TW201015048A - Three-dimensional shape measuring method - Google Patents

Abstract

A lens 11 is set to a first setting status where the lens 1 is declined about a Y-axis of a measuring apparatus 1 (S3-1). The lens 11 is rotated about a Z-axis of a design coordinate system at 90 degrees so as to be changed from the first setting status to a second setting status (S3-8). For each of the first and second setting statuses, first pieces of measurement data are obtained by measuring X-, Y-, and Z-axis coordinates of surface points of the lens 11 on one straight line elongated along the X-axis and passing an design apex coordinate of the lens 11, and second pieces of measurement data are obtained by measuring X-, Y-, and Z-axis coordinates of surface points of the lens 11 on the other straight line elongated along the Y-axis and passing the design apex coordinate of the lens 11 (S3-4, S3-11). For each of the first and second setting statuses, differences of the first and second pieces of data with respect to a designed configuration are calculated. The calculated differences are composed (S3-15).

Description

201015048 VI. OBJECTS OF THE INVENTION: FIELD OF THE INVENTION The present invention relates to a three-dimensional shape measuring method suitable for use in a camera-attached mobile phone lens for use in BD ( Blu-ray discs, etc., such as pick-up lenses of optical disc memory devices, etc. The tilt of the lens surface with respect to the optical axis constitutes a three-dimensional shape evaluation of a highly tilted lens. Background of the Invention A method of measuring the shape of a lens as a test piece 3 has a method of measuring a high inclined surface by using a probe constituted by a micro air slider (refer to, for example, Patent Document 1). Fig. 26 is a view showing a conventional three-dimensional shape measuring method described in Patent Document i. In Fig. 26, the probe unit 100 is provided with a probe 102 having a stylus pen 1〇1 at the lower end. The micro air slider 1〇3 on the upper end side of the probe 1〇2 is supported by the air bearing in a non-contact manner. The laser light of the semiconductor laser 1〇4 is guided to the mirror 105 provided at the upper end of the stylus pen 7. The atomic force acting between the stylus pen 101 and the measuring object 1〇6 is converted into a force in the upper and lower directions of the probe unit 1〇〇 by the error 彳§ generating unit 108, wherein the error signal generating unit 1〇8 is generated. The error signal is determined by the amount of light of the laser light reflected by the mirror 1〇5 and passing through the pinhole 107. Based on the output from the error signal generating unit 108, the position of the entire probe unit 100 is controlled by the servo circuit 1〇9 and the linear motor no. The Z coordinate of the probe 102 is measured by the laser light Fz from the He-Ne laser (not shown) reflected by the mirror 1〇5. By this method, a high-inclined surface can be measured with high precision, but 201015048 has been improved today. The slope is still at its limit. However, in the applications such as a lens for a mobile phone with a camera and a pickup lens for an optical disk memory device such as a BD (Blu-ray Disc), it is necessary to understand the increase in the image size and the diameter of the condensed beam diameter, and the inclined surface is increasingly required. The angle of inclination is over 80. The lens is required to evaluate a higher slope. Therefore, a method has been proposed in which the lens is tilted in the three directions and defeated in each of the set directions, and the two regions in which the measurement regions are overlapped in the measurement data in the three directions are synthesized into the rainbow surface. The difference between the data of the synthesis and the shape of the < δ ( is evaluated (see, for example, Patent Document 2 and Non-Patent Document 1). Fig. 27 is a conventional lens measurement evaluation method described in Patent Document 2. First, the lens is tilted in the three directions and measured in each of the installation directions. Next, the rotational position and the left and right positions are adjusted, and the obtained three-direction measurement data 200a, 200b, and 200c are combined into a portion where the measurement regions overlap, and coincide in the xz plane. Then, the difference between the synthesized data 2〇〇d and the design shape is evaluated. Further, conventionally, as a method of measuring the characteristics of the lens, the lens is tilted in the three directions and measured in each of the installation directions, and one of the three directions is defined as a reference material, and for the reference material, the other 2 The data of the measurement area overlap in the measurement data of the direction is synthesized to be uniform in the XZ plane, and the difference between the data of the synthesis and the design shape is evaluated (refer to, for example, Patent Document 3). Fig. 28 is a view showing a conventional lens measurement evaluation method described in Patent Document 3. First, a lens (mold) is horizontally placed, and the central portion 301a is measured. However, in 20101048, the lens is tilted (the design optical axis 302 is tilted about the Y-axis), and the portion 301b where the lens surface is inclined to the measuring machine is measured. Further, the lens is rotated by 180 degrees around the design optical axis 302, and the opposite side portion 301a on the coaxial side measured by measuring the tilt lens is measured. Then, based on the central portion 301a, the measurement data of the cutter portion 3〇ib, 301c is rotated and moved in parallel so that the measurement data overlaps the overlapping portions of the measurement regions of the portions 301b and 301c and the central portion 301a. In summary, the data measured from the three directions is synthesized based on the central portion 301a. Then, the shape is evaluated with the synthesized data. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. 2005-201656 (Patent Document 3) International Publication No. 06/082368 (Non-Patent Document 1) Miura Seihiro, " Lens shape measuring system for laser probe method", O plus E, New Technology Communication Co., Ltd., Heisei September, 2004 (2004), Vol. 46, No. 3, pl〇70-l〇74 C 1 ^ The invention discloses a problem to be solved by the invention. However, in the conventional method, if the lens is disposed to be offset from an axis (X axis) different from the axis (Y axis) at which the lens is tilted, a shape error is formed. In summary, when the measurement shape of the X section is obtained, if the measurement of the γ profile is not performed, when the lens is displaced about the direction of rotation of the X axis, the measurement value includes an error. The following is specific for this point. Consider measuring the lens surface tilt of the cross-sectional direction of the outermost peripheral portion of the effective diameter of 16 mm (radius R = 〇.8 mm) and R = 0.8 mm as shown in Fig. 29. 201015048 'The depth from the apex of the lens, that is, the amount of the recess is 0.5 mm. The aspherical, the moon' brother. In Fig. 29, the rotation around the X, γ, and z axes is set to A and axis, respectively. ° The solid line 401a indicates the lens profile under the circumstance that there is no deviation from the rotation (A) around the X axis. On the other hand, the broken line 4 〇 lb indicates that the rotation of the X axis (the A axis) is 1 for the measuring machine. In the case of setting, the lens 4 faces. When measuring from the apex portion of the lens, when the lens is facing the measuring system of the measuring machine, it is tilted on the A axis. At the position (dotted line 4〇lb), at the position of the Y-axis direction of the lens surface scanned by the stylus pen, is the concave amount h Ηί .

