200946853 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種具高效率降溫核凝作用之冷凝裝置 與方法及使用該冷凝裝置之溶劑回收、滌塵與除霧淨化系 統，尤指一種讓濕空氣中所含水氣因降溫至過飽和現象， 而產生核凝作用的高效能冷凝技術，將大部分之有機溶劑 回收、淨化處理，且兼具提高次微米級滌塵、除霧功能， 而使廢氣淨化之設計者。 【先前技術】 按，生活和生産中廣泛應用的有機溶劑，在室溫下易 揮發成氣體，故又名揮發性有機氣體（Volatile Organic Compounds，VOCs)，而多數的VOCs對人體有一定毒性，必 須加以回收處理；而不同之產業領域所使用之有機溶劑亦 不同，諸如PU(polyurethane，聚氨基甲酸酯）生產業、科 技製造業及鋰電池製造業等產業，所主要使用之各種有機 溶劑，相關之性質係表列於次頁之性質表（表一）；其中， PU生產過程所排放的VOCs，主要來自於降低黏度利於加工 所添加的有機溶劑，包括曱苯（Toluene)、甲基乙基酮 (MEK)、二甲基甲醯胺（DMF)··.等；此外，在半導體晶圓廠 及TFT-LCD面板等科技製造業之製程中，將單乙醇胺 (MEA)、二甲基亞颯（DMS0)、丙二醇甲醚乙酯（PGMEA)、環 己酮（ΑΝ0ΝΕ)···等有機溶劑，應用於諸如光阻剝離液 (stripper)之使用；而鋰電池製造之塗佈機，則必須將氮-甲基四氫0比洛酮（NMP)之廢氣回收。 200946853 機溶劑之物化特性，係㈣點、高飽和蒸汽 獻易於揮發，但不易於冷凝；反之，高沸點、 低飽和^壓之有機溶劑則不易於揮發，但易料凝；然 而’由該有機溶劑性質表（表―）中可看出，所列之有機溶 劑多屬中高彿點、低飽和蒸汽壓之物化特性。 有機溶劑特性性質表（表 ❹ ❹ 一) 溶劑 學名 分子 量 沸點 CC) 活性碳（吸 附材）脫附 難度 蒸汽壓 (20°C mmHg ) 水溶性（20 °C ) Toluen e 甲苯 (CtHs) 92 111 容易 22. 3 不溶於水 ΜΕΚ 甲基乙基酮 (CiHsO) 72 80 容易 77. 5 27-29 g /100 g 水 DMF 二甲基甲醯 胺 (hcon(ch〇2) 73 153 困難 2. 7 全溶於水 MEA 單乙醇氨 (CzHtNO) 61 171 很困難&聚 合 0. 24 全溶於水 DMSO 二甲基亞颯 (CH3)2S0 78 189 很困難 0. 37 全溶於水 PGMEA 丙二醇甲鍵 乙酯 (CeHl2〇3) 132 146 容易 3. 2 18.5g/l〇〇g 水 ANONE 環己酮 (CeHioO) 98 157 很困難&聚 合 3. 38 2. 3g/l〇〇g— 水 (微溶） NMP 氮-甲基四氫 吼>!§•辆 (CsHsNO) 99 204 很困難 0. 23 全溶於水 200946853 再按，目前相關業者對於VOCs之回收處理，多採就地 裝設冷凝器加以回收處理；此類冷凝回收系統對中高沸點 且全溶於水之有機物質，在正確的設計與操作下才可達到 高的回收效率，而除了所冷凝吸收下來之VOCs可回收純化 再利用外，因為中高沸點難處理VOCs濃度已大幅下降，可 降低下游端廢氣處理設備之負荷及延長吸脫附濃縮設備之 壽命，得以有效提升其整體之處理效率。 然而，以一般傳統冷凝法回收VOCs之原理，係利用冷 凍設備先將含VOCs廢氣之溫度冷卻至該有機物質之露點溫 度（飽和溫度）以下，即可達到飽和冷凝之效果；其中，一 般常見之VOCs冷凝系統，主要包含除濕器及VOCs冷凝器 兩項基本設備，裝設除濕器之目的在於將空氣中多餘之水 氣去除，避免在VOCs冷凝區之溫度降至0°C(273K)以下時， 發生不利於冷凝之結冰效應；再者，決定冷凝器去除VOCs 效能的兩項重要關鍵因素為：（1)冷凝系統需達足夠低溫 (-40°C)、（2)廢氣中含較高之 VOCs 濃度（> 10,000ppmv); 又，冷凝器之處理效能與廢氣線速度的增加呈反比之趨 勢，故延長廢氣之停留時間將可提升去除效率。 因此，由於傳統之冷凝回收法，需以冷凍設備將操作 溫度控制在相當低溫以及夠長的停留時間，方能以冷凝機 制去除VOCs，並確保處理後廢氣所含VOCs濃度值達到最 低；不過，如此之傳統冷凝回收方式，若應用於排放量相 當大而VOCs濃度僅數十到數百PPMv(<<l，000ppmv)之產 業，為達到高冷凝效率而須降到極低溫（至少須低於零下20 °C)，所需付出之能源耗損及設備維護成本將會相當高；於 200946853 是，許多業者基於傳統冷凝系統設計之限制，以及節省操 作成本的考量，往往面臨冷凝設備回收效率不佳的問題。 另一方面，針對次微米級的細微霧或粒，目前均無較 佳且經濟的方法與裝置，例如一般常用的文式洗滌塔而 言，若欲針對0.3/zm次微米級的細微霧或粒（去除約50% 效率），則其所需的壓力降將近需高達35英吋水柱高，液 氣比約2.0公升/立方公尺，其去除效率有限外且其操作成 本也相當的高；因此，如何將廢氣中欲處理的次微米級細 微霧或粒，先行將其粒徑成長增大到較易處理的微米級微 霧或粒，以便在合理的操作成本下，以期去除次微米級細 微霧或粒的效率達到更高，將是一重要課題。 【發明内容】 本發明之主要目的，係欲解決先前技術冷凝效率不佳 之問題，而具有提升冷凝效率之功效。 本發明之另一目的，則兼具提高次微米級滌塵、除霧 功能之功效。 本發明之又一目的，乃具有降低能源耗損及設備維護 成本之功效。 為達上述功效，本發明具高效率降溫核凝作用之冷凝 方法，係包含下列步驟： a. )令廢氣在風速控制於層流（Laminar Flow)之條件下 冷凝，較佳風速約為1. 5m/s以下； b. )在露點溫度以下（溫度約1〜30°C，最佳為5〜20 °C )之過飽和環境，讓廢氣中所含之水氣或/及VOCs本身 產生降溫核凝作用，將次微米級細微霧或粒成長成較大微 200946853 米級微霧或粒，並經由碰撞與合併過程凝結成微霧滴或液 膜，而利用所凝結之微霧滴或/及液膜，再自廢氣大量吸收 易溶於水之VOCs、或各種無機鹽煙塵與其他物質化合而成 的可溶性微粒； C.)令廢氣在風速控制於奮流（Turbulent Flow)之條件 下除霧，較佳風速約為2. Om/s以上；以及 d.)將V0CS之微霧滴與廢氣之液滴收集回收者。 本冷凝方法特別適合應用於水溶性高的V0CS、或各種 無機鹽與其他物質化合而成的可溶性微粒，尤其針對具有 中高沸點的V0CS;因為一般對於吸濕性或吸水性凝結核， 在相對濕度小於100%RH的情況下，就能使水汽凝結的微 粒，所需的過飽和度，比非吸濕性核或吸水性核小得多， 而且凝結核的尺度越大，凝結所需的過飽和度越小；其中， 凝結核之來源可為水溶性高的中高沸點VOCs次微米級微 粒、廢氣中的各種無機鹽煙塵與其他物質化合而成的可溶 性微粒，結核的尺度範圍，從5奈米到1微米左右。 φ 【實施方式】 首先，請參閱第一、二圖所示，本發明具高效率降溫 核凝作用之冷凝裝置，係包括有：由至少一核凝冷凝器（11) 與至少一除霧器（12)所組成之冷凝單元（10)，以及一非偶 合定風量控制單元（20);其中， 該核凝冷凝器（11)，設置於廢氣排出口之下游端，而 形成1〜30°C(最佳為5〜20°C)之低溫環境；俾以藉由於此 低溫環境之條件下，將廢氣所含之水氣或/及V0CS本身，降 溫到低於露點溫度的過飽和狀態，而產生核凝作用並冷凝 -10 - 200946853 凝結成液膜’且利用所凝結之液膜，再大量吸收中高沸點 且易溶於水之V0CS、或各種無機鹽煙塵與其他物質化合而 成的可溶性微粒，而結合低溫冷凝、凝結核成長、包覆與 液滴或液膜吸收之多重效能； 該除霧器（12)，設置於該核凝冷凝器（11)之下游端， 在一定風速下’將次微米級細微霧或粒之廢氣水氣或/及 V0CS本身，在經過該核凝冷凝器（U)之降溫核凝作用後， 成長為較易處理的微米級或更大的微霧或粒而收集回收， Φ 其操作機制可為攔截式、慣量式或擴散式；以及 該非偶合定風量控制單元（20) ’令廢氣通過該核凝冷 凝器（11)之氣流風速控制於層流條件下，較佳約為1.5m/s 以下；並將通過該除霧器（12)之氣流風速控制於紊流條件 下，較佳約為2. Om/s以上者。 