200919471 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種碟片原、版（discmaster)，特別關 於種用以製備碟片模版（stamper )之碟片原版。 【先前技術】200919471 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a disc master, and in particular to a disc master for preparing a disc stamper. [Prior Art]
Ik著貝訊與多媒體世代的來臨，電子產品對儲存媒 體的儲存③、度及谷量之需求也不斷地增加。習知的儲存 媒體主要分成兩大類：磁記錄媒體及光記錄媒體。目前 市場上是以光記錄媒體佔優勢，其係包含唯讀型光碟 (CD-ROM)、可寫一次型光碟（CD_R)、可重 光碟（CD-RW)、唯讀型數位影音光碟（dvd_r〇m)、 "T寫次型數位影音光碟（DVD-R )、可重覆讀寫型數 位影音光碟（DVD-RW，DVD+RW)及動態隨機記憶數 位影音光碟（DVD-RAM)等。 光δ己錄媒體生產過程中，一般都是利用具有溝槽或 凹洞之碟片模版，配合射出成形的方法，以製作與碟片 模版具有相對應圖案之基板，再利用此具有預溝槽的基 板（pre-grooved substrate )來進行後續製程以大量生產 光§己錄媒體。 為獲得碟片模版，則需先製作一碟片原版。如圖1 所示’一種習知碟片原版製作過程包含步驟S11至步驟 S13。請同時參照圖2A至圖2D，方便說明習知碟片原 版的製作過程。 200919471 請翏照圖1及圖2A所示，步驟su係塗佈一光阻 層13於一基板u上’為了加強光阻層與基板η之 間的結合力’可先塗佈—接著劑（primer) 12於基板u 上再塗佈光阻層13。而接著劑12係可為—介面活化劑 (SUrfaCtant)或一黏著促進劑 Udhesion prom()ter)。 請參照圖1、圖2B及圖2C所示，步驟S12係雷射 刻版（LaSer Beam Recording, LBR)光阻層 13 並進行 顯影步驟，藉由顯影把刻版的訊號顯像出纟，形成一圖 案化光阻層13a於基板11上。 請參照圖！及圖2D所示，步驟S13係在顯影完成 的圖案化光阻層13a上濺鍍一薄金屬層15。其中，金屬 層的材質可為鎳釩合金，即完成碟片原版的製作。 完成碟片原版後，可利用金屬層15作為後續電鑄 (eleCtr0f0rming )步驟的導電層。電鑄步驟是將金屬層 加厚再將金屬層與碟片原版剝離，則此金屬層即為父模 版（father stamper )。 藉由父模版並重複電鑄及剝離步驟，即可製成複數 個母模版（mother stamper)，而每個母模版可繼續重複 電鑄及剝離步驟，以製成複數個子模版（son stampei〇。 乂才果版或子模版可用於大量生產光記錄媒體，以射出成 开> 具有溝槽（groove )的碟片基板。 然而，習知技術的碟片原版係利用圖案化光阻層 Ua來形成溝槽的形狀，由於結構強度不夠，因此無法 進行多次父模版之電鑄分離製程，溝槽寬度亦不易精準 200919471 控制。另外’為符合特定規格，以增進碟片與光碟機之 相容性’碟片原版需具有—資料區（如咖）及一預 錄區（embosse“rea)，由於預錄區用於記錄燒錄策略 或製造薇商資訊，因此資料區及預錄區的溝槽需且有不 同深度，但以上述製作方法並不易達成。 因此，如何提供一種碟片原版，能夠解決碟片原版 形成不同溝槽深度，且能提高溝槽寬度 控制的％疋性’已成為重要課題之一。 【發明内容】 =於上述課題，本發明之目的為提供—種碟片原 版，、u冓強度高並具有不同於溝槽深度的預錄凹槽，且 圖案化光阻層的寬度控制較容易且穩定。 緣=4達上述目的，依據本發明之—種碟片原版 :5一基板、一圖案化光阻層以及-金屬層。基板具有 預錄區及-貝料區，預錄區具有至少—預錄凹槽，圖 案化光阻層設置於資料區，金屬層覆蓋圖案化光阻層及 承上所述’因依據本發明之—種碟片原版係具有溝 二深，不同於資料區溝槽的預錄凹槽。與習知技術 強度提高，因此可重複進行電鑄及剝離 I程，並谷易控制圖案化光阻層的溝槽形狀成為U字 形，而能精確定義碟片原版的溝槽尺寸。 200919471 【實施方式】 加以說明 如圖3所示，-種應用於本發明的碟片原版製作過 程包含步驟s心步驟S25。請同丨時參照圖4a至圖4〇, 方便說明碟片原版的製作過程。 請參照圖3及圖4A所示，步驟S21係於一且有一 預錄區A及-資料區B之基板2;1上設置—光阻層23。 基板21的材質例如為—玻璃、—石英或—陶究材料， 陶瓷材料例如為一氧化物、一氮化物或一碳化物。依據 實際需求’基板可預先研磨及清洗，使表面平整。 形成光阻層23的方式例如為旋轉塗佈 (spin-coating)’藉由光阻層23的厚度可決定資料區的 溝槽深度，且厚度設置除了均勻厚度之外，亦可使厚度 不一致，例如為内厚外薄或内薄外厚，用以作出内深= 淺或内淺外深的溝槽。光阻層23的材質例如為聚亞醯 胺（polyimide，PI)。 製作過程更可包含一步驟S20，以預先塗佈一接著 劑22於基板21上，則光阻層23設置於接著劑22上， 接者劑22可為一界面活性劑或是一黏合促進劑。 請參照圖3及圖4B所示，步驟S22係雷射刻版並 顯影光阻層23。由於雷射刻版製程穩定性較高，因此 藉由調整雷射刻版製程的參數值來控制溝槽寬度，其條 200919471 件為.預錄區A需蝕刻至光阻層23底部並呈現一 〇型， 而貝料區B則不需蝕刻至光阻層23底部並呈現一 v型。 。步驟S23、S24的主要目的是產生預錄區a與資料 區B的深度差。請參照圖3及圖4(：所示，步驟s23係 第反應性離子蝕刻（Reactive Ion Etching，RIE)基板 之預錄區A的光阻層，以形成至少一預錄凹槽％。第 :反應性離子蝕刻的反應氣體係具有一含氟氣體，例如 三氟甲烧、氟化碳、c5Fl0、C3F8SC2F6。另外，含氟 氣體係可搭配氬氣（Ar)或氧氣（〇2)來作為反應氣體， 以增加姓刻能量。藉由控制氣體流量、壓力、功率及時 間’即能夠控制形成溝槽的形狀及深度，而精確定義碟 片原版的溝槽尺寸。 >步驟S24係第二反應性離子㈣基板之資料區b 的光阻層Μ形成一圖案化光阻層23a。第二反應性離 子=刻的反應氣體係具有—含氧氣體，例如氧氣或一氧 化石反進仃第一反應性離子钱刻時，其反應氣體只對光 阻層23有反應’因此隨著光阻層變薄，資料區 光阻層23之溝槽形狀，可由V型逐漸變成㈣。藉由 控制反應氣體_時間’可蚊資㈣B所剩光阻厚 度，直至與碟片原版要求的溝槽深度相同。 請參照圖3及圖奶所示，步驟防係設置一 層25覆蓋預錄凹槽24及圖案化光阻層23a。當然，金 屬層25亦覆盍基板21不具圖案化光阻層…的表面、: 其中’金屬層25係藉由沈積、塗佈、印刷或電艘方式 200919471 形成’且其材質係可為顧合金。 =圖4D所不’本發明較佳實施例之一種碟片原版 二已二基板21、-圖案化光阻層23a以及一金屬層 亡土板21具有一預錄區A及一資料區b，預錄區a 預錄凹槽24。圖案化光阻層23a設置於資料 金屬層25覆蓋圖案化光阻層…及預錄凹槽24。 由㈣片原版及其製作方法已詳述於上，故不再資述。 =上所述’因依據本發明之―種碟片原版係具有溝 f咏度不同於資料區溝槽的預錄凹槽。與習知技術相 二本么明結構強度提高，基板不會有翻痕，因此可重 電鑄及剝離製程’並容易控制圖案化光阻層的溝 :形狀成為U字形’而能精確定義碟片原版的溝槽尺 寸。 以上所述僅為_性，㈣為限制性者。任何未脫 發明之精神與範脅，而對其進行之等效修改或變 更’均應包含於後附之申請專利範圍中。 【.圖式簡單說明】 圖1為種習知碟片原版製作過程的流程圖； 圖2為圖1之碟片原版製作過程的示意圖； 圖3為應用於本發明之碟片原版製作過程 圖；以及 4 圖4A至圖4D為本發明較佳實施例之〆 版及其製作過程的示意圖。 