i 201020435 六、發明說明： 【發明所屬之技術領域】 本發明係關於—種使用於真空處理裝置之間或真空處理裝置 與真空排氣泵之間的真空閘閥、及使用該真空閘閥之閘間閉方法。 【先前技術】 身又而d 叹置有後、接於排氣口所設之閘密封（gate seal) 面而閉塞排氣口之閘的情形時，設置有閘後退口遮蔽裝置，以便 於閘（閥體）自排氣口後退時雜質不會侵人、附著於閘後退室。 於曰本專利特開平7-42872號公報t，揭示有於形成排氣口 的排氣通路内*置㈣型遮板（shutter)，使其移動至排氣通路 内，於閘後退時遮蔽閘後退口，以作為上賴後退口遮蔽裝置。 ❷ 於日本專利_平3-23_號公報巾，揭示有—種超高真空 閘閥，其特徵在於，包括：閥箱、閥座、具有開口之閥板、連接 於該閥板之閥棒、閥棒驅動機構、閥板固耕、及内插連接於上 述閥箱與上述閥座及閥板固定件間之自由伸縮的伸縮管 (bell〇WS);於上糊板之開、閉位置，上酬板通倾上述闕 j及上述閥板H1定件對接，使上述閥棒驅動機構所佔有之上述闕 箱内的靜區（dead space )閉塞。 >、日本專利特開平7_42872號公報中所揭示的圓筒型遮板係排 氣通路内移動者，此外，於 — 本專利_平3-2謂4號公報中所 揭示之伸縮自由之伸縮管传执 又置於#區内。若根據上述先前例之 3 201020435 構成貝j存在於閘之後退或閉塞移動時，遮板或者伸縮管與排氣 接觸’而附著排氣中之雜質之危險 【發明内容】 本u之目的在於借鑒相關方面之優點，而提供—種直空問 闊錢用該真空_之關财法，其係包括閘之後退及閉塞移 動w在内’於自閘開放狀態向閉塞狀態及自閉塞狀態向開放狀態 之轉變過程中，可減少雜質侵人、附著於閘後退室。 〃本發明係提供—種真空閘閥，其包括：具有於端部形成有排 氣:之排氣筒部的本體、具有閘後退室之閘後退部、自上述問後 退至移動至上述排氣筒部而閉塞上述排氣口且收納於上述問後退 室内的閘、使該_動之_動部、可沿上述職筒移動並設置 :i遮板祕^的她 '及使該遮板軸之雜 徵在於： V丨八付 ，上述本體係面向上賴氣筒部之側面部形成有人口，並具有 ^成有於上補向上述人口働時及於上述_上述間後退 至後退移動時使上述遮板自上述排賴部隔離之上述遮板移動室 之遮板移動部； 置 上述間後退部之上·後退室係與上述遮板移動室連通而設 於上述遮板移動部中，與上述遮板移動室之上述 入口 相對形 201020435 成有固定密封部； 上述遮板係與上述固定密封部㈣而具有遮板遮板密封部； 上述閑係可自上相後駭向上述额室，進而自該遮板室 向上述排氣筒部移動，而且上述閘中，於其—面側與上述固定密 ，部相對形成有第—閘密封部，而且，上述閘中，於第-閘密封 邛之相反面側與上述遮板遮板密封部相對形成有第二間密封部； 一上述遮㈣於上述閘收納於上述閘後退室時，使上述遮板移 _動室移動’藉由遮板密封部接觸於上賴定密封部而随上述入 口’且於上述閘使上述遮板移動歸動，藉由第—閘密封部虚上 述固定密封__塞上述排氣口時，使上述遮板移動室移動， 错由上述遮板密封部與第二閘密封部接觸而閉塞上述入口。 、此外’本發明係提供—種真空閘閥，其中，上述固定密封部、 j迷遮板密封部、第—_封部、及第二_封部係於上述排氣 Λ部之長度方向上，配設於上述遮板移動室内的同一面上。 〜此外’本發縣提供—種真空_，其中，上述遮板密封部 係精由模板（shuttering)而形成，該模板及上述遮板可互相装 卸自由，上述排氣筒部係於内周面具有_狀的蓋及於蓋之外周 _有成為上述遮板移敏之—部分㈣板㈣室，於該遮板收 納室之側_沿該遮板㈣室設置有上述遮板驅铸之遮板驅動 活基’該遮板驅動活塞係與上述模板連接，藉由沿上述排氣筒部 作動之上述遮板驅動活塞，而沿上述排氣筒部移動。- 201020435 此外，本發明係提供—種真空關’其中’上述閘驅動部與 上述遮板驅動部係藉由—组驅動源及_力切敏置而驅動，並 具有於上述開後退於上述閘後退室時，以移動上述遮板之方式進 行控制之控制裝置。 ^ …此外，本發明係提供一種真空閘閥，其中，上述間後退部形 成箱狀’自本體側面與上述本體形成—體，且可裝卸自由，上述 閘使用擺形閘’該開可使上述閘後退部及上述遮板移動室搖動。 本發明係提供—種真空_之閘_方法，其係包括··具有❹ ，端部形成有魏口之排氣筒部的本體、具有_退室之問後退 。卜自上述閘後退室向上述排氣筒部移動而閉塞上述排氣口且收 上述閘後退至的閑、使該閘移動之閘驅動部、可沿上述排氣 筒移動並設置於上述遮板移動室之雜、使該遮板移動之遮板驅 動部； 上述本體係於面向上述排氣筒部之側面部形成有入口，並具 、/成有於上述閑向上述人σ閉塞時及上述閘向上述開後退室後❹ 退％使上述遮板自上述排氣筒部隔離之遮板移動室之遮板移動 部； 上述閘後退部之上述閑後退室與上述遮板移動室連通而設 置； 上述遮板移動部t，與上述遮板移動室之上述入口相對形成 有固定密封部； 6 201020435 部，上顿細相對之方式具有遮板密封 於其—面側與上述固定密封部相對形成有第 上二，於上述問中，於第-間密封部之相反面側愈 上述遮板讀抑對戦有第二_卿者，料徵在於· 於上==方式來實行上述_閉’即，於上述_ 鲁 ❹ k綺，上相城上述遮板轉t飾，藉由迚板 役封部與上述固定密封部接觸而閉塞上述人σ，且於#、t 上述間後退室向上述遮板室移動，進而自該遮板室向上述 :動’藉由上述_與上述固定密封接觸 ： 3==上述遮板移動室，藉由上述遮板密封部與第 —在封部接觸而閉塞上述入口。 此外，本發明係提供—種真空閉間之間開閉方法， 述固定密封部、上述遮板密封部、第1密封部;; =於上述排氣筒部之長度方向，以與上述固定密二二= 式於同一面上移動上述遮板移動室。 【實施方式】 以下，根據圖式說明本發明之一實施例。 雜據本發明，則具有上述翁及遮板移動室，遮板於開之 後叫，以及於間之排氣口閉塞日夺’均可閉塞遮板移動室之入口， 且於間後退移動時及閉塞移動時，自排氣筒部隔離，閘自 201020435 態向閉塞狀態及自縣狀態向·狀態之轉變過程中，可減少雜 質向閘後退室侵入附著。 ’ [實施例] 圖i係本發明之實施例之真空_之頂視圖，圖2係侧面刊 面圖，圖3係底視圖。再者，圖2係圖3之A_A剖面圖。 該等圖中，真空閘閥100由本體U與閘後退部12構成，本 體U、閘後退部12同時形成為箱狀，兩者可相互自域卸地成為 一體’兩◦形環14。如圖1所示，本體1丨與閘後退部 12相比高度較高，從上物狀情形時，兩者好錢惰圓形， 中央部成為較粗之形狀。 本體U係於中央之内部設置有排氣筒部15，面向該排氣筒部 A之側面部，_立於排氣筒部15之關之形式形成有遮板移動 至16。即，於本體U之側面部之周圍設置有形成 巧板移騎1了。 於問後退部12之内部具有閘後退室13，該閘後退室13介由 ^肺__部15連通。排氣筒部15形成《]筒狀，因 遮板至中Μ亦形成獨ί於排氣筒部15之周圍之形狀，於 8 ’面向排氣筒部15之側面於其周圍形成有入口 Γ 端部（下側端部、.端部）中形成有排氣口 閘（咖具有可閉塞排氣口20之大小，如下所述，排氣筒 201020435 415遮板移動室16及開後退室㈣可移動。 这板私動至16中圓筒狀之遮板22設置為可於排氣筒 筒長方向沿排氣筒部15移動。 。之 圖4係表示圖 成之詳細結構。 之遮板移動室16及遮板移動室16附近之構i 201020435 VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum gate valve used between vacuum processing apparatuses or between a vacuum processing apparatus and a vacuum exhaust pump, and a gate chamber using the vacuum gate valve Closed method. [Prior Art] When the body is closed and the rear gate is connected to the gate seal surface provided by the exhaust port to block the opening of the exhaust port, a gate rear retracting device is provided to facilitate the gate. (Valve body) The impurities do not invade and adhere to the brake back chamber when retreating from the exhaust port. Japanese Patent Publication No. 7-42872 discloses that a (four) type shutter in an exhaust passage forming an exhaust port is moved into an exhaust passage, and a shutter is closed when the brake is retracted. The back is retracted to serve as a shelter for the upper back. An ultra-high vacuum gate valve is disclosed in Japanese Patent Laid-Open No. Hei. No. 3-23_, which is characterized in that it comprises: a valve box, a valve seat, a valve plate having an opening, a valve rod connected to the valve plate, a valve rod driving mechanism, a valve plate solidification, and a telescopic extension tube (bell〇WS) connected between the valve box and the valve seat