TWM349032U - Micro solid state laser module - Google Patents

Description

M349032 Exit end 22 Splitting surface 31 Carrier plate 50 Base 60 Incident end 21 Splitter 30 Photodetector (PD) 40 Plane 51 Temperature controller 61 Eight, new description: [New technical field]

This creation is related to a kind of material penalty. #特娶Λ技技... t solid laser module' especially refers to a kind of use: minute: two two = = square to convert the thunder, and the second beam can be worn The over-optical light is mounted on the first detector so that all components can be packaged on a flat surface, and the final output field can be emitted vertically, and the light source passing through the nonlinear crystal can be directly measured by the level detector. Compensation corrector. [Previous Technology] A solid state laser module is a common photo-electronic/photonic device, which uses a wavelength conversion device (or a wavelength conversion device). The principle of frequency doubling converts a laser of a known wavelength into laser light of different wavelengths (λ2) such as blue light, green light, etc., which can be selected according to different needs; therefore, the photoelectric device or the laser module is generally called wavelength conversion. Optoelectronic device (Wavelength Conversion Photonic Device). An optoelectronic device, such as the solid-state laser module referred to in the present invention, can select a wavelength converter that uses different structural designs, and basically each wavelength is converted to 3 M349032 converter before conversion laser light (wavelength λ!) and conversion There is a wavelength conversion efficiency from to λ2 between the rear laser light (wavelength into 2) and when the wavelength of the laser light before the conversion must match or coincide with a specific wavelength (the specific wavelength is called It is the maximum conversion wavelength maximum conversion wavelength λ.) 'The wavelength conversion efficiency can reach the maximum value, that is, the maximum wavelength conversion efficiency is achieved (maximum wavelength conversion efficiency)

Efficiency) the wavelength of the laser light before the conversion λ! does not match or match (c〇incident with) its maximum conversion wavelength, such as less than or greater than the maximum conversion wavelength (,), its wavelength conversion The efficiency is reduced; however, the wavelength before the conversion of a laser light (λι) or the maximum conversion wavelength of a wavelength converter (,) is related to its laser device or wavelength.

The temperature of the converter changes, and the ambient temperature often changes the temperature of the laser device and the wavelength converter, and the wavelength before the laser light conversion (λ!) and the maximum conversion wavelength of the wavelength converter (,) relative to the temperature The change rate 〇f temperature per temperature is different, as the wavelength (M) of the laser light is exactly the same as the maximum of a wavelength converter at a certain ambient temperature. Ue), * When the ambient temperature changes, such as changing (generally rising) to another temperature - the wavelength of the pre-conversion wavelength of the above-mentioned laser light (Μ) and the maximum conversion wavelength of the wavelength converter vary (ie, different rates of change) And no longer the same 'that is, the wavelength conversion efficiency will be reduced _ times, so that the wavelength conversion optoelectronic device, such as the solid-state laser module of the present case, projects the laser light outward, that is, the converted laser light (the expected brightness; therefore, for a wavelength Han 2 ',,, / achieve T 対 wavelength conversion power-on device, such as the use of the solid 4 M349032 state laser module in this case, when the ambient temperature changes cause wavelength conversion efficiency When it is relatively low, it is necessary and necessary to control the solid-state laser module to achieve and maintain the maximum wavelength conversion efficiency, that is, feedback monitoring to improve the brightness of the laser light projected from the solid-state laser module. Traditional solid-state lasers contain a variety of structural designs, such as diode pumped solid state (DPSS) lasers, but most of them are bulky, with external acousto-optic modulators ( Externai acoustic optical modulator ), low conversion efficiency, no temperature compensation mechanism, and large energy consumption. For example, US 4,731,795 uses a coaxial method. As for assembly, the entire group of laser modules is quite large, and the mounting method is not easy to mass-produce by the type semiconductor package, and the direct feedback monitoring cannot be performed by this method, so the solid-state laser module is for output power. The stability is low. The difference between USM40,574 and the above US4J31795 is that the structure of the structure is somewhat different. The difference lies in the difference between the laser and the coupled lens of the nonlinear crystal. US 5,187,714 must be matched with a special package casing. After the planar structure is completed, it can only be emitted from the side without vertical