TW200938498A - Scribing apparatus and method for cutting substrate using the scribing apparatus - Google Patents

Abstract

The present invention relates to a scribing apparatus and a method for cutting substrate using the scribing apparatus, which scribes along with an arranging direction of a unit substrate without rotating a mother substrate. Based on the feature, a scribing apparatus raising the productivity by shortening the engineering time, a method and an appratus for cutting substrate using the scribing apparatus are provided.

Description

200938498 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to the manufacture of a panel for use in a flat panel display (p 1 a 1 -D ispiay): two: and: the method 'more in detail' is related to the formation A plurality of sheets: an apparatus and method for cutting a mother substrate by forming a scribing line on a plate and a wire device. [Prior Art] Recently, the information processing machine has been rapidly developed with the speed of information processing speed: (10) The second-generation machine has the benefit of displaying information that is both active. In the 'as a display system, the main use of the Brown tube (c

|P ,: "" Ray Tube) monitor, but; near, like a light weight and occupy a small space thinner (Ding hlnFlim τ :: marrow: liquid crystal display 1 r a n s 1 s t 〇

LlQUld C^stal Displ a y P a n e 1 ) or organic light emitting diode display (〇 r g a n i c Ti 〇 u + ^

The use of Diodes dlspl is increasing. 3 7 P-like flat display A panel that is generally used for a flat panel display or the like is produced by using a brittle substrate. The panel is roughly divided into a single-board substrate and a bonded substrate on which two substrates are bonded. 200938498 The bonded substrate is used as a small unit of a liquid crystal display for a telephone, and is used for processing a large size and a large size. Therefore, the mother substrate is cut into a small unit substrate by a large-sized:== board. It is used as each panel. ^ In the method of cutting the mother substrate, there is a method of cutting by using a laser light += method or by piercing a diamond with a fine diamond. A board L is used! The method of cutting the mother beam by the beam of light is performed by illuminating the laser beam of the scribe line along the cutting line of the mother substrate to form a lined line of the heated line and quenching the line, and the slanting object.

The laser beam is broken and the mother substrate is cut into units; A. The method of cutting the mother substrate by the scribing wheel is to form a scribe line (scribe L. e) which is formed at a predetermined depth along the cutting line after the scribing wheel contacts the planned cutting line of the mother substrate. The scribing process and the physical impact of the mother substrate and the transmission of the crack along the scribe line (Craek) are used to cut the mother substrate into a unit substrate cracking process (B reak丨ngp "〇cess". SUMMARY OF THE INVENTION An object of the present invention is to provide a scribing apparatus capable of forming a scribing line on a mother substrate along a direction in which the unit substrate is arranged without rotating the mother substrate, and a substrate cutting apparatus and method using the scribing apparatus. 5 200938498 SUMMARY OF THE INVENTION In order to achieve the above object, in the scribing apparatus of the present invention, the aligning substrate of the aligning substrate is separated into a single-positioned upper right cultivating unit, which is provided with: a branch member, which is provided with a mother substrate and can be cut A few tmh hard to the first side, is provided (four); = on the path, used to force 乂, +, π # and 桠偁仵 private movement of the knot. . A scribe line is formed on the mother substrate of the 丨 w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w w The second direction of the direction of the syllabus can be provided in the scribe line device of the present invention, which is composed of a plurality of the first scribe lines in the direction of the unit material. The line unit can follow the first side (the side of the first scribing unit of the Lisie). The scribing device of the present invention further includes a first moving unit with the plurality of first books f /, system - J, the fruit can be arranged on the mother substrate 6 200938498 = the way to cut the predetermined line, so that the plurality of brother-line units move in the second direction. -4! First:: yuan Having: the first, the same as the foregoing; the first lead screw 'is inserted in the forward direction; and the first-driver, ==! the second side. 'Knife J makes a statement it一 it m Μ φ The first bracket is formed with a first female screw portion: to invite any one of the first lead screws to be screwed in. - the clear scribing device further has a second moving unit, and the emperor : cutting the second direction on the mother substrate, the scribe unit moves, and the second moving unit 1 is prepared. The second scribing-single-guide screw is inserted into the second bracket, and the second-direction flat direction of the cold-rotating screw is rotated with the lead screw, and the second bracket is formed by the second bracket. The second part is screwed with the second lead screw, and has a second female screw member' and a clear lead screw/, which is arranged to guide the aforementioned first-year and ~... The linear movement of the second bracket is described. The squaring unit and the second scribe unit are long-distorted: the rods are arranged side by side in the second; the directions are opposite to each other ==, The scribe line is formed along the first-inverse direction, and the scribe line of the second scribe line 1 200938498 is formed into a scribe line in the direction of the slanting direction. The object of the present invention is the substrate cutting device of the present invention: the mother substrate of the unit substrate having a plurality of unit substrates is placed on the substrate, and the mother substrate is printed by the loading portion. a splitting portion that is separated into a unit substrate by the mother substrate portion; and the unloading has: a selective structure The substrate is unloaded, and the scribe line portion is moved linearly, and the plurality of slabs are placed on the mother substrate of the secant line perpendicular to the first direction. Forming the first-side ...., the scribe line unit, the substrate cutting device of the present invention configured to form the second direction scribe line / i on the mother substrate in the first direction a wider mobile unit, which makes the aforementioned plurality

I; the second direction of movement is such that the plurality of I == are arranged on the mother substrate: the cut-predetermined line. J < - The second unit comprises: a first bracket, each of which is coupled to the first early twist; the first lead screw is inserted into the front bracket 'wire set to the axis Q and the second side 8 200938498 And the first driver rotates the first lead screw respectively, and the first bracket is formed with a first female screw portion to be screwed with any one of the first lead screws.

