201006567 九、發明說明: 【發明所屬之技術領域】 本發明係關於形成膠圖案於基板之點膠機。 【先前技術】 定圖案塗佈種平面ΐ顯示器(fpds)時’以預 、土 衣置,以黏著或密封基板。 -驅動頭單元、頭切件、以及乂軸 元。頭單二於平台上。供排出膠之嘴嘴安裝於頭單 及頭支標件之s間,且===°χ轴馬區動單元插置於頭單元 軸方向)。_舰㈣料輯之方向(χ 上形成複數_圖案,藉此增加早生兀產率以同時於大面積基板 魯 點膠機形成膠圖宰於其 方_=::=及雷射位移細於- 部相==:==财以及與發射 :=發射部發射且嶋反二=: 201006567 再者,頭單元配有Y轴駆 射位移感測器於γ轴方向元^動嗔嘴及雷 如此當點膠機移動噴嘴於χ轴' ¥轴、及 形成膠圖案於基板ρ如圖丨所示,在相鄰圖案9^= 之間隔Dp小於當複數個頭單元8〇彼此儘可处土 而 二I間:間隔%的案例中,很難利用這複數個 °守形成圖案90。因此,複數個頭單元8〇必須交替地 ,來形,成圖案90,或複數個圖案9G必須僅由—個頭單曰 參 然而,習知點膠機的問題在於,雷射位移感測器82之 發射部82i及接收部822配置於X轴方向,亦即配置 於與複數個頭單元80之配置方向相同的方向,使得各頭單 兀80的X軸寬度Wx增加。再者,移動各喷嘴81及雷射= 移感測器82於Y軸方向之Y轴驅動單元,建構成將轉動馬 達的轉動力透過凸輪傳送到喷嘴8丨及雷射位移感測器82, 使得架構複雜化’此外各頭單元80的χ轴寬度Wx; 的轉動直徑而增加。 网 201006567 因此,習知點膠機的問題在於,將具有大χ軸寬度Wx 之各頭單το 80應用於點軸’使得當形成具有小間隔之複 數個圖案90時,增加了頭單元8〇的行程(血说幻,且限制了 可塗佈於基板的圖案90。 【發明内容】 魯 —因此’本發明有繁於上述習知技術發生的問題,本發明 的在於ki、種點膠機,其最小化膠排出喷嘴於X 軸方向間之_’因而容許有效地形成各_案於基板上。 單元為述目的’本發明提供—種點膠機,包含:頭 動於X軸;向=二並,支撐件’以水平移 =產生 =之連接部’且_直接驅動部之 動 軸方向;以及雷純移减 ㈣Μ於γ 及噴嘴間之間隔。 &供於頭早70 ’以量測基板 發射;包含用以發射雷射光之發射部,以及與 部於Y車由方^間Γ且接收雷射光之接收部,發射部及接收 向,配置^ 即與複數個頭單元的配置方向垂直之方 點膠機更包含x輪 _ 移動部,以及提卜力早几,料έ連接於頭單元之 疋“頭支梧件且延伸於X軸方向之部, 201006567 且移動頭單元於^方向。 動部於z軸位置為不同。 早70之移動部與相鄰移 再者,為了達成上述目的 具有以水平_於x 點膠機,其 兀,以及提供於料相_対及^頭切件之頭單 移感測器,其中雷射位移感“隔之雷射位 參 向垂直之-,配置料與魏個鄉元的紀置方201006567 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a dispenser for forming a glue pattern on a substrate. [Prior Art] When a pattern is applied to a flat-panel display (fpds), it is placed in a pre-coating to adhere or seal the substrate. - Drive head unit, head cut, and 乂 axis. The first one is on the platform. The nozzle for discharging the glue is installed between the head of the head piece and the head support member, and ===° The axis unit of the shaft is inserted in the direction of the head unit axis). _ Ship (four) material direction (χ form a complex number _ pattern, thereby increasing the yield of early oysters to simultaneously form a rubber map on the large-area substrate Lu glue machine _=::= and the laser displacement is finer than - Department phase ==:== Cai and launch: = Launcher launch and 嶋 反== 201006567 Furthermore, the head unit is equipped with a Y-axis 位移 displacement sensor in the γ-axis direction. Thus, when the dispenser moves the nozzle on the ' shaft ' ¥ shaft and forms a glue pattern on the substrate ρ as shown in FIG. ,, the interval Dp between the adjacent patterns 9^= is smaller than when the plurality of head units 8〇 are mutually soiled. In the case of two I: interval %, it is difficult to use the plurality of guards to form the pattern 90. Therefore, the plurality of head units 8 must be alternately shaped to form a pattern 90, or the plurality of patterns 9G must be only by the head. A problem with the conventional dispenser is that the transmitting portion 82i and the receiving portion 822 of the laser displacement sensor 82 are disposed in the X-axis direction, that is, in the same direction as the arrangement direction of the plurality of head units 80. So that the X-axis width Wx of each head unit 80 is