200938329 六、發明說明： 【發明所屬之技術領域】 本發明係關於使工具與被加工物相對移動，對該被加 工物進行加工之工作機械。 【先前技術】 近年，對工作機械之高精度加工的要求逐漸高漲。工 ❹ 作機械的加工精度，受到安裝工件之機台、支承主軸之鞍 台等的移動平滑度、移動的真直度、移動與主軸中心線之 平行度及直角度等、機械本體的幾何學的精度大幅地左右 ，藉由加工中之工具與件之相對位置的精度所決定。 又，爲了將工件予以高精度地加工，工作機械本身需 要維持高尺寸精度。即，不僅構成工作機械之機台、鞍台 等的構造體，支承這些構件的移動並且成爲該移動的基準 之底座、柱體等的構造體之位置精度也變得重要。因此， G 這些構成工作機械之構造體，爲了不會因應力等而產生變 形，以具高剛性地加以設計，並且不會受到振動所影響地 加以設計。 然而，工作機械會受到從其本身所產生的熱所影響， 或受到周圍的溫度所影響，會有使構成該機械的構造體產 生熱膨脹，進而變形之情況。即，在工作機械，因該運轉 ，使得各種馬達、工具、工件等成爲熱的產生源，該熱傳 達至構造體而產生熱變形。又’因工作機械的設置環境的 溫度變化、溫度分布差，使得構造體也在前後左右上下的 -5- 200938329 各部產生溫度差，造成倒塌、翹曲等的熱變形。如此，當 在構造體產生熱變形時，則會有主軸傾斜，使工件的加工 精度降低之虞。 因此，以往以來，對因工作機械本身的發熱、工作機 械週邊的溫度環境所致之工件的加工精度，提出各種對策 。爲了解決這種問題之工作機械，如專利文獻1，2所揭 示者。 [專利文獻1] 日本特開平4-82649號公報 [專利文獻2] 日本特開平6— 39682號公報 【發明內容】 [發明所欲解決之課題] 在此，在工作機械，支承工具之主軸係藉由複數個構 造體，可朝其各軸方向移動，因藉由此主軸的移動，會有 在構造體產生變形之情事。 例如，在橫式搪床這種的工作機械，將支承主軸之鞍 0 台可在柱體的側面移動地支承，並且柱體本身也可移動。 因此，當特別是成爲大型化者時，柱體的高度變高，且鞍 台的重量變重，因此，隨著鞍台朝上方移動，柱體的變形 (傾斜）變大，不易保持鞍台的上下移動之真直度。又， 在使柱體移動之情況，影響到支承該移動之底座的真直度 ，造成柱體一邊會產生角度偏差（間距、滾轉角、偏離角 )一邊移動，造成在該柱體產生變形（傾斜）。其結果’ 會有在主軸的前端位置產生誤差，使工件的加工精度降低 -6- 200938329 之虞。 但，在以往的工作機械，針對上述這種因主軸對各軸 方向之移動索引起的柱體的變形並未講求任何對策，會有 導致加工精度降低之虞。即，爲了達到更高的加工精度， 不僅需要考量因工作機械本身的發熱、工作機械週邊的溫 度環境所致之構造體的熱變形，也需要考量因主軸對各軸 方向之移動所引起的構造體的變形。 〇 因此，本發明係爲了解決上述課題而開發完成之發明 ’其目的在於提供，即使因主軸對各軸方向之移動造成柱 體變形，也能防止加工精度降低之工作機械。 [用以解決課題之手段] 用以解決上述課題之第1發明之工作機械係使工具與 被加工物相對移動，對該被加工物進行加工之工作機械， 其特徵爲： © 鞍台，其是將可裝卸地裝設前述工具之主軸可旋轉地 加以支承； 柱體，其是將前述鞍台可移動地支承，且設置成可移 動； 柱體變形檢測手段，其是檢測因前述鞍台及前述柱體 的至少其中一方的移動所產生之前述柱體的變形；及 補正手段，其是依據前述柱體變形檢測手段的檢測結 果，對前述工具及被加工物的至少其中一方的移動進行補 正。 200938329 用以解決上述課題之第2發明之工作機械，其中’ 前述柱體變形檢測手段係具備有： 垂直地垂吊於前述柱體之被測量部；及 測量前述柱體與前述被測量部之間的距離之測量手段 〇 用以解決上述課題之第3發明之工作機械，其中， 前述柱體變形檢測手段具備有：使前述被測量部的擺 動衰減之衰減手段。 用以解決上述課題之第4發明之工作機械，其中， 前述柱體變形檢測手段係具備有： 安裝於前述柱體，用來收容黏性流體之容器； 經由線材（wire )垂直地垂吊於前述柱體之垂吊構件 經由球面襯套，上端被支承於前述垂吊構件，具有被 測量部之第1棒狀構件； 經由球面襯套，上端被支承於前述垂吊構件，下端進 入到前述容器的黏性流體中之第2棒狀構件；及 安裝於前述柱體，測量到前述被測量部爲止的距離之 距離感測器。 用以解決上述課題之第5發明之工作機械，其中， 將前述柱體變形檢測手段設置於前述柱體內。 [發明效果] 因此’若根據本發明之工作機械的話，即使因主軸對 -8 - 200938329 各軸方向之移動造成柱體變形’也能藉由所檢測之柱體的 變形量，補正工具及被加工物的至少其中—方的移動’能 夠防止加工精度降低。 【實施方式】 以下，根據圖面，詳細說明關於本發明之工作機械。 圖1係本發明的一實施例之工作機械的槪略斜視圖，圖2 φ 係柱體變形檢測裝置的槪略構成圖，圖3係柱體的橫斷面 圖，圖4係顯示柱體朝X軸方向之變形的狀態之槪略圖 ，圖5係顯示柱體朝Z軸方向之變形的狀態之槪略圖。再 者，各圖中所記載之X軸方向、Y軸方向、及Z(W)軸 方向，分別顯示正交的正交3軸方向者，顯示機械前後方 向、機械上下方向、及機械寬度方向。又，下述所記載之 本實施例，爲將本發明之工作機械適用於大型的橫式搪床 者。 Ο 如圖1所示，在大型的橫式搪床之工作機械1，設有 固定於地面之底座11，在此底座11的上面，設有延伸於 X軸方向之左右一對的導軌12a、12b。在導軌12a、12b ’柱體基座13可朝X軸方向滑動地被支承著，在此柱體 基座13的上面，立設有中空狀的柱體1。因此，藉由將 由未Η示的柱體驅動馬達、柱體輸送螺旋機構等所構成之 柱體驅動手段驅動，使得柱體基座13(柱體14)可朝X 軸方向移動可能。 在柱體1 4的前面（後述的側壁1 4 b )，設有延伸於 200938329 Y軸方向之左右一對的導軌15a、15b，在此導軌15a、 15b，鞍台16可朝Y軸方向滑動地被支承著。因此，藉 由使未圖示之鞍台驅動馬達、鞍台輸送螺旋機構等所構成 之鞍台驅動手段，可使鞍台16朝Y軸方向移動。 在鞍台16，形成有貫通於Z軸方向之導引部17，在 此導引部17內，衝柱（ram) 18可朝Z軸方向滑動地被 支承著。因此，藉由使由未圖示的衝柱驅動馬達、衝柱輸 送螺旋機構等所構成之衝柱驅動手段驅動，使得衝柱18 0 可朝Z軸方向移動。 在衝柱18內，主軸19可旋轉且可朝W軸方向滑動 地被支承著，在此主軸19的前端，進行預定的加工之工 具T可裝卸地被裝設著。因此，藉由使由未圖示的主軸旋 轉馬達等所構成之主軸旋轉手段驅動，使得主軸19可在 W軸周圍旋轉，進一步使由未圖示的主軸驅動馬達、主軸 輸送螺旋機構等所構成之主軸驅動手段驅動，主軸19可 朝W軸方向移動。 ◎ 又，在底座11的側方，設有固定於地面之機台底座 21，在此機台底座21的上面，設有延伸於Z軸方向之前 後一對的導軌2 2a、22b。在導軌22a、2 2b，機台座23可 朝Z軸方向滑動地被支承著，且在此機台座23的上部， 旋轉機台24可旋轉地被支承著。又，在旋轉機台24的上 面，工件（被加工物）W可裝卸地被裝設著。因此，藉由 使由未圖示的機台驅動馬達、機台輸送螺旋機構等所構成 之機台驅動手段驅動，機台座23(旋轉機台24)形成爲 -10- 200938329 可朝Z軸方向移動，且藉由使由未圖示的機台旋轉馬達等 所構成之機台旋轉手段驅動，旋轉機台24成爲可在Y軸 周圍旋轉。 又，在工作機械1，設有用來控制該工作機械1全體 之NC裝置（補正手段）50。此NC裝置50連接於上述各 驅動手段及各旋轉手段等，切換工具T及工件W之移動 方向、移動速度等，並且調整這些之移動量、旋轉量，進 ❹ 行該工具T及工件w之定位控制、工件W之分度控制。 藉此，工具τ與工件W相對地移動，工件W被加工成預 定的形狀。 如圖2及圖3所示，柱體14具有上壁14a及側壁 14b、14c、14d、14e，形成爲中空狀。在這樣的柱體14 內，柱體變形檢測裝置（柱體變形檢測手段）30以垂直 地垂吊於上壁14a的下面之方式被支承著。 柱體變形檢測裝置30具有柔軟的2條線材31，這些 ❹ 線材31的兩端部安裝於上壁14a的下面。在線材31，垂 吊構件33經由通過用構件32垂吊著，在此垂吊構件33 ，懸吊棒（第1棒狀構件，第2棒狀構件）35、36經由 球面襯套34安裝著。再者，關於線材31，其材質、粗細 度等可任意地設定，但，即使柱體14產生變形而傾斜， 也能常時地垂直地垂吊這種之低剛性者即可。 在懸吊棒35的軸方向中間部及下端，設有被測量構 件3 7、3 8。在被測量構件3 7，形成有被測量面（被測量 部）37a、37b，在被測量構件38，形成有被測量面（被 -11 - 200938329 測量部）38a、38b。被測量面37a、38a形成爲與X軸方 向正交之平面，而被測量面37b、38b形成爲與Z軸方向 正交之平面。