The substrate cutting device of the jujube month further includes a second moving unit that moves the second scribing unit by the cutting line in the second direction on the mother substrate, and the second moving unit includes: a second bracket coupled to the second scribing unit; a second guide screw:,:, inserted into the second bracket, and disposed in an axial direction parallel to the first direction; and a second driver Rotating the lead screw 'in the second bracket is formed with a second female:: portion to be screwed with the second lead screw. "Fixed:: The substrate cutting device of the brighter part is further provided with a guiding member which is arranged in parallel with the rain-leading lead screw and the second lead screw, and is used for the straight-lined use of the front bracket and the second bracket. Each of the one scribe line unit and the second scribe line unit is provided with two scribe lines, which are arranged side by side in the above-mentioned public, the aforementioned first--------------------------------------------------- The wire rods are lined up in the opposite direction along the first-- &, and the first-to-shoulder-lined sticks are formed in a line along the second-W line in the early direction. On the other hand, the mother substrate can be a flat display substrate. The substrate cutting method of the present invention is 9 200938498. A plurality of scribe lines are provided to separate into a unit substrate, and the mother substrate of the bit substrate is provided with: The line unit, the second base line perpendicular to the first direction of the linear movement of the plurality of lined military plates is 7L earlier, and is arranged along the aforementioned -°, and the first one is arranged in the first direction One: i, the spring is on the side of the side and uses the aforementioned: The above-mentioned '-, early 兀 on the substrate, a scribe line is formed in the first - * 彳崎 i _ direction, and the above-mentioned younger line is used to form a scribe line on the mother substrate. In the feature of the present invention, the substrate cutting device at the opening date is fixed in the scribe line unit in which the direction is formed, and the mother substrate is moved toward the side to form the scribe line in the second direction. The spring is fixed, and the second scribing unit can move toward =. The cow-to-universal straight line can describe the 罘-direction scribing system at the same time to form a plurality of strips at the same time. One of the intervals is a scribe line on the mother substrate. The method of cutting the substrate of the present invention is a method of cutting the second direction on the mother substrate. Moving along the ground of the first-side one, the edge can be formed on the mother substrate to form a scribe line in the second direction 200938498. According to the present invention, the alignment direction of the substrate can be formed on the mother substrate along the unit of the brake and the τ mother substrate. According to the invention, #性提升. The β error is caused by the shortening of the engineering time. [Embodiment] Two embodiments are implemented to explain the preferred apparatus and method of the present invention in detail. When the first substrate is cut by the substrate of the scribing device, the target is given a parameter H ^ and the same component, even if it is displayed in the substrate.

The surface of the ® is also as good as possible. The name is given to the door. "Breaking. And the description of the present invention is combined with 4 + for the specific known composition or function. (4) If the gist is unclear, it should be omitted. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The figure shows an embodiment of a mother substrate. As shown in the first figure, the mother substrate 1 is a thin film transistor-liquid crystal.

Flim Transit Γ Crystal Disp 曰ay, Ding Ft — lcd) panel. The mother substrate 丄 is roughly composed of a first mother substrate 2 having a square shape and a second mother substrate 200938498. The first mother substrate 2 and the second mother substrate 3 are stacked one on top of the other. A plurality of unit substrates 2a, 3a are formed on the first mother substrate 2 and the second mother substrate 3, and the unit substrates 2a, 33 are

First, the substrate 2 and the second mother substrate 3 are arranged in a lattice on the plane. The first mother substrate 2 is a substrate on which a thin film transistor substrate is formed, and the second mother substrate 3 is a substrate on which a color filter substrate is formed. The other side of the mother substrate 1 may be a panel light-emitting diode for a flat panel display (◦ r g a n i c L i g h t E ! 1 t t 1 n g D 1 〇 d e s, 〇L ED) display panel or the like. Figs. y, y, and 2 are diagrams schematically showing the configuration of the substrate cutting device 1 of the present invention. Ρ 板 板 板 ’ ’ ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” The I carrier portion 1 1 , the scribe line portion 2 , the placket 13 and the unloading portion 24 are sequentially produced by the loading unit i i . The mother substrate is passed through the scribe line portion 12 and the rupture portion: set to 10, and is separated into a plurality of pieces of the outer portion of the device 10 according to the unit 柘, 么 $ $ * (4) ^ ^ 3 . 4 and the output substrate is cut. The scribe portion 1 2 is used after the first mother substrate... The scribe device 1 2 a ' can be placed on the base plate 2 or the second mother plate 3 along the unit substrate 200938498