Sln (l°) is a position deviating from the γ-axis of the measuring machine by 8.73 μm as shown by the following formula (丨). [Number 1] Υ, ==; Η *8 Ϊ η (10) = 8.73 (μπι) (1) Further, at Υ, the position X becomes a value represented by the following formula (2). [Number 2] x = R*cos(asin(YVR)) = 0.7999524(mm) (2) Therefore, the coordinate system of the lens pair measuring machine is tilted by 1 on the A axis. The error in the Z direction is a value represented by the following formula (3). [Number 3] (0.8-0.7999524)*ίαη75° = 0.178(μιη) (3) If the shape error of the lens due to the measurement error is not corrected, the lens for BD or the like cannot be smallly condensed, and the camera is attached. The mobile phone uses a lens to cause image blurring and the like. In addition, the conventional method is based on the measurement data of the central part, and the measurement data of the left and right parts are overlapped in 201015048. Therefore, when the data is connected by measurement data, the shape change of the mm level must be characterized by the level of μιηα. Shapes combine materials, so synthesis is not easy. Moreover, the conventional method is based on the correction calculation of the radius of the probe tip (probe R) to generate an error. Further, in the conventional method, in order to obtain measurement data of one profile, it is necessary to measure the lens in three directions, and therefore measurement takes time. The present invention has been made in view of the above-described conventional problems, and an object of the invention is to provide a three-dimensional shape measuring method capable of measuring a high-inclined portion of a measurement object such as a lens with high precision. Means for Solving the Problem The present invention provides a three-dimensional shape measuring method in which a measuring object is set to a second state in which a measuring object is disposed obliquely about a Υ axis, and the measuring object is set as a s ten coordinate system of the measuring object. The ζ axis is centered, and is rotated by one or more times in a natural multiple of 9 degrees or less, and the second setting state is set to one or more from the above-described setting state, and In the second installation state, the coordinates of the X-axis, the γ-axis, and the Z-axis of the surface of the measurement object are measured on a straight line passing through the y-axis direction of the apex coordinate of the design of the measurement object, and the first measurement data group is obtained, and The coordinates of the x-axis, the Y-axis, and the Z-axis of the surface of the measurement object are measured on a straight line in the Y-axis direction of the vertex coordinates of the measurement object, and the second measurement data group is obtained for each of the first and second In the installation state, the difference between the design and the shape is calculated using the first and second measurement data groups, and the difference between the first and second installation states and the design shape is combined. In the third-order shape measuring method of the present invention, not only the coordinates of the X-axis, the Y-axis, and the two axes of the surface of the measuring object on the 201015048 straight line in the x-axis direction, that is, the first measurement data group but also the straight line in the x-axis direction are used. The coordinates of the X-axis, the Υ-axis, and the Ζ axis of the surface of the measurement object, that is, the second measurement data group, were used to calculate the difference from the design shape. Therefore, even if the position at which the measurement object is placed deviates around the X axis, the X-axis, γ-axis, and ζ-axis coordinates of the measurement data group can be accurately calculated, and the cross-sectional shape and design of the measurement object including the high slant surface can be measured with high precision. The difference in shape. Further, since the second set state of the measurement object is rotated around the z-axis of the design coordinate system from the second installation state, the surface of the measurement object is measured, so that the measurement including the high inclination surface can be performed. The entire section of the object is obtained from the difference in design shape. For example, the aforementioned angle increment is 18 degrees, and the second setting state is one. In this case, the difference in the shape of the design can be measured with high precision with respect to the profile on the x-axis of the coordinate system designed for the measurement object. Further, the angle increment may be 90 degrees, and the second setting state may be three. In this case, the difference between the design axis and the y-axis of the coordinate system of the measurement object can be measured with the accuracy of the south and the design shape. Specifically, the difference between the second measurement data group and the design shape is used to perform preliminary coordinate conversion, and the third and third data sets are rotated in accordance with the tilt around the Y axis and moved in parallel. And converting the coordinates to the design coordinates of the measurement object when the inclination around the Y axis is not performed, and performing calibration, and converting the first and second measurement data groups that have been subjected to the coordinate conversion described above, The difference between the design data set of the (5) measurement data group and the measurement object described above is calculated by fitting the design shape of the object to the above-mentioned object. 201015048 or 'Using the first and second measurement data sets to calculate the difference from the design shape to perform the preliminary coordinate conversion, and the second and second measurement data groups are rotated and moved in parallel about the γ axis. When the coordinate is converted to the above-mentioned design coordinate system of the above-mentioned measurement object when the inclination of the Υ|^ is tilted, the X-axis, the γ-axis, the Ζ-axis, the Α-axis, and the ugly axis are calculated to prepare for the month. The aforementioned third and second measurement data sets of the coordinate conversion are fitted to

Month] The ith calibrated amount of the 3 又 又 , , , , , , , , , , , 述 , 述 述 , 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述 述'Performing the first coordinate conversion, coordinate-converting the first measurement data group that has been subjected to the preliminary training conversion by the fixed calibration amount, and fixing the aforementioned X-axis 'Y-axis, Z-axis, A-axis, and the above-mentioned The axis 'calculated second calibration amount' other than the calibration amount is such that the first measurement data group subjected to the first coordinate conversion is fitted to the design shape of the measurement object, and the second calibration is performed. The first measurement data group of the above-mentioned preliminary coordinate conversion is subjected to coordinate conversion, and the calculated amount is calculated.

The difference between the first measurement data group of the second calibration and the design shape of the measurement object is performed. In this case, even when the number of points of the measurement data group is unevenly distributed to the center of the design data, or when the aspheric amount of the measurement object is small or moderate, the high-incidence surface can be measured as high-precision. The cross-sectional shape of the measured object. The design shape for performing the aforementioned preliminary coordinate conversion may also be one in which the design parameters have been converted in accordance with the shape of the actual measurement object. In this case, coordinate conversion or subsequent processing can be performed with higher precision, and high-precision measurement of the high tilt 9 201015048 bevel can be realized. The combination of the difference between the first and second installation states and the design shape may include manual adjustment of the difference between the first and second installation states and the difference between the design shapes described above. Further, the combination of the difference between the first and second installation states and the design shape may include: determining the difference between the first and second installation states and the design shape by the least squares method; The approximate straight line is coordinate-converted between the first and second installation states and the design shape so that the approximate straight lines of the first and second installation states overlap each other. By these processes, the difference between the cross-sectional shape and the design shape of the measurement object including the high inclined surface can be measured with higher precision. When the surface measurement data is used instead of the second measurement data group, the three-dimensional shape of the measurement object can be measured. Advantageous Effects of Invention As described above, in the third-order shape measuring method of the present invention, the first installation state of the measurement object is obliquely set, and the measurement object is rotated about the Z-axis of the design coordinate system from the first installation state. 2 The setting state is not only the coordinates of the x-axis, the γ-axis, and the z-axis of the surface of the measuring object on the straight line in the X-axis direction, that is, the first measurement data group, and the X-axis of the surface of the measuring object on the straight line in the Y-axis direction. The coordinates of the Y-axis and the Z-axis, that is, the second measurement data group, are used to calculate the difference from the design shape. Therefore, even if the position at which the measurement object is placed deviates around the χ axis, the χ axis, the γ axis, and the z axis coordinate of the measurement data group can be accurately calculated, and the entire measurement of the measurement object including the high slant surface can be measured with high accuracy. The difference between shape and design shape. [Embodiment] 10 201015048 BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the drawing, the coordinate axis must be distinguished from the coordinate axis set by the measuring machine itself for the orthogonal coordinate axis of the 3-dimensional space and the design of the coordinate axis of the lens. Attached to the front is attached "i(UA3P)"' )". (Embodiment 1) Fig. 1 shows a three-dimensional shape measuring method in which the present invention can be carried out: an under-element shape measuring machine (only τ is called a 骇 machine). The measurement (10) is provided with an upper stone mount 5 which is placed on the lower stone fixing cymbal via the X-axis table 3 and the cymbal stand* driven by the motor. The probe unit (8) (the same as the one described in the reference to the lake) can be mounted on the upper stone holder $ in the direction of the x-axis. The laser light from He-Ne Laser 6 is divided into optical 系统 ζ axis by the optical system 7 and the laser light Fx, Fy, Fz. The laser light (4) is measured by the X-axis mirror 8 fixed to the lower stone solid=seat 2 to measure the χ coordinate. Similarly, the laser light Fy is irradiated onto the x-axis mirror 9 fixed to the lower stone mount 2 to measure the gamma coordinates. z lasers are divided into two lanes, and the reflected light from the z-mirror fixed at the upper part of the lower stone mount 2 and the mirror 1〇5 (refer to Fig. 26) at the upper end of the stylus pen 101 are measured and measured. Z coordinate on the top. Referring to Fig. 2 together, the jig 12 for the measurement of the lens 11 (not limited to the lens, for example, a mold for lens forming) is provided by the A-axis horn table 13 and the rack gear. The χ 台 stage 14 and the B-axis angle measurement 2 are both manually mounted on the lower stone mount 2 . It is consumed by b: Μ ' The lens 11 is rotated around the γ axis and tilted, and can be consumed by a. 13 Adjust the direction of rotation around the X axis. Moreover, the position of the γ-axis direction can be adjusted by χγ^ 11 201015048. The jig 12 has a tapered spacer 16 fixed to the peak horn table, and a nucleus rH: 11 disposed on the tapered spacer π. The severable hook 18 is detachably attached to the upper ridge 17. The cone == the top of the piece 16 is inclined to the horizontal _ degree. The upper plate π is supported by three points on the upper surface of the spacer 16 . For the upper plate of the tapered spacer 16, the C-axis is clamped to the angular position above the cone by the U-positioning pin 19' by being disengaged from the positioning lock 19 and mechanically rotated,

It is configured such that the upper plate 17 can be mechanically rotated by the mechanical degree of the tapered spacer 16 each time.

The control/computing device composed of the computer and its peripheral devices performs measurement based on the operation of the entire program of the program side control unit 1 stored in advance, and performs various calculations for the measurement data. Specifically, the control device 21 is configured to return the entire probe unit 100 in the z direction so that the force acting on the stylus 101 at the lower end of the probe 103 is constant from the surface of the lens 11 as the measurement object. By controlling the servo, the probe unit 100 is sequentially scanned in the X or γ axis direction by the cymbal stage 3 and the cymbal stage 4, and the shape data is obtained by taking the pitch in a specific direction. Point group and remember. An output device 22 such as a display and its peripheral devices, and an input device 23 including a keyboard and a mouse are connected to the control/computing device 21. By the output device 22, the operation result of the control device 21 or the like is entered or displayed, and the command to the control device 21 can be input by the input device 23. The third-dimensional shape measuring method of this embodiment will be described below with reference to the flowchart of Fig. 3. First, the lens U is obliquely disposed to the lower stone mount 2 (step S3-1). Specifically, as shown in Fig. 6, the lens ^ is placed in such a manner that the mark 12 201015048 lla of the lens 11 comes to the negative side of the Y axis of the measuring machine 1. The mark Ua can be set by the plastic injection portion at the time of molding or the imprinting of the mold. Further, the lens 11 is obliquely inclined with the Y-axis as the center of rotation (in the direction of the B-axis). The tilt of the lens 11 about the Y-axis can be adjusted by the B-axis goniometer 15. When the measurable limit angle of the measuring machine 1 is 60 degrees and the maximum tilt angle of the lens surface is 80 degrees, if the lens 11 is set to have an inclination angle of 20 degrees around the γ axis, the X-axis direction of the lens surface is The part of the negative side of the shaft can be measured

The angle of the set surface suppresses the limit angle that can be measured at the measuring machine 1, and the three-dimensional measurement can be realized. Next, the measurement NC path is set (step S3-2). Referring to Fig. 6, the measurement path for the NC path is measured in the X-axis direction (solid line u丨) and the measurement path in the x-axis direction (dashed line L12). The measurement path Lu in the X-axis direction is a linear shape in the direction of the cuffs. The apex position Pt of the lens 11 (the point at which the position in the Z-axis direction is the highest) is in a state of being obliquely inclined in the x-axis. The cross section of the axis: the measurement path L22 in the /axis direction is a linear shape in the γ-axis direction, and is a section along the axis which is reduced by Pt by the apex of the lens u in a state where the yaw axis is obliquely inclined. Further, the measurement path mm in the X-axis and γ-axis directions is set so as to be accommodated within the range of the maximum inclination angle to be measured when measuring the lens surface which is inclined around the ¥ axis. Then, the state in which the stylus pen ι〇 is moved to the difficult position of the lens u is performed while maintaining the state of the y-axis toward the y-axis (step s3_3). The centering is performed by moving the XY stages 3, 4 in the direction of the lamp axis so that the stylus pen (8) comes to the lens vertex position Pt. "4k and measurement data storage (step S3.4). Specifically, 13 201015048. In the above-mentioned measurement paths Ln, L12, the stylus pen 1〇1 is moved in the x-axis direction and the Y-axis direction. The vertex position Pt of the lens u in the state of being disposed obliquely is used as the starting point, and 雠 is applied to the axis of the χ axis so that the maximum tilt angle of the measuring machine is applied to the stylus pen 〇 1 and the force of the lens 11 is "fixed" and the stylus pen u is scanned, and the position of the stylus pen 01 (XYZ coordinate) is sequentially measured, and the measurement data group as the X-axis direction is memorized or saved. The step is set in the oblique direction. The vertex position Pt of the lens 11 in the state is used as the measurement start point 'and the servo is applied to the axis of the x-axis direction so that the maximum inclination angle of the measuring machine i is _, and the force of the writing needle 1G1 and the lens U is - Set ' and scan the stylus 1 (π, sequentially measure the position of the stylus 101 at that time (ΧΥΖ coordinates), memorize or save the measurement data group for the SY-axis direction. Then 'calibrate the process, the county exits the axis and γ Measure Ο =1, _ _ _ _ 5). Next, according to the knot of 1 processing It is judged whether or not the tilt adjustment is required (step S3 is specific and the result of the calibration processing is performed. When the setting of the measuring machine 1 in the rotation direction (the A-axis) around the X-sleeve is large (for example, i. or more), the eight-axis operation is performed. The angle measuring table η, the rotation of the lens 11 around the X axis is only equivalent to the value obtained by the calibration process; the X axis (A axis) rotation amount (in order to fit the measurement data group to the lens: The rotation amount of the X-axis is adjusted, and the adjustment is made. (4) The setting angle around the X-axis is not measured (step S3-7). After the inclination adjustment, repeat from the centering to two... Judgment of the angle adjustment (steps). On the other hand, the calibration process is set in the direction of the lens u in the direction of rotation of the X-axis of the measuring machine (4) = (for example, under the object), then the end of the step is 14: 201015048 The measurement of the X-axis direction and the Y-axis direction of the lens 11 is performed, and the process proceeds to step S3_8. When the inclination adjustment is not required, the final lens η measured in the posture set in step S3-1 is obtained. Measurement data group in the X-axis and y-axis directions. The final measurement data group in the X-axis direction The data of the high inclined surface in the negative direction of the parent axis of the lens 11. In step S3-8, the tilt of the lens 11 is changed to change the measurement surface on the lens surface. Specifically, the axis of the lens 11 on the design coordinate system The reference 're-set the lens 11 by 180 degrees' is such that the mark #11a of the lens u comes to the negative side on the Y-axis. The rotation of the lens 11 can be temporarily removed from the tapered spacer 16 The upper portion 17 of the 12-piece upper plate 17 is changed by 18 degrees, and then the positioning pin 19 is positioned and attached to the tapered spacer 16 again. After the inclination of the lens 11 is changed, the NC path for measurement is performed in the same manner as before the tilt change. The setting (step S3_9) repeats the centering (step S3) 〇), the measurement of the y-axis direction and the γ-axis direction, the storage of the measurement data (step S3_n), and the tilt adjustment (step S3_14) until the measuring machine is around The setting deviation of the lens 11 in the rotational direction of the x-axis becomes quite small. The measurement NC path of the lens after the tilting of the lens is the same as that before the tilt change, and the measurement path in the x-axis direction is linear in the X-axis direction, and is placed obliquely obliquely in the x-axis. A cross section of the axis of the apex position Pt of the lower lens η, and a measurement path L22 in the γ-axis direction is a linear shape in the z-axis direction, and is a lens u which is placed obliquely obliquely on the Β axis. The profile of the axis of the vertex position pt. The deviation of the setting of the lens 11 in the rotation direction of the measuring machine 1 around the X-axis becomes relatively small, and when the step S3_13 does not require the inclination adjustment, the final flaw of the lens n in the posture changed in the step S3-8 is obtained. Axis and γ-axis 15 201015048 To measure the 疋-bean group. The measurement data group of the final axis direction obtained is the data of the high inclined surface of the lens 11 in the positive direction of the X-axis. Then, coordinate conversion, calibration processing, and data synthesis are performed on the measurement data group 'measured in the X-axis direction and the γ-axis direction measured in two postures (step S3-15). Refer to Figure 4 below for details on coordinate conversion, calibration, and data synthesis. First, the amount of shift of the lens u which is obliquely inclined (steps S3 to S3 8) to the lens design coordinate system (when the lens 11 is horizontally disposed) is calculated (step S4_1). The lens is disposed obliquely. The measurement data group at the time of 丨 is in the state indicated by the broken line of the 7A image of the 帛面. Therefore, the offset of the obliquely disposed position on the design of the lens design coordinate system is calculated, that is, the lens shown in Fig. 7B is calculated. The vertex offset position (Xt〇ff, Yt〇ff, Zt〇. Then, the offset calculated in step S4-1 is set to be obliquely inclined in two directions (steps S3-1, S3-8). The measured data of the X-axis and the γ-axis measured (steps S-1 to S3-7 and steps S3-8 to S3-14) are also coordinate-converted to the position measurement data (step S4_2). In other words, according to the offset calculated in step S4-1, all the obliquely set position measurement data are first rotated only by B, and then moved to the vertex position of the lens design coordinate system and obliquely. The difference between the vertex positions of the lenses when setting the lens, as shown by the dotted line in Figure 7B, Coordinate conversion is performed. Then, as shown in Fig. 9, only the amount of rotation of the lens u around the z-axis is measured, and coordinate conversion around the Z-axis is performed, and the coordinates are converted into design positions (step S4-3). The measurement data after the coordinates conversion of steps S4-2 and S4-3, including the cause 16 16150150 j j 'the lower end of the stylus 101 has a certain finite radius offset (probe R offset), In the step S4_4, after the correction of the probe R after the offset of the amount of the probe R is performed on the measurement data after the step S4_2 is converted, the difference between the design shape and the lens n is minimized. The difference between the design and the calibration process at the time of exiting the field. The following is a description of the step S4_4 cap design calibration process with reference to Fig. 1, and the first step, the manual movement calculation is performed (step S5-1). Specifically, The display of the output device 22 graphically displays the measurement data and the design. The operation of the input device 23 causes the measurement data to be moved in parallel or rotationally to fit as much as possible to the design. This is described later in step S5-2. When the RMS value is calculated as the first time, -# When the loops (lo〇p) of steps S5-1 to S5-8 are initially executed, the probe R correction of step S5_4 is performed by the money line (four) μ·3 because the result of the _ residual result described later is not calculated & The procedure of the probe R correction (step S5_4) will be described with reference to Fig. 8. In the 8th figure, in the state where the stylus 101 having the spherical shape of the front end is focused on the lens u, the lens coordinate system is in the X-axis direction. The measurement obtained by scanning at a specific sampling interval is indicated by a broken line L31. The shape of the lens surface (X, γ, Z) is represented by Z = f (X, Y), and is shown in Fig. 8. The inclination of the normal direction of the lens surface of the probe center coordinate Xm at the probe position is indicated by an arrow vu. Starting from the center position of the probe of Xm, the intersection of the vector V12 and the lens surface in the opposite direction of the arrow Vu is again determined by combining the vectors 乂12 and 2 ==f(X, Y). However, the point X' is located at a position deviated from the true contact point of the stylus pen 101 with the lens surface. In order to reduce the calculation error, the vector V13 in the opposite direction to the normal to the lens surface at the X position of 17 201015048 X' is calculated, and the intersection of the vector 13 and the lens surface at the start of the probe center position at xm is obtained. X HX ' can be obtained by combining vectors V13 and z = f(XY). Next, re-set X" to X and re-determine X". This calculation is repeated until the distance difference between X and x', 2 points is quite small from the viewpoint of the decomposition ability of the measuring machine i, and is calculated as a value close to the true contact point. After the probe R is corrected, the data in the effective radius ER region of the lens 11 set in advance in the measurement data group corrected by the probe R is extracted (step S5-5). That is to say, in the present embodiment, the target area (calibrated effective diameter) of the design calibration is included in all the measurement data of the effective radius ER of the lens u. Next, the calibration amount of the XYZAB axis is calculated by the least square method (step S5-6). Specifically, the sum of the squares of the differences between the points of the measurement data group in which the probe r obtained in step S5_5 has been corrected and the design shape of the lens ( (the corresponding point of the lens u. The minimum minimum flat method is used to calculate the deviation between the measured data group of the probe R corrected and the parallel direction of the design axis, the γ axis and the Ζ axis, that is, the calibration quantities dX, dY, dZ, and calculate the winding The deviation of the rotation of the X-axis and the Y-axis, that is, the calibration amount dA, dB. These calculated calibration quantities dX, dY, dz, dA, and dB are stored as cumulative calibration results. The receiver's coordinates of the probe R corrected in step S5-4 are coordinate-converted by the calibration amount, dY, dZ, dA, and dB' calculated in step S5_6 (S5-7). Next, the sum of the squares of the difference between the measurement data group and the design shape after the coordinate conversion by the calibration amount in step S5-7 is calculated and stored (step S5-8). 18 201015048 Repeat the process from the manual calculation of the wood (step S5-1) to the calculation of the RMS value (step S5·8), the calculation result of the previous value of the previous calculation and the change of the calculation result of the current RMS value. The rate is less than the specific range (step S5-9). No. 2: When the money is owed to execute the cycle of the step, the manual movement calculation is performed (after step S5_D and before the probe R is corrected (step (4), by accumulating the right, ', . At the time of execution, coordinate conversion is performed in the calibration amount dX dY dZ, dA) calculated in step (step S53). The calibration amount dA dB calculated by the least square method in step S5 6 is not a strict solution but is an approximate solution, but A more accurate calibration process can be achieved by repeating the processing of step 8. Μ In step S5 9 'When the rate of change of the calculated result of the RMS value is less than the specific I interval, the calibration process for the Sxst type ends. At this time, in the previous step In S5-7, the calibration of the probe is corrected. After the end of step S4_3 and FIG. 5 of FIG. 4, as shown in FIG. 9, only the coordinates of the z-axis are converted for the calibration data by setting the lens around the z-axis during measurement. Convert the calibration data to coordinates measured on the lens coordinate system The position to be determined. For the calculation of the two directions (all tilting configurations of the lens )), after the processing of the method (step S4_5), the lens design shape and the measured lens U are determined for both directions. The difference in shape is combined, and the obtained data is synthesized and memorized, and output to the output device 22 as needed (step S4_6). Fig. 10 is a view showing the calculation result of the embodiment 1. The horizontal vehicle 19 201015048 is The x-axis, the unit is 111111 'The difference between the vertical axis system and the z-direction of the design shape Zd (= (measurement data) - (design value)) 'unit is mm. As shown in the first figure, by this implementation The three-dimensional shape measurement method of the type can realize the shape evaluation of the lens surface having the inclined surface of 8 degrees. In the embodiment 1, the lens is rotated by 180 degrees during the measurement, and the measurement is performed from the two directions and measured on the X-axis. Data, but the lens ^ can be rotated 9 degrees each time, and

