TW201024657A - Method and system of using laser in measuring material surface shape - Google Patents

Method and system of using laser in measuring material surface shape Download PDF

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Publication number
TW201024657A
TW201024657A TW97151527A TW97151527A TW201024657A TW 201024657 A TW201024657 A TW 201024657A TW 97151527 A TW97151527 A TW 97151527A TW 97151527 A TW97151527 A TW 97151527A TW 201024657 A TW201024657 A TW 201024657A
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Taiwan
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laser
material surface
lightning
image
shape
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TW97151527A
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Chinese (zh)
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TWI387722B (en
Inventor
jia-xian Xiao
Zheng-Kai Gao
Rong-Cun Jian
Cheng-Ping Zhao
Chun-Hui Liu
Yong Gao
zhe-sheng Liu
Tai Gao
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China Steel Corp
Shenwang Pioneer Tech Corp Beijing
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Priority to TW97151527A priority Critical patent/TWI387722B/en
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Publication of TWI387722B publication Critical patent/TWI387722B/en

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Abstract

The present invention relates to a method and system of using laser in measuring material surface shape, which uses a linear laser device to generate a laser line beam to project on the material surface under test with an oblique included angle,. The plane confined by the laser line beam intersects the material surface under test, and the laser line beam will be shown on the material surface under test. When the test material surface is smooth and even, the laser line is a straight line; when the surface is rough and uneven, the laser line is a curve. Given a known included angle and a reference point location on the laser line, height of every point of the laser line on the material surface under test can be calculated using trigonometry. The invented method and system of using laser in measuring material surface shape is simple and highly accurate. Furthermore, since the invented method and system of using laser in measuring material surface shape do not need to be in direct contact with the material surface under test, maintenance rate can be significantly reduced.

Description

201024657 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種檢測料面形狀之方法和系統,詳言 之,係關於一種雷射檢測料面形狀的方法及系統。 【先前技術】 圖1顯示習知檢測料面形狀之系統結構示意圖。該習知 料面(如燒結機料面)檢測系統i包括一支架丨丨、一上限高度 _ 檢測頭12及一下限高度檢測頭13。該上限高度檢測頭12及 該下限高度檢測頭13固設於該支架U,且並排相鄰地位於 一料面14上方相對位置。其中,該上限高度檢測頭12及該 下限南度檢測頭13的設置咼度不同’該上限高度檢測頭a 為檢測上限咼度’該下限高度檢測頭丨3為檢測下限高度。 當該上限高度檢測頭12檢測到物料時,則表明該處料面高 度過高;當該下限高度檢測頭13沒有檢測到物料時,則表 明該處料面高度過低。在該習知料面檢測系統1中由於 φ 檢測頭經常需要與物料接觸’容易造成檢測頭故障問題。 另外’習知料面檢測方法精確度低,不能對料面形狀進行 準確判斷。 另外’在習知技術中亦有採用雷射來檢測物體表面粗輪 度的方法’例如中國大陸專利第CN1040265 Α號。這類雷 射檢測方法主要是利用物體表面對雷射反射所形成的反射 圖像來檢測粗輪度。 此外,在中國大陸專利第CN1040265A號中,雷射線束 以一定入射角照射到被測表面上,除一部分被吸收外,大 136847.doc 201024657 部分被反射和散射,反射光和散射光組成與粗糙度有關的 圖譜,反射形成的核心光斑和散射形成的光帶分別有光電 轉換器轉換為電信號’通過測定反射光強和散射光強的比 就可以求得粗糙度。這種檢測方法的檢測精確度在某些領 域也不能令人滿意,另外對系統的精度要求非常嚴格,此 外檢測精確度受被測物體自身組成材料的影響也比較大。 因此’有必要提供一創新且富有進步性之雷射檢測料面 Φ 形狀的方法及系統,以解決上述問題。 【發明内容】 本發明提供一種雷射檢測料面形狀之方法,包括以下步 驟.(a)從一待檢測料面上方之一相對位置施加一雷射線束 至該待檢測料面,使該雷射線束限定的一平面之一側邊實 質上平行一第一方向,並且該平面與一第二方向成一夾 角’其中該第二方向係為該待檢測料面之運動方向且垂直 該第一方向;(b)在該雷射線束與一基準料面相交之位置的 β —上方相對位置,對該雷射線束與該待檢測料面之一交線 影像揭取;及(c)根據所擷取的該交線圖像來獲取該待檢測 料面之形狀。 本發明另提供一種雷射檢測料面形狀之系統,包括一線 式雷射器、一影像擷取裝置及一計算裝置。該線式雷射器 定位在一待檢測料面上方相對位置,用以產生一雷射線 束’該雷射線束限定的一平面之一側邊實質上平行一第一 方向’並且該平面與一第二方向成一夾角’其中該第二方 向係為該待檢測料面之運動方向且垂直該第一方向。該影 136847.doc 201024657 像擷取裝置定位在該線式雷射器所產生的該雷射線束與一 基準料面相交之位置的上方相對位置,用於對該雷射線束 與該待檢測料面的交線影像擷取。該計算裝置用以根據影 像擷取裝置所擷取的該交線圖像來獲取該待檢測料面之形 狀’其中’所獲取該待檢測料面之形狀可包括獲取該待檢 測料面之寬度、長度和凹凸度至少其中之一。 本發明雷射檢測料面形狀之方法及系統簡單,且檢測精 確度高。另外,由於本發明雷射檢測料面形狀之方法及系 統不需要與待檢測料面發生直接接觸,可大幅降低檢修 率。 【實施方式】 圖2及圖3顯示本發明使用雷射線束檢測料面形狀的系統 結構示意圖。以下茲以燒結機料面(通常是運動的)之檢測 為例’詳細說明本發明雷射檢測料面形狀之系統和方法。 