increased. Further, each nozzle 81 and the laser = shift sensor 82 are moved to Y. The Y-axis drive unit in the axial direction is configured to transmit the rotational force of the rotary motor through the cam to the nozzle 8 and the laser displacement sensor 82, complicating the structure 'in addition to the pivot width Wx of each head unit 80; The increase in diameter. Net 201006567 Therefore, the conventional dispenser has a problem in that the application of the head το 80 having the large yaw width Wx to the point axis 'is increased when a plurality of patterns 90 having a small interval are formed The stroke of the head unit 8〇 (the blood is illusory, and the pattern 90 that can be applied to the substrate is limited. [Invention] The present invention has problems arising from the above-mentioned conventional techniques, and the present invention resides in ki, A dispensing machine that minimizes the gap between the glue discharge nozzles in the X-axis direction and thus allows for effective formation of the respective substrates on the substrate. The unit provides a dispensing machine for the purpose of the present invention, including: X-axis; direction = two, the support member 'shifts horizontally = produces = connection portion' and _ direct drive portion of the moving axis direction; and the pure pure shift (four) Μ γ and the interval between the nozzles. Early 70' to measure substrate emission; included a transmitting portion for emitting laser light, and a receiving portion for receiving laser light between the Y vehicle and the receiving portion, a transmitting portion and a receiving direction, and a dispensing machine perpendicular to the arrangement direction of the plurality of head units It also includes the x wheel _ moving part, and the tipping force, which is connected to the head unit and extends in the X-axis direction, 201006567 and moves the head unit in the ^ direction. The position of the shaft is different. The moving part of the early 70 and the adjacent shifter have a horizontal-to-x melter for the above purpose, and the first one is provided for the head of the material phase _ and the head cut Sense sensor, in which the laser displacement sense "the laser position is perpendicular to the vertical position", and the configuration material and Wei Jixiangyuan's Jifang
再者,為了達成上述目的,本發 含複數個群元,各具有対;觀膠機,包 驅動單元,搞接藤置-s、广排出勝’以及複數個χ軸 轴:Ί 頭域件,且水平移動頭單元於X ° ,、各x軸驅動單元包含連接於頭單元之蒋動邱 件且延伸於X軸方二 私動料相鄰移動部於z軸(垂直)位置為不同。 w ϋ此i固定部包含複數_定部安裝於z軸方向,以彼 *:1間隔’以及移動部及相鄰移動部耦接到不同的固 =元件包含導件’延伸於X軸方向且導弓| 實施方式 方、後^參考伴隨圖式,說明根據本發明較佳實施例之 201006567 點膠機 〈第一實施例> 將參考圖2至圖4,%日H扭4走i 膠 機 °兒明根據本發明第一實施例之點 圖2為根據本發明第—實施觸示轉機之 :為顯示严2之點膠機之頭單元之透視圖,而圖4 圖Furthermore, in order to achieve the above objectives, the present invention includes a plurality of group elements, each having a flaw; a glue machine, a package driving unit, a pick-up rattan-s, a wide discharge win, and a plurality of shaft axes: And the horizontal moving head unit is at X ° , and each of the x-axis