200940429 九、發明說明 【發明所屬之技術領域】 本發明是關於液晶用的玻璃基板或半導體晶圓等薄板 狀工件出入保管庫用的多關節機械人。 【先前技術】 習知的多關節機械人，已提案有藉由肩關節部旋轉中 g 心和台座旋轉中心的偏置以在轉動台座時可讓多關節機械 人的旋繞半徑變小（例如，參照專利文獻1 )。 習知的多關節機械人1，如第6圖所示，具備有由關 節部3、4、5連結成可旋轉，由旋轉驅動源傳達旋轉力可 進行所期望之動作的二組多關節臂2,構成爲將設置在二 組多關節臂2基端的關節部3的旋轉中心軸配置在上下（ 或軸方向）。 多關節機械人1，具備有二組多關節臂2，一方的臂 φ 驅動式裝置2爲供給用，另一方爲取出用，可同時執行工 件9的供給動作和另一工件9的取出動作。 此外，習知的多關節機械人1，其由多關節臂2保持 著工件9的手部8是構成爲可朝圖中箭頭符號X所示的 工件9取出、供給方向直線移動。 另外，習知的多關節機械人1，具備有可使設置在多 關節臂2的支撐構件10上下移動的移動構件11 (以下， 稱移動機構11)，可調整多關節臂2的上下位置。此外 ’上下移動機構11的台座13是設置成可轉動，可使多關 -5- 200940429 節機械人1旋繞改變方向。 再加上，習知的多關節機械人1，其台座13是 成可朝圖中箭頭符號γ所示方向，即可朝分別正交 部8移動方向和支撐構件1〇上下移動方向的方向移 基座台14上藉此可調整上下移動機構11的位置。 此外，習知的多關節機械人1所具備的二組多關 2’例如是具有複數的關節部，即多關節機械人1是 g 爲水平關節式機械人。本實施形態的多關節臂2，具 第一臂6(以下，稱上腕6)，和與上腕6連結的第 7(以下，稱前腕7)，及與前腕7連結可保持著工 的手部8。 上腕6的基端是透過驅動軸連結在支撐構件1〇 成可轉動的關節部3(以下，稱肩關節部3)。該肩 部3是成爲多關節臂2的基端關節部3。此外，上腕 端和前腕7基端是透過驅動軸連結著，構成可轉動的 〇 部4(以下，稱肘關節部4)。另外，前腕7前端和 8是透過驅動軸連結著，構成可轉動的關節部5(以 稱手關節部5)。該等構件是配置成可使肩關節部3 轉中心軸位於同軸上成對面配置在上下方向。 多關節臂2是利用未圖示的旋轉驅動源轉動肩關 3和關節部4和手關節部5，朝工件取出、供給方向 手部8。此時，多關節臂2,其機構是執行伸縮動作 部8朝一方向直線移動於伸直上腕6和前腕7的伸長 ’及上腕6和前腕7成爲摺疊狀態的收縮位置。 設置 於手 動在 節臂 構成 備. 二臂 件9 ，構 關節 6前 關節 手部 下， 的旋 節部 移動 讓手 位置 -6 - 200940429 於此，習知的多關節機械人1是設計成於第7圖所示 的多關節臂2縮回位置，可使手部8所保持的工件9中心 和台座13的旋轉中心一致。再加上，將肘關節部4的旋 轉中心和台座13的旋轉中心針對手部8的移動方向偏移 在正交方向使肘關節部4或手部8於台座13轉動時不會 突出多關節機械人1周圍所需的最小區域圓15，因此能 夠縮小多關節機械人1的旋繞半徑。 0 此外，習知的多關節機械人，提出一種電動機的旋轉 是以皮帶傳達至差動減速機，以軸承支撐差動減速機的旋 轉（例如，參照專利文獻2)。 習知多關節機械人的旋繞構造，如第8圖所示，馬達 102是在大致圓筒狀的旋轉構件1〇4的外圍部附近，安裝 成倒立，利用其軸和結合於減速機構103輸入的驅動輸入 軸193上所安裝的帶齒皮帶輪191、192和帶齒皮帶1〇9 運作旋轉驅動力的供給。減速機構103是安裝在固定構件 φ 105 ’旋轉構件1〇4頂部是利用機械人的基座台1 17和螺 栓116形成安裝，利用底部的軸承112旋轉自如地保持在 固定構件105。 〔專利文獻1〕日本特開2001-274218號公報（第4 頁〜第5頁、第1圖、第2圖） 〔專利文獻2〕日本特開平2-160485號公報（第2 頁〜第3頁、第1圖） 【發明內容】 200940429 〔發明欲解決之課題〕 液晶用玻璃基板或半導體晶圓等薄板狀工件出入保管 庫用的多關節機械人隨著大型化的趨勢，處理基板片數也 被要求增加的同時還被要求能以短時間進行處理。因此， 對於多關節機械人的要求，不管基板配置用保管庫已經變 高到達天花板所造成的設備本身大型化，將工件搬出入於 保管庫的傳遞路程還是以較短爲佳。即，若傳遞路程是構 成從幾乎可高到天花板的傳遞路程至幾乎可低到貼地的傳 遞路程時，則可讓保管庫配置更多的基板，因此對於多關 節機械人的要求就希望能夠有效利用高度方向。 此外，讓多關節機械人達到高速、高精度也成爲大課 題。另一方面，大型化的設備，爲了要維持周圍的乾淨無 塵環境是需要龐大的設備投資，因此就希望能夠讓保管庫 配置更多的基板，增加基板處理片數。基於此，也就希望 多關節機械人能夠從上述高傳遞路程至低傳遞路程朝上下 方向移動。 另外，關於乾淨無塵度，爲確保乾淨無塵度所使用的 機械人需構成爲機械人的內部不露出。因此，所使用的機 械人驅動機構是要求需配置在機械人內部。 此外，液晶基板或半導體晶圓的生產片數是逐年變多 ’爲提高生產性，對於機械人就要求需提昇搬運工件數。 然而，機械人因內含機械零件所以需要維修保養，維修保 養時間對於搬運工件數的影響也很大，因此就希望機械人 能夠容易維修保養。關於維修保養，理所當然是會有動力 -8 - 200940429 傳達用部位的更換作業’更換作業最多的是減速機的更換 ’如何讓該減速機的更換能夠更加容易就成爲課題。特別 是在台座旋繞時，立柱或多關節臂或手的力矩會作用在驅 動用的減速機，因此台座旋繞軸的減速機損傷的可能性較 高。 針對上述課題，習知的多關節機械人，其立柱和安裝 在立柱的多關節臂及手旋繞用的台座的旋繞機構是構成爲 _ 減速機直接連結在台座’所以在維修保養時爲了要更換內 藏的減速機’需要對立柱另外加以支撐的作業，無法容易 進行維修保養’因此減速機的更換作業費時，導致生產性 降低的問題。 另外’習知的多關節機械人是構成爲多關節臂基端同 軸配置在上下的構造。因此，配置在多關節臂基端的機構 零件即馬達或皮帶輪的更換時，只能採取卸下單方多關節 臂之後再進行更換的方法，所以維修保養時間就變龐大， Φ 導致生產性降低的問題。 此外，習知多關節機械人的旋繞機構的構造，若是如 一般的垂直多關節機械人其構造爲多關節臂配置在旋繞機 構上的構造時，即使是構成爲底部配置有軸承但上部的力 矩載重也不會產生大的作用因此不成問題，但透過台座旋 繞側部的立柱時就會有較大的力矩載重作用。如此一來， 因減速機的輸出平面和軸承的支撐平面並不一致，所以旋 繞時的力矩載重會形成大的作用，不僅對於減速機，軸承 也會造成損傷，產生維修保養困難的問題。 -9- 200940429 另外，工件的傳遞路程雖是要低，但第8圖所示的旋 繞機構其內部有著不必要的空間，即使將其組合在習知多 關節機械人還是無法形成低傳遞路程，因此就產生工件無 法搬出入於保管庫下部的問題。 本發明是有鑑於上述問題所硏創的發明，目的是提供 一種能夠實現容易維修保養且低傳遞路程的多關節機械人 〇 〔用以解決課題之手段〕 爲解決上述問題，本發明構成爲下述。 申請專利範圍第1項所記載的發明，多關節機械人， 是由：搬運物載放用的手部；與上述手部連結，至少具備 2個以上的旋轉關節，可使上述手部伸縮成朝一方向移動 ，配置在上下方向成相向的多關節臂；安裝在立柱成可上 下移動做爲上下方向移動的移動機構和上述多關節臂連結 φ 用的支撐構件；及連結在上述立柱下端部，安裝在上述立 柱做爲上述多關節臂旋繞用的台座所構成，於該多關節機 械人中，上述台座旋繞用的減速機其輸出軸的固定面是位 於上述台座支撐用的上述軸承的厚度大致中心。 申請專利範圍第2項所記載的發明，以旋繞支撐著上 述多關節臂和上述立柱和上述移動機構及上述台座的狀態 卸下上述減速機。 申請專利範圍第3項所記載的發明，將上述減速機卸 下時要拆下的蓋配備在上述台座上面並且在上述減速機上 -10- 200940429 面。 申請專利範圍第4項所記載的發明，上述軸承爲斜置 滾輪軸承。 申請專利範圍第5項所記載的發明，上述減速機的輸 入是由透過皮帶配置在上述台座的馬達執行。 申請專利範圍第6項所記載的發明，是於上述減速機 的半徑方向的外側配置上述軸承。 g 申請專利範圍第7項所記載的發明，上述台座的旋繞 是由減速機輸出執行，由有別於上述減速機另外配備在上 述台座的軸承執行上述台座的旋繞支撐，於上述減速機的 輸出軸繫結著上述減速機的輸入軸的保持構件。 申請專利範圍第8項所記載的發明，上述軸承是由斜 置滾輪軸承構成’將上述斜置滾輪軸承的軸向間隙以負公 差構成。 申請專利範圍第9項所記載的發明，多關節機械人， Q 是由：搬運物載放用的手部；與上述手部連結，至少具備 2個以上的旋轉關節’可使上述手部伸縮成朝一方向移動 ，配置在上下方向成相向的多關節臂；安裝在立柱成可上 下移動做爲上下方向移動的移動機構和上述多關節臂連結 用的支撐構件；及連結在上述立柱下端部，安裝在上述立 柱做爲上述多關節臂旋繞用的台座所構成，於該多關節機 械人中’首先鬆脫拿掉蓋用螺栓卸下減速機蓋，其次，鬆 脫拿掉輸出軸固定螺栓，拆下固定在上述台座的固定構件 ’鬆脫拿掉差動齒輪減速機固定部所繫結的固定用螺栓， -11 - 200940429 將上述差動齒輪減速機的上述固定部從底座卸下。 〔發明效果〕 根據申請專利範圍第1項及第9項所記載的發明時， 爲了對立柱和安裝在立柱的多關節臂及手部旋繞用的台座 加以維修保養，在進行內設減速機更換作業時，由於是利 用有別於減速機另外配置的軸承支撐著台座，因此不需要 0 對立柱進行另外的支撐作業’能夠容易進行維修保養。 此外，能夠消除台座高度方向的閒置空間。即，手部 的底面能夠配置成位於底座其高至低的位置，能夠實現低 傳遞路程的工件搬運。即，手部的底面是可配置成位於底 座其高至低的位置，可以實現低傳遞路程的工件搬運。 另外’即使作用著台座旋繞造成的立柱、多關節臂或 手部的大力矩，但因是使用如斜置滾輪軸承對於來自任何 方向的載重都可保持良好精度的軸承，以較大的旋轉半徑 Q 進行支撐，所以能夠獲得良好精度支撐的同時，在取出減 速機時也不需要對立柱進行另外支撐的作業，因此能夠容 易進行維修保養。 【實施方式】 〔發明之最佳實施形態〕 以下，參照圖面對本發明實施形態進行說明。 〔實施例1〕 -12- 200940429 第1圖爲本發明多關節機械人的透視圖，第2圖爲本 發明多關節機械人的上面圖，第3圖爲本發明多關節機械 人的正面圖。 本發明的多關節機械人1，爲了對應未圖示保管庫的 高層化，構成由可區分爲複數塊的立柱12所連結形成的 構造。如上述，藉由依順序連結各立柱塊16形成具有可 對應保管庫高層之高度的多關節機械人1。本實施例中， 多關節機械人1是構成爲4個立柱塊16所連結形成的構 造。各立柱塊16的兩端面是形成可使立柱塊16間連結的 嵌合構造，再加上，爲了讓線性導件形成的引導機構獲得 的良好精度配置具有未圖示的定位孔，使用定位工具調整 進行組裝。 此外，本發明的多關節機械人1，具備有由關節部3 、4、5連結成可旋轉，由旋轉驅動源傳達有旋轉力可進 行所期望動作的二組多關節臂2。此外，由多關節臂2保 φ 持著工件9的手部8是構成可朝圖中箭頭符號X所示的 工件9取出、供給方向直線移動。另外，設置在二組多關 節臂2基端的關節部3旋轉中心軸的關係，如第2圖所示 ，構成爲相對於上臂21基端的關節部3在手部8移動方 向錯開位置配置下臂22基端的關節部3。 此外，又具備有可使設有多關節臂2的支撐構件10 上下移動的上下移動構件11，構成可調整多關節臂2的 上下位置。