又，在懸吊棒36的下端，設有配重39。 又，在側壁1 4b的內面，上下一對的距離感測器（測 量手段）40a、40b以與被測量面37a、38a相對向的方式 被設置著，並且在側壁14e的內面，上下一對的距離感測 器（測量手段）41a、41b以與被測量面37b、38b相對向 的方式被設置著。距離感測器40a、40b、41a、41b係爲 非接觸式的感測器，其中，距離感測器40a、40b常時測 量到被測量面37a、38a爲止的距離’並且’距離感測器 41a、41b常時測量到被測量面37b、38b爲止的距離。進 —步，在距離感測器40a、40b、41a、41b’連接著NC裝 置50，藉由這些距離感測器40a、40b、41a、41b所測量 到的測量距離（檢測結果）被輸入至NC裝置50。 又，在側壁14d的內面，經由未圖示的支承構件，支 承著承油盤（容器）42。在承油盤42，儲存有高黏性流 體之油43，懸吊棒36進入到此承油盤42的油43中。再 者，承油盤42及油43爲構成衰減手段者。 即，在NC裝置50，從藉由距離感測器40a、40b所 側量到的至被測量面37a、38a爲止之測量距離差，運算 柱體14朝X軸方向之變形量（傾斜量），並且從藉由距 離感測器41a、41b所側量到的至被測量面37b、38b爲止 之測量距離差，運算柱體14朝Z軸方向之變形量（傾斜 量）。然後，依據所運算之柱體14朝X軸方向及Z軸方 -12- 200938329 向之變形量’補正各驅動手段的驅動，進行工具τ及工 W之位置控制’來將工件w加工成預定的形狀。 又’即使因外亂振動等，造成懸吊棒35、36與垂 構件33 —同擺動’也由於懸吊棒36的擺動被承油盤 的油43迅速地衰減，故，懸吊棒35的擺動也在短時間 哀減。 因此，在藉由工作機械1對工件w進行加工的情 Φ ’將工件w裝設於旋轉機台24的上面，使機台座23 Ζ軸方向移動，將工件W移動至加工位置。接著，藉 主軸19，一邊使工具Τ旋轉，一邊使柱體14朝X軸方 移動，或使鞍台16朝Υ軸方向移動，或使衝柱18朝 軸方向移動，或使主軸19朝w軸方向移動。又，亦可 應需要’使旋轉機台24旋轉，用以進行工件W之分度 轉。藉此，進行藉由工具Τ對工件W之加工。 在此，如上述般’在進行工件W之加工時，需要 〇 工具τ朝X軸方向、Υ軸方向、Ζ軸方向、W軸方向中 至少其中1方向移動，特別是在使工具Τ朝X軸方向 Υ軸方向移動之情況，柱體14容易變形。因此，會有 柱體14變形’造成在主軸19的前端位置產生誤差，使 加工精度降低之虞產生。 即，在橫式搪床這種的工作機械1，由於其構造爲 可旋轉地支承主軸19之鞍台16在柱體14的側壁14b 移動地予以支承，故，如圖4所示，當使鞍台16朝Y 方向移動時，以柱體基座13與柱體14之接合點作爲基 件 吊 42 內 況 朝 由 向 Z 因 旋 使 之 及 因 得 使 可 軸 準 -13- 200938329 ，柱體14朝X軸方向傾斜。特別是在當工作機械1成爲 大型者時，柱體14的高度高、且鞍台16的重量變重，因 此’由於使鞍台16朝上方移動，使得柱體14的變形變多 ’變得無法保持鞍台16的上下移動之真直度。 又，在將柱體14(柱體基座13)在底座11上朝X 軸方向移動之情況，影響到底座11、導軌12a、12b的真 直度’造成柱體14 一邊角度偏差（間距、滾轉角、偏離 角）一邊移動。因此，如圖5所示，以柱體基座13與柱 體14之接合點爲基準，柱體14朝Z軸方向傾斜。 且，如圖3所示，柱體14的側壁14b、14d的厚度， 會因導軌15a、15b形成於側壁14b而有所不同，在厚壁 之側壁14b與薄壁之側壁14d，在熱容量上會產生差。因 此，當各驅動手段及旋轉手段 '工具T、工件W等發熱 ，或工作機械1的設置環境的溫度改變時，比起熱容量大 的側壁14b，熱容量小的側壁1 4d變得容易熱變形，其結 果，使柱體14朝X軸方向傾斜。 如此，當在柱體14產生朝X軸方向及Z軸方向之變 形時，在主軸19的前端位置產生誤差，會有造成工件W 之加工精度降低之虞。因此，在工作機械1，藉由設置於 柱體14內之柱體變形檢測裝置30，對該柱體14直接且 常時地檢測複合性產生之變形。 即，在使鞍台16朝Y軸方向移動，而在柱體14產 生朝X軸方向之變形情況、及因工作機械1本身的發熱 、設置環境的溫度變化，造成在柱體14產生朝X軸方向 -14- 200938329 之熱變形的情況，首先，藉由距離感測器40a、40b，測 量到被測量面37a、38a爲止的距離。然後，將所測量到 的測量距離輸入至NC裝置50，然後，藉由該NC裝置50 運算該差。接著，NC裝置50從該所運算之測量距離差， 運算柱體14朝X軸方向之變形量，依據此變形量，補正 各驅動手段的驅動，進行工具T及工件W之位置控制。 又，在使柱體14朝X軸方向移動，而在柱體14產 〇 生朝Z軸方向之變形的情況，首先，藉由距離感測器41 a 、4 1 b，測量到被測量面3 7b、3 8b爲止之距離。然後，將 這些所測量到的測量距離輸入至NC裝置5 0，藉由該NC 裝置50，運算該差。接著，NC裝置50從該所運算之測 量距離差，運算柱體14朝Z軸方向之變形量，依據此變 形量，補正各驅動手段的驅動，進行工具T及工件W之 位置控制。 因此，若根據本發明之工作機械的話，在藉由工具T Ο 進行對工件w之加工時，利用以柱體變形檢測裝置3 0 , 檢測當柱體14、鞍台16等移動時所產生之柱體14對X 軸方向及Z軸方向的變形後，再藉由NC裝置，依據該檢 測結果，補正各驅動手段的驅動，進行工具T及工件W 之位置控制，藉此，能夠防止加工精度降低。 又，在柱體變形檢測裝置30，利用經由球面襯套34 將懸吊棒35、36的上端支承於以線材31所垂吊之垂吊構 件33，並且使懸吊棒36的下端進入到承油盤42的油43 ，藉此，即使在柱體14產生外亂振動，不僅能在短時間 -15- 200938329 衰減懸吊棒35、36的擺動，並且可將該懸吊棒35、36常 時保持於靜止在垂直方向之狀態。其結果，藉由距離感測 器40a、40b、41a、41b，可直接並迅速、正確地測量到 被測量構件37、38的被測量面37a、37b、38a、38b爲止 之距離。且，藉由將柱體變形檢測裝置30設置於柱體14 內’可謀求省空間化，因此，也不需要將工作機械1作成 爲必要以上之大型化者。 [產業上之利用可能性] 本發明能夠適用於，針對機具中心等的工作機械，防 止因已被固定之柱體的熱變形所引起之加工精度降低的熱 變形防止構造。 【圖式簡單說明】 圖1係本發明的一實施例之工作機械的槪略斜視圖。 圖2係柱體變形檢測裝置的槪略構成圖。 圖3係柱體的橫斷面圖。 圖4係顯示柱體朝X軸方向之變形的狀態之槪略圖 〇 圖5係顯示柱體朝Z軸方向之變形的狀態之槪略圖。 【主要元件符號說明】 I :工作機械 II :底座 -16- 200938329 12a、12b ：導軌 1 3 :柱體基座 1 4 :柱體 14a :上壁 1 4 b ~ 1 4 e :側壁 15a、15b ：導軌 1 6 :鞍台 © 17 :導引部 1 8 :衝柱 19 :主軸 21 :機台底座 22a、22b ：導軌 23 :機台座 2 4 ·旋轉機台 3 〇 :柱體變形檢測裝置 φ 3 1 :線材 32 :通過用構件 3 3 :垂吊構件 3 4 :球面襯套 3 5、3 6 :懸吊棒 3 7、3 8 :被測量構件 37a、37b、38a、38b ：被測量面 39 :配重 40a、 40b、 41a、 41b ：距離感測器 -17- 200938329 42 :承油盤 43 :油 50 : NC裝置 T :工具 W :工件200938329 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a work machine for moving a tool and a workpiece to process the workpiece. [Prior Art] In recent years, the demand for high-precision machining of working machines has been increasing. The machining accuracy of the machine is the movement smoothness of the machine table on which the workpiece is mounted, the saddle that supports the main shaft, the straightness of the movement, the parallelism of the movement and the spindle center line, and the straight angle, etc. The