201038385 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種附有表面形狀之光學零件之製造方法 .以及附有表面形狀之光學零件之製造裝置。 【先前技術】 ^ 自行動電話等小型液晶顯示器至個人電腦及電視機等大 •型液晶顯示器中’為了使背光單元之光源(例如螢光管或 者LED(Light E㈣ing Diode，發光二極體））的光自側面射 人並將其導入至畫面上（進行面發光），而冑泛地使用導光 可對導光板賦予被稱作光學圖案之表面形狀，藉由該表 面形狀反射來自晝面側面之透射光，而使其於晝面上：先: (專利文獻1及2)。隨著市場上之液晶顯示器 要求導光板薄型化。 寻U匕亦 導光板等附有表面形狀之光學零件係藉由將表面形狀轉 印於光學零件用基板（例如聚碳酸醋導光板、擴散板等）上 而製造。作為對光學零件進行表面形狀轉印之方法，業界 正對例如射出成形方法、利用真空裝置之方法等 (專利文獻3〜9)。 九 、如上所述，業界要求導光板薄壁化，但例如於藉由射出 成形來製造时表㈣狀之光學零件之情料，存在藉由 射出成形無法高效率且高精度地使附有表面形狀之光㈣ 件之表面形狀成形的問題。具體而言，由於氣泡殘留於模 具與基板之間，以及因樹脂不能流入至模具端部，故轉印 146546.doc 201038385 率之不均變大因而良率變差等原因，導致難以實現薄壁 以及連續運轉。 又，於利用真空裝置來製造附有表面形狀之光學零件之 情形時，存在於基板上轉印表面形狀之表面形狀心模= 厚，進行真空、熱成形及冷卻之所有步驟時均加熱、冷卻 效率欠佳，且花費時間，故而製造效率較差的問題。7 17 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2〇〇6_156368號公報 [專利文獻2]日本專利特開平8_17913〇號公報 [專利文獻3]日本專利特開2〇〇8_23841號公報 [專利文獻4]日本專利特開2〇〇8_23876號公報 [專利文獻5]日本專利特開2〇〇8_2392〇號公報 [專利文獻6]曰本專利特開2006475617號公報 [專利文獻7]日本專利特開平8_169〇5〇號公報 [專利文獻8]日本專利特開2006-159643號公報 [專利文獻9]日本專利特開2〇07_913〇6號公報 【發明内容】 本發明之目的在於提供一種可高效率且高精度地對光學 零件用基板進行表面形狀成形的附有表面形狀之光學零件 之製造方法。 本發明之目的在於提供一種可高效率且高精度地對光學 零件用基板進行表面形狀成形的附有表面形狀之光學零件 之製造裝置。 146546.doc 201038385 根據本發明’提供以下之附有表面形狀之光學零件之贺 造方法等。 1 · 一種附有表面形狀之光學零件之製造方法，其係包括 如下步驟： 利用失持面之至少一面具有表面形狀賦予模的一對可挣 性片材來夾持基板； 使上述一對可撓性片材間形成真空，對上述—對可挽性 Ο Ο 片材之夹持面加熱、加壓，於上述基板之至少—面上形成 表面形狀圖案；及 將上述一對可撓性片材之夾持面冷卻，而將形成有上述 表面形狀圖案之上述基板固化。 ^ 2·如1之附有表面形狀之光學零件之製造方法，其中將上 述可撓性片材之失持面加熱至9〇〜26〇。〇。 3. 如1或2之附有表面形狀之光學零件之製造方法，其中 將上述可撓性片材之夾持面冷卻至5〜1 〇〇。(：。 4. 如1至3中任一項之附有表面形狀之光學零件之製造方 法，其中將上述可撓性片材之夾持面加 ^ kgf/em2。 主 U.5〜5〇 5. -種附有表面形狀之光學零件之製造裝置，其包括. 基板夾持機構，其於夾持基板之夹持㈣至少且 表面形狀賦予模； /、有 加熱、加壓機構’其對上述基板加熱、域而於 至少一面上形成表面形狀圖案；及 、土 冷卻機構，其將上述基板冷卻而將形成有上述表面形狀 146546.doc 201038385 圖案之上述基板固化。 根據本發明，可提供— 件用基板進行表面形狀成效率且高精度地對光學零 製造方法。 ^附有表面形狀之光學零件之 件1 月可提供—種可高效率且高精度地對光學变 制 進行表面形狀成形的附有表面形狀之光學零件之 製造裝置。 干令旰之 【實施方式】 下牛：月=附有表面形狀之光學零件之製造方法係包括如 利用夹持面之至少一面具有表面形狀賦予模的— 2可撓：片材來爽持基板；使一對可撓性片材間形成為真 至小對_可撓性片材之失持面加熱、加壓，而於基板之 2少-面上形成表面形狀圖t;及將—對可撓性片材之失 面冷。I7，⑥將形成有表面形狀圖案之基板固化。 ^發明之附有表面形狀之光學零件之製造方法，因係於 於基板與表面形狀賦予模之間的空氣去除的狀態下轉 、p表面形狀（表面形狀成形），因此可抑制轉印後產生氣 泡，由於使用具有表面形狀賦予模之可撓性片材，因 匕可提呵表面形狀賦予模與基板之密接性，且可提昇對基 板^轉印精度。進而，本發明可連續形成附有表面形狀之 “车芩件因此與批次式之成形相比，可高效率地製造附 有表面形狀之光學零件。 作為製造附有表面形狀之光學零件所使用之基板的材 ' 了列舉.聚碳酸酯（PC，polycarbonate)、聚對苯二甲 I46546.d〇c 201038385 酸乙二酉旨fPFT , ’ polyethylene terephthalate)、環狀聚稀 烴、丙烯酸、聚笨乙烯（ps，p〇lystyrene)等。 / 較好的是0.1〜3.0 上述基板之厚度通常為0.05〜6.0 mn] mm . 丨片材以熱導率較高之金屬（例如鋁、銅、黃鋼 • 之片材為宜。 j撓性片材之厚度較好的是G.5〜3 mm。藉由使用如此之 〇 ㈣之可撓性片材，可提高加熱及冷卻速度，可大幅度地 縮短週期時間。 +對可撓性片材於夾持面之至少一面具有表面形狀賊予 模。 作為由表㈣狀賦予模所形成之表面形狀圖案，例如當 光學零件為擴散板時，只要為如下之形狀則並無特別限 定，即藉由將該形狀之該圖案轉印至基板表面，可使來自 :源之入射光聚光及/或擴散，&而可提昇亮度以及減少 ❹力度不均。又’例如當光學零件為導光板時，只要為如下 之形狀則並無特別限定，即藉由將該形狀之該圖案轉印至 表面可使來自光源之入射光反射、射出等，從而可 提昇亮度以及減少亮度不均。再者，光學零件並不限定於 擴散板以及導光板。 作為上述表面形狀圖案，可列舉：具有直線、三角錐、 四㈣等形狀之稜鏡，菲淫耳透鏡，扁豆狀透鏡，半球狀 點專形狀。 藉由將表面形狀賦予槿祚岌+ π T祺作為夾持面的一對可撓性片材夾 I46546.doc 201038385 持基板之後，使一對可撓性片材間形成為真空 是-50至-loo 上述真空度通常為_30至_100 kPa，較好的 kPa。 使一對可撓性片材間形成為真空之後，對材加 熱、加壓從而於基板之至少—面上形成表面形狀圖案。 加熱溫度通常為90〜26(rc。於基板為例如聚碳酸醋製片 材之情形時，加熱溫度較好的是160〜23〇。〇。 加疋壓力通常為〇.5〜50 kgf/cm2。於美;v , t制 、土板為例如聚碳酸 酯製片材之情形時，加壓壓力較好的是1〇〜4〇kg^m2。 加熱、加壓處理時間通常為卜6〇秒，較好的是二卜 Μ表面形_案之後’對—對可撓性片材進行冷卻從 而將形成有上述表面形狀圖案之基板固化，然後自可換性 片材中剝離附有表面形狀之基板（附有表面形狀之光學零 件）。 7 作為冷卻溫度，通常為5〜崎，較好的是i㈣。C。 又，作為冷卻處理時間，通常〜6()秒，較好的是Μ 秒。 以上’對加熱溫度，加壓壓力，加熱、加壓處理時間， 冷部溫度以及冷卻處理時間進行了說明，但並不限定於上 Γ可根據用作基板之樹脂之軟化溫度以及熔解溫度而適 當選擇。 < 本發明之附有表面形狀之光學零件的製造方法例如可藉 罢由使用圖1〜圖3所示的附有表面形狀之光學零件之製造裝 置而實施。 146546.doc 201038385 圖1係本發明之附有表面形狀之光學零件之製造裝置之 一實施形態的概略俯視圖，圖2係本發明之附有表面形狀 之光學零件之製造裝置之一實施形態的概略側視圖，圖3 係本發明之附有表面形狀之光學零件之製造裝置之一實施 形態的概略前視圖。 圖1〜圖3之附有表面形狀之光學零件之製造裝置丨係旋轉 <真空轉印裝置，其於同—平面上包括：片材供給滑動單 〇 7020 ’其供給基板10 ;腔室30 ’其包含夾持基板10之可撓 性片材（基板夾持機構）；加熱加壓機構4〇(加熱機構），其 進行加熱而貝鈿表面形狀轉印；冷卻加壓機構5〇(冷卻機 構）’其將腔室30與經表面形狀轉印之基板冷卻固化，以 使自腔至30中剝離基板1〇變得容易；以及片材取出滑動單 元60 ’其取出經表面形狀轉印之基板。 片材供給滑動單元20、加熱加壓機構4〇、冷卻加壓機構 5〇及片材取出滑動單元6G係按該順序而配置在以間歇旋轉 ¢) 之腔至3 0之旋轉軸為中心的同心圓上。 自片材供給滑動單元20供給基板1〇，並將其填充至腔室 3〇内。填充有基板10之腔室3〇以伺服馬達等作為驅動源並 以方疋轉軸為中〜進行旋轉，旋轉至加熱加塵機構為止。 腔至3 0於旋轉至加熱加壓機構4〇為止之期間關閉蓋子， 藉由真空閥開始抽真空，使腔室3〇内形成為真空。 圖4係移動至加熱加壓機構4〇之填充有基板1〇之腔室3〇 的概略剖面圖。 基板10係由-對可撓性片材34(基板夹持機構）以表面形 146546.doc 201038385 狀賦予模32作為夾持面而夹持著。腔室⑽μ” _ 而形成真空區域38。 < 移動至加熱加壓機構40之基板10, ϋ由以液麼叙44(或 者氣缸）作為驅動源之加壓機，而與配置於可撓性片材34 之夾持面之表面形狀賦予模32壓接。加壓機藉由與可繞性 片材34之壓接面上所配備之加熱板42，而透過一對可祕 片材34之爽持面對表面形狀賦予模32進行加熱及加壓，從 而將表面形狀賦予模32之表面形狀圖案轉印至基板10之兩 面。 表面形狀圖案轉印後，織3G進—步旋轉，移動至 加麼機構M)為止。冷卻加覆機構观具備冷卻板代替㈣ 板42以外，與加熱加塵機構4〇相同。藉由冷卻板將轉印有 :=案之基板™ ’並將其自表面形狀賦予 再者，冷卻加壓機構50亦可為氣缸等。 後，腔室30進一步旋轉，移動至片材取出 =止。腔室30於移動至片材取出滑動單元6q為止之 '•、°束抽真空，且將其蓋子打開。 /曰 將轉印有表面形狀圖案之基板1〇 中搬出，脒〜m竹取出滑動早元60 為止。a進-步旋轉，移動至片材供給滑動單元20 2表面形狀之光學零件之製造裝置】藉由反 連串之動作’而連續地製造轉印有” 1〇(附有表面形狀之光學零件）。 4圖木之基板 】46546.doc .10· 201038385 本貫施形態中，一對可撓性片材34係於夹持面 之兩面均具有表面形狀賦予模以，於基板之兩面 形狀圖案，但並不限定於此。於本發明中，—时面 材只要於其夾持面之任一 ' 撓性片 具有表面形狀賦予模即可，亦 °製造僅於一面轉印有表面形狀圖案之基板。 ’、 [實施例] 以下’基於本發明之實施例進行詳細說明，但本發明只 要不超越其主旨則並不限定於以下之實施例。 八 實施例1〜2 7 使用圖1所示之光學零件製造裝置丨，以表丨所示 狀態：加㈣力、加熱溫度及加熱時間來製造附有表㈣ ::光學零件用基板。再者，於實施例㈣中，可撓性片 Η鋼製）之厚度為！ _，且係於〇3 _厚之聚碳酸醋製 土反㈤咖㈣㈤以股份有限公司製造）上形成表面形狀 Ο ^將冷卻溫度設定為20t。又，對製造時表面形狀賦 于模與基板之間有無氣泡進行確認。 對所製造之實施例！〜2 7的附有表面形狀之光學零件用基 板之轉印率進行評價。將結果示於表丄。 上述轉印率係根據以下之式’由圖5所示之實際轉印範 圍及表面形狀轉印區域而計算出。 輅f7率[/〇] = (貫際轉印範圍/表面形狀轉印區域）χΐ〇〇 ^者所明「表面形狀轉印區域」，係指表面形狀賦予 模所且亡 :之表面形狀圖案之面積，所謂「實際轉印區 域」，係指由表面形狀賦予模所賦予的附有表面形狀之光 146546.doc 201038385 學零件所具有之表面形狀圖案的面積。 [表1] 加熱溫度 rc] 真空狀態 [kPa] 加壓壓力 [kgf/cm2] 加熱時間 [sec] 轉印率 [%] 氣泡 實施例1 160 -90 40 60 100 無 實施例2 170 -90 40 30 100 無 實施例3 180 -90 20 5 50> 實施例4 180 -90 20 10 70> 無 實施例5 180 -90 40 5 70> 無 實施例6 180 -90 40 15 100 無 實施例7 190 -90 20 5 70> 無 實施例8 190 -90 20 10 90> 無 實施例9 190 -90 40 5 90> 無 實施例10 190 -90 40 10 100 無 實施例11 200 -90 20 5 90> 無 實施例12 200 -90 20 10 90< 無 實施例13 200 -90 40 5 90> 無 實施例14 200 -90 40 10 100 無 實施例15 210 -90 20 5 90< 無 實施例16 210 -90 20 10 100 無 實施例17 210 -90 40 5 90< 無 實施例18 210 -90 40 10 100 無 實施例19 220 -90 20 5 90< 無 實施例20 220 -90 20 10 100 無 實施例21 220 -90 40 5 100 無 實施例22 220 -90 40 10 100 實施例23 230 -90 10 10 100 無 實施例24 230 -90 20 5 100 無 實施例25 230 -90 20 10 100 益 /»»» 實施例26 230 -90 40 5 100 無 實施例27 230 -90 40 10 100 無 以上對本發明之幾種實施形態及/或實施例進行了詳細 說明，但業者可容易地於實際上不脫離本發明之新穎示教 及效果之前提下，對該等例示之實施形態及/或實施例施 以多種變更。因此，該等多種變更包含於本發明之範圍 内0 146546.doc -12· 201038385 本說明書中所記载之文獻之内容全部引用於此。 【圖式簡單說明】 圖1係本發明之附有表面形狀之光學零件之製造裝置之 一實施形態的概略俯視圖； 圖2係本發明之附有表面形狀之光學零件之製造裝置之 一實施形態的概略側視圖； 圖3係本發明之附有表面形狀之光學零件之製造裝置之 一實施形態的概略前視圖； 圖4係移動至加熱加壓機構之填充有基板之腔室的概略 剖面圖；及 圖5係表示表面形狀賦予模之表面形狀賦予區域以及附 有表面形狀之光學零件之實際轉印範圍的圖。 