200925074 九、發明說明 【發明所屬之技術領域】 本發明是有關使用搬運車搬運物品的搬運車系統，尤 其是有關對應具備風扇濾器單元的倉庫的搬運車系統。 【先前技術】 以往，使用高架行走車、有軌道台車、堆高式起重機 @ 及無人搬運車搬運物品的系統有搬運車系統。該搬運車系 統中，沿著搬運車的搬運路徑設有暫時保管物品的保管 部。 以上的搬運車系統有例如作爲搬運車的堆高式起重機 的自動倉庫。該自動倉庫設置具有收納物品的多數物品收 納棚架的載架作爲保管部，從載架複數設置以和堆高式起 重機不同的搬運車來移載物品的物品移載處的站。堆高式 起重機在軌道上行走到載架的預定棚架上，或站爲止，使 〇 載置物品的升降台升降，退出滑動式叉架，藉此在升降台 與載架及站之間移載物品。站間的物品的搬運是以和堆高 式起重機不同的搬運車進行。 自動倉庫的有關技術有例如專利文獻1記載的無塵室 用的自動倉庫。該技術中，自動倉庫的載架上，複數設置 稱爲風扇濾器單元（以下，稱FFU)的供給清潔空氣的裝 置，維持自動倉庫的潔淨度（清潔度）。 〔專利文獻1〕日本特開2005-231774號公報 200925074 【發明內容】 〔發明所欲解決的課題〕 但是，專利文獻1記載的自動倉庫有以下的問題。 亦即，該自動倉庫中雖相對於一例棚架設有一個 FFU，但是一部的FFU發生異常而不能正常動作時，對於 其故障產生的FFU所設置的棚架列不能維持著清潔度。 其結果，由於不能保持著清潔度的棚架的物品遭到污染， 0 將此污染的物品移動到其他棚架的場合，會導致使維持著 清潔度的棚架遭到污染等的事態發生。亦即，由於污染後 •的物品會污染到導持著清潔度的棚架爲止，導致以物品爲 媒體使污染擴大等事態的發生。 又’同時專利文獻1的無塵室用的自動倉庫中，堆高 式起重機對於不能維持著清潔度的棚架與維持著清潔度的 其他棚架在無區別狀態下進行物品的搬運。其結果，堆高 式起重機（升降台）以通常的搬運速度通過不能維持著清潔 〇 度的棚架前方而移動到其他棚架的場合，堆高式起重機本 身遭受污染’因此會發生該污染後的堆高式起重機所搬運 的物品整體遭受污染的事態。亦即，根據污染後的堆高式 起重機會造成清潔物品的污染，同時會有堆高式起重機爲 媒體導致污染擴大等事態的發生。 因此’本發明有鑑於上述的問題，提供可防止污染擴 大的搬運車系統爲目的。 〔解決課題的手段] -5- 200925074 爲達成上述目的，本發明的搬運車系統是使用搬運車 搬運物品的搬運車系統，其特徵爲，具備：於對每一風扇 濾器單元，記憶著與藉著該風扇濾器單元供給清潔空氣的 保管物品的區域相關的相關圖表的記憶部，及任一風扇爐 ' 器單元發生異常的場合，控制搬運車使得上述相關圖表中 與發生異常的風扇濾器單元相關區域的污染不致擴大的搬 運控制部。 0 在此，上述搬運控制部也可以決定搬運車的搬運路 徑，使其在任一的風扇瀘器單元發生異常的場合，不通過 -上述相關圖表中與發生異常的風扇濾器單元相關的區域。 又，上述搬運控制部也可以決定搬運車的搬運速度， 使其在任一的風扇濾器單元發生異常的場合，通過上述相 關圖表中與發生異常的風扇濾器單元相關區域時的速度低 於通過其他區域時的速度。 藉此，FFU的一部分形成異常的場合，控制搬運車不 〇 會由此通過不能維持著清潔的區域，並且通過時會降低速 度通過。因此，不會污染搬運車，可槪率高地防止搬運車 爲媒體之清潔物品污染的擴大。 又，上述搬運控制部也可以在任一風扇濾器單元發生 異常的場合，使得保管在上述相關圖表中與發生異常的風 扇濾器單元相關區域的物品避開到其他的區域。 藉此，FFU的一部分形成異常的場合，控制搬運車使 得不能維持著清潔的區域的物品避開。因此，不能維持著 清潔區域的物品不致遭受污染，可槪率高地防止物品爲媒 -6 - 200925074 體導致清潔棚架污染的擴大。 又’上述搬運車系統爲具備有保管物品的複數棚架的 載架；供給上述棚架清潔空氣的風扇濾器單元·，及搬運物 品的堆高式起重機的自動倉庫，上述搬運控制部也可以控 制堆高式起重機’使上述區域棚架的污染不致擴大到其他 棚架及物品。 藉此，可防止自動倉庫內的污染擴大》 0 又’上述搬運系統，具備：保管物品的複數個無塵 室；對上述無塵室供給清潔空氣的風扇濾器單元；及搬運 物品的搬運車，上述搬運控制部也可以控制搬運車，使上 述區域的無塵室的污染不致擴大到其他無塵室及物品。 藉此’可以防止複數具備無塵室的搬運車系統的污染 擴大。 〔發明效果〕 ❹ 根據本發明，可實現防止污染擴大的搬運車系統。 【實施方式】 以下，針對本發明實施形態的搬運車系統，一邊參閱 圖示說明如下。 (第1實施形態）第1圖爲本實施形態之無塵室用的自 動倉庫的剖視圖（FFU正上部的水平方向剖視圖）。第2圖 爲同自動倉庫的剖視圖（垂直方向剖視圖）。 該自動倉庫爲本發明搬運車系統的一例，爲堆高式起 200925074 重機1、載架2及FFU4所構成。 堆高式起重機1爲本發明搬運車的一例，具有從站 (未圖示）抽取入庫的物品將其搬運到載架2，並且從載架 2抽取出庫的物品將其搬運到站的功能。具體而言，堆高 式起重機1是在舖設於載架2前方的通路5的行走軌道6 上行走’使載放著物品8的升降台升降，使滑動式叉架退 出進行物品8的搬運。 ❹ 載架2是沿著堆高式起重機1的通路5設置，載架2 縱橫設置著保管物品8的複數個物品保管棚架。該棚架及 堆高式起重機1(升降台）通過的棚架前方爲本發明區域的 —例，不同棚架及該棚架前方爲不同的區域。載架2的背 面，即與通路5的相反側設有管路1 4，其外側是以不通 氣性外壁覆蓋。從載架2的FFU4背面之支柱22的部 分’即在FFU4背面的水平方向的兩端部分，設置一對噴 出口 20及21 。 © FFU4被設置在載架2的底部，對載架2供給清潔空 氣。每一台的FFU4設置一對的噴出口 20及21，從噴出 口 20及21使清潔空氣一邊噴出朝橫向擴開，一邊從載架 2的下部向上部流動。並且，第2圖中，箭頭是表示清潔 空氣的流動。 第3圖是表示本實施形態自動倉庫的功能性構成的方 塊圖。 該自動倉庫爲機構部30、控制部31、表示部32、輸 入部33、通訊i/f部34、搬運條件決定部35、避難指令 200925074 生成部36、棚架數據更新部37、記憶部39及FFU狀態 確認部42所構成。並且，控制部3 1、搬運條件決定部3 5 及避難指令生成部36爲本發明搬運控制部的一例。 機構部30爲堆高式起重機1及FFU4等的機構組件 的集合。 控制部31是根據搬運指令及避難指令等控制機構部 30 ° ❹ 表示部 3 2 爲 CRT(Cathod-Ray Tube)或者 LCD(LiquidBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transport vehicle system for transporting articles using a transport vehicle, and more particularly to a transport vehicle system corresponding to a warehouse having a fan filter unit. [Prior Art] In the past, a system using an overhead traveling vehicle, an orbiting trolley, a stacker crane @, and an automated guided vehicle to carry articles has a transport vehicle system. In the transport vehicle system, a storage unit for temporarily storing articles is provided along the transport path of the transport vehicle. The above-described truck system has, for example, an automatic warehouse for a stacker crane as a transport vehicle. The automatic warehouse is provided with a carrier that accommodates a plurality of articles and houses a scaffold as a storage unit, and a station in which the articles are transferred from the transport vehicle different from the stacker crane is transported from the carrier. The stacker crane travels on the track to the predetermined scaffolding of the carrier, or stands up, so that the lifting platform on which the article is placed is lifted and lowered, and the sliding fork frame is withdrawn, thereby moving between the lifting platform and the carrier and the station. Loading items. The handling of items between stations is carried out in a different way than a stacker. The related art of the automatic warehouse is, for example, an automatic warehouse for a clean room described in Patent Document 1. In this technique, a device for supplying clean air called a fan filter unit (hereinafter referred to as FFU) is provided on a carrier of an automatic warehouse to maintain the cleanliness (cleanliness) of the automatic warehouse. [Problem to be Solved by the Invention] However, the automatic warehouse described in Patent Document 1 has the following problems. That is, in the automatic warehouse, although one FFU is provided with respect to one example of the scaffold, when one of the FFUs is abnormal and cannot operate normally, the scaffold row provided for the FFU caused by the failure cannot maintain the cleanliness. As a result, the articles of the scaffold which cannot maintain the cleanliness are contaminated. 0 When the contaminated articles are moved to other scaffoldings, the scaffolding which maintains the cleanliness is contaminated. That is, since the items after the contamination are contaminated by the scaffolding that guides the cleanliness, the occurrence of pollution by the use of the articles as the medium is caused. Further, in the automatic warehouse for a clean room of Patent Document 1, the stacker crane carries the articles in a state in which the scaffold which cannot maintain the cleanliness and the other scaffolds which maintain the cleanliness are in an indistinguishable state. As a result, when the stacker crane (lifting platform) moves to the other scaffolding frame at a normal conveying speed through the front of the scaffold which cannot maintain the cleanness, the stacking crane itself is contaminated, and thus the pollution occurs. The overall handling of the items carried by the stacker is contaminated. That is to say, according to the contaminated stacker crane, the pollution of the cleaning articles may be caused, and at the same time, the stacking crane may cause the pollution to expand due to the media. Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a transportation vehicle system capable of preventing pollution from being enlarged. [Means for Solving the Problem] -5- 200925074 In order to achieve the above object, the transport vehicle system of the present invention is a transport vehicle system that transports articles using a transport vehicle, and is characterized in that it is provided for storing and lending to each of the fan filter units. When the fan filter unit supplies the memory unit of the relevant section of the area for storing the clean air, and if any of the fan unit units is abnormal, the control vehicle is controlled to cause the abnormality of the fan filter unit in the related chart. The traffic control department of the area is not enlarged. Here, the conveyance control unit may determine the conveyance path of the conveyance vehicle so that, in the case where an abnormality occurs in any of the fan unit units, the area related to the fan filter unit in which the abnormality has occurred is not passed. Further, the conveyance control unit may determine the conveyance speed of the conveyance vehicle so that when any of the fan filter units is abnormal, the speed in the relevant diagram is related to the area of the fan filter unit where the abnormality occurs, and the speed is lower than that of the other area. The speed of time. Thereby, when a part of the FFU is abnormal, the control of the conveyance vehicle does not pass through the area where the cleaning cannot be maintained, and the speed is lowered when passing. Therefore, it does not pollute the truck, and it can prevent the truck from increasing the pollution of the cleaning products of the media. Further, in the case where an abnormality occurs in any of the fan filter units, the conveyance control unit may prevent an article stored in the relevant map from the region related to the fan filter unit in which the abnormality has occurred from being bypassed to another region. As a result, when a part of the FFU is abnormal, the conveyance vehicle is controlled to prevent the articles in the cleaned area from being avoided. Therefore, it is impossible to maintain the items in the clean area without being contaminated, and the high rate of prevention can prevent the articles from being contaminated by the medium -6 - 200925074. Further, the transport vehicle system is a carrier including a plurality of scaffolds for storing articles, a fan filter unit for supplying the scaffold clean air, and an automatic warehouse for stacking cranes for transporting articles, and the transport control unit can also control The high-rise cranes do not allow the pollution of the scaffolding in the above areas to be extended to other scaffolding and articles. In this way, it is possible to prevent contamination in the automatic warehouse. 0. The above-described transportation system includes: a plurality of clean rooms for storing articles; a fan filter unit for supplying clean air to the clean room; and a transport vehicle for transporting articles. The conveyance control unit can also control the transportation vehicle so that the contamination of the clean room in the area is not expanded to other clean rooms and articles. By this, it is possible to prevent contamination of a plurality of truck systems having a clean room. [Effect of the Invention] According to the present invention, it is possible to realize a transport vehicle system that prevents contamination from expanding. [Embodiment] Hereinafter, a transport vehicle system according to an embodiment of the present invention will be described below with reference to the drawings. (First Embodiment) Fig. 1 is a cross-sectional view (a horizontal cross-sectional view of the upper portion of the FFU) of the automatic warehouse for a clean room of the present embodiment. Figure 2 is a cross-sectional view of the same automated warehouse (vertical cross-sectional view). This automatic warehouse is an example of the transportation vehicle system of the present invention, and is composed of a stacker type 200925074 heavy machine 1, a carrier 2, and an FFU 4. The stacking crane 1 is an example of a transport vehicle of the present invention, and has a function of transporting an article picked up from a station (not shown) to the carrier 2, and extracting the articles from the rack 2 and transporting the articles to the station. Specifically, the stacker crane 1 travels on the traveling rail 6 of the passage 5 laid in front of the carrier 2, and elevates and lowers the lifting platform on which the article 8 is placed, and the sliding fork is retracted to carry the article 8. ❹ The carrier 2 is provided along the passage 5 of the stacking crane 1, and the carrier 2 is provided with a plurality of article storage racks for storing the articles 8 in the vertical and horizontal directions. The front of the scaffolding through which the scaffolding and the stacking crane 1 (elevating platform) pass is an example of the area of the invention, and the different scaffoldings and the front of the scaffolding are different areas. The back side of the carrier 2, i.e., the side opposite the passage 5, is provided with a conduit 14 which is covered by a non-venting outer wall. A pair of discharge ports 20 and 21 are provided from the portion of the pillar 22 on the back surface of the FFU 4 of the carrier 2, that is, at both end portions in the horizontal direction on the back surface of the FFU 4. © FFU4 is placed at the bottom of the carrier 2 to supply clean air to the carrier 2. Each of the FFUs 4 is provided with a pair of discharge ports 20 and 21, and the discharge air is ejected from the discharge ports 20 and 21 toward the lateral direction, and flows from the lower portion of the carrier 2 to the upper portion. Further, in Fig. 2, an arrow indicates the flow of the clean air. Fig. 3 is a block diagram showing the functional configuration of the automatic warehouse of the embodiment. The automatic warehouse is the mechanism unit 30, the control unit 31, the display unit 32, the input unit 33, the communication i/f unit 34, the conveyance condition determination unit 35, the evacuation command 200925074 generation unit 36, the scaffolding data update unit 37, and the storage unit 39. The FFU status confirmation unit 42 is configured. Further, the control unit 31, the conveyance condition determination unit 35, and the evacuation command generation unit 36 are examples of the conveyance control unit of the present invention. The mechanism unit 30 is a collection of mechanism components such as a stacker crane 1 and an FFU 4. The control unit 31 is a control unit 30° according to a conveyance command and an evacuation command. The display unit 3 2 is a CRT (Cathod-Ray Tube) or an LCD (Liquid).
Crystal Display)等，輸入部33爲鍵盤或者滑鼠等，該等 是作爲本自動倉庫與操作員間對話等使用。 通訊I/F部34是作爲堆高式起重機1及FFU4的通訊 等使用。 搬運條件決定部3 5是根據搬運指令決定物品8的搬 運路徑及搬運速度等的搬運條件。搬運條件的決定是參照 棚架數據41來進行，FFU4發生異常的場合，控制堆高式 〇 起重機1使異常的FFU4所供給清潔空氣造成棚架的污染 不致擴大到該棚架以外的其他棚架及物品。搬運路徑爲堆 高式起重機1(升降台）通過前方的棚架的順序，搬運速度 是通過棚架前方時的速度。 避難指令生成部36在FFU4的其中之一故障、風扇 的異常或濾器堵塞等致收到異常報告的場合，控制堆高式 起重機1發出避難指令使異常的FFU4所供給清潔空氣造 成棚架的污染不致擴大到其他的棚架及物品。避難指令是 將不能供給清潔空氣的非潔淨棚架的物品8移動到供給清 -9- 200925074 潔空氣的潔淨棚架的指令。 棚架數據更新部37收到異常報告的場合，更新棚架 數據41»棚架數據41的更新是以數據40導致異常FFU4 的相關棚架作爲非潔淨棚架登錄至棚架數據41進行。 記憶部3 9爲硬碟或者記憶體等，保持著相關圖表40 及棚架數據41等。 第4圖及第5圖是表示相關圖表40及棚架數據41的 H 例。並且，第4圖及第5圖中FFU及棚架文字橫向所賦 予的號碼是爲了特定各棚架及FFU4全部預先所賦予的棚 架及FFU4的號碼。 相關圖表40是針對每一 FFU4，與該FFU4所供給清 潔空氣的棚架互相關聯。例如1號的FFU4是關於1~8號 的棚架。具有第1圖及第2的構成的自動倉庫中，例如同 列的棚架是與該列的FFU4互相關聯。 棚架數據41是對於載架2的全部棚架表示其狀態。 〇 第5圖中「空氣狀態」是表示是否爲潔淨的棚架，「〇」 是表示潔淨的棚架，「X」是表示非潔淨的棚架。又， 「空狀態」是表示物品8是否爲入庫的棚架，「〇」是表 示物品8未入庫的棚架，「X」是表示物品8入庫的棚 架。例如，1號的棚架是表示潔淨且物品8未入庫的棚 架。 FFU狀態確認部42是確認在預先所決定的期間中 FFU4是否發生異常。 第6圖是說明具有上述構成的自動倉庫的物品8搬運 -10- 200925074 動作用的流程圖。 首先，搬運條件決定部35是經輸入 I/F34接收搬運指令，決定搬運路徑（步驟 言’搬運條件決定部35是在搬運指令所表 架上，儘可能不通過棚架數據41所表示 方，且儘可能縮短搬運時間，來決定物品8 此時，以搬運指令表示搬進處的非潔淨棚 n 定：以搬進處作爲非潔淨棚架以外的棚架； 搬進處爲非潔淨的棚架或不進行搬運而結束 例如，搬運指令表示搬進處的棚架爲4 數據41表示29〜32號的棚架爲非潔淨的棚 開第7圖表示的29~ 32號的棚架前方決定到 徑的搬運路徑。 另一方面，搬運指令表示搬進處棚架的 棚架數據41表示25~32號棚架的非潔淨的 φ 無避開25〜32號的棚架前方到達4號棚架的 決定通過非潔淨棚架前方的次數最少的路 25〜32號棚架其中之一的前方的路徑作爲 如，決定僅通過第8圖表示的32號棚架前 搬運路徑。 接著，搬運條件決定部35是決定搬 S61)。具體而言，搬運條件決定部35以所 徑爲前提，判定是否通過非潔淨棚架前方的 且，通過非潔淨棚架前方路徑的搬運路徑的 部33或通訊 S60)。具體而 示搬進處的棚 非潔淨棚架前 的搬運路徑。 架的場合，決 通知使用者此 動作。 號棚架，棚架 架。此時，避 達4號棚架路 4號棚架，以 棚架。此時， 路徑。因此， 徑，即僅通過 搬運路徑。例 方的路徑作爲 運速度（步驟 決定的搬運路 搬運路徑。並 場合，決定物 200925074 品8的搬運速度使得通過非潔淨棚架前方時的堆高式起重 機1的速度低於通過潔淨的其他棚架前方時的速度。另一 方面，在不是通過非潔淨棚架前方的搬運路徑的場合’決 定物品8的搬運速度爲一定速度。 例如，第7圖表示的搬運路徑的場合，可以完全不通 過非潔淨的29〜3 2號棚架前方即可到達目的的4號棚架。 因此，從站到4號棚架爲止可決定以一定速度搬運物品 ❿ 8。 另一方面，第8圖表示的搬運路徑的場合，不通過非 潔淨32號的棚架前方極不能到達目的的4號棚架。因 此，決定在通過32號的棚架前方時會降低堆高式起重機 1(升降台）的速度盡早搬運物品8，除此之外是以一定速度 搬運物品8。 最後，控制部3 1是以搬運條件決定部3 5所決定的搬 運條件，控制機構部3 0將站的物品8搬運到以搬運指令 〇 所表示搬進處的棚架（步驟S62)。 第9圖是說明具有上述構成的自動倉庫之物品8的避 難動作用的流程圖。 首先，FFU狀態確認部42確認預定的FFu4發生異 常（步驟S7 1)。具體而言，FFU狀態確認部42確認出因異 常預定的FFU4不能供給清潔空氣，將異常發生報告給避 難指令生成部36。 接著，避難指令生成部36收到異常的報告，根據預 定的FFU4的異常特定形成非潔淨的棚架（步驟S72)。具 -12- 200925074 體而言，避難指令生成部36在相關圖表40特定收到異常 報告的FFU4相關的棚架。 例如，避難指令生成部36收到2號的FFU4發生異 常的報告的場合，第4圖的相關圖表40中2號的FFU4 與9〜16號的棚架互相關聯，因此特定9〜16號的棚架。 接著，棚架數據更新部37以所特定的棚架作爲非潔 淨的棚架予以登錄，更新棚架數據41(步驟S73)。具體而 0 言，避難指令生成部36是以棚架數據41所特定棚架的 「空氣狀態」的欄爲「X」。 接著，避難指令生成部36確認所特定的棚架是否有 物品8入庫，入庫的場合，生成使其物品8避難至潔淨棚 架的避難指令（步驟S 74)。具體而言，避難指令生成部36 在棚架數據41中，「空氣狀態」的欄爲「X」，「空狀 態」的欄爲「X」的場合，生成指令使其棚架的物品8在 棚架數據41中避難至「空氣狀態」的欄爲「〇」，「空 Q 狀態」的欄形成爲「〇」的棚架。並且，所特定的棚架中 物品8未入庫的場合，避難指令生成部36不生成避難指 令結束動作。 最後，控制部31控制機構部3 0以避難指定生成部 3 6所生成的避難指令所表示的內容進行物品8的搬運（步 驟S75)。具體而言，控制部31控制機構部30將非潔淨 棚架的物品8搬運到潔淨且空的棚架內。 如上述，根據本實施形態的自動倉庫，FFU4形成異 常不能正常動作的場合，控制使物品8的搬運不會通過未 -13- 200925074 保持著潔淨的棚架前方，且通過時會降低速度通過。因 此，不會污染堆高式起重機，可以高槪率地防止因堆高式 起重機爲媒體導致潔淨物品污染的擴大。 又，根據本實施形態的自動倉庫’ FFU4形成異常不 能動作的場合，可藉此將不能保持著潔淨的棚架的物品8 移動到其他棚架。因此，不會爲不能保持著潔淨的棚架的 物品所污染，可以高槪率地防止物品爲媒體擴大到對潔淨 II 棚架的污染。 (第2實施形態）第1 0圖是表示本實施形態的搬運車 系統的槪略構成圖。 該搬運車系統爲控制器50;複數個無塵室53;搬運 車51及複數個FFU54所構成。 無塵室53是藉通路連結。堆高式起重機1通過的無 塵室53爲本發明區域的一例，不同的無塵室53爲不同的 區域。各無塵室53設有暫時保管物品8的保管部，及作 〇 爲搬運車51與保管部的站。 控制器50是經網路與搬運車51及FFU54導電連 接，管理著無塵室53間的物品8的搬運。具體而言，控 制器50在與搬運車51之間進行搬運指令及避難指令的通 訊來管理物品8的搬運。控制器50與搬運車51及FFU54 之間的通訊是例如，經由沿著物品8的搬運路徑舖設的通 訊線（通訊用的傳送媒體）來進行。該通訊線連接在控制器 5〇的同時，搬運車51搭載有可在該通訊線之間進行指令 傳收訊用的通訊裝置。 -14- 200925074 搬運車51是行走在行走軌道上的高架行走車及有軌 道台車等，搭載物品8進行無塵室5 3間的物品8的搬 運。 FFU 5 4被設置在每個無塵室53，例如配設在無塵室 53的頂棚，對本體所配設的無塵室53供給清潔空氣。 第11圖是表示控制器50及搬運車51的功能性構成 的方塊圖。 © 該控制器50爲表示部62、輸入部63、通訊I/F部 64、搬運條件決定部65、避難指令生成部66、室數據更 新部67、記憶部69及FFU狀態確認部72所構成。 表示部 62 爲 CRT(Cathode-Ray Tube)或者 LCD (Liquid Crystal Display)等，輸入部63爲鍵盤或者滑鼠 等，該等是作爲主控制器50與操作員的對話等之用。 通訊I/F部64是使用在控制器50與搬運車51及 FFU54的通訊等。 〇 搬運條件決定部65是根據搬運指令來決定物品8的 搬運路徑及搬運速度等的搬運條件。搬運條件的決定是參 照室數據71進行，FFU5 4發生異常的場合，控制搬運車 51使得因發生異常的FFU54對供給清潔空氣的無塵室53 的污染不致擴大到該無塵室53以外的其他無塵室53及物 品8。搬運路徑爲搬運車51通過的無塵室53的順序，搬 運速度則是通過無塵室53時搬運車51的速度。 避難指令生成部66收到FFU54其中之一形成異常的 報告的場合，生成控制搬運車51的避難指令使得因發生 -15- 200925074 異常的FFU5 4對供給清潔空氣的無塵室53的污染不致擴 大到其他的無塵室53及物品8。避難指令是將不能供給 清潔空氣的非潔淨無塵室53的物品8移動到供給清潔空 氣的潔淨無塵室53的指令。 室數據更新部67收到異常報告的場合，更新室數據 71。室數據71的更新是在相關圖表70中以形成異常的 FFU54相關的無塵室53作爲非潔淨無塵室53登錄到室數 ❹ 據中加以進行。 記憶部69爲硬碟或者記憶體等，保持著相關圖表70 及室數據71等。 第12圖及第13圖是表示相關圖表70及室數據71的 例圖。並且，第12圖及第13圖中，FFU及無塵室的文字 橫向所賦予的號碼是爲了特定各無塵室53及FFU54全部 預先所賦予的棚架及FFU4的號碼。 相關圖表70是針對每一 FFU54，與該FFU54所供給 ❿ 清潔空氣的無塵室53互相關聯。例如1號的FFU54是關 於1號的無塵室5 3。 室數據71是針對所有的無塵室53表示其狀態。第 13圖中「空氣狀態」是表示是否爲潔淨的無塵室53, 「〇」是表示潔淨的無塵室53，「X」是表示非潔淨的無 塵室53。又，「空狀態」是表示相對於物品8的入庫是 否爲空而可保管新的物品8的無塵室53，「〇」是表示 可保管新的物品8的無塵室53，「X」是表示不能保管新 的物品8的無塵室5 3。「入庫狀態」是表示是否有物品8 -16- 200925074 入庫的無塵室53，「〇」是表示有物品8入庫的無塵室 53，「X」是表示無物品8入庫的無塵室53。例如，表示 1號的無塵室53是潔淨有物品8入庫，並可保管新的物 品8的無塵室5 3。 FFU狀態確認部72是確認在預先所決定的期間中 FFU54是否發生異常。 搬運車51爲機構部60、控制部61及通訊部I/F部 © 68所構成。並且，控制部61、搬運條件決定部65及避難 指令生成部66是本發明搬運控制部的一例。 機構部60是車輪及驅動該車輪的馬達等機構組件的 集合。控制部61是根據搬運指令及避難指令等控制機構 部60。通訊I/f部68是使用於搬運車51與控制器50的 通訊等。 第14圖是說明具有上述構成的搬運車系統的物品8 搬運動作的流程圖。 © 首先，搬運條件決定部65是經輸入部63或通訊 I/F64接收搬運指令，決定搬運路徑（步驟S80)。具體而 言，搬運條件決定部65是在搬運指令所表示搬出處到搬 進處，儘可能不通過無塵室71所表示非潔淨的無麈室 53，且儘可能縮短搬運時間，來決定物品8的搬運路徑。 此時，以搬運指令表示搬進處的非潔淨無塵室53的場 合，決定：以搬進處爲非潔淨無塵室53以外的其他無塵 室53，通知使用者此搬進處爲非潔淨的棚架或不進行搬 運而結束動_。 -17- 200925074 例如’搬運指令表示搬進處的無塵室53爲4號無塵 室53與搬出處的無塵室53爲9號無塵室53。並且，以 室數據71表示3號及5號的無塵室53作爲非潔淨的無塵 室53。此時，避開如第15圖表示的1、3及5號的無麈 室53決定到達4號無塵室53的路徑作爲搬運路徑。 另一方面，以搬運指令表示作爲搬進處的無塵室53 的1號無塵室53及作爲搬出處的無麈室53的9號無塵室 ❹ 53。並且’以室數據71表示4、5及6號的無塵室53作 爲非潔淨的無塵室53。此時，無避開4、5及6號的無塵 室53到達1號無塵室53的路徑。因此，決定通過非潔淨 無塵室53的次數最少的路徑，即僅通過4、5及6號的無 麈室53其中之一的路徑作爲搬運路徑。例如，決定僅通 過第16圖表示的6號無塵室53的路徑作爲搬運路徑。 接著，搬運條件決定部65是決定搬運速度（步驟 S81)。具體而言，搬運條件決定部65以所決定的搬運路 〇 徑爲前提，判定是否通過非潔淨無塵室53的搬運路徑。 並且，通過非潔淨無塵室53的搬運路徑的場合，決定物 品8的搬運速度使得通過非潔淨無塵室53時的搬運車51 的速度低於通過潔淨的其他無麈室53時的速度。另一方 面，在不是通過非潔淨無塵室53的搬運路徑的場合，決 定物品8的搬運速度爲一定速度。 例如，第15圖表示的搬運路徑的場合，可以完全不 通過非潔淨的1、3及5號的無塵室53即可到達目的的4 號無塵室53。因此，從9號無塵室53到4號無麈室53 -18- 200925074 爲止可決定以一定速度搬運物品8。 另一方面，第16圖表示的搬運路徑的場合，僅能通 過非潔淨的6號無塵室53始能到達目的的1號無塵室 53。因此，決定通過6號無塵室53時降低搬運車51的速 度來搬運物品8，除此之外是以一定速度搬運物品8。 接著，搬運條件決定部65以逖決定的搬運條件搬蓮 物品8，及將作爲搬進處與搬出處的無塵室53所表示的 ❹ 搬運指令，經由通訊I/F部64送訊到搬運車51(步驟 S82) ° 最後，控制部61根據經由通訊I/F部68收到的指 令，在所決定的搬運條件下控制機構部30將搬出處的無 塵室53的物品8搬運到搬進處的無塵室53(步驟S83)。 第17圖是說明具有上述構成的搬運車系統之物品8 的避難動作用的流程圖。 