200907189 九、發明說明： 【發明所屬之技術領域】 本發明係關於塗布滾筒的軸承構造以及塗布裝置，特 別是關於均勻地形成寬廣塗布面的塗布裝置之塗布滾筒的 軸承構造。 【先前技術】 以往，在塗布滾筒裝置方面，提案有各種方式（例如， 專利文獻1)。這些塗布滾筒裝置都是一邊導引寬度較小的 薄膜，一邊塗布塗布液。 不過，隨著使用於液晶顯示器等之功能性薄膜（例如， 光學補償膜、抗反射膜等）的大面積化，薄膜寬度也變大， 而需要寬廣的塗布滾筒裝置。 但是，在寬廣的塗布滾筒裝置方面，由於塗布滾筒（以 下簡稱爲「滾筒」）自身的重量而使軸撓曲增加，因對於軸 承部的力矩（moment)增大，而在旋轉時產生滾筒的軸晃 動。另外，由於隨著滾筒之加長化而增加的滾筒重量相對 於軸承部的負荷增大。其結果，會有滾筒的旋轉精度明顯 下降、在薄膜上塗布之塗布膜厚度變得不均勻的問題。 相對地，例如，在專利文獻2方面，則使用附有自動 調準機構之軸承（滾子軸承）來作爲使滾筒旋轉的機構。然 後，爲了補償附有自動調準機構之軸承的旋轉精度低落， 將氣體軸承用外座圈固定於滾筒內部，在該氣體軸承用外 座圈內側設置氣體軸承用支撐軸。藉此，抑制伴隨滾筒旋 200907189 轉的轉矩不均。 另外，在專利文獻3方面，提出了將滾筒固定於角軸 承（angular bearing)內座圈，進一步在內周面固定角軸承外 座圈，且與外周面成爲球狀之外殼嵌合的軸承構造。以此 軸承構造而言，滾筒的轉動不論是重力方向還是水平方向 都可自由活動。另外，角軸承在軸方向上的間隙也消失， 所以能實現高旋轉精度。 [專利文獻1]特開2002-336756號公報 [專利文獻2]特開平6-221325號公報 [專利文獻3]特開2006-349100號公報 【發明內容】 [本發明欲解決的課題] 不過，在上述專利文獻2、3之方法中，因爲皆使用滾 動軸承’所以在軸承構造上容易成爲振動的發生源頭，也 變得容易傳達外部振動。因此，會有軸承的動態特性低， 振動等之干擾容易傳達至薄膜的問題。 此外，使用球面型外殼的上述專利文獻3中也有如同 以下的問題。 (1)滾筒和塗布頭的間隙會變動。具體而言，第6圖 係將滾筒5安裝於以往之軸承構件2時的上視圖，如同一 圖所示，軸承構件2也在薄膜3的搬送方向上進行調準。 亦即，因爲構成球面型外殼的內座圈4之外周面在薄膜3 的搬送方向上成爲球面狀，所以如箭頭所示，在薄膜搬送 200907189 方向（γ方向）上也會傾斜運動。因此，水平方向的外力（例 如薄膜搬送方向的張力等）施加於滾筒5時，滾筒5和塗布 頭6的間隙會大幅變動，要形成均句膜厚的塗布面就會變 得困難。 (2) 因爲以球面型外殼來調準滾筒時，構造上的點接 觸增加，所以軸承部的動態特性下降，振動會發生。當此 振動傳達至滾筒時，會有造成對薄膜的塗布性能下降之虞。 (3) 球面型外殼的球面係加工精度低、成本變高。 此外，在生產功能性薄膜方面，爲了進行高精度的薄 層塗布，滾筒被要求是以下的高精度旋轉。 本發明乃有鑑於這種情況’所以目的在於提供一種塗 布滾筒的軸承構造，其即使塗布滾筒撓曲或是有對塗布滾 筒施加重力方向以外之外力’塗布滾筒的旋轉軸心也不會 變動，能夠實現高旋轉精度。 [解決課題的手段] 本發明的第一型態中，爲了達成前述目的而提供一種 塗布滾筒的軸承構造，其特徵爲具備：第1軸承部，其將 塗布滾筒的旋轉軸支撐爲可自由旋轉；以及第2軸承部， 其支撐前述第1軸承部，並且以僅跟隨前述塗布滾筒的重 力方向之撓曲的方式容許前述第1軸承部之傾斜運動。 依據第一型態，係設置第2軸承部，其以僅跟隨塗布 滾筒的重力方向之撓曲的方式容許第1軸承部之傾斜運 動。藉此，即使塗布滾筒會撓曲，也不會在旋轉時發生滾 200907189 筒軸晃動或增大軸承的負荷’且以撓曲的狀態來形成固定 的旋轉軸心並且旋轉。另外’即使對塗布滾筒施加重力方 向以外的外力’塗布滾筒的旋轉軸心也不會變動。藉此， 能實現高旋轉精度。 作爲第1軸承部，雖未特別限定，但較佳爲可使用例 如，油壓式靜壓軸承等。另外，在來自外部侵入之振動等 的干擾少的時候，能採用高精度的滾珠軸承方式和滾子軸 承方式等。另外，滾筒的重量小等而對軸承之負荷或力矩 的影響小的時候，也能採用利用空氣壓的空氣壓軸承方 式、利用磁力的磁性軸承方式等。 本發明的第二型態之特徵爲：在第一型態中，前述第 2軸承部係一種滑動軸承，其具備：滑動軸承部內座圈， 其設置在前述第1軸承部之外周，以內周面來支撐前述第 1軸承部；以及滑動軸承部外座圈，其設置在前述滑動軸 承部內座圈之外周，將該內座圈之外周面支撐爲可自由滑 動。 本發明的第三型態之特徵爲：在第二型態中’前述滑 動軸承部內座圏會形成爲部分圓柱形狀，在該部分圓柱形 狀中，上下對向之一對外周面會沿著前述塗布滾筒之軸方 向而形成圓弧狀之凸狀曲面，並且以該軸方向爲中心而左 右對向之一對外周面會形成平面，前述滑動軸承部外座圈 係具有部分圓柱形狀的空間，在該部分圓柱形狀的空間 中，上下對向之一對內周面會形成沿著前述塗布滾筒之軸 200907189 方向而和前述滑動軸承部內座圈之前述一對外周面相接觸 的圓弧狀之凹狀曲面，並且以該軸方向爲中心而左右對向 之一對內周面會形成和前述滑動軸承部內座圈之前述左右 對向的一對外周面相接觸的平面。 依據第三型態，因爲將構成第2軸承部的滑動軸承部 內座圈及滑動軸承部外座圈之以塗布滾筒之軸方向爲中心、 而左右面對的側面做成平面，所以能限制第2軸承部在該 左右方向上的傾斜運動。另外，因爲在滑動軸承部內座圏 之上下面對的2個外周面會形成圓弧狀的凸狀曲面，所以 能容許塗布滾筒在軸方向上的傾斜運動。 藉此，因爲能確保對調準所必需的自由度，並且比以 往的軸承更能削減點接觸部，所以能在使軸承之動態特性 提升的狀態下進行調準。另外，因爲相較於以往的球面型 之滑動軸承’曲面加工的精度高，所以即使滑動軸承部內 座圈以及滑動軸承部外座圏成爲大直徑，也能精度良好地 進行兩者的對準加工。因此，使調準性高精度化的同時， 能夠低成本化。 本發明的第四型態之特徵爲：在第三型態中前述圓弧 狀之凸狀曲面的曲率半徑R係前述滑動軸承部內座圈之內 徑d的0.8〜2倍。 在滑動軸承部內座圈中，當圓弧狀之凸狀曲面的曲率 半徑太小時，構造上支撐塗布滾筒所必需的剛性就會下 降，當曲率半徑太大時，就無法獲得充分的調準性’兩種 200907189 狀況皆不佳。藉由第四型態，圓弧狀之凸狀曲面的曲率半 徑係藉由設爲滑動軸承部內座圈之內徑d(50〜25〇mm左右） 的0.8〜2倍（40〜500mm左右），所以能抑制如同上述的不 佳情形。 本發明的第五型態之特徵爲：在第三或第四型態中’ 其中在前述滑動軸承部內座圈之外周面中，前述左右對向 之平面間的寬度B和前述曲率半徑R的比B/R係1〜5。 依據第五型態，即使重力方向以外的力量對滑動軸承 部內座圈發生作用，滑動軸承部內座圈的位置相對於滑動 軸承部外座圈也會是穩定的，不會使滑動軸承部內座圈之 動態特性下降，能發揮高調準性。亦即，B/R比在低於1 時，滑動軸承部內座圈的動態特性會容易下降，在超過5 時，滑動軸承部內座圈的重量會增加，變得很難平順地進 丫了調準。因此，B / R比係1〜5左右爲較佳。 本發明的第六型態之特徵爲：在第一至第五型態中任 一個當中前述一對第1軸承部係油壓式靜壓軸承。 依據第六型態，作爲支撐塗布滾筒的軸承方式，因爲 採用顯現高振動阻尼性、高旋轉精度、高負荷容量等的油 壓式靜壓軸承方式，所以能使靜態特性、動態特性都獲得 提升。另外，在支撐長條型塗布滾筒的第丨軸承部中，也 能防止令人擔憂的旋轉軸之外周面和第1軸承部之內周面 的咬合（接觸）。 本發明的第七型態之特徵爲：在第六型態中，具備： -10- 200907189 測定手段，其測定前述油壓式靜壓軸承之潤滑油的溫度； 以及溫度控制手段’其根據該測定手段的結果’來將前述 潤滑油控制在既定的溫度。 要支撐寬度和重量大的塗布滾筒時’需要高的軸承剛 性。因此，油壓式靜壓軸承的供油壓力變高’潤滑油變得 容易發熱。即使此潤滑油之溫度在±數°c的範圍內變動，也 因爲會對軸承的性能造成影響’所以潤滑油溫度控制變得 很重要。藉由第七型態’因爲監控這種潤滑油溫度’將潤 滑油控制在既定的溫度’所以能穩定地維持軸承的性能。 本發明的第八型態之特徵爲：在第一至第七型態中任 一個當中，前述塗布滾筒的有效面長係3〇〇〇mm以下。 這種寬度很大的塗布滾筒，會由於自身重量而造成軸 擦曲增加。藉由第八型態’因爲塗布滾尚的有效面長設在 3 00 0mm以下，所以能將塗布滾筒的提曲量設在定値以下 (5 0 # m 以下）。 本發明的第九型態係爲了達成前述目的，而提供一種 塗布滾筒的軸承構造’其特徵爲：設置在塗布滾筒之旋轉 軸的兩端側且將前述旋轉軸支撑爲可自由旋轉的一對軸承 構件當中之至少一方係具有第一至弟八型態中任一項記載 之軸承構造。 本發明的第十型態之特徵爲：在第九型態中’前述一 對軸承構件之任一個皆具有第一至第八型態中任一項記載 之軸承構造，並旦藉由止推軸承來支撐前述一對軸承構件 -11- 200907189 當中一方的第1軸承部。 單純地以軸頸式靜壓軸承來支撐塗布滾筒時，在推力 方向上之旋轉軸的移動就變得很自由。因此，作爲用於限 制塗布滾筒在推力方向上之移動的軸承機構，在塗布滾筒 的兩端部會有支撐推力方向的方法。不過，由於潤滑油發 熱而在塗布滾筒的軸方向上引起熱膨脹的時候，因爲在軸 方向上沒有多餘空間’所以會有受到壓縮荷重而變形之 虞。藉由第十型態’因爲僅在塗布滾筒之一方設置止推軸 承，所以能抑制如同上述的不佳情形。 本發明的第十一型態係爲了達成前述目的，而提供一 種塗布裝置，其係押出型的塗布裝置，且在塗布頭以及捲 繞於塗布滾筒而在水平方向上行進的帶狀薄膜之間的間隙 中形成塗布液橋接，並將從前述塗布頭吐出之塗布液塗布 在前述薄膜上，該塗布裝置之特徵爲：將前述塗布滾筒之 旋轉軸支撐爲可自由旋轉的一對軸承構件當中之至少一方 係具有第一至第八型態中任一項記載之軸承構造。 藉由第^ 型態，在這種塗布裝置中，在薄膜搬送方 向上塗布滾筒的旋轉軸心不會變動。因此，在捲繞有薄膜 的塗布滾筒和塗布頭之間能形成均勻的間隙，能均勻地塗 布塗布液。此外’作爲塗布滾筒，也包含加壓滾筒。 [發明的效果] 藉由本發明’即使塗布滾筒會撓曲或對塗布滾筒施加 重力方向以外的外力，塗布滾筒之旋轉軸心也不會變動， -12- 200907189 能實現高旋轉精度。 【實施方式】 以下’依照附加的圖面，來詳細說明本發明之塗布滾 筒的軸承構造以及塗布裝置的較佳實施形態。 第1圖係說明具備本發明之塗布滾筒的軸承構造的塗 布裝置之槪要的立體圖。其中（A)部分係表示塗布裝置之主 要部分的圖，（B)部分係表示軸承構件之構成構件的圖。 如第1圖所示’塗布裝置1 0係對連續行進之薄膜塗布 塗布液的裝置，主要是由捲繞有薄膜12的加壓滾筒14(以 下簡稱爲「滾筒1 4」）以及配置成相對於此滾筒1 4而設有 既定間隙的押出型（extrusion)之塗布頭16所構成。以下， 以滾筒14之軸方向爲X方向’以該滾筒14之軸方向爲中 心的左右方向（相對於軸方向而水平正交之方向或者是薄 膜搬送方向）爲Y方向’以上下方向（重力方向）爲Z方向， 且皆包含正（P1 u s)側、負（m i n u s)側。 在押出型之塗布頭16內部，以薄膜12的寬度方向而 形成穴袋18。穴袋18係介由縫隙20而連通於塗布頭16 之前端（唇部）的縫隙開口部20a。縫隙開口部20a係在薄膜 12之寬度方向上形成爲細長型’其寬度尺寸係形成爲與薄 膜12之寬度尺寸大略相等。然後，藉由未圖示之塗布液供 給源並介由供給路徑1 7而供給於穴袋丨8的塗布液係介由 縫隙2 0而從縫隙開口部2 0 a中被吐出。然後，在塗布頭1 6 之前端和連續行進的薄膜1 2之間的間隙上形成塗布液橋 -13- 200907189 接（聯接）’將塗布液轉移至薄膜1 2上。此外，塗布頭16 係被未圖示之支撐構件所支撐。 滾筒1 4之寬度係大幅地形成爲能夠捲繞薄膜1 2的程 度，該兩端部之旋轉軸2 2係被具有本發明之軸承構造的軸 承構件24支撐爲可自由旋轉。 本發明所使用的滾筒14係因爲例如，滾筒14之重量 重達約400kg左右，寬度也較大，所以很容易因自身重量 而在重力方向上撓曲。產生此撓曲時，塗布頭16和滾筒14 之間隙分佈就不均勻。因此，爲了均勻地保持塗布頭1 6和 滾筒1 4的間隙分佈，必須進行使塗布頭1 6之前端形狀配 合撓曲之滾筒1 4之形狀的調整。在此調整時出現的誤差量 係由於滾筒1 4所具有之撓曲量而受到影響。具體而言’出 現了滾筒1 4之撓曲量的1 0 %左右來作爲間隙的調整誤差。 因爲作爲塗布頭1 6和滾筒1 4之間隙的分佈精度而要 求是5 // m以下，所以較佳爲將滾筒1 4之撓曲量設爲5 0 μ m以下，作爲滾筒14的有效面長L則較佳爲設成3 000mm 以下。 不過，因爲即使進行上述調整，薄膜12也會捲繞於滾 筒1 4且在水平方向上被搬送，所以由於施加於滾筒1 4的 薄膜12之張力變動和傳達至滾筒14的搬送方向之外部振 動，塗布頭16和滾筒14的間隙會變動。因此’塗布層之 膜厚和薄膜寬度方向的膜厚分佈變得不均勻。所以’必須 一邊隨著滾筒14的軸撓曲，一邊避免產生軸晃動（旋轉軸 -14- 200907189 心之變動）而穩定地支撐滾筒14(進行調準）。 因此，在本發明中，將軸承構件24構成爲無薄膜搬送 方向（Y方向）的調準，僅在滾筒14的軸方向（X方向）上進 行調準。以下說明屬於本發明之特徵部分的軸承構件24。 在軸承構件24中，於滾筒14之旋轉軸22的外周，配 設有將旋轉軸22支撐爲可自由旋轉的油壓式靜壓軸承 2 6 (第1軸承部），進一步在其外周配設滑動軸承27 (第2軸 承部）’其支撐油壓式靜壓軸承26並且進行滾筒14的調準。 滑動軸承27係由滑動軸承部內座圈28與滑動軸承部 外座圈3 0所構成。 滑動軸承部內座圈2 8係如第1圖之（B )部分所示，滑 動軸承部內座圈28在Z方向（上下方向）上對向的2個外周 面28a、28b’係在X方向上形成圓弧狀的凸狀曲面，在γ 方向（以軸方向爲中心的左右方向）上對向的 2個外周面 2 8 c、2 8 d係形成爲構成平面的部分圓柱形狀。 在滑動軸承部內座圈28外周上配設有支撐滑動軸承 部內座圈28的滑動軸承部外座圈30,且形成爲收納滑動軸 承部內座圈28。亦即，外座圈30在Z方向（上下方向）上對 向的2個內周面30a、30b係在X方向上形成圓弧狀的凹狀 曲面’在Y方向（以軸方向爲中心的左右方向）上對向的2 個內周面3 0 c、3 0 d則形成平面（參照後述的第4圖）。