然而，該核凝冷凝器（11)為盤管鰭片式（如第三圖所 示）、板式或洗務驟冷式（如第二圖所示）；其中，該洗蘇 驟冷式之核凝冷凝器（11)至少包括一核凝洗滌喷霧管路組 _ (111)，亦可進一步與一核凝洗滌填充材（112)所組成；又， 成組之核凝冷凝器（11)與除霧器（12)，可依據所欲處理之 有機溶劑或各種無機鹽與其他物質化合而成的可溶性微粒 之種類、氣流溫度、氣流濕度、廢氣流量等因素，予以複 數組串聯及/或並聯之方式設置。 此外，該非偶合定風量控制單元（2〇)之第一實施例（如 第一圖所示），乃於該冷凝單元（1〇)之上或下游端設置一風 機（25)與一流量計（21),並令該風機（25)連接一變頻器 (23)，且於流量計（21)與變頻器（23)間設置一流量控制器 200946853 (22) ’並將一非偶合平衡管（24)跨設於該冷凝單元（10)與 風機（25)之兩端’而得以機動調整風量用以穩定開停機之 穩定度；該非偶合定風量控制單元（2〇a)之第二實施例（如 第二圖所示），則於該冷凝單元（1〇)之下游端設置一風機 (25) ’並令該風機（25)連接一變頻器（23)，且將一設有控 制風門（26)之非偶合平衡管（24)之一端連接於風機（25)之 下游端，而非偶合平衡管（24)之另端連接至核凝冷凝器（11) 與除霧器（12)之間；藉以，除了穩定開停機之穩定度之外， 另可輔助調整通過該核凝冷凝器（11)之氣流風速控制於層 流條件下，並將通過該除霧器（12)之氣流風速控制於紊流 條件下。 然而’請參閱第三圖所示，本發明之溶劑回收、滌塵 與除霧淨化系統’係於該冷凝裝置之下游端，加設一固定 床式回收單元（30);而該固定床式溶劑回收單元（30)，乃 將複數個固定吸附床（31)並聯連接於冷凝單元（10)之氣流 出口，該固定吸附床（31)内部平鋪有吸附材（32)，外部連 接有蒸氣源（33)、排氣管（34)及冷凝分離器（35)，該冷凝 分離器（35)設置有排水管（37)與連接至回收槽（38)之溶劑 回收管（36);於是，當溶水性低之有機溶劑（如表一所示之 甲苯）’無法藉該冷凝單元（10)予以吸收，則可由該固定床 式回收單元（30)予以回收。 基於如是之構成，本發明冷凝單元（10)之設計，在層 流流場條件下結合了低溫冷凝、凝結核成長與液滴/液臈吸 收之多重效能，有別傳統冷凝器僅考量利用低溫冷凝VOCs 之單純飽和凝結概念，可有效提升V0CS之冷凝吸收效率， -12 - 200946853 且不必為了達到高冷凝效率而須降到極低溫，而應用在成 分多樣化、大風量且具高沸點之VOCs廢氣特性之處理相當 合適；另一方面，一般習有冷凝器之設計，為考量較佳的 熱傳與質傳係數，均將其設計於奮流（Turbulent Flow)流 場條件，然而未考慮到凝結核成長之效果，係層流條件大 幅優於紊流條件；其中，成組之核凝冷凝器（11)與除霧器 (12)，若以兩組串聯設置為例，前置之核凝冷凝器（11)以 預降溫為主，凝結核成長與液滴/液膜吸收為輔，後置之核 凝冷凝器（11)則以前述之多重凝結核成長與液滴/液膜吸 收效能處理廢氣中之V0CS為主；其中，該除霧器（12)之操 作機制為攔截式、慣量式或擴散式，其形式可為V型格片 式、編織網目式、V型編織網蜂巢式、多通道蜂巢式、石墨 發泡式、碳矽發泡式、PU發泡式、拉西環式…等其中一種。 是以，本發明具有提升冷凝回收效率且降低能源耗損 及設備維護成本之功效。再者，對於該非偶合定風量控制 單元（20)穩定開停機風量之效果，係如以下各實施例之比 較表（表二、表三、表四）所示，均呈現不錯之穩定效果。 綜上所述，本發明所揭示之技術手段，確具「新穎性」、 「進步性」及「可供產業利用」等發明專利要件，祈請鈞 局惠賜專利，以勵發明，無任德感。 惟，上述所揭露之圖式、說明，僅為本發明之較佳實 施例，大凡熟悉此項技藝人士，依本案精神範疇所作之修 飾或等效變化，仍應包括本案申請專利範圍内。 -13 - 200946853 實施例〈一〉冷凝單元風量160NCMM; 光電業去光阻機台（x3)來源排氣風量50~150NCMM &溶劑為乙醇氨 (MEA)及（DMS0)& 溫度 35 〜45°C & 露點溫度 12~14°C.(表二） 風速（量） 控制 冷凝單元之（a)風量、（b)通 過冷凝器與（C)除霧器風速 變化範圍 冷凝吸 收單元 淨化回 收性能 前端機 台穩定 度 冷凝回 收溶劑 含水率 無非偶合 定風量控 制單元 (a)50~150NCMM (b) 0. 5〜2. 5m/s +層流、過 渡流、紊流 (c) 0. 5〜2. 5m/s·♦層流、過 渡流、紊流 25-90% (極不 穩定） 不佳 25-90% (不佳） 有非偶合 定風量控 制單元 (a)140~160NCMM (b) l. 12〜1· 28m/s今層流 (c) 2. 33〜2· 67m/s +奮流 85-95% (穩定） 佳 25%以下 (佳） 實施例〈二〉冷凝單元風量11NCMM; 光電業上光阻機台（x2)來源排氣風量3〜10NCMM &溶劑為丙二醇曱醚 乙酯（PGMEA)及環己酮（ANONE)&溫度50~95°C &露點溫度10~12 °C .(表三） 風速（量）控制 冷凝單元 風量變化 範圍 冷凝單元淨 化回收性能 前端機台 穩定度 冷凝回收溶 劑含水率 無非偶合定風 量控制單元 3-10NCMM 15-80% (極不穩定） 不佳 50-90% (不佳） 有非偶合定風 量控制單元 11NCMM 65-90% (較穩定） 佳 60%以下 (較佳） -14 - 200946853 實施例〈三〉冷凝單元風量100NCMM; PU業上膠貼合機台來源排氣風量50〜98NCMM &溶劑為二甲基甲醯胺 (DMF)、甲基乙基酮（MEK)及甲苯（Toluene) &溫度80~95°C &露 點溫度5~30°C.(表四） 風速 (量）控 制 冷凝單元之（a)風量、 (b)通過冷凝器與（c)除 霧器風速變化範圍 冷凝單元淨 化回收性能 前端機 台穩定 度 冷凝回收 溶劑含水 率 無非偶 合定風 量控制 單元 (a)50~98NCMM (b) 1. 2〜2. 4m/s +層 流、過渡流、紊流 (c) 1 · 2〜2. 4m/s +層 流、過渡流、紊流 10-80% (極不穩定） 不佳 50-90% (不佳） 有非偶 合定風 量控制 單元 (a)lOONCMM (b) l· Om/s·♦層流 (c) 2. 5m/s+ 紊流 85%以上 (較穩定） 佳 50%以下 (佳） -15 - 200946853 【圖式簡單說明】 第一圖係本發明之冷凝裝置之結構示意圖（說明非偶合 定風量控制單元之第一實施例）。 第二圖係本發明之冷凝裝置之結構示意圖（說明非偶合 定風量控制單元之第二實施例）。 第三圖係本發明之淨化裝置之結構示意圖。