200911507 九、發明說明： 【發明所屬之技術領域】 本發明係主張關於20〇7年〇4月〇5曰申請之曰本 案號特願2007-099888之優先權。 本發明係關於藉由對_機施壓而將微細形狀之圖 印至熱可塑性板之表面上的熱壓成形裝置、以及該裝^ 具系統。 棋 【先前技術】 ' 習知之熱壓成形裝置例如制於對液晶顯示器 之導光板或擴散板、以及透鏡或光碟基板之類的於表面上呈^ 微細形狀圖案之光學零件或者具有高創音性 ，、有 形。這麵伽讀狀祕㈣;== 2〇〇4：74769 i^t ^ …冷部板上文裝有一板狀壓模機，使 壓模機進行加熱冷卻，然後該壓模機娘由J二部板對上述 ί可塑性樹脂板之表面施藶。、α μ ^部板而對熱 【發明内容】 [發明所欲解決之問題] :知，而轉印之形狀圖案之 的疋數Am至數十⑽。另 -叙而吕 性樹脂板之厚度具有±〇 J_左右之^被加工材科之熱可塑 機之模具之尺寸或‘模機自 及。進而，安敦有壓模 __左右之不均。 尽度及平面度亦具有0,01〜 6 200911507 又’曰本專利特開2004_74 係將經加熱冷卻板加执之二報中揭示之熱屋成形 之表面，接著利用該加熱冷卻板來冷卻難 :科 :加工材料之_束。因此，加、對 時之熱畸變所導致之翹曲。 胃產生加熱冷部 由上纽象料致在成科壓模機與被加 面上之勤分林均勻，從而 之接觸 以所麵力對被加工材料進行施屋。其結果為，於被 材料之表面局部地產生圖案未被完全轉印之缺陷。、 為了解決該問題，考慮了若干對策。例如， =峨大之施壓力’或提高議之加熱溫度，以二 “P斤而之面麼力’或者延長經加熱之顧機對被加工材料之 間’以增大被加工材料之軟化層，從而降低轉印所需之 然而，上述對策不僅在設備成本、運轉成本（running⑺㈦ 及生產時間方©補理想’ ^且由於被加工材料承受多餘之溫 度或面壓力，使得成料材㈣面之鼓起會變A，因而必須在 成形結束後對鼓起之材料側面進行後加工處理。 因此，本發明之目的在於，在將凹凸圖案轉印至熱可塑性 板之表面上的熱壓成形中，使熱可塑性板與壓模機之接觸狀，離 均一化。 [解決問題之技術手段] 本發明之熱壓成形裝置係藉由對壓模機施壓而將形狀圖 200911507 案轉印至熱可塑性板之表面上，該熱壓成形裝置包含加壓裝置 以及氣缸機構，其中，上述加壓裝置具有支承板、滑動板及驅 動上述滑動板之驅動裝置，上述氣缸機構安裝於上述滑動板或 支承板上。上述氣缸機構於充滿熱媒流體之壓力室之内側具有 氣缸，該氣缸具有可撓性頂板，該可撓性頂板具有朝向壓力室 之内表面、及支持壓模機之外表面。進而，該熱壓成形裝置包 含對壓力室内之熱媒流體進行加熱及冷卻之加熱冷卻裝置、以 . 及對壓力室施加偏壓之預壓裝置。 該熱壓成形裝置藉由加熱壓力室内之熱媒流體來對壓模 機進行加熱，當壓模機之溫度加熱至熱可塑性板之材料軟化溫 度以上時，使加壓裝置之滑動板下降，以將壓模機施壓於熱可 塑性板上。此時，壓模機利用壓力室之内壓，經由可撓性頂板 而對熱可塑性板之表面施壓，因而壓模機之於熱可塑性板之表 面上的壓力分布變得更加均勻。其後，於該施壓狀態下使壓力 室内之熱媒流體冷卻。當壓模機之溫度冷卻至熱可塑性板之材 《 料軟化溫度以下時’滑動板上升。 本發明之較佳實施形態中，氣缸機構之構成為，在由加壓 震置對氣&機構所施加之壓力上升時，使壓力室之内壓上升。 例如，氣紅機構還包含—活塞，其可滑動地插人至上述氣缸 内’以使壓力室之容積可變，該活塞連結於滑動板或支承板， 在由該滑動板或支承板對活塞所施加之壓力上升時，該活塞會 於氣缸内滑動，以減小壓力室之容積。 本發明之較佳實施形態中，上述加熱冷卻裝置包含··設置 8 200911507 於壓力室内之齡換管、以及向該熱交換管⑽給加熱流體及 冷卻流體之加熱冷卻流體供給裝置。或者—變形例為，上述加 熱冷卻裝置亦可包含：設置於壓力室内之電加熱器、設置於壓 力室内之熱交換管、驅動電加熱n之加細電源、以及向熱交 換管内供給冷卻流體之冷卻流體供給裝置。 本發明之較佳實施形態中’在滑動板上升以結束壓模機對 熱可塑性板之施麟，上述賴裝置將由於壓力室之内壓而使 頂板向外纖出呈凸賴需之必要數量的壓力，料上述偏壓 而施加至壓力室。 本發明之較佳實施形態中’上述熱壓成形裝置上還設有檢 測壓力室之_之壓力感測器。並且，上述驅練置根據壓力 感测器之檢測壓力來控制滑動板之移動，以使壓力室之内壓成 為預先設定之設定壓。 本發明之較佳實施形態中，上述熱壓成形裝置上還設有檢 貝J壓力至内之熱媒流體之溫度的溫度感測器。並且，上述加熱 冷郃裝置根據溫度感測器之檢測溫度來控制壓力室内之熱媒 流體之溫度，以使其成為預先設定之設定溫度。 、 本發明之另一側面之模具系統係藉由對壓模機施壓而將 凹凸圖案轉印至熱可塑性板之表面上的熱壓成形裴置用之模 具系統，該模具系統包含：上述氣缸機構、加熱冷卻裝置、以 及預壓裝置。 [發明之效果] 根據本發明，可使成形時之熱可塑性板與壓模機之接觸狀 9 200911507 態均一化。 【實施方式】 以下’參照圖式來說明本發明之一實施形態之熱壓成形裝 置。 圖1表示本發明之一實施形態的熱壓成形裝置之全體構 成。 熱壓成形裝置100構成為通用之加壓裝置與熱壓成形用 之模具系統的組合。通用之加壓裝置包含：固定於地板上之支 、 承板（bolster) 102、配置於該支承板102上方之滑動板104、 以及驅動滑動板104之驅動裝置1〇6。滑動板1〇4受到驅動裝 置106之驅動，從而沿著未圖示之支柱在上下方向上移動，以 接近及遠離支承板102。驅動裝置1〇6例如具有驅動滑動板1〇4 之伺服馬達108、以及驅動並控制伺服馬達1〇8之馬達控制器 110。作為驅動裝置106 ,亦可使用具有油壓致動器之驅動裝 置，以替代具有圖示之伺服馬達之驅動裝置。 I 模具系統包含上下兩個氣缸機構112、114，該上下兩個 氣缸機構分別以相互對向配置之方式安裝於支承板1〇2及滑 動板104上。圖2係放大表示上述兩個氣虹機構η〗、114之 一部分。兩個氣缸機構112、114實質上具有相同之構成，因 此僅以上側之氣缸機構112為例，參照圖丨及圖2來說明其構 成。 上侧之氣缸機構112具有：模座組（die set) 116、活塞 ⑽、氣幻20及固持器（h〇lde〇 122。模座組ιΐ6呈大致矩 200911507 形板狀，其固定於滑動板104上。活塞118呈大致矩形柱狀， 其固定於模座組116之中央部上。氣缸120呈大致矩形筒狀， 其底部開口。從氣缸12〇底部之開口向氣缸12〇之内側插入有 /舌塞118。在氣缸120之内側面與活塞us之外側面密著之狀 態下，氣缸120相對於活塞118在上下方向上可滑動（換言之， 活塞118相對於氣缸12〇在上下方向上可滑動）。固持器 呈大致矩形輪狀，其固定於模座組116上，並嵌入至氣缸12〇 f 之外周。氣缸120相對於固持器122在上下方向上亦可滑動。 、 固持器122從外側約束氣缸12〇，以免氣缸12〇在滑動時傾斜。 於固持器122之頂面上，經由彈簧146而安裝有在其頂面 上具有真空襯墊之圓環狀密閉框144。密閉框144相對於固持 器122可滑動，且藉由彈簧146而向下方賦能。當滑動板1〇4 下降而使在、閉框144抵接於下側之氣缸機構η*時，密閉框 144之内側形成一真空腔室。當滑動板1〇4再下降時，密閉框 144在彈簧146之按壓力之作用下抵接於下側之氣缸機構 1 I14，並以此狀態相對於固持器122而向上方滑動。藉由未圖 不之真空泵及大氣開放閥，該真空腔室可自由地進行抽真空與 大氣開放。 氣虹120之頂部具有頂板124，該頂板124係可撓性薄金 屬板。於氣缸120内’藉由頂板124、活塞118、及氣缸120 之侧壁而形成一壓力室126。於該壓力室126内，填充有在大 乳壓下亦可進行高溫加熱之熱導率高的熱媒流體（例如油或蘇 威蘇萊克斯公司的膠登(GALDEN)產品等液體）。壓力室126 11 200911507 實質上密閉著，以便即使在壓力室126之内壓提高時，熱媒流 體亦不會自壓力室126向外側漏出。 密閉之壓力室126之容積可隨著活塞118相對於氣缸12〇 之滑動而變化。當從滑動板104施加至活塞118上之壓力增大 時，活塞118朝向氣缸120之頂部滑動，使得壓力室126之容 積減少，因此壓力室126之内壓上升。除可撓性頂板124以外， 朝向壓力室126之所有壁均為剛體，故不會隨著壓力室126之 内壓而變形。另一方面，當壓力室126之内壓上升時，可撓性 頂板124之内表面承受該内壓而變形為向外側鼓出。 如圖2所示，於氣缸120頂部之外表面（頂面）上，固定 有可撓性薄板狀之壓模機128。該壓模機128之固定方法可將 以下兩者配合使用，即，例如，於氣缸12〇之頂面上利用經加 工之真空吸附槽130進行的抽真空處理（為此而使用之真空泵 之圖示省略）、以及設置於氣缸12〇頂面上之固定炎具132。 固定於氣缸120頂部之壓模機128之背面密著於可撓性頂板 124之外表面。當由壓力室126之内壓而引起頂板124變形時， 壓模機128亦會同樣地產生變形。在熱壓成形時，將上、下壓 模機128、128施壓於作為熱可塑性樹脂板的被加工材料2〇〇 之上、下兩面上。此時’隨著上述壓力室126之内麗之上升， 壓模機128、128產生變形，由此，被加工材料2〇〇之表面上 的壓模機128、128之成形壓力之分布比先前更加均勻。 於壓力室126内設有一裝置，用以對填充於該壓力室内之 熱媒流體進行加熱及冷卻。本實施形態中，舉例來說，複數根 12 200911507 熱交換管134配置於壓力室126内。該等複數根熱交換管134 之入口經由形成於氣缸120内之歧管（manjf〇id) 138而連接 於敷設在模座組116内之供給管136。又，該等複數根熱交換 管134之出口經由形成於氣缸12〇内之歧管142而連接於敷設 在模座組116内之排出管HO。進而，用以檢測壓力室126内 之熱媒流體之溫度的溫度感測器148設置於壓力室126内或者 朝向壓力室126之壁面上（本實施形態中指活塞118之頂面 上）。 1 如圖1所示，供給管丨36與排出管140連接於加熱冷卻流 體供給裝置150。加熱冷卻流體供給裝置15〇具有流體循環裝 置152及控制裝置154。流體循環裝置152將經溫度調節之高 溫加熱流體Η (例如蒸氣、熱水、油等）與低溫冷卻流體c (例 如冷卻水）供給至供給管136，然後吸收通過熱交換管134而 向排出管140排出之上述流體。加熱流體與冷卻流體於熱交換 管134中交替流動，從而可將壓力室126内之熱媒流體進行加 t 熱及冷卻。簡言之，本實施例包含一加熱冷卻裝置180具有熱 交換管134與加熱冷卻流體供給裝置15〇，可對壓力室内之熱 媒流體進行加熱及冷卻。控制裝置154接收溫度感測器148之 輸出4§唬’並對由流體循環裝置152所供給之加熱流體與冷卻 /瓜體之/J2L度及流量加以控制，以使表示上述輸出信號之壓力室 126内之熱媒流體之溫度成為預先設定之設定溫度（加熱用之 設定溫度與冷卻用之設定溫度）。 再者，用以對壓力室126内之熱媒流體進行加熱及冷卻之 13 200911507 變形構成例亦可為，於壓力室126内設置—電加熱器（圖示省 略）與一熱交換管13 4 ’在加熱時，利用外部之加熱器電源（圖 示省略）對電加熱器通電，並且停止對熱交換管134供給冷卻 流體，將空氣供給至壓力室126，又，在冷卻時，停止對電加 熱器通電，並且將冷卻流體供給至熱交換管134。 又，如圖1所示，於壓力室126上，經由預壓管162而連 接一預壓裝置160。該預壓裝置160對壓力室126始終持續地 施加規定之偏壓，隨此，當壓力室126之内壓超出所規定之容 許上限壓時，釋放壓力室126之超壓力而成為容許上限壓。此 處，上述偏壓係在為了於圖案轉印後結束壓模機丨28對被加工 材料200之施壓而使滑動板1〇4上升時，由於壓力室126之内 壓而使頂板124向外側鼓出成凸狀所需之必要數量的壓力（例 如，IMPa左右）。該偏壓低於圖案轉印時所需之壓力（例如， 4〜5MPa左右）。又，上述容許上限壓係比圖案轉印時所需之 壓力（例如，4〜5 MPa左右）高出很多之壓力。 L 如圖1所不’用以檢測壓力室126之内麗的壓力感測器 164設置於壓力室126或賴管162中（本實施例為預壓管 162)。壓力感測斋164之輸出信號被輸入至驅動装置娜之馬 達控制器11G。馬達㈣|| 11G_服馬達⑽作為驅動源來 控制滑動板104之移動，以使塵力感· 164之輸出信號所示 的壓力室126之内壓成為預先設定之設定内壓（其係根據加工 步驟而改變之值）。其結果為，從伺服馬達⑽施加至滑動板 104之壓力之數量得到控制。 14 200911507 圖3A至圖3D表示具有上述構成之熱壓成型裝置⑽所 進行的加工動作之流程。 如圖3A所示，在滑動板刚位於上限位置之狀態下，下 側之壓杈機128上放置有作為加工前之熱可塑性樹脂板的被 ^工材料200。其後’如圖3B所示，滑動板104下降，從而 密閉框144接觸到下側之固持器122，於密閉框144之内側形 成真空腔室170 ’滑動板104停止。利用未圖示之真空泵開 始對真空腔室170進行抽真空處理，並隨此開始向上、下熱交 換管134、134供給加熱媒體。 其後，如圖3C所示，當上、下壓力室126、126内之熱媒 々IL體之溫度上升至規定之設定溫度，且真空腔室17〇内之真空 度達到規定之真空壓時，滑動板1〇4開始再次下降，上、下壓 模機128、128夾持被加工材料200而對被加工材料2〇〇加壓 P。其結果為，從滑動板1〇4與支承板1〇2施加至上、下氣缸 機構112、114的壓力增大。進而，若滑動板1()4持續下降， 則上、下活塞118、118相對於上、下氣缸120、120而滑動， 各個壓力室126、126之容積變小，故各個壓力室126、126之 内壓上升至高於偏壓。藉此，上、下可撓性頂板124、124受 到壓力室126、126之較高内壓的作用而向外侧鼓出，故上、 下壓模機128、128之外表面之整個區域對被加工材料200之 兩面以較高且均勻之壓力施壓。壓力室126、126之内壓分別 藉由壓力感測器164、164而檢測出，並且以使所檢測出之各 個内壓成為設定壓力（熱壓成形時足夠高的壓力）之方式來調 15 200911507 整滑動板104之移動。在規定之設定時間期間，上、下壓模機 128、128對被加工材料200之兩面以上述設定壓力而施壓。 其後，如圖3D所示，開始向上、下熱交換管134供給冷 卻流體。壓模機128、丨28以設定壓力對被加工材料2〇〇持續 方e壓’直至壓力冑126、126内之熱媒流體之溫度下降至規定 低溫為止。其後，滑動板104上升而返回圖3A之狀態，成形 結束。 ( 以此方式，利用壓模機128、12§以壓力室126、126之内 壓經由可撓性頂板124、124來對被加工材料2〇〇之表面施壓， 因而不會受到被加工材料、壓模機、模具尺寸精度之影響，故 可利用壓模機以均勻之壓力來對被加工材料2〇〇之表面施 壓。其結果為’可利用必要之最小限壓力與加熱溫度進行熱壓 成形，從而可降低加壓成形裝置之設備成本及運轉成本，還可 縮短生產時間。 又’上述實施形態中，壓力室内配置有用以對熱媒流體進 ί 行加熱冷卻之熱交換構件（熱交換管、電加熱器等）’故容易 進行熱父換構件之配置、以及加熱與冷卻之切換，又，安裝有 壓模機之頂板之外表面的溫度之不均亦較小。 α進而，上述實施形態中，壓力室總是處於被施加偏壓之狀 態，故成形後在壓模機離開被加工材料時，壓力室之頂板及壓 模機成為從其中央部向外側稍有鼓出之凸狀。因此，被加工材 料容易從壓模機上脫模。 以上說明了本發明之實施形態，但上述實施形態係用以說 200911507 明本發明之例不，其宗旨並非將本發明之範圍僅限定於上述實 施形態。因此，本發明對於上述實施形態以外之態樣锯 【圖式簡單說明】 只施。 圖1係本發明之-實施形態的熱壓成形裝置之全體構成。 圖2係放大表示兩個氣缸機構之一部分。 圖3係表示熱壓成型裝置所進行的加工動作之流程。 【主要元件符號說明】 100 熱壓成形裝置 f 1〇2 支承板 104 滑動板 106 驅動裝置 1〇8 伺服馬達 110 馬達控制器 112、114氣知:機構 116 模組座 《118 活塞 120 氣紅 122 固持器 124 頂板 126 壓力室 128 壓模機 130 真空吸附槽 132 固定失具 17 200911507 134 熱交換管 136 供給管 138 歧管 140 排出管 142 歧管 144 密閉框 148 溫度感測器 150 加熱冷卻流體供給裝置 152 流體循環裝置 154 控制裝置 160 預壓裝置 162 預壓管 164 塵力感測器 170 真空腔室 180 加熱冷卻裝置 200 被加工材 Η 加熱流體 C 冷卻流體 Ρ 加壓 18200911507 IX. INSTRUCTIONS: [Technical field to which the invention pertains] The present invention claims priority to the patent application No. 2007-099888 for the application of the 〇 〇 〇 〇 曰 曰 。 。 。 。 。 。 。 。 