emission, and can not be directly feedback monitoring. The stability of the output power is low. US 6,778,582 discloses the use of a surface-emitting laser (VCSEy and a non-linear crystal stacked on top of a mirror) and the above structure is placed on a heat sink ( On the heat sink, the package structure adopts the vertical stacking technology, and the architecture principle is to use the near-infrared surface-emitting laser, such as the wavelength of l〇64nm, through the state green crystal (double frequency crystal) The conversion produces 532 nm of green light, which is then amplified by the external 5 M349032 mirror and the top surface of the surface-emitting laser to produce green light. Pub. No. US 2008 / 0002745 A1 discloses the use of non-projection areas for wavelength compensation of the source after conversion, that is, the use of non-projection areas to monitor the stability of the output light (converted light source) power, the compensation architecture utilizes wavelength conversion The light after the wavelength converter then uses a beam splitter to extract part of the light to the detector, and the current value detected by the detector is used to determine whether the center wavelength of the DBR laser and the center wavelength of the nonlinear crystal have Matching, when the current value detected by the detector becomes small, the center wavelength of the DBR lightning Φ and the center wavelength of the nonlinear crystal do not match. At this time, the feedback circuit will start (using the non-projection area action) to adjust the DBR laser phase section. The current value further adjusts the center wavelength of the DBR laser to achieve a stable effect of the output light (converted light source) power. Corning Inc.'s paper "Wavelength Matching and Tuning in Green Laser Packaging using Second Harmonic Generation" uses a near-infrared laser diode (DBR laser) to emit laser light with a wavelength of 1064 nm, and uses a condenser lens to emit laser light. Injection nonlinearity • Crystal (wavelength converter) to convert l〇64nm laser light into 532nm green light, the structure is in the laser diode (BR laser) and nonlinear crystal (wavelength converter) A temperature controller and a temperature sensor are arranged below, but the architecture can not immediately perform the optimal matching of the center wavelength of the laser diode (DBR laser) and the nonlinear crystal (wavelength converter), and can only use the measurement. The resulting temperature is used to match the two center wavelengths of a laser diode (DBR laser) and a nonlinear crystal (wavelength converter), that is, to adjust a laser diode (DBR laser) and a nonlinear crystal (wavelength converter). The temperature of the individual center wavelengths is shifted 'so as to cause distortion, that is, the power of the output light after the M349032 conversion will vary with the external temperature. At present, the application range of solid-state laser modules is quite extensive, including: scientific research such as material property measurement, scientific excitation light source, space telemetry and resource detection, etc.; defense industry such as laser range finder, laser tracking scanning system , laser defense weapons, etc.; industrial and people's livelihood such as material processing (such as MEMS processing, resistance decoration, wafer marking), underwater photography and seabed detection, non-destructive testing, semiconductor wafer testing, etc.; Such as ophthalmic treatment, skin treatment, dental treatment, dental surgery and so on. At present, the output value of solid-state lasers ranks fourth among all laser modules, and has penetrated into the lives of ordinary people. At present, solid-state lasers are mainly produced by producing green light and blue light. At present, the wavelength converter commonly used in solid-state laser modules can be a periodically polarized cesium clock crystal (peri〇dicaiiy p〇ie (j Lithium Niobate, abbreviated as PPLN), potassium vanadate crystal (KTi0P04, abbreviated as KTP). , 130, 3 ugly 0, into the 〇? and other crystals, in which rush 1 ^ has a higher wavelength conversion efficiency (up to about 50%); in contrast, ΚΤΙ > conversion efficiency is much lower (about 5 %~10%), but because the conversion efficiency is less sensitive to external temperature changes, and the component price is much lower than ppLN. Therefore, if KTP is used as the wavelength converter of the solid-state laser module, the performance requirements will be low. The low-priced market is very competitive; the KTP is a stacked, (Bulk) type, which has a large optical coupling diameter and is easy to lightly match the laser light; therefore, this creation proposes a simplified miniature solid-state laser mode. The group architecture is a miniature solid-state green laser module, and its package is still in the TO-can packaging mode. Compared with the traditional solid-state (green) laser module, the module is expected to have the volume and performance. , capacity and & 7 M349032 The new purpose of this creation is to provide a compact solid state laser module, which is arranged after the wavelength converter by using a spectroscopic device such as Prism. The beam