配合參考圖2及圖3 ,該雷射檢測料面形狀之系統2包括: 瘳 一線式雷射器21、一影像棟取裝置22及一計算裝置23。 首先’定義一基準料面P1(假想水平面)。該線式雷射器 21定位在一待檢測料面24上方相對位置,該線式雷射器21 産生的雷射線束限定的平面P2之一側邊實質上平行一第一 方向(在此為寬度方向)’並且該平面P2與一第二方向(在此 為長度方向)成一夾角(X,其中該第二方向係為該待檢測料 面之運動方向Μ且垂直該第一方向。其中。該夾角α通常 在10度至80度之間’較佳地,該炎角α係為45度。 該影像擷取裝置22定位在該線式雷射器21所産生的該雷 136847.doc 201024657 射線束與該基準料面P1 (作為該待檢測料面24的基準料面) 相交的位置(基準線L)之上方相對位置,用於對該雷射線 束與該待檢測料面24的交線S影像擷取。由於該夾角α的存 在,如果該待檢測料面24出現凹凸不平的情況,該影像擷 取裝置22所擷取的交線S相對於基準線L而言,其圖像就會 是一條相應的曲線而非直線。 該計算裝置23(例如:電腦)用以根據該影像擷取裝置22 φ 所擷取的該交線S之圖像來獲取該待檢測料面24之形狀。 在本實施例中’該計算裝置23具有一計算模組23 1。該計 算模組231用以將該雷射線束與該基準料面P1相交之位置 定義為該基準線L’並求取所擷取的該交線圖像形成的該 曲線S上之每一測量點偏離該基準線l的偏離距離,並且該 計算模組23 1用以根據該夾角α及該偏離距離,計算該曲線 S上之每一測量點與該基準料面的距離。其中,該計算 裝置23係利用以下幾何原理,基於該影像擷取裝置22所擷 Φ 取的該交線s之圖像進行分析和計算,以獲取該待檢測料 面24之形狀。 圖4顯示本發明料面高度/深度的計算示意圖。配合參考 圖2至圖4,該交線S上的每一測量點至該基準料面?1的實 際距離(深度或高度)之計算方法相同,茲以該交線s上的 一測量點N為例說明。該測量點n至該基準料面p 1的實際 距離設為D,該測量點N與該基準線L的偏離距離設為X, 由圖4中顯示的幾何關係可以得知,D=Xxtan α。舉例而 言’如果該夾角α設置為45度,則d=X。 136847.doc 201024657 當然,通過測量該交線s的橫向長度,即可求出該待檢 測料面之寬度’這也是本發明的另—種應用。要強調的 是,上述實施方式雖僅用於計算該測量點N錢基準料面 P1的實際距離D ’然:而不應當理解為對其進行的任何限 制。例如,根據本發明雷射檢測料面形狀之方法及系統, 也可以用於檢測任何合適的物體表面形狀(包括寬度、長 度、凹凸度至少其中之一)。 本發明雷射檢測料面形狀之方法及系統簡單,且檢測精 確度高。另外’由於本發明雷射檢測料面形狀之方法及系 統不需要與待檢測料面發生直接接觸’可大幅降低檢修 率〇 上述實施例僅為說明本發明之原理及其功效,並非限制 本發明。因此習於此技術之人士對上述實施例進行修改及 變化仍不脫本發明之精神。本發明之權利範圍應如後述之 申請專利範圍所列。 【圖式簡單說明】 圖1顯示習知檢測料面形狀之系統結構示意圖; 圖2及圖3顯示本發明使用雷射線束檢測料面形狀的系統 結構示意圖;及 圖4顯示本發明料面高度/深度的計算示意圖。 【主要元件符號說明】 1 習知料面檢測系統 2 本發明雷射檢測料面形狀之系統 H 支架 136847.doc -10- 201024657 12 13 14 21 22 23 24 231 上限高度檢測頭 下限高度檢測頭 料面 線式雷射器 影像擷取裝置 計算裝置 待檢測料面 計算模組 參 136847.doc201024657 IX. Description of the Invention: [Technical Field] The present invention relates to a method and system for detecting the shape of a dough surface, and more particularly to a method and system for detecting the shape of a material surface by a laser. [Prior Art] Fig. 1 shows a schematic diagram of a system structure for detecting the shape of a material surface. The conventional material (e.g., sintering machine surface) detection system i includes a bracket 丨丨, an upper limit height _ detecting head 12 and a lower limit height detecting head 13. The upper limit height detecting head 12 and the lower limit height detecting head 13 are fixed to the bracket U and are adjacent to each other at a relative position above the level 14 in parallel. The upper limit height detecting head 12 and the lower limit south degree detecting head 13 have different setting degrees. The upper limit height detecting head a is a detecting upper limit degree. The lower limit height detecting head 丨3 is a detecting lower limit height. When the upper limit height detecting head 12 detects the material, it indicates that the material level is too high; when the lower limit height detecting head 13 does not detect the material, it indicates that the material level is too low. In the conventional surface detecting system 1, since the φ detecting head often needs to be in contact with the material, it is easy to cause the head failure problem. In addition, the conventional material surface detection method has low accuracy and cannot accurately judge the shape of the material surface. In addition, in the prior art, there is also a method of using a laser to detect the coarse rotation of an object surface, such as the Chinese Patent No. CN1040265. This type of laser detection method mainly uses the reflection image formed by the surface of the object to reflect the laser to detect the coarse rotation. In addition, in Chinese Patent No. CN1040265A, the beam of lightning is irradiated onto the surface to be measured at a certain angle of incidence, except that part of it is absorbed, the portion of the large 136847.doc 201024657 is reflected and scattered, and the reflected and scattered light are composed and rough. The degree-dependent map, the core spot formed by the reflection and the light band formed by the scattering, respectively, are converted into electrical signals by the photoelectric converter. 