200946853 IX. Description of the invention: [Technical field of the invention] The present invention relates to a condensing device and method with high efficiency cooling nuclear coagulation and a solvent recovery, dedusting and defogging purification system using the same, especially a kind The high-efficiency energy condensation technology that causes the water in the humid air to cool down to supersaturation, and produces nuclear coagulation, recovers and purifies most of the organic solvent, and has the functions of improving sub-micron dust and demisting. And the designer who makes the exhaust gas clean. [Prior Art] Organic solvents widely used in life and production are easily volatilized into gases at room temperature, so they are also known as Volatile Organic Compounds (VOCs), and most VOCs are toxic to humans. It must be recycled; the organic solvents used in different industrial fields are different, such as PU (polyurethane) production, technology manufacturing and lithium battery manufacturing industries, the various organic solvents used. The relevant properties are listed in the nature table of the next page (Table 1); among them, the VOCs emitted by the PU production process mainly come from the organic solvent added to reduce the viscosity and facilitate the processing, including Toluene and methyl. Ethyl ketone (MEK), dimethylformamide (DMF), etc. In addition, in the manufacturing process of semiconductor fabs and TFT-LCD panels, monoethanolamine (MEA), dimethyl Organic solvents such as DMS0, propylene glycol methyl etherate (PGMEA), cyclohexanone (ΑΝ0ΝΕ)···, used in applications such as stripper, and coatings made of lithium batteries Machine, it must be N - methylenetetrahydrofolate 0 naloxone recovery ratio of the exhaust gas (NMP) of. 200946853 The physicochemical properties of the solvent are (four) points, high saturated steam is easy to volatilize, but not easy to condense; conversely, the organic solvent with high boiling point and low saturation is not easy to volatilize, but it is easy to coagulate; however, 'by the organic It can be seen from the solvent property table (Table-) that the listed organic solvents are mostly physicochemical properties of medium-high Buddha points and low saturated vapor pressure. Table of properties of organic solvents (Table ❹ ) 1) Solvent name Molecular weight boiling point CC) Activated carbon (adsorbed material) Desorption difficulty Vapor pressure (20 ° C mmHg ) Water solubility (20 ° C ) Toluen e Toluene (CtHs) 92 111 Easy 22. 3 Insoluble in hydrazine Methyl ethyl ketone (CiHsO) 72 80 Easy 77. 5 27-29 g /100 g Water DMF dimethylformamide (hcon(ch〇2) 73 153 Difficult 2. 7 Full Dissolved in water MEA monoethanolamine (CzHtNO) 61 171 very difficult & polymerization 0. 24 fully soluble in water DMSO dimethyl hydrazine (CH3) 2S0 78 189 very difficult 0. 37 fully soluble in water PGMEA propylene glycol methyl bond B Ester (CeHl2〇3) 132 146 Easily 3. 2 18.5g/l〇〇g Water ANONE Cyclohexanone (CeHioO) 98 157 Very difficult & polymerization 3. 38 2. 3g/l〇〇g—water (slightly soluble) NMP Nitrogen-methyltetrahydroindene>!§•C (CsHsNO) 99 204 Very difficult 0. 23 Totally soluble in water 200946853 Press again, the current relevant industry for the recycling of VOCs, more than the local installation of condenser It can be recycled; such a condensing recovery system can reach the medium and high boiling point and completely soluble in water, under the correct design and operation. The recovery efficiency, in addition to the VOCs absorbed by the condensation can be recycled and reused, because the concentration of VOCs in the middle and high boiling point has been greatly reduced, which can reduce the load of the downstream exhaust gas treatment equipment and prolong the life of the suction and desorption equipment. Effectively improve the overall processing efficiency. However, the principle