200934711 九、發明說明 【發明所屬之技術領域】 本發明，是有關搬運絕緣性的工件用的搬運系統。 【先前技術】 例如，在薄型顯示裝置的製造過程等，需要可搬運如 玻璃基板等的絕緣性的物品（工件）的技術。而且，搬運 ❹ 這種工件用的裝置，一般使用將複數滾子並列在搬運方向 的輸送帶裝置。 當輸送帶裝置進行玻璃基板的搬運時，會因爲與滾子 的摩擦而在基板表面發生靜電。該情況，又會使空氣中的 灰塵或垃圾（也稱碎片）附著於基板表面，又會導致基板 的電路發生問題。 爲了解決這種問題，以往已提案對於基板進行除電的 技術。例如專利文獻1，將導電滾子的至少與基板接觸的 〇 部分由導電性柔軟構件形成，進一步將導電性柔軟材料接 地。 [專利文獻1]日本特開2002-274642號公報 【發明內容】 (本發明所欲解決的課題） 但是’上述習知的輸送帶裝置，具有以下的問題點。 即’即使使用導電性的滾子，也只有滾子及基板的接 觸部分被除電。即’除電的程度不充分，因此無法回避前 -4- 200934711 述的問題。 且，近年來因爲玻璃基板的大型化，所以擔心帶電量 進一步增加。 本發明，是爲了解決上述習知的課題，目的爲提供一 種搬運系統可抑制搬運絕緣性的工件時產生帶電。 (解決上述課題的手段） 0 如申請專利範圍第1項的搬運系統，是搬運絕緣性的 工件的搬運系統，具備托盤、及複數滾子。托盤是載置工 件。複數滾子，是爲了搬運托盤而朝搬運方向並列配置。 滾子及托盤，至少彼此的接觸部是具有導電性，接觸部是 接地。 在此系統中，當進行托盤的搬運時，因托盤及滾子的 摩擦所發生的靜電可更朝確實地放電。即，可抑制搬運絕 緣性的工件時產生帶電。其結果，例如，在工件就不易產 〇 生碎片吸引等的問題。 如申請專利範圍第2項的搬運系統中，是對於申請專 利範圍第1項，其中，托盤，是由導電性材料形成。 在此系統中，托盤是因爲由導電性材料形成，所以滾 子直接接觸的部分以外所儲存的靜電也可放電。 如申請專利範圍第3項的搬運系統’是對於申請專利 範圍第1或2項，其中，滾子’是由含有預定量的導電性 材料的樹脂形成。 在此系統中，因爲使用樹脂製的滾子’所以搬運時托 -5- 200934711 盤不 範圍 料。 要求 ^ 範圍 料。 要求 產生 ❹ 【實 〜第 的工 搬運 易弄傷。 如申請專利範圍第4項的搬運系統，是對於申請專利 第3項，其中’滾子，是含有1〜50wt%的導電性材 在此系統中’可充分地確保爲了抑制工件的帶電量所 的滾子的導電性。 如申請專利範圍第5項的搬運系統，是對於申請專利 第4項，其中’滾子，是含有1〜3〇wt%的導電性材 在此系統中’可充分地確保爲了抑制工件的帶電量所 的滾子的導電性。 [發明的效果] 依據本發明的搬運系統，可抑制搬運絕緣性的工件時 帶電。 施方式】 對於本發明的一實施例的搬運系統100，使用第1圖 5圖說明如下。 [整體結構] 搬運系統100，是如第1圖及第2圖所示，將薄板狀 件載置於搬運用托盤1(以下稱「托盤1」），沿著 路徑搬運直到預定的位置爲止用的裝置。本實施例的 -6 - 200934711 搬運系統100所搬運的薄板狀的工件，是例如使用於電子 顯示器（液晶顯示器或等離子顯示器等）的板狀工件，或 使用於有機EL的樹脂板等。 [搬運輸送帶20] 搬運輸送帶20,是如第1圖及第2圖所示，具備支撐 框架21、及滾子25、及驅動裝置（無圖示）。 U 支撐框架21，是由導電性材料形成，具有：容納滾子 25的驅動力傳達機構用的本體21a、及將本體21a支撐於 地面上方用的支撐腳21b。 滾子25，是沿著搬運方向複數配置。具體而言，滾子 25，是由沿著搬運方向配置的一對的滾子群所構成。各滾 子25，是透過導電性的軸26安裝於本體21a。軸26，是 透過配置於本體21a內的軸承（無圖示）可轉動地被支撐 ，進一步與配置於本體21a內的驅動裝置（無圖示）連結 H 。滾子25，是由含碳的MC耐綸形成。在本實施例中’是 藉由含有1〜50wt%的碳黑’確保滾子25具有預定的導電 性。 [搬運用托盤1] 第4圖，是顯示搬運用托盤1的一實施例的結構的立 體圖，第5圖是托盤1的俯視圖。 托盤1，是爲了載置薄板狀的工件進行搬運所使用。 托盤1，主要具備：矩形狀的外框2、及橫跨於外框2中 200934711 的相面對的框構件之間的複數架4。又，在此，使用玻璃 基板W作爲薄板狀的工件❶ 外框2’是由4條的框構件2a所構成。本實施例的框 構件2a是使用固定板厚的鋁壓出材，框構件2a是由二條 的長邊框構件及二條的短邊框構件所構成。 框構件2a’是具備：外側凸緣（接觸部）11、及形成 於比外側凸緣1 1高的位置的內側凸緣1 2，於外側凸緣1 1 及內側凸緣1 2之間設置傾斜部1 3。內側凸緣1 2，是從傾 斜部1 3的上端部朝內方延伸，外側凸緣丨丨，是從傾斜部 1 3的下端部朝外方延伸。傾斜部1 3，是在形成外框2時 朝下方擴大而形成具有角度。 架4，是在外框2中的相面對的框構件2a之間複數橫 跨，構成玻璃基板W的載置部。架4，是使用固定板厚的 鋁壓出材。 架4，是爲了支撐玻璃基板W而具有複數的載置銷4a 。載置銷4a，是由耐磨耗性高的聚醚乙醚酮樹脂（PEEK )所形成，即使返覆玻璃基板W的搭載，也幾乎不發生 由磨耗所產生的垃圾（灰塵），不會污染玻璃基板W。且 ，與玻璃基板W的接觸面因爲少，所以可以抑制由托盤1 及玻璃基板W的摩擦或剝離所產生的帶電。 托盤1，是當由搬運輸送帶20所搬運時，如第1圖所 示，左右兩側被載置於滾子25的各滾子群上。更具體而 言，如第3圖所示’托盤1的外側凸緣1 1是載置於滾子 25上。 -8- 200934711 在此狀態下，無圖示的驅動裝置旋轉滾子25的話， 托盤1會被搬運於複數滾子25上。 以上的構造中，支撐框架21，是藉由支撐腳21b接地 。由此，滾子25，是通過軸26及支撐框架21接地。且， 藉由托盤1也載置於滾子25上，而通過滾子25、軸26、 支撐框架21接地。藉由以上的接地構造，可抑制由托盤1 及滾子25的搬運時的接觸所產生的帶電。 在此系統中，因爲托盤1是由導電性材料形成，所以 滾子25直接接觸的部分以外所儲存的靜電也可放電。 在此系統中，因爲使用樹脂製的滾子25，所以搬運時 托盤不易弄傷。 [實施例1] 爲了確認本發明的搬運系統1 〇 〇中的絕緣性工件的帶 電抑制效果，進行下述項目的實驗。 又，以下的實驗，是使用單程搬運距離〇.5m的托盤 耐久試驗裝置及小型的試驗用托盤進行，在室溫25度、 濕度4 5 %的環境實驗室進行測量。且，絕緣性工件是使用 24 0mm或400mm的玻璃基板進行。且，玻璃基板的帶電 量的測量，是藉由表面電位計進行，搬運速度的測量，是 藉由貼付於小型的試驗用托盤及玻璃基板的刻度（2 5mm 間距）及光檢測器進行。且，滾子的旋轉數，是藉由一體 安裝在滾子旋轉軸的脈衝圓板及光檢測器進行沏[量。 又，本試驗用托盤，是對於尺寸以外的結構，是由與 -9- 200934711 前述的托盤同樣的構成要素所構成。 (1 )將玻璃基板以單體搬運的形式搬運的情況的帶 電電位的測量（習知技術） 最初，對於習知的搬運方法，即接地的導電性的滾子 (例如含碳的MC耐綸）與玻璃基板接觸搬運的情況，測 量在玻璃基板發生的帶電電位。 具體而言，將玻璃基板載置於滾子上後，充分地除電 ，分別以滾子有加減速的情況及無的情況的條件返覆往復 搬運玻璃基板，測量玻璃基板的上面及下面的帶電電位（ V)。在此，無加減速的情況的速度曲線，是如第7圖所 示，有加減速的情況的速度曲線，是如第8圖所示。 即，這此可了解，滾子無加減速的情況，滾子及玻璃 基板之間發生滑動，有加減速的情況，是因爲滾子及玻璃 基板之間無滑動，就可無磨擦地進行搬運。 此結果，如第6圖所示就可確認，無論任一的條件（ 有加減速的情況及無的情況）所測量的情況，玻璃基板的 帶電電位皆是隨著搬運距離的比例變大。即可確認，將玻 璃基板與滾子接觸地搬運的情況，與玻璃基板接觸的滾子 是由導電性的材料形成，即使進一步接地，也無充分的除 電效。這是因爲，只要被搬運的玻璃基板具有絕緣性，就 無法避免由滾子的摩擦所產生的帶電，且，即使使用接地 的導電性的滾子進行除電，實際上只有滾子及玻璃基板的 接觸部分被除電。即，在上述習知的搬運方法中，玻璃基 -10- 200934711 板的帶電無法充分被抑制。 (2)搬運物的種類別的帶電電位的測量（本發明及 習知技術的比較） 接著，對於接地的導電性滾子，依據搬運物的種類不 同，分別測量玻璃基板的上面及下面的帶電電位（V)將 。搬運物，是以下的3種類。 0 (a)玻璃基板單體（習知技術） (b) 載置於鋁托盤的玻璃基板（本發明） (c) 載置於SUS托盤的玻璃基板（本發明） 在此，搬運玻璃基板單體（玻璃尺寸：400mm )時的 速度曲線是如第7圖所示，而搬運載置於SUS托盤的玻璃 基板（玻璃尺寸：240mm )，載置於鋁托盤的玻璃基板（ 玻璃尺寸：240mm )時的速度曲線，是分別如第10圖（a )、第10圖（b)所示。 φ 此結果，如第9圖所示可確認，與搬運玻璃基板單體 的情況相比，使用SUS托盤、鋁托盤搬運玻璃基板的情況 ，玻璃基板的帶電電位非常小。而且，搬運距離變大的情 況，其不同更顯著。由此可確認，對於在接地的導電性滾 子上進行搬運的情況，爲了抑制被搬運物的帶電，不是直 接搬運玻璃基板單體，而是使用由導電性材料所構成的托 盤搬運玻璃基板較有利。 (3)托盤及滾子的材質不同的帶電電位的測量（本 -11 - 200934711 發明及其以外的技術的比較） 接著，使用托盤搬運玻璃基板（玻璃尺寸：240mm ) 作爲前提，依據托盤及滾子導電性的有無的各組合不同， 測量玻璃基板的帶電電位（V )。組合是如以下3種類。 (a ) UPE (超高分子量聚乙烯）的滾子（絕緣性）及 鋁的凸緣（導電性）的組合（本發明以外的技術） (b) 含碳的MC耐綸的滾子（導電性）及鋁的凸緣 U (導電性）的組合（本發明） (c) 含碳的MC耐綸的滾子（導電性）及在表面貼 附PVC膠帶的凸緣（絕緣性）的組合（本發明以外的技 術） 以上3例，測量被載置於托盤的玻璃基板的上面及下 面的帶電電位（V)。