另外，上下移動機構11的台座13是設置成可 轉動，構成可旋繞多關節機械人1改變方向。於此，上下 -13- 200940429 移動機構11是和手部8的移動方向成相同方向配置，支 撐構件10是從上下移動機構11針對手部8移動方向朝正 交方向突出，連結在多關節臂2基端的關節部3。此外， 連結在下臂的支撐構件10，如第2圖所示形成爲手部8 移動方向偏置形狀以在多關節臂2由上下移動機構11移 動至下方時不會干涉到台座13。另外，上下移動機構11 是以未圖示具有密封功能的保護蓋覆蓋著，藉此抑制來自 _ 立柱12內部的灰塵。 其次，使用第4圖說明台座13的構造。台座13的內 部內包有台座13驅動用的馬達31和減速機構36。爲了 讓台座13的厚度形成爲較薄的構成，其內部形成有加強 肋51，藉此成爲高剛性構造可保持著已安裝在立柱12的 臂體重量。接著，針對台座1 3的細部構造進行說明。馬 達31是以螺栓等固定在台座13，馬達31的輸出軸是旋 轉自如地支撐在馬達用軸承32，輸出軸32安裝有皮帶34 0 的一端。皮帶34的另一端是安裝在由減速機蓋45正下方 配置的輸入齒輪用軸承35支撐成旋轉自如的輸入齒輪36 ，透過皮帶34讓馬達31的動力傳達至輸入齒輪36。輸 入齒輪用軸承35的外輪是固定在軸承保持構件49，軸承 保持構件4 9是繫結在差動減速機3 7的輸出軸3 9。如上 述將軸承保持構件49繫結在輸出軸39的構成是可讓輸出 軸39兼作爲軸承保持構件49的安裝底座，藉此能夠消除 台座高度方向的閒置空間。即，手部的底面可配置成低至 台座的高度，可以實現低傳遞路程的工件搬運。並且，差 -14- 200940429 動減速機37與減速機蓋45爲止的高度是以輸入齒輪用軸 承35的軸承厚度和皮帶34的寬度算出，成爲最小尺寸。 此外’輸入齒輪36是輸入至差動減速機37。差動減速機 37的固定部38是固定在底座17，差動減速機37的輸出 軸39是由輸出軸固定螺栓40固定在需固定於台座13的 固定構件41。差動減速機37部份的高度是以差動減速機 37、輸入齒輪軸承35的軸承厚度和皮帶34的寬度算出， i 成爲最小尺寸。 0 此外’爲了讓台座13厚度變薄，對於台座13旋繞動 作支撐用的軸承並不需要形成多段，而是以可保持來自於 任何方向之載重的斜置滾輪軸承42構成。斜置滾輪軸承 42的內輪，是由和台座13固定的固定構件43保持著， 旋轉自如地支撐著台座13。另外，斜置滾輪軸承42的外 輪是由固定在底座17的固定構件44保持成不動。爲了防 止旋繞時的立柱12的振動或倒下，斜置滾輪軸承42的軸 ❹ 向間隙’例如是以〇至1 5 " m程度負公差構成。如此一 來，因斜置滾輪軸承的軸向間隙成爲零所以就形成不會產 生立柱12振動或倒下的構成。 接著’針對斜置滾輪軸承42和差動減速機37的關係 進行說明。當以差動減速機3 7的輸入齒輪3 6的旋轉中心 爲旋繞中心時，差動減速機37的輸出軸39是以旋繞中心 爲中心，旋轉成爲具有比輸入齒輪36旋轉半徑還外側的 旋轉半徑。此外，斜置滾輪軸承4 2是以旋繞中心爲中心 ，旋轉其內輪成爲具有比差動減速機37的輸出軸39旋轉 -15- 200940429 半徑還外側的旋轉半徑。如上述，斜置滾輪軸承42和差 動減速機37的旋轉中心相同，斜置滾輪軸承42是配置成 具有比差動減速機3 7外側的旋轉半徑。另外，高度方向 ，差動減速機37的輸出軸39和台座13兩者固定用的固 定構件41的固定面高度是配置成位於斜置滾輪軸承42大 致高度中心。即，如此一來，就能夠讓立柱或上下移動機 構、上下臂的力矩載重由大的斜置滾輪軸承支撐著，藉由 & 將高度設定成輸出軸的固定面位於斜置滾輪軸承大致高度 中心，能夠抑制台座驅動時的扭曲。 構成如上述時，台座13的旋轉支撐是由斜置滾輪軸 承42執行，台座13的旋轉是由差動減速機37的輸出執 行，如此一來例如即使在減速機3 7更換時，因台座1 3是 由斜置滾輪軸承42支撐著，所以就能夠不受拘束只拆卸 減速機3 7。 本發明和專利文獻1不同的部份，在於本發明爲相對 〇 於上臂基端的關節部在手部移動方向錯開位置配置下臂基 端的關節部之構成，同時台座的旋轉支撐是由斜置滾輪軸 承執行，台座的旋轉是由差動減速機的輸出執行的部份。 其次，使用第1圖對動作進行說明。本發明的多關節 機械人1所具備的二組多關節臂2，例如具有複數的關節 部，即，多關節機械人1是水平多關節機械人的構成。本 實施形態的多關節臂2具備和習知多關節臂2相同的構造 〇 上腕6的基端是透過驅動軸連結於支撐構件10，構 -16- 200940429 成可轉動的肩關節部3。該肩關節部3是成爲多關節臂2 基端的關節部3。此外，上腕6的前端和前腕7的基端是 透過驅動軸形成連結著，構成可轉動的肘關節部4。另外 ，前腕7的前端和手部8是透過驅動軸形成連結著，構成 可轉動的手關節部5。 多關節臂2是利用未圖示的旋轉驅動源轉動肩關節部 3和肘關節部4和手關節部5，使手部8朝工件取出、供 g 應方向移動。此時，多關節臂2，其機構是讓手部8朝一 方向進行伸縮動作，使其在伸直上腕6和前腕7的伸長位 置，及上腕6和前腕7成爲摺疊狀態的縮回位置之間直線 移動。 於此’針對本實施例的多關節機械人1的旋繞半徑是 使用下臂22進行說明。於第5圖所示的下臂22縮回位置 ，由手部8保持的工件9其中心是設計成和台座13旋轉 中心一致。再加上，肩關節部3的旋轉中心和手關節部5 φ 的旋轉中心和台座13的旋轉中心是偏置成一致位於手部 8移動方向軸線上’使肘關節部4或手部8於台座13轉 動時不會突出多關節機械人1周圍所需的最小區域圓15 ’因此就能夠縮小多關節機械人1的旋繞半徑。 於此’爲了避免圖面變繁雜而使用下臂進行了說明， 但對於上臂2 1也是相同，工件9的中心是設計成和台座 13旋轉中心一致，肩關節部3、手關節部5和台座13的 旋轉中心位置關係也是和下臂相同構成。 其次’針對上下方向的動作進行說明。多關節臂2是 -17- 200940429 安裝在支撐構件10，根據未圖示的控制器指令由上下移 動機構11朝上下方向移動。如第3圖所示，在朝下方移 動時，因支撐構件1 0是以不干涉到台座1 3的形態構成爲 手部8移動方向偏置形狀，所以支撐構件可下降至上 下移動機構11最下點的移動位置。 接者，使用第4圖對減速機的更換作業進行說明。首 先’鬆脫拿掉蓋用螺栓46卸下減速機蓋45。如此一來， • 就可確認出被固定在輸入齒輪用軸承35及台座13的固定 構件41。其次’鬆脫拿掉輸入齒輪36的固定螺检47，將 輸入齒輪36和皮帶部份分開。如此一來，就能夠卸下皮 帶34。接著’鬆脫拿掉輸出軸螺栓40，卸下被固定在台 座的固定構件41。如此一來，就能夠讓差動齒輪減速機 37的輸出軸39成爲不受拘束可自由取出的狀態。其次， 鬆脫拿掉差動齒輪減速機37其固定部38所繫結的固定部 用螺栓48，將差動齒輪減速機37的固定部38從底座17 φ 卸下。如此一來’就能夠不受拘束地將差動齒輪減速機 37從台座13取出。 如以上所述的順序，能夠順利取出差動齒輪減速機。 此時，因台座是由斜置滾輪軸承支撐著，所以安裝在台座 的立柱及上下移動機構並不需具備特別的器具，就能夠進 行作業。 此外，針對馬達的更換，同樣地只要卸下配置在馬達 上部的外罩就能夠容易進行更換作業。 -18- 200940429 【圖式簡單說明】 第1圖爲表示本發明實施例的多關節機械人透視圖。 第2圖爲表示本發明實施例的多關節機械人上面圖。 第3圖爲表示本發明實施例的多關節機械人正面圖。 第4圖爲表示示本發明實施例的台座側剖面圖。 第5圖爲表示本發明實施例的多關節機械人旋繞半徑 圖。 〇 第6圖爲習知的多關節機械人透視圖。 第7圖爲表示習知的多關節機械人旋繞半徑圖。 第8圖爲表示習知的多關節機械人旋繞構造正面圖。 t主要元件符號說明】 1 :多關節機械人 2 :多關節臂 21 :上臂 ® 22 :下臂 3 :肩關節部 5 :手關節部 6 :上腕 7 :前腕 8 :手部 9 :工件 I 〇 :支撐構件 II :上下移動機構 -19- 200940429 1 2 :立柱 13 :台座 14 :基座台 1 5 :最小區域圓 1 6 :立柱塊 17 :底座 3 1 :馬達 32 :輸出軸 3 3 :馬達用軸承 34 :皮帶 35:輸入齒輪用軸承 3 6 :輸入齒輪 3 7 :差動減速機 3 8 :固定部 39 :輸出軸 40:輸出軸固定螺栓 41 :固定構件 42 :斜置滾輪軸承 43 :固定構件 44 :固定構件 45 :減速機蓋 46 :蓋用螺栓 4 7 :固定螺栓 48 :固定部用螺栓 -20- 200940429 49 :軸承保持構件 5 0 :開口部 5 1 :加強肋In the present invention, a multi-joint robot for entering and leaving a thin plate-shaped workpiece such as a glass substrate or a semiconductor wafer for liquid crystal. [Prior Art] Conventional multi-joint robots have proposed offsets of the g-center and the rotation center of the pedestal by the rotation of the shoulder joint portion to make the multi-joint robot's winding radius smaller when the pedestal is rotated (for example, Refer to Patent Document 1). As shown in Fig. 6, the conventional multi-joint robot 1 includes two sets of multi-joint arms that are coupled to each other by the joint portions 3, 4, and 5 so as to be rotatable and that can transmit a rotational force by a rotational drive source to perform a desired operation. 