201130618 四、指定代表圖： (一) 本案指定代表圖為：第（—）圖。 (二) 本代表圖之元件符號簡單說明：。 11 12 13 14 21 22 41 42 100、懸臂式多軸多轉向測試設備示意圖201130618 IV. Designated representative map: (1) The representative representative of the case is: (-). (2) A brief description of the symbol of the representative figure: 11 12 13 14 21 22 41 42 100, cantilever multi-axis multi-turn test equipment
11、第一轉向模組框架機構示意圖 f一轉向模組機架機構示意圖 ，-轉向模組動力裝置機構示意圖 f:轉向模組傳動裝置機構示意圖 f二轉向模組動力裝置機構示意圖 第二轉向模組傳動裝置機構示意圖 加熱壓合蓋機構示意圖 承載座機構示意圖 本案若有化子式日守，睛揭示最能顯示發明特徵的化學式·· 六、發明說明： 【發明所屬之技術領域】 行及狀—概.測晶片進 行複數個晶片的測二 轉的測試設備，而且-次能進 【先前技術】 伴隨，因此 視=#=轉仰： 201130618 试時，依晶片接聊的不同，會有相银叙α ^ ± 為訊號傳輸的介質。當同時測試晶出來，作 的翻轉，就容易造成連接線交錯混雜$再2多轴向多角度 類晶月的測試作業時，都是由單一月因此’目前進行此 全自動作業，測試效率不佳。為此^晶】的單機器及非 備，以解決此類特殊晶片的測發明人即思考一種創新的設 【發明内容】 複數t气:式多軸多轉向的測試設備，能-次同時進行 幅提昇"乡轴多轉向的翻轉加熱測試作業，使得測試效率大 ΪΪΪ:5當複數晶片被放置於；=組ί，配合相關的 操作 向模i達：且本發明主要包括有第-轉向模組、第二轉 m Ϊ盤模組、以及失持單元模組，該第-轉向模軋 明巧二麵臂式多轴多轉向制試賴，為-種自動化的 =設備，就能進行多轴多轉“：：模 的 為 轉 負責帶動一挺鈕灶姑八付平儿俠如·，咏矛一褥同犋組能 夾持單元模組樞接於妨二Γ 一得间供、組§又1仏成柩朱外堂愿，該 模組旋轉，框架内，該第二轉向組能帶動該夾持單元 夾持單元握^+ΐ第—轉向模組兩者的轉動方向相互垂直。該 次承载複數個該測試載盤模組，該測試載模組則能一 框架轉，該第二轉向模組設置於該框架外壁處， 201130618 【實施方式】 如第一圖所示，為本發明之古辨园 向測試設備1GG主要包括第—轉向觀f H臂式多軸多轉 載盤模組3以及夾持單元模組4所構成。第2、測試 供複數個待測晶片放置。而該夾载盤模組3負責 帶及動第該^ 以下就各構作作一詳細的描述。該i中 J負責動帶一框架η作前後财;主要 轉第一轉向模組丨包括有一框架二)各： 一動力裝置13、以及一第一值齡苗1/β 、且機架12、一第 的框體，相對的兩邊是被插接於 ^方型 ，第一傳植置Η $ 14 _具有齒輪組#其他連 以 11之樞接處相互連結。該第-動力if J為=置 cz-χ^^ 4 ^ # 41 r- ,〇 轉、q夹持早几模組4包括一加熱壓合 的内#^ - Μ A ’該承载座42相對的兩邊是樞接於該框架11 動力射向f組2是11定於該麵11的外壁’包括第二 tin與t傳動裝置22。第：傳練置如部具有齒輪 處結構相連接。該Γ4、?ί 3力為裝置^與承載座42之福接 承载座42產生順時針或逆時針的轉動。但該第 轉向模組^動框架11的旋轉方向與第二轉向模組2帶動承載.11. Schematic diagram of the first steering module frame mechanism f. Schematic diagram of the steering module frame mechanism, - Schematic diagram of the steering module power plant mechanism f: Schematic diagram of the steering module transmission mechanism f. Two steering module power device mechanism schematic second steering mode Schematic diagram of the mechanism of the transmission mechanism. Schematic diagram of the mechanism of the heating and pressing cover mechanism. If there is a chemical-type day-care, the eye reveals the chemical formula that best shows the characteristics of the invention. 6. Description of the invention: [Technical field of invention] - General measurement of the wafer to test the test equipment of a plurality of wafers, and - can enter [previous technology] accompanied, so the view = # = turn: 201130618 test, depending on the wafer to talk, there will be phase Silver is α ^ ± is the medium for signal transmission. When the crystal is tested at the same time, the flipping is easy to cause the connecting lines to be interlaced. When the test operation of more than 2 axes and multi-angle crystals is performed, it is all from a single