【主要元件符號說明】 1 附有表面形狀之光學零件之製造裝置 10 基板 20 片材供給滑動單元 30 腔室 32 表面形狀賦予模 34 可撓性片材 36 0型環 38 真空區域 40 加熱加壓機構 42 加熱板 44 液壓缸 146546.doc 201038385 50 冷卻加壓機構 60 片材取出滑動單元 146546.doc -14-201038385 VI. Description of the Invention: [Technical Field] The present invention relates to a method of manufacturing an optical component having a surface shape, and a manufacturing apparatus of an optical component having a surface shape. [Prior Art] ^ From small liquid crystal displays such as mobile phones to large LCD monitors such as personal computers and televisions, 'for light source of backlight unit (such as fluorescent tube or LED (Light E (four) ing Diode, light-emitting diode)) The light is incident from the side and is introduced onto the screen (for surface illumination), and the light guide is widely used to impart a surface shape called an optical pattern to the light guide plate, and the surface shape is reflected from the side of the surface. The light is transmitted to the surface of the crucible: first: (Patent Documents 1 and 2). As the liquid crystal display on the market requires a thinner light guide plate. An optical component having a surface shape such as a light guide plate or the like is manufactured by transferring a surface shape onto a substrate for an optical component (for example, a polycarbonate light guide plate, a diffusion plate, or the like). As a method of transferring the surface shape of the optical component, for example, a method of injection molding, a method using a vacuum device, and the like are known (Patent Documents 3 to 9). IX. As mentioned above, the industry requires that the light guide plate be thinned. However, for example, when the optical component of the watch type (four) is manufactured by injection molding, there is a possibility that the surface is attached with high efficiency and high precision by injection molding. The shape of the light (4) The problem of the shape of the surface of the piece. Specifically, since the air bubbles remain between the mold and the substrate, and the resin cannot flow into the end of the mold, the unevenness of the transfer rate of 146546.doc 201038385 becomes large, and the yield is deteriorated, which makes it difficult to achieve thin wall. And continuous operation. Further, when a vacuum device is used to manufacture an optical component having a surface shape, the surface shape of the transfer surface shape on the substrate is thicker than the thickness, and is heated and cooled in all steps of vacuum, thermoforming, and cooling. The problem is that the efficiency is poor and it takes time, so the manufacturing efficiency is poor. [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 4] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. 2006-159643 (Patent Document No. JP-A-2006-159643) It is an object of the invention to provide a method for producing an optical component with a surface shape which can form a surface shape of a substrate for an optical component with high efficiency and high precision. It is an object of the present invention to provide an apparatus for manufacturing an optical component having a surface shape which can be formed into a surface shape of an optical component substrate with high efficiency and high precision. 146546.doc 201038385 According to the present invention, the following method and the like for attaching an optical component having a surface shape are provided. 