is used to split the converted laser light into two beams, one beam is vertically emitted as the main output source, and the other beam is passed through a beam splitting device such as a prism and incident on a photodetector (PD) to make the solid state lightning. Shots, wavelength converters (non-linear crystals), • Spectroscopic devices such as a germanium and photodetector can be packaged on a single surface to facilitate packaging in a small TO-can package (T〇_can packaging And the final output light source can be emitted vertically outward; further, the converted laser light passing through the wavelength converter can be directly detected by the photodetector to compensate and correct the feedback of the output light source, thereby enhancing the laser mode The use efficiency of the group is superior to that of the conventional solid state laser module. Another object of the present invention is to provide a miniature solid state laser module, which is transmitted through the light. The detector directly detects the converted laser light after the conversion of the wavelength converter to perform compensation correction, such as using a logic circuit to control the driving current for raising or lowering the solid-state laser, or notifying the temperature controller attached to the solid-state laser to Temperature control 'to achieve direct monitoring effect, to effectively reduce the error of feedback compensation, and better than the traditional feedback compensation method. Another object of the present invention is to provide a miniature solid state laser module, the laser module Further indirect use of additional micro-optical elements (mier〇optics) to achieve photo-coupling requirements, such as using a coupling lens or a collimating lens with a focusing lens (c〇ilimator 8 M349032 lens + focusing lens) The indirect optical coupling method replaces the original direct optical coupling method to greatly increase the tolerance of the positioning accuracy of the group, which is beneficial to mass production, and the attenuation of the light energy is relatively small (less than 2%), which does not affect the light transmission. The power of laser light, in order to avoid the need for extremely high assembly positioning accuracy (about lum) due to direct optical coupling, which will challenge assembly Limit station assembly work efficiency is lowered relatively. Another object of the present invention is to provide a miniature solid state laser module, which can further cooperate with a right angle pnsm to fold back the optical path between the solid state laser and the spectroscopic device. The main components of the micro-solid-state laser module and the micro-optical components used in combination can be arranged to form two parallel in-line columns, thereby effectively reducing the space of the created laser mode to facilitate packaging in a smaller TO. -can package. In order to achieve the above objectives, the miniature solid-state laser module of the present invention mainly utilizes a solid-state laser (8〇1丨(1 gamma 1&361'), a wavelength converter (or wavelength conversion device). a light splitting device (Prism), and a photo detector (photo detector, 馐i$L ΡΉ Λ > / τ due to energy, 4 main components are sequentially arranged on a plane, wherein the ς, laser It is used to emit laser light and human to the wavelength converter; the wavelength is based on the frequency doubling principle to illuminate the laser light emitted by the solid-state laser to a different wavelength of laser light, such as green light, and to human The light splitting device, for example, enters, and the light device, such as a prism system, is arranged behind the wavelength converter for converting the laser light into two beams, wherein the first beam source, 2 can be perpendicular to the set plane and emitted outward. In order to become the main output light, the second beam is incident on the 9 M349032 photodetector through a sub-S device such as a prism, and the photodetector is used to detect the optical power of the second beam; wherein, the spectroscopic light is utilized Device arrangement All components can be packaged on a single surface and packaged in a small T-can package (T0-Can packaging), which effectively reduces the size of the laser module, improves efficiency and simplifies assembly. The structure makes the miniature solid-state laser module of this creation superior to the traditional solid-state laser module in terms of volume, performance and productivity. The creation further directly detects the through-wavelength converter through the photodetector (PD) The converted laser light is used as a basis for feedback compensation and correction 'such as using logic to control the drive current to boost or lower the solid state laser, or to inform its additional temperature controller such as a chiller (TE-c〇 〇ler) Controls the cooling of the solid-state laser (because the laser module will increase in the degree of the material), so that the error of the feedback compensation is minimized and far superior to the traditional feedback method. The micro-solid-state laser module of the present invention utilizes the above-mentioned solid-state laser, wavelength