200951081 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種排水處理方法。 【先前技術】 近年來，氫氧化四曱基銨（以下，亦有揭示為TMAH(Tetra Methyl Ammonium Hydroxide)之情形）等之氫氧化四烧銨係用 作製造半導體或液晶面板之光微影用之正型光阻劑用顯影 液等，伴隨半導體或液晶之生產量之增加，含有氫氧化四 ❿ 烧鈹之排水之產生量增加。 先前，作為含有氫氧化四烷銨之排水之處理方法，已知 有藉由加熱而使氫氧化四烧銨熱分解之處理方法、藉由逆 滲透膜而除去氫氧化四烷銨之處理方法、以及使用離子交 換樹脂來除去該氫氧化四烷銨之處理方法等。然而，於對 氫氧化四烷銨進行熱分解之處理方法中，需要用於加熱之 燃料等，於使用逆滲透膜或離子交換樹脂之方法中，需要200951081 VI. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to a drainage treatment method. [Prior Art] In recent years, tetraammonium hydroxide such as tetramethylammonium hydroxide (hereinafter also referred to as TMAH (Tetra Methyl Ammonium Hydroxide)) is used for photolithography for manufacturing semiconductors or liquid crystal panels. In the developer for a positive type resist, etc., as the production amount of the semiconductor or the liquid crystal increases, the amount of the drain containing the cesium hydroxide is increased. Heretofore, as a treatment method of a wastewater containing tetraammonium hydroxide, a treatment method of thermally decomposing ammonium tetrahydrogen hydroxide by heating, a treatment method of removing tetraammonium hydroxide by a reverse osmosis membrane, and a treatment method are known. And a treatment method for removing the tetraammonium hydroxide using an ion exchange resin. However, in the treatment method for thermally decomposing tetraammonium hydroxide, a fuel for heating or the like is required, and in the method using a reverse osmosis membrane or an ion exchange resin, it is required
對已除去之氫氧化四烷銨進行處理。因此，此種處理方法 A 胃 有處理成本比較高之問題。 又，作為含有TMAH等之氫氧化四烷銨之排水之處理方 法，已知有藉由利用有好氣性微生物之好氣處理之排水處 理方法（專利文獻1)。然而，對於藉由好氣處理之排水處理 方法而言，伴隨微生物之增殖而產生之廢棄物之量比較 多，且需要用以供給氧之動力，從而有排水處理成本比較 高之問題。 另一方面，作為能夠以比較低之成本而對含有TMAH等 139394.doc 200951081 之氫氧化四烷銨之排水進行處理之排水處理方法，已知有 藉由利用有厭氧性微生物之厭氧處理（甲烷醱酵等）之排水 處理方法。該排水處理方法與藉由熱分解等之處理方法不 同，可無需用於熱分解之燃料等，且與使用逆滲透膜或離 子交換樹脂之處理方法不同，可無需對於已除去之氫氧化 四燒錄之進-步之时處理。然而，於為了使氫氧化四院 銨等之有機性物質之大部分分解而實施之厭氧處理中，存 在如下問題：氫氧化四烷銨等之有機性物質之分解活性容 易隨時間而降低，難以保持較高之分解活性。 因此，業者期望一種排水處理方法，其係含有氫氧化四 烷銨之排水之排水處理方法，其可抑制氫氧化四烷銨之分 解活性之下降且利用了厭氧處理。 專利文獻1 ·日本專利特開2〇〇6-326435號公報 【發明内容】 發明所欲解決之問題 本發明係鑒於上述問題點、期望點，其課題在於提供一 種可抑制氫氧化四院鐘之分解活性之下降之對含有氣氧化 四烷銨的排水進行厭氧處理之排水處理方法。 解決問題之技術手段 為了解決上述問題，本發明之排水處理方法之特徵在 於其係、3有氫氧化四烧録之排水之排水處理方法，其於 糖類或-元醇存在下，對上述排水進行厭氧處理。 根據包含上述構成之排水處理方法，由於在糖類或一元 醇存在下對上述排水進行厭氧處理，故而藉由上述糖類或 139394.doc 200951081 二:：能夠提高厭氧性微生物可對氫氧化四炫錢進行分 戈謝活性。雖尚未完全弄清藉由上述糖類或— 谷易對虱氧化四烷銨進行分解之原理，但一 類或一元醇 般吻為上述糖 之代謝活Γί 生物對氣氧化四燒錢進行分解 之代論活性。亦即，一般認為，為了對上述糖 … 騎代謝，厭氧性微生物之代謝活動變得活躍，隨之= 風氧化四烷錄進行分解之代謝活動亦變得活躍。， 下又=本發明之排水處理方法中’較佳於單糖類存在 ㈣水進行厭氧處理。於單糖類存在下，對 :二進行厭氧處理’藉此有如下優點，即，能夠進—步； 1風性微生物可對氯氧化四院錢進行分解之代謝活性。 萄ΓΓΓ明之排水處理方法_，上述單糖類較佳為葡 r夠進：ί述單糖類為葡萄糖，故而有如下優點，即， 之代謝活性。 # 了對心化四㈣進行分解 又，於本發明之排水虛 下，對上較佳係於異丙醇存在 :水氧處理。於異丙醇存在下，對上述 排水進订厭乳處理，藉此有如下優點，即，能夠進—步提 ==生物可對氨氧化四烧銨進行分解之代謝活性。 排排水處理方法中，較佳係於相對於上述 重量份之有機碳量之量的碳量1重量份，存在^ 進行厭氧處理。的上迷糖類之情形下，對上述排水 又’於本發明之排水處理方法中，較佳係相對於上述排 139394.doc 200951081 尺中所3氫氧化四烷銨㈣^ 量份之有機碳量之量的上比：重量份’存在Ο.5〜2重 進行厭氧處理。 I讀之㈣下，對上述排水 發明之效果 :發：之排水處理方法能夠提高可對厭氧性微生物之氫 ^四^料行分解之代謝活性。因此，本發明之排水處 =方法產生能射卩制職處理巾之聽化四驗之 性之下降的效果。 【實施方式】 本發明之排水處理方法係於糖類或一元醇存在下，對含 有氫氧化四㈣之排水崎厭氧處理之排水處理方法。 以下，對本發明之排水處理方法之一實施形態 明。 木實施形態之排水處理方法係實施以下所述之各步驟。 亦即’本實施形態之排水處理方法實施如下步驟：混合 步驟，其將含有氫氧化四燒銨之排水與糖類或—元醇混 合；厭氧處理步驟，其於上述糖類或一元醇存在下，利用 厭氧性微生物對上述含有氫氧化四㈣之上述排水進行厭 氧處理；以及分離步驟，其將經厭氧處理之上述排水分離 為處理水與污泥。 -面參照圖式’-面更詳細地對本實施形態之排水處理 方法進行說明。 本實施形態之排水處理方法可使用圖丨所示之排水處理 設備而實施。 139394.doc 200951081 亦即，於上述混合步驟中，例如使用蓄積有上述排水之 原水槽1、以及對自原水槽〗供給之上述排水與上述糖類或 -兀醇進行混合之集合槽2。詳細而言，例如，將蓄積於 原水槽1之含有氫氧化四烷銨之排水供給至上述集合槽2， 於供給至該集合糟2之上述排水中添加上述糖類口或一元 醇。如此，對含有氫氧化四烷銨之排水與上述糖類或一元 醇進行混合。The removed tetraalkylammonium hydroxide is treated. Therefore, this treatment method A has a problem of relatively high processing cost. Further, as a method of treating a waste water containing tetraammonium hydroxide such as TMAH, a drainage treatment method using aerobic treatment with aerobic microorganisms is known (Patent Document 1). However, for the drainage treatment method by aerobic treatment, the amount of waste generated by the proliferation of microorganisms is relatively large, and the power for supplying oxygen is required, so that the cost of drainage treatment is relatively high. On the other hand, as a wastewater treatment method capable of treating a wastewater containing tetraammonium hydroxide of 139394.doc 200951081 such as TMAH at a relatively low cost, anaerobic treatment by using an anaerobic microorganism is known. Drainage treatment method (methane fermentation, etc.). This drainage treatment method is different from the treatment method by thermal decomposition, etc., and does not require a fuel for thermal decomposition, etc., and unlike the treatment method using a reverse osmosis membrane or an ion exchange resin, it is not necessary to remove the tetrahydrogenate that has been removed. Recorded in the step-by-step process. However, in the anaerobic treatment which is carried out in order to decompose most of the organic substance such as ammonium oxyhydroxide, there is a problem in that the decomposition activity of the organic substance such as tetraammonium hydroxide is likely to decrease with time. It is difficult to maintain a high decomposition activity. Accordingly, the present inventors have desired a drainage treatment method which is a drainage treatment method comprising a drainage of tetraammonium hydroxide which suppresses a decrease in the decomposition activity of tetraammonium hydroxide and utilizes anaerobic treatment. SUMMARY OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION The present invention has been made in view of the above problems and needs, and it is an object of the invention to provide a fourth hospital which can suppress oxidation. A wastewater treatment method for anaerobic treatment of a wastewater containing tetraammine gas oxidized by a decrease in decomposition activity. Means for Solving the Problems In order to solve the above problems, the wastewater treatment method of the present invention is characterized in that it has a drainage treatment method of a water-discharged four-burning wastewater, which is subjected to the above-mentioned drainage in the presence of a saccharide or a-hydric alcohol. Anaerobic treatment. According to the wastewater treatment method comprising the above configuration, since the above-mentioned drainage is subjected to anaerobic treatment in the presence of a saccharide or a monohydric alcohol, the above-mentioned saccharide or 139394.doc 200951081 2: can improve the anaerobic microorganisms The money is divided into Gosh activity. Although the principle of decomposing tetraammonium oxide by saccharide or glutamic acid is not fully understood, one type or one alcohol-like kiss is the metabolic activity of the above-mentioned sugar. active. In other words, in order to metabolize the above-mentioned sugar, the metabolic activity of the anaerobic microorganism becomes active, and the metabolic activity of the decomposition of the cyclopentane is also active. Next, in the wastewater treatment method of the present invention, 'preferably, the monosaccharide is present. (IV) The water is subjected to anaerobic treatment. In the presence of a monosaccharide, the anaerobic treatment of the second is carried out, which has the advantage that it can be further advanced; 1 the windy microorganism can decompose the metabolic activity of the chlorine oxidation four yards. In the case of the wastewater treatment method of the present invention, the above-mentioned monosaccharide is preferably in the form of glucose: the monosaccharide is glucose, and therefore has the advantage that it is metabolically active. #的的化化四四的四的四下的下下。 In addition to the drainage of the present invention, the upper part is preferably in the presence of isopropanol: water oxygen treatment. In the presence of isopropyl alcohol, the above-mentioned drainage is subjected to an anortic treatment, whereby the following advantages can be obtained: that is, the metabolic activity of biodegradable ammonium sulphate can be further decomposed. In the drainage treatment method, it is preferred to carry out anaerobic treatment in an amount of 1 part by weight based on the amount of carbon of the above-mentioned parts by weight. In the case of the above-mentioned saccharide, it is preferable that the above-mentioned drainage is in the drainage treatment method of the present invention, and the amount of organic carbon of the tetra-ammonium hydroxide (tetra)ammonium hydroxide in the above-mentioned row 139394.doc 200951081 is preferably used. The ratio of the amount: the weight portion 'existing Ο. 5~2 weight for anaerobic treatment. Under I (4), the effect of the above-mentioned drainage invention: The drainage treatment method can improve the metabolic activity of the hydrogen anaerobic microorganisms. Therefore, the drainage method of the present invention has the effect of producing a reduction in the nature of the hearing of the surgical treatment towel. [Embodiment] The wastewater treatment method of the present invention is a wastewater treatment method for anaerobic treatment of wastewater containing tetrakis(4) in the presence of a saccharide or a monohydric alcohol. Hereinafter, an embodiment of the wastewater treatment method of the present invention will be described. The drainage treatment method of the wood embodiment is carried out by the following steps. That is, the drainage treatment method of the present embodiment performs the following steps: a mixing step of mixing a wastewater containing ammonium sulphate and a saccharide or a monohydric alcohol; and an anaerobic treatment step in the presence of the saccharide or monohydric alcohol, The above-mentioned drainage containing tetrakis(4) hydroxide is subjected to anaerobic treatment using an anaerobic microorganism; and a separation step of separating the above-described anaerobic-treated drainage into treated water and sludge. - The surface treatment method of the present embodiment will be described in more detail with reference to the drawings. The drainage treatment method of the present embodiment can be carried out using the drainage treatment apparatus shown in Fig. 。. In the above mixing step, for example, the raw water tank 1 in which the above-described drainage is accumulated, and the collecting tank 2 in which the above-mentioned drainage supplied from the raw water tank is mixed with the above-mentioned sugar or - sterol is used. Specifically, for example, the wastewater containing tetraammonium hydroxide accumulated in the raw water tank 1 is supplied to the collection tank 2, and the above-mentioned saccharide port or monohydric alcohol is added to the above-mentioned drain supplied to the pool. Thus, the wastewater containing tetraammonium hydroxide is mixed with the above sugar or monohydric alcohol.