of recycling VOCs by the general conventional condensation method is to use the freezing equipment to cool the temperature of the VOCs-containing exhaust gas to below the dew point temperature (saturation temperature) of the organic substance to achieve saturated condensation. The effect is that the common VOCs condensing system mainly includes two basic equipments: a dehumidifier and a VOCs condenser. The purpose of installing the dehumidifier is to remove excess water in the air to avoid the temperature drop in the condensation zone of the VOCs. At 0 ° C (273 K) or less, there is an icing effect that is not conducive to condensation; in addition, two important factors that determine the effectiveness of the condenser to remove VOCs are: (1) The condensing system needs to reach a sufficiently low temperature (-40 ° C) (2) The concentration of VOCs in the exhaust gas is higher (> 10,000 ppmv); in addition, the treatment efficiency of the condenser is inversely proportional to the increase in the exhaust gas velocity. The trend is that prolonging the residence time of the exhaust gas will improve the removal efficiency. Therefore, due to the conventional condensation recovery method, the refrigeration temperature is required to control the operating temperature to a relatively low temperature and a long enough residence time to remove the VOCs by the condensation mechanism. And to ensure that the concentration of VOCs contained in the exhaust gas is minimized after treatment; however, such a conventional condensation recovery method is applied to an industry in which the discharge amount is relatively large and the concentration of VOCs is only tens to hundreds of PPMv (<<1,000 ppmv) In order to achieve high condensation efficiency, it must be reduced to very low temperature (at least below 20 °C), the energy consumption and equipment maintenance cost will be quite high; in 200946853, many operators are based on traditional condensing system design. Limitations, as well as savings in operating costs, often face problems with poor condensing equipment recovery efficiency. On the other hand, there are no better and economical methods and devices for submicron-scale fine mists or granules, such as the commonly used gram wash tower, if it is intended for fine fog of 0.3/zm sub-micron or Granules (removing about 50% efficiency), the required pressure drop will be as high as 35 inches of water column height, liquid to gas ratio of about 2.0 liters / cubic meter, the removal efficiency is limited and the operating cost is quite high; Therefore, how to increase the particle size growth of the submicron fine mist or granules to be treated in the exhaust gas to the more manageable micro-scale micro-fog or granules, in order to remove the sub-micron level under reasonable operating cost. The higher efficiency of fine mist or granules will be an important issue. SUMMARY OF THE INVENTION The main object of the present invention is to solve the problem of poor condensation efficiency of the prior art and to improve the efficiency of condensation. Another object of the present invention is to improve the sub-micron dust and defogging function. Another object of the present invention is to reduce energy consumption and equipment maintenance costs. In order to achieve the above effects, the condensing method of the present invention with high efficiency cooling nuclear coagulation comprises the following steps: a.) The exhaust gas is condensed under the condition that the wind speed is controlled by laminar flow, and the preferred wind speed is about 1. 