driving units includes a Jiang moving element connected to the head unit and the adjacent moving parts extending from the X-axis two private bodies are different in the z-axis (vertical) position. w ϋ i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i Guide Bow|Embodiment </ RTI> Referring to the accompanying drawings, a 201006567 dispenser according to a preferred embodiment of the present invention will be described. <First Embodiment> Referring to FIG. 2 to FIG. 4, %-day H-twisting 4 Figure 2 is a perspective view of a first embodiment of the dispensing machine according to the present invention: a perspective view of the head unit of the dispensing machine shown in Figure 2, and Figure 4
轴驅動早儿朗3之卿元分離之狀態之透簡。不Y 如圖2至圖4所示,根墙夫&…〜 含基底框架10、平台3〇 :月弟一貫施例之點膠機包 樓件5〇、細轉單元ft性顿LM)導㈣、頭支 3〇連接到基底框架1G,單元7〇 °平台 件40安裝於平台30於γ 、 σ 〇上。LM導 成由此對LM料銜安裝 Ο 頭單元60裝設於頭支樓件5Q 、方向。複數個 平移動頭單元6。於X軸方向,亦即 的方向亚用以將相關的頭單元6〇轉接到頭支撑件兄。己置 第-驅動裝置(未顯示)可提供於基底框架1 對於基底框架10向前及向後(γ轴 、’叫目 二驅動裝置59可提供於頭支撐件^ +=,而 移動頭支撐件50。當基板2 者[Μ夺件40 頭支編難 201006567 _如圖3及圖4所示,各頭單元60包含填充有膠之注射 為61、與注射器61相通且排出膠之喷嘴62、位於噴嘴62 鄉近且里測賀嘴62與基板2〇間之間隔之雷射位移感測器 63、 移動料62及雷射位移感測器、63於γ軸方向(亦即與 複數個頭單元60的配置方向垂直之方向)之Υ軸驅動單^ 64、 以及移動噴嘴62及雷射位減測器63於2軸方向之ζ 軸驅動單元65。 於此 告射位移感測器63包含發射雷射光之發射部 3卜以及與發射部631相距預定距離且接收自基板2〇反射 ^雷射光之接收部632。發射部631及接收部632於γ軸方 向配置成列。 平乃 方移感測器63之發射部631及接收部㈣ ❹ Γ22 Λ Γ二,相較於f知發射部82丨及接收部 22於X軸方向配置成列之案例, 軸寬度Wx約50%。因此,可降低 认〇 、早兀之 上之相鄰喷嘴62間之X軸間隔Dn M、於複數個頭單元6。 Y軸驅動單元64 &含提供於各 方向產生線性,_力之直接驅動部^早⑽上且於Y軸 雷射位移•寵63連_直接驅 W及將Μ 62及 助4 64丨之連接部642。 於此,直接驅動部具有移動部及固定部於其卜且可包 201006567 驅動力之 含藉由移動部及固定部間之電磁互動而提供線性 線性馬達,或轉動馬達及滾珠螺桿。 γ軸驅動單元64之連接部642可包含板件⑷ 棒644。喷嘴62及雷射位移感測器63連接到板件643 f棒644之—端連接到板件⑷,而另-端連接到直接驅動 杉41 ’因而將.驅動力從直接驅動部641傳送到板件⑷。 為了降低各頭單元60之X軸寬度Wx,較佳地,板件643 參 包έ平板,且使其兩表面面向X軸方向。 於根據本發明第一實施例之點膠機中,移動嗜嘴及 雷射位移感測器63於Υ軸方向之γ _動單元64,包含於 Υ軸方向產生線性驅動力之直接驅動部041。相較於習知具 有轉動馬達及凸輪之點膠機,這樣的架構降低了各頭單元 f之^軸寬度Wx,因而當複數個頭單元60彼此儘可能地 靠近時,降低了相鄰喷嘴62間之最小間隔1)11。 根據本發明第一實施例之點膠機如上所述地建構,雷射 位移感測器63之發射部631及接收部632於Y軸方向配置 成列,且直接驅動部641應用於γ軸驅動單元64,以移動 噴鳥62及雷射位移感測器63於γ軸方向。這樣的架構可 降低提供於複數個頭單元60上之喷嘴62間之最小χ軸間 % Dn,因而容許在基板2〇上有效地形成其間具有小間隔 之各種圖案,而不受限於特定的圖案形狀,且降低各頭 單元6()之行程 201006567 <第二實施例> 將參考圖5及圖6,綱根據本發明第二實施例之點膠 於第-及第二實施例中共同的轉將以相同的參考符號 表示,並將於此省略這些元件的詳細說明。 ^為《本發㈣二實___歡透視圖,而 圖6為顯示圖5之點膠機之前視圖。 中,移婦本發㈣二實關之點膠機 ::動各頭早“0於X轴方向之乂 叙设於頭支撐件50且延伸 :〜 接於各頭單元6〇69 71,以及連 .极且插入固定部71而盥盆耦桩 72。X _鱗元7G藉由固 移動= ^電磁絲,導_單元6G m?2 頭早元60於X軸方向,其中 移動口而移動 長轴方向。 、以牛心裝於頭切件50之 鲁 固定部71包含複數個固定部。固定部 成 们Z _向彼此相距預定間隔。 -置成 個固定部71,即第-固定部711及第二固^兩 頭單元⑹之上部及下部,使得彼此相距:供於 _到第1定部711,而裝設於二== -則耦接到第二固定部7 I 2。 、 ί夕動部 201006567 一這樣的架構容許相鄰的頭單元 不官各移動部72的寬度Wd,使得頭動於X輛方向’而 72寬度的影㈣此頭單元6Q可儘可受移動部 备頭單元60彼此儘可能地靠近時 罪近。再者’ 隔Μ。結果,可降低提供於頭單元60上m 6㈣之間 小間隔Dn。 〈貝鳥62間之最 ❷ ❹ 命同日守,移動部72設計成適於頭單元6〇 度。於此,各移動部72可設計得比對應的頭單元里6及〇^速 於故樣的案例中’複數個頭單元6 二:。 ,無法彼此靠近到最小咖。然而,根據本的=蔣 動部72位於Z轴的不同位置,因此可克服上述^題相郝移The shaft drives the simplification of the state of the separation of the early child. No Y As shown in Figure 2 to Figure 4, the root wall &...