month. Therefore, this automatic operation is currently performed, and the test efficiency is not good. For this reason, the single-machine and non-prepared to solve the problem of such special wafers, the inventor thinks about an innovative design. [Summary of the invention] The multi-gas: multi-axis multi-steering test equipment can be performed simultaneously Amplification " Home-turn multi-turning flip-up heating test operation, making test efficiency greater: 5 when multiple wafers are placed; = group ί, with associated operations to the mode i: and the invention mainly includes the first-turn The module, the second-turn m-disk module, and the lost-holding unit module, the first-steering die-rolling and the two-face-arm multi-axis multi-steer system can be carried out for an automated device. Multi-axis and multi-turn ":: The mode is responsible for the transfer of a button, the stove, the eight-payer, the flat child, such as the 咏 褥 褥 褥 褥 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能 能The group § 1 仏 柩 柩 外 外 , , , , , 愿 愿 柩 柩 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组 模组Carrying a plurality of test carrier modules at a time, the test carrier module can be rotated by a frame, the first The second steering module is disposed at the outer wall of the frame, 201130618. [Embodiment] As shown in the first figure, the test equipment 1GG of the present invention mainly includes a first-turn view, an H-arm multi-axis multi-transfer disk mold. The group 3 and the clamping unit module 4 are formed. The second test is for a plurality of wafers to be tested, and the carrier-carrying module 3 is responsible for carrying out the movement and the following. The i is responsible for the movement of a frame η for the front and rear; the main conversion first steering module 丨 includes a frame 2) each: a power device 13, and a first age seedling 1 / β, and the frame 12, A first frame, the opposite sides are plugged into the square shape, the first planting set Η $ 14 _ has a gear set # other links are connected to each other by a pivot joint of 11. The first-power if J is = Set cz-χ^^ 4 ^ # 41 r- , 〇 、, q 夹 early module 4 includes a heat-pressed inner #^ - Μ A 'the opposite sides of the carrier 42 are pivoted to the frame 11 The power transmission direction f group 2 is 11 the outer wall 'defined on the surface 11' includes the second tin and the t transmission 22. The first: the transmission is connected to the structure with a gear. Γ4,? 3 force is a clockwise or counterclockwise rotation of the device and the support base 42 of the carrier 42. However, the rotation direction of the first steering module and the second steering module 2 drive the bearing .