'The roughness can be obtained by measuring the ratio of the reflected light intensity to the scattered light intensity. The detection accuracy of this detection method is also unsatisfactory in some fields. In addition, the accuracy of the system is very strict, and the accuracy of the detection is also greatly affected by the material of the measured object itself. Therefore, it is necessary to provide an innovative and progressive method and system for detecting the shape of the Φ of the laser to solve the above problems. SUMMARY OF THE INVENTION The present invention provides a method for detecting a shape of a surface of a laser, comprising the following steps: (a) applying a lightning beam from a relative position above a surface to be detected to the surface to be inspected, so that the lightning One side of a plane defined by the beam is substantially parallel to a first direction, and the plane is at an angle to a second direction, wherein the second direction is the direction of motion of the to-be-detected surface and perpendicular to the first direction (b) at a position above β at a position where the lightning beam intersects a reference level, the image of the intersection of the lightning beam and the surface to be inspected is removed; and (c) according to The intersection image is taken to obtain the shape of the to-be-detected material surface. The invention further provides a system for detecting the shape of a surface of a laser, comprising a line laser, an image capturing device and a computing device. The line laser is positioned at a relative position above the surface to be inspected to generate a lightning beam 'the side of one of the planes defined by the lightning beam is substantially parallel to a first direction' and the plane is The second direction is at an angle 'where the second direction is the direction of movement of the to-be-detected material plane and perpendicular to the first direction. The image 136847.doc 201024657 is positioned such that the picking device is positioned above the position where the lightning beam generated by the line laser beam intersects a reference level for the lightning beam and the to-be-detected material The intersection image of the face is captured. The calculating device is configured to acquire the shape of the to-be-detected material surface according to the intersection image captured by the image capturing device to obtain the shape of the to-be-detected material surface, which may include obtaining the width of the to-be-detected material surface , at least one of length and roughness. The method and system for detecting the shape of the surface of the laser of the invention are simple, and the detection accuracy is high. In addition, since the method and system for detecting the shape of the surface of the laser of the present invention do not require direct contact with the surface to be inspected, the inspection rate can be greatly reduced. [Embodiment] Figs. 2 and 3 show a system configuration diagram for detecting a shape of a dough surface using a lightning beam in the present invention. Hereinafter, the system and method for detecting the shape of the material of the laser of the present invention will be described in detail by taking the detection of the surface of the sintering machine (usually moving) as an example. Referring to Figures 2 and 3, the system 2 for detecting the shape of the surface of the laser includes: 瘳 a line laser 21, an image building device 22, and a computing device 23. First, define a reference level P1 (imaginary level). The line laser 21 is positioned at a relative position above the to-be-detected material surface 24, and one side of the plane P2 defined by the lightning beam generated by the line laser 21 is substantially parallel to a first direction (here The width direction ′′′ and the plane P2 is at an angle (X) to a second direction (here, the length direction), wherein the second direction is the direction of motion of the to-be-detected material plane and perpendicular