TWI316997B - Vacuum gate valve - Google Patents
Vacuum gate valve Download PDFInfo
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- TWI316997B TWI316997B TW93107270A TW93107270A TWI316997B TW I316997 B TWI316997 B TW I316997B TW 93107270 A TW93107270 A TW 93107270A TW 93107270 A TW93107270 A TW 93107270A TW I316997 B TWI316997 B TW I316997B
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- 238000007789 sealing Methods 0.000 claims description 41
- 230000007704 transition Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 210000002858 crystal cell Anatomy 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
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Description
T316997 / 五、發明說明(1) 【發明所屬之技術領域】 本發明係關於一種閘閥,特別是有關於一種一閥板以 關閉一開口的真空閘閥。 【先前技術】 在先前技術裡,已知被用來關閉在容器或管道裡的開 口的真空閘閥有許多實施方式。L型真空閘閥主要被用在 I C及半導體製造裡,此類製造須在受保護的環境裡發生, 以盡可能地排除污染性顆粒的出現。舉例而言,在半導體 或液晶元件的製造單元裡,高敏感性半導體或液晶元件通 過若干製造室,每個製造室透過通道連到下個製造室,通 道藉真空閘閥開啟,以致零件能從一製造室被送到下一製 造室,並再氣密地被關閉,以致下一製造步驟能進行。 第1 a、1 b及1 c圖顯示一種先前技術的真空閘閥,但不 注重比例。第1 a圖顯示真空閘閥在它的開啟的位置。真空 閘閥包括一個如圖所示,該真空閘閥有一閥殼1 ,閥殼1有 壁2 ,壁2有一開口 3,開口 3可被關閉。一閥座4 (被做成平 面或錐面)環繞開口 3,有或無密封件。如第1 a圖所示,在 真空閘閥的開啟的原始的位置,一閥板5在開口 3旁,靠近 壁2 ,閥板5的形狀(特定地是矩形)重疊開口 3,以致開口 3 能整個被閥板5的密封面7關閉。閥板5被設在一閥桿8,閥 桿8定義一閥桿軸線1 1。可用二平行閥桿取代單一閥桿8。 以下將更詳細討論把閥板5連到閥桿8的方式。如第lb及第 1 c圖所示,藉控制元件1 0,能沿兩個自由度控制閥桿8,BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a gate valve, and more particularly to a valve plate for closing an opening. [Prior Art] In the prior art, there are many embodiments of vacuum gate valves known to be used to close an opening in a container or pipe. L-type vacuum gate valves are primarily used in I C and semiconductor manufacturing. Such fabrication must occur in a protected environment to minimize the presence of contaminating particles. For example, in a semiconductor or liquid crystal cell manufacturing unit, a high-sensitivity semiconductor or liquid crystal cell passes through a plurality of manufacturing chambers, each of which is connected to a next manufacturing chamber through a passage, and the passage is opened by a vacuum gate valve, so that the parts can be removed from one The manufacturing chamber is sent to the next manufacturing chamber and is then hermetically closed so that the next manufacturing step can proceed. Figures 1 a, 1 b and 1 c show a prior art vacuum gate valve, but not to scale. Figure 1 a shows the vacuum gate valve in its open position. The vacuum gate valve includes a valve housing 1 having a valve housing 1 having a wall 2 and an opening 3 for opening 3. The opening 3 can be closed. A valve seat 4 (made as a flat or tapered surface) surrounds the opening 3 with or without a seal. As shown in Fig. 1a, in the original position where the vacuum gate valve is opened, a valve plate 5 is adjacent to the opening 3, adjacent to the wall 2, and the shape of the valve plate 5 (specifically rectangular) overlaps the opening 3 so that the opening 3 can The entire sealing surface 7 of the valve plate 5 is closed. The valve plate 5 is provided on a valve stem 8 which defines a valve stem axis 11 . Instead of a single valve stem 8, a two parallel valve stem can be used. The manner in which the valve plate 5 is attached to the valve stem 8 will be discussed in more detail below. As shown in Figures lb and 1c, the valve stem 8 can be controlled in two degrees of freedom by means of the control element 10,