藉此， 滑動軸承部內座圈2 8只有在X方向上傾斜運動，卻不會在 Y方向上傾斜運動。因此’能將支撐旋轉軸22的油壓式靜 -15- 200907189 壓軸承26設定爲僅容許在X方向上傾斜運動’而不會在Y 方向上傾斜運動。 在滑動軸承部內座圈28之外周面28a、28b方面’當 曲率半徑R太小時，在構造上支撐滾筒1 4所必需的剛性就 會下降，當曲率半徑R太大時，調準性就會下降。因此’ 滑動軸承部內座圏28之外周面28a、28b的曲率半徑R係 較佳爲滑動軸承部內座圈28之內徑d(50〜250mm左右）的 0_8〜2倍（40〜500mm左右）。 滑動軸承部內座圏28之外周面當中，在Y方向（以軸 方向爲中心的左右方向）上對向的2個外周面28c、28d之 間的寬度B和曲率半徑R的比（以下，將其稱爲「B/R比」） 低於1時，滑動軸承部內座圈2 8之動態特性就容易下降， 若超過5時，滑動軸承部內座圏2 8重量會增加，變得無法 平順地調準。因此，較佳爲將B/R比設爲1〜5。 第2圖係說明具有本發明之軸承構造的軸承構件2 4之 內部構成的放大截面圖。此外’同一圖係表示設有止推軸 承之側的軸承構件24。 在滑動軸承部內座圈28之內周面上，如第2圖所示， 固疋有將旋轉軸22支撐爲可自由旋轉的油壓式靜壓軸承 26之外周構件32，且與滑動軸承部內座圈28成爲一體而 運動。另外，在滑動軸承部內座圈28之內周面上，於周緣 方向上設置用以供給潤滑油的供油溝3 4。 在油壓式靜壓軸承26之內壁面和旋轉軸22之間，沿 -16- 200907189 著周緣方向以及軸方向而形成靜壓穴袋36以及大氣壓 放溝38，這些靜壓穴袋36以及大氣壓解放溝38係介由 承金屬構件40而連通，該軸承金屬構件40在和旋轉軸 外周面之間形成有能通過潤滑油之程度的微細流路。大 壓解放溝3 8係被密封構件42所密封。另外，在面對供 溝34的外周構件32之表面上形成供油口 44，此供油口 與靜壓穴袋36則介由形成爲微細流路狀的供油孔46而 通。靜壓穴袋38、38連通於在重力方向之下部沿著軸方 而形成的排油孔4 8，排油孔4 8連通於排油口 5 0。 藉此，潤滑油係從在周緣方向上形成的供油溝3 4， 過供油口 44以及供油孔46，而供給於靜壓穴袋36、軸 金屬構件40(周緣方向的微細流路）以及大氣壓解放溝38 然後，循環於靜壓穴袋3 6、大氣壓解放溝3 8的潤滑油係 集中於排油孔4 8以後，介由排油口 5 0而排出至外部。 貯留、供給潤滑油的潤滑油供給源 5 2係藉由管 54a、54b而分別連通於供油溝34、排油口 50，而形成有 滑油之循環路徑5 4。在潤滑油循環路徑5 4的途中，設有 定潤滑油之溫度的濕度計5 6以及潤滑油溫度控制機 5 8。在濕度計56方面，會成爲能常時監視潤滑油之溫度 狀況。另外，潤滑油溫度控制機構5 8係使用氣冷、水冷 冷煤方式的溫調機器，來將潤滑油之溫度控制爲既定 度。藉此，根據濕度計5 6的潤滑油之溫度測定結果’潤 油溫度控制機構5 8將潤滑油之溫度控制爲既定溫度。 解 軸 22 氣 油 44 過 向 經 承 〇 被 路 潤 測 構 的 、 溫 滑 -17- 200907189 在油壓式靜壓軸承2 6的內部，與滾筒1 4相反之側的 大氣壓解放溝38的旁邊，設置有凸緣狀的止推軸承60。此 止推軸承60係在固定於滾筒14的狀態下，成爲和滾筒14 一起自由旋轉，和外周構件32之間藉由螺絲64而固定的 固定構件62之間的周緣方向側面部上，會形成油能夠潤滑 之程度的微細流路。然後，從大氣壓解放溝3 8流出的潤滑 油係藉由通過、潤滑上述微細的流路，而限制在滾筒丨4之 軸方向上的移動。在油壓式靜壓軸承2 6之滾筒14側，根 據需求而設置摩擦密封部66。 此外，上述的止推軸承60係較佳爲僅設置在一對軸承 構件24當中的任一方。亦即，潤滑油已發熱的時候，在滾 筒14之軸方向上發生熱膨脹，滾筒越長則其膨脹量越大。 於滾筒14的兩端部支撐推力方向時，因爲在軸方向上沒有 多餘空間’所以也會有受到壓縮荷重而變形之虞。因此， 在支撐滾筒14的一對軸承構件24當中，藉由僅在任一方 設置止推軸承6 0，來抑制如同上述的不佳情形。 接著，關於本發明的作用，則參照第3圖以及第4A圖、 第4B圖來說明。第3圖係說明滾筒在重力方向上撓曲之狀 態的說明圖，第4A圖以及第4B圖係說明軸承構件24之動 作的說明圖。其中，第4A圖係從正面觀看塗布裝置1〇之 動作的圖’也就是軸承構件24在重力方向上之截面圖。另 外’第4B圖係從上方觀看塗布裝置1〇之動作的圖，也就 是軸承構件24在水平方向上之截面圖》 -18 - 200907189 首先，使潤滑油供給源52運作，從供油溝34將潤滑 油供給於油壓式靜壓軸承26內的靜壓穴袋36以及大氣壓 解放溝3 8的同時，介由排油孔48、排油口 50排出，而循 環於潤滑油供給源5 2。此時的油溫及油壓係因應滾筒重 量、旋轉速度、必要的剛性値等之設計條件，而設定爲適 當的値。然後，使滾筒14旋轉。 使滾筒14旋轉的期間，如第3圖所示，滾筒14由於 自身重量而在重力方向上撓曲，成爲旋轉軸心14A(虛線） 由水平晃動的狀態。 此時，如第4A圖所示’軸承構件24中，隨著滾筒14 的撓曲，滑動軸承部內座圈28會在X方向上傾斜運動（參 照箭頭）。因此，即使塗布滾筒撓曲，在旋轉時滾筒也不會 發生軸晃動或增大軸承的負荷，且以撓曲的狀態來形成固 定的旋轉軸心並且旋轉。 另外，從上方觀看此時的情況時，如第4 B圖所示，在 軸承構件24中’因爲在Y方向上，滑動軸承部內座圈28 之外周面2 8 c和外座圈3 0之內周面3 0 c、以及滑動軸承部 內座圈28之外周面28d和滑動軸承部外座圈30之內周面 3 0 d係相互在平面上接觸，所以滑動軸承部內座圏2 8不會 在Y方向上傾斜運動，而被穩定地固定著。 亦即，即使在滾筒1 4上發生撓曲，也能以跟隨撓曲的 方式，滑動軸承部內座圈2 8在X方向上傾斜運動，在γ 方向上不會傾斜運動。因此，滾筒1 4的旋轉軸心1 4 A (虛線） -19- 200907189 不會變動，能以高旋轉精度來將滾筒14支撐爲可自由旋 轉。此外，能使塗布頭1 6和滾筒1 4的間隙分佈變得均勻。 如同這般，藉由本實施形態，能抑制滾筒在薄膜之搬 送方向上的軸晃動，實現高旋轉精度。另外，相較於以往 的球面型滑動軸承，本發明之部分圓柱型的滑動軸承係因 爲加工曲面的精度高，所以即使滑動軸承部內座圈以及滑 動軸承部外座圈成爲大直徑，也能精度良好地進行兩者的 對準加工。因此，能使調準性高精度化的同時，能夠低成 本化。 此外，作爲使用於本發明的薄膜1 2，能使用習知的各 種薄膜。一般而言，聚對苯二甲酸乙二酯、聚-2,6 -萘二甲 酸乙二酯、二醋酸纖維素、三醋酸纖維素、醋酸丙酸纖維 素、聚氯乙烯、聚氯亞乙烯、聚碳酸酯、聚醯亞胺、聚醯 胺等之習知的各種塑膠薄膜、紙、將聚乙烯、聚丙烯、乙 烯丁烯共聚物等之炭原子數爲2〜10之聚烯烴塗布或者 層積於紙上而得的各種積層紙、鋁、銅、錫等之金屬箔等， 在帶狀基材之表面上形成預備之加工層者或將這些層積而 成的各種複合材料都包含在內。 以上’雖已說明了本發明之滾筒的軸承構造的較佳實 施形態’但本發明並非侷限於上述實施形態，能夠採用各 種型態。 例如，在上述各實施形態中，作爲支撐旋轉軸2 2的第 1軸承部’雖採用了在高振動阻尼性、高旋轉精度、高負 -20- 200907189 何谷重寺方面都有可靠度的油壓式靜壓軸承26，但並非侷 限於此，能夠使用各種軸承。另外，從外部侵入之振動等 的千擾少的時候’能採用高精度的滾珠軸承方式和滾子軸 承方式等。另外’滾筒的重量小等等所需之負荷容量小且 力矩之影響小的時候，也能採用利用空氣壓的空氣壓軸承 方式、利用磁力的磁性軸承方式等。 在上述各實施形態中，將具有本發明之軸承構造的軸 承構件24配置在滾筒14兩端，但並非侷限於此，也可以 僅配置在一方。在此情況下，也能獲得與上述相同的效果。 另外，在本實施形態中，在使用押出型之塗布頭的塗 布裝置中，雖說明了支撐捲繞有薄膜之加壓滾筒的軸承構 造，但並非侷限於此，例如，也能使用將由滾筒所汲起的 塗布液轉印至薄膜上的棒桿塗布裝置之塗布棒桿。 [實施例] 以下，雖說明本發明的實施例，但本發明並非侷限於 這些實施例。 測出改變滾筒1 4之有效面長時的撓曲量。 在材質爲SCM，外徑120mm的滾筒14中，在1000〜 4000mm的範圍中改變滚筒14之寬度方向的有效面長。滾 筒1 4之撓曲量係藉由雷射變位計’來測定滾筒有效面兩端 部和中央部之共計3點。於第5圖表示此結果。 如第5圖所示’能明瞭到當滾筒1 4的有效面長超過 3 0 0 0 m m時，撓曲量會成比例地增加’相對於此，當滾筒 -21 - 200907189 14的有效面長低於3000mm時’撓曲量爲50 以下而變 得較小。 另外，從調準性的觀點來探討滑動軸承部內座圈2 8之 較佳尺寸以及形狀。 內座圏28之外周面28a、28b的曲率半徑R設爲100mm 時，改變內座圈28之兩個相互面對的外周面28c、28d之 間的寬度B，藉以評估B/R比對於調準性的影響。軸承調 準性係藉由目視觀察而進行’由以下的基準來評估。 ◎…調準性極高 ◦…調準性高 △…調準性稍低’但實用上沒問題的程度 X…調準性低 於表1表示此結果。 [表 1]__ 曲率半徑R(mm) 寬度B(mm) B/R比 調準性的評估 試驗1 100 100 1 Δ 試驗2 200 2 ◎ 試驗3 300 3 ◎ 試驗4 400 4 〇 試驗5 500 5 Δ 綜上所述，可瞭解到將滑動軸承部內座圈2 8之γ方向 的平面間的寬度B與Z方向之曲率半徑R的比（B/R比）設 爲1〜5時，就能穩定地維持高調準性。 -22- 200907189 【圖式簡單說明】 第1圖係（A)部分、（B)部分分別表示具備本發明之塗布 滾筒之軸承構造的塗布裝置的主要部分以及軸承構件之構 成構件的立體圖。 第2圖係說明第1圖之軸承構件的內部構成之放大截 面圖。 第3圖係說明滾筒在重力方向上撓曲之狀態的說明 圖。 第4A圖係說明第1圖之塗布裝置的動作之說明圖。 第4B圖係說明第1圖之塗布裝置的動作之其他說明 圖。 第5圖係表示本實施例之結果的圖表圖。 第6圖係從具備以往的球面型外殼之軸承構件上方觀 看的水平截面圖。 【主要元件符號說明】 10 塗布裝置 12 薄膜 14 滾筒 16 塗布頭 22 旋轉軸 24 軸承構件 26 油壓式靜壓軸承 27 滑動軸承 -23- 200907189 28 滑 動 軸 承 部 內 座 圈 28a、 28b 滑 動 軸 承 部 內 座 圈 之 外 周 面 (Z 方 向 ) 28c、 28d 滑 動 軸 承 部 內 座 圈 之 外 周 面 (Y 方 向 ) 30 滑 動 軸 承 部 外 座 圈 30a、 30b 滑 動 軸 承 部 外 座 圈 之 內 周 面 (Z 方 向 ) 30c、 30d 滑 動 軸 承 部 外 座 圈 之 內 周 面 (Y 方 向 ) 36 靜 壓 穴 袋 38 大 氣 壓 解 放 溝 56 濕 度 計 58 潤 滑 油 溫 度 控 制 機 構 60 止 推 軸 承 -24-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bearing structure and a coating apparatus for a coating drum, and more particularly to a bearing structure of a coating drum of a coating apparatus for uniformly forming a wide coating surface. [Prior Art] Conventionally, various methods have been proposed for coating a drum device (for example, Patent Document 1). These coating roller devices are coated with a coating liquid while guiding a film having a small width. However, as the functional film (for example, an optical compensation film, an antireflection film, etc.) used for a liquid crystal display or the like has a large area, the film width also becomes large, and a wide coating roller device is required. However, in the case of a wide coating roller device, the deflection of the shaft is increased by the weight of the coating roller (hereinafter simply referred to as "roller"), because the moment for the bearing portion is increased, and the roller is generated during the rotation. The shaft is shaking. In addition, the load of the drum, which is increased as the drum is lengthened, increases with respect to the load of the bearing portion. As a result, there is a problem that the rotation accuracy of the drum is remarkably lowered and the thickness of the coating film applied on the film becomes uneven. In contrast, for example, in Patent Document 2, a bearing (roller bearing) with an automatic alignment mechanism is used as a mechanism for