and the valve plate fixing member; in an open position of the upper paste board, The upper plate is tilted by the above-mentioned valve plate H1 and the valve plate H1 is fixed, and the dead space in the above-mentioned box occupied by the valve rod driving mechanism is blocked. The cylindrical shutter disclosed in Japanese Laid-Open Patent Publication No. Hei 7-42872 is a mover in the exhaust passage, and the expansion and contraction of the expansion and contraction disclosed in Japanese Patent Laid-Open No. Hei. The pipe pass is placed in the # zone. According to the above-mentioned prior art 3 201020435, the composition of the shell j is present when the gate is retracted or blocked, and the shutter or the telescopic tube is in contact with the exhaust gas to adhere to the impurity in the exhaust gas. [Inventive content] The purpose of this u is to learn from The advantages of related aspects, and provide a kind of direct space to ask for the use of the vacuum _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ During the transition of the state, impurities can be invaded and attached to the back chamber of the gate. The present invention provides a vacuum gate valve including: a body having an exhaust pipe portion in which an exhaust gas is formed at an end portion, a brake retreating portion having a brake retreat chamber, and retracting from the above to move to the exhaust pipe a portion that closes the exhaust port and is housed in the back room, causes the moving portion to move along the target cylinder, and provides: i the shutter member's and the shutter axis The miscellaneous sign is: V丨八付, the above system has a population formed on the side portion of the upper gas cylinder portion, and has the above-mentioned population to make up the above-mentioned population and to retreat to the backward movement in the above-mentioned a shutter moving portion of the shutter moving chamber that is separated from the blocking portion; the upper and lower chambers are connected to the shutter moving chamber and are provided in the shutter moving portion, and The above-mentioned inlet relative shape 201020435 of the shutter moving chamber has a fixed sealing portion; the shutter has a shutter sealing portion with the fixed sealing portion (4); the free line can be turned from the upper phase to the front chamber, and further From the shutter room to the above exhaust pipe Moving, and in the above-mentioned gate, a first gate sealing portion is formed on the surface of the first surface opposite to the fixed portion, and the shutter is sealed on the opposite side of the first gate sealing jaw from the shutter plate a second sealing portion is formed opposite to the portion; and the shielding (four) moves the shutter to move the chamber when the shutter is received in the gate retreating chamber, and the shutter sealing portion contacts the upper sealing portion And the opening of the shutter is caused by the opening of the shutter, and the shutter is moved by the first seal sealing portion when the first sealing seal is opened, and the shutter moving chamber is moved by the shutter sealing portion. The inlet is closed by coming into contact with the second gate seal. Further, the present invention provides a vacuum gate valve in which the above-mentioned fixed seal portion, j-shield seal portion, first seal portion, and second seal portion are attached to the longitudinal direction of the exhaust manifold portion. It is disposed on the same surface of the moving chamber of the above-mentioned shutter. In addition, 'the present invention provides a vacuum _, wherein the shutter sealing portion is formed by a shuttering, the template and the shutter are detachable from each other, and the exhaust pipe portion is attached to the inner circumferential surface. The cover having the _ shape and the outer periphery of the cover have a portion (four) plate (four) which is the displacement of the shutter, and the side of the shutter storage chamber is provided with the above-mentioned shutter-casting shutter along the shutter (four) chamber. The drive movable base 'the shutter drive piston is connected to the template, and the piston is driven along the exhaust cylinder portion by the shutter that operates along the exhaust cylinder portion. - 201020435 In addition, the present invention