第5頁 1316997_ 五、發明說明(2) 例如藉一液壓及轉環單元。更特定地,閥桿8能沿閥桿轴 線1 1線性移動,並能在一垂直於壁2的平面裡轉。 在下兩步驟關閉開口 3。第一步驟發生在第1 a及1 b圖 所示的兩個情況之間,在第一步驟,如箭頭2 8 a及2 8 b所示 ,藉控制元件1 0使閥桿8沿閥桿軸線1 1延伸,以致閥板5沿 大致平行於壁2的路徑橫越開口 3,同時避免閥板5接觸閥 殼1的壁2或閥座4。 第二步驟發生在第1 b及1 c圖所示的兩個情況之間,在 第二步驟,如箭頭2 8 c所示,藉控制元件1 0使閥桿8轉向壁 2 ,以致閥板5的密封面7 (可能支持一密封環)壓住閥座4並 緊緊關閉開口 3 ,若是可能,則是氣密地。舉例而言,要 密封,可用設在閥板5的密封面7上並壓住環繞開口 3的閥 座4的密封環,或用設在閥座4上而被閥板5的密封面7壓住 的密封環。藉閥座4,吾人瞭解,閥板5的密封面7壓住壁2 的相反面,並因此實現密封。 從先前技術(例如U S 6 6 2 9 6 8 2 B 2 )已知不同密封設備。 舉例而言,以V i t ο n R為商品名的彈性密封材料是密封環的 適當材料。考慮以兩步驟發生的關閉作業,密封環幾乎不 受任何可能摧毀它的剪力,因閥桿8的轉動使閥板5大致垂 直於閥座4移動。從先前技術已知各種控制元件1 0,每一 種可能造成閥桿8及閥板5的稍微不同的控制方向。因此,Page 5 1316997_ V. Description of the invention (2) For example, a hydraulic and swivel unit. More specifically, the valve stem 8 is linearly movable along the stem axis 1 1 and is rotatable in a plane perpendicular to the wall 2. Close the opening 3 in the next two steps. The first step occurs between the two cases shown in Figures 1 a and 1 b. In the first step, as indicated by arrows 2 8 a and 2 8 b, the valve stem 8 is brought along the valve stem by the control element 10 The axis 1 1 extends such that the valve plate 5 traverses the opening 3 along a path substantially parallel to the wall 2 while avoiding the valve plate 5 contacting the wall 2 of the valve housing 1 or the valve seat 4. The second step occurs between the two cases shown in Figures 1 b and 1 c. In the second step, as indicated by the arrow 2 8 c, the valve stem 8 is deflected by the control element 10 to the wall 2, so that the valve plate The sealing surface 7 of 5 (possibly supporting a sealing ring) presses against the valve seat 4 and closes the opening 3 tightly, if possible, airtightly. For example, to be sealed, it may be provided on the sealing surface 7 of the valve plate 5 and pressed against the sealing ring of the valve seat 4 surrounding the opening 3, or by the sealing surface 7 of the valve plate 5 provided on the valve seat 4. The sealing ring that lives. By means of the valve seat 4, it is understood that the sealing surface 7 of the valve plate 5 presses against the opposite side of the wall 2 and thus achieves a seal. Different sealing devices are known from prior art (for example U S 6 6 2 9 6 8 2 B 2 ). For example, an elastomeric sealing material having the trade name V i t ο n R is a suitable material for the sealing ring. Considering the closing operation occurring in two steps, the sealing ring is hardly subjected to any shearing force which may destroy it, and the valve plate 5 is moved substantially perpendicularly to the valve seat 4 due to the rotation of the valve stem 8. Various control elements 10 are known from the prior art, each of which may result in a slightly different control direction of the valve stem 8 and the valve plate 5. therefore,
可啟用垂直於壁2的閥板5的絕對線性移動,以取代從閥板 5向閥座4的弧形轉動路徑。上述類型的真空閘閥有各式實 施例,例如美國專利 6 4 3 1 5 1 8 Β 1 、5 4 1 5 3 7 6 A、5 6 4 1 1 4 9 AThe absolute linear movement of the valve plate 5 perpendicular to the wall 2 can be enabled to replace the arcuate rotational path from the valve plate 5 to the valve seat 4. There are various embodiments of vacuum gate valves of the above type, such as U.S. Patent 6 4 3 1 5 1 8 Β 1 , 5 4 1 5 3 7 6 A, 5 6 4 1 1 4 9 A
1316997 五、發明說明(3) > 6 0 4 5 1 1 7 A ' 5 9 3 4 6 4 6 A ' 5 7 5 5 2 5 5 A ' 6 0 8 2 7 0 6、 6095180 及6629682 B2 °1316997 V. INSTRUCTIONS (3) > 6 0 4 5 1 1 7 A ' 5 9 3 4 6 4 6 A ' 5 7 5 5 2 5 5 A ' 6 0 8 2 7 0 6 , 6095180 and 6627682 B2 °
在先前技術中看見的一特定問題是閥板5與閥殼1的對 齊。應觀察到,在一方面,在使閥板5橫越開口 3的第一 步,應避免密封面7接觸壁2或閥座4,因這接觸可能導致 密封面或密封環的損壞。此外,在第二步(施壓),閥板5 須準確對齊閥座4,否則閥板5的密封面7不會到達在閥座4 上的準確位置。在施壓時,密封面7的平面平行於閥座4的 平面是重要的,特別是在用長閥板5時,否則將沿閥座4不 均勻地施壓於密封面7,這在一方面造成不足緊密並在另 一方面導致密封材料的損壞。此外,閥板5及閥桿8可能受 彎折力及扭轉力。為此,從先前技術已知的控制元件大多 有適當控制機構以準確對齊閥桿8並因此對準確對齊閥板 5 ° 舉例而言,把閥桿8的一連接部9導入閥板5的一承接 部6 ,形成閥桿8與閥板5的相連。固定方式有許多,例如 美國專利6068180及6619618所述者,藉著至少一根從密封 面的反面伸出的螺栓。A particular problem seen in the prior art is the alignment of the valve plate 5 with the valve housing 1. It should be observed that, on the one hand, in the first step of traversing the valve plate 5 across the opening 3, the sealing surface 7 should be prevented from contacting the wall 2 or the valve seat 4, as this contact may result in damage to the sealing surface or the sealing ring. Further, in the second step (pressure application), the valve plate 5 must be accurately aligned with the valve seat 4, otherwise the sealing surface 7 of the valve plate 5 does not reach the exact position on the valve seat 4. When applying pressure, it is important that the