。. The present invention relates to a hot press forming apparatus for printing a pattern of fine shapes onto a surface of a thermoplastic sheet by applying pressure to a machine, and the apparatus system. Chess [Prior Art] 'The conventional hot press forming apparatus is, for example, an optical component such as a light guide plate or a diffusing plate for a liquid crystal display, and a micro-pattern on a surface such as a lens or a disc substrate, or has high ingenuity. ,,tangible. This surface is readable (4); == 2〇〇4:74769 i^t ^ ...The cold plate is equipped with a plate-shaped molding machine to heat and cool the molding machine, and then the molding machine is made by J. The two plates apply a surface to the surface of the above lacquerable resin sheet. , α μ ^ plate and heat [Explanation] [Problems to be solved by the invention]: It is known that the number of turns of the shape pattern of the transfer is Am to several tens (10). In addition, the thickness of the resin sheet of the ruthenium has a size of ± 〇 J_, the size of the mold of the thermoplastic machine of the material to be processed, or the mold machine. In addition, Anton has a variation of the stamper __. The degree of flatness and flatness also has 0,01~6 200911507 and the patent of the patented special opening 2004_74 is the surface of the hot house formed by the second report of the heating and cooling plate, and then the cooling plate is cooled by the heating and cooling plate. : Section: The bundle of processed materials. Therefore, the warpage caused by the thermal distortion of the addition and the time is added. The stomach produces a heated cold part. The upper part of the image is evenly distributed on the Chengke press machine and the surface to be added, so that the contact is applied to the material to be processed. As a result, a defect in which the pattern is not completely transferred is locally generated on the surface of the material. In order to solve this problem, several countermeasures have been considered. For example, = pressure on the pressure of the big one or increase the heating temperature of the discussion, with two "P pounds of force" or extended heating between the materials to increase the softening layer of the material being processed In order to reduce the transfer required, however, the above countermeasures are not only in equipment cost, running cost (running (7) (seven) and production time side), but also because the material to be processed is subjected to excess temperature or surface pressure, so that the material (four) surface The bulging may become A, and thus the side surface of the bulged material must be post-processed after the forming is completed. Therefore, the object of the present invention is to perform hot pressing in transferring the concave-convex pattern onto the surface of the thermoplastic sheet. The thermoplastic sheet is brought into contact with the molding machine to be uniform. [Technical means for solving the problem] The hot press forming apparatus of the present invention transfers the shape pattern 200911507 to thermoplasticity by applying pressure to the molding machine. On the surface of the plate, the hot press forming device comprises a pressurizing device and a cylinder mechanism, wherein the pressurizing device has a support plate, a sliding plate and a driving device for driving the sliding plate, The cylinder mechanism is mounted on the sliding plate or the support plate. The cylinder mechanism has a cylinder inside a pressure chamber filled with a heat medium fluid, the cylinder has a flexible top plate having an inner surface facing the pressure chamber, and The outer surface of the molding machine is supported. Further, the hot press forming apparatus includes a heating and cooling device for heating and cooling the heat medium fluid in the pressure chamber, and a preloading device for biasing the pressure chamber. The device heats the molding machine by heating the heat medium in the pressure chamber, and when the temperature of the molding machine is heated to above the softening temperature of the material of the thermoplastic plate, the sliding plate of the pressing device is lowered to press the molding machine Pressing on the thermoplastic plate. At this time, the molding machine presses the surface of the thermoplastic plate through the flexible top plate by the internal pressure of the pressure chamber, so that the pressure of the molding machine on the surface of