TW200931553A - Image-capturing device of the optical detection equipment for cleaving wafer - Google Patents
Image-capturing device of the optical detection equipment for cleaving wafer Download PDFInfo
- Publication number
- TW200931553A TW200931553A TW97101097A TW97101097A TW200931553A TW 200931553 A TW200931553 A TW 200931553A TW 97101097 A TW97101097 A TW 97101097A TW 97101097 A TW97101097 A TW 97101097A TW 200931553 A TW200931553 A TW 200931553A
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- TW
- Taiwan
- Prior art keywords
- wafer
- image
- image capturing
- component
- capturing device
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 52
- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 238000005520 cutting process Methods 0.000 claims abstract description 10
- 238000007689 inspection Methods 0.000 claims description 21
- 238000005336 cracking Methods 0.000 claims description 9
- 238000003776 cleavage reaction Methods 0.000 claims description 8
- 230000007017 scission Effects 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 108
- 239000013078 crystal Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 101100425901 Rattus norvegicus Tpm1 gene Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000011389 fruit/vegetable juice Nutrition 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97101097A TW200931553A (en) | 2008-01-11 | 2008-01-11 | Image-capturing device of the optical detection equipment for cleaving wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97101097A TW200931553A (en) | 2008-01-11 | 2008-01-11 | Image-capturing device of the optical detection equipment for cleaving wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200931553A true TW200931553A (en) | 2009-07-16 |
| TWI353032B TWI353032B (enExample) | 2011-11-21 |
Family
ID=44865335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97101097A TW200931553A (en) | 2008-01-11 | 2008-01-11 | Image-capturing device of the optical detection equipment for cleaving wafer |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200931553A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI447829B (enExample) * | 2011-10-12 | 2014-08-01 | ||
| TWI498990B (zh) * | 2012-12-19 | 2015-09-01 | Genesis Photonics Inc | 劈裂裝置 |
| CN113192871A (zh) * | 2021-05-19 | 2021-07-30 | 精良(北京)电子科技有限公司 | 一种用于芯片解理的裂片装置及芯片解理设备 |
-
2008
- 2008-01-11 TW TW97101097A patent/TW200931553A/zh not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI447829B (enExample) * | 2011-10-12 | 2014-08-01 | ||
| TWI498990B (zh) * | 2012-12-19 | 2015-09-01 | Genesis Photonics Inc | 劈裂裝置 |
| CN113192871A (zh) * | 2021-05-19 | 2021-07-30 | 精良(北京)电子科技有限公司 | 一种用于芯片解理的裂片装置及芯片解理设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI353032B (enExample) | 2011-11-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |