WO2011081151A1

WO2011081151A1 - Photosensitive composition, partition wall, color filter and organic el element

Info

Publication number: WO2011081151A1
Application number: PCT/JP2010/073603
Authority: WO
Inventors: 秀幸高橋; 健二石関; 正行川島; 光太郎山田
Original assignee: 旭硝子株式会社
Priority date: 2009-12-28
Filing date: 2010-12-27
Publication date: 2011-07-07
Also published as: KR101810702B1; TW201129861A; TWI483068B; CN102656517B; JPWO2011081151A1; CN102656517A; KR20120124392A; JP5682573B2

Abstract

Disclosed is a photosensitive composition containing an ink-repellent component, which is capable of imparting a partition wall obtained therefrom with good ink repellency at the upper part thereof, developer resistance sufficient for preventing corrosion by a liquid developer, properties of preventing the occurrence of film remaining, and good wettability and spreadability of an ink over an opening portion between partition walls, although the ink-repellent component does not have an ethylenic double bond. Specifically disclosed is a photosensitive composition which contains: a polymer that has a mass average molecular weight (Mw) of 2.6 × 10⁴ < Mw ≤ 20 × 10⁴ and contains a side chain having a group represented by general formula (1) and a side chain having a polyoxyalkylene group but no side chain having an ethylenic double bond; a photocuring initiator; and a binder resin. -CFXR^f (1) (In the formula, X represents a hydrogen atom, a fluorine atom or a trifluoromethyl group; and R^f represents a fluorine atom or a fluoroalkyl group having 1-20 carbon atoms and optionally having an ether oxygen atom.)

Description

Photosensitive composition, partition, color filter, and organic EL device

The present invention relates to a photosensitive composition, a partition using the same, a color filter having the partition, and an organic EL device.

In recent years, partition walls between pixels of a color filter, partition walls between pixels of an organic EL (Electro-Luminescence) display element, partition walls partitioning each TFT of an organic TFT (Thin Film Transistor) array, partition walls of an ITO electrode of a liquid crystal display element As a material for forming a permanent film such as a partition wall of a circuit wiring board, a photosensitive composition has attracted attention. For example, when a color filter is manufactured, a barrier rib pattern (which may also serve as a black matrix) is formed using photolithography, and then R (red), G (green), and B (blue) ink is applied to the openings between the partition walls to form pixels. Moreover, when manufacturing an organic EL element, after forming a partition pattern using photolithography, a solution such as a hole transport material and a light emitting material is applied to the opening between the partitions using an inkjet method, A pixel having a hole transport layer, a light emitting layer, and the like is formed.

In order to prevent color mixture between adjacent pixels of the color filter or the organic EL element, the upper surface of the partition wall needs to have a property of repelling ink, so-called liquid repellency. Further, in order to prevent white spots of the color filter and the organic EL element, the opening between the partition walls needs to have a property of getting wet with ink, so-called lyophilic property.

In order to obtain the characteristics required for such a partition, it has been proposed to add an ink repellent component to the photosensitive composition for forming the partition. For example, Patent Document 1 describes a photosensitive resin composition containing a repeating unit having at least a fluorine atom in a side chain and a repeating unit having a polyether structure in a side chain. The mass average molecular weight of the fluorine-containing compound described in the examples of Patent Document 1 is 26,000 at the maximum.

Patent Document 2 discloses a photopolymerizable compound, an ink repellent compound that is a copolymer obtained by copolymerizing at least a fluorine-containing monomer and a monomer containing an alkylene group having an etheric oxygen atom, a photopolymerization initiator, The coloring photosensitive resin composition containing a coloring agent is described. The maximum weight average molecular weight of the fluorine-containing copolymer described in the examples of Patent Document 2 is 10,900.

However, in the conventional ink repellent component, when a fluorine-containing resin having an ethylenic double bond is used, the required performance of the obtained partition wall, that is, good ink repellency at the top of the partition wall, and erosion to the developer Performance such as resistance to the developer not developed, good wetting and spreading of the ink to the opening between the partition walls, etc. are sufficiently obtained, but when using a fluorine-containing resin having no ethylenic double bond, these performances The present condition is that the partition which fully satisfy | fills all is not obtained.
In addition, in the fluorine-containing resin having an ethylenic double bond sufficiently provided with the above-described performance as an ink repellent component, the number of steps is increased because a group having an ethylenic double bond is introduced into the fluorine-containing resin. There were disadvantages in manufacturing.

JP 2008-33229 A JP 2009-168948 A

The present invention was made in order to solve the problems of the prior art, and although it is an ink repellent component that does not have an ethylenic double bond, it has good ink repellency at the upper part of the partition wall and is not eroded by the developer. Contains an ink repellent component that can impart to the resulting partition the resistance to developer, the property of suppressing the generation of residual film that remains without being developed, and the good ink wetting and spreading property to the opening between the partitions. An object of the present invention is to provide a photosensitive composition. Another object of the present invention is to provide a partition having good performance obtained from an economically advantageous material, and a color filter and an organic EL device having the partition.

The present invention provides a photosensitive composition, partition walls, a color filter, and an organic EL device having the following configuration.
[1] a polymer (A) having a side chain having a group represented by the following general formula (1) and a side chain having a polyoxyalkylene group and having no side chain having an ethylenic double bond; A photosensitive composition comprising a photocuring initiator (B) and a binder resin (C),
-CFXR ^f (1)
(In the formula, X represents a hydrogen atom, a fluorine atom or a trifluoromethyl group, and R ^f represents a fluoroalkyl group or fluorine atom having 1 to 20 carbon atoms which may have an etheric oxygen atom. To express.)
The polymer (A) has a mass average molecular weight (Mw (A)) of 2.6 × 10 ⁴ <Mw (A) ≦ 20 × 10 ⁴ .

[2] The photosensitive composition according to [1], wherein the content ratio of the polyoxyalkylene group in the polymer (A) is 5 to 60% by mass.
[3] The photosensitive composition according to [1] or [2], wherein the polymer (A) has an acidic group.
[4] The photosensitive composition according to any one of [1] to [3], wherein the polymer (A) has a fluorine atom content of 20 to 50% by mass.
[5] The photosensitive composition according to any one of [1] to [4], wherein the ratio of the polymer (A) in the total solid content of the photosensitive composition is 0.07 to 1% by mass.

[6] The photosensitive composition according to any one of [1] to [5], wherein the polymer (A) further has at least one selected from the group consisting of an epoxy group, a mercapto group, and a hydroxyl group.
[7] The photosensitive composition according to any one of [1] to [6], wherein the polymer (A) further has a side chain having a group represented by the following general formula (2).

(Wherein R ¹ and R ² are each independently a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group which may be substituted with a fluorine atom; R ³ is a hydrogen atom or a carbon number; Represents an organic group of 1 to 10 and n represents an integer of 1 to 200.)

[8] A side chain having a group represented by the general formula (2) and a side chain having a polyoxyalkylene group, and having a group represented by the general formula (1) and an ethylenic group It is a polymer (A) ′ having no side chain having a double bond, and its mass average molecular weight (Mw (A) ′) is 2.6 × 10 ⁴ <Mw (A) ′ ≦ 20 × 10. ^4. The photosensitive composition according to any one of [1] to [7], further comprising a polymer (A) ′ that is ⁴ .
[9] The photocuring initiator (B) is a photopolymerization initiator, and the binder resin (C) is a photosensitive resin having an acidic group and an ethylenic double bond. The photosensitive composition in any one.

[10] The photosensitive composition according to [9], further comprising a crosslinking agent (D) having two or more ethylenic double bonds.
[11] The photosensitive composition according to any one of [1] to [10], further comprising a black colorant (E).
[12] A partition formed in a manner that partitions the substrate into a plurality of sections for pixel formation, and is made of a cured film of the photosensitive composition according to any one of [1] to [11] Septum characterized by.

[13] A color filter having a plurality of pixels and a partition located between adjacent pixels on the substrate, wherein the partition is formed by the partition described in [12], and the pixel is formed by an inkjet method A color filter characterized by being made.
[14] An organic EL element having a plurality of pixels and a partition located between adjacent pixels on the substrate, wherein the partition is formed by the partition described in [12], and the pixel is formed by an inkjet method. An organic EL element formed.

In the present specification, the term “photocuring initiator” is used as a general term for compounds that generate active species by light irradiation to initiate the curing reaction of the binder resin (C).
In this specification, the polyoxyalkylene group is a divalent group represented by — (RO) _p — (R represents an alkylene group, and p represents an integer of 2 or more). One end of the polyoxyalkylene group is bonded to the terminal group, and the other end is a bond bonded to the main chain side of the polymer.

According to the photosensitive composition of the present invention, by using an economically advantageous ink repellent component, the obtained partition wall has good ink repellency at the top of the partition wall, developer resistance not eroded by the developer, and without development. It is possible to impart the property of suppressing the generation of remaining residual film and the good ink spreading property to the opening between the partition walls. According to the present invention, using the photosensitive composition of the present invention, a partition wall that is economically advantageous and has good performance, and a color filter and an organic EL device having the partition wall are obtained.

Although the form for implementing this invention is demonstrated below, this invention is not limited to the following embodiment.
In the present specification, unless otherwise specified,% represents mass%. Further, the (meth) acryloyl group is used as a general term meaning both an acryloyl group and a methacryloyl group. (Meth) acrylate is used as a generic term for both acrylate and methacrylate. (Meth) acrylic acid is used as a generic term for both acrylic acid and methacrylic acid. (Meth) acrylamide is used as a general term for both acrylamide and methacrylamide. (Meth) allyl is used as a generic term for both allyl and methallyl. The group represented by the general formula (1) is also referred to as a group (1). The same applies to other groups.

<1> Photosensitive composition The photosensitive composition of the present invention has a side chain having a group represented by the following general formula (1) and a side chain having a polyoxyalkylene group, and an ethylenic double bond. A polymer (A) having a weight average molecular weight (Mw (A)) of 2.6 × 10 ⁴ <Mw (A) ≦ 20 × 10 ⁴ and a photocuring initiator (B And a binder resin (C).
-CFXR ^f (1)
(In the formula, X represents a hydrogen atom, a fluorine atom or a trifluoromethyl group, and R ^f represents a fluoroalkyl group or fluorine atom having 1 to 20 carbon atoms which may have an etheric oxygen atom. To express.)

The photosensitive composition of the present invention is a photosensitive composition comprising the polymer (A), a photocuring initiator (B), and a binder resin (C), and is a binder in a light irradiation portion upon exposure in photolithography or the like. It is a negative photosensitive composition in which the resin (C) is cured by the action of the photocuring initiator (B). In photolithography or the like, a portion that is not irradiated with light (an unexposed portion) is selectively removed during alkali development performed after exposure, and as a result, a partition wall made of a cured product of the photosensitive composition is formed. It is formed.
The negative photosensitive composition is classified into several types such as a radical curable type and an acid curable type depending on the type of curing, and depending on the type of curing, the photocuring initiator (B) and the binder resin ( A combination of C) is selected. The photosensitive composition of the present invention can be applied to any curing type as long as it is a negative photosensitive composition, but is particularly suitable for a radical curable photosensitive composition. Hereinafter, an embodiment of the photosensitive composition of the present invention will be described using a radical curable photosensitive composition and an acid curable photosensitive composition as examples.

(1) Radical curable photosensitive composition When the photosensitive composition of the present invention is a radical curable type, the photosensitive composition contains a polymer (A) and a photopolymerization initiator (B) as a photocuring initiator (B). B1) and a photosensitive resin (C1) having an acidic group and an ethylenic double bond as the binder resin (C). Such a radical curable photosensitive composition is a coating film cured product in which the photosensitive resin (C1) is radically polymerized by the action of the photopolymerization initiator (B1) in the light-irradiated portion during exposure in photolithography or the like, and curing is accelerated. Form.
Each component which the radical curable photosensitive composition concerning this invention contains is demonstrated below.

(1-1) Polymer (A)
The polymer (A) has a side chain having the group represented by the general formula (1), has a polyoxyalkylene group, and does not have a side chain having an ethylenic double bond. The mass average molecular weight (Mw (A)) is 2.6 × 10 ⁴ <Mw (A) ≦ 20 × 10 ⁴ .

Since the polymer (A) has a side chain having the fluorine atom-containing group (1) and has a high molecular weight such that the mass average molecular weight is shown in the above range, the photosensitivity of the present invention on the substrate. When the coating film formed by applying the composition is dried, it tends to move to the vicinity of the surface of the coating film. The polymer (A) does not have an ethylenic double bond in the side chain, but has a high molecular weight as in the mass average molecular weight range, so that the photosensitive composition is cured by exposure after drying the coating film. As the film advances, it remains in the vicinity of the surface of the coating film transferred during drying of the coating film and is easily fixed at that position. Furthermore, in the polymer (A), the solubility of the developer is sufficiently ensured by setting the mass average molecular weight within the above range. As a result, the partition formed by developing the coated film after exposure can exhibit liquid repellency on the top surface, and can also exhibit lyophilicity at the opening between the partitions. It becomes. In addition, even if a heating (post-baking) treatment is performed after development, the polymer (A) does not migrate to the openings, and lyophilicity can be maintained in the openings between the partition walls. .

Furthermore, since the polymer (A) has a side chain having a polyoxyalkylene group, the liquid repellency can be maintained even when a jet rinsing step using high-pressure water after the development step is performed. The reason why the phenomenon is observed is not necessarily clear, but is considered as follows.
Due to the interaction between the polyoxyalkylene group and other components such as the binder resin (C), the so-called anchor effect, the polymer (A) is considered to be less likely to be detached from the coating film surface. In particular, when the jet rinsing step using high-pressure water after the development step is performed, the polymer (A) is easily detached from the surface layer. However, since the polymer (A) has a side chain having a polyoxyalkylene group, due to the anchor effect, the polymer (A) tends to remain on the surface of the coating film, and the coating film tends to exhibit liquid repellency. There is. For this reason, when ink is applied to the opening surrounded by the partition wall using the inkjet method, it is possible to suppress the occurrence of color mixing between adjacent openings and the occurrence of white spots in the openings. Moreover, a polymer (A) can suppress generation | occurrence | production of the residual film demonstrated below by having a side chain which has a polyoxyalkylene group.

That is, the phenomenon that the remaining film is generated is considered as follows. Since an alkaline developer used for producing barrier ribs or the like by photolithography or the like generally contains a surfactant, bubbles are easily generated in the development process. Moreover, when this bubble adheres to the liquid-repellent surface, it is difficult to remove. Therefore, there is a tendency that the ink repellent component contained in the photosensitive composition remains in the form of a film due to the bubbles adhering to the portion that should be dissolved and removed by the alkaline developer. The polymer (A) having a side chain having a polyoxyalkylene group can suppress the generation of the remaining film thus generated.
The mechanism by which polyalkylene chains suppress the formation of residual film is not clear, but even if bubbles in the developer once adhere to the coating, the bubbles are easily removed by the presence of polyalkylene chains on the surface. It is conceivable that bubbles are difficult to stay at least at the same location.

The mass average molecular weight (Mw (A)) of the polymer (A) used in the present invention is 2.6 × 10 ⁴ <Mw (A) ≦ 20 × 10 ⁴ . More preferably, 3.0 × 10 ⁴ <Mw (A) ≦ 12 × 10 ⁴ , still more preferably 3.5 × 10 ⁴ ≦ Mw (A) ≦ 12 × 10 ⁴ , and particularly preferably, 4.0 × 10 is a ^{4 ≦ Mw (a) ≦ 10} × 10 4.
When the mass average molecular weight of the polymer (A) is 2.6 × 10 ⁴ or less, the lyophilicity of the opening between the partition walls is insufficient, and the ink is applied to the opening when the ink is applied using an ink jet method. Does not spread out sufficiently. On the other hand, when the mass average molecular weight exceeds 20 × 10 ⁴ , alkali solubility and developability become insufficient.
When the mass average molecular weight (Mw (A)) is in the range of more than 3.0 × 10 ^{4 and} less than 12 × 10 ⁴ , the liquid repellency is kept high regardless of the type and concentration of alkali and jet rinse conditions. It is preferable because it is easy to sag and has a wide manufacturing margin. Moreover, it is preferable also from the ease of manufacture of a polymer (A).

