201033580 六、發明說明： 【發明所屬之技術領域】 本發明係有關於表面粗糙度量測’特別是關於以電荷耦合元 件(CCD)量測表面粗糙度之方法與裝置。 ° 【先前技術】 按’在傳統的探針式表面粗縫度量測系統，因與工件表面直 接接觸，會造成工件表面的損傷，因此表面粗糙度的量測已朝非 接觸式的型態發展。非接觸式之量測不僅使用方便且其設備價格 較低廉。 參 表面粗糙度在不同場合有不同程度的需求。對於光學元件來 忒’其表面平整度要求甚高，若採用一般機械接觸式的量測方法， 例如比較量測法、探針式量測儀、電容測定法、放射性同位素量 測法等來量測光學元件之表面粗糙度，不但無法達到量測標準， 還^對光學元件產生表面或輪廓破壞；所以，具有高精密度、非 破壞性之光學非接觸量測方法，便成為較佳的選擇。習知之光學 非接觸量财法有絲切斷法、光線反射法、光波干涉法及 取樣法等。習知該等光學非接觸量測方法，其檢測原理大致如下. 參以入射光照射受測表面；以感測器或CCD摘取該受測表面影像或 該受測表面之放大影像；及依該受測表面影像作波峰、波谷演算 或依該受測表面之放大影像作判別而估算出表面粗糙度。然<而， 該ί習知光學非接觸量測方法具有以下缺點：-、其必須建構複雜 的數學式以求出表面粗縫度；二、其所需之量測架構較為複雜。 …因此’亟需提供—低成本、架構鮮之解決方案，其可在低 計算複雜度下’有鱗地制制轉之絲錄度。、' ^鑒於此’本㈣提卿的制方案以量測制工 =表，粗糙度，該方案具精_制架構，只須依制工件反 射，之党度灰階值及一具低複雜度之計算過程即可測得待測工件 201033580 【發明内容】 、本發明之一目的在於提供一低成本之CCD量測表面粗縫度之 方法’用以依待測工件反射光之亮度灰階值及具低複雜度之計算 過程以測得待測工件之表面粗糙度。 本發明之另一目的在於提供一低成本之CCD量測表面粗糙度 =裝置’ 以依細卫件反射光之亮歧階值及具低複雜度之計 鼻過程以測得待測工件之表面粗糙度。 本發明又一目的在於提供一低成本之CCD量測表面粗糙度之 方案，其可線上量測待測工件之表面粗糙度。 ，為達成本發明上述諸目的，一 CCD量測表面粗缝度之方法乃 被提出’該方法包含町步氣施加—人㈣射光至—待測工件201033580 VI. Description of the Invention: [Technical Field] The present invention relates to surface roughness measurement, particularly to a method and apparatus for measuring surface roughness by a charge coupled device (CCD). ° [Prior Art] According to the traditional probe surface rough measurement system, the surface of the workpiece will be damaged due to direct contact with the surface of the workpiece, so the measurement of the surface roughness has been toward the non-contact type. development of. Non-contact measurement is not only easy to use but also inexpensive. The surface roughness has different levels of demand in different occasions. For optical components, the surface flatness is very high. If general mechanical contact measurement methods are used, such as comparative measurement, probe measurement, capacitance measurement, and radioisotope measurement. The surface roughness of the optical measuring element not only fails to meet the measurement standard, but also causes surface or contour damage to the optical element; therefore, a high-precision, non-destructive optical non-contact measurement method becomes a better choice. . The opticals of the conventional non-contact quantity method include a wire cutting method, a light reflection method, a light wave interference method, and a sampling method. Conventionally, the optical non-contact measurement method has the following detection principle: the incident light is irradiated onto the surface to be tested; the image of the surface to be tested or the enlarged image of the surface to be tested is extracted by a sensor or a CCD; The measured surface image is used as a peak, a valley calculation or a surface roughness based on the enlarged image of the surface to be measured. However, the optical non-contact measurement method has the following disadvantages: - it must construct a complex mathematical formula to find the surface roughness; second, the required measurement architecture is more complicated. ...therefore, there is a need for a low-cost, well-structured solution that can be scaled to a low degree of computational complexity. , '^ In view of this' (4) Timing's system to measure the workmanship = table, roughness, the program has a fine structure, only need to rely on the workpiece reflection, the party gray scale value and a low complexity The calculation process of the degree can be used to measure the workpiece to be tested 201033580. [Invention] The object of the present invention is to provide a low-cost CCD measuring method for the rough surface of the surface. The value and the calculation process with low complexity to measure the surface roughness of the workpiece to be tested. Another object of the present invention is to provide a low-cost CCD measuring surface roughness=device' to measure