: The line T is formed into a scribe line (Scribe... (1). The rupture part 1 3 uses a split rod (B blood 3 k Bar) (not shown), on the book formed on the mother substrate i ^ ^ ,. ^ Force is applied to the spring and the spring portion: the substrate is cut off from the mother substrate 1. Next, on the side of the scribe line i 2, the reversing portion 15 is disposed. The reversing portion 丄 5 acts as a scribe line a character in which the position of one side is interchanged with the position of the other side where the scribe line is not formed, that is, in the case where the first substrate is formed in the mother substrate 1 in order to form the first mother substrate in the second mother base == 2 is interchanged with the position of the second mother substrate 3. (4): The three-dimensional system shows a perspective view of the embodiment of the one-side scribing device provided by the scribe line 12 of the second figure, and the fourth figure is: The upper view, the snapper solid production - the side view of the mouth of the bamboo brother. The music of the fifth figure of the three-figure branch of the building, the first direction of the first structure, the support member of the 1st, the Qin moving direction, the second direction π is a direction perpendicular to the first direction I in the structure of the scribing device] L 2 a , and the third direction is perpendicular to the first direction and the second direction 。. L and the first direction 11 are respectively corresponding to any one of the arrangement directions of the unit substrates 2a and 3a arranged in a lattice on the mother substrate. As shown in the second to fifth figures, the line is drawn. The device 1 2 a is provided with a support member 100, a scribing unit 200 (200a-1, 13200938498 00 =1, and a mobile unit 300 (3 7a, 3〇〇b). The branch member loo supports the mother substrate The parent pure 1 moves in a straight line along the direction I. The secant sheet 7020 (the 3 series is in contact with the mother substrate i 2 placed on the cutting member 100, forming a scribe line in the first direction 1 and a secant line in the second direction Π 1 Move U30 (4) to move the line to the π line. υ朝弟10,000 moving unit 3 0 〇a makes the line single 1, 2 0 0 a — 2 toward the second 'U〇a- single 9 η Π , Wanmen η private movement, to adjust the line d - 1, 2 0 〇a a 2 between the ρ, show, Dan line unit 20 〇 1, 1, ^ " between ^. Through the section, and 碉 ii! Μ The interval between the spacing of the cards A ° a 2 and the spacing of the square lines. In the spring day where the white I is to be formed, the scribing unit 2 〇〇 a — a — 2: fixed the mother substrate 1 toward the first direction ! Move. Private move early 7G 3 〇0 b system to make a single line Yuan; square: linear movement. In the second direction to be formed: ^, the mother substrate 1 is fixed, the linear unit 3 〇〇brR^AS, 7 卩 ^ ^ is transmitted (J b and the second direction η The straight line of the straight line is straight and the spring is private. The second side moves: the mother board 1 is in the first side... The branch member 1〇〇 has the table 12 1 4 0. Ί 〇^ υ次铌动早元元 1 4 G# Make ^ Q put the mother pure 1 on. The drive table moves the table 120 in the direction of the first direction I. 14 200938498