~ with the base frame 10, the platform 3〇: the month of the consistent application of the dispensing machine package 5 〇, fine turn unit ft LM) The guide (4), the head support 3〇 are connected to the base frame 1G, and the unit 7〇° platform member 40 is mounted on the platform 30 on γ, σ 。. The LM guide thus mounts the LM member mounting head unit 60 to the head support member 5Q and the direction. A plurality of flat moving head units 6. In the X-axis direction, that is, the direction is used to transfer the associated head unit 6〇 to the head support brother. A first drive unit (not shown) can be provided to the base frame 1 for the base frame 10 forward and backward (the gamma axis, 'the second drive unit 59 can be provided to the head support ^ +=, and the moving head support 50. When the substrate 2 is the same as the one shown in FIG. 3 and FIG. 4, each head unit 60 includes a glue-filled injection 61, a nozzle 62 communicating with the syringe 61 and discharging the glue, A laser displacement sensor 63, a moving material 62, and a laser displacement sensor 63 located in the vicinity of the nozzle 62 and measuring the distance between the mouthpiece 62 and the substrate 2, 63 in the γ-axis direction (ie, with a plurality of head units) The Υ axis drive unit 64 of the 60 direction of the arrangement direction is vertical, and the 喷嘴 axis drive unit 65 of the moving nozzle 62 and the laser position reducer 63 in the 2-axis direction. The ejector displacement sensor 63 includes the emission The emitting portion 3 of the laser beam and the receiving portion 632 which is received by the substrate 2 from the substrate 2 to reflect the laser beam are disposed at a predetermined distance from the emitting portion 631. The emitting portion 631 and the receiving portion 632 are arranged in a row in the γ-axis direction. The transmitting portion 631 and the receiving portion (4) of the detector 63 are Γ 22 Λ , 2, compared with the transmitting portion 82 In the case where the cymbal and the receiving portion 22 are arranged in a row in the X-axis direction, the axial width Wx is about 50%. Therefore, the X-axis interval Dn M between the adjacent nozzles 62 on the 〇 and the early 兀 can be reduced, and the plurality of head units can be reduced. 6. Y-axis drive unit 64 & provides linear drive in all directions, _ force direct drive unit ^ early (10) and Y-axis laser displacement • pet 63 _ direct drive W and will Μ 62 and help 4 64 The connecting portion 642. The direct driving portion has a moving portion and a fixing portion, and the driving force of the 201006567 includes a linear linear motor or a rotating motor by electromagnetic interaction between the moving portion and the fixed portion. Ball screw. The connecting portion 642 of the γ-axis driving unit 64 may include a plate member (4) rod 644. The nozzle 62 and the laser displacement sensor 63 are connected to the plate member 643. The end of the rod 644 is connected to the plate member (4), and the other is - The end is connected to the direct drive stalk 41' and thus the driving force is transmitted