the surface of the workpiece to be tested according to the brightness of the light reflected by the fine guard and the low complexity. Roughness. Still another object of the present invention is to provide a low cost CCD measuring surface roughness which can measure the surface roughness of a workpiece to be tested on line. In order to achieve the above objects of the present invention, a method of measuring the rough surface of a CCD is proposed. The method includes the application of the tempo gas - the person (four) illuminates the workpiece to be tested.
以產生一反射光；以一 CCD檢光感測器接收該反射光，其中該CCD ，光感測H具有複數個像素單元以產生對應於該反射光之複數個 凴度灰階值；對該等亮度灰階值施行一最大值計算以產生一最大 灰階值；對該等亮度灰階值施行一平均值計算以產生一平均灰階 值；對該最大灰階值施行一第一粗糙度計算以產生一第一粗糙 度；及對該平均灰階值施行一第二粗糙度計算以產生一第二粗糙 度。 為達成上述諸目的，本發明進一步提出一 CCD量測表面粗糙 度之裝置，其具有··一雷射光源裝置，用以產生一入射雷射光； 待測工件，用以依該入射雷射光產生一反射光；一 c⑶檢光感 測器，其具有複數個像素單元以產生對應於該反射光之複數個亮 度灰階·及一灰階值處理器，用以對該等亮度灰階值施行一最 大，計算以產生一最大灰階值，對該等亮度灰階值施行一平均值 =算以產生一平均灰階值，對該最大灰階值施行一第一粗糙度計 算以產生一第一粗糙度，及對該平均灰階值施行一第二粗糙度計 算以產生一第二粗链度。 為使貴審查委員能進一步瞭解本發明之結構、特徵及其目 201033580 的，茲附以圖式及較佳具體實施例之詳細說明如后。 【實施方式】 請參照圖1’其繪示本發明CCD量測表面粗糙度之方法其一實 施例之流程圖。如圖1所示，該實施例包含:施加一入射雷射光至 一待測工件（步驟a);以CCD接收該待測工件之反射光（步驟匕）； 計算最大灰階值及平均灰階值（步驟c);及依該最大灰階值、平均 灰階值求得表面粗糙度之對應值（步驟d)。 在步驟a中，該入射雷射光可為紅光或藍光或綠光，不同之 色光波長可決定不同的表面粗糙度量測範圍，而該待測工件可為 © 無電解鎳或銅或銘或鋼等反射率良好之材質。 在步驟b中，該CCD具有複數個像素單元，例如2〇〇個水平 排列之像素單元，以產生對應於該反射光之2〇〇個亮度灰階值。 請參照圖3，其繪示該200個水平排列之像素單元之一灰階值分 佈。如圖3所示，該灰階值分佈在像素位置約1〇〇處有一最大灰 階值52。該灰階值分佈之集中度與待測工件之表面粗糙度有關， 待測工件之表面愈光滑，其灰階值分佈之集中度愈高；待測工件 之表面愈粗糙，其灰階值分佈愈平坦。 、在步驟c中，本實施例對該等亮度灰階值施行一最大值計算 以產生該灰階值分佈之最大灰階值，及對該等亮度灰階值施行一 平均值計算以產生該灰階值分佈之平均灰階值。 μ、在步驟d中，本實施例對該最大灰階值施行一第一粗糙度計 ^以產生-第—姉：度’及對該平均灰階值施行—第二粗縫度計 算以產生-第二粗輪度，其中該第一粗糙度計算係有關於一二次 多項式函數之計算，該第二粗财計算係有關於——次多項式函 ，之計算。該二次多項式函數之係數係事先依—處理程序而得， °亥矛呈序包含：量測複數個已知粗链度之標準工件以獲取複數個反 巧最大灰階值；及依該#已知姆度及該等反射光最大灰階值 也行線ϋ迴歸以獲;^ §《二次多項式函數之係數。請參照圖4，其繪 5 201033580 職錄财之方料灿綠大雄值y與表 =應關係。如圖4所示，該二次多項式函數為 - 782 ’其迴歸符合係數為R2=〇. _。該 曰係數亦係事触—處理程序而得，該程序包含. :測=2知_度之標準工件以獲取複數個反射光平均灰階 tin已知粗链度及該等反射光平均灰階值施行線性迴歸 =取该-次多項式函數之係數。如圖5所示該一次多項式函 數為y=-2. 58G5X+108.16，其迴歸符合係數為_ 9855。Generating a reflected light; receiving the reflected light by a CCD light detecting sensor, wherein the light sensing H has a plurality of pixel units to generate a plurality of twist gray scale values corresponding to the reflected light; The equal-intensity gray-scale value is subjected to a maximum value calculation to generate a maximum gray-scale value; an average value is calculated for the brightness-graded gray-scale value to generate an average gray-scale value; and a first roughness is applied to the maximum gray-scale value Calculating to generate a first roughness; and performing a second roughness calculation on the average grayscale value to generate a second roughness. In order to achieve the above objects, the present invention further provides a CCD device for measuring surface roughness, which has a laser light source device for generating an incident laser light; and a workpiece to be tested for generating the incident laser light. a reflected light; a c(3) photodetector having a plurality of pixel units to generate a plurality of luminance grayscale and a grayscale value processor corresponding to the reflected light for performing the luminance grayscale values a maximum, calculated to generate a maximum grayscale value, an average value of the luminance grayscale values is calculated to generate an average grayscale value, and a first roughness calculation is performed on the maximum grayscale value to generate a first A roughness, and performing a second roughness calculation on the average grayscale value to produce a second coarse chain degree. The detailed description of the drawings and preferred embodiments is set forth in the accompanying drawings. [Embodiment] Referring to Fig. 1', a flow chart of an embodiment of