TWI349098B - - Google Patents

Info

Publication number
TWI349098B
TWI349098B TW096149902A TW96149902A TWI349098B TW I349098 B TWI349098 B TW I349098B TW 096149902 A TW096149902 A TW 096149902A TW 96149902 A TW96149902 A TW 96149902A TW I349098 B TWI349098 B TW I349098B
Authority
TW
Taiwan
Application number
TW096149902A
Other languages
Chinese (zh)
Other versions
TW200928288A (en
Inventor
Po Hsun Hou
Peng Jen Chen
Jia Chang Chen
Chin Chich Chen
Shyue Wen Wu
Original Assignee
Metal Ind Res & Dev Ct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW96149902A priority Critical patent/TW200928288A/zh
Publication of TW200928288A publication Critical patent/TW200928288A/zh
Application granted granted Critical
Publication of TWI349098B publication Critical patent/TWI349098B/zh

Links

TW96149902A 2007-12-25 2007-12-25 Contact optical measurement method for work-piece profile TW200928288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96149902A TW200928288A (en) 2007-12-25 2007-12-25 Contact optical measurement method for work-piece profile

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96149902A TW200928288A (en) 2007-12-25 2007-12-25 Contact optical measurement method for work-piece profile

Publications (2)

Publication Number Publication Date
TW200928288A TW200928288A (en) 2009-07-01
TWI349098B true TWI349098B (cg-RX-API-DMAC7.html) 2011-09-21

Family

ID=44863977

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96149902A TW200928288A (en) 2007-12-25 2007-12-25 Contact optical measurement method for work-piece profile

Country Status (1)

Country Link
TW (1) TW200928288A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI710748B (zh) 2019-04-15 2020-11-21 財團法人工業技術研究院 輪廓精度量測系統及量測方法

Also Published As

Publication number Publication date
TW200928288A (en) 2009-07-01

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