TW200928288A - Contact optical measurement method for work-piece profile - Google Patents
Contact optical measurement method for work-piece profile Download PDFInfo
- Publication number
- TW200928288A TW200928288A TW96149902A TW96149902A TW200928288A TW 200928288 A TW200928288 A TW 200928288A TW 96149902 A TW96149902 A TW 96149902A TW 96149902 A TW96149902 A TW 96149902A TW 200928288 A TW200928288 A TW 200928288A
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- contact
- work
- contour
- polarizer
- Prior art date
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- 230000003287 optical effect Effects 0.000 title claims abstract description 34
- 238000000691 measurement method Methods 0.000 title abstract description 8
- 238000012360 testing method Methods 0.000 claims abstract description 28
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 238000004364 calculation method Methods 0.000 claims abstract description 6
- 238000013461 design Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 108091008695 photoreceptors Proteins 0.000 claims 1
- 238000004458 analytical method Methods 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 4
- 230000010287 polarization Effects 0.000 abstract 3
- 230000001066 destructive effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000000523 sample Substances 0.000 description 5
- 230000001154 acute effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010205 computational analysis Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96149902A TW200928288A (en) | 2007-12-25 | 2007-12-25 | Contact optical measurement method for work-piece profile |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96149902A TW200928288A (en) | 2007-12-25 | 2007-12-25 | Contact optical measurement method for work-piece profile |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200928288A true TW200928288A (en) | 2009-07-01 |
| TWI349098B TWI349098B (cg-RX-API-DMAC7.html) | 2011-09-21 |
Family
ID=44863977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96149902A TW200928288A (en) | 2007-12-25 | 2007-12-25 | Contact optical measurement method for work-piece profile |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200928288A (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI710748B (zh) * | 2019-04-15 | 2020-11-21 | 財團法人工業技術研究院 | 輪廓精度量測系統及量測方法 |
-
2007
- 2007-12-25 TW TW96149902A patent/TW200928288A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI710748B (zh) * | 2019-04-15 | 2020-11-21 | 財團法人工業技術研究院 | 輪廓精度量測系統及量測方法 |
| US11506489B2 (en) | 2019-04-15 | 2022-11-22 | Industrial Technology Research Institute | Contour accuracy measuring system and contour accuracy measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI349098B (cg-RX-API-DMAC7.html) | 2011-09-21 |
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