accuracy is largely determined by the accuracy of the relative position of the tool and the part being machined. Moreover, in order to process the workpiece with high precision, the work machine itself needs to maintain high dimensional accuracy. In other words, it is important that the positional accuracy of the structure such as the base or the column which serves as the reference for the movement of the structure, such as the machine body or the saddle, which constitutes the machine tool. Therefore, these structures constituting the working machine are designed to be highly rigid so as not to be deformed by stress or the like, and are designed without being affected by vibration. However, the working machine is affected by the heat generated by itself, or is affected by the surrounding temperature, and the structure constituting the machine is thermally expanded and deformed. That is, in the working machine, various motors, tools, workpieces, and the like are generated as heat sources, and the heat is transmitted to the structure to cause thermal deformation. In addition, due to temperature changes and temperature distribution in the setting environment of the working machine, the structure is also subjected to temperature difference in each part of the front, rear, left, and right, and is caused by thermal deformation such as collapse and warpage. Thus, when the structure is thermally deformed, the spindle is tilted, and the machining accuracy of the workpiece is lowered. Therefore, in the past, various measures have been proposed for the machining accuracy of the workpiece due to the heat generated by the working machine itself and the temperature environment around the working machine. A working machine for solving such a problem is disclosed in Patent Document 1, 2. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. With a plurality of structures, it is possible to move in the direction of each axis, and the structure may be deformed by the movement of the main shaft. For example, in a working machine such as a horizontal boring machine, the saddle supporting the main shaft can be movably supported on the side of the cylinder, and the cylinder itself can also be moved. Therefore, when the size of the column is increased, the height of the column becomes high, and the weight of the saddle becomes heavier. Therefore, as the saddle moves upward, the deformation (tilt) of the column becomes large, and it is difficult to maintain the saddle. The straightness of the up and down movement. Moreover, in the case of moving the cylinder, the true straightness of the base supporting the movement is affected, and the cylinder body is moved while causing angular deviation (pitch, roll angle, off-angle), causing deformation (tilt) in the cylinder. ). As a result, there is an error in the front end position of the spindle, which lowers the machining accuracy of the workpiece -6-200938329. However, in the conventional working machine, there is no countermeasure against the deformation of the cylinder due to the movement index of the main shaft in the direction of each axis, and the machining accuracy is lowered. That is, in order to achieve higher machining accuracy, it is necessary to consider not only the heat generated by the working machine itself but also the thermal deformation of the structure caused by the temperature environment around the working machine, and also the structure caused by the movement of the main shaft to the respective axes. Body deformation. Therefore, the present invention has been developed in order to solve the above problems. The object of the invention is to provide a working machine capable of preventing a reduction in machining accuracy even if the cylinder is deformed by the