5m / s or less; b. ) in a supersaturated environment below the dew point temperature (temperature of about 1~30 ° C, preferably 5~20 ° C), so that the water vapor or / and VOCs contained in the exhaust gas itself produce a cooling core Condensation, the sub-micron fine mist or granules are grown into larger micro-200946853-meter micro-mist or granules, and condensed into micro-mist droplets or liquid film through collision and combination process, and the condensed micro-mist droplets or/and The liquid film absorbs a large amount of VOCs which are easily soluble in water or soluble particles of various inorganic salt soot and other substances from the exhaust gas; C.) Defogging the exhaust gas under the condition that the wind speed is controlled by Turbulent Flow Preferably, the wind speed is about 2. Om/s or more; and d.) collecting the droplets of the V0CS and the droplets of the exhaust gas. The condensation method is particularly suitable for use in highly water-soluble V0CS, or soluble particles of various inorganic salts combined with other substances, especially for V0CS having a medium to high boiling point; because it is generally for hygroscopic or water-absorbing condensation nuclei, in relative humidity In the case of less than 100% RH, the condensation of particles of water vapor can be much less than the non-hygroscopic core or the water-absorbent core, and the larger the scale of the condensation tuberculosis, the supersaturation required for condensation. The smaller the source, the source of condensation nuclei can be high-water-soluble high-boiling VOCs submicron particles, various inorganic salt fumes in the exhaust gas and other substances combined into soluble particles, the scale range of nodules, from 5 nm to About 1 micron. φ [Embodiment] First, please refer to the first and second figures, the condensing device with high efficiency and cooling nuclear coagulation of the present invention includes: at least one nuclear condenser (11) and at least one mist eliminator (12) a condensing unit (10), and a non-coupling constant air volume control unit (20); wherein the nuclear condenser (11) is disposed at a downstream end of the exhaust gas discharge port to form 1 to 30° a low temperature environment of C (preferably 5 to 20 ° C); by means of the low temperature environment, the water vapor or/or V0CS itself contained in the exhaust gas is cooled to a supersaturation state lower than the dew point temperature, and Produces nuclear coagulation and condenses -10,468,46853 Condensed into a liquid film' and uses the condensed liquid film to absorb a large amount of V0CS, which is high in boiling point and soluble in water, or soluble particles formed by combining various inorganic salt soot with other substances. Combined with the multiple effects of low temperature condensation, condensation growth, coating and droplet or liquid film absorption; the mist eliminator (12) is disposed at the downstream end of the nuclear condenser (11) at a certain wind speed' Sub-micron fine mist or grain of exhaust gas / and V0CS itself, after the nuclear condensation of the nuclear condenser (U), grows into a relatively easy to handle micro-mist or larger micro-fog or particles