於上述厭氧處理步驟中，將添加有上述糖類或一元醇之 上述排水，自上述集合槽2供給至填充有含有厭氧性微生 物之顆粒污泥（粒狀污泥）之反應器3中，於上述反應器3 中’在上述糖類或-元醇存在下’利用上述污泥中所含之 上述厭氧性微生物之厭氧性代謝，對含有氫氧化四院錢之 上述排水進行厭氧處理。 於上述分離步财，使㈣在上述厭氧處理步驟中經處 理之處理水與污泥進行分離之分離槽4、以及蓄積上述厭 乳處理中經處理之處理水之處理水槽5。詳細而言，於上 述分離糟4中，將伴隨對上述排水進行厭氧處理而自上述 反應器3上部排出之含有污泥之混合液，分離成對上述排 水進行處理所得之處理水與污泥，將上述分離_中分離 出之處理水供給至上述處理水糟5並蓄積上述處理水，進 而、，將上述分離槽4中分離出之污泥輸送至上述集合槽2。 首先’對上述各步驟中之上述厭氧處理步驟之 說明。 運仃 上述厭氧處理步驟中’在上述反應器3中，於上述糖類 139394.doc 200951081 或一元醇存在下，利用上述污泥中所含之上述厭氧性微生 物，對含有氫氧化四烷銨之上述排水進行厭氧性厭氧處 理。亦即，上述厭氧處理步驟係於混合有上述糖類或一元 醇與含有上述氫氧化四烷銨之上述排水之狀態下，利用厭 氧性微生物之代謝活動而實施之厭氧性處理步驟。 於上述厭氧處理步驟中經處理之上述排水只要係包含氫 氧化四烷銨者，則無特別限定。上述氫氧化四烷銨於半導 體或液晶面板之製造過程中，例如係用作用於光微影之正 型光阻劑用顯影液者，且可包含於半導體或液晶面板之製 造工場之排水中。又，上述氫氧化四烷銨亦包含於來自製 造氫氧化四烷銨之藥品製造工場之排水中。 於上述厭氧處理步驟中經處理之上述排水除了可含有氫 氧化四烷銨之外，亦可含有各種成分。例如，上述排水可 含有已剝離溶解之光阻劑成分或界面活性劑等。 作為上述氫氧化四烷銨，可例示氫氧化四曱基銨 (TMAH)、氫氧化四乙基銨（TEAH，Tetra Ethyl Ammonium Hydroxide)、氣氧化四丙基敍（TPAH，Tetra Propyl Ammonium Hydroxide)、氫氧化四 丁基敍（TBAH，Tetra Butyl Ammonium Hydroxide)、及氫氧化苄基三甲基銨等。 其中，氫氧化四甲基銨（TMAH)係最常用作上述正型光阻 劑用顯影液者，作為半導體或液晶面板之製造工場之排水 中所含之通常之氫氧化四烧錢，可列舉氫氧化四甲基餒 (TMAH)。 上述排水中所含之上述氫氧化四烷銨之濃度較佳為 139394.doc 200951081 12,000 mg/L以下。當該濃度為12〇〇〇 mg/L以下時，對保 持於反應器内之厭氧性微生物造成之負荷較為適當，進 而，可將作為氫氧化四烷銨之分解產生物之銨濃度抑制於 厭氧處理之容許範圍内，從而不易妨礙厭氧性微生物之繁 . 殖，因此，有可尚效率地將氫氧化四烧銨分解之優點。 ‘ 又，上述排水中所含之上述氲氧化四烷銨之濃度較佳為 1〇〇 mg/L以上，更佳為500 mg/L以上。當該濃度為1〇〇 mg/L以上時，有如下優點，即，可容易地將上述氫氧化四 ㈣用作用於厭氧性微生物之代謝之有機性物質；當上述 濃度為500 mg/L以上時，有可更容易地供使用之優點。 又’於使用有顆粒污泥之處理之情形時，上述濃度較佳為 1500 mg/L以上，其中該顆粒污泥可容易地保持反應器内 之厭氧性微生物，且可維持上述氫氧化四燒錄之更高之除 去率。 作為上述糖類，可列舉單糖類、二糖類、結合有三個以 φ 上之單糖類之募糖、以及結合有2〇以上之單糖類之多糖類 等。 作為上述單糖類，可列舉葡萄糖、果糖、以及半乳糖 作為上述一糖類，可列舉薦糖、乳糖、海藻糖、以及 麥芽糖等。作為上述寡糖，可列舉棉子糖、潘糖、松三 糖、龍膽三糖' 以及水蘇糖等。作為上述多糖類，可列舉 灰粉、肝糖、環脂糖、果膠、以及三仙勝等。 t述糖類可單獨使用1種，或者可組合地使用2種以上。 慮到藉由上述厭氧處理而容易地進一步將上述氣氧化 139394.doc 200951081 四烷銨分解，上述糖類較佳為單糖類或二糖類。又，考慮 到更容易被微生物分解，上述單糖類較佳為葡萄糖。 例如於採用葡萄糖作為上述糖類之情形時，可於上述厭 氧處理步驟中，使用製造砂糖時之副產物即廢糖漿等之含 有葡萄糖之糖類組成物。考慮到含有作為糖類之葡萄糖且 合易以低價格獲得，上述廢糖漿可較佳地被使用。 上述元醇係於分子中含有一個羥基且以任意之比例溶 解於水之水冷性之化合物。作為該一元醇，可列舉甲醇、 乙醇、以及異丙醇等。 上述疋醇可單獨使用1種，或者可組合地使用2種以 上0 考慮丨藉由上述厭氧處理而容易地進一步將上述氫氧化 四烷銨分解，上述一元醇較佳為異丙醇。 上述厭氧處理步驟中，為了將上述一元醇添加至上述排 欠中可使用含有上述一元醇之一元醇組成物。具體而 言，作為該-元醇組成物，例如可使用含有—元醇 液、及自工場雜屮夕入士 — r 有出之3有一 7C醇之廢水等。作為含有— 酵之廢液，例如可列舉含有製 所使用之比"、曲 專之工業材料時 乂同之濃度的一元醇之廢液，作為含 之廢水，可列舉於兮τIϋ ^^ 幻举於該工業材料之水洗過程中與一 洗水一併自工場等排ψ ^ 或廢水用作-I 等。將該含有-元醇之廢液 不^ 此有如下優點，即，即便 謂’亦可抑制氫氧化四烷銨之分解活性之 降，同時可斟各士 ^ 解『生之下 π醇之廢液或廢水進行淨 139394.doc 200951081 旦上= 糖類之添加量較佳係相對於氫氧化四驗之有機碳In the anaerobic treatment step, the above-described drainage water to which the saccharide or monohydric alcohol is added is supplied from the collection tank 2 to the reactor 3 filled with granular sludge (granular sludge) containing anaerobic microorganisms. In the reactor 3 described above, 'anaerobic treatment of the above-mentioned anaerobic microorganisms contained in the sludge is carried out in the presence of the above-mentioned saccharide or -alcohol, and the above-mentioned drainage containing the oxidized four yards is subjected to anaerobic treatment. . In the above separation step, (4) a separation tank 4 for separating the treated water treated with the sludge in the anaerobic treatment step, and a treatment tank 5 for storing the treated water in the above-described anger treatment. Specifically, in the separation waste 4, the mixed liquid containing the sludge discharged from the upper portion of the reactor 3 with the anaerobic treatment of the above-mentioned drainage is separated into treated water and sludge obtained by treating the above-mentioned drainage. The treated water separated in the separation_ is supplied to the treated water sludge 5 to accumulate the treated water, and further, the sludge separated in the separation tank 4 is sent to the collecting tank 2. First, the description of the above anaerobic treatment steps in each of the above steps. In the above anaerobic treatment step, in the above reactor 3, in the presence of the above-mentioned saccharide 139394.doc 200951081 or monohydric alcohol, the above-mentioned anaerobic microorganism contained in the sludge is used to contain tetraammonium hydroxide The above drainage is subjected to anaerobic anaerobic treatment. That is, the anaerobic treatment step is an anaerobic treatment step performed by the metabolic activity of the anaerobic microorganism in a state in which the saccharide or the monohydric alcohol and the above-described drainage containing the tetraammonium hydroxide are mixed. The above-mentioned drainage which is treated in the above anaerobic treatment step is not particularly limited as long as it contains tetraammonium hydroxide. The above-described tetraalkylammonium hydroxide is used as a developer for a positive photoresist for photolithography, for example, in the production of a semiconductor or a liquid crystal panel, and may be contained in a drainage of a semiconductor or liquid crystal panel manufacturing plant. Further, the above tetraammonium hydroxide is also contained in the drainage from a pharmaceutical manufacturing plant for producing tetraammonium hydroxide. The above-mentioned drainage treated in the above anaerobic treatment step may contain various components in addition to tetraammonium hydroxide. For example, the above-mentioned drainage may contain a photoresist component or a surfactant which has been peeled off and dissolved. Examples of the tetraammonium hydroxide hydride include tetradecyl ammonium hydroxide (TMAH), Tetra Ethyl Ammonium Hydroxide (TEAH), and Tetra Propyl Ammonium Hydroxide (TPAH). Tetra Butyl Ammonium Hydroxide (TBAH), benzyltrimethylammonium hydroxide, and the like. Among them, tetramethylammonium hydroxide (TMAH) is most commonly used as a developing solution for the above-mentioned positive type resist, and it is exemplified as the usual hydrogen oxyhydroxide contained in the drainage of a semiconductor or liquid crystal panel manufacturing plant. Tetramethylhydrazine hydroxide (TMAH). The concentration of the above tetraammonium hydroxide contained in the above-mentioned drainage is preferably 139394.doc 200951081 12,000 mg/L or less. When the concentration is 12 〇〇〇mg/L or less, the load on the anaerobic microorganisms held in the reactor is appropriate, and further, the ammonium concentration as a decomposition product of tetraammonium hydroxide can be suppressed. Within the allowable range of anaerobic treatment, it is difficult to hinder the anaerobic microorganisms from cultivating, and therefore, there is an advantage that the tetraammonium hydroxide can be efficiently decomposed. ‘ Further, the concentration of the above-mentioned tetraammonium oxide oxidized in the above-mentioned drainage is preferably 1 〇〇 mg/L or more, more preferably 500 mg/L or more. When the concentration is 1 〇〇mg/L or more, there is an advantage that the above-mentioned tetrakis(tetra) hydroxide can be easily used as an organic substance for metabolism of anaerobic microorganisms; when the above concentration is 500 mg/L In the above, there is an advantage