201017808 六、發明說明： 【發明所屬之技術領域】 本發明關於一種曝光設備之光罩傳送機械手，特別地，本 發明關於一種曝光設備之光罩傳送機械手，其具有結合為一體 的一夾爪及一位置排列機構，由此可對放置於轉輪之光罩之位 置進行排列。 【先前技術】 ❹ -般而s ’曝光稍係指在半導體或薄膜電Baa體液晶顯示 器（Thin-Film Transistor-Liquid Crystal Display，TFT LCD)等 需要電路製程之生產線中，利用照相原理，向光罩等光掩模 (photomask)照射光線而在半導體晶圓或薄膜電晶體液晶顯 示器（TFTLCD)玻璃板基板上緣製電路之設備。 其中，特別地，在液晶顯示器（LCD)之玻璃板基板上緣 製電路的曝光設備中，通常在支樓各種零件之平板之上侧配設 ❹有絲部份，並且鱗光部狀上下浙職設有光罩與玻璃 板，以使得光罩之圖案藉由曝光部份緣製於玻璃板之表面。 而且，此曝光設備在曝光部份之一側具有一轉輪，轉 旋轉地安裝有複數個光單，由此可實現光罩之迅速交替，並且 在平板之—侧具有—裝載有這些光罩之H盒，以及-傳送機械 手，其用以將褒載於匿盒之光罩供給至轉輪且將完成曝光作業 之光罩重新返回至匣盒。 然而由於上述之傳送機械手僅簡單執行將光罩放置於轉 輪並重新取回之功能，因此在最初放置於轉輪之光罩位置產生 3 201017808 誤差之If况下，存在很難修正其位置之問題。 而且’還具有上述之光罩配置位置誤差可在需要超精密加 工之曝光作業過程中造成致命缺陷之問題。 【發明内容】 因此’繁於上述習知技術之問題，本發明之目的在於提供 一種曝光設備之光罩傳送機械手，此傳送機械手之纽可對放 置於轉輪上之光罩位置進行微細調整。 並且，本發明之目的在於可用簡單之結構對光罩之位置進 行精密排列。 而且，本發明之目的在於防止傳送機械手在傳送光罩之過 程中產生之振動傳遞至曝光部份。 、為了實現上述之目的，本發明關於一種曝光設備之光罩傳 送機械手，其按縣裝載於曝歧備之£盒之光罩傳送至轉輪 之方式’在其下側具有—在x、γ、z軸方向及旋轉方向上移 動之移動部份’並且在移動部份之上端具有—固定光罩之夹 爪’其特徵在於j夾爪之—側具有—位置排列機構，此位置 排列機構與該夾爪相結合為—體用以對放置於轉輪上之光罩 之位置進行排列。 而且’曝光設備之光罩傳送機械手之特徵在於：此位置排 列機構包含複數個位置排列圓筒，這些位置排列圓筒係與失爪 =頂面相結合，對配設於轉輪之1放面之光罩之—侧面施加 壓力而使其向轉輪之内侧方向移動。 並且，曝光設備之光罩傳送機械手之特徵在於：更包含有 201017808 # μ切架其在移動雜及夾爪與平板齡離之狀態下 支撐此移動部份及夾爪。 中，值w在本發明之實關之曝光設備之光罩傳送機械手 體’，/，的傳送機械手之夾爪與位置制機構相結合為- β匕夾爪可對放置於轉輪上的光罩位置進行微細調 ^而可對將光罩裝載於轉輪之過程巾產生之位置誤差進行201017808 VI. Description of the Invention: [Technical Field] The present invention relates to a reticle transfer robot for an exposure apparatus, and more particularly to a reticle transfer robot for an exposure apparatus having a clip integrated into one The claws and a position aligning mechanism are arranged to position the reticle placed on the runner. [Prior Art] ❹ - s 'exposure slightly refers to the semiconductor or thin film semiconductor liquid crystal display (TFT LCD A device such as a mask or the like that illuminates light to form a circuit on a semiconductor wafer or a thin film transistor liquid crystal display (TFTLCD) glass substrate. In particular, in an exposure apparatus for manufacturing a circuit on a glass plate substrate of a liquid crystal display (LCD), a wire portion is usually disposed on the upper side of the flat plate of various parts of the branch building, and the scale portion is upper and lower. A mask and a glass plate are provided so that the pattern of the mask is adhered to the surface of the glass sheet by the exposed portion. Moreover, the exposure apparatus has a rotating wheel on one side of the exposed portion, and a plurality of optical sheets are rotatably mounted, whereby the rapid replacement of the reticle can be realized, and the hood is mounted on the side of the flat plate. The H-box, and the transfer robot, are used to supply the reticle carried by the tamper to the reel and return the reticle that has completed the exposure operation to the cassette. However, since the above-mentioned transfer robot simply performs the function of placing the reticle on the reel and retrieving it, it is difficult to correct the position when the reticle position initially placed on the reel produces a 3 201017808 error. The