the thermoplastic plate The distribution becomes more uniform. Thereafter, the heat medium fluid in the pressure chamber is cooled under the pressure application state. When the temperature of the molding machine is cooled to the material of the thermoplastic sheet, the softening temperature of the material In the preferred embodiment of the present invention, the cylinder mechanism is configured to increase the internal pressure of the pressure chamber when the pressure applied to the gas & mechanism is increased by the pressure shock. The gas red mechanism further includes a piston slidably inserted into the cylinder to change a volume of the pressure chamber, the piston being coupled to the sliding plate or the support plate, and being applied to the piston by the sliding plate or the supporting plate When the pressure rises, the piston slides in the cylinder to reduce the volume of the pressure chamber. In a preferred embodiment of the present invention, the heating and cooling device includes a setting of 8 200911507 in the pressure chamber, and a change The heat exchange tube (10) is a heating and cooling fluid supply device for heating fluid and cooling fluid. Alternatively, the heating and cooling device may include: an electric heater disposed in the pressure chamber, a heat exchange tube disposed in the pressure chamber, A fine power source for electrically heating n and a cooling fluid supply device for supplying a cooling fluid to the heat exchange tube. In a preferred embodiment of the present invention, 'the sliding plate is raised to end the compression of the thermoplastic plate by the molding machine, and the above-mentioned device will cause the top plate to be outwardly bent out due to the internal pressure of the pressure chamber. The pressure is applied to the pressure chamber by the above bias. In a preferred embodiment of the present invention, the pressure forming device is further provided with a pressure sensor for detecting the pressure chamber. Further, the urging means controls the movement of the sliding plate in accordance with the detected pressure of the pressure sensor so that the internal pressure of the pressure chamber becomes a predetermined set pressure. In a preferred embodiment of the present invention, the hot press forming apparatus further includes a temperature sensor for detecting the temperature of the heat medium fluid within the pressure J. Further, the heating and cooling device controls the temperature of the heat medium fluid in the pressure chamber based on the detected temperature of the temperature sensor so as to be a predetermined set temperature. A mold system according to another aspect of the present invention is a mold system for a hot press forming apparatus for transferring a concave-convex pattern onto a surface of a thermoplastic sheet by applying pressure to a molding machine, the mold system comprising: the cylinder Mechanism, heating and cooling device, and preloading device. [Effects of the Invention] According to the present invention, the state of the contact between the thermoplastic sheet and the molding machine at the time of molding can be made uniform. [Embodiment] Hereinafter, a hot press forming apparatus according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 shows the overall configuration of a hot press forming apparatus according to an embodiment of the present invention. The hot press forming apparatus 100 is configured as a combination of a general pressurizing device and a die system for hot press forming. A general pressurizing device includes: a bracket fixed to the floor, a bolster 102, a slide plate 104 disposed above the support plate 102, and a driving device 1〇6 for driving the slide plate 104. The slide plate 1〇4 is driven by the driving device 106 to move in the up and down direction along a post (not shown) to approach and away from the support plate 102. The