L ^ J 201130618 座42的旋轉方向相互垂直。 如第二圖所示，為該測試載盤模組3之分解圖。該測試载盤模 組3包括有複數個承座31、一承盤32及一電路板33。複數承座 31是被固定於承盤32之上。該承座31中央區域具有一凹槽^ 311，該凹槽座311是供晶片放置之用。該承座31内部具有^針 延伸至凹槽座311内，以進行相關的電性連接。該電路板泊能被 結合於該承盤32底部，其上具有複連接器331，該連接器犯^使 複數承座31之相關的電路能與電路板33相電性連接。^發明之 測試載盤模組3具有一特殊之處，主要是利用電路板33内部之相 關電路設計，使得複數承座31在測試過程的訊號輸出或外部電源 的輸入，僅藉由承盤32底部之金屬接觸片321即可作傳輸，該= 屬接觸片321在組裝時是與電路板33相電性連接。為了測試 ，組3移載的方便性，另設有一通訊介面連接器34，第一圖： 该通訊介面連接器34是置於承載座42處。該通訊介面連接器q ^有，彈性探針341，使用時測試主機之連接線僅需—條與 ^面連接器34相連接。當該通訊介面連接器34以該彈性探針^ 接觸片321接觸後’是利用通訊傳輸模式進行訊號傳 ^:條^接線與測試主機相連。因此本發明進行複數晶片的刺續 丄作，就不需要許多條連接線作連接，在第一或第 2在進行多難轉時，就不會有連接_繞^組1、 健該測試载 壓合蓋4卜以及一承裁二模組4主要包括-加熱 用以將戦健模組3内之晶^行加^2^載用座42主要 用環境溫度之功能測試，另一功主貝力此’用以模擬使 置。如第四圖所示，該加熱麗合蓋底 疋於兩者的中間位 掣件411，該彈性頂擎件411的°分£ =有複數個彈性頂 3之複數湖置，物 201130618 座31之凹槽座311的内部，施壓於晶片的頂部。如第三圖，為了 確保該加熱壓合蓋41與承載座42蓋合後不會任意分離，該夾持 單元模組4另外具有數組扣合組件44，該扣合組件44位於力σ熱壓 合蓋41與承載座42相對的兩邊。由於扣合組件44可由許多不同 的貫施方式達成，本發明僅就其中一種作說明。該扣合組件44包 括一氣壓紅441及一卡合件442，該氣壓缸411設置於該承載座 42的侧邊，該卡合件442則設置於該壓合蓋41的側邊。該卡合件 442具有一突輪4421。如第五Α、五Β圖示，當該氣壓缸441在作 動時會伸出一突桿4411，組裝時該突桿4411會突出該突輪4421 之上，如此就會使加熱壓合蓋41與承載座42兩者無法開啟。反 之如果要開啟時，該氣壓缸441之突桿4411就必須縮回。 形的立二、。^、欠七国^圖所示，為本發明不同狀態的實際旋轉情 模也内冑巾魏㈣試賴數晶#被安置該測試載盤 5=”載盤模組皆被該夾持單元模、组4固定於内部。如 古不，利用該第一轉向模組1可使得該框架11作Z-Y平面 第：轴中線為準，作順時針及逆時針:= 逆時針表qn轉向 ζ-γ辦線為準，作順時針及 如第⑽所示，當第—轉向模組1與第二 三度空間1=作動，舰進行X_Y平面的旋轉。如此即能進行 已二說明，僅為本發明之較佳實施例而 請專利範圍内作之變化或修飾’皆應涵蓋在以下本案之申 【圖式簡單說明】 發明之立體分解圖； 第一圖為本㈣之測試載賴_分解圖 m 6 201130618 第三圖為本發明之夾持單元模組之局部分解圖； 第四圖為本發明之夾持單元模組之加熱壓合蓋結構的立體圖 第五圖為本發明實際作動時之立體圖(一）； 第六圖為本發明實際作動時之立體圖(二）； 第七圖為本發明實際作動時之立體圖(三）； 第八圖為本發明實際作動時之立體圖（四）。L ^ J 201130618 The rotation directions of the seats 42 are perpendicular to each other. As shown in the second figure, it is an exploded view of the test carrier module 3. The test carrier module 3 includes a plurality of sockets 31, a retainer 32 and a circuit board 33. The plurality of sockets 31 are fixed to the retainer 32. The central portion of the socket 31 has a recess 311 for the wafer to be placed. The socket 31 has a pin extending into the recess 311 for associated electrical connection. The board mooring can be coupled to the bottom of the retainer 32 with a multi-connector 331 that allows the associated circuitry of the plurality of receptacles 31 to be electrically coupled to the circuit board 33. The inventive test carrier module 3 has a special feature, mainly utilizing the relevant circuit design inside the circuit board 33, so that the signal output of the plurality of sockets 31 during the test process or the input of the external power source is only by the retainer 32. The bottom metal contact piece 321 can be transported, and the contact piece 321 is electrically connected to the circuit board 33 when assembled. For testing, the convenience of group 3 transfer is additionally provided with a communication interface connector 34. First, the communication interface connector 34 is placed at the carrier 42. The communication interface connector has a flexible probe 341. In use, the test cable of the test host only needs to be connected to the surface connector 34. When the communication interface connector 34 is contacted by the elastic probe ^ contact piece 321, the signal transmission is performed by using the communication transmission mode: the connection is connected to the test host. Therefore, the present invention performs the splicing operation of the plurality of wafers, and does not require a plurality of connecting lines for connection. When the first or the second is more difficult to rotate, there is no connection _ winding group 1, the test load The press-fit cover 4 and the second cover module 4 mainly include - heating for testing the crystal inside the tamper module 3 with the function of the ambient temperature, and the other function is Beili this is used to simulate the setting. As shown in the fourth figure, the heating lid is placed on the middle of the middle member 411, and the elastic