201004709 六、發明說明： 【發明所屬之技術領域】 本發明涉及-種氣刀裝置，特別涉及一種可應用於平 板顯示元件用基板的乾燥製程中，尤其以雙重喷射方式嘴 射乾燥用空氣，並可容易進行乾燥的氣刀裝置。 【先前技術】 冑洗平板顯示元件用基板的製程主要以向基板表面嘴 射（供給）清洗液（例如，去離子水）的方式來進行，所 述製程是在具備如流體喷射用喷嘴的清洗單元的清洗裝置 内進行’且所述清洗裝置爲腔室形狀。 如此，用所述清洗裝置對基板進行清洗時，重要的是 去除基板上的殘留清洗液的同時要對基板進行乾燥處理。 例如在進行清洗製程後，若基板上存在殘留清洗液，其表 面會產生水斑（water spGt)，這有可能成爲降低清洗質量 的因素。 因此，進行基板清洗製程的同時需要進行乾燥製程， 這種乾燥製程大部分通過氣刀吹出乾燥用空氣，從而吹去 基板上的殘留清洗液來進行的，這種方式是所屬技術領域 中已被廣泛知曉的技術。 這種基板乾燥製程中使用的氣刀已在 2003年申請了韓 國專利，並於2004年12月31日公開，其公開號爲第 10-2004-0110783 號。 所述公開號爲第10-2004-0110783號的專利中，氣刀的 3 201004709 主體内側具有多角度喷嘴，所述多角度喷嘴上設置有多個 空氣喷射口，所述多角度噴嘴設置爲雙重（dual )喷射結構， 其由在所述主體的下面前後相隔配置的前嘴射口和後喷射 口組成。 即，所述公開號爲第10-2004_01 10783號的韓國專利 中，對基板進行乾燥製程時，可通過所述前喷射口和後喷 射口以不同的喷射角度向基板喷射空氣，因此可在加大基 板的清洗距離的狀態下進行乾燥製程。 然而’上述公開專利涉及的氣刀裝置在進行基板的乾 燥製程時會産生以下問題。 即，用所述氣刀主體喷射空氣時，無法適當地調整及 設定所述多角度喷嘴的前喷射口和後喷射口的空氣喷射量 (喷射比例）。 上述結構由於無法提供符合基板尺寸、形狀或者作業 條件的空氣喷射環境，很難獲得滿意的作業兼容性及設備 效率。 例如，在基板表面上粘附許多清洗液的狀態下，第一 次通過所述前喷射口將殘留清洗液吹出時，若空氣的喷射 壓力較大’清洗液就會被喷射壓力不規則地濺出。 特別是’在上述乾燥製程中，若發生殘留清洗液在基 板上不規則濺出的現象’則由於清洗液被減到基板的其他 部分而不僅會降低乾燥效率’而且會引發二次汙染（water Spot) ο 上述問題是由於沒有具備可控制裝置，無法根據基板 201004709 的尺寸或者工作條件來適當地調整及設定所述前喷射口和 後喷射口的喷射環境而導致的。 【發明内容】 本發明鑒於上述問題而作’其目的在於提供—種氣刀 裝置，該裝置以雙重（dual)喷射方式喷射乾燥用空氣的同 時對基板進行乾燥製程，尤其可調整喷射量和喷射壓力， 從而可確保進一步提高的乾燥效率和作業兼容性。 ® 爲了實現上述目的’本發明提供一種氣刀裝置，其包 括：主體，其内部設置有空氣流入口；第一腔室，其設置 在所述主體内側，接收由所述空氣流入口供給的乾燥用空 氣；第二腔室，其與第一腔室之間設有所述空氣流入口， 從而與第一腔室相隔配置；吐出單元，其包括用於向外部 噴射所述第一腔室和第二腔室的乾燥用空氣的第_吐出口 和第二吐出口 ·，以及流量控制機構，其用於控制從所述空 氣流入口供給到所述第一腔室和第二腔室的乾燥用空氣的 供給量。 如上所述，本發明可通過所述流量控制機構來控制所 述吐出單元的第一吐出口及第二吐出口的噴射環境並進 行基板的乾燥製程。 特別是，所述流量控制機構可設置爲以至少一種比例 來調整及設定向所述第一腔室和第二腔室供給的乾燥用空 氣的供給量’例如可將所述第一吐出口和第二吐出口的喷 射環境（空氣喷射量比例）簡單設置爲至少一種比例從而使 201004709 其符合基板的尺寸或者乾燥製程的作業環境。 由於所述流量控制機構具備上述結構及作用，因此與 兩個喷射口的喷射比例始終恒定的現有雙重喷射式氣刀相 比較，本發明可獲得更加優秀的乾燥效率和作業兼容性。 【實施方式】 以下，參照附囷詳細說明本發明的較佳實施例。 在所屬技術領域的技術人員能夠實施本發明的範圍内 對本發明的實施例進行說明。 因此’本發明的實施例可以多種形式來實施，本發明 的保護範圍並不局限於下面描述的實施例。 圖1是本發明氣刀裝置一個實施例的較佳的設置狀態 示意圖’元件符號2爲主體，該主體2可設置於如附圖中 所示的具備乾燥用腔室D1和輸送裝置D2的常規的基板乾 燥裝置D的内部。 所述輸送裝置D2可以從所述乾燥用腔室D1内部的一 側向另一側輸送基板G，例如所述輸送裝置D2被構成爲由 多個輸送用輥R構成的常規輥筒式輸送機。 即’所述主體2被構成爲向左右方向延伸的長方體結 構’其可設置在所述輸送裝置D2的輸送區域上，從而使主 艎在所述乾燥用腔室D1的内部與基板〇的一面（上面）相 對應。 另外，參照圓2,所述主體2内側設置有空氣流入口 Η， 其用於提供從外部供給乾燥用空氣Α(例如：清潔乾燥空氣） 201004709 的通道。 所述空氣流入口 Η貫穿所述主體2的一側端部，並向 另一側延伸。201004709 6. Technical Field of the Invention The present invention relates to a gas knife device, and more particularly to a drying process which can be applied to a substrate for a flat panel display element, in particular, a double jet method for jetting drying air, and An air knife device that can be easily dried. [Prior Art] The process of rinsing the substrate for a flat panel display element is mainly performed by spraying (supplying) a cleaning liquid (for example, deionized water) onto the surface of the substrate, which is provided with a cleaning such as a nozzle for fluid ejection. The unit is cleaned in the cleaning device and the cleaning device is in the shape of a chamber. Thus, when the substrate is cleaned by the cleaning device, it is important to dry the substrate while removing the residual cleaning liquid on the substrate. For example, after the cleaning process, if there is residual cleaning liquid on the substrate, water spGt is generated on the surface, which may become a factor that reduces the cleaning quality. Therefore, a drying process is required at the same time as the substrate cleaning process, and most of the drying process is performed by blowing the drying air through the air knife to blow off the residual cleaning liquid on the substrate, which is in the technical field. A widely known technology. The air knife used in the substrate drying process was applied for a Korean patent in 2003 and was published on December 31, 2004, and its publication number is No. 10-2004-0110783. In the patent of the publication No. 10-2004-0110783, the