JP6193088B2 - Method for detecting application area and application amount of transparent resin applied to glossy metallic surface and optical coherence tomography measurement system - Google Patents

Description

  The present invention relates to a method for detecting an application region and an application amount of a transparent resin such as an adhesive or a protective film applied to a metallic gloss surface, and an optical coherence tomography measurement system thereof.

  The inspection of the presence or absence of the application of the transparent resin applied to the glossy metal surface is performed visually using a microscope, and the presence or absence of the application of the transparent resin is automatically determined by an OCT apparatus (see Patent Documents 2 and 3 below). Currently, this is not realized.

  In addition, what handled the tooth | gear as a to-be-measured sample by the OCT apparatus is disclosed (refer the following patent document 1).

JP 2006-132996 A JP 2003-329577 A JP 2002-310897 A

Laser Research, October 2003: Technology development of optical coherence tomography centered on medical care

  A semi-transparent or almost transparent protective resin or adhesive (hereinafter referred to as transparent resin) is locally applied on the wiring of a metal substrate having wiring on a metal plate for wiring protection, insulation, and element fixing. Yes. At these application locations, the transparent resin needs to completely cover the metal wiring area connecting the metal substrates, and detection of the application area and the application amount in the vicinity of the wiring is required. However, at present, the detection of the application region of the transparent resin is performed visually with a microscope, and automatic detection is difficult, and detection of the application amount by automatic detection has not been realized yet. However, in the first place, the optical coherence tomography measurement system can detect a tomographic image of a subject in a non-contact and non-invasive manner by using light as a probe and capturing a light reflection signal in the subject as light interference. Light reflection occurs on mirror surfaces such as mirrors and metallic glossy surfaces, and also occurs where there is a difference in the refractive index of the medium in the subject, but almost 100% of the amount of light is reflected when reflecting off mirrors or metallic glossy surfaces. In contrast, the reflection at a difference in refractive index is very small.

  Therefore, when a transparent resin is applied on a metallic glossy surface, the sensitivity of the detector is taken by the amount of light reflected from the metallic glossy surface in OCT, and it is difficult to detect the coated surface of the transparent resin. It is difficult to measure the presence / absence and application amount of a transparent resin.

  In this way, in the measurement of tomographic images with the optical coherence tomography measurement system, the reflected light from the surface of the transparent resin cannot be captured, so the transparent resin application area and application amount are detected from the transparent resin application shape. Is not easy.

  Under such circumstances, the present invention provides an optical coherence tomography measurement system that can automatically determine the application area and the application amount of a transparent resin applied to a metallic glossy surface and can be used on a production line. I did it.

  In view of the above situation, the present invention detects the application region and the application amount of a transparent resin applied to a metallic glossy surface that enables automatic determination of the application region and application amount of the transparent resin applied to the metal glossy surface. It is an object of the present invention to provide a method and an optical coherence tomography measurement system thereof.

In order to achieve the above object, the present invention provides
[1] In a method for detecting a coating area and a coating amount of a transparent resin to be applied to a metallic glossy surface, light from a low coherence light source is divided into object light and reference light, and the object light is locally applied to the metallic glossy surface. The transparent resin to be applied is scanned, irradiated and returned, the returned object light and the reference light are combined, the difference between the object optical path length and the reference optical path length is made variable, and the combined light is dispersed. The spectrum of the combined light split by the diffraction grating is detected, and the detected data is subjected to inverse Fourier transform processing to form a tomographic image of the transparent resin. Is detected and displayed.

  [2] In the method of detecting the coating area and the coating amount of the transparent resin applied to the metallic glossy surface, the light from the low-coherence light source is divided into the object light and the reference light, and the object light is locally applied to the metallic glossy surface. The transparent resin to be applied is scanned, irradiated and returned, the returned object light and the reference light are combined, the difference between the object optical path length and the reference optical path length is variable, and the phase of the combined light is changed. Modulating, generating a beat signal, detecting interference of the combined light, processing this detection data, forming a tomographic image of the transparent resin, and analyzing the tomographic image, and applying the transparent resin coating region and coating The quantity is detected and displayed.

