TW201032002A - Photosensitive black-colored resin composition, black matrix substrate, and manufacturing method of color filter - Google Patents

Photosensitive black-colored resin composition, black matrix substrate, and manufacturing method of color filter Download PDF

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Publication number
TW201032002A
TW201032002A TW098138749A TW98138749A TW201032002A TW 201032002 A TW201032002 A TW 201032002A TW 098138749 A TW098138749 A TW 098138749A TW 98138749 A TW98138749 A TW 98138749A TW 201032002 A TW201032002 A TW 201032002A
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Taiwan
Prior art keywords
black matrix
resin composition
substrate
acid
black
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TW098138749A
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Chinese (zh)
Inventor
Motohiko Murakami
Masayuki Miki
Yukio Fujii
Hideyuki Yamada
Hidekazu Shiomi
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Sumitomo Chemical Co
Seiren Co Ltd
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Application filed by Sumitomo Chemical Co, Seiren Co Ltd filed Critical Sumitomo Chemical Co
Publication of TW201032002A publication Critical patent/TW201032002A/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0046Photosensitive materials with perfluoro compounds, e.g. for dry lithography

Abstract

The present invention aims to provide a photosensitive black-colored resin composition, which is used to form black matrix of spacer, can prevent color mixture due to blending different color inks with adjacent color pixel layers without implementing special treatments such as plasma surface treatment, and can avoid pixel defects such as local trapping. The photosensitive black-colored resin composition contains, with respect to total fluoride content of all the solid components, 0.0008 to 0.005 mass% of fluoride surfactants having perfluoroalkyl at side chains.

Description

201032002 六、發明說明: 【發明所屬之技術領域】 本發明有關感光性黑色樹脂組成物、黑色矩陣基板以 及彩色濾光片之製造方法。詳言之,係有關構成彩色濾光 片的隔離壁圖案形成用感光性黑色樹脂組成物,特別是有 關用於以噴墨印刷方式製造彩色濾光片的成爲遮光性隔離 壁的黑色矩陣形成用感光性黑色樹脂組成物,亦有關使用 Φ 該感光性黑色樹脂組成物製備之黑色矩陣基板、以及使用 該黑色矩陣基板之彩色濾光片之製造方法。 【先前技術】 彩色濾光片是組裝於液晶顯示裝置中使顯示圖像彩色 化而使用的光學元件,或者是組裝到固體攝像元件中爲了 得到彩色圖像而使用的光學元件。此等彩色濾光片已知有 在基板上的同一平面上具有包括相互鄰接而形成的多個彩 φ 色像素層的著色圖案的彩色濾光片。其中,著色圖案例如 由紅色像素層、綠色像素層以及藍色像素層的3原色的彩 色像素層構成,鄰接的彩色像素層間,形成成爲遮光層的 黑色矩陣。各種顏色的彩色像素層是著色爲各種顏色的透 明層,黑色矩陣爲黑色且實質上不透過可見光的層。 作爲彩色濾光片之一般製造方法,已知有在基板上形 成著色感光性樹脂組成物層,該著色感光性樹脂組成物層 由含有各種顏色著色劑的著色感光性樹脂組成物的固體成 分所構成,透過光罩照射光線,利用對顯影液的溶解性變 -5- 201032002 化的著色感光性樹脂組成物層之性質,在基板上形成著色 圖案的光微影蝕刻方式之製造方法(例如,特開平7_ 27 1 020號公報)。 然而,光微影蝕刻方式的彩色濾光片製造方法中,在 基板表面塗佈著色感光性樹脂組成物後,有必要重複進行 透過光罩曝光並顯影除去不需要部分的步驟,其製造步驟 複雜。進而’昂貴光罩的費用負擔、塗佈設備、曝光設備 以及顯影設備等設備的折舊成本爲必要。因此,以製造步 驟的簡單化以及降低製造成本爲目的,代替光微影蝕刻法 ,而提案有藉由噴墨印刷法形成彩色像素層的方法。 噴墨印刷法中,通常將具有遮光性的黑色矩陣作爲隔 離壁,藉由在該黑色矩陣的開口部印刷噴墨印刷用油墨而 形成彩色像素層,但在進行印刷時,由於對噴墨印刷用油 墨的固體成分濃度有其限制,故爲了得到所期望的層厚以 及著色濃度,相對於黑色矩陣的開口部容積(開口面積X 隔離壁高度),有必要印刷數倍以上體積之噴墨印刷用油 墨。由此,印刷的噴墨印刷用油墨從開口部溢出,超出成 爲隔離壁的黑色矩陣'噴墨印刷用油墨亦侵入在鄰接的開 口部,而發生“混色”。 針對該“混色”的問題,已提出有例如藉由在四氟甲 烷等氟化合物的氣氛中進行電漿處理,僅使黑色矩陣表面 氟化,使相對於噴墨印刷用油墨的疏液性增大之方法(例 如,日本專利第3328297號公報),且,提出有添加有機 矽化合物或有機氟化合物,形成賦予相對於噴墨印刷用油 -6- 201032002 墨的疏液性的黑色矩陣之方法(例如,特開平7 -3 59 1 5號 公報、特開2006-163233號公報)。 又,特開20〇7-25 63 5 7號公報中揭示一種使成爲隔離 壁之黑色矩陣表面的全部負離子的檢測強度總計爲1時, 以使氟離子的檢測強度成爲0.3〜0.6的方式構成之方法。 日本專利第3328297號公報揭示的方法中,藉由電漿 處理將黑色矩陣表面氟化,因此使黑色矩陣表面上相對於 φ 噴墨印刷用油墨的疏液性成爲均句,但是電漿處理步驟成 爲必要,不能謂爲簡單化的方法。 另外,特開平7-3 59 1 5號公報、特開2006- 1 63 23 3號公 報所揭示的方法中,使用含有有機矽化合物或有機氟化合 物的組成物形成黑色矩陣,因此可以形成賦予相對於噴墨 印刷用油墨的疏液性的黑色矩陣,可以防止由於鄰接的彩 色像素層間中的異色油墨混入而發生的混色,但是在確保 黑色矩陣表面整體的均勻疏液性方面不足。黑色矩陣表面 φ 的疏液性不均匀時,在以隔離壁所包圍的像素區域的黑色 矩陣的開口部印刷噴墨印刷用油墨時,局部發生油墨的塡 充不良’也就是發生“漏白”等像素缺陷問題。因此,在 局部發生漏白的狀態下製作的彩色濾光片,在漏白部分有 發生漏光的問題。 又,使用含有有機矽化合物或有機氟化合物的組成物 形成黑色矩陣時,首先,將上述組成物塗佈在基板表面整 體上。接著,透過具有所需圖案的光罩曝光,之後,進行 顯影處理而在基板表面上形成黑色矩陣。對於形成有如此 201032002 黑色矩陣的基板,特別是形成隔離壁高度較大的黑色矩陣 時,在隔離壁所包圍的黑色矩陣的開口部所對應的基板表 面上,有殘存有機矽化合物或有機氟化合物的情況。 在此,特開2007-2563 5 7號公報所揭示的方法,雖然 規定了在成爲隔離壁的黑色矩陣表面之氟離子檢測強度, 但是沒有規定黑色矩陣的開口部所對應的基板表面之氟離 子檢測強度。因此,特開2007-256357號公報中揭示的方 法不能說是解決了在黑色矩陣的開口部所對應的基板表面 上殘存有機氟化合物時所發生的問題的方法。 有機矽化合物或有機氟化合物在黑色矩陣的開口部所 對應的基板表面上殘存時,於形成有彩色像素層的該基板 表面亦賦予了對於噴墨印刷用油墨的疏液性,由於開口部 的基板表面的疏液性導致發生漏白。 【發明內容】 因此,本發明之目的係提供一種感光性黑色樹脂組成 物,該感光性黑色樹脂組成物可以形成成爲隔離壁的黑色 矩陣,其不實施如電漿處理之特殊表面處理,可以防止由 於鄰接的彩色像素層間的異色油墨的混入而發生的混色, 可以防止局部的漏白等像素缺陷的發生。又,提供一種使 用該感光性黑色樹脂組成物製作之黑色矩陣基板、以及使 用該黑色矩陣基板的彩色濾光片之製造方法。 本發明之感光性黑色樹脂組成物,係用於在基板上具 有多個彩色像素層及位於鄰接的彩色像素層間之黑色矩陣 -8 - 201032002 的彩色濾光片中形成前述黑色矩陣之感光性黑色樹脂組成 物,其特徵在於, 以相對於全部固體成分的氟含量計’含有在側鏈上具 有氟烷基之氟系界面活性劑0.0008〜0.005質量%。 依據本發明,係一種用於在基板上具有多個彩色像素 層及位於鄰接的彩色像素層間之黑色矩陣之彩色濾光片中 形成前述黑色矩陣之感光性黑色樹脂組成物。且’該感光 Φ 性黑色樹脂組成物中,以相對於全部固體成分的氟含量計 ,含有在側鏈上具有氟烷基之氟系界面活性劑0.0008〜 0.005質量%。以相對於全部固體成分的氟含量計,含有規 定量氟系界面活性劑之感光性黑色樹脂組成物,係可形成 成爲隔離壁的黑色矩陣之感光性黑色樹脂組成物,其被賦 予相對於噴墨印刷用油墨的疏液性,可以防止由於鄰接的 彩色像素層間的異色油墨混入而發生的混色,確保均勻的 疏液性,可以防止局部的漏白等像素缺陷的發生。 ❹ 在側鏈上具有氟烷基之氟系界面活性劑之含量,以相 對於全部固體成分的氟含量計,未達0.0 008質量%時,形 成的黑色矩陣的疏液性不充分,不僅不能充分發揮鄰接的 彩色像素層間的混色防止效果,而且在黑色矩陣表面發生 如貝納爾旋流窩的結構而不佳。另外,在側鏈上具有氟烷 基之氟系界面活性劑之含量以相對於全部固體成分的氟含 量計,超過0.005質量%時’雖然基板中央部沒有問題,但 是基板外周部(邊緣部)附近的彩色像素層中發生局部漏 白等像素缺陷。 -9 ** 201032002 本發明之感光性黑色樹脂組成物中,上述氟系界面活 性劑較好是以全部結構單位總計100質量%爲基準,具有下 述式(1 a )所示的結構單位1〜40質量%、下述式(1 b )所 示的結構單位20〜98質量%、以及下述式(1 c )所示的結 構單位1〜40質量%之比例的化合物。 【化1】 R1 I —ch2 — c —I x'-l'-r2 (la) R3I —Chfe —C ——I X〇-L2-(-R4-〇^· R5 (1b) R6 I —ch2 — c --I x2 - L3 - Rf201032002 VI. Description of the Invention: [Technical Field] The present invention relates to a photosensitive black resin composition, a black matrix substrate, and a method of producing a color filter. More specifically, it relates to a photosensitive black resin composition for forming a partition wall pattern constituting a color filter, and particularly relates to a black matrix for forming a light-shielding partition wall for producing a color filter by inkjet printing. The photosensitive black resin composition is also related to a black matrix substrate prepared using the photosensitive black resin composition and a method of producing a color filter using the black matrix substrate. [Prior Art] A color filter is an optical element that is incorporated in a liquid crystal display device to color a display image, or an optical element that is incorporated in a solid-state image sensor to obtain a color image. These color filters are known to have a color filter having a colored pattern including a plurality of color φ color pixel layers formed adjacent to each other on the same plane on the substrate. Here, the colored pattern is composed of, for example, a color pixel layer of three primary colors of a red pixel layer, a green pixel layer, and a blue pixel layer, and a black matrix serving as a light shielding layer is formed between adjacent color pixel layers. The color pixel layers of the various colors are transparent layers colored in various colors, and the black matrix is black and substantially transparent to visible light. As a general method for producing a color filter, it is known that a colored photosensitive resin composition layer is formed on a substrate, and the colored photosensitive resin composition layer is composed of a solid component of a colored photosensitive resin composition containing various colorants. A method of manufacturing a photolithographic etching method in which a color pattern is formed on a substrate by irradiating light through a photomask and utilizing the properties of a coloring photosensitive resin composition layer which is soluble in a developing solution to be changed from -5 to 201032002 (for example, Japanese Patent Laid-Open No. 7_27 1 020). However, in the method of manufacturing a color filter of a photolithography method, after the coloring photosensitive resin composition is applied onto the surface of the substrate, it is necessary to repeat the step of exposing through the mask and developing and removing unnecessary portions, and the manufacturing steps are complicated. . Further, the cost of the expensive reticle, the depreciation cost of equipment such as coating equipment, exposure equipment, and developing equipment are necessary. Therefore, in order to simplify the manufacturing steps and to reduce the manufacturing cost, instead of the photolithography method, a method of forming a color pixel layer by an inkjet printing method has been proposed. In the inkjet printing method, a black matrix having a light-shielding property is generally used as a partition wall, and a color pixel layer is formed by printing ink for inkjet printing on an opening of the black matrix. However, when printing is performed, inkjet printing is performed. Since the solid content concentration of the ink is limited, in order to obtain a desired layer thickness and color density, it is necessary to print a plurality of times of inkjet printing with respect to the opening volume (opening area X partition wall height) of the black matrix. Use ink. As a result, the ink for printing inkjet printing overflows from the opening, and the ink which exceeds the black matrix of the partition wall is also infiltrated into the adjacent opening portion to cause "mixing". In view of the problem of the "color mixing", it has been proposed to fluorinate only the surface of the black matrix by plasma treatment in an atmosphere of a fluorine compound such as tetrafluoromethane, thereby increasing the liquid repellency with respect to the ink for inkjet printing. In addition, a method of adding an organic ruthenium compound or an organic fluorine compound to form a black matrix which imparts lyophobic property to ink of inkjet printing oil-6-201032002 has been proposed (for example, Japanese Patent No. 3328297). (Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. 2006-163233). In the case where the total detection intensity of all the negative ions on the surface of the black matrix which is the partition wall is 1 in total, the detection intensity of the fluoride ion is 0.3 to 0.6. The method. In the method disclosed in Japanese Patent No. 3328297, the surface of the black matrix is fluorinated by plasma treatment, so that the liquid repellency on the surface of the black matrix with respect to the ink for φ inkjet printing becomes a uniform sentence, but the plasma treatment step It is necessary to be a simplistic method. In the method disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. 2006- 1 63 23 3, a black matrix is formed using a composition containing an organic ruthenium compound or an organic fluorine compound. The liquid-repellent black matrix of the ink for inkjet printing can prevent color mixture due to the incorporation of the color ink in the adjacent color pixel layers, but is insufficient in ensuring uniform liquid repellency of the entire black matrix surface. When the liquid repellency of the black matrix surface φ is not uniform, when the ink for inkjet printing is printed on the opening of the black matrix in the pixel region surrounded by the partition wall, the ink is poorly filled, that is, the "leakage" occurs. Pixel defect issues. Therefore, in the color filter produced in a state where the whitening occurs locally, there is a problem that light leakage occurs in the white portion. Further, when a black matrix is formed using a composition containing an organic cerium compound or an organic fluorine compound, first, the above composition is applied onto the entire surface of the substrate. Next, exposure is performed through a photomask having a desired pattern, and then development processing is performed to form a black matrix on the surface of the substrate. In the case of the substrate in which the black matrix of 201032002 is formed, in particular, when a black matrix having a large partition wall height is formed, an organic germanium compound or an organic fluorine compound remains on the surface of the substrate corresponding to the opening of the black matrix surrounded by the partition wall. Case. In the method disclosed in Japanese Laid-Open Patent Publication No. 2007-2563, the fluorine ion detection intensity of the surface of the black matrix which is the partition wall is specified, but the fluoride ion of the substrate surface corresponding to the opening of the black matrix is not defined. Detection intensity. Therefore, the method disclosed in Japanese Laid-Open Patent Publication No. 2007-256357 cannot be said to solve the problem that occurs when the organic fluorine compound remains on the surface of the substrate corresponding to the opening of the black matrix. When the organic ruthenium compound or the organic fluorine compound remains on the surface of the substrate corresponding to the opening of the black matrix, the liquid repellency of the ink for inkjet printing is also imparted to the surface of the substrate on which the color pixel layer is formed, and the opening portion is provided. The lyophobicity of the surface of the substrate causes whitening to occur. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a photosensitive black resin composition which can be formed into a black matrix which is a partition wall which is not subjected to a special surface treatment such as plasma treatment and can be prevented. The color mixture which occurs due to the mixing of the color inks between the adjacent color pixel layers can prevent the occurrence of local pixel defects such as whitening. Further, a black matrix substrate produced using the photosensitive black resin composition and a method of producing a color filter using the black matrix substrate are provided. The photosensitive black resin composition of the present invention is used for forming a photosensitive black of the black matrix in a color filter having a plurality of color pixel layers on a substrate and a black matrix -8 - 201032002 located between adjacent color pixel layers The resin composition is characterized in that it contains 0.0008 to 0.005 mass% of a fluorine-based surfactant having a fluoroalkyl group in a side chain, based on the fluorine content of all the solid components. According to the present invention, there is provided a photosensitive black resin composition for forming the black matrix in a color filter having a plurality of color pixel layers on a substrate and a black matrix between adjacent color pixel layers. Further, the photosensitive Φ black resin composition contains a fluorine-based surfactant having a fluoroalkyl group in a side chain of 0.0008 to 0.005 mass% based on the fluorine content of the total solid content. A photosensitive black resin composition containing a predetermined amount of a fluorine-based surfactant based on the fluorine content of all the solid components is a photosensitive black resin composition of a black matrix which is a partition wall, which is imparted with respect to the spray. The liquid repellency of the ink for ink printing can prevent color mixture caused by the mixing of the color inks between adjacent color pixel layers, and ensure uniform liquid repellency, thereby preventing occurrence of local pixel defects such as whitening. ❹ The content of the fluorine-based surfactant having a fluoroalkyl group in the side chain is less than 0.0008% by mass based on the fluorine content of the total solid content, and the liquid matrix formed by the black matrix is insufficient, not only The effect of preventing color mixture between adjacent color pixel layers is sufficiently exerted, and a structure such as a Bernal swirl cell is not preferable on the surface of the black matrix. In addition, when the content of the fluorine-based surfactant having a fluoroalkyl group in the side chain is more than 0.005 mass% based on the fluorine content of the total solid content, the substrate peripheral portion has no problem, but the outer peripheral portion (edge portion) of the substrate A pixel defect such as partial whitening occurs in the nearby color pixel layer. -9 ** 201032002 In the photosensitive black resin composition of the present invention, the fluorine-based surfactant preferably has a structural unit 1 represented by the following formula (1 a ) based on 100% by mass of all structural units. ~40% by mass, a compound having a ratio of 20 to 98% by mass of the structural unit represented by the following formula (1b), and a structural unit of 1 to 40% by mass represented by the following formula (1c). [1] R1 I —ch2 — c —I x′−l'-r2 (la) R3I —Chfe —C ————————————————————————————————————————————————————————————————————————————————————————————————————————— c --I x2 - L3 - Rf

(1c)(1c)