converter, and spectroscopic device, such as a sputum and a photodetector, to form a main component in a plane, wherein these main The components can be arranged in a direct optical coupling manner on the plane to form a straight line, so that the arrangement is the most compact and the space is also minimized, so as to be accommodated in the structure of τ〇_5. The coupling method requires a very high assembly and positioning precision. (About lum) 'I will challenge the limit of the assembly machine and reduce the assembly work rate. Therefore, the laser module of this creation can further indirectly use additional optics. (micro optics) to replace the original direct optocoupler 5 way 'such as the use of light coupling lens (coupling lens) light light combination or collimating lens with focusing lens (c〇Uimat〇r lens + focusing M349032 lens) indirect The optical coupling method is advantageous for mass production by greatly increasing the assembly tolerance, and the attenuation of the light energy is also 2% accurate. 'It does not affect the power of the transmitted laser light. Small but small

In the construction method of the TO-Can in the TO-Can, the space available for the interior is quite limited. For example, in the case of T0-5, the internal capacity can be accommodated, and the component of the valley element is approximately. The laser module of the creation is further The surface of the element is rounded by a right angle prism to be folded back by the solid energy to match the optical path between the light-emitting devices, such as using an optical coupling lens and a laser to micro optics. The solid-state laser, such as the angular prism, is first incident on an optical coupling lens and then incident on the right-angled prism, and the lightning strikes back, and then enters an optical coupling lens and the subsequent wavelength = the original device is 0. The main components of the micro-solid-state laser module and the micro-optical components for splitting can be arranged to form two parallel in-line columns, so as to cooperate to create a housing space for the laser module, thereby facilitating the package effect to reduce the TO-can Package. 'The solid-state laser of the miniature solid-state laser module of the present invention can further be controlled by a temperature control device such as a thermal resistor or a refrigerator (TE_C00ler) for controlling the solid-state radiation. The temperature, when the photodetector (PD) directly detects the laser light converted by the wavelength converter and wants to perform feedback compensation and correction, the temperature controller can be notified to perform temperature control, and the solid state lightning is utilized The method of detecting the temperature of the laser light to change the wavelength of the laser light emitted thereby, thereby adjusting the wavelength of the laser light to be equal to or approaching the optimum conversion wavelength of the wavelength converter to improve the wavelength conversion efficiency of the laser module. And improve its efficiency. As for the wavelength converter of the micro-solid-state laser module, 11 M349032 selects a crystal that is less sensitive to external temperature changes, such as potassium vanadate crystal (ΚΉΟΡΟ4, abbreviated as κτρ), so that the optimal conversion wavelength of the wavelength converter is maintained. It is relatively variable at a fixed value and does not change with the external temperature, so that it can be competitive in a low-price market that does not require high performance. [Embodiment] In order to make the creation more clear and detailed, the preferred embodiment is illustrated with the following illustrations. The structure and technical features of the present invention are described in detail as follows: Referring to Figures 1 and 2, respectively, A schematic diagram of the basic architecture of the micro-solid-state laser module and its top view. The present invention is a solid state laser module 1. The output laser light from the laser light source to the final outward projection sequentially comprises the following main components: a solid state laser 10 . a wavelength converter (or wavelength conversion device), a light splitting device 30 such as Prism, and a photo detector (PD) 40, and the above main components are sequentially It is disposed on a plane, such as on the surface 51 of the substrate above the Si substrate 50, or on the surface of the carrier plate with good heat conduction. The solid state laser 10 can be a semiconductor laser or a diode pumped solid state (DPSS) laser, and can be a single-chip laser (DFB) or a single-wafer (DFB) Modules of several optoelectronic devices (such as a semiconductor laser emitting light of wavelength λ〇 and generating a wavelength of laser light through a solid crystal), such as using 808 laser diode chip (808 LDchip ' can emit wavelength 8 〇 8 nm of laser light), which is used to emit laser light and incident on the incident end 21 of the wavelength converter 20; and the solid-state laser 10 can change its driving current by 12 M349032 to change the thunder emitted by it. The wavelength of the light; the solid state laser ίο can further be disposed on a sub-mount 