The data on the Y-axis is obtained in the same manner as the data on the X-axis, and the profile data on the X-axis and the Y-axis of the lens 11 is measured. In the first embodiment, in the first embodiment, the measurement is performed in two setting states in which the lens u φ is rotated at an angular increment of 18 degrees from the z-axis of the s coordinate system. The X-axis of the design coordinate system of the 获得 obtains the profile data, but the measurement can be performed for the four setting states in which the lens 11 is rotated at an angular increment of 90 degrees centering on the Z-axis of the design coordinate system. The X-axis and Y-axis of the coordinate system are designed to obtain profile data. (Embodiment 2) Most of the lenses used in camera-attached mobile phones and DSCs (digital cameras) are axisymmetric aspherical lenses. However, when the difference between the design shape and the actual shape is large, there is a case where the calibration data does not extend horizontally. This phenomenon occurs because the number of data points is not symmetrically distributed based on the design center. The measurement results in the above-mentioned Fig. 10 are also unnatural in the central portion of the measurement data on the X-axis of about ± 〇 4 mm on the X-axis. In this case, when analyzing the other data shown in Figure 11, the data should be symmetrical based on the point of the lens design coordinates. Because of the data on the negative side of the χ axis, the trend is shown by the solid line L41. The negative direction of the shaft is reduced by 20 201015048. The data in Fig. 11 is taken from the lens design coordinates, and the data points are bilaterally symmetric with X=G as the center, and the calibration results obtained by the operation are shown in Fig. 12. In the case where the measurement data is taken from the left-right symmetry of the towel, if the trend is displayed by the solid line L42, the calibration data is roughly symmetrical, which becomes a factual information. When the aspherical amount of the lens shape is large, by using the lens design coordinates, the measurement data group extracted in the central symmetrical region (symmetric region CER) can perform accurate calibration for the juice shape. However, when the amount of aspheric surface is insufficient, the movement of the X-axis direction is separated from the rotation about the Y-axis and cannot be calibrated. Hereinafter, the description will be made with reference to Figs. 13A to 13C. In the case of the lens surface having a large amount of aspherical surface shown in Fig. 13A, the shape of the liquid on the lens surface (solid line) is a shape that faces away from the spherical surface. Therefore, it is necessary to move the measurement data group (dotted line) of the lens surface to overlap In the case of designing the shape, the amount of parallel movement in the X-axis direction and the rotational movement angle around the γ-axis can be accurately obtained. However, in the case of the lens surface having a small amount of aspherical surface shown in Fig. 13C, since the design shape (solid line) of the lens surface is close to the spherical surface, the f group (dotted line) α of the lens surface is required to be moved. When the weight is at the design frequency, it is difficult to individually determine the amount of movement in the X-axis direction and the amount of rotation around the γ-axis. Further, as shown in Fig. 13®, depending on the design of the lens, the shape of the central portion of the lens is close to the spherical surface, and the amount of the aspheric surface is large outside the lens (the case where the aspheric amount is medium). In this case, when the measurement data group (dotted line) of the lens surface is to be superimposed on the design shape (solid line), if the measurement data of the entire surface is used, the amount of movement in the x-axis direction can be accurately obtained. And the amount of rotational movement of the gamma axis of the wrap. However, if a measurement data group of a region having a small amount of aspheric surface 21 201015048 near the center is used, it is difficult to separately obtain the amount of the spherical direction and the rotational movement angle around the γ axis. The implementation of the type 2 3 dimensional measurement method takes into account the above two points, and considers the symmetry of the data points centered on the X = 〇 or γ = 〇 of the lens design coordinates, and for various aspherical lenses. Correspondence. The third dimension measurement method of this embodiment 2 is the same as the embodiment 1 described with reference to the fourth aspect, but the specific processing from the coordinate conversion to the data synthesis (step S3-15 of Fig. 3) is different. Fig. 14 is a view showing the processing from the conversion of the coordinate of the embodiment 2 to the data synthesis (step S3-15 of the third diagram). In the fourteenth figure, the calculation of the offset amount of the setting position on the design formula and the coordinate conversion of the measurement data according to the design (steps S14_1, S14-2), and the calibration data according to the setting direction of the lens c The rotation of the shank direction (step S14_3) and the position of the data synthesis (S14-8, S14-9) are the same as those of the implementation type i (steps of Figure 4, Team 1 to S4-3, S4- 5. S4-6). The calculation of the offset amount of the installation position on the design formula and the data conversion (step S14-1, step SM-2) based on the measurement data and the rotation of the C φ axis direction of the calibration data (step S14-3) In the same manner as the implementation type 1 (Fig. 5), the repeated calculation of the calibration process of the design is performed so that the calibration effective diameter is all the data included in the effective radius ER of the lens 11 so as to be in the design shape of the lens 11. After the difference is minimized, the difference at that time is obtained. When the rate of change of the RMS converges within a specific range in step S14-4, the process proceeds to step S14-5. In step S14-5, the calibration amounts dY and dA of the γ-axis and the A-axis are fixed to the values calculated in step 22 201015048 and S14-3, and the calibration data points and columns are coordinate-converted with dY and dA, and the calibration is valid. The rest is set in the symmetry area cer, and the repeated calculation of the design calibration process is performed to calculate dx, dB. When the rate of change of the step si4_^ RMS converges within a specific range, since the calibration is completed, the process proceeds to step SU-8. On the other hand, in step SM_5, when the rate of change of RMs does not converge within a specific range, the process proceeds to step S14_6. In step si4_6, the alignment amounts dY'dA, dXg of the Y-axis, the A-axis, and the X-axis are set to (4) Μ]