plane of the sealing surface 7 is parallel to the plane of the valve seat 4, in particular when the long valve plate 5 is used, otherwise it will be unevenly pressed against the sealing surface 7 along the valve seat 4, The aspect causes insufficient tightness and on the other hand causes damage to the sealing material. Further, the valve plate 5 and the valve stem 8 may be subjected to bending and torsion forces. For this purpose, most of the control elements known from the prior art have suitable control mechanisms for accurately aligning the valve stem 8 and thus for accurately aligning the valve plate 5°. For example, a connection 9 of the valve stem 8 is introduced into one of the valve plates 5 The receiving portion 6 forms a connection between the valve stem 8 and the valve plate 5. There are a number of fastening methods, such as those described in U.S. Patent Nos. 6,068,180 and 6,,,,,,,,,,,,,,,,
在美國專利6 6 1 9 6 1 8裡,一真空閘閥有一閥板,閥板 有不均勻壁厚,亦即中間比兩旁更厚。在中間(厚壁區), 有一半圓形承接部以承接一閥桿,在承接部與密封面之間 的壁厚大於在承接部與密封面的反面之間的壁厚。閥桿在 其端有一連接部,它也是半圓形,並被導作承接部。一根 螺栓從密封面的反面鎖入而把閥板固定至閥桿。以上述之In U.S. Patent 6 6 1 9 6 18, a vacuum gate valve has a valve plate having a non-uniform wall thickness, i.e., the center is thicker than both sides. In the middle (thick-walled area), there is a semi-circular receiving portion to receive a valve stem, and the wall thickness between the receiving portion and the sealing surface is greater than the wall thickness between the receiving portion and the opposite surface of the sealing surface. The valve stem has a connection at its end which is also semi-circular and is guided as a receiving portion. A bolt is locked from the opposite side of the sealing surface to secure the valve plate to the valve stem. In the above
第7頁 1316997 五、發明說明(4) 閥板、承接部及連接部的設計,意圖在閥板被壓在閥座時 避免閥板(特別是長閥板的兩旁)過度彎曲,卻不需要比一 根更多的轴或更厚的閥板。 在特定時期,閥板應受控制或維修,特別是檢查或更 換密封環,以確保真空閘閥持續緊密。以從先前技術已知 的真空閘閥,難拆、裝閥板,因須從閥板的數側介入,方 能從閥桿拆卸閥板,鬆開安裝螺栓並把閥板從閥桿取走尤 其是難。因處理閥板的不良人體工學可能性,尚無安全拆 卸能不損壞閥板或閥殼(特別是閥座)。Page 7 1316997 V. INSTRUCTIONS (4) The design of the valve plate, the receiving portion and the connecting portion is intended to prevent excessive bending of the valve plate (especially on both sides of the long valve plate) when the valve plate is pressed against the valve seat, but does not need More than one shaft or a thicker valve plate. At certain times, the valve plate should be controlled or repaired, especially to check or replace the seal ring to ensure that the vacuum gate valve remains tight. With the vacuum gate valve known from the prior art, it is difficult to disassemble and install the valve plate, and the valve plate can be removed from the valve stem by removing the valve plate from the valve shaft, and the mounting bolt is removed and the valve plate is removed from the valve stem. It is difficult. Due to the poor ergonomics of the valve plate, there is no safe disassembly to damage the valve plate or the valve housing (especially the valve seat).
【發明内容】 本發明的主要目的是提供一種真空閘閥,此真空閘閥 係為在閥桿與閥板之間有連接,以提供一轉動能力,使閥 板在閥桿軸線的周圍的對齊能適應閥座之種類,有高可靠 性、簡化的處理及維修及簡單的零件設計。 本發明的次要目的係在於一環形轴承部,設置於該承 接部及該連接部,它允許該閥板相對該閥桿繞該閥桿軸線 至少部分轉動,以致至少在該閥板第一次被壓在該閥座時 ,該閥板繞該閥桿轴線的對齊會適應該閥座。SUMMARY OF THE INVENTION A primary object of the present invention is to provide a vacuum gate valve having a connection between a valve stem and a valve plate to provide a rotational capability for adapting the alignment of the valve plate around the axis of the valve stem. The type of seat has high reliability, simplified handling and maintenance, and simple part design. A secondary object of the present invention is an annular bearing portion disposed at the receiving portion and the connecting portion that allows the valve plate to at least partially rotate relative to the valve stem about the stem axis such that at least the valve plate is firstly When pressed against the valve seat, the alignment of the valve plate about the stem axis will accommodate the valve seat.