provides a vacuum shutoff in which the above-mentioned gate driving portion and the shutter driving portion are driven by a group driving source and a force-sensitive device, and have the above-mentioned opening and retreating to the gate When the room is retracted, the control device that controls the shutter is moved. In addition, the present invention provides a vacuum gate valve, wherein the intermediate receding portion is formed in a box shape from the body side and is formed into the body, and is detachable, and the gate is opened by using a swing gate. The receding portion and the shutter moving chamber are shaken. The present invention provides a vacuum _ _ _ method, which includes a body having a ❹, an exhaust pipe portion in which an end portion is formed with a Wei mouth, and a back-off having a _ shed. a shutter drive unit that moves from the brake recessed chamber to the exhaust pipe portion to close the exhaust port and receives the brake to retreat, and moves the gate, and is movable along the exhaust cylinder and disposed on the shutter a shutter driving unit for moving the shutter in the moving chamber; the system has an inlet formed on a side surface facing the exhaust tube portion, and is formed in the above-mentioned idle σ occlusion a shutter moving portion of the shutter moving chamber that is separated from the exhaust pipe portion by the gate to the opening and retreating chamber; and the idle receding chamber of the gate retreating portion is connected to the shutter moving chamber The shutter moving portion t is formed with a fixed sealing portion opposite to the inlet of the shutter moving chamber; 6 201020435, the upper portion is thinly opposed to the shutter surface, and the surface thereof is formed opposite to the fixed sealing portion In the above question, in the above question, on the opposite side of the first-to-seal portion, the above-mentioned shutter reading has a second _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ That is, in the above _ ❹ ❹ k绮, The above-mentioned shutter is turned into a t-piece, and the above-mentioned person σ is closed by the contact plate sealing portion contacting the fixed sealing portion, and the above-mentioned receding chamber moves to the shutter chamber in the #, t, and further from the shutter chamber to the above The movement is contacted with the fixed seal by the above-mentioned _: 3== the shutter moving chamber, and the inlet is closed by the shutter sealing portion contacting the first sealing portion. Further, the present invention provides a method of opening and closing between vacuum closings, wherein the fixing sealing portion, the shutter sealing portion, and the first sealing portion are formed;; in the longitudinal direction of the exhaust cylinder portion, The second = type moves the shutter moving chamber on the same side. [Embodiment] Hereinafter, an embodiment of the present invention will be described based on the drawings. According to the present invention, there is a moving chamber of the above-mentioned body and shutter, the shutter is called after being opened, and the exhaust port between the openings is closed, and the entrance of the shutter moving chamber can be closed, and when moving backwards and When the occlusion moves, it is isolated from the exhaust pipe section, and during the transition from the 201020435 state to the occlusion state and the self-county state to the state, it is possible to reduce the intrusion of impurities into the sluice chamber. [Embodiment] Fig. 1 is a top view of a vacuum of an embodiment of the present invention, Fig. 2 is a side view, and Fig. 3 is a bottom view. 2 is a cross-sectional view taken along line A_A of FIG. 3. In the figures, the vacuum gate valve 100 is constituted by the main body U and the brake receding portion 12, and the body U and the brake receding portion 12 are simultaneously formed in a box shape, and the two can be uncoupled from each other to form an integral two-ring-shaped ring 14. As shown in Fig. 1, the main body 1 is higher in height than the brake retreat portion 12, and in the case of the upper object, both of them are loose and round, and the central portion has a thicker shape. The main body U is provided with an exhaust pipe portion 15 in the center thereof, and faces the side portion of the exhaust pipe