TW201012017A - A micro solid state laser module - Google Patents

Abstract

This invention is a micro solid state laser module. From the laser source to the final projecting output laser, comprising the following major components in this order: a solid state laser that emits a laser light beam; a wave length converter that utilizes harmonic theory to convert the wave length of a laser beam into a laser light beam in such a different wave length as green light; a light dispersion device, such as a prism, that is placed at the rear part of the wave length convertor and splits the converted laser light into two separate light beams: the first light beam as the main light beam that contains the majority part of the power and that can vertically emit outside to form a main output light source, the second light beam that passes the light dispersion device, such as a prism, and enters into a light detector; and a light detector that is used for inspecting the power of the second light beam. Hence, through placing the light dispersion device, such as a prism, every component is allowed to be packaged on a plane surface for processing which is beneficial for a relatively small packaging type like a TO-can packaging; in addition, when compared to the traditional solid state laser module, the design is more superior in size, capability, and yield. Moreover, compensation can be made because the light detector being used can directly inspect the laser light converted by the wave length convertor; therefore, temperature reduction controls like increasing or lowering of the driving current to the solid state laser, or the notification of the nearby auxiliary temperature controller, such as a TE-cooler, can be performed. As a result, the error of the feedback compensation is minimized and is far better than traditional feedback method.

Description

201012017 Multiplier crystal 20b Incident end 21 Exit end 22 Spectroscopic device 30 Splitting surface 31 Photodetector (PD) 40 Carrier 50 Plane 51 Base 60 ❷ Temperature controller 61 8. If there is a chemical formula in this case, please reveal the best display invention. Chemical formula of the characteristic: (none) IX. Description of the invention: [Technical field of the invention] The present invention relates to a micro solid state laser module, in particular to a rear view of a wavelength converter using a spectroscopic device such as a prism to be converted The laser beam is split into two beams 'so that the first beam can be emitted vertically as the main source of the output light' and the second beam can pass through the beam splitting device such as a beam and incident on a photodetector so that all components can be The package is processed on a plane, and the final output source can be vertically emitted, and the light source passing through the nonlinear crystal can be directly detected by the photodetector to compensate the corrector. [Prior Art] A solid state laser module is a common photo-electronic device (Photo-electronic/Photonic Device), which is multiplied by a wavelength conversion device (or wavelength conversion device). The frequency principle converts laser light of a known wavelength into laser light of different wavelengths (λ2) such as blue light, green light, etc., which can be used according to different needs in 201012017; therefore, the photoelectric device or the laser module is generally called wavelength conversion. Optoelectronic device (Wavelength Conversion Photonic Device). An optoelectronic device, such as the solid-state laser module referred to in the present invention, may select a wavelength converter of a different structural design, and substantially each of the wavelength converters converts the laser light (wavelength λι) and the converted laser light before conversion ( There is a wavelength conversion efficiency (wavelength conversion efficiency from 9 丨 to λ2), and the wavelength of the laser light before the conversion must match or coincide with a specific wavelength (the specific wavelength is called maximum The conversion wavelength maximum conversion wavelength ❹,) 'the wavelength conversion efficiency can reach the maximum value, that is, to achieve the maximum wavelength conversion efficiency (maximum wavelength conversion efficiency), and the wavelength λι of the laser light before conversion does not match or Coincident with its maximum conversion wavelength λ. If the wavelength is less than or greater than the maximum conversion wavelength (λ.), the wavelength conversion efficiency is lowered; however, the wavelength before the conversion of a laser light (λΟ or the maximum conversion wavelength of a wavelength converter (λ.) is The temperature of the laser device or the wavelength converter changes, and the ambient temperature often changes the temperature of the laser device and the wavelength converter, and the wavelength before the laser light conversion (λ!) and the maximum conversion wavelength of the wavelength converter (λ.) The change rate of temperature per temperature is different, as the wavelength (λ) of the laser light is converted to be exactly the same at a certain ambient temperature. The maximum conversion wavelength (λ.) of the converter, and when the ambient temperature changes, such as changing (generally rising) to another temperature, the wavelength of the pre-conversion laser (λ!) and the maximum conversion wavelength of the wavelength converter ( λ.) is no longer the same due to different degrees of change (ie different rate of change), ie the wavelength conversion efficiency is degraded, so that the wavelength conversion optoelectronic device is as in this case The laser light projected from the solid-state laser module, that is, the converted laser light (wavelength λ2) cannot achieve the desired brightness; therefore, for the use of a wavelength-converting photovoltaic device such as the solid-state 201012017 laser module of the present invention, When the ambient temperature changes and the wavelength conversion efficiency is relatively reduced, the solid state laser module is adjusted to achieve and maintain the maximum wavelength conversion efficiency, that is, feedback monitoring to improve the brightness of the laser light projected by the solid state laser module. There is a need and necessity. Traditional solid-state lasers contain various structural designs, such as diode pumped solid state (DPSS) lasers, but most of them are bulky. The disadvantages of external acoustic optical modulator, low conversion efficiency, no temperature com comPensati〇n mechanism, and large energy consumption, such as: US 4,731,795 is assembled in a coaxial manner, and the entire set of laser modules is quite large and constructed. It is not easy to mass-produce by type semiconductor packaging, and it can not be directly monitored by this method, so the solid-state laser module has low stability to output power. Between US 5,440,574 and the above-mentioned US 4,731795 type The difference is that the structure of the structure is somewhat different, and the difference lies in the difference between the laser and the coupling lens of the nonlinear crystal. US5,187,714 must be matched with a special package casing, which can only be illuminated from the side after the planar structure is completed. , 0 can't be shot vertically, and can't do direct feedback monitoring, and the stability of output power is low. US 6,778,582 discloses the use of a surface-emitting laser (VCSEL) and a stack of non-linear crystals and finally a mirror-over stack and the structure is placed on a heatsink, the package structure The vertical stacking technology is used, and the architectural principle is to use a near-infrared surface-emitting laser, such as a wavelength of l〇64nm, to generate 532nm green light through a nonlinear crystal (double frequency crystal) conversion, and then through the external The top surface of the mirror and the surface-emitting laser is resonantly amplified to produce green light.

Pub. No. US 2008 / 0002745 A1 discloses the use of non-projection areas for wavelength compensation of the source after conversion, that is, using the non-projection area to monitor the stability of the output light (converted light source) power, and its compensation architecture utilizes the wave 201012017 The light after the wavelength converter then uses a beam splitter to extract part of the light to the detector, and uses the current value detected by the detector to determine the center wavelength of the DBR laser and the center of the nonlinear crystal Whether the wavelength is matched, when the current value detected by the detector becomes small, the center wavelength of the DBR laser and the center wavelength of the nonlinear crystal do not match, and the feedback circuit will start (using the non-projection area action) to adjust the DBR laser phase. The current value of the section further adjusts the center wavelength of the DBR laser to achieve a stable effect of the output light (converted light source) power. Corning Inc.'s paper "Wavelength Matching and Tuning in 0 Green Laser Packaging using Second Harmonic

Generation uses a near-infrared laser diode (DBR laser) to emit laser light with a wavelength of 1064 nm, and uses a concentrating lens to inject laser light into a nonlinear crystal (wavelength converter) to convert l〇64 nm laser light into 532 nm. Green light, its architecture is to set a temperature controller and temperature sensor under the laser diode (DBRlaser) and nonlinear crystal (wavelength converter) respectively. However, this architecture can not be used as a laser diode ( DBRlaser) and the optimal matching of the central wavelength of the nonlinear crystal (wavelength converter) can only use the measured temperature to make the assumption of the laser diode (DBR laser) and the nonlinear germanium crystal (wavelength converter). Matching of the center wavelength, that is, adjusting the temperature of the laser diode (DBRlaser) and the nonlinear crystal (wavelength converter) to move the individual center wavelengths, thus causing distortion, that is, the converted output light The power will vary with the external temperature. At present, the application range of solid-state laser modules is quite extensive, including: scientific research such as material property measurement, scientific excitation light source, space telemetry and resource detection, etc.; defense industry such as laser range finder, laser tracking Systems, laser defense weapons, etc.; industrial and people's livelihood such as material processing (such as MEMS processing, resistance decoration, wafer marking), underwater photography and seabed detection, non-destructive testing, semiconductor wafer testing, etc.; medical use Aspects such as ophthalmic treatment, skin treatment, dental treatment, dental surgery 201012017, etc. At present, the output value of solid-state lasers ranks fourth among all laser modules, and has penetrated into the lives of ordinary people. Currently, solid-state lasers are mainly produced by green light and blue light. The wavelength converter commonly used in solid-state laser modules can be periodically polarized lithium niobate (PPLN), potassium vanadate crystal (KTi0P04, KTP for short), LBO, BBO, ADP. Such crystals, in which PPLN has a higher wavelength conversion efficiency (up to about 50%); in contrast, KTP conversion efficiency is much lower (about 5% to 10%), but because of the conversion efficiency ❹ The external temperature change is less sensitive, and the component compensation is much lower than ppLN. Therefore, if the wavelength converter is used as the solid-state laser module, it will be competitive for the low-cost market with low performance requirements; The (Bulk) type has a large smooth surface and is easy to engage with laser light. Therefore, the present invention proposes a simplified micro solid state laser module structure such as a micro solid green laser module. The package is still in TO-can packaging mode. Compared with the