drive unit 1〇6 has, for example, a servo motor 108 that drives the slide plate 1〇4, and a motor controller 110 that drives and controls the servo motor 1〇8. As the driving device 106, a driving device having a hydraulic actuator may be used instead of the driving device having the servo motor shown. The I mold system includes upper and lower cylinder mechanisms 112 and 114, and the upper and lower cylinder mechanisms are attached to the support plate 1〇2 and the slide plate 104 so as to face each other. Fig. 2 is an enlarged view showing a part of the above two gas-red mechanisms η, 114. The two cylinder mechanisms 112 and 114 have substantially the same configuration. Therefore, only the cylinder mechanism 112 on the upper side is taken as an example, and the configuration will be described with reference to Figs. 2 and 2 . The upper side cylinder mechanism 112 has a die set 116, a piston (10), a gas phantom 20, and a holder (h〇lde 〇 122. The die holder group ι 6 has a substantially rectangular shape of 200911507, which is fixed to the sliding plate. The piston 118 has a substantially rectangular column shape and is fixed to a central portion of the die holder set 116. The cylinder 120 has a substantially rectangular cylindrical shape and has a bottom opening. The opening from the bottom of the cylinder 12 is inserted into the inner side of the cylinder 12 / tongue plug 118. In a state in which the inner side surface of the cylinder 120 is in close contact with the outer side surface of the piston usus, the cylinder 120 is slidable in the up and down direction with respect to the piston 118 (in other words, the piston 118 is vertically movable with respect to the cylinder 12). The retainer has a substantially rectangular wheel shape and is fixed to the die holder set 116 and embedded in the outer circumference of the cylinder 12 〇 f. The cylinder 120 can also slide in the up and down direction with respect to the retainer 122. The retainer 122 The outer side restrains the cylinder 12〇 so as not to tilt the cylinder 12 when sliding. On the top surface of the holder 122, an annular sealing frame 144 having a vacuum gasket on its top surface is attached via a spring 146. The sealing frame 144 Relative to the holder 122 The sliding portion is energized downward by the spring 146. When the sliding plate 1〇4 is lowered to bring the closing frame 144 into contact with the lower cylinder mechanism η*, a vacuum chamber is formed inside the sealing frame 144. When the slide plate 1〇4 is lowered again, the seal frame 144 abuts against the lower side cylinder mechanism 1 I14 by the pressing force of the spring 146, and slides upward with respect to the holder 122 in this state. The vacuum pump and the atmospheric open valve can be freely evacuated and open to the atmosphere. The top of the gas rainbow 120 has a top plate 124, which is a flexible thin metal plate. The top plate 124, the piston 118, and the side wall of the cylinder 120 form a pressure chamber 126. The pressure chamber 126 is filled with a heat medium (such as oil) having a high thermal conductivity which can be heated at a high temperature under high pressure. Or a liquid such as a GALDEN product from Solvay Solex. The pressure chamber 126 11 200911507 is substantially sealed so that the heat medium fluid does not self-pressure chamber 126 even when the pressure within the pressure chamber 126 is increased. Leaking to the outside. The capacity of the closed pressure chamber 126 It may vary as the piston 118 slides relative to the cylinder 12. As the pressure applied from the sliding plate 104 to the piston 118 increases, the piston 118 slides toward the top of the cylinder 120, causing the volume of the pressure chamber 126 to decrease, thus the pressure The pressure inside the chamber 126 rises. Except for the flexible top plate 124, all the walls facing the pressure chamber 126 are rigid and do not deform