movement of the main shaft in the direction of each axis. [Means for Solving the Problem] The working machine according to the first aspect of the invention for solving the above-mentioned problems is a working machine that relatively moves a tool and a workpiece, and processes the workpiece, and is characterized by: The spindle is rotatably mounted to detachably mount the tool; the cylinder is movably supported by the saddle and is configured to be movable; and the cylinder deformation detecting means detects the saddle And a deformation of the column body caused by movement of at least one of the pillars; and a correction means for performing movement of at least one of the tool and the workpiece according to a detection result of the column deformation detecting means Correction. 200938329 The working machine according to the second aspect of the invention, wherein the column deformation detecting means includes: a measuring portion vertically suspended from the column; and measuring the column and the portion to be measured In the working machine according to the third aspect of the invention, the column deformation detecting means includes means for attenuating the oscillation of the portion to be measured. In the working machine according to the fourth aspect of the invention, the column deformation detecting means includes: a container attached to the column for accommodating a fluid; and vertically suspended by a wire The hanging member of the column body is supported by the hanging member via a spherical bushing, and has a first rod-shaped member of the portion to be measured; the upper end is supported by the hanging member via the spherical bushing, and the lower end enters the aforementioned a second rod-shaped member of the viscous fluid of the container; and a distance sensor attached to the column and measuring the distance from the portion to be measured. In the machine tool according to the fifth aspect of the invention, the column deformation detecting means is provided in the column body. [Effect of the Invention] Therefore, if the working machine according to the present invention is used, even if the column body is deformed due to the movement of the main shaft pair -8 - 200938329, the deformation amount of the cylinder can be corrected, the correction tool and the At least one of the movements of the workpiece can prevent the processing accuracy from being lowered. [Embodiment] Hereinafter, a machine tool according to the present invention will be described in detail based on the drawings. 1 is a schematic oblique view of a working machine according to an embodiment of the present invention, FIG. 2 is a schematic structural view of a φ-type cylinder deformation detecting device, FIG. 3 is a cross-sectional view of the cylinder, and FIG. 4 is a cylindrical body. A schematic diagram of a state of deformation in the X-axis direction, and FIG. 5 is a schematic diagram showing a state in which the cylinder is deformed in the Z-axis direction. Further, in the X-axis direction, the Y-axis direction, and the Z (W)-axis direction described in each drawing, the orthogonal three-axis directions are displayed, and the machine front-rear direction, the machine vertical direction, and the mechanical width direction are displayed. . Further, the present embodiment described below is applied to a large horizontal trampoline in the working machine of the present invention. As shown in Fig. 1, a working machine 1 for a large horizontal boring machine is provided with a base 11 fixed to the ground, and a pair of left and right guide rails 12a extending in the X-axis direction are provided on the upper surface of the base 11 12b. The column bases 13 are slidably supported in the X-axis direction on