a method for measuring surface roughness of a CCD of the present invention is shown. As shown in FIG. 1, the embodiment includes: applying an incident laser light to a workpiece to be tested (step a); receiving the reflected light of the workpiece to be tested by the CCD (step 匕); calculating a maximum gray scale value and an average gray scale a value (step c); and obtaining a corresponding value of the surface roughness according to the maximum gray scale value and the average gray scale value (step d). In step a, the incident laser light may be red light or blue light or green light, and different color light wavelengths may determine different surface roughness measurement ranges, and the workpiece to be tested may be: electroless nickel or copper or inscription or A material with good reflectivity such as steel. In step b, the CCD has a plurality of pixel units, e.g., 2 horizontally arranged pixel units, to produce 2 亮度 luminance grayscale values corresponding to the reflected light. Referring to FIG. 3, a gray scale value distribution of one of the 200 horizontally arranged pixel units is illustrated. As shown in Fig. 3, the gray scale value distribution has a maximum gray scale value 52 at a pixel position of about 1 。. The concentration of the gray scale value distribution is related to the surface roughness of the workpiece to be tested. The smoother the surface of the workpiece to be tested, the higher the concentration of the gray scale value distribution; the rougher the surface of the workpiece to be tested, the gray scale value distribution The flatter it is. In step c, the embodiment performs a maximum value calculation on the luminance grayscale values to generate a maximum grayscale value of the grayscale value distribution, and performs an average value calculation on the luminance grayscale values to generate the The average grayscale value of the grayscale value distribution. μ, in step d, the embodiment performs a first roughness meter on the maximum gray scale value to generate a -first: degree ' and performs a second coarse slit degree calculation on the average gray scale value to generate a second coarse rotation, wherein the first roughness calculation is related to a calculation of a quadratic polynomial function, the second coarse calculation being related to a calculation of a sub-polynomial function. The coefficient of the quadratic polynomial function is obtained according to the processing procedure in advance, and the method includes: measuring a plurality of standard workpieces of known thick chain degrees to obtain a plurality of inverse gray scale values; and It is known that the maximum gray scale value of the reflected light and the reflected light are also obtained by the line ϋ regression; ^ § "The coefficient of the quadratic polynomial function. Please refer to Figure 4, which shows the relationship between the 2010 and 201033580 job records. As shown in Fig. 4, the quadratic polynomial function is - 782 ' and its regression fit coefficient is R2 = 〇. _. The 曰 coefficient is also obtained by the touch-processing program. The program includes: Measure = 2 know _ degree standard workpiece to obtain a plurality of reflected light average gray scale tin known thick chain degree and the average gray scale of the reflected light The value is subjected to linear regression = the coefficient of the polynomial function is taken. As shown in Fig. 5, the linear polynomial function is y=-2. 58G5X+108.16, and its regression coincidence coefficient is _ 9855.