The number average molecular weight (Mn (A)) of the polymer (A) is preferably 1.0 × 10 ⁴ ≦ Mn (A) ≦ 15.0 × 10 ⁴ , and 1.5 × 10 ⁴ ≦ It is more preferable that Mn (A) ≦ 12.0 × 10 ⁴ , and it is particularly preferable that 2.0 × 10 ⁴ ≦ Mn (A) ≦ 10.0 × 10 ⁴ . When the number average molecular weight of the polymer (A) is less than 1.0 × 10 ⁴ , the lyophilicity of the opening between the partition walls is insufficient, and the ink is applied to the opening when the ink is applied using an ink jet method. May not be sufficiently wet and spread, and if the number average molecular weight exceeds 15.0 × 10 ⁴ , alkali solubility and developability may be insufficient.
In addition, in this specification, a mass average molecular weight (Mw) and a number average molecular weight (Mn) mean the value which measured polystyrene as a standard substance by the gel permeation chromatography method.

It is not certain about the relationship between the weight average molecular weight and number average molecular weight of the polymer (A) and the lyophilicity at the opening between the partition walls. Generally, a photosensitive composition, particularly a photosensitive composition containing a black colorant, may not sufficiently proceed with a curing reaction at the time of exposure, but the polymer (A) that is not immobilized at the time of exposure is exposed to light. In the case of a heat treatment called post-baking (which will be described later) that is usually performed after development, the film may move to the side surfaces of the partition walls or may flow out to the openings between the partition walls. When the mass average molecular weight of the polymer (A) exceeds 2.6 × 10 ⁴ , and more preferably the number average molecular weight is 1.0 × 10 ⁴ or more, the migration / outflow of the polymer (A) during the post-baking It is thought that the phenomenon is suppressed.

In the polymer (A) used in the present invention, the molecular weight distribution represented by mass average molecular weight (Mw (A)) / number average molecular weight (Mn (A)) is 1.2 or more and 8 or less. Preferably, 1.3 or more and 4 or less are more preferable. When the molecular weight distribution in the polymer (A) is within this range, the production process of the polymer (A) can be simplified, which is economically advantageous, and the developability is also good.

The polymer (A) used for this invention has group (1) containing the fluorine atom shown by the said General formula (1) in a side chain. In the group (1), when R ^f is a fluoroalkyl group having 1 to 20 carbon atoms which may have an etheric oxygen atom, R ^f may have a halogen atom excluding a fluorine atom. Good. As such a halogen atom, a chlorine atom is preferable. Further, the structure of the fluoroalkyl group is not particularly limited, and examples thereof include a linear structure, a branched structure, a ring structure, a structure having a partial ring, and the like, and a linear structure is preferable. Further, when R ^f is a fluoroalkyl group having an etheric oxygen atom, the etheric oxygen atom may be present between the carbon-carbon bonds of the fluoroalkyl group or at the end of the fluoroalkyl group. May be.
R ^f in the group (1) is preferably a fluoroalkyl group having 1 to 20 carbon atoms which may have the etheric oxygen atom. X is particularly preferably a fluorine atom.

In the above group (1), when R ^f is a fluoroalkyl group having 1 to 20 carbon atoms which may have an etheric oxygen atom, R ^f is particularly limited as long as it has such a configuration. Not. As R ^f , specifically, —CF ₃ , —CF ₂ CF ₃ , —CF ₂ CHF ₂ , — (CF ₂ ) ₂ CF ₃ , — (CF ₂ ) ₃ CF ₃ , — (CF ₂ ) ₄ CF ₃ , — (CF ₂ ) ₅ CF ₃ , — (CF ₂ ) ₆ CF ₃ , — (CF ₂ ) ₇ CF ₃ , — (CF ₂ ) ₈ CF ₃ , — (CF ₂ ) ₉ CF ₃ , — ( CF ₂ ) ₁₁ CF ₃ , — (CF ₂ ) ₁₅ CF ₃ , —CF (CF ₃ ) O (CF ₂ ) ₅ CF ₃ , —CF ₂ O (CF ₂ CF ₂ O) _p CF ₃ (p is 1 ), —CF (CF ₃ ) O (CF ₂ CF (CF ₃ ) O) _q C ₆ F ₁₃ (q is an integer of 1 to 4), —CF (CF ₃ ) O (CF ₂ CF (CF ₃ ) O) _r C ₃ F ₇ (r is an integer of 1 to 5).
If R ^f is carbon atoms, which may have an etheric oxygen atom is 1 to 20 fluoroalkyl group, the R ^f, a perfluoroalkyl group and an etheric oxygen atom having no etheric oxygen atom A perfluoroalkyl group having an etheric oxygen atom is more preferable. The number of carbon atoms is preferably 1 to 11 and particularly preferably 3 to 5.

Among these groups (1), in the present invention, a perfluoroalkyl group or a polyfluoroalkyl group having one hydrogen atom is preferable, and a perfluoroalkyl group is particularly preferable. The perfluoroalkyl group and the polyfluoroalkyl group include those having an etheric oxygen atom. Moreover, as said polyfluoroalkyl group which has one hydrogen atom, the compound whose X is a hydrogen atom is preferable. Thereby, the partition formed using the photosensitive composition of this invention becomes favorable for the liquid repellency of an upper surface.

The group (1) preferably has 4 to 6 carbon atoms. Specific examples of such a group (1) include — (CF ₂ ) ₃ CF ₃ , — (CF ₂ ) ₄ CF ₃ , — (CF ₂ ) ₅ CF ₃ , —CF ₂ O (CF ₂ ) ₂ OCF ₃ , -CF ₂ O (CF ₂ ) ₂ O (CF ₂ ) ₂ OCF _{3 and the} like. If the polymer (A) has 4 to 6 carbon atoms in the side chain (1), the compatibility between the polymer (A) and other components constituting the photosensitive composition can be improved. Can do. Thereby, aggregation of a polymer (A) in the coating film formed by apply | coating a photosensitive composition can be suppressed, As a result, a partition with a favorable external appearance can be formed.

In the polymer (A), the number of introduced groups (1) in the side chain having the group (1) is 1. In each side chain having the group (1) of the polymer (A), the group (1) may be the same or different. That is, the group (1) that the polymer (A) has in the side chain may be only one type or a combination of two or more types. In the polymer (A) used in the present invention, the group (1) may be introduced into all side chains, but preferably the polymer (A) so as to have the following fluorine atom content. The ratio of the side chain into which the group (1) is introduced relative to the whole is appropriately adjusted. Specifically, when the polymer (A) is produced by polymerizing the raw material monomer as described later, the blending amount of the monomer having the group (1) with respect to the entire raw material monomer is adjusted.

Further, the position of introduction of the side chain having the group (1) in the polymer (A) is not particularly limited, and is preferably regular and regularly spaced in a block manner so as to have the following fluorine atom content. Or the side chain which has group (1) in the principal chain which comprises a polymer (A) can be introduce | transduced at random. Thus, if the polymer (A) is within the range of the weight average molecular weight of the present invention, the side chain having the group (1) is composed of an alternating copolymer, a block copolymer, and a random copolymer. It may be introduced in any form. The polymer (A) is preferably a random copolymer from the viewpoints of production efficiency, intramolecular uniformity of the liquid repellent component, compatibility with components other than the liquid repellent component, and the like. In addition, it is preferable to introduce | transduce randomly by random copolymerization similarly to introduction | transduction of the side chain which has group (1) also about the side chain which has the various groups introduce | transduced below demonstrated.

In the polymer (A) used in the present invention, the fluorine atom content in the polymer (A) mainly due to the side chain having the group (1) is preferably 20 to 50% by mass, It is more preferably 25 to 42% by mass, and particularly preferably 25 to 35% by mass. If the fluorine atom content in the polymer (A) is less than 20% by mass, sufficient development resistance tends to be not obtained, and as a result, the liquid repellency of the upper surface of the partition wall may be insufficient. . Further, when the fluorine atom content in the polymer (A) exceeds 50% by mass, the polymers (A) tend to self-aggregate, and as a result, the liquid repellency of the upper surface of the partition wall becomes insufficient. Sometimes. Furthermore, the adhesion between the partition walls and the substrate may be reduced.

In addition, the fluorine atom content in the polymer (A) is a content mainly derived from the fluorine atom of the group (1) that the polymer (A) has in the side chain. However, for example, when the polymer (A) has a fluorine atom not derived from the group (1) such as a fluorine atom directly bonded to the main chain carbon, the fluorine atom and the group ( In addition to 1), it refers to the content of fluorine atoms combined with the fluorine atoms of the polymer (A).

In addition, the polymer (A) used in the present invention has a side chain having a polyoxyalkylene group. This polyoxyalkylene group is a polyoxyalkylene group having a repeating unit of an oxyalkylene group having 2 to 4 carbon atoms.
The content of the polyoxyalkylene group in the polymer (A) used in the present invention is preferably 5 to 60% by mass. More preferably, it is 10 to 55% by mass, and particularly preferably 15 to 50% by mass. When the content of the polyoxyalkylene group in the polymer (A) is less than 5% by mass, the liquid repellency may be significantly lowered when a jet rinsing process using high-pressure water is performed after the development process. Furthermore, there is a possibility that a large amount of residual film exists in the partition walls and partition opening portions finally obtained. Moreover, when the content of the polyoxyalkylene group exceeds 60% by mass, the liquid repellency may be lowered.

The polyoxyalkylene group used in the present invention is specifically a group represented by the following general formula (11) (hereinafter sometimes referred to as group (11)).
-(R ¹¹ O) _m (R ¹² O) _j R ¹³ (11)
(In the formula (11), R ¹¹ represents an ethylene group, R ¹² represents an alkylene group having 3 or 4 carbon atoms, R ¹³ represents a hydrogen atom or an optionally substituted substituent having 1 to 10 carbon atoms. In the alkyl group, m represents an integer of 4 to 100, j represents an integer of 0 to 100, and m + j is 4 to 100.

In the group (11), R ¹¹ represents an ethylene group (—CH ₂ CH ₂ —), and R ¹² represents an alkylene group having 3 or 4 carbon atoms. The structure of the alkylene group having 3 or 4 carbon atoms may be a linear structure or a branched structure. R ¹² is a propylene group (—CH ₂ CH (CH ₃ ) —), a trimethylene group (—CH ₂ CH ₂ CH ₂ —), an ethylethylene group (—CH ₂ CH (CH ₂ CH ₃ ) —), 1, Examples include 2-dimethylethylene group (—CH (CH ₃ ) CH (CH ₃ ) —), tetramethylene group (— (CH ₂ ) ₄ —), and propylene group or tetramethylene group is preferable.
In the group (11), m represents an integer of 4 to 100, and j represents an integer of 0 to 100, respectively, preferably 50 or less, more preferably 30 or less. Further, m / (m + j), which is the ratio of the number of R ^{11 in} the polyoxyalkylene group, is preferably 50 to 100%, more preferably 80 to 100%, and substantially 100%. It is particularly preferred.
M + j is 4 to 100, preferably 6 to 50, and more preferably 8 to 30. When m + j is 3 or less, the liquid repellency tends to decrease when a jet rinsing process using high-pressure water is performed after the development process. Furthermore, there is a tendency that a large amount of residual film is generated. When m + j is 101 or more, the polymer (A) migrates to the opening during post-baking, and the lyophilicity of the opening between the partition walls becomes insufficient. When the ink is applied using the inkjet method, the opening Ink may not be sufficiently wet and spread. In the general formula (11), (R ¹¹ O) _m (R ¹² O) _j is a group (11) having m (R ¹¹ O) units and j (R ¹² O) units. The order of bonding between the (R ¹¹ O) unit and the (R ¹² O) unit is not particularly limited. That is, in the group (11), m (R ¹¹ O) units and j (R ¹² O) units may be bonded alternately, randomly, or in blocks.

In the group (11), when R ¹³ is an alkyl group having 1 to 10 carbon atoms which may have a substituent, the structure is a straight chain structure, a branched structure, a ring structure, a partial ring It may have a structure or the like. Specific examples of the substituent include a carboxyl group, a hydroxyl group, and an alkoxy group having 1 to 5 carbon atoms. In the present invention, R ¹³ in the group (11) is preferably a linear or unsubstituted alkyl group having 1 to 5 carbon atoms, more preferably a methyl group or an ethyl group.

In addition, as for the polyoxyalkylene group such as the group (11) in the side chain of the polymer (A), one type may be used alone, or two or more types may be used in combination. In addition, the introduction of the side chain having the group (11) into the polymer (A) is, as will be described later, when the polymer (A) is produced by polymerizing the raw material monomer. The blending amount of the monomer with respect to the whole raw material monomer is appropriately adjusted so that the blending amount can give the effect of improving the developability to the polymer (A) without impairing the effects of the present invention. .

The polymer (A) contained in the photosensitive composition of the present invention is a side having a functional group corresponding to various purposes in addition to the side chain having the group (1) within the range not impairing the effects of the present invention. It is possible to have chains. As an example of such functional group introduction into the side chain of the polymer (A), for example, a group having a siloxane bond represented by the following general formula (2) for the purpose of improving ink falling property and UV ozone resistance. (Hereinafter sometimes referred to as group (2)) can be introduced into the side chain of the polymer (A).

In the group (2), R ¹ and R ² may be the same or different for each structural unit. When R ¹ and R ² are alkyl groups, the preferred carbon number is 1 to 10, and the more preferred carbon number is 1 to 6. These may have a linear structure or a branched structure. When R ¹ and R ² are cycloalkyl groups, the preferred carbon number is 3 to 10, and the more preferred carbon number is 5 or 6. When R ¹ and R ² are aryl groups, the preferred carbon number is 6-15, and the more preferred carbon number is 6-10. Some or all of the hydrogen atoms of R ¹ and R ² may be substituted with fluorine atoms.
In consideration of the liquid repellency of the partition formed using the photosensitive composition containing the polymer (A), R ¹ and R ² are each independently a hydrogen atom, a methyl group, or a trifluoromethyl group. or it is preferably phenyl group, and particularly preferably R ¹ and R ² of the total siloxane units are methyl groups.
In addition, when R ³ is an organic group having 1 to 10 carbon atoms, R ³ may have a nitrogen atom, an oxygen atom, a fluorine atom, or the like. In the present invention, R ³ is preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or an alkyl group having 1 to 5 carbon atoms substituted with a fluorine atom, and more preferably a trifluoromethyl group. Or it is a methyl group. Further, in the group (2), n is preferably an integer of 2 to 100.

When the polymer (A) has a side chain having the group (2), one type of the group (2) may be used alone, or two or more types may be used in combination. Further, the content of the silicon atom derived from the group (2) in the polymer (A) is preferably 0.1 to 25% by mass, more preferably 0.5 to 20% by mass. When the content of silicon atoms is within this range, the above effect can be imparted to the polymer (A) without impairing the effect of the present invention. In addition, the adjustment of the silicon atom content in the polymer (A) is as follows. When the polymer (A) is produced by polymerizing the raw material monomer, the raw material single amount of the monomer having the group (2) It is performed by appropriately adjusting the blending amount for the whole body.

The polymer (A) preferably further has a side chain having an acidic group. The introduction of the side chain having an acidic group in the polymer (A) is performed for the purpose of improving developability. The developer used for the development photosensitive composition is generally an alkaline developer, and the solubility of the polymer (A) in the developer is improved by introducing an acidic group. The polymer (A) contained in the unexposed part of the coating film is removed by the developer. When the polymer (A) has a side chain having an acidic group, the alkali solubility is good, and therefore the possibility that the polymer (A) adheres to the opening is very low. Therefore, the lyophilicity of the opening is good. In addition, the acidic group which a polymer (A) has in a side chain may be 1 type, or may be 2 or more types.

Although it does not specifically limit as an acidic group introduce | transduced into a polymer (A), A carboxyl group, a phenolic hydroxyl group, a sulfonic acid group, etc. are mentioned. Here, the introduction of acidic groups to the side chain of the polymer (A), may be performed by introducing the end group R ¹³ of the polyoxyalkylene group (11). In addition, in the polymer (A) used for this invention, when manufacturing a polymer (A) by superposition | polymerization of a raw material monomer, it mentions later with respect to the whole raw material monomer of the monomer which has an acidic group. The blending amount is appropriately adjusted so that the obtained polymer (A) has the following preferable acid value.

The polymer (A) preferably has an acid value of 100 mgKOH / g or less, more preferably 10 to 50 mgKOH / g. When the acid value is within this range, the development of the unexposed part can be performed well, and the liquid repellency at the upper part of the partition wall of the exposed part is also good. The acid value is the mass [mg] of potassium hydroxide necessary to neutralize 1 g of the sample, and the unit is described as mgKOH / g in this specification.