the guide rails 12a and 12b', and a hollow column 1 is erected on the upper surface of the column base 13. Therefore, the column base 13 (column 14) can be moved in the X-axis direction by driving the column driving means constituted by a column driving motor, a column conveying screw mechanism or the like which is not shown. A pair of left and right guide rails 15a and 15b extending in the Y-axis direction of 200938329 are provided in front of the column body 14 (the side wall 1 4 b to be described later), and the rails 15a and 15b can slide the saddle 16 in the Y-axis direction. The ground is supported. Therefore, the saddle 16 can be moved in the Y-axis direction by a saddle driving means including a saddle driving motor (not shown) and a saddle conveying screw mechanism. In the saddle 16, a guide portion 17 penetrating in the Z-axis direction is formed, and in this guide portion 17, a ram 18 is slidably supported in the Z-axis direction. Therefore, the punch 18 0 can be moved in the Z-axis direction by driving the punch driving means constituted by a punch driving motor (not shown), a punch conveying screw mechanism, or the like. In the punching column 18, the spindle 19 is rotatable and slidably supported in the W-axis direction, and a tool T for performing predetermined machining at the tip end of the spindle 19 is detachably mounted. Therefore, the main shaft 19 can be rotated around the W-axis by a spindle rotating means including a spindle rotating motor or the like (not shown), and further composed of a spindle drive motor (not shown) and a spindle conveying screw mechanism. The spindle drive means is driven, and the spindle 19 is movable in the W-axis direction. Further, on the side of the base 11, a base 21 for fixing to the floor is provided, and on the upper surface of the base 21, guide rails 2 2a and 22b extending forward and backward in the Z-axis direction are provided. In the guide rails 22a and 22b, the machine base 23 is slidably supported in the Z-axis direction, and the rotary table 24 is rotatably supported at the upper portion of the machine base 23. Further, on the upper surface of the rotary table 24, a workpiece (object to be processed) W is detachably mounted. Therefore, by driving the machine driving means including a machine driving motor, a machine conveying screw mechanism, and the like (not shown), the machine base 23 (rotating machine table 24) is formed in the direction of the Z-axis toward -10-200938329. By moving, the rotary table 24 is rotatable around the Y-axis by driving the table rotating means constituted by a table rotating motor or the like (not shown). Further, the work machine 1 is provided with an NC device (correction means) 50 for controlling the entire work machine 1. The NC device 50 is connected to each of the above-described driving means and each of the rotating means, and switches the moving direction and moving speed of the tool T and the workpiece W, and adjusts the amount of movement and the amount of rotation to advance the tool T and the workpiece w. Positioning control, indexing control of workpiece W. Thereby, the tool τ moves relative to the workpiece W, and the workpiece W is processed into a predetermined shape. As shown in Figs. 2 and 3, the column body 14 has an upper wall 14a and side walls 14b, 14c, 14d, and 14e, and is formed in a hollow shape. In such a column 14, the column deformation detecting means (column deformation detecting means) 30 is supported so as to be vertically suspended from the lower surface of the upper wall 14a. The column deformation detecting device 30 has two flexible wires 31, and both ends of these wires 31 are attached to the lower surface of the upper wall 14a. The wire member 31, the hanging member 33 is