[式中,R1、R3以及R6各自獨立地表示氫原子或碳原子數1 〜5之烷基,R2表示氫原子、碳原子數1〜5之烷基、羥基 、或-(8丨(0:1!3)2〇)„1-8丨((:113)3,尺4表示碳原子數2〜8之伸烷 基,R5表示氫原子 '碳原子數1〜12之烷基 '醯基、或碳 原子數6〜20之芳基;L1' L2、以及L3各自獨立地表示單 鍵、伸烷基或經取代伸烷基;X1表示-co2-、-CONY1·、或 伸芳基,X2表示-〇-、-C02-、-CONY2-、伸芳基、或2價雜 環殘基;Rf表示氟烷基;η表示2〜20之整數;又,m表示〇 〜3之整數,Y1以及Y2各自獨立地表示氫原子或碳原子數1 〜5之烷基]。 根據本發明,感光性黑色樹脂組成物中含有的氟系界 面活性劑爲具有特定結構的化合物。由此,感光性黑色樹 脂組成物爲可形成黑色矩陣的感光性黑色樹脂組成物,其 可更有效地防止鄰接的彩色像素間的混色,可更有效地防 止漏白等像素缺陷的發生。 -10 - 201032002 又本發明係一種黑色矩陣基板,其係用於製造在基板 上具有多個彩色像素層及位於鄰接彩色像素層間之黑色矩 陣的彩色濾光片的黑色矩陣基板, 其係形成有使用前述感光性黑色樹脂組成物製備之黒 色矩陣的黑色矩陣基板。 根據本發明,黑色矩陣基板係用於製造彩色濾光片之 形成有黑色矩陣之基板,前述彩色濾光片係在基板上具有 •多個彩色像素層及位於鄰接的彩色像素層間的成爲隔離壁 的黑色矩陣。並且,黑色矩陣基板係於基板上形成使用前 述感光性黑色樹脂組成物製備的黑色矩陣者。此等黑色矩 陣基板具有以均勻狀態被賦予相對於噴墨印刷用油墨的疏 液性所成之成爲隔離壁的黑色矩陣。因此,可以防止藉由 噴墨印刷法在黑色矩陣的開口部印刷的噴墨印刷用油墨超 出成爲隔離壁的黑色矩陣而使油墨侵入鄰接的開口部發生 混色,同時也可以防止發生局部地油墨塡充不良的問題、 φ 即防止發生漏白等像素缺陷。 又本發明之黑色矩陣基板中,在藉由飛行時間型二次 離子質量分析計(TOF-SIMS )檢測的負離子的檢測結果 中,全部負離子的檢測強度的總計爲1時的氟離子的檢測 強度比,於黑色矩陣表面爲0.15以上且未達0.3’並且於黑 色矩陣的開口部所對應的基板表面較佳〇·〇5以下。 依據本發明,黑色矩陣基板’在藉由飛行時間型二次 離子質量分析計(TOF-S IMS )檢測的負離子的檢測結果 中,全部負離子的檢測強度的總計爲1而公稱化時的氟離 -11 - 201032002 子的檢測強度比,於黑色矩陣表面爲0.15以上且未達0.3, 並且於黑色矩陣的開口部所對應的基板表面爲0.05以下。 此等黑色矩陣基板具有以均勻狀態被賦予相對於噴墨印刷 用油墨的疏液性所成之成爲隔離壁的黑色矩陣。因此,可 以防止藉由噴墨印刷法在黑色矩陣的開口部印刷的噴墨印 刷用油墨超出成爲隔離壁的黑色矩陣而使油墨侵入鄰接的 開口部發生混色,同時也可以防止發生局部地油墨塡充不 良的問題、即防止發生漏白等像素缺陷。 成爲隔離壁的黑色矩陣的表面氟離子的檢測強度比未 達〇· 1 5時,黑色矩陣相對於噴墨印刷用油墨的疏液性不充 分,無法充分發揮鄰接的彩色像素層間的混色防止效果。 另外’黑色矩陣表面之氟離子檢測強度比爲0.3以上時, 基板外周部(邊緣部)附近的彩色像素層發生局部的漏白 等像素缺陷。進而,黑色矩陣的開口部所對應的基板表面 氟離子的檢測強度比超過0.05時,亦成爲對形成有彩色像 素層的基板表面賦予相對於噴墨印刷用油墨的疏液性,而 使基板外周部(邊緣部)附近的彩色像素層發生局部的漏 白等像素缺陷,同時因黑色矩陣表面的疏液性引起的混色 防止效果降低。 另外,本發明之黑色矩陣基板中,黑色矩陣的膜厚較 佳爲1.2μιη以上、3·0μιη以下。 根據本發明,黑色矩陣基板所具有的黑色矩陣的膜厚 爲1.2〜3.0 μηι。膜厚未達1.2 μιη時,無法在黑色矩陣的開 口部塡充爲了達成顏色再現所必要的色濃度時的足夠量的 -12- 201032002 油墨,故而不佳。膜厚超過3 ·0μιη時,不僅難於製 形成高精度的隔離壁圖案的黑色矩陣基板,而且使 色矩陣基板製造彩色濾光片時,彩色像素層和隔離 低差變大,故使液晶胞的設計變得困難,而不佳。 另外,本發明係一種彩色濾光片之製造方法, 色濾光片係在基板上具有多個彩色像素層及位於鄰 色像素層間的黑色矩陣,該方法之特徵在於包括: φ 使用前述感光性黑色樹脂組成物,在基板上形 矩陣,製備黑色矩陣基板之黑色矩陣基板製備步驟 在黑色矩陣基板上形成之黑色矩陣的開口部所 隔離壁所包圍的像素區域中,藉由噴墨印刷方式印 印刷用油墨,形成彩色像素層之像素層形成步驟。 根據本發明,彩色濾光片之製造方法係在基板 多個彩色像素層及位於鄰接的彩色像素層間的黑色 彩色濾光片之製造方法,其包括黑色矩陣基板製備 參 像素層形成步驟。黑色矩陣基板製備步驟中,使用 光性黑色樹脂組成物,在基板上形成以均勻狀態被 對於噴墨印刷用油墨的疏液性所成之成爲隔離壁的 陣’而製備黑色矩陣基板。並且,像素層形成步驟 黑色矩陣基板上形成之黑色矩陣的開口部所對應之 所包圍的像素區域中,藉由噴墨印刷方式印刷噴墨 油墨,形成彩色像素層。像素層形成步驟中,由於 以均勻狀態被賦予相對於噴墨印刷用油墨的疏液性 壁的黑色矩陣基板中的隔離壁所包圍的像素區域中 備能夠 用該黑 壁的尚 前述彩 接的彩 成黑色 ,及 對應之 刷噴墨 上具有 矩陣之 步驟及 前述感 賦予相 黑色矩 中,在 隔離壁 印刷用 在具有 之隔離 印刷油 -13- 201032002 墨,故可製造可防止超過成爲隔離壁的黑色矩陣而在鄰接 的開口部侵入油墨發生混色、可防止發生局部地油墨塡充 不良的問題、即可防止發生漏白等像素缺陷之彩色濾光片 【實施方式】 本發明的目的、特色以及優點藉由下述的詳細說明和 附圖可更加明確。 以下參考附圖詳細說明本發明之較佳實施方式。 本發明之感光性黑色樹脂組成物係用於形成彩色濾光 片的黑色矩陣之組成物,所述彩色濾光片係在基板上具有 多個彩色像素層及位於鄰接的彩色像素層間之成爲隔離壁 的黑色矩陣。感光性黑色樹脂組成物可爲負型,亦可爲正 型’但更佳爲可設定高光學濃度之負型感光性樹脂組成物 (負型感光性黑色樹脂組成物) 負型感光性黑色樹脂組成物含有遮光劑、黏合劑樹脂 、具有烯屬不飽和鍵之可加成聚合之化合物、光聚合引發 劑、光聚合引發助劑 '後述之氟系界面活性劑及溶劑。 遮光劑可爲染料亦可爲有機或無機顏料。又,亦可將 染料與顏料以混合狀態使用。作爲無機顏料,可舉出如金 屬氧化物或金屬錯鹽之金屬化合物,具體而言,可舉例有 鐵、鈷、鋁、鎘、鉛、銅、鈦、鎂、鉻、鋅、銻等金屬的 -14- 201032002 氧化物或複合金屬氧化物、氮化物、氮氧化物。又,作爲 有機顏料,可舉出顏色索引(The Society of Dyers and Colourists公司發行)中分類爲顏料的化合物。 特別是,形成黑色矩陣時,使用黑色顏料作爲遮光劑 。作爲黑色顏料,例如,可舉出碳黑、特開平5_31 1 1〇9號 公報或特開平6-11613號公報等記載的石墨、特開平4_ 3 22 219號公報或特開平3-2745〇3號公報等記載的無機黑色 ❹ 顏料、特開平2-216102號公報等記載的偶氮系黑色素、 C.I.顔料黑1、C.I.顏料黑7等有機黑色顏料等。著色爲黑 色的感光性黑色樹脂組成物進而可含有紅色顏料、綠色顏 料、藍色顏料、黃色顏料、青色顏料、品紅色顏料等作爲 顏料。 至於遮光劑之粒徑,以平均粒徑計,較佳爲0.005〜 0.2μιη,更佳爲0.01〜Ο.ΐμπι。具有此等粒徑之遮光劑例如 可藉由捏合法等公知方法製造。 φ 另外,相對於感光性黑色樹脂組成物之全部固體成分 ,以質量百分率計,較佳含有遮光劑5〜30質量%。若遮光 劑含量小於5質量%,則不僅無法以規定的膜厚形成具有充 分光學濃度的遮光性隔離壁,而且發生隔離壁截面形狀的 “褶皺”或“場邊”之不良影響,故而不佳。又’若遮光 劑含量超過3 0質量%,則感光性黒色組成物的流動性降低 ,難以形成均勻膜厚的隔離壁。 黏合劑樹脂係在負型感光性黑色樹脂組成物中’對於 使用該感光性黑色樹脂組成物形成的樹脂組成物層賦予其 -15- 201032002 光線未照射區域溶解於顯影液之性質的成分。又,黏合劑 樹脂亦具有在使用感光性黑色樹脂組成物形成的樹脂組成 物層中,作爲使遮光劑分散的分散介質的功能。 作爲負型感光性黑色樹脂組成物中使用的黏合劑樹脂 ,例如,可舉例有丙烯酸系共聚物、使分子中具有2個以 上環氧基之環氧化合物與羧酸之反應産物進而與多元羧酸 的酸酐反應所得之聚羧酸樹脂等。 作爲丙烯酸系共聚物,例如,可舉例含有羧基的單體 及可與其共聚合的其他單體的共聚物。 作爲含有羧基之單體,例如,可舉例有不飽和單羧酸 、不飽和二羧酸、不飽和三羧酸等之不飽和多元羧酸等分 子中具有至少1個羧基之不飽和羧酸。其中,作爲不飽和 單羧酸,例如,可舉例有丙烯酸、甲基丙烯酸、巴豆酸、 α -氯丙烯酸、桂皮酸等。作爲不飽和二羧酸,例如,可舉 例有馬來酸、富馬酸、衣康酸、檸康酸、中康酸等。不飽 和多元羧酸可爲其酸酐,具體可爲馬來酸酐、衣康酸酐、 檸康酸酐等。又,不飽和多元羧酸可爲其單(2-甲基丙烯 醯氧基烷基)酯,具體地,例如琥珀酸單(2-丙烯醯氧基 乙基)酯、琥珀酸單(2-甲基丙烯醯氧基乙基)酯、鄰苯 二甲酸單(2-丙烯醯氧基乙基)酯、鄰苯二甲酸單(2-甲 基丙烯醯氧基乙基)酯等。不飽和多元羧酸可爲其兩末端 二羧基聚合物之單(甲基)丙烯酸酯,具體爲ω-羧基聚己 內酯單丙烯酸酯、ω-羧基聚己內酯單甲基丙烯酸酯等。上 述含有羧基的單體可分別單獨使用或混合2種以上使用。 -16- 201032002 作爲可與上述含有羧基的單體共聚合的其他單 如,可舉例有苯乙烯、α-甲基苯乙烯、鄰-乙烯基 間-乙烯基甲苯、對-乙烯基甲苯、對-氯苯乙烯、多 基苯乙烯、間-甲氧基苯乙烯、對-甲氧基苯乙烯、丨 基苄基甲基醚、間-乙烯基苄基甲基醚、對-乙烯基 基醚、鄰-乙烯基苄基縮水甘油基醚、間-乙烯基苄 甘油基醚、對-乙烯基苄基縮水甘油基醚、茚等芳 φ 烯基化合物;丙烯酸甲酯、甲基丙烯酸甲酯、丙烯 、甲基丙烯酸乙酯、丙烯酸正丙酯、甲基丙烯酸正 丙烯酸異丙酯、甲基丙烯酸異丙酯、丙烯酸正丁酯 丙烯酸正丁酯、丙烯酸異丁酯、甲基丙烯酸異丁酯 酸第二丁酯、甲基丙烯酸第二丁酯、丙烯酸第三丁 基丙烯酸第三丁酯、丙烯酸2-羥基乙酯、甲基丙烯 基乙酯、丙烯酸2-羥基丙酯、甲基丙烯酸2-羥基丙 烯酸3-羥基丙酯、甲基丙烯酸3-羥基丙酯、丙烯酸 φ 丁酯、甲基丙烯酸2-羥基丁酯、丙烯酸3-羥基丁酯 丙烯酸3-羥基丁酯、丙烯酸4-羥基丁酯、甲基丙烯 基丁酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、丙烯 、甲基丙烯酸苄酯、丙烯酸環己酯、甲基丙烯酸環 丙烯酸苯酯、甲基丙烯酸苯酯、丙烯酸2-甲氧基乙 基丙烯酸2-甲氧基乙酯、丙烯酸2-苯氧基乙酯、甲 酸2-苯氧基乙酯、甲氧基二乙二醇丙烯酸酯、甲氧 二醇甲基丙烯酸酯、甲氧基三乙二醇丙烯酸酯、甲 乙二醇甲基丙烯酸酯、甲氧基丙二醇丙烯酸酯、甲 體,例 甲苯、 ® -甲氧 郎-乙烯 苄基甲 基縮水 香族乙 酸乙酯 丙酯、 、甲基 、丙烯 酯、甲 酸2-羥 酯、丙 2-羥基 、甲基 酸4-經 酸苄酯 己酯、 酯、甲 基丙烯 基二乙 氧基三 氧基丙 -17- 201032002 二醇甲基丙烯酸酯、甲氧基二丙二醇丙烯酸酯、甲氧基二 丙二醇甲基丙烯酸酯、丙烯酸異冰片基酯、甲基丙烯酸異 冰片基酯、丙烯酸二環戊二烯基酯、甲基丙烯酸二環戊二 烯基酯、丙烯酸2-羥基-3-苯氧基丙酯、甲基丙烯酸2-羥 基-3-苯氧基丙酯、甘油單丙烯酸酯、甘油單甲基丙烯酸酯 等之不飽和羧酸酯類;丙烯酸2-胺基乙酯、甲基丙烯酸2-胺基乙酯' 丙烯酸2-二甲胺基乙酯、甲基丙烯酸2-二甲胺 基乙酯、丙烯酸2-胺基丙酯、甲基丙烯酸2-胺基丙酯、丙 烯酸2-二甲胺基丙酯、甲基丙烯酸2-二甲胺基丙酯、丙烯 酸3-胺基丙酯、甲基丙烯酸3-胺基丙酯、丙烯酸3-二甲胺 基丙酯、甲基丙烯酸3 -二甲胺基丙酯等之不飽和羧酸胺基 烷基酯類;丙烯酸縮水甘油酯、甲基丙烯酸縮水甘油酯等 不飽和羧酸縮水甘油酯類;乙酸乙烯酯、丙酸乙烯酯、丁 酸乙烯酯、苯甲酸乙烯酯等羧酸乙烯酯類;乙烯基甲基醚 、乙烯基乙基醚、烯丙基縮水甘油基醚等不飽和醚類;丙 烯腈、甲基丙烯腈、(X-氯丙烯腈、氰化亞乙烯等氰化乙烯 基化合物;丙烯醯胺、甲基丙烯醯胺、α-氯丙烯醯胺、N-2-羥基乙基丙烯醯胺、Ν-2-羥基乙基甲基丙烯醯胺等不飽 和醯胺類;馬來醯亞胺、Ν-苯基馬來醯亞胺、Ν-環己基馬 來醯亞胺等不飽和醯亞胺類;1,3-丁二烯、異戊二烯、氯 丁二烯等脂肪族共軛二烯類;聚苯乙烯、聚丙烯酸甲酯、 聚甲基丙烯酸甲酯、聚丙烯酸正丁酯、聚甲基丙烯酸正丁 酯、於聚矽氧烷之聚合物分子鏈的末端具有單丙烯醯基或 者單甲基丙烯醯基之大分子單體類等。該等單體可以分別 -18- 201032002 單獨使用或混合2種以上使用。 上述共聚物中含有羧基的單體單位之含量’以質量百 分率計’通常爲1〇〜50質量%左右,較佳15〜40質量%左 右。 作爲上述丙烯酸系聚合物’例如’可舉例有(甲基) 丙烯酸/ (甲基)丙烯酸甲酯共聚物、(甲基)丙烯酸/ ( 甲基)丙烯酸苄酯共聚物' (甲基)丙烯酸/ (甲基)丙 φ 烯酸2-羥基乙酯/(甲基)丙烯酸苄酯共聚物、(甲基)丙 烯酸/ (甲基)丙烯酸甲酯/聚苯乙烯大分子單體共聚物' (甲基)丙烯酸/ (甲基)丙烯酸甲酯/聚甲基丙烯酸甲醋 大分子單體共聚物、(甲基)丙烯酸/ (甲基)丙烯酸节 酯/聚苯乙烯大分子單體共聚物' (甲基)丙烯酸/ (甲基 )丙烯酸苄酯/聚甲基丙烯酸甲基酯大分子單體共聚物、 (甲基)丙烯酸/ (甲基)丙烯酸2-羥基乙酯/(甲基)丙 烯酸苄酯/聚苯乙烯大分子單體共聚物、(甲基)丙烯酸/ φ (甲基)丙烯酸2-羥基乙酯/ (甲基)丙烯酸苄酯/聚甲基 丙烯酸甲酯大分子單體共聚物、甲基丙烯酸/苯乙烯/ (甲 基)丙烯酸苄酯/N-苯基馬來醯亞胺共聚物、(甲基)丙 烯酸/琥珀酸單(2_丙烯醯氧基乙基)酯/苯乙烯/ (甲基) 丙烯酸苄酯/N-苯基馬來醯亞胺共聚物、(甲基)丙烯酸/ 琥珀酸單(2-丙烯醯氧基乙基)酯/苯乙烯/ (甲基)丙烯 酸烯丙酯/N-苯基馬來醯亞胺共聚物、(甲基)丙烯酸/ ( 甲基)丙烯酸苄酯/N-苯基馬來醯亞胺/苯乙烯/甘油單(甲 基)丙烯酸酯共聚物等。又,所謂(甲基)丙烯酸酯表示 -19 - 201032002 丙烯酸酯或甲基丙烯酸酯。 其中’較佳爲甲基丙烯酸苄酯/甲基丙烯酸共聚物、 甲基丙烯酸苄酯/甲基丙烯酸/苯乙烯共聚物、甲基丙烯酸 甲酯/甲基丙烯酸共聚物、甲基丙烯酸甲酯/甲基丙烯酸/苯 乙烯共聚物等。 上述丙烯酸系聚合物之聚苯乙烯換算重量平均分子量 較佳爲3000〜400000之範圍,更佳爲5000〜1 00000之範圍 。又,酸値較佳爲30〜250,更佳爲60〜180之範圍。Wherein R1, R3 and R6 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and R2 represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a hydroxyl group, or -(8丨(0) :1!3)2〇)„1-8丨((:113)3, rule 4 represents an alkylene group having 2 to 8 carbon atoms, and R5 represents a hydrogen atom 'alkyl group having 1 to 12 carbon atoms'. a group or an aryl group having 6 to 20 carbon atoms; L1' L2 and L3 each independently represent a single bond, an alkyl group or a substituted alkyl group; and X1 represents a -co2-, -CONY1, or an aryl group. , X2 represents -〇-, -C02-, -CONY2-, an extended aryl group, or a divalent heterocyclic residue; Rf represents a fluoroalkyl group; η represents an integer of 2 to 20; further, m represents an integer of 〇~3 And Y1 and Y2 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. According to the invention, the fluorine-based surfactant contained in the photosensitive black resin composition is a compound having a specific structure. The photosensitive black resin composition is a photosensitive black resin composition capable of forming a black matrix, which can more effectively prevent color mixture between adjacent color pixels, and can more effectively prevent pixel defects such as white leakage. -10 - 201032002 The present invention is also a black matrix substrate for manufacturing a black matrix substrate having a plurality of color pixel layers on a substrate and a color filter located adjacent to the black matrix between the color pixel layers. A black matrix substrate having a enamel matrix prepared using the photosensitive black resin composition is formed. According to the present invention, a black matrix substrate is used for manufacturing a color filter formed with a black matrix substrate, and the color filter is attached to a substrate. a black matrix serving as a partition wall between the plurality of color pixel layers and the adjacent color pixel layers, and the black matrix substrate is formed on the substrate to form a black matrix prepared using the photosensitive black resin composition. The matrix substrate has a black matrix which is a partition wall which is imparted with a liquid repellency with respect to the ink for inkjet printing in a uniform state. Therefore, inkjet printing which is printed on the opening of the black matrix by the inkjet printing method can be prevented. The ink penetrates the black matrix which becomes the partition wall, and the ink invades the adjacent opening part. The color mixing is also possible, and it is also possible to prevent the problem of local ink squeezing failure, φ, that is, preventing pixel defects such as whitening. Further, in the black matrix substrate of the present invention, the time-of-flight secondary ion mass spectrometer (TOF) -SIMS) In the detection result of the negative ions detected, the detection intensity ratio of the fluoride ions when the total detection intensity of all the negative ions is 1 is 0.15 or more and less than 0.3' on the surface of the black matrix, and corresponds to the opening of the black matrix. The surface of the substrate is preferably 〇·〇5 or less. According to the present invention, the detection intensity of all negative ions in the detection result of the negative ions detected by the time-of-flight secondary ion mass spectrometer (TOF-S IMS ) When the total amount is 1 and the nominal ratio of fluorine to -11 - 201032002 is 0.15 or more and less than 0.3 on the surface of the black matrix, the surface of the substrate corresponding to the opening of the black matrix is 0.05 or less. These black matrix substrates have a black matrix which is a partition wall which is imparted with a liquid repellency with respect to the ink for inkjet printing in a uniform state. Therefore, it is possible to prevent the ink for inkjet printing printed on the opening of the black matrix by the inkjet printing method from exceeding the black matrix serving as the partition wall, thereby causing the ink to enter the adjacent opening portion to be mixed, and it is also possible to prevent the ink from being locally generated. A problem of poor charging, that is, preventing pixel defects such as whitening. When the detection intensity ratio of the fluorine ion on the surface of the black matrix which becomes the partition wall is less than 〇·15, the liquid repellency of the black matrix with respect to the ink for inkjet printing is insufficient, and the color mixing prevention effect between adjacent color pixel layers cannot be sufficiently exhibited. . Further, when the fluorine ion detecting intensity ratio of the black matrix surface is 0.3 or more, a pixel defect such as partial whitening occurs in the color pixel layer in the vicinity of the outer peripheral portion (edge portion) of the substrate. Further, when the detection intensity ratio of the fluorine ion on the surface of the substrate corresponding to the opening of the black matrix exceeds 0.05, the liquid repellency with respect to the ink for inkjet printing is applied to the surface of the substrate on which the color pixel layer is formed, and the periphery of the substrate is made The color pixel layer in the vicinity of the portion (edge portion) is partially defective in pixel leakage such as whitening, and the color mixing prevention effect due to the liquid repellency of the black matrix surface is lowered. Further, in the black matrix substrate of the present invention, the film thickness of the black matrix is preferably 1.2 μm or more and 3.0 μm or less. According to the present invention, the black matrix of the black matrix substrate has a film thickness of 1.2 to 3.0 μm. When the film thickness is less than 1.2 μm, a sufficient amount of -12-201032002 ink in order to achieve a color density necessary for color reproduction cannot be filled in the opening portion of the black matrix, which is not preferable. When the film thickness exceeds 3·0 μm, it is difficult to form a black matrix substrate having a high-precision barrier pattern, and when the color filter substrate is used to manufacture a color filter, the color pixel layer and the isolation low difference become large, so that the liquid crystal cell is made. Design has become difficult and not good. In addition, the present invention is a method of manufacturing a color filter having a plurality of color pixel layers and a black matrix between adjacent color pixel layers on a substrate, the method comprising: φ using the aforementioned photosensitivity a black resin composition having a matrix on a substrate, and a black matrix substrate preparing step of preparing a black matrix substrate is printed by inkjet printing in a pixel region surrounded by a partition wall of an opening of a black matrix formed on a black matrix substrate The printing ink forms a pixel layer forming step of the color pixel layer. According to the present invention, a method of manufacturing a color filter is a method of manufacturing a plurality of color pixel layers of a substrate and a black color filter between adjacent color pixel layers, comprising a black matrix substrate preparing a pixel layer forming step. In the black matrix substrate preparation step, a black matrix substrate was prepared by forming a matrix of spacers formed in a uniform state by the liquid repellency of the ink for inkjet printing using a photosensitive black resin composition. Further, in the pixel layer forming step, the pixel region surrounded by the opening portion of the black matrix formed on the black matrix substrate is printed by inkjet printing to form a color pixel layer. In the pixel layer forming step, the pixel region surrounded by the partition wall in the black matrix substrate which is provided with the liquid-repellent wall of the inkjet printing ink in a uniform state is provided with the color-bonding of the black wall. The color is black, and the corresponding brush inkjet has a matrix step and the aforementioned sensation imparting a phase black moment, and the partition wall is printed with the isolated printing oil-13-201032002 ink, so that it can be prevented from exceeding the partition wall. The black matrix is infiltrated into the ink in the adjacent opening portion to prevent coloring, and it is possible to prevent local ink charging failure, and to prevent color defects such as whitening. [Embodiment] The object and features of the present invention And the advantages will be more apparent by the following detailed description and the accompanying drawings. The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. The photosensitive black resin composition of the present invention is used for forming a composition of a black matrix of a color filter having a plurality of color pixel layers on a substrate and being separated between adjacent color pixel layers The black matrix of the wall. The photosensitive black resin composition may be of a negative type or a positive type, but more preferably a negative photosensitive resin composition capable of setting a high optical density (negative photosensitive black resin composition) negative photosensitive black resin The composition contains an opacifier, a binder resin, an addition polymerizable compound having an ethylenically unsaturated bond, a photopolymerization initiator, a photopolymerization initiator, a fluorine-based surfactant described later, and a solvent. The opacifier can be a dye or an organic or inorganic pigment. Further, the dye and the pigment may be used in a mixed state. The inorganic pigment may, for example, be a metal compound such as a metal oxide or a metal salt, and specific examples thereof include metals such as iron, cobalt, aluminum, cadmium, lead, copper, titanium, magnesium, chromium, zinc, and antimony. -14- 201032002 Oxide or composite metal oxides, nitrides, nitrogen oxides. Further, examples of the organic pigment include compounds classified as pigments in a color index (issued by The Society of Dyers and Colourists). In particular, when a black matrix is formed, a black pigment is used as an opacifier. Examples of the black pigments include those described in the publications of JP-A-H05-311-1, pp. 6-11613, and JP-A-6-11613 Inorganic black enamel pigments, such as azomethanone, CI pigment black 1, and CI pigment black 7, described in JP-A No. 2-216102, and the like. The photosensitive black resin composition colored in black may further contain a red pigment, a green pigment, a blue pigment, a yellow pigment, a cyan pigment, a magenta pigment or the like as a pigment. The particle diameter of the opacifier is preferably from 0.005 to 0.2 μm, more preferably from 0.01 to Ο.ΐμπι, based on the average particle diameter. The light-shielding agent having such a particle diameter can be produced, for example, by a known method such as kneading. Further, it is preferable to contain the light-shielding agent in an amount of 5 to 30% by mass based on the total solid content of the photosensitive black resin composition. When the content of the light-shielding agent is less than 5% by mass, it is not possible to form a light-shielding partition wall having a sufficient optical density with a predetermined film thickness, and it is also inferior to the "pleat" or "side edge" of the cross-sectional shape of the partition wall, which is not preferable. . Further, when the content of the light-shielding agent exceeds 30% by mass, the fluidity of the photosensitive enamel composition is lowered, and it is difficult to form a partition having a uniform film thickness. The binder resin is a component of a negative photosensitive photosensitive resin composition, and a resin composition layer formed using the photosensitive black resin composition is imparted with a property of being dissolved in a developing solution in a region where the light is not irradiated from -15 to 201032002. Further, the binder resin also has a function as a dispersion medium for dispersing the light-shielding agent in the resin composition layer formed using the photosensitive black resin composition. The binder resin used in the negative photosensitive black resin composition may, for example, be an acrylic copolymer, a reaction product of an epoxy compound having two or more epoxy groups in a molecule and a carboxylic acid, and further a polycarboxylic acid. A polycarboxylic acid resin obtained by reacting an acid anhydride or the like. The acrylic copolymer may, for example, be a copolymer of a monomer having a carboxyl group and another monomer copolymerizable therewith. The monomer having a carboxyl group may, for example, be an unsaturated carboxylic acid having at least one carboxyl group in a molecule such as an unsaturated polycarboxylic acid such as an unsaturated monocarboxylic acid, an unsaturated dicarboxylic acid or an unsaturated tricarboxylic acid. Among them, examples of the unsaturated monocarboxylic acid include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, and cinnamic acid. The unsaturated dicarboxylic acid may, for example, be maleic acid, fumaric acid, itaconic acid, citraconic acid or mesaconic acid. The unsaturated polycarboxylic acid may be an acid anhydride thereof, and specifically may be maleic anhydride, itaconic anhydride, citraconic anhydride or the like. Further, the unsaturated polycarboxylic acid may be a mono(2-methylpropenyloxyalkyl)ester thereof, specifically, for example, succinic acid mono(2-propenyloxyethyl) ester, succinic acid mono(2- Methyl propylene methoxyethyl) ester, mono(2-propenyl methoxyethyl) phthalate, mono(2-methylpropenyloxyethyl) phthalate, and the like. The unsaturated polycarboxylic acid may be a mono(meth)acrylate of a di-carboxyl polymer at both ends thereof, specifically ω-carboxypolycaprolactone monoacrylate, ω-carboxypolycaprolactone monomethacrylate or the like. The above-mentioned carboxyl group-containing monomers may be used alone or in combination of two or more. -16-201032002 Other examples of copolymerizable with the above carboxyl group-containing monomer include styrene, α-methylstyrene, o-vinyl m-vinyltoluene, p-vinyltoluene, and the like. -chlorostyrene, polystyrene, m-methoxystyrene, p-methoxystyrene, mercaptobenzyl methyl ether, m-vinylbenzyl methyl ether, p-vinyl ether , o-vinylbenzyl glycidyl ether, m-vinylbenzyl glyceryl ether, p-vinylbenzyl glycidyl ether, an aryl φ alkenyl compound such as hydrazine; methyl acrylate, methyl methacrylate, Propylene, ethyl methacrylate, n-propyl acrylate, isopropyl methacrylate, isopropyl methacrylate, n-butyl acrylate, n-butyl acrylate, isobutyl methacrylate Second butyl ester, second butyl methacrylate, third butyl butyl acrylate, 2-hydroxyethyl acrylate, methacryl ethyl ester, 2-hydroxypropyl acrylate, methacrylic acid 2- 3-hydroxypropyl hydroxyacrylate, 3-hydroxypropyl methacrylate, Cyclobutyric acid acrylate, 2-hydroxybutyl methacrylate, 3-hydroxybutyl acrylate 3-hydroxybutyl acrylate, 4-hydroxybutyl acrylate, methacryl butyl acrylate, allyl acrylate, methacrylic acid Allyl ester, propylene, benzyl methacrylate, cyclohexyl acrylate, phenyl methacrylate phenyl acrylate, phenyl methacrylate, 2-methoxyethyl acrylate 2-methoxyethyl acrylate, acrylic acid 2 -phenoxyethyl ester, 2-phenoxyethyl formate, methoxy diethylene glycol acrylate, methoxy glycol methacrylate, methoxy triethylene glycol acrylate, methyl glycol methyl Acrylate, methoxypropylene glycol acrylate, methyl, for example, toluene, ® - methoxyur-vinylbenzyl methyl condensate, ethyl acetate propyl ester, methyl, propylene ester, 2-hydroxyester formate, C 2-Hydroxy, methyl acid 4-benzyl hexyl acrylate, ester, methacryl diethylene trioxypropane-17- 201032002 diol methacrylate, methoxydipropylene glycol acrylate, A Oxydipropylene glycol methacrylate, isobornyl acrylate, methyl Isobornyl enoate, dicyclopentadienyl acrylate, dicyclopentadienyl methacrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-hydroxy-3-benzene methacrylate Unsaturated carboxylic acid esters such as oxypropyl acrylate, glycerin monoacrylate, glycerol monomethacrylate; 2-aminoethyl acrylate, 2-aminoethyl methacrylate 2- 2-dimethylamino acrylate Ethyl ester, 2-dimethylaminoethyl methacrylate, 2-aminopropyl acrylate, 2-aminopropyl methacrylate, 2-dimethylaminopropyl acrylate, 2-dimethyl methacrylate Alkyl propyl ester, 3-aminopropyl acrylate, 3-aminopropyl methacrylate, 3-dimethylaminopropyl acrylate, 3-dimethylaminopropyl methacrylate, etc. Aminoalkyl esters; glycidyl esters of unsaturated carboxylic acid such as glycidyl acrylate and glycidyl methacrylate; vinyl acetate such as vinyl acetate, vinyl propionate, vinyl butyrate or vinyl benzoate Esters; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether; acrylonitrile, methyl propyl Acrylic acid, vinyl cyanide compound such as X-chloroacrylonitrile or vinyl cyanide; acrylamide, methacrylamide, α-chloropropenylamine, N-2-hydroxyethyl decylamine, hydrazine Unsaturated guanamines such as 2-hydroxyethyl methacrylamide; unsaturated quinones such as maleic imine, fluorene-phenyl maleimide, fluorene-cyclohexylmaleimide ; aliphatic conjugated dienes such as 1,3-butadiene, isoprene, chloroprene; polystyrene, polymethyl acrylate, polymethyl methacrylate, polybutyl acrylate, poly N-butyl methacrylate, a macromolecular monomer having a monopropenyl fluorenyl group or a monomethacryl fluorenyl group at the terminal of the polymer molecular chain of polyoxymethane. These monomers may be used singly or in combination of two or more kinds -18-201032002, respectively. The content "in terms of mass percentage" of the monomer unit having a carboxyl group in the above copolymer is usually about 1 to 50% by mass, preferably about 15 to 40% by mass. As the above acrylic polymer 'for example, (meth)acrylic acid/methyl (meth)acrylate copolymer, (meth)acrylic acid / benzyl (meth)acrylate copolymer (meth)acrylic acid / (Methyl)-propyl acrylate 2-hydroxyethyl/benzyl (meth) acrylate copolymer, (meth)acrylic acid / methyl (meth) acrylate / polystyrene macropolymer (A Acrylic acid / methyl (meth) acrylate / polymethyl methacrylate macromolecular copolymer, (meth) acrylate / (meth) acrylate / polystyrene macropolymer - Methyl)acrylic acid / benzyl (meth) acrylate / polymethyl methacrylate macromolecular copolymer, (meth) acrylate / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate Ester/polystyrene macromer copolymer, (meth)acrylic acid / φ (hydroxy) 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate / polymethyl methacrylate macromer copolymer , methacrylic acid / styrene / benzyl (meth) acrylate / N-phenyl maleimide copolymer, Methyl)acrylic acid/succinic acid mono(2-propenyloxyethyl)ester/styrene/(methyl) benzyl acrylate/N-phenylmaleimide copolymer, (meth)acrylic acid / amber Acid mono(2-propenyloxyethyl)ester/styrene/allyl (meth)acrylate/N-phenylmaleimide copolymer, (meth)acrylic acid/benzyl (meth)acrylate Ester/N-phenylmaleimide/styrene/glycerol mono(meth)acrylate copolymer, and the like. Further, the term "(meth)acrylate" means -19 - 201032002 acrylate or methacrylate. Wherein 'preferably benzyl methacrylate/methacrylic acid copolymer, benzyl methacrylate/methacrylic acid/styrene copolymer, methyl methacrylate/methacrylic acid copolymer, methyl methacrylate/ A methacrylic acid/styrene copolymer or the like. The polystyrene-equivalent weight average molecular weight of the above acrylic polymer is preferably in the range of 3,000 to 400,000, more preferably in the range of 5,000 to 1,000,000. Further, the acid strontium is preferably in the range of 30 to 250, more preferably in the range of 60 to 180.