1 . A method of manufacturing an optical component with a surface shape, comprising the steps of: clamping a substrate by using a pair of earnable sheets having a surface shape imparting a mold on at least one side of the missing surface; Forming a vacuum between the flexible sheets, heating and pressing the clamping surface of the above-mentioned pullable sheet, forming a surface shape pattern on at least the surface of the substrate; and forming the pair of flexible sheets The clamping surface of the material is cooled, and the substrate on which the surface shape pattern is formed is cured. A method of manufacturing an optical component having a surface shape as described in 1, wherein the missing surface of the flexible sheet is heated to 9 〇 to 26 〇. Hey. 3. The method of producing an optical component having a surface shape according to 1 or 2, wherein the clamping surface of the flexible sheet is cooled to 5 to 1 Torr. (4) The method for producing an optical component having a surface shape according to any one of 1 to 3, wherein the clamping surface of the flexible sheet is added by ^kgf/em2. Main U.5~5〇 5. A manufacturing apparatus for attaching an optical component having a surface shape, comprising: a substrate clamping mechanism that clamps at a clamping substrate (4) at least and has a surface shape imparting a mold; /, having a heating and pressurizing mechanism The substrate is heated to form a surface shape pattern on at least one surface; and a soil cooling mechanism that cools the substrate to cure the substrate on which the surface shape 146546.doc 201038385 is formed. According to the present invention, The surface of the substrate is made into an optical zero manufacturing method with high efficiency and high precision. ^The optical component with the surface shape is available in January to provide surface shape shaping for optical deformation with high efficiency and high precision. Manufacturing device for optical parts with surface shape. [Embodiment] Under the cow: Month = manufacturing method of optical parts with surface shape includes at least one mask using a clamping surface Having a surface shape imparting to the mold - 2 flexible: the sheet is used to hold the substrate; forming a pair of flexible sheets to form a true to a small pair of _ flexible sheet material is heated and pressurized, and The surface shape map t is formed on the surface of the substrate 2; and the surface of the flexible sheet is cooled. I7, 6 solidifies the substrate on which the surface shape pattern is formed. ^Invented optical part with surface shape Since the manufacturing method is performed in a state in which the air between the substrate and the surface shape is given to the mold is removed, and the p surface shape (surface shape is formed), it is possible to suppress generation of bubbles after the transfer, and to use the surface shape to impart a mold. The flexible sheet material can impart the adhesion between the mold and the substrate because of the surface shape, and can improve the transfer precision of the substrate. Further, the present invention can continuously form the "rutting member with the surface shape and thus the batch. Compared