60, and the base 60 can be provided with a temperature controller 61 such as a thermal resistor or a refrigerator. (TE-cooler) is used to control the temperature of the solid-state laser 10 for varying the wavelength of the solid-state laser 10 to change the wavelength of the laser light emitted by the solid-state laser 10. The wavelength converter 20 can be composed of a nonlinear crystal 20a and a frequency doubling crystal 20b. The nonlinear crystal 20a can be a garnet crystal (simply called Nd:YAG 'where: Nd is a Syrian-Neodymium, Y is in B-Yttrium, A is Al-Aluminium, and G is Garnet-Garnet. The frequency-doubled crystal 20b can be potassium vanadate crystal (KTiOP〇4, KTP for short); the main function of the wavelength converter 20 is to make the solid-state mine. The laser light emitted by the first shot is incident from the incident end 21, and the wavelength of the laser light emitted by the solid-state laser 10 is converted into laser light of different wavelengths such as green light by a frequency doubling principle, and then emitted from the exit end 22 And incident on the spectroscopic device 30 as a 稜鏡; and because the wavelength converter of the present invention chooses to use a crystal that is less sensitive to external temperature changes, such as yttrium garnet crystal (Nd:YAG) and potassium vanadate crystal (KTiOP) 〇4, abbreviated as KTP), so the optimal conversion wavelength (maximuin c〇nVersion wavelength) of the wavelength converter of the present invention can be maintained at a fixed value without relatively changing with the external temperature. The 5th light splitting device 30 can be a light splitting device having a 45 degree splitting surface 31, which is arranged behind the wavelength converter 2A, when the laser light 11 emitted from the exit end 22 of the wavelength converter 20 is incident. When the splitting surface 31 of the splitting device 30 is 45 degrees, the converted laser light 11 can be divided into two light beams, wherein the first light beam 12 is the main light beam which can be perpendicular to the setting plane 51 and is outwardly emitted 13 M349032 to become The primary light source of the miniature solid-state laser module 1 is formed, and the first light beam 13 is incident on the photodetector 40 through the 45-degree spectroscopic surface 31 (ie, one surface) of the spectroscopic device 30. Therefore, the main function of the spectroscopic device 3 is to divide the converted laser light 11 into one large and one small parts. The majority of the laser light, that is, the first light beam 12, is output outward to form the micro-solid state of the present invention. The main output light source of the laser module 1, and a small portion of the laser light, that is, the second light beam 13, is incident on the (input) photodetector', so that the spectroscopic surface 31 of the spectroscopic device 30 is reflected as part of the laser light 11 The surface of the laser beam 11 is reflected when the first beam 12 is incident on the spectroscopic surface 31 of the spectroscopic device 30. Only a small portion of the laser beam, that is, the second beam 13 will penetrate the spectroscopic device 30. The light splitting surface 31 (the surface) 31 is received by the photodetector 40; the splitting surface 31 of the spectroscopic device 30 may be a part of the reflective material matching the wavelength of the laser light 11, or a partial reflection beam splitter matching the wavelength of the laser beam may be added. . The photodetector 40 is configured to detect the optical power of the second light beam 13 and control the wavelength of the laser light emitted by the solid-state laser light to enable the creative micro-type solid-state laser module 1 to transmit the light. The detector 4 directly detects the first beam 13 of the converted laser light for compensation correction, such as using a logic circuit to k or reduce the driving current of the solid laser 10, or notifying the base of the solid laser 10 The temperature controller 61 attached to 60 is used for temperature control to control and adjust the wavelength of the laser light emitted by the solid-state laser 10 to be equal to or close to the optimum conversion wavelength of the wavelength converter 20 to enhance the laser. The wavelength conversion efficiency of the module increases its optical power, achieving a direct monitoring effect to effectively reduce the error of feedback compensation. As for the above-mentioned logic circuit 61 for automatically controlling the driving current to raise or lower the solid-state laser 10 or to notify the temperature controller 61 attached to the base 60 of the solid-state laser 14 M349032 10 for temperature control, the logic circuit described above The design and its automatic control function can be achieved by the conventional circuit design, so the circuit design of the logic circuit will not be detailed here. By the arrangement of the spectroscopic device 30, the main components of the micro-solid-state laser module 1 of the present invention include a solid-state laser 10, a wavelength converter 20, a spectroscopic device 30 such as a chirp and a photodetector 4. The package can be packaged on a flat surface, such