2. The rotation center axis of the joint portion 3 provided at the base end of the two sets of the multi-joint arms 2 is arranged in the vertical direction (or the axial direction). The multi-joint robot 1 includes two sets of multi-joint arms 2, one arm φ drive type device 2 is for supply, and the other is for take-out, and the supply operation of the workpiece 9 and the take-out operation of the other workpiece 9 can be simultaneously performed. Further, in the conventional multi-joint robot 1, the hand 8 holding the workpiece 9 by the multi-joint arm 2 is configured to be taken out from the workpiece 9 indicated by an arrow X in the drawing, and linearly moved in the supply direction. Further, the conventional multi-joint robot 1 includes a moving member 11 (hereinafter referred to as a moving mechanism 11) that can move the support member 10 provided on the multi-joint arm 2 up and down, and can adjust the vertical position of the multi-joint arm 2. Further, the pedestal 13 of the 'up and down moving mechanism 11 is set to be rotatable, so that the multi-off -5 - 200940429 robot 1 can be rotated to change direction. In addition, the conventional multi-joint robot 1 has a pedestal 13 which is movable in the direction indicated by the arrow symbol γ in the figure, and can be moved in the direction in which the orthogonal portion 8 moves and the direction in which the support member 1 is moved up and down. Thereby, the position of the vertical movement mechanism 11 can be adjusted by the base table 14. Further, the conventional multi-joint robot 1 has two sets of multiple joints 2', for example, a plurality of joint portions, that is, the multi-joint robot 1 is a horizontal joint type robot. The multi-joint arm 2 of the present embodiment has a first arm 6 (hereinafter referred to as an upper wrist 6), a seventh (hereinafter referred to as a front wrist 7) coupled to the upper wrist 6, and a hand that can be attached to the front wrist 7 to maintain the working hand. 8. The proximal end of the upper wrist 6 is coupled to the support member 1 via a drive shaft to form a rotatable joint portion 3 (hereinafter referred to as a shoulder joint portion 3). This shoulder portion 3 is a proximal end joint portion 3 that serves as the multi-joint arm 2. Further, the upper wrist end and the base end of the front wrist 7 are coupled via a drive shaft to constitute a rotatable jaw portion 4 (hereinafter referred to as an elbow joint portion 4). Further, the front ends of the front wrists 7 and 8 are coupled to each other through a drive shaft to constitute a rotatable joint portion 5 (referred to as a hand joint portion 5). The members are arranged such that the central axis of the shoulder joint portion 3 is disposed on the coaxial pair in the up and down direction. The multi-joint arm 2 rotates the shoulder 3, the joint portion 4, and the hand joint portion 5 by a rotation drive source (not shown), and takes out the direction hand 8 toward the workpiece. At this time, the multi-joint arm 2 has a mechanism in which the telescopic movement portion 8 linearly moves in one direction to the extension of the upper wrist 6 and the front wrist 7, and the contraction position in which the upper wrist 6 and the front wrist 7 are in a folded state. It is set in the manual arm assembly. The two arm members 9 and the front joints of the front joints of the joints are moved by the knobs. -6 - 200940429 Here, the conventional articulated robot 1 is designed to be The retracted position of the multi-joint arm 2 shown in Fig. 7 allows the center of the workpiece 9 held by the hand 8 to coincide with the center of rotation of the pedestal 13. Further, the rotation center of the elbow joint portion 4 and the rotation center of the pedestal 13 are offset from the moving direction of the hand 8 in the orthogonal direction so that the elbow joint portion 4 or the hand portion 8 does not protrude when the shank 13 is rotated. The minimum area circle 15 required around the robot 1 can reduce the winding radius of the multi-joint robot 1 . Further, a conventional multi-joint robot proposes that the rotation of the motor is transmitted to the differential speed reducer by a belt, and the rotation of the differential speed reducer is supported by the bearing (for example, refer to Patent Document 2). As shown in Fig. 8, the motor 102 is mounted in an inverted state in the vicinity of the outer peripheral portion of the substantially cylindrical rotating member 1〇4, and is input by the shaft and the combination of the speed reduction mechanism 103. The toothed pulleys 191, 192 and the toothed belt 1 〇 9 mounted on the drive input shaft 193 operate the supply of the rotational driving force. The speed reduction mechanism 103 is attached to the fixing member φ 105 ′. The top of the rotating member 1〇4 is mounted by the base table 17 and the bolt 116 of the robot, and is rotatably held by the fixing member 105 by the bearing 112 at the bottom. [Patent Document 1] JP-A-2001-274218 (Page 4 to Page 5, Figure 1 and Figure 2) [Patent Document 2] Japanese Patent Laid-Open No. 2-160485 (page 2 to page 3) [Page 1 of the Invention] [Explanation of the Invention] 200940429 [Problems to be Solved by the Invention] The number of substrates