portion A, and a shutter is moved to 16 in a state in which the exhaust pipe portion 15 is closed. That is, the formation of the slab is provided around the side portion of the body U. The inside of the retreating portion 12 has a brake receding chamber 13 which is connected via the lung__ portion 15. The exhaust pipe portion 15 is formed in a cylindrical shape, and since the shutter to the center is formed in a shape similar to the periphery of the exhaust pipe portion 15, an inlet is formed around the side of the exhaust pipe portion 15 at 8'. An exhaust port brake is formed in the end portion (lower end portion, end portion) (the coffee has a size that can occlude the exhaust port 20, as described below, the exhaust cylinder 201020435 415 shutter moving chamber 16 and opening and retreating chamber (4) The plate is privately moved to the 16-cylindrical shutter 22 so as to be movable along the exhaust cylinder portion 15 in the longitudinal direction of the exhaust cylinder. Fig. 4 is a detailed structure of the figure. The structure of the moving chamber 16 and the shutter moving chamber 16
圖4中，本體u 33，各自之接著面中 箱體。 包括中央部材31、上部部材32及下部部材 配設有密封材而成為一體，整體上成為筒狀 材才方向’下部部材之内方向上藉由中央部 才3而形成有遮板移動室16。因此，中央部 下。W材33構成具有遮板移動室16之遮板移動部p。 於平^述’遮板移動室16係以允許閘21之擺狀旋轉之方式 於千面方向面向開後退室13形成逐漸擴大之室。 ❹口 20^1之排氣筒部15之壁面上圓筒狀的蓋％向下方之排氣 之方向延伸嵌入而黏著。 ^中央部材/1之内壁部形成有孔（h〇11〇W)，該孔之前面側以 二加以覆盘’形成有遮板收納室36，該遮板收納室％於其下 P與遮板移動室16連通成為遮板飾室16之-部分。因此， 遮板移動室16成為向遮板收納室36上方突出之形狀。 遮板收納室36中收納有遮板22。遮板收納室36之圖中，上 方向之長度與蓋35覆蓋孔之長度相等。遮板22可移動遮板收 9 201020435 納室36，且： 向上方移動時，避板遮板移動室％可向間21移動。遮板22 於中央部材3^ ^大部分可收納於遮板收納室36。 納室36設置有遮板 丨面1遮板收 環收納㈣、貫卿動部41包括圓筒心形 之上端所設置之=及0形環收納室43而配置之驅咖4 形環站及於驅動轴納室43所配設之〇 活塞45上麵與上巧1=設置之模板保持部47。於遮板駆動 自驅動源之轉，㈣1 端6之間的關42中導入有源 於_動活塞45 :使=而與0形環46 _相抗衡而作用 於遮心 使驅動軸44及模板保持部47向下方移動。 、’… 之下端部之壓側面固定有模板c密 板48係於左方端部安裝有模板保持部V並藉由t 48，該模 而保持及移動。伴产果板保持部47 下運動。伴㈣板48之移動，遽板22與其形成-體而上 « 成為密封面，該部分係於稱為遽板密封部 之上面與雜密封部49相對設置有q 包括該〇形環51在内稱為第二間密封部52。、’此處， 於間2!之相反側之面，即下面設置有其他〇形 包括該〇形環51在内稱為第―閉密封部54。 ’此處’ 叹置於下方梢33之排氣口 2Q之人口部 該閥座中著座有間21，<曰是十w 構成為間座’ ^遠考座部中設置有固定密封部，此 201020435 處’稱為固定密封部55。如上所述，於遮板移動部π中，应遮板 移動室16之人口 18相對形成有固定密封部沾。 0形環51及G形環53分別介在於遮板密封部* 封部52、第一閘密封部54盥固宏玄44加π 〇 一』山 "口疋在、封。卩55之間，發揮密封功能 及緩衝、減振功能。0形環51並非構成密封部之必需口。 如上所述’瞻封部55、遮板密封部49、第1 細部54 Ο 魯 及弟一閘密封部52於排氣筒部15之長度方向、於遮板移動室Μ 之内部配設於同一面⑷上。如上所述，遮板密封部49胖由 模板4_成，模板48及遮板22，進而模板仙及模板保持部 47係可互裝卸自由。如上所述，本體u中，於排氣筒部π之側 面部形成嫩街16，_，_職冑16與排氣筒部 15之間以閘21可移動之方式而連通’遮板移動室16之入口 18 成為連通部入口。因此，藉由本體11而形成之遮板移動部17中， 面向排氣筒㈣之_部频有人σ 18，並爾收納遮板^ 而可自排氣筒部15隔離的遮板移動室16。自該遮板Μ之排氣筒 部15隔_及藉由各密刪封及人口 18之遮板m之閉塞係於 δ亥遮板移動室16内逸杆。而曰 危4 一 ⑽订而且，遮板移動部17中’與遮板移動 室16之入π 18相對，於閥座上形成有固定密封部阳。而且，如 上所述，遮板22細與蚊㈣部55相對之方式於下端部具有 遮板密封部49。 士圖1所不本體u中，以圍住排氣筒部15之方式安裝有 201020435 螺检61 ’可將本體11固定於其他部材。此外，如圖3所示，本體 11中&置有用於知作閘a之閘及遮板操作部似。 圖5及圖6係砉+ 衣不由閘21引起的真空閥100之閘開閉狀態。 圖5 ίτ'表tf由閘21弓丨起之閥閉狀態，而且，圖6係表示由問2ι 引起的閥開狀‘⑮。其等之圖中，遮板移動室Μ係與閘後退室（3 連k閘21係以軸68為中心而擺狀旋轉遮板移動室π及閑後退 =匕即化成閥體旋轉。圖5係表示閘以於遮板移動室旋轉而閉 2排氣20之狀怨’圖6係表示閘2ι於遮板後退室^旋轉而開❹ 放排氣〇 2G，本身後退於遮板後退室以之狀態。 圖7係表不料岐遮板職/狀敝遮減作部62之構 成。 。圖7中’閘及遮板操作部62係包括：藉由配設於操作本體⑸ 操作本㈣内之致動器65、致動器65而被旋轉驅動之—群勤In Fig. 4, the bodies u 33 are in the respective upper faces of the case. The central member 31, the upper member 32, and the lower member are integrally provided with a sealing member, and the entire tubular member is formed in the direction of the inner portion of the lower member. The shutter moving chamber 16 is formed by the central portion 3. Therefore, the central department. The W material 33 constitutes a shutter moving portion p having a shutter moving chamber 16. In the flat panel, the shutter moving chamber 16 forms a gradually enlarged chamber facing the opening and receding chamber 13 in a manner of allowing the swing of the shutter 21 to rotate. The cylindrical cover on the wall surface of the exhaust pipe portion 15 of the mouth 20^1 is inserted and adhered in the direction of the exhaust gas below. ^The inner wall portion of the central member/1 is formed with a hole (h〇11〇W), and the front side of the hole is covered with two sheets to form a shutter storage chamber 36, and the shutter storage chamber is placed under the cover P and the cover. The plate moving chamber 16 is connected to become a portion of the shutter trim chamber 16. Therefore, the shutter moving chamber 16 has a shape that protrudes above the shutter storage chamber 36. A shutter 22 is housed in the shutter storage chamber 36. In the diagram of the shutter accommodation