請參關2,其繪示本發明（；〇)制表面粗缝之方法其另一 =列^I糊。如，2所* ’該實施他含:開啟量_統程式 Μ牛=調整工件高度(步驟W ;蓋上罩子(步驟c);啟動雷射 在步驟a中，該量測系統程式可儲存、執一 置中’該資料處理裝置可為-電腦裝置。 聚 在步驟b中，該工件之高度係調整至使一 CCD檢光感測器可 準確接收其反射光，其中該工件可為無電解賊銅或贼鋼等反 射率良好之材質。 在步驟c中，該罩子係用以防止外部的光線干擾表面粗糙度 之量測。 在步驟d中，雷射源之雷射光可為紅光或藍光或綠光，且其 雷射光之強度係經適當衰減以使該CCD檢光感測器不致發生接收 飽和之現象。 •在步驟e中，本實施例對該CCD檢光感測器之複數個像素單 元之亮度灰階值施行一最大值計算以產生一最大灰階值，對該等 像素單元之亮度灰階值施行一平均值計算以產生一平均灰階值， 對該最大灰階值施行一第一粗糙度計算以產生一第一粗糙度，及 對該平均灰階值施行一第二粗糙度計算以產生一第二粗糙度，其 201033580 中該第一粗糙度計算係有關- 祕度計祕錢於--次㈣數之計算，該第二 在步驟f中，本實施例利用一 該第二粗喊表虹件之粗贿範^顯補第—粗糙度及 方t實ί例關閉該雷射源以結束該次量測。 之裝置。請參昭圖6,其繪-Ji枚出―CCD量測表面粗糙度 «Ub歸不本發明α 一實施例之方塊圖。如圖6所干f j衣面粗错度之裝置其 一雷射光衰減請、-铜;;/^施例雷射光源_、 一灰階值處理器604。彳件602、一 CCD檢光感測器603及 該雷射光源600之雷射光可為紅光 同的表面粗謎量職圍。 Hi械料，以決疋不 光以T係用以適當衰減該雷射光源議之雷射 先以使該CCD檢先感測器6〇3不致發生接收飽和之現象。 準確之，度係調整至使該檢光感測器603可 銦Mi w、’且雜測I件6G2可為無1解誠銅或銘或 鋼4反射率良好之材質。 ❹ jCCD檢光感，器603具有具有複數個像素單元，例如2〇〇 畔L '排狀像素單元，卩產生對應於該反射光之個亮度灰 階值。 rrn/亥灰階值處理1 ’搞接至該CCD檢光感測器603，用以對該 光感測器603之該等像素單元之亮度灰階值施行一最大值 計算以產ί —最歧雜，對料單元之亮歧施行一 平均值ί算以產生—平均灰階值，職最大灰階值施行一第一粗 縫度!十?以產生―第—祕度，及對該平均灰階值施行—第二粗 縫度1算以產生—第二粗輪度，其巾該第—粗糙度計算係有關於 一一次多項式函數之計算，該第二粗糙度計算係有關於一一次多 項式函數之計算。該灰階值處理器604進一步具有一應用程式， 201033580 量測功能，並在-顯示裝置上顯示該 單之諸I施例之揭露，本案確6提供—低成本、架構簡 之表面_ί。/、可在低計减賴τ，有鮮地量曝測工件 本案所揭示者，乃較佳實施例，舉凡源於本案技術思 部變更或修飾而為熟習該項技藝之人所易於推知者，例如i素ί ❹ 请函數之變更、韻光源之敎、灰階值處理 器之變更等，俱不脫本案之專利權範疇。 、’不上所陳’本案無論就目的、手段與功效，在在顯示其週異 於習知之肋特徵，且其首先發明合於實用，亦在在符合發明之 專利要件’ n貴審查委貞明察，並祈早日賜^專利，俾嘉氧 社會，實感德便。 ‘" 【圖式簡單說明】 圖1為-示意圖’其緣示本發明CCD量測表面粗糙度之方法 其一實施例之流程圖。 圖2為一示意圖，其繪示本發明CCD量測表面粗糙度之方法 其另一實施例之流程圖。 圖3為一示意圖，其繪示本發明CCD量測表面粗链度之方法 針對一工件量測所得之一反射光灰階值分佈曲線圖。 圖4為一示意圖，其緣示本發明[CD量測表面粗链度之方法 其反射光最大灰階值與表面粗糙度間之對應關係圖。 圖5為一示意圖，其繪示本發明CCD量測表面粗糙度之方法 其反射光平均灰階值與表面粗糖度間之對應關係圖。 圖6為一示意圖，其繪示本發明CCD量測表面粗糙度之裝置 其一實施例之方塊圖。 【主要元件符號說明】 雷射光源600 8 201033580 雷射光衰減片601 待測工件602 CCD檢光感測器603 灰階值處理器604Please refer to 2, which shows the method of making the surface rough joint of the invention (; 〇) another one of the columns. For example, 2 *' the implementation of his: open amount _ system yak = adjust the height of the workpiece (step W; cover the cover (step c); start the laser in step a, the measurement system program can be stored, The data processing device can be a computer device. In step b, the height of the workpiece is adjusted so that a CCD light detecting sensor can accurately receive its reflected light, wherein the workpiece can be electroless. A material with good reflectivity such as thief copper or thief steel. In step c, the cover is used to prevent external light from interfering with the measurement of surface roughness. In step d, the laser light of the laser source may be red or Blue light or green light, and the intensity of the laser light is appropriately attenuated so that the CCD light detecting sensor does not suffer from receiving saturation. • In step e, the plural of the CCD light detecting sensor in this embodiment Performing a maximum value calculation on the luminance gray scale values of the pixel units to generate a maximum gray scale value, performing an average calculation on the luminance gray scale values of the pixel units to generate an average gray scale value, the maximum gray scale value Performing a first roughness calculation to generate a first rough Degree, and performing a second roughness calculation on the average grayscale value to generate a second roughness, wherein the first roughness calculation in 201033580 is related to the calculation of the secret amount of the secret amount in the (second) number. In the second step f, in the embodiment, the laser source is turned off by using the second rough caller and the roughness and the square to close the laser source to end the measurement. The device is shown in Fig. 6, which shows that the CCD measuring surface roughness «Ub is not a block diagram of the embodiment of the present invention. As shown in Fig. 6, the apparatus for roughing the gross surface of the fj is a laser light attenuation, - copper;; / ^ embodiment of the laser source _, a gray level value processor 604. The element 602, a CCD light sensor 603 and the laser light of the laser