processed by a multi-joint robot for entering and leaving a thin plate-shaped workpiece such as a liquid crystal glass substrate or a semiconductor wafer with a large size It is also required to be added and is required to be processed in a short time. Therefore, in response to the demand of the multi-joint robot, it is preferable that the transfer distance of the workpiece to be moved into the storage is small, regardless of whether the storage space for the substrate arrangement has become higher and the size of the device itself is increased. That is, if the transfer path is a transfer path from almost high to the ceiling to a transfer path that is almost low to the ground, the storage can be configured with more substrates, so it is desirable for the multi-joint robot to Effective use of the height direction. In addition, it has become a big problem for multi-joint robots to achieve high speed and high precision. On the other hand, large-scale equipment requires a large investment in equipment in order to maintain a clean and dust-free environment. Therefore, it is desirable to have more substrates in the storage and increase the number of substrates processed. Based on this, it is also desired that the multi-joint robot can move in the up and down direction from the above high transfer path to the low transfer path. In addition, regarding the cleanness and dustiness, the robot used to ensure clean and dust-free degree needs to be constructed so that the inside of the robot is not exposed. Therefore, the mechanical man drive mechanism used is required to be disposed inside the robot. In addition, the number of productions of liquid crystal substrates or semiconductor wafers is increasing year by year. To improve productivity, it is required for robots to increase the number of workpieces to be transported. However, the robot needs maintenance due to the inclusion of mechanical parts, and the maintenance and repair time has a great influence on the number of workpieces to be transported. Therefore, it is desirable for the robot to be easy to maintain. Regarding maintenance, it is natural that there will be power. -8 - 200940429 Replacement of the transmission part. The replacement of the reduction gear is the most. The replacement of the reduction gear can be made easier. Especially when the pedestal is wound, the torque of the column or the multi-joint arm or hand acts on the speed reducer for driving, so the speed reducer of the turret winding shaft is more likely to be damaged. In view of the above-mentioned problems, the conventional multi-joint robot has a column and a multi-joint arm attached to the column and a turret for the hand-wound pedestal. The _ reducer is directly connected to the pedestal, so in order to be replaced during maintenance The built-in reducer's work requires additional support for the column, and it is not easy to perform maintenance. Therefore, the replacement of the reducer takes time, resulting in a problem of reduced productivity. Further, the conventional multi-joint robot is configured such that the base end of the multi-joint arm is arranged on the same axis. Therefore, when the motor or the pulley that is disposed at the base end of the multi-joint arm is replaced, only the method of removing the single multi-joint arm and then replacing it can be performed, so the maintenance time becomes large, and Φ causes a problem of reduced productivity. . Further, in the structure of the conventional multi-joint robot winding mechanism, if the structure is a structure in which the multi-joint arm is disposed on the winding mechanism as in a general vertical multi-joint robot, even if the bearing is disposed at the bottom, the upper moment load is configured. It does not produce a large effect and is therefore not a problem, but there is a large torque load when the pedestal is wound around the side column. In this way, since the output plane of the reducer and the support plane of the bearing are not uniform, the moment load during the winding will have a large effect, which not only causes damage to the reducer but also causes problems in maintenance and maintenance. -9- 200940429 In addition, although the transfer path of the workpiece is low, the winding mechanism shown in Fig. 8 has unnecessary space inside, even if it is combined with a conventional multi-joint robot, it cannot form a low transmission path. There is a problem that the workpiece cannot be moved out of the lower part of the storage. The present invention has been made in view of the above problems, and an object of the invention is to provide a multi-joint robot that can realize easy maintenance and low transmission path. [Means for Solving the Problem] In order to solve the above problems, the present invention is constructed as follows. Said. According to the invention of the first