在此，托盤的滾子的接觸部分，是 凸緣（該當於第4圖的外側凸緣11)。 此結果，如第11圖所示，滾子及凸緣皆是導電性構 Q 件時，即上述（b)的組合時，可確認玻璃基板的帶電電 位非常小。另一方面，（a ) 、（ c )的組合時，與（b ) 相比，可確認玻璃基板的帶電電位變大。 依據以上的結果可確認，使用托盤搬運絕緣性的玻璃 基板時爲了抑制帶電電位，使托盤及滾子雙方（至少接觸 部分）具有導電性的話最有效果。 (4)將玻璃基板載置於鋁托盤搬運的情況的帶電電 位的測量（本發明） -12- 200934711 最後，將玻璃基板載置於鋁托盤，測量改變搬運速度 或加減速進行搬運的情況時的玻璃基板的帶電電位（V) 。具體而言，如第1 3圖〜第1 6圖所示的速度曲線，測量 由：15m/min、有加減速（第 13圖參照）；30m/min、有 加減速（第14圖參照）；45m/min、有加減速（第15圖 參照）；45m/min、無加減速（第16圖參照）的條件進行 搬運的情況時的玻璃基板的上面及下面的帶電電位（V) ❿ 此結果，如第12圖所示可確認，無論任一的條件所 測量的情況，與由玻璃單體搬運的情況（第6圖參照）相 比，可大大地抑制帶電電位的上昇。 依據以上（1 )〜（4 )的測量可確認，絕緣性的工件 是藉由輸送帶裝置等的滾子搬運的情況中，將絕緣性工件 載置於導電性托盤，使托盤及接地導電性滾子接觸的搬運 方法是有效的。 〇 又，由（2)〜（4)所使用的托盤的載置銷，皆是 peek製，且是絕緣體。 (5)將玻璃基板載置於托盤時的帶電電位的測量（ 本發明） 實際使用時，是有將玻璃基板從托盤出入的過程。即 是藉由從托盤下方貫通架之間的方式使突出銷或者是滾子 昇降，使玻璃基板返覆與托盤載置銷的接觸/分離。 在此，對於將玻璃基板載置於托盤時的帶電電位，相 -13- 200934711 互改變載置銷及突出銷及滾子的材質，進行玻璃基板的帶 電電位（V )的測量。具體而言對於： (a ) PEEK (聚醚乙醚酮樹脂）的載置銷及突出銷（ 絕緣性）及含碳的MC耐綸的滾子（導電性）的組合， (b )捲附有鋁箔的PEEK (聚醚乙醚酮樹脂）的載置 銷及突出銷（導電性）及含碳的MC耐綸的滾子（導電性 )的組合， U ( c ) PEEK (聚醚乙醚酮樹脂）的載置銷及突出銷（ 絕緣性）及在表面貼附PVC膠帶的滾子（絕緣性）的組 合， (d )捲附有鋁箔的PEEK (聚醚乙醚酮樹脂）的載置 銷及突出銷（導電性）及貼附有PVC膠帶的滾子（絕緣 性）的組合，一邊藉由雷射變位計測量昇降速度，一邊在 將托盤載置於滾子上的狀態，藉由昇降於架之間的突出銷 ，昇降玻璃基板。此時，玻璃基板，當位於載置銷上時是 Q 與突出銷分離，當位於突出銷上時是與載置銷分離。即， 返覆與各銷的接觸/剝離。而且，分別測量被載置於托盤 的玻璃基板的上面及下面的帶電電位（V)。又，玻璃基 板，是帶電正（+ )或負（-)1 k V以上之後開始測量。且 ，突出銷的昇降速度，是無加減速的l.〇m/min。 此結果，無論任一的條件，即使返覆昇降，帶電電位 也幾乎無變化，無法認定有類似剝離帶電的現象。這是因 爲，玻璃基板及載置銷的接觸面積非常小。由此，可確認 對於托盤上載置/取出玻璃基板並未產生問題。 -14- 200934711 [其他的實施例] 以上’雖說明本發明的一實施例，但是本發明不限定 於上述實施例’在未脫離本發明的範圍內可進行各種變更 〇 (A) 在上述實施例的搬運系統1 〇 〇中，搬運絕緣性 的玻璃基板W的托盤1，雖舉例如第4圖及第5圖所示具 φ 有架4。但是，本發明不限定於此。 例如，載置玻璃基板W的部分，是由導電性的平板 形成也可以。 (B) 在上述實施例的搬運系統1〇〇中，滾子25的整 體’雖舉例如由導電性材料形成的例。但是，不限定於此 〇 例如，如第17圖所示’滾子25之中，與托盤1接觸 的接觸部2 5 a是由導電性材料形成也可以。此情況，接觸 © 部25a是適切被設定成接地於某處的話，可以獲得與上述 實施例的搬運系統100同樣的效果。 且’不需要全部的滾子具有導電性，在可獲得預定效 果的範圍內只一部分具有導電性也可以。 (C )在上述實施例的搬運系統100中，滾子25，雖 舉例如由含碳的MC耐綸形成的例。但是，不限定於此。 例如，由含有導電性材料的超高分子量聚乙烯或聚醚 醯亞胺等的樹脂形成也可以。且，藉由導電性金屬形成滾 子也可以。 -15- 200934711 又，在本實施例中，雖顯示含碳的MC耐綸的實驗資 料，但是對於含碳的UPE，也已確認可獲得同樣的效果。 (D )在上述實施例的搬運系統1〇〇中，滾子25 ’雖 舉例是由含有1〜50wt%的碳黑來確保導電性的MC耐綸 所形成的例。但是，不限定於此。 例如，將1〜50wt%的碳纖維含於MC耐綸也可以。 且，含有1〜30wt%的碳毫微管或碳毫微纖維也可以。此 0 情況，也可以獲得與上述實施例的搬運系統100同樣的效 果。 (E) 在上述實施例的搬運系統1〇〇中，托盤1的整 體，雖舉例是由導電性的鋁推出構件形成的例。但是，不 限定於此。 例如，只有滾子25的接觸部分也就是外側凸緣1 1是 由導電性的材質形成也可以。 且，如第9圖所示的SUS製的托盤也可獲得同樣的效 〇 果’其他的導電性的金屬或者是施加導電性的表面處理， 也可以獲得同樣的效果。 (F) 在上述實施例的搬運系統1〇〇中，雖舉例載置 於托盤的搬運工件爲玻璃基板W。但是，不限定於此。 例如，所使用於電子顯示器（液晶顯示器或等離子顯 示器等）的板狀工件，或使用於有機EL顯示器或照明的 樹脂板等，也可以獲得與上述的實施例的搬運系統100同 樣的效果。 (G) 在上述實施例的搬運系統i 00中，雖舉例設有 -16- 200934711 形成於架4的載置銷4 a的例。但是，不限定於此。 例如’在托盤1及玻璃基板W之間無相對移動，即 無滑動發生的方式控制搬運輸送帶20上的托盤1的搬運 速度也可以。此情況，也可抑制因托盤1及玻璃基板W 之間所發生的摩擦或是剝離所產生的帶電。由此，可提高 抑制搬運絕緣性的工件時的帶電的效果。 u 【圖式簡單說明】 [第1圖]本發明的一實施例的搬運系統的外觀圖。 [第2圖]本發明的一實施例的搬運系統的橫剖圖。 [第3圖]第1圖及第2圖中的滾子周邊的擴大剖面圖 〇 [第4圖]藉由第1圖的搬運系統搬運的搬運用托盤的 外觀圖。 [第5圖]藉由第1圖的搬運系統搬運的搬運用托盤的 φ 平面圖 [第6圖]藉由習知的搬運方法搬運玻璃基板的情況的 帶電電位的測量結果。 [第7圖]進行第6圖的測量時的速度曲線（無加減速 )的圖表。 [第8圖]進行第6圖的測量時的速度曲線（有加減速 )的圖表。 [第9圖]將各種搬運媒體藉由習知的搬運方法搬運的 情況時的帶電電位的測量結果。 -17- 200934711 [第10圖](a )是進行第9圖的測量時的SUS托盤中 的速度曲線的圖表。（b)是進行第9圖的測量時的鋁托 盤中的速度曲線的圖表。 [第11圖]托盤及滾子在的材質將改變測量情況的帶電 電位的測量結果。 [第1 2圖]玻璃基板將鋁托盤在載置搬運情況的帶電電; 位的測量結果。 〇 [第1 3圖]進行第12圖的測量時的速度曲線（ 1 5m/min、無加減速）的圖表。 [第14圖]進行第12圖的測量時的速度曲線（ 30m/min、無加減速）的圖表。 [第15圖]進行第12圖的測量時的速度曲線（ 45m/min、有加減速）的圖表。 [第 16圖]進行第 12圖的測量時的速度曲線（ 45m/min、無加減速）的圖表。 〇 [第17圖]本發明的其他的實施例的滾子周邊的擴大剖 面圖。 【主要元件符號說明】 1 :搬運用托盤 2 :外框 2 a :框構件 4 :架 4a :載置銷 -18- 200934711 1 1 :外側凸緣（接觸部） 1 2 :內側凸緣 1 3 :傾斜部 20 :搬運輸送帶 21 :支撐框架 2 1 a :本體 21b :支撐腳 25 :滾子（接觸部） 2 5 a _接觸部 26 :軸 100 :搬運系統200934711 IX. Description of the Invention [Technical Field of the Invention] The present invention relates to a transport system for transporting an insulating workpiece. [Prior Art] For example, in a manufacturing process of a thin display device or the like, a technique of transporting an insulating article (workpiece) such as a glass substrate is required. Further, in the apparatus for transporting such a workpiece, a conveyor belt device in which a plurality of rollers are arranged in parallel is generally used. When the conveyor device carries the glass substrate, static electricity is generated on the surface of the substrate due to friction with the roller. In this case, dust or garbage (also called debris) in the air is attached to the surface of the substrate, which may cause problems in the circuit