首先，預定的FFU54發生異常的場合（步驟S90)， 〇 FFU狀態確認部72確認預定的FFU54發生異常（步驟 S91)。具體而言，FFU狀態確認部72確認出因異常預定 的FFU54不能供給清潔空氣，將異常發生報告給避難指 令生成部66。 接著，避難指令生成部66收到異常的報告，根據預 定的FFU54的異常特定形成非潔淨的無塵室53(步驟 S 92)。具體而言，避難指令生成部66在相關圖表70特定 形成異常的FFU54相關的無塵室53。 例如，避難指令生成部66收到2號的FFU54發生異 -19- 200925074 常的報告的場合，第12圖的相關圖表7〇中2號的FFU54 與2號的無塵室53互相關聯’因此特定2號的無塵室 53 = 接著，室數據更新部67以所特定的無塵室53作爲非 潔淨的無塵室53予以登錄’更新室數據71 (步驟S93)。 具體而言，避難指令生成部66是以室數據71所特定無塵 室53的「空氣狀態」的欄爲「X」。 0 接著，避難指令生成部66確認所特定的無塵室53是 否有物品8入庫’入庫的場合’生成使其物品8避難至潔 淨無塵室53的避難指令（步驟S94)。具體而言，避難指令 生成部66在室數據71中，「空氣狀態」的欄爲「x」， 「入庫狀態」的欄形成「〇」的場合，生成指令使其無塵 室53的物品8在室數據71中避難至「空氣狀態」的欄爲 「〇」，「空狀態」的欄形成爲「〇」的無塵室53。並 且，所特定的無塵室53中物品8未入庫的場合，避難指 〇 令生成部66不生成避難指令結束動作。 接著，避難指令生成部66將所生成的避難指令經由 通訊I/F部64送訊到搬運車51(步驟S95)。 最後，控制部61控制機構部60根據經由通訊I/F部 68所收訊的搬運指令，進行物品8的搬運（步驟S96)。具 體而言’控制部61控制機構部60將非潔淨無塵室53的 物品8，搬運到潔淨並可保管新的物品8無塵室5 3。 如上述’根據本實施形態搬運車系統，FFU54形成異 常不能正常動作的場合，控制使物品8的搬運不會通過未 -20- 200925074 #持著:潔 '淨的無麈室53，且通過時會降低速度通過。因 此，不會污染搬運車51 ’可以高槪率地防止因搬運車爲 媒體導致潔淨物品污染的擴大。 又，根據本實施形態的搬運車系統’ FFU54形成異常 不能動作的場合’可藉此將不能保持著潔 '淨的無塵室5 3 的物品8移動到其他無塵室53°因此’不會爲不能保持 著潔淨的無塵室53的物品8所污染’可以高槪率地防止 0 物品爲媒體擴大到對於無塵室5 3的污染。 以上，針對本發明的搬運車系統’根據實施的形態已 作說明。但是，本發明不僅限於此一實施形態。在不脫離 本發明要旨的範圍內該業者所可思及並施以種種變更等皆 包含於本發明之範圍內。 上述實施形態中，FFU被設置在每一無塵室內，相關 圖表中使得1個無塵室與1個FFU互相關聯。但是，FFU 也可以相對於複數個無塵室設置1個，相關圖表中使得複 〇 數個無麈室與1個FFU互相關聯。此時，與1個FFU相 關聯的複數個無塵室是形成本發明的1個區域。並且，也 可以在1個無塵室設置複數個FFU，在相關圖表中使1個 無塵室與複數個FFU互相關聯。另外，潔淨度不僅是正 常·異常的2種類，也可以分爲數階段。 爲了實現上述的構成，例如在控制器設置圖表最佳化 部，在無塵室設置測定無麈室的潔淨度的粒子計數器等。 圖表最佳化部是根據潔淨度的測定結果在相關圖表中增減 與FFU相關聯之無塵室數量。亦即，圖表最佳化部在其 -21 - 200925074 中之一無塵室中潔淨度低於臨界値時，相關圖表中，減少 與清潔空氣供給至潔淨度低於臨界値的無塵室的FFU相 關聯之無塵室的數量。另一方面，其中之一無塵室中潔淨 度高於臨界値時，相關圖表中，增加與清潔空氣供給至潔 淨度高於臨界値的無塵室的FFU相關聯之無塵室的數 Q 〔產業上的可利用性〕 本發明可利用於搬運車系統，尤其可利用於具備FFU 的搬運車系統等。 【圖式簡單說明】 第1圖爲本發明第1實施形態的無塵室用的自動倉庫 的剖面圖（FFU正上方部的水平方向剖面圖）。 第2圖爲同一實施形態的自動倉庫的剖面圖（鉛直方 ❹ 向剖面圖）。 第3圖是表示同一實施形態的自動倉庫的功能性構成 的方塊圖。 第4圖是表示相關圖表的例圖。 第5圖是表示棚架數據的例圖。 第6圖是說明同一實施形態的自動倉庫的物品搬運動 作用的流程圖。 第7圖是說明搬運路徑及搬運速度的決定動作用的 圖。 -22- 200925074 第8圖是說明搬運路徑及搬運速度的決定動作用的 圖。 第9圖是說明同一實施形態的自動倉庫的物品避難動 作用的流程圖。 第1 0圖爲本發明第2實施形態的搬運車系統的槪略 構成圖。 第11圖是表示同一實施形態的搬運車系統的控制器 Q 及搬運車的功能性構成的方塊圖。 第12圖是表示相關圖表的例圖。 第13圖是表示室數據的例圖。 第14圖是說明同一實施形態的搬運車系統的物品搬 運動作用的流程圖。 第15圖是說明搬運路徑及搬運速度的決定動作用的 圖。 第16圖是說明搬運路徑及搬運速度的決定動作用的 ❹ 圖。 第17圖是說明同一實施形態的搬運車系統的物品避 難動作用的流程圖。 【主要元件符號說明】 1 :堆高式起重機 2 :載架 4、54 : FFU 5 :通路 23- 200925074 6 :行走軌道 8 :物品 14 :管路 1 6 :外壁 20、2 1 :噴出口 2 2 :支柱 3 0、6 0 :機構部 φ 3 1、6 1 :控制部 訊I/F部 件決定部 令生成部 新部 表 態確認部 32、62 :顯示部 3 3、6 3 :輸入部 34 、 64 、 68 :通 3 5、6 5 :搬運條 36、66 :避難指 37 :棚架數據更 3 9、6 9 :記憶部 Q 40、70:相關圖 41 :棚架數據 42 、 72 ： FFU 狀 50 :控制器 部 5 1 :搬運車 53 :無塵室 67 :室數據更新 71 :室數據 -24-The input unit 33 is a keyboard or a mouse, etc., and is used as a dialogue between the automatic warehouse and the operator. The communication I/F unit 34 is used as communication between the stacker 1 and the FFU 4. The conveyance condition determination unit 35 is a conveyance condition for determining the conveyance path, the conveyance speed, and the like of the article 8 based on the conveyance command. The transportation condition is determined by referring to the scaffolding data 41. When the FFU 4 is abnormal, the stacking crane 1 is controlled so that the clean air supplied by the abnormal FFU 4 causes the scaffolding pollution to not spread to other scaffolds other than the scaffold. And items. The transport path is the order in which the stacker 1 (elevator) passes through the scaffolding in the front, and the transport speed is the speed at the front of the scaffold. The evacuation command generating unit 36 controls the stacker 1 to issue an evacuation command to cause the scavenging of the clean air supplied by the abnormal FFU 4 when one of the failures of the FFU 4, the abnormality of the fan, or the clogging of the filter is received. Do not expand to other scaffolding and items. The evacuation order is an instruction to move the item 8 of the non-clean scaffold that cannot supply clean air to the clean scaffold that supplies the clean air -9-200925074 clean air. When the scaffolding data update unit 37 receives the abnormality report, the update of the scaffolding data 41»the scaffolding data 41 is performed by registering the scaffolding of the abnormal FFU4 with the data 40 as the non-clean scaffolding to the scaffolding data 41. The memory unit 39 is a hard disk or a memory, and the related chart 40 and the scaffolding data 41 are held. 4 and 5 are views showing H examples of the related chart 40 and the scaffolding data 41. Further, the numbers assigned in the horizontal direction of the FFU and the scaffolding text in Figs. 4 and 5 are for specifying the number of the scaffolding and the FFU 4 which are given in advance for each of the scaffolding and the FFU 4. The associated chart 40 is for each FFU 4 that is associated with the scaffold that supplies the clean air to the FFU 4. For example, the FFU4 of No. 1 is about the scaffolding of No. 1~8. In the automatic warehouse having the first and second configurations, for example, the same scaffolding is associated with the FFU 4 of the column. The scaffolding data 41 indicates the state of all the scaffoldings of the carrier 2. 〇 In Figure 5, "air state" is a scaffolding indicating whether it is clean, "〇" is a clean scaffolding, and "X" is a non-clean scaffolding. Further, the "empty state" is a scaffold indicating whether or not the article 8 is stored, "〇" is a scaffold indicating that the article 8 is not stored, and "X" is a scaffold indicating that the article 8 is stored. For example, the scaffolding No. 1 is a scaffold that indicates that it is clean and that the item 8 is not in storage. The FFU status confirming unit 42 checks whether or not the FFU 4 has an abnormality in the period determined in advance. Fig. 6 is a flow chart for explaining the action of the article 8 transporting -10-200925074 of the automatic warehouse having the above configuration. First, the conveyance condition determination unit 35 receives the conveyance command via the input I/F 34, and determines the conveyance path (the step 'the conveyance condition determination unit 35 is on the conveyance command table, and does not pass the scaffolding data 41 as much as possible. And, as long as the transportation time is shortened as much as possible, the item 8 is determined. At this time, the non-cleaning shed is indicated by the transportation instruction: the moving place is a scaffold