aspect of the invention, the multi-joint robot is a hand for carrying a load, and is connected to the hand, and has at least two or more rotating joints, and the hand can be expanded and contracted. Moving in one direction, a multi-joint arm that is opposed to each other in the vertical direction; a moving mechanism that is attached to the column to move up and down as a vertical movement, and a support member for connecting the multi-joint arm to the φ; and a lower end portion of the column The pedestal is mounted on the pedestal for the multi-joint arm winding. In the multi-joint robot, the fixed surface of the output shaft of the yoke for winding the pedestal is substantially the thickness of the bearing for supporting the pedestal. center. According to the invention of claim 2, the reduction gear is detached while supporting the multi-joint arm, the column, the moving mechanism, and the pedestal. According to the invention of claim 3, the cover to be removed when the speed reducer is removed is provided on the pedestal and on the speed reducer -10-200940429. According to the invention of claim 4, the bearing is an inclined roller bearing. According to the invention of claim 5, the input of the speed reducer is performed by a motor that is disposed on the pedestal through a transmission belt. According to the invention of the sixth aspect of the invention, the bearing is disposed outside the radial direction of the reduction gear. g. The invention according to claim 7, wherein the winding of the pedestal is performed by a speed reducer output, and the winding of the pedestal is performed by a bearing different from the variator provided in the pedestal, and the output of the pedestal is outputted by the variator The shaft is attached to the holding member of the input shaft of the above reduction gear. According to the invention of claim 8, the bearing is constituted by an inclined roller bearing, and the axial gap of the inclined roller bearing is formed with a negative tolerance. According to the invention of the ninth aspect of the invention, the multi-joint robot Q is a hand for carrying a load; and the hand is connected to the hand, and at least two or more rotary joints are provided to allow the hand to expand and contract. Moving in one direction, a multi-joint arm that is opposed to each other in the vertical direction; a moving mechanism that is attached to the column to be movable up and down as a vertical movement, and a support member for connecting the multi-joint arm; and a lower end portion of the column The column is mounted on the above-mentioned column as a pedestal for the multi-joint arm winding. In the multi-joint robot, 'first loosely remove the cover bolt and remove the speed reducer cover, and secondly, loosen and remove the output shaft fixing bolt. Remove the fixing member fixed to the pedestal' Loosely remove the fixing bolt fastened by the differential gear reducer fixing portion, -11 - 200940429 Remove the fixing portion of the differential gear reducer from the base. [Effect of the Invention] According to the invention described in the first and the ninth aspects of the patent application, in order to maintain the column and the multi-joint arm attached to the column and the pedestal for hand winding, the internal reducer is replaced. In the operation, since the pedestal is supported by a bearing different from that of the reducer, it is not necessary to perform another support operation for the column. In addition, it is possible to eliminate the idle space in the height direction of the pedestal. That is, the bottom surface of the hand can be disposed to be positioned at a high to low position of the base, and the workpiece can be conveyed with a low transfer path. That is, the bottom surface of the hand is configurable to be positioned at a high to low position of the base, enabling workpiece handling with a low transfer path. In addition, even if the large moment of the column, the multi-joint arm or the hand caused by the pedestal winding is applied, the bearing with good precision can be used for the load from any direction, such as the inclined roller bearing, with a larger radius of rotation. Since the Q is supported, it is possible to obtain good precision support, and it is not necessary to perform additional support for the column when the reducer is taken out, so that maintenance can be easily performed. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. [Embodiment 1] -12- 200940429 Fig. 1 is a perspective view of a multi-joint robot of the present invention, Fig. 2 is a top view of a multi-joint robot of the present invention, and Fig. 3 is a front view of a multi-joint robot of the present invention . In the multi-joint robot 1 of the present invention, in order to correspond to the high-rise of the storage (not shown), a structure in which the columns 12 that can be divided into a plurality of blocks are connected is formed. As described above, the multi-joint robot 1 having the height corresponding to the upper level of the storage compartment is formed by connecting the respective pillar blocks 16 in order. In the present embodiment, the multi-joint robot 1 is configured to be formed by joining four pillar blocks 16. The both end faces of each of the column blocks 16 are formed to have a fitting structure for connecting the column blocks 16 together, and a positioning hole (not shown) is provided for the good precision of the guide mechanism for forming the linear guide, and the positioning tool is used. Adjust for assembly. Further, the multi-joint robot 1 of the present invention includes two sets of multi-joint arms 2 that are coupled to each other by the joint portions 3, 4, and 5 so as to be rotatable, and that can transmit a desired force by a rotational driving source. Further, the hand 8 holding the workpiece 9 by the multi-joint arm 2 is configured to be taken out from the workpiece 9 indicated by the arrow X in the drawing, and linearly moved in the supply direction. Further, the relationship between the central axes of rotation of the joint portions 3 provided at the proximal ends of the two sets of the multi-joint arms 2 is as shown in Fig. 2, and the lower arm is disposed at a position shifted from the joint portion 3 of the proximal end of the upper arm 21 in the moving direction of the hand 8 22 joint end 3 of the base. Further, the vertical movement member 11 for moving the support member 10 provided with the multi-joint arm 2 up and down is provided to constitute the up-and-down position of the adjustable multi-joint arm 2. Further, the pedestal 13 of the vertical movement mechanism 11 is provided so as to be rotatable, and the slewing multi-joint robot 1 is changed in direction. Here, the up-and-down-13-200940429 moving mechanism 11 is disposed in the same direction as the moving direction of the hand 8, and the support member 10 is protruded in the orthogonal direction from the vertical movement mechanism 11 in the moving direction of the hand 8, and is coupled to the multi-joint arm. 2 joints 3 at the base end. Further, as shown in Fig. 2, the support member 10 coupled to the lower arm is formed such that the hand 8 is offset in the moving direction so as not to interfere with the pedestal 13 when the multi-joint arm 2 is moved downward by the vertical movement mechanism 11. Further, the vertical movement mechanism 11 is covered with a protective cover having a sealing function (not shown), thereby suppressing dust from the inside of the column 12. Next, the structure of the pedestal 13 will be described using FIG. The inside of the pedestal 13 is provided with a motor 31 for driving the pedestal 13 and a speed reduction mechanism 36. In order to make the thickness of the pedestal 13 thin, a reinforcing rib 51 is formed inside, whereby the high rigidity structure maintains the weight of the arm body attached to the column 12. Next, the detailed structure of the pedestal 13 will be described. The motor 31 is fixed to the pedestal 13 by bolts or the like, and the output shaft of the motor 31 is rotatably supported by the motor bearing 32, and the output shaft 32 is attached to one end of the belt 34 0 . The other end of the belt 34 is an input gear 36 that is rotatably supported by an input gear bearing 35 disposed directly below the speed reducer cover 45, and transmits the power of the motor 31 to the input gear 36 through the belt 34. The outer wheel of the input gear bearing 35 is fixed to the bearing holding member 49, and the bearing holding member 49 is coupled to the output shaft 39 of the differential speed reducer 37. The configuration in which the bearing holding member 49 is coupled to the output shaft 39 as described above is such that the output shaft 39 can also serve as a mounting base for the bearing holding member 49, whereby the free space in the height direction of the pedestal can be eliminated. That is, the bottom surface of the hand can be arranged to be as low as the height of the pedestal, and workpiece handling with a low transfer path can be realized. Further, the height from the difference -14 to 200940429 to the reduction gear cover 45 is calculated based on the bearing thickness of the input gear bearing 35 and the width of the belt 34, and is the minimum size. Further, the input gear 36 is input to the differential speed reducer 37. The fixing portion 38 of the differential speed reducer 37 is fixed to the base 17, and the output shaft 39 of the differential speed reducer 37 is fixed to the fixing member 41 to be fixed to the pedestal 13 by the output shaft fixing bolt 40. The height of the portion of the differential speed reducer 37 is calculated by the