rotating the drum. Then, in order to compensate for the low rotation accuracy of the bearing with the automatic alignment mechanism, the outer race for the gas bearing is fixed to the inside of the drum, and a support shaft for the gas bearing is provided inside the outer race for the gas bearing. Thereby, the torque unevenness accompanying the rotation of the drum 200907189 is suppressed. Further, in Patent Document 3, a bearing structure in which a drum is fixed to an inner bearing of an angular bearing, and an outer race of the angular bearing is fixed to the inner peripheral surface, and the outer peripheral surface is formed into a spherical outer casing is proposed. . With this bearing construction, the rotation of the drum is freely movable regardless of the direction of gravity or the horizontal direction. In addition, the clearance of the angular bearing in the axial direction also disappears, so that high rotation accuracy can be achieved. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. 2006-349100. In the methods of Patent Documents 2 and 3, since the rolling bearing is used, the bearing structure is likely to be a source of vibration, and external vibration is easily transmitted. Therefore, there is a problem that the dynamic characteristics of the bearing are low, and disturbances such as vibration are easily transmitted to the film. Further, the above Patent Document 3 using a spherical outer casing also has the following problems. (1) The gap between the drum and the coating head may vary. Specifically, Fig. 6 is a top view of the conventional bearing member 2 when the drum 5 is attached. As shown in the same figure, the bearing member 2 is also aligned in the conveying direction of the film 3. In other words, since the outer peripheral surface of the inner race 4 constituting the spherical outer casing is spherical in the conveying direction of the film 3, it is inclined as shown by the arrow in the direction of the film transport 200907189 (γ direction). Therefore, when an external force in the horizontal direction (for example, a tension in the film transport direction) is applied to the drum 5, the gap between the drum 5 and the coating head 6 greatly fluctuates, and it becomes difficult to form a coated surface having a uniform thickness. (2) When the roller is aligned with the spherical outer casing, the point contact on the structure increases, so the dynamic characteristics of the bearing portion decrease and vibration occurs. When this vibration is transmitted to the drum, there is a fear that the coating performance of the film is lowered. (3) The spherical surface of the spherical outer casing has low processing precision and high cost. Further, in order to produce a highly functional thin layer coating for the production of a functional film, the drum is required to have the following high-precision rotation. The present invention has been made in view of the above circumstances. Therefore, it is an object of the present invention to provide a bearing structure of a coating drum which does not change the rotational axis of the coating drum even if the coating drum is flexed or has a direction of gravity applied to the coating drum. Able to achieve high rotation accuracy. [Means for Solving the Problems] In the first aspect of the present invention, in order to achieve the above object, a bearing structure for a coating drum is provided, characterized in that the first bearing portion is provided to support a rotation shaft of the coating drum so as to be rotatable And the second bearing portion that supports the first bearing portion and allows the tilting movement of the first bearing portion so as to follow the deflection of the gravity direction of the coating drum. According to the first aspect, the second bearing portion is provided which allows the tilting movement of the first bearing portion so as to follow the deflection of the gravity direction of the coating drum. Thereby, even if the coating drum is deflected, the rolling of the cylinder shaft 200907189 does not occur, or the load of the bearing is increased, and the fixed rotating shaft center is formed in a deflected state and rotated. Further, even if an external force other than the gravity direction is applied to the coating drum, the rotation axis of the coating drum does not change. Thereby, high rotation accuracy can be achieved. The first bearing portion is not particularly limited, but a hydraulic hydrostatic bearing or the like is preferably used. In addition, when there is little disturbance from vibration such as external intrusion, high-precision ball bearing method and roller bearing method can be used. Further, when the weight of the drum is small and the influence on the load or the moment of the bearing is small, an air pressure bearing method using air pressure or a magnetic bearing method using magnetic force can be used. According to a second aspect of the present invention, in the first aspect, the second bearing portion is a sliding bearing including: a sliding bearing portion inner race provided on an outer circumference of the first bearing portion, and an inner circumference The first bearing portion is supported on the surface, and the outer race of the sliding bearing portion is provided on the outer circumference of the inner race of the sliding bearing portion, and the outer circumferential surface of the inner race is slidably supported. The third aspect of the present invention is characterized in that, in the second type, the inner seat of the sliding bearing portion is formed into a partial cylindrical shape, and in the partial cylindrical shape, one of the upper and lower facing faces is along the outer peripheral surface. An arc-shaped convex curved surface is formed in the axial direction of the coating drum, and one of the right and left opposing faces is formed in a plane in the axial direction, and the outer ring of the sliding bearing portion has a space of a partial cylindrical shape. In the portion of the cylindrical shape, one of the upper and lower opposing inner circumferential surfaces forms an arcuate concave shape which is in contact with the outer peripheral surface of the inner race of the sliding bearing portion along the direction of the shaft 200907189 of the coating drum. In the curved surface, a pair of right and left opposing inner circumferential surfaces are formed on a plane that is in contact with the outer peripheral surface of the inner circumference of the sliding bearing portion. According to the third type, the inner race of the sliding bearing portion constituting the second bearing portion and the outer race of the sliding bearing portion are centered on the axial direction of the coating drum, and the side surfaces facing each other are formed into a flat surface. 