The table 1 220 has an upper plate 1 22 and a lower plate 1 2 4 . The upper plate 1 22 and the lower plate 1 2 4 have a flat and substantially rectangular shape, and the upper plate 12 2 is positioned on the upper side of the lower plate 1 2 4 . The mother substrate 1 is placed on the upper plate 1 2 2 . The upper plate 1 • 2 2 has an area similar to or larger than the mother substrate 1. A plurality of holes (not shown) which are connected to a vacuum path (not shown) are formed on the upper surface of the upper plate 1 2 2, and the mother substrate 1 is fixed to the upper plate 1 22 by vacuum pressing. Further, a nut holder portion (not shown) for fixing the mother substrate 于 to the upper plate 1 22 can be additionally provided on the upper plate 1 2 2 or the lower plate 1 2 4 . The drive unit 1 400 moves the table 1 2 0 linearly in the first direction I. The drive unit 丄4 〇 is provided with a guide member 1 4 2 bracket 1 4 4 and a driver (not shown). The guiding member 1 4 Θ 2 is "having a length" along the first direction j and is attached to the center of the base b. The guiding member 丄42 has the same visibility along its length. The upper surface of the guiding member 142 is provided flat, and the long grooves 141 formed in the longitudinal direction are respectively provided on both sides of the guiding member 142. The table 120 is coupled to the guiding member 142 by the bracket 14 4 . bracket! 4 4 has a bottom plate 4 5 , a branch board 1 4 7 and a joint board 1 4 9 . The bottom plate 145 has a flat rectangular plate shape and is positioned on the guiding member 丄42. The support plate 丄 4 7 15 200938498 is fixedly attached to the lower plate 1 2 4 of the table 2 2 方式 in a manner of being vertically fixed on the upper surface of the bottom plate i 4 5 and supporting the table 120. The splicing plates 1 4 7 are provided in two and juxtaposed on both sides above the bottom plate 145. The joining plate 2 4 9 has a side plate j14 9 a which is perpendicularly joined to the bottom surface of the bottom plate 145, and an insert plate 1 4 9 b which extends perpendicularly from the lower end of the side plate 149 a toward the inner side. The insertion plate 1 4 g b is inserted into the long groove formed by the side of the guiding member 丄 4 2 0 . The combined boarding system is provided with two and facing each other. Hey. VJ 71 | Member <!4 2 Guided and moved linearly in the first direction. As a driver, an assembly with a motor and a screw can be used. The assembly consisting of the selection, the belt, and the pulley or the wire is used; the assembly system of the first and second JT〇r) & ^〇d is for the industry in the related art, The specific composition of the assembly of the eve of the evening is based on f knowing, = detailed description. Dividing the cookware - Draw 1m unit 2 0 0 with first scribing unit 2q - 2, 2 - 2 - 2, and second scribing unit 2 - scribing unit 2 n n , early W 〇 0 b. The first provided in the support member 2 0 0 2 is tied in π, the second direction on the path of the second piece 00 moves, the J line is earlier than 2 0 〇b can be provided along the first - ancient One side of the Jingjing 〇〇 方向 被 被 被 I I I I I I I I I I I I I I I I I I I I 2009 2009 The first scribe line unit 2 0 〇a — 丄, 2 〇 2 is formed on the mother substrate 1 to form a scribe line in the first direction ι, and the :: line unit 2 0 0 b is formed on the mother substrate 形成 to form the second line . φ ... in the embodiment of the towel, exemplified by providing two saponins 2 ◦ 0 a - 1, 2 〇〇a - 2 as the first - then: 兀 2 0 0 a - i, 2 〇〇 a - In the case of 2, two or more plural scribing units may be arranged in iron. The first scribe line: also 2〇〇a 1 2〇〇a-2 is transmitted through the second π to move the second direction π to adjust the interval. 0 a — 1 with 2 2 0 a 0 a —. 2 with 2 2 0 a 2 0 0 b with 2 2 0 b , 0 a —, 1 > b , and 2 4 The description of the 'first stroke showing a 22〇a-2' 24 〇 bars 240a-1, 2 2 2 0 b, and 2 4 〇b shown in the sixth figure is omitted. The eighth figure is a perspective view of the scribing bar in the sixth figure, the ninth figure 17 200938498 is the lower end of the scribing bar in the eighth figure". The above view of the scribing wheel in the ninth figure. As shown in the eighth to the tenth drawings, the drawing has a scribing wheel 22, a support body;;,: 〇 1 16 , a damper 2 2 8 , a heart 92 4 , a pressing member 22, a Japanese name line wheel 2 2 2 is in the line 4 of the scribing project and the mother substrate! Contact and spear Φ into a scribe line. As the scribing wheel 2 2 2 in the mother substrate 1 shaped wheel. In the scribing wheel 2 2 2 = diamond material can be used 2 2 2 a, and the provided strokes and b is sharp. "The edge 222 of the 2 2 2 is drawn. The m wheel 222 is supported by the body 2 2 4 224 has the body and knows the moon." b. In the body a ^ 2 PR . is formed with a through body 2 2 4 hand: = shaw 22 "having a cross section of a circular shape, the 2 4 b system is in a groove 2 2 in a direction perpendicular to the longitudinal direction of the groove 2 2 5 5 is provided on the body 2 2 4 a. The through holes of the two ends of the solid scribing wheel 222 of the shaft pin ?= 2 2 4 1) are formed when the shaft pin 224b is branched. When the scribing wheel 2 2 2 is P 9 . Supporting 蚪, the scribing wheel 2 2 2 is partially located in the cymbal, and a part is protruding below the supporting body 2 2 4. 1 receiving 5 member 2 2 6 thinning on the scribing wheel 2 2 2 and the mother substrate plate 1 The square ★: γ 2 2 is squashed with a certain force to press the base, the work 塾 scribe wheel 2 2 2. For example, press 18 200938498 member 2 2 6 stands on the upper part of the support 2 2 4, The support body 2 2 4 is pressed in the downward direction by the air pressure, thereby pressurizing the scribing wheel 2 2 2. The device 2 2 8 is applied to the scribing wheel 2 2 2 when the scribing process is performed, and vibrates. The oscillator 2 2 8 is used in the internal body 2 2 4 : as the vibration (four) 2 2 8, the ultrasonic vibration can be used. Also, as shown in the third to fifth figures, the mobile unit 3〇〇 = 'Second mobile unit 3〇〇a and second mobile unit 3〇#(4) Single 70 3 0 Q a is to move the first-line unit 2 to the second direction]j to move the second-line unit 2 0 0 a —丄, : mother substrate 1 望 望 ^ , τ Ζ arranged in: the first direction of the cut line of the direction 1. The second movement: the second line makes the second scribe unit 2 follow the parent base line unit 2 〇〇 a 1, 2 〇〇一... Move to the cut line to move. Also, the first move and the second book 彳呤I + 9 n 2 straight, the table shifts - 丨,, the spring is 7G 2 0 〇b linear movement # pieces 3 7 〇. The second moving system is equipped with a first vertical bracket 0, a first bracket 330-1, and a first driving member W ◦. ^ ττ σ d 1 0 is configured such that the 弟--direction ϋ is separated by a certain distance. 0 ^ s? w ^ = straight support table 3] (4) configured to move on the mother substrate along the direction of the I straight line 19 200938498 The substrate 1 can be fixed by the first vertical support stand 3 l at the upper end of the first vertical support table 3 1 引导. 〇, the length direction of the guiding member 370 is arranged at the _37 n. The guiding member 3 Above and below 7 0 Available:: Long groove 372, 374 in direction. Length φ First-scribe unit 2 QQ a — χ is combined with the guiding member 3 7 透过 through the first bracket 3 0 -1, the first secant line _ 2 〇 The cymbal 2 is coupled to the member 370 via the first bracket 330-2. Since the first brackets 33 and 2 have the same configuration, the following description will be made only for the first brackets 330-1. The first bracket 3 3 - as shown in the figure, has a branching plate 332 and a coupling plate 334j. The plate 3 3 2 has a flat rectangular plate shape and is located at one of the guiding members 370. On the side. The coupling plate 3 3 4 has a side plate 3 3 4 a which vertically protrudes from the upper side and the lower side of the support plate 332 from the support plate 3 3 2 , and a long groove 3 7 2 which is formed in the guiding member 3 7 〇 Insert the plate 3 3 4 b. The first drive member 350 provides a driving force to cause the first carriages 3 3 0 - 1 , 3 3 0 - 2 to move linearly along the guide member 370. The "' drive member 3 5 Q has a first lead screw 3 5 2, 3 5 4 in a flat configuration with the guiding member 3 7 。. As shown in the seventh figure, the first bracket 3 3〇1 is mounted to be linearly movable on the first lead screw 35, and is on the first lead screw 354 20 200938498 '/- bracket 3 3 Q — 2 installed to move in a straight line. That is, the first bracket 33〇-1 is inserted into the first lead screw 3 5 2, and the 5 4 'dipole-lead screw 3 5 2 is formed with the female thread portion 3 3 5 formed in the first bracket 〇-1. i (d), and in contrast, the first (four) rod 354 is not inserted into the first guide by the same ground frame 3 3 0 - 2 in a state of being in contact with the hole 3 3 6 - 1 formed in the first bracket 3 - 1 Screw = 3 〇 - 乂: — - lead screw 3 5 2 is penetrated in a state of not forming contact with the truss t hole 3 3 6 - 2, and the opposite The female thread portion 3 3 5 - 2 of the first bracket 3 3 〇 - 2 is coupled to each other. When the driver-guide screw 3 5 2 is driven, a 1 is linearly moved, and the first tray is ? Ω 〇 " 3 0 / Chu a heart 曰 wood 3 3 0 -2 does not move, and m dry 3 5 4 drive, the first - bracket 3 3 0 -] does not move 'but the first - extension 丄 丄 1 ! =, link The first scribe line to the first bracket 3 3 0 - 1 is earlier than 2 Π η η 1 < + -2 of the first secant unit;: connected to the first bracket 33 〇 2 0 0 a — 2 The second direction π private motion 'adjusts the interval between the first scribe unit 2 〇〇 丄, 2 〇〇 a 2 2 The first driver 3 5 3 end of the screw 3 5 is coupled to one end of the first driving screw 3 5 5 to provide a rotational force 2, and is coupled to a first driver 3 5 5 that provides rotation of the first lead screw 3 5 4 . The actuators 3 5 3, 3 are already provided. As an assembly of the first driving member 3 lead screw, a variety of actuators for the first bracket 3 3 〇 1 can be used. J ' can be driven by a motor or the like 5 0 is an example with a motor and can also be used to provide a linear drive with a cylinder like 3 3 0 - 2