可作爲黏合劑樹脂使用之聚羧酸樹脂,例如,可舉例 有下述式(2)所示之化合物與多元酸或其酸酐之縮聚合 物(參照特開平4-35 5450號公報、特開平9-40745號公報、 特開平9-325494號公報、特開2000-281738號公報),或爲 式(2)的前驅物之環氧化合物與多元羧酸及/或單羧酸之 反應生成物與多元酸或其酸酐的縮聚合物等。 【化2】The polycarboxylic acid resin which can be used as the binder resin, for example, a polycondensate of a compound represented by the following formula (2) and a polybasic acid or an anhydride thereof can be exemplified (refer to Japanese Laid-Open Patent Publication No. Hei-4-35 5450, No. A reaction product of an epoxy compound of a precursor of the formula (2) and a polyvalent carboxylic acid and/or a monocarboxylic acid, or a reaction product of a precursor of the formula (2), or a monocarboxylic acid, is disclosed in JP-A-H09-325494, JP-A-2000-281738 A polycondensate or the like with a polybasic acid or an anhydride thereof. [Chemical 2]

R,。 I ch2=c-c-o-ch2-ch-ch2- 〇 OHR,. I ch2=c-c-o-ch2-ch-ch2- 〇 OH

❹ R10❹ R10

I C 一 C=CHjI C a C=CHj

It Ο [式中,R7以及R8分別獨立地表示氫原子、碳原子數1〜5 之烷基或鹵原子,R1G表示氫原子或甲基,x表示下述式( 2-1)〜(2-7)任一者所示之2價殘基’ R9表示可具有取代 基之碳原子數1〜ίο之伸烷基’ p表0〜5之整數示’ q表示1 〜10之整數]。 -20- 201032002 【化3】It Ο [wherein R7 and R8 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogen atom, R1G represents a hydrogen atom or a methyl group, and x represents a formula (2-1) to (2) -7) A divalent residue represented by any of the formulas R9 represents an alkylene group having 1 to ί of a carbon atom which may have a substituent. p An integer of 0 to 5 is shown as 'q means an integer of 1 to 10'. -20- 201032002 【化3】

(2—7)(2-7)

(2-3)(2-3)

(2 — 6)(2 - 6)

作爲多元酸’例如,可舉例有馬來酸、琥珀酸、衣康 酸、鄰苯二甲酸、四氫鄰苯二甲酸、六氫鄰苯二甲酸、甲 基内亞甲基四氫鄰苯二甲酸、六氯降冰片烯二酸、甲基四 氫鄰苯二甲酸、偏苯三酸、苯均四酸、二苯甲酮四羧酸、 4,4’-聯苯二甲酸爲代表之聯苯四羧酸、聯苯醚四羧酸等。 作爲多元酸之酸酐,可舉例有上述多元酸之酸酐等。 多元酸或其酸酐可分別單獨使用或混合2種以上使用 多元酸或多元酸酐之使用量,相對於式(2)所示之 化合物等之反應對象之化合物與多元酸或其多元酸酐的總 莫耳量’以莫耳比計,通常爲5〜9 5 %,較佳1 〇〜9 0 %左右 。又’前述黏合劑樹脂中,較佳爲含有聚羧酸之樹脂。 負型感光性黑色樹脂組成物中使用之黏合劑樹脂之酸 値’通常爲70〜170,較佳爲80〜MO。又,黏合劑樹脂之 聚苯乙烯換算重量平均分子量通常爲1000〜50000,較佳 爲 1 500 〜20000。 負型感光性樹脂組成物中使用之黏合劑樹脂,相對於 -21 - 201032002 感光性黑色樹脂組成物之全部固體成分,以質量百分率計 ,通常以5〜90質量%,較佳以10〜60質量%之範圍含有。 作爲負型感光性黑色樹脂組成物中所含之具有烯屬不 飽和鍵之可經加成聚合之化合物,爲例如,選自在末端至 少具有1個烯屬不飽和鍵之化合物,較佳具有2個以上烯屬 不飽和鍵之化合物,可爲單體,亦可爲二聚體、三聚體以 及寡聚物等預聚物,亦可爲其等之混合物或其等之共聚物 等。 作爲上述單體,例如,可舉例有丙烯酸、甲基丙烯酸 、衣康酸、巴豆酸、異巴豆酸以及馬來酸等不飽和羧酸與 脂肪族多元醇化合物之酯、不飽和羧酸與脂肪族多元胺化 合物之醯胺等。 作爲不飽和羧酸與脂肪族多元醇化合物之酯,例如, 可舉例有乙二醇二丙烯酸酯、三乙二醇二丙烯酸酯、1,3-丁二醇二丙烯酸酯、四亞甲基二醇二丙烯酸酯、丙二醇二 丙烯酸酯、新戊二醇二丙烯酸酯、三羥甲基丙烷三丙烯酸 酯、三羥甲基丙烷三(丙烯醯氧基丙基)醚、三羥甲基乙 烷三丙烯酸酯、己二醇二丙烯酸酯、1,4-環己烷二醇二丙 烯酸酯、四乙二醇二丙烯酸酯、季戊四醇二丙烯酸酯、季 戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇二 丙烯酸酯、二季戊四醇六丙烯酸酯、山梨糖醇三丙烯酸酯 、山梨糖醇四丙烯酸酯、山梨糖醇五丙烯酸酯、山梨糖醇 六丙烯酸酯、三(丙烯醯氧基乙基)異氰尿酸酯、聚酯丙 烯酸酯寡聚物等丙烯酸酯;四亞甲基二醇二甲基丙烯酸酯 -22- 201032002 、三乙二醇二甲基丙烯酸酯 '新戊二醇二甲基丙烯酸酯、 三經甲基丙烷三甲基丙烯酸酯、三羥甲基乙烷三甲基丙烯 酸醋、乙二醇二甲基丙烯酸酯、丨,3-丁二醇二甲基丙烯酸 醋、己烷二醇二甲基丙烯酸酯、季戊四醇二甲基丙烯酸酯 、季戊四醇三甲基丙烯酸酯、季戊四醇四甲基丙烯酸酯、 二季戊四醇二甲基丙烯酸酯、二季戊四醇六甲基丙烯酸酯 、山梨糖醇三甲基丙烯酸酯、山梨糖醇四甲基丙烯酸酯、 φ 雙[對_(3 -甲基丙烯醯氧基-2-羥基丙氧基)苯基]二甲基 甲烷、雙-[對-(甲基丙烯醯氧基乙氧基)苯基]二甲基甲 院等甲基丙烯酸酯;乙二醇二衣康酸酯、丙二醇二衣康酸 酯、丨,3· 丁二醇二衣康酸酯、I,4-丁二醇二衣康酸酯、四 亞甲基二醇二衣康酸酯、季戊四醇二衣康酸酯、山梨糖醇 四衣康酸酯等衣康酸酯;乙二醇二巴豆酸酯、四亞甲基二 醇二巴豆酸酯、季戊四醇二巴豆酸酯、山梨糖醇四二巴豆 酸酯等巴豆酸酯;乙二醇二異巴豆酸酯、季戊四醇二異巴 Ο 豆酸酯、山梨糖醇四異巴豆酸酯等異巴豆酸酯;乙二醇二 馬來酸酯、三乙二醇二馬來酸酯、季戊四醇二馬來酸酯、 山梨糖醇四馬來酸酯等馬來酸酯等。 作爲不飽和羧酸與脂肪族多元胺化合物之醯胺,例如 ’可舉例有亞甲基雙-丙烯醯胺、亞甲基雙-甲基丙烯醯胺 、1,6 -六亞甲基雙-丙烯醯胺、1,6 -六亞甲基雙-甲基丙烯醯 胺、二伸乙基三胺三丙烯醯胺、苯二甲基雙丙烯醯胺、苯 二甲基雙甲基丙烯醯胺等。 作爲單體之其他實例,例如,可舉例有〗分子中具有2 -23- 201032002 個以上異氰酸酯基之聚異氰酸酯化合物與下述式(3)所 示之乙烯基單體進行加成而得到之乙烯基胺基甲酸酯化合 物等。 【化4】 R21 R22 …⑶ ch2=c-c-o-ch2-ch-oh Ο [式中,R21以及R22分別獨立地表示氫原子或甲基]。As the polybasic acid, for example, maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, methyl endomethylenetetrahydrophthalic acid can be exemplified. , hexachloronorbornene dicarboxylic acid, methyltetrahydrophthalic acid, trimellitic acid, pyromellitic acid, benzophenone tetracarboxylic acid, 4,4'-diphenyl phthalate represented by biphenyl Tetracarboxylic acid, diphenyl ether tetracarboxylic acid, and the like. The acid anhydride of the polybasic acid may, for example, be an acid anhydride of the above polybasic acid. The polybasic acid or its acid anhydride may be used alone or in combination of two or more kinds thereof, and the amount of the compound to be reacted with the compound represented by the formula (2) and the polybasic acid or its polybasic acid anhydride may be used. The amount of the ear is usually from 5 to 95%, preferably from about 1 to about 90%, in terms of the molar ratio. Further, among the above binder resins, a resin containing a polycarboxylic acid is preferred. The acid 値' of the binder resin used in the negative photosensitive black resin composition is usually 70 to 170, preferably 80 to MO. Further, the polystyrene-equivalent weight average molecular weight of the binder resin is usually from 1,000 to 50,000, preferably from 1,500 to 20,000. The binder resin used in the negative photosensitive resin composition is usually 5 to 90% by mass, preferably 10 to 60% by mass based on the total solid content of the photosensitive black resin composition of the period from 21 to 201032002. The range of mass % is contained. The compound which can be subjected to addition polymerization having an ethylenically unsaturated bond contained in the negative photosensitive black resin composition is, for example, a compound selected from at least one ethylenically unsaturated bond at the terminal, preferably having 2 The compound of the above ethylenically unsaturated bond may be a monomer, a prepolymer such as a dimer, a trimer or an oligomer, a mixture thereof or the like, or a copolymer thereof or the like. As the above monomer, for example, an ester of an unsaturated carboxylic acid such as acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid or maleic acid with an aliphatic polyol compound, an unsaturated carboxylic acid and a fat can be exemplified. A group of polyamine compounds such as decylamine. The ester of the unsaturated carboxylic acid and the aliphatic polyol compound may, for example, be ethylene glycol diacrylate, triethylene glycol diacrylate, 1,3-butylene glycol diacrylate, tetramethylene di Alcohol diacrylate, propylene glycol diacrylate, neopentyl glycol diacrylate, trimethylolpropane triacrylate, trimethylolpropane tris(propylene methoxypropyl) ether, trimethylolethane three Acrylate, hexanediol diacrylate, 1,4-cyclohexanediol diacrylate, tetraethylene glycol diacrylate, pentaerythritol diacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol diacrylate Ester, dipentaerythritol hexaacrylate, sorbitol triacrylate, sorbitol tetraacrylate, sorbitol pentaacrylate, sorbitol hexaacrylate, tris(propylene methoxyethyl) isocyanurate Acrylates such as polyester acrylate oligomers; tetramethylene glycol dimethacrylate-22- 201032002, triethylene glycol dimethacrylate 'neopentyl glycol dimethacrylate, three Methyl propane trimethacrylate, trimethylolethane trimethacrylate, ethylene glycol dimethacrylate, hydrazine, 3-butanediol dimethacrylate, hexanediol dimethyl Acrylate, pentaerythritol dimethacrylate, pentaerythritol trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol dimethacrylate, dipentaerythritol hexamethacrylate, sorbitol trimethacrylate, sorbus Sugar alcohol tetramethacrylate, φ bis [p-(3-methylpropenyloxy-2-hydroxypropoxy)phenyl]dimethylmethane, bis-[p-(methacryloxy) Ethoxylated methacrylates such as ethoxy)phenyl]dimethyl ketone; ethylene glycol diitaric acid ester, propylene glycol conjugated acid ester, hydrazine, 3 · butanediol II itaconate, I, 4 - butanediol diitaconate, tetramethylene glycol isaconate, pentaerythritol diitaconate, sorbitol tetraconate, etc.; ethylene glycol dicrotonate , crotonic acid such as tetramethylene glycol dicrotonate, pentaerythritol dicrotonate, sorbitol tetradodetoic acid ester Ethylene glycol diisocrotonate, pentaerythritol diisobarium phthalate, sorbitol tetraisocrotonate, etc.; ethylene glycol dimaleate, triethylene glycol dimaleate Maleate such as ester, pentaerythritol dimaleate or sorbitol tetramaleate. As the decylamine of the unsaturated carboxylic acid and the aliphatic polyamine compound, for example, methylene bis-acrylamide, methylene bis-methyl decylamine, 1,6-hexamethylene bis- can be exemplified. Acrylamide, 1,6-hexamethylenebis-methylpropenylamine, di-ethyltriamine tripropenylamine, benzodimethylbisacrylamide, benzodimethylbismethyl decylamine Wait. As another example of the monomer, for example, an ethylene obtained by adding a polyisocyanate compound having 2 to 23 - 3,003,200 or more isocyanate groups in the molecule and a vinyl monomer represented by the following formula (3) can be exemplified. A carbamic acid ester compound or the like. R21 R22 (3) ch2=c-c-o-ch2-ch-oh Ο [wherein R21 and R22 each independently represent a hydrogen atom or a methyl group].

作爲上述之乙烯基胺基甲酸酯化合物,可舉例有特公 昭48 -4 1 708號公報記載之1分子中含有2個以上聚合性乙烯 基之化合物、特開昭5 1 -3 7 1 93號公報記載之胺基甲酸酯丙 烯酸酯類、特開昭48 -64 1 8 3號公報、特公昭49-43 1 91號公 報以及特公昭52-30490號公報等記載之聚酯丙烯酸酯類等 之多官能丙烯酸酯或甲基丙烯酸酯。又,亦可使用曰本接 著協會誌Vol.20,No.7,300〜308頁( 1984年)中作爲光 硬化性單體以及寡聚物所介紹之物質。The above-mentioned vinyl urethane compound is exemplified by a compound containing two or more polymerizable vinyl groups in one molecule described in Japanese Patent Publication No. Sho 48-41, No. 708, and JP-A-53-37 1 93 The urethane acrylates described in Japanese Laid-Open Patent Publication No. SHO-48-64 No. Hei. A polyfunctional acrylate or methacrylate. Further, as a photocurable monomer and an oligomer, it can also be used as a photocurable monomer and an oligomer in 协会本接志志, Vol.20, No. 7, 300-308 (1984).

前述之具有烯屬不飽和鍵且可加成聚合之化合物之使 用量,相對於感光性黑色樹脂組成物的全部固體成分,以 質量百分率計,通常爲0.5〜50質量%,較佳爲1〜40質量% 作爲負型感光性黑色樹脂組成物中含有的光聚合引發 劑,只要是能夠引發具有烯屬不飽和鍵且可加成聚合之化 合物聚合的化合物,則無特別限定,可舉例有苯乙酮系光 聚合引發劑、苯偶因系光聚合引發劑、二苯甲酮系光聚合 引發劑、噻噸酮系光聚合引發劑、三嗪系光聚合引發劑、 -24- 201032002 噁二唑系光聚合引發劑等。 作爲本乙酮系光聚合引發劑,例如, 基苯乙酮、2-羥基-2-甲基-1-苯基丙烷-b 醛、2-羥基-2-甲基-丨—H- ( 2-羥基乙氧基: 、1-羥基環己基苯基酮、2_甲基·2_嗎啉基 基)丙烷-1-酮、2-苄基-2-二甲胺基-1-( 丁烷-卜酮、2 -羥基-2-甲基- i- [4- ( 1-甲基 φ 烷-1-酮之寡聚物等。 作爲苯偶因系光聚合引發劑,例如, 、苯偶因甲基醚、苯偶因乙基醚、苯偶因 因異丁基醚等。 作爲二苯甲酮系光聚合引發劑,例如 甲酮、鄰-苯甲醯基苯甲酸甲酯、4_苯基二 醯基-4’-甲基二苯硫醚、3,3,,4,4’_四(第 )—苯甲酮、2,4,6-三甲基二苯甲酮等。 φ 作爲噻噸酮系光聚合引發劑,例如, 基噻噸酮、4 -異丙基噻噸酮、2,4_二乙基 氯噻噸酮、1-氯-4-丙氧基噻噸酮等。 作爲三嗪系光聚合引發劑,例如,可 二氯甲基)-6-對-甲氧基苯乙烯基-s_三曉 甲基)-6-(1-對-二甲胺基苯基_丨,3_ 丁二; 2 -二氯甲基-4-胺基_6_對_甲氧基苯乙烯基· 1_基)-4,6_雙-三氯甲基-s-三嗪、2- ( 4-)-4,6-雙-二氯甲基-3_三嗪、2_(4_乙氧基 可舉例有二乙氧 •酮、苄基二甲縮 >苯基]丙烷-1-酮 -1- ( 4-甲硫基苯 4-嗎啉基苯基) 乙烯基)苯基]丙 可舉例有苯偶因 異丙基醚、苯偶 ,可舉例有二苯 苯甲酮、4-苯甲 三丁基過氧羰基 可舉例有2-異丙 噻噸酮、2,4-二 以舉出2,4-雙( 、2,4-雙(三氯 稀基)-s-三嗪' s-三嗪、2-(萘-甲氧基-萘-1-基 蔡-1-基)_4,6- -25- 201032002 雙-三氯甲基-S-三嗪、2- (4-丁氧基-萘-1-基)-4,6-雙-三 氯甲基-s-三嗪、2-[4-(2-甲氧基乙基)-萘-1-基]-4,6-雙-三氯甲基-s-三嗪、2-[4-(2-乙氧基乙基)-萘-1-基]-4,6-雙-三氯甲基-s-三嗪、2-[4-(2-丁氧基乙基)-萘-1-基]-4,6-雙-三氯甲基-3-三嗪、2-(2-甲氧基-萘-1-基)-4,6-雙-三氯甲基-s-三嗪、2- (6 -甲氧基-5-甲基-萘-2-基)-4,6-雙-三氯甲基-s-三嗪、2- (6-甲氧基-萘-2-基)-4,6-雙-三 氯甲基-s-三嗪、2- (5 -甲氧基-萘-1-基)-4,6-雙-三氯甲 基-s-三嗪、2- (4,7-二甲氧基-萘-1-基)-4,6-雙-三氯甲 基-s-三曉、2- (6 -乙氧基-萘-2-基)-4,6 -雙-三氯甲基- s-三嗪、2-(4,5-二甲氧基·萘-1-基)-4,6-雙-三氯甲基-s-三 嗪、4-[對-Ν,Ν-二(乙氧基羰基甲基)胺基苯基]-2,6-二( 三氯甲基)-s-三嗪、4-[鄰-甲基-對-Ν,Ν-二(乙氧基羰基 甲基)胺基苯基]-2,6-二(三氯甲基)-s-三嗪、4-[對-Ν,Ν-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三嗪 、4-[鄰-甲基-對-Ν,Ν-二(氯乙基)胺基苯基]-2,6-二(三 氯甲基)-s-三嗪、4-(對-Ν-氯乙基胺基苯基)-2,6-二( 三氯甲基)-s_三嗪、4-(對-Ν-乙氧基羰基甲基胺基苯基 )-2,6-二(三氯甲基)-s-三嗪、4-[對-Ν,Ν-二(苯基)胺 基苯基]-2,6-二(三氯甲基)-8-三嗪、4-(對-1氯乙基羰 基胺基苯基)-2,6-二(三氯甲基)-s-三嗪、4-[對-Ν-( 對-甲氧基苯基)羰基胺基苯基]_2,6-二(三氯甲基)-s-三 嗪、4-[間- Ν,Ν-二(乙氧基羰基甲基)胺基苯基]-2,6-二( 三氯甲基)-s-三嗪、4-[間-溴-對-Ν,Ν-二(乙氧基羰基甲 -26- 201032002 基)胺基苯基]-2,6-二(三氯甲基)-s-三嗪、4-[間-氯-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基 )-s-三嗪、4-[間-氟-對-N,N-二(乙氧基羰基甲基)胺基 苯基]-2,6-二(三氯甲基)-s-三嗪、4-[鄰-溴-對-Ν,Ν-二( 乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三曝 、4-[鄰-氯-對-Ν,Ν-二(乙氧基羰基甲基)胺基苯基-2,6-二(三氯甲基)-s-三嗪、4-[鄰-氟-對-Ν,Ν-二(乙氧基羰 ❹ 基甲基)胺基苯基]-2,6-二(三氯甲基)-8-三嗪、4-[鄰- 溴-對- Ν,Ν-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三嗪、4-[鄰-氯-對-Ν,Ν-二(氯乙基)胺基苯基]-2,6-二 (三氯甲基)-s-三嗪、4-[鄰-氟·對-Ν,Ν-二(氯乙基)胺 基苯基]-2,6-二(三氯甲基)-s-三嗪、4-[間-溴-對-Ν,Ν-二 (氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三嗪、4-[ 間-氯-對-Ν,Ν-二(氯乙基)胺基苯基]-2,6-二(三氯甲基 )-s-三嗪、4-[間-氟-對-Ν,Ν-二(氯乙基)胺基苯基]-2,6-φ 二(三氯甲基)-s-三嗪、4-(間-溴-對-Ν-乙氧基羰基甲基 胺基苯基)-2,6-二(三氯甲基)-s-三嗪、4-(間-氯-對-Ν-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三 嗪、4-(間-氟-對-Ν-乙氧基羰基甲基胺基苯基)-2,6-二( 三氯甲基)-s-三嗪、4-(鄰-溴-對-Ν-乙氧基羰基甲基胺基 苯基)-2,6-二(三氯甲基)-8-三嗪、4-(鄰-氯-對->1-乙 氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三嗪、4-(鄰-氟-對-Ν-乙氧基羰基甲基胺基苯基)-2,6-二(三氯 甲基)-s-三嗪、4-(間-溴-對-Ν-氯乙基胺基苯基)-2,6- -27 - 201032002 二(二氯甲基)-s-三嗪、4·(間·氯·對_N_氯乙基胺基苯基 )-2,6-二(三氯甲基)-s-三曉、4_ (間_氣對養氯乙基 胺基苯基)-2,6-二(三氯甲基)_s_三嗪、4_ (鄰-溴_對_ N-氯乙基胺基苯基)-2,6_二(三氯甲基)—三嗪、4_ ( 鄰-氯-對-N-氯乙基胺基苯基)_2,6_二(三氯甲基)—s — 三 嗪、4-(鄰-氟-對_N_氯乙基胺基苯基)_2,6_二(三氯甲基 )-s-三嗪等。The amount of the above-mentioned compound having an ethylenically unsaturated bond and which is addition-polymerizable is usually 0.5 to 50% by mass, preferably 1 to 1% by mass based on the total solid content of the photosensitive black resin composition. 40% by mass The photopolymerization initiator contained in the negative-type photosensitive black resin composition is not particularly limited as long as it is a compound capable of initiating polymerization of a compound having an ethylenically unsaturated bond and addition polymerization, and benzene is exemplified. Ethyl ketone photopolymerization initiator, benzoin photopolymerization initiator, benzophenone photopolymerization initiator, thioxanthone photopolymerization initiator, triazine photopolymerization initiator, -24-201032002 An azole photopolymerization initiator or the like. As the present ethyl ketone photopolymerization initiator, for example, acetophenone, 2-hydroxy-2-methyl-1-phenylpropane-b aldehyde, 2-hydroxy-2-methyl-oxime-H- ( 2 -hydroxyethoxy: 1, 1-hydroxycyclohexyl phenyl ketone, 2-methyl-2-morpholinyl)propan-1-one, 2-benzyl-2-dimethylamino-1-(butyl An alkane-p-ketone, an oligomer of 2-hydroxy-2-methyl-i-[4-(1-methylφ-alkan-1-one, etc. as a benzoin photopolymerization initiator, for example, benzene Occasion methyl ether, benzoin ethyl ether, benzoin-isobutyl ether, etc. As a benzophenone-based photopolymerization initiator, for example, methyl ketone, methyl o-benzylbenzoate, 4 _Phenyldimercapto-4'-methyldiphenyl sulfide, 3,3,,4,4'-tetra(di)-benzophenone, 2,4,6-trimethylbenzophenone, etc. φ is a thioxanthone photopolymerization initiator, for example, thioxanthone, 4-isopropylthioxanthone, 2,4-diethylchlorothioxanthone, 1-chloro-4-propoxythiophene Toxane ketone, etc. As a triazine-based photopolymerization initiator, for example, dichloromethyl)-6-p-methoxystyryl-s-trisylmethyl-6-(1-p-dimethyl) Aminophenyl 丨, 3_ butyl; 2 - Chloromethyl-4-amino _6_p-methoxy styryl-1-yl)-4,6-bis-trichloromethyl-s-triazine, 2-(4-)-4, 6-bis-dichloromethyl-3_triazine, 2-(4-ethoxyl group may be exemplified by diethoxy ketone, benzyl dimethyl condensate > phenyl] propan-1-one-1- (4 -Methylthiobenzene 4-morpholinylphenyl)vinyl)phenyl]propene may, for example, be benzoin isopropyl ether or benzoin, and examples thereof include dibenzophenone and 4-benzyltributyl. The peroxycarbonyl group can be exemplified by 2-isopropylthioxanthone and 2,4-di, and 2,4-bis(,2,4-bis(trichlorosuccinyl)-s-triazine's-triazine is exemplified. ,2-(naphthalene-methoxy-naphthalen-1-ylxan-1-yl)_4,6- -25- 201032002 bis-trichloromethyl-S-triazine, 2-(4-butoxy- Naphthalen-1-yl)-4,6-bis-trichloromethyl-s-triazine, 2-[4-(2-methoxyethyl)-naphthalen-1-yl]-4,6-double -trichloromethyl-s-triazine, 2-[4-(2-ethoxyethyl)-naphthalen-1-yl]-4,6-bis-trichloromethyl-s-triazine, 2 -[4-(2-butoxyethyl)-naphthalen-1-yl]-4,6-bis-trichloromethyl-3-triazine, 2-(2-methoxy-naphthalene-1- -4,6-bis-trichloromethyl-s-triazine, 2-(6-methoxy-5-methyl-naphthalen-2-yl)-4,6-bis-trichloromethyl -s-triazine, 2-( 6-methoxy-naphthalen-2-yl)-4,6-bis-trichloromethyl-s-triazine, 2-(5-methoxy-naphthalen-1-yl)-4,6-double -Trichloromethyl-s-triazine, 2-(4,7-dimethoxy-naphthalen-1-yl)-4,6-bis-trichloromethyl-s-three, 2- (6 -ethoxy-naphthalen-2-yl)-4,6-bis-trichloromethyl-s-triazine, 2-(4,5-dimethoxynaphthalen-1-yl)-4,6 - bis-trichloromethyl-s-triazine, 4-[p-oxime, fluorenyl-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-di(trichloromethyl)-s Triazine, 4-[o-methyl-p-indole, indole-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine, 4-[p-indole, indole-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine, 4-[o-methyl-p-anthracene, Ν-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine, 4-(p-indole-chloroethylaminophenyl)-2,6 - bis(trichloromethyl)-s-triazine, 4-(p-indole-ethoxycarbonylmethylaminophenyl)-2,6-di(trichloromethyl)-s-triazine, 4-[p-indole, indole-bis(phenyl)aminophenyl]-2,6-di(trichloromethyl)-8-triazine, 4-(p-1,3-chloroethylcarbonylaminobenzene) Base-2,6-di(trichloromethyl) -s-triazine, 4-[p-indole-(p-methoxyphenyl)carbonylaminophenyl]_2,6-di(trichloromethyl)-s-triazine, 4-[inter- Ν,Ν-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine, 4-[m-bromo-p-anthracene, fluorene-di (Ethoxycarbonylmethyl-26-201032002) Aminophenyl]-2,6-bis(trichloromethyl)-s-triazine, 4-[m-chloro-p-N,N-di ( Ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazine, 4-[m-fluoro-p-N,N-di(ethoxycarbonyl) Aminophenyl]-2,6-bis(trichloromethyl)-s-triazine, 4-[o-bromo-p-indole, indole-bis(ethoxycarbonylmethyl)aminobenzene -2,6-bis(trichloromethyl)-s-three exposure, 4-[o-chloro-p-indole, indole-bis(ethoxycarbonylmethyl)aminophenyl-2,6 - bis(trichloromethyl)-s-triazine, 4-[o-fluoro-p-indole, indole-bis(ethoxycarbonylmethylmethyl)aminophenyl]-2,6-di ( Trichloromethyl)-8-triazine, 4-[o-bromo-p-indole, indole-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s- Triazine, 4-[o-chloro-p-indole, indole-bis(chloroethyl)aminophenyl]-2,6-di(trichloro) Methyl)-s-triazine, 4-[o-fluoro-p-indole, indole-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine , 4-[m-bromo-p-indole, indole-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine, 4-[m-chloro- Ν-Ν, Ν-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazine, 4-[m-fluoro-p-anthracene, fluorene-di ( Chloroethyl)aminophenyl]-2,6-φ bis(trichloromethyl)-s-triazine, 4-(m-bromo-p-anthracene-ethoxycarbonylmethylaminophenyl) -2,6-bis(trichloromethyl)-s-triazine, 4-(m-chloro-p-indole-ethoxycarbonylmethylaminophenyl)-2,6-di(trichloromethane) -s-triazine, 4-(m-fluoro-p-indole-ethoxycarbonylmethylaminophenyl)-2,6-di(trichloromethyl)-s-triazine, 4- (o-bromo-p-oxime-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-8-triazine, 4-(o-chloro-p--> -ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazine, 4-(o-fluoro-p-indole-ethoxycarbonylmethylaminobenzene -2,6-bis(trichloromethyl)-s-triazine, 4-(m-bromo-p-indole-chloroethylaminophenyl)-2,6--27 - 201032002 bis(dichloromethyl)-s-triazine, 4·(m-chloro-p-_N-chloroethylaminophenyl)-2,6-di(trichloromethyl)-s-three Xiao, 4_ (m-p-chloroethylaminophenyl)-2,6-di(trichloromethyl)_s_triazine, 4_(o-bromo-p-N-chloroethylaminobenzene Base)-2,6-bis(trichloromethyl)-triazine, 4_(o-chloro-p-N-chloroethylaminophenyl)_2,6-bis(trichloromethyl)-s — Triazine, 4-(o-fluoro-p-_N-chloroethylaminophenyl)_2,6-bis(trichloromethyl)-s-triazine, and the like.