suspended by the member for use 32, and the hanging member 33, the suspension bar (the first bar member, the second bar member) 35, 36 are mounted via the spherical bushing 34. . In addition, the material, the thickness, and the like of the wire member 31 can be arbitrarily set. However, even if the column body 14 is deformed and inclined, the low rigidity can be vertically suspended vertically. The members to be measured 3 7 and 38 are provided at the intermediate portion and the lower end of the suspension rod 35 in the axial direction. The measured surface (measured portion) 37a, 37b is formed on the member to be measured 37, and the surface to be measured (measured by -11 - 200938329) 38a, 38b is formed in the member to be measured 38. The measured surfaces 37a and 38a are formed in a plane orthogonal to the X-axis direction, and the measured surfaces 37b and 38b are formed in a plane orthogonal to the Z-axis direction. Further, a weight 39 is provided at the lower end of the suspension rod 36. Further, on the inner surface of the side wall 14b, a pair of upper and lower distance sensors (measuring means) 40a, 40b are provided so as to face the measured surfaces 37a, 38a, and on the inner surface of the side wall 14e, up and down A pair of distance sensors (measuring means) 41a, 41b are provided to face the measured surfaces 37b, 38b. The distance sensors 40a, 40b, 41a, 41b are non-contact sensors, wherein the distance sensors 40a, 40b constantly measure the distance 'to the measured faces 37a, 38a' and the distance sensor 41a 41b constantly measures the distance to the measured surfaces 37b and 38b. Further, the NC device 50 is connected to the distance sensors 40a, 40b, 41a, 41b', and the measured distance (detection result) measured by the distance sensors 40a, 40b, 41a, 41b is input to NC device 50. Further, on the inner surface of the side wall 14d, an oil bearing pan (container) 42 is supported via a support member (not shown). In the oil pan 42, the oil 43 of the highly viscous fluid is stored, and the suspension rod 36 enters the oil 43 of the oil pan 42. Further, the oil pan 42 and the oil 43 are those which constitute a damping means. In other words, in the NC device 50, the amount of deformation (inclination amount) of the column 14 in the X-axis direction is calculated from the measured distance difference from the side of the distance sensors 40a and 40b to the measured surfaces 37a and 38a. The amount of deformation (inclination amount) of the column 14 in the Z-axis direction is calculated from the measured distance difference from the side of the sensors 41a, 41b to the measured surfaces 37b, 38b. Then, according to the calculated column 14 in the X-axis direction and the Z-axis side -12-200938329, the amount of deformation 'corrects the driving of each driving means, and the position control of the tool τ and the work W' is performed to process the workpiece w into a predetermined one. shape. Further, even if the suspension rods 35 and 36 are oscillated together with the vertical member 33 due to external vibration or the like, the oil 43 of the oil pan is rapidly attenuated by the swing of the suspension rod 36, so that the suspension rod 35 is The swing is also slashed in a short time. Therefore, the workpiece w is mounted on the upper surface of the rotary table 24 by machining the workpiece w by the machine tool 1, and the machine base 23 is moved in the z-axis direction to move the workpiece W to the machining position. Next, the spindle 19 is rotated by the spindle 19, and the column 14 is moved toward the X-axis, or the saddle 16 is moved in the z-axis direction, or the punch 18 is moved in the axial direction, or the spindle 19 is turned toward the w. Move in the direction