problem. Moreover, the above-mentioned reticle placement position error can cause fatal defects in an exposure operation requiring ultra-precision processing. SUMMARY OF THE INVENTION Therefore, it is an object of the prior art to provide a reticle transfer robot for an exposure apparatus. The transfer robot can finely position the reticle placed on the reel. Adjustment. Further, it is an object of the present invention to precisely arrange the positions of the reticle by a simple structure. Moreover, it is an object of the present invention to prevent the vibration generated by the transfer robot during the transfer of the reticle from being transmitted to the exposed portion. In order to achieve the above object, the present invention relates to a reticle transfer robot for an exposure apparatus, which is carried by a county-mounted photomask of an unsuitable cassette to a reel in a manner of "on its lower side - at x, a moving portion that moves in the γ, z-axis direction and the rotational direction and has a gripper for fixing the reticle at the upper end of the moving portion, characterized in that the side of the j-jaw has a position aligning mechanism, and the position arranging mechanism In combination with the jaws, the body is arranged to position the reticle placed on the wheel. Moreover, the reticle transfer robot of the exposure apparatus is characterized in that the position arranging mechanism includes a plurality of position arranging cylinders, and the position arranging cylinders are combined with the missing claw=top surface, and are disposed on the reel 1 The visor is pressed against the side to move toward the inside of the wheel. Moreover, the reticle transfer robot of the exposure apparatus is characterized in that it further includes a 201017808 #μ-cut frame which supports the moving portion and the jaws in a state where the movement is mixed and the jaws and the plate are separated. In the present invention, the photomask transfer robot of the exposure apparatus of the present invention is combined with the positional mechanism of the transfer robot and the position mechanism is - β匕 jaws can be placed on the runner The position of the reticle is finely tuned to perform positional errors on the process towel that is loaded on the reel
月雄之修正’因此具有提高曝光作業之精密度且降低不良率 之效果。 而且在本發明之實施例中，位置排列機構包含複數個位 =排列圓筒’由此可使賴單之結構實現對光罩之位置進行精 密之排列’因此本發明具有不僅可簡單地製作位置排列機構， 而且可對衫之位置及配置角度進行更微缝精密之修正，同 時還不會妨礙夾爪之作動之效果。 並且’在本發明之實施例t，更包含有—與平板相分離之 機械手支撐架，由此可防止傳職械手在傳送光罩之過程中產 生之振動傳遞至曝光部份，本發·有可防止傳送機械手 之作動過程中產生之振動所引_曝光作業之巾斷，從而進一 步提高生產率，而且可進一步提高加工之精密度之效果。 【實施方式】 以下，將結合圖式部份詳細描述本發明之較佳實施例。 「第1圖」係為本發明之-實施例之—曝光設備之立體 圖’「第2圖」係為「第1圖」之主視圖’「第3圖」係為本發 明之實施例之夾爪41放大之立體圖，「第4圖」係為本發明之 5 201017808 實施例之作動狀態之立體圖，以及「第5圖」係為「第4圖」 之主要部分之概略之俯視圖，如圖所示’本發明之實施例之傳 送機械手40將裝載於曝光設備的匣盒30中的光罩1傳送至轉 輪50的光罩1之位置，其中轉輪50與曝光部份2〇之一侧相 結合’特別地，在本發明之實施例之曝光設僙的光罩丨之傳送 機械手40中，一位置排列機構43對裝載於轉輪5〇之光罩i 之位置進行調節，並且位置排列機構43與傳送機械手4〇之夾 爪41相結合為一體，由此對光罩丨之位置進行迅速且精密之 調節。 曝光部份20配設於結合有曝光設備之各種構成零件的平 板10之上側，並且曝光部份20之下側配設有顯示器裝置中使 用之玻璃板2，曝光部份20之上侧配設有光罩丨，此光罩】用 作將電路曝光於玻璃板2之底片，從而使得光罩丨之圖案藉由 曝光部份20形成於玻璃板2之表面。 