The calculated value 'by dY, dA, dX will be measured after the data point is converted into coordinates. 'Set the calibration valid record to the meditation coffee, perform the repeated calculation of the calibration process of the collection, calculate the dB, and make the calibration complete. . °X° > When the rate of change of RMS does not converge within a specific range in step Si4-4, the process proceeds to step S14-7. In step S14-7, the calibration quantity and dX of the Y-axis and the χ-axis are fixed to the values calculated in step S14_4, and the coordinate points of the measurement data are converted into coordinates, and the calibration effective diameter is set in the symmetry. The zone CER performs a double calculation of the design calibration process to calculate the dB, and the calibration is completed. In Fig. 14, step 814 is passed from step S14_4. The case where the calibration is completed corresponds to the case where the aspheric amount of the lens 11 is large (Fig. 13A). Further, the case where the calibration is completed from step S14-4 through steps S14-5 and S14-6 is equivalent to the case where the aspheric amount of the lens 11 is moderate (Fig. 13B). Further, the case where the calibration is completed from step S14-4 through S14-7 is equivalent to the case where the aspheric surface of the lens 11 is small (Fig. 13C). The processing contents of steps S14-4 to S14-7 will be specifically described below. The figure shows the details of step S14-4 of Fig. 14. Figure 15 shows the calibration of the design in the third implementation mode (step S4-3, except whether the rate of change of the RMS value is accommodated in a specific range (疋 收敛 convergence) by repeated calculations. Figure 5) is the same. First, the counter for the number of times of calculation is set to the initial value of 0 (step S15_1). Next, the counter is incremented by only 1 (step S15-2). Next, manual movement calculation is performed (step S5-1). Specifically, the reset values of the calibration quantities dX, dY, dZ, dA, and dB are 0, and the display device of the output device 22 displays the measurement data and the design formula graphically, and the measurement is performed by the operation of the input device 23. The data is moved in parallel or rotated to fit as much as possible into the design. When it is N-1 in step S15-4 (the first execution of the loop of steps S5 - 5 to S15 - 10), the probe R correction is executed without executing step S15-3 (step S15_6). This probe R correction system is the same as the probe R correction of the third embodiment described with reference to Fig. 8 (step S5-4 of Fig. 5). - After the probe R is corrected, the data in the effective radius ER region of the lens 11 in the measurement data group corrected by the probe R is extracted (step S15_7), and the calibration amount of the XYZAB axis is calculated by the least square method (step s5_8) . Specifically, the method of calculating the sum of the squares of the differences between the points of the measurement data group corrected by the probe R and the design shape of the lens 11 obtained in step S15-7 is the minimum minimum method, and the calculation is performed. The deviation between the measured data group and the X-axis, the γ-axis, and the z-axis of the design shape corrected by the probe R, that is, the calibration amounts dX, dY, and dZ, and the rotation around the X-axis and the Y-axis is calculated. Deviation, ie the amount of calibration dA, dB. The calculated calibration quantities dX, dY, dZ, dA, and dB are stored as cumulative calibration results. Next, the measurement data group corrected by the probe R extracted in step Sls_7 is coordinate-converted by the calibration amount 24 201015048 dX dY, dZ, dA, dB ' calculated in step S15-8 (S15_9). The square sum of the difference between the measured data group and the design shape converted by the coordinate by the calibration amount, i.e., the RMS value, is calculated and recorded (step S15-10).