other than the non-clean scaffold; the moving place is a non-clean shed. The rack is not transported, for example, the transport command indicates that the scaffolding at the loading position is 4 data 41 indicates that the scaffolding brackets 29 to 32 are unclean, and the scaffolding of 29 to 32 shown in Fig. 7 is determined in front of the scaffolding. On the other hand, the conveyance command indicates that the scaffolding data 41 of the scaffolding in the loading place indicates that the scaffolding of the 25 to 32 scaffolding is not clean. The frame is determined by the path in front of one of the roads 25 to 32 in the front of the non-cleaning scaffold, and the path of the front of the scaffolding No. 32 shown in Fig. 8 is determined as follows. The determination unit 35 determines to move S61). Specifically, the conveyance condition determination unit 35 determines whether or not to pass the portion 33 of the conveyance path of the non-clean scaffolding front path or the communication S60) on the premise of the diameter. Specifically, the shed in the moving place is the transport path before the non-clean scaffolding. In the case of the rack, the user is notified of this action. Scaffolding, scaffolding. At this time, avoid the 4th scaffolding on the 4th scaffolding road, and use the scaffolding. At this point, the path. Therefore, the path is only through the transport path. The example path is used as the transport speed (the transport path of the transport path determined by the step. In some cases, the transport speed of the product 200925074 is 8 so that the speed of the stacker 1 when passing the front of the non-clean scaffold is lower than that of the other clean booth. On the other hand, when the conveyance path in front of the non-clean scaffold is not passed, the conveyance speed of the article 8 is determined to be a constant speed. For example, in the case of the conveyance path shown in Fig. 7, it may not pass at all. The purpose of the 4th scaffolding can be reached in front of the unclean 29~3 2 scaffolding. Therefore, it is possible to transport the items at a certain speed from the station to the 4th scaffolding. 8 On the other hand, Figure 8 shows In the case of the transport path, it is not possible to reach the purpose of the scaffold No. 4 without passing the front of the non-clean 32 scaffold. Therefore, it is decided to reduce the speed of the stacking crane 1 (elevator) when passing the front of the scaffold No. 32. The article 8 is transported as early as possible, and the article 8 is transported at a constant speed. Finally, the control unit 3 1 is a transport condition determined by the transport condition determining unit 35, and the control mechanism unit 30 will The article 8 is transported to the scaffolding of the loading place indicated by the transport command (step S62). Fig. 9 is a flowchart for explaining the evacuation operation of the article 8 having the automatic warehouse having the above configuration. First, the FFU status checking unit 42. The FFU state confirmation unit 42 confirms that the FFU 4 that is abnormally scheduled cannot supply the clean air, and reports the abnormality to the evacuation command generation unit 36. Next, the evacuation command generation unit generates the evacuation command generation unit 36. The portion 36 receives the abnormality report, and forms a non-clean scaffold according to the abnormality of the predetermined FFU 4 (step S72). In the case of the -12-200925074, the evacuation command generating unit 36 specifies the abnormality report received in the related chart 40. For example, when the evacuation command generation unit 36 receives a report that an abnormality has occurred in the FFU 4 of No. 2, the FFU 4 of No. 2 and the scaffold of No. 9 to No. 16 in the related diagram 40 of FIG. 4 are associated with each other. The scaffolding data update unit 37 registers the scaffolding as a non-clean scaffolding and updates the scaffolding data 41 (step S73). Specifically, evacuation The generation unit 36 sets the column of the "air state" of the scaffold specific to the scaffolding data 41 to "X". Next, the evacuation command generation unit 36 confirms whether or not the specific scaffold has the item 8 in the storage, and generates the storage. In the scaffolding data 41, the "air state" column is "X" and "empty state" in the evacuation command generation unit 36. When the column is "X", a command is generated to cause the article 8 of the scaffold to take refuge in the scaffolding data 41 to the "air state" column as "〇", and the "empty Q state" column is formed as a "〇" shed. Further, when the article 8 in the specific scaffolding is not stored, the evacuation command generating unit 36 does not generate the evacuation command end operation. Finally, the control unit 31 controls the mechanism unit 30 to carry the article 8 by the content indicated by the evacuation command generated by the evacuation designation generating unit 36 (step S75). Specifically, the control unit 31 controls the mechanism unit 30 to transport the articles 8 of the non-clean scaffolding into a clean and empty scaffold. As described above, according to the automatic warehouse of the present embodiment, when the FFU 4 is abnormally unable to operate normally, the conveyance of the article 8 is controlled so as not to pass through the front of the clean scaffold which is not cleaned, and the speed is lowered when passing. Therefore, it does not pollute the stacker cranes, and it can prevent the expansion of clean items caused by the stacking cranes as media. Further, in the case where the automatic warehouse "FFU4 of the present embodiment" is abnormally inoperable, the article 8 which cannot hold the clean scaffold can be moved to the other scaffold. Therefore, it will not be contaminated by items that cannot maintain a clean scaffolding, and it is possible to prevent articles from being expanded to the pollution of the clean II scaffolding at a high rate. (Second Embodiment) Fig. 1 is a schematic block diagram showing a transport vehicle system according to the present embodiment. The truck system is composed of a controller 50, a plurality of clean rooms 53, a transport vehicle 51, and a plurality of FFUs 54. The clean room 53 is connected by a passage. The