with the molding of the secondary type, the optical component with the surface shape can be efficiently manufactured. As a material for manufacturing the substrate for the optical component with the surface shape, a polycarbonate (PC, polycarbonate), a poly pair is listed. Benzoic acid I46546.d c 201038385 acid bismuth fPFT, 'polyethylene terephthalate', cyclic polythene, acrylic acid, polystyrene (ps, p〇lystyrene), etc. / preferably 0.1 to 3.0 The thickness of the above substrate is usually 0.05~ 6.0 mn] mm . The sheet material is made of a metal with a high thermal conductivity (for example, aluminum, copper, and yellow steel). The thickness of the flexible sheet is preferably G.5~3 mm. By using the flexible sheet of the above (4), the heating and cooling rates can be increased, and the cycle time can be greatly shortened. + The flexible sheet has a surface shape thief pre-die on at least one side of the clamping surface. The surface shape pattern formed by the mold in the form of a table (four), for example, when the optical member is a diffusion plate, is not particularly limited as long as it has the following shape, that is, by transferring the pattern to the surface of the substrate. Concentrating and/or diffusing the incident light from the source, and increasing the brightness and reducing the unevenness of the enthalpy. Further, for example, when the optical component is a light guide plate, the shape is not particularly limited as long as the pattern is transferred to the surface, and the incident light from the light source can be reflected and emitted, thereby improving Brightness and uneven brightness reduction. Further, the optical component is not limited to the diffusion plate and the light guide plate. Examples of the surface shape pattern include a crucible having a shape such as a straight line, a triangular pyramid, and a four (four) shape, a phenanthrene lens, a lentil lens, and a hemispherical point shape. By holding the surface of the pair of flexible sheet clips with the surface shape given 槿祚岌+ π T祺 as the gripping surface, I46546.doc 201038385, after holding the substrate, the vacuum between the pair of flexible sheets is formed to be -50 to -loo The above vacuum is usually _30 to _100 kPa, preferably kPa. After forming a vacuum between the pair of flexible sheets, the material is heated and pressurized to form a surface shape pattern on at least the surface of the substrate. The heating temperature is usually 90 to 26 (rc. When the substrate is, for example, a sheet made of polycarbonate, the heating temperature is preferably 160 to 23 Torr. The twisting pressure is usually 〇5 to 50 kgf/cm2. When the v, t system and the soil plate are, for example, polycarbonate sheets, the pressing pressure is preferably 1 〇 to 4 〇 kg ^ m 2 . The heating and pressing treatment time is usually 〇 6 〇 Second, it is preferable that the surface of the second dice is formed after the case, and the flexible sheet is cooled to solidify the substrate on which the surface shape pattern is formed, and then peeled off from the exchangeable sheet to have a surface shape. Substrate (optical part with surface shape) 7 As the cooling temperature, it