that it can be used more easily. Further, when the treatment with granular sludge is used, the above concentration is preferably 1500 mg/L or more, wherein the granular sludge can easily maintain the anaerobic microorganisms in the reactor, and the above-mentioned hydroxide can be maintained. The higher removal rate of burning. Examples of the saccharide include monosaccharides, disaccharides, polysaccharides in which three monosaccharides of φ are combined, and polysaccharides in which two or more monosaccharides are combined. Examples of the monosaccharide include glucose, fructose, and galactose. Examples of the monosaccharide include sucrose, lactose, trehalose, and maltose. Examples of the oligosaccharide include raffinose, panose, melezose, gentian trisaccharide, and stachyose. Examples of the polysaccharide include ash powder, glycogen, cyclolipose, pectin, and Sanxiansheng. The saccharide may be used singly or in combination of two or more. It is considered that the gas oxidation 139394.doc 200951081 tetraalkylammonium is easily decomposed by the above anaerobic treatment, and the above sugars are preferably monosaccharides or disaccharides. Further, in view of being more easily decomposed by microorganisms, the above monosaccharide is preferably glucose. For example, when glucose is used as the saccharide, a glucose-containing saccharide composition such as a waste syrup which is a by-product in the production of granulated sugar can be used in the anaerobic treatment step. The above-mentioned waste syrup can be preferably used in view of containing glucose as a saccharide and obtaining it at a low price. The above-mentioned alcohol is a water-cooling compound which contains one hydroxyl group in the molecule and is dissolved in water in an arbitrary ratio. Examples of the monohydric alcohol include methanol, ethanol, and isopropyl alcohol. The above sterol may be used singly or in combination of two or more kinds. The above anaerobic treatment may be used to further decompose the tetraammonium hydroxide. The monohydric alcohol is preferably isopropyl alcohol. In the above anaerobic treatment step, a monohydric alcohol composition containing the above monohydric alcohol may be used in order to add the above monohydric alcohol to the above-mentioned deficiencies. Specifically, as the monohydric alcohol composition, for example, a liquid containing a liquid alcohol, and a wastewater having a liquid of 7 to 7 in an industrial field may be used. As the waste liquid containing the yeast, for example, a waste liquid containing a monohydric alcohol having a concentration different from that of the industrial material used in the production of the product, and the waste water containing the same can be cited as the waste water, which can be exemplified in 兮τIϋ ^^ 幻In the process of washing the industrial material, it is discharged from the workshop with a washing water, or the wastewater is used as -I. The waste liquid containing the -ol has the advantage that even if it is said, the decomposition activity of tetraammonium hydroxide can be suppressed, and at the same time, the waste of the π alcohol can be eliminated. Liquid or wastewater is cleaned 139394.doc 200951081 Dandan = the amount of sugar added is preferably relative to the organic carbon of the four
It ，成為G.5〜2重量份之有機碳量之量，更佳係 成為0.5〜1重量份之有機碳量之量。 晉;^述糖類之量係相料氫氧化四㈣之有機碳量之Θ :，成為0.5重量份以上之有機碳量之量，藉此有如下 地伴持^ 7促進風乳化四燒錢之分解，從而可更長時間 地保持虱氧化四烷銨之分解活性。 ❹ 又’上述糖類之量較佳係相對於氫氧化四隸之有機碳 量之1重量份，成為2重量份 置伤以下之有機碳量之量，更佳係 成為1重置份以下之右嬙 p ^ 、 有機妷量之量，藉此有如下優點， 於被厭氧性微生物代謝^分解為更低分子之化合物 之有機性物質減4、，1Λ·二-T* 、“ 質咸夕故而可將相對於厭氧性微生物之代謝 有機性物質之！種之上述二有如下優點：用以對作為 ^ ^ 述糖類進行分解之代謝活動被抑制 :更低’相應地’用以分解氫氧化四⑽之代謝可變得更 自於可將相對於厭氧性微生物之代謝活動之負荷 抑^更低’故而有如下優點：厭氧性微生物之代謝活動 =達到極限，即便於作為有機性物質之氣氧化四烧按之 濃度上升之情形時，亦可穩定地進行排水處理。 上述一元醇之添加量並盔 篁座無特別之限定，較好係相對於氫 ^匕四烧敍之有機碳量之1重量份，成為〇.5〜2重量份之有 機碳量之量。 述7G醇之量係相對於氫氧化四烧錢之有機碳量之1 重ϊ伤’成為〇 · 5重量份以μ 丄 里重伤U上之有機碳量之量，藉此有如 139394.doc 200951081 下優點，即，可促進氫氧化四烧錢之分解，從而可更長時 間地保持氫氧化四烷銨之分解活性。 上述一元醇之量係相對於氫氧化四烷銨之有機碳量 之1重量份，成為2重量份以下之有機碳量之量，藉此有如 下優點’ ~ ’由於被厭氧性微生物而分解為更低分子之化 合物之有機性物質減少，故而可將相對於厭氧性微生物之 代謝活動之負荷抑制得更低。亦即，有如下優點：用以對 作為有機性物質之！種之上述一元醇進行分解之代謝活動 被=料更低，相應地，用以分解氫氧化四烧鐘之代謝可 變得^高。又，由於可將相對於厭氧性微生物之代謝活動 之負何抑制得更低’故而有如下優點：厭氧性微生物之代 謝活動不易達到極限，即便於作為有機性物質之氫氧化四 炫錢之濃度上升之情形時，亦可穩定地進行排水處理。 上述厭氧處理步驟例如能夠以下述方式實施：—面對 氧化四院铵之濃度進行測定，—面根據該濃度之變化’將 所添加之上述糖類或一元醇之量控制為特定之量。以上述 方式實施上述厭氧處理步驟’藉此有如下優點，即，可= 所添加之糖類或一元醇控制為必需之最小限度，從 相對於厭氧性微生物之代謝活動之負荷抑制得更低^ 、 詳細而言，於上述厭氧處理步驟中，較佳係一面對 排水中所含之氫氧化四院錢之量進行測定，一面於 藉由該測定所求出之氫氧化四燒狀有機碳量之工重量 份，存在〇·5〜2重量份之有機碳量之量之糖類或-元醇之 情形下，對上述排水進行厭氧處理。 139394.doc -12· 200951081 又於上述厭氧處理步驟中，由於存在一元醇而致使氣 氧化四烧銨之分解率變得比較高之後，即便不將一元醇添 加至上过:排水中’亦可將氫氡化四烧敍之分解率維持得比 較高。由於不將—元醇添加s上述排水中，故而可進一步 .減乂所使用之元醇’從而可將相對於厭氧性徵生物之代 . 謝活動之負荷抑制得更低。 .此處，上述有機碳量係用於表示有機性物質中所含之碳 原、子之質量之值。亦即’於分子構造明破之化合物之情形 時’上述有機碳量係藉由將碳原子之原子量佔該化合物之 为子量之比例乘以特定量的上述化合物之重量而求出之 值。又，於使用糖類或一元醇之含有率不明之混合物等之 情形時，上述有機碳量係使特定量之該混合物溶解於特定 量之水，利用總有機碳濃度計來測定該溶液之總有機碳 里，並根據該已測定之值與已溶解之上述混合物量進行計 算而求出之值。 ❿ 上述厭氧處理由於無需持續地供給分子狀氧，因此可抑 制為此所/肖耗之電費。因此，與必需持續地供給分子狀氧 之利用好氣性微生物之好氣性代謝活動的好氣處理相比 較，能夠以低成本實施。又，上述厭氧處理係如下之處 理.與上述好规處理相比較，微生物之增殖速度緩慢，但 適合於含有比較高之濃度之有機性物質之排水的處理，且 亦可抑制污泥產生量，因此，亦能夠以低成本實施剩餘污 泥處理等。 再者，於上述厭氧處理中，藉由厭氧性微生物之代謝活 139394.doc 13 200951081 動而將各種有機性物質分解為更低分子之化入物，又 將各種無機性物質代 可 可產生之物質，除了可：：質:Γ上述厭氧處理中 X,, M g,枝 甲烷、一氧化碳等以外，亦可It is an amount of the organic carbon amount of G. 5 to 2 parts by weight, more preferably 0.5 to 1 part by weight of the amount of the organic carbon. Jin; ^The amount of sugar is the amount of organic carbon in the fourth phase of the hydrogenation of the phase material. The amount of organic carbon is 0.5 parts by weight or more, thereby supporting the wind-emulsified four-burning It decomposes, so that the decomposition activity of tetraammonium oxide can be maintained for a longer period of time. Further, the amount of the above-mentioned saccharide is preferably 1 part by weight based on the amount of the organic carbon of the hydrazine hydroxide, and the amount of the organic carbon is 2 parts by weight or less, more preferably 1 part or less.嫱p ^ , the amount of organic sputum, which has the following advantages: the organic matter that is metabolized by anaerobic microorganisms into lower molecular compounds minus 4, 1 Λ · 2 - T*, "quality eve Therefore, the above two of the metabolic organic substances of the anaerobic microorganisms have the following advantages: the metabolic activity for decomposing the sugars is suppressed: lower 'correspondingly' for decomposing hydrogen The metabolism of oxidized tetra (10) can become more self-sufficient than the load of metabolic activity relative to anaerobic microorganisms. Therefore, it has the following advantages: metabolic activity of anaerobic microorganisms = reaching the limit, even as organic When the concentration of the substance is increased, the concentration of the above-mentioned monohydric alcohol is not limited, and it is preferably organic relative to the hydrogen. 