對於光罩1 ^言’如上所獅成有構成電路之超微細圖 案，光罩1形成為板狀而安裝於下述之轉輪5〇且固定配設於 曝光部份20之上侧，以使得形成於光罩i上之圖案藉由曝光 部份20曝光可繪製於玻璃板2之表面。 匣盒30固定排列且容納有複數個光罩丨，並且可藉由傳 送機械手40按照計劃實現抽出及收取，由此在内側形成容納 有複數個光罩1之容納空間’並且£盒3Q具有—開放側面， 以使得光罩1之抽出及收取比較順利。 傳送機械手40位於曝光部份2〇與匣盒3〇之間用以傳送 201017808 光罩1，傳送機械手4Q具有—在χ、 轉方向上移動之移動部份42， z軸之3軸方向及旋 固定光罩1之夾爪41，夹爪^ 〇且移”42之上端具有一 並且可順利傳送光罩丨。 可穩疋且牢固地夾住光罩1， ❿ 光罩7同5=Γ預定先t由傳送機械手4〇自厘盒如抽出之 光罩1 _曝光部份輪5G可自動地將 合之驅動軸52之上端，轉輪5〇 、俯20之-側相結 形狀相結合，其中這些旋轉;、複數俯走轉托架心圓形 由此，一個轉輪50上可同時安裝有裝有各個光罩卜 中心同步旋轉，同時傳送光罩1，以 使得光罩1配設於曝光雜2G，並且，轉輪 業之光罩1重新旋轉而將其傳送至曝光部份20之;^ ❹ 並且，如圖所示，夾爪41具有一在側面方向移動且支撐 光罩1之側面的側面支律片4n，一在上下方向移動且支樓光 罩1之頂面的頂面支樓片413，以及一使得側面支撐片411及 頂面支撐片413運行之致動部份412，并且，夾爪41之一侧 面具有一位置排列機構43,位置排列機構43使放置於轉輪5〇 上之光罩1移動位置以將光罩i移動至執行曝光作業之準確位 置。 而且，位置排列機構43包含有複數個位置排列圓筒， 位置排列圓筒431之排列方向與轉輪5〇裝載之光罩丨之配置 方向處於同一水平，位置排列圓筒431使得光罩丨進行直線移 7 201017808 動’並且對光罩i施加壓力而將其推向轉輪5Q之内側方向. 在使用夾爪將光罩i放置於轉輪5G上之後，位置排列圓筒 如-方面推動光罩丨之侧面，另一方面使光罩丨移動，從而 最終將光罩1放置於準確位置。 分別進行控 而且可改變 此時，較佳地，對上述各位置排列圓筒431 制，從而不僅能夠改變光罩丨之直線方向之移動， 光罩1之配置角度。 並且，平板1G之-侧具有—機械手支撑架6()，機械 樓架在致動部份412、夾爪41及£盒3Q與平板1〇相分離 之狀態下支擇致動部份412、夾爪41及匡盒3〇，由此使得傳 送機械手40之作㈣財產生之絲不絲料光部份。 、，由此’可防止傳賴械手4〇在作動過程巾產生之振動 曝光作業中產生不良影響，或者可防止在傳送機械手牝之移 動過程中產生曝光作業之情’故不僅可大幅度提高生產 而且能夠減少不良率。 【圖式簡單說明】 第1圖係為本㈣之-實_之—曝光設備之立體圖； 第2圖係為第1圖之主視圖； 第3圖係為本發明之實施例之—夾爪放大之立體圖； 第4圖係為本發明之實闕之领狀態之立體圖；以及 第5圖係為第4圖之主要部分之概略之俯視圖。 201017808 【主要元件符號說明】 1 :光罩 ‘ 2:玻璃板 10 :平板 20 :曝光部份 30 :匣盒 40 :傳送機械手 41 :夾爪 42 :移動部份 43 :位置排列機構 50 :轉輪 51 :旋轉托架 52 :驅動轴 60 :機械手支撐架 411 :側面支撐片 ® 412 :致動部份 413 :頂面支撐片 431 :位置排列圓筒The correction of Yuexiong has the effect of improving the precision of the exposure work and reducing the defective rate. Moreover, in the embodiment of the present invention, the position arranging mechanism includes a plurality of bits=arrangement cylinders, thereby enabling the structure of the singular sheet to precisely arrange the position of the reticle. Therefore, the present invention has not only a simple position but also a simple position. Arranging the mechanism, and making more precise correction of the position and arrangement angle of the shirt, without hindering the action of the jaws. And in the embodiment t of the present invention, further comprising a mechanical hand support frame separated from the flat plate, thereby preventing the vibration generated by the transmission technician during the process of transmitting the light cover from being transmitted to the exposed portion, the present invention - It can prevent the vibration generated by the movement of the transfer robot and the exposure of the exposure operation, thereby further improving the productivity and further improving the precision of the processing. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail in conjunction with the drawings. 