2 The tilting movement of the bearing portion in the left and right direction. Further, since the two outer peripheral faces of the upper and lower sides of the seat portion of the sliding bearing portion are formed into an arcuate convex curved surface, the tilting movement of the coating drum in the axial direction can be allowed. In this way, since the degree of freedom necessary for the alignment can be ensured and the point contact portion can be reduced more than the conventional bearing, the alignment can be adjusted while the dynamic characteristics of the bearing are improved. In addition, since the precision of the curved surface machining is higher than that of the conventional spherical plain bearing, even if the inner race of the sliding bearing portion and the outer race of the sliding bearing portion have a large diameter, the alignment processing can be performed accurately. . Therefore, the accuracy can be improved and the cost can be reduced. According to a fourth aspect of the present invention, in the third mode, the radius of curvature R of the arcuate convex curved surface is 0.8 to 2 times the inner diameter d of the inner race of the sliding bearing portion. In the inner race of the sliding bearing portion, when the radius of curvature of the arc-shaped convex curved surface is too small, the rigidity necessary for structurally supporting the coating drum is lowered, and when the radius of curvature is too large, sufficient alignment cannot be obtained. 'The two 200907189 conditions are not good. According to the fourth type, the radius of curvature of the arc-shaped convex curved surface is set to be 0.8 to 2 times (about 40 to 500 mm) of the inner diameter d (about 50 to 25 mm) of the inner race of the sliding bearing portion. Therefore, it is possible to suppress the poor situation as described above. The fifth aspect of the present invention is characterized in that, in the third or fourth type, wherein the width B between the planes of the right and left opposite sides and the aforementioned radius of curvature R are in the outer circumferential surface of the inner race of the sliding bearing portion It is 1 to 5 than the B/R system. According to the fifth type, even if the force other than the direction of gravity acts on the inner race of the sliding bearing portion, the position of the inner race of the sliding bearing portion is stable with respect to the outer race of the sliding bearing portion, and the inner race of the sliding bearing portion is not caused. The dynamic characteristics are degraded, and high alignment can be achieved. That is, when the B/R ratio is lower than 1, the dynamic characteristics of the inner race of the sliding bearing portion are likely to be lowered. When the ratio is more than 5, the weight of the inner race of the sliding bearing portion is increased, and it becomes difficult to smoothly adjust the adjustment. quasi. Therefore, it is preferable that the B / R ratio is about 1 to 5. A sixth aspect of the present invention is characterized in that, in any one of the first to fifth types, the pair of first bearing portions are hydraulic pressure type hydrostatic bearings. According to the sixth type, as the bearing method for supporting the coating drum, since the hydraulic static bearing method exhibiting high vibration damping property, high rotation accuracy, high load capacity, etc., the static characteristics and the dynamic characteristics can be improved. . Further, in the second bearing portion that supports the long-type coating drum, it is possible to prevent the occurrence of a fearful engagement (contact) between the outer peripheral surface of the rotating shaft and the inner peripheral surface of the first bearing portion. The seventh aspect of the present invention is characterized in that, in the sixth mode, there is: -10-200907189 measuring means for measuring the temperature of the lubricating oil of the hydraulic pressure hydrostatic bearing; and temperature control means ' The result of the measuring means is to control the lubricating oil to a predetermined temperature. When it is necessary to support a coating drum having a large width and a weight, high bearing rigidity is required. Therefore, the oil supply pressure of the hydraulic hydrostatic bearing becomes high, and the lubricating oil becomes easy to generate heat. Even if the temperature of the lubricating oil fluctuates within ±10 °C, it will affect the performance of the bearing. Therefore, the temperature control of the lubricating oil becomes important. By the seventh type 'because the temperature of the lubricating oil is monitored', the lubricating oil is controlled at a predetermined temperature', so that the performance of the bearing can be stably maintained. An eighth aspect of the invention is characterized in that, in any one of the first to seventh types, the effective surface length of the coating drum is 3 mm or less. Such a coating drum having a large width causes an increase in the shaft rubbing due to its own weight. In the eighth type, since the effective surface length of the coating roll is set to be less than 300 mm, the amount of the coating drum can be set to be less than or equal to 50 Å. In order to achieve the above object, a ninth aspect of the present invention provides a bearing structure of a coating drum which is characterized in that a pair of both sides of the rotating shaft of the coating drum are supported