The polymer (A) preferably further has a side chain having a functional group capable of undergoing a crosslinking reaction with a functional group included in the matrix constituting the partition wall by heat or light, such as an epoxy group, a mercapto group, or a hydroxyl group. These functional groups introduced into the polymer (A) can be used alone or in combination of two or more. Moreover, the introduction of these functional groups into the side chain of the polymer (A) may be carried out by introducing it into the terminal group R ¹³ of the polyoxyalkylene group (11). The introduction of a hydroxyl group can also be performed by using R ¹³ as a hydrogen atom.

The photosensitive composition of the present invention contains a photocuring initiator (B) and a binder resin (C) in addition to the polymer (A). This binder resin (C) is cured by the action of the photocuring initiator (B) when exposed. When producing a partition using a photosensitive composition, the unexposed part other than the part hardened | cured by pattern exposure is removed with a developing solution. When performing photolithography using a negative photosensitive composition such as the photosensitive composition of the present invention, a combination of a binder resin (C) having an acidic group and an alkaline developer is usually used.

When the polymer (A) has a functional group capable of being thermally cross-linked with an acidic group such as an epoxy group or a hydroxyl group, the partition matrix has these functional groups of the polymer (A) by post-baking treatment after exposure and development. The polymer (A) is sufficiently fixed to the partition wall by thermally crosslinking with the acidic group derived from the binder resin (C). Further, when the polymer (A) has both the acidic group, the thermally crosslinkable functional group and the acidic group, the polymer (A) particularly at a portion where the polymer (A) on the upper surface of the partition wall is present at a high density. The two are heat-crosslinked to become more polymerized and are sufficiently fixed to the partition walls. Further, when the polymer (A) has a mercapto group, it is sufficiently fixed to the partition wall by crosslinking with the ethylenically unsaturated double bond group derived from the binder resin (C) by post-baking treatment in the same manner as described above. The As a result, it is possible to prevent the polymer (A) from flowing out into or eluting from the partition wall, which is a concern when the ink is subsequently injected into the partition opening by inkjet.

The introduction of the side chain having a functional group crosslinkable with the functional group of the partition matrix into the polymer (A) is performed when the polymer (A) is produced by polymerizing raw material monomers as described later. In addition, the blending amount of the monomer having a functional group and a functional group crosslinkable in the partition matrix with respect to the whole raw material monomer can be added to the polymer (A) without impairing the effect of the present invention. Is appropriately adjusted so that the blending amount can provide the effect of suppressing the outflow / elution of the polymer (A).

(Production of polymer (A))
The polymer (A) used in the present invention has a structure having a side chain having the group (1) and a side chain having a polyoxyalkylene group such as the group (11). In order to form a side chain having an acidic group, a side chain having an acidic group, a side chain having a functional group that can be cross-linked by heat or light, etc. Examples thereof include a method of forming directly by a polymerization reaction or a method of forming by chemical conversion after the polymerization reaction.

The polymer (A) has a side chain having the essential group (1), a side chain having a polyoxyalkylene group such as the group (11), and a side chain optionally having the above groups by polymerization reaction. For direct formation, a monomer having the group (1), a monomer having a side chain having a polyoxyalkylene group such as the group (11), and a monomer having the group (2) if necessary Body, monomer having an acidic group, monomer having a functional group crosslinkable with the functional group of the partition matrix, and / or other monomer may be copolymerized under appropriate conditions. .
Examples of copolymerization include alternating copolymerization, block copolymerization, random copolymerization and the like, and the copolymerization can be carried out by a conventionally known method. In the present invention, the polymer (A) Is preferably a random copolymer obtained by copolymerization by random copolymerization.

As a monomer which has the said group (1) used for manufacture of a polymer (A), it is preferable that it is a compound represented by following General formula (3). These may be used individually by 1 type, or may use 2 or more types together.
CH ₂ = CR ⁴ —COO—Y—CFXR ^f (3)

(In the formula (3), R ⁴ represents a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a trifluoromethyl group, an etheric oxygen atom or a C 1-20 fluoro atom. An alkyl group, a cyano group, an alkyl group having 1 to 20 carbon atoms, an alkyl group substituted with an aryl group having 7 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, or a cycloalkyl group having 3 to 20 carbon atoms, Y is a single bond or a divalent organic group having no fluorine atom having 1 to 6 carbon atoms, —CFXR ^f is a group corresponding to the group (1), ie, X is A hydrogen atom, a fluorine atom or a trifluoromethyl group, and R ^f is a fluoroalkyl group having 1 to 20 carbon atoms which may have an etheric oxygen atom, or a fluorine atom.)

A preferred embodiment of —CFXR ^f in the compound (3) is the same as that described for the group (1).

Among the groups represented by Y in the above formula (3), Y, which is a divalent organic group having no fluorine atom having 1 to 6 carbon atoms, represents —R ⁵ —, —R ⁵ —NR ^6. —SO ₂ —, —R ⁵ —NR ⁶ —CO—, —CH ₂ CH (OH) —R ⁷ — (R ⁵ is an alkylene group having 1 to 6 carbon atoms, and R ⁶ is a hydrogen atom or R ⁷ is a single bond or an alkylene group having 1 to 4 carbon atoms, provided that when R ⁶ is a methyl group, R ⁵ bonded to NR ⁶ has 1 to 5 carbon atoms. Etc.). Specific examples ^{_{_{_{R 5, -CH 2 -, -}}}} CH 2 CH 2 -, - CH (CH 3) -, - CH 2 CH 2 CH 2 -, - C (CH 3) 2 -, - CH (CH ₂ CH ₃ ) —, —CH ₂ CH ₂ CH ₂ CH ₂ —, —CH (CH ₂ CH ₂ CH ₃ ) —, —CH ₂ (CH ₂ ) ₃ CH ₂ —, —CH (CH ₂ CH (CH ₃ ) ₂ )-and the like. Specific examples ^{_{_{_{R 7, -CH 2 -, -}}}} CH 2 CH 2 -, - CH (CH 3) -, - CH 2 CH 2 CH 2 -, - C (CH 3) 2 -, - CH (CH ₂ CH ₃ ) —, —CH ₂ CH ₂ CH ₂ CH ₂ —, —CH (CH ₂ CH ₂ CH ₃ ) — and the like.
Among these, Y in the compound (3) is preferably an alkylene group having 2 to 4 carbon atoms from the viewpoint of availability.

Among the groups represented by R ⁴ in the compound (3), a hydrogen atom, a fluorine atom, a chlorine atom, a methyl group, a trifluoromethyl group, a phenyl group, a benzyl group and the like are preferable, and a hydrogen atom, a fluorine atom, a chlorine atom, A methyl group or a trifluoromethyl group is more preferable. R ⁴ is particularly preferably a hydrogen atom or a methyl group. That is, the compound (3) is particularly preferably (meth) acrylate.

The compound represented by the general formula (3) is particularly preferably (meth) acrylate in which —CFXR ^f is a perfluoroalkyl group having 4 to 6 carbon atoms and Y is an alkylene group having 2 to 4 carbon atoms. Specific examples include 2- (perfluorohexyl) ethyl (meth) acrylate and 2- (perfluorobutyl) ethyl (meth) acrylate.

As a monomer which has the said group (11) used for manufacture of a polymer (A), it is preferable that it is a compound represented by the following general formula (12) or (13). These may be used individually by 1 type, or may use 2 or more types together.
CH ₂ = CR ¹⁴ —COO— (W—O) _q — (R ¹¹ O) _m (R ¹² O) _j R ¹³ (12)
CH ₂ = CR ¹⁴ —O— (W—O) _q — (R ¹¹ O) _m (R ¹² O) _j R ¹³ (13)
(In the formulas (12) and (13), R ¹⁴ is substituted with a hydrogen atom, a chlorine atom, a bromine atom, an iodine atom, a cyano group, an alkyl group having 1 to 20 carbon atoms, or an aryl group having 7 to 20 carbon atoms. An alkyl group, an aryl group having 6 to 20 carbon atoms, or a cycloalkyl group having 3 to 20 carbon atoms, and W is a divalent organic group having 1 to 10 carbon atoms and no fluorine atom. Q is 0 or 1. — (R ¹¹ O) _m (R ¹² O) _j R ¹³ is a group corresponding to the group (11).)

The preferred embodiment of — (R ¹¹ O) _m (R ¹² O) _j R ^{13 in} the compounds (12) and (13) is the same as that described for the group (11).
In the compounds (12) and (13), — (W—O) _q — represents a single bond when q is 0. When q is 1, — (W—O) _q — is an organic group having an oxygen atom on the R ¹¹ side. When q is 1, W is preferably a divalent hydrocarbon group having 2 to 10 carbon atoms, such as an alkylene group having 2 to 6 carbon atoms, a cycloalkylene group having 5 or 6 carbon atoms, or a cycloalkylene having 5 or 6 carbon atoms. A cycloalkylene group-containing alkylene group having 6 to 10 carbon atoms in total and having an alkylene group having 1 to 2 carbon atoms on both sides or one side of the group is preferable. However, when W is the same alkylene group as R ¹¹ (and when q is not 0, it is also the same alkylene group as R ¹² ), q is regarded as 0.
Further, R ¹⁴ in the compounds (12) and (13) is preferably a hydrogen atom, a fluorine atom, a chlorine atom, a methyl group, or a trifluoromethyl group, and particularly preferably a hydrogen atom or a methyl group.

In the above formulas (12) and (13), when q is 1, — (W—O) — represents a straight chain structure other than R ¹¹ O and R ¹² O, a branched structure, a ring structure, a partially ring An oxygen atom-terminated hydrocarbon group having 1 to 10 carbon atoms is preferred. More preferred is an oxygen atom-terminated hydrocarbon group having 3 to 8 carbon atoms. Specific examples of the oxygen atom-terminated hydrocarbon group include CH ₂ C ₆ H ₁₀ CH ₂ O (wherein C ₆ H ₁₀ is a cyclohexylene group), CH ₂ O, CH (CH ₃ ). _{_{_{_{O, CH 2 CH 2 CH 2}}}} O, C (CH 3) 2 O, CH (CH 2 CH 3) O, CH 2 CH 2 CH 2 CH 2 O, CH (CH 2 CH 2 CH 3) O, CH 2 _{_{_{_{(CH 2) 3 CH 2 O}}}} , CH (CH 2 CH (CH 3) 2) O , and the like. Among these, W in the compounds (12) and (13) is an oxyalkylene group having 3 or 4 carbon atoms (provided that when j is not 0, the same oxyalkylene as R ¹² O, for ease of availability) Are preferred).

In the compounds (12) and (13), among the groups represented by R ¹⁴ above, a hydrogen atom, a chlorine atom, a methyl group, a phenyl group, a benzyl group, and the like are preferable, and a hydrogen atom, a chlorine atom, or a methyl group is more preferable. preferable.

As a compound represented by the said General formula (12) and General formula (13), the compound shown below etc. are mentioned as a preferable compound.
(Compound represented by formula (12)))
_{_{_{CH 2 = CHOCH 2 C 6 H}}} 10 CH 2 O (CH 2 CH 2 O) m R 13
_{_{_{_{CH 2 = CHO (CH 2)}}}} 4 O (CH 2 CH 2 O) m R 13

(Compound represented by the general formula (13))
_{_{_{CH 2 = CHCOO (CH 2 CH}}} 2 O) m R 13,
_{_{_{CH 2 = C (CH 3)}}} COO (CH 2 CH 2 O) m R 13,
_{_{_{CH 2 = CHCOO (CH 2 CH}}} 2 O) m (C 3 H 6 O) j R 13,
_{_{_{_{CH 2 = C (CH 3)}}}} COO (CH 2 CH 2 O) m (C 3 H 6 O) j R 13,
_{_{_{CH 2 = CHCOO (CH 2 CH}}} 2 O) m (C 4 H 8 O) j R 13,
(In the above formula, m and j are the same as above. C ₆ H ₁₀ is a cyclohexylene group, C ₃ H ₆ is a propylene group, and C ₄ H ₈ is a tetramethylene group. In the formula, R ¹³ is the number of carbon atoms. 1 to 10 linear or unsubstituted alkyl groups such as a methyl group and a hydrogen atom)

In the preparation of the polymer (A), commercially available products can be used as the compounds (12) and (13) used for the purpose of introducing the group (11) into the side chain. Examples of such commercially available products include the following.
BLEMMER PME-400 (trade name, manufactured by NOF Corporation, CH ₂ ═C (CH ₃ ) COO (CH ₂ CH ₂ O) _k CH ₃ : k in the formula represents an average value between molecules, and the value of k is It is about 9. Hereinafter, k, m, and j in the molecular formula of each commercially available product are all average values between molecules.)
NK ester M-230G: (trade name, manufactured by Shin-Nakamura Chemical Co., Ltd., CH ₂ ═C (CH ₃ ) COO (CH ₂ CH ₂ O) _k CH ₃ : k in the formula represents an average value between molecules, k The value of is about 23).
New Frontier NF biisomer PEM6E (trade name, manufactured by Daiichi Kogyo Seiyaku Co., Ltd., CH ₂ ═C (CH ₃ ) COO (CH ₂ CH ₂ O) _k H: where k is about 6).
Light ester 130A (trade name, manufactured by Kyoeisha Chemical Co., Ltd., CH ₂ ═CHCOO (CH ₂ CH ₂ O) _k CH ₃ : where k is about 9).
BLEMMER AE-400 (trade name, manufactured by NOF Corporation, CH ₂ ═CHCOO (CH ₂ CH ₂ O) _k H: where k is about 10).
BLEMMER PP-800 (trade name, manufactured by NOF Corporation, CH ₂ ═C (CH ₃ ) COO (C ₃ H ₆ O) _k H: wherein k is about 13),
Blemmer AP-800 (trade name, manufactured by NOF Corporation, CH ₂ = CHCOO (C ₃ H ₆ O) _k H: where k is about 13).
BLEMMER 70PEP-350B (trade name, manufactured by NOF Corporation, CH ₂ ═C (CH ₃ ) COO (C ₂ H ₄ O) _m (C ₃ H ₆ O) _j H: where m is about 5, j is About 2).
BLEMMER 55PET-800 (trade name, manufactured by NOF Corporation, CH ₂ ═C (CH ₃ ) COO (C ₂ H ₄ O) _m (C ₄ H ₈ O) _j H: wherein m is about 10, j is About 5).

The monomer having the group (2) used as necessary for the production of the polymer (A) is preferably a compound represented by the following general formula (4). These may be used alone or in combination of two or more.

(In the formula (4), R ⁸ is a hydrogen atom or a methyl group, and Z is a single bond or a divalent organic group having 1 to 6 carbon atoms. It also has a siloxane bond bonded to Z. The group is a group corresponding to the group (2), that is, R ¹ and R ² are each independently a hydrogen atom, an alkyl group optionally substituted with a fluorine atom, a cycloalkyl group, or An aryl group, R ³ is a hydrogen atom or an organic group having 1 to 10 carbon atoms, and n is an integer of 1 to 200.)

Preferred embodiments of R ¹ , R ² , R ³ and n in the compound (4) are the same as those described for the group (2).
Of the groups represented by Z, the compound (4) has a divalent hydrocarbon group having 1 to 6 carbon atoms, specifically, —CH ₂ —, —CH ₂ CH ₂ -, -CH (CH ₃ )-, -CH ₂ CH ₂ CH _2- , -C (CH ₃ ) _2- , -CH (CH ₂ CH ₃ )-, -CH ₂ CH ₂ CH ₂ CH ₂ -,- CH (CH ₂ CH ₂ CH ₃ ) —, —CH ₂ (CH ₂ ) ₃ CH ₂ —, —CH (CH ₂ CH (CH ₃ ) ₂ ) — and the like can be mentioned. In particular, —CH ₂ CH ₂ —, —CH ₂ CH ₂ CH ₂ —, and —CH ₂ CH ₂ CH ₂ CH ₂ — are preferable.

The monomer having an acidic group used as necessary for the production of the polymer (A) is not particularly limited as long as it has an acidic group. A monomer having a carboxyl group, a phenolic hydroxyl group may be used. And a monomer having a sulfonic acid group. These may be used alone or in combination of two or more.

Examples of the monomer having a carboxy group include acrylic acid, methacrylic acid, vinyl acetic acid, crotonic acid, itaconic acid, maleic acid, fumaric acid, cinnamic acid, and salts thereof.