of the substrate. In order to solve such a problem, a technique for removing a substrate has been proposed in the past. For example, in Patent Document 1, at least a portion of the conductive roller that is in contact with the substrate is formed of a conductive flexible member, and the conductive flexible material is further grounded. [Problem to be Solved by the Invention] However, the conventional conveyor belt device described above has the following problems. That is, even if a conductive roller is used, only the contact portion of the roller and the substrate is neutralized. That is, the degree of de-energization is not sufficient, so the problem described in the previous -4-200934711 cannot be avoided. Further, in recent years, the size of the glass substrate has increased, so that the charge amount is further increased. The present invention has been made to solve the above-described problems, and an object of the invention is to provide a charging system capable of suppressing the occurrence of charging when a workpiece having an insulating property is conveyed. (Means for Solving the Problem) 0 The transport system of the first application of the patent scope is a transport system for transporting an insulative workpiece, and includes a tray and a plurality of rollers. The tray is a workpiece. The plurality of rollers are arranged side by side in the transport direction for transporting the tray. The roller and the tray have at least a contact portion that is electrically conductive and the contact portion is grounded. In this system, when the tray is transported, static electricity generated by the friction of the tray and the roller can be discharged more reliably. In other words, it is possible to suppress the occurrence of charging when the workpiece is insulated. As a result, for example, there is a problem that the workpiece is less likely to be produced and the debris is attracted. The handling system of the second application of the patent application is the first item of the patent application range, wherein the tray is formed of a conductive material. In this system, since the tray is formed of a conductive material, static electricity stored outside the portion where the roller directly contacts can also be discharged. The handling system of claim 3 is the first or second aspect of the patent application, wherein the roller ' is formed of a resin containing a predetermined amount of a conductive material. In this system, since the resin roller is used, the tray is not in the range of the carrier. Requirements ^ Range. Requires the production of ❹ [real ~ the first work of transport is easy to hurt. The handling system of the fourth application of the patent scope is the third item of the patent application, in which the 'roller, which contains 1 to 50% by weight of the electrically conductive material in the system' can be sufficiently ensured in order to suppress the charge amount of the workpiece. The conductivity of the roller. For example, the handling system of claim 5 is for the application of patent item 4, in which 'roller, which contains 1 to 3 wt% of electrically conductive material in this system' can be sufficiently ensured to suppress the charging of the workpiece. The conductivity of the roller. [Effects of the Invention] According to the transport system of the present invention, it is possible to suppress charging when transporting an insulating workpiece. Embodiments of the transport system 100 according to an embodiment of the present invention will be described below using FIG. [Overall Configuration] As shown in Fig. 1 and Fig. 2, the transporting system 100 is placed on the transport tray 1 (hereinafter referred to as "tray 1") and transported along the path to a predetermined position. s installation. In the -6 - 200934711 of the present embodiment, the sheet-like workpiece conveyed by the transport system 100 is, for example, a plate-like workpiece used for an electronic display (such as a liquid crystal display or a plasma display), or a resin plate used for an organic EL. [Transport Conveyor Belt 20] As shown in Figs. 1 and 2, the conveyance belt 20 includes a support frame 21, a roller 25, and a driving device (not