to collect and recover, Φ its operation mechanism can be intercepted , the inertia type or the diffusion type; and the non-coupling constant air volume control unit (20) 'controls the airflow velocity of the exhaust gas passing through the nuclear condensation condenser (11) under laminar flow conditions, preferably about 1.5 m/s or less; The wind speed of the airflow passing through the defogger (12) is controlled under turbulent flow conditions, preferably about 2. Om/s or more. However, the nuclear condenser (11) is a coil fin type (as shown in the third figure), a plate type or a washing quenching type (as shown in the second figure); wherein the washing and quenching type The nuclear condensation condenser (11) comprises at least one nuclear condensation washing spray line group _ (111), which may further be composed of a nuclear condensation washing filler material (112); and, a group of nuclear condensation condensers (11) And the mist eliminator (12) can be connected in series according to factors such as the type of soluble particles, the temperature of the gas stream, the humidity of the gas stream, the flow rate of the exhaust gas, etc., depending on the organic solvent to be treated or the combination of various inorganic salts and other substances. Or set in parallel. In addition, the first embodiment of the non-coupling constant air volume control unit (shown in the first figure) is provided with a fan (25) and a flow meter above or downstream of the condensing unit (1〇). (21), and the fan (25) is connected to a frequency converter (23), and a flow controller 200946853 (22) ' is disposed between the flow meter (21) and the frequency converter (23) and a non-coupling balance tube is provided (24) straddle the two ends of the condensing unit (10) and the fan (25) to adjust the air volume to stabilize the stability of the shutdown; the second implementation of the non-coupled constant air volume control unit (2〇a) For example (as shown in the second figure), a fan (25) is disposed at the downstream end of the condensing unit (1〇) and the fan (25) is connected to a frequency converter (23), and a control is provided One end of the non-coupling balance tube (24) of the damper (26) is connected to the downstream end of the fan (25), and the other end of the non-coupling balance tube (24) is connected to the nuclear condenser (11) and the defogger (12). Between the two; in addition to the stability of the stable start-stop, the auxiliary can adjust the airflow speed control through the nuclear condenser (11) Under laminar flow conditions, the airflow velocity through the mist eliminator (12) is controlled under turbulent conditions. However, 'Please refer to the third figure, the solvent recovery, dust removal and defogging purification system of the present invention is attached to the downstream end of the condensing device, and a fixed bed type recovery unit (30) is added; and the fixed bed type The solvent recovery unit (30) connects a plurality of fixed adsorption beds (31) in parallel to the gas flow outlet of the condensing unit (10), and the fixed adsorption bed (31) is internally laid with an adsorbent material (32), and the external connection is vaporized. a source (33), an exhaust pipe (34), and a condensing separator (35), the condensing separator (35) is provided with a drain pipe (37) and a solvent recovery pipe (36) connected to the