with the internal pressure of the pressure chamber 126. On the other hand, within the pressure chamber 126 When the pressure rises, the inner surface of the flexible top plate 124 is deformed to bulge outward by receiving the internal pressure. As shown in Fig. 2, a flexible sheet-shaped press machine 128 is fixed to the outer surface (top surface) of the top of the cylinder 120. The fixing method of the molding machine 128 can be used in combination with, for example, a vacuuming process by using the processed vacuum adsorption tank 130 on the top surface of the cylinder 12〇 (a diagram of the vacuum pump used for this purpose) The device is omitted, and the fixed fixture 132 is disposed on the top surface of the cylinder 12. The back surface of the molding machine 128 fixed to the top of the cylinder 120 is adhered to the outer surface of the flexible top plate 124. When the top plate 124 is deformed by the internal pressure of the pressure chamber 126, the molding machine 128 is similarly deformed. At the time of hot press forming, the upper and lower pressers 128 and 128 are pressed against the upper and lower surfaces of the workpiece 2〇〇 as the thermoplastic resin sheet. At this time, as the inside of the pressure chamber 126 rises, the molding machines 128, 128 are deformed, whereby the forming pressure of the molding machines 128, 128 on the surface of the workpiece 2 is more distributed than before. More even. A means is provided in the pressure chamber 126 for heating and cooling the heat medium fluid filled in the pressure chamber. In the present embodiment, for example, a plurality of 12 200911507 heat exchange tubes 134 are disposed in the pressure chamber 126. The inlets of the plurality of heat exchange tubes 134 are connected to a supply tube 136 disposed in the die holder set 116 via a manifold 138 formed in the cylinder 120. Further, the outlets of the plurality of heat exchange tubes 134 are connected to the discharge pipe HO laid in the die holder group 116 via a manifold 142 formed in the cylinder 12 bore. Further, a temperature sensor 148 for detecting the temperature of the heat medium fluid in the pressure chamber 126 is disposed in the pressure chamber 126 or toward the wall surface of the pressure chamber 126 (in the present embodiment, on the top surface of the piston 118). As shown in Fig. 1, the supply pipe 36 and the discharge pipe 140 are connected to the heating and cooling fluid supply device 150. The heating and cooling fluid supply device 15A has a fluid circulation device 152 and a control device 154. The fluid circulation device 152 supplies a temperature-regulated high-temperature heating fluid (e.g., steam, hot water, oil, etc.) and a cryogenic cooling fluid c (e.g., cooling water) to the supply pipe 136, and then absorbs it through the heat exchange pipe 134 to the discharge pipe. The above fluid discharged from 140. The heating fluid and the cooling fluid alternately flow in the heat exchange tubes 134, so that the heat medium fluid in the pressure chamber 126 can be heated and cooled. Briefly, the present embodiment includes a heating and cooling device 180 having a heat exchange tube 134 and a heated cooling fluid supply unit 15 for heating and cooling the heat medium fluid in the pressure chamber. The control device 154 receives the output 4 唬 ′ of the temperature sensor 148 and controls the heating fluid and the cooling/guar body/J2L degree and flow rate supplied by the fluid circulation device 152 to make the pressure chamber representing the output signal The temperature of the heat medium fluid in 126 is a predetermined set temperature (a set temperature for heating and a set temperature for cooling). Further, in order to heat and cool the heat medium fluid in the pressure chamber 126, the deformation configuration may be such that an electric heater (not shown) and a heat exchange tube 13 4 are provided in the pressure chamber 126. 'When heating, the electric heater is energized by an external heater power source (not shown), and the supply of the cooling fluid to the heat exchange tube 134 is stopped, the air is supplied to the pressure chamber 126, and when it is cooled, the power is stopped. The heater is energized and a cooling fluid is supplied to the heat exchange tubes 134. Further, as shown in Fig. 1, a preloading device 160 is connected to the pressure chamber 126 via a preload tube 162. The preloading device 160 constantly applies a predetermined bias to the pressure chamber 126. Accordingly, when the internal pressure of the pressure chamber 126 exceeds the predetermined allowable upper limit pressure, the overpressure of the pressure chamber 126 is released to become the allowable upper limit pressure. Here, the biasing is performed by pressing the presser 丨28 against the material to be processed 200 after the pattern transfer to raise the sliding plate 1〇4, and the top plate 124 is moved by the internal pressure of the pressure chamber 126. The outer side bulges the necessary amount of pressure required to be convex (for example, about 1 MPa). The bias voltage is lower than the pressure required for pattern transfer (for example, about 4 to 5 MPa). Further, the allowable upper limit pressure is much higher than the pressure required for pattern transfer (for example, about 4 to 5 MPa). The pressure sensor 164, which is not used to detect the pressure inside the pressure chamber 126, as shown in Fig. 1, is disposed in the pressure chamber 126 or the manifold 162 (this embodiment is the pre-pressure tube 162). The output signal of the pressure sensing 164 is input to the drive unit Nazhida controller 11G. Motor (4)|| 11G_ service motor (10) as a driving source to control the movement of the sliding plate 104 so that the internal pressure of the pressure chamber 126 indicated by the output signal of the dust force 164 becomes a preset internal pressure (based on The value of the processing step is changed). As a result, the amount of pressure applied from the servo motor (10) to the slide plate 104 is controlled. 14 200911507 Figs. 3A to 3D show the flow of the machining operation performed by the hot press forming apparatus (10) having the above configuration. As shown in Fig. 3A, in the state in which the slide plate is just at the upper limit position, the workpiece material 200 as the thermoplastic resin sheet before the processing is placed on the lower press machine 128. Thereafter, as shown in Fig. 3B, the slide plate 104 is lowered, so that the sealing frame 144 contacts the lower holder 122, and the vacuum chamber 170' is formed inside the sealing frame 144. The vacuum chamber 170 is evacuated by a vacuum pump (not shown), and the heating medium is supplied to the upper and lower heat exchange tubes 134, 134. Thereafter, as shown in FIG. 3C, when the temperature of the heat medium 々IL body in the upper and lower pressure chambers 126, 126 rises to a predetermined set temperature, and the vacuum degree in the vacuum chamber 17 达到 reaches a prescribed vacuum pressure The slide plate 1〇4 starts to fall again, and the upper and lower molding machines 128 and 128 sandwich the workpiece 2 to pressurize the material to be processed 2〇〇. As a result, the pressure applied from the slide plate 1〇4 and the support plate 1〇2 to the upper and lower cylinder mechanisms 112 and 114 is increased. Further, if the slide plate 1 () 4 continues to descend, the upper and lower pistons 118, 118 slide with respect to the upper and lower cylinders 120, 120, and the volume of each of the pressure chambers 126, 126 becomes small, so that the respective pressure chambers 126, 126 The internal pressure rises above the bias voltage. Thereby, the upper and lower flexible top plates 124, 124 are bulged outward by the higher internal pressure of the pressure chambers 126, 126, so that the entire area of the outer surfaces of the upper and lower molding machines 128, 128 is opposed. Both sides of the machined material 200 are pressed at a relatively high and uniform pressure. The internal pressures of the pressure chambers 126, 126 are detected by the pressure sensors 164, 164, respectively, and are adjusted so that the detected internal pressures become set pressures (high enough pressure during hot press forming). 