from the direct drive portion 641 to the plate member (4). In order to lower the X-axis width Wx of each of the head units 60, preferably, the plate member 643 is wrapped in a flat plate, and The two surfaces thereof face the X-axis direction. In the dispenser according to the first embodiment of the present invention, The γ-moving unit 64 of the movable nozzle and the laser displacement sensor 63 in the x-axis direction includes a direct driving portion 041 which generates a linear driving force in the direction of the x-axis. Compared with the conventional dispensing motor and cam Thus, such an architecture reduces the axial width Wx of each head unit f such that when the plurality of head units 60 are as close as possible to each other, the minimum spacing 1) 11 between adjacent nozzles 62 is reduced. The dispenser according to the first embodiment of the present invention is constructed as described above, and the transmitting portion 631 and the receiving portion 632 of the laser displacement sensor 63 are arranged in a row in the Y-axis direction, and the direct driving portion 641 is applied to the γ-axis driving. The unit 64 moves the bird 62 and the laser displacement sensor 63 in the γ-axis direction. Such an arrangement can reduce the minimum inter-axis % Dn provided between the nozzles 62 on the plurality of head units 60, thereby allowing various patterns having a small interval therebetween to be effectively formed on the substrate 2 without being limited to a specific pattern. Shape, and reducing the stroke of each head unit 6() 201006567 <Second Embodiment> Referring to Figures 5 and 6, the dispensing according to the second embodiment of the present invention is common in the first and second embodiments The rotations will be denoted by the same reference symbols, and a detailed description of these elements will be omitted herein. ^ is a perspective view of the present invention (four) two real ___, and Figure 6 is a front view showing the dispenser of Figure 5. In the middle, the transfer of the women's hair (four) two real off the glue machine:: move each head early "0 in the X-axis direction is set in the head support 50 and extends: ~ connected to each head unit 6〇69 71, and The pole is coupled to the fixed portion 71 and the sump is coupled to the pile 72. The X _ scale 7G is moved by the solid = ^ electromagnetic wire, and the guide unit 6G m? 2 is in the X-axis direction, wherein the movement is moved The long axis direction. The lug fixing portion 71 of the head cutting member 50 includes a plurality of fixing portions. The fixing portions are spaced apart from each other by a predetermined interval. - A fixing portion 71, that is, a first fixing portion is formed 711 and the upper portion and the lower portion of the second unit (6) are spaced apart from each other: for _ to the first fixed portion 711, and for the second == - coupled to the second fixed portion 7 I 2 . Such an architecture allows the adjacent