The processing of the steps S15-2 to S15-10 is repeated until the rate of change of the RMs value is less than the specific range (the step is still - (1) after the execution of the step of the step YANG S15-10 after seven times, the manual movement calculation is performed ( After step si5_3) and before the probe R correction (step S15_6), coordinates are performed by accumulating the calibration result (the calibration amount dX, dY, dZ, dA, dB calculated in step 5_6 at the previous cycle execution) Conversion (step S15-5). When the number of repetitions of the cycle of v5-15 to S15-10 is N times, when the rate of change of the RMS value is smaller than a specific range (when the rms value converges), the process proceeds to step· 14_5 (Fig. 16), but when the number of repetitions of the cycle exceeds N times (when the RMS value is not received), the process proceeds to step si4_7(5)8 (steps S15-11, S15-12). Figure 16 shows the details of step 814_5 of Figure 14. In Fig. 16, in the calibration process for designing all the data in the radius of the calibration as the radius of the rule, when the ruler ^18 value converges (the calibration amount dX' dY' dZ ' dA ' can be obtained] In the case of the solution of the dB, the measurement data group of only the cell (symmetric area CER) near the center of the lens u is targeted, and the calibration amount dx of the remaining axis other than the calibration amounts dY and dA is newly calculated, and is committed. Then, the known dY, dA, dX, dZ, and dB will be designed. The measurement data after the coordinate conversion is performed by the offset of the position (step S14 2) is coordinate-converted. That is to say, the processing system of Fig. 16 is γ pumping and the calibration quantity of the axis of a 25 201015048 is determined by the data of (4), and (4), the measurement data of the symmetric area CER is used to calculate the calibration amount of the remaining axis. By the processing of the (4); map (step S14-5 of Fig. 14), as described with reference to the item (10), even if the number of points of the measured data group is unevenly distributed to the center of the design data, it can be excluded. The influence of the lens 11 on the positional deviation of the measuring machine i can be measured with high precision. The processing of Fig. 16 will be specifically described below. First, the counter for the number of times of calculation is set to the initial value 〇 (step S16-1). Next, the counter is incremented only 丨 (step si6_2). Next, the measurement data is coordinate-converted using the calibration amounts dY and dA obtained in step S14-3 (step S16_3). The measurement data of the object to be converted is a coordinate conversion (steps S14-1, S14-2) according to the offset of the set position on the design, and a rotation in the direction of the direction in which the lens u is disposed (step S14- 3) The measured data of the completion. When the step S10-4 is N-1 (the first execution of the loop of the steps S10-2 to S1hl0), the probe R correction is executed without executing the step S16_3 (step S16-6). This probe R correction system is the same as the probe R correction of the third embodiment of the present invention described in Fig. 8 (step S5_4 of Fig. 5). After the probe R is corrected, the data in the symmetry area CER in the measurement data group corrected by the probe is extracted (step S16_7), and the calibration amount of the XZB axis is calculated by the least square method (step S16_8). Specifically, the least square method in which the sum of the squares of the difference between the points of the measurement data group corrected by the probe R captured in step S16-7 and the design shape of the lens 11 is minimized is calculated, and the obtained Calibration of the measured data set and design shape of the probe R corrected 26 201015048 The quantity dX, dZ, dB: These calculated calibration quantities dX, dZ, and dB are the cumulative calibration results. Next, by measuring the amount of recklessness, dA, and dB, the measured data group is coordinate-converted (8) (4). The measurement data (all data within the effective radius ER) obtained by the probe obtained in the step of Fig. 15 which is the target of the coordinate conversion. Further calculating and reading the sum of the squares of the measured data group and the design shape (10) converted by the calibration material coordinates in the symmetric region CER, that is, the value (step lion 6_ι〇).

重复 Repeat the processing of steps S16-2 to S16-10 until the rate of change of the value of 8 is less than the specific range (step _6:7). When the cycle of the lion 6_2 16 10 is executed after the second time, the cumulative calibration is performed by calibrating the lamp, converting from the coordinates performed (step si6.3) and before the probe R correction (step sis_6). As a result (the front cut is followed by Wei Xing, Yu Bu Na. The calculated calibration amount X dY dZ, dA, dB') performs coordinate conversion (step S16-5). ▲When the number of repetitions of the cycle of steps S16-2 to S16-10 reaches N times, the variation of the monthly J RMS value is smaller than the case where the specific range s s value converges): since the data collection is completed for the calibration of the design job, Transfer to step S14.8 of Figure 14 'The number of repetitions of the cycle exceeds N times (the RMS value does not arrogate the situation Μ 'transfer to step si4_6 (Fig. 17) (step (4) VII, S16-12). The figure is not detailed in step S14-6 of Fig. 14. Fig. 17 is in Fig. 16 (step _4-4 of Fig. 14). When the RMS does not converge, the fixed Y-axis is valid for calibration without cer. When the remaining calibration amount in the calibration of the radius is not determined, the same amount of processing is performed by fixing the calibration amount dX of the X-axis. By the first opening (the step of the second drawing is called -2010 2715015048, even for reference The shape of the central portion of the lens described in the third step is close to the case where the portion outside the lens is aspherical (the spherical amount is medium (6)', and the position of the lens 11 for the measuring machine i can still be excluded." The shape of the lens is measured by U冋 precision. The following description shows the processing of Figure 17. First, use The calibration quantities dY, dA, and dx obtained in step S14-3 are coordinate-converted (step Sm). The data of the coordinate conversion object is offset according to the set position on the attack type. The coordinate conversion (steps sm, sh-2) and the measurement data in the c-axis direction rotation (step S14_3) in response to the setting direction of the lens n. In step S17_2, the RMS value is calculated as the first time (step S17). In the first execution of the loop of S17_8, the probe R correction of step S17_4 is executed without executing step S17_3. The probe R correction is corrected with the probe R of the first real type described with reference to Fig. 8 ( Step S5_4) in Fig. 5 is the same. After the probe R is corrected, the data in the symmetric region CER in the measurement data group corrected by the probe R is extracted (step sn-5), and the zb axis is calculated by the least square method. The amount of calibration (step S17-6). Specifically, the sum of the squares of the differences between the points of the measurement data group corrected by the probe R taken in step S17_5 and the design shape of the lens 11 is minimized. The Xiaoping method is used to calculate the measured data group and the set of the probe R that has been corrected. The calibration amount of the shape (12, dB, . The calculated calibration amount dZ', dB' is the cumulative calibration result. Next, the calibration amount dX, dY, dZ, dA, dB' will be measured. The data group is coordinate-converted (S17-7). The target data is converted into the measurement data of the probe R obtained in step S15-6 of Fig. 15 (effective half 28 201015048)

All the information in it). Further, the RMS value of the difference between the measured data group and the design 幵/shape after the coordinate conversion of the data in the symmetry area CER by the calibration amount is calculated and stored (step S17_8). The above process is repeated until the RMS value is obtained in step S17-9. When the loop of steps S17-2 to S17-8 is executed after the second time, the coordinate conversion by the calibration amounts dY, dA, and dx (before step S17_U and before the probe R correction (step si7_4)) is performed by Cumulative calibration result (at the previous cycle execution, the calibration amount calculated in step 85_6, 丫1, £1, (18,) performs coordinate conversion (step 817_3). Figure 18 shows the 14th The details of step 814_7 of the figure. Fig. 18 is in the U diagram (step S14-4 of Fig. 14), when the RMS value does not converge, that is, within the effective radius ER of the lens 11 for the calibration effective diameter In the design calibration process of all data, the RMS value converges (the case where the solution of the calibration amount dX, dY 'dz, dA, dB cannot be obtained). By the step μ (step of Figure 14) The processing of S14-7), even if the aspherical amount of the lens surface is small as described with reference to the i3c diagram, can eliminate the influence of the positional deviation of the setting machine 1 on the position of the fixed machine 1, and the lens is measured with high precision. First, in step S18-1, the calibration amount dA, the Huai Shi _ ° is again 〇, and the school soap is effective half (four) In the calibration of the data, the calculation procedure of the remaining data is the same. The processing of the steps 818-2 to SltlO in Fig. 18 is fixed in step S18-1 except for the gamma slave quantity. In the middle, all the data are the dX' and dY' of the axis, and the measurement data group of the CER only in the symmetry area is calculated as the remaining amount of the calibration axis dZ", dA", and dB". 17Fig. 29 201015048 The processing of steps S17-1 to S17-9 is the same. Fig. 19 is an example of the calculation result of the implementation type 2. This figure is in the step 814_5 of Fig. 14, the RMS value converges. The horizontal axis of the figure is the X-axis, the unit is the claw, and the vertical axis is the difference between the two directions of the design shape. (Measurement)-(design), the unit is mm. As shown in the figure, in the third-order shape measuring method of the present embodiment, the shape of the lens surface having the inclined surface of 80 degrees can be evaluated so that the data overlaps at the central portion of the lens. In the embodiment 2, the measurement is performed. Rotate the lens 18 degrees, measure 'from 2 directions' and measure the data on the X-axis, but the lens can be made every 9 degrees. Rotation, _ acquires the data on the γ-axis in the same way as the data on the X-axis, and measures the profile data on the 乂 axis and the Y-axis of the lens 。. The second diagram shows the leaf calculation in this case (implementation type) 3) The lens 11 is an aspherical lens for a camera-attached mobile phone or the like, which is approximately the same as a spherical lens having a spherical radius of 1 〇 3 ugly in the case of a spherical surface, and an aspherical surface with respect to the lens surface of the spherical surface The amount is sometimes only a few μηη. After the right is made for this (four) mirror u 'money design, if φ uses plastic or other materials to shape the lens n, it will be the same level as the aspherical surface due to shrinkage during molding. The case where the number is called the deformation of the level. In this case, the 'designed shape is estimated from the actual shape, and the estimated design shape is used. The measurement data is placed on the measuring machine, and the measured data is coordinate-converted and calibrated, thereby accurately measuring the high-inclined portion. The 3 dimensional shape. The following is explained using a specific example. Referring to Fig. 21, the design of the axisymmetric aspherical lens is expressed by, for example, 30 201015048 (4). This design is composed of a spherical term (spherical radius R), a conical coefficient κ representing an ellipse, a hyperboloid characteristic, and an aspherical coefficient Ai (i = 1 to about) indicating a difference from the spherical surface. [Number 4]