1 part by weight of carbon, It is an amount of 5 to 2 parts by weight of organic carbon. The amount of 7G alcohol is 1% of the amount of organic carbon relative to the amount of carbonic acid burned. The amount of organic carbon thereon is such that it has the advantage of 139394.doc 200951081, that is, it can promote the decomposition of the four-burning hydrogen hydroxide, thereby maintaining the decomposition activity of tetraammonium hydroxide for a longer period of time. The amount is 1 part by weight or less based on the amount of the organic carbon of tetraammonium hydroxide, and the amount of the organic carbon is 2 parts by weight or less, thereby having the following advantages: ~ ~ Decomposed into lower molecules by anaerobic microorganisms Since the organic substance of the compound is reduced, the load on the metabolic activity of the anaerobic microorganism can be suppressed to be lower, that is, it has the advantage of decomposing the above monohydric alcohol as an organic substance. The metabolic activity is lower, and accordingly, the metabolism for decomposing the four-hour clock of hydrogen peroxide can become high. Moreover, since the metabolism of the anaerobic microorganism can be suppressed lower. Therefore, it has the following advantages: The metabolic activity of the microorganisms is not easy to reach the limit, and the drainage treatment can be stably performed even when the concentration of the oxyhydroxide as the organic substance rises. The anaerobic treatment step can be carried out, for example, in the following manner: The concentration of the ammonium oxidized in the fourth chamber is measured, and the amount of the above-mentioned saccharide or monohydric alcohol added is controlled to a specific amount according to the change in the concentration. The anaerobic treatment step described above is carried out in the above manner, thereby having the following advantages , that is, the added sugar or monohydric alcohol is controlled to the minimum necessary, and the load from the metabolic activity relative to the anaerobic microorganism is suppressed to be lower ^, in detail, in the above anaerobic treatment step, In the case of the amount of the amount of the sulphuric acid, which is contained in the water, the amount of 四·5~2 is the weight of the amount of the oxidized organic carbon in the sulphuric acid. In the case of a portion of the amount of organic carbon, such as a saccharide or a monohydric alcohol, the above-mentioned drainage is subjected to anaerobic treatment. 139394.doc -12· 200951081 In the above anaerobic treatment step, the decomposition rate of the gas-oxidized tetra-salt ammonium is relatively high due to the presence of monohydric alcohol, even if the monohydric alcohol is not added to the above: The decomposition rate of hydroquinone four burns is maintained relatively high. Since the -ol is not added to the above-mentioned drainage, the amount of the alcohol used can be further reduced, so that the load on the generation of the anaerobic genus can be suppressed to be lower. Here, the amount of the organic carbon is used to indicate the value of the mass of the carbon and the sub-mass contained in the organic substance. That is, in the case of a compound having a molecular structure, the organic carbon amount is obtained by multiplying the atomic weight of the carbon atom by the amount of the compound by a specific amount of the weight of the compound. Further, in the case of using a mixture of a sugar or a monool having an unknown content, the amount of the organic carbon is such that a specific amount of the mixture is dissolved in a specific amount of water, and the total organic matter of the solution is measured by a total organic carbon concentration meter. The value obtained by calculation based on the measured value and the amount of the above-mentioned mixture dissolved. ❿ Since the above anaerobic treatment does not require continuous supply of molecular oxygen, the electricity cost for this purpose can be suppressed. Therefore, it can be implemented at a low cost as compared with the aerobic treatment which requires continuous supply of molecular oxygen and aerobic metabolic activity using aerobic microorganisms. Further, the anaerobic treatment is as follows. Compared with the above-mentioned good-treatment treatment, the growth rate of the microorganism is slow, but it is suitable for the treatment of the drainage containing the organic substance having a relatively high concentration, and the amount of sludge generated can be suppressed. Therefore, it is also possible to carry out excess sludge treatment and the like at low cost. Furthermore, in the above anaerobic treatment, various organic substances are decomposed into lower molecular substances by the metabolic activity of anaerobic microorganisms, and various inorganic substances are produced by cocoa. The substance can be: In addition to: X, M g, methane, carbon monoxide, etc. in the above anaerobic treatment,
列舉風、11、硫化氫等 J 將被處理之有機性物暂 藉由上述厭氧處理， 錢1±物質之_部分分解，從 烧等之生物氣體。可自η “怒 甲 如將其用作燃料。 献應&3回收該生物氣體，例 於上述厭氧處理步驟 述糖類或一元醇之排HI 而對包含上 中，可藉。亦即，於上述厭氧處理 :心中所含之厭氧性微生物，將上述排水中所 ，之虱氧化四烧錢分解為更低分子之化合 厭氧處理中，上沭撼脑+ _ ^ 於上述 核類或—讀可提高厭氧性微生物對氫 氧化四烷銨進行分解之能力， 11 微w… 月“且了更長時間地保持厭氧性 微生物對虱虱化四烷銨進行分解之活性。 雖尚未完全弄清藉由上述糖類或一元醇而容 四燒敍進行分解之原理，但—般認為上述糖類或-元= 提而厭氧性微生物對氫氧化四㈣進行分解之代謝活性。 亦即’-般認為’為了對上述糖類或一元醇進行代謝，厭 氧性微生物之代謝活動變得活躍，隨之，對氫氧化四烷銨 進行分解之代謝活動亦變得活躍。Listed wind, 11, hydrogen sulfide, etc. J The organic matter to be treated is temporarily decomposed by the above-mentioned anaerobic treatment, and the biomass gas is burned. It can be used as a fuel from η "Rage A. The effusion & 3 recovers the biogas, for example, in the above anaerobic treatment step, the HI of the saccharide or the monohydric alcohol is described, and the inclusion of the upper middle can be borrowed. In the above anaerobic treatment: the anaerobic microorganisms contained in the heart, the sulphur oxides in the above-mentioned drainage are decomposed into lower molecular anaerobic treatment, and the upper cerebral genus + _ ^ is in the above nucleus Or - reading can improve the ability of anaerobic microorganisms to decompose tetraammonium hydroxide, 11 micro w... and "and for a longer period of time to maintain the activity of anaerobic microorganisms to decompose tetradecyl ammonium." Although the principle of decomposition by the above-mentioned saccharides or monohydric alcohols has not been fully understood, it is generally considered that the above-mentioned saccharides or - ary = anaerobic microorganisms decompose the metabolic activity of tetra(tetra) oxyhydroxide. In other words, in order to metabolize the above-mentioned sugar or monohydric alcohol, the metabolic activity of the anaerobic microorganism becomes active, and accordingly, the metabolic activity for decomposing tetraammonium hydroxide is also active.