traditional solid-state (green) laser module, it is expected to be overwhelming in terms of module size, performance, capacity and price. Competitiveness. The main purpose of the present invention is to provide a compact solid state laser module, which is arranged after the wavelength converter by using a spectroscopic device such as Prism. After the injection is converted, the laser light is split into two beams, one beam is emitted perpendicularly as the main output source, and the other beam passes through the beam splitting device such as sharp and incident on a photodetector (PD) to make the solid state laser, wavelength All components such as converters (non-linear crystal lattices), spectroscopic devices such as a prism and photodetector can be packaged on a flat surface for processing in a small TO-can package (T〇_can packaging) and ultimately The output light source can be directly emitted outward; further, the light detector can directly detect the 201012017 $ line compensation correction after the conversion by the wavelength converter, such as using the encounter _ Φ owe =:==r l or notification = := ; Effectiveness reduces the error of return compensation

Lei Yi: It is to provide a miniature solid-state laser module, which uses additional micro-optical components (*. Widely used for coupling first, such as optical coupling lens em^mglens) or collimating lens with focusing lens (e. out of 1) indirect light-lighting method, in place of the original ίίί?:, to greatly increase the tolerance of assembly positioning accuracy; mass production, and the attenuation of light energy is quite small (less than 2%) ), ^it affects the power of the transmitted laser light to avoid the need for extremely high assembly positioning accuracy (about lum) due to the direct smoothing method, which will challenge the limit of the assembly station and relatively reduce the efficiency of assembly work. Another object of the present invention is to provide a micro solid state laser module, which can further cooperate with a right angle prism to fold back the optical path between the solid state laser and the spectroscopic device. The main components of the micro-solid-state laser module and the micro-optical elements used in combination can be arranged to form two parallel in-line, thereby effectively reducing the accommodation space of the laser module of the invention, so as to facilitate packaging in a small TO- Can in the package. In order to achieve the above object, the micro solid state laser module of the present invention mainly uses a solid state laser (solid state laser), a wavelength converter (or wavelength conversion device), and a light distribution device 201012017.

The main components such as a prism (Prism) and a photo detector (PD) are sequentially arranged on a plane, wherein the solid laser system emits laser light and is incident on the wavelength converter. The wavelength converter converts the wavelength of the laser light emitted by the solid-state laser into a laser light of different wavelengths such as green light by a frequency doubling principle and enters the light splitting device such as a light-emitting device; the light-splitting device is arranged in a The laser converter is used to split the converted laser light into two beams, wherein the first beam of the main beam can be perpendicular to the set plane and emitted outward to become the main output source, wherein the first beam is Passing through a spectroscopic device such as a prism to the photodetector; the photodetector is for detecting the optical power of the second beam; wherein, by using the spectroscopic device, the components are packaged on a plane for processing And it is beneficial to package in a small TO-can packaging, which can effectively reduce the size of the laser module, improve the efficiency of use and simplify assembly. Configuration, so that the solid-state laser module micro volume present invention, performance, production capacity is superior to conventional solid-state laser group 0 g

The present invention further transmits the laser light converted by the wavelength converter directly through the photodetector (PD), and serves as a basis for feedback compensation and correction, such as using a logic circuit to control lifting or lowering the solid state laser. Drive current' or notify its additional temperature controller, such as a chiller, to control the cooling of the solid-state laser (because the ray group will rise at its temperature), so that the feedback compensation is performed. The error is minimal and far superior to the traditional feedback method. The micro-solid-state laser module of the present invention is constructed by using the above-mentioned solid-state laser, wavelength converter, and spectroscopic device, such as a germanium and a photodetector, etc., wherein the main components can be on a plane. The -JL歹1J is arranged in a direct light handle manner so that the arrangement is the most compact and the space occupied is also small, so as to be accommodated in the structure of τ〇_5. In addition, the direct optical coupling method described above requires an extremely high assembly positioning precision 201012017 degree (about lum), which will challenge the limit of the assembly machine and relatively reduce the assembly work efficiency, so the laser module of the present invention can be further indirectly The use of additional micro optics to replace the original direct face-to-face approach, such as optical coupling with a coupling lens or indirect light with a collimator lens + focusing lens The coupling method is beneficial to mass production by greatly increasing the tolerance of assembly positioning accuracy, and the attenuation of light energy is also relatively small (less than 2%), and does not affect the power of the transmitted laser light. In addition, in the TO-Can configuration, the space for the internal accommodating component ❹ is quite limited. For example, in the case of TO-5, the area of the internal accommodating component is about 5 mm X 5 mm, and the laser of the present invention. The module can further cooperate with a right angle prism to fold back the optical path between the solid state laser and the spectroscopic device, such as using a micro-optical lens such as an optical coupling lens and a right angle 使 to make the solid state The laser light emitted by the laser is first incident on an optical coupling lens and then incident on a right angle 稜鏡 to produce a 180 degree foldback, and then incident on an optical coupling lens and a subsequent wavelength converter and a beam splitting device to make the micro solid state of the present invention The main components of the laser module and the micro-optical components used in combination can be arranged in two parallel in-line to effectively reduce the housing space of the laser module of the invention, thereby facilitating packaging in a small TO-can package. . The solid state laser of the micro solid state laser module of the present invention can further be provided with a temperature control device such as a thermal resistor or a cooler (TE-cooler) for controlling the solid state laser. Temperature 'When the photodetector (PD) directly detects the laser light converted by the wavelength converter and wants to perform feedback compensation and correction, the temperature controller can be notified to perform temperature control, and the solid state laser is changed. The method of temperature to change the wavelength of the laser light emitted by it, thereby adjusting the wavelength of the laser light to be equal to or approaching the optimum conversion wavelength of the wavelength converter to improve the wavelength conversion efficiency of the laser module. Improve its efficiency in 201012017. As for the wavelength of the micro-solid laser module of the present invention, the crystal which is less sensitive to external temperature changes, such as vanadium acid (KTi〇p〇4, abbreviated as KTP), is used to maintain the optimum wavelength of the wavelength converter. It is relatively variable at a fixed value and does not change with the external temperature, so that it can be competitive in a low-price market that does not require high performance. [Embodiment] In order to make the present invention more clear and detailed, the preferred embodiment and the following drawings are used to describe the structure and technical features of the present invention as follows: Referring to Figures 1 and 2, respectively, A schematic diagram of the basic architecture of the invention of the micro solid state laser module group and a schematic diagram thereof. The invention relates to a solid state laser module 1, wherein the output laser light from the laser light source to the final outward projection sequentially comprises the following main components: a solid state laser 10 . a wavelength converter (or wavelength conversion device) 20, a light splitting device 30 such as Prism, and a photo detector (PD) 40, and the above main components are The sequence is set on a plane, such as on the surface 51 of the substrate above the Si substrate 50, or on the surface of the carrier plate with good thermal conductivity. The solid-state laser 10 can be a semiconductor laser or a diode pumped solid state (DPSS) laser, and can be a single-chip laser (DFB) or a single-chip laser (DFB). A module with several optoelectronic devices (such as a semiconductor laser that emits a wavelength of light and a laser beam with a wavelength of λ!), such as a 808 laser diode chip (808 LDchip) a laser emitting light having a wavelength of 8 〇 8 nm) for emitting laser light and incident on the incident end 21 of the wavelength converter 20; and the solid-state laser 10 can use the boosting or lowering of its driving current to control the change of the thunder that is emitted therefrom The wavelength of the light; the solid-state laser 10 can further be disposed on a sub-mount 60, and the base 60 can be provided with a temperature controller 61 such as a thermal resistor or a cold 201012017 The TE-cooler is used to control the temperature of the solid-state laser 10 for changing the wavelength of the laser light emitted by the solid-state laser 10 by changing the temperature of the solid-state laser 10. The wavelength converter 20 can be composed of a nonlinear crystal 20a and a octave crystal 20b, which can be a yttrium garnet crystal (Nd:YAG for short, wherein: Nd is a Syrian-Neodymium, Y is a -Yttrium) , A is Ming Al_ Aluminium, G is Garnet ·

Garnet), the frequency doubling crystal 20b may be potassium vanadate crystal (KTiOP〇4, abbreviated as KTP); the main function of the wavelength converter 20 is to cause the laser light emitted by the solid state laser to be emitted from the incident end 21, And converting, according to the frequency doubling principle, the wavelength of the laser light emitted by the solid-state laser 10 into laser light of different wavelengths, such as green light, and then emitted by the exit end 22 and incident on the spectroscopic device 30, as shown in FIG. The wavelength converter is selected to use a crystal that is less sensitive to changes in external temperature, such as yttrium garnet crystal (Nd:YAG) and potassium vanadate crystal (KTiOP〇4, KTP for short), so the wavelength converter of the present invention is the most The maximum conversion wavelength can be maintained at a fixed value without a relative change with the external temperature. The spectroscopic device 30 can be a φ spectroscopic device having a 45-degree spectroscopic surface 31, which is arranged behind the wavelength converter 20, and is incident when the laser light η emitted from the exit end 22 of the wavelength converter 20 is incident. When the splitting light is 31, the converted laser beam can be divided into two beams, and the first light beam 12 of the first light beam 12 can be perpendicular to the setting plane 51 and emitted outward. It becomes the main output light source of the micro solid state laser module 1 of the present invention, wherein: the two beams 13 pass through the 45-minute sub-beam of the spectroscopic device 30 and are incident on the photodetector 4 。. Therefore, the function of the spectroscopic device 3 is such that the converted laser light 11 is divided into a large one and a small one, and most of the laser light, that is, the first light beam 12 is output outward to form the micro-invention of the present invention. The main source of the solid-state laser module 1 is a light source, and a small portion of the laser light, that is, the second beam 13 is incident on the surface of the laser beam 31. Most of the laser light of the laser beam 11 is reflected when the first beam 12 is incident on the spectroscopic surface 31 of the spectroscopic device 30, and only the second beam 13 passes through the spectroscopic surface 31 of the spectroscopic device 30 and is used by the photodetector. 40, the splitting surface 31 of the light splitting device 30 may be a part of the reflective material matching the wavelength of the laser light 11, or a partial reflection beam splitter matching the wavelength of the laser light u may be added. The photodetector 40 is configured to detect the optical power of the second beam 13 and control the wavelength of the laser light emitted by the solid-state laser 10 to enable the micro-type solid-state laser module 1 of the present invention to pass the light detection. The device 40 directly detects the second beam 13 of the converted laser light for compensation correction, such as using a logic circuit to control the driving current for raising or lowering the solid laser 10, or notifying the base 60 of the solid-state laser 10 The temperature controller 61 performs temperature control to control and adjust the wavelength of the laser light emitted by the solid-state laser 10 to be equal to or close to the optimal conversion wavelength of the wavelength converter 20 to improve the wavelength conversion of the laser module. Efficiency increases its optical power and achieves direct monitoring to effectively reduce the error of returning compensation. As for the above-mentioned logic circuit design using the logic circuit for automatically controlling the driving current of raising or lowering the solid-state laser 10 or notifying the temperature controller 61 attached to the base 60 of the solid-state laser 10 for temperature control And its automatic control function can be achieved by the conventional circuit design, so the circuit design of the logic circuit will not be detailed here. The main components of the micro solid state laser module 1 of the present invention include a solid state laser, a wavelength converter 20, a beam splitting device 30 such as a chirp and a photodetector 40, by means of the arrangement of the spectroscopic device 30. The package can be packaged on a flat surface, such as disposed on the surface 51 of the carrier board 50, so that it is packaged in a small TO-can packaging assembly structure as shown in FIG. 7. As shown in FIG. 8 and 9, the volume of the micro solid state laser module 1 can be effectively reduced, and the use efficiency of the micro solid state laser module 1 is improved and the assembly structure thereof is simplified, so that the micro solid state laser module 1 of the present invention is simplified. 