Examples of the monomer having a phenolic hydroxyl group include o-hydroxystyrene, m-hydroxystyrene, p-hydroxystyrene, and one or more hydrogen atoms of these benzene rings, such as a methyl group, an ethyl group, and an n-butyl group. And an alkyl group, a methoxy group, an ethoxy group, an n-butoxy group or the like, a halogen atom, a haloalkyl group having one or more halogen atoms, a nitro group, a cyano group, a compound substituted with an amide group, etc. .

Examples of the monomer having a sulfonic acid group include vinyl sulfonic acid, styrene sulfonic acid, (meth) allyl sulfonic acid, 2-hydroxy-3- (meth) allyloxypropane sulfonic acid, 2-methacrylic acid 2-sulfoethyl, Examples include 2-sulfopropyl (meth) acrylate, 2-hydroxy-3- (meth) acryloyloxypropane sulfonic acid, 2- (meth) acrylamide-2-methylpropane sulfonic acid, and the like.

Monomer having a functional group (hereinafter also referred to as “crosslinkable functional group”) that can be cross-linked by heat or light with the functional group of the partition matrix used as necessary for the production of the polymer (A). As long as it has a crosslinkable functional group, it will not be specifically limited. Specific examples include a monomer having an epoxy group and a monomer having a hydroxyl group. These may be used alone or in combination of two or more. In addition, it is preferable that the monomer which has a crosslinkable functional group does not have group (1) and group (2) substantially.

Examples of the monomer having an epoxy group include glycidyl (meth) acrylate and 3,4-epoxycyclohexylmethyl acrylate.

Examples of the monomer having a hydroxyl group include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 5-hydroxypentyl ( (Meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 4-hydroxycyclohexyl (meth) acrylate, neopentyl glycol mono (meth) acrylate, 3-chloro-2-hydroxypropyl (meth) acrylate, glycerin mono (meth) acrylate 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, cyclohexanediol monovinyl ether, 2-hydroxyethyl allyl ether, N-hydroxymethyl (meth) acrylate Amide, N, N-bis (hydroxymethyl) (meth) acrylamide.

In addition, about the side chain which has the mercapto group illustrated above as a crosslinkable functional group, thiocarboxylic acid ester can be introduce | transduced into a polymer terminal by using a thiocarboxylic acid ester compound as a chain transfer agent. Further, by treating the polymer with an acid or alkali, the thiocarboxylic acid ester can be decomposed to obtain a polymer having a mercapto group at the terminal. The thiocarboxylic acid ester compound is, for example, a compound in which the carboxyl group of thioacetic acid, thiopropionic acid, thiobutyric acid, or thiobenzoic acid is substituted with a —COSH group.

Monomers other than those that can be optionally used for the production of the polymer (A) include hydrocarbon olefins, vinyl ethers, isopropenyl ethers, allyl ethers, vinyl esters, allyl esters. , (Meth) acrylic acid esters, (meth) acrylamides, aromatic vinyl compounds, chloroolefins, conjugated dienes and the like, and considering the heat resistance of the partition wall, (meth) acrylic acid esters, or ( Meth) acrylamides are preferred. Note that these compounds may have a functional group such as a carbonyl group or an alkoxy group.

In order to produce the polymer (A) used in the present invention, monomers used for polymerization are appropriately selected from the monomers described above and copolymerized at an appropriate ratio. In addition, the preferable compounding ratio of the various monomers used when manufacturing a polymer (A) is as follows.

The ratio of the monomer mass having the group (1) to the total mass of the monomer to be copolymerized is such that the fluorine atom content in the polymer (A) is in the above preferred range, specifically 20 to 50% by mass, The proportion is more preferably 25 to 42% by mass, particularly preferably 25 to 35% by mass. Although it depends on the type of the monomer having the group (1) as such a ratio, specifically, it is preferably 20 to 80% by mass, more preferably 30 to 70% by mass, It is particularly preferably 40 to 60% by mass. If this ratio is too low, sufficient fluorine atom content cannot be secured, and sufficient development resistance tends to be not obtained, and in the vicinity of the upper surface of the partition formed using the photosensitive composition of the present invention. A polymer (A) becomes difficult to transfer, and as a result, the liquid repellency of the upper surface of a partition may become inadequate. On the other hand, if this ratio is too high, the fluorine atom content exceeds the preferred range, the polymers (A) tend to self-aggregate, and as a result, the liquid repellency of the upper surfaces of the partition walls may be insufficient. . Furthermore, the adhesion between the partition walls and the substrate may be reduced.
In the production of the polymer (A), when a monomer containing a fluorine atom is used as a raw material monomer in addition to the monomer having the group (1), the resulting polymer (A) What is necessary is just to adjust suitably the ratio of each raw material monomer so that fluorine atom content may become the said preferable range.

The ratio of the monomer mass having the group (11) to the total mass of the monomer to be copolymerized is such that the content of the group (11) in the polymer (A) is 5 to 60% by mass. It is preferable to do. The ratio is more preferably 10 to 55% by mass, and particularly preferably 15 to 50% by mass. Within this range, the content of the group (11) in the polymer (A) is generally within the above preferred range, and liquid repellency is maintained even when a jet rinsing step using high-pressure water after the development step is performed. be able to. Furthermore, the generation of a residual film can be prevented.

In the polymerization of the polymer (A), if a monomer having a group (2) is used as necessary, the ratio of the monomer mass having the group (2) to the total mass of the monomer to be copolymerized is: It is preferable that the silicon (A) content in the polymer (A) is in the above preferred range, specifically 0.1 to 25% by mass, more preferably 0.5 to 20% by mass. Such a ratio depends on the type of the monomer having the group (2), but specifically, it is preferably 0.5 to 30% by mass, more preferably 2 to 20% by mass. When the proportion of the monomer having the group (2) in all the monomers to be copolymerized is within this range, the silicon atom content in the polymer (A) is generally within the above preferable range, and the ink fall resistance and UV ozone resistance are improved. Good properties and the like.

In the polymerization of the polymer (A), when a monomer having an acidic group is used as necessary, the ratio of the mass of the monomer having an acidic group to the total mass of the monomer to be copolymerized is determined by the polymer ( It is preferable that the acid value of A) be in the above-mentioned preferable range, specifically 100 mgKOH / g or less, more preferably 10 to 50 mgKOH / g. Such a ratio depends on the type of monomer having an acidic group, but is specifically preferably 2 to 20% by mass, more preferably 4 to 12% by mass. When the proportion of the monomer having an acidic group in all the monomers to be copolymerized is within this range, the development of the unexposed portion can be carried out satisfactorily without impairing the effects of the present invention, and the parent of the opening can be performed. Although liquidity can be improved, it is favorable.

In the polymerization of the polymer (A), when using the monomer having the crosslinkable functional group as necessary, the ratio of the monomer mass having the crosslinkable functional group to the total mass of the monomer to be copolymerized Is preferably 1 to 40% by mass, and more preferably 5 to 20% by mass. When the ratio of the monomer having a crosslinkable functional group in all the monomers to be copolymerized is within this range, the polymer (A) can be immobilized on the partition wall without impairing the effects of the present invention. In addition, developability is improved.

In the polymerization of the polymer (A), when other monomers other than the above are used as necessary, the ratio of the mass of the other monomers to the total mass of the monomers to be copolymerized is 70% by mass or less. It is preferable that the content is 50% by mass or less. When the ratio of this mass exceeds 70 mass%, alkali developability may fall.

The polymer (A) used in the present invention has, as essential components, a side chain having the above group (1) and a side chain having a polyoxyalkylene group such as the above group (11). A copolymer having a side chain having a group (2), a side chain having an acidic group, a side chain having a thermally crosslinkable functional group, and the like, the monomer having the group (1) and the group (11) A monomer having a polyoxyalkylene group such as a monomer having a group (2), a monomer having an acidic group, a monomer having a thermally crosslinkable functional group, and / or It can synthesize | combine by melt | dissolving another monomer in a solvent, heating, adding a polymerization initiator, and making it copolymerize. In addition, when making it copolymerize, it is preferable to add a chain transfer agent as needed. Moreover, you may add a monomer, a polymerization initiator, a solvent, and a chain transfer agent continuously. Here, the adjustment of the mass average molecular weight of the polymer (A) can be performed by adjusting the conditions such as the polymerization temperature and time, the amount of the polymerization initiator, the addition amount of the chain transfer agent, and the like.
The polymer (A) thus produced is random copolymerization, but the block copolymer is prepared using a usual method such as changing the introduction timing of the raw material monomer into the copolymerization reaction system depending on the type of monomer. It is also possible to produce a polymer.

Examples of the solvent used for the polymerization of the polymer (A) include alcohols such as ethanol, 1-propanol, 2-propanol, 1-butanol and ethylene glycol; ketones such as acetone, methyl isobutyl ketone and cyclohexanone; Cellsorbs such as methoxyethanol, 2-ethoxyethanol and 2-butoxyethanol; carbitols such as 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol and 2- (2-butoxyethoxy) ethanol Methyl acetate, ethyl acetate, n-butyl acetate, ethyl lactate, n-butyl lactate, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol diacetate Esters such as glycerol triacetate; diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether.

Examples of the polymerization initiator include known organic peroxides, inorganic peroxides, azo compounds and the like. Organic peroxides and inorganic peroxides can also be used as redox catalysts in combination with a reducing agent. These polymerization initiators may be used alone or in combination of two or more.

Examples of the organic peroxide include benzoyl peroxide, lauroyl peroxide, isobutyryl peroxide, t-butyl hydroperoxide, t-butyl-α-cumyl peroxide and the like. Examples of inorganic peroxides include ammonium persulfate, sodium persulfate, potassium persulfate, hydrogen peroxide, percarbonate and the like. Examples of the azo compound include 2,2′-azobisisobutyronitrile, 1,1′-azobis (cyclohexane-1-carbonitrile), 2,2′-azobis (2,4-dimethylvaleronitrile), 2, 2′-azobis (2-methylbutyronitrile), 2,2′-azobis (4-methoxy-2,4-dimethylvaleronitrile), dimethyl 2,2′-azobisisobutyrate, 2,2′-azobis (2 -Amidinopropane) dihydrochloride and the like.

Examples of chain transfer agents include mercaptans such as n-butyl mercaptan, n-dodecyl mercaptan, t-butyl mercaptan, ethyl thioglycolate, 2-ethylhexyl thioglycolate, 2-mercaptoethanol; chloroform, carbon tetrachloride, tetraodor Alkyl halides such as carbon halides, and the thiocarboxylic acid ester compounds mentioned in the introduction of the mercapto group into the polymer (A).

Here, the side chain having the above various groups in the polymer (A) used in the present invention, in particular, the side chain having an acidic group or the side chain having a thermally crosslinkable functional group is also formed by chemical conversion after the polymerization reaction. Is possible. For example, a copolymer having a side chain having the group (1) and a side chain having a hydroxyl group is produced by the above polymerization, and a polybasic acid anhydride (such as maleic anhydride) is reacted with the hydroxyl group of the copolymer. Thus, a polymer (A) having a side chain having a carboxyl group as an acidic group can be produced.

In the radical curable photosensitive composition according to the present invention, the polymer (A) is preferably contained at a ratio of 0.07 to 1% by mass with respect to the total solid content of the composition. More preferably, it is contained in a proportion of 0.5% by mass. If the content is too small, the liquid repellency of the upper surface of the partition formed using the photosensitive composition of the present invention may be insufficient. If the content is too large, the adhesion between the partition and the substrate may be insufficient. May decrease.

Moreover, in the radical curable photosensitive composition which concerns on this invention, it is possible to contain the component which can provide a liquid-repellent effect | action to a partition other than the said polymer (A). Specifically, such a component has a side chain having a group represented by the general formula (2) and a side chain having a polyoxyalkylene group, and is represented by the general formula (1). Polymer (A) ′ having neither a side chain having a group nor a side chain having an ethylenic double bond, and the mass average molecular weight (Mw (A) ′) is 2.6 × 10 ⁴ <Mw (A) A polymer (A) ′ in which ≦ 20 × 10 ⁴ is mentioned.
In other words, the polymer (A) ′ is a polymer essentially having a side chain having the group (2) instead of the side chain having the group (1) in the polymer (A). Moreover, in the said polymer (A), in addition to the side chain which has group (1), although the structure was described about the polymer (A) which has a side chain which has group (2), polymer (A) ' Can have the same configuration as that except that it does not have a side chain having the group (1).

Specifically, the silicon atom content in the polymer (A) ′ is preferably 0.1 to 25% by mass, and more preferably 0.5 to 20% by mass. When the silicon atom content is within this range, the photosensitive composition of the present invention can be imparted with an effect of enhancing the liquid repellency of the partition wall surface obtained by using the photosensitive composition of the present invention without impairing the effects of the present invention. It becomes possible.
As in the polymer (A), the polymer (A) ′ has a side chain having the group (11), preferably the content of the group (11) with respect to the polymer (A) ′ is 5 to 60% by weight. Have in proportions. Furthermore, the polymer (A) ′ can optionally have a side chain having an acidic group, a side chain having a functional group that can be cross-linked by heat or light with a functional group that the partition matrix has, such as Also for the polymerization reaction for forming a structure having a side chain, the monomer having the group (1) is not used as a raw material monomer, but the monomer having the group (2) is used as an essential raw material monomer. Except for the above, it can be the same as the polymer (A).

In the radical curable photosensitive composition according to the present invention, when the polymer (A) ′ is used, it is contained in a proportion of 0.5 to 30% by mass with respect to the total solid content of the composition. It is preferably contained in a proportion of 2 to 20% by mass. By using in this content, it becomes possible to give the photosensitive composition of the present invention the effect of enhancing the liquid repellency of the partition wall surface obtained by using the photosensitive composition of the present invention without impairing the effects of the present invention. Further, when the polymer (A) ′ is used, even if the polymer (A) having no side chain having the group (2) is used as the polymer (A) used in combination therewith, the same as described above. The effect can be demonstrated.

(1-2) Photocuring initiator (B) (Photopolymerization initiator (B1))
When the photosensitive composition of the present invention is a radical curable type, a photopolymerization initiator (B1) that generates radicals upon irradiation with light is used as the photocuring initiator (B).

The photopolymerization initiator (B1) is not particularly limited as long as it is a compound that generates radicals upon irradiation with light. Specifically, α-diketones such as benzyl, diacetyl, methylphenylglyoxylate, and 9,10-phenanthrenequinone; acyloins such as benzoin; acylo such as benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether Inethers: thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2,4-dimethylthioxanthone, isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 2,4-diisopropylthioxanthone, thioxanthone-4 Thioxanthones such as sulfonic acids; benzophenones such as benzophenone, 4,4′-bis (dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone; Tophenone, 2- (4-toluenesulfonyloxy) -2-phenylacetophenone, p-dimethylaminoacetophenone, 2,2′-dimethoxy-2-phenylacetophenone, p-methoxyacetophenone, 2-methyl- [4- (methylthio) Acetophenones such as phenyl] -2-morpholino-1-propanone and 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one; anthraquinone, 2-ethylanthraquinone, camphorquinone, Quinones such as 1,4-naphthoquinone; ethyl 2-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate (n-butoxy), isoamyl 4-dimethylaminobenzoate, 4-dimethyl 2-ethylhexyl aminobenzoate Aminobenzoic acids such as phenacyl chloride, trihalomethylphenyl sulfone, acyl phosphine oxides, peroxides such as di-t-butyl peroxide, 1,2-octanedione, 1- [4- ( Phenylthio)-, 2- (O-benzoyloxime)], ethanone 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazoyl-3-yl] -1- (O-acetyloxime), etc. An oxime ester etc. are mentioned and 2 or more types may be used together.

Among these, the photopolymerization initiator (B1) used in the present invention is preferably a compound represented by the following general formula (5).

(In the formula, R ²¹ is a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an alkenyl group having 2 to 5 carbon atoms, or an alkyl group. A phenyl group having 6 to 20 carbon atoms or an alkyl group substituted or unsubstituted phenoxy group having 6 to 20 carbon atoms, and R ²² is a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, A cycloalkyl group having 3 to 8 carbon atoms, a phenyl group having 6 to 20 carbon atoms that is substituted or substituted with an alkyl group, an alkanoyl group having 2 to 20 carbon atoms, and a 7 to 20 carbon atom that is substituted or unsubstituted with an alkyl group a benzoyl group, a phenoxycarbonyl group alkoxycarbonyl group or an alkyl group substituted or unsubstituted 7 to 20 carbon atoms having a carbon number of 2 ~ 12, R ²³ is an alkyl group having 1 to 12 carbon atoms ^{^{^{There, R 24, R 25, R}}} 26 and ^{R 27} each independently represent a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, a substituted or unsubstituted cyclohexyl group having a carbon number of 3-8 with an alkyl group, A substituted or unsubstituted phenyl group having 6 to 20 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, a substituted or unsubstituted benzoyl group having 7 to 20 carbon atoms, or a substituted alkyl group Or an unsubstituted benzylcarbonyl group having 7 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 12 carbon atoms, an phenoxycarbonyl group having 7 to 20 carbon atoms substituted or unsubstituted with an alkyl group, and 1 to 20 amide groups or nitro groups.)