The twisting unit 2 〇 〇 a — is attached to the first support: the stay 3 3 2 so as to be movable up and down. For example, 1± p scoop branch j; 5 brother, on the support plate 3 3 2, in the direction: m to form a slit-shaped groove 3 3 i, the first scribing early 2 0 〇a - work The scribing rods 2 2 〇a 1 and 2 4 〇 3 - 1 are respectively combined with the support shaft (not shown) of the insertion guide groove 3 3 1 , and the m-line unit 2 ◦ ◦ b - 2 can also be moved up and down. Since the m bracket 3 3 ◦ - 2 ' is the same as the connection structure of the first scribe line unit 20 〇a-1, the description will be omitted. The second moving unit 3 〇 〇 b is provided with a second vertical support table 3 1CK , a second bracket 33 〇 , and a second drive member 3 50 . The second vertical support table 310' is configured to be spaced apart from the second direction 11 by a certain distance. The second vertical support table 3 1 0' is configured such that when the mother substrate 1 moves linearly along the first direction I, the mother substrate 1 can be disposed through the second vertical support table 310. Further, the 'second vertical support table 31' is configured such that its upper end can be fixedly coupled to the upper end of the first vertical support table to be fixed by the 2009 2009498 guiding member 37 7 . The second scribing unit 2 〇 〇 b ^ / a = is combined with the guiding member 3 7 〇疋 〇疋 has the same as the first gantry described above, and thus the description thereof will be omitted. Brother-drive member 3

0 Second bracket 3 Since the second bracket _ ^ 3 〇 -1 has the same structure 5 〇石 π 1_ second lift QQn, as shown in the fourth figure, you ¥ 托木33〇 along the guiding member 37Ω A ◎ ground provides 'driving force. The second driving: the linear moving fun guiding members 370 are arranged in parallel:: and % as shown in the seventh β-picture, the second bracket 33〇: 352' is movably mounted on the second lead screw 3 5 to be straight Moved in the second bracket 33 (the female threaded portion of the κ, that is, the lead screw 3 5 2 is combined with the 5 3 and the second is connected to the second bracket 3 3), and the second direction is 连Move 0. 〇b is the second drive 353 of the second lead screw 3 5 2 /, and the first two provides the drive of the motor. For example, the driver: 35^. Two drive members? ς n • Although the motor and guide 蟫 γ ^ + t 50 ice + screw cup assembly are used as an example, the belly can also use a linear drive force like the cylinder to the second bracket. A variety of drives. ", 竿 竿 line! Yuan 2 0 0 5 can be moved up and down with the second ^ 3 °, because the connection structure is the same as the above first line 23 200938498 line unit 2 〇〇 omitted. a — 1 The link structure is the same &