作為上述厭氧處理步驟中所使用之上述污泥，只要為含 ^厭氧性微生物且可實施上述厭氧處理者，則無特収限 疋，但考慮到例如可於反應器内將厭氧性微生物保持於高 濃度’又’可進行與處理水之固液分離，則較佳為上述S 139394.doc • 14· 200951081 粒污泥。再者，亦可使用使厭氧性微生物附著於塑膠等之 載體而成之載體附著污泥。 又，作為上述污泥，可使用對有機性排水進行厭氧處理 之污泥。具體而言，可使用對化學工場排水、造紙排水、 • 髒水污泥、食品排水、洗毛排水等之有機性排水進行厭氧 . 處理之厭氧污泥，更具體而言，於將糖類添加至含有氫氧 化四烷銨之排水中而進行厭氧處理之情形時，較佳可使用 對含有澱粉等之糖類之有機性排水進行厭氧處理之厭氧污 ❹'尼’於將—元醇添加至含有氫氧化四燒錄之排水中而進行 厭氧處理之情形時，較佳使用對含有一元醇之有機性排水 進行厭氧處理之厭氧污泥。 上述/亏泥之反應槽内之濃度較佳為1〇〇〇〇〜1〇〇〇〇〇 mg/L ’更佳為2〇,〇〇〇〜50,000 mg/L。又，反應槽内之排水 之滯留時間較佳為2〜48小時左右，更佳為4〜48小時。 上述厭氧處理步驟之方式並無特別之限定，但考慮到可 φ 冋負何運轉且可使裝置小型化，較佳如上述反應器3中所 實施之方式般，採用使用有顆粒污泥之上流式厭氧性污泥 床（UASB，Upflow Anaer〇bic SludgeBed)方式。 再者，上述厭氧處理步驟較佳係於磷、鐵等之用於厭氧 性微生物之營養鹽存在下實施。於上述營養鹽存在下實施 上述厭氧處理步驟，藉此，可成為易於供厭氧性微生物繁 殖之環境，因此，有厭氧性微生物之代謝活動可變得活躍 之優點。 其次，參照圖式，分別對上述混合步驟以及上述分離步 139394.doc -15. 200951081 驟進行詳細說明。 於上述混合步驟令， 糖類進行混合。或者， 四烷錄之排水與上述一 對含有氫氧化四烷銨之排水與上述 於上述混合步驟令，對含有氫氧化 元醇進行混合。 :即:於上述混合步驟中，例如’首先將蓄積於原水槽 1之3有虱氧化四院銨之排水供給至集合槽2。可使用 之泵p作為供給機構❶The above-mentioned sludge used in the above anaerobic treatment step is not limited to any one as long as it is an anaerobic microorganism and can be subjected to the above anaerobic treatment, but it is considered that anaerobic can be carried out in the reactor, for example. The microorganisms are kept at a high concentration 'again' for solid-liquid separation from the treated water, preferably S 139394.doc • 14· 200951081. Further, it is also possible to use a carrier in which an anaerobic microorganism is attached to a carrier such as a plastic to adhere to the sludge. Further, as the sludge, sludge which is subjected to anaerobic treatment of organic drainage can be used. Specifically, anaerobic sludge treated by anaerobic treatment of organic drainage such as chemical plant drainage, paper drainage, dirty water sludge, food drainage, scouring drainage, etc., and more specifically, sugars can be used. When it is added to a wastewater containing tetraammonium hydroxide and subjected to anaerobic treatment, it is preferred to use an anaerobic treatment for anaerobic treatment of organic drainage containing sugars such as starch. When the alcohol is added to the anaerobic treatment in the water containing the sulphuric acid, it is preferred to use an anaerobic sludge which is subjected to anaerobic treatment of the organic wastewater containing the monohydric alcohol. The concentration in the above-mentioned/depleted reaction tank is preferably 1 〇〇〇〇 to 1 〇〇〇〇〇 mg/L ‘more preferably 2 〇, 〇〇〇 50,000 50,000 mg/L. Further, the residence time of the drainage in the reaction tank is preferably from about 2 to 48 hours, more preferably from 4 to 48 hours. The method of the above anaerobic treatment step is not particularly limited, but it is preferable to use a granular sludge as in the above-described manner in the reactor 3, in consideration of the operation of the φ 冋 minus the operation. Upflow Anaer〇bic Sludge Bed (UASB). Further, the anaerobic treatment step is preferably carried out in the presence of a nutrient salt for anaerobic microorganisms such as phosphorus or iron. By performing the above-described anaerobic treatment step in the presence of the above-mentioned nutrient salt, it is possible to provide an environment in which anaerobic microorganisms can be easily propagated. Therefore, the metabolic activity of anaerobic microorganisms can be made active. Next, the above mixing step and the above-described separation step 139394.doc -15. 200951081 will be described in detail with reference to the drawings. In the above mixing step, the sugars are mixed. Alternatively, the tetradecane-depleted water and the above-mentioned pair of water-containing tetraalkylammonium hydroxide are mixed with the above-mentioned mixing step to contain a hydroxide alcohol. That is, in the above-described mixing step, for example, first, the drainage water accumulated in the raw water tank 1 and having the ammonium oxide of the fourth chamber is supplied to the collecting tank 2. The pump p can be used as a supply mechanism❶
再者，為了使上述厭氧處理步驟之效率為最佳，可藉 鹼性水溶液等而對上述集合槽2中之排水之PH值心調 整。可將驗性水溶液等自储罐（未圖示）供給至上述集合槽 2。上述厭氧處理中之pH值較佳為^^。 其次，於上述混合步驟中，在供給至上述集合槽2之上 述排水中添加上述糖類或包含該糖類之糖類組成物。為了 使^述反應器3内之厭氧處理之效率為最#，可將所期望 之量之上述糖類或上述糖類組成物添加至上述集合槽2。 再者，於上述混合步驟中，亦可混合地使用上述糖類與上 述糖類組成物，亦可利用水等之溶媒將上述糖類或上述糖 類組成物稀釋後使用。 或者，於上述混合步驟中，在供給至上述集合槽2之上 述排水中添加上述一元醇或包含該一元醇之一元醇組成 物。為了使上述反應器3内之厭氧處理之效率為最佳可 將所期望之量之上述一元醇或上述一元醇組成物添加至上 述集合槽2。再者，於上述混合步驟中，亦可混合地使用 上述一 tl醇與上述一元醇組成物，亦可利用水等之溶媒將 139394.doc -16- 200951081 上述一元醇或上述一元醇組成物稀釋後使用。又，於上述 混合步驟中’例如’如上所述’使用包含一元醇之工場廢 水等之廢水，對上述一元醇與含有氫氧化四烷銨之排水進 行混合。 再者，於本實施形態之上述混合步驟中，將上述糖類或 一元醇添加至上述集合槽2，但未必限於此種方法。例 如，亦可直接將一元醇添加至原水槽！中，於原水槽丨中對 一元醇與上述排水進行混合。又’例如可採用如下之方 ® 法：於連接原水糟1與集合槽2之配管之途中，或者於連接 集合槽2與反應器3之配管之途中添加上述一元醇，或於上 述反應器3中添加上述一元醇，藉此，對上述一元醇與上 述排水進行混合。 繼而，對上述分離步驟進行說明。於上述分離步驟中， 將經厭氧處理之上述排水分離為處理水與污泥。 亦即，於上述分離步驟中H，將伴隨對上述排水進 β 行厭氧處理而自上述反應器3上部排出之含有上述污泥的 混合液，分離為對上述排水進行處理所得之處理水盘上述 污泥。該分離係可藉由使用在一般之厭氧處理中所使用之 分離槽4而實施。 再者，代替以上述方式使用分離槽4來實施分離步驟， 可藉由於上述反應器3之上部設置由複數個傾斜板所構成 之GSS裝置（氣固液分離裝置）等之固液分離機構而實施分 又，於上述分離步驟中 將上述處理水供給至用以蓄積 139394.doc -17· 200951081 上述分離槽4中經分離之處理水之處理水槽5,並蓄積上述 處理水。藉由實施上述厭氧處理步驟，可使上述處理水之 氫氧化四烷銨濃度低於經厭氧處理之前之上述排水的濃 度。又，由總有機碳量（TOC，Total 〇rganic Carb〇n)等所 表不之上述處理水中所含之有機性物質的濃度可小於經厭 氧處理之前之上述排水的濃度。 進而，於上述分離步驟中，將分離出之污泥輸送至上述 集合槽2。將分離出之上述污泥送回至上述集合槽2,藉 此，有可將反應槽内t厭氧污泥濃度維㈣高濃度之優 ^ 再者，於厭氧處理之方式為固定床式之情形日夺，通常， 不將上述分離槽4中分離出之污泥輸送至反應器，但於反 應器内之厭氧污泥濃度減少之情形時，可將上述分離槽4 中分離出之污泥輸送至上述反應器3。藉此，有可恢復厭 氧污泥濃度之優點。 再者’如下態樣亦可包含於本發明：於上述厭氧處理步 驟之前或之後，進-步對上述排水實施其他處理。亦即， 例如，亦可於上述厭氧處理步驟之後，實施利用好氣性微 生物之代謝活動之好氣處理，又，例如亦可於上述厭氧處 理步驟之前’實施與上述厭氧處理步料时式之厭氧處 理。又，亦可於上述厭氧處理步驟之前，實施自上述排水 中分離上述排水中之光阻劑之步驟。 本發明並不限定於上述例示之排水處理方法。 又’於不損害本發明之效果之範圍内，可採用-般之排 139394.doc •18- 200951081 水處理方法中所使用之各種態樣。 實施例 其次，列舉實施例，更詳細地對本發明進行說明，但本 發明並不限定於該等實施例。 (試驗例1) 按照圖1所示之排水處理流程，以如下所述之方式，實 施進行厭氧性處理之排水處理。 以污泥濃度成為25,000 mg/L之方式，將食品工場排水 © 處理設備（UASB設備）之顆粒污泥填充至内徑為100 mm#、 液面高度為635 mm之5 L容積的反應器中。於原水槽中， 蓄積適當地添加有特定量之作為氫氧化四烧敍之氫氧化四 甲基銨（TMAH)或作為糖類之葡萄糖的排水，亦即，蓄積 能夠以人工之方式調製之模擬排水。將該模擬排水輸送至 集合槽，將集合槽中之排水之pH調整值設為7.0。自反應 器之底部供給集合槽中之排水。將反應器内之水溫控制為 35°C，於此種條件下，一面適當地將特定量之TMAH或葡 鲁 萄糖添加至原水槽中，一面實施藉由厭氧處理之排水處 理。 . 具體而言，以表1所示之條件實施排水處理。亦即，以 直至開始第52天為止，總有機碳量（TOC)成為2640(mg/L) 左右之方式，將排水中之TMAH濃度設定為5000 mg/L。再 者，將每一天之排水之供給量設為1.7 L而實施排水處理。 自試驗開始後第10天左右起，TOC除去率開始上升，於 第20天，TOC除去率接近100%，但若超過20天，則除去率 139394.doc -19- 200951081 開始下降，因此，於開始第52天，將顆粒污泥更換為與開 始時相同之顆粒污泥，且以總有機碳量（TOC)成為 1320(mg/L)左右之方式，將排水中之TMAH濃度設定為 2500 mg/L，將每一天之排水之供給量設為3.7 L而繼續進 行排水處理。 由於TOC除去率開始上升，但接著便急遽下降，因此， 於開始第75天，一面以TMAH及葡萄糖之總有機碳量 (TOC)分別成為1320(mg/L)左右之方式添加葡萄糖，一面 繼續進行排水處理。 於開始第114天之後，再次中止添加葡萄糖而僅殘留 TMAH，於開始第145天結束試驗。 根據對過濾水之處理水TOC濃度（S-TOC)、以及供給至 集合槽之排水之排水TOC濃度（S-TOC)進行測定所得的值 而評價TMAH之分解性，其中該過濾水係藉由No. 5C之濾 紙（相當於JIS P 3801 [濾紙（化學分析用）]所規定之5種C)， 對自反應器上部排出之後於分離槽中分離出之處理水進行 過濾所得者。更詳細而言，隨時間對上述2種TOC濃度進 行測定，算出將該時點之排水TOC濃度與處理水TOC濃度 之差除以排水TOC濃度所得的值作為溶解性TOC除去率（S-TOC除去率）。再者，TOC濃度係使用市售之總有機碳濃度 計而測定。將表示S-TOC除去率之圖表表示於圖2中。 進而，利用離子層析法來分析TMAH之濃度，藉由與上 述TOC濃度相同之方法而算出除去率。將表示藉由TMAH 濃度測定而獲得之TMAH之除去率之圖表表示於圖3中。 139394.doc -20- 200951081 [表i] 設定時期 (天數） 排水添加成分 設定濃度 (mg/L) 設定τοΡ (mg/L) ---— 備註 ——-- 無葡菊撼 0 ΤΜΑΗ 5000 2640 52 ΤΜΑΗ 2500 1320 無葡萄_糖 <更換污泥〉 75 ΤΜΑΗ 2500 1320~~~ 葡萄糖/TMAH=1/1 基準） 萄糖 葡萄糖 3300 1320 114 ΤΜΑΗ 2500 1320 145 (END) - - - 根據圖2可知：即便於TMAH之分解活性下降之後， ❿ ΤΜΑΗ之分解活性亦會因添加葡萄糖而上升。又，於第114 天之後中止添加葡萄糖’藉此’分解活性急遽下降，可觀 察到S-TOC除去率之下降。因此，可謂，藉由使用有葡萄 糖之厭氧處理之排水處理方法之對ΤΜΑΗ進行分解的性能 優異。又，可謂能夠將ΤΜΑΗ之分解活性保持得較高。 進一步而言，於ΤΜΑΗ濃度為5,000 mg/L之情形時，與 2,500 mg/L之情形同樣地可暫時獲得接近於100%之除去 率，因此認為ΤΜΑΗ幾乎不會妨礙厭氧性微生物之繁殖。 ® 因此認為：若於該ΤΜΑΗ濃度亦添加葡萄糖，則可與2,500 mg/L之情形同樣地抑制ΤΜΑΗ之分解活性之下降。 • (試驗例2) 未更換顆粒污泥’而且變更為表2所示之條件’除此以 '外，與試驗例1之處理條件同樣地實施排水處理。每一天 之排水之供給量係自7.3 L開始，於第38〜66天設為9.7 L， 於第66~82天設為11 L。將表示S-TOC除去率之圖表表示於 圖4中，將表示藉由ΤΜΑΗ濃度測定而獲得之ΤΜΑΗ之除去 139394.doc -21- 200951081 率之圖表表示於圖5中。 [表2] 設定時期 (天數） 排水添加成分 設定濃度 (mg/L) 設定TOC (mg/L) 備註 0 TMAH 2500 1320 葡萄糖/TMAH=1/1 (TOC基準） 葡萄糖 3300 1320 38 TMAH 2500 1320 葡萄糖添加量減少50% (TOC基準） 葡萄糖 1650 660 66 TMAH 2500 1320 葡萄糖添加量減少75% (TOC基準） 葡萄糖 825 330 82 (END) - - - 根據圖4以及圖5可知：當相對於TMAH之有機碳重量之 1重量份，葡萄糖之量相當於1重量份之有機碳重量時， TMAH之分解活性較高，即便葡萄糖之量相當於0.5重量份 之總有機碳重量，TMAH之分解活性亦較高。 亦即，相對於TMAH之有機碳重量之1重量份，添加相 當於0.5重量份以上之總有機碳重量之量之葡萄糖，藉 此，可維持較高之TMAH之分解活性。 (試驗例3) 未更換顆粒污泥，將葡萄糖設為廢糖漿（市售品TOC含 有量為310 g/kg)，將每一天之排水之供給量設為2.8 L直至 第68天為止，其後設為6.2 L，而且變更為表3所示之條 件，除此以外，與試驗例1之處理條件同樣地實施排水處 理。將表示S-TOC除去率之圖表表示於圖6中，將表示藉 由TMAH濃度測定而獲得之TMAH之除去率之圖表表示於 圖7中。 