as on the surface 51 of the carrier board 50, so that it can be packaged in a smaller TO-can packaging assembly structure. As shown in 7, 8, and 9, the volume of the micro solid state laser module 1 can be effectively reduced, and the use efficiency of the micro solid state laser module 1 is improved and the assembly structure is simplified, so that the micro solid state laser module of the present invention is Jane is superior to traditional solid-state laser modules in terms of size, performance and productivity. The micro-solid-state laser module 1 of the present invention can directly detect the second beam 13 of the converted laser light through the photodetector 40 to perform compensation correction, thereby achieving direct monitoring effect. In order to effectively reduce the error of feedback compensation, the error of feedback compensation is minimized, and "" Φ is far superior to the traditional feedback method. The micro-solid-state laser module 1 of the present invention has the above-mentioned basic structure, that is, a main component including a solid-state laser 10, a wavelength converter 20, a light splitting device 3, such as a light detector (PD) 40, And is arranged on a plane, as shown on the surface 51 of the carrier 50, as shown in FIG. ', '^; however, the optical coupling of the main components on the plane is not limited, such as It can be arranged in a direct optical coupling manner on a flat surface, and additional micro optics can be used instead of direct optical coupling, such as optical coupling with optical coupling lenses or collimating lenses with 15 M349032 The indirect optical coupling mode or arrangement of the lenses is not limited; the arrangement of the main components on the plane is not limited, such as further utilizing the right angle prism to fold back from the solid state laser to the beam splitting. The optical path between the devices is such that the main components and the micro-optical components used in combination can be arranged to form two parallel in-line columns, thereby effectively reducing the accommodation space of the laser module. The following is explained in the preferred embodiment as follows: <First Embodiment>

Referring to Figures 1 and 2, respectively, it is a schematic diagram of the basic architecture (which can be regarded as the first embodiment) of the present miniature solid-state laser module and a schematic diagram thereof. The micro solid state laser module 1 of the embodiment adopts a direct optical coupling mode, that is, the present embodiment uses an 8〇8 laser diode chip (8〇8LD chip) to emit laser light having a wavelength of 8〇8 nm, and In a very short distance, about 2~3um 'incident into the nonlinear crystal 2〇a of the wavelength converter 2〇 and the frequency doubling crystal 20b, and then the output end of the wavelength converter 2〇 (double frequency crystal 2〇b) 22 is emitted, through the light splitting device 3〇 having a 45-degree splitting surface 31, such that the first light beam 12 can be emitted in a direction of 9 degrees from the original incident angle, that is, perpendicular to the set plane 51 and emitted outward to become The main output light source of the miniature i-state laser module 1 is created. The direct light-lighting method of the present embodiment is as shown in FIG. 2, which is arranged in a direct optical coupling manner, and (4) 10 and the wavelength converter 20 are arranged in a row, so that the arrangement is simplified and the space occupied is the smallest. Can be accommodated in T〇_5 (T〇_Can) ',,, and package structure, but relatively high assembly positioning accuracy (about lum) is required. 'When performing assembly and positioning work, it will be limited and relatively reduced. Assembly work efficiency. % U... Bit 16 M349032 <Second Embodiment> Referring to Figure 3, there is shown a perspective view of a second embodiment of the present miniature solid state laser module. The micro solid state laser module 2 of the present embodiment further adopts an indirect optical coupling method instead of the direct optical rotation mode of the first embodiment, that is, an additional micro optical component (Micro 〇ptics) 70 is used to complete the indirect. For the optical coupling requirement, the micro-optical element Optics 70 can be a coupling lens (not shown) or a collimator lens 71 φ fits a focusing lens as shown in FIG. 3 . The focusing lens 72 is formed in combination (ie, collimator lens + focusing lens), thereby facilitating mass production without greatly increasing the tolerance of assembly positioning accuracy, and the attenuation of light energy is also relatively small (less than 2%), does not affect the power of the transmitted light. <Third Embodiment> Referring to Figs. 4, 5, and 6, respectively, it is a TO-Can seal exhibition φ structure internal size reference map and the third embodiment of the present miniature solid state laser module Two different top view schematics. Since the space of the inside of the package structure of a TO-Can is quite limited, as shown in FIG. 4, the area of the internal accommodating component is about 5 mm×5 mni, so Such a limited area is placed on the solid-state laser 10 of the creation of the miniature solid-state laser module and its sub-mount 60, the wavelength conversion piano 2 such as the nonlinear crystal 20a and the frequency doubling crystal 2〇b (such as Nd: YAG and KTP), and other MicroOptics 70, as shown in FIG. 3, collimator lens 71 and focusing lens, and 17 M349032 spectroscopic device 30, such as a light detector 40. Such components may have doubts about insufficient space. The micro solid state laser module 3 of the present embodiment is further configured to utilize a right angle prism 80 to fold back the optical path between the solid state laser and the beam splitting device 30 as if using a micro-optical element ( Light-and-light lens 70 and a right angle 稜鏡80, wherein the micro-optical element 70 can be a light-collecting lens such as 圊5, so that the solid-state laser 先 〇 the emitted laser light first Inserting a micro-optical element (optical coupling lens) 70 into the right angle 稜鏡 80 to generate a 180 degree fold back, and then into the subsequent wavelength converter 20, the beam splitting device 30 such as a prism and photodetector 40; or the micro The element 70 can be formed by a combination of a collimator lens 71 and a focusing lens 72 (ie, collimating lens + focusing, lens) as shown in FIG. 6 to cause the solid laser 10 to emit the laser light. First, a collimating lens 71 is incident on the right angle 稜鏡 80 to generate a 180 degree fold, and then incident on the focusing lens 72, and then incident on the subsequent wavelength converter 2, the beam splitting device 30, and the photodetector 40' The main body of the miniature solid state laser module 3 of the embodiment • The components (1〇, 20, 30, 40) and the micro-optical components (70) used in combination can be arranged to form two parallel in-line as shown in Figures 5 and 6, thereby effectively reducing the capacity of the miniature solid-state laser module 3. Space is provided to facilitate packaging in a smaller TO-can package. Referring to FIGS. 7, 8, and 9, respectively, the three-dimensional $ intent and the top view and the side view (with size) of the embodiment of a miniature solid-state laser module are actually packaged into a TO-Can package structure, wherein As shown in FIG. 3, the micro solid state laser module 2 of the embodiment is disposed in a T〇_can package junction 90, and the TO-can sealing structure 90 basically includes a τ〇_^ησ mirror M349032. TO-can lens 91, TO-can cap 92, TO-canheader 93 and TO-can electronic connection of TO-can 94; and the micro-solid laser module of the present invention shown in Figures 7, 8, and 9 can be packaged into the T0_Can package structure to achieve the state of use of a miniature solid state laser module. The above description is only a preferred embodiment of the present invention, and is merely illustrative and not limiting; it is understood by those skilled in the art that the spirit and scope defined by the present invention claims Within the scope

Many changes, modifications, and even equivalent changes are made, but they fall within the scope of this type of protection. B [Simple description of the diagram] Figure 1. Schematic diagram of the basic architecture (first example) of the micro-solid-state laser module. Figure 2: A top view of Figure 1. Figure 3 is a perspective view of a second embodiment of the present miniature micro-solid laser module. Figure 4: A reference to the internal dimensions of a TO-Can package. Figure 5 is a top plan view of a third embodiment of the present miniature solid state laser module. Figure 6 is a schematic view showing a third embodiment of the present miniature solid state laser module. FIG. 7 is a perspective view showing the actual packaging of a miniature solid-state laser module embodiment into a TO-Can package structure. Figure 8: A top view of the circle 7 . Figure 9: Schematic view of the side view (with dimensions) of the circle 7. 19 M349032 [Key component symbol description] Micro solid state laser module 1, 2, 3 solid state laser 10 laser light 11 first beam 12 second beam 13 wavelength converter 20 nonlinear crystal 20a frequency doubling crystal 20b incident end 21 Exit 22 Splitter 30 Splitter 31 Photodetector (PD) 40 Carrier 50 Plane 51 Base 60 Temperature Controller 61 Micro-optical components 70 Collimating lenses 71 Focusing lenses 72 Right-angled 稜鏡 80TO-can Encapsulated structure 90 TO- Can lens 91 TO-can cover 92 TO-can socket 93 TO-can electrical connection 94

20

Claims (1)

M349032 IX. Patent application scope: 1. A miniature solid-state laser module, comprising a solid-state laser, a wavelength converter, a spectroscopic device and a photodetector, among which: a solid-state laser can emit a thunder The light is incident on the wavelength converter; the wavelength converter converts the wavelength of the laser light emitted by the solid-state laser into laser light of different wavelengths by the frequency doubling principle, and is incident on the light splitting device; the light splitting device is arranged at the wavelength The rear of the converter is used to split the converted laser light into the first and second beams, wherein the first beam is emitted outward to become the main output source, wherein the second beam is incident through the beam splitting device. a photodetector for receiving and detecting optical power of a second beam passing through the spectroscopic device; wherein the spectroscopic device is arranged to enable solid-state laser, wavelength converter, spectroscopic device and photodetection The main components such as the device can be packaged and disposed on a plane; wherein the optical power of the second beam is detected by the photodetector to be the first Feedback compensation and correction for the beam optical power. 