TW201029069A - Method of using evaporating and laser annealing to construct a semiconductor structure in display panel and thin film solar panel manufacturing process - Google Patents

Method of using evaporating and laser annealing to construct a semiconductor structure in display panel and thin film solar panel manufacturing process Download PDF

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Publication number
TW201029069A
TW201029069A TW098102692A TW98102692A TW201029069A TW 201029069 A TW201029069 A TW 201029069A TW 098102692 A TW098102692 A TW 098102692A TW 98102692 A TW98102692 A TW 98102692A TW 201029069 A TW201029069 A TW 201029069A
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Taiwan
Prior art keywords
semiconductor
layer
photoresist
laser
semiconductor structure
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TW098102692A
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English (en)
Chinese (zh)
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TWI399813B (enExample
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Da-Shuang Guan
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Da-Shuang Guan
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Physical Vapour Deposition (AREA)
TW098102692A 2009-01-23 2009-01-23 Method of using evaporating and laser annealing to construct a semiconductor structure in display panel and thin film solar panel manufacturing process TW201029069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW098102692A TW201029069A (en) 2009-01-23 2009-01-23 Method of using evaporating and laser annealing to construct a semiconductor structure in display panel and thin film solar panel manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW098102692A TW201029069A (en) 2009-01-23 2009-01-23 Method of using evaporating and laser annealing to construct a semiconductor structure in display panel and thin film solar panel manufacturing process

Publications (2)

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TW201029069A true TW201029069A (en) 2010-08-01
TWI399813B TWI399813B (enExample) 2013-06-21

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TW098102692A TW201029069A (en) 2009-01-23 2009-01-23 Method of using evaporating and laser annealing to construct a semiconductor structure in display panel and thin film solar panel manufacturing process

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Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4335266A (en) * 1980-12-31 1982-06-15 The Boeing Company Methods for forming thin-film heterojunction solar cells from I-III-VI.sub.2
US20060024442A1 (en) * 2003-05-19 2006-02-02 Ovshinsky Stanford R Deposition methods for the formation of polycrystalline materials on mobile substrates

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