13 201012017 It is superior to traditional solid-state laser modules in terms of size, performance and productivity. By means of the arrangement of the photodetector 40, the micro-solid laser mode of the present invention, the group 1 can directly detect the second beam 13 of the converted laser light through the photodetector 40 for compensation correction, and achieve direct monitoring. The effect is to effectively reduce the error of the feedback compensation, so that the error of the feedback compensation is minimized, and is far superior to the traditional feedback mode. ❹ Ο The invention of the micro solid state laser module 1 has the above basic structure, namely, a solid state laser, a wavelength converter 20, a light splitting device 30, and a photodetector (PD). And the order is set on the = plane, such as on the surface 51 of the carrier 50, as shown by 囷 1, 2, ', the optical coupling of the main elements on the plane is not limited. Directly optically coupled to form a continuous array on a plane, or indirectly using additional microoptics instead of direct optical Ϊΐ, such as optical coupling using optically coupled lenses or collimating lenses The indirect optical coupling mode or arrangement of the film is not limited; the arrangement of the component elements on the plane is not limited, for example, the right angle prism can be further configured to be folded back by the solid state laser 拗 ί . The optical path between the devices enables the main components and the components used in combination to be arranged in two parallel in-line, thereby effectively reducing the accommodation space of the laser module of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The following are respectively described as follows: <First Embodiment> FIG. 1 and FIG. 2 are respectively schematic diagrams showing the micro solid state laser mode m architecture (which can be regarded as the first embodiment) of the present invention. The top view shows the image of the miniature solid-state laser module 1 using direct optical coupling. This embodiment uses a 808 laser diode chip (808 LD to emit laser light with a wavelength of 808 nm, and Within a short distance, the output of the nonlinear crystal boat 20 &amp; and the frequency doubling crystal incident to the wavelength converter 20 and then the wavelength converter 20 (the frequency doubling crystal 20b) is passed through the 45-degree spectroscopic surface 31. The light splitting device 3 is configured such that a beam 12 of the 201012017 can be emitted in a direction of 9 degrees from the original incident angle, that is, perpendicular to the set plane 51 and emitted outward to become the micro solid state laser module 1 of the present invention. The main output light source, and the direct light absorbing mode adopted in this embodiment is as shown in FIG. 2, which is arranged in a direct optical coupling manner, that is, the solid-state laser 10 and the wavelength converter 20 are arranged in a row, and thus arranged. The most streamlined space is also the smallest. It is housed in the TO-5 (TO-Can) package structure, but it requires a very high assembly positioning accuracy (about lum). When assembling and positioning, it will challenge the limit of the assembly machine and reduce the assembly efficiency. ® &lt;Second Embodiment&gt; Referring to Fig. 3, it is a perspective view of a second embodiment of the micro solid state laser module of the present invention. The micro solid state laser module 2 of the present embodiment adopts an indirect The optical coupling method is used in place of the direct light surface combination of the first embodiment, that is, an additional micro-optical element is additionally used (Micro °