and the rotating shaft is supported as a freely rotatable pair. At least one of the bearing members has a bearing structure as described in any one of the first to the eighth type. According to a tenth aspect of the present invention, in the ninth aspect, the one of the pair of bearing members has the bearing structure according to any one of the first to eighth types, and The bearing supports the first bearing portion of one of the pair of bearing members -11-200907189. When the coating drum is simply supported by the journal type hydrostatic bearing, the movement of the rotating shaft in the thrust direction becomes free. Therefore, as a bearing mechanism for restricting the movement of the coating drum in the thrust direction, there is a method of supporting the thrust direction at both end portions of the coating drum. However, when the lubricating oil generates heat and causes thermal expansion in the axial direction of the coating drum, there is no excess space in the axial direction, so there is a tendency to be deformed by the compression load. By the tenth type, since the thrust bearing is provided only on one side of the coating drum, the above-described poor condition can be suppressed. An eleventh aspect of the present invention provides, in order to achieve the above object, a coating apparatus which is an extrusion type coating apparatus and which is between a coating head and a belt-shaped film which is wound in a coating drum and travels in a horizontal direction. A coating liquid bridge is formed in the gap, and a coating liquid discharged from the coating head is coated on the film, and the coating device is characterized in that the rotating shaft of the coating drum is supported as a freely rotatable pair of bearing members. At least one of the bearing structures described in any one of the first to eighth types is provided. In the coating apparatus, in the coating apparatus, the rotation axis of the coating drum in the film conveying direction does not change. Therefore, a uniform gap can be formed between the coating drum on which the film is wound and the coating head, and the coating liquid can be uniformly applied. Further, as the coating drum, a pressure roller is also included. [Effects of the Invention] According to the present invention, even if the coating drum is deflected or an external force other than the direction of gravity is applied to the coating drum, the rotation axis of the coating drum does not fluctuate, and -12-200907189 can achieve high rotation accuracy. [Embodiment] Hereinafter, a preferred embodiment of a bearing structure and a coating apparatus of a coating roller according to the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is a perspective view showing a schematic configuration of a coating device having a bearing structure of a coating drum of the present invention. The part (A) is a view showing a main part of the coating device, and the part (B) is a view showing a constituent member of the bearing member. As shown in Fig. 1, the apparatus for applying a coating liquid to a continuous film is mainly composed of a pressure roller 14 (hereinafter simply referred to as "roller 1 4") around which a film 12 is wound, and is disposed to be opposed to each other. The drum 14 is provided with an extrusion head 16 having a predetermined gap. Hereinafter, the axial direction of the drum 14 is the X direction 'the left and right direction centered on the axial direction of the drum 14 (the direction orthogonal to the axial direction or the film transport direction) is the Y direction 'above the downward direction (gravity The direction is the Z direction, and both include the positive (P1 us) side and the minus (minus) side. Inside the extrusion-type coating head 16, a pocket 18 is formed in the width direction of the film 12. The pocket 18 is communicated with the slit opening 20a of the front end (lip) of the coating head 16 via the slit 20. The slit opening portion 20a is formed in an elongated shape in the width direction of the film 12, and its width dimension is formed to be substantially equal to the width dimension of the film 12. Then, the coating liquid supplied from the coating liquid (not shown) and supplied to the pockets 8 via the supply path 17 is discharged from the slit opening 20a via the slit 20. Then, a coating liquid bridge -13 - 200907189 is joined to the gap between the front end of the coating head 16 and the continuously traveling film 12 to transfer the coating liquid onto the film 12. Further, the coating head 16 is supported by a support member (not shown). The width of the drum 14 is largely formed to the extent that the film 12 can be wound, and the rotating shafts 2 at both ends are rotatably supported by the bearing member 24 having the bearing structure of the present invention. The drum 14 used in the present invention is, for example, the drum 14 having a weight of about 400 kg and a large width, so that it is easily deflected in the direction of gravity by its own weight. When this deflection occurs, the gap distribution between the coating head 16 and the drum 14 is uneven. Therefore, in order to uniformly maintain the gap distribution between the coating head 16 and the drum 14, it is necessary to adjust the shape of the drum 14 which is configured to flexibly bend the front end of the coating head 16. The amount of error that occurs during this adjustment is affected by the amount of deflection of the drum 14. Specifically, about 10% of the amount of deflection of the drum 14 is present as an adjustment error of the gap. Since the distribution accuracy of the gap between the coating head 16 and the drum 14 is required to be 5 // m or less, it is preferable to set the deflection amount of the drum 14 to 50 μm or less as the effective surface of the drum 14. The length L is preferably set to be less than 3 000 mm. However, even if the above adjustment is performed, the film 12 is wound around the drum 14 and conveyed in the horizontal direction. Therefore, the tension of the film 12 applied to the drum 14 and the external vibration transmitted to the conveyance