139394.doc -22- 200951081 [表3] 設定時期 (天數） 排水添加成分 設定濃度 (mg/L) 設定TOC (mg/L) 備註 0 TMAH 2500 1320 廢糖漿/TMAH=1/1 (TOC基準） 廢糖漿 4260 1320 29 TMAH 2500 1320 廢糖漿添加量減少50% (TOC基準） 廢糖漿 2130 660 68 TMAH 2500 1320 中止添加廢糖漿 74 (END) - - - 根據圖6及圖7可知：當相對於TMAH之有機碳量之1重 量份，廢糖漿之量相當於1重量份之有機碳重量時， TMAH之分解活性較高，即便當廢糖漿之量相當於0.5重量 份之總有機碳重量，TMAH之分解活性亦較高。 亦即，相對於TMAH之有機碳重量之1重量份，添加相 當於0.5重量份以上之總有機碳重量之量之廢糖漿，藉此 可維持較高之TMAH之分解活性。 (試驗例4) 按照圖1所示之排水處理流程，以如下所述之方式，實 施進行厭氧性處理之排水處理。 以污泥濃度成為25,000 mg/L之方式，將食品工場排水 處理設備（UASB設備）之顆粒污泥填充至内徑為100 mm多、 液面高度為635 mm之5 L容積的反應器中。於原水槽中， 蓄積適當地添加有特定量之作為氫氧化四烧銨之氫氧化四 曱基銨（TMAH)或作為一元醇之異丙醇（以下亦稱為 「IPA」）的排水，亦即，蓄積能夠以人工之方式調製之模 擬排水。將該模擬排水輸送至集合槽，將集合槽中之排水 139394.doc -23· 200951081 之pH調整值設為7.0。自反應器之底部供給集合槽中之排 水。將反應器内之水溫控制為35°C，於此種條件下，一面 適當地將特定量之TMAH或IPA添加至原水槽中，一面實 施藉由厭氧處理之排水處理。 具體而言，以表4所示之條件實施排水處理。亦即，以 直至開始第52天為止，總有機碳量（TOC)成為2640(mg/L) 左右之方式，將排水中之TMAH濃度設定為5000 mg/L。再 者，將每一天之排水之供給量設為1.7 L而實施排水處理。 自試驗開始後第10天左右起，TOC除去率開始上升，於 第20天，TOC除去率接近100%，但若超過20天，則除去率 開始下降，因此，於開始第52天，將顆粒污泥更換為與開 始時相同之顆粒污泥，且以總有機碳量（TOC)成為 1320(mg/L)左右之方式，將排水中之TMAH濃度設定為 2500 mg/L，將每一天之排水之供給量設為3.7 L而繼續進 行排水處理。 更換顆粒污泥之後，TOC除去率開始上升，但接著便急 遽下降，無法藉由厭氧處理而充分地將TMAH分解。 根據對過濾水之處理水TOC濃度（S-TOC)、以及供給至 集合槽之排水之排水TOC濃度（S-TOC)進行測定所得的值 而評價TMAH之分解性，其中該過濾水係藉由No. 5C之濾 紙（相當於了18? 3801[濾紙（化學分析用）]所規定之5種(：）， 對自反應器上部排出之後於分離槽中分離出之處理水進行 過濾所得者。更詳細而言，隨時間對上述2種TOC濃度進 行測定，算出將該時點之排水TOC濃度與處理水TOC濃度 139394.doc -24- 200951081 之差除以排水TOC濃度所得的值作為溶解性TOC除去率ατό。除去率 ） 。 再者， TOC濃度 係使用 市售之 總有機 碳濃度 計而測定。將表示S-TOC除去率之圖表表示於圖8中。 進而，利用離子層析法來分析TMAH之濃度’藉由與上 述TOC濃度相同之方法而算出除去率。將表示藉由TMAH 濃度測定而獲得之TMAH之除去率之圖表表示於圖9中。 [表4] 設定時期 排水添加成 設定濃度 設定TOC 備註 (天數） 分 (mg/L) (mg/L) 0 TMAH 5000 2640 無IPA 52 TMAH 2500 1320 無IPA <更換污 75 (END) - - -Further, in order to optimize the efficiency of the anaerobic treatment step, the pH of the drainage water in the collection tank 2 can be adjusted by an alkaline aqueous solution or the like. An aqueous test solution or the like can be supplied from the storage tank (not shown) to the above-described collection tank 2. The pH in the above anaerobic treatment is preferably ^^. Next, in the mixing step, the saccharide or the saccharide composition containing the saccharide is added to the drainage water supplied to the collection tank 2. In order to make the efficiency of the anaerobic treatment in the reactor 3 the most, a desired amount of the above saccharide or the above saccharide composition may be added to the collection tank 2. Further, in the mixing step, the saccharide and the saccharide composition may be used in combination, and the saccharide or the saccharide composition may be diluted with a solvent such as water. Alternatively, in the above mixing step, the monohydric alcohol or a monohydric alcohol composition containing the monohydric alcohol may be added to the drainage water supplied to the collection tank 2. In order to optimize the efficiency of the anaerobic treatment in the above reactor 3, a desired amount of the above monohydric alcohol or the above monohydric alcohol composition may be added to the above-mentioned collecting tank 2. Further, in the mixing step, the above-mentioned monohydric alcohol and the above monohydric alcohol composition may be used in combination, and the above monohydric alcohol or the above monohydric alcohol composition may be diluted with a solvent such as water or the like. After use. Further, in the above mixing step, the above monohydric alcohol is mixed with the waste water containing tetraammonium hydroxide by using, for example, as described above, using waste water such as plant waste water containing monohydric alcohol. Further, in the mixing step of the present embodiment, the saccharide or monohydric alcohol is added to the collection tank 2, but it is not necessarily limited to such a method. For example, you can also add monohydric alcohol directly to the original sink! The monohydric alcohol is mixed with the above drainage in the original tank. Further, for example, the following method can be used: the above monohydric alcohol is added to the pipe connecting the raw water slag 1 and the collecting tank 2, or the piping connecting the collecting tank 2 and the reactor 3, or the above reactor 3 The monohydric alcohol is added thereto, whereby the monohydric alcohol is mixed with the above-mentioned drainage. Next, the above separation step will be described. In the above separation step, the anaerobic treatment of the above-mentioned drainage is separated into treated water and sludge. In other words, in the separation step, H, the mixed liquid containing the sludge discharged from the upper portion of the reactor 3 with the anaerobic treatment of the above-mentioned drainage into the β is separated into a treated water tray obtained by treating the above-mentioned drainage. The above sludge. This separation can be carried out by using the separation tank 4 used in the general anaerobic treatment. Further, instead of performing the separation step using the separation tank 4 in the above manner, a solid-liquid separation mechanism such as a GSS apparatus (gas-solid liquid separation apparatus) composed of a plurality of inclined plates may be provided in the upper portion of the reactor 3. In the above separation step, the treated water is supplied to the treatment tank 5 for accumulating the separated treated water in the separation tank 4 of 139394.doc -17· 200951081, and the treated water is accumulated. By carrying out the above anaerobic treatment step, the concentration of tetraammonium hydroxide in the treated water can be made lower than the concentration of the above-mentioned drain before the anaerobic treatment. Further, the concentration of the organic substance contained in the above treated water represented by the total organic carbon amount (TOC, Total 〇rganic Carb〇n) or the like may be smaller than the concentration of the above-mentioned drainage before the anaerobic treatment. Further, in the above separation step, the separated sludge is sent to the collection tank 2. The separated sludge is returned to the collection tank 2, whereby the concentration of the anaerobic sludge in the reaction tank can be improved, and the anaerobic treatment is a fixed bed type. In any case, the sludge separated in the separation tank 4 is not transported to the reactor, but the separation tank 4 can be separated when the concentration of the anaerobic sludge in the reactor is reduced. The sludge is sent to the above reactor 3. Thereby, there is an advantage that the concentration of the anaerobic sludge can be recovered. Further, the following aspects may be included in the present invention: other treatments are performed on the above-mentioned drainage before or after the above anaerobic treatment step. That is, for example, after the anaerobic treatment step, the aerobic treatment using the metabolic activity of the aerobic microorganism may be performed, and, for example, the anaerobic treatment step may be performed before the anaerobic treatment step. Anaerobic treatment. Further, the step of separating the photoresist in the drainage from the drainage may be carried out before the anaerobic treatment step. The present invention is not limited to the above-described exemplary drainage treatment method. Further, various aspects used in the water treatment method can be employed in the range of 139394.doc • 18-200951081, which does not impair the effects of the present invention. EXAMPLES Next, the present invention will be described in more detail by way of examples, but the invention is not limited to the examples. (Test Example 1) According to the drainage treatment flow shown in Fig. 1, the drainage treatment for the anaerobic treatment was carried out as follows. The granular sludge of the food plant drainage © treatment equipment (UASB equipment) was filled into a reactor of 5 L volume with an inner diameter of 100 mm# and a liquid level of 635 mm at a sludge concentration of 25,000 mg/L. . In a raw water tank, a specific amount of drainage is added as a tetramethylammonium hydroxide (TMAH) or a glucose as a sugar, which is a simulated amount of water that can be artificially prepared. . The simulated drainage was sent to the collection tank, and the pH adjustment value of the drainage in the collection tank was set to 7.0. The drain in the collection tank is supplied from the bottom of the reactor. The water temperature in the reactor was controlled to 35 ° C, and