of the axis. Further, it is also possible to rotate the rotary table 24 to perform the indexing of the workpiece W. Thereby, the machining of the workpiece W by the tool boring is performed. Here, as described above, when the workpiece W is processed, it is necessary to move the tool τ in at least one of the X-axis direction, the z-axis direction, the z-axis direction, and the W-axis direction, particularly when the tool is turned toward the X. When the axial direction moves in the x-axis direction, the column 14 is easily deformed. Therefore, the column 14 is deformed, causing an error in the position of the leading end of the main shaft 19 to cause a decrease in machining accuracy. That is, in the working machine 1 such as a horizontal boring machine, since the saddle 16 configured to rotatably support the main shaft 19 is movably supported on the side wall 14b of the cylinder 14, as shown in Fig. 4, when When the saddle 16 moves in the Y direction, the joint between the column base 13 and the column 14 is used as the base member 42 and the internal condition is caused by the rotation of the Z to the Z. The body 14 is inclined in the X-axis direction. In particular, when the work machine 1 is a large one, the height of the column 14 is high, and the weight of the saddle 16 is increased, so that the deformation of the column 14 is increased by moving the saddle 16 upward. The true straightness of the up and down movement of the saddle 16 cannot be maintained. Further, when the column 14 (the column base 13) is moved in the X-axis direction on the base 11, the degree of straightness of the base 11 and the guide rails 12a and 12b is affected, causing the angular deviation of the column 14 (pitch, roll). The corner and the off angle are moved sideways. Therefore, as shown in Fig. 5, the column 14 is inclined in the Z-axis direction with reference to the joint of the column base 13 and the column 14. Moreover, as shown in FIG. 3, the thickness of the side walls 14b, 14d of the column 14 is different depending on the guide rails 15a, 15b formed on the side wall 14b, and the heat dissipation capacity is on the side wall 14b of the thick wall and the side wall 14d of the thin wall. Will produce a difference. Therefore, when the driving means and the rotating means 'tool T, the workpiece W, etc. generate heat, or the temperature of the installation environment of the working machine 1 changes, the side wall 14d which has a small heat capacity becomes easy to thermally deform, compared with the side wall 14b which has a large heat capacity. As a result, the column 14 is inclined in the X-axis direction. As described above, when the column 14 is deformed in the X-axis direction and the Z-axis direction, an error occurs at the tip end position of the spindle 19, which may cause a decrease in the machining accuracy of the workpiece W. Therefore, in the working machine 1, the column 14 is directly and constantly detected in the deformation of the composite by the column deformation detecting device 30 provided in the column 14. In other words, when the saddle 16 is moved in the Y-axis direction, the column 14 is deformed in the X-axis direction, and the temperature of the working machine 1 itself is changed, and the temperature of the installation environment changes. In the case of thermal deformation in the axial direction -14 to 200938329, first, the distances to the measured surfaces 37a, 38a are measured by the distance sensors 40a, 40b. Then, the measured measurement distance is input to the NC device 50, and then the difference is calculated by the NC device 50. Next, the NC device 50 calculates the amount of deformation of the column 14 in the X-axis direction from the calculated distance difference, and