inner side of the air knife 3 201004709 has a multi-angle nozzle, and the multi-angle nozzle is provided with a plurality of air injection ports, and the multi-angle nozzle is set to be double (dual) A spray structure consisting of a front nozzle opening and a rear injection port which are arranged one behind the other under the main body. In the Korean Patent Publication No. 10-2004-01 10783, when the substrate is subjected to a drying process, air can be ejected to the substrate through the front ejection port and the rear ejection port at different ejection angles, so that it can be added. The drying process is performed in a state where the cleaning distance of the large substrate is high. However, the air knife device according to the above publication discloses the following problems in the drying process of the substrate. That is, when air is ejected by the air knife main body, the air injection amount (injection ratio) of the front injection port and the rear injection port of the multi-angle nozzle cannot be appropriately adjusted and set. The above structure is difficult to obtain satisfactory work compatibility and equipment efficiency because it is impossible to provide an air jet environment conforming to the substrate size, shape or working conditions. For example, in a state in which a lot of cleaning liquid adheres to the surface of the substrate, when the residual cleaning liquid is blown out through the front ejection port for the first time, if the ejection pressure of the air is large, the cleaning liquid is splashed irregularly by the ejection pressure. Out. In particular, 'in the above drying process, if the residual cleaning liquid is irregularly splashed on the substrate, the cleaning liquid is reduced to other parts of the substrate, which not only reduces the drying efficiency, but also causes secondary pollution. Spot) ο The above problem is caused by the fact that there is no controllable device and it is not possible to appropriately adjust and set the ejection environment of the front and rear ejection ports according to the size or operating conditions of the substrate 201004709. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide an air knife device that performs a drying process on a substrate while spraying a drying air in a dual jet manner, in particular, an injection amount and an injection amount can be adjusted. Pressure, which ensures further improved drying efficiency and job compatibility. In order to achieve the above object, the present invention provides an air knife device comprising: a main body having an air flow inlet therein; a first chamber disposed inside the main body to receive the dry supply supplied by the air flow inlet Using air; a second chamber disposed between the first chamber and the air inlet to be spaced apart from the first chamber; and a discharge unit including for spraying the first chamber to the outside and a first discharge port and a second discharge port of drying air of the second chamber, and a flow control mechanism for controlling drying from the air flow inlet to the first chamber and the second chamber The amount of air supplied. As described above, according to the present invention, the flow rate control means can control the ejection environment of the first discharge port and the second discharge port of the discharge unit and perform the drying process of the substrate. In particular, the flow control mechanism may be configured to adjust and set a supply amount of drying air supplied to the first chamber and the second chamber in at least one ratio, for example, the first discharge port and the first discharge port The ejection environment (air injection amount ratio) of the second discharge port is simply set to at least one ratio so that 201004709 conforms to the size of the substrate or the working environment of the drying process. Since the flow rate control mechanism has the above-described configuration and function, the present invention can obtain more excellent drying efficiency and work compatibility than the conventional double injection type air knife in which the injection ratios of the two injection ports are always constant. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Embodiments of the invention are described within the scope of the invention which can be practiced by those skilled in the art. Thus, the embodiments of the present invention can be embodied in various forms, and the scope of the present invention is not limited to the embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a preferred arrangement of an embodiment of an air knife device of the present invention. The component symbol 2 is a main body, and the main body 2 can be disposed in a conventional embodiment having a drying chamber D1 and a conveying device D2 as shown in the accompanying drawings. The inside of the substrate drying device D. The conveying device D2 can transport the substrate G from one side to the other side inside the drying chamber D1, for example, the conveying device D2 is configured as a conventional roller conveyor composed of a plurality of conveying rollers R . That is, the main body 2 is configured as a rectangular parallelepiped structure extending in the left-right direction, which can be disposed on the conveying region of the conveying device D2, so that the main jaw is inside the drying chamber D1 and the side of the substrate. (above) corresponds. Further, with reference to the circle 2, the inside of the main body 2 is provided with an air inflow port 用于 for providing a passage for supplying dry air Α (for example, clean dry air) 201004709 from the outside. The air inflow port Η extends through one end of the main body 2 and extends to the other side.
雖然圖中未顯示，所述空氣流入口 Η通過管體和空氣 供給裝置相連接，從而接收乾燥用空氣Α。所述空氣供$裝 置是用於基板乾燥製程中的常規裝置。並且乾燥用空氣A 的供給線上設置有流量計、壓力計、濾波器等各種流體供 給及控制用的周邊裝置。 ' 本發明氣刀裝置的上述實施例包括第一腔室4a和第一 腔室4b。 所述第一腔室4a和第二腔室4b分別設置在所述主體2 的内側’從而接收從所述空氣流入口 Η供給的乾燥用空氣 Α 〇 即，如圖2所示，所述第一腔室4a爲一腔室，其大小 適於存儲一定量的從所述空氣流入口 Η流入的乾燥用空氣 Α 〇 所述第一腔室4a設置於所述主體2内空氣流入口 11的 一侧0 而且，如圏2所示，所述第二腔室4b爲一腔室，其大 小適於存儲一定量的從所述空氣流入口 Η流入的乾燥用空 氣Α。所述第二腔室4b設置於所述主體2内空氣流入口 Η 的另一側’並且與所述第一腔室4a相隔β 本發明氣刀裝置的上述實施例包括吐出單元6。 所述吐出單元6可由多個葉片結合而成，並設置有第 7 201004709 一吐出口 6a及第二吐 吐出口 6b用;所述第一吐出口 6a及第二 用於向外部喷射所述第一脉〜 弟 内的乾燥用空氣A。 腔至4a及第二腔室4b 出葉片B1、第一：：3所不’所述也出單元6包括第一吐 -吐出葉“二:述Γ:第三… 所述第二吐出葉片、二一腔室4a和第二腔室4b之間； 並與之相隔” 、—吐出葉片的-面相面對， -吐出二所:：形成與所述第一腔…連㈣ bi的另-面二i出葉片B3與所述第-吐出葉片 _ ^ ’，並與之相隔設置，用於形成與所述第 一腔至4b相連通的第二吐出口讣。 一— 所示所述第一吐出葉片B1以其一侧與所述第 腔至4a及第二腔室仆之間的障壁&下部相連接的狀態 設置在所述主體2上。 所述第二吐出葉片B2及第三吐出葉片b3設置於所述 主體2上，並分別與所述第一吐出葉片B1的一面及另一面 相面對，從而在所述第二吐出葉片B2及第三吐出葉片b3 之間形成第一吐出口 6a及第二吐出口 6b。 而且’所述第一吐出口 6a及第二吐出口 6 b的一側（上 側）端部分別與所述第一腔室4a及第二腔室4b相連通，而 另一側（下侧）端部的流道朝下側逐漸變窄。 所述各吐出口 6a、6b的左右方向的多個位置上相隔設 置有多個加強板6c。如圖2所示，當所述第一吐出葉片B卜 第二吐出葉片B2及第三吐出葉片B3以重疊狀態結合時， 201004709 所述加強板6c具有穩定地支持所述多個吐出葉片的作用， 從而防止所述吐出葉片發生變形。 通常，所述第一吐出口 6a及第二吐出口 6b的吐出縫隙 大小爲0.06mm至0.15mm，所述第一吐出口 6a的縫隙大小 最好爲所述第二吐出口 6b缝隙的兩倍以上。 如此’若加大所述第一吐出口 6a的尺寸，則由於乾燥 用空氣A的喷射量增加，在進行基板〇的乾燥製程時可簡 便地初步去除基板G上的大量清洗液w。 ❹Although not shown in the drawing, the air inflow port is connected to the air supply means through the pipe body to receive the drying air enthalpy. The air supply means is a conventional device used in a substrate drying process. Further, a peripheral device for supplying and controlling various fluids such as a flow meter, a pressure gauge, and a filter is provided on the supply line of the drying air A. The above embodiment of the air knife device of the present invention comprises a first chamber 4a and a first chamber 4b. The first chamber 4a and the second chamber 4b are respectively disposed inside the main body 2 to receive the drying air supplied from the air inlet port, as shown in FIG. A chamber 4a is a chamber sized to store a certain amount of drying air flowing in from the air inlet port. The first chamber 4a is disposed in the air inlet 11 of the main body 2. One side 0 and, as indicated by 圏2, the second chamber 4b is a chamber sized to store a certain amount of drying air enthalpy flowing from the air inlet port. The second chamber 4b is disposed on the other side of the air flow inlet port 所述 in the main body 2 and is spaced apart from the first chamber 4a. The above embodiment of the air knife device of the present invention includes the discharge unit 6. The discharge unit 6 may be formed by combining a plurality of blades, and is provided with a seventh 201004709 one discharge port 6a and a second discharge port 6b; the first discharge port 6a and the second one for injecting the first portion One pulse ~ Dry air A in the younger brother. The cavity to 4a and the second chamber 4b are out of the blade B1, the first::3 is not the same as the unit 6 includes the first spit-extracting leaf "two: Γ: third... the second spitting blade, Between the two chambers 4a and the second chambers 4b; and spaced apart from each other, - the surface of the spouting leaves facing each other, - spitting two:: forming another side with the first cavity ... (four) bi The blade B3 and the first-discharge blade _ ^ ' are disposed apart from each other for forming a second discharge port 连通 that communicates with the first cavity to 4b. The first discharge vane B1 is disposed on the main body 2 in a state in which one side thereof is connected to the barrier & lower portion between the first chamber to the fourth chamber and the second chamber. The second discharge blade B2 and the third discharge blade b3 are disposed on the main body 2 and face one surface and the other surface of the first discharge blade B1, respectively, so as to be in the second discharge blade B2 and A first discharge port 6a and a second discharge port 6b are formed between the third discharge blades b3. Further, one side (upper side) end of the first discharge port 6a and the second discharge port 6b communicates with the first chamber 4a and the second chamber 4b, respectively, and the other side (lower side) The flow path at the end is gradually narrowed toward the lower side. A plurality of reinforcing plates 6c are provided at a plurality of positions in the left-right direction of the discharge ports 6a and 6b. As shown in FIG. 2, when the first discharge blade B and the second discharge blade B2 and the third discharge blade B3 are combined in an overlapping state, the reinforcing plate 6c of 201004709 has a function of stably supporting the plurality of discharge blades. Thereby preventing deformation of the spouting blade. Generally, the discharge slits of the first discharge port 6a and the second discharge port 6b have a size of 0.06 mm to 0.15 mm, and the gap of the first discharge port 6a is preferably twice the gap of the second discharge port 6b. the above. When the size of the first discharge port 6a is increased, the amount of injection of the drying air A is increased, and a large amount of the cleaning liquid w on the substrate G can be easily removed at the time of performing the drying process of the substrate. ❹