Optics 70 to complete the need for indirect optical coupling, the micro-optical component (MicrQ Optics) 70 can be a coupling lens (not shown), or a collimator (collimator) as shown in FIG. The lens 71 is combined with a focusing lens 72 (ie, collimator lens + focusing lens), thereby not only greatly increasing the tolerance of assembly positioning accuracy, but also facilitating mass production, and The attenuation of light energy is also quite small (less than 2%) 'not affecting the power of the transmitted laser light. &lt;Third Embodiment&gt; Referring to Figures 4, 5 and 6, respectively, the internal size reference drawing of a TO-Can package structure and the third embodiment of the micro solid state laser module of the present invention are different. See the schematic. Due to the limited space available for receiving components in a TO-Can package structure, as shown in Figure 4, the area of the internal accommodating component is about 5mm X 5mm, 15 201012017 Therefore, in order to place the solid-state laser 10 of the micro-solid-state laser module of the present invention and its sub-mount 60 in such a limited area, the wavelength converter 20 such as the nonlinear crystal 20a and the frequency doubling crystal 20b (such as Nd) : YAG and KTP), and other micro-optical components (MicroOptics) 70 as shown in FIG. 3, collimator lens 71 and focusing lens and spectroscopic device 30 such as a photodetector 40 and the like There may be doubts about insufficient space for placement. The micro solid state laser module 3 of the present embodiment is further configured to utilize a right angle prism 80 to fold back the optical path between the solid state laser 10 and the Φ beam splitter 30, such as using a micro-optical component. (optical coupling lens) 70 and a straight angle 稜鏡 80, wherein the micro-optical element 70 can be a coupling lens as shown in FIG. 5, so that the solid-state laser 10 emits the laser light first. The micro-optical element (optical coupling lens) 70 is again incident on the right angle 稜鏡 80 to produce a 180 degree fold back, and then incident on the subsequent wavelength converter 20, the beam splitting device 30 such as a pupil and photodetector 40; or the micro-optical element 70 It can be formed by a combination of a collimator lens 71 and a focusing lens 72 (ie, a collimating lens + a focusing lens). As shown in FIG. 6, the solid-state laser is emitted first. The β-collimating lens 71 is incident on the right angle 稜鏡80 to generate a 180 degree foldback, and then incident on the focusing lens 72, and then incident on the subsequent wavelength converter 20, the beam splitting device 30 and the photodetector 40, so that the embodiment Micro solid state laser module 3 The element (10, 20, 30, 40) and the micro-optical element (70) used in combination can be arranged to form two parallel in-line as shown in FIGS. 5 and 6, thereby effectively reducing the accommodation space of the micro-solid laser module 3. To facilitate packaging in a smaller TO-can package. Referring to FIG. 7 , FIG. 8 and FIG. 9 , which are respectively a perspective view of a practical embodiment of a micro solid state laser module according to the present invention and a top view and a side view (with dimensions). As shown in FIG. 3, the micro solid state laser module 2 of the present embodiment is disposed in a TO-can package structure 201012017 90, and the TO-can package structure 90 basically comprises a TO-can lens. 91, a TO-can cap (92), a TO-can header (TO-can header) 93 and a TO-can electrical connection (electronicconnection 〇 fT〇-can) 94; The miniature solid-state laser module of the present invention can be packaged into a T〇_Can package structure as shown in Figs. 8, 9 to achieve a state of use of a miniature solid-state laser module. The above description is only the preferred embodiments of the present invention, and is merely illustrative and not restrictive; the technical field is generally understood by those skilled in the art, and the spirit and scope defined by the claims of the present invention. Many changes, modifications, and even equivalent changes can be made to them, but they will fall within the scope of Tai Luming's protection. [Simplified description of the drawings] Fig. 1 is a schematic diagram showing the basic structure (example) of the micro solid state laser module of the present invention. Coin pertinence Figure 2: Figure 1 shows the top view. = 3 : is a perspective view of a second embodiment of the micro solid state laser module of the present invention. Fig. 4 is a reference view of the internal dimensions of a TO-Can package structure.