head units to disregard the width Wd of each moving portion 72, so that the head moves in the X direction '' and the width of the 72's (4) the head unit 6Q can be replaced by the moving part The units 60 are close to each other as close as possible to each other. Further, 'the barriers.' As a result, the small interval Dn provided between the m 6 (four) on the head unit 60 can be reduced. The moving portion 72 is designed to be suitable for the head unit 6 . Here, each moving portion 72 can be designed to be 'multiple head units' in the case of the corresponding head unit 6 and the same speed. 6 2:., can't get close to each other to the minimum coffee. However, according to this = Jiang moving part 72 is located at different positions on the Z axis, so it can overcome the above problem
如此根據本發明第二實施例之點膠機建 供於一個頭單元6〇之移動部72與提供於另—個頭單H 之移,°卩72 H成在z軸彼此不同的位置,因此降低接 供=複數個頭單元6Q上之噴嘴62間之最小乂軸間隔%, 而谷5午^基板2〇上有效率地形成圖案間具有小間隔%之 各種圖案,而不受限於特定的圖案形狀,並降低各 60的行程。 〜 根據本發明之點膠機如上所述地建構,雷射位移感測器 63之發射部631及接收部632於γ軸方向配置成列,且直 接驅動部64丨㈣於γ趣動單元64,以移動噴嘴62及雷 射位移或測态63於γ軸方向,因而縮減各頭單元60之χ 201006567 軸寬度Wx ’且當複數個頭單元60彼此儘可能地靠近時, 低了噴嘴62間之最小間隔。因此’可塗佈各種圖案到基 20 ’且可避免各頭單元60不必要的行程。 土 再者’根據本發明之點膠機建構成,使得提供於— 單元60之移動部72與提供於相鄰頭單元6〇之移動部π,、 在Z轴的位置彼此不肖,因此降低提供於複數個頭Thus, the dispenser according to the second embodiment of the present invention is constructed such that the moving portion 72 of one head unit 6 is moved by the other head sheet H, and the position H 72 H is different from each other in the z-axis, thereby reducing The minimum inter-axis spacing % between the nozzles 62 on the plurality of head units 6Q is received, and the various patterns having a small interval % between the patterns are efficiently formed on the substrate 2 without being limited to a specific pattern. Shape and reduce the stroke of each 60. The dispenser according to the present invention is constructed as described above, and the transmitting portion 631 and the receiving portion 632 of the laser displacement sensor 63 are arranged in a row in the γ-axis direction, and the direct driving portion 64 is used in the γ fun unit 64. In order to move the nozzle 62 and the laser displacement or the measured state 63 in the γ-axis direction, thereby reducing the χ 201006567 shaft width Wx ' of each head unit 60 and lowering the gap between the nozzles 62 when the plurality of head units 60 are as close as possible to each other Minimum interval. Therefore, various patterns can be applied to the base 20' and unnecessary travel of each head unit 60 can be avoided. The soil refiller is constructed in accordance with the present invention so that the moving portion 72 provided to the unit 60 and the moving portion π provided to the adjacent head unit 6 are not in a position to each other in the Z-axis, and thus the reduction is provided. In plural heads