作爲噁一唑系光聚合引發劑,例如,可舉例有2 -三氯 甲基-5-苯乙烯基二唑、2_三氯甲基_5·(對氰基 苯乙烯基)-1,3,4-噁二唑、2_三氯甲基_5_(對-甲氧基苯 乙烯基)-1,3,4-噁二唑、2_三氯甲基_5_ (對-丁氧基苯乙 烯基)_1,3,4·噁二唑、2·三氯甲基_5_ (對-羥基苯乙烯基 )-1,3,4-噁二唑、2_三氯甲基_5•(對-氯苯乙烯基)· 1,3,4-噁一唑、2-三氯甲基·5_ (對_甲氧基苯基)-^,“噁 —唑、2-二氯甲基_5•(對-丁氧基苯基)噁二唑、 2·二氯甲基·5·(2 •萘基)-1,3,4-噁二唑、2-三氯甲基_5-( 曰(2本并呋喃基)乙烯基)丨,3,4嚼二哩、I三氯甲 基-5-(点-(6·甲氧基_2_苯并呋喃基)乙烯基),心噁 —唑、2_二氯甲基- 5·(2 -苯并呋喃基)-i,3,4 -噁二唑等。 另外’作爲光聚合引發劑’例如,可使用2,4,6-三甲 基苯甲醯基二苯基氧化膦、2,2,-雙(鄰-氯苯基)-4,4,,5, 5 -四苯基-1,2’-聯二咪唑、1〇_ 丁基_2氯吖啶酮、2_乙基 意醒、一苯甲酿、9,1〇_菲醌' 樟腦醌、苯基乙醛酸甲基酯 、一茂鈦化合物等。前述光聚合引發劑中,較好使用導入 -28 - 201032002 有二氯甲基之三嗪系光聚合引發劑、導入有三氯甲基之嚼 二唑系光聚合引發劑。 作爲導入有三氯甲基之三嗪系光聚合引發劑,例如, 可舉例有2,4_雙(三氯甲基)-6-(4-甲氧基苯基)-1,3,5-三嗪、2,4-雙(三氯甲基)_6_(4_甲氧基萘基)-^,卜三 嗓、2,4 -雙(三氯甲基)_6·胡椒基-丨,3,5_三嗪' 2,4•雙( 二氯甲基)-6- (4-甲氧基苯乙烯基)-13,5-三嗪、2,4-雙 φ (三氯甲基)_6-[2- ( 5-甲基呋喃-2-基)次乙基]-1,3,5-三 嗪、2,4 -雙(三氯甲基)_6_[2_ (呋喃-2_基)次乙基]· 1,3,5-三嗪、2,4-雙(三氯甲基)_6_[2-(4-二乙胺基-2-甲 基苯基)次乙基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧基苯基)次乙基]-^、三嗪等。 作爲導入有三氯甲基之噁二唑系光聚合引發劑,例如 ’可舉例有2 -三氯甲基-5-苯乙烯基-1,3,4 -噁二唑、2 -三氯 甲基- 5-(對-氰基苯乙烯基)-丨,3,4_噁二唑、2_三氯甲基-9 5-(對-甲氧基苯乙烯基)-丨,^^噁二唑、2_三氯甲基-5_ (對-丁氧基苯乙烯基)·1,3,4_噁二唑、2_三氯甲基_5_( 冷-(2-苯并呋喃基)乙烯基)-I 3,4_噁二唑等。 前述光聚合引發劑可以分別單獨使用或組合2種以上 使用。 負型感光性黑色樹脂組成物可含有光聚合引發助劑。 作爲光聚合引發助劑,可舉例有例如,三乙醇胺、甲基二 乙醇胺、三異丙醇胺、4_二甲胺基苯甲酸甲酯、4_二基胺 基苯甲酸乙酯、4-二甲胺基苯甲酸異戊酯、4_二甲胺基苯 -29- 201032002 甲酸2-乙基己酯' 苯甲酸2_二甲胺基乙酯、N,N-二甲基對 甲苯胺、4,4,-雙(二甲胺基)二苯甲酮(通稱米氏酮)、 4,4’-雙(二乙胺基)二苯甲酮、9,10·二甲氧基蒽、2 -乙 基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二 乙氧基蒽等。這些光聚合引發助劑可以分別單獨使用或組 合2種以上使用。 使用前述光聚合引發助劑時,其使用量相對於光聚合 引發劑1莫耳,通常爲〇.〇1〜10莫耳。 光聚合引發劑以及光聚合引發助劑之合計使用量,相 對於感光性黑色樹脂組成物的全部固體成分,以質量百分 率計’通常爲1〜50質量%,較佳爲3〜30質量%。 作爲感光性黑色樹脂組成物中含有的溶劑,例如,可 舉例有酯類、醚類、酮類、芳香族烴類等。 作爲酯類,例如,可舉例有乙酸乙酯、乙酸正丁酯、 乙酸異丁酯、甲酸戊酯、乙酸異戊酯、乙酸異丁酯、丙酸 丁酯、丁酸異丙酯、丁酸乙酯、丁酸丁酯、乳酸甲酯、乳 酸乙酯等烷酯類;羥基乙酸甲酯、羥基乙酸乙酯、羥基乙 酸丁酯、甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸 丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯等烷氧基乙酸烷 酯類;3-羥基丙酸甲基酯、3-羥基丙酸乙基酯等羥基丙酸 烷酯類;3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3_乙氧 基丙酸甲酯、3-乙氧基丙酸乙酯、2-羥基丙酸甲酯、2-羥 基丙酸乙酯、2-羥基丙酸丙酯、2-甲氧基丙酸甲酯、2-甲 氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、 -30- 201032002 2-乙氧基丙酸乙酯、2-羥基_2_甲基丙酸甲酯、2·羥基_2_甲 基丙酸乙酯、2-甲氧基甲基丙酸甲酯、2_乙氧基甲 基丙酸乙醋、丙酮酸甲酯、丙酮酸乙醋、丙嗣酸丙醋、乙 酿乙酸甲酯、乙醯乙酸乙酯、2_氧代丁酸甲酯、2_氧代丁 酸乙酯等。 作爲醚類,例如,可舉例有二乙二醇二甲基醚、四氫 呋喃、乙一醇單甲基醚、乙二醇單乙基醚、甲基溶纖劑乙 φ 酸酯、乙基溶纖劑乙酸酯、二乙二醇單甲基醚、二乙二醇 單乙基醚、一乙一醇單丁基醚、丙二醇甲基醚乙酸酯、丙 一醇乙基酸乙酸酯、丙二醇两基醚乙酸酯等。 作爲酮類’例如,可舉例有甲基乙基酮、環己酮、2_ 庚酮、3-庚酮等。 作爲方香族烴類’例如,可舉例有甲苯、二甲苯、三 甲苯等。 前述溶劑中,較好使用3 -乙氧基丙酸甲酯、3_乙氧基 參 丙酸乙酯、乙基溶纖劑乙酸酯、乳酸乙酯、二乙二醇二甲 基醚、乙酸丁酯、3 -甲氧基丙酸甲酯、2-庚酮、環己酮、 乙基卡必醇乙酸酯'丁基卡必醇乙酸酯以及丙二醇甲基醚 乙酸酯。 前述溶劑可以分別單獨使用或混合2種以上使用,其 使用量,以感光性黑色樹脂組成物中全部固體成分濃度的 質量百分率計,通常在2〜50質量%之範圍內選擇。 (正型感光性黑色樹脂組成物) -31 - 201032002 正型感光性黑色樹脂組成物含有遮光劑 、感光劑、後述的氟系界面活性劑及溶劑。 正型感光性黑色樹脂組成物中含有的遮 ,可以使用與前述負型感光性黑色樹脂組成 光劑以及溶劑同樣者。 黏合劑樹脂於該正型感光性黑色樹脂組 以對於使用該感光性黑色樹脂組成物所形成 層賦予其光線未照射區域溶解於顯影液的性 ,黏合劑樹脂亦具有在使用感光性黑色樹脂 之樹脂組成物層中,作爲使遮光劑分散之分 〇 作爲正型感光性黑色樹脂組成物中使用 ’例如,可舉例有酚醛樹脂、聚羥基苯乙烯 性羥基的高分子化合物、甲基丙烯酸共聚物 物等含有羧基的高分子化合物等含有酚性羥 溶性樹脂。又,作爲鹼溶性樹脂,較佳爲具 作爲具有硬化性的鹼溶性樹脂,例如,可舉 基、環氧基、氧雜環丁烷基、四氫呋喃基、 的具有硬化性的鹼溶性樹脂。 作爲在正型感光性黑色樹脂組成物中使 例如,可舉例有具有重氮醌基的化合物等。 合物,例如,可舉例有1,2-重氮苯醌磺酸醋 醌磺酸酯、1,2-重氮苯醌磺酸醯胺、1,2-重 胺類等。較好爲1,2-重氮萘醌磺酸酯。 、黏合劑樹脂 光劑以及溶劑 物中含有的遮 成物中,係用 之樹脂組成物 質的成分。又 組成物所形成 散介質的功能 的黏合劑樹脂 樹脂等含有酚 、丙烯酸共聚 基或羧基的鹼 有硬化性者。 例有具有乙烯 丁內酯骨架等 用的感光劑, 作爲重氮醌化 、1,2-重氮萘 氮萘醌磺酸醯 201032002 如上述之負型以及正型感光性黑色樹脂組成物亦可含 有熱聚合抑制劑、塡充劑、黏合劑樹脂以外的高分子化合 物、密著促進劑、抗氧化劑、紫外線吸收劑、凝集防止劑 等添加劑。 熱聚合抑制劑係爲了防止在感光性黑色樹脂組成物保 存時,具有烯屬不飽和鍵且可加成聚合的化合物引發熱聚 合而含有者。作爲熱聚合抑制劑,例如,可舉例有氫醌、 Φ 對·甲氧基苯酚、二-第三丁基-對-甲酚、連苯三酚、第三 丁基兒茶酚、苯醌、4,4’-硫基雙(3-甲基-6-第三丁基苯酚 )、2,2’-亞甲基雙(4-甲基-6-第三丁基苯酚)、N-亞硝 基苯基羥基胺亞鈽鹽等。含有熱聚合抑制劑時,其含量相 對於感光性黑色樹脂組成物的總量,以質量百分率計,通 常爲0.0 1〜5質量%左右。又,作爲塡充劑,例如,可舉例 有玻璃、氧化鋁等。 作爲黏合劑樹脂以外的高分子化合物,例如,可舉例 φ 有聚乙烯醇、聚丙烯酸、聚乙二醇單烷基醚、聚丙烯酸氟 烷酯等。 作爲密著促進劑,例如,可舉例有乙烯基三甲氧基矽 烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧基乙氧基) 矽烷、N- ( 2-胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、 N- (2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺基丙基 三乙氧基矽院、3 -環氧丙氧基丙基三甲氧基砂院、3 -環氧 丙氧基丙基甲基二甲氧基矽烷、2- (3,4-環氧基環己基) 乙基三甲氧基矽烷、3 -氯丙基甲基二甲氧基矽烷、3 -氯丙 -33- 201032002 烷、 P基_ 爲紫 i -2- ,作 機羧 酸、 酸等 己二 、甲 、四 頭酸 丙基 香族 苯三 羧酸 基琥 亞肉 羧酸 基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽 3-巯基丙基三甲氧基矽烷等。 作爲抗氧化劑,例如,可舉例有2,2-硫基雙(4-E 6-第三丁基苯酚)、2,6-二-第三丁基苯酚等。又,作 外線吸收劑,例如,可舉例有2- ( 3-第三丁基-5-甲; 羥基苯基)-5-氯苯并三唑、烷氧基二苯甲酮等。另外 爲凝集防止劑,例如,可舉例有聚丙烯酸鈉等。 又,本發明之感光性黑色樹脂組成物亦可含有有 酸、有機胺化合物等。 作爲有機羧酸,例如,可舉例有甲酸、乙酸、丙 丁酸、戊酸、新戊酸、己酸、二乙基乙酸、庚酸、辛 脂肪族單羧酸;乙二酸 '丙二酸、琥珀酸、戊二酸、 酸、庚二酸、辛二酸、壬二酸、癸二酸、十三烷二酸 基丙二酸、乙基丙二酸、二甲基丙二酸、甲基琥珀酸 甲基琥珀酸、檸康酸等脂肪族二羧酸;丙三羧酸、烏 、樟腦三酸等脂肪族三羧酸;苯甲酸、甲苯甲酸、異 苯甲酸、2,3-二甲基苯甲酸、3,5-二甲基苯甲酸等芳 單羧酸;鄰苯二甲酸、間苯二甲酸、對苯二甲酸、偏 酸、均苯三甲酸、苯偏四甲酸、苯均四酸等芳香族多 :苯基乙酸、氫化阿托酸、氫化肉桂酸、扁桃酸、苯 珀酸、阿托酸、桂皮酸、桂皮酸甲酯、桂皮酸苄酯、 桂基乙酸、香豆酸、傘形酸等分子量1000以下的有機 等。 作爲有機胺化合物,較佳使用分子量1 000以下的有機 201032002 胺化合物,例如,可舉例有正丙基胺、異丙基胺、正丁基 胺、異丁基胺、第三丁基胺、正-戊基胺、正-己基胺、正-庚基胺、正-辛基胺、正-壬基胺、正-癸基胺、正-十一烷 基胺、正-十二烷基胺、環己基胺、鄰-甲基環己基胺、間-甲基環己基胺、對-甲基環己基胺、鄰-乙基環己基胺、間-乙基環己基胺、對-乙基環己基胺等單(環)烷基胺類; 甲基·乙基胺、二乙基胺、甲基•正丙基胺、乙基•正丙 Φ 基胺、二-正丙基胺、二異丙基胺、二-正丁基胺、二異丁 基胺、二-第三丁基胺、二-正-戊基胺、二-正-己基胺、甲 基•環己基胺、乙基•環己基胺、二環己基胺等二(環) 烷基胺類;二甲基•乙基胺、甲基•二乙基胺、三乙基胺 、二甲基•正丙基胺、二乙基•正丙基胺、甲基•二-正 丙基胺、乙基•二-正丙基胺、三-正丙基胺、三異丙基胺 、三-正丁基胺、三異丁基胺、三-第三丁基胺、三-正-戊 基胺、三-正-己基胺、二甲基•環己基胺、二乙基•環己 φ 基胺、甲基•二環己基胺、乙基•二環己基胺、三環己基 胺等三(環)烷基胺類;2-胺基乙醇、3-胺基-1-丙醇、1-胺基-2-丙醇、4-胺基-1-丁醇、5-胺基-1-戊醇、6-胺基-1-己醇、4-胺基-1-環己醇等單(環)烷醇胺類;二乙醇胺、 二-正-丙醇胺、二異丙醇胺、二-正-丁醇胺、二異丁醇胺 、二-正-戊醇胺、二-正-己醇胺、二(4-環己醇)胺等二 (環)烷醇胺類;三乙醇胺、三-正-丙醇胺、三異丙醇胺 、三-正-丁醇胺、三異丁醇胺、三-正-戊醇胺、三-正-己 醇胺、三(4-環己醇)胺等三(環)烷醇胺;3-胺基-1,2- -35- 201032002 丙二醇、2-胺基-1,3-丙二醇、4-胺基-1,2-丁二醇、4-胺基-1,3-丁二醇、4-胺基-1,2-環己烷二醇、4-胺基-1,3-環己烷 二醇、3-二甲胺基-1,2-丙二醇、3-二乙胺基-1,2-丙二醇、 2-二甲胺基-1,3-丙二醇、2-二乙胺基-1,3-丙二醇等胺基( 環)烷二醇類;1-胺基環戊烷甲醇、4-胺基環戊烷甲醇、 1-胺基環己烷甲醇、4-胺基環己烷甲醇、4-二甲胺基環戊 烷甲醇、4-二乙胺基環戊烷甲醇、4-二甲胺基環己烷甲醇 、4-二乙胺基環己烷甲醇等含有胺基的環烷甲醇類;丙 胺酸、2-胺基丁酸、3-胺基丁酸、4-胺基丁酸、2-胺基異 丁酸、3-胺基異丁酸、2-胺基戊酸、5-胺基戊酸、6-胺基 己酸、1-胺基環丙烷羧酸、1-胺基環己烷羧酸、4-胺基環 己烷羧酸等胺基羧酸類等。 又,例如,胺基直接與苯基結合之化合物,可舉例有 胺基係透過碳鏈與苯基結合之化合物等。作爲前述之胺基 直接與苯基結合的化合物,例如,可舉例有苯胺、鄰-甲 基苯胺、間-甲基苯胺、對-甲基苯胺、對-乙基苯胺、對-正丙基苯胺、對-異丙基苯胺、對-正丁基苯胺、對-第三丁 基苯胺、1-萘基胺、2-萘基胺、N,N-二甲基苯胺、Ν,Ν-二 乙基苯胺、對-甲基-Ν,Ν-二甲基苯胺等芳香族胺類;鄰-胺 基苄基醇、間-胺基苄基醇、對-胺基苄基醇、對-二甲胺基 苄基醇、對-二乙胺基苄基醇等胺基苄基醇類;鄰-胺基苯 酚、間-胺基苯酚、對-胺基苯酚、對-二甲胺基苯酚、對-二乙胺基苯酚等胺基苯酚類;間-胺基苯甲酸、對-胺基苯 甲酸、對-二甲胺基苯甲酸、對-二乙胺基苯甲酸等胺基苯 -36- 201032002 甲酸(衍生物)類等° 前述有機羧酸、有機胺基化合物可以分別單獨使用或 混合2種以上使用。使用前述有機羧酸、有機胺基化合物 時,感光性黑色樹脂組成物中其含量’相對於感光性黑色 樹脂組成物的總量’以質量百分率計,通常爲0.001〜15 質量%,較佳爲〇. 〇 1〜1 〇質量%。 本發明之感光性黑色樹脂組成物中之特徵構成係含有 Φ 在側鏈上具有氟烷基之氟系界面活性劑。 在側鏈上具有氟烷基的氟系界面活性劑可爲非離子型 界面活性劑、陽離子型界面活性劑、陰離子型界面活性劑 的任意一種。在此,所謂氟烷基爲烷基中的全部氫原子經 氟原子取代之氟烷基(全氟烷基)以及烷基中的一部分氫 原子經氟原子取代之氟烷基的總稱,可爲直鏈狀、支鏈狀 之任意基。氟烷基中含有氧原子者(例如,cf3-(ocf2cf2)2-等)亦包含在本發明之氟烷基定義中。贏烷基 φ 的鏈長較佳爲碳原子數3〜I2,又,較佳爲直鏈狀全氟烷 基。 _系界面活性劑較好爲以全部結構單位的總計丨〇〇質 量%爲基準’具有下述式(i a )所示的結構單位1〜4〇質量 %、下述式(lb )所示的結構單位20〜98質量%、以及下 述式(1 c )所示的結構單位1〜4〇質量%之比例的化合物。 -37- 201032002 【化5】 R1 I —CH2 ~* C — I X’-L’~R2 (la) R3 R*The oxazole-based photopolymerization initiator may, for example, be 2-trichloromethyl-5-styryldiazole or 2-trichloromethyl-5(p-cyanostyryl)-1. 3,4-oxadiazole, 2_trichloromethyl_5_(p-methoxystyryl)-1,3,4-oxadiazole, 2_trichloromethyl_5_ (p-butoxy Styryl)_1,3,4·oxadiazole, 2·trichloromethyl_5_(p-hydroxystyryl)-1,3,4-oxadiazole, 2_trichloromethyl_5 • (p-chlorostyryl)·1,3,4-oxazole, 2-trichloromethyl·5_(p-methoxyphenyl)-^, “oxazole, 2-dichloromethyl” _5•(p-butoxyphenyl)oxadiazole, 2·dichloromethyl·5·(2 •naphthyl)-1,3,4-oxadiazole, 2-trichloromethyl _ 5-( 曰(2 benzofuryl)vinyl)anthracene, 3,4 chelate, I trichloromethyl-5-(d-(6-methoxy-2-benzofuranyl)vinyl , oxazole, 2, dichloromethyl- 5 (2-benzofuranyl)-i, 3,4-oxadiazole, etc. Further, 'as a photopolymerization initiator', for example, 2, 4,6-trimethylbenzimidyldiphenylphosphine oxide, 2,2,-bis(o-chlorophenyl)-4,4,5,5-tetraphenyl-1,2 -biimidazole, 1〇_butyl-2-chloroacridone, 2_ethyl awake, benzoyl, 9,1 〇 phenanthrene quinone, phenylglyoxylate methyl ester, one mega In the photopolymerization initiator, a triazine-based photopolymerization initiator having a dichloromethyl group introduced into -28 - 201032002 and a chelate-diazole-based photopolymerization initiator having a trichloromethyl group introduced therein are preferably used. The triazine-based triazine-based photopolymerization initiator may, for example, be 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine. , 2,4-bis(trichloromethyl)_6_(4-methoxynaphthyl)-^, bicene, 2,4-bis(trichloromethyl)_6·piperidin-丨, 3,5 _Triazine ' 2,4• bis(dichloromethyl)-6-(4-methoxystyryl)-13,5-triazine, 2,4-double φ (trichloromethyl)_6- [2-(5-methylfuran-2-yl)ethylidene]-1,3,5-triazine, 2,4-bis(trichloromethyl)_6_[2_(furan-2-yl) Ethyl]·1,3,5-triazine, 2,4-bis(trichloromethyl)_6_[2-(4-diethylamino-2-methylphenyl)ethenyl]-1, 3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl) secondary The oxadiazole-based photopolymerization initiator to which trichloromethyl group is introduced, for example, is exemplified by 2-trichloromethyl-5-styryl-1,3,4-oxine Diazole, 2-trichloromethyl-5-(p-cyanostyryl)-indole, 3,4-oxadiazole, 2-trichloromethyl-9 5-(p-methoxystyrene Base)-丨,^^oxadiazole, 2_trichloromethyl-5_(p-butoxystyryl)·1,3,4-oxadiazole, 2_trichloromethyl_5_(cold -(2-benzofuranyl)vinyl)-I 3,4-oxadiazole and the like. These photopolymerization initiators may be used alone or in combination of two or more. The negative photosensitive black resin composition may contain a photopolymerization initiation aid. As the photopolymerization initiation aid, for example, triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-diaminoaminobenzoate, and 4- Isoamyl dimethylaminobenzoate, 4-dimethylaminobenzene-29- 201032002 2-ethylhexyl formate '2-dimethylaminoethyl benzoate, N,N-dimethyl-p-toluidine , 4,4,-bis(dimethylamino)benzophenone (commonly known as Michler), 4,4'-bis(diethylamino)benzophenone, 9,10·dimethoxyanthracene , 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene, and the like. These photopolymerization initiation aids may be used alone or in combination of two or more. When the aforementioned photopolymerization initiator is used, it is used in an amount of 1 mol based on the photopolymerization initiator, usually 〇1 to 10 mol. The total amount of the photopolymerization initiator and the photopolymerization initiation aid is usually from 1 to 50% by mass, preferably from 3 to 30% by mass, based on the total solid content of the photosensitive black resin composition. The solvent contained in the photosensitive black resin composition may, for example, be an ester, an ether, a ketone or an aromatic hydrocarbon. As the ester, for example, ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, butyric acid can be exemplified. Ethyl esters such as ethyl ester, butyl butyrate, methyl lactate, ethyl lactate; methyl hydroxyacetate, ethyl hydroxyacetate, butyl glycolate, methyl methoxyacetate, ethyl methoxyacetate, Alkoxyacetic acid alkyl esters such as butyl oxyacetate, methyl ethoxyacetate, and ethyl ethoxyacetate; hydroxypropionic acid alkyl esters such as methyl 3-hydroxypropionate and ethyl 3-hydroxypropionate Esters; methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 2-hydroxypropionate , ethyl 2-hydroxypropionate, propyl 2-hydroxypropionate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, 2-B Methyl oxypropionate, -30- 201032002 2-Ethoxyethyl propionate, 2-hydroxy-2-methylpropanoate, 2·hydroxy-2-methylpropanoate, 2-A Methyl oxymethylpropionate, ethyl 2-acetoxymethylpropionate, pyruvic acid Ester, pyruvic acid ethyl ester, propionic acid, malonic Si vinegar, wine methyl acetate, ethyl acetate, acetyl, 2_ oxobutanoate, 2_-oxobutyrate and the like. As the ether, for example, diethylene glycol dimethyl ether, tetrahydrofuran, ethyl alcohol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve ethane acrylate, ethyl cellosolve can be exemplified. Acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, monoethyl alcohol monobutyl ether, propylene glycol methyl ether acetate, propanol ethyl acid acetate, propylene glycol Ethyl ether acetate and the like. The ketones 'for example, methyl ethyl ketone, cyclohexanone, 2 - heptanone, 3-heptanone and the like can be exemplified. As the scented hydrocarbons, for example, toluene, xylene, toluene or the like can be exemplified. Among the above solvents, methyl 3-ethoxypropionate, ethyl 3-ethoxylated propionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, Butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, ethyl carbitol acetate 'butyl carbitol acetate, and propylene glycol methyl ether acetate. The solvent may be used singly or in combination of two or more kinds, and the amount thereof is usually selected from the range of 2 to 50% by mass based on the mass percentage of the total solid content of the photosensitive black resin composition. (Positive-type photosensitive black resin composition) -31 - 201032002 The positive-type photosensitive black resin composition contains a light-shielding agent, a photosensitizer, a fluorine-based surfactant, and a solvent, which will be described later. The mask contained in the positive photosensitive black resin composition may be the same as the above-mentioned negative photosensitive black resin-constituting photo-agent and solvent. In the positive photosensitive black resin group, the layer formed by using the photosensitive black resin composition is provided with a layer in which the light is not irradiated, and the adhesive resin is also used in the photosensitive black resin. In the resin composition layer, the branching agent for dispersing the light-shielding agent is used as a positive-type photosensitive black resin composition. For example, a polymer compound having a phenol resin or a polyhydroxystyrene-based hydroxyl group, a methacrylic acid copolymer can be exemplified. A polymer compound containing a carboxyl group such as a substance or the like contains a phenolic hydroxyl-soluble resin. In addition, the alkali-soluble resin is preferably an alkali-soluble resin having curability, and examples thereof include a curable alkali-soluble resin, an epoxy group, an oxetane group, and a tetrahydrofuranyl group. As the positive photosensitive black resin composition, for example, a compound having a diazonium group or the like can be exemplified. The compound may, for example, be 1,2-diazonium sulfonate sulfonate, 1,2-diazonium sulfonate decylamine, 1,2-heavy amine or the like. It is preferably 1,2-diazonaphthoquinone sulfonate. The binder resin and the coating contained in the solvent are components of the resin composition. Further, a binder resin such as a resin which has a function as a bulk medium, and a base containing a phenol, an acrylic acid copolymer or a carboxyl group, such as a resin, is curable. For example, a sensitizer having a vinyl butyrolactone skeleton or the like may be used as the diazonium difluoride, 1,2-diazonaphtazinylsulfonium sulfonate 201032002, and the negative and positive photosensitive black resin compositions as described above may also be used. It contains additives such as a thermal polymerization inhibitor, a chelating agent, a polymer compound other than the binder resin, an adhesion promoter, an antioxidant, an ultraviolet absorber, and an aggregation inhibitor. The thermal polymerization inhibitor is contained in order to prevent the thermal polymerization of the compound having an ethylenically unsaturated bond and addition polymerization when it is retained in the photosensitive black resin composition. As the thermal polymerization inhibitor, for example, hydroquinone, Φ-p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4'-thiobis(3-methyl-6-tert-butylphenol), 2,2'-methylenebis(4-methyl-6-tert-butylphenol), N-Asia Nitrophenylhydroxylamine sulfonium salt and the like. When the thermal polymerization inhibitor is contained, the content thereof is usually about 0.01 to 5% by mass based on the total mass of the photosensitive black resin composition. Further, examples of the chelating agent include glass, alumina, and the like. Examples of the polymer compound other than the binder resin include PTFE, polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, and polyfluoroalkyl acrylate. As the adhesion promoter, for example, vinyl trimethoxy decane, vinyl triethoxy decane, vinyl tris(2-methoxyethoxy) decane, N-(2-aminoethyl) can be exemplified. )-3-Aminopropylmethyldimethoxydecane, N-(2-aminoethyl)-3-aminopropyltrimethoxydecane, 3-aminopropyltriethoxyphthalate , 3-glycidoxypropyltrimethoxy sand, 3-glycidoxypropylmethyldimethoxydecane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxy Baseline, 3-chloropropylmethyldimethoxydecane, 3-chloropropane-33-201032002 alkane, P-based _ is violet i -2-, as a carboxylic acid, acid, etc. Acid propyl succinyl benzene tricarboxylate succinic acid carboxylic acid trimethoxy decane, 3-methyl propylene methoxy propyl trimethoxy sulfonium 3-mercaptopropyl trimethoxy decane, and the like. As the antioxidant, for example, 2,2-thiobis(4-E 6-tert-butylphenol), 2,6-di-t-butylphenol or the like can be exemplified. Further, as the external absorbent, for example, 2-(3-tert-butyl-5-methyl; hydroxyphenyl)-5-chlorobenzotriazole or alkoxybenzophenone can be exemplified. Further, as the aggregation preventing agent, for example, sodium polyacrylate or the like can be exemplified. Further, the photosensitive black resin composition of the present invention may contain an acid, an organic amine compound or the like. As the organic carboxylic acid, for example, formic acid, acetic acid, propyl butyric acid, valeric acid, pivalic acid, caproic acid, diethyl acetic acid, heptanoic acid, octyl aliphatic monocarboxylic acid; oxalic acid 'malonic acid, Succinic acid, glutaric acid, acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, tridecanedioic acid malonic acid, ethylmalonic acid, dimethylmalonic acid, methyl An aliphatic dicarboxylic acid such as succinic acid methyl succinic acid or citraconic acid; an aliphatic tricarboxylic acid such as glycerin tricarboxylic acid, uranium or camphor tricarboxylic acid; benzoic acid, toluic acid, isobenzoic acid, 2,3-dimethyl Aromatic carboxylic acids such as benzoic acid and 3,5-dimethylbenzoic acid; phthalic acid, isophthalic acid, terephthalic acid, partial acid, trimesic acid, benzoic acid, and benzene Aromatic such as acid: phenylacetic acid, hydrogenated atropine, hydrogenated cinnamic acid, mandelic acid, benionic acid, atropic acid, cinnamic acid, methyl cinnamate, benzyl cinnamate, cinnamic acid, coumaric acid An organic acid having a molecular weight of 1,000 or less, such as an umbrella acid. As the organic amine compound, an organic 201032002 amine compound having a molecular weight of 1,000 or less is preferably used, and examples thereof include n-propylamine, isopropylamine, n-butylamine, isobutylamine, and tert-butylamine. - amylamine, n-hexylamine, n-heptylamine, n-octylamine, n-decylamine, n-decylamine, n-undecylamine, n-dodecylamine, Cyclohexylamine, o-methylcyclohexylamine, m-methylcyclohexylamine, p-methylcyclohexylamine, o-ethylcyclohexylamine, m-ethylcyclohexylamine, p-ethylcyclohexyl Mono(cyclo)alkylamines such as amines; methyl ethylamine, diethylamine, methyl-n-propylamine, ethyl-n-propyl-propylamine, di-n-propylamine, diisopropyl Amine, di-n-butylamine, diisobutylamine, di-tert-butylamine, di-n-pentylamine, di-n-hexylamine, methyl•cyclohexylamine, ethyl•ring Di(cyclo)alkylamines such as hexylamine, dicyclohexylamine; dimethyl-ethylamine, methyl•diethylamine, triethylamine, dimethyl-n-propylamine, diethyl • n-propylamine, methyl • di-n-propylamine, ethyl • Di-n-propylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-t-butylamine, tri-n-pentylamine, Tri- (n-hexylamine), dimethyl-cyclohexylamine, diethylcyclohexylamine, methyldicyclohexylamine, ethyldicyclohexylamine, tricyclohexylamine, etc. Alkylamines; 2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol, 5-amino-1-pentanol a mono(cyclo)alkanolamine such as 6-amino-1-hexanol or 4-amino-1-cyclohexanol; diethanolamine, di-n-propanolamine, diisopropanolamine, di- a di(cyclo)alkanolamine such as n-butanolamine, diisobutanolamine, di-n-pentanolamine, di-n-hexanolamine or bis(4-cyclohexanol)amine; triethanolamine, Tri-n-propanolamine, triisopropanolamine, tri-n-butanolamine, triisobutanolamine, tri-n-pentanolamine, tri-n-hexanolamine, tris(4-cyclohexyl) Tri(cyclo)alkanolamines such as amines; amines; 3-amino-1,2-35-201032002 Propylene glycol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol , 4-amino-1,3-butanediol, 4-amino-1,2-cyclohexane Alcohol, 4-amino-1,3-cyclohexanediol, 3-dimethylamino-1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino group- Amino (cyclo)alkanediols such as 1,3-propanediol, 2-diethylamino-1,3-propanediol; 1-aminocyclopentane methanol, 4-aminocyclopentane methanol, 1-amine Cyclohexane methanol, 4-aminocyclohexane methanol, 4-dimethylaminocyclopentane methanol, 4-diethylaminocyclopentane methanol, 4-dimethylaminocyclohexane methanol, 4- An amino group-containing cycloalkane methanol such as diethylaminocyclohexane methanol; alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutyric acid, 3-aminoisobutyric acid, 2-aminopentanoic acid, 5-aminopentanoic acid, 6-aminohexanoic acid, 1-aminocyclopropanecarboxylic acid, 1-aminocyclohexanecarboxylic acid, 4- An aminocarboxylic acid such as an aminocyclohexanecarboxylic acid or the like. Further, for example, a compound in which an amine group is directly bonded to a phenyl group may, for example, be a compound in which an amine group is bonded to a phenyl group through a carbon chain. As the compound in which the aforementioned amine group is directly bonded to the phenyl group, for example, aniline, o-methylaniline, m-methylaniline, p-methylaniline, p-ethylaniline, p-n-propylaniline can be exemplified. , p-isopropylaniline, p-n-butylaniline, p-t-butylaniline, 1-naphthylamine, 2-naphthylamine, N,N-dimethylaniline, anthracene, fluorene-diethyl Aromatic amines such as aniline, p-methyl-hydrazine, hydrazine-dimethylaniline; o-aminobenzyl alcohol, m-aminobenzyl alcohol, p-aminobenzyl alcohol, p-dimethyl Aminobenzyl alcohols such as aminobenzyl alcohol and p-diethylaminobenzyl alcohol; o-aminophenol, m-aminophenol, p-aminophenol, p-dimethylaminophenol, -aminophenols such as diethylaminophenol; m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, p-diethylaminobenzoic acid, etc. 201032002 Formic acid (derivatives), etc. The above-mentioned organic carboxylic acid and organic amine-based compound may be used alone or in combination of two or more. When the organic carboxylic acid or the organic amine-based compound is used, the content of the photosensitive black resin composition is generally 0.001 to 15% by mass, preferably 0.001 to 15% by mass, based on the total mass of the photosensitive black resin composition. 〇. 〇1~1 〇% by mass. The photosensitive black resin composition of the present invention has a fluorine-based surfactant having a fluoroalkyl group in its side chain. The fluorine-based surfactant having a fluoroalkyl group in the side chain may be any of a nonionic surfactant, a cationic surfactant, and an anionic surfactant. Here, the fluoroalkyl group is a generic term for a fluoroalkyl group in which all hydrogen atoms in the alkyl group are substituted with a fluorine atom, and a fluoroalkyl group in which a part of hydrogen atoms in the alkyl group is substituted with a fluorine atom. Any group of linear or branched. Those having an oxygen atom in the fluoroalkyl group (for example, cf3-(ocf2cf2)2-, etc.) are also included in the definition of the fluoroalkyl group of the present invention. The chain length of the alkyl group φ is preferably from 3 to 12 carbon atoms, and more preferably a linear perfluoroalkyl group. The surfactant-based surfactant is preferably a structural unit represented by the following formula (ia): 1 to 4% by mass based on the total mass % of all structural units, and is represented by the following formula (lb). A compound having a structural unit ratio of from 20 to 98% by mass and a structural unit of from 1 to 4% by mass represented by the following formula (1c). -37- 201032002 R1 I —CH2 ~* C — I X’-L’~R2 (la) R3 R*