top member 411 is divided into a plurality of lakes having a plurality of elastic tops 3, and the object is 201130618. The inside of the recessed seat 311 is pressed against the top of the wafer. As shown in the third figure, in order to ensure that the heating and pressing cover 41 does not arbitrarily separate from the carrier 42 , the clamping unit module 4 additionally has an array of fastening components 44 , and the fastening component 44 is located at a force σ hot pressing The cover 41 is opposite to the carrier 42. Since the snap-fit assembly 44 can be implemented in a number of different manners, the present invention is described in only one of them. The fastening component 44 includes a pneumatic red 441 and a latching member 442. The pneumatic cylinder 411 is disposed at a side of the carrier 42 and the engaging member 442 is disposed at a side of the pressing cover 41. The engaging member 442 has a projecting wheel 4421. As shown in the fifth and fifth figures, when the pneumatic cylinder 441 is actuated, a protruding rod 4411 is protruded. When assembled, the protruding rod 4411 protrudes above the protruding wheel 4421, so that the heating pressing cover 41 is caused. Both the carrier 42 and the carrier 42 cannot be opened. On the other hand, if it is to be opened, the protrusion 4411 of the pneumatic cylinder 441 must be retracted. The shape of the second. ^, owe seven countries ^ picture, the actual rotation model of the different states of the invention is also inside the towel Wei (four) try the number of crystals # is placed the test carrier 5 = "the carrier module is the clamping unit The mold and the group 4 are fixed inside. If the first steering module 1 is used, the frame 11 can be made into the ZY plane: the center line of the shaft is clockwise and counterclockwise: = counterclockwise table qn turns ζ - γ line is subject to clockwise and as shown in (10), when the first steering module 1 and the second three-dimensional space 1 = actuate, the ship performs the rotation of the X_Y plane. This can be explained twice, only For the preferred embodiment of the present invention, the changes or modifications made within the scope of patents should be covered in the following description of the present invention [simplified description of the drawings]. The first exploded view of the invention; Exploded view m 6 201130618 The third figure is a partial exploded view of the clamping unit module of the present invention; the fourth figure is a perspective view of the heating and pressing cover structure of the clamping unit module of the present invention. The fifth figure is the actual operation of the present invention. The perspective view of the time (1); the sixth figure is the perspective view of the actual operation of the invention (2); The picture shows a perspective view of the present invention is actually seven actuator (C); a perspective view (d) of the present invention, when the graph of the eighth practical actuation.
【主要元件符號說明】 100 懸臂式多軸多轉向測試設備 1 第一轉向模組 11 框架 12 機架 13 第一動力裝置 14 第一傳動裝置 2 第二轉向模組 21 第二動力裝置 22 第二傳動裝置 3 測試載盤模組 31 承座 311 凹槽座 32 承盤 32 金屬接觸片 33 電路板 331 連接器 34 通訊介面連接器 341 彈性探針 4 夾持單元模組 41 加熱壓合蓋 411 彈性頂掣件 42 承載座 201130618 44 扣合組件 441 氣壓缸 4411 突桿 442 卡合件 4421突輪[Main component symbol description] 100 Cantilever multi-axis multi-steering test equipment 1 First steering module 11 Frame 12 Rack 13 First power unit 14 First transmission unit 2 Second steering module 21 Second power unit 22 Second Transmission 3 Test carrier module 31 Bearing 311 Groove holder 32 Bearing plate 32 Metal contact piece 33 Circuit board 331 Connector 34 Communication interface connector 341 Elastic probe 4 Clamping unit module 41 Heating press cover 411 Elastic Top member 42 carrier 201130618 44 fastening component 441 pneumatic cylinder 4411 protruding rod 442 engaging member 4421