本發明的又一目的係在於一限制部,設置於該承接部 及該連接部,它把該環形軸承部所允許的轉動限制到一角 範圍,以致該閥板橫越該開口時,該閥殼不接觸該閥板。 本發明所依據的構想是提供一種真空閘閥,在閥桿與 閥板之間有連接部,以提供一轉動能力,使閥板在閥桿軸Still another object of the present invention is to provide a restricting portion disposed at the receiving portion and the connecting portion, which limits the rotation allowed by the annular bearing portion to an angular range such that the valve plate traverses the opening, the valve housing Do not touch the valve plate. The invention is based on the idea of providing a vacuum gate valve having a connection between the valve stem and the valve plate to provide a rotational force to cause the valve plate to be on the valve stem shaft
第8頁 1316997_ 五、發明說明(5) 線的周圍的對齊能適應閥座,至少在第一次施壓時。如此 ,就不需要閥板的冗長的預先對齊。用裝置在閥板橫越開 口時限制轉動的能力,就能避免閥殼接觸閥板。又,本發 明提供從閥板的單側作業就能拆、卸閥板的可能性,以大 幅簡化真空閘閥的維修。依本發明實施的閥板及閥桿能達 成此目的。 以下是本發明的概論。 本發明的真空閘閥包括一閥殼,閥殼有壁,壁有一開 口 ,還有一閥座環繞該開口 。舉例而言,該開口有矩形剖 面,有四個圓角。藉閥座,一壁部(作為密封面)被另一表 面(作為密封面)壓住。該壁就可能形成該殼。該開口能被 一閥板關閉。舉例而言,該閥板有矩形剖面及一密封面, 其尺寸使閥板能罩住而關閉該開口。在一可能實施例裡, 一密封環固定於該密封面的邊以施於該閥座。該閥板可拆 卸地設在一閥桿上。用真空閘閥的控制元件支持並調整閥 桿,以致閥板能沿該閥桿軸線橫越該開口,且該閥板的密 封面能壓住該閥座而關閉該開口 。從先前技術已知有許多 方式能實施控制元件以如此調整該閥桿及該閥板。依本發 明,在閥板裡(更特定的是在閥板的兩面之一裡).有一承接 部,在該閥桿的末端有一連接部,該連接部的形狀對應該 承接部的形狀,該連接部能被導入該承接部。承接部及連 接部的形狀使它們共同成為環形軸承部及限制部(限制閥 板的轉角)。環形軸承部允許該閥板相對該閥桿繞該閥桿 軸線至少部分轉動。它可被做成簡單頸軸承或滾子軸承。Page 8 1316997_ V. INSTRUCTIONS (5) The alignment around the line can be adapted to the seat, at least for the first time. In this way, a lengthy pre-alignment of the valve plate is not required. The ability of the device to limit rotation when the valve plate traverses the opening prevents the valve housing from contacting the valve plate. Further, the present invention provides the possibility of disassembling and unloading the valve plate from one side of the valve plate, thereby greatly simplifying the maintenance of the vacuum gate valve. The valve plate and valve stem according to the present invention achieve this purpose. The following is an overview of the invention. The vacuum gate valve of the present invention includes a valve housing having a wall, an opening in the wall, and a valve seat surrounding the opening. For example, the opening has a rectangular cross section with four rounded corners. By the valve seat, one wall (as a sealing surface) is pressed by the other surface (as a sealing surface). The wall may form the shell. The opening can be closed by a valve plate. For example, the valve plate has a rectangular cross section and a sealing surface sized to enable the valve plate to cover and close the opening. In a possible embodiment, a sealing ring is secured to the edge of the sealing surface for application to the valve seat. The valve plate is detachably mounted on a valve stem. The valve stem is supported and adjusted by the control element of the vacuum gate valve such that the valve plate can traverse the opening along the axis of the valve stem and the cover of the valve plate can press against the valve seat to close the opening. It is known from the prior art that there are many ways to implement a control element to adjust the valve stem and the valve plate in this manner. According to the invention, in the valve plate (more specifically in one of the two faces of the valve plate), there is a receiving portion having a connecting portion at the end of the valve stem, the connecting portion having a shape corresponding to the shape of the receiving portion, The connecting portion can be introduced into the receiving portion. The shape of the receiving portion and the connecting portion are such that they together become an annular bearing portion and a restricting portion (restricting the corner of the valve plate). An annular bearing portion allows the valve plate to at least partially rotate relative to the valve stem about the stem axis. It can be made into a simple neck bearing or roller bearing.
T3T6997_ 五、發明說明(6) 因此,以該閥板壓住該閥座時,該閥板繞該閥桿軸線的對 齊可能適應該閥座。因此,相對於一垂直於該閥桿轴線的 平面,該閥板變成平行於該閥座,以致在閥板的兩端的接 觸壓力相同。以此方式,避免不均勻的施壓及變化的密封 間隙,卻不必以預先的準確的齊來提供高度準確的密合。 該限制部把該環形軸承部允許的轉動限制到一詳細定義的 角範圍,以致使該閥板橫越該開口時該閥殼不接觸該閥板 ,過大的轉角可能使閥殼接觸該閥板。然而,可省略一個 繞該閥桿軸線的準確的預先的對齊,因該閥板在移動時就 自行對齊。該環形軸承部及該限制部可被做成兩個分開的 部分或一個能實現兩個功能的元件。 【實施方式】 藉助於附圖所示的晝的示範的若干特定實施例,將更 詳細地描述本發明的設備,並將討論本發明的其他優點。 部分*描述個別圖時*仍用在稍早描述過的圖用過的元件 符號,並在内容裡討論一些視圖。 第1 a圖、第1 b圖及第1 c圖顯示在先前技術中已討論的 典型真空閘閥的運作。在後續的圖中,將使用在第1 a圖、 第1 b圖及第1 c圖中介紹過的元件符號的一部分。 既然第2a圖、第2b圖、第3a圖、第3b圖、第4a圖、第 4 b圖及第5圖以不同視野、不同圖、不同詳細程度顯示本 發明的真空閘閥的相同實施例,以下將一起描述這些圖, 雖有時僅提及某圖。在圖中從外界看不見的元件以虛線顯T3T6997_ V. INSTRUCTION DESCRIPTION (6) Therefore, when the valve plate is pressed against the valve seat, the alignment of the valve plate around the valve stem axis may be adapted to the valve seat. Therefore, the valve plate becomes parallel to the valve seat with respect to a plane perpendicular to the axis of the valve stem such that the contact pressure at both ends of the valve plate is the same. In this way, uneven pressure and varying seal gaps are avoided without having to provide a highly accurate fit in advance. The restriction limits the allowable rotation of the annular bearing portion to a defined angular range such that the valve housing does not contact the valve plate when the valve plate traverses the opening, and an excessive angle of rotation may cause the valve housing to contact the valve plate . However, an accurate pre-alignment around the axis of the valve stem can be omitted as the valve plate self-aligns as it moves. The annular bearing portion and the restricting portion can be formed as two separate portions or an element capable of achieving two functions. [Embodiment] The apparatus of the present invention will be described in more detail with the aid of several specific embodiments of the exemplary embodiment shown in the drawings, and other advantages of the present invention will be discussed. Part* describes individual symbols* is still used for component symbols used in diagrams described earlier, and some views are discussed in the content. Figures 1a, 1b, and 1c show the operation of a typical vacuum gate valve that has been discussed in the prior art. In the subsequent figures, a part of the component symbols introduced in the 1a, 1b, and 1c diagrams will be used. 2A, 2b, 3a, 3b, 4a, 4b, and 5 show the same embodiment of the vacuum gate valve of the present invention in different fields of view, different figures, and different levels of detail, These figures will be described together below, although sometimes only a certain figure is mentioned. The components that are invisible from the outside in the figure are shown in dotted lines.