如圖3所示，上述第一吐出葉片b卜第二吐出葉片 及第三吐出葉片B3分別具有矩形葉片形狀，從而與所述主 體2的長度相對應。並且如圖4所示，所述第一吐出口以 及第二吐出口 6b的吐出口末端以狹縫（sHt)形狀延伸並以 相互平行的狀態設置，並且且右姑 亚見具有被所述多個加強板6c分割 的多個吐出端部。 例如，雖然未圖示’所述吐出單元6以常規方法（例 ==料）進行密封處理，⑼而防止在喷 從所述第一吐出葉片B1、第…葉… 葉片B3之間的接縫泄漏。 整μ 珩-丄》呆/im、第-吐屮 葉片B2及第三吐出葉 罘一吐出 接）與所述主體2的下面相結合。 用螺栓連 ❹當在所述乾 边輪送裝置D2輸送基板G時，上述吐出果：内藉由所 -吐出口 6a喷射乾燥 “通過所述第 氣A並第一次吹出基板G上的 201004709 殘留清洗液w (例如：去離子水），然後所述第二吐出口讣 在所述第一吐出口 6a的後面第二次吹出基板G上的殘留清 洗液W。 由於具備上述結構，本發明可通過所述吐出單元6的 第一吐出口 6a和第二吐出口 6b經兩次（第一次、第二次） 吹出乾燥用空氣A，同時去除已清洗的基板G上粘附的殘 留清洗液W。本發明以此方式來進行乾燥製程。 而且’在所述基板乾燥裝置（D)的乾燥用腔室D1内， 所述主體2在所述基板G的輸送區域上最好用以下方式設 0 置。 例如在以圖5爲基准時，所述主體2可傾斜設置在同 與基板G的輸送方向相垂直的任意基准線κι具有第一傾斜 角Q1的範圍内。所述第一傾斜角Q1最好爲約3〇2至383。 若傾斜角大於述第一傾斜角Q1，則當通過所述第一吐 出口 6a及第一吐出口 6b向基板G喷射乾燥用空氣a時， 由於喷射壓力容易損失，無法獲得滿意的去除效果。若小 於上述第一傾斜角Q1’則由於乾燥用空氣A的喷射壓力， 〇 有可能發生粘附在基板G上的殘留清洗液w不規則地濺起 的現象。 另外，本發明氣刀裝置的上述實施例包括流量控制機 構8。 所述流量控制機構8設置爲可控制（調整及設定）乾 燥用空氣A的喷射環境（喷射量）的結構。 參照圖6’所述流量控制機構8包括流量分配器T1* 10 201004709 用於驅動所述流量分配器T1的驅動器Τ2。 所述流量分配器Τ1位於所述主體2的内側，從而以一 定比例調整向所述第一腔室4a及第二腔室4b供給的乾燥用 空氣A的供給量。 即，如圖2所示’所述流量分配器τι可被構成爲具有 與所述空氣流入口 Η對應的外周面，並且内部具有供給通 道Η1的中空管，並且以所述供給通道Η1的中心轴線爲基 准可旋轉地安裝在所述空氣流入口 Η的内側。 ® 而且’所述流量分配器T1的外周面上設置有調整單元 10，所述調整單元10與所述第一腔室4a及第二腔室4b相 對應，並用於控制乾燥用空氣A的供給量。 當所述流量分配器T1在所述空氣流入口 η的内側以中 心軸線爲基准旋轉時，所述調整單元10可用至少一種比例 調整及設定所述第一腔室4a和第二腔室4b内乾燥用空氣a 的喷射量。 例如，所述調整單元10可由第一調整單元l〇a和第二 ® 調整單元l〇b組成，所述第一調整單元i〇a和第二調整單元 10b具有第一調整孔VI及第二調整孔V2。所述第一調整孔 VI及第二調整孔V2將所述第一腔室4a和第二腔室4b的 乾燥用空氣A的噴射比例分配成1 (第一腔室）：1(第二腔 室）或4(第一腔室）：1(第二腔室）。 如此，通過把所述多個第一調整單元i〇a和第二調整單 元1 Ob的調整孔設成適當的大小’從而與上述喷射比例成 一定比例即可構成調整乾燥用空氣A的分配量比例的結構。 11 201004709 而且，如圖2所示，所述流量分配器T1和空氣流入口 Η之間的接縫處最好設置密封件c。 所述密封件C可使用橡膠或者有機矽（Silicone )’若 所述密封件C設置於所述流量分配器T1和空氣流入口 Η之 間的接縫’則不僅可防止乾燥用空氣Α通過接缝向外部泄 漏，而且可最大限度地減少所述流量分配器T1旋轉時發生 的摩擦。 而且，如圖6所示，所述驅動器T2以步進電動機作爲 驅動源來使用，並且其電機軸端部和所述流量分配器T1的 @ 一端相連接。 即，當步進電動機驅動時，所述驅動器T2將所述空氣 流入口 Η内的所述流量分配器T1旋轉至電機轴旋轉的角度 大小，並可調整及設定乾燥用空氣Α的喷射量比例。 所述驅動器T2除了通過如上常規步進電動機驅動以 外，雖然圖中未顯示，還可以通過氣缸、皮帶、螺杆或齒 條齒輪等驅動方式傳遞動力，並以此來驅動所述流量分配 器 T1。 η 這種驅動結構是所屬技術領域中的技術人員容易實施 的，因此在這裏不再詳細說明》 上述流量控制機構8可通過如下操作適當地分配從所 述主體2的内側供給到所述第一腔室4a和第二腔室4b的乾 燥用空氣A的供給量。 例如’如圖2所示，通過所述驅動器T2來旋轉所述流 量分配器T1’從而將所述第一調整單元10a的多個第一調 12 201004709 整孔VI設置爲與所述第一腔室牝及第二腔室仆相匹配（連 通）。 基於上述設置狀態，本發明可通過所述第一調整單元 10a的多個第一調整孔vi將從所述空氣流入口 Η供給到所 述第一腔室4a及第二腔室4b的乾燥用空氣Α的喷射量比 例設定爲1 :1。 另外’如圖7所示，所述第二調整單元10b的多個第 二調整孔V2可設置爲與所述第一腔室4a及第二腔室4b相 〇 匹配（連通）。 基於這種設置狀態，本發明可通過所述第二調整單元 10b的多個第二調整孔V2將從所述空氣流入口 Η供給到所 述第一腔室4a及第二腔室4b的乾燥用空氣Α的喷射量比 例設定爲4:1 » 因此’通過操作上述流量控制機構8來調整供給到所 述第一腔室4a及第二腔室4b的乾燥用空氣A的分配量， 從而可適當地控制所述吐出單元6的第一吐出口 6a及第二 _ 吐出口 6b的喷射環境。 雖然本發明的說明書和附囷中只示出流量控制機構8 的調整單元10由第一調整單元l〇a及第二調整單元^ 組 成，從而將分配比例控制成兩個比例（11或4:1)的實施方 式，然而本發明並不局限於此。 例如，雖然圖中未顯示，所述調整單元進一步包括 第三調整單元’從而可用三種分配比例來控制，除此以外 還可用至少兩種分配比例調整及設定乾燥用空氣A的供給 13 201004709 量，從而使其配合工作條件β 因此，當本發明氣刀裝置的上述實施例向基板G喷射 乾燥用空氣並進行乾燥作業時，可利用流量控制機構8將 所述吐出單元6的第一吐出口 6a及第二吐出口 6b的喷射環 境（喷射量比例）設定爲至少一種類型，從而使其符合基 板G的尺寸、形狀或作業條件，因此可確保作業兼容性和 乾燥效率進一步得到提高。 而且’雖然本發明的說明書和附圖中只示出將所述主 艘2設置成圖1所示的結構，即主體2在輸送裝置d2的輸 送區域内與基板G的一面相對應設置的實施方式，但本發 明並不局限於上述結構。 例如，如圖8所示’主體2還可設置爲由兩個主體在 輸送裝置D2的上下兩側相隔設置的結構，從而在所述輸送 裝置D2的輪送區域内與基板〇的一面（上面）和另一面（底 面）相對應。此外，雖然圖中未顯示，主體2可相隔設置 在基板G的輸送區域内的至少兩個位置上。 基於上述結構’在輸送基板G的過程中，本發明可以 通過對該基板G的一面及另一面的至少一處嘴射乾燥用空 氣A的方式進行乾燥製程。 工 【圖式簡單說明】 圖1是本發明的氣刀裝置一個實施例的較 示意圖。 ^置狀態 圖2是本發明的氣刀裝置一個實施例的内部結構示章 201004709 囷。 圖3疋用於本發明的氣刀裝置一個實施例中吐出單元 的詳細結構圖。 圖4是本發明的氣刀裝置一個實施例中吐出單元的吐 出端部的結構示意圖。 圖5是用於說明圖i中主體的較佳設置狀態（角度）的示 意圖。As shown in Fig. 3, the first discharge vanes b and the second discharge vanes B3 each have a rectangular blade shape and correspond to the length of the main body 2. Further, as shown in FIG. 4, the discharge port ends of the first discharge port and the second discharge port 6b are extended in the shape of a slit (sHt) and are disposed in parallel with each other, and the right abutment has a plurality of said A plurality of discharge ends of the reinforcing plate 6c are divided. For example, although not shown, the discharge unit 6 performs a sealing process by a conventional method (example == material), and (9) prevents a seam between the first discharge blade B1, the first...the blade B3 from