I I CH2 —C— — CHi —C —I I CH2 —C— — CHi —C —

I I 0,\〇-L*~fR4-〇3^R5 x -L -Rf (1b) (1c)I I 0,\〇-L*~fR4-〇3^R5 x -L -Rf (1b) (1c)

Φ ’ Rl ' R3以及R6各自獨立地表示氫原子或碳原子數1 〜5之垸基’ R2表示氫原子、碳原子數1〜5之烷基、羥基 、或-(31((^3)2〇)〇1_31((;^3)3,114表示碳原子數2〜8之伸烷 基’ R表示氮原子、碳原子數1〜12之烷基、醯基或碳原 子數6〜20之芳基;L1、L2以及L3各自獨立地表示單鍵、 伸院基或經取代伸烷基;X1表示-C02-、-CONY1-、或伸芳 基’ X表示·〇-' -C02-、-CONY2-、伸芳基、或2價的雜環 殘基;Rf表示氟烷基;η表示2〜20之整數,又,m表示0〜 3之整數’ Y1以及γ2各自獨立地表示氫原子或碳原子數1〜 5之院基]。 R1' R2、R3以及R6之至少1個爲碳原子數1〜5之烷基Φ ' Rl ' R3 and R6 each independently represent a hydrogen atom or a fluorenyl group having 1 to 5 carbon atoms. R 2 represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a hydroxyl group, or -(31((^3)) 2〇)〇1_31((;^3)3,114 represents an alkylene group having 2 to 8 carbon atoms. R represents a nitrogen atom, an alkyl group having 1 to 12 carbon atoms, a fluorenyl group or a carbon number of 6 to 20 The aryl group; L1, L2 and L3 each independently represent a single bond, a pendant or substituted alkyl group; X1 represents -C02-, -CONY1-, or an aryl group X represents 〇-'-C02- , -CONY2-, an aryl group, or a divalent heterocyclic residue; Rf represents a fluoroalkyl group; η represents an integer of 2 to 20, and m represents an integer of 0 to 3 'Y1 and γ2 each independently represent hydrogen Atom or a number of carbon atoms of 1 to 5]. R1' R2, R3 and R6 are at least one alkyl group having 1 to 5 carbon atoms.

時’該烷基可爲直鏈狀亦可爲支鏈狀,作爲其例,可舉例 有甲基、乙基、正丙基、異丙基、正丁基、異丁基 '第二 丁基。R4表示之碳原子數2〜8的伸烷基可爲直鏈狀亦可爲 支鏈狀,作爲其例,可舉例有伸乙基、伸丙基(甲基伸乙 基)、三亞甲基、四亞甲基、六亞甲基。R5爲碳原子數1 〜12之烷基時,該烷基可爲直鏈狀亦可爲支鏈狀,作爲其 例,可舉例有甲基、乙基 '正丙基、異丙基、正丁基、異 丁基、第二丁基、2-乙基己基、正十二烷基。R5爲醯基時 ,作爲其例,可舉例有乙醯基、丙醯基、苯甲醯基’其碳 -38- 201032002 原子數通常爲2〜10左右。R5爲碳原子數6〜20之芳基時, 作爲其例,可舉例有苯基、甲苯基、萘基。L1、L2以及L3 之至少1個爲伸烷基時,該伸烷基可爲直鏈狀亦可爲支鏈 狀,作爲其例,可舉例有伸乙基、伸丙基、三亞甲基、四 亞甲基、六亞甲基,其碳原子數通常爲2〜8左右。L1、L2 以及L3之至少1個爲經取代伸烷基時,作爲其例,可舉例 有如伸乙基、伸丙基、三亞甲基、四亞甲基、六亞甲基之 φ 直鏈狀或支鏈狀伸烷基之氫原子被如苯基之芳基或羥基取 代而得者,其碳原子數通常爲2〜20。X1以及X2之至少1個 爲伸芳基時,作爲其例,可舉例有伸苯基、伸萘基,其碳 原子數通常爲6〜20。X2爲2價雜環殘基時,作爲其例,可 舉例有自如吡啶環、嘧啶環、耻嗪環、噻唑環之雜環除去 2個氫原子而成的殘基,其碳原子數通常爲3〜10。Y1以及 Y2之至少1個爲碳原子數1〜5之烷基時,該烷基可爲直鏈 狀亦可爲支鏈狀,作爲其例,可舉例有甲基、乙基、正丙 φ 基、異丙基、正丁基、異丁基、第二丁基。 又,氟系界面活性劑進而較佳係式(la)中的R2表 示-(Si(CH3)2〇)m-Si(CH3)3之化合物,即,至少使用含有氟 烷基以及烯屬雙鍵之單體與含有有機矽鏈以及烯屬雙鍵之 單體聚合得到的氟系共聚物。 並且,本發明之第1實施形態之感光性黑色樹脂組成 物,以相對於全部固體成分的氟含量計,含有0.0008〜 0.00 5質量% ( 8〜50ppm )之氟系界面活性劑。此種感光性 黑色樹脂組成物可較好地使用於用以形成黑色矩陣之組成 -39- 201032002 物,所述黑色矩陣係在基板上具有多個彩色像素層及位於 鄰接的彩色像素層間的成爲隔離壁的黑色矩陣之彩色濾光 片中的黑色矩陣。 亦即,藉由使用以相對於全部固體成分的氟含量計, 含有0.0008〜0.005質量% ( 8〜50ppm)之在側鏈上具有氟 烷基之氟系界面活性劑的感光性黑色樹脂組成物,可成爲 形成成爲隔離壁的黑色矩陣之組成物,其賦予該隔離壁相 對於噴墨印刷用油墨的疏液性,可以防止由鄰接的彩色像 素層間的異色油墨混入而發生的混色,確保均句的疏液性 ,可防止局部的漏白等像素缺陷發生。又,第1實施形態 之感光性黑色樹脂組成物中,在側鏈上具有氟烷基之氟系 界面活性劑本身的含量,可根據其分子量所占的氟的質量 比例而適當調整,但通常,相對於全部固體成分爲0.01〜 0.03質量 % ( 100 〜300ppm)左右。 在側鏈上具有氟烷基之氟系界面活性劑的含量,以相 對於全部固體成分的氟含量計,未達8ppm時,所形成的成 爲隔離壁的黑色矩陣的疏液性不充分,不僅無法充分發揮 鄰接的彩色像素層間的混色防止效果,而且黑色矩陣表面 産生貝納爾旋流窩般的結構,而較不佳。另外,在側鏈上 具有氟烷基之氟系界面活性劑的含量,以相對於全部固體 成分的氟含量計,超過50ppm時,基板的中央部雖沒有問 題’但是基板外周部(邊緣部)附近的彩色像素層發生局 部的漏白等像素缺陷。 在此,以相對於全部固體成分的氟計,在側鏈上具有 -40-The alkyl group may be linear or branched, and examples thereof include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl 'second butyl. . The alkylene group having 2 to 8 carbon atoms represented by R4 may be linear or branched, and examples thereof include an exoethyl group, a propyl group (methyl exoethyl group), and a trimethylene group. , tetramethylene, hexamethylene. When R5 is an alkyl group having 1 to 12 carbon atoms, the alkyl group may be linear or branched, and examples thereof include a methyl group, an ethyl 'n-propyl group, an isopropyl group, and a positive one. Butyl, isobutyl, t-butyl, 2-ethylhexyl, n-dodecyl. When R5 is a fluorenyl group, examples thereof include an ethyl group, a propyl group, and a benzhydryl group. The carbon number of the carbon-38-201032002 is usually about 2 to 10. When R5 is an aryl group having 6 to 20 carbon atoms, examples thereof include a phenyl group, a tolyl group, and a naphthyl group. When at least one of L1, L2 and L3 is an alkylene group, the alkylene group may be linear or branched, and examples thereof include an ethyl group, a propyl group, and a trimethylene group. Tetramethylene and hexamethylene have a carbon number of usually about 2 to 8. When at least one of L1, L2 and L3 is a substituted alkylene group, as an example thereof, a φ straight chain such as an exoethyl group, a propyl group, a trimethylene group, a tetramethylene group or a hexamethylene group may be exemplified. The hydrogen atom of the branched alkyl group is substituted by an aryl group or a hydroxyl group of a phenyl group, and the number of carbon atoms is usually 2 to 20. When at least one of X1 and X2 is an aryl group, examples thereof include a phenyl group and a naphthyl group, and the number of carbon atoms is usually 6 to 20. When X2 is a divalent heterocyclic residue, examples thereof include a residue obtained by removing two hydrogen atoms from a heterocyclic ring such as a pyridine ring, a pyrimidine ring, a azoazine ring or a thiazole ring, and the number of carbon atoms is usually 3 to 10. When at least one of Y1 and Y2 is an alkyl group having 1 to 5 carbon atoms, the alkyl group may be linear or branched, and examples thereof include methyl group, ethyl group, and n-propane φ. Base, isopropyl, n-butyl, isobutyl, second butyl. Further, the fluorine-based surfactant further preferably wherein R2 in the formula (la) represents a compound of -(Si(CH3)2〇)m-Si(CH3)3, that is, at least a fluoroalkyl group and an olefinic group are used. A fluorine-based copolymer obtained by polymerizing a monomer of a bond with a monomer containing an organic oxime chain and an ethylenic double bond. Further, the photosensitive black resin composition of the first embodiment of the present invention contains 0.0008 to 0.005 mass% (8 to 50 ppm) of a fluorine-based surfactant based on the fluorine content of all the solid components. Such a photosensitive black resin composition can be preferably used in a composition for forming a black matrix, which has a plurality of color pixel layers on a substrate and is located between adjacent color pixel layers. A black matrix in the color filter of the black matrix of the isolation wall. That is, a photosensitive black resin composition containing 0.0008 to 0.005 mass% (8 to 50 ppm) of a fluorine-based surfactant having a fluoroalkyl group in a side chain, based on the fluorine content relative to the entire solid content, is used. It can form a composition of a black matrix which is a partition wall, and imparts liquid repellency to the partition wall with respect to the ink for inkjet printing, thereby preventing color mixture caused by the incorporation of the color ink between adjacent color pixel layers, and ensuring uniformity. The lyophobic nature of the sentence prevents the occurrence of pixel defects such as local leakage. Further, in the photosensitive black resin composition of the first embodiment, the content of the fluorine-based surfactant itself having a fluoroalkyl group in the side chain can be appropriately adjusted depending on the mass ratio of fluorine in the molecular weight, but usually It is about 0.01 to 0.03 mass% (100 to 300 ppm) with respect to all solid components. When the content of the fluorine-based surfactant having a fluoroalkyl group in the side chain is less than 8 ppm based on the fluorine content of all the solid components, the liquid repellency of the black matrix which is formed as a partition wall is insufficient, and The color mixing prevention effect between adjacent color pixel layers cannot be sufficiently exerted, and the black matrix surface produces a Benar swirling-like structure, which is less preferable. In addition, when the content of the fluorine-based surfactant having a fluoroalkyl group in the side chain is more than 50 ppm based on the fluorine content of all the solid components, there is no problem in the central portion of the substrate. However, the outer peripheral portion (edge portion) of the substrate A pixel defect such as partial whitening occurs in the nearby color pixel layer. Here, it has -40- on the side chain in terms of fluorine relative to the total solid content.