1 is a perspective view of an exposure apparatus of the present invention - "the second diagram" is a front view of "the first diagram" and "the third diagram" is a clip of an embodiment of the present invention. The perspective view of the claw 41 is enlarged, and the "figure 4" is a perspective view of the active state of the embodiment of the present invention 5, 201017808, and the "figure 5" is a schematic plan view of the main part of the "fourth figure". The transfer robot 40 of the embodiment of the present invention transmits the reticle 1 loaded in the cassette 30 of the exposure apparatus to the position of the reticle 1 of the reel 50, wherein one of the reel 50 and the exposure portion 2 In combination with the side cover, in particular, in the transfer robot 40 of the exposure cover of the embodiment of the present invention, a position arranging mechanism 43 adjusts the position of the mask i loaded on the reel 5〇, and The position aligning mechanism 43 is integrated with the gripper 41 of the transport robot 4, thereby quickly and precisely adjusting the position of the mask 丨. The exposure portion 20 is disposed on the upper side of the flat plate 10 in which various components of the exposure apparatus are combined, and the glass plate 2 used in the display device is disposed on the lower side of the exposure portion 20, and the upper side of the exposure portion 20 is disposed. A reticle is used to expose the circuit to the backsheet of the glass sheet 2 such that the pattern of the reticle is formed on the surface of the glass sheet 2 by the exposed portion 20. In the case of the reticle, the reticle 1 is formed into a plate shape and is attached to the following wheel 5 〇 and fixedly disposed on the upper side of the exposure portion 20 to The pattern formed on the mask i can be drawn on the surface of the glass sheet 2 by exposure of the exposed portion 20. The cassette 30 is fixedly arranged and accommodates a plurality of reticle cymbals, and can be extracted and collected as planned by the transport robot 40, thereby forming an accommodating space accommodating a plurality of reticles 1 on the inner side and the cassette 3Q has - Open the side to make the extraction and collection of the mask 1 smoother. The transport robot 40 is located between the exposure portion 2〇 and the cassette 3〇 for transmitting the 201017808 mask 1 , and the transport robot 4Q has a moving portion 42 that moves in the χ and the direction of rotation, and a 3-axis direction of the z-axis. And the claw 41 of the fixed reticle 1 is screwed, and the upper end of the clamping jaw 42 has a one and can smoothly transmit the reticle 丨. The reticle 1 can be stably and firmly clamped, and the reticle 7 is the same as 5= ΓPredetermined t first by the transfer robot 4 〇 〇 盒 如 如 如 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In combination, wherein these rotations; the plurality of tilting and rotating brackets are circular in shape, whereby a rotating wheel 50 can be simultaneously mounted with the respective reticle center synchronous rotation, and the reticle 1 is transmitted at the same time, so that the reticle 1 Arranged in the exposure miscellaneous 2G, and the reticle 1 of the reel industry is re-rotated to transfer it to the exposed portion 20; ^ ❹ and, as shown, the jaw 41 has a side movement and supports light a side branch piece 4n on the side of the cover 1, a top support piece 413 which moves in the up and down direction and a top surface of the refurbishment mask 1, and The side support piece 411 and the top surface support piece 413 are operated by the actuating portion 412, and one side of the jaw 41 has a position arranging mechanism 43 for positioning the light mask 1 placed on the wheel 5 The position is moved to move the mask i to the exact position at which the exposure operation is performed. Moreover, the position alignment mechanism 43 includes a plurality of position alignment cylinders, and the arrangement direction of the position alignment cylinders 431 and the photomasks of the reel 5〇 are mounted. The arrangement direction is at the same level, and the position alignment cylinder 431 causes the mask 丨 to move linearly 7 201017808 and applies pressure to the mask i to push it toward the inner side of the wheel 5Q. Place the mask i using the jaws After the runner 5G, the position arranging cylinder pushes the side of the reticle to the side, and on the other hand, moves the reticle to finally position the reticle 1 in an accurate position. The control is separately controlled and can be changed at this time. Preferably, the cylinder 431 is arranged for each of the above positions, so that not only the movement of the mask rim in the linear direction but also the arrangement angle of the reticle 1 can be changed. Moreover, the side of the flat plate 1G has the robot support frame 6 () The mechanical gantry selects the actuating portion 412, the jaw 41 and the cassette 3 in a state in which the actuating portion 412, the jaw 41 and the cartridge 3Q are separated from the flat plate 1 〇, thereby causing the transfer robot 40 (4) The silk produced by the money is not part of the light. Therefore, it can prevent the smashing robot 4 产生 from adversely affecting the vibration exposure operation generated by the operation process towel, or can prevent the transmission robot from being damaged. The exposure process is generated during the movement process, so not only can the production be greatly improved but also the defect rate can be reduced. [Simple description of the drawing] Figure 1 is a perspective view of the exposure device (4) - the actual image of the exposure device; 1 is a front view of the first embodiment of the present invention; FIG. 4 is a perspective view showing a state in which the jaws are enlarged; FIG. 4 is a perspective view showing a state of the actual state of the present invention; A schematic top view of the main part of the figure. 201017808 [Description of main component symbols] 1 : Photomask ' 2: Glass plate 10 : Flat plate 20 : Exposure part 30 : Cassette 40 : Transfer robot 41 : Clamp 42 : Moving part 43 : Positioning mechanism 50 : Turn Wheel 51: Rotating bracket 52: Drive shaft 60: Robot support frame 411: Side support piece® 412: Actuating portion 413: Top support piece 431: Position alignment cylinder