h=v^Y2) R: spherical radius κ : conical coefficient

Ai : # spherical coefficient X : X coordinate direction coordinate value γ : Y coordinate direction coordinate value. When the measurement data group is calibrated to the design shape, the deformation shape error is regarded as the design formula of the formula (4), and only the spherical radius R is generated. Change to change the value of the spherical radius R. Then, the measurement data group is calibrated for the design shape in which the spherical radius r is changed, and the optimum fitting scale value at which the RMS value is the smallest is calculated. Fig. 22 shows the result of using the difference between the calculated shape of the calculated best fit r value and the measured data point group. Figure 22 shows the original design shape. The error in the Zd direction is less than the calibrated Figure 19, which becomes a design that fits better to the design shape. The obtained optimum fitting R value is taken as a design shape, and the conversion amount of the coordinates χγζΑΒ in each state is calculated and stored by the procedure of the implementation type i or the implementation type 2. Thereafter, the design shape is restored to the original design shape, and the coordinate conversion and the probe scale correction processing are sequentially performed in accordance with the coordinate conversion amount of the memory, and the three-dimensional shape data is displayed as the difference between the 31 201015048 J疋 data group and the original design shape. By this, the coordinate conversion and the probe R correction can be performed with higher precision from the obliquely set state, and high-precision measurement of the high-inclined surface can be performed. Further, in order to calculate the coordinate conversion amount of the measurement data group more accurately, and to connect the overlapping portions of the center portion with high precision, it is also possible to estimate the design shape of the measurement material group itself. For example, when the design formula of the axisymmetric aspherical surface is expressed by the formula (4), in addition to the parameter calculation of the aforementioned best fit R, the

The Αι item of the aspherical term is re-fitted so that the RMS value of the calibration measurement data set becomes the smallest speculative design shape. The calculated design parameters are calculated as the design shape 'in the implementation mode' or the execution type 2 program, and the conversion amount of the coordinates XYZAB in each state is calculated and stored. Thereafter, the design shape is restored to the original design shape, and the coordinate conversion and the probe R correction processing are sequentially performed in accordance with the coordinate conversion amount of the memory, and the three-dimensional shape data is displayed as the difference between the (four) group and the original design shape. As a result, coordinate conversion and detection correction can be performed with higher precision from the obliquely disposed state, and high-precision measurement of the high-inclined surface can be performed. In order to better align the overlap of the central part, the symmetry is well evaluated, and the processing of the type 1 or the implementation type 2 is performed, and the output of the 10th figure can be manually adjusted. Specifically, the output data of the first image is monitored by the display of the output device 22, and the data of the left region of the data for the two directions is manually controlled by the input device 23 to rotate around the axis and the Z axis. The horizontal movement of the direction. Moreover, for the data of the right area, the movement around the Y-axis and the horizontal movement in the z-axis direction are performed manually. With these manual adjustments, the two data movements 32 201015048 are superimposed and combined in the central region of the symmetric CER of the two data, so that even one part of the measurement data contains noise data due to waste on the lens surface. In the case of the high-inclination surface, it is possible to superimpose the data of each of the missing parts. Further, in order to more accurately align the central portion of the 'symmetric good evaluation data' to perform the process of the type 1 or the implementation of the state 2, the output of the 23rd figure can also be used to move using the least square line and synthesis. Specifically, in the symmetric region CER in which the measurement data is obtained symmetrically in the center of the design shape, the measurement data in the two directions, that is, the measurement data group DL in the left region and the measurement data group DR in the right region are performed as follows. deal with. 1) The central portion of each of the measurement data DL and DR is linearly approximated by the least square method on the XZ plane (symbols L51 and L52 in Fig. 23). 2) The two approximate straight lines L51 and L52 are superimposed on the X-axis to calculate the amount of rotation around the γ-axis (approximate straight line L51, the inclination of L52 with respect to the X-axis) and the amount of movement in the Z-axis direction. 3) The two measurement data groups DL and DR are rotated and horizontally moved by the amount of rotation around the γ-axis and the horizontal movement amount in the two-axis direction calculated by 2), and the measurement data groups DL and DR are synthesized. With the above processing, even if one of the measurement data groups DL and DR contains noise information due to waste on the lens surface, and no manual alignment is performed, the weight of the central portion of the cake can be High-precision measurement of high-inclined surfaces. (Implementation 4) In the implementation of the pattern 1 or the embodiment 2, the treatment is performed on the obliquely disposed lens 33 201015048 Η, and the probe Π) 2 is directed to the measuring machine as the χ axis and the γ axis direction on the coordinate system, That is, the measurement result of scanning in the cross direction in the face of the face. In order to evaluate the lens surface as a surface shape, the scanning path on the stroke-like surface as shown by the second paste, in the state where the probe 102 is in focus, in the lens ^, the stylus 1〇1 is turned to the ΧΥ direction Continuous scanning, the measurement data group on the surface can be obtained. In Fig. 24, the symbol Α1 indicates that the lenticular effective area' symbol μ indicates a region in which the probe 102 of the measuring machine 11 can follow the surface shape. The test data group on the surface is divided into two groups of the data group (dotted line) on the x-axis and the data group (dashed line) on the outer side. Then, in the implementation type 1 or the implementation type 2, the measurement on the X-axis is used as the data group (solid line) group on the sphere, and the measurement material on the Y-axis is used as the outer measurement data group (dashed line). By processing, it is possible to perform high-precision measurement of high-inclined surfaces as surface data. (Embodiment 5) - Verification to perform the three-dimensional shape measurement method of the embodiment 1 to 4 - The measurement accuracy of the measuring machine 1 is preferably the main working member 31 as shown in Figs. 25A and 25B. The main work piece 31 is formed of an elliptical portion 31a having a radius of χγ in the χ γ direction and a radius Rz in the Ζ direction, and is made of a material of a super hard alloy electroplated nickel. At this time, the elliptical shape portion 31a is represented by the following design formula. First, the design pattern in which the axis of symmetry is perpendicular, that is, in the Z-axis direction, is as shown in the following formula (5). [Number 5]

34 201015048 When designing the XZ plane horizontally, the design is as follows (6). [Number 6]

The design formula when the YZ plane is horizontally set is as follows (7) [Number 7]