chamber 36, the length in the upper direction is equal to the length of the cover 35 covering the hole. The shutter 22 can move the shutter to receive the 201020435 chamber 36, and: When moving upward, the shield shutter moving chamber % can move toward the room 21. The shutter 22 is mostly housed in the shutter housing chamber 36 in the center member 3^. The chamber 36 is provided with a shutter surface 1 and a shutter housing (four), and the tunnel portion 41 includes a ring-shaped four-ring ring station disposed on the upper end of the cylindrical heart shape and the 0-ring storage chamber 43 The top surface of the helium piston 45 disposed on the drive shaft chamber 43 is provided with a template holding portion 47. In the rotation of the shutter from the driving source, (4) the opening 42 between the 1 end 6 is introduced into the active piston 45: so that it is counterbalanced with the 0-shaped ring 46 _ to act on the center of the drive shaft 44 and the template The holding portion 47 moves downward. The lower side of the lower end portion is fixed with a template c-bonding plate 48 attached to the left end portion with the template holding portion V and held and moved by t 48. The accompanying fruit board holding portion 47 moves. With the movement of the (four) plate 48, the sill plate 22 forms a body-up surface and becomes a sealing surface which is disposed on the upper surface of the stencil sealing portion opposite to the miscellaneous sealing portion 49, including the 〇-shaped ring 51. It is called a second seal portion 52. Here, the surface on the opposite side of the middle 2!, that is, the other side shape including the 〇-shaped sealing portion 54 is included. 'Here' sighs the venting port of the lower tip 33 of the population section 2Q. There is a seat 21 in the seat. <曰 is ten w. It is a seat. ^There is a fixed seal in the seat. This 201020435 is referred to as a fixed seal 55. As described above, in the shutter moving portion π, the population 18 of the shutter moving chamber 16 is formed with a fixed seal portion. The 0-ring 51 and the G-ring 53 are respectively disposed in the shutter sealing portion * the sealing portion 52, the first gate sealing portion 54, the sturdy macro Xuan 44 plus π 〇 a "mountain", and the mouth is sealed. Between 55 and 55, it functions as a sealing function and cushioning and vibration damping. The O-ring 51 is not a necessary port for the sealing portion. As described above, the "sealing portion 55, the shutter sealing portion 49, and the first thin portion 54" and the first gate sealing portion 52 are disposed in the same direction in the longitudinal direction of the exhaust tube portion 15 in the shutter moving chamber On the face (4). As described above, the shutter sealing portion 49 is formed by the template 4, the template 48 and the shutter 22, and the template and the template holding portion 47 are detachable from each other. As described above, in the body u, the side portion of the exhaust pipe portion π is formed as a side street, and the _, _ occupation 16 and the exhaust pipe portion 15 are connected to each other in a manner that the gate 21 is movable. The entrance 18 of 16 becomes the entrance of the communication section. Therefore, in the shutter moving portion 17 formed by the main body 11, the visor moving chamber 16 which is separated from the exhaust cylinder portion 15 by the slewing portion facing the exhaust cylinder (four) . The venting of the ventilating portion 15 of the slats and the occlusion of the shutters of the population 18 are slid into the sliding movement chamber 16 of the δ. In addition, the shutter moving portion 17 is opposed to the entrance π 18 of the shutter moving chamber 16, and a fixed seal portion is formed on the valve seat. Further, as described above, the shutter 22 is thinner than the mosquito (four) portion 55 so as to have a shutter sealing portion 49 at the lower end portion. In the body u of Fig. 1, a 201020435 screw test 61' is attached to surround the exhaust pipe portion 15, and the body 11 can be fixed to other members. Further, as shown in Fig. 3, the body 11 is provided with a gate for knowing the gate a and a shutter operation portion. Fig. 5 and Fig. 6 show the state in which the vacuum valve 100 is opened and closed by the gate 21 without the brake 21. Fig. 5 