is usually 5 to S, preferably i (four) C. Also, as the cooling treatment time, usually ~6 () seconds, preferably Μ The above 'described heating temperature, pressurization pressure, heating, pressurization treatment time, cold portion temperature and cooling treatment time are described, but it is not limited to the upper crucible according to the softening temperature and melting temperature of the resin used as the substrate. And appropriately selected. < Light of the surface shape of the present invention The manufacturing method of the component can be carried out, for example, by using a manufacturing apparatus with an optical component having a surface shape as shown in Fig. 1 to Fig. 3. 146546.doc 201038385 Fig. 1 is a manufacturing of an optical component with a surface shape of the present invention. FIG. 2 is a schematic side view showing an embodiment of an apparatus for manufacturing an optical component having a surface shape according to the present invention, and FIG. 3 is a manufacturing apparatus for an optical component having a surface shape according to the present invention. A schematic front view of an embodiment of the present invention. The manufacturing apparatus of the optical component having the surface shape shown in Figs. 1 to 3 is a rotary rotary vacuum transfer device comprising: a sheet supply slide unit 7020 on the same plane 'The supply substrate 10; the chamber 30' includes a flexible sheet (substrate clamping mechanism) that sandwiches the substrate 10; a heating and pressurizing mechanism 4 (heating mechanism) that heats and transfers the surface shape of the shellfish a cooling pressurizing mechanism 5 (cooling mechanism) which cools and solidifies the chamber 30 and the surface-transformed substrate to facilitate the peeling of the substrate 1 from the cavity to 30; and the sheet is taken out The moving unit 60' takes out the substrate transferred by the surface shape. The sheet supply sliding unit 20, the heating and pressurizing mechanism 4, the cooling and pressing mechanism 5, and the sheet take-up sliding unit 6G are arranged in this order in an intermittent manner. Rotate the cavity of the ¢) to the concentric circle centered on the axis of rotation of 30. The substrate 1 is supplied from the sheet supply sliding unit 20 and filled into the chamber 3A. The chamber 3 filled with the substrate 10 is driven by a servo motor or the like and rotated in the square to the center, and rotated to the heating and dusting mechanism. The chamber is closed to 30° during the rotation to the heating and pressurizing mechanism 4〇, and the vacuum is started by the vacuum valve to form a vacuum in the chamber 3〇. Fig. 4 is a schematic cross-sectional view of the chamber 3〇 which is moved to the heating and pressurizing mechanism 4〇 filled with the substrate 1〇. The substrate 10 is sandwiched by a pair of flexible sheets 34 (substrate holding mechanisms) having a surface shape of 146546.doc 201038385 as a clamping surface. The chamber (10) μ" _ is formed into a vacuum region 38. < Moving to the substrate 10 of the heating and pressurizing mechanism 40, and using a press machine having a liquid source 44 (or a cylinder) as a