to the first direction. The angle α is usually between 10 and 80 degrees. Preferably, the angle α is 45 degrees. The image capturing device 22 is positioned at the line 136847.doc 201024657 generated by the line laser 21 a position above the position (reference line L) where the beam intersects the reference level P1 (as the reference level of the to-be-detected surface 24) for the intersection of the lightning beam and the to-be-detected surface 24 The image of the line S is captured. Due to the presence of the angle α, if the surface 24 to be detected is uneven, the image of the intersection S drawn by the image capturing device 22 relative to the reference line L is an image thereof. It will be a corresponding curve instead of a straight line. The computing device 23 (for example: The brain is configured to acquire the shape of the to-be-detected material surface 24 according to the image of the intersection line S captured by the image capturing device 22 φ. In the present embodiment, the computing device 23 has a computing module 23 1. The calculation module 231 is configured to define a position where the lightning beam intersects the reference material plane P1 as the reference line L′ and obtain each of the curves S formed by the intersection image captured. a deviation distance of the measurement point from the reference line 1 , and the calculation module 23 1 is configured to calculate a distance between each measurement point on the curve S and the reference material plane according to the angle α and the deviation distance. The computing device 23 uses the following geometric principle to analyze and calculate the image of the intersection line s taken by the image capturing device 22 to obtain the shape of the to-be-detected material surface 24. FIG. 4 shows the present invention. Schematic diagram of the calculation of the height/depth of the material surface. With reference to Fig. 2 to Fig. 4, the actual distance (depth or height) of each measurement point on the intersection line S to the reference material plane 1 is the same. A measurement point N on the intersection line s is taken as an example. The measurement point n to the The actual distance of the reference material plane p 1 is set to D, and the deviation distance of the measurement point N from the reference line L is set to X, which can be known from the geometric relationship shown in Fig. 4, D = Xxtan α. For example, if The angle α is set to 45 degrees, then d=X. 136847.doc 201024657 Of course, by measuring the lateral length of the intersection s, the width of the to-be-detected surface can be determined. This is another application of the present invention. It should be emphasized that the above embodiment is only used to calculate the actual distance D of the measuring point N money reference surface P1: it should not be construed as any limitation on it. For example, the laser detection according to the invention The method and system for the shape of the dough surface can also be used to detect any suitable surface shape of the object (including at least one of width, length, and concavity). The method and system for detecting the shape of the surface of the laser of the invention are simple, and the detection accuracy is high. In addition, the method and system for detecting the shape of the surface of the laser of the present invention do not need to be in direct contact with the surface to be inspected, which can greatly reduce the inspection rate. The above embodiments are merely illustrative of the principle and function of the present invention, and do not limit the present invention. . Therefore, those skilled in the art can make modifications and changes to the above embodiments without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a system structure for detecting a shape of a material surface; FIG. 2 and FIG. 3 are schematic diagrams showing a system structure for detecting a shape of a material surface using a lightning beam according to the present invention; and FIG. 4 is a view showing a height of a material surface of the present invention. / Sketch calculation of depth. [Description of main component symbols] 1 Conventional material surface detecting system 2 System for detecting the shape of a laser surface of the present invention H bracket 136847.doc -10- 201024657 12 13 14 21 22 23 24 231 Upper limit height detecting head lower limit height detecting head Face-line laser image capture device computing device to be tested surface calculation module 136847.doc