In the compound represented by the general formula (5), R ²¹ is preferably an alkyl group having 1 to 10 carbon atoms or a phenyl group having 6 to 12 carbon atoms substituted or unsubstituted with an alkyl group, such as a methyl group, Examples include an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, and a phenyl group. Among these, an alkyl group having 1 to 4 carbon atoms is preferable, an alkyl group having 1 or 2 carbon atoms is more preferable, and a methyl group is particularly preferable.

In the compound represented by the general formula (5), R ²² is preferably an alkyl group having 1 to 10 carbon atoms or an alkoxycarbonyl group having 2 to 5 carbon atoms, such as a methyl group, an ethyl group, or a propyl group. Butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, methoxycarbonyl group, ethoxycarbonyl group, propoxycarbonyl group and the like. Among them, an alkyl group having 1 to 6 carbon atoms is preferable, an alkyl group having 1 to 3 carbon atoms is more preferable, and a methyl group is particularly preferable.

In the compound represented by the general formula (5), examples of the alkyl group having 1 to 12 carbon atoms represented by R ²³ include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, and a heptyl group. Octyl group, nonyl group, decyl group, undecyl group, dodecyl group and the like. Among these, an alkyl group having 1 to 8 carbon atoms is preferable, an alkyl group having 2 to 6 carbon atoms is more preferable, and an ethyl group is particularly preferable.

In the compound represented by the general formula (5), R ²⁴ , R ²⁶ and R ²⁷ are preferably hydrogen atoms.

In the compound represented by the general formula (5), R ²⁵ is a benzoyl group having 7 to 20 carbon atoms substituted or unsubstituted with an alkyl group or a carbon number having 7 to 20 carbon atoms substituted or unsubstituted with an alkyl group. A benzylcarbonyl group is preferable, and a 2-methylbenzoyl group, a benzylcarbonyl group, or a 1,3,5-trimethylbenzylcarbonyl group is particularly preferable.

The compound represented by the general formula (5) (O-acyloxime compound) is not particularly limited, but in the general formula (5), R ²¹ is a phenyl group, R ²² is an octyl group, and R ²³ is an ethyl group. R ²⁴ , R ²⁶ and R ²⁷ are hydrogen atoms, R ²⁵ is a benzoyl group; R ²¹ is a methyl group, R ²² is a butyl group, heptyl group or octyl group, R ²³ is an ethyl group, R ²⁴ , R ²⁶ and R ²⁷ are hydrogen atoms and R ²⁵ is a benzoyl group; R ²¹ is a phenyl group, R ²² is an octyl group, R ²³ is an ethyl group, R ²⁴ , R ²⁶ and R ²⁷ are hydrogen atoms, and R ²⁵ is compound 2-methylbenzoyl ^{group; R 21} is a methyl ^{group, R 22} is a methyl group or an octyl ^{group, R 23} is ^{^ethyl, R} ^24, R ²⁶ and ^{R 27} are hydrogen atoms, R ⁵ is a 2-methylbenzoyl group ^{compound; R 21} and ^{R 22} is a methyl ^{group, R 23} is ^{^ethyl, R} ^24, R ²⁶ and ^{R 27} are hydrogen ^{atoms, R 25} is 2-methyl-5-tetrahydrofuranyl-methoxy Examples thereof include compounds that are a benzoyl group, a 2-methyl-4-tetrahydropyranylmethoxybenzoyl group, or a 2-methyl-5-tetrahydropyranylmethoxybenzoyl group.

A commercially available product can be used as the photopolymerization initiator (B1). Examples of commercially available products include OXE02 (trade name, manufactured by Ciba Specialty Chemicals, Etanone 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazoyl-3-yl] -1- (O-acetyl) Oxime): a compound in which, in the above general formula (5), R ²¹ and R ²² are methyl groups, R ²³ is an ethyl group, R ²⁴ , R ²⁶ and R ²⁷ are hydrogen atoms, and R ²⁵ is a 2-methylbenzoyl group) Is mentioned.

The content of the photopolymerization initiator (B1) in the radical curable photosensitive composition according to the present invention is preferably 1 to 15% by mass with respect to the total solid content of the composition, and 2 to 7% by mass. Is more preferable. When the content is 1 to 15% by mass, the curability is good and a pattern or line width close to the mask pattern can be formed by exposure and development.

Along with the photopolymerization initiator (B1), 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 1,4-butanol bis (3-mercaptobutyrate), tris (2-mercaptopropanoyl) When a thiol compound such as (oxyethyl) isocyanurate or pentaerythritol tetrakis (3-mercaptobutyrate) is used, a sensitizing effect may be exhibited.

(1-3) Binder resin (C) (Photosensitive resin (C1))
When the photosensitive composition of the present invention is a radical curable type, the binder resin (C) is a photosensitive resin having an acidic group and an ethylenic double bond that is polymerized by the radical generated by the photopolymerization initiator (B1). Resin (C1) is used.
Since the photosensitive resin (C1) has an ethylenic double bond involved in the photopolymerization in one molecule and further has an acidic group, the photosensitive resin (C1) is an uncured photosensitive composition using an alkaline developer. Unexposed portions can be selectively removed, and as a result, barrier ribs can be formed. In addition, it is preferable that photosensitive resin (C1) does not have group (1) and group (2) substantially.

Although it does not specifically limit as an acidic group which the photosensitive resin (C1) has, a carboxyl group, a phenolic hydroxyl group, a sulfonic acid group, a phosphoric acid group etc. are mentioned, You may use 2 or more types together.

Although it does not specifically limit as an ethylenic double bond which the photosensitive resin (C1) has, the double bond which addition polymerization groups, such as a (meth) acryloyl group, an allyl group, a vinyl group, a vinyloxy group, is mentioned, Two or more kinds may be used in combination. In addition, some or all of the hydrogen atoms of these addition polymerizable groups may be substituted with a hydrocarbon group, preferably a methyl group.

The photosensitive resin (C1) is not particularly limited. Specifically, the resin (C1-1) having a side chain having an acidic group and a side chain having an ethylenic double bond, and an epoxy resin having ethylenic properties. Examples thereof include a resin (C1-2) into which a double bond and an acidic group are introduced. These may be used alone or in combination of two or more.

Resin (C1-1) is, for example, a side chain having a reactive group obtained by copolymerizing a monomer having a reactive group such as a hydroxyl group, a carboxyl group, or an epoxy group with a monomer having an acidic group. And a copolymer having an acidic group-containing side chain, a functional group capable of bonding to the reactive group, and a compound having an ethylenic double bond dissolved in a solvent and reacted. it can. The monomer having a phosphate group as an acidic group is not particularly limited, and examples thereof include 2- (meth) acryloyloxyethane phosphoric acid.

Resin (C1-2) can be synthesized, for example, by reacting an epoxy resin with a compound having a carboxyl group and an ethylenic double bond and then reacting with a polybasic carboxylic acid or its anhydride. Can do. Specifically, by reacting an epoxy resin with a compound having a carboxyl group and an ethylenic double bond, the carboxyl group and the epoxy group of the epoxy resin react to introduce an ethylenic double bond. Next, a carboxyl group can be introduce | transduced by making polybasic carboxylic acid or its anhydride react with the hydroxyl group of resin in which the ethylenic double bond was introduce | transduced.

The epoxy resin is not particularly limited, but is bisphenol A type epoxy resin, bisphenol F type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, trisphenolmethane type epoxy resin, epoxy resin having naphthalene skeleton, Examples include an epoxy resin having a biphenyl skeleton represented by the formula (6), an epoxy resin represented by the following general formula (7), an epoxy resin represented by the following general formula (8), and the like.

(In the formula (6), s is 1 to 50, preferably 2 to 10. Further, each hydrogen atom of the benzene ring is independently an alkyl group having 1 to 12 carbon atoms, a halogen atom, or a substituent. It may be substituted with a phenyl group which may have

(In Formula (7), R ³¹ , R ³² , R ³³ and R ³⁴ are each independently a hydrogen atom, a chlorine atom or an alkyl group having 1 to 5 carbon atoms, and t is 0 to 10) .)

(In Formula (8), each hydrogen atom of the benzene ring may be independently substituted with an alkyl group having 1 to 12 carbon atoms, a halogen atom, or an optionally substituted phenyl group. 0 to 10)

In addition, after making the epoxy resin represented by General formula (6), General formula (7), or General formula (8) and the compound which has a carboxyl group and an ethylenic double bond react, it is polybasic carboxylic acid. When the anhydride is reacted, it is preferable to use a mixture of a dicarboxylic acid anhydride and a tetracarboxylic dianhydride as the polybasic carboxylic acid anhydride. At this time, the molecular weight can be controlled by changing the ratio of the dicarboxylic anhydride and the tetracarboxylic dianhydride.

A commercially available product can be used as the resin (C1-2) in which an acidic group and an ethylenic double bond are introduced into an epoxy resin. Examples of such commercially available products are KAYARAD PCR-1069, K-48C, CCR-1105, CCR-1115, CCR-1163H, CCR-1166H, CCR-1159H, TCR-1025, TCR-1064H. , TCR-1286H, ZAR-1535H, ZFR-1122H, ZFR-1124H, ZFR-1185H, ZFR-1492H, ZCR-1571H, ZCR-1569H, ZCR-1580H, ZCR-1581H, ZCR-1588H, ZCR-1629H (above And Nippon Kayaku Co., Ltd.) and EX1010 (manufactured by Nagase ChemteX Corporation).
As a resin (C1-2) in which an acidic group and an ethylenic double bond are introduced into an epoxy resin, an acidic group and an ethylenic double bond are introduced into an epoxy resin having a biphenyl skeleton represented by the formula (6) Resin, a resin obtained by introducing an acidic group and an ethylenic double bond into an epoxy resin represented by formula (7), or an acid group and an ethylenic double bond introduced into an epoxy resin represented by formula (8) Resin is preferred. By using the resin, more black colorant can be blended in the composition, and the light shielding property and optical density can be increased. Moreover, the coating film peeling at the time of image development is suppressed and a high resolution pattern can be obtained. On the other hand, the linearity of the line is good and preferable. Furthermore, the appearance after the post-baking step is maintained, and a smooth coating surface is easily obtained, which is preferable.

The photosensitive resin (C1) used in the present invention preferably has a mass average molecular weight of 1.5 × 10 ³ to 30 × 10 ³ , more preferably 2.0 × 10 ³ to 15 × 10 ³ . When the mass average molecular weight is less than 1.5 × 10 ³ , curing during exposure may be insufficient, and when it exceeds 30 × 10 ³ , developability may be deteriorated.

The number of ethylenic double bonds that the photosensitive resin (C1) has is preferably 3 or more, more preferably 6 or more in one molecule on average. When the number of ethylenic double bonds is 3 or more, the difference in alkali solubility between the exposed portion and the unexposed portion is likely to be different, and a fine pattern can be formed with a smaller exposure amount.

The photosensitive resin (C1) preferably has an acid value of 10 to 300 mgKOH / g, more preferably 30 to 150 mgKOH / g. When it is 10 to 300 mgKOH / g, the developability of the photosensitive composition is good.

The content of the photosensitive resin (C1) in the radical curable photosensitive composition according to the present invention is preferably 5 to 80% by mass with respect to the total solid content of the composition, and is 10 to 60% by mass. Is more preferable. When the content is 5 to 80% by mass, the developability of the photosensitive composition is good.

(1-3) Optional Components The radical curable photosensitive composition according to the present invention comprises the polymer (A), a photopolymerization initiator (B1) as a photocuring initiator (B), and a binder resin (C). As an essential component, the photosensitive resin (C1) having an acidic group and an ethylenic double bond as an optional component is described below for the purpose of improving various functions and the like as long as the effects of the present invention are not impaired. It is possible to contain components.
(Crosslinking agent (D) having two or more ethylenic double bonds)
The radical curable photosensitive composition according to the present invention preferably contains a crosslinking agent (D) having two or more ethylenic double bonds as an optional component for promoting radical curing. Thereby, the sclerosis | hardenability of the said photosensitive resin (C1) at the time of exposure improves, and the exposure amount at the time of forming a partition can be reduced. In addition, it is preferable that the said crosslinking agent (D) does not have an acidic group substantially.

The crosslinking agent (D) having two or more ethylenic double bonds is not particularly limited, but a compound having 2 to 10 (meth) acryloyloxy groups is preferable. Specifically, diethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate , Trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ethoxylated isocyanuric acid triacrylate And urethane acrylate. These may be used alone or in combination of two or more.

In the present invention, a commercially available product can be used as the crosslinking agent (D) having two or more ethylenic double bonds. Examples of such commercially available products include KAYARAD DPHA (trade name, manufactured by Nippon Kayaku Co., Ltd., a mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate), NK ester A-9300 (trade name, manufactured by Shin-Nakamura Chemical Co., Ltd.) , Ethoxylated isocyanuric acid triacrylate), NK ester A-9300-1CL (trade name, manufactured by Shin-Nakamura Chemical Co., Ltd., ε-caprolactone-modified tris- (2-acryloxyethyl) isocyanurate), BANI-M (trade name) Manufactured by Maruzen Petrochemical Co., Ltd., bis {4- (allylbicyclo [2.2.1] hept-5-ene-2,3-dicarboximido) phenyl} methane), BANI-X (trade name, Maruzen Petrochemical) N, N′-m-xylylene-bis (allylbicyclo [2.2.1] hept-5-ene- , 3-dicarboximide)), and the like.
Examples of urethane acrylate include KAYARAD UX series manufactured by Nippon Kayaku Co., Ltd., and specific product names include UX-3204, UX-6101, UX-0937, DPHA-40H, UX-5000, UX-5002D-P20. Etc.
A-9300, BANI-M and BANI-X are preferable from the viewpoint of imparting hardness to the coating film and suppressing thermal sagging. A-9300-1CL is preferable from the viewpoint of imparting flexibility to the coating film. Urethane acrylate is preferable because an appropriate development time can be realized and developability is improved.

The content of the crosslinking agent (D) in the radical curable photosensitive composition according to the present invention is preferably 1 to 50% by mass with respect to the total solid content of the composition, and preferably 5 to 30% by mass. More preferred. When the content is 1 to 50% by mass, the developability of the photosensitive composition is improved.

(Black colorant (E))
The radical curable photosensitive composition according to the present invention has a black colorant (E) according to the required optical density of the partition wall when the cured product is used in applications requiring light shielding properties such as a black matrix. It is preferable to contain.

The black colorant (E) is not particularly limited, and examples thereof include carbon black, aniline black, anthraquinone black pigment, metal oxide such as titanium black, metal particles such as silver tin alloy, and perylene black pigment. Specifically, C.I. I. Pigment black 1, 6, 7, 12, 20, 31 etc. are mentioned. The black colorant (E) may be a mixture of organic pigments such as red pigments, blue pigments, green pigments, and inorganic pigments. Among these, carbon black is preferable in consideration of the light shielding property. Carbon black may be surface-treated with a resin or the like. Moreover, in order to adjust the color tone of the black colorant (E), carbon black can be used in combination with a blue pigment or a purple pigment.

The carbon black used as the black colorant (E) preferably has a specific surface area of 50 to 200 m ² / g by the BET method. If this specific surface area is too small, the shape of the partition wall may be deteriorated. If the specific surface area is too large, the dispersion aid described later will be excessively adsorbed on the black colorant (E), resulting in a large amount of dispersion aid. It may be necessary to add an agent.

Furthermore, considering the exposure sensitivity of the photosensitive composition, it is preferable that the carbon black used as the black colorant (E) has an oil absorption of dibutyl phthalate of 120 cc / 100 g or less, and a smaller amount is more preferable.

Further, the carbon black used as the black colorant (E) preferably has an average primary particle diameter of 20 to 50 nm. If this average primary particle size is too small, it becomes difficult to disperse at a high concentration, it may be difficult to obtain a photosensitive composition with good stability over time, and if the average primary particle size is too large, It may cause deterioration of the shape of the partition wall. The carbon black preferably has an average secondary particle size of 80 to 200 nm. The particle size of carbon black can be measured using a transmission electron microscope.