corrects the driving of each driving means based on the amount of deformation to control the position of the tool T and the workpiece W. Further, in the case where the column 14 is moved in the X-axis direction and the column 14 is deformed in the Z-axis direction, first, the measured surface is measured by the distance sensors 41 a and 4 1 b. 3 7b, 3 8b distance. Then, these measured measurement distances are input to the NC device 50, and the difference is calculated by the NC device 50. Next, the NC device 50 calculates the amount of deformation of the column 14 in the Z-axis direction from the calculated distance difference, and corrects the driving of each driving means based on the amount of deformation, thereby controlling the position of the tool T and the workpiece W. Therefore, according to the working machine of the present invention, when the workpiece w is processed by the tool T , , the column deformation detecting device 30 is used to detect when the column 14 , the saddle 16 , etc. are moved. After the cylinder 14 is deformed in the X-axis direction and the Z-axis direction, the NC device is used to correct the driving of each driving means based on the detection result, and the position control of the tool T and the workpiece W is performed, thereby preventing the machining accuracy. reduce. Further, in the column deformation detecting device 30, the upper ends of the suspension bars 35 and 36 are supported by the hanging member 33 suspended by the wire 31 via the spherical bushing 34, and the lower end of the suspension bar 36 is brought into the bearing. The oil 43 of the oil pan 42, whereby even if the column 14 is subjected to external vibration, the swing of the suspension bars 35, 36 can be attenuated not only in a short time -15 - 200938329, but also the suspension bars 35, 36 can be kept in a constant state. Keep it in a state of being in a vertical direction. As a result, the distances of the measured surfaces 37a, 37b, 38a, and 38b of the members to be measured 37, 38 can be directly and quickly and accurately measured by the distance sensors 40a, 40b, 41a, and 41b. Further, since the column deformation detecting device 30 is provided in the column 14 to save space, it is not necessary to make the working machine 1 larger or larger. [Industrial Applicability] The present invention can be applied to a work machine such as a machine center, and a heat deformation preventing structure that prevents deterioration in machining accuracy due to thermal deformation of a cylinder that has been fixed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic perspective view of a working machine according to an embodiment of the present invention. Fig. 2 is a schematic structural view of a cylinder deformation detecting device. Figure 3 is a cross-sectional view of the cylinder. Fig. 4 is a schematic view showing a state in which the column body is deformed in the X-axis direction. Fig. 5 is a schematic view showing a state in which the column body is deformed in the Z-axis direction. [Description of main components] I: Working machine II: Base-16- 200938329 12a, 12b: Guide rail 1 3: Column base 1 4: Column 14a: Upper wall 1 4 b ~ 1 4 e: Side walls 15a, 15b : Guide rail 1 6 : Saddle © 17 : Guide part 1 8 : Punch 19 : Main shaft 21 : Machine base 22a, 22b : Guide rail 23 : Machine base 2 4 · Rotary table 3 〇: Column deformation detecting device φ 3 1 : wire 32 : member for passage 3 3 : hanging member 3 4 : spherical bushing 3 5, 3 6 : suspension rod 3 7 , 3 8 : member to be measured 37a, 37b, 38a, 38b: measured surface 39: Counterweight 40a, 40b, 41a, 41b: Distance sensor-17- 200938329 42: Oil pan 43: Oil 50: NC device T: Tool W: Workpiece
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