recovery tank (38); When the organic solvent having low water solubility (such as toluene shown in Table 1) cannot be absorbed by the condensing unit (10), it can be recovered by the fixed bed type recovery unit (30). Based on the configuration, the condensing unit (10) of the present invention combines the multiple effects of low temperature condensation, condensation tuberculosis growth and droplet/liquid helium absorption under the laminar flow field condition, and the conventional condenser only considers the use of low temperature. The concept of pure saturated condensation of condensed VOCs can effectively improve the condensing absorption efficiency of V0CS, -12 - 200946853 and does not have to be reduced to very low temperature in order to achieve high condensing efficiency, and is applied to VOCs with diverse composition, high air volume and high boiling point. The treatment of exhaust gas characteristics is quite suitable; on the other hand, the design of the condenser is generally adopted, considering the better heat transfer and mass transfer coefficients, which are designed in the Turbulent Flow flow field conditions, but not considered The effect of the growth of condensation nuclei is that the laminar flow conditions are much better than the turbulent conditions; among them, the group of nuclear condensers (11) and the demisters (12), if two sets are connected in series, the pre-nuclear The condenser (11) is mainly pre-cooling, and the growth of the condensation tuberculosis is supplemented by the droplet/liquid membrane absorption. The post-nuclear condenser (11) is formed by the above-mentioned multi-condensation tuberculosis growth and droplet/liquid membrane absorption. Performance processing The V0CS in the gas is mainly; wherein the operation mechanism of the mist eliminator (12) is intercepting, inertia or diffusion, and the form thereof may be a V-shaped grid type, a woven mesh type, a V-shaped woven mesh honeycomb type, Multi-channel honeycomb, graphite foam, carbon foam, PU foam, Rasch ring, etc. Therefore, the present invention has the effects of improving the efficiency of condensing recovery and reducing energy consumption and equipment maintenance costs. Furthermore, the effect of the non-coupling constant air volume control unit (20) for stably opening and closing the air volume is as shown in the comparison table (Table 2, Table 3, Table 4) of the following embodiments, and all have a good stable effect. In summary, the technical means disclosed in the present invention have the invention patents such as "novelty", "progressiveness" and "available for industrial use", and pray for the patent to be invented by the bureau. German sense. The drawings and descriptions disclosed above are only preferred embodiments of the present invention, and those skilled in the art, which are subject to the spirit of the present invention, should be included in the scope of the patent application. -13 - 200946853 Example <1> Condensation unit air volume 160NCMM; Photoelectric industry to photoresist machine (x3) source exhaust air volume 50~150NCMM & solvent is ethanol ammonia (MEA) and (DMS0) & temperature 35 ~ 45 °C & dew point temperature 12~14°C. (Table 2) Wind speed (quantity) Control the condensing unit (a) air volume, (b) through the condenser and (C) defogger wind speed change range condensing absorption unit purification and recovery Performance front end machine stability condensing recovery solvent moisture content no non-coupling constant air volume control unit (a) 50~150NCMM (b) 0. 