第10頁 如圖所矛 ^ 裡有一·開口 3 垓真空閘閥有一閥殼1 ,閥殼1有 有—閥柄S 一閥座4,閥座4環繞開口 3。兮古< 2,壁2 環32以關閉開間口I5有-密封面7,·封面7的;i㊁間間還 密封面),升/ j。在閥板5的兩寬側面之一的中=〜密封 桿8的連接部9 p二接部6以承接一閥桿8的連接部彳相對 入承接部6,板5可拆地被設在閥椁8 ,連接Λβ〇。藉閥 控制機制=並=桿 密封二氏Ξ;:^轴線⑴而予以關閉,封移r 己住閥座4而壓住閥板5。 在封面7的 承部12'及:6部與4,部9-起形成二功能部,亦即 1 2分社P"/刀3 (限制部」)以限制轉角。搽 軸 允”板5相對閥桿8繞閥桿軸線 =形軸承部 至少當閥板5第一次被放到閥座4, 夕4刀轉動,以致 對齊適應閥座4。I所示之實施例中板r5、,閥椁軸線Η的 於閥板5的承接部6,包括一圓轴12&展形軸承部12形成 12a形成於閥桿8的連接部9,圓孔丨—圓孔12b,圓軸 軸1 2 a。圓軸1 2 a滑動地被枢接在圓孔在閥板5裡)配合圓 (clearance fit)或過渡配合(trans· 2b裡,有空隙配合 代方案中,可用轉動軸承取代摩择 ti〇n fit)。在一替 作為環形軸承。 ""承或簡單頸軸承,以 第二功能部,亦即限制部13 ,扣a %形軸承部1 2的轉動Page 10 As shown in the figure, there is an opening. 3 The vacuum gate valve has a valve housing 1 and the valve housing 1 has a valve stem S. A valve seat 4, and the valve seat 4 surrounds the opening 3.兮古< 2, wall 2 ring 32 to close the opening I5 has a - sealing surface 7, · cover 7; i between the two sides of the sealing surface), l / j. In the middle of one of the two wide sides of the valve plate 5, the connecting portion 9 p of the sealing rod 8 is opposite to the receiving portion 6 by a connecting portion of the valve stem 8, and the plate 5 is detachably provided. Valve 椁8, connected to Λβ〇. By means of the valve control mechanism = and = rod seals the second Ξ;: ^ axis (1) to close, seal r to the valve seat 4 and press the valve plate 5. In the cover portion 12' and the 6th portion of the cover 7, the second and second portions form a two-function portion, that is, a 1 2 branch P"/knife 3 (restriction portion) to restrict the corner. The 搽 shaft allows the plate 5 to rotate around the valve stem axis with respect to the valve stem 8 = the bearing portion is at least when the valve plate 5 is first placed on the valve seat 4, and the fourth knife is rotated so that the alignment is adapted to the valve seat 4. In the example, the plate r5, the receiving portion 6 of the valve shaft axis 于 on the valve plate 5, includes a round shaft 12 & the formed bearing portion 12 is formed 12a is formed at the connecting portion 9 of the valve stem 8, the circular hole 圆 - the circular hole 12b, The circular shaft shaft 1 2 a. The circular shaft 1 2 a is slidably pivoted in the circular hole in the valve plate 5) The clearance fit or the transition fit (trans· 2b, in the gap fit generation scheme, the rotation is available The bearing replaces the ti〇n fit. In the alternative, it is used as a ring bearing. "" bearing or simple neck bearing, with the second function, that is, the restriction portion 13, the rotation of the a-shaped bearing portion 12
第11頁 I1I6997Page 11 I1I6997
五、發明說明(8) 限制在一範圍〗4裡 到開口3之上,閥殼广二圖及第W圖以致當間板5被移 接觸閥板5)。在所=觸閥板5 (過大轉角使閥幻能 部及-内多邊形部m例中,限制部13有一外多邊形 内多邊形部在閥板外夕邊形部形成於閥桿8的連接部9, 邊形部大於外多邊 ?接邠6裡以配合外多邊形部。内 内多邊形部是内四1致轉動限於範圍14裡。在此, 多邊形部是外四邊形^ jl3b,有至少二平行面l3b,, 邊形、外多邊形部 ;a,有平行面1 3a’ 。然而,内 形部或五邊形部取有其他實施例。舉例而言,可用= 圓的或斜的,如在圖:邊形#’在邊與邊之間的角可:】 閥桿8的連接部9斤不的實施例中。 故成 間桿轴線丨i上。在以=正面有一中心螺孔丨5 ’它的輛 此外,沿閥桿軸線丨丨,卜,此螺孔1 5將被稱為第—螺線在 接部6之側面丨7之間,’在閥板5裡,在承接部6及相 5。 1 =鎖入第一螺孔15,,有以-穿孔16,一螺栓18能通過反於承 閥柃軸線1 1被拆掉。 致閥板5能被固定於閥穿孔 被鎖緊,以免遺失穿=有反沈孔以接受螺閥栓1而能沿 8鎖到閥桿8。如在第ja圖及第5圖裡:螺栓 然,可選其他螺栓社^^,螺拴18的頭有六邊# 破螺栓 在未被顯示於其他固定裝置 凹部。當 是在閥桿8,連接部、替代性實施例裡,卜、十、 在承接部裡,且穿'在間板5 ’像 =之承接 有其他實施例。〖裡。此外,用-較長 1316997_ 五、發明說明(9) 在相反於承接部6的側面1 7,閥板5有一螺孔2 1 ,以下 將稱之為第二螺孔2 1。第二螺孔在一中心部,緊鄰穿孔1 6 。用第二螺孔2 1 ,能把一工具鎖入第二螺孔2 1 ,並如此沿 閥桿1 1向上施力於閥板5,在鬆開螺栓1 8以後,把閥板5 帶離閥桿8。因此,藉從第二螺孔2 1鬆開螺栓1 8並隨後抬 起,只從側面1 7干涉,就能把閥板5帶離閥桿8,以致能對 閥板5進行維修(舉例而言)。在此,螺栓1 8被做成A 1 1 e η螺 栓,它有相關的扳手尺寸,它的在兩邊之間的寬度小於閥 板5的第二螺孔2 1的小直徑,以致其寬度等於A 1 1 e η螺栓1 8 的兩邊之間的寬度的六面銷能穿過第二螺孔2 1 。吾人瞭解 ,螺孔通常是内螺紋,不論其形成方式。 在圖所示之真空閘閥的實施例裡,閥殼1有一作業開 口30(第4b圖)在頂部,移走一蓋29(第4a圖及第4b圖),就 能開啟作業開口 3 0。透過這個作業開口 3 0,可簡單地且人 體工學地鬆開螺栓1 8,並把閥板5從閥8抬起(並因此把閥 板5整個拆掉)。在拆卸中為更佳地處理閥板,在相反於密 封面7的侧面2 0裡有兩個把手凹部1 9 (舉例而言),所以能 向上施力於閥板5而把它從閥桿8抬起,並/或在拆卸後更 易操控閥板5。為更佳的握持,把手凹部1 9内可有止滑塗 料。 第6 a圖及第6 b圖是限制部1 3的橫剖圖,垂直於閥桿軸 線1 1 。顯示閥殼1、壁2、閥板5、閥桿8及限制部1 3的部分 ,限制部1 3有閥桿8的外四邊形部1 3 a的平行表面1 3 a ’及閥 板5的内四邊形部1 3 b的平行内面1 3 b ’ 。