200911507 The movement of the entire sliding plate 104. During the predetermined set time, the upper and lower molding machines 128, 128 pressurize both sides of the workpiece 200 at the set pressure. Thereafter, as shown in Fig. 3D, the upper and lower heat exchange tubes 134 are started to supply the cooling fluid. The molding machine 128 and the crucible 28 pressurize the material to be processed 2 at a set pressure until the temperature of the heat medium fluid in the pressure ports 126 and 126 falls to a predetermined low temperature. Thereafter, the slide plate 104 is raised to return to the state of Fig. 3A, and the forming is completed. (In this manner, the surface of the material to be processed 2 is pressed by the flexible top plates 124, 124 by the internal pressure of the pressure chambers 126, 126 by the molding machine 128, 12 §, and thus is not subjected to the material to be processed. The influence of the size accuracy of the die press and the die, so that the surface of the material to be processed can be pressed with a uniform pressure by a press machine. The result is that 'the minimum pressure and the heating temperature can be used for heat. By press forming, the equipment cost and running cost of the press forming apparatus can be reduced, and the production time can be shortened. In the above embodiment, the pressure chamber is provided with a heat exchange member for heating and cooling the heat medium fluid (heat The exchange tube, the electric heater, and the like) are easy to perform the arrangement of the hot parent replacement member and the switching between the heating and the cooling, and the unevenness of the temperature of the surface of the top plate to which the molding machine is mounted is also small. In the above embodiment, the pressure chamber is always biased. Therefore, when the molding machine leaves the material to be processed after molding, the top plate and the molding machine of the pressure chamber are slightly outward from the center portion. Therefore, the material to be processed is easily released from the molding machine. The embodiment of the present invention has been described above, but the above embodiment is used to say that the invention is not limited to 200911507. The present invention is limited to the above-described embodiments. Therefore, the present invention is not limited to the above-described embodiment of the present invention. Fig. 1 is a view showing the overall configuration of the hot press forming apparatus according to the embodiment of the present invention. Fig. 2 is an enlarged view showing a part of two cylinder mechanisms. Fig. 3 is a flow chart showing the processing operation performed by the hot press forming apparatus. [Main element symbol description] 100 hot press forming apparatus f 1〇2 support plate 104 sliding plate 106 drive Device 1〇8 Servo Motor 110 Motor Controller 112, 114 Gas: Mechanism 116 Module Block “118 Piston 120 Gas Red 122 Holder 124 Top Plate 126 Pressure Chamber 128 Molding Machine 130 Vacuum Adsorption Tank 132 Fixed Dislocation 17 200911507 134 Heat exchange tube 136 supply tube 138 manifold 140 discharge tube 142 manifold 144 enclosure 148 temperature sensor 150 heating cooling fluid supply 152 Circulation means 154 control means 160 of the preload device 164 dust tube 162 preload force sensor 170 the vacuum chamber 180 heating and cooling device 200 is a heating fluid processing material Η Ρ pressurized cooling fluid 18 C