201030343 六、發明說明： 【發明所屬之技術領域】 本發明為一種測試設備的技術領域，尤其一種能將 行X轴、Y轴及Z轴等三度空間翻轉的測試設備，而且一=处 行複數個晶片的測試作業。 久此進 【先前技術】 隨著科技的進步，各式各樣的晶片開發也不斷推 伴隨著各種不同型式的產品也相繼問市。 出新因此 其中有些晶片_試1作也不同於傳統方式， 間的測試。例如，要將制晶片進行三度空間的 不同位置之下對晶片進行相對的測試。另外在： 依晶片接腳的不同’會有相對數目的連接^仃^時味 位置及右侧視角位置等六種不同的位置 目也多’如果此^在職過程中，行接綠的數 動作業，測試效率不佳。為此太的早機器及非全自 以解決此類縣晶片的^作業。 卩心—種創新的設備， 【發明内容】 晶㈣轴多轉二昇進行複數個 3 201030343 備就月b進仃多轴多轉向的翻轉測試’使測試操作上更為容易 ，達上述之目的，本發明主要包括 ΐΐϊ動測Γί盤模組、以及夾_模組，向ί 3 ί以模;;=;框架内，該第二轉“ 办;第，、第一轉向模組兩者的轉動方向相互垂直。1 健組，顧輸 ，將上 【實施方式】 “如第一圖所示，為本發明之立體圖。本發明 第—轉向模組卜第二轉向模組2、測試201030343 VI. Description of the Invention: [Technical Field] The present invention is a technical field of test equipment, and in particular, a test apparatus capable of inverting a three-dimensional space such as an X-axis, a Y-axis, and a Z-axis, and one at a row Testing of multiple wafers. Long time to enter [previous technology] With the advancement of technology, a variety of wafer development has also been pushed along with a variety of different types of products have also been asked. Some new ones, some of which are different from the traditional ones, are also tested. For example, the wafer is subjected to relative testing of the wafer under different positions in the three-dimensional space. In addition: depending on the difference in the chip pins, there will be a relative number of connections ^ 仃 ^ odor position and right view position and other six different positions are also more than the number of positions in the ^ in the course of the job, the green number of actions Industry, testing efficiency is not good. For this reason, the early machine and the non-all self-solving work of such a county wafer.卩心—a kind of innovative equipment, 【Summary of the Invention】 Crystal (four) axis multi-turn two liters to carry a plurality of 3 201030343 ready for the month b into the multi-axis multi-turning flip test 'to make the test operation easier, to achieve the above purpose The present invention mainly includes a Γ Γ Γ 盘 disk module, and a _ module, to ί 3 ί 模;; =; within the frame, the second turn "do; first, the first steering module The directions of rotation are perpendicular to each other. 1 健组,顾输,上上 [Embodiment] "As shown in the first figure, it is a perspective view of the present invention. The first steering module of the invention, the second steering module 2, the test
St%:⑽糊組4^=以= ❿ ΐΐϋ厂轉向模組2負責帶動該夾持單元模組4旋轉二 3第一轉向模組1則能帶動該第二轉向模組2與該夾持單:模： 作另-方向的旋轉，該第一及第二轉向模組1、2兩=== Ιίίίί狀。稭此讓複數晶片就能被三度空間的翻轉’以進行 0 各ϊϋ作—詳細的描述。該其中第—轉向模組1主要 G im(z-Y平面方向)各_度範圍内的旋 轉運動。該第-轉向模組1包括有一框架u、一組機架12、一第 2力裝置13、以及一第一傳動裝置14。該框架n為似正方型 與第-傳祕置Μ職置於該機架12的^|第該 4 201030343 置14内部具有齒輪組等其他連動 13與樞架11之樞接處相互連結。哕 ' 刀別與該第一動力裝置 並能經第-傳動裝置14帶動“Λ 1广裝置13為一馬達’ 動。 朱11可作順時針或逆時針的轉 該第二轉向模組2主要負責帶 (Ζ-Χ平面方向）各90度的旋轉持^模組4作左、右 41與-承載座42，該承載座相=#早1且4包括-壓合蓋 内壁。該第二轉向模組2是固定於^ 疋樞f於該框架U的 力裝置21與第二傳動裝置22。第丄傳^1的夕卜，，包括第二動 等其他構件，並分麟鄕二動力 ,具有齒輪組 ❹結構相連接。該第二動力裝置21為L焉.素^丨^座42之樞接處 二“轉方向相互$直 〇 2 如第一圖所示，為該測試載盤模組3之 。 H於承盤32之上。該承座31中央區域具有—凹g 該凹槽座311是供晶片放置之用。該承座31内部 Φ 延伸至凹槽座3U内，以進行相關的電性連接。該電路板33能被 結合於該承盤32底部’其上具有複連接器331，該mg 複，承座31之相關的電路能與電路板33相電性連接。本發明之 測試載，模組3具有一特殊之處，主要是利用電路板33内部之相 關電路設計，使得複數承座31在測試過程的訊號輸出或外部電源 的輸入，僅藉由承盤32底部之金屬接觸片321即可作傳輸，該金 屬接觸片321在組裝時是與電路板33相電性連接。為了測試載盤 ，組3移載的方便性，另設有一通訊介面連接器34’第一圖所示， 該通訊介面連接器34是置於承載座42處。該通訊介面連接器34 具有數彈性探針341，使用時測試主機之連接線僅需一條與該通訊 介面連接器34相連接。當該通訊介面連接器34以該彈性探針341 5 201030343 丨接概’是糊通赠輸模錢行訊號傳遞， t 。因此本發縣細^的測試 2在進行多軸旋轉時，就不會有連接線易纏繞在；= 般描本發明夹持單元模組之立體圖。圖中該測試載 她組3已被夾_定其中。該夾持單元模組4主要包括 = 座42。嫩蓋41與承载座42主要用以將； 3夾持固^於兩者的中間位置。如第四圖所示該壓 否蓋41底面另外具有複數個彈性頂掣件411，該彈性頂 =佈位置是聰於該職雌模組3之複數 』 裝時該彈性頂掣件411是伸入於該承座31之凹槽座部且 晶片的頂部。如第三圖’為了確保該壓合蓋41與承载座42 mfi分離，該夾持單元模組4另外具有數組扣合組件 4丄3亥扣&、.且件44位於壓合蓋41與承載座42相對的兩邊。由於 件44可由許多不同的實施方式達成，本發明僅就其中-種 Γ該扣合組件44包括一氣壓缸441及一卡合件扣，該Ϊ =4U設置於穌載座42的側邊，該卡合件442則設置於= ❹ a盍41的側邊。該卡合件442具有一突輪4421。如第五a、^ =’當該氣壓缸441在作動時會伸出一突桿則， =4=會突出該突輪4421之上，如此就會使壓合蓋4i ▲、兩/者無法開啟。反之如果要開啟時，該該氣壓缸Ml之突桿Ad 就必須縮回。 立體如巴第=七圖中:斤示^本發日月不同狀態的實際旋轉情形的 體圖。在各圖中麵彳了測摘複數晶片被安置該測 内’該測試載盤模組皆被該夾持單祕組4固錄内部。如^ ^所不，利用該第-轉向模組i可使得該框架…乍ζ_γ平^ 如準’作順時針及逆時針各180度的旋轉: 第七圖所不’利用該第—轉向模組2則可使炎持單元模組4作 6 201030343 z-x平面方向的轉向，即以 90度的旋轉。如第八圖 線作順時針及逆時針各 測試 2依序作動，則能進行χ_γ平面；^轉向模組1與第二轉向模組 . Y十面的知轉。如此即能進行三度空間的 已，ί為=====明大2ίΓ之較佳實施例而 依本發明之精神二凡熟悉該項技藝之人士其所 請專利範_。 1机飾’皆應涵蓋在以下本案之申St%: (10) paste group 4^=== ΐΐϋ 转向 factory steering module 2 is responsible for driving the clamping unit module 4 to rotate 2 3 the first steering module 1 can drive the second steering module 2 and the clamping Single: Mode: For the other-direction rotation, the first and second steering modules 1, 2 are === Ιίίίί. This allows the multiple wafers to be flipped by a three-dimensional space to make a detailed description. The first steering module 1 has a rotational motion in the range of _ degrees in the main G im (z-Y plane direction). The first steering module 1 includes a frame u, a set of frames 12, a second force device 13, and a first transmission 14. The frame n is a square-like type and is placed on the frame 12 by the first-in-the-middle secret. The first 4 201030343 has 14 internal links with gears and the like and other pivotal joints with the pivot frame 11.哕' The knife and the first power unit can be driven by the first transmission device to drive the "1" wide device 13 as a motor. The Zhu 11 can be rotated clockwise or counterclockwise to the second steering module 2 The rotation holding module 4 for each 90 degree (Ζ-Χ plane direction) is used as the left and right 41 and the carrier 42, and the carrier phase = #早1 and 4 includes - the inner wall of the pressing cover. The steering module 2 is a force device 21 and a second transmission device 22 fixed to the frame U. The second transmission device includes a second movement and other components, and is divided into two powers. The second power unit 21 is connected with the gear unit 。 structure. The second power unit 21 is a pivotal joint of the L 焉 素 ^ ^ ^ ^ ^ 42 "two directions of mutual rotation $ as shown in the first figure, is the test carrier Module 3. H is above the deck 32. The central portion of the socket 31 has a recess g. The recess 311 is for wafer placement. The inner portion Φ of the socket 31 extends into the recessed seat 3U for relevant electrical connection. The circuit board 33 can be coupled to the bottom of the retainer 32 and has a multi-connector 331 on which the associated circuitry of the receptacle 31 can be electrically coupled to the circuit board 33. In the test carrier of the present invention, the module 3 has a special feature, mainly utilizing the relevant circuit design inside the circuit board 33, so that the signal output of the plurality of sockets 31 during the test process or the input of the external power source is only by the retainer 32. The bottom metal contact piece 321 can be transported, and the metal contact piece 321 is electrically connected to the circuit board 33 when assembled. In order to test the carrier, the convenience of group 3 transfer is additionally provided with a communication interface connector 34' shown in the first figure, the communication interface connector 34 being placed at the carrier 42. The communication interface connector 34 has a plurality of elastic probes 341, and only one of the connection lines for testing the host is connected to the communication interface connector 34 in use. When the communication interface connector 34 is connected to the elastic probe 341 5 201030343, the message is transmitted by the money transmission signal t, t. Therefore, in the test of the county's fineness 2, when the multi-axis rotation is performed, there is no connection line to be easily entangled; = a perspective view of the clamping unit module of the present invention is generally described. The test in the figure shows that her group 3 has been clipped. The clamping unit module 4 mainly includes a seat 42. The tender cover 41 and the carrier 42 are mainly used for clamping and fixing the intermediate position between the two. As shown in the fourth figure, the bottom surface of the pressure-receiving cover 41 additionally has a plurality of elastic top members 411. The elastic top=cloth position is the plural of the female module 3, and the elastic top member 411 is extended. It enters the recess of the socket 31 and the top of the wafer. As shown in the third figure, in order to ensure that the press-fit cover 41 is separated from the carrier 42 mfi, the clamping unit module 4 additionally has an array of snap-fit assemblies 4丄3, and the member 44 is located at the press-fit cover 41. The opposite sides of the carrier 42 are opposite. Since the member 44 can be implemented in a number of different embodiments, the present invention includes only one pneumatic cylinder 441 and one engaging member buckle, and the Ϊ = 4U is disposed on the side of the carrier 42. The engaging member 442 is disposed on the side of the = ❹ a盍41. The engaging member 442 has a projecting wheel 4421. For example, the fifth a, ^ = 'When the pneumatic cylinder 441 is extended, a protruding rod is extended, and =4 = will protrude above the protruding wheel 4421, so that the pressing cover 4i ▲, two / can not Open. On