可觀察,相對外四V. INSTRUCTIONS (8) Restricted in a range of 4 to above the opening 3, the valve casing is wide and the W is so that the diaphragm 5 is moved into contact with the valve plate 5). In the example of the valve body 5 (the valve illusion portion and the inner polygon portion m), the restricting portion 13 has an outer polygonal inner polygonal portion formed on the outer peripheral portion of the valve plate at the connecting portion 9 of the valve stem 8. The ridge portion is larger than the outer ridges 6 to fit the outer polygonal portion. The inner inner polygon portion is inner rotator limited to the range 14 . Here, the polygonal portion is an outer quadrilateral ^ jl3b having at least two parallel faces l3b , a polygonal shape, an outer polygonal portion; a, having a parallel surface 1 3a'. However, the inner or pentagon portion has other embodiments. For example, = round or oblique, as shown in the figure: The angle between the edge and the edge of the edge #' can be:] the connection portion of the valve stem 8 is not in the embodiment. Therefore, the axis of the rod is 丨i. The center has a central screw hole 丨 5 ' In addition, along the axis of the valve stem, the screw hole 15 will be referred to as the first spiral between the side 丨7 of the joint 6, 'in the valve plate 5, at the receiving portion 6 and Phase 5. 1 = Locked into the first screw hole 15, with a perforation 16, a bolt 18 can be removed by abutting against the bearing bore axis 11. The valve plate 5 can be fixed to the valve perforation Locked to avoid loss of wear = there is an anti-sinking hole to accept the screw plug 1 and can be locked to the valve stem 8 along the 8th. As in the ja and 5: bolts, other bolts can be selected ^^, The head of the bolt 18 has six sides. The broken bolt is not shown in the recess of the other fixing device. When it is in the valve stem 8, the connecting portion, in an alternative embodiment, the cloth, the ten, the receiving portion, and the wearing The intermediate plate 5' is replaced by another embodiment. [In addition, with - longer 1316997_5, invention description (9) On the side opposite to the side of the receiving portion 6, the valve plate 5 has a screw hole 2 1 , Hereinafter, it will be referred to as a second screw hole 2 1. The second screw hole is in a central portion, adjacent to the through hole 16. With the second screw hole 2 1 , a tool can be locked into the second screw hole 2 1 and thus The valve stem 11 is biased upward by the valve plate 5, and after the bolt 18 is loosened, the valve plate 5 is brought away from the valve stem 8. Therefore, the bolt 18 is loosened by the second screw hole 2 1 and then lifted, Only by interference from the side 107, the valve plate 5 can be taken away from the valve stem 8 so that the valve plate 5 can be repaired (for example). Here, the bolt 18 is made of an A 1 1 e η bolt, which There are related wrenches , the width between the two sides is smaller than the small diameter of the second screw hole 2 1 of the valve plate 5, so that the width of the six-sided pin of the width between the two sides of the bolt 1 8 can pass through the Two screw holes 2 1. It is understood that the screw holes are usually internal threads, regardless of how they are formed. In the embodiment of the vacuum gate valve shown in the figures, the valve housing 1 has a working opening 30 (Fig. 4b) at the top, removed A cover 29 (Figs. 4a and 4b) can open the working opening 30. Through this working opening 30, the bolts 18 can be easily and ergonomically loosened and the valve plate 5 can be removed from the valve 8. Lift up (and thus remove the entire valve plate 5). In order to better handle the valve plate during disassembly, there are two handle recesses 19 (for example) in the side 20 opposite the sealing surface 7, so that the valve plate 5 can be applied upwards from the valve stem 8 lifted up and/or easier