direction of the drum 14 are caused. The gap between the coating head 16 and the drum 14 may vary. Therefore, the film thickness of the coating layer and the film thickness distribution in the film width direction become uneven. Therefore, it is necessary to stably support the drum 14 (alignment) while avoiding shaft sway (rotation of the shaft -14-200907189) while the shaft of the drum 14 is flexed. Therefore, in the present invention, the bearing member 24 is configured to be aligned in the film transport direction (Y direction), and is aligned only in the axial direction (X direction) of the drum 14. The bearing member 24 which is a characteristic part of the present invention will be described below. In the bearing member 24, a hydraulic-type hydrostatic bearing 26 (first bearing portion) that rotatably supports the rotating shaft 22 is disposed on the outer circumference of the rotating shaft 22 of the drum 14, and is further disposed on the outer circumference thereof. The sliding bearing 27 (second bearing portion) 'supports the hydraulic hydrostatic bearing 26 and performs alignment of the drum 14. The sliding bearing 27 is composed of a sliding bearing inner race 28 and a sliding bearing outer race 30. In the sliding bearing portion inner race 28, as shown in part (B) of Fig. 1, the two outer peripheral faces 28a and 28b' of the slide bearing inner race 28 facing in the Z direction (vertical direction) are in the X direction. The arc-shaped convex curved surface is formed, and the two outer peripheral surfaces 2 8 c and 28 d opposed in the γ direction (the horizontal direction centered on the axial direction) are formed into a partial cylindrical shape constituting a plane. A sliding bearing portion outer race 30 that supports the slide bearing inner race 28 is disposed on the outer circumference of the inner race 28 of the sliding bearing portion, and is formed to accommodate the slide bearing inner race 28. In other words, the two inner circumferential surfaces 30a and 30b of the outer race 30 which are opposed in the Z direction (up and down direction) are formed in an arcuate concave curved surface in the X direction in the Y direction (centered in the axial direction). In the horizontal direction, the two inner peripheral surfaces 3 0 c and 30 d that face each other form a plane (see FIG. 4 to be described later). Thereby, the inner race 28 of the sliding bearing portion only moves obliquely in the X direction, but does not tilt in the Y direction. Therefore, the hydraulic -15-200907189 pressure bearing 26 that supports the rotating shaft 22 can be set to allow only the tilting movement in the X direction without tilting in the Y direction. In the case of the outer peripheral surface 28a, 28b of the inner race 28 of the sliding bearing portion, when the radius of curvature R is too small, the rigidity necessary for structurally supporting the drum 14 is lowered, and when the radius of curvature R is too large, the alignment is decline. Therefore, the radius of curvature R of the outer circumferential surfaces 28a and 28b of the inner side of the sliding bearing portion 28 is preferably 0_8 to 2 times (about 40 to 500 mm) of the inner diameter d (about 50 to 250 mm) of the inner race 28 of the sliding bearing portion. The ratio of the width B to the radius of curvature R between the two outer peripheral surfaces 28c and 28d opposed to each other in the Y direction (the horizontal direction centered on the axial direction) among the outer peripheral surfaces of the inner side of the sliding bearing portion 28 (hereinafter, When it is less than 1, the dynamic characteristics of the inner race 28 of the sliding bearing portion are liable to lower. When it exceeds 5, the weight of the inner seat of the sliding bearing portion is increased, and the smoothness is not smooth. Adjust. Therefore, it is preferable to set the B/R ratio to 1 to 5. Fig. 2 is an enlarged cross-sectional view showing the internal structure of a bearing member 24 having the bearing structure of the present invention. Further, 'the same figure shows the bearing member 24 provided with the side of the thrust bearing. As shown in Fig. 2, on the inner circumferential surface of the inner race 28 of the sliding bearing portion, the outer peripheral member 32 of the hydraulic hydrostatic bearing 26 that rotatably supports the rotary shaft 22 is fixed, and the inner peripheral member 32 is fixed to the sliding bearing portion. The race 28 is integrated and moves. Further, on the inner circumferential surface of the inner race 28 of the sliding bearing portion, an oil supply groove 34 for supplying lubricating oil is provided in the circumferential direction. Between the inner wall surface of the hydrostatic hydrostatic bearing 26 and the rotating shaft 22, a static pressure pocket 36 and an atmospheric pressure pocket 38 are formed along the circumferential direction and the axial direction of the-16-200907189, and these static pressure pockets 36 and atmospheric pressure The liberation ditch 38 is communicated by the metal bearing member 40, and the bearing metal member 40 is formed with a fine flow path that can pass the lubricating oil between the outer peripheral surface of the rotating shaft and the rotating shaft. The large pressure liberation groove 38 is sealed by the sealing member 42. Further, an oil supply port 44 is formed on the surface of the outer peripheral member 32 facing the supply groove 34, and the oil supply port and the static pressure pocket 36 are communicated through the oil supply hole 46 formed in a fine flow path shape. The static pressure pockets 38, 38 communicate with the oil discharge holes 4 8 formed along the axial direction in the lower portion of the gravity direction, and the oil discharge holes 4 8 communicate with the oil discharge ports 50. Thereby, the lubricating oil is supplied from the oil supply groove 34, the oil supply port 44, and the oil supply hole 46 formed in the circumferential direction to the static pressure pocket 36 and the shaft metal member 40 (the fine flow path in the circumferential direction) And the atmospheric pressure liberation ditch 38. Then, the lubricating oil circulating in the static pressure pockets 36 and the atmospheric pressure liberation ditch 38 is concentrated on the oil drain holes 48 and discharged to the outside through the oil discharge ports 50. The lubricating oil supply source 52 that stores and supplies the lubricating oil is connected to the oil supply groove 34 and the oil discharge port 50 by the pipes 54a and 54b, respectively, and a lubricating oil circulation path 54 is formed. On the way of the lubricating oil circulation path 504, a hygrometer 56 for setting the temperature of the lubricating oil and a lubricating oil temperature control unit 58 are provided. In the aspect of the hygrometer 56, it is possible to constantly monitor the temperature of the lubricating oil. Further, the lubricating oil temperature control means 5.8 uses a temperature-controlled machine of air-cooling or water-cooled cold coal type to control the temperature of the lubricating oil to a predetermined degree. Thereby, based on the temperature measurement result of the lubricating oil of the hygrometer 56, the lubrication temperature control means 58 controls the temperature of the lubricating oil to a predetermined temperature. The shaft 22 gas oil 44 passes through the bearing and is measured by the road. The temperature is -17-200907189. Inside the hydraulic hydrostatic bearing 26, next to the atmospheric pressure liberation ditch 38 on the opposite side of the drum 14 A flange-shaped thrust bearing 60 is provided. The thrust bearing 60 is rotatably rotated together with the drum 14 in a state of being fixed to the drum 14, and is formed on the side surface portion in the circumferential direction between the fixing members 62 fixed by the screws 64 between the outer peripheral members 32. A fine flow path in which the oil can be lubricated. Then, the lubricating oil flowing out from the atmospheric pressure liberation groove 38 is restricted from moving in the axial direction of the drum cymbal 4 by passing and lubricating the above-described fine flow path. On the drum 14 side of the hydraulic hydrostatic bearing 26, a friction seal portion 66 is provided as needed. Further, the thrust bearing 60 described above is preferably provided only in one of the pair of bearing members 24. That is, when the lubricating oil has heated, thermal expansion occurs in the axial direction of the drum 14, and the longer the drum, the larger the amount of expansion. When the thrust direction is supported at both end portions of the drum 14, since there is no excess space in the axial direction, there is a possibility that the compression load is deformed. Therefore, among the pair of bearing members 24 supporting the drum 14, the thrust bearing 60 is provided in only one of them, thereby suppressing the above-described poor condition. Next, the operation of the present invention will be described with reference to Fig. 3, Fig. 4A, and Fig. 4B. Fig. 3 is an explanatory view showing a state in which the drum is deflected in the direction of gravity, and Figs. 4A and 4B are explanatory views for explaining the operation of the bearing member 24. Here, Fig. 4A is a view showing the action of the coating device 1' from the front side, that is, a cross-sectional view of the bearing member 24 in the direction of gravity. Further, Fig. 4B is a view showing the action of the coating device 1 from above, that is, a cross-sectional view of the bearing member 24 in the horizontal direction. -18 - 200907189 First, the lubricating oil supply source 52 is operated from the oil supply groove 34. The lubricating oil is supplied to the static pressure pocket 36 and the atmospheric pressure liberation groove 38 in the hydraulic hydrostatic bearing 26, and is discharged through the oil discharge hole 48 and the oil discharge port 50, and circulated to the lubricating oil supply source 52. . The oil temperature and oil pressure at this time are set to appropriate enthalpy depending on the design conditions of the weight of the drum, the rotational speed, and the necessary rigidity. Then, the drum 14 is rotated. When the drum 14 is rotated, as shown in Fig. 3, the drum 14 is deflected in the direction of gravity due to its own weight, and the rotating shaft center 14A (dashed line) is swayed horizontally. At this time, as shown in Fig. 4A, in the bearing member 24, the inner race 28 of the sliding bearing portion is tilted in the X direction (refer to the arrow) as the drum 14 is flexed. Therefore, even if the coating drum is deflected, the drum does not sway or increase the load of the bearing during the rotation, and the fixed rotating shaft is formed in a deflected state and rotated. Further, when the situation at this time is viewed from above, as shown in Fig. 4B, in the bearing member 24, 'because in the Y direction, the outer peripheral surface 28b of the sliding bearing inner race 28 and the outer race 30 The inner peripheral surface 30c, and the outer peripheral surface 28d of the inner ring 28 of the sliding bearing portion and the inner peripheral surface 30d of the outer race 30 of the sliding bearing portion are in contact with each other on the plane, so that the inner seat 圏28 of the sliding bearing portion does not It is tilted in the Y direction and is stably fixed. That is, even if the drum 14 is deflected, the inner race 28 of the sliding bearing portion can be tilted in the X direction so as not to tilt in the γ direction in a manner of following the deflection. Therefore, the rotation axis 1 4 A (dashed line) -19-200907189 of the drum 14 does not change, and the drum 14 can be rotatably supported with high rotation accuracy. Further, the gap distribution of the coating head 16 and the drum 14 can be made uniform. As described above, according to the present embodiment, it is possible to suppress the shaft from swaying in the direction in which the film is conveyed, and to achieve high rotation accuracy. In addition, compared with the conventional spherical plain bearing, the partial cylindrical sliding bearing of the present invention has high precision in machining a curved