ίτ' table tf is closed by the gate 21, and Fig. 6 shows the valve opening '15 caused by the question 2ι. In the figure, the shutter moving chamber and the brake retreat chamber (3 connected k gate 21 is centered on the shaft 68 and swings the rotating shutter movement chamber π and idle back = 匕 to form the valve body rotation. Figure 5 It means that the gate is rotated by the shutter moving chamber and the 2 exhaust gas 20 is closed. Figure 6 shows that the brake 2 is rotated in the shutter and the chamber is rotated. The exhaust gas is exhausted 2G, and it is retracted from the shutter back chamber. Fig. 7 is a view showing the configuration of the shutter/coverage preventing portion 62. The gate and shutter operating portion 62 of Fig. 7 includes: by being disposed in the operating body (5), operating the fourth (4) The actuator 65 and the actuator 65 are rotationally driven
66 67 ’藉由固定旋轉之齒輪6了而旋麵作之車由68，藉由插動, 轉之窗輪66而被_操作之空氣切脉_，如軸之空^ 換杠杆69而被操作之空氣切換閥7〇、71及空氣切換間7〇 ; 出空氣之空氣室72。 ] 猎由所供應之空氣而操作致動器65並使操作齒輪群66、 旋轉。 、 …伴隨於此’軸68旋轉，並使固定於軸68之閘2ι擺狀 攸而形成圖5、圖6所示之狀態。該情形時，藉由揺動之齒輪66 12 201020435 而使空氣切關70、71之域娜。如上所麟絲驅動力切換 I置。於供應空氣時’可設置不僅實行上述機械的控制，而且實 行矛王序控制（私式化af异機控制等）之控制裝置。 ' 經切換之空氣自空氣室72導入圓筒42之上方部、下方部， 分別作用於遮板驅動用活塞45，以與閘21之旋轉連動之形式，使 遮板22上下勒。如上所述’職__及遮板鶴部之一部 分’本例之情形係使用有-組空氣驅動源。亦可藉由其他驅動源 來驅動間驅動部及遮板驅動部。 圖5-圖7係表示擺類型之開21 (排架輕類型間）之例，使用 可直線狀機之閘，使與該直驗義之閘之移動軸之遮板22 上下運動。 圖8係表示閘21與遮板22之連動狀態之圖。圖8⑴係表 示閘21位於與排氣口 20相對之位置，遮板&向下方端移動= 遮板密封部49與固定密封部55接觸之狀態，圖δ⑵係表示藉 由向圓筒42導入切換空氣，遮板驅動活塞45向上方移動，且遮 板22收納於遮板收納室36之狀態，而開21變得可後退，圖8⑶ 係表示藉由軸68之旋轉，閘21自排氣筒15經由轴移動室Μ而 後退於閘後退室13之狀態，圖8 (4)係表示間21後退於閑後退 至13時’經切換之空氣導人至圓筒犯，遮板&向下方運動到達 最下點，遮板部49與固定密封部55接觸之狀態。如上所述，問 21與遮板22向對角線方向移動。再者，其等之圖係表示㈣及 13 201020435 遮板22作動之圖，只是密封環48之比例，並非正確地表示密封 情況者。 圖9係表示自閥閉塞（CLOSE)至開放（OPEN)之順序圖。 圖9 (1)係表示閥閉之狀態。該狀態中閘21之第—閘之密封 部54與固定密封部55接觸而閉塞閘21之排氣口 20,遮板密封部 49與第一閘松封部52接觸，且遮板22與閘一起閉塞遮板移動室 16之入口 18之狀態。藉此而防止自製程腔體（process chambe]f) 飛揚之雜質（depot)介由入口 18浸入閘後退室13。 ⑬ 圖9 (2)係表示為了閘21向閘後退室13後退，遮板22向上 運動之狀態。該狀態中，空氣經切換，遮板22係收納於遮板收納 室36内，排氣筒部15、遮板移動室16及閘後退室13相連通。 圖9 (3)係表示閘21後退於閘後退室13之狀態。 圖9 (4)係表示於閘21後退於閘後退室13之狀態下，空氣 經切換，收納於遮板收納室36之遮板22向下運動，並到達下端， 遮板岔封部49與固定密封部55接觸，遮板22單獨閉塞入口 18。❹ 該狀態下閥變成開放狀態。 圖10係表示自閥開放至閥閉塞之順序圖。步驟與圖9所示之 順序相反。 圖10 (1)係與圖9 (4)相似，表示閘21後退於閘後退室13， 遮板22單獨閉塞入口 18之狀態。該情形時，遮板密封部49係與 固定密封部55接觸。 14 201020435 圖10 (2)係與圖9 (3)相似，表示為了移動閘21，遮板22 向上運動並收納於遮板收納室36之狀態。如上所述閘後退室13、 遮板移動室16及排氣筒部15相連通。 圖10 (3)係與圖9 (2)相似，表示移動與閘21連通之閘後 退室13、遮板移動室16及排氣筒部15，於排氣口 20之上方移動 之狀態。 圖10 (4)係與圖9 (1)相似，於排氣口 20之上方存在之閘 • 21向下運動，第一閘密封部54與固定密封部55接觸，閘31移動 至排氣口 20，與空氣被切換，閉塞排氣口 2〇之同時，遮板泣向 下運動，遮板密封部49與第二閘密封部52接觸，遮板22與閘21 一起閉塞入口 18。該狀態係閥閉狀態。 如上所述，遮板22係於閘21收納於閘後退室13時，使遮板 移動室16移動，藉由遮板密封部49與固定密封部55接觸而閉塞 入口 18，且於閘21使遮板移動室16移動，藉由第一閘密封部％ © ” □定4封55接觸而閉塞排氣口 2G時，使遮板移動室16移動， 藉由遮板密封部與第二閘密封部52接觸而閉塞入口 18。 ;X隋幵/^·，固疋检封部55、遮板密封部49、第一閘密封部 …閘在封邛54係於排氣筒部15之長度方向，與固定密封 4 55=對之方式於同—面⑷上移動遮板移動室w。 —;閘21使排氣口 2〇處於開狀態時，遮板密封部係與固定 密封部55接觸，固定穷封部 ^ U疋*封。卩55可防止於排氣口暴露，並可防止 201020435 雜質附著於固定密封部55。於閘21使排氣口處於閉狀態時，第一 閘禮封部53係與固定密封部55接觸，且遮板密封部49與第二閘 密封部52接觸，藉此而閉塞入口 18,可防止雜質浸入附著於閘後 退至13。遮板22係於構成遮板移動室16之一部分的遮板收納室 16上，於閘21移動時及閘21閉塞排氣口 20時，可防止經收納之 雜質附著於遮板22。如上所述，遮板22係具有使形成之遮板移動 室16上下運動，於遮板室16内防止雜質浸入閘後退室的功能。 而且，於閘21閉塞排氣口 20時，各密封部係配設於遮板移動室 16内與上下方向相同的垂直線上，確侧塞，從而有效地防止附 著雜質。 【圖式簡單說明】 圖1係本發明之實施例之頂視圖。 圖2係本發明之實施例之側面剖面圖（圖3之η剖面圖）。 圖3係本發明之實施例之底視圖。 圖4係圖2之一部分之詳細圖。 圖5係表示閘之旋轉狀況之圖。 圖6係表示閘之旋轉狀況（2)之圖。 圖7係閘及遮板操作部之構成圖。 圖8係說明閘及遮板移動之圖。 圖9係麵自關塞至咖放讀態之圖。 201020435 圖ίο係自閥開放至閥閉塞之狀態之圖。66 67 'With the fixed rotating gear 6 and the rotating surface of the car 68, by the insertion, turning the window wheel 66 and being operated by the air pulse _, such as the shaft empty ^ change lever 69 The air switching valves 7〇, 71 and the air switching chamber 7〇; the air chamber 72 for the air. The hunter operates the actuator 65 by the supplied air and rotates the operating gear group 66. With the rotation of the shaft 68, the brakes 2 fixed to the shaft 68 are swung to form the state shown in Figs. 5 and 6 . In this case, the air is cut off by 70, 2010 by the swaying gear 66 12 201020435. As shown above, the driving force of the wire is switched. In the case of supplying air, it is possible to provide a control device that not only performs the above-described mechanical control but also performs spear control (private afron control, etc.). The switched air is introduced into the upper portion and the lower portion of the cylinder 42 from the air chamber 72, and acts on the shutter