being sprayed. leakage. The whole μ 珩 丄 丄 im im im im im im im im im im im im im im / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / When the substrate G is transported by the dry side transfer device D2, the discharge fruit is sprayed and dried by the discharge port 6a. "Through the first gas A and the first blow of the 201004709 on the substrate G. The cleaning liquid w (for example, deionized water) is left, and then the second discharge port 吹 blows the residual cleaning liquid W on the substrate G a second time behind the first discharge port 6a. With the above structure, the present invention The drying air A can be blown out twice (first time, second time) through the first discharge port 6a and the second discharge port 6b of the discharge unit 6, while removing the residual cleaning adhered to the cleaned substrate G. The liquid W. The present invention performs the drying process in this manner. Further, in the drying chamber D1 of the substrate drying device (D), the main body 2 is preferably used in the conveying region of the substrate G in the following manner. For example, when referring to Fig. 5, the main body 2 can be obliquely disposed within a range of an arbitrary inclination line κι which is perpendicular to the conveying direction of the substrate G and has a first inclination angle Q1. The angle Q1 is preferably about 3〇2 to 383. When the drying air a is sprayed onto the substrate G through the first discharge port 6a and the first discharge port 6b, the injection pressure is easily lost, and a satisfactory removal effect cannot be obtained. The first inclination angle Q1' is a phenomenon in which the residual cleaning liquid w adhering to the substrate G is irregularly splashed due to the ejection pressure of the drying air A. Further, the above embodiment of the air knife device of the present invention The flow control mechanism 8 is provided. The flow control mechanism 8 is provided to control (adjust and set) the injection environment (injection amount) of the drying air A. The flow control mechanism 8 includes the flow distributor T1 as described with reference to FIG. 6' * 10 201004709 Driver Τ 2 for driving the flow distributor T1. The flow distributor Τ1 is located inside the main body 2, thereby supplying the first chamber 4a and the second chamber 4b with a certain ratio. The supply amount of the drying air A. That is, as shown in Fig. 2, the flow distributor τι may be configured to have an outer peripheral surface corresponding to the air flow inlet port, and have an internal supply a hollow tube of the channel Η1 is rotatably mounted inside the air inlet port 为 with reference to a central axis of the supply channel 。1. Further, the outer peripheral surface of the flow distributor T1 is provided An adjusting unit 10 corresponding to the first chamber 4a and the second chamber 4b and for controlling the supply amount of the drying air A. When the flow distributor T1 is at the air flow inlet When the inner side of η is rotated on the basis of the central axis, the adjustment unit 10 can adjust and set the injection amount of the drying air a in the first chamber 4a and the second chamber 4b by at least one ratio. For example, the adjustment The unit 10 may be composed of a first adjustment unit 10a and a second adjustment unit 10b, the first adjustment unit i〇a and the second adjustment unit 10b having a first adjustment hole VI and a second adjustment hole V2. The first adjustment hole VI and the second adjustment hole V2 divide the injection ratio of the drying air A of the first chamber 4a and the second chamber 4b into 1 (first chamber): 1 (second chamber) Room) or 4 (first chamber): 1 (second chamber). In this manner, by adjusting the adjustment holes of the plurality of first adjustment units i〇a and the second adjustment unit 1 Ob to an appropriate size ′ to be proportional to the injection ratio, the distribution amount of the drying air A can be adjusted. The structure of the scale. 