The cutting of the substrate in 0 month is suppressed as follows: 2: = early 70 3 〇〇a, 3 0 〇b control the first - mobile work = two! The control unit 40 is the first of the 3 3 0 〇a The driver 3 5 5 and the second mobile unit 3 〇 5 3 ' are from the slave 7 - drive 3 纟. By controlling the first driver 3 5 3 5 - the scribe unit 2 〇〇 moving in the second direction η, can, 敫μ J〇a-2 system - moving n brother - scribe unit 2 〇◦ a second drive cry 35 ;: 2: the interval. Further, by the third control unit 2, the second scribing unit 2〇〇b moves in the direction π. J. The younger brother will explain the process of manufacturing the flat panel display panel by using the above-described configuration, and the substrate cut by 0 is loaded as shown in FIG. 11 and the mother substrate (S 1 0 ) is loaded. The first: mother substrate is subjected to a scribing process (s 2 〇). After the scribe line is formed on the first mother substrate, the mother substrate is inverted (s 3 Q ), and a scribe line (S 4 0 ) is formed on the first mother substrate. For example, &, after the second and second mother substrates are scribed, the cracking process ($50) is performed. If the mother substrate 1 is separated into a plurality of unit units 24 200938498 by the cracking process, the unit substrate It is unloaded (s 6 〇), and the unit substrate is cleaned. Next, the process of performing the scribing process on the mother substrate 1 by the scribing device 1 2 a of the present invention will be described. Fig. 12A to Fig. 12K are views showing a process of generating a scribe line on the mother substrate by using the scribing device of the present invention. The Φ φ mother substrate 1 is placed on the upper plate 2 of the table 2 2 。. The table 丄 2 is linearly moved in the first direction I through a driver (not shown) (12th and 8th). When the table 2 250 moves to the set position (that is, the first cutting planned line a of the mother substrate 排列 is arranged at the position of the second scribe line 2 ◦ 〇b), the movement of the table 120 is stopped ( Twelfth 6th)). Then, in the second scribing unit 200b, the second (four)' of the second moving unit 3 〇〇b is driven under the shape of the first cutting planned line a of the mother substrate in the second direction. The two-dash line unit 2〇〇b moves on one side of the mother substrate 丄. At this time, any one of the scribing bars 22〇b and 2400b of the second scribing unit 20〇b is at a height which can be in contact with the mother substrate χ. The way moves downwards (12th C). In this state, the second driver 3 5 3 of the second moving unit 3 0 0 |3 is driven, and the second scribe line 2 2 〇〇 1 :) is moved to the second mother board 1 . At this time, the second *) and the mother 2 scribe bars 22 〇 b, 24 〇 b "marks. The scribed rods that are in contact with each other are formed on the mother substrate 1 to form a slit k 1 • The y/dress mark is formed on the mother substrate 1, and the element 2 0 0 b=: after the scribe line is formed, the second scribe line is scribed by the bar 2 2 0 b, 2 4 nh # μ + Twelfth 0)) 2 4 0 b Moves upwards ^9 Work Α Ί ^ , 〇丄J 0 is driven by the drive to cry (go m, - direction) linear movement. If the workbench; = and toward the first L Second, the second cutting planned line b of the substrate 1 is arranged in the line bar 'the second scribe line unit 2', the b, 2 4 0 b among the one of the scribe bars 2 2 The height of the contact with the mother substrate 1 is shifted downward (Twelfth E-picture). :: The second drive of the second moving unit 3〇〇b is driven by the second female unit = the scribe unit 2 The two sides nn; the mother substrate 1 moves. At this time, the second scribing unit 2 - the scribing rods of the scribing rods 2 2 0 b, 24 〇 b of the scribe line are formed on the mother substrate 丄Crack: through the smashing of the pre-twist line b, continuously forming cracks, and A scribe line is formed on the substrate 1. After the scribe line is formed, the scribe line 2 2 0 b, 2 4 0 b of the second scribe line 2 〇〇b moves upward (Ten. 26 200938498 2F). In the process described above, the remaining cuttings, springs c, and d are formed on the mother substrate 1, and then the table 20 is passed through a driver (not shown) toward the first stage. Move straight. If the workbench moves to Bodhisattva 1 2 0, the target stops from 2 ^ "王J呀^又疋's position 'stops movement of the mouth 1 2 0 (12th G picture). ◎ After that Driving the first moving unit? η η 5 3 3 5 5 to adjust the interval between the first scribing unit 2 〇〇a - 2, 〇〇a - 2. The first scribing unit ^ 2 factory:: unit! 0 a and move to the previously set ★ ] P, the first scribing unit 2 0 0 a - 1 is arranged at the position of the planned cutting line e of the mother substrate 1), and the first scribing unit 2 is twitched Go to the set position (that is, the first line is 2 ◦ ◦ a - 2 is arranged at the cutting position of the mother substrate). At this time, the first line unit bar, the 24 J 1 line 2 2 〇a — two in the middle The scribe line Ί is moved downward with the scribe line 2 2 〇a _ 1 of the mother substrate 〇〇a-2, and the first scribe unit 2 -2 ' 2 4 0 a — 9 — A streak bar 22〇a — 2, 24〇a moves downwards in a height that is in contact with the 14 mother substrate 1 (12th Η). The operation is performed in the first scribing unit 2 〇〇a 丄, 2 〇◦ a 2 27 200938498 in the direction of the a direction, arranged in the state of the cutting line e, f of the mother substrate ,, working a 彳 U σ 1 The 20-axis is moved linearly in the first direction by the driver (not shown). When the table 1 2 0 is moved to the position where the 丨 is set, the position of the line is formed on the mother substrate 1 along the predetermined predetermined taste e and f of the mother substrate 1 . ] Work 1 1 2 0 moves stop (Twelfth! Figure). ° Spears unit 3 〇 的 a drive 3 ah knife