to manipulate the valve plate 5 after disassembly. For better grip, a slip-stop coating can be placed in the recess 9 of the handle. Fig. 6a and Fig. 6b are cross-sectional views of the restricting portion 13 which are perpendicular to the stem axis 1 1 . The valve casing 1, the wall 2, the valve plate 5, the valve stem 8 and the portion of the restricting portion 13 are shown, and the restricting portion 13 has the parallel surface 1 3 a ' of the outer quadrangular portion 1 3 a of the valve stem 8 and the valve plate 5 The parallel inner face 1 3 b ' of the inner quadrilateral portion 1 3 b. Observable, relatively external
第13頁 1316997_ 五、發明說明GO) 邊形部13a,内四邊形部13b有大尺寸(oversize)。内、外 四邊形部可有方形剖面,有相同邊長,或有不同邊長(如 在圖所示的實施例裡)。這大尺寸可能在二維相同(如圖所 示)或不同。第6 a圖顯示閥板5在其中心位置,第6 b圖顯示 受限於限制部1 3的最大角範圍1 4。這大尺寸須使機動性受 限於角範圍1 4 ,在其中,密封面7不能接觸壁2 (特別是閥 座4 )。當然,有可能使角範圍1 4比在圖所示的實施例裡更 小許多。在一方面,角範圍1 4愈小愈好,因較大轉角可能 在第一次應用引起剪力,但在另一方面,角範圍1 4須大到 足以使閥板5在應用中自由對齊。 第7圖顯示多功工具2 2 ,用它能把閥板5設在真空閘閥 的閥桿8 ,或從真空閘閥的閥桿8拆卸閥板5。把多功工具 2 2第二鎖入螺孔2 1並施向上的力,就能鬆開螺栓1 8並把閥 板5從閥桿8抽走。多功工具2 2有一把手2 3以施向上力及力 矩,還有一長軸24,其第一端連於把手23。長軸24的另端 有外六邊形部2 6於其末稍2 5,所以能施力矩於螺栓1 8。接 著外六邊形部2 6的是外螺紋2 7 ,被用以螺合閥才2 5的第二 螺孔2 1 。用多功工具2 2,吾人可沿閥軸線1 1向上施人力於 閥板5而把它從閥桿8抬起。外六邊形部2 6的扳手尺寸對應 螺栓1 8的,因此,在它的兩個角之間的寬度小於外螺紋2 7 (對應第二螺孔2 1的螺紋)的小直徑。 即使不用上述之環形軸承部及限制部,仍能用上述之 真空閘閥、閥板5及多功能工具2 2,從人體工學的觀點, 以第二螺孔2 1 、把手凹部1 9、螺栓1 8及多功能工具2 2,本Page 13 1316997_ V. DESCRIPTION OF THE INVENTION GO) The rib portion 13a has an inner dimension 13b having an oversize. The inner and outer quadrilateral portions may have a square cross section with the same side length or different side lengths (as in the embodiment shown). This large size may be the same in two dimensions (as shown) or different. Fig. 6a shows the valve plate 5 at its center position, and Fig. 6b shows the maximum angular range of 14 limited to the restriction portion 13. This large size is such that the maneuverability is limited to the angular range 14 in which the sealing surface 7 cannot contact the wall 2 (especially the valve seat 4). Of course, it is possible to make the angular range 14 4 much smaller than in the embodiment shown in the figure. In one aspect, the smaller the angular range 14 is, the better the angle may be caused by the first application, but on the other hand, the angular range 14 must be large enough to allow the valve plate 5 to be freely aligned in the application. . Figure 7 shows the multi-tool 2 2 with which the valve plate 5 can be placed on the valve stem 8 of the vacuum gate valve or the valve plate 5 can be removed from the valve stem 8 of the vacuum gate valve. By locking the multi-tool 2 2 into the screw hole 2 1 and applying an upward force, the bolt 18 can be loosened and the valve plate 5 can be withdrawn from the valve stem 8. The multi-tool 2 2 has a handle 2 3 for applying an upward force and a torque, and a long shaft 24 having a first end connected to the handle 23. The other end of the long shaft 24 has an outer hexagonal portion 26 at the end thereof, so that a torque can be applied to the bolt 18. Next to the outer hexagon portion 26 is an external thread 27 which is used to screw the second screw hole 2 1 of the valve 2 . With the multi-tool 2 2, we can apply force to the valve plate 5 along the valve axis 1 1 to lift it from the valve stem 8. The wrench of the outer hexagon portion 26 has a size corresponding to the bolt 18, and therefore, the width between its two corners is smaller than the small diameter of the outer thread 27 (corresponding to the thread of the second screw hole 21). Even if the above-mentioned annular bearing portion and the restricting portion are not used, the above-described vacuum gate valve, valve plate 5 and multi-function tool 2 2 can be used, from the ergonomic point of view, the second screw hole 2 1 , the handle recess portion 19 , the bolt 1 8 and multi-tool 2 2, this