In the radical curable photosensitive composition according to the present invention, the black colorant (E) in the case where the black colorant (E) is blended in order to impart light-shielding properties such as a black matrix to the cured film. The content depends on the required light shielding properties and optical density, but is preferably 15 to 60% by mass, more preferably 20 to 50% by mass, and more preferably 25 to 40% by mass based on the total solid content of the composition. % Is particularly preferred. If this content is too small, the optical density of the partition may be insufficient in the case of a black matrix or the like. If the content is too high, the curability of the photosensitive composition will be reduced and the appearance of the partition will be reduced. Liquid repellency may be reduced.

(Polymer dispersant / dispersion aid)
When the radical curable photosensitive composition according to the present invention contains a dispersible material such as the black colorant (E), it is preferable to contain a polymer dispersant in order to improve the dispersibility. The polymer dispersant is not particularly limited, and is urethane type, polyimide type, alkyd type, epoxy type, polyester type, melamine type, phenol type, acrylic type, polyether type, vinyl chloride type, vinyl chloride vinyl acetate type. Examples thereof include a polymer system, a polyamide system, and a polycarbonate system. Among these, urethane type or polyester type is preferable. The polymer dispersant may have a polyoxyethylene group and / or a polyoxypropylene group.

When the polymer dispersant is used for dispersing the black colorant (E), it is preferable to use a polymer dispersant having a basic group in consideration of the affinity for the black colorant (E). Although it does not specifically limit as a basic group, A primary, secondary, or tertiary amino group is mentioned.

Commercially available products can be used as such polymer dispersants. Examples of commercially available products include Disparon DA-7301 (trade name, manufactured by Enomoto Kasei Co., Ltd.), BYK161, BYK162, BYK163, BYK182 (all above). Trade names, manufactured by BYK-Chemie), Solspers 5000, Solspers 17000 (all of which are trade names, manufactured by Zeneca).

The addition amount of the polymer dispersant is preferably 5 to 30% by mass and more preferably 10 to 25% by mass with respect to the dispersible material such as the black colorant (E). If the amount added is too small, the effect of improving dispersibility may be insufficient, and if the amount added is too large, the developability of the photosensitive composition may be lowered.

The radical curable photosensitive composition according to the present invention may contain a phthalocyanine pigment derivative or a metal phthalocyanine sulfonamide compound as a dispersion aid. The dispersion aid is considered to have a function of improving dispersion stability by adsorbing to a dispersible material such as a black colorant (E) and a polymer dispersant.

(Fine particles)
The radical curable photosensitive composition according to the present invention may contain fine particles as necessary. Thereby, it can suppress that the shape of a partition changes at the time of the post-baking mentioned later.

The fine particles are not particularly limited, inorganic fine particles such as silica, zirconia, magnesium fluoride, tin-doped indium oxide (ITO), antimony-doped tin oxide (ATO); organic fine particles such as polyethylene and polymethyl methacrylate (PMMA) Is mentioned. The fine particles are preferably inorganic fine particles in view of heat resistance, and silica or zirconia is preferred in consideration of availability and dispersion stability. Further, when the photosensitive composition contains a black colorant (E) and a polymer dispersant in order to improve the dispersibility thereof, the fine particles can be obtained by considering the adsorptive capacity of the polymer dispersant. It is preferably negatively charged. Furthermore, considering the exposure sensitivity of the photosensitive composition, it is preferable that the fine particles do not absorb light irradiated at the time of exposure, i-line (365 nm), h-line (405 nm), which is the main emission wavelength of an ultra-high pressure mercury lamp, It is particularly preferable not to absorb g-line (436 nm).

The particle diameter of the fine particles is preferably 1 μm or less, more preferably 200 nm or less, since the surface smoothness of the partition wall is improved.

The content of fine particles in the radical curable photosensitive composition according to the present invention is preferably 3 to 30% by mass, more preferably 5 to 20% by mass, based on the total solid content of the composition. If the content is too small, the shape of the partition wall may change during post-baking, and if the content is too large, the dispersion stability of the photosensitive composition may decrease.

(Silane coupling agent)
The radical curable photosensitive composition according to the present invention may contain a silane coupling agent as required. Thereby, the adhesiveness of a partition and a board | substrate can be improved.

The silane coupling agent is not particularly limited. Specifically, tetraethoxysilane, 3-glycidoxypropyltrimethoxysilane, methyltrimethoxysilane, vinyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, 3-chloropropyltrimethoxysilane, 3-mercaptopropyl Examples include trimethoxysilane, heptadecafluorooctylethyltrimethoxysilane, N-phenyl-3-aminopropyltrimethoxysilane, polyoxyalkylene having a triethoxysilyl group, and imidazolesilane. Good.

(Thermosetting agent)
The radical curable photosensitive composition according to the present invention may contain a thermosetting agent, if necessary. Thereby, the heat resistance of a partition and water permeability resistance can be improved. Further, when the polymer (A) has a thermally crosslinkable functional group, the polymer (A) and the thermosetting agent are chemically bonded, thereby obtaining an effect of fixing the polymer (A) to the partition wall. It is done.

Although it does not specifically limit as a thermosetting agent, Amino resin (melamine compounds, such as hexamethoxymethylol melamine), a compound which has two or more epoxy groups, a compound which has two or more hydrazino groups, a polycarbodiimide compound, an oxazoline group A compound having two or more, a compound having two or more aziridine groups, a polyvalent metal, a compound having two or more mercapto groups, a polyisocyanate compound and the like may be mentioned, and two or more may be used in combination. Among these, considering the chemical resistance of the partition walls, amino resins, compounds having two or more epoxy groups, or compounds having two or more oxazoline groups are preferable.
(Phosphate compound)
The radical curable photosensitive composition according to the present invention may contain a phosphate compound as necessary. This is preferable because adhesion to the substrate can be improved. Examples of the phosphoric acid compound include mono (meth) acryloyloxyethyl phosphate, di (meth) acryloyloxyethyl phosphate, tris (meth) acryloyloxyethyl phosphate, and the like.

(Other optional ingredients)
Moreover, the radical curable photosensitive composition according to the present invention includes a curing accelerator, a thickener, a plasticizer, an antifoaming agent, a leveling agent, a repellency inhibitor, as necessary, in addition to various components other than those described above. An ultraviolet absorber or the like may be included.
The radical curable photosensitive composition according to the present invention is prepared by uniformly mixing the above-described various essential components and optional components added as necessary according to the above-mentioned blending amount by a normal method. can do.

(2) Acid curable photosensitive composition When the photosensitive composition of the present invention is an acid curable type, the photosensitive composition comprises a polymer (A) and a photoacid generator (B) as a photocuring initiator (B). B2) and an alkali-soluble resin (C21) having a carboxyl group and / or a phenolic hydroxyl group as the binder resin (C), and a compound having two or more groups capable of reacting with the carboxyl group and / or the phenolic hydroxyl group Contains a crosslinkable resin (C22). In such an acid-curable photosensitive composition, an acid is generated from the photoacid generator (B2) in the light irradiation portion during exposure in photolithography or the like, and an alkali-soluble resin having a carboxyl group and / or a phenolic hydroxyl group ( C21) and a crosslinkable resin (C22) which is a compound having two or more groups capable of reacting with a carboxyl group and / or a phenolic hydroxyl group undergo a crosslinking reaction to form a cured coating film.

Each component contained in the acid-curable photosensitive composition according to the present invention will be described below.
(2-1) Polymer (A)
The polymer (A) contained in the acid-curable photosensitive composition according to the present invention is a characteristic component in the photosensitive composition of the present invention, and includes the above-described radical curable photosensitive composition including preferred embodiments thereof. The polymer (A) described in the article can be applied to the acid-curable photosensitive composition.
The content of the polymer (A) in the photosensitive composition can also be the same as described above. Furthermore, in addition to the polymer (A), the polymer (A) ′ described above as a component capable of imparting a liquid repellency to the partition walls can be used in the same manner as in the case of the radical curable photosensitive composition.

(2-2) Photocuring initiator (B) (photoacid generator (B2))
When the photosensitive composition of the present invention is an acid curable type, a photoacid generator (B2) that is a compound that generates an acid by light is used as the photocuring initiator (B). Examples of the photoacid generator (B2) include diaryliodonium salts, triarylsulfonium salts, triazine compounds, sulfonyl compounds, sulfonic acid esters, and the like.

Specific examples of the cation moiety of the diaryliodonium salt include diphenyliodonium, 4-methoxyphenylphenyliodonium, bis (4-t-butylphenyl) iodonium, and the like. Specific examples of the anion moiety of the diaryliodonium salt include trifluoromethanesulfonate, nonafluorobutanesulfonate, p-toluenesulfonate, pentafluorobenzenesulfonate, hexafluorophosphate, tetrafluoroborate, hexafluoroantimonate, (R ^f ) _k PF _(6-k) ⁻ (where k is an integer of 1 to 6) and the like. The diaryliodonium salt consists of a combination of one of the cation moieties and one of the anion moieties. An example is bis (4-tert-butylphenyl) iodonium trifluoromethanesulfonate.

Specific examples of the cation moiety of the triarylsulfonium salt include triphenylsulfonium, diphenyl-4-methylphenylsulfonium, diphenyl-2,4,6-trimethylphenylsulfonium, and the like. Specific examples of the anion moiety of the triarylsulfonium salt include specific examples of the anion moiety of the diaryl iodonium salt. A triarylsulfonium salt consists of a combination of one of the cation moieties and one of the anion moieties. Examples thereof include triphenylsulfonium trifluoromethanesulfonate.

Specific examples of triazine compounds include 2-methyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl)- 1,3,5-triazine, 2- (2-furyl) ethenyl-bis (trichloromethyl) -1,3,5-triazine, 2- (5-methyl-2-furyl) ethenyl-bis (trichloromethyl)- Examples include 1,3,5-triazine and 2- (3,4-dimethoxyphenyl) ethenyl-bis (trichloromethyl) -1,3,5-triazine.

Specific examples of the sulfonyl compound include bis (phenylsulfonyl) diazomethane, bis (t-butylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, and the like.

Specific examples of sulfonic acid esters include 2-nitrobenzyl p-toluenesulfonate, α- (p-toluenesulfonyloxyimino) -phenylacetonitrile, and the like.

The content of the photoacid generator (B2) in the acid curable photosensitive composition according to the present invention is preferably 0.1 to 30% by mass, preferably 1 to 20% by mass, based on the total solid content of the composition. More preferred. Within this range, the developability of the photosensitive composition will be good.

(2-2) Binder resin (C) (alkali-soluble resin (C21) / crosslinkable resin (C22))
When the photosensitive composition of the present invention is an acid curable type, the binder resin (C) includes a carboxyl group and / or a phenolic hydroxyl group that undergoes cross-linking polymerization by the action of the acid generated by the photoacid generator (B2). And a combination of the alkali-soluble resin (C21) having a crosslinkable resin (C22) which is a compound having two or more groups capable of reacting with a carboxyl group and / or a phenolic hydroxyl group.

(Alkali-soluble resin (C21))
The alkali-soluble resin (C21) has a carboxyl group and / or a phenolic hydroxyl group. A crosslinkable resin (C22) which is a compound which is soluble in an alkaline solution by having a carboxyl group and / or a phenolic hydroxyl group, and which has two or more groups capable of reacting with the carboxyl group and / or the phenolic hydroxyl group; It can be crosslinked to form a cured film. The alkali-soluble resin (C21) can be used without any limitation as long as it is a resin that is soluble in an alkaline solution constituting a developer used in photolithography of the photosensitive composition. And a resin (C21-1) obtained by polymerizing a monomer having a group and an ethylenic double bond and / or a monomer having a phenolic hydroxyl group and an ethylenic double bond as essential, and a phenol resin. . These resins preferably have substantially no groups (1) and (2).

A resin (C21-1) obtained by polymerizing a monomer having a carboxyl group and an ethylenic double bond and / or a monomer having a phenolic hydroxyl group and an ethylenic double bond as an essential component is obtained by polymerizing the carboxyl group and ethylene. It can be obtained by copolymerizing a monomer having an ionic double bond and / or a monomer having a phenolic hydroxyl group and an ethylenic double bond, if necessary, with another monomer. In this alkali-soluble resin (C21-1), the proportion of monomer units based on other monomers is preferably 30 to 95% by mass, more preferably 50 to 90% by mass. Within this range, the alkali solubility and developability of the photosensitive composition are good.

The monomer having a carboxyl group and an ethylenic double bond used for preparing the alkali-soluble resin (C21-1) includes acrylic acid, methacrylic acid, vinyl acetic acid, crotonic acid, itaconic acid, maleic acid. Examples include acids, fumaric acid, cinnamic acid, or salts thereof. Examples of the monomer having a phenolic hydroxyl group and an ethylenic double bond include o-hydroxystyrene, m-hydroxystyrene, p-hydroxystyrene and the like, in which one or more hydrogen atoms of these benzene rings are methyl, ethyl, Alkyl groups such as n-butyl, alkoxy groups such as methoxy, ethoxy and n-butoxy, halogen atoms, haloalkyl groups in which one or more hydrogen atoms of the alkyl group are substituted with halogen atoms, nitro groups, cyano groups, amide groups And the like. As the other monomer, the same monomer as the other monomer used for the production of the polymer (A) can be used.

Examples of the phenol resin include aromatic hydroxy compounds such as phenol, cresol, xylenol, resorcinol and hydroquinone and phenols which are at least one selected from these alkyl-substituted or halogen-substituted aromatic compounds as aldehydes such as formaldehyde, acetaldehyde and benzaldehyde. For example, a phenol / formaldehyde resin, a cresol / formaldehyde resin, or a phenol / cresol / formaldehyde cocondensation resin can be used.

The acid value of the alkali-soluble resin (C21) is preferably 10 to 600 mgKOH / g, more preferably 50 to 300 mgKOH / g. Within this range, the developability of the photosensitive composition will be good.

The number average molecular weight of the alkali-soluble resin (C21) is preferably 200 to 20000, more preferably 2000 to 15000. Within this range, the alkali solubility and developability of the photosensitive composition will be good. The mass average molecular weight is preferably 1.5 × 10 ³ to 30 × 10 ³ , and more preferably 2.0 × 10 ³ to 15 × 10 ³ . When the mass average molecular weight is less than 1.5 × 10 ³ , curing during exposure may be insufficient, and when it exceeds 30 × 10 ³ , developability may be deteriorated.

In the acid-curable photosensitive composition according to the present invention, the content of the alkali-soluble resin (C21) having a carboxyl group and / or a phenolic hydroxyl group is 10 to 90% by mass with respect to the total solid content of the composition. Preferably, 30 to 80% by mass is more preferable. Within this range, the developability of the photosensitive composition of the present invention is good.

(Crosslinkable resin (C22))
The crosslinkable resin (C22) is a compound having two or more groups capable of reacting with a carboxyl group and / or a phenolic hydroxyl group. By having two or more groups capable of reacting with a carboxyl group and / or a phenolic hydroxyl group, it can be crosslinked with an alkali-soluble resin (C21) having a carboxyl group and / or a phenolic hydroxyl group to form a cured coating film. Moreover, when the said polymer (A) has a carboxyl group and / or a hydroxyl group, it can also bridge | crosslink with a polymer (A) and a coating-film cured | curing material can be formed. The crosslinkable resin (C22) is preferably a compound substantially free of the group (1) and the group (2).

The crosslinkable resin (C22) is preferably at least one selected from the group consisting of amino resins, epoxy compounds, and oxazoline compounds. These may be used alone or in combination of two or more.

Amino resins include compounds in which a part or all of amino groups such as melamine compounds, guanamine compounds, urea compounds, etc. are hydroxymethylated, or part or all of the hydroxyl groups of the hydroxymethylated compounds are methanol, ethanol , A compound etherified with n-butyl alcohol, 2-methyl-1-propanol, and the like, for example, hexamethoxymethylmelamine and the like.

Epoxy compounds include bisphenol A type epoxy resins, bisphenol F type epoxy resins, phenol / novolak type epoxy resins, cresol / novolac type epoxy resins, trisphenol methane type epoxy resins, brominated epoxy resins and other glycidyl ethers, 3, Alicyclic epoxy resins such as 4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, bis (2,3-epoxycyclopentyl) ether, glycidyl such as diglycidyl hexahydrophthalate, diglycidyl tetrahydrophthalate, diglycidyl phthalate Esters, tetraglycidyldiaminodiphenylmethane, glycidylamines such as triglycidylparaaminophenol, and complex such as triglycidyl isocyanurate Such expression epoxy resin.