2. The micro solid state laser module according to claim 1, wherein the main components such as the solid laser, the wavelength converter, the spectroscopic device and the photodetector are packaged on a Si substrate. On the table plane. 3. The micro-solid-state laser module according to claim 1, wherein the main components such as the solid-state laser, the wavelength converter, the spectroscopic device and the photodetector are packaged on a surface of a heat-conducting carrier board. on. The M.sub.1. A single-chip laser (dfb, multi_section DBRlaser) and one of a module having several optoelectronic devices. 5. Micro-solid laser mode as described in claim 1 or 4 of the patent application The group, wherein the solid state laser emits a laser light having a wavelength of 808 nm using an 8 〇 8 laser diode wafer. 6. The micro solid state laser module of claim 2, wherein the solid state laser further comprises a temperature controller to control the temperature of the solid state laser. ^ The micro solid state laser module of claim 6, wherein the degree controller comprises at least one of a resistive heater (a resistor) or a refrigerator (TE-cooler). 8 H Please refer to the micro-flip laser module described in the patent specification (4). The money-long converter is composed of a nonlinear crystal and a octave crystal. The micro-solid thunder described in item 8 of the patent scope is disclosed. Shooting module, its ίο " ΐ nonlinear crystal can be a garnet crystal (Nd: YAG). π patent $ &amp; surrounding the micro solid state laser module described in Item 8, the frequency crystal can be 1 Potassium acid crystal (KTi〇p〇4, referred to as patent 1 &amp; the miniature 111-state laser module described in item 1 above, 12, the laser light after conversion by the wavelength converter is green light. Ming patent fc circumference 1 The micro-solid-state laser module described in the item, the 22 M349032 H optical device system has a 45-degree spectroscopic surface. The micro-solid-state laser module described in Item 12 of the fourth section, the spectroscopic device of the far splitting device The surface is matched with a part of the reflective material of the wavelength of the light emitted by the human. For example, the micro solid state laser module described in the scope of claim ii, wherein the 4th beam is the majority of the laser light and is used vertically. The direction is emitted outward to become the main output source. The miniature ID state laser module described in Item 1 of the Ming Dynasty Record, wherein the first beam is a small portion of the laser light and passes through the spectroscopic device to be incident on the photodetector. [16] The micro-solid-state laser module of claim 1, wherein when the photodetector (4) measures the optical power of the second beam, the logic circuit can be used to control the driving of the solid-state laser to increase or decrease. The electric 'claw' compensates and corrects the feedback of the optical power of the first beam. 17. The micro-solid-state laser module according to the patent specification (4), i or 6, wherein the photodetector can notify the temperature control of the solid-state laser when the optical power of the second beam is insufficient. The temperature control of the solid-state laser is used to control and adjust the wavelength of the laser light emitted by the solid-state laser to an optimum conversion wavelength equal to or close to the first light ^ Wu Yi ^ Hai Gu also laser The laser light emitted by the direct light is used in a very short distance __ combined to the wavelength conversion ~, so that the solid-fire and the wavelength converter form a column arrangement. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; The illuminating light is first coupled to the wavelength converter through the micro-optical element by indirect optical coupling. 20. The micro solid state laser module of claim 19, wherein the § hai micro optical component is a coupling lens. 21. The micro solid state laser module of claim 19, wherein the micro-optical element is formed by a combination of a collimator lens 0 and a focusing lens. 22. The micro-solid-state laser module according to claim 1, wherein the solid-state laser and the wavelength converter are further configured to have a right angle prism to be emitted by the solid-state laser. The laser light is 180 degrees folded back through the right angle 后 and then injected into the subsequent wavelength converter to form a parallel parallel arrangement between the solid state laser and the wavelength converter. 23. The micro solid state laser module of claim 1, wherein the micro solid state laser module is disposed in a TO-can package structure. twenty four