3 5 5 'moving the first scribe unit 2 0 0 a — 1 , 2 〇 π 卜 2 so that the first scribe unit 2 0 0 a — !, 2〇〇a ^ can be arranged on the cut line g, h. The first scribe line unit 2 〇〇a-1 is transmitted through the position set by the first moving unit 30 ( (that is, the position of the first scribe unit 2 0 0 a 1 (four) at the planned cutting line g of the mother substrate i ), and the :: a few 2 0 0 a - 2 is moved to the set position (that is, the pre-: = unit 2 0 0 a - 2 is arranged at the position of the cut-off line h of the mother substrate 1). At this time, the first line of the line to the 1st line 2 2 0 a - work, 24 〇: the line bar 2 2 〇 1, 1, 0a - 丄 2 in the height of the contact plate 1 approach downwards Move, and the first line of the 20-a-2, 2, 2, 4, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2 The position moves downwards at a height that can be in contact with the mother substrate 1 (Twelfth J-J). 28 200938498: Section: scribe unit 2〇〇a—work, 2〇〇2 to 1 row: on the mother substrate 1 Cutting schedule:: The first side:::12 0 is transmitted through the drive (not shown), and the movement is fixed. If the table 12 moves to ", (ie, along the mother substrate) When the cutting planned line T of 1 is in the position where the scribe line is formed on the mother substrate 1, the movement of the operation ΔI20 is stopped (Twelfth K-th). The scribe line device of the present invention and the above description The substrate is cut on the plane of the mother substrate, and a scribe line of the second direction 例如 is formed in the direction of the alignment of the unit substrate, for example, and then the first direction perpendicular to the second direction n is formed in a state where the mother substrate is rotated. 1 Here, the order in which the scribe lines are formed is merely an example, and it is also possible to first form a scribe line of the first direction work and then form a scribe line which is perpendicular to the second direction perpendicular to the first direction work. When the substrate is not rotated during the formation of the scribe line, the overall engineering time can be shortened, whereby the productivity of the scribe line can be improved. The above description is merely illustrative of the technical idea of the present invention, as long as it is The present invention is not limited to the embodiments of the present invention, and various modifications and variations are possible without departing from the spirit and scope of the invention. The thinker only uses 29 200938498 to explain it and not to pass the scope of this technical idea. + Huan Ba "Mu Yuliang 疋 发 依 依 依 依 依 : : : : : : : : : : : : : : : : : : : : : : : Patented by the present invention =: All the above is only a preferred and feasible embodiment of the present invention,

==:! The scope of protection, therefore, the use of the invention (3) Miao Gonghe's equivalent technical changes are included in the scope of protection of this law, and is given to Chen Ming. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a schematic view showing an example of a mother substrate. The third diagram of the substrate cutting device of the present invention shows a portion of the present invention provided by the scribe line portion of the second figure. A perspective view of a line device embodiment. = Four figures show the top view of the scribing device of the third figure. The f-figure shows a side view of the support member of the third figure. The sixth figure shows an enlarged view of the "A" portion of the third figure. Figure 7A is a cross-sectional view showing the coupling relationship between the bracket and the lead screw of the sixth drawing. Fig. 7B is a cross-sectional view showing the coupling relationship between the bracket and the lead screw of the sixth figure. The younger brother, EJ, is a three-dimensional diagram of the inscribed stick of the six-figure. 30 200938498 The ninth figure shows a cross-sectional view of the eighth figure. Part of the ί5 section 5 shows the top view of the scribe wheel of the ninth figure. Positioning = The flow of the process of using the substrate cutting device of the present invention to display the thousands of displays is sequentially displayed. The twelfth A picture shows the production of the (four) line on the substrate (4). The U-line device is shown in the parental Fig. 12B showing a process diagram for generating a scribe line on the substrate using the present invention. The s-tapping device shows a process diagram for generating a scribe line on the substrate using the present invention in the mother's eleventh C-picture system. -〗 〖,, 泉凌在母 The 12th D-picture shows the process diagram for generating scribe lines on the substrate. The line device is shown in Fig. 12E. A process diagram for generating a scribe line on the substrate is used. The illusion and the spring are placed in the mother. The twelfth F-picture shows the process diagram for generating the scribe line on the substrate. The line device shows a process diagram for generating a scribe line on the substrate using the present invention in the eleventh G-ray system. The ^ line device is shown in the figure of the eleventh figure: a process diagram for generating a line on the substrate of the present invention. The clever lining device is shown in the eleventh figure. The ^ line device in the mother's twelfth J picture shows the monthly scribing device on the mother 200938498 substrate to create a process diagram of the line. The twelfth gamma diagram shows a process diagram for generating a scribe line on a mother substrate using the scribing apparatus of the present invention.

[Description of main component symbols] Mother substrate 1 First mother substrate 2 Unit substrate 2 a Second mother substrate 3 Early substrate 3 a Substrate cutting device 1 装载 Loading portion 1 1 Scribe portion 1 2 Scribe device 12 a Branch Member 10 0 Table 12 0 Upper plate 12 2 Lower plate 12 4 Drive unit 14 0 Long groove 1 4 1 Guide member 14 2 Bracket 1 4 4 Base plate 1 4 5 Support plate 14 7 32 200938498 Bonding plate 14 9 Side plate 14 9 a Inserting plate 14 9 b scribe unit 2 0 0 . First scribe unit 200a-1 scribe line - 1, 24 〇 a - 1 - first scribe unit 200a - 2 划线 scribe 2 2 0 a - 2 , 240a — 2 scribe bar 2 2 0 a scribe wheel 2 2 2 through hole 2 2 2 a edge 2 2 2 b support 2 2 4 body 2 2 4 a shaft pin 2 2 4 b ^ pressing member 2 2 6 oscillator 228 second scribe unit 2 0 0 b . scribe bar 2 2 0b, 2 40b . mobile unit 3 0 0 first mobile unit 3 0 ◦ a first vertical support table 310 first bracket 3 30 — 1,330 — 2 Guide groove 3 31 33 200938498 Support plate 3 3 2 Bond plate 3 3 4 Side plate 3 3 4 a Insert plate 3 3 4 b