Examples of the oxazoline compound include 2-vinyl-2-oxazoline, 2-vinyl-4-methyl-2-oxazoline, 2-vinyl-5-methyl-2-oxazoline, 2-isopropenyl-2-oxazoline, 2-isopropenyl Mention may be made of copolymers of polymerizable monomers such as -4-methyl-2-oxazoline.

In the acid-curable photosensitive composition according to the present invention, the content of the crosslinkable resin (C22), which is a compound having two or more groups capable of reacting with a carboxyl group and / or a phenolic hydroxyl group, is the total solid content of the composition. The content is preferably 1 to 50% by mass, and more preferably 5 to 30% by mass. Within this range, the developability of the photosensitive composition will be good.

(2-3) Optional Components The acid curable photosensitive composition according to the present invention includes the polymer (A), a photoacid generator (B2) as a photocuring initiator (B), and a binder resin (C). And an alkali-soluble resin (C21) having a carboxyl group and / or a phenolic hydroxyl group, and a crosslinkable resin (C22) which is a compound having two or more groups capable of reacting with a carboxyl group and / or a phenolic hydroxyl group. However, various optional components can be contained for the purpose of improving various functions and the like within a range not impairing the effects of the present invention.
Examples of such optional components include all components other than the crosslinking agent (D) having two or more ethylenic double bonds among the optional components described in the radical curable photosensitive composition. As in the case of the photosensitive composition, it can be used for an acid-curable photosensitive composition.

The acid-curable photosensitive composition according to the present invention is prepared by uniformly mixing the above-described various essential components and optional components added as necessary according to the above-mentioned blending amount by a normal method. can do.

[Dilution solvent]
When forming a partition using the photosensitive composition of the present invention such as the above-described radical curable photosensitive composition or acid curable photosensitive composition, a diluted solution obtained by diluting the photosensitive composition with a solvent is used. It is preferable to form a coating film of the photosensitive composition by volatilizing and removing the solvent after using it to form a coating film (wet film).

The solvent for diluting the photosensitive composition is not particularly limited. Specifically, alcohols such as ethanol, 1-propanol, 2-propanol, 1-butanol and ethylene glycol; ketones such as acetone, methyl isobutyl ketone and cyclohexanone; 2-methoxyethanol, 2-ethoxyethanol, 2- Cellsorbs such as butoxyethanol and 2-propoxyethanol; carbitols such as 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol and 2- (2-butoxyethoxy) ethanol; methyl acetate; Ethyl acetate, n-butyl acetate, ethyl lactate, n-butyl lactate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate , Diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol diacetate, propylene glycol diacetate, ethyl 3-ethoxypropionate, cyclohexanol acetate, ethyl lactate, lactate n- Esters such as butyl, γ-butyrolactone, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, glycerin triacetate; diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dibutyl ether, triethylene glycol dimethyl ether, tetraethylene glycol And ethers such as dimethyl ether, propylene glycol dimethyl ether, dipropylene glycol dimethyl ether, dibutyl ether, and diethylene glycol methyl ethyl ether, cyclohexanone, 4-butyrolactone, and the like may be used in combination.

The diluted solution obtained by diluting the photosensitive composition with a solvent is preferably prepared so that the concentration of the photosensitive composition, that is, the solid content concentration is 5 to 40% by mass, and is 10 to 25% by mass. It is more preferable to prepare.

<2> Partition Wall The partition wall of the present invention is a partition wall formed by partitioning the substrate into a plurality of pixel forming sections by using the cured film of the photosensitive composition of the present invention. It can be applied to a black matrix of an organic EL element.

Hereinafter, as an example of a method for producing the partition wall of the present invention, a method for producing the partition wall by a photolithography process using the photosensitive composition of the present invention will be described.

(Coating process)
First, a diluted solution of the photosensitive composition of the present invention is applied to a substrate. The substrate is not particularly limited, and various glass plates; SiC substrate, inorganic substrate such as silicon; inorganic oxide substrate such as ITO; polyester (polyethylene terephthalate, etc.), polyolefin (polyethylene, polypropylene, etc.), polycarbonate, polymethyl methacrylate And thermoplastic resin sheets such as polysulfone, polyimide, and poly (meth) acrylic resin; and cured sheets of thermosetting resin such as epoxy resin and unsaturated polyester. Considering heat resistance, the substrate is preferably a heat resistant resin such as a glass plate and polyimide. Moreover, since the exposure from the surface where the partition wall of the substrate is not formed is possible, the substrate is preferably transparent. Furthermore, the substrate is a substrate in which an inorganic film such as an organic film or TFT (Thin Film Transistor), ITO, SiO ₂ is formed on a transparent substrate such as a glass substrate, or a patterned substrate, silicon nitride Or a substrate on which an insulating film such as polyimide is formed, or a laminated substrate in which these substrates are laminated.

The coating method is not particularly limited, and examples thereof include spin coating, spraying, slit coating, roll coating, spin coating, and bar coating.

(Drying process)
Next, the coating film formed on the substrate is dried. Thereby, since a solvent volatilizes, the coating film of the photosensitive composition without stickiness is obtained. It does not specifically limit as a drying method, Vacuum drying and heat drying are mentioned. In order to efficiently dry the coating film without causing uneven appearance, it is preferable to use vacuum drying and heat drying in combination. The drying conditions vary depending on the type and composition of the components contained in the photosensitive composition, but the vacuum drying is preferably 10 to 500 Pa (absolute pressure) for 10 to 300 seconds, and the heat drying is 50 to 120. It is preferable that the temperature is 10 to 2000 seconds at ° C.

(Exposure process)
Next, the coating film is exposed through a mask having a predetermined pattern. The light irradiated at the time of exposure is not particularly limited, and visible light, ultraviolet light, far ultraviolet light, KrF excimer laser, ArF excimer laser, F ₂ excimer laser, Kr ₂ excimer laser, KrAr excimer laser, Ar ₂ excimer laser, etc. Excimer laser, X-ray, electron beam and the like can be mentioned. Light having a wavelength of 100 to 600 nm is preferable, light having a wavelength of 300 to 500 nm is more preferable, and i-line (365 nm), h-line (405 nm), and g-line (436 nm) are particularly preferable. In addition, a well-known super high pressure mercury lamp etc. can be used as a light source.

Exposure is usually 5 ~ 1000mJ / cm ² at i-line standard, preferably 10 ~ 400mJ / cm ^2, more preferably 20 ~ 200mJ / cm ^2, particularly preferably 50 ~ 100mJ / cm ^2. When the exposure amount is less than 5 mJ / cm ² , the coating film may be insufficiently cured and the developability may be deteriorated. When it exceeds 1000 mJ / cm ² , high resolution may not be obtained.

(Development process)
Next, using a developing solution, the unexposed part of the coating film is removed and developed. The developer is not particularly limited, and examples thereof include aqueous alkali solutions such as inorganic alkalis, amines, alkanolamines, and quaternary ammonium salts. The development time, that is, the time for contact with the developer is preferably 5 to 180 seconds. The developing method is not particularly limited, and examples thereof include a liquid filling method, a dipping method, and a shower method.

(Jet rinse process)
Furthermore, it is preferable to perform jet rinsing. Jet rinsing is a process in which water is compressed or water and air are compressed and sprayed onto a substrate on which a partition wall is formed. The pressure is preferably 2 to 20 MPa. By carrying out the jet rinsing, it is possible to remove the residue that remains undissolved in the development process and the part of the components of the photosensitive composition dissolved during the development that are reattached to the substrate.
Note that water on the substrate can be removed by air drying with compressed air or compressed nitrogen after jet rinsing.

(Post exposure process)
Next, post-exposure may be performed on the developed partition wall. At this time, the exposure may be performed from either the surface on which the partition is formed or the surface on which the partition is not formed, or may be performed from both surfaces. The light irradiated during exposure is preferably ultraviolet light.

As the light source, a known ultra-high pressure mercury lamp, high-pressure mercury lamp, or the like can be used. These light sources generally emit light having a wavelength of 600 nm or less that contributes to hardening of the partition walls, and emit less light having a wavelength of 200 nm or less that causes oxidative decomposition of the partition walls. Furthermore, it is preferable that the quartz tube glass used for the light source has a function of an optical filter that cuts light having a wavelength of 200 nm or less.

Exposure is usually at 50 mJ / cm ² or more, preferably 200 mJ / cm ² or more, more preferably 1000 mJ / cm ² or more, 2000 mJ / cm ² or more is particularly preferable.

In addition, a low-pressure mercury lamp may be used as the light source. However, since the low-pressure mercury lamp emits a lot of light having a wavelength of 200 nm or less, the exposure amount is preferably 500 mJ / cm ² or less, and 300 mJ / cm ² or less. Is more preferable.

(Post-baking process)
It is preferable to heat the partition after development (when post-exposure is performed, after post-exposure). The heating condition is preferably 150 to 250 ° C. for 5 to 90 minutes, and the heating temperature is more preferably 180 ° C. or higher. If the heating temperature is too low, chemical resistance may be insufficient, and when ink is applied to the partition walls, the partition walls may swell or the ink may ooze.
On the other hand, if the heating temperature is too high, the partition walls may be thermally decomposed.

As the heating device, a hot plate, an oven or the like can be used.

The partition wall of the present invention is formed by curing the photosensitive composition of the present invention through the photolithography process as described above. In the partition of this invention, the black matrix which exhibits black can be comprised by mix | blending a black coloring agent (E) with the photosensitive composition used for the preparation as needed. In this case, a black matrix will be formed by forming a partition using a photosensitive composition.

The partition wall of the present invention preferably has a width (average value) of 100 μm or less, more preferably 20 μm or less. The distance between adjacent partition walls, that is, the width (average value) of the openings is preferably 300 μm or less, more preferably 100 μm or less. Further, the height (average value) of the partition walls is preferably 0.05 to 50 μm, more preferably 0.2 to 10 μm.

In general, the liquid repellency (ink repellency) of the partition walls made of a cured film of the photosensitive composition includes water repellency and oil repellency, and water and PGMEA (propylene glycol monomethyl ether acetate: as a solvent for the ink, respectively) It can be evaluated by the contact angle of a commonly used organic solvent). The upper surface of the partition wall of the present invention preferably has a water contact angle of 90 ° to 150 °, more preferably 95 ° to 120 °. Further, the upper surface of the partition wall preferably has a PGMEA contact angle of 35 ° to 55 °, more preferably 40 ° to 50 °.

<3> Color filter The color filter of the present invention is a color filter having a plurality of pixels and a partition located between adjacent pixels on the substrate, and the partition is formed of the partition of the present invention. The pixel is formed by an inkjet method. In the color filter of the present invention, the partition walls are preferably a black matrix having an optical density of about 2 to 7.
As described above, the color filter of the present invention is manufactured by forming a partition, for example, a black matrix on a substrate, and then forming a pixel by applying ink to the opening of the partition using an inkjet method. can do.

The ink jet method is not particularly limited, but is a method in which charged ink is continuously ejected and controlled by a magnetic field, a method in which intermittent ink is ejected using a piezoelectric element, and ink is heated and intermittently utilizing its foaming. The method of injecting automatically is mentioned.

The arrangement of the pixels is not particularly limited, and examples thereof include known arrangements such as a stripe type, a mosaic type, a triangle type, and a four-pixel arrangement type.

The ink mainly contains a coloring component, a binder resin component, and a solvent, and may be either water-based ink or oil-based ink. As the coloring component, pigments and / or dyes excellent in heat resistance, light resistance and the like are preferable. As the binder resin component, a resin that is transparent and excellent in heat resistance is preferable, and examples thereof include an acrylic resin, a melamine resin, and a urethane resin. The water-based ink contains water as a solvent and, if necessary, a water-soluble organic solvent, and contains a water-soluble resin and / or a water-dispersible resin as a binder resin component. The oil-based ink contains an organic solvent as a solvent, and a resin soluble in the organic solvent as a binder resin component.

In addition, after applying an ink to a partition, for example, an opening of a black matrix, using an inkjet method, a pixel can be formed by performing drying, heat curing, ultraviolet curing, or the like as necessary.

Also, after forming pixels in the openings of the partition walls, a protective film can be formed as necessary. Thereby, the surface smoothness of the color filter can be improved, and the eluent from the partition walls and pixels can be blocked from reaching the liquid crystal layer adjacent to the protective film.

At this time, it is preferable to remove the liquid repellency of the upper surface of the partition wall before forming the protective film. Thereby, it can suppress that the upper surface of a partition repels the coating liquid for protective films. A method for removing the liquid repellency on the upper surface of the partition wall is not particularly limited, and examples thereof include plasma ashing treatment and optical ashing treatment.

Furthermore, in order to improve the quality of the liquid crystal panel manufactured using the color filter of the present invention, a photo spacer may be formed on a partition wall, for example, a black matrix, if necessary.

<4> Organic EL Element The organic EL element of the present invention is an organic EL element having a plurality of pixels and a partition located between adjacent pixels on a substrate, and the partition is formed of the partition of the present invention. The pixel is formed by an inkjet method.
The organic EL device of the present invention can be produced as follows. First, using a sputtering method or the like, a transparent electrode such as ITO is formed on a transparent substrate such as a glass substrate, and the transparent electrode is etched into a desired pattern as necessary. Next, in the same manner as in the case of the color filter, a partition, for example, a black matrix is formed on the substrate, and then a hole transport material is used as an ink in the opening of the partition (black matrix) using an ink jet method. The solution of the above and the solution of the light emitting material are sequentially applied and dried to form a hole transport layer and a light emitting layer. Furthermore, an organic EL element is obtained by forming an electrode, such as aluminum, using a vapor deposition method or the like to form a pixel.

Hereinafter, the present invention will be described based on examples, but the present invention is not limited thereto. In addition, a part means a mass part.
The abbreviations of the compounds used in the following examples are shown below.

[1] Compound (monomer) used for production of polymer (A) and polymer (R)
_{_{C6FMA: CH 2 = C (CH}} 3) COOCH 2 CH 2 (CF 2) 6 F
X-24-8201: Dimethyl silicone chain-containing methacrylate X-24-8201 (manufactured by Shin-Etsu Chemical Co., Ltd.) (in the general formula (4), R ⁸ is a methyl group, Z is a trimethylene group, R ¹ , R ² , R ³ Are compounds in which each is a methyl group and n is 24 as an average value between molecules)
MAA: methacrylic acid 2-HEMA: 2-hydroxyethyl methacrylate PME400: BLEMMER PME-400 (manufactured by NOF Corporation, CH ₂ ═C (CH ₃ ) COO (CH ₂ CH ₂ O) _k CH ₃ : k in the formula is (The average value between molecules is shown, and the value of k is about 9.)
PME1000: Blemmer PME-1000 (manufactured by NOF Corporation, CH ₂ ═C (CH ₃ ) COO (CH ₂ CH ₂ O) _k CH ₃ : k in the formula represents an average value between molecules, and the value of k is about 23.)
GMA: Glycidyl methacrylate MMA: Methyl methacrylate

(Polymerization initiator)
V-65: V-65 (Wako Pure Chemical Industries, 2,2'-azobis (2,4-dimethylvaleronitrile))
(Chain transfer agent)
n-DM: n-dodecyl mercaptan (solvent)
MEK: 2-butanone

[2] Photosensitive composition component (photocuring initiator (B): photopolymerization initiator (B1))
OXE02: OXE02 (manufactured by Ciba Specialty Chemicals, Etanone 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazoyl-3-yl] -1- (O-acetyloxime) (general formula (5) Wherein R ²¹ and R ²² are methyl groups, R ²³ is an ethyl group, R ²⁴ , R ²⁶ and R ²⁷ are hydrogen atoms, and R ²⁵ is a 2-methylbenzoyl group)
(Binder resin (C): photosensitive resin (C1))
EX1010: EX-1010 (manufactured by Nagase ChemteX Corporation, a resin solution in which an ethylenic double bond and an acidic group are introduced into the epoxy resin represented by the general formula (7), solid content: 70% by mass, mass average molecular weight: 3,020)
ZCR1569H: ZCR-1569H (manufactured by Nippon Kayaku Co., Ltd., a solution of a resin in which an ethylenic double bond and an acidic group are introduced into an epoxy resin having a biphenyl skeleton represented by the general formula (6); solid content: 70% by mass; (Mass average molecular weight: 4,710)

(Crosslinking agent (D))
DPHA: KAYARAD DPHA (Nippon Kayaku Co., Ltd., mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate)
A9300: NK ester A-9300 (manufactured by Shin-Nakamura Chemical Co., Ltd., ethoxylated isocyanuric acid triacrylate)
(solvent)
PGMEA: Propylene glycol monomethyl ether acetate (black colorant (E), fine particles)
CB: carbon black dispersion (average secondary particle size 120 nm, dispersion medium: PGMEA, carbon black 20% by mass, polyurethane polymer dispersant 5% by mass with amine value of 18 mgKOH / g)
Silica: Silica dispersion (average particle size 20 nm, dispersion medium PGMEA, solid content 30% by mass)

[Synthesis Example 1 of Polymer (A)]
To an autoclave with an internal volume of 1 L equipped with a stirrer, MEK (420.0 g), C6FMA (90.0 g), MAA (9.0 g), PME1000 (81.0 g), and polymerization initiator V-65 (0. 5 g) was charged and polymerized at 50 ° C. for 24 hours with stirring under a nitrogen atmosphere to synthesize a crude copolymer. Hexane was added to the obtained crude copolymer solution for purification by reprecipitation, followed by vacuum drying to obtain polymer (A-1) (162.4 g) corresponding to polymer (A).
The polymer (A-1) had a number average molecular weight of 37,800 and a weight average molecular weight of 58,730.