shown). The U support frame 21 is made of a conductive material, and has a main body 21a for accommodating the driving force transmitting mechanism of the roller 25, and a supporting leg 21b for supporting the main body 21a above the ground. The roller 25 is arranged in plural along the conveyance direction. Specifically, the roller 25 is constituted by a pair of roller groups arranged along the conveyance direction. Each of the rollers 25 is attached to the main body 21a via a conductive shaft 26. The shaft 26 is rotatably supported by a bearing (not shown) disposed in the main body 21a, and is further coupled to a driving device (not shown) disposed in the main body 21a. The roller 25 is formed of a carbon-containing MC nylon. In the present embodiment, the roller 25 is ensured to have a predetermined conductivity by containing 1 to 50% by weight of carbon black. [Transport Tray 1] Fig. 4 is a perspective view showing a configuration of an embodiment of the transfer tray 1, and Fig. 5 is a plan view of the tray 1. The tray 1 is used for transporting a sheet-shaped workpiece. The tray 1 mainly includes a rectangular outer frame 2 and a plurality of frames 4 spanning the facing frame members of the outer frame 2 in 200934711. Here, the glass substrate W is used as a thin plate-shaped workpiece. The outer frame 2' is composed of four frame members 2a. The frame member 2a of the present embodiment is an aluminum extrusion material having a fixed plate thickness, and the frame member 2a is composed of two long frame members and two short frame members. The frame member 2a' is provided with an outer flange (contact portion) 11 and an inner flange 1 2 formed at a position higher than the outer flange 1 1 , and is disposed between the outer flange 1 1 and the inner flange 1 2 The inclined portion 13 is. The inner flange 12 extends inward from the upper end portion of the inclined portion 13, and the outer flange 延伸 extends outward from the lower end portion of the inclined portion 13. The inclined portion 13 is formed to have an angle when it is formed to expand downward when the outer frame 2 is formed. The frame 4 is a mounting portion that constitutes the glass substrate W in a plurality of traverses between the facing frame members 2a in the outer frame 2. The frame 4 is an aluminum extruded material using a fixed plate thickness. The holder 4 has a plurality of mounting pins 4a for supporting the glass substrate W. The mounting pin 4a is formed of a polyetheretherketone resin (PEEK) having high abrasion resistance, and even if the glass substrate W is mounted, the garbage (dust) generated by the abrasion hardly occurs, and the contamination is not caused. Glass substrate W. Further, since the contact surface with the glass substrate W is small, charging due to friction or peeling of the tray 1 and the glass substrate W can be suppressed. When the tray 1 is transported by the transport conveyor 20, as shown in Fig. 1, the left and right sides are placed on the roller groups of the rollers 25. More specifically, as shown in Fig. 3, the outer flange 11 of the tray 1 is placed on the roller 25. -8- 200934711 In this state, when the drive unit (not shown) rotates the roller 25, the tray 1 is transported to the plurality of rollers 25. In the above configuration, the support frame 21 is grounded by the support leg 21b. Thereby, the roller 25 is grounded via the shaft 26 and the support frame 21. Further, the tray 1 is also placed on the roller 25, and the roller 25, the shaft 26, and the support frame 21 are grounded. According to the above grounding structure, it is possible to suppress the charging caused by the contact between the tray 1 and the roller 25 during transportation. In this system, since the tray 1 is formed of a conductive material, static electricity stored outside the portion where the roller 25 directly contacts can also be discharged. In this system, since the resin roller 25 is used, the tray is not easily damaged during transportation. [Example 1] In order to confirm the charging suppressing effect of the insulating workpiece in the conveying system 1 of the present invention, an experiment of the following items was carried out. In addition, the following