bearing thickness of the differential reduction gear 37, the input gear bearing 35, and the width of the belt 34, i being the minimum size. Further, in order to make the thickness of the pedestal 13 thin, it is not necessary to form a plurality of stages for the support for the turret 13 to be wound and supported, but the inclined roller bearing 42 for holding the load from any direction. The inner ring of the inclined roller bearing 42 is held by a fixing member 43 fixed to the pedestal 13, and rotatably supports the pedestal 13. Further, the outer wheel of the inclined roller bearing 42 is held stationary by the fixing member 44 fixed to the base 17. In order to prevent the vibration or the falling of the column 12 at the time of winding, the axial direction of the inclined roller bearing 42 is constituted by, for example, a negative tolerance of 〇 to 1 5 " m. As a result, since the axial gap of the inclined roller bearing becomes zero, the structure in which the column 12 is not vibrated or fallen down is formed. Next, the relationship between the inclined roller bearing 42 and the differential reducer 37 will be described. When the center of rotation of the input gear 36 of the differential speed reducer 37 is the center of rotation, the output shaft 39 of the differential speed reducer 37 is centered around the center of the winding, and is rotated to have a rotation outside the radius of rotation of the input gear 36. radius. Further, the inclined roller bearing 42 is centered around the center of the winding, and the inner wheel is rotated to have a radius of rotation which is larger than the outer diameter of the output shaft 39 of the differential speed reducer 37 by -15-200940429. As described above, the inclined roller bearing 42 and the differential speed reducer 37 have the same rotation center, and the inclined roller bearing 42 is disposed to have a radius of rotation outside the differential speed reducer 37. Further, in the height direction, the height of the fixing surface of the fixing member 41 for fixing both the output shaft 39 of the differential speed reducer 37 and the pedestal 13 is arranged to be at the center of the height of the inclined roller bearing 42. That is, in this way, the moment load of the upright column or the up and down moving mechanism and the upper and lower arms can be supported by the large inclined roller bearing, and the height of the fixed shaft of the output shaft is set at the approximate height of the inclined roller bearing by & The center can suppress the distortion when the pedestal is driven. When the configuration is as described above, the rotatory support of the pedestal 13 is performed by the inclined roller bearing 42, and the rotation of the pedestal 13 is performed by the output of the differential speed reducer 37, so that, for example, even when the speed reducer 37 is replaced, the pedestal 1 is used. 3 is supported by the inclined roller bearing 42, so that the speed reducer 3 7 can be removed without being restrained. The present invention differs from Patent Document 1 in that the present invention is configured such that the joint portion of the lower arm is disposed at a position shifted from the joint portion of the upper arm to the distal end of the upper arm, and the rotatory support of the pedestal is an inclined roller. The bearing is executed and the rotation of the pedestal is performed by the output of the differential reducer. Next, the operation will be described using FIG. The two sets of the multi-joint arms 2 included in the multi-joint robot 1 of the present invention have, for example, a plurality of joint portions, that is, the multi-joint robot 1 is a horizontal multi-joint robot. The multi-joint arm 2 of the present embodiment has the same structure as the conventional multi-joint arm 2 〇 The proximal end of the upper wrist 6 is coupled to the support member 10 through the drive shaft, and is configured to be a rotatable shoulder joint portion 3. The shoulder joint portion 3 is a joint portion 3 that serves as a base end of the multi-joint arm 2. Further, the front end of the upper wrist 6 and the proximal end of the front wrist 7 are coupled to each other through a drive shaft to constitute a rotatable elbow joint portion 4. Further, the front end of the front wrist 7 and the hand 8 are coupled to each other through a drive shaft to constitute a rotatable hand joint portion 5. The multi-joint arm 2 rotates the shoulder joint portion 3, the elbow joint portion 4, and the hand joint portion 5 by a rotational driving source (not shown), and the hand 8 is taken out toward the workpiece and moved in the g-direction. At this time, the multi-joint arm 2 is configured such that the hand 8 is telescopically moved in one direction so as to extend between the extended position of the upper wrist 6 and