[Synthesis Examples 2 to 4 of Polymer (A)]
In the synthesis of the polymer (A-1), polymers (A-2) to (A-4) corresponding to the polymer (A) were obtained by the same reaction except that the composition of the raw materials was changed as shown in Table 1. )

[Comparative Synthesis Examples 1 and 2]: Synthesis of Comparative Example Polymer (R) Not Suitable for Polymer (A) Produced the polymers (R-1) and (R-2) which were not compatible with the polymer (A) in the present invention by the same reaction.

For each polymer (A) and comparative polymer (R) obtained above, the number average molecular weight (Mn), mass average molecular weight (Mw), Mw / Mn, fluorine atom (F) measured by the following methods: Table 1, together with the polymer yield, shows the content of polyoxyalkylene groups, the content of polyoxyalkylene groups, the content of silicon atoms (Si), the acid value, and the developer solubility.

<Molecular weight>
The number average molecular weight (Mn) and the mass average molecular weight (Mw) were measured by gel permeation chromatography using polystyrene as a standard substance. As the gel permeation chromatography, HPLC-8220GPC (manufactured by Tosoh Corporation) was used. As the column, a column in which three shodex LF-604 were connected was used. An RI detector was used as the detector. As a standard substance, EasiCal PS1 (manufactured by Polymer Laboratories) was used. Further, when measuring the number average molecular weight and the mass average molecular weight, the column is maintained at 37 ° C., tetrahydrofuran is used as the eluent, the flow rate is 0.2 mL / min, and the 0.5 mass% tetrahydrofuran solution of the measurement sample is measured. 40 μL was injected.

<Fluorine atom content>
The fluorine atom content in the polymer was calculated from the charged value of the polymerization reaction.
<Content of polyoxyalkylene group>
The content ratio of the polyoxyalkylene group in the polymer was calculated from the charged value of the polymerization reaction.
<Silicon atom content>
The content of silicon atoms in the polymer was calculated from the charged value of the polymerization reaction.

<Acid value>
The acid value is a theoretical value calculated from the blending ratio of monomers as raw materials.

<Developer solubility>
Each polymer obtained above was added to a 0.1% aqueous NaCO ₃ solution (pH 11, temperature 23 ° C.), and the stirring condition: the ratio (mass%) of the polymer dissolved at 50 rpm was determined. It was used as an index of solubility in an alkaline aqueous solution.

[Example 1]
Polymer (A-1) (0.03 part) obtained in the above synthesis example, CB (31.6 parts) as a dispersion of black colorant (E), OXE02 as photopolymerization initiator (B1) (0.76 parts), EX1010 (6.3 parts) as a dispersion of the photosensitive resin (C1), DPHA (1.9 parts) as a crosslinking agent (D), and PGMEA (34.4 parts) as a solvent ) And cyclohexanone (25.0 parts) were mixed to obtain a diluted solution of the photosensitive composition. The content of the polymer (A-1) in the total solid content of the diluted liquid of the photosensitive composition was 0.20% by mass.

Using a spinner, a diluted solution of the photosensitive composition is applied on a glass substrate, and then dried on a hot plate at 100 ° C. for 2 minutes to form a coating film of the photosensitive composition having a thickness of 2.0 μm. did. Next, using a super high pressure mercury lamp, the coating film was irradiated with light having an exposure amount of 100 mJ / cm ^{2 on} the basis of i-line (365 nm) through a mask to be exposed. The mask has a lattice pattern with a light shielding portion of 150 μm × 400 μm and a light transmitting portion of 20 μm, and the volume of the opening formed is 120 pL. The area of the pattern was 10 cm ^2. Next, development was performed using a developing machine. The developer used was a 10-fold diluted aqueous solution of semi-clean DL-A4 (trade name, manufactured by Yokohama Yushi Kogyo Co., Ltd.). A nozzle whose irradiation angle to the substrate was narrowed to 8 degrees or less was used as a nozzle, and a developing solution was discharged onto the substrate under a pressure of 0.15 MPa to generate bubbles and spin development was performed. Thereafter, the unexposed portion was washed away with water and dried. Next, the glass substrate sample (1) of Example 1 in which the partition walls were formed was obtained by heating (post-baking) the glass plate in an oven at 220 ° C. for 30 minutes.

A glass substrate sample (2) of Example 1 on which a cured product of the coating film of the photosensitive composition was formed in the same manner as above except that the exposure was performed without using a mask. Furthermore, the glass substrate sample (3) of Example 1 which performed jet rinsing with 4.0 MPa high pressure jet water for 10 seconds was obtained.

[Examples 2 to 5]
Photosensitivity containing each of the polymers (A-2) to (A-5) obtained in the above synthesis examples in the same manner as in Example 1 except that the composition of each component was changed as shown in Table 2. Glass substrate samples (1) of Examples 2 to 5 in which partition walls made of a cured film of the composition were formed, and Examples 2 to 5 of which a cured product of the coating film of the photosensitive composition was formed The glass substrate sample (2) and the glass substrate sample (3) which performed jet rinse further were obtained.

[Comparative Examples 1 and 2]
Photosensitive materials each containing the polymers (R-1) and (R-2) obtained in the above comparative synthesis examples in the same manner as in Example 1 except that the composition of each component was changed as shown in Table 2. Glass substrate sample (1) of Comparative Examples 1 and 2 in which a partition wall made of a cured film of the photosensitive composition was formed, and Comparative Examples 1 and 2 in which a cured product of the coating film of the photosensitive composition was formed A glass substrate sample (2) and a glass substrate sample (3) subjected to jet rinsing were obtained.

[Evaluation method and evaluation results]
With the method described below, the liquid repellency was evaluated using the glass substrate sample (2) and the glass substrate sample (3) prepared in each of the above Examples and Comparative Examples. In addition, using the glass substrate samples (1) prepared in each of the above Examples and Comparative Examples, the ink wettability and the state of residual film generation in the opening between the partition walls were evaluated. An evaluation result is shown in Table 3 with the content mass% of each component in the total solid component of the photosensitive composition.
In the table, ◎ indicates the best, ○ indicates good, Δ indicates acceptable, and × indicates impossibility. In the present invention, all evaluations are good or good.

<Liquid repellency>
The liquid repellency was evaluated by measuring the contact angle of PGMEA on the surface of the cured film of the glass substrate sample (2). Moreover, the liquid repellency tolerance by jet rinse was evaluated by measuring the contact angle of PGMEA of the surface of the coating-film hardened | cured material of a glass substrate sample (3).
The contact angle is an angle formed by a solid surface and a tangent to the liquid surface at a point where the solid and the liquid come into contact, and is defined as an angle on the side including the liquid. For this reason, the larger the contact angle, the better the liquid repellency of the cured film. The case where the contact angle of PGMEA was 40 ° or more and 50 ° or less was evaluated as ◯, the case where it was 35 ° or more and less than 40 ° was evaluated as Δ, and the case where it was less than 35 ° was evaluated as ×.

<State of residual film generation>
In the glass substrate sample (1), the number of development defects was visually measured to evaluate the state of residual film generation. The number of development defects per area was determined to be less than 100, ◯ for 100 to less than 200, and x for 200 or more.

<Wetting and spreading of ink in the opening between the partition walls>
Liquid epoxy ME-562 (Nihon Pernox) (6.25 g), curing agent HV-562 (Nihon Pernox) (6.25 g), diethyl adipate (12.5 g) and diethyl malonate (25.0 g) ) Was stirred and mixed using a stirrer for 1 hour to prepare an ink.
Using the ink jet method, about 10 pL or about 20 pL of the ink prepared above is applied to the opening between the partition walls of the glass substrate sample (1), and photographed using an ultra-deep shape measuring microscope VK-8500 (manufactured by Keyence Corporation). By observing the photograph, wetting and spreading properties of the ink in the opening between the partition walls were evaluated.

In the above-obtained photograph, for the 10 openings between the partitions, the part where the ink was repelled was 0, ◎ 1-2, ○, 3-5 An object was judged as Δ, and an object that was 5-10 places was judged as ×.

As can be seen from Table 3, even when jet rinsing is performed, the mass average molecular weight (Mw (A)) is in the range of 2.6 × 10 ⁴ <Mw (A) ≦ 20 × 10 ⁴ , and polyoxyalkylene Polymers (A-1) to (A-5) corresponding to the group-containing polymer (A) (the content of polyoxyalkylene groups in the polymer is preferably 5 to 60% by mass in the present invention) In the glass substrate samples (3) of Examples 1 to 5 having the partition walls obtained by using the photosensitive composition of the present invention containing each of the above, the liquid repellency was good. This is because the polymer (A) was not peeled off from the surface layer even when the barrier ribs obtained using the photosensitive compositions of Examples 1 to 5 were subjected to high-pressure water washing called jet rinsing. Is maintained.

Glass substrate samples of Examples 1 to 5 having partition walls obtained using the photosensitive composition of the present invention each containing polymers (A-1) to (A-5) corresponding to the polymer (A) In (1), the generation of a residual film was small. This indicates that a sufficient amount of polyoxyalkylene groups were present on the surfaces of the partition walls obtained using the photosensitive compositions of Examples 1 to 5, and thus the occurrence of residual film was suppressed. Is.

The polymer (A-1) corresponding to the polymer (A) even when about 20 pL of ink is applied to the opening between the partitions having a volume of 120 pL, that is, even when the amount of ink applied is small relative to the volume of the opening In the glass substrate samples (1) of Examples 1 to 5 having partition walls obtained by using the photosensitive composition of the present invention each containing ~ (A-5), the ink wets into the openings between the partition walls. It expanded and there were no white spots. This indicates that in the coating films obtained from the photosensitive compositions of Examples 1 to 5, the developability was good and the polymer (A) component did not move from the partition wall surface to the opening between the partition walls. Is.
Further, even when a smaller amount of about 10 pL of ink was applied, the weight average molecular weight of the polymer (A) was 40,000 or more. In Examples 1 to 4, the ink wets and spreads in the opening between the partition walls, and there is no white spot. It was.

On the other hand, a polymer (R-1) having a mass-average molecular weight Mw (A) outside the range of the polymer (A) according to the present invention, specifically a mass-average molecular weight Mw of less than 2.6 × 10 ⁴ is obtained. In the glass substrate sample (3) of Comparative Example 1 having partition walls obtained using the photosensitive composition contained, the liquid repellency after jet rinsing was remarkably lowered. Further, when about 20 pL of ink was applied to the opening between the partitions having a volume of 120 pL, that is, when the amount of ink applied was small relative to the volume of the opening, there was a portion where the ink did not spread out in the opening. This indicates that the polymer (R-1) migrated into the opening during post-baking, and the lyophilicity of the opening decreased.
In the glass substrate sample (1) of Comparative Example 2 having a partition wall obtained using the photosensitive composition containing the polymer (R-2) having no polyoxyalkylene group, a large number of residual films were generated. It was.

The photosensitive composition of the present invention is an ink repellent component that does not have an ethylenic double bond, but has good ink repellency at the upper part of the partition wall, resistance to developer not corroded by the developer, residual film remaining without development It is a photosensitive composition containing an ink repellent component capable of imparting the property of suppressing the generation of ink and the good wetting and spreading property of the ink to the opening between the partition walls to the obtained partition wall.
Such a photosensitive composition of the present invention is suitably used for forming barrier ribs, for example, for manufacturing color filters using an inkjet recording technique and for manufacturing organic EL display elements. Furthermore, it is suitably used as a material for forming a permanent film such as a partition for partitioning each TFT of an organic TFT (Thin Film Transistor) array, a partition for an ITO electrode of a liquid crystal display element, a partition for a circuit wiring board.
The entire contents of the specification, claims and abstract of Japanese Patent Application No. 2009-298961 filed on Dec. 28, 2009 are incorporated herein as the disclosure of the specification of the present invention. It is.

Claims

A polymer (A) having a side chain having a group represented by the following general formula (1) and a side chain having a polyoxyalkylene group and having no ethylenic double bond, and photocuring A photosensitive composition comprising an initiator (B) and a binder resin (C),
-CFXR f (1)
(In the formula, X represents a hydrogen atom, a fluorine atom or a trifluoromethyl group, and R f represents a fluoroalkyl group or fluorine atom having 1 to 20 carbon atoms which may have an etheric oxygen atom. To express.)
The polymer (A) has a mass average molecular weight (Mw (A)) of 2.6 × 10 4 <Mw (A) ≦ 20 × 10 4 .
2. The photosensitive composition according to claim 1, wherein the content ratio of the polyoxyalkylene group in the polymer (A) is 5 to 60% by mass.
The photosensitive composition according to claim 1 or 2, wherein the polymer (A) has an acidic group.
The photosensitive composition according to any one of claims 1 to 3, wherein a fluorine atom content ratio in the polymer (A) is 20 to 50 mass%.
The photosensitive composition according to any one of claims 1 to 4, wherein the ratio of the polymer (A) in the total solid content of the photosensitive composition is 0.07 to 1% by mass.
The photosensitive composition according to any one of claims 1 to 5, wherein the polymer (A) further comprises one or more selected from the group consisting of an epoxy group, a mercapto group, and a hydroxyl group.
The photosensitive composition according to any one of claims 1 to 6, wherein the polymer (A) further has a side chain having a group represented by the following general formula (2).

(Wherein R 1 and R 2 are each independently a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group which may be substituted with a fluorine atom; R 3 is a hydrogen atom or a carbon number; Represents an organic group of 1 to 10 and n represents an integer of 1 to 200.)
A side chain having a group represented by the following general formula (2) and a side chain having a polyoxyalkylene group, and having a group represented by the general formula (1) and an ethylenic double bond A polymer (A) ′ having no side chain having a mass average molecular weight (Mw (A) ′) of 2.6 × 10 4 <Mw (A) ′ ≦ 20 × 10 4 The photosensitive composition according to any one of claims 1 to 7, further comprising a polymer (A) '.

(Wherein R 1 and R 2 are each independently a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group which may be substituted with a fluorine atom; R 3 is a hydrogen atom or a carbon number; Represents an organic group of 1 to 10 and n represents an integer of 1 to 200.)
9. The photo-initiator (B) is a photo-polymerization initiator, and the binder resin (C) is a photosensitive resin having an acidic group and an ethylenic double bond. The photosensitive composition as described.
Furthermore, the photosensitive composition of Claim 9 containing the crosslinking agent (D) which has 2 or more of ethylenic double bonds.
The photosensitive composition according to any one of claims 1 to 10, further comprising a black colorant (E).
A partition formed in the form of partitioning a substrate into a plurality of sections for pixel formation, wherein the partition is made of a cured coating film of the photosensitive composition according to any one of claims 1 to 11. Partition wall.
A color filter having a plurality of pixels and a partition located between adjacent pixels on a substrate, wherein the partition is formed by the partition according to claim 12, and the pixel is formed by an inkjet method The color filter characterized by being.
An organic EL element having a plurality of pixels and a partition located between adjacent pixels on a substrate, wherein the partition is formed by the partition according to claim 12, and the pixel is formed by an inkjet method. An organic EL element characterized by being a thing.