experiment was carried out using a pallet endurance test apparatus with a single-pass transport distance of 〇5 m and a small test tray, and was measured in an environmental laboratory at room temperature of 25 degrees and humidity of 45 %. Further, the insulating workpiece was formed using a glass substrate of 240 mm or 400 mm. Further, the measurement of the amount of charge of the glass substrate was carried out by a surface potentiometer, and the measurement of the conveyance speed was carried out by attaching a scale (25 mm pitch) of a small test tray and a glass substrate to a photodetector. Further, the number of rotations of the roller is brewed by a pulse disk and a photodetector which are integrally attached to the rotating shaft of the roller. Further, the test tray is a structure other than the size, and is composed of the same components as the tray described in -9-200934711. (1) Measurement of Charge Potential in Case of Handling Glass Substrate as Single Carrier (Conventional Technology) First, a conventional transfer method, that is, a grounded conductive roller (for example, a carbon-containing MC nylon) When the glass substrate is transported in contact with the glass substrate, the charged potential generated on the glass substrate is measured. Specifically, after the glass substrate is placed on the roller, the battery is sufficiently de-energized, and the glass substrate is reciprocally conveyed under the condition that the roller is accelerated or decelerated and the case where it is not present, and the upper surface and the lower surface of the glass substrate are charged. Potential (V). Here, the speed profile in the case of no acceleration/deceleration is a speed profile in the case of acceleration and deceleration as shown in Fig. 7, as shown in Fig. 8. That is, it can be understood that when the roller is not accelerated or decelerated, the roller and the glass substrate are slid, and there is acceleration and deceleration because the roller and the glass substrate are not slipped, and the roller can be conveyed without friction. . As a result, as shown in Fig. 6, it can be confirmed that the charged potential of the glass substrate increases in proportion to the conveyance distance regardless of any condition (in the case of acceleration/deceleration or absence). It can be confirmed that when the glass substrate is transported in contact with the roller, the roller that is in contact with the glass substrate is made of a conductive material, and even if it is further grounded, there is no sufficient static elimination effect. This is because, as long as the glass substrate to be conveyed has insulation properties, charging due to friction of the rollers cannot be avoided, and even if the grounded conductive roller is used for power removal, only the roller and the glass substrate are actually used. The contact portion is neutralized. That is, in the above conventional transportation method, charging of the glass base-10-200934711 plate cannot be sufficiently suppressed. (2) Measurement of the charged potential of the species of the carrier (comparison of the present invention and the prior art) Next, for the grounded conductive roller, the upper and lower sides of the glass substrate are respectively charged depending on the type of the carrier. The potential (V) will be. It is the following three types of the following. 0 (a) Glass substrate monomer (conventional technique) (b) Glass substrate placed on an aluminum tray (present invention) (c) Glass substrate placed on a SUS tray (invention) Here, the glass substrate is conveyed The speed curve at the time of the body (glass size: 400 mm) is as shown in Fig. 7, and the glass substrate (glass size: 240 mm) placed on the SUS tray is transported, and the glass substrate placed on the aluminum tray (glass size: 240 mm) The velocity curves at the time are as shown in Fig. 10 (a) and Fig. 10 (b), respectively. φ As a result, as shown in Fig. 9, it was confirmed that the charging potential of the glass substrate was extremely small when the glass substrate was transported using a SUS tray or an aluminum tray as compared with the case of transporting the glass substrate alone. Moreover, the