Female threaded portion 335 — 1, 335 — 2 hole 336 — 1, 336-2 First driving member 3 5 0 First lead screw 3 5 2 First driver 3 5 3, 3 5 5 First lead screw 3 5 4 Second moving unit 3 0 Ob Second vertical support table 3 1 (Γ Second bracket 3 3 0 female thread portion 3 3 5 / second driving member 3 5 (Γ second lead screw 3 5 2 / second driver 3 5 3 ' Guide member 370 Long groove 3 7 2, 3 7 4 Control unit 4 0 0 Base B First direction I Second direction Π Third direction Π 34 200938498 Broken part 1 3 Unloading part 1 4 Inverting part 1 5

Claims (1)

200938498 VII. Scope of application for patents: 1. A kind of scribe device, which is used to form a slab for separating into a unit substrate, and the base plate ί 线 ΐ ΐ ' The mother substrate may have a plurality of scribe lines directly in the first direction, and the # 路径 f f is used to move the target member to the scribe line unit: the unit ” is formed on the mother substrate to form the first-side- Forming a scribing device perpendicular to the aforementioned second item 1 to the mother substrate, wherein 1 is provided by a plurality of the first ones of the first query/, -中^^;t"ΐ®42^^^^ ;^ either side of the scribe unit. /, the narration-line unit in the first step further includes the scribing device described in the above page, wherein the plurality of the first plurality of the A southbound cut off the scheduled line. The younger w line moves a few times toward the aforementioned second direction, as in the patent application scope, the foregoing first-moving unit includes the scribing device described in the fourth item, wherein the hs rod system: is respectively connected by line units; It is the first bracket of the second party and the second bracket, and the second, the device is respectively made of the above; the screw "the bracket is formed with the first - snail", any one of the 36th 200938498 200938498 guide η The first-lead screw screwing further includes a scribing device as described in item 5 of the t-li range, and the X-ray stalk-moving early sputum, the transmitting machine 1 has a cutting line in the second direction to make the aforementioned The second *two single "the first moving unit of the cymbal" has: a line early movement 该 the second ^, wood, is coupled to the second second-guide screw, is inserted in the aforementioned 'axial axis is the aforementioned The second direction is parallel; and the taper is a tray, and is configured to c' such that the second guide and the second guide (2) r bracket are formed with the second female thread portion and the foregoing first package: The scribing device, wherein the second lead screw is parallel, for describing the linear movement of the aforementioned frame. Mitomu and the description of the second support 8 as claimed in the scope of patents? Ten knots. ^, wherein the aforementioned first book # 单 $ $ ^ ^ 弟 3 3 3 3 3 3 3 3 划线 划线 划线 划线 划线 划线 划线 第二 划线 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二Forming a book bar in the opposite direction, following the first direction = bar, followed by the second, a substrate cutting device comprising: jir loading a mother board forming a plurality of unit substrates The generating unit' is configured such that the "mounting portion (four) portion" delivered by the loading portion is separated from the mother substrate to form a unit substrate; the scribe line on the P mother substrate is formed by the first two. The separated unit substrate is unloaded, and the 'the aforementioned scribe line portion includes: 37 200938498 moving the centering member system, placing the viewing mother substrate and being able to move in the direction of the straight line in the first direction = ΐ = the path of the first supporting member is in front = The board is formed in the first square direction and the second side is provided in the front direction and the second direction. The line unit is formed on the mother substrate to the second direction. The plurality of first strokes can be arranged in the aforementioned mother mr The first complex = the first - the 'line' line alignment. The j-division of the direction of the cut-off preset, the substrate cutting rods described in the item are _ _ _ _ _ _ _ _ _ _ _ The male-bracket, and the ◎, respectively, are rotated by the susceptor-guide screw, and the guide is used as the guide; the rod is: the ridge, and the substrate is cut off. The cutting of the second direction 1 ^ follows the movement of the mother substrate, the second moving unit includes moving the second line unit (2); the rod element; the axial direction is the second direction Ping r: and the younger brother holds a $, and is configured to (10) support (four) turn, Fang Leyi to the threaded part to screw with the above-mentioned 38 200938498 two-lead screw. € Please cut the substrate as described in item 12 of the patent scope The second member of the second bracket is configured to be parallel with the first guide member and the second guide screw, and the second bracket of the H cup is moved linearly. The bracket and the foregoing 14 are as set forth in the scope of the patent application, wherein the first-stitching unit and the board cutting device and the second one are respectively provided To the opposite side of the line, the line is in the direction of the above-mentioned first direction:: phase with:: with the wire rod, followed by the aforementioned second 15, as set forth in the patent application, ^ front material base (four) plane (four) Substrate cutting device=the parent substrate of the unit substrate, the unit method, wherein the plurality of scribe lines include: a square movement K-shaped into the early substrate; a straight line with the mother substrate... a second scribe unit, Followed by the side of the above-described scribe line unit, and arranged in the direction of the other side, the scribe line is formed by the first-first direction, and the first two sides of the mother substrate are: m, The line unit is fixed to the first method of the mother substrate, wherein the mother substrate: the line: 'the first line is formed in the second direction. The younger brother moves in the direction of the line, and the second clearing element is formed by the '^^ 固固39 200938498 method, and the substrate cutting method 范围 ?:?~_ line system described in the 17th item simultaneously forms a plurality of lines. The front side of the method is formed on the board; the space between the fourth direction and the element is formed on the board, and the second base is described in the base unit 20, as described in the seventh paragraph of the patent application. The line unit may be arranged on the mother substrate while moving the mother substrate along the second 乂=cutting line to be arranged on the mother substrate. 40