  [3] In the method for detecting the application region and the application amount of the transparent resin applied to the metallic glossy surface according to [1] or [2] above, the transparent resin in which the object light is locally applied to the metallic glossy surface The scanning irradiation is characterized by including a region where the transparent resin is applied and a region where the transparent resin is not applied.

  [4] In the method for detecting the application region and the application amount of the transparent resin applied to the metallic glossy surface according to [1] or [2], the detection of the application region and the application amount of the transparent resin may be performed according to the application amount. Accordingly, the detection is performed by detecting application surfaces having different detection positions.

  [5] In an optical coherence tomography measurement system, a low-coherence light source, means for dividing the light from the low-coherence light source into object light and reference light, and a transparent on which the object light is locally applied to a metallic gloss surface Means for scanning and irradiating the resin to return, means for combining the returned object light and the reference light, and making the difference between the object optical path length and the reference optical path length variable, and diffraction for dispersing the combined light. A grating, a detecting means for detecting the spectrum of the combined light split by the diffraction grating, and processing the detection data from the detecting means to form a tomographic image of the transparent resin, and analyzing the tomographic image And a means for detecting and displaying the application region and the application amount of the transparent resin.

  [6] In an optical coherence tomography measurement system, a low-coherence light source, means for dividing the light from the low-coherence light source into object light and reference light, and a transparent on which the object light is locally applied to a metallic gloss surface Means for scanning and irradiating the resin to return, means for combining the returned object light and the reference light, and making the difference between the object optical path length and the reference optical path length variable, and modulating the phase of the combined light Then, a means for generating a beat signal, a detection means for detecting interference of the combined light, and a calculation process of detection data from the detection means to form a tomographic image of the subject, and analysis of the tomographic image And a means for detecting and displaying the transparent resin application region and the application amount.

  [7] In the optical coherence tomography measurement system according to the above [5] or [6], the scanning irradiation to the transparent resin in which the object light is locally applied to the metallic gloss surface is a region to which the transparent resin is applied. And a region not coated.

  [8] In the optical coherence tomography measurement system according to [5] or [6], the application region and the application amount of the transparent resin are detected by detecting application surfaces having different detection positions according to the application amount. It is characterized by that.

  [9] The optical coherence tomography measurement system according to [5] or [6], wherein the scanning of the transparent resin is performed by a scanning mechanism that moves the transparent resin.

  [10] The optical coherence tomography measurement system according to [5] or [6], wherein the transparent resin is fixed at a predetermined position, and the object light is performed by a scanning mechanism using a galvanometer mirror.

  According to the present invention, it is possible to automatically determine the application area and the application amount of a transparent resin applied to a metallic glossy surface, and a method for detecting the application area and the application amount of a transparent resin applied to a metallic glossy surface. The optical coherence tomography measurement system can be provided.

1 is a block diagram of an all fiber type spectral domain type OCT measurement system showing a first embodiment of the present invention; FIG. It is a block diagram of the OCT measurement system of the all-fiber type | mold spectrum domain type | mold which shows 2nd Example of this invention. It is a schematic diagram of the light reflectivity R and the light transmittance T at the boundary between media having different refractive indexes n _i and n _t . It is a schematic diagram of reflection in case transparent resin is apply | coated to the metal surface of a metal substrate. It is a schematic diagram which shows the real shape (actual thickness g) of transparent resin when transparent resin is apply | coated to the metal surface of a metal substrate. It is a schematic diagram of the cross-sectional image measured using the optical coherence tomography measurement system of this invention. It is a figure which shows the microscope image of the transparent resin application part in case transparent resin is apply | coated to the metal surface of a metal substrate. It is a figure which shows the 3D image of a transparent resin application part. It is a figure which shows the XZ tomographic plane of a transparent resin application part. It is a figure which shows the XY tomographic plane of a transparent resin application part. It is a figure which shows the microscope image of the transparent resin application part in case transparent resin is apply | coated to the metal surface of a metal substrate. It is a figure which shows an OCT image. It is a figure which shows the flow of determination of measurement. It is a figure which shows the inclination map of the microscopic image which has a NG circle | round | yen in case the transparent resin is apply | coated to the metal surface of a metal substrate, and the application part of transparent resin. It is a figure which shows the inclination map of the microscopic image which has an OK circle in case the transparent resin is apply | coated to the metal surface of a metal substrate, and the application part of transparent resin.