By having the elliptical portion 31a' as shown in Fig. 25A, the shape from 0 degrees to 60 degrees in the vicinity of the Z-axis can be evaluated, and the shape accuracy can be confirmed. Thereafter, as shown in Fig. 25B, the shape is rotated from the X-axis by 90 degrees, and the shape of the main workpiece from 0 to 60 degrees can be evaluated from above the Z-axis to confirm the shape accuracy. By confirming that the elliptical shape portion 31a of the main work piece 31 in each direction is accommodated within a specific value from the deviation of the design shape, and the symmetry axis is regarded as the vertical direction, the measurement can be performed from the above at an angle of 〇~90°. Accuracy verification of machine 1. The above embodiment is described by taking the X-axis as a reference. However, the method of the present invention can be carried out even if the X coordinate and the Y coordinate are replaced and the Y axis is used as a reference. INDUSTRIAL APPLICABILITY The three-dimensional shape measuring method of the present invention can accurately measure an inclined surface which is larger than a tilt angle which can be measured by a conventional three-dimensional shape measuring machine, and is applicable to a lens such as a mobile phone used in a camera. The lens surface used for a pickup lens such as a BD or the like has a high tilt 35 201015048 oblique lens shape for tilting the optical axis, and is used for high-precision three-dimensional shape measurement. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a three-dimensional shape measuring apparatus for performing a three-dimensional shape measuring method of the first embodiment. Fig. 2 is a schematic side view showing a jig of a lens (measured object). Fig. 3 is a flow chart showing the method for measuring the shape of the third dimension of the embodiment 1. Fig. 4 is a flow chart showing the details of the step S3-15 of Fig. 3. Fig. 5 is a flow chart showing the details of the step S4-4 of Fig. 4. Figure 6 is a perspective view showing the mode of the measurement route. Fig. 7A is a schematic side view showing the measurement route before the coordinate conversion. Fig. 7B is a schematic side view showing the measurement route after the coordinate conversion. Figure 8 is a schematic diagram for explaining the correction of the probe R. Figure 9 is a conceptual diagram for explaining the coordinate conversion on the C-axis. Fig. 10 is a view showing an example of the measurement result of the embodiment 1. Fig. 11 is a view showing another example of the measurement result of the embodiment 1 (when the measurement data points have asymmetry). Fig. 12 is a view showing the results of the measurement of the embodiment 1 when the number of measured data points is asymmetrical, and the result of calibrating the data in the center with symmetry. Fig. 13A is a schematic view showing the relationship between the measured data group and the design shape when the aspheric amount is large. Fig. 13B is a schematic view showing the relationship between the measurement data group and the design shape when the aspheric amount is medium. 36 201015048 Fig. 13C is a schematic diagram showing the relationship between the measured data group and the design shape when the aspheric amount is small. Fig. 14 is a flow chart showing the method of measuring the three-dimensional shape of the embodiment 2. Fig. 15 is a flow chart showing the details of the step S14-3 of Fig. 14. Fig. 16 is a flow chart showing the details of the step S14-4 of Fig. 14. Fig. 17 is a flow chart showing the details of the step S14-5 of Fig. 14. Figure 18 is a flow chart showing the details of step S14-6 of Figure 14. Fig. 19 is a view showing an example of the measurement results of the embodiment 2. Fig. 20 is a view showing other measurement results of the embodiment 2. Fig. 21 is a perspective view showing a mode of design of an axisymmetric aspherical lens. Fig. 22 is a view showing an example of the measurement result of the best-fit R using the embodiment 3. Fig. 23 is a view for explaining the superposition of the least squares method of the embodiment 3. Fig. 24 is a plan view showing the mode of scanning on the surface of the embodiment 4. Fig. 25A is a schematic side view showing the main work piece (the symmetry axis is set in the Z direction). Fig. 25B is a view showing the pattern measurement of the main work piece (horizontally set on the XZ plane). Fig. 26 is a schematic view for explaining an example of a probe unit of a three-dimensional shape measuring device. Fig. 27 is a conceptual diagram for explaining an example of a conventional three-dimensional shape measuring method. 37 201015048 Fig. 28 is a conceptual diagram for explaining another example of the conventional three-dimensional shape measuring method. Figure 29 is a schematic view for explaining measurement errors resulting from rotation about the X-axis. [Description of main component symbols] 1...3 dimensional shape measuring machine 19... positioning pin 2... lower stone fixing seat 21... control/computing device 3...X-axis table 22...output device 4.. .Y-axis table 23...Input device 5...Upper stone mount 31...Main work piece 6...He-Ne Laser 31a...Oval spheroid 7...Optical system 100... Needle unit 8...X-axis mirror 101...needle pen 9".Y-axis mirror 102...probe 11...lens 103...micro air slider 12...judge 104....semiconductor laser 13... Α axis angle measuring table 105... mirror 14...XY stage 106···measuring object 15...B-axis horn table 107...needle 16L 16...conical spacer 108. .. error signal generating portion 17 ... upper plate 109 ... servo circuit 18 ... support fishing 110 ... line twin motor

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201015048 2003⁄4 200b, 200c...Measurement data 200d...Synthesized data 301a...Central portion 301b, 301c...Part 302...Design optical axis 401a...Solid line 401b...Dash line S3-1 ~S3 -15··.Steps 54-1 to S4-6...Steps 55-1 to S5-9...Steps 514- 1-S14-9...Steps 515- 1 to S15-12...Steps 516- 1 to S16^ 12···Steps 517- 1 to S17-8·.·Steps 518- 1 to S18-10...Steps

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Claims (1)

201015048 VII. Patent application scope: 1. A method for measuring a three-dimensional shape, wherein the measurement object is set to a first installation state which is inclined around the Y-axis, and the Z-axis of the design object of the measurement object is The center is rotated by one or more times in a natural multiple of 90 degrees or less, and the first setting state is set to one or more second setting states, and for each of the first and second setting states, The coordinates of the X-axis, the Y-axis, and the Z-axis of the surface of the measurement object are measured on a straight line passing through the X-axis direction of the vertex coordinates of the design of the measurement object, and the first measurement data group is obtained and passed through the measurement object. The coordinates of the X-axis, the Y-axis, and the Z-axis of the surface of the measurement object are measured on a straight line in the Y-axis direction of the upper vertex coordinates, and the second measurement data group is obtained, and the first and second installation states are used. The first and second measurement data groups calculate a difference from the design shape, and the difference between the first and second installation states and the design shape is combined. 2. The method of measuring a three-dimensional shape according to the first aspect of the patent application, wherein the angle increment is 180 degrees, and the second setting state is one. 3. The third dimension shape measuring method according to the first aspect of the patent application, wherein the angle increment is 90, and the second setting state is three. 4. The method for measuring a three-dimensional shape according to any one of claims 1 to 3, wherein the first and second measurement data sets are used to calculate a difference from the design shape 40 201015048, and the preliminary coordinate conversion is performed, and the aforementioned The first and second measurement data groups are rotated and moved in parallel with the tilt around the Y-axis, and the coordinates are converted into the design coordinate system* of the measurement object when the tilt around the Y-axis is not performed, and calibration is performed. Converting the first and second measurement data groups that have been subjected to the preliminary coordinate conversion to coordinates, and fitting the shape of the measurement object to the design shape of the measurement object, and calculating the first measurement data group and the measurement object that have been subjected to the calibration. The difference in the aforementioned design shape. 5. The third dimension shape measuring method according to claim 1, wherein the first and second measurement data groups are calculated by using the first and second measurement data groups to calculate a difference from the design shape, and the first and second measurement data groups are generated. In response to the above-described rotation about the yaw axis and the parallel movement, the coordinates are converted into the aforementioned design coordinate system * _ for the X-axis, the Υ-axis, the Ζ-axis, and the 未 without the aforementioned measurement of the inclination around the Υ The first and second measurement data groups that have been subjected to the preparatory coordinate conversion, and the first calibration amount fitted to the design shape of the measurement object, from the X-axis, the Y-axis, and the Z-axis In the first calibration amount of the A-axis and the B-axis, two or three are selected as the fixed calibration amount, and the first coordinate conversion is performed, and the first measurement data on which the preliminary coordinate conversion has been performed is performed with the fixed calibration amount. The group is coordinate-converted, and the second calibration amount is calculated for the axis other than the calibration amount of the solid axis 41 201015048 among the X-axis, the Y-axis, the Z-axis, the A-axis, and the B-axis, and the first coordinate conversion is performed. First measurement When the group is fitted to the design shape of the measurement object, the second calibration is performed, and the first measurement data group subjected to the preliminary coordinate conversion is coordinate-converted by the fixed calibration amount and the second calibration amount, and the calculation is performed. The difference between the first measurement data group of the second calibration and the design shape of the measurement object. 6. The third dimension shape measuring method according to item 4 of the patent application, wherein the design shape for performing the preliminary coordinate conversion has been converted into design parameters in accordance with the shape of the actual measuring object. 7. The third dimension shape measuring method according to claim 1, wherein the combination of the difference between the first and second installation states and the design shape includes manual adjustment in the first and second setting states. The overlap with the difference between the aforementioned design shapes. 8. The method for measuring a three-dimensional shape according to the first aspect of the patent application, wherein the combination of the difference between the first and second installation states and the design shape includes: for the first and second setting states; The difference between the design shapes is obtained by the least square method, and the difference between the first and second installation states and the design shape is coordinate-converted so that the first and second installation states are the same. Approximate straight lines overlap. 9. For the method of measuring the 3 dimensional shape of the first item of the patent application, the surface measurement data is replaced by the 42 201015048 surface measurement data. ί Φ 43