difference in the handling distance becomes larger, and the difference is more remarkable. Therefore, in the case of transporting the grounded conductive roller, in order to suppress the charging of the object to be transported, it is not necessary to directly transport the glass substrate alone, but to use a tray-mounted glass substrate made of a conductive material. advantageous. (3) Measurement of the charged potential of the material of the tray and the roller (Comparison of the invention and other technologies). Next, use the tray to transport the glass substrate (glass size: 240 mm) as a premise, depending on the tray and roll. The charged potential (V) of the glass substrate was measured for each combination of the presence or absence of the sub-conductivity. The combination is as follows. (a) Combination of UPE (Ultra High Molecular Weight Polyethylene) roller (insulating) and aluminum flange (conductivity) (Technology other than the present invention) (b) Carbon-containing MC nylon roller (conductive Combination of aluminum alloy flange U (conductivity) (invention) (c) Combination of carbon-containing MC nylon roller (conductivity) and flange (insulation) of PVC tape attached to the surface (Techniques other than the present invention) In the above three examples, the charged potential (V) placed on the upper surface and the lower surface of the glass substrate of the tray was measured. Here, the contact portion of the roller of the tray is a flange (which is referred to as the outer flange 11 of Fig. 4). As a result, as shown in Fig. 11, when both the roller and the flange were electrically conductive members, that is, when the combination of the above (b) was combined, it was confirmed that the charged potential of the glass substrate was extremely small. On the other hand, when (a) and (c) are combined, it can be confirmed that the charging potential of the glass substrate becomes larger than (b). According to the above results, it has been confirmed that when the insulating glass substrate is transported by the tray, it is most effective to suppress the electrification potential and to make both the tray and the roller (at least the contact portion) conductive. (4) Measurement of the charged potential when the glass substrate is placed on the aluminum tray (Invention) -12- 200934711 Finally, when the glass substrate is placed on an aluminum tray and the conveyance speed is changed or the acceleration/deceleration is carried out, The charged potential (V) of the glass substrate. Specifically, the speed curve shown in Fig. 13 to Fig. 16 is measured by: 15 m/min, with acceleration and deceleration (refer to Fig. 13); 30 m/min, with acceleration and deceleration (refer to Fig. 14) 45m/min, acceleration/deceleration (refer to Fig. 15); charged potential (V) on the upper and lower surfaces of the glass substrate when transported under conditions of 45 m/min and no acceleration/deceleration (refer to Fig. 16) As a result, as shown in Fig. 12, it was confirmed that the increase in the charging potential can be greatly suppressed as compared with the case of the case where the glass monomer is transported (see Fig. 6). According to the measurements of (1) to (4) above, it can be confirmed that when the insulating workpiece is conveyed by a roller such as a conveyor belt device, the insulating workpiece is placed on the conductive tray to make the tray and the grounding conductivity. The handling method of roller contact is effective. 〇 Further, the mounting pins for the trays used in (2) to (4) are made of peek and are insulators. (5) Measurement of the charged potential when the glass substrate is placed on the tray (Invention) In actual use, there is a process of taking in and out of the glass substrate from the tray. That is, the protruding pin or the roller is lifted and lowered by passing between the frames below the tray, and the glass substrate is returned to contact/separate from the tray loading pin. Here, with respect to the charged potential when the glass substrate is placed on the tray, the material of the mounting pin, the protruding pin, and the roller is changed from phase to phase 13-200934711, and the charged potential (V) of the glass substrate