clean room 53 through which the stacker 1 passes is an example of the area of the invention, and the different clean rooms 53 are different areas. Each of the clean rooms 53 is provided with a storage unit for temporarily storing the articles 8, and a station for the transport vehicle 51 and the storage unit. The controller 50 is electrically connected to the transport vehicle 51 and the FFU 54 via the network, and manages the transport of the articles 8 between the clean rooms 53. Specifically, the controller 50 manages the conveyance of the article 8 by communicating with the transport vehicle 51 with a conveyance command and an evacuation command. The communication between the controller 50 and the transport vehicle 51 and the FFU 54 is performed, for example, via a communication line (transmission medium for communication) that is laid along the transport path of the article 8. While the communication line is connected to the controller 5, the transport vehicle 51 is equipped with a communication device capable of transmitting and receiving commands between the communication lines. -14- 200925074 The transport vehicle 51 is an overhead traveling vehicle and a railroad trolley that travels on a traveling rail, and the article 8 is loaded to carry out the transportation of the articles 8 between the clean rooms 53. The FFU 5 4 is disposed in each of the clean rooms 53 and is disposed, for example, in the ceiling of the clean room 53 to supply clean air to the clean room 53 provided in the main body. Fig. 11 is a block diagram showing the functional configuration of the controller 50 and the transport vehicle 51. The controller 50 is composed of a display unit 62, an input unit 63, a communication I/F unit 64, a conveyance condition determination unit 65, an evacuation command generation unit 66, a room data update unit 67, a storage unit 69, and an FFU status confirmation unit 72. . The display unit 62 is a CRT (Cathode-Ray Tube) or an LCD (Liquid Crystal Display), and the input unit 63 is a keyboard or a mouse. These are used as a dialogue between the main controller 50 and an operator. The communication I/F unit 64 is used for communication between the controller 50, the transport vehicle 51, and the FFU 54.搬运 The conveyance condition determination unit 65 is a conveyance condition for determining the conveyance path, the conveyance speed, and the like of the article 8 based on the conveyance command. When the conveyance condition is determined by referring to the room data 71, and the FFU 5 4 is abnormal, the transport vehicle 51 is controlled so that the contamination of the clean room 53 to which the clean air is supplied by the FFU 54 having an abnormality does not increase to other than the clean room 53. Clean room 53 and article 8. The transport path is the order of the clean room 53 through which the transport vehicle 51 passes, and the transport speed is the speed at which the transport vehicle 51 passes when passing through the clean room 53. When the evacuation command generating unit 66 receives a report indicating that an abnormality has occurred in one of the FFUs 54, the evacuation command for controlling the transport vehicle 51 generates an evacuation command for controlling the transport vehicle 51 so that the contamination of the clean room 53 to which the clean air is supplied is not enlarged by the FFUs 5 that have an abnormality of -15-200925074. Go to other clean rooms 53 and items 8. The evacuation command is an instruction to move the article 8 of the unclean clean room 53 to which clean air cannot be supplied to the clean clean room 53 to supply clean air. When the room data update unit 67 receives the abnormality report, the room data update unit 67 updates the room data 71. The update of the room data 71 is performed by registering the clean room 53 associated with the FFU 54 forming an abnormality in the related chart 70 as the non-clean clean room 53 in the number of rooms. The memory unit 69 is a hard disk, a memory, or the like, and holds the related chart 70, the room data 71, and the like. Fig. 12 and Fig. 13 are diagrams showing an example of the correlation chart 70 and the room data 71. In addition, in the 12th and 13th drawings, the numbers assigned to the characters of the FFU and the clean room are the numbers of the scaffolding and the FFU 4 which are given in advance for specifying the clean rooms 53 and the FFU 54 in advance. The correlation chart 70 is for each FFU 54, and is associated with the clean room 53 to which the clean air is supplied by the FFU 54. For example, the FFU 54 of No. 1 is the clean room 5 3 of No. 1. The room data 71 indicates the state of all the clean rooms 53. In Fig. 13, the "air state" is a clean room 53 indicating whether it is clean, "〇" is a clean room 53 which is clean, and "X" is a clean room 53 which is not clean. In addition, the "empty state" is a clean room 53 that can store a new article 8 with respect to whether or not the storage of the article 8 is empty, and "〇" is a clean room 53 that can store a new article 8, "X" It is a clean room 5 3 which cannot store a new article 8. The "warehouse status" is a clean room 53 indicating whether or not there is an item 8 -16-200925074, "〇" is a clean room 53 indicating that the item 8 is stored, and "X" is a clean room 53 indicating that the item 8 is not stored. . For example, the clean room 53 indicating No. 1 is a clean room 53 in which the cleaned goods 8 are stored and the new article 8 can be stored. The FFU state confirming unit 72 confirms whether or not the FFU 54 has an abnormality in the period determined in advance. The transport vehicle 51 is composed of a mechanism unit 60, a control unit 61, and a communication unit I/F unit © 68. Further, the control unit 61, the conveyance condition determination unit 65, and the evacuation command generation unit 66 are examples of the conveyance control unit of the present invention. The mechanism unit 60 is a collection of mechanism components such as a wheel and a motor that drives the wheel. The control unit 61 is a control unit unit 60 based on a conveyance command and an evacuation command. The communication I/f unit 68 is used for communication between the transport vehicle 51 and the controller 50, and the like. Fig. 14 is a flow chart for explaining the conveyance operation of the article 8 of the transport vehicle system having the above configuration. © First, the conveyance condition determination unit 65 receives the conveyance command via the input unit 63 or the communication I/F 64, and determines the conveyance path (step S80). Specifically, the conveyance condition determination unit 65 is a non-cleaning chamber 53 that does not pass through the clean room 71 as indicated by the conveyance command, and determines the article as long as possible. 