source 600 can be The surface of the red light is the same as the rough mystery. Hi-materials, in order to not only use the T system to properly attenuate the laser light source, so that the CCD detection sensor 6〇3 will not receive The phenomenon of saturation. Accurately, the degree is adjusted so that the photodetector 603 can be indium Mi w, and the miscellaneous I 6G2 can be a material with no reflection of copper or Ming or steel 4 ❹ jCCD Detecting sensation, the 603 has a plurality of pixel units, for example, a 2-inch L'-row pixel unit, and generates a luminance grayscale value corresponding to the reflected light. rrn/Hai grayscale value processing 1 'connected to the CCD photodetector 603 for performing a maximum calculation on the luminance grayscale values of the pixel units of the photo sensor 603 to produce the most ambiguous, The ambiguity is performed by an average value calculated to generate an average grayscale value, and the maximum grayscale value is applied to a first coarse seam degree! Ten to generate a "first secret" and to perform the average grayscale value - second The rough degree 1 is calculated to generate a second coarse rotation, and the first roughness calculation is performed on a first-order polynomial function, and the second roughness calculation is related to the calculation of the first-order polynomial function. The grayscale value processor 604 further has an application, 201033580 measuring function, and displays the disclosure of the single embodiment of the single on the display device, and the present invention provides a low cost, simple architecture surface. /, can reduce the τ at the low level, there is a fresh amount of exposure to the workpiece disclosed in this case, is the preferred embodiment, which is derived from the technical changes or modifications of the technical department of the case is easy for people who are familiar with the skill to infer For example, i Su ί ❹ Please change the function, change the rhyme source, change the gray scale value processor, etc., and do not deviate from the scope of patent rights in this case. "Nothing to be done" This case, regardless of its purpose, means and efficacy, is showing its rib characteristics that are different from the conventional ones, and its first invention is practical and practical, and it is also in the examination of the patent requirements of the invention. Observing, and praying for a patent as soon as possible, 俾 Jia oxygen society, really feel good. ‘" [Simple Description of the Drawings] Fig. 1 is a schematic view showing a flow chart of a method for measuring the surface roughness of the CCD of the present invention. Fig. 2 is a schematic view showing a flow chart of another embodiment of the method for measuring the surface roughness of the CCD of the present invention. 3 is a schematic view showing a method for measuring the thickness of a surface of a CCD according to the present invention. Fig. 4 is a view showing the correspondence relationship between the maximum gray scale value of the reflected light and the surface roughness of the method for measuring the surface roughness of the CD according to the present invention. Fig. 5 is a schematic view showing the correspondence between the average gray scale value of the reflected light and the surface roughness of the method for measuring the surface roughness of the CCD of the present invention. Fig. 6 is a schematic view showing a block diagram of an embodiment of the apparatus for measuring surface roughness of the CCD of the present invention. [Main component symbol description] Laser light source 600 8 201033580 Laser light attenuating sheet 601 Object to be tested 602 CCD light detecting sensor 603 Gray scale value processor 604