under such conditions, a certain amount of TMAH or glucosinolate was appropriately added to the raw water tank, and drainage treatment by anaerobic treatment was carried out. Specifically, the drainage treatment was carried out under the conditions shown in Table 1. That is, the total organic carbon amount (TOC) is about 2640 (mg/L) until the 52nd day of the start, and the TMAH concentration in the drainage is set to 5000 mg/L. Further, drainage treatment was carried out by setting the supply amount of the drainage per day to 1.7 L. From the 10th day after the start of the test, the TOC removal rate began to rise. On the 20th day, the TOC removal rate was close to 100%, but if it exceeded 20 days, the removal rate 139394.doc -19- 200951081 began to decline, therefore, On the 52nd day, the granular sludge was replaced with the same granular sludge as the beginning, and the TMAH concentration in the drainage was set to 2500 mg in such a manner that the total organic carbon (TOC) was about 1320 (mg/L). /L, the supply of the drainage per day is set to 3.7 L and the drainage treatment is continued. Since the removal rate of the TOC began to increase, it was drastically reduced. Therefore, on the 75th day, glucose was added to the total organic carbon (TOC) of TMAH and glucose to be around 1320 (mg/L). Drainage treatment. After the start of the 114th day, the addition of glucose was stopped again and only TMAH remained, and the test was terminated on the first day of the 145th day. The decomposition of TMAH is evaluated based on a value obtained by measuring the TOC concentration (S-TOC) of the treated water of the filtered water and the drainage TOC concentration (S-TOC) of the drainage supplied to the collection tank, wherein the filtered water is used No. 5C filter paper (corresponding to five kinds of C) specified in JIS P 3801 [filter paper (for chemical analysis)], and the treated water separated from the upper portion of the reactor and filtered in the separation tank is filtered. More specifically, the above two types of TOC concentrations are measured over time, and a value obtained by dividing the difference between the drain TOC concentration at the time of the treatment and the treated water TOC concentration by the drain TOC concentration is calculated as the solubility TOC removal rate (S-TOC removal). rate). Further, the TOC concentration was measured using a commercially available total organic carbon concentration meter. A graph showing the S-TOC removal rate is shown in Fig. 2. Further, the concentration of TMAH was analyzed by ion chromatography, and the removal rate was calculated by the same method as the above TOC concentration. A graph showing the removal rate of TMAH obtained by TMAH concentration measurement is shown in Fig. 3. 139394.doc -20- 200951081 [Table i] Setting period (days) Draining additive setting concentration (mg/L) Setting τοΡ (mg/L) ---- Remarks --- No gerbera 撼 0 ΤΜΑΗ 5000 2640 52 ΤΜΑΗ 2500 1320 Grape-free _ sugar <replacement of sludge> 75 ΤΜΑΗ 2500 1320~~~ Glucose/TMAH=1/1 basis) Glucose glucose 3300 1320 114 ΤΜΑΗ 2500 1320 145 (END) - - - According to Figure 2 : Even after the decomposition activity of TMAH is lowered, the decomposition activity of ❿ 上升 is increased by the addition of glucose. Further, the addition of glucose was stopped after the 114th day, whereby the decomposition activity was drastically lowered, and the decrease in the S-TOC removal rate was observed. Therefore, it can be said that the performance of decomposing ruthenium by using the anaerobic treatment of the anaerobic treatment with glucose is excellent. Further, it can be said that the decomposition activity of ruthenium can be kept high. Further, in the case where the concentration of cerium is 5,000 mg/L, the removal rate close to 100% can be temporarily obtained in the same manner as in the case of 2,500 mg/L, and therefore it is considered that cerium hardly interferes with the growth of anaerobic microorganisms. ® Therefore, it is considered that if glucose is added to the cerium concentration, the decrease in the decomposition activity of hydrazine can be suppressed as in the case of 2,500 mg/L. (Test Example 2) The granular sludge was not replaced, and the conditions shown in Table 2 were changed, except that the treatment was carried out in the same manner as in the test conditions of Test Example 1. The supply of drainage per day starts from 7.3 L, is set to 9.7 L on days 38 to 66, and is set to 11 L on days 66 to 82. A graph showing the S-TOC removal rate is shown in Fig. 4, which shows the removal of ruthenium obtained by the ruthenium concentration measurement. The graph of the rate of 139394.doc -21 - 200951081 is shown in Fig. 5. [Table 2] Setting period (days) Draining additive setting concentration (mg/L) Setting TOC (mg/L) Remark 0 TMAH 2500 1320 Glucose/TMAH=1/1 (TOC standard) Glucose 3300 1320 38 TMAH 2500 1320 Glucose Addition reduced by 50% (TOC basis) Glucose 1650 660 66 TMAH 2500 1320 Reduced glucose addition by 75% (TOC basis) Glucose 825 330 82 (END) - - - According to Figure 4 and Figure 5: When compared to TMAH organic When the amount of glucose is 1 part by weight based on the weight of the organic carbon, the decomposition activity of TMAH is high, and even if the amount of glucose is equivalent to 0.5 part by weight of the total organic carbon, the decomposition activity of TMAH is high. . Namely, glucose is added in an amount equivalent to 0.5 part by weight or more of the total organic carbon based on 1 part by weight of the organic carbon of TMAH, whereby a high decomposition activity of TMAH can be maintained. (Test Example 3) The granular sludge was not replaced, and glucose was set as the waste syrup (commercial TOC content was 310 g/kg), and the supply amount of the drainage per day was set to 2.8 L until the 68th day. Drainage treatment was carried out in the same manner as in the test conditions of Test Example 1, except that the condition shown in Table 3 was changed to 6.2 L. A graph showing the S-TOC removal rate is shown in Fig. 6, and a graph showing the removal rate of TMAH obtained by TMAH concentration measurement is shown in Fig. 7. 139394.doc -22- 200951081 [Table 3] Setting period (days) Drain addition component setting concentration (mg/L) Setting TOC (mg/L) Remark 0 TMAH 2500 1320 Waste syrup / TMAH=1/1 (TOC standard) Waste syrup 4260 1320 29 TMAH 2500 1320 Reduced amount of waste syrup added by 50% (TOC basis) Waste syrup 2130 660 68 TMAH 2500 1320 Stop adding waste syrup 74 (END) - - - According to Figure 6 and Figure 7, when compared to TMAH 1 part by weight of the organic carbon, and the amount of the waste syrup is equivalent to 1 part by weight of the organic carbon, the decomposition activity of TMAH is high, even when the amount of the waste syrup is equivalent to 0.5 part by weight of the total organic carbon, TMAH The decomposition activity is also high. Namely, a waste syrup in an amount equivalent to 0.5 part by weight or more of the total organic carbon weight is added to 1 part by weight of the organic carbon of TMAH, whereby a high decomposition activity of TMAH can be maintained. (Test Example 4) According to the drainage treatment flow shown in Fig. 1, the drainage treatment for the anaerobic treatment was carried out as follows. The granular sludge of the food plant drainage treatment equipment (UASB equipment) was filled into a reactor having a volume of 5 mm and a liquid surface height of 635 mm in a volume of 25,000 mg/L. In the original water tank, a drainage amount of tetramethylammonium hydroxide (TMAH) as a tetrabasic ammonium hydroxide or isopropanol (hereinafter also referred to as "IPA") as a monohydric alcohol is appropriately added to the raw water tank. That is, the simulated drainage that can be artificially modulated is accumulated. The simulated drainage was sent to the collection tank, and the pH adjustment value of the drainage 139394.doc -23· 200951081 in the collection tank was set to 7.0. The water in the collection tank is supplied from the bottom of the reactor. The temperature of the water in the reactor was controlled to 35 ° C, and under such conditions, a certain amount of TMAH or IPA was appropriately