  In the method of detecting the coating area and the coating amount of the transparent resin applied to the metal surface of the present invention, the light from the low coherence light source is divided into the object light and the reference light, and the object light is locally applied to the metallic gloss surface. Diffraction that scans and irradiates the transparent resin applied to the substrate, combines the returned object light and the reference light, makes the difference between the object optical path length and the reference optical path length variable, and splits the combined light The spectrum of the combined light split by the grating is detected, and the detected data is subjected to Fourier inverse transform processing to form a tomographic image of the transparent resin. By analyzing the tomographic image, the coating area and the coating amount of the transparent resin are determined. Detect and display.

  Hereinafter, embodiments of the present invention will be described in detail.

  FIG. 1 is a block diagram of an all fiber type spectral domain type OCT measurement system showing a first embodiment of the present invention.

  As shown in this figure, the OCT measurement system 1 divides the light from the low coherence light source 2 into the optical fiber 4 through the lens 3 and the reference light 7 and the optical fiber 9 through the optical fiber 6 by the fiber coupler (demultiplexing element) 5. The reference light 7 is reflected by the reference mirror 8, returns to the fiber coupler (demultiplexing element) 5 through the same optical path, and the object light 10 passes through the objective lens 12 of the measuring head 11. The transparent resin 23 applied to the metallic gloss surface 22 of the metal substrate 21 is irradiated, and the surface reflected light, the internal scattered light, and the boundary surface reflected light from the irradiated portion return to the fiber coupler (demultiplexing element) 5 through the same optical path, The light combined and interfered by the fiber coupler (demultiplexing element) 5 is split by the diffraction grating 15 via the lens 14 via the optical fiber 13 and is then split by the spectroscope (CCD camera) 16. The spectrum of the wave light is detected, and the detected data is subjected to Fourier inverse transform processing by the computing means (PC unit) 17 to form a tomographic image of the transparent resin 23, and the application region and the application of the transparent resin 23 are analyzed by analyzing the tomographic image. The amount is detected and displayed on the display means (display device) 18. That is, here, by constructing an all-fiber interferometer and analyzing the wave number of the output light of the interferometer with the spectroscope 16, the tomographic profile of the transparent resin 23 applied to the metallic glossy surface 22 of the metal substrate 21 is obtained. The system to acquire is adopted. In this embodiment, since the scanning of the transparent resin 23 is configured to be performed by a scanning mechanism that moves the transparent resin 23, the measurement head 11 can be simplified.

  FIG. 2 is a block diagram of an all-fiber spectral domain type OCT measurement system showing a second embodiment of the present invention. In this embodiment, a galvanometer mirror 53 for scanning the transparent resin 23 is built in the measuring head 51 so as to perform optical scanning, and the transparent resin 23 is set and fixed at a predetermined position. . Therefore, the setting of the transparent resin 23 can be performed accurately and easily.

Figure 3 is a schematic diagram of an optical reflectance R and transmittance T of the boundary of media having different refractive index n _i and n _t.

In this figure, when measuring a tomographic image of the transparent resin 23 applied to the metallic glossy surface 22 of the metal substrate 21 as an object with the optical coherence tomography measurement system, as shown in FIG. Where n _i and the refractive index of the transparent resin 23 are n _t , the light reflectivity R at the boundary between the media having different refractive indices n _i and n _t is
R = (n _t −n _i ) ² / (n _t + n _i ) ²
Given in.

On the other hand, the light transmittance T is
T = 4n _t n _i / (n _t + n _i ) ²
Given in.

  FIG. 4 is a schematic view of reflection when a transparent resin is applied to the metal surface of the metal substrate.