the other hand, if it is to be opened, the protrusion Ad of the pneumatic cylinder M1 must be retracted. Stereo 巴巴第=七图: The body diagram of the actual rotation of the different states of the sun and the moon. In each of the figures, the measurement of the plurality of wafers is placed in the test. The test carrier modules are all affixed to the inside by the holding unit 4. For example, if the first steering module i is used, the frame can be rotated by 180 degrees in a clockwise and counterclockwise manner. Group 2 can make the inflammatory holding unit module 4 turn in the direction of the plane of 2010 2010, z3, that is, at 90 degrees. If the eighth line is clockwise and counterclockwise, the test 2 can be performed in sequence, then the χ γ plane can be performed; ^ the steering module 1 and the second steering module. Thus, it is possible to carry out the three-dimensional space, and the preferred embodiment of the invention is in accordance with the spirit of the present invention. 1 machine ‘ should cover the following case
【圖式簡單說明】 第一圖為本發明之立體分解圖； 第亡圖為本發明之測試載盤模組的分解圖； ，二圖為本發明之夾持單元模組之局部分解圖； 明之紐單元模組之壓合蓋底部結構的立體圖 ^五Α圖為本發明之扣合組件之氣壓缸的立體圖； 第五B圖為本發明之扣合組件之氣壓缸的作動圖； 第六圖為本發明實際作動時之立體圖(一）； ’ 第七圖為本發明實際作動時之立體圖(二）； 第八圖為本發明實際作動時之立體圖(三）。 ❹ 【主要元件符號說明】 100 多軸多轉向測試設備 1 第一轉向模組 11 框架 12 機架 13 第一動力裝置 14 第一傳動裝置 2 第二轉向模組 21 第二動力裝置 22 第二傳動裝置 3 測試載盤模組 7 201030343BRIEF DESCRIPTION OF THE DRAWINGS The first figure is an exploded perspective view of the present invention; the first dead view is an exploded view of the test carrier module of the present invention; and the second figure is a partially exploded view of the clamping unit module of the present invention; The perspective view of the bottom structure of the press-fit cover of the unit module of the Ming Dynasty is a perspective view of the pneumatic cylinder of the fastening assembly of the present invention; FIG. 5B is an operation diagram of the pneumatic cylinder of the fastening assembly of the present invention; The figure is a perspective view of the actual operation of the invention (1); 'The seventh figure is a perspective view of the actual operation of the invention (2); The eighth figure is a perspective view (3) of the actual operation of the invention. ❹ [Main component symbol description] 100 multi-axis multi-steering test equipment 1 first steering module 11 frame 12 frame 13 first power unit 14 first transmission unit 2 second steering module 21 second power unit 22 second transmission Device 3 test carrier module 7 201030343
31 承座 311 凹槽座 32 承盤 32 金屬接觸片 33 電路板 331 連接器 34 通訊介面連接器 341 彈性探針 4 夾持單元模組 41 壓合蓋 411 彈性頂掣件 42 承載座 44 扣合組件 441 氣壓缸 4411 突桿 442 卡合件 4421 突輪31 Seat 311 Groove seat 32 Dish 32 Metal contact piece 33 Circuit board 331 Connector 34 Communication interface connector 341 Elastic probe 4 Clamping unit module 41 Pressing cover 411 Elastic top element 42 Carrier seat 44 Fastening Component 441 pneumatic cylinder 4411 protruding rod 442 engaging member 4421
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