the front wrist 7, and the retracted position where the upper wrist 6 and the front wrist 7 are folded. Move in a straight line. Here, the winding radius of the multi-joint robot 1 of the present embodiment will be described using the lower arm 22. At the retracted position of the lower arm 22 shown in Fig. 5, the center of the workpiece 9 held by the hand 8 is designed to coincide with the center of rotation of the pedestal 13. Further, the center of rotation of the shoulder joint portion 3 and the center of rotation of the hand joint portion 5 φ and the center of rotation of the pedestal 13 are offset so as to be coincident with the axis of movement of the hand 8 'to make the elbow joint portion 4 or the hand 8 When the pedestal 13 is rotated, the minimum area circle 15 required around the multi-joint robot 1 is not protruded, so that the winding radius of the multi-joint robot 1 can be reduced. Here, the lower arm is used to avoid the complicated drawing, but the same is true for the upper arm 21, and the center of the workpiece 9 is designed to coincide with the center of rotation of the pedestal 13, the shoulder joint 3, the hand joint 5, and the pedestal. The positional relationship of the center of rotation of 13 is also the same as that of the lower arm. Next, the operation in the vertical direction will be described. The multi-joint arm 2 is attached to the support member 10 at -17-200940429, and is moved in the vertical direction by the vertical movement mechanism 11 in accordance with a controller command (not shown). As shown in Fig. 3, when moving downward, the support member 10 is configured to be offset from the pedestal 13 so that the hand 8 is offset in the moving direction. Therefore, the support member can be lowered to the up-and-down moving mechanism 11 The moving position of the next point. The replacement work of the reducer will be described using Fig. 4 . First, loosen the cover and remove the reducer cover 45 with the bolts 46. In this way, the fixing member 41 fixed to the input gear bearing 35 and the pedestal 13 can be confirmed. Next, the fixing screw 47 of the input gear 36 is removed and the input gear 36 is separated from the belt portion. In this way, the belt 34 can be removed. Then, the output shaft bolt 40 is removed and the fixing member 41 fixed to the pedestal is removed. In this way, the output shaft 39 of the differential gear reducer 37 can be freely taken out without being restrained. Then, the fixing portion 38 of the differential gear reducer 37 is detached from the base 17 φ by the bolt 48 for fixing the fixing portion 38 of the differential gear reducer 37. In this way, the differential gear reducer 37 can be taken out from the pedestal 13 without any restraint. In the order described above, the differential gear reducer can be taken out smoothly. At this time, since the pedestal is supported by the inclined roller bearing, the column and the vertical movement mechanism attached to the pedestal can be operated without requiring special equipment. Further, in the replacement of the motor, the replacement work can be easily performed by simply removing the cover disposed on the upper portion of the motor. -18- 200940429 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a multi-joint robot of an embodiment of the present invention. Fig. 2 is a top view showing a multi-joint robot according to an embodiment of the present invention. Fig. 3 is a front elevational view showing the multi-joint robot of the embodiment of the present invention. Fig. 4 is a side sectional view showing the pedestal according to the embodiment of the present invention. Fig. 5 is a view showing a multi-joint robot winding radius of an embodiment of the present invention. 〇 Figure 6 is a perspective view of a conventional multi-joint robot. Fig. 7 is a view showing a conventional multi-joint robot winding radius. Fig. 8 is a front elevational view showing a conventional multi-joint robot winding structure. t Main component symbol description] 1 : Multi-joint robot 2 : Multi-joint arm 21 : Upper arm ® 22 : Lower arm 3 : Shoulder joint 5 : Hand joint 6 : Upper wrist 7 : Front wrist 8 : Hand 9 : Workpiece I 〇 : Support member II : Up and down moving mechanism -19- 200940429 1 2 : Column 13 : pedestal 14 : Base table 1 5 : Minimum area circle 1 6 : Column block 17 : Base 3 1 : Motor 32 : Output shaft 3 3 : Motor Bearing 34: Belt 35: Input gear bearing 3 6 : Input gear 3 7 : Differential speed reducer 3 8 : Fixing portion 39 : Output shaft 40 : Output shaft fixing bolt 41 : Fixing member 42 : Inclined roller bearing 43 : Fixing member 44: Fixing member 45: Reducer cover 46: Cover bolt 4 7: Fixing bolt 48: Bolt for fixing portion -20- 200940429 49: Bearing holding member 50: Opening portion 5 1 : Reinforcing rib
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