driving piston 45, respectively, so that the shutter 22 is pulled up and down in conjunction with the rotation of the shutter 21. As described above, the "employment __ and one part of the sloping crane" is a case where a group-air drive source is used. The inter-drive unit and the shutter drive unit can also be driven by other drive sources. Fig. 5 - Fig. 7 show an example of the opening type 21 of the pendulum type (between the light type of the rack), and the shutter of the linear axis is used to move the shutter 22 of the moving shaft of the straightforward gate up and down. Fig. 8 is a view showing a state in which the shutter 21 and the shutter 22 are interlocked. Fig. 8 (1) shows that the shutter 21 is located at a position opposed to the exhaust port 20, and the shutter & moves to the lower end = the state in which the shutter sealing portion 49 is in contact with the fixed seal portion 55, and Fig. δ(2) shows the introduction into the cylinder 42 When the air is switched, the shutter drive piston 45 moves upward, and the shutter 22 is accommodated in the shutter storage chamber 36, and the opening 21 is retracted. Fig. 8(3) shows the brake 21 self-venting by the rotation of the shaft 68. The cylinder 15 moves back to the brake recoil chamber 13 via the shaft movement chamber, and Fig. 8 (4) shows that the space 21 is retracted to idle and retreats to 13 when the 'switched air leads to the cylinder, the shutter & The lower movement reaches the lowermost point, and the shutter portion 49 is in contact with the fixed seal portion 55. As described above, the question 21 and the shutter 22 are moved in the diagonal direction. Further, the drawings thereof indicate (4) and 13 201020435 that the shutter 22 is actuated, but the ratio of the seal ring 48 is not the correct representation of the seal. Figure 9 is a sequence diagram showing the valve occlusion (CLOSE) to the opening (OPEN). Fig. 9 (1) shows the state of the valve closing. In this state, the first gate sealing portion 54 of the gate 21 is in contact with the fixed sealing portion 55 to close the exhaust port 20 of the gate 21, the shutter sealing portion 49 is in contact with the first gate releasing portion 52, and the shutter 22 and the shutter are closed. Together, the state of the inlet 18 of the shutter moving chamber 16 is closed. Thereby, the depot of the self-made process cavity is prevented from being immersed in the gate retreat chamber 13 through the inlet 18. 13 (2) shows a state in which the shutter 22 is moved upward for the gate 21 to retreat toward the brake recessing chamber 13. In this state, the air is switched, and the shutter 22 is housed in the shutter accommodation chamber 36, and the exhaust cylinder portion 15, the shutter moving chamber 16, and the brake recess chamber 13 communicate with each other. Fig. 9 (3) shows a state in which the gate 21 is retreated to the gate retreating chamber 13. Fig. 9 (4) shows that in a state where the brake 21 is retreated to the brake retreat chamber 13, the air is switched, and the shutter 22 accommodated in the shutter storage chamber 36 moves downward and reaches the lower end, and the shutter sealing portion 49 is The fixed seal 55 is in contact and the shutter 22 individually occludes the inlet 18.阀门 The valve becomes open in this state. Figure 10 is a sequence diagram showing the opening from the valve to the valve closing. The steps are the reverse of the order shown in FIG. Fig. 10 (1) is similar to Fig. 9 (4), showing that the shutter 21 is retracted from the brake retreat chamber 13, and the shutter 22 is slid in the state of the inlet 18 alone. In this case, the shutter sealing portion 49 is in contact with the fixed sealing portion 55. 