==62間之最小X軸間隔Dn。因此,在基板 有效率地形成圖_具有小_%之 I 於特定的圖案形狀,並可降低各頭單元6〇的^呈而不叉限 如上所述,本發明提供—種點膠機,1使 地靠的寬度’因此當複數個頭單71彼此進可能 ,罪近%’取小化了喷嘴間之 『月匕 地形成各_案,鱗低各頭單元的在基板有效率 頭單ίί ❻接頭單元以移動 移動部,安裝成在2移動部’與前個移動部鄰近的另-個 之X_隔。 ㈣位置彼此不同,因此最小化噴嘴間The minimum X-axis interval Dn between ==62. Therefore, the substrate is efficiently formed in a pattern having a small _% of a specific pattern shape, and the head unit 6 〇 can be reduced without being limited. As described above, the present invention provides a sorting machine. 1 The width of the ground is 'so that when a plurality of headers 71 enter each other, the sin is close to %' to minimize the formation of each of the nozzles, and the scale of the head unit is efficient on the substrate. The ❻ joint unit is moved to move the moving portion, and is installed to be another X-storage adjacent to the previous moving portion at the 2 moving portion. (4) The positions are different from each other, thus minimizing the gap between the nozzles
X 述貫施例可獨立地實施,i?此森, L 也貫施。軸本發明較— 二%例也可組合 藝者當知在不恃離太Λ d化為明目的揭露,熟此技 砷及範《#下,=明如所附巾㈣#彳範圍所揭露之精 201006567 【圖式簡單說明】 參考本發明以下詳細說明及伴隨圖式,將更清楚了解本 發明前述及其他目的、特徵、觀點、及優點,其中: 圖1為顯示習知點膠機之頭單元之前視圖; 圖2為根據本發明第一實施例顯示點膠機之透視圖; 圖3為顯示圖2之點膠機之頭單元之透視圖; 圖4為顯示Y軸驅動單元與圖3之頭單元分離之狀態 ❿ 之透視圖; 圖5為根據本發明第二實施例顯示點膠機之透視圖;以 及 圖6為顯示圖5之點膠機之前視圖。 【主要元件符號說明】The X example can be implemented independently, i? this is the same, L is also applied. The invention of the invention is more than two percent of the examples. The artist can also know that the artist is not exposed to the sun, and that the invention is exposed to the purpose of the eye, and that the skill is arsenic and the "#下,=明如附巾(四)#彳 disclosure BRIEF DESCRIPTION OF THE DRAWINGS The foregoing and other objects, features, aspects and advantages of the present invention will become more < 2 is a perspective view of a dispensing machine in accordance with a first embodiment of the present invention; FIG. 3 is a perspective view showing a head unit of the dispensing machine of FIG. 2; FIG. 4 is a view showing a Y-axis driving unit and a drawing 3 is a perspective view showing a state in which the unit is separated; FIG. 5 is a perspective view showing the dispenser according to the second embodiment of the present invention; and FIG. 6 is a front view showing the dispenser of FIG. [Main component symbol description]
10 基底框架 20 基板 30 平台 40 線性馬達導件 50 頭支撐件 51 導件 59 第二驅動裝置 60 頭單元 61 注射器 62 噴嘴 雷射位移或測器 63 201006567 發射部 接收部 γ軸驅動單元 直接驅動部 連接部 板件 連接棒 Z軸驅動單元 支樓板 X軸驅動單元 固定部 第一固定部 第二固定部 移動部 頭單元 喷嘴 雷射位移感測器 發射部 接收部 圖案 頭單元之X軸寬度 相鄰圖案之間隔 相鄰噴嘴之間隔 移動部的寬度 16-10 Base frame 20 Substrate 30 Platform 40 Linear motor guide 50 Head support 51 Guide 59 Second drive unit 60 Head unit 61 Syringe 62 Nozzle laser displacement or detector 63 201006567 Transmitter receiving part γ-axis drive unit Direct drive unit Connecting part plate connecting rod Z-axis driving unit supporting floor board X-axis driving unit fixing part first fixing part second fixing part moving part head unit nozzle laser displacement sensor transmitting part receiving part pattern head unit X-axis width adjacent The interval between the patterns of the adjacent nozzles is the width of the moving portion of the nozzle 16-