is measured. Specifically, it is: (a) a combination of a mounting pin and a protruding pin (insulating property) of PEEK (polyether ether ketone resin) and a roller (conductivity) of a carbon-containing MC nylon, (b) a roll attached Combination of mounting pins and protruding pins (conductivity) of PEEK (polyether ether ketone resin) of aluminum foil and roller (conductivity) of carbon-resistant MC nylon, U ( c ) PEEK (polyether ether ketone resin) a combination of a mounting pin and a protruding pin (insulating) and a roller (insulating) to which a PVC tape is attached, and (d) a mounting pin and a protruding pin of PEEK (polyetheretherketone resin) to which an aluminum foil is attached A combination of a pin (conductivity) and a roller (insulating) to which a PVC tape is attached, while being lifted and lowered by a laser displacement meter, is placed on the roller while being lifted and lowered. A protruding pin between the shelves, lifting the glass substrate. At this time, the glass substrate is separated from the protruding pin when it is placed on the mounting pin, and is separated from the mounting pin when it is placed on the protruding pin. That is, the contact/disbonding of each pin is repeated. Further, the charged potential (V) placed on the upper and lower surfaces of the glass substrate of the tray was measured. Further, the glass substrate is measured after charging positive (+) or negative (-) 1 k V or more. Moreover, the lifting speed of the protruding pin is l.〇m/min without acceleration/deceleration. As a result, regardless of any of the conditions, even if the return is raised and lowered, the charged potential hardly changes, and it is impossible to recognize that there is a phenomenon similar to the peeling electrification. This is because the contact area between the glass substrate and the mounting pin is extremely small. As a result, it was confirmed that there was no problem in placing/removing the glass substrate on the tray. -14-200934711 [Other Embodiments] The above describes an embodiment of the present invention, but the present invention is not limited to the above-described embodiment. Various modifications can be made without departing from the scope of the invention (A). In the transport system 1 of the example, the tray 1 in which the insulating glass substrate W is transported, for example, has a frame 4 as shown in Figs. 4 and 5 . However, the present invention is not limited to this. For example, the portion on which the glass substrate W is placed may be formed of a conductive flat plate. (B) In the transport system 1 of the above embodiment, the entirety of the roller 25 is exemplified by, for example, a conductive material. However, the present invention is not limited to this. For example, in the roller 25 shown in Fig. 17, the contact portion 25a that is in contact with the tray 1 may be formed of a conductive material. In this case, if the contact © portion 25a is appropriately set to be grounded, the same effect as the transport system 100 of the above-described embodiment can be obtained. Further, it is not necessary that all of the rollers have conductivity, and only a part of them may have conductivity in a range in which a predetermined effect can be obtained. (C) In the transport system 100 of the above embodiment, the roller 25 is exemplified by, for example, a carbon-containing MC nylon. However, it is not limited to this. For example, it may be formed of a resin such as ultrahigh molecular weight polyethylene or polyether ruthenium containing a conductive material. Further, a roller may be formed of a conductive metal. -15- 200934711 Further, in the present embodiment, although experimental data of carbon-containing MC nylon was shown, it was confirmed that the same effect was obtained for the carbon-containing UPE. (D) In the transport system 1 of the above embodiment, the roller 25' is exemplified by an MC nylon which contains 1 to 50% by weight of carbon black to ensure conductivity. However, it is not limited to this. For example, it is also possible to contain 1 to 50% by weight of carbon fibers in the MC nylon. Further, it is also possible to contain 1 to 30% by weight of carbon nanotubes or carbon