Claims (1)

201024657 、申請專利範園: 1. -種雷射檢測料面形狀之方法,包括以下步驟: ⑷從-待檢測料面上方之—相對位置施加_雷射線束 至該待檢測料面,使該雷射線束限定的一平面之一 側邊實質上平行—第—方向並且該平面與一第二 方向成—夾角,其中該第二方向係為該待檢測料: 之運動方向且垂直該第一方向; φ ()在該雷射線束與-基準料面相交之位置的—上方相 對位置’對該f射線束與該待檢測料面之 像擷取;及 線景/ ⑷根據所擷取的該交線圖像來獲取該待檢測料面之形 狀。 136847.doc 201024657 量點與該基準料面的距離。 7. 一種雷射檢測料面形狀之系統,包括: 一線式雷射器,定位在一待檢測料面上方相對位置, 用以產生一雷射線束,該雷射線束限定的一平面之一側 邊實質上平行一第一方向,並且該平面與一第二方向成 一夾角’其中該第二方向係為該待檢測料面之運動方向 且垂直該第一方向; φ 一影像擷取裝置,定位在該線式雷射器所産生的該雷 射線束與一基準料面相交之位置的上方相對位置,用於 對該雷射線束與該待檢測料面的交線影像擷取;及 一計算裝置,用以根據影像擷取裝置所擷取的該交線 圖像來獲取該待檢測料面之形狀。 8. 如請求項7之系統,其中該待檢測料面為運動的燒結機 料面。 9. 如睛求項7之系統’其中該夾角為10度至80度。 β 10.如請求項9之系統,其中該夾角為45度。 11. 如請求項7之系統,其中該計算裝置為電腦。 12. 如請求項7之系統,其中該計算裝置包括一計算模組, 用以將該雷射線束與該基準料面相交之位置定義為一基 準線’並求取所擷取的該交線圖像形成的曲線上之每一 測量點偏離該基準線的偏離距離,並且用以根據該夾角 及該偏離距離,計算該曲線上之每一測量點與該基準料 面的駔離。 136847.doc201024657, Patent Application Park: 1. A method for detecting the shape of a material surface by laser, comprising the following steps: (4) applying a ray beam from the relative position above the to-be-detected material surface to the material to be tested, so that One side of a plane defined by the beam of lightning is substantially parallel—the first direction and the plane is at an angle to a second direction, wherein the second direction is the direction of motion of the object to be detected: Direction; φ () at the position relative to the position where the lightning beam intersects with the - reference plane - the image of the f-ray beam and the image to be detected; and the line view / (4) according to the The intersection image is used to obtain the shape of the surface to be inspected. 136847.doc 201024657 The distance between the point and the reference level. 7. A system for detecting the shape of a surface of a laser, comprising: a line of lasers positioned at a relative position above a surface to be inspected for generating a beam of lightning, one side of a plane defined by the beam of lightning The edge is substantially parallel to a first direction, and the plane forms an angle with a second direction, wherein the second direction is the direction of motion of the to-be-detected material plane and perpendicular to the first direction; φ an image capturing device, positioning a position above the position where the lightning beam generated by the line laser beam intersects a reference material plane for capturing an intersection image of the lightning beam and the to-be-detected material surface; and calculating The device is configured to acquire the shape of the to-be-detected material surface according to the intersection image captured by the image capturing device. 8. The system of claim 7, wherein the surface to be inspected is a moving sintering machine surface. 9. The system of claim 7 wherein the angle is between 10 and 80 degrees. β 10. The system of claim 9, wherein the included angle is 45 degrees. 11. The system of claim 7, wherein the computing device is a computer. 12. The system of claim 7, wherein the computing device includes a computing module for defining a location at which the lightning beam intersects the reference level as a baseline 'and ascertaining the intersection The deviation distance of each measurement point on the curve formed by the image from the reference line is used to calculate the deviation of each measurement point on the curve from the reference level according to the angle and the deviation distance. 136847.doc
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