driving source, and being disposed in the flexible portion The surface shape of the gripping surface of the sheet 34 is crimped to the mold 32. The press machine is passed through a pair of the secretable sheets 34 by the heating plate 42 provided on the crimping surface of the recyclable sheet 34. The surface shape is given to the mold 32 to be heated and pressurized, so that the surface shape pattern of the surface shape imparting mold 32 is transferred to both sides of the substrate 10. After the surface shape pattern is transferred, the woven 3G is rotated in a stepwise manner and moved to In addition to the mechanism M), the cooling and covering mechanism is provided with a cooling plate instead of the (four) plate 42, and is the same as the heating and dusting mechanism 4〇. By the cooling plate, the substrate TM of the case is transferred and is self-surfaced. Further, the shape of the cooling and pressurizing mechanism 50 may be a cylinder or the like. Thereafter, the chamber 30 is further rotated to move to the sheet take-out = stop. The chamber 30 is moved to the sheet take-out sliding unit 6q. The beam is evacuated and its lid is opened. /曰 will be transferred with a surface shape map The substrate of the case is unloaded, and the 脒~m bamboo is taken out and slid as early as 60. The a-step rotation is performed to move the sheet to the optical element manufacturing device of the surface shape of the sliding unit 20 2 by the action of the reverse series 'And the transfer is made continuously" 1" (optical part with surface shape). 4: The substrate of the wood] 46546.doc .10· 201038385 In the present embodiment, the pair of flexible sheets 34 have a surface shape imparting a mold on both surfaces of the clamping surface, and are patterned on both sides of the substrate, but It is not limited to this. In the present invention, it is sufficient that any of the "flexible sheets" having a surface shape is provided to the mold, and a substrate having a surface shape pattern transferred only on one side is produced. The following embodiments are described in detail based on the embodiments of the present invention, but the present invention is not limited to the following examples without departing from the spirit thereof. Eight Embodiments 1 to 2 7 Using the optical component manufacturing apparatus shown in Fig. 1, the substrate (see Table 4) and the substrate for optical parts were produced in the state shown in Table :: (4) force, heating temperature, and heating time. Furthermore, in the embodiment (4), the thickness of the flexible sheet steel is made! _, and is based on 〇3 _ thick polycarbonate 土 土 ( (5) coffee (four) (five) made by the company made of surface shape Ο ^ set the cooling temperature to 20t. Further, the surface shape at the time of production was confirmed by the presence or absence of bubbles between the mold and the substrate. For the manufactured examples! The transfer ratio of the substrate for the optical component with the surface shape of ~27 was evaluated. The results are shown in the table. The above transfer rate was calculated from the actual transfer range and the surface shape transfer area shown in Fig. 5 according to the following formula.