  As shown in this figure, when the transparent resin 23 is applied to the metallic glossy surface 22 of the metal substrate 21, if the refractive index of the transparent resin 23 is 1.5, the application surface 24 of the transparent resin 23 has an irradiation light amount. On the other hand, only 4% is reflected, but 96% of the irradiation light amount is reflected on the metallic glossy surface 22 of the metal substrate 21 to which the transparent resin 23 is applied. Since the reflected light on the coated surface 24 of the transparent resin 23 and the metallic glossy surface 22 of the metal substrate 21 are coaxially reflected and overlapped, the detection is saturated with the high intensity reflected light amount of the metallic glossy surface 22 of the metal substrate 21, The amount of reflected light from the coating surface 24 of the low-strength transparent resin 23 cannot be sufficiently detected.

  Further, since the transparent resin 23 is locally applied, the application surface 24 of the transparent resin 23 has a dome shape as shown in FIG. In places other than the center of the application portion of the transparent resin 23, the application surface 24 of the transparent resin 23 is not perpendicular to the light irradiation axis, and the reflected light from the application surface 24 of the transparent resin 23 escapes off axis and cannot be detected.

  Thus, since the reflected light from the coating surface 24 of the transparent resin 23 cannot be captured in the measurement of the tomographic image by the optical coherence tomography measurement system, the coating region and the coating amount of the transparent resin 23 are changed from the coating shape of the transparent resin 23. It is not easy to detect.

  In view of the current situation, the present invention is an optical coherence tomography measurement system that can automatically determine the application region and the application amount of the transparent resin 23 applied to the metal surface of the metal substrate and use it on the production line. To offer.

  FIG. 5 is a schematic diagram showing the actual shape (actual thickness g) of the transparent resin when the transparent resin is applied to the metal surface of the metal substrate, and FIG. 6 is measured using the optical coherence tomography measurement system of the present invention. It is the schematic diagram of a cross-sectional image.

In the optical coherence tomography measurement system of the present invention, when measuring the transparent resin 23 applied to the metallic glossy surface 22 of the metal substrate 21 as an object, as shown in FIG. The optical distance is not the actual thickness g of the transparent resin 23 (see FIG. 5), and the optical distance is given by the actual distance g × the refractive index n _t of the transparent resin 23. Since the refractive index of the air 25 is approximately 1, the measurement distance in the air 25 coincides with the actual distance of the transparent resin 23 as the subject, but when measuring a medium whose refractive index is not 1, It is measured longer than the actual distance by an actual distance g × (medium refractive index n _t −1). For example, when the thickness of glass having a thickness of 3 mm (refractive index of 1.5) is measured, it is measured to be 4.5 mm.

Therefore, when a transparent resin is locally applied to the metallic gloss surface of a flat metal substrate, the refractive index is 1 or more, so that the metal substrate at the position where the transparent resin is applied as shown in FIG. The position is detected deeper than the position of the uncoated metal substrate, even though the transparent resin coating surface is flat. The detection position of the metal substrate in the transparent resin application area is the actual distance g × the refractive index n _{t of the} medium, based on the transparent resin application surface, and the detection position of the metal substrate in the area where the transparent resin is not applied is Since it is g × 1 (refractive index of air), the position of the metal substrate in the transparent resin application region is based on the position of the metal substrate on which the transparent resin is not applied.
g × (n _t −1)
It becomes. Since this amount is proportional to the thickness g of the transparent resin, the transparent resin coating amount can be obtained by detecting this amount. Whether or not the transparent resin is applied can be confirmed by detecting whether or not the position of the metal substrate is detected deeper than the position of the metal substrate to which the transparent resin is not applied. Moreover, since the reflected light from a sufficiently strong metal substrate is used for measurement, sufficient detection sensitivity is maintained.

  FIG. 7 is a view showing a microscopic image of a transparent resin application portion when a transparent resin is applied to the metal surface of the metal substrate, FIG. 8 is a view showing a 3D image of the transparent resin application portion, and FIG. FIG. 10 is a diagram showing an XZ tomographic plane of the application part, and FIG. 10 is a diagram showing an XY tomographic plane of the transparent resin application part.