Figure 5 is a schematic illustration of a third embodiment of a miniature solid state laser module of the present invention. Figure ό: A schematic view of a third embodiment of a miniature solid state laser module of the present invention. ^ is a top-down to FIG. 7 is a three-dimensional schematic circle in the actual Zen-TO-Can package structure of the embodiment of a miniature solid-state laser module of the present invention. Figure 8 is a top view of Figure 7. [Description of main component symbols] Fig. 9 is a side view (with dimensions) of Figure 7. Miniature solid state laser module 丨, 2 solid state laser 10 17 201012017

Laser light 11 First beam 12 Second beam 13 Wavelength converter 20 Nonlinear crystal 20a Frequency doubled crystal 20b Incident end 21 Exit end 22 Beam splitter 30 Beam splitter 31 Photodetector (PD) 40 Carrier 50 Plane 51 Base 60 Temperature Controller 61 Micro Optics 70 Collimator lens 71 Focusing lens 72 Right angle prism 80 TO-can package structure 90 TO-can lens (TO-canlens) ) 91 TO-can cap 92 TO-can header TO-can header 93 TO-can electronic connection of TO-can 94

Claims (1)

201012017 X. Patent application scope: 1. A miniature solid-state laser module, comprising a solid-state laser, a wavelength converter, a spectroscopic device and a photodetector, among which: solid-state laser, which can launch a mine The light is incident on the wavelength converter; the wavelength converter converts the wavelength of the laser light emitted by the solid-state laser into laser light of different wavelengths by the frequency doubling principle, and is incident on the light splitting device; the light splitting device is arranged at the wavelength The rear of the converter is used to split the converted laser light into first and second light beams, wherein the first light e beam is emitted outward to become a main output light source, wherein the second light beam passes through the light splitting device. And incident to the photodetector; the photodetector is configured to receive and detect the optical power of the second beam passing through the spectroscopic device; wherein 'the arrangement of the spectroscopic device is used to enable the solid state laser, the wavelength converter, the spectroscopic device, and The main components such as the photodetector can be packaged and disposed on a plane; wherein the optical power of the second beam is detected by the photodetector, A beam of light is used to compensate and correct the optical power feedback. 2. The micro solid state laser module according to claim 1, wherein the main components such as the solid laser, the wavelength converter, the spectroscopic device and the photodetector are packaged on a Si substrate. On the surface of the table. 3. The micro solid state laser module according to claim 1, wherein the solid laser, the wavelength converter, the spectroscopic device and the photodetector are packaged on a surface of a thermally conductive carrier. on. 4. The micro solid state laser module of claim 1, wherein the solid state laser is selected from the group consisting of a half guided laser, a diode pumped solid state (DPSS) laser, and a single. A multi-section DBR (DFB) and a module with several photovoltaic 201012017 devices. 5. The micro solid state laser module of claim 1 or 4, wherein the solid state laser emits a laser light having a wavelength of 808 nm using a 808 laser diode wafer. The micro solid state laser module of the first aspect, wherein the solid state laser further comprises a temperature controller to control the temperature of the solid state laser. 7. The micro solid state laser module of claim 6, wherein the temperature controller comprises at least one of a thermal resistor or a TE-cooler. 8. The micro solid state laser module of claim 1, wherein the wavelength converter comprises a linear crystal and a frequency doubling crystal. 9. The micro solid state laser module of claim 8, wherein the nonlinear crystal is yttrium garnet crystal (Nd: YAG). 10. The micro solid state laser module according to claim 8, wherein the frequency doubling crystal is potassium vanadate crystal (KTi0P04, abbreviated as KTP) 〇11, as described in claim 1 A solid state laser module in which laser light converted by a wavelength converter is green light. 12. The micro solid state laser module of claim 1, wherein the spectroscopic device has a 45 degree spectroscopic surface. 13. The micro solid state laser module of claim 12, wherein the spectroscopic surface of the spectroscopic device is adapted to partially reflect the wavelength of the incident laser light. 14. The micro solid state laser module of claim 1, wherein the first beam is a majority of the laser light and is emitted outward in a direction perpendicular to the plane of the arrangement to become the main output source. . 15. The micro-solid-state laser module according to claim 1, wherein the 20 201012017 Γϊϊτ beam is a small portion of the laser light and passes through the spectroscopic device. The micro-solid-state laser module according to the first item of the first aspect, wherein the detector can detect the driving power of the solid-state laser when the optical power of the second beam is insufficient. The beam is compensated and corrected for optical power feedback. Address, the micro-solid-state laser model described in item 1 or 6 of the patent scope, wherein the photodetector detects the optical power of the second beam The daytime search can use the logic circuit to notify the temperature controller of the solid-state laser to perform temperature control by laser, so as to control and adjust the wavelength of the light=light emitted by the solid-state laser to be equal to or close to the wavelength converter. 'To compensate and correct the feedback of the optical power of the first beam. 8. The micro solid state laser module of claim 1, wherein the laser light emitted by the solid state laser is coupled into the wavelength converter by a direct optical coupling method in a very short distance. Solid-state lasers and wavelength converters form a continuous array. 19. The micro-solid-state laser module according to claim 1, wherein the solid-state laser and the wavelength converter are further arranged with a micro-optical device to make the laser light emitted by the solid-state laser use indirect light. The coupling mode is first coupled to the wavelength converter via a micro-optical element. 20. The micro solid state laser module of claim 19, wherein the sigma micro-optical element is a light-handle lens (C0UpHng iens). 21. The micro solid state laser module of claim 19, wherein the micro-optical element is formed by a combination of a collimator lens and a focusing lens. 22. The micro solid state laser module of claim 1, wherein the solid state laser and the wavelength converter are further configured to provide a right angle prism for the solid state laser to emit. 21 201012017 Laser light passes through the right angle 稜鏡 to produce a 180 degree fold and then enters the subsequent wavelength converter, forming a parallel parallel arrangement between the solid state laser and the wavelength converter. 23. The micro solid state laser module of claim 1, wherein the micro solid state laser module is disposed in a TO-can package structure. twenty two