月摩 10 200919471 【主要元件符號說明】 11、 21 :基板 12、 22 :接著劑 13、 23 :光阻層 13a、23a :圖案化光阻層 24 :預錄凹槽 15、25 :金屬層 A ·預錄區 B :資料區 S11〜S13、S20〜S25 :碟片原版製作過程的流程步驟 11With the advent of Beixun and the multimedia generation, the demand for electronic products to store 3, degrees and valleys of storage media has also increased. The conventional storage media are mainly divided into two categories: magnetic recording media and optical recording media. Currently, the market is dominated by optical recording media, which include CD-ROM, CD-R, CD-RW, and CD-ROM (dvd_r). 〇m), "T writes digital audio and video discs (DVD-R), re-readable digital audio and video discs (DVD-RW, DVD+RW) and dynamic random memory digital video discs (DVD-RAM), etc. . In the production process of optical δ recording media, a disk stencil having grooves or recesses is generally used, and a method of injection molding is used to fabricate a substrate having a pattern corresponding to the stencil, and the pre-groove is utilized. A pre-grooved substrate is used for subsequent processes to mass produce optical recording media. In order to obtain a disc template, you need to make a disc original. As shown in Fig. 1, a conventional disc mastering process includes steps S11 to S13. Please refer to FIG. 2A to FIG. 2D at the same time to facilitate the description of the production process of the conventional disc. 200919471 Referring to FIG. 1 and FIG. 2A, the step su is applied to a photoresist layer 13 on a substrate u to enhance the bonding force between the photoresist layer and the substrate η. Primer 12 further coats the photoresist layer 13 on the substrate u. The adhesive 12 can be an interface activator (SUrfaCtant) or an adhesion promoter Udhesion prom () ter). Referring to FIG. 1 , FIG. 2B and FIG. 2C , step S12 is a LaSer Beam Recording (LBR) photoresist layer 13 and performing a development step, and developing a signal of the engraved image by developing to form a defect. A patterned photoresist layer 13a is on the substrate 11. Please refer to the picture! As shown in Fig. 2D, in step S13, a thin metal layer 15 is sputtered on the developed patterned photoresist layer 13a. Among them, the material of the metal layer can be nickel vanadium alloy, that is, the original disc is produced. After the disc master is completed, the metal layer 15 can be utilized as a conductive layer for the subsequent electroforming (eleCtr0f0rming) step. In the electroforming step, the metal layer is thickened and the metal layer is peeled off from the original plate, and the metal layer is a father stamper. A plurality of mother stampers can be made by the parent template and the electroforming and stripping steps are repeated, and each master template can continue to repeat the electroforming and stripping steps to form a plurality of sub-templates (son stampei〇). The virgin version or the sub-template can be used for mass production of an optical recording medium to emit a disc substrate having a groove. However, the disc precursor of the prior art utilizes the patterned photoresist layer Ua. The shape of the groove is formed, because the structural strength is not enough, it is impossible to carry out the electroforming separation process of the parent template many times, and the groove width is not easy to be accurately controlled by 200919471. In addition, in order to meet the specific specifications, the disc is compatible with the disc player. The original 'disc' must have a data area (such as coffee) and a pre-recorded area (embosse "rea". Because the pre-recorded area is used to record the burning strategy or create Weishang information, the data area and the pre-recorded area are ditched. The groove needs to have different depths, but the above manufacturing method is not easy to achieve. Therefore, how to provide a disc original can solve the different groove depths of the original plate and increase the groove width. The % control of the control has become one of the important topics. [Invention] In the above object, the object of the present invention is to provide a disc original, which has a high intensity and a pre-recorded concave different from the groove depth. The groove and the width control of the patterned photoresist layer are relatively easy and stable. The edge = 4 for the above purpose, according to the invention, a disc original: a substrate, a patterned photoresist layer and a metal layer. a pre-recorded area and a bedding area, the pre-recorded area having at least a pre-recorded groove, the patterned photoresist layer being disposed in the data area, the metal layer covering the patterned photoresist layer and the said “in accordance with the present invention— The disc original has a groove depth of two, which is different from the pre-recorded groove of the groove in the data area. Compared with the conventional technology, the electroforming and peeling process can be repeated, and the pattern control photoresist layer can be controlled by the valley. The groove shape is U-shaped, and the groove size of the original plate can be precisely defined. 200919471 [Embodiment] As shown in FIG. 3, the disk original production process applied to the present invention includes the step s step S25. Please refer to Figure 4a for the same time. 4A, it is convenient to explain the manufacturing process of the original disc. Referring to FIG. 3 and FIG. 4A, the step S21 is performed on the substrate 2 having a pre-recorded area A and a data area B; 23. The material of the substrate 21 is, for example, a glass, a quartz or a ceramic material, and the ceramic material is, for example, an oxide, a nitride or a carbide. The substrate can be pre-polished and cleaned according to actual needs to make the surface smooth. The manner of forming the photoresist layer 23 is, for example, spin-coating. The depth of the trench of the data region can be determined by the thickness of the photoresist layer 23, and the thickness is set to be inconsistent in addition to the uniform thickness. For example, the inner thickness is thin or the inner thin outer thickness is used to make the inner depth = shallow or shallow inner and outer grooves. The material of the photoresist layer 23 is, for example, polyimide (PI). The manufacturing process may further include a step S20 to pre-coat an adhesive 22 on the substrate 21, and the photoresist layer 23 is disposed on the adhesive 22. The adhesive 22 may be a surfactant or a adhesion promoter. . Referring to Fig. 3 and Fig. 4B, step S22 is to perform laser engraving and develop the photoresist layer 23. Due to the high stability of the laser engraving process, the groove width is controlled by adjusting the parameter value of the laser engraving process, and the strip of 200919471 is that the pre-recorded area A needs to be etched to the bottom of the photoresist layer 23 and present one. The 〇 type, and the batting area B do not need to be etched to the bottom of the photoresist layer 23 and present a v-shape. . The main purpose of steps S23, S24 is to generate a depth difference between the pre-recorded area a and the data area B. Referring to FIG. 3 and FIG. 4 (step, s23 is a photoresist layer of a pre-recorded area A of a reactive ion etch (RIE) substrate to form at least one pre-recorded groove %. The reactive ion etching reaction gas system has a fluorine-containing gas such as trifluoromethane, carbon fluoride, c5F10, C3F8SC2F6. In addition, the fluorine-containing gas system can be combined with argon (Ar) or oxygen (〇2) as a reaction. The gas is used to increase the energy of the surname. By controlling the gas flow, pressure, power and time, the shape and depth of the groove can be controlled to precisely define the groove size of the disc master. > Step S24 is the second reaction The photoresist layer of the data region b of the ion (four) substrate forms a patterned photoresist layer 23a. The second reactive ion=etched reaction gas system has an oxygen-containing gas, such as oxygen or a monosulfide. When the reactive ions are engraved, the reaction gas reacts only to the photoresist layer 23. Therefore, as the photoresist layer becomes thinner, the groove shape of the photoresist layer 23 in the data region can be gradually changed from V to (4). By controlling the reaction Gas _ time 'can be mosquitoes (four) B left light The thickness is the same as the groove depth required for the original disc. Referring to Figure 3 and the milk, the step protection layer is provided with a layer 25 covering the pre-recording groove 24 and the patterned photoresist layer 23a. Of course, the metal layer 25 is also The cover substrate 21 has no surface of the patterned photoresist layer, wherein: 'the metal layer 25 is formed by deposition, coating, printing or electric boat method 200919471' and its material can be a alloy. = Figure 4D does not In the preferred embodiment of the present invention, a disc original two-substrate 21, a patterned photoresist layer 23a, and a metal layer dead soil board 21 have a pre-recorded area A and a data area b, and the pre-recorded area a The groove 124 is formed. The patterned photoresist layer 23a is disposed on the data metal layer 25 to cover the patterned photoresist layer and the pre-recorded groove 24. The original film and the manufacturing method thereof have been described in detail above, and therefore are not described. According to the invention, the disc original has a groove with a groove width different from that of the data zone groove. Compared with the prior art, the structure strength is improved, and the substrate does not Has a crease, so it can be electro-cast and stripped process' and easy to control the patterned photoresist layer : The shape becomes U-shaped' and can accurately define the groove size of the disc original. The above is only _ sex, (4) is the limit. Any spirit and norm that has not been de-invented, and the equivalent modification Or the change should be included in the scope of the patent application attached. [. Brief description of the drawing] Fig. 1 is a flow chart of the process of making the original disc original; Fig. 2 is a schematic view of the original process of the disc of Fig. 1. 3 is a schematic diagram of a process for producing a master of a disc according to the present invention; and FIG. 4A to FIG. 4D are schematic diagrams showing a stencil of a preferred embodiment of the present invention and a manufacturing process thereof. Moon Mo 10 200919471 [Description of Main Components] 11, 21: substrate 12, 22: adhesive 13, 23: photoresist layer 13a, 23a: patterned photoresist layer 24: pre-recorded grooves 15, 25: metal layer A · pre-recorded area B: data area S11~ S13, S20~S25: Process Step 11 of the original production process of the disc