辂f7 rate [/〇] = (inter-transfer range/surface shape transfer area) 「^ The "surface shape transfer area" means the surface shape is given to the mold and the surface shape pattern of death: The area of the "actual transfer area" refers to the area of the surface shape pattern of the surface 146546.doc 201038385 which is given by the surface shape imparting the mold. [Table 1] Heating temperature rc] Vacuum state [kPa] Pressurization pressure [kgf/cm2] Heating time [sec] Transfer rate [%] Bubble Example 1 160 - 90 40 60 100 No Example 2 170 - 90 40 30 100 No Example 3 180 - 90 20 5 50 > Example 4 180 - 90 20 10 70 > None Example 5 180 - 90 40 5 70 > None Example 6 180 - 90 40 15 100 No Example 7 190 - 90 20 5 70> None Example 8 190 - 90 20 10 90> None Example 9 190 - 90 40 5 90> None Example 10 190 - 90 40 10 100 No Example 11 200 - 90 20 5 90 > No implementation Example 12 200 - 90 20 10 90 <Example No. 13 200 - 90 40 5 90> None Example 14 200 - 90 40 10 100 No Example 15 210 - 90 20 5 90 < None Example 16 210 - 90 20 10 100 No Example 17 210 - 90 40 5 90 <Example No. 18 210 - 90 40 10 100 No Example 19 220 - 90 20 5 90 < Example 20 220 - 90 20 10 100 No Example 21 220 - 90 40 5 100 None Example 22 220 - 90 40 10 100 Example 23 230 - 90 10 10 100 No Example 24 230 - 90 20 5 100 No Example 25 230 - 90 20 10 100 Benefit /»»» Embodiment 26 230 - 90 40 5 100 No embodiment 27 230 - 90 40 10 100 None of the above embodiments and/or embodiments of the present invention have been described in detail, but the practitioner can easily without departing from the invention. Various modifications and improvements are possible in the embodiments and/or embodiments described hereinabove. Therefore, the various changes are included in the scope of the present invention. 0 146546.doc -12· 201038385 The contents of the documents described in the present specification are all incorporated herein by reference. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic plan view showing an embodiment of a manufacturing apparatus for an optical component having a surface shape according to the present invention; FIG. 2 is an embodiment of a manufacturing apparatus for an optical component having a surface shape according to the present invention; FIG. 3 is a schematic front view showing an embodiment of a manufacturing apparatus for an optical component having a surface shape according to the present invention; FIG. 4 is a schematic cross-sectional view showing a chamber filled with a substrate which is moved to a heating and pressurizing mechanism. And FIG. 5 is a view showing the surface transfer shape of the surface shape imparting region of the mold and the actual transfer range of the optical component to which the surface shape is attached. [Description of main component symbols] 1 Manufacturing apparatus 10 for optical parts with surface shape 10 Substrate 20 Sheet feeding slide unit 30 Chamber 32 Surface shape imparting mold 34 Flexible sheet 36 0-ring 38 Vacuum area 40 Heating and pressurizing Mechanism 42 Heating plate 44 Hydraulic cylinder 146546.doc 201038385 50 Cooling pressurizing mechanism 60 Sheet take-out sliding unit 146546.doc -14-