added to the raw water tank to carry out drainage treatment by anaerobic treatment. Specifically, the drainage treatment was carried out under the conditions shown in Table 4. That is, the total organic carbon amount (TOC) is about 2640 (mg/L) until the 52nd day of the start, and the TMAH concentration in the drainage is set to 5000 mg/L. Further, drainage treatment was carried out by setting the supply amount of the drainage per day to 1.7 L. From the 10th day after the start of the test, the TOC removal rate began to rise. On the 20th day, the TOC removal rate was close to 100%. However, if it exceeded 20 days, the removal rate began to decrease. Therefore, on the 52nd day of the start, the particles were removed. The sludge is replaced with the same granular sludge as the beginning, and the total organic carbon (TOC) is about 1320 (mg/L), and the TMAH concentration in the drainage is set to 2500 mg/L, which will be used every day. The supply amount of the drainage was set to 3.7 L, and the drainage treatment was continued. After the replacement of the granular sludge, the TOC removal rate began to rise, but then it fell sharply, and the TMAH could not be sufficiently decomposed by anaerobic treatment. The decomposition of TMAH is evaluated based on a value obtained by measuring the TOC concentration (S-TOC) of the treated water of the filtered water and the drainage TOC concentration (S-TOC) of the drainage supplied to the collection tank, wherein the filtered water is used The filter paper of No. 5C (corresponding to the five types (:) specified in 18? 3801 [filter paper (for chemical analysis)], and the treated water separated in the separation tank after being discharged from the upper part of the reactor is filtered. More specifically, the above two TOC concentrations were measured over time, and the value obtained by dividing the difference between the drainage TOC concentration at the time of the treatment and the treated water TOC concentration 139394.doc -24-200951081 by the drainage TOC concentration was calculated as the solubility TOC. Removal rate ατό. Removal rate). Further, the TOC concentration was measured using a commercially available total organic carbon concentration meter. A graph showing the S-TOC removal rate is shown in Fig. 8. Further, the concentration of TMAH was analyzed by ion chromatography, and the removal rate was calculated by the same method as the above TOC concentration. A graph showing the removal rate of TMAH obtained by TMAH concentration measurement is shown in Fig. 9 . [Table 4] Setting period Drainage is added to the set concentration setting TOC Remarks (days) Minutes (mg/L) (mg/L) 0 TMAH 5000 2640 No IPA 52 TMAH 2500 1320 No IPA <Replacement of pollution 75 (END) - - -
(試驗例5) 除了設為表5所示之條件以外，與試驗例4同樣地開始排 水處理。 亦即，於試驗開始時，以總有機碳量（TOC)成為 900(mg/L)之方式，將排水中之IPA濃度設定為1500 mg/L。再者，將每一天之排水之供給量設為3 L。 於試驗開始後2週左右，TOC除去率變得穩定’因此於 第29天，每一天供給1.5 L之已將TMAH之總有機碳量 (TOC)調整為880(mg/L)、且已將IPA之總有機碳量（TOC)調 整為1760(mg/L)之排水，並繼續進行排水處理。 開始第56天之後，將TMAH之總有機碳量（TOC)調整為 1060(mg/L)，將 IPA 之總有機碳（TOC)調整為 1580(mg/L)。 開始第85天之後，將TMAH之總有機碳量（TOC)調整為 139394.doc •25- 200951081 1320(mg/L)，將 IPA 之總有機碳（TOC)調整為 1320(mg/L)。 開始第104天之後，將TMAH之總有機碳量（TOC)調整為 1760(mg/L)，將 IPA之總有機碳（TOC)調整為 880(mg/L)。 開始第133天之後，中止添加IPA，將TMAH之總有機碳 量（TOC)調整為1760(mg/L)，將每一天之排水之供給量設 為3 L。 於開始179天結束試驗。 將表示S-TOC除去率之圖表表示於圖10中，將表示藉由 TMAH濃度測定而獲得之TMAH之除去率之圖表表示於圖 11中。 [表5] 設定時期 (天數） 排水添加成分 設定濃度 (mg/L) 設定TOC (mg/L) 備註 0 IPA 1500 900 無 TMAH 29 TMAH 1670 880 IPA/TMAH=2/1 (TOC基準） IPA 2930 1760 56 TMAH 2010 1060 IPA/TMAH=1.5/1 (TOC基準） IPA 2630 1580 85 TMAH 2500 1320 1 IPA/TMAH=1/1 (TOC基準） IPA 2200 1320 104 TMAH 3340 1760 IPA/TMAH=0.5/1 (TOC基準） IPA 1470 880 133 TMAH 3340 1760 無IPA 179 (END) - - 根據圖10及圖11可知：相對於TMAH之有機碳重量之1 重量份，添加相當於0.5重量份以上之總有機碳量之量之 IPA，藉此可維持較高之TMAH之分超活性。而且，即便 中止添加IPA之後，亦可比較長時間地維持TMAH之分解 活性。 139394.doc 26- 200951081 【圖式簡單說明】 圖1係表示本實施形態之排水處理方法中所使用之排水 處理設備之模式圖； 圖2係表示試驗例1之排水處理中之S-TOC除去率之圖 表； 圖3係表示試驗例1之排水處理中之藉由TMAH濃度測定 而獲得之TMAH的除去率之圖表； 圖4係表示試驗例2之排水處理中之S-TOC除去率之圖 ⑩ 表； 圖5係表示試驗例2之排水處理中之藉由TMAH濃度測定 而獲得之TMAH的除去率之圖表； 圖6係表示試驗例3之排水處理中之S-TOC除去率之圖 表； 圖7係表示試驗例3之排水處理中之藉由TMAH濃度測定 而獲得之TMAH的除去率之圖表； 圖8係表示試驗例4之排水處理中之S-TOC除去部之圖 表； 圖9係表示試驗例4之排水處理中之藉由TMAH濃度測定 .而獲得之TMAH的除去率之圖表； 圖10係表示試驗例5之排水處理中之S-TOC除去率之圖 表；及 圖11係表示試驗例5之排水處理中之藉由TMAH濃度測 定而獲得之TMAH的除去率之圖表。 【主要元件符號說明】 139394.doc •27· 200951081 1 原水槽 2 集合槽 3 反應器 4 分離槽 5 處理水槽 139394.doc(Test Example 5) The water discharge treatment was started in the same manner as in Test Example 4 except that the conditions shown in Table 5 were used. That is, at the beginning of the test, the IPA concentration in the drainage was set to 1500 mg/L in such a manner that the total organic carbon amount (TOC) was 900 (mg/L). Furthermore, the supply of drainage per day is set to 3 L. The TOC removal rate became stable about 2 weeks after the start of the test. Therefore, on the 29th day, 1.5 L of the total organic carbon (TOC) of TMAH has been adjusted to 880 (mg/L) per day, and The total organic carbon (TOC) of IPA is adjusted to 1760 (mg/L) of drainage and continues to be drained. After the start of the 56th day, the total organic carbon (TOC) of TMAH was adjusted to 1060 (mg/L), and the total organic carbon (TOC) of IPA was adjusted to 1580 (mg/L). After the first 85 days, the total organic carbon (TOC) of TMAH was adjusted to 139394.doc •25- 200951081 1320 (mg/L), and the total organic carbon (TOC) of IPA was adjusted to 1320 (mg/L). After the first 104 days, the total organic carbon (TOC) of TMAH was adjusted to 1760 (mg/L), and the total organic carbon (TOC) of IPA was adjusted to 880 (mg/L). After the first 133 days, the IPA was discontinued, the total organic carbon (TOC) of TMAH was adjusted to 1760 (mg/L), and the supply of drainage per day was set to 3 L. The test was terminated at the beginning of 179 days. A graph showing the S-TOC removal rate is shown in Fig. 10, and a graph showing the removal rate of TMAH obtained by TMAH concentration measurement is shown in Fig. 11. [Table 5] Setting period (days) Draining additive setting concentration (mg/L) Setting TOC (mg/L) Remark 0 IPA 1500 900 No TMAH 29 TMAH 1670 880 IPA/TMAH=2/1 (TOC reference) IPA 2930 1760 56 TMAH 2010 1060 IPA/TMAH=1.5/1 (TOC reference) IPA 2630 1580 85 TMAH 2500 1320 1 IPA/TMAH=1/1 (TOC reference) IPA 2200 1320 104 TMAH 3340 1760 IPA/TMAH=0.5/1 ( TOC standard) IPA 1470 880 133 TMAH 3340 1760 No IPA 179 (END) - - According to Fig. 10 and Fig. 11, it is known that the total organic carbon content is 0.5 parts by weight or more based on 1 part by weight of the organic carbon of TMAH. The amount of IPA, thereby maintaining a high TMAH super-activity. Moreover, even after the IPA is added, the decomposition activity of TMAH can be maintained for a relatively long time. 139394.doc 26-200951081 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a drainage treatment apparatus used in the drainage treatment method of the present embodiment; and Fig. 2 is a view showing S-TOC removal in the drainage treatment of Test Example 1. Fig. 3 is a graph showing the removal rate of TMAH obtained by the TMAH concentration measurement in the drainage treatment of Test Example 1; and Fig. 4 is a graph showing the S-TOC removal rate in the drainage treatment of Test Example 2. 10 is a graph showing the removal rate of TMAH obtained by the TMAH concentration measurement in the drainage treatment of Test Example 2; and FIG. 6 is a graph showing the S-TOC removal rate in the drainage treatment of Test Example 3; Fig. 7 is a graph showing the removal rate of TMAH obtained by measurement of TMAH concentration in the drainage treatment of Test Example 3; Fig. 8 is a graph showing the S-TOC removal portion in the drainage treatment of Test Example 4; A graph showing the removal rate of TMAH obtained by measuring TMAH concentration in the drainage treatment of Test Example 4; FIG. 10 is a graph showing the S-TOC removal rate in the drainage treatment of Test Example 5; and FIG. 11 is a graph showing Borrowing in the drainage treatment of Test Example 5 TMAH concentration was measured to obtain a graph of the rate of removal of TMAH. [Explanation of main component symbols] 139394.doc •27· 200951081 1 Raw water tank 2 Collection tank 3 Reactor 4 Separation tank 5 Treatment tank 139394.doc