TW200932362A - Positioning-type mask - Google Patents
Positioning-type mask Download PDFInfo
- Publication number
- TW200932362A TW200932362A TW97102193A TW97102193A TW200932362A TW 200932362 A TW200932362 A TW 200932362A TW 97102193 A TW97102193 A TW 97102193A TW 97102193 A TW97102193 A TW 97102193A TW 200932362 A TW200932362 A TW 200932362A
- Authority
- TW
- Taiwan
- Prior art keywords
- positioning
- mask
- thin plate
- substrate
- area
- Prior art date
Links
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 11
- 238000002955 isolation Methods 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 10
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97102193A TW200932362A (en) | 2008-01-21 | 2008-01-21 | Positioning-type mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97102193A TW200932362A (en) | 2008-01-21 | 2008-01-21 | Positioning-type mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200932362A true TW200932362A (en) | 2009-08-01 |
| TWI362228B TWI362228B (enExample) | 2012-04-11 |
Family
ID=44865565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97102193A TW200932362A (en) | 2008-01-21 | 2008-01-21 | Positioning-type mask |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200932362A (enExample) |
-
2008
- 2008-01-21 TW TW97102193A patent/TW200932362A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI362228B (enExample) | 2012-04-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |