200918937 九、發明說明： 【發明所屬之技術領域】 . 本發明涉及一種顯微鏡用載物台。 【先前技術】 先前之顯微鏡用載物台包括上承載台及下承載台。該 下承載台固定於顯微鏡之主體上，該上承載台用於承載被 測物體，其藉由滾珠、輥子等機構設置於該下承載台上且 可相對該下承載台沿兩個相互垂直之方向移動，從而可利 用調整該上承載台沿平行於該下承載台所於平面之兩個相 互垂直之方向移動以使被測物體被置於顯微鏡之物鏡下 方。一種新型顯微鏡系統可參見Ian T. Young等人於文獻 IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, VOL. BME-29，ΝΟ·2，FEBRUARY 1982 中之 SSAM: Solid-State Automated Microscope —文。 然而利用上述顯微鏡來量測物體時，有可能遭遇被測 物體之量測面與顯微鏡之物鏡係不平行之情形，使得顯微 鏡對被測物體之部分量測面無法聚焦，從而造成了顯微鏡 之量測誤差。由於該顯微鏡用載物台之上承載台只能沿平 行於下承載台所於平面之兩個相互垂直之方向移動，從而 無法校正被測物體之量測面與顯微鏡之物鏡不平行之情 況。 有鑑於此，有必要提供一種能夠使被測物體之量測面 與顯微鏡之物鏡保持平行之顯微鏡用載物台。 【發明内容】 8 200918937 以下將以實施例說明—秸At 顯微鏡之物鏡保持平行 =使被測物體之量測面與 . 一種顯微鏡用載物台，复 口。 -設置於該第一承載台上之第：：：個第-承載台及—個 承載待測物體，該顯微鏡 該第二承载台用以 台’ -個沿第一方向延伸 ，二包括-個第三承载 單元，一個沿不同於第—方向★區:單兀，一個第—調節 單元，及-個第二調節單元，該=7方向延伸的第二抱結 載台與第二承载台之間，該二二承载台位於該第—承 該第一樞結單元樞轴連接f承载台與第三承载台藉由 由該第二樞結單元樞軸連 载口與第二承载台藉 -承載台與第三承載台之間用：：調節單元設置於該第 第一承載台之傾斜角度， DD即5亥第三承载台相對於 载台與第三承载台之間用以調節c於該第二承 承載台之傾斜角度。 —承载台相對於第三 相1於先前技術，該顯微鏡 即早兀來調整該第三承載台相對於第猎由該第一調 度，逛可藉由該第二調整單元 7载台之傾斜角 第三承載台之傾斜角度，即可調第：承载台相對於 之待測物體之量測面相對於第金 承载台上所承載 ^將被測物體之量測面調整到與斜角度’從而 態。 ”·礅鏡之物鏡平行之狀 【實施方式】 下面將結合_與實施例對本發明_鏡用載物台作 200918937 進一步的詳細說明。 凊參閱圖；[血圖2太 -第三承載μ Λ ’―個第二承載台i2，》個 Ρ戰口 13’ _個第一樞結單元一 個 15，一個第-柄- 個弟—凋節單元 二主弟―柘結早兀16及一個第二調整單元 兀 Μ同時參閱圖3,該第一承載a 。 之主體（圖未示）上， 口用於口疋於顯微鏡 U之上用以丄弟—承載台12設置於該第-承载台 上用Μ承载待測物體（ 戰口 於該第:承載台Π與第二承載Λ::承栽台”設置 δ亥弟一承载台u呈 _ HU目對的第二端部⑴，：第I: Ul及巧^ 1110,該第二端部11?盘枯哲—知郤111杈置有樞結部 置有一螺孔1120岑二、一"二承载台13相對的表面上設 内。 ，以弟一調節單元15設置於該螺孔1120 邱131^第二承载台13具有—第一端部131、—盘兮第一端 # 131相對的第二端部132、一盘 ^弟鈿 三端部133及㈣第n Ί弟一 ^部131相鄰之第 μ弟一螭σρ 133相對的四 該第二承载台13之第—端部13 該第一樞結單开π 士办 Μ叹置有樞結部1310, 而該第三承載”3 牙叹於該柩結部1110與131〇’從 方執口 13旎夠以該第一插 σ — 該第-樞結單^ 14之延伸 二早几14料旋轉。 示；>。_第-娃 ^為Α方向（如圖1與圖2所.200918937 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a stage for a microscope. [Prior Art] The previous microscope stage includes an upper stage and a lower stage. The lower carrier is fixed on the main body of the microscope, and the upper carrier is used for carrying the object to be tested, and is disposed on the lower platform by means of balls, rollers, etc., and can be perpendicular to the lower carrier The direction is moved so that the upper stage can be adjusted to move in two mutually perpendicular directions parallel to the plane of the lower stage so that the object to be measured is placed under the objective lens of the microscope. A new type of microscope system can be found in Ian T. Young et al., IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, VOL. BME-29, ΝΟ 2, FEBRUARY 1982, SSAM: Solid-State Automated Microscope. However, when the above-mentioned microscope is used to measure an object, there is a possibility that the measurement surface of the object to be measured is not parallel with the objective lens of the microscope, so that the microscope cannot focus on a part of the measurement surface of the object to be measured, thereby causing the amount of the microscope. Measuring error. Since the stage on the stage of the microscope can only move in two mutually perpendicular directions parallel to the plane of the lower stage, it is impossible to correct the fact that the measuring surface of the object to be measured is not parallel with the objective lens of the microscope. In view of the above, it is necessary to provide a microscope stage capable of keeping the measurement surface of the object to be measured parallel to the objective lens of the microscope. SUMMARY OF THE INVENTION 8 200918937 The following description will be made by way of example - the objective lens of the straw At microscope is kept parallel = the measuring surface of the object to be measured is combined with a microscope stage. - a first:-bearing station disposed on the first carrying platform and one carrying the object to be tested, the second carrying platform of the microscope is used for the station - one extending in the first direction, and two including - a third carrying unit, a second holding unit and a second carrying unit extending in a direction different from the first direction: a single unit, a first adjusting unit, and a second adjusting unit The second loading platform is located at the first bearing unit, and the first pivoting unit pivotally connects the f carrying platform and the third carrying platform by the second pivoting unit pivotal connecting port and the second carrying platform. Between the carrying platform and the third carrying platform: the adjusting unit is disposed at an inclination angle of the first carrying platform, and the DD is 5 hai, the third carrying platform is opposite to the loading platform and the third carrying platform for adjusting c The angle of inclination of the second bearing platform. - the carrier is relative to the third phase 1 in the prior art, the microscope is early to adjust the inclination of the third stage relative to the first hunting by the first scheduling, and the tilting angle of the stage by the second adjusting unit 7 The tilting angle of the third carrying platform can be adjusted: the measuring surface of the carrying platform relative to the object to be tested is adjusted relative to the carrying surface of the object on the gold carrying platform, and the measuring surface of the object to be measured is adjusted to the oblique angle . The embodiment of the objective lens of the frog mirror is parallel. [Embodiment] The present invention will be further described in detail with reference to the invention _ mirror stage 200918937. 凊 Refer to the figure; [blood diagram 2 too - third carrier μ Λ '―Second carrying station i2,》 Ρ Ρ 13 13' _ a first pivoting unit a 15, a first-handle - a younger brother - a unit of the second unit - 柘 knot early 兀 16 and a second Referring to FIG. 3, the main body (not shown) of the first bearing a is used for mouth opening on the microscope U for the younger brother-the carrier 12 is disposed on the first carrier. The second end part (1) of the pair of HU-Mian is placed on the object to be tested (the battle port is in the first: the load-bearing platform and the second load-bearing raft:: the planting station). : Ul and Qiao ^ 1110, the second end part 11? Pan Zhezhe - knowing that the 111杈 is provided with a pivotal portion with a screw hole 1120岑2, a " two bearing table 13 on the opposite surface. The second adjusting unit 15 is disposed on the screw hole 1120. The second loading table 13 has a first end portion 131, a second end portion 132 opposite to the first end #131 of the disk, a disc ^ 钿 端 133 133 及 及 及 及 及 及 及 及 及 及 及 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 131 The π 士 Μ Μ 置 置 置 置 置 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 13 The extension of the single sheet ^ 14 is rotated by a few 14 in the early morning. Show; >._第-娃^ is the direction of the ( (as shown in Figure 1 and Figure 2).
丁） 3弟一端部132與該 M 部出設置有拖結部咖相連，三端 載台12相對的表面上”該第一承 °有螺孔134〇,該第二調整單元 10 200918937 17設置於該螺孔1340内。 該第二承載台12具有—第一端部121及與該第—端部 m相對的第二端部122，該第一端部i2i設置有拖結部 1210_，該第二端部122與該第二調整單元口相連。 之第該it承載台12之第—端部121與該第三承載台13 广鳊。”33位於同-側，該第三端部133設置有枢結 = 33:該第二樞結單元16同時穿設於該插結部與 =轉第，台12能夠以該第二極結單元Μ為 2所：、弟—樞結早兀16之延伸方向為Β方向(如圖1 與圖2所不）。較佳者，該A方向與b 該第二承載台之表面123上設置有容置孔直 數r以承載待測物體。於本 大小及形狀：適應不同 該第-調節單元於該表面123上。 ⑸固接且可*卿孔個本體151 ’ —個與該本體 於該本體151:…螺之螺桿❿^ 該抵靠部153抵持住該第三 側之f W⑸。 第一調節單元15可莊 σ 之弟一端部132。該 該第-調節單元15 3 桿152於螺孔1120内旋轉使得 降，從而：沿該螺孔1120之延伸方向上升或下 對於第；：承載台u之^^及其上之第二承載台⑴目 該弟二調節單元17包括— 171固接且可㈣_ 料體171，—個與該本體 ”这螺孔1340相嚙合之螺桿172，一個設置 11 200918937 Π3〇 該抵罪部173抵持你访楚— -第二調節單元Π可藉由螺一桿17:之第二端部122。該 m — 一猎由螺才干172於螺孔1340内旋轉使得 - 成弟一调即早7G 17沿續硬：?丨1 ^ /σ D亥螺孔ΐ34〇之延伸方向上升或下 :角彳】而調節該第二承載台12相對於第三承載台13之傾 ^由及此二見之？由該第一調節單元15來職 ^ : 承載台12相對於第-承載台11之傾斜 相對於第三承載第二承載台12 12之即可調整該第二承載台 ^ 上所承載之待測物體的量 載…_度，從而可將被測物體」=二： 顯微鏡之物鏡平行之狀態。 正3^1、 可：解的是’該螺孔1120亦可設置於第三承載台13 第-；Γ二1T5與第一承載台11相對的表面上，此時，該 内，；第之螺f 152旋入第三承載台13之螺孔mo 之第之弟二端部112;該螺孔_亦可設置於第二承載f12 ^二端部122與第三承載台13相對的表面上，此:乂2 名-调節單元17之螺桿172旋入第 " 1340内，該篦一坰r时一 ^ 』土 K戟口 12之螺孔 栽台13:第：部\:之抵咖， 提出明確已符合發明專利之要件，遂依法 出專利申mx上所述者僅為本發明之較佳實施方 12 200918937 範圍。舉凡熟悉本案 等效修飾或變化，皆 式γ自不能以此限制本案之申請專利 技藝之人士援依本發明之精神所作之 •應涵蓋於以下申請專利範圍内。 -【圖式簡單說明】 之正面立體示 立圖1係本發明實施例之顯微鏡用載物台 意圖。D) The first end portion 132 of the 3rd body is connected to the M portion, and the surface of the third end stage 12 is opposite to the surface of the third end stage 12, the first receiving unit has a screw hole 134〇, and the second adjusting unit 10 is set in 200918937 17 The second loading base 12 has a first end portion 121 and a second end portion 122 opposite to the first end portion m. The first end portion i2i is provided with a towing portion 1210_. The second end portion 122 is connected to the second adjusting unit port. The first end portion 121 of the first it carrying platform 12 and the third carrying portion 13 are wide. The "33" is located on the same side, and the third end portion 133 The pivotal connection is set to 33: the second pivoting unit 16 is simultaneously disposed at the insertion portion and the second rotation unit, and the table 12 can be divided into two by the second pole junction unit: The direction of extension is the Β direction (as shown in Figures 1 and 2). Preferably, the A direction and the surface 123 of the second stage are provided with a receiving hole straightness r to carry the object to be tested. In this size and shape: adapted to the different first adjustment unit on the surface 123. (5) Fixing and arranging the body 151' with the body 151: screw ❿^ The abutting portion 153 abuts the f W(5) of the third side. The first adjustment unit 15 can be the other end of the body 132. The rod 152 is rotated in the screw hole 1120 to be lowered, so as to rise or fall along the extending direction of the screw hole 1120; the second stage of the bearing table u and the second carrier (1) The second adjustment unit 17 includes - 171 fixed and (4) _ material 171, a screw 172 meshing with the screw hole 1340 of the body, a setting 11 200918937 Π 3 〇 the conviction section 173 to resist your visit楚—The second adjustment unit Π can be rotated by a second end 122 of the rod 17: The m-a hunter is rotated by the screw 172 in the screw hole 1340 so that the mate is adjusted as early as 7G 17 Hard: ? 丨 1 ^ / σ D 螺 ΐ ΐ 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 而 而 而 而 而 而 而 而 而 而 而 而 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节 调节The first adjusting unit 15 is used to: the tilt of the carrying platform 12 relative to the first carrying platform 11 relative to the third carrying second carrying platform 12 12 to adjust the object to be tested carried on the second carrying platform The load is ... _ degrees, so that the measured object can be "= two: the objective lens of the microscope is parallel. Positive 3^1, can be solved: 'The screw hole 1120 can also be disposed on the surface of the third stage 13-; the second 1T5 is opposite to the first stage 11, at this time, the inside; The screw f 152 is screwed into the second end portion 112 of the screw hole mo of the third carrier 13; the screw hole _ can also be disposed on the surface of the second carrier f12 ^ two end portion 122 opposite to the third carrier 13 , this: 乂 2 - the screw 172 of the adjustment unit 17 is screwed into the "1340", the 篦一坰r一一 』土K戟12 screw hole planting table 13: Part:\: arrived The coffee has been clarified to meet the requirements of the invention patent, and the above-mentioned patent application is only the preferred embodiment of the invention 12 200918937. Anyone who is familiar with the equivalent modification or change of this case, γ can't limit the patent application technology of this case to the extent that it is included in the spirit of the present invention. - [Simplified illustration of the drawings] Front perspective view of Fig. 1 is intended to be a stage for a microscope according to an embodiment of the present invention.
意圖。 2係本發明實施例之顯微鏡用载物台 之背面立體示 之分解示意圖。 圖3係本發明實施例之顯微鏡用載物台 【主要元件符號說明】 顯微鏡用載物台 10 第一承載台 11 第一承载台 12 第三承载台 13 第一樞結單元 第一調節單元 第二樞結單元 J3S3 — 早兀 第一端部 第二端部 表面 14 15 16 17 111 ’ 121 ， 131 H2 > 122 > 132 123 124 133 134 容置孔 第三端部 第四端部 13 1330 200918937 本體 151 ， 171 螺桿 152 ， 172 抵靠部 153 ， 173 樞結部 1110 ， 1210 ， 1310 ， 螺孔 1120 ， 1340 14intention. 2 is an exploded perspective view showing the back side of the stage for the microscope of the embodiment of the present invention. 3 is a microscope stage according to an embodiment of the present invention. [Main component symbol description] Microscope stage 10 First stage 11 First stage 12 Third stage 13 First pivot unit First adjustment unit Two pivoting unit J3S3 - early first end second end surface 14 15 16 17 111 ' 121 , 131 H2 > 122 > 132 123 124 133 134 receiving hole third end fourth end 13 1330 200918937 body 151, 171 screw 152, 172 abutment 153, 173 pivoting portion 1110, 1210, 1310, screw hole 1120, 1340 14