nanofibers. In the case of this 0, the same effect as the conveying system 100 of the above embodiment can be obtained. (E) In the transport system 1 of the above embodiment, the entirety of the tray 1 is exemplified by a conductive aluminum push-out member. However, it is not limited to this. For example, only the contact portion of the roller 25, that is, the outer flange 1 1 may be formed of a conductive material. Further, the same effect can be obtained by the SUS tray as shown in Fig. 9. The other conductive metal or the surface treatment to which conductivity is applied can also obtain the same effect. (F) In the conveyance system 1 of the above embodiment, the conveyance workpiece placed on the tray is exemplified as the glass substrate W. However, it is not limited to this. For example, a plate-like workpiece used for an electronic display (a liquid crystal display or a plasma display or the like), or a resin plate used for an organic EL display or illumination, or the like can also obtain the same effects as the transport system 100 of the above-described embodiment. (G) In the transport system i 00 of the above embodiment, an example in which the mounting pin 4 a formed on the rack 4 is provided is -16-200934711. However, it is not limited to this. For example, it is also possible to control the conveyance speed of the tray 1 on the conveyance conveyor 20 without relative movement between the tray 1 and the glass substrate W, that is, without slippage. In this case, charging due to friction or peeling occurring between the tray 1 and the glass substrate W can also be suppressed. Thereby, the effect of charging when suppressing the conveyance of the workpiece can be improved. u [Brief Description of the Drawings] [Fig. 1] An external view of a conveying system according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing a conveyance system according to an embodiment of the present invention. [Fig. 3] An enlarged cross-sectional view of the periphery of the roller in the first and second figures. Fig. 4 is an external view of the transport tray transported by the transport system of Fig. 1. [Fig. 5] φ plan view of the transport tray transported by the transport system of Fig. 1 [Fig. 6] The measurement result of the charged potential when the glass substrate is transported by a conventional transport method. [Fig. 7] A graph showing the speed curve (without acceleration/deceleration) at the time of measurement in Fig. 6. [Fig. 8] A graph showing the speed curve (with acceleration and deceleration) at the time of measurement in Fig. 6. [Fig. 9] Measurement results of the charged potential when various transport media are transported by a conventional transport method. -17- 200934711 [Fig. 10] (a) is a graph showing the speed curve in the SUS tray when the measurement in Fig. 9 is performed. (b) is a graph of the speed profile in the aluminum tray when the measurement of Fig. 9 is performed. [Fig. 11] The material of the tray and the roller will change the measurement result of the charged potential of the measurement. [Fig. 1 2] Photovoltaic electricity in the case where the aluminum substrate is placed on the glass substrate; 〇 [Fig. 1 3] A graph showing the speed curve (1 5 m/min, no acceleration/deceleration) at the time of measurement in Fig. 12. [Fig. 14] A graph showing the speed curve (30 m/min, no acceleration/deceleration) at the time of measurement in Fig. 12. [Fig. 15] A graph showing the speed curve (45 m/min, acceleration/deceleration) at the time of measurement in Fig. 12. [Fig. 16] A graph showing the speed curve (45 m/min, no acceleration/deceleration) at the time of measurement in Fig. 12.第 [Fig. 17] An enlarged cross-sectional view of the periphery of the roller of another embodiment of the present invention. [Description of main component symbols] 1 : Pallet for transport 2 : Frame 2 a : Frame member 4 : Shelf 4a : Mounting pin -18- 200934711 1 1 : Outer flange (contact) 1 2 : Inner flange 1 3 : inclined portion 20 : conveying conveyance belt 21 : support frame 2 1 a : main body 21b : support leg 25 : roller (contact portion) 2 5 a _ contact portion 26 : shaft 100 : conveying system
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