  In FIG. 7, 31 is an element (metallic glossy surface) of an electronic circuit, 32 is a transparent resin (translucent adhesive) applied to the metallic glossy surface 31, and 33 in FIG. 9 is an element (metallic glossy surface). , 34 is the transparent resin portion, and 35 is the signal strength of the Ag paste surface portion that electrically connects the wiring portion and the element. Although the transparent resin 32 can be detected, the signal strength with noise is small. Ingenuity is required for use on the production line. In FIG. 10, 36 and 37 are transparent resin portions, and 38, 39 and 40 are Ag paste surface portions.

  FIG. 11 is a view showing a microscopic image of the transparent resin application part when the transparent resin is applied to the metal surface of the metal substrate. The OK round part is the transparent resin application part and the NG round part is the transparent resin application part. There is no part. FIG. 12 is a view showing the OCT image, 41 is an element part to which a transparent resin is not applied, and 42 is an Ag paste surface part. FIG. 13 is a diagram showing a flow of the determination of the measurement, and FIG. 13A is a diagram showing identification of the transparent resin application portion, and a map of the peak intensity of the reflected signal is created. Since the reflected signal from the element part and the metal substrate part is strong (indicated in white), a clear difference from the transparent resin application part appears. FIG. 13B is a diagram showing the shape of the transparent resin application part, and creates a map of position information (level information) of the reflected signal. FIG. 13C quantifies the slope shape of the transparent resin application part, and creates a slope map from the position information of FIG. 13B of the Ag paste part.

  For example, in the tomographic image shown in FIG. 12A, it can be seen that almost parallel is maintained at the boundary from the element portion 41 to the right Ag paste portion 42, and no transparent resin is applied to the element portion.

  On the other hand, in the tomographic image of FIG. 12B, the boundary portion from the element portion 41 to the right Ag paste portion 42 descends from the reference plane (element surface).

  This indicates that the optical distance is extended and represented in accordance with the application amount for applying the transparent resin to the surface of the element portion.

  An inclination map representing these inclinations as the entire application portion represents a negative inclination (black) to a positive inclination (white) in gray scale.

  FIG. 14 is a view showing a microscope image having an NG circle when the transparent resin is applied to the metal surface of the metal substrate and an inclination map of the application portion of the transparent resin, and FIG. 15 is an application of the transparent resin to the metal surface of the metal substrate. It is a figure which shows the inclination map of the microscopic image which has the OK circle | round | yen in the case of being performed, and the application part of transparent resin.

  In the inclination map, the OK round part has a negative inclination (black) part on the outer peripheral part, and it can be seen that the transparent resin is sufficiently applied on the metal substrate.

  Further, it can be seen that the NG round portion does not have a negative slope (black) portion on the outer peripheral portion, and no transparent resin is applied on the metal substrate.

  As is apparent from this figure, the application region of the transparent resin can be determined.

  In addition, this invention is not limited to the said Example, Based on the meaning of this invention, a various deformation | transformation is possible and these are not excluded from the scope of the present invention.

  The method for detecting the application area and the application amount of the transparent resin applied to the metal surface of the present invention and the optical coherence tomography measurement system can automatically determine the application area and application amount of the application of the transparent resin applied to the metal surface. This method can be used as a method for detecting a coating region and a coating amount of a transparent resin to be applied to a metal surface and an optical coherence tomography device.

1 OCT measurement system 2 Low coherence light source 3 Lens 4, 6, 9, 13 Optical fiber 5 Fiber coupler (demultiplexing element)
7 Reference Light 8 Reference Mirror 10 Object Light 11 Measuring Head 12, 54 Objective Lens 14, 52 Lens 15 Diffraction Element 16 Spectroscope (CCD Camera)
17 Calculation means (PC unit)
18 Display means (display device)
DESCRIPTION OF SYMBOLS 21 Metal substrate 22 Metal gloss surface 23,32 Transparent resin, such as an adhesive agent and protective resin 24 Transparent resin coating surface 25 Air 31 Element part (metal gloss surface)
33 Signal strength of element part (metallic glossy surface) 34 Transparent resin part such as adhesive or protective resin 35 Signal strength of Ag paste surface part 36, 37 Adhesive part 38, 39, 40, 42 Ag paste surface part 41 Adhesive Element part 51 is applied 51 Measuring head 53 Galvano mirror

Claims (10)

The light from the low-coherence light source is divided into object light and reference light, and the object light is scanned and irradiated to a transparent resin locally applied to the metallic glossy surface, and the returned object light and the reference The light is combined, the difference between the object optical path length and the reference optical path length is made variable, the spectrum of the combined light separated by the diffraction grating that separates the combined light is detected, and the detected data is subjected to inverse Fourier transform processing. Te, wherein forming a tomographic image of a transparent resin, and detecting the coating amount and the coating area of the transparent resin by analyzing the tomographic image, the application area of the transparent resin applied to the metallic luster surface and displaying And the method of detecting the coating amount.   The light from the low-coherence light source is divided into object light and reference light, and the object light is scanned and irradiated to the transparent resin locally applied to the metallic glossy surface, and the returned object light and the reference light are returned. Combines the reference light, makes the difference between the object optical path length and the reference optical path length variable, modulates the phase of the combined light, generates a beat signal, detects interference of the combined light, and calculates the detection data Processing, forming a tomographic image of the transparent resin, detecting and displaying the transparent resin coating area and coating amount from the analysis of the tomographic image, and displaying the transparent resin coated on the metallic glossy surface A method for detecting the coating area and the coating amount.   3. The method for detecting the application area and the application amount of the transparent resin applied to the metallic glossy surface according to claim 1 or 2, wherein the scanning irradiation to the transparent resin in which the object light is locally applied to the metallic glossy surface is performed. A method for detecting an application area and an application amount of a transparent resin applied to a metallic glossy surface, wherein the transparent resin includes an area where the transparent resin is applied and an area where the transparent resin is not applied.   3. The method for detecting the application area and application amount of a transparent resin applied to the metallic glossy surface according to claim 1 or 2, wherein the detection position of the application area and application amount of the transparent resin differs depending on the application quantity. A method for detecting an application region and an application amount of a transparent resin applied to a metallic glossy surface, which is performed by detecting an application surface.   A low-coherence light source, means for dividing light from the low-coherence light source into object light and reference light, and means for scanning and irradiating the object light to a transparent resin locally applied to a metallic glossy surface And means for combining the returned object light and the reference light so as to make a difference between the object optical path length and the reference optical path length variable, a diffraction grating for spectrally separating the combined light, and spectrally separated by the diffraction grating A detection means for detecting the spectrum of the combined light, and processing the detection data from the detection means to form a tomographic image of the transparent resin, and from the analysis of the tomographic image, the application region and the application amount of the transparent resin An optical coherence tomography measurement system comprising means for detecting and displaying the light.   A low-coherence light source, means for dividing light from the low-coherence light source into object light and reference light, and means for scanning and irradiating the object light to a transparent resin locally applied to a metallic glossy surface And means for combining the returned object light and the reference light, making the difference between the object optical path length and the reference optical path length variable, means for modulating the phase of the combined light and generating a beat signal; Detection means for detecting the interference of the combined light, and processing the detection data from the detection means to form a tomographic image of the subject, and from the analysis of the tomographic image, the application region and the application amount of the transparent resin An optical coherence tomography measurement system comprising means for detecting and displaying the light.   The optical coherence tomography measurement system according to claim 5 or 6, wherein the scanning irradiation to the transparent resin in which the object light is locally applied to the metallic glossy surface includes an area where the transparent resin is applied and an area where the transparent resin is not applied. An optical coherence tomography measurement system comprising:   7. The optical coherence tomography measurement system according to claim 5, wherein the detection of the application region and the application amount of the transparent resin is performed by detecting an application surface having a detection position different depending on the application amount. Coherence tomography measurement system.   7. The optical coherence tomography measurement system according to claim 5, wherein scanning of the transparent resin is performed by a scanning mechanism that moves the transparent resin.   7. The optical coherence tomography measurement system according to claim 5, wherein the transparent resin is fixed at a predetermined position, and the object light is measured by a scanning mechanism using a galvanometer mirror.

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