11 201004709 Moreover, as shown in Fig. 2, a seal c is preferably provided at the joint between the flow distributor T1 and the air flow inlet port. The seal C can use rubber or organic crucibles. 'If the seal C is disposed at the seam between the flow distributor T1 and the air inlet port ', the drying air can be prevented from passing through. The slit leaks to the outside, and the friction occurring when the flow distributor T1 is rotated can be minimized. Further, as shown in Fig. 6, the driver T2 is used with a stepping motor as a driving source, and its motor shaft end is connected to the @ end of the flow distributor T1. That is, when the stepping motor is driven, the driver T2 rotates the flow distributor T1 in the air inlet port to an angle of rotation of the motor shaft, and can adjust and set the injection amount ratio of the drying air enthalpy. . The driver T2 is driven by a conventional stepping motor as above, and although not shown, it is also possible to transmit power by a driving method such as a cylinder, a belt, a screw or a rack gear, and thereby drive the flow distributor T1. This drive structure is easily implemented by those skilled in the art, and therefore will not be described in detail herein. The flow control mechanism 8 described above can be appropriately distributed from the inside to the first side of the main body 2 by the following operation. The supply amount of the drying air A of the chamber 4a and the second chamber 4b. For example, as shown in FIG. 2, the flow distributor T1' is rotated by the driver T2 to set a plurality of first adjustments 12 201004709 of the first adjustment unit 10a to the first cavity. The chamber and the second chamber are matched (connected). Based on the above-described setting state, the present invention can supply the drying of the first chamber 4a and the second chamber 4b from the air inflow port by the plurality of first adjusting holes vi of the first adjusting unit 10a. The air jet injection ratio is set to 1:1. Further, as shown in Fig. 7, a plurality of second adjustment holes V2 of the second adjustment unit 10b may be disposed to match (connect) with the first chamber 4a and the second chamber 4b. Based on this arrangement state, the present invention can supply the drying of the first chamber 4a and the second chamber 4b from the air inflow port by the plurality of second adjusting holes V2 of the second adjusting unit 10b. The injection amount ratio of the air enthalpy is set to 4:1 » Therefore, the distribution amount of the drying air A supplied to the first chamber 4a and the second chamber 4b is adjusted by operating the flow rate control mechanism 8 described above, thereby The ejection environment of the first discharge port 6a and the second_discharge port 6b of the discharge unit 6 is appropriately controlled. Although only the adjustment unit 10 of the flow control mechanism 8 is composed of the first adjustment unit 10a and the second adjustment unit ^ in the specification and the accompanying drawings of the present invention, the distribution ratio is controlled to two ratios (11 or 4: 1) embodiment, however, the invention is not limited thereto. For example, although not shown in the drawings, the adjustment unit further includes a third adjustment unit ′ so that it can be controlled by three distribution ratios, and in addition, the supply of the drying air A can be adjusted and set by at least