5~2. 5m/s + laminar flow, transition flow, turbulent flow (c) 0. 5 ~2. 5m/s·♦ laminar flow, transition flow, turbulent flow 25-90% (very unstable) poor 25-90% (poor) with non-coupled constant air volume control unit (a) 140~160NCMM (b l. 12~1· 28m/s current layer flow (c) 2. 33~2· 67m/s + strenuous flow 85-95% (stable) better than 25% (better) Example <2> condensing unit air volume 11NCMM; Photoelectric industry photoresist unit (x2) source exhaust air volume 3~10NCMM & solvent is propylene glycol oxime ether ethyl ester (PGMEA) and cyclohexanone (ANONE) & temperature 50~95 ° C & dew point temperature 10~12 °C (Table 3) Wind speed (quantity) control condensing unit air volume variation range Condensing unit purification recovery performance Front end machine stability Condensation recovery solvent Moisture rate No non-coupling constant air volume control unit 3-10NCMM 15-80% (very unstable) Poor 50-90% (poor) Non-coupling constant air volume control unit 11NCMM 65-90% (more stable) better 60% or less (better) -14 - 200946853 Example <3> Condensing unit air volume 100NCMM; PU industry glue Fitting machine source exhaust air volume 50~98NCMM & solvent is dimethylformamide (DMF), methyl ethyl ketone (MEK) and toluene (Toluene) & temperature 80 ~ 95 ° C & dew point temperature 5~30°C. (Table 4) Wind speed (quantity) control condensing unit (a) air volume, (b) through condenser and (c) defogger wind speed change range condensing unit purification recovery performance front end machine stability condensation The water content of the recovered solvent is not the same as the constant air volume control unit (a) 50~98NCMM (b) 1. 2~2. 4m/s + laminar flow, transition flow, turbulent flow (c) 1 · 2~2. 4m/s + Laminar, transitional, turbulent 10-80% (very unstable) poor 50-90% (poor) with non-coupling Air volume control unit (a) lOONCMM (b) l· Om/s·♦ laminar flow (c) 2. 5m/s+ turbulent flow more than 85% (stable) better than 50% (good) -15 - 200946853 BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic structural view of a condensing device of the present invention (a first embodiment of a non-coupling constant air volume control unit). The second drawing is a schematic view of the structure of the condensing device of the present invention (a second embodiment of the uncoupled constant air volume control unit). The third figure is a schematic structural view of the purification apparatus of the present invention.
【主要元件符號說明】 (10) 冷凝單元 (11) 核凝冷凝器 (111) 核凝洗滌喷霧管 路組 (112) 核凝洗滌填充材 (12) 除霧器 (20) 、（20a)非偶合定 風量控制單元 (21) 流量計 (22) 流量控制器 (23) 變頻器 (24) 非偶合平衡管 (25) 風機 (26) 控制風門 (30) 固定床式回收單元 (31) 固定吸附床 (32) 吸附材 (33) 蒸氣源 (34) 排氣管 (35) 冷凝分離器 (36) 溶劑回收管 (37) 排水管 (38) 回收槽 -16 -[Explanation of main component symbols] (10) Condensation unit (11) Nuclear condensation condenser (111) Nuclear condensation washing spray line group (112) Nuclear condensation washing filler (12) Demisters (20), (20a) Non-coupling constant air volume control unit (21) Flow meter (22) Flow controller (23) Inverter (24) Non-coupling balance tube (25) Fan (26) Control damper (30) Fixed bed recovery unit (31) Fixed Adsorbent bed (32) Adsorbent (33) Vapor source (34) Exhaust pipe (35) Condensing separator (36) Solvent recovery pipe (37) Drain pipe (38) Recovery tank - 16