14 201020435 Fig. 10 (2) is similar to Fig. 9 (3), and shows a state in which the shutter 22 is moved upward and accommodated in the shutter accommodation chamber 36 in order to move the shutter 21. As described above, the brake retreating chamber 13, the shutter moving chamber 16, and the exhaust cylinder portion 15 are in communication. Fig. 10 (3) is similar to Fig. 9 (2), and shows a state in which the sluice chamber 13, the shutter moving chamber 16, and the exhaust cylinder portion 15 which are in communication with the gate 21 are moved above the exhaust port 20. Fig. 10 (4) is similar to Fig. 9 (1). The gate 21 existing above the exhaust port 20 moves downward, the first gate seal portion 54 is in contact with the fixed seal portion 55, and the gate 31 is moved to the exhaust port. 20. When the air is switched, the exhaust port 2 is closed, the shutter is moved downward, the shutter seal portion 49 is in contact with the second gate seal portion 52, and the shutter 22 closes the inlet 18 together with the gate 21. This state is a valve closed state. As described above, when the shutter 21 is housed in the brake recess chamber 13, the shutter moving chamber 16 is moved, and the shutter seal portion 49 is in contact with the fixed seal portion 55 to close the inlet 18, and the shutter 21 is closed. When the shutter moving chamber 16 moves, the shutter moving chamber 16 is moved by the first gate seal portion % © ” when the four seals 55 are in contact to close the exhaust port 2G, and the shutter seal portion and the second gate are sealed. The portion 52 contacts and closes the inlet 18. X隋幵/^·, the solid seal sealing portion 55, the shutter sealing portion 49, the first gate seal portion, and the like, the seal 54 is attached to the length of the exhaust cylinder portion 15 And the fixed seal 4 55=the way to move the shutter moving chamber w on the same plane (4). When the brake 21 makes the exhaust port 2〇 open, the shutter sealing portion is in contact with the fixed sealing portion 55. The fixed seal part ^ U疋* seal. The 卩55 can prevent the exhaust port from being exposed, and can prevent the 201020435 impurity from adhering to the fixed seal portion 55. When the brake port is closed, the first brake seal portion is closed. The 53 series is in contact with the fixed sealing portion 55, and the shutter sealing portion 49 is in contact with the second gate sealing portion 52, thereby blocking the inlet 18 to prevent impurity immersion The shutter 22 is attached to the shutter and is retracted to 13. The shutter 22 is attached to the shutter housing chamber 16 which is a part of the shutter moving chamber 16. When the shutter 21 moves and the shutter 21 closes the exhaust port 20, the stored impurities are prevented from adhering. In the shutter 22, as described above, the shutter 22 has a function of moving the formed shutter moving chamber 16 up and down to prevent impurities from entering the gate back chamber in the shutter chamber 16. Further, when the shutter 21 closes the exhaust port 20 Each sealing portion is disposed on the same vertical line as the vertical direction in the shutter moving chamber 16, and the side plug is ensured to effectively prevent adhesion of impurities. [Fig. 1] Fig. 1 is a top view of an embodiment of the present invention Figure 2 is a side cross-sectional view of the embodiment of the present invention (n-sectional view of Figure 3). Figure 3 is a bottom view of an embodiment of the present invention. Figure 4 is a detailed view of a portion of Figure 2. Figure 5 is a schematic view of the gate. Fig. 6 is a view showing a state of rotation of the brake (2). Fig. 7 is a view showing a configuration of a shutter and a shutter operation portion. Fig. 8 is a view showing a movement of the shutter and the shutter. Closed to the map of the coffee reading. 201020435 Figure ίο from valve opening to valve occlusion The map of the state.
【主要元件符號說明】 11 本體 12 閘後退部 13 閘後退室 14 0形環 15 排氣筒部 16 遮板移動室 17 遮板移動部 18 入口 20 排氣口 21 閘 22 遮板 31 閘 32 上部部材 33 下部部材 35 蓋 36 遮板收納室 41 遮板驅動部 42 圓筒 43 0形環收納室 44 驅動軸 46 0形環 47 模板保持部 48 模板 49 遮板密封部 51 0形環 52 第二閘密封部 53 0形環 54 第一閘密封部 55 固定密封部 61 螺栓 62 遮板操作部 65 致動器 66 齒輪 67 齒輪 68 軸 69 杠杆 17 201020435 70切換閥 72空氣室 71切換閥 100 真空閘閥[Description of main component symbols] 11 Main body 12 Brake retreat 13 Brake retreat chamber 14 O-ring 15 Exhaust cylinder part 16 Shutter moving chamber 17 Shutter moving part 18 Inlet 20 Exhaust port 21 Gate 22 Shutter 31 Gate 32 Upper Member 33 Lower member 35 Cover 36 Shutter storage chamber 41 Shutter drive unit 42 Cylinder 43 O-ring accommodation chamber 44 Drive shaft 46 O-ring 47 Template holder 48 Template 49 Shutter seal 51 O-ring 52 Second Brake seal 53 53 ring 54 first gate seal 55 fixed seal 61 bolt 62 shutter operation 65 actuator 66 gear 67 gear 68 shaft 69 lever 17 201020435 70 switching valve 72 air chamber 71 switching valve 100 vacuum gate valve
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