8 handling path. In this case, when the non-clean clean room 53 at the loading place is indicated by the conveyance command, it is determined that the moving place is the clean room 53 other than the non-clean clean room 53 and the user is notified that the move is not the place. Clean the scaffolding or end it without carrying it. -17- 200925074 For example, the transportation command indicates that the clean room 53 of the moving place is the clean room 53 of the No. 4 clean room 53 and the clean room 53 of the carry-out place is the clean room 53 of No. 9. Further, the clean room 53 of No. 3 and No. 5 is indicated by the chamber data 71 as the non-clean clean room 53. At this time, the route leading to the clean room 53 of No. 4 is determined as the conveyance path by avoiding the no-chambers 53 of No. 1, No. 3 and No. 5 shown in Fig. 15 . On the other hand, the No. 1 clean room 53 as the clean room 53 of the carry-in place and the No. 9 clean room ❹ 53 which is the clean room 53 of the carry-out place are indicated by the conveyance command. Further, the clean room 53 of the 4, 5, and 6 is indicated by the chamber data 71 as the non-clean clean room 53. At this time, the path of the clean room 53 of the No. 4, No. 5, and No. 6 is not avoided. Therefore, the path through which the number of the non-clean clean rooms 53 is the smallest, that is, the path through only one of the non-clean rooms 53 of No. 4, No. 5, and No. 6 is determined as the transport path. For example, it is determined that only the path of the sixth clean room 53 shown in Fig. 16 is used as the conveyance path. Next, the conveyance condition determination unit 65 determines the conveyance speed (step S81). Specifically, the conveyance condition determination unit 65 determines whether or not the conveyance path of the non-clean clean room 53 passes through the premise of the determined conveyance path diameter. Further, when the conveyance path of the non-clean clean room 53 is passed, the conveyance speed of the article 8 is determined such that the speed of the conveyance vehicle 51 when passing through the non-clean clean room 53 is lower than the speed when the other clean room 53 is cleaned. On the other hand, when the conveyance path of the non-clean clean room 53 is not passed, the conveyance speed of the article 8 is determined to be a constant speed. For example, in the case of the conveyance path shown in Fig. 15, the clean room 53 of the purpose can be reached without passing through the clean rooms 53 of the unclean 1, 3, and 5. Therefore, it is possible to decide to carry the article 8 at a constant speed from the clean room 53 to the no-storage room 53 -18- 200925074. On the other hand, in the case of the conveyance path shown in Fig. 16, the purpose of the clean room No. 1 can be reached only by the non-clean No. 6 clean room 53. Therefore, it is determined that the article 8 is transported when the speed of the transport vehicle 51 is lowered when the clean room 53 is cleaned, and the article 8 is transported at a constant speed. Then, the conveyance condition determination unit 65 conveys the lotus article 8 by the conveyance condition determined by the conveyance, and conveys the conveyance command indicated by the clean room 53 as the carry-in place and the carry-out place to the conveyance via the communication I/F unit 64. The vehicle 51 (step S82) Finally, the control unit 61, based on the command received via the communication I/F unit 68, causes the control unit 30 to transport the article 8 of the clean room 53 at the carry-out to the moving under the determined conveyance conditions. The clean room 53 of the entrance (step S83). Fig. 17 is a flow chart for explaining the evacuation operation of the article 8 having the transport vehicle system having the above configuration. First, when an abnormality occurs in the predetermined FFU 54, (step S90), the 〇FFU state confirming unit 72 confirms that an abnormality has occurred in the predetermined FFU 54 (step S91). Specifically, the FFU state confirming unit 72 confirms that the FFU 54 that is abnormally scheduled cannot supply the clean air, and reports the abnormality to the evacuation command generating unit 66. Then, the evacuation command generating unit 66 receives the abnormality report, and forms the non-clean clean room 53 based on the abnormality of the predetermined FFU 54 (step S92). Specifically, the evacuation command generation unit 66 specifies the clean room 53 associated with the FFU 54 that forms an abnormality in the correlation chart 70. For example, when the evacuation command generation unit 66 receives the report that the FFU 54 of the No. 2 is different from the -19-200925074, the FFU 54 of the No. 2 in the related chart 7 of FIG. 12 is associated with the clean room 53 of No. 2. The clean room 53 of the specific No. 2 = Next, the room data update unit 67 registers the 'update room data 71' with the specific clean room 53 as the non-clean clean room 53 (step S93). Specifically, the evacuation command generating unit 66 sets the column "air state" of the clean room 53 specified by the room data 71 to "X". Then, the evacuation command generating unit 66 confirms whether or not the specified clean room 53 has been stored in the storage unit. The evacuation command generates an evacuation command for evacuating the article 8 to the clean room 53 (step S94). Specifically, in the room data 71, the "air state" column is "x", and when the column "in the storage state" is "〇", the article 8 is commanded to make the article 8 of the clean room 53. In the room data 71, the column for evacuation to the "air state" is "〇", and the column of "empty state" is formed as the clean room 53 of "〇". Further, when the article 8 in the specified