201032002 氟烷基之氟系界面活性劑含量可以如下求 鏈上具有氟烷基之氟系界面活性劑的分子 量比例與全部固體成分中在側鏈上具有氟 活性劑所占的質量比例相乘而求出。另外, 在的含氟成分僅爲在側鏈上具有氟烷基之 時,固體成分中氟含量可以藉由氧燃燒-離 求出。 又,在側鏈上具有氟烷基之氟系界面活 鏈的氟烷基以外還具有氟之情況,亦包含該 對於全部固體成分的氟含量在上述範圍內即 成分中存在在側鏈上具有氟烷基之氟系界面 含氟成分時,亦包含該含氟成分的氟,相s 分的氟含量期望在上述範圍內。 又,氟系界面活性劑之分子量,從混色 缺陷防止性以及界面活性劑自身對於溶劑的 慮,以聚苯乙烯換算之分子量較佳爲1 5000〜 另外,本發明之感光性黑色樹脂組成 爲隔離壁的黑色矩陣以外,亦可使用於形 間隙目的之光間隔物。使用本發明之感光 成的光間隔物,可以高精度間距以及形狀 ),可以防止干擾有效像素。 (黑色矩陣基板) 接著,對使用前述之感光性黑色樹脂 ’即,將在側 中氟所占的質 基的氟系界面 固體成分中存 系界面活性劑 子色譜法分析 性劑,除了側 氟,只要使相 可。又,固體 活性劑以外的 於全部固體成 防止性、像素 溶解性方面考 25000 〇 ,除了形成成 爲控制液晶胞 樹脂組成物形 置柱狀物(柱 成物形成的黑 -41 - 201032002 色矩陣基板進行說明。 黑色矩陣基板係用於製造彩色濾光片者’所述彩色濾 光片係在基板上具有多個彩色像素層及位於鄰接的彩色像 素層間的成爲隔離壁的黑色矩陣’將前述感光性黑色樹脂 組成物塗佈在基板上形成感光性黑色樹脂組成物層’透過 光罩對該感光性黑色樹脂組成物層照射光線’藉由使經照 射之感光性黑色樹脂組成物層顯影而製作黑色矩陣基板。 圖1A〜圖1C係顯示黑色矩陣基板7之製造方法順序之 圖。黑色矩陣基板7之製造係準備作爲形成黑色矩陣的基 材的基板2而開始。 作爲基板2,例如,除了玻璃基板、矽基板等以外, 可舉例有聚碳酸酯基板、聚酯基板、芳香族聚醯胺基板、 聚醯胺醯亞胺基板、聚醯亞胺基板等樹脂基板。另外,基 板2亦可施以藉由矽烷偶聯劑等試劑的試劑處理、電漿處 理、離子鍍敷處理、濺射處理、氣相反應處理、真空蒸鍍 處理等前處理。 接著,在基板2的厚度方向一表面上塗佈前述之本發 明感光性黑色樹脂組成物。作爲塗佈方法,例如,可以使 用旋轉塗佈法(旋塗法)、流延塗佈法、輥塗佈法、狹縫 塗佈法、狹縫及旋轉法、非旋轉塗佈法等公知之塗佈方法 。將感光性黑色樹脂組成物塗佈於基板2表面上後,乾燥 並使溶劑揮發,如圖1 A所示,在基板2上形成具有既定膜 厚的感光性黑色樹脂組成物層1。 接著’如圖1 B所示,透過光罩3對感光性黑色樹脂組 -42- 201032002 成物層1照射光線4。在此,圖1 B中,以感光性黑色樹脂組 成物層1係使用負型感光性黑色樹脂組成物所形成者進行 說明。 光罩3例如係在玻璃板31等表面上設置遮光層32而得 者。藉由遮光層32,光線4被遮蔽。玻璃板31中未設置遮 光層32的部分爲透光部33,光線4透過透光部33並照射於 感光性黑色樹脂組成物層1,感光性黑色樹脂組成物層1轉 φ 印透光部33的圖案並被曝光。另外,爲了提高曝光感度, 亦可在玻璃板31表面塗佈PV A等氧阻斷膜。 作爲光線4,通常使用g線(波長436nm ) 、i線(波 長3 65nm)等紫外線。較好光線4係以平行光照射感光性黑 色樹脂組成物層1,通常透過光罩陣列(未圖示)等進行 照射。對感光性黑色樹脂組成物層1之曝光可以使用公知 的投影式曝光裝置或連線(proxy )方式的曝光装置透過 光罩3而進行,亦可使用以雷射作爲光源的無光罩描繪裝 Φ 置進行。光線4之照射量,可根據感光性黑色組成物中遮 光劑的含量、黏合劑樹脂的種類或含量、具有烯屬不飽和 鍵且可加成聚合的化合物的種類或含量、光聚合引發劑的 種類或含量、以及曝光裝置中使用的光源波長、讀取波長 、功率而適當選擇。 對感光性黑色樹脂組成物層1的曝光結束後進行顯影 。顯影時,只要使曝光後之感光性黑色樹脂組成物層1與 顯影液接觸即可。 作爲顯影液,例如可以使用鹼性水溶液。作爲鹼性水 -43- 201032002 溶液,例如可以使用氫氧化鈉、氫氧化鉀、碳酸鈉、矽酸 鈉、偏矽酸鈉、氨水、乙基胺、二乙基胺、二甲基乙醇胺 、氫氧化四甲基銨、氫氧化四乙基銨、膽鹼、吡咯、哌啶 、1,8-二氮雜雙環-[5,4,0]-7-十一碳烯等水溶性鹼性化合 物的水溶液,其濃度相對於鹼性水溶液,以質量百分率計 ,通常爲0.001〜1〇質量%,較佳爲0.01〜1質量%左右。前 述之鹼性水溶液可含有甲醇、乙醇等水溶性有機溶劑、界 面活性劑等。可使用有機溶劑作爲顯影液,例如,可以適 當組合感光性黑色樹脂組成物中含有的溶劑而使用。 顯影方法並無特別限定,例如,可以藉由沉浸顯影法 (浸漬顯影法)、淋洗顯影法 '噴霧顯影法、棒式顯影法 (溢液顯影法)等方法顯影。顯影溫度通常爲10〜40 °c之 範圍,顯影時間通常爲10〜300秒。 藉由顯影,感光性黑色樹脂組成物層1中之光線4未照 射的光線未照射區域溶解於顯影液而被除去。另一方面, 光線4照射的感光性黑色樹脂組成物層1之光線照射區域殘 留在基板2上,如圖1C所示,可製備於基板2表面上形成有 黑色矩陣(隔離壁圖案)5B Μ的黑色矩陣基板7。藉由顯 影處理,溶解除去感光性黑色樹脂組成物層1的部分成爲 黑色矩陣5ΒΜ的開口部7a。 本實施形態中,在黑色矩陣基板7中,黑色矩陣5BM 的隔離壁高度(黑色矩陣5BM的膜厚)A較佳爲1.2〜 3.0μηι。黑色矩陣5BM的隔離壁高度A未達1·2μιη時,在黑 色矩陣5ΒΜ的開口部7a無法塡充用以達成顏色再現所必要 201032002 的色濃度的足夠量之噴墨印刷用油墨,而不佳。隔離壁高 度A超過3.Ομιη時,不僅難以製備形成有高精度隔離壁圖案 的黑色矩陣基板7,而且使用該黑色矩陣基板7製造彩色濾 光片時’彩色像素層與隔離壁的高低差變大,液晶胞的設 計變得困難,而不佳。 另外,本實施形態中,黑色矩陣基板7的黑色矩陣 5ΒΜ中隔離壁的寬度Β通常設定在50μιη左右以下,較佳爲 φ 10〜20μπι左右。另外,由隔離壁所包圍之區域的黑色矩陣 5ΒΜ的開口部7a—般爲矩形狀,從油墨的塡充性考慮,其 角部可爲半徑爲數μιη左右的弧形狀。黑色矩陣5 Β Μ的開口 部7a爲正方形時,其開口部7a之邊長C通常設定在20〜 150μηι左右。又,黑色矩陣5BM的開口部7a爲長方形時,201032002 The fluorine-based surfactant content of the fluoroalkyl group can be obtained by multiplying the molecular weight ratio of the fluorine-based surfactant having a fluoroalkyl group in the chain by the mass ratio of the fluorine-containing active agent in the side chain in all the solid components. Find out. Further, when the fluorine-containing component is only a fluoroalkyl group in the side chain, the fluorine content in the solid component can be determined by oxygen combustion-ion. Further, in the case where the fluoroalkyl group having a fluorine-based interfacial living chain of a fluoroalkyl group has fluorine in the side chain, the fluorine content in the entire solid content is in the above range, that is, the component has a side chain. When the fluorine-based interface fluorine-containing component of the fluoroalkyl group contains fluorine of the fluorine-containing component, the fluorine content of the phase is desirably within the above range. Further, the molecular weight of the fluorine-based surfactant is preferably 15,000 in terms of molecular weight in terms of polystyrene from the prevention of color mixture defects and the solvent of the surfactant itself, and the photosensitive black resin composition of the present invention is isolated. In addition to the black matrix of the wall, a photo spacer for the purpose of the gap can also be used. With the photosensitive spacer of the present invention, high-precision pitch and shape can be prevented, and interference with effective pixels can be prevented. (Black matrix substrate) Next, the surfactant-based chromatographic analytical agent is used in the fluorine-based interface solid component in which the photosensitive black resin in the side is used, in addition to the side fluorine. As long as the phase is available. Further, in addition to the solid active agent, 25,000 Å of all solids were prevented from being formed and the solubility of the pixels was measured, except that the pillars were formed to control the composition of the liquid crystal cell resin (black-41 - 201032002 color matrix substrate formed by the column product) The black matrix substrate is used for manufacturing a color filter. The color filter has a plurality of color pixel layers on a substrate and a black matrix which is a partition wall between adjacent color pixel layers. The black resin composition is applied onto a substrate to form a photosensitive black resin composition layer 'optical light is irradiated onto the photosensitive black resin composition layer through a photomask' by developing the irradiated photosensitive black resin composition layer. Fig. 1A to Fig. 1C are diagrams showing a procedure for manufacturing a black matrix substrate 7. The fabrication of the black matrix substrate 7 is started as a substrate 2 for forming a substrate of a black matrix. As the substrate 2, for example, Examples of the glass substrate, the ruthenium substrate, and the like include a polycarbonate substrate, a polyester substrate, and an aromatic polyamide substrate. a resin substrate such as a polyamide amide substrate or a polyimide substrate, and the substrate 2 may be subjected to a reagent treatment, a plasma treatment, an ion plating treatment, a sputtering treatment, or the like by a reagent such as a decane coupling agent. The pretreatment such as a gas phase reaction treatment or a vacuum vapor deposition treatment is applied. Next, the photosensitive black resin composition of the present invention described above is applied to one surface in the thickness direction of the substrate 2. As the coating method, for example, a spin coating method can be used. A known coating method such as (spin coating method), a cast coating method, a roll coating method, a slit coating method, a slit and a spin method, or a non-spin coating method, and coating a photosensitive black resin composition After drying on the surface of the substrate 2, the solvent is evaporated and the solvent is volatilized. As shown in Fig. 1A, a photosensitive black resin composition layer 1 having a predetermined film thickness is formed on the substrate 2. Next, as shown in Fig. 1B, the light is transmitted. The cover 3 irradiates the photosensitive layer 1 with the photosensitive black resin group -42-201032002. The photosensitive layer 1 is formed of a photosensitive black resin composition layer 1 using a negative photosensitive black resin composition. The mask 3 is attached, for example. The light shielding layer 32 is provided on the surface of the glass plate 31, etc. The light 4 is shielded by the light shielding layer 32. The portion of the glass plate 31 where the light shielding layer 32 is not provided is the light transmitting portion 33, and the light 4 is transmitted through the light transmitting portion 33. The photosensitive black resin composition layer 1 is irradiated onto the photosensitive black resin composition layer 1, and the pattern of the photosensitive black resin composition layer 1 is φ printed and exposed. Further, in order to improve the exposure sensitivity, PV A may be coated on the surface of the glass plate 31. As the light ray 4, ultraviolet rays such as g-line (wavelength 436 nm) and i-line (wavelength 3 65 nm) are usually used. Preferably, the light 4 is irradiated with parallel light to the photosensitive black resin composition layer 1, usually through the light. The cover array (not shown) or the like is irradiated. The exposure of the photosensitive black resin composition layer 1 can be performed by using a known projection exposure apparatus or a line type exposure apparatus through the mask 3, or can be used. A maskless photographic device with a laser as a light source is used. The amount of irradiation of the light 4 may be based on the content of the light-shielding agent in the photosensitive black composition, the kind or content of the binder resin, the type or content of the compound having an ethylenically unsaturated bond and addition-polymerizable, and the photopolymerization initiator. The type or content, and the wavelength of the light source, the reading wavelength, and the power used in the exposure apparatus are appropriately selected. After the exposure of the photosensitive black resin composition layer 1 is completed, development is carried out. In the development, the photosensitive black resin composition layer 1 after exposure may be brought into contact with the developer. As the developer, for example, an alkaline aqueous solution can be used. As the alkaline water-43-201032002 solution, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium citrate, sodium metasilicate, aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, hydrogen can be used. Water-soluble basic compound such as tetramethylammonium oxide, tetraethylammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazabicyclo-[5,4,0]-7-undecene The aqueous solution has a concentration of usually 0.001 to 1% by mass, preferably 0.01 to 1% by mass, based on the mass of the aqueous alkaline solution. The alkaline aqueous solution described above may contain a water-soluble organic solvent such as methanol or ethanol, or an interfacial surfactant. An organic solvent can be used as the developer, and for example, a solvent contained in the photosensitive black resin composition can be appropriately combined and used. The developing method is not particularly limited. For example, it can be developed by a immersion developing method (immersion developing method), a rinse developing method "spray developing method", or a stick developing method (repelling developing method). The developing temperature is usually in the range of 10 to 40 ° C, and the developing time is usually 10 to 300 seconds. By the development, the light-irradiated area in which the light 4 in the photosensitive black resin composition layer 1 is not irradiated is dissolved in the developer and removed. On the other hand, the light-irradiating region of the photosensitive black resin composition layer 1 irradiated with the light 4 remains on the substrate 2, and as shown in Fig. 1C, a black matrix (partition wall pattern) 5B can be formed on the surface of the substrate 2. Black matrix substrate 7. The portion where the photosensitive black resin composition layer 1 is dissolved and removed by the development treatment becomes the opening portion 7a of the black matrix 5?. In the present embodiment, in the black matrix substrate 7, the height of the partition wall (the thickness of the black matrix 5BM) A of the black matrix 5BM is preferably 1.2 to 3.0 μm. When the height A of the partition wall A of the black matrix 5BM is less than 1.2 μm, the ink jet printing ink of a sufficient amount of the color density of 201032002 required for color reproduction cannot be filled in the opening portion 7a of the black matrix 5ΒΜ. When the height A of the partition wall exceeds 3.μιη, it is difficult to prepare not only the black matrix substrate 7 on which the high-precision partition wall pattern is formed, but also the height difference between the color pixel layer and the partition wall when the color filter is manufactured using the black matrix substrate 7. Large, the design of the liquid crystal cell becomes difficult and not good. Further, in the present embodiment, the width Β of the partition wall in the black matrix 5 of the black matrix substrate 7 is usually set to about 50 μm or less, preferably about 10 to 20 μm. Further, the opening portion 7a of the black matrix 5A in the region surrounded by the partition wall is generally rectangular, and the corner portion may have an arc shape having a radius of about several μη from the viewpoint of the ink filling property. When the opening 7a of the black matrix 5 Β 为 is square, the side length C of the opening 7a is usually set to about 20 to 150 μm. Moreover, when the opening 7a of the black matrix 5BM is a rectangle,

其開口部7a的尺寸通常設定在20〜150pmx70〜50(^m&S 〇 顯影處理後製備的黑色矩陣基板7,於使用鹼性水溶 φ 液作爲顯影液時,於顯影處理後進行水洗、加熱處理。爲 了使黑色矩陣5BM相對於噴墨印刷用油墨表現足夠的穩定 性而不引起如溶解或膨潤之變形,加熱處理通常以1 5 0〜 250 °C進行5〜30分鐘。 如上述製造的黑色矩陣基板7中,黑色矩陣5BM由於 使用本發明之感光性黑色樹脂組成物製備’因此由以均勻 狀態被賦予相對於噴墨印刷用油墨之疏液性的隔離壁構成 。因此,藉由噴墨印刷法在黑色矩陣5BM的開口部7a印刷 的噴墨印刷用油墨’可以防止油墨超出成爲隔離壁的黑色 -45- 201032002 矩陣5BM而侵入鄰接的開口部7a發生混色,可以防止發生 局部油墨塡充不良問題、即可以防止發生漏白等像素缺陷 〇 又,在藉由飛行時間型二次離子質量分析計(Time of Flight Secondary Ion Mass Spectroscopy,簡稱:T OF -SIMS )檢測的負離子的檢測結果中,黑色矩陣基板7之全 部負離子檢測強度的總計爲1而公稱化時的氟離子檢測強 度比,較好於成爲隔離壁的黑色矩陣5BM表面爲0.1 5以上 、未達0.3,且於黑色矩陣5BM的開口部7a所對應的基板2 表面爲0.0 5以下。 黑色矩陣5BM的表面、與黑色矩陣5BM的開口部7a所 對應的基板2表面中的氟離子檢測強度比,藉由調整形成 黑色矩陣5BM時使用的感光性黑色樹脂組成物中氟系界面 活性劑的含量,可以控制在特定範圍。 使用以相對於全部固體成分的氟含量計,含有0.0008 〜0.005質量%(8~5(^?111)氟系界面活性劑之前述感光性 黑色樹脂組成物,藉由在基板2上形成黑色矩陣5BM,可 成爲於黑色矩陣5BM表面之氟離子檢測強度比爲0.15以上 、未達〇 · 3 ’且於黑色矩陣5 B Μ之開口部7 a所對應的基板2 表面氟離子的檢測強度比爲〇·〇5以下之黑色矩陣基板7。The size of the opening portion 7a is usually set to 20 to 150 pm x 70 to 50 (the black matrix substrate 7 prepared after the development process), and when the alkaline water-soluble φ liquid is used as the developing solution, it is washed and heated after the development treatment. In order to make the black matrix 5BM exhibit sufficient stability with respect to the ink for inkjet printing without causing deformation such as dissolution or swelling, the heat treatment is usually carried out at 150 to 250 ° C for 5 to 30 minutes. In the black matrix substrate 7, the black matrix 5BM is prepared by using the photosensitive black resin composition of the present invention. Therefore, it is composed of a partition wall which is imparted with a liquid repellency with respect to the ink for inkjet printing in a uniform state. Ink printing ink "printed in the opening 7a of the black matrix 5BM by the ink printing method can prevent the ink from exceeding the black-45-201032002 matrix 5BM which is the partition wall and invade the adjacent opening portion 7a to cause color mixing, thereby preventing local ink sputum from occurring. Poor charging problem, which can prevent pixel defects such as whitening, and by time-of-flight secondary ion mass spectrometer (Time of Flight) Secondary Ion Mass Spectroscopy, abbreviated as: T OF -SIMS) In the detection result of the negative ions detected, the total negative ion detection intensity of the black matrix substrate 7 is 1 and the fluoride ion detection intensity ratio at the time of the nominalization is better as the partition wall. The surface of the black matrix 5BM is 0.15 or more and less than 0.3, and the surface of the substrate 2 corresponding to the opening 7a of the black matrix 5BM is 0.05 or less. The surface of the black matrix 5BM corresponds to the opening 7a of the black matrix 5BM. The fluorine ion detection intensity ratio in the surface of the substrate 2 can be controlled to a specific range by adjusting the content of the fluorine-based surfactant in the photosensitive black resin composition used in forming the black matrix 5BM. It is used in relation to the entire solid content. In the fluorine content, the photosensitive black resin composition containing 0.0008 to 0.005 mass% (8 to 5 (?? 111) of a fluorine-based surfactant can be formed into a black matrix by forming a black matrix 5BM on the substrate 2. The fluoride ion detection intensity ratio of the surface of the 5BM is 0.15 or more, and the surface of the substrate 2 corresponding to the opening portion 7 a of the black matrix 5 B 氟 is fluoride ion. Measuring the intensity of the square of the black-matrix substrate 〇5 7 ratio.

黑色矩陣5ΒΜ的表面與黑色矩陣5ΒΜ的開口部7a所對 應的基板2表面中氟離子檢測強度比經控制在前述特定範 圍之黑色矩陣基板7,其具有成爲被以均勻狀態賦予相對 於噴墨印刷用油墨的疏液性之隔離壁的黑色矩陣5BM。医I 201032002 此,可以防止藉由噴墨印刷法在黑色矩陣5BM的開口部7a 印刷的噴墨印刷用油墨超出成爲隔離壁的黑色矩陣5BM而 使油墨侵入鄰接的開口部7a發生混色,同時可以防止發生 局部油墨塡充不良問題、即可以防止發生漏白等像素缺陷 成爲隔離壁的黑色矩陣5BM表面之氟離子檢測強度比 未達0.1 5時,成爲隔離壁的黑色矩陣5BM相對於噴墨印刷 φ 用油墨的疏液性不充分,無法充分發揮鄰接的彩色像素層 間的混色防止效果。又,黑色矩陣5BM表面之氟離子檢測 強度比爲0.3以上時,在基板2外周部(邊緣部)附近的彩 色像素層發生局部的漏白等像素缺陷。進而,黑色矩陣 5BM的開口部7a所對應的基板2表面之氟離子檢測強度比 超過0.05時,對於形成有彩色像素層的基板2表面亦賦予 相對於噴墨印刷用油墨的疏液性,使基板2外周部(邊緣 部)附近的彩色像素層發生局部的漏白等像素缺陷,同時 φ 黑色矩陣5BM表面的疏液性帶來的混色防止效果降低。 (彩色濾光片之製造) 接著,說明本發明的彩色濾光片之製造方法。圖2A以 及圖2B係顯示彩色濾光片製造方法之順序圖。且圖3 A以及 圖3B係顯示彩色濾光片構成之槪略圖。彩色濾光片之製造 方法包括黑色矩陣基板製備步驟和像素層形成步驟。 <黑色矩陣基板製備步驟> -47 - 201032002 黑色矩陣基板製備步驟係製備黑色矩陣基板的步驟, 如上述,製備在基板2上形成黑色矩陣5BM的黑色矩陣基 板7。 <像素層形成步驟> 在像素層形成步驟中,在黑色矩陣基板7上形成的隔 離壁所包圍之像素區域的黑色矩陣5BM的開口部7a上,藉 由噴墨印刷方式印刷噴墨印刷用油墨,形成彩色像素層。 彩色像素層由紅色彩色像素層、綠色彩色像素層以及藍色 彩色像素層之3原色彩色像素層構成。 像素層形成步驟中,如圖2A所示,對應於所形成之彩 色像素層的各種顏色,使用噴墨印刷用噴頭1 OR、10G、 10B,在黑色矩陣5BM的特定開口部7a上印刷各種顏色的 噴墨印刷用油墨1 1 R、1 1 G、1 1 B。至於噴墨印刷用噴頭並 無特别限定,可以使用壓電方式、氣泡噴射(Bubble ject )(註冊商標)方式、靜電方式等公知的噴頭,特佳爲壓 電方式。又,作爲噴墨印刷用油墨,可使用含有以公知方 法調製之公知著色劑、分散劑、利用熱或光而高分子化之 交聯性分子的單體或寡聚物、黏合劑樹脂、聚合引發劑、 以及溶劑等之公知噴墨印刷用油墨。 將各種顏色的噴墨印刷用油墨1 1 R、1 1 G、1 1 B印刷在 黑色矩陣5BM之特定開口部7a上時,由於各種顏色油墨的 固體成分濃度受到制約,因此形成的彩色像素層中,爲了 得到所期望的層厚以及著色濃度,相對於黑色矩陣5BM的 201032002 開口部7a的容積(開口面積x隔離壁高度)’有必要印刷 數倍以上體積之噴墨印刷用油墨1 1 R、1 1 G、1 1 B。 本實施形態之像素層形成步驟中’由於以均勻狀態賦 予相對於噴墨印刷用油墨1 1 R、1 1 G、1 1 B的疏液性之黑色 矩陣5BM的開口部7a上印刷各種顏色油墨11R、11G、11B ,故可防止油墨超出成爲隔離壁的黑色矩陣5BM而侵入鄰 接的開口部7a發生混色’可防止發生局部油墨塡充不良問 A 題、即可以防止發生漏白等像素缺陷。 黑色矩陣5ΒΜ之特定開口部7a上印刷各種顏色的噴墨 印刷用油墨1 1 R、1 1 G、1 1 B,若暴露於熱或光,則如圖2 B 所示,對應於印刷有各種顏色油墨的黑色矩陣5 BM的開口 部7a,形成紅色彩色像素層5R、綠色彩色像素層5G以及藍 色彩色像素層5B。如此,如圖3A所示,可製造在基板2上 形成由3原色的彩色像素層5R、5G、5B構成之著色圖案5 及位於鄰接的彩色像素層間的成爲隔離壁的黑色矩陣5BM φ 的彩色濾光片6。又,如圖3A所示之彩色濾光片6,係對應 於形成爲正方形的黑色矩陣5B Μ的開口部7a,形成有各種 顏色的彩色像素層5R、5G、5B者,藉由對應於形成爲長 方形的黑色矩陣5BM的開口部7a,形成各種顏色的彩色像 素層5R、5G、5B,可製造圖3B所示之彩色濾光片60。 (實施例) 以下,利用實施例進而詳細說明本發明,但本發明不 限定於該等實施例。 -49- 201032002 (感光性黑色樹脂組成物中氟系界面活性劑含量之影響) <氟系界面活性劑之合成> [氟系界面活性劑1之合成]The surface of the black matrix 5 与 and the surface of the substrate 2 corresponding to the opening portion 7 a of the black matrix 5 氟 have a fluorine ion detection intensity ratio of the black matrix substrate 7 controlled to the above-described specific range, and are provided in a uniform state with respect to inkjet printing. A black matrix 5BM of the lyophobic barrier wall using ink. In the case of the inkjet printing method, the inkjet printing ink printed on the opening 7a of the black matrix 5BM by the inkjet printing method can prevent the ink from entering the adjacent opening portion 7a by the black matrix 5BM which is the partition wall, and can be prevented from being mixed. Preventing the occurrence of local ink squeezing problems, that is, preventing the occurrence of pixel defects such as whitening, and the black matrix 5BM surface of the partition wall has a fluorine ion detection intensity ratio of less than 0.15, and the black matrix 5BM which becomes the partition wall is printed with respect to inkjet. The liquid repellency of the φ ink is insufficient, and the effect of preventing color mixture between adjacent color pixel layers cannot be sufficiently exhibited. Further, when the fluorine ion detecting intensity ratio of the surface of the black matrix 5BM is 0.3 or more, pixel defects such as partial whitening occur in the color pixel layer in the vicinity of the outer peripheral portion (edge portion) of the substrate 2. Further, when the ratio of the fluorine ion detection intensity of the surface of the substrate 2 corresponding to the opening 7a of the black matrix 5BM exceeds 0.05, the liquid repellency with respect to the ink for inkjet printing is also imparted to the surface of the substrate 2 on which the color pixel layer is formed. A pixel defect such as partial whitening occurs in the color pixel layer in the vicinity of the outer peripheral portion (edge portion) of the substrate 2, and the color mixing prevention effect due to the liquid repellency of the surface of the φ black matrix 5BM is lowered. (Manufacture of Color Filter) Next, a method of manufacturing the color filter of the present invention will be described. 2A and 2B are sequence diagrams showing a method of manufacturing a color filter. 3A and 3B are schematic views showing the constitution of a color filter. The manufacturing method of the color filter includes a black matrix substrate preparing step and a pixel layer forming step. <Black matrix substrate preparation step> -47 - 201032002 Black matrix substrate preparation step is a step of preparing a black matrix substrate, and as described above, a black matrix substrate 7 on which a black matrix 5BM is formed on the substrate 2 is prepared. <Pixel layer forming step> In the pixel layer forming step, inkjet printing is performed by inkjet printing on the opening portion 7a of the black matrix 5BM of the pixel region surrounded by the partition wall formed on the black matrix substrate 7. A color pixel layer is formed using ink. The color pixel layer is composed of a red color pixel layer, a green color pixel layer, and three primary color pixel layers of a blue color pixel layer. In the pixel layer forming step, as shown in FIG. 2A, inkjet printing heads 1 OR, 10G, and 10B are used to print various colors on the specific opening portion 7a of the black matrix 5BM, corresponding to the respective colors of the formed color pixel layer. Inkjet printing inks 1 1 R, 1 1 G, 1 1 B. The head for inkjet printing is not particularly limited, and a known nozzle such as a piezoelectric method, a bubble jet (registered trademark) method, or an electrostatic method can be used, and a piezoelectric method is particularly preferable. Further, as the ink for inkjet printing, a monomer or oligomer containing a known color former prepared by a known method, a dispersant, a crosslinkable molecule polymerized by heat or light, a binder resin, and polymerization can be used. A known ink for inkjet printing such as an initiator and a solvent. When inks 1 1 R, 1 1 G, and 1 1 B of inkjet printing of various colors are printed on the specific opening 7a of the black matrix 5BM, the color pixel layer is formed because the solid concentration of the ink of each color is restricted. In order to obtain a desired layer thickness and coloring density, it is necessary to print a plurality of times of inkjet printing ink 1 1 R with respect to the volume (opening area x partition wall height) of the opening portion 7a of the black matrix 5BM 201032002. , 1 1 G, 1 1 B. In the pixel layer forming step of the present embodiment, 'color inks are printed on the opening portion 7a of the black matrix 5BM which is provided with the liquid repellency to the inkjet printing inks 1 1 R, 1 1 G, and 1 1 B in a uniform state. Since 11R, 11G, and 11B prevent the ink from exceeding the black matrix 5BM which is the partition wall and invade the adjacent opening portion 7a to cause color mixing, it is possible to prevent the occurrence of local ink squeezing problems, that is, to prevent occurrence of pixel defects such as whitening. The inkjet printing inks 1 1 R, 1 1 G, and 1 1 B of various colors are printed on the specific openings 7a of the black matrix 5, and if exposed to heat or light, as shown in FIG. The opening portion 7a of the black matrix 5 BM of the color ink forms a red color pixel layer 5R, a green color pixel layer 5G, and a blue color pixel layer 5B. Thus, as shown in FIG. 3A, the color pattern 5 composed of the color pixel layers 5R, 5G, and 5B of the three primary colors and the color of the black matrix 5BM φ serving as the partition wall between the adjacent color pixel layers can be manufactured. Filter 6. Further, the color filter 6 shown in FIG. 3A corresponds to the opening portion 7a of the black matrix 5B that is formed in a square shape, and the color pixel layers 5R, 5G, and 5B of various colors are formed by correspondingly forming Color pixel layers 5R, 5G, and 5B of various colors are formed in the opening portion 7a of the rectangular black matrix 5BM, and the color filter 60 shown in Fig. 3B can be manufactured. (Examples) Hereinafter, the present invention will be described in detail by way of examples, but the present invention is not limited to the examples. -49- 201032002 (Impact of fluorine-based surfactant content in photosensitive black resin composition) <Synthesis of fluorine-based surfactant> [Synthesis of fluorine-based surfactant 1]

在具備攪拌裝置、冷凝管、溫度計之玻璃燒瓶中,加 入下述式(4)所示的含有氟烷基之丙烯酸酯單體29重量 份、下述式(5)所示的含有有機矽之烯屬不飽和單體26 重量份、於側鏈具有聚氧乙烯(分子量400 )之單丙烯酸 酯化合物(單末端爲甲氧基醚)45重量份、丙二醇單甲基 醚乙酸酯200重量份,於氮氣氣流中、回流下,滴加作爲 聚合引發劑之偶氮雙異丁腈1重量份,在8 0 °C回流1 2小時 進行聚合反應,得到氟系界面活性劑1。 【化6】 0 f3c(cf2)5、 a 1 / , …⑷ 【化7】 (H3C)3.SiOSi(CH3)2In a glass flask equipped with a stirring device, a condenser, and a thermometer, 29 parts by weight of a fluoroalkyl group-containing acrylate monomer represented by the following formula (4) and an organic oxime represented by the following formula (5) are added. 26 parts by weight of an ethylenically unsaturated monomer, 45 parts by weight of a monoacrylate compound having a polyoxyethylene (molecular weight of 400) in a side chain (single terminal is a methoxy ether), and 200 parts by weight of propylene glycol monomethyl ether acetate One part by weight of azobisisobutyronitrile as a polymerization initiator was added dropwise under a nitrogen gas stream under reflux, and the mixture was refluxed at 80 ° C for 12 hours to carry out a polymerization reaction to obtain a fluorine-based surfactant 1. [6] 0 f3c(cf2)5, a 1 / , (4) (H3C) 3.SiOSi(CH3)2

• . ·⑸• . . . (5)

氟系界面活性劑1爲具有下列結構單位及比例之化合 物:在式(la)中,R1爲甲基、X1爲- C〇2-、L1爲伸乙基 、R2爲- (SUCHshOh-SUCHsh之結構單位爲26質量% :式 (lb)中’ R3爲氫原子、l2爲單鍵、R4爲伸乙基、η爲9、 R5爲甲基之結構單位爲45質量% ;以及式(lc)中,尺6爲 甲基、X2爲-C〇2-、L3爲伸乙基、Rf爲全氟己基之結構單 -50- 201032002 位爲29質量%。 [氟系界面活性劑2之合成] 除了式(4)所示之含有氟烷基之丙烯酸酯單體變更 爲21重量份、式(5)所示之含有有機矽之嫌屬不飽和單 體變更爲18重量份、於側鏈具有聚氧乙烯(分子量4〇〇 ) 之單丙烯酸酯化合物(單末端爲甲氧基醚)變更爲58重量 φ 份,且進而添加甲基丙烯酸2-羥基乙酯3重量份以外,與 氟系界面活性劑1同樣地操作進行聚合反應,得到氟系界 面活性劑2。 氟系界面活性劑2具有下列結構單位及比例之化合物 :式(la)中,R1爲甲基、X1爲-C02-、L1爲伸乙基、R2 爲- (SKCHhhOh-SKCHsh之結構單位爲18質量%;式(la )中,R1爲甲基、X1爲- C02-、L1爲伸乙基、R2爲羥基之 結構單位爲3質量% :式(lb)中,R3爲氫原子、L2爲單鍵 φ 、R4爲伸乙基、η爲9、R5爲甲基之結構單位爲58質量% ; 以及式(lc)中,R6爲甲基、X2爲-C02-、L3爲伸乙基、 Rf爲全氟己基之結構單位爲21質量%。 (實施例1 ) 將遮光劑[黑色顏料(C.I.顏料黑7) 40質量份與聚胺 基甲酸酯系分散劑12質量份之混合物]52質量份 '黏合劑 樹脂[下述式(6 )所示的化合物3 0 0質量份和聯苯四羧酸 二酐50質量份和四氫鄰苯二甲酸酐5〇質量份之反應生成物 -51 - 201032002 ]33質量份、具有烯屬不飽和鍵且可加成聚合之化合物二 季戊四醇六丙烯酸酯11質量份、光聚合引發劑的2,4-雙( 三氯甲基)-6-胡椒基-1,3,5-三嗪5.0質量份、光聚合引發 助劑的雙甲酮3.0質量份、0.68質量份(相對於全部固體成 分含量:65ppm,相對於全部固體成分的氟含量:llppm )氟系界面活性劑1、及溶劑的丙二醇單甲基醚乙酸酯3 58 質量份混合,得到實施例1之感光性黑色樹脂組成物。The fluorine-based surfactant 1 is a compound having the following structural units and ratios: in the formula (la), R1 is a methyl group, X1 is -C〇2-, L1 is an exoethyl group, and R2 is - (SUCHshOh-SUCHsh The structural unit is 26% by mass: in the formula (lb), R3 is a hydrogen atom, l2 is a single bond, R4 is an exoethyl group, η is 9, and R5 is a methyl group having a structural unit of 45 mass%; and formula (lc) In the structure, the ruler 6 is a methyl group, the X2 is -C〇2-, the L3 is an exoethyl group, and the Rf is a perfluorohexyl group. The structure is -50 to 201032002, which is 29% by mass. [Synthesis of a fluorine-based surfactant 2] The fluoroalkyl group-containing acrylate monomer represented by the formula (4) was changed to 21 parts by weight, and the organic ruthenium-containing unsaturated monomer represented by the formula (5) was changed to 18 parts by weight, and had a side chain. The polyacrylate (molecular weight 4 Å) monoacrylate compound (single terminal methoxy ether) was changed to 58 parts by weight, and further, 3 parts by weight of 2-hydroxyethyl methacrylate was added, and a fluorine-based interface was added. The active agent 1 is subjected to a polymerization reaction in the same manner to obtain a fluorine-based surfactant 2. The fluorine-based surfactant 2 has the following structural units and ratios of compounds. In the formula (la), R1 is a methyl group, X1 is -C02-, L1 is an exoethyl group, and R2 is - (the structural unit of SKCHhhOh-SKCHsh is 18% by mass; in the formula (la), R1 is a methyl group, X1 is -C02-, L1 is an exoethyl group, and R2 is a hydroxyl group. The structural unit is 3% by mass: in the formula (lb), R3 is a hydrogen atom, L2 is a single bond φ, R4 is an exoethyl group, and η is 9. R5 is a structural unit of a methyl group of 58% by mass; and in the formula (lc), R6 is a methyl group, X2 is -C02-, L3 is an exoethyl group, and Rf is a perfluorohexyl group. The structural unit is 21% by mass. Example 1) A mixture of 40 parts by mass of a black pigment (CI Pigment Black 7) and 12 parts by mass of a polyurethane dispersant] 52 parts by mass of a binder resin [Example (6) Reaction product of 30 parts by mass of the compound and 50 parts by mass of biphenyltetracarboxylic dianhydride and 5 parts by mass of tetrahydrophthalic anhydride. -51 - 201032002 ] 33 parts by mass, having an ethylenically unsaturated bond And 11 parts by mass of the compound dipentaerythritol hexaacrylate which can be added and polymerized, and 5.0 parts by mass of 2,4-bis(trichloromethyl)-6-piperidin-1,3,5-triazine of the photopolymerization initiator, Double of photopolymerization initiator 3.0 parts by mass of ketone, 0.68 parts by mass (relative to total solid content: 65 ppm, fluorine content relative to all solid components: ll ppm) fluorine-based surfactant 1, and solvent propylene glycol monomethyl ether acetate 3 58 mass The mixture was mixed to obtain a photosensitive black resin composition of Example 1.

【化8】【化8】

ΗΗ

I o-ch2-ch-ch2-o— c-c=ch2 OH Ο •··(6) (實施例2 ) 除變更氟系界面活性劑1的添加量’使相對於全部固 體成分的含量爲130pPm (相對於全部固體成分的氟含量: 22ppm )以外,與實施例1同樣,得到實施例2之感光性黑 色樹脂組成物。 (實施例3 ) 除變更氟系界面活性劑1的添加量’使相對於全部固 體成分的含量爲21 Oppm (相對於全部固體成分的氟含量: 3 5ppm )以外,與實施例1同樣,得到實施例3之感光性黑 色樹脂組成物。 •52- 201032002 (實施例4 ) 除變更氟系界面活性劑)的添加量,使相對於全部固 體成分的含量爲160Ppm (相對於全部固體成分的氟含量: 27ppm )以外,與實施例i同樣,得到實施例4之感光性黑 色樹脂組成物。 (實施例5 ) 除了由氟系界面活性劑1變更爲氟系界面活性劑2,且 相對於全部固體成分的氟系界面活性劑2的含量爲260Ppm (相對於全部固體成分的氟含量:4 5ppm )以外,與實施 例1同樣,得到實施例5之感光性黑色樹脂組成物。 (比較例1 ) 除了不添加氟系界面活性劑1以外,與實施例1同樣, φ 得到比較例1之感光性黑色樹脂組成物。 (比較例2 ) 除了由氟系界面活性劑1變更爲下述式(7)所示的有 機矽系界面活性劑,使相對於全部固體成分的界面活性劑 的含量爲lOOppm以外,與實施例1同樣’得到比較例2之感 光性黑色樹脂組成物。 【化9】I o-ch2-ch-ch2-o-cc=ch2 OH Ο (6) (Example 2) The amount of addition of the fluorine-based surfactant 1 was changed to 130 pPm with respect to the total solid content ( A photosensitive black resin composition of Example 2 was obtained in the same manner as in Example 1 except that the fluorine content of all the solid components was 22 ppm. (Example 3) The same procedure as in Example 1 was carried out except that the amount of addition of the fluorine-based surfactant 1 was changed so that the content of the total solid content was 21 Oppm (the fluorine content of all the solid components: 3 5 ppm). The photosensitive black resin composition of Example 3. 52-201032002 (Example 4) The same as Example i except that the amount of addition of the fluorine-based surfactant was changed to 160 Ppm (the fluorine content of all solid components: 27 ppm) with respect to the total solid content. The photosensitive black resin composition of Example 4 was obtained. (Example 5) The fluorine-based surfactant 2 was changed to the fluorine-based surfactant 2, and the content of the fluorine-based surfactant 2 relative to the total solid content was 260 Ppm (the fluorine content relative to the total solid content: 4) A photosensitive black resin composition of Example 5 was obtained in the same manner as in Example 1 except for 5 ppm. (Comparative Example 1) A photosensitive black resin composition of Comparative Example 1 was obtained in the same manner as in Example 1 except that the fluorine-based surfactant 1 was not added. (Comparative Example 2) The content of the surfactant based on the entire solid component was changed to 100 ppm, except that the fluorine-based surfactant 1 was changed to the organic lanthanoid surfactant represented by the following formula (7). 1 - The photosensitive black resin composition of Comparative Example 2 was obtained in the same manner. 【化9】

AcO-POA-(- SKCH3)2〇-l—POA-Ac ---(7) -53- 201032002 [式中,POA表示聚氧化烯結構,且’ ^表示乙醯基]。 (比較例3 ) 除變更以式(7)所示的有機矽系界面活性劑的添加 量,使相對於全部固體成分的界面活性劑的含量爲8〇 PPm 以外,與比較例2同樣,得到比較例3之感光性黑色樹脂組 成物。 (比較例4 ) 除變更以式(7)所示的有機矽系界面活性劑的添加 量,使相對於全部固體成分的界面活性劑的含量爲16〇Ppm 以外,與比較例2同樣,得到比較例4之感光性黑色樹脂組 成物。 (比較例5 ) 除變更氟系界面活性劑1的添加量,使相對於全部固 體成分的含量爲32PPm (相對於全部固體成分的氟含量: 6ppm )以外,與實施例1同樣,得到比較例5之感光性黑色 樹脂組成物。 (比較例6 ) 除變更氟系界面活性劑1的添加量,使相對於全部固 體成分的含量爲320ppm (相對於全部固體成分的氟含量: 5 4ppm )以外,與實施例1同樣,得到比較例6之感光性黑 201032002 色樹脂組成物。 <黑色矩陣基板的製造> 分别將實施例1〜5以及比較例1〜6之感光性黑色樹脂 組合物利用旋塗法塗佈於無鹼玻璃基板(型號:#1 737, 康寧股份有限公司製)上,真空乾燥後在l〇〇°C加熱90秒 ,在無鹼玻璃基板上形成由各感光性黑色樹脂組成物的固 φ 體成分所構成的感光性黑色樹脂組成物層。將形成之感光 性黑色樹脂組成物層進行230 °Cx20分鐘熱處理後的膜厚反 映爲旋塗機的塗佈條件,由此調整感光性黑色樹脂組成物 層的厚度爲規定厚度。該感光性黑色樹脂組成物層之膜厚 成爲後述的黑色矩陣中隔離壁的高度。膜厚使用膜厚計( 商品名:Dektak,ULVAC股份有限公司製)測定。 接著,在形成有感光性黑色樹脂組成物層之無鹼玻璃 基板上,透過具有特定隔離壁圖案的光罩,以貼近間隙 φ 15〇μιη照射紫外線(照射量爲lOOmJ/cm2 :以I線換算)進 行曝光。使用具備具有CD19pm、長方形的開口部66X 226μιη的重複圖案的光罩作爲隔離壁圖案。 接著,將曝光後之感光性黑色樹脂組成物層藉由顯影 液(CD液:富士膠捲電子材料股份有限公司製,稀釋5 0倍 )進行26 tx80秒淋洗顯影,接著用純水洗滌,在潔淨烘 箱中以230 °C X20分鐘燒成,得到形成有黑色矩陣(隔離壁 樹 色 黑 性 光 感 的 5 例 施 實 及 以 4 。 例 板施 基實 ΒΓ 陣月 矩使 色於 黑對 的’ Ν 又 案 -55- 201032002 組成物製造的黑色矩陣基板中的黑色矩陣,使用各種標準 溶劑測定接觸角,以Zismanri方法測定表面能,測定結果 分別爲 22.9nN/m及 23.0nN/m » <彩色濾光片之製造〉 [噴墨印刷用油墨之製備] 製備含有15質量份作爲著色劑的C.I.顏料藍15 : 6 、 2質量份C.I.顏料紫23、7質量份聚酯系分散劑、餘量爲作 爲溶劑的二丙二醇單甲基醚乙酸酯(DPMA )的藍色著色 劑分散液。同樣地按照表1所示組成,製備綠色著色劑分 散液以及紅色著色劑分散液。 [表1] 紅色著色劑分散 液(質量份) 綠色著色劑分散 液(質量份) 藍色著色劑分散 液(質量份) 著色劑 PR242 10 - - PR177 10 - PG36 • 12 - PY150 5 - PB15:6 - 15 PV23 • - 2 分散劑 分散劑1 1 7 - - 分散劑2 • 7 - 分散劑3 卸 - 7 溶劑 EDGAC 74 - - DPMA - 75 77AcO-POA-(-SKCH3)2〇-l-POA-Ac ---(7) -53- 201032002 [wherein, POA represents a polyoxyalkylene structure, and '^ represents an ethylidene group]. (Comparative Example 3) The same procedure as in Comparative Example 2 was carried out except that the amount of the organic lanthanoid surfactant added by the formula (7) was changed so that the content of the surfactant relative to the entire solid content was 8 〇 PPm. The photosensitive black resin composition of Comparative Example 3. (Comparative Example 4) The same procedure as in Comparative Example 2 was carried out except that the amount of the organic lanthanoid surfactant added by the formula (7) was changed so that the content of the surfactant relative to the entire solid content was 16 〇 Ppm. The photosensitive black resin composition of Comparative Example 4. (Comparative Example 5) A comparative example was obtained in the same manner as in Example 1 except that the amount of the fluorine-based surfactant 1 was changed so that the content of all the solid components was 32 ppm (the fluorine content of all the solid components was 6 ppm). A photosensitive black resin composition of 5. (Comparative Example 6) A comparison was made in the same manner as in Example 1 except that the amount of the fluorine-based surfactant 1 was changed so that the content of all the solid components was 320 ppm (the fluorine content of all the solid components: 5 4 ppm). Photosensitive black of Example 6 201032002 Color resin composition. <Production of Black Matrix Substrate> The photosensitive black resin compositions of Examples 1 to 5 and Comparative Examples 1 to 6 were applied to an alkali-free glass substrate by a spin coating method (Model: #1 737, Corning Co., Ltd.) The product was heated in a vacuum oven and heated at 10 ° C for 90 seconds to form a photosensitive black resin composition layer composed of a solid φ component of each photosensitive black resin composition on the alkali-free glass substrate. The thickness of the photosensitive black resin composition layer formed by heat treatment at 230 ° C for 20 minutes is reflected by the coating conditions of the spin coater, whereby the thickness of the photosensitive black resin composition layer is adjusted to a predetermined thickness. The film thickness of the photosensitive black resin composition layer is the height of the partition wall in the black matrix to be described later. The film thickness was measured using a film thickness meter (trade name: Dektak, manufactured by ULVAC Co., Ltd.). Next, on the alkali-free glass substrate on which the photosensitive black resin composition layer was formed, the mask was passed through a mask having a specific partition wall pattern, and the ultraviolet ray was irradiated close to the gap φ 15 〇 μη (the amount of irradiation was 100 mJ/cm 2 : converted by I line) ) for exposure. A reticle having a repeating pattern having a CD 19 pm and a rectangular opening portion 66X 226 μm was used as the partition wall pattern. Then, the exposed photosensitive black resin composition layer was subjected to a 26 t x 80 second rinse development by a developing solution (CD liquid: Fujifilm Electronic Materials Co., Ltd., diluted 50 times), followed by washing with pure water. In a clean oven, it was fired at 230 °C for X20 minutes to obtain a black matrix (5 cases of blackening of the black color of the partition wall and the application of 4). The example of the board is the base of the moon. ' Ν 案 -55- 201032002 The black matrix in the black matrix substrate manufactured by the composition, the contact angle was measured using various standard solvents, and the surface energy was measured by the Zismanri method, and the measurement results were 22.9 nN/m and 23.0 nN/m, respectively. Manufacture of color filter> [Preparation of ink for inkjet printing] Preparation of 15 parts by mass of CI Pigment Blue 15 as a coloring agent: 2, 2 parts by mass of CI Pigment Violet 23, 7 parts by mass of a polyester-based dispersant, The balance was a blue colorant dispersion of dipropylene glycol monomethyl ether acetate (DPMA) as a solvent, and a green colorant dispersion and a red colorant dispersion were prepared in the same manner as shown in Table 1. 1] Red colorant dispersion (parts by mass) Green colorant dispersion (parts by mass) Blue colorant dispersion (parts by mass) Colorant PR242 10 - - PR177 10 - PG36 • 12 - PY150 5 - PB15:6 - 15 PV23 • - 2 Dispersant Dispersant 1 1 7 - - Dispersant 2 • 7 - Dispersant 3 Unloading - 7 Solvent EDGAC 74 - - DPMA - 75 77

表1中,PR242表示C.I·顏料紅242’ PR177表不C·1·顏 -56- 201032002 料紅177,PG36表示C.I.顏料綠36,PY150表示C.I.顏料黃 150,PB15: 6表示C.I.顏料藍15: 6,PV2 3表示C.I.顏料紫 23。另外,EDGAC表示二乙二醇單乙基醚乙酸酯,DPMA 表示二丙二醇單甲基醚乙酸酯。 於製備的藍色顏料分散液61質量份中添加丙烯酸樹脂 4質量份、作爲溶劑的二乙二醇單丁基醚(BDG) 35質量 份,製備藍色噴墨印刷用油墨。同樣地按照表2所示組成 ,製備綠色噴墨印刷用油墨、紅色噴墨印刷用油墨。 [表2] 噴墨印刷用油墨 紅色(質量份) 綠色(質量份) 藍色(質量份) 著色劑分散液 90 86 61 丙烯酸樹脂 3 2 4 EDGAC 7 _ - 溶劑 DPMA _ 12 BDG - - 35 表2中,EDGAC表示二乙二醇單乙基醚乙酸酯,DPMA 表示二丙二醇單甲基醚乙酸酯,BDG表示二乙二醇單丁基 醚。 [彩色濾光片之製備] 在使用實施例1〜5以及比較例1〜6之感光性黑色樹脂 組成物製造的各黑色矩陣基板中的黑色矩陣的開口部中, 使用噴墨印刷用噴頭,同時塡充紅色油墨120pL、綠色油 -57- 201032002 墨120pL、藍色油墨130pL,在40°C x2分鐘預乾燥後,在 230°Cx20分鐘進行烘烤製備彩色濾光片。 [評價] 對於如上製備的各彩色濾光片,進行目視觀察及顯微 鏡觀察,評價對黑色矩陣開口部的油墨塡充狀況、鄰接像 素層間有無混色。至於油墨塡充狀況,特別注意彩色濾光 片畫面的周邊部(邊緣鄰接像素)上發生的油墨塡充不良 (漏白)’與畫面中央部的塡充狀態一倂評價。沒有漏白 發生的情況作爲“〇”,有漏白發生的情況作爲‘‘ χ,,。 至於鄰接像素層間的混色,沒有發生混色的情況作爲“〇 ” ’發生混色的情況作爲“ χ ” 。且,至於綜合評價,“ 漏白”以及“混色”均未發生的情況作爲“〇”,發生任 —種的情況作爲“ χ” 。評價結果如表3所示。 201032002 [表3]In Table 1, PR242 indicates CI·Pigment Red 242' PR177 No C.1·Yan-56-201032002 Red 177, PG36 indicates CI Pigment Green 36, PY150 indicates CI Pigment Yellow 150, and PB15: 6 indicates CI Pigment Blue 15 : 6, PV2 3 represents CI Pigment Violet 23. Further, EDGAC represents diethylene glycol monoethyl ether acetate, and DPMA represents dipropylene glycol monomethyl ether acetate. To 61 parts by mass of the prepared blue pigment dispersion liquid, 4 parts by mass of an acrylic resin and 35 parts by mass of diethylene glycol monobutyl ether (BDG) as a solvent were added to prepare an ink for blue inkjet printing. Similarly, the ink for green inkjet printing and the ink for red inkjet printing were prepared in accordance with the composition shown in Table 2. [Table 2] Ink for inkjet printing (parts by mass) Green (parts by mass) Blue (parts by mass) Colorant dispersion 90 86 61 Acrylic resin 3 2 4 EDGAC 7 _ - Solvent DPMA _ 12 BDG - - 35 In 2, EDGAC represents diethylene glycol monoethyl ether acetate, DPMA represents dipropylene glycol monomethyl ether acetate, and BDG represents diethylene glycol monobutyl ether. [Preparation of color filter] In the opening of the black matrix in each of the black matrix substrates produced using the photosensitive black resin compositions of Examples 1 to 5 and Comparative Examples 1 to 6, an inkjet printing head was used. At the same time, red ink 120pL, green oil-57-201032002 ink 120pL, blue ink 130pL, and pre-dried at 40 ° C x 2 minutes, baked at 230 ° C x 20 minutes to prepare a color filter. [Evaluation] For each of the color filters prepared as above, visual observation and microscopic observation were carried out, and the state of ink filling in the opening portion of the black matrix and the presence or absence of color mixing between adjacent pixel layers were evaluated. As for the ink filling state, it is particularly noted that the ink squeezing failure (leakage) occurring on the peripheral portion (edge adjacent pixel) of the color filter screen is evaluated in the same manner as the state of the center of the screen. There is no such thing as a "〇", and there is a situation where a white leak occurs as ‘‘χ,,. As for the color mixture between adjacent pixel layers, the case where color mixing does not occur is referred to as "χ" when "混" is mixed. Moreover, as for the comprehensive evaluation, the case of "leak white" and "mixed color" did not occur as "〇", and the case of any kind of occurrence was referred to as "χ". The evaluation results are shown in Table 3. 201032002 [Table 3]

感光性黑色樹脂組成物 隔離壁 高度 (μιη) 評價結果 編號 界面活性劑 漏白 混色 綜合 評價 種類 添加量 (ppm) 氟換算添加量 (PPm) 中央部 邊緣部 實施例1 氟系界面活性劑1 65 11 2.2 〇 〇 〇 〇 實施例2 氟系界面活性劑1 130 22 1.6 〇 〇 〇 〇 實施例3 氟系界面活性劑ίΐ 210 35 1.5 〇 〇 〇 〇 實施例4 氟系界面活性劑1 160 27 2.1 〇 〇 〇 〇 實施例5 氟系界面活性劑2 260 45 2.3 〇 〇 〇 〇 比較例1 未添加 0 0 1.6 〇 〇 X X 比較例2 矽系界面活性劑 100 0 2.3 〇 X 〇 X 比較例3 矽系界面活性劑 80 0 2.3 〇 X X X 比較例4 矽系界面活性劑 160 0 1.6 X X 〇 X 比較例5 氟系界面活性劑1 32 6 2.1 〇 〇 X X 比較例6 氟系界面活性劑1 320 54 2.2 X X 〇 X 由表3可以明確看出,使用以相對於全部固體成分的 氟含量計,含有8〜50ppm之氟系界面活性劑之實施例1〜5 之感光性黑色樹脂組成物製備的彩色濾光片,並未發生混 φ 色,亦未發生漏白等像素缺陷。~ 又,圖4表示使用實施例之感光性黑色樹脂組成物製 * 備之彩色濾光片的表面放大照片,圖5表示使用比較例之 感光性黑色樹脂組成物製備之彩色濾光片的表面放大照片 。由圖4、5的彩色濾光片的表面放大照片,亦可知使用比 較例的感光性黑色樹脂組成物製備的彩色濾光片發生混色 、漏白等像素缺陷,與此相反,使用實施例的感光性黑色 樹脂組成物製備的彩色濾光片並未發生混色、漏白等像素 缺陷。 -59- 201032002 (黑色矩陣基板中氟離子檢測強度比之影響) <感光性黑色樹脂組成物之調製〉 [感光性黑色樹脂組成物1之調製] 將遮光劑[黑色顏料(C.I.顏料黑7 ) 40質量份及聚胺 基甲酸酯系分散劑1 2質量份之混合物]5 2質量份、黏合劑 樹脂[上述式(6)所示的化合物3 00質量份及聯苯四羧酸 二酐50質量份和四氫鄰苯二甲酸酐50質量份的反應生成物 ]33質量份、具有烯屬不飽和鍵且可加成聚合的化合物二 季戊四醇六丙烯酸酯11質量份、光聚合引發劑的2,4-雙( 三氯甲基)-6-胡椒基-1,3,5-三嗪5.0質量份、光聚合引發 助劑的雙甲酮3.0質量份、2.8質量份(相對於全部固體成 分的含量:260ppm,相對於全部固體成分的氟含量: 4 7ppm )氟系界面活性劑1、及溶劑的丙二醇單甲基醚乙酸 酯3 58質量份混合,得到感光性黑色樹脂組成物1。 [感光性黑色樹脂組成物2之調製] 除變更氟系界面活性劑1的添加量,使相對於全部固 體成分的含量爲21 Oppm (相對於全部固體成分的氟含量: 4 0ppm )以外,與感光性黑色樹脂組成物1同樣,得到感光 性黑色樹脂組成物2。 [感光性黑色樹脂組成物3之調製] 除變更氟系界面活性劑1的添加量,使相對於全部固 -60- 201032002 體成分的含量爲105PPm (相對於全部固體成分的氟含量: 2 Op pm )以外,與感光性黑色樹脂組成物1同樣,得到感光 性黑色樹脂組成物3。 [感光性黑色樹脂組成物4之調製] 除了不添加氟系界面活性劑1以外,與感光性黑色樹 脂組成物1同樣,得到感光性黑色樹脂組成物4。 [感光性黑色樹脂組成物5之調製] 除變更氟系界面活性劑1的添加量,使相對於全部固 體成分的含量爲35ppm (相對於全部固體成分的氟含量: 6ppm )以外,與感光性黑色樹脂組成物1同樣,得到感光 性黑色樹脂組成物5。 [感光性黑色樹脂組成物6之調製] φ 除了變更氟系界面活性劑1的添加量,使相對於全部 固體成分的含量爲315ppm (相對於全部固體成分的氟含量 :5 7ppm )以外,與感光性黑色樹脂組成物1同樣,得到感 光性黑色樹脂組成物6。 <黑色矩陣基板之製造> (實施例6 ) 將感光性黑色樹脂組成物1利用旋塗法塗佈在無鹼玻 璃基板(型號:#1737,康寧股份有限公司製)上,真空 -61 - 201032002 乾燥後,在100 °C下加熱90秒,在無鹼玻璃基板上形成由 感光性黑色樹脂組成物1之固體成分所構成的感光性黑色 樹脂組成物層。將形成的感光性黑色樹脂組成物層在230 °C下進行熱處理20分鐘後的膜厚反映爲旋塗機的塗佈條件 ,由此調整感光性黑色樹脂組成物層的厚度爲規定厚度。 該感光性黑色樹脂組成物層的膜厚成爲後述的黑色矩陣中 隔離壁高度。膜厚使用膜厚計(商品名:Dektak,ULVAC 股份有限公司製)測定,其結果爲1 .6μιη。 接著,在形成有感光性黑色樹脂組成物層的無鹼玻璃 基板上,透過具有特定的隔離壁圖案的光罩,以貼近間隙 15 0μ«ι照射紫外線(照射量爲lOOmJ/cm2 :以I線換算)進 行曝光。使用具備具有CD19pm、長方形的開口部66x 226 μπι的重複圖案之光罩作爲隔離壁圖案。 接著,將曝光後的感光性黑色樹脂組成物層藉由顯影 液(CD液:富士膠捲電子材料股份有限公司,稀釋5 0倍) 於26°C進行80秒淋洗顯影,接著用純水洗滌,在潔淨烘箱 中在23 0 °C進行20分鐘燒成,得到形成有黑色矩陣(隔離 壁圖案)的實施例6之黑色矩陣基板。 對於所得到的實施例6之黑色矩陣基板,使用飛行時 間型二次離子質量分析計(TOF-SIMS )的Physical Electronics公司製的TRIFT2 (測定光束徑:5〜1 Ομιη )測 定黑色矩陣的表面及黑色矩陣的開口部所對應的基板表面 中的氟離子。氟離子的測定在容易發生油墨塡充不良的邊 緣附近部所對應的黑色矩陣的上側表面以及黑色矩陣的開 -62- 201032002 口部表面進行,用氟離子相對於各表面全部負離子的信號 強度的積分値的強度比進行比較。 實施例6的黑色矩陣基板中氟離子的測定結果爲’於 黑色矩陣的上側表面之氟離子檢測強度比爲0·28 ’於黑色 矩陣開口部所對應的基板表面之氟離子檢測強度比爲〇·03 φ (實施例7 ) 除了將感光性黑色樹脂組成物1變更爲感光性黑色樹 脂組成物2以外,與實施例6同樣,得到隔離壁高度爲 1.5μιη之實施例7的黑色矩陣基板。實施例7的黑色矩陣基 板中氟離子測定結果爲,於黑色矩陣的上側表面之氟離子 檢測強度比爲〇_22 ’於黑色矩陣開口部所對應的基板表面 之氟離子檢測強度比爲〇.〇2。 φ (實施例8 ) 除了將感光性黑色樹脂組成物1變更爲感光性黑色樹 脂組成物3以外,與實施例6同樣,得到隔離壁咼度爲 2.3μηι之實施例8的黑色矩陣基板。實施例8的黑色矩陣基 板中氟離子測定結果爲,於黑色矩陣的上側表面之氟離子 檢測強度比爲0.29,於黑色矩陣開口部所對應的基板表面 之氟離子檢測強度比爲〇.〇4。 (比較例7 ) -63- 201032002 除了將感光性黑色樹脂組成物1變更爲感光性黑色樹 脂組成物4以外,與實施例6同樣,得到隔離壁高度爲 1.6 μηι之比較例7的黑色矩陣基板。比較例7的黑色矩陣基 板中氟離子測定結果爲,於黑色矩陣的上側表面之氟離子 檢測強度比爲0.001以下,於黑色矩陣開口部所對應的基 板表面之氟離子檢測強度比爲0.001以下。 (比較例8 ) 除了將感光性黑色樹脂組成物1變更爲感光性黑色樹 脂組成物5以外,與實施例6同樣,得到隔離壁高度爲 1.6 μιη之比較例8的黑色矩陣基板。比較例8的黑色矩陣基 板之氟離子測定結果爲,於黑色矩陣的上側表面之氟離子 檢測強度比爲〇. 1 2,於黑色矩陣開口部所對應的基板表面 之氟離子檢測強度比爲0.02。Photosensitive black resin composition partition wall height (μιη) Evaluation result No. Surfactant leakage white color mixed comprehensive evaluation type addition amount (ppm) Fluorine conversion addition amount (PPm) Center portion edge portion Example 1 Fluorine-based surfactant 1 65 11 2.2 〇〇〇〇 Example 2 Fluoride-based surfactant 1 130 22 1.6 〇〇〇〇 Example 3 Fluoride-based surfactant ΐ 210 35 1.5 〇〇〇〇 Example 4 Fluoride-based surfactant 1 160 27 2.1 〇〇〇〇 Example 5 Fluoride-based surfactant 2 260 45 2.3 〇〇〇〇Comparative Example 1 Not added 0 0 1.6 〇〇XX Comparative Example 2 Lanthanide surfactant 100 0 2.3 〇X 〇X Comparative Example 3 矽Surfactant 80 0 2.3 〇XXX Comparative Example 4 Lanthanide surfactant 160 0 1.6 XX 〇X Comparative Example 5 Fluorinated surfactant 1 32 6 2.1 〇〇XX Comparative Example 6 Fluorinated surfactant 1 320 54 2.2 XX 〇X As apparent from Table 3, the preparation of the photosensitive black resin composition of Examples 1 to 5 containing 8 to 50 ppm of a fluorine-based surfactant based on the fluorine content of the entire solid content was used. A color filter, color mixing does not occur φ, pixel defect trapping nor the like occur. Further, Fig. 4 shows a surface enlarged photograph of a color filter prepared by using the photosensitive black resin composition of the embodiment, and Fig. 5 shows the surface of a color filter prepared using the photosensitive black resin composition of the comparative example. Zoom in on the photo. The surface of the color filter of FIGS. 4 and 5 is enlarged, and it is also known that the color filter prepared by using the photosensitive black resin composition of the comparative example is subjected to pixel defects such as color mixing and whitening. On the contrary, the embodiment is used. The color filter prepared by the photosensitive black resin composition did not cause pixel defects such as color mixing and whitening. -59- 201032002 (Impact of Fluoride Ion Intensity Ratio in Black Matrix Substrate) <Preparation of Photosensitive Black Resin Composition> [Modulation of Photosensitive Black Resin Composition 1] Anti-Suning Agent [Black Pigment (CI Pigment Black 7) 40 parts by mass and a mixture of 12 parts by mass of a polyurethane dispersant] 5 2 parts by mass, a binder resin [300 parts by mass of the compound represented by the above formula (6) and biphenyltetracarboxylic acid Reaction product of 50 parts by mass of anhydride and 50 parts by mass of tetrahydrophthalic anhydride] 33 parts by mass of 11 parts by mass of compound dipentaerythritol hexaacrylate having ethylenically unsaturated bond and addition polymerizable, photopolymerization initiator 5.0 parts by mass of 2,4-bis(trichloromethyl)-6-piperidin-1,3,5-triazine, 3.0 parts by mass of dimethanone of photopolymerization initiation aid, and 2.8 parts by mass (relative to all Content of solid content: 260 ppm, fluorine content with respect to all solid components: 4 7 ppm) Mixing of fluorine-based surfactant 1 and solvent propylene glycol monomethyl ether acetate 3 58 parts by mass to obtain a photosensitive black resin composition 1. [Preparation of photosensitive black resin composition 2] The content of the fluorine-based surfactant 1 was changed so that the content of all the solid components was 21 Oppm (the fluorine content of all solid components: 40 ppm), and In the same manner as the photosensitive black resin composition 1, a photosensitive black resin composition 2 was obtained. [Preparation of photosensitive black resin composition 3] The content of the fluorine-based surfactant 1 was changed so as to be 105 ppm based on the total solid content of the solid-60-201032002 (the fluorine content relative to the total solid content: 2 Op) In the same manner as the photosensitive black resin composition 1, a photosensitive black resin composition 3 was obtained. [Preparation of photosensitive black resin composition 4] A photosensitive black resin composition 4 was obtained in the same manner as in the photosensitive black resin composition 1 except that the fluorine-based surfactant 1 was not added. [Preparation of photosensitive black resin composition 5] The content of the fluorine-based surfactant 1 was changed, and the content of all the solid components was 35 ppm (fluorine content with respect to all solid components: 6 ppm), and photosensitivity In the same manner as the black resin composition 1, a photosensitive black resin composition 5 was obtained. [Preparation of the photosensitive black resin composition 6] φ In addition to changing the amount of the fluorine-based surfactant 1 to be added, the content of the total solid content is 315 ppm (the fluorine content relative to the total solid content: 5 7 ppm), and In the same manner as the photosensitive black resin composition 1, a photosensitive black resin composition 6 was obtained. <Production of Black Matrix Substrate> (Example 6) The photosensitive black resin composition 1 was applied onto an alkali-free glass substrate (Model: #1737, manufactured by Corning Incorporated) by a spin coating method, vacuum-61 - 201032002 After drying, the film was heated at 100 ° C for 90 seconds to form a photosensitive black resin composition layer composed of a solid component of the photosensitive black resin composition 1 on an alkali-free glass substrate. The film thickness after the heat treatment of the photosensitive black resin composition layer formed at 230 ° C for 20 minutes is reflected as the coating condition of the spin coater, whereby the thickness of the photosensitive black resin composition layer is adjusted to a predetermined thickness. The film thickness of the photosensitive black resin composition layer is the height of the partition wall in the black matrix to be described later. The film thickness was measured using a film thickness meter (trade name: Dektak, manufactured by ULVAC Co., Ltd.), and the result was 1.6 μm. Next, on the alkali-free glass substrate on which the photosensitive black resin composition layer is formed, a mask having a specific partition wall pattern is passed through to irradiate ultraviolet rays close to the gap of 15 μm (the irradiation amount is 100 mJ/cm 2 : by the I line). Conversion) for exposure. A reticle having a repeating pattern of a CD 19 pm and a rectangular opening portion of 66 x 226 μm was used as the partition wall pattern. Next, the exposed photosensitive black resin composition layer was subjected to a rinsing development at 26 ° C for 80 seconds by a developing solution (CD liquid: Fujifilm Electronic Materials Co., Ltd., diluted 50 times), followed by washing with pure water. The film was fired at 23 ° C for 20 minutes in a clean oven to obtain a black matrix substrate of Example 6 in which a black matrix (wall pattern) was formed. With respect to the obtained black matrix substrate of Example 6, the surface of the black matrix was measured using TRIFT2 (measurement beam diameter: 5 to 1 Ο μιη) manufactured by Physical Electronics Co., Ltd. using a time-of-flight secondary ion mass spectrometer (TOF-SIMS). Fluoride ions in the surface of the substrate corresponding to the opening of the black matrix. The measurement of the fluoride ion is performed on the upper surface of the black matrix corresponding to the vicinity of the edge where the ink collapse is likely to occur, and the surface of the black matrix is opened -62-201032002, and the signal intensity of all negative ions with respect to each surface is used. The intensity ratio of the integral enthalpy is compared. The measurement results of the fluorine ions in the black matrix substrate of Example 6 were such that the ratio of the fluoride ion detection intensity of the upper surface of the black matrix was 0·28' to the surface of the substrate corresponding to the black matrix opening. 03 φ (Example 7) A black matrix substrate of Example 7 having a partition wall height of 1.5 μm was obtained in the same manner as in Example 6 except that the photosensitive black resin composition 1 was changed to the photosensitive black resin composition 2. In the black matrix substrate of the seventh embodiment, the fluorine ion detection intensity ratio of the upper surface of the black matrix is 〇_22', and the ratio of the fluoride ion detection intensity of the substrate surface corresponding to the black matrix opening portion is 〇. 〇 2. φ (Example 8) A black matrix substrate of Example 8 having a barrier entanglement of 2.3 μm was obtained in the same manner as in Example 6 except that the photosensitive black resin composition 1 was changed to the photosensitive black resin composition 3. In the black matrix substrate of Example 8, the fluorine ion detection intensity ratio was 0.29 on the upper surface of the black matrix, and the fluoride ion detection intensity ratio on the substrate surface corresponding to the black matrix opening portion was 〇.〇4 . (Comparative Example 7) -63-201032002 A black matrix substrate of Comparative Example 7 having a partition wall height of 1.6 μm was obtained in the same manner as in Example 6 except that the photosensitive black resin composition 1 was changed to the photosensitive black resin composition 4. . In the black matrix substrate of Comparative Example 7, the fluorine ion detection intensity ratio was 0.001 or less on the upper surface of the black matrix, and the fluoride ion detection intensity ratio on the surface of the substrate corresponding to the black matrix opening was 0.001 or less. (Comparative Example 8) A black matrix substrate of Comparative Example 8 having a partition wall height of 1.6 μm was obtained in the same manner as in Example 6 except that the photosensitive black resin composition 1 was changed to the photosensitive black resin composition 5. The fluorine ion measurement result of the black matrix substrate of the comparative example 8 is that the fluoride ion detection intensity ratio on the upper surface of the black matrix is 〇1.2, and the fluoride ion detection intensity ratio on the substrate surface corresponding to the black matrix opening portion is 0.02. .

(比較例9 ) Q 除了將感光性黑色樹脂組成物1變更爲感光性黑色樹 脂組成物6以外,與實施例6同樣,得到隔離壁高度爲 1.6μπι的比較例9的黑色矩陣基板。比較例9的黑色矩陣基 板中氟離子的測定結果爲,於黑色矩陣的上側表面之氟離 子檢測強度比爲0.33,於黑色矩陣開口部所對應的基板表 面之氟離子檢測強度比爲〇. 1 8。 <彩色濾光片之製造> -64 - 201032002 [噴墨印刷用油墨之製備] 製備由15質量份著色劑的C.I.顔料藍15: 6、2質量份 C.I.顏料紫23、聚酯系分散劑7質量份、溶劑的二丙二醇單 甲基醚乙酸酯77質量份所構成的藍色著色劑分散液。同樣 地,按照上述表1所示之組成,製備綠色著色劑分散液以 及紅色著色劑分散液。 於所製備的藍色顏料分散液61質量份中添加丙烯酸樹 φ 脂4質量份、溶劑的二丙二醇丁基醚35質量份,製備藍色 噴墨印刷用油墨。同樣地,按照上述表2所示之組成,製 備綠色噴墨印刷用油墨、紅色噴墨印刷用油墨。 [彩色濾光片之製備] 實施例6〜8以及比較例7〜9之黑色矩陣基板中的黑色 矩陣開口部上,使用噴墨印刷用噴頭,同時塡充紅色油墨 120pL、綠色油墨120pL'藍色油墨130pL,在40°C下預乾 φ 燥2分鐘後,在230°C下烘烤20分鐘製備彩色濾光片。 [評價] 對於如上製備的各彩色濾光片,進行目視觀察及顯微 鏡觀察’評價在黑色矩陣開口部的油墨塡充狀況、鄰接像 素層間有無混色。至於油墨塡充狀況,特別注意彩色濾光 片畫面的周邊部(邊緣鄰接像素)上發生的油墨塡充不良 (漏白)’與畫面中央部的塡充狀態一併評價。無漏白發 生的情況作爲“〇” ’有漏白發生的情況作爲“ X,’ 。至 -65- 201032002 於鄰接像素層間的混色’未發生混色的情況作爲“〇”, 發生混色的情況作爲“ X ” 。且,至於綜合評價’ “漏白 ”以及“混色”任一者的評價結果均爲“〇”時’作爲“ 〇”,任意一者爲“ X”時’作爲“ X” 。評價結果如表4 所示。 [表4](Comparative Example 9) The black matrix substrate of Comparative Example 9 having a partition wall height of 1.6 μm was obtained in the same manner as in Example 6 except that the photosensitive black resin composition 1 was changed to the photosensitive black resin composition 6. In the black matrix substrate of Comparative Example 9, the fluorine ion detection intensity ratio on the upper surface of the black matrix was 0.33, and the fluoride ion detection intensity ratio on the substrate surface corresponding to the black matrix opening portion was 〇. 8. <Production of Color Filter> -64 - 201032002 [Preparation of ink for inkjet printing] Preparation of CI Pigment Blue 15: 6 by mass of 15 parts by mass of colorant, Pigment Violet 23 of 2 parts by mass, dispersion of polyester A blue colorant dispersion composed of 7 parts by mass of a solvent and 77 parts by mass of a solvent of dipropylene glycol monomethyl ether acetate. Similarly, a green colorant dispersion and a red colorant dispersion were prepared in accordance with the compositions shown in Table 1 above. To 61 parts by mass of the prepared blue pigment dispersion liquid, 4 parts by mass of acrylic acid φ lipid and 35 parts by mass of dipropylene glycol butyl ether of a solvent were added to prepare an ink for blue ink jet printing. Similarly, the ink for green inkjet printing and the ink for red inkjet printing were prepared in accordance with the composition shown in Table 2 above. [Preparation of Color Filters] In the black matrix openings of the black matrix substrates of Examples 6 to 8 and Comparative Examples 7 to 9, the inkjet printing head was used, and the red ink 120pL and the green ink 120pL' blue were simultaneously filled. The color ink 130 pL was predried at 40 ° C for 2 minutes, and then baked at 230 ° C for 20 minutes to prepare a color filter. [Evaluation] For each of the color filters prepared as described above, visual observation and microscopic observation were carried out to evaluate the ink filling condition in the black matrix opening portion and the presence or absence of color mixing between adjacent pixel layers. As for the ink filling condition, it is particularly noted that the ink squeezing failure (leakage) occurring on the peripheral portion (edge adjacent pixel) of the color filter screen is evaluated together with the squeezing state at the center of the screen. The case where no whitening occurs is referred to as "〇". The case where whitening occurs is referred to as "X,'. To -65-201032002, when the color mixture between adjacent pixel layers does not mix, "作为", when color mixing occurs, “X ”. As for the comprehensive evaluation of “leak white” and “mixed color”, the evaluation result is “〇”, and “anything” is “X” and “X”. The evaluation results are shown in Table 4. [Table 4]

黑色矩阔 蓮板 感光性黑色樹脂組成物 m ϊ結果 編號 隔離壁高度 (μιη) 氟離子檢測強度比 氣系界 面活性劑 於邊 緣部 之漏白 混色 綜合 評價 隔離壁 表面 開口部基 板表面 添加量 (ppm) 氟換算添加 量(ppm) 實施例6 1.6 0.28 0.03 260 47 〇 〇 〇 實施例7 1.5 0.22 0.02 210 40 〇 〇 〇 實施例8 2.3 0.29 0.04 105 20 〇 〇 〇 比較例7 1.6 <0.001 <0.001 0 0 〇 X X 比較例8 1.6 0.12 0.02 35 6 〇 X X 比較例9 1.6 0.33 0.18 315 57 X 〇 X 由表4顯示,使用於黑色矩陣表面之氟離子檢測強度 比爲0.1 5以上、未達0.3,且於黑色矩陣開口部所對應的基 板表面之氟離子檢測強度比爲〇.〇5以下之實施例6〜8的黑 色矩陣基板製備的彩色濾光片,並未發生混色,亦未發生 漏白等像素缺陷。 本發明在不脫離其主旨或主要特徵之下,可以其他各 種形態實施。因此,前述實施形態在所有方面僅僅只是例 示,本發明的範圍係如申請專利範圍所示,絕不受說明書 所限制。進而,屬於申請專利範圍之變形或變更亦全部在 本發明範圍內。 -66- 201032002 【圖式簡單說明】 圖1A〜圖1C係顯示黑色矩陣基板之製造方法之順序圖 〇 圖2 A及圖2B係顯示彩色濾光片之製造方法之順序圖。 圖3 A及圖3 B係槪略顯示彩色濾光片結構之圖。 圖4係使用實施例之感光性黑色樹脂組成物所製備之 彩色濾光片的表面放大照片。 圖5係使用比較例之感光性黑色樹脂組成物所製備之 彩色濾光片的表面放大照片。 【主要元件符號說明】 1 :感光性黑色樹脂組成物層 2 :基板 3 :光罩 3 1 :玻璃板 32 :遮光層 3 3 :透光部 4 ;光線 5 :著色圖案 5 B :藍色像素層 5BM :黑色矩陣 5 G :綠色像素層 5R :紅色像素層 -67- 201032002 6,60 :彩色濾光片 7 :黑色矩陣基板 7 a :開口部 10B :噴墨印刷用噴頭 1 0 G :噴墨印刷用噴頭 1 OR :噴墨印刷用噴頭 1 1 B :噴墨印刷用油墨 1 1 G :噴墨印刷用油墨 1 1 R :噴墨印刷用油墨Black unilateral lotus plate photosensitive black resin composition m ϊ result number partition wall height (μιη) Fluoride ion detection intensity than gas phase surfactant at the edge portion of the white mixed color evaluation of the partition wall surface opening substrate surface addition amount ( Ppm) Fluorine-added amount (ppm) Example 6 1.6 0.28 0.03 260 47 〇〇〇 Example 7 1.5 0.22 0.02 210 40 〇〇〇 Example 8 2.3 0.29 0.04 105 20 〇〇〇 Comparative Example 7 1.6 < 0.001 <0.001;0.001 0 0 〇XX Comparative Example 8 1.6 0.12 0.02 35 6 〇XX Comparative Example 9 1.6 0.33 0.18 315 57 X 〇X As shown in Table 4, the fluoride ion detection intensity ratio used on the surface of the black matrix is 0.1 5 or more. 0.3, and the color filter prepared on the black matrix substrate of Examples 6 to 8 in which the fluorine ion detection intensity ratio of the substrate surface corresponding to the black matrix opening portion is 〇.5 or less does not cause color mixing, and does not occur. Pixel defects such as whiteout. The present invention can be embodied in other various forms without departing from the spirit or essential characteristics thereof. Therefore, the foregoing embodiments are merely illustrative in all respects, and the scope of the invention is in the Further, variations or modifications belonging to the scope of the patent application are also within the scope of the invention. -66- 201032002 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A to FIG. 1C are sequence diagrams showing a method of manufacturing a black matrix substrate. FIG. 2A and FIG. 2B are sequence diagrams showing a method of manufacturing a color filter. Fig. 3A and Fig. 3B show a schematic view of the color filter structure. Fig. 4 is a magnified photograph of the surface of a color filter prepared by using the photosensitive black resin composition of the example. Fig. 5 is a magnified photograph of the surface of a color filter prepared by using the photosensitive black resin composition of the comparative example. [Explanation of main component symbols] 1 : Photosensitive black resin composition layer 2 : Substrate 3 : Photomask 3 1 : Glass plate 32 : Light shielding layer 3 3 : Light transmitting portion 4; Light 5 : Coloring pattern 5 B : Blue pixel Layer 5BM: Black matrix 5 G : Green pixel layer 5R : Red pixel layer - 67 - 201032002 6, 60 : Color filter 7 : Black matrix substrate 7 a : Opening portion 10B : Inkjet printing head 1 0 G : Spray Ink printing head 1 OR : Inkjet printing head 1 1 B : Inkjet printing ink 1 1 G : Inkjet printing ink 1 1 R : Inkjet printing ink

-68--68-

Claims (1)

201032002 七、申請專利範圍: 1. 一種感光性黑色樹脂組成物’其係用於形成黑色矩 陣的感光性黑色樹脂組成物,前述黑色矩陣是在基板上具 有多個彩色像素層及位於鄰接的彩色像素層間的黑色矩陣 的彩色濾光片中的黑色矩陣,其特徵在於 以相對於全部固體成分的氟含量計,含有0.0008〜 0.005質量%之在側鏈上具有氟烷基之氟系界面活性劑。 2 ·如申請專利範圍第1項之感光性黑色樹脂組成物, 其中前述氟系界面活性劑爲以全部結構單位的總計1 00質 量%爲基準,具有以下述式(la)所示的結構單位1〜40質 量%、以下述式(1 b )所示的結構單位20〜98質量%、以 及以下述式(lc)所示的結構單位1〜40質量%之比例的化 合物, 【化1 0】 R* I R3 R6 | 1 —CHi —C — | 1 —CHe —C — I 1 —CH2 — c —— 1 X1 - L1 - R2 I \〇-L2 千R4-〇^*R5 X2 - L3 - Rf (la) (lb) (lc) [式中,R1、R3以及R6各自獨立地表示氫原子或碳原子數1 〜5之烷基,R2表示氫原子、碳原子數1〜5之烷基 '羥基 、或-(8丨((:113)20)„1-3丨(<:113)3,114表示碳原子數2〜8之伸烷 基,R5表示氫原子、碳原子數1〜12之烷基、醯基、或碳 原子數6〜20之芳基,L1、L2、以及L3各自獨立地表示單 鍵、伸烷基或經取代伸烷基,X1表示-C〇2_、-CONY1-、或 -69 - 201032002 伸芳基,X2表示-Ο-、-C02-、-CONY2-、伸芳基 '或2價的 雜環殘基,Rf表示氟烷基,η表示2〜20之整數’又’ m表 示0〜3之整數,Y1以及Y2各自獨立地表示氫原子或碳原子 數1〜5之院基]。 3. —種黑色矩陣基板,其係形成有使用申請專利範圍 第1或2項之感光性黑色樹脂組成物所製備之黑色矩陣之黑 色矩陣基板,其用於製造在基板上具有多個彩色像素層及 位於鄰接的彩色像素層間的黑色矩陣之彩色濾光片,其係 形成有具有開口部的黑色矩陣之黑色矩陣基板。 4. 如申請專利範圍第3項之黑色矩陣基板,其中,利 用飛行時間型二次離子質量分析計(TOF-S IMS )檢測的 負離子之檢測結果中,全部負離子的檢測強度的總計爲1 時的氟離子的檢測強度比,於黑色矩陣的表面係0.1 5以上 、未達0.3,且於對應於黑色矩陣的開口部之基板表面上 爲0.0 5以下。 5. 如申請專利範圍第3或4項之黑色矩陣基板,其中黑 色矩陣之膜厚爲1·2μιη以上、3.0μιη以下。 6. —種彩色濾光片之製造方法,該方法係在基板上具 有多個彩色像素層及位於鄰接的彩色像素層間的黑色矩陣 之彩色濾光片之製造方法,其特徵在於包括: 使用申請專利範圍第1或2項之感光性黑色樹脂組成物 ,在基板上形成黑色矩陣,製備黑色矩陣基板之黑色矩陣 基板製備步驟,及 在由黑色矩陣基板上形成之黑色矩陣的開口部所對應 -70 - 201032002 的隔離壁所包圍之像素區域中,藉由噴墨印刷方式印刷噴 墨印刷用油墨而形成彩色像素層之像素層形成步驟。201032002 VII. Patent application scope: 1. A photosensitive black resin composition for forming a photosensitive black resin composition of a black matrix, the black matrix having a plurality of color pixel layers on the substrate and adjacent colors a black matrix in a color filter of a black matrix between pixel layers, characterized in that it contains 0.0008 to 0.005 mass% of a fluorine-based surfactant having a fluoroalkyl group in a side chain with respect to a fluorine content of all solid components. . (2) The photosensitive black resin composition according to the first aspect of the invention, wherein the fluorine-based surfactant has a structural unit represented by the following formula (la) based on a total of 100% by mass of all structural units. a compound having a ratio of 1 to 40% by mass, a structural unit represented by the following formula (1b): 20 to 98% by mass, and a structural unit represented by the following formula (lc): 1 to 40% by mass; R* I R3 R6 | 1 —CHi —C — | 1 —CHe —C — I 1 —CH2 — c — 1 X1 - L1 - R2 I \〇-L2 Thousand R4-〇^*R5 X2 - L3 - Rf (la) (lb) (lc) [wherein, R1, R3 and R6 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and R2 represents a hydrogen atom and an alkyl group having 1 to 5 carbon atoms. 'Hydroxyl, or -(8丨((:113)20) „1-3丨(<:113)3,114 represents an alkylene group having 2 to 8 carbon atoms, and R5 represents a hydrogen atom and a carbon atom number of 1. An alkyl group of -12, a fluorenyl group, or an aryl group having 6 to 20 carbon atoms, and L1, L2, and L3 each independently represent a single bond, an alkylene group or a substituted alkyl group, and X1 represents -C〇2_, -CONY1-, or -69 - 201032002 Extending an aryl group, X2 represents -Ο-, -C02-, -CONY2-, aryl- or divalent heterocyclic residue, Rf represents a fluoroalkyl group, and η represents an integer of 2 to 20' and 'm' An integer of ~3, Y1 and Y2 each independently represent a hydrogen atom or a propylene group having 1 to 5 carbon atoms. 3. A black matrix substrate formed by using the photosensitive property of claim 1 or 2 a black matrix black matrix substrate prepared by a black resin composition for producing a color filter having a plurality of color pixel layers and a black matrix between adjacent color pixel layers on a substrate, which is formed with an opening a black matrix substrate of a black matrix. 4. A black matrix substrate according to claim 3, wherein all negative ions are detected by a negative ion detected by a time-of-flight secondary ion mass spectrometer (TOF-S IMS ) The detection intensity ratio of the fluoride ion when the total detection intensity is 1 is 0.15 or more on the surface of the black matrix, which is less than 0.3, and is 0.05 or less on the surface of the substrate corresponding to the opening of the black matrix. Such as applying for a patent The black matrix substrate of item 3 or 4, wherein the black matrix has a film thickness of 1·2 μm or more and 3.0 μm or less. 6. A method of manufacturing a color filter having a plurality of color pixel layers on a substrate And a method for manufacturing a color filter of a black matrix between adjacent color pixel layers, comprising: forming a black matrix on the substrate using the photosensitive black resin composition of claim 1 or 2, preparing black a step of preparing a black matrix substrate of a matrix substrate, and printing inkjet printing by inkjet printing in a pixel region surrounded by a partition wall of -70 - 201032002 corresponding to an opening of a black matrix formed on a black matrix substrate The ink layer forms a pixel layer forming step of the color pixel layer. -71 --71 -
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