two distribution ratios. Therefore, when the above-described embodiment of the air knife apparatus of the present invention ejects the drying air to the substrate G and performs the drying operation, the first discharge port 6a of the discharge unit 6 can be used by the flow rate control mechanism 8. The ejection environment (the injection amount ratio) of the second discharge port 6b is set to at least one type so as to conform to the size, shape, or working condition of the substrate G, thereby ensuring further improvement in work compatibility and drying efficiency. Further, although the description of the present invention and the drawings only show that the main ship 2 is provided in the configuration shown in FIG. 1, that is, the main body 2 is disposed corresponding to one side of the substrate G in the conveying region of the conveying device d2. Means, but the present invention is not limited to the above structure. For example, as shown in FIG. 8, the main body 2 may be disposed such that two bodies are spaced apart from each other on the upper and lower sides of the conveying device D2 so as to be on one side of the substrate (in the rolling region of the conveying device D2). ) corresponds to the other side (bottom surface). Further, although not shown in the drawings, the main bodies 2 may be disposed at at least two positions spaced apart in the conveying area of the substrate G. In the process of transporting the substrate G based on the above structure, the present invention can perform a drying process by spraying the air for drying A on at least one of the one surface and the other surface of the substrate G. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing an embodiment of an air knife device of the present invention. ^Statement Figure 2 is an internal structure of an embodiment of the air knife apparatus of the present invention 201004709 囷. Fig. 3 is a detailed structural view of a discharge unit used in an embodiment of the air knife device of the present invention. Fig. 4 is a view showing the structure of a discharge end portion of a discharge unit in an embodiment of the air knife device of the present invention. Fig. 5 is a view for explaining a preferred setting state (angle) of the main body in Fig. i.
圖6是用於說明本發明的氣刀裝置一個實施例中流量 控制機構的結構圖。 囷7是用於說明本發明的氣刀裝置一個實施例中 控制機構作用的示意圖。 /;1 的另一 圖8是用於說明本發明的氣刀裝置一個實施 設置狀態的結構圖。 【主要元件符號說明】 2 主體 6 吐出單元 10 調整單元 10a 第一調整單元 10b 第二調整單元 2a 障壁 4a 第一腔室 4b 第二腔室 6a 第一吐出口 15 201004709 6b 第二吐出口 6c 加強板 A 乾燥用空氣 B1 第一吐出葉片 B2 第二吐出葉片 B3 第三吐出葉片 C 密封件 D 基板乾燥裝置 D1 乾燥用腔室 D2 輸送裝置 G 基板 H 空氣流入口 HI 供給通道 K1 基准線 Qi 第一傾斜角 R 輸送輥 T1 流量分配器 T2 驅動器 VI 第一調整孔 V2 第二調整孔 W 殘留清洗液Fig. 6 is a structural view for explaining a flow rate control mechanism in an embodiment of the air knife device of the present invention.囷7 is a schematic view for explaining the action of the control mechanism in one embodiment of the air knife device of the present invention. Fig. 8 is a structural view for explaining an embodiment of the air knife device of the present invention. [Main component symbol description] 2 Main body 6 Discharge unit 10 Adjustment unit 10a First adjustment unit 10b Second adjustment unit 2a Barrier 4a First chamber 4b Second chamber 6a First discharge port 15 201004709 6b Second discharge port 6c Strengthen Plate A Drying air B1 First discharge blade B2 Second discharge blade B3 Third discharge blade C Seal D Substrate drying device D1 Drying chamber D2 Conveying device G Substrate H Air inflow HI Supply channel K1 Reference line Qi First Tilt angle R Conveying roller T1 Flow distributor T2 Drive VI First adjustment hole V2 Second adjustment hole W Residual cleaning solution
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