clean room 53 is not stored, the evacuation instruction generating unit 66 does not generate the evacuation command end operation. Next, the evacuation command generating unit 66 transmits the generated evacuation command to the transport vehicle 51 via the communication I/F unit 64 (step S95). Finally, the control unit 61 controls the mechanism unit 60 to carry the article 8 based on the conveyance command received via the communication I/F unit 68 (step S96). Specifically, the control unit 61 controls the mechanism unit 60 to transport the article 8 of the non-clean clean room 53 to a clean and storeable new article 8 clean room 53. As described above, when the FFU 54 is abnormally unable to operate normally according to the transportation vehicle system of the present embodiment, the conveyance of the article 8 is controlled so as not to pass through the clean room 53. Will slow down the speed. Therefore, the van 51' can be prevented from being contaminated, and the contamination of the cleaned goods caused by the transport vehicle as a medium can be prevented at a high rate. Further, according to the embodiment of the transport vehicle system 'FFU 54 of the present embodiment, the abnormality of the FFU 54 can be prevented, the article 8 of the clean room 5 3 that cannot be cleaned can be moved to the other clean room 53°. The contamination of the article 8 which cannot maintain the clean clean room 53 can prevent the 0 article from being expanded to the contamination of the clean room 53 by a high rate. As described above, the transport vehicle system of the present invention has been described based on the embodiment. However, the present invention is not limited to this embodiment. It is to be understood that various changes and modifications may be made without departing from the scope of the invention. In the above embodiment, the FFU is disposed in each of the clean rooms, and one clean room and one FFU are associated with each other in the related diagram. However, the FFU can also be set to one with respect to a plurality of clean rooms, and the related diagrams make it possible to associate a plurality of defective rooms with one FFU. At this time, a plurality of clean rooms associated with one FFU are one area forming the present invention. Further, a plurality of FFUs may be provided in one clean room, and one clean room and a plurality of FFUs may be associated with each other in the related chart. In addition, the degree of cleanliness is not only two types of normal and abnormal, but also can be divided into several stages. In order to realize the above configuration, for example, a controller optimization unit is provided in the controller, and a particle counter or the like for measuring the cleanliness of the clean room is provided in the clean room. The chart optimization unit increases or decreases the number of clean rooms associated with the FFU in the relevant chart based on the measurement results of the cleanliness. That is, when the cleansing room of the chart optimization department is less than the critical threshold in one of the clean rooms of the period -21 - 200925074, the relevant chart reduces the supply of clean air to the clean room with a cleanliness below the critical threshold. The number of clean rooms associated with FFU. On the other hand, when the cleanliness of one of the clean rooms is higher than the critical enthalpy, the number of clean rooms associated with the FFU associated with the clean air supply to the clean room above the critical enthalpy is increased in the relevant chart. [Industrial Applicability] The present invention can be utilized in a transportation vehicle system, and can be particularly utilized in a transportation vehicle system including an FFU. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view of a clean room for a clean room according to a first embodiment of the present invention (a horizontal cross-sectional view of a portion directly above the FFU). Fig. 2 is a cross-sectional view (a vertical cross-sectional view) of the automatic warehouse of the same embodiment. Fig. 3 is a block diagram showing the functional configuration of an automatic warehouse in the same embodiment. Fig. 4 is a diagram showing an example of a related chart. Fig. 5 is a view showing an example of scaffolding data. Fig. 6 is a flow chart for explaining the action of moving articles in the automatic warehouse of the same embodiment. Fig. 7 is a view for explaining the operation of determining the conveyance path and the conveyance speed. -22- 200925074 Fig. 8 is a view for explaining the operation of determining the conveyance path and the conveyance speed. Fig. 9 is a flow chart for explaining the action of the article evacuation in the automatic warehouse of the same embodiment. Fig. 10 is a schematic structural view of a transport vehicle system according to a second embodiment of the present invention. Fig. 11 is a block diagram showing a functional configuration of a controller Q and a transport vehicle of the transport vehicle system of the same embodiment. Fig. 12 is a diagram showing an example of a related chart. Fig. 13 is a view showing an example of room data. Fig. 14 is a flow chart for explaining the action of moving articles of the transport vehicle system of the same embodiment. Fig. 15 is a view for explaining the operation of determining the conveyance path and the conveyance speed. Fig. 16 is a view for explaining the operation of determining the conveyance path and the conveyance speed. Fig. 17 is a flow chart for explaining the article evacuation operation of the transport vehicle system of the same embodiment. [Main component symbol description] 1 : Stacker 2 : Carrier 4, 54 : FFU 5 : Path 23 - 200925074 6 : Walking track 8 : Item 14 : Pipe 1 6 : Outer wall 20 , 2 1 : Outlet 2 2: struts 3 0, 6 0 : mechanism unit φ 3 1 , 6 1 : control unit I/F unit determination unit command generation unit new unit state confirmation unit 32, 62: display unit 3 3, 6 3 : input unit 34 , 64 , 68 : pass 3 5 , 6 5 : transport bar 36 , 66 : evacuation finger 37 : scaffolding data more 3 9 , 6 9 : memory Q 40 , 70 : related Figure 41 : scaffolding data 42 , 72 : FFU shape 50: controller unit 5 1 : truck 53 : clean room 67 : room data update 71 : room data - 24 -