第14頁 1316997_ 五、發明說明(π) 發明對先前技術達成可觀的改善。 第8a圖、第8b圖及第8c圖顯示把閥板5從閥桿8拆卸的 作業。在第一步(第8 a圖),透過開啟的作業開口 3 0 ,把多 功工具2 2放到螺栓1 8,並繞閥桿軸線1 1 ,循箭頭3 1 a,轉 多功工具2 2 ,藉外六邊形部2 6鬆開螺栓1 8。在第二步(第 8b圖),循箭頭31b ,藉外螺紋27 ,把多功工具22鎖入第二 螺孔2 1 。在第三步(第8 c圖),向上施人力(循箭頭3 1 c ), 藉此把閥板5從閥桿8抬起,並透過作業開口 3 0把閥板5從 真空閘閥移走。 把手凹部1 9使吾人能把閥板5從閥桿8抬起而不必開啟 作業開口 3 0 ,當螺栓1 8已鬆開並進入把手凹部1 9,並把 它從閥殼1移走。在此例裡,閥板5的進、出是在與密封面 7相反的侧面2 0進行,例如透過一個在閥殼1裡與開口 3相 反的開口 ,如第4 b圖所示。Page 14 1316997_ V. INSTRUCTIONS (π) The invention achieves considerable improvements in the prior art. Figs. 8a, 8b and 8c show the operation of detaching the valve plate 5 from the valve stem 8. In the first step (Fig. 8a), the multi-tool 2 2 is placed on the bolt 18 through the open working opening 30, and the stem axis 1 1 is followed by the arrow 3 1 a, and the multi-tool 2 is turned. 2, loosen the bolt 1 8 by the outer hexagonal part 2 6 . In the second step (Fig. 8b), the multi-tool 22 is locked into the second screw hole 2 1 by the external thread 27 by the arrow 31b. In the third step (Fig. 8c), the manpower is applied upwards (following arrow 3 1 c ), thereby lifting the valve plate 5 from the valve stem 8 and removing the valve plate 5 from the vacuum gate valve through the working opening 30. . The handle recess 19 allows us to lift the valve plate 5 from the valve stem 8 without having to open the working opening 30, when the bolt 18 has been released and enters the handle recess 19 and removes it from the valve housing 1. In this case, the inlet and outlet of the valve plate 5 are performed on the side 20 opposite to the sealing surface 7, for example, through an opening in the valve casing 1 opposite to the opening 3, as shown in Fig. 4b.
第15頁 辟 9¾ ' 【圖式簡單說明】 第1 a圖、第1 b圖及第1 c圖顯示一典型閘閥的運作 (functioning) ° 第2 a圖及第2 b圖以底面圖及背面圖顯示一閥板。 第3 a圖及第'3 b圖以側面圖及頂面圖顯示一閥桿的一連接部 〇 第4 a圖是一真空閘閥的剖面不透明圖,閥板被安裝。 第4 b .圖是一真空閘閥的剖面不透明®,閥板被拆掉。 第5圖詳細顯示承接部與連接部。 第6 a圖是切過能限制轉角的部分的橫剖圖,閥板設在中間 〇 第6 b圖是切過能限制轉角的部分的橫剖圖,顯示閥板的可 能的轉動範圍6 第7圖顯示一多功工具,它能拆、裝閥板。 第8 a圖、第8 b圖及第8 c圖顯示用多功工具拆掉閥板的作業 〇 【圖號簡單說明】 1 閥殼 2 壁 3開口 4 閥座 5 閥板 6 承接部 7 密封面Page 15 93 93⁄4 ' [Simple description of the diagram] Figure 1 a, Figure 1 b and Figure 1 c show the operation of a typical gate valve ° 2 a and 2 b to the bottom and back The figure shows a valve plate. Figure 3a and Figure 3b show a connection of a valve stem in a side view and a top view. Figure 4a is a cross-sectional opacity diagram of a vacuum gate valve with the valve plate installed. Figure 4b is a section of the vacuum gate valve opaque® with the valve plate removed. Fig. 5 shows the receiving portion and the connecting portion in detail. Figure 6a is a cross-sectional view of the portion that cuts the corner, the valve plate is placed in the middle. Figure 6b is a cross-sectional view of the portion that cuts the corner, showing the possible range of rotation of the valve plate. Figure 7 shows a multi-tool that can be removed and installed. Fig. 8a, Fig. 8b and Fig. 8c show the operation of removing the valve plate with the multi-tool. 简单 [Simple description of the figure] 1 Valve housing 2 Wall 3 opening 4 Seat 5 Valve plate 6 Receiving part 7 Sealing surface
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Claims (1)
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TW93107270A TWI316997B (en) | 2004-03-18 | 2004-03-18 | Vacuum gate valve |
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TW93107270A TWI316997B (en) | 2004-03-18 | 2004-03-18 | Vacuum gate valve |
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TW200532128A TW200532128A (en) | 2005-10-01 |
TWI316997B true TWI316997B (en) | 2009-11-11 |
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TW93107270A TWI316997B (en) | 2004-03-18 | 2004-03-18 | Vacuum gate valve |
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TWI385329B (en) * | 2008-11-21 | 2013-02-11 | V Tex Corp | Vacuum gate valve and its opening and closing method |
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