surface, so that even if the inner race of the sliding bearing portion and the outer race of the sliding bearing portion have a large diameter, accuracy can be achieved. The alignment processing of both is performed well. Therefore, the accuracy can be improved and the cost can be reduced. Further, as the film 1 2 used in the present invention, various conventional films can be used. In general, polyethylene terephthalate, polyethylene-2,6-naphthalenedicarboxylate, cellulose diacetate, cellulose triacetate, cellulose acetate propionate, polyvinyl chloride, polyvinyl chloride Polyethylene film, paper, polyethylene, polypropylene, ethylene butylene copolymer, etc., which are coated with a polyolefin having a carbon number of 2 to 10 or Various laminated papers laminated on paper, metal foils such as aluminum, copper, tin, etc., or a composite layer formed on the surface of the belt-shaped substrate, or various composite materials obtained by laminating these Inside. The above has described the preferred embodiment of the bearing structure of the drum of the present invention. However, the present invention is not limited to the above embodiment, and various types can be employed. For example, in each of the above-described embodiments, the first bearing portion ′ that supports the rotating shaft 22 has reliability in terms of high vibration damping resistance, high rotation accuracy, and high negative -20-200907189 Heguzhongsi. The hydraulic hydrostatic bearing 26 is not limited thereto, and various bearings can be used. In addition, when there is little disturbance such as vibration from the outside, the high-precision ball bearing method and the roller bearing method can be used. Further, when the weight of the drum is small and the required load capacity is small and the influence of the moment is small, an air pressure bearing method using air pressure or a magnetic bearing method using magnetic force can be used. In each of the above embodiments, the bearing member 24 having the bearing structure of the present invention is disposed at both ends of the drum 14, but the invention is not limited thereto, and may be disposed only on one side. In this case as well, the same effects as described above can be obtained. Further, in the present embodiment, in the coating apparatus using the extrusion type coating head, the bearing structure supporting the pressure roller on which the film is wound is described. However, the present invention is not limited thereto. For example, it is also possible to use the roller. The lifted coating liquid is transferred to the coating rod of the rod coating device on the film. [Examples] Hereinafter, examples of the invention will be described, but the invention is not limited to the examples. The amount of deflection when changing the effective face length of the drum 14 was measured. In the drum 14 having a material of SCM and an outer diameter of 120 mm, the effective surface length in the width direction of the drum 14 is changed in the range of 1000 to 4000 mm. The amount of deflection of the drum 14 is determined by the laser displacement gauge' to determine a total of three points at both ends and the central portion of the effective surface of the drum. This result is shown in Figure 5. As shown in Fig. 5, it can be understood that when the effective face length of the drum 14 exceeds 30,000 mm, the amount of deflection increases proportionally. In contrast, when the effective face length of the drum-21 - 200907189 14 When it is less than 3000 mm, the amount of deflection is less than 50 and becomes smaller. Further, the preferred size and shape of the inner race 28 of the sliding bearing portion are discussed from the viewpoint of the alignment. When the radius of curvature R of the outer peripheral faces 28a, 28b of the inner seat 28 is set to 100 mm, the width B between the two mutually facing outer peripheral faces 28c, 28d of the inner race 28 is changed, thereby evaluating the B/R ratio. The impact of quasi-sex. Bearing alignment is performed by visual observation and is evaluated by the following criteria. ◎...The alignment is extremely high ◦...The alignment is high △...The alignment is slightly lower ‘But the degree of practically no problem X...The alignment is low. Table 1 shows the result. [Table 1]__ Curvature radius R (mm) Width B (mm) Evaluation of B/R ratio alignment test 1 100 100 1 Δ Test 2 200 2 ◎ Test 3 300 3 ◎ Test 4 400 4 〇 Test 5 500 5 Δ In summary, it can be understood that when the ratio (B/R ratio) of the width B between the planes in the γ direction of the inner race of the sliding bearing portion 28 to the radius of curvature R in the Z direction is 1 to 5, Maintain high standards of stability. -22-200907189 [Brief Description of the Drawings] Fig. 1 is a perspective view showing a main portion of a coating device having a bearing structure of a coating drum of the present invention and a constituent member of a bearing member, respectively. Fig. 2 is an enlarged cross-sectional view showing the internal structure of the bearing member of Fig. 1. Fig. 3 is an explanatory view showing a state in which the drum is deflected in the direction of gravity. Fig. 4A is an explanatory view for explaining the operation of the coating device of Fig. 1. Fig. 4B is a view for explaining another operation of the coating apparatus of Fig. 1. Fig. 5 is a graph showing the results of the present embodiment. Fig. 6 is a horizontal sectional view seen from above a bearing member having a conventional spherical outer casing. [Description of main components] 10 Coating device 12 Film 14 Roller 16 Coating head 22 Rotary shaft 24 Bearing member 26 Hydraulic hydrostatic bearing 27 Sliding bearing -23- 200907189 28 Sliding bearing inner race 28a, 28b Sliding bearing inner race Outer circumferential surface (Z direction) 28c, 28d Sliding bearing inner race outer peripheral surface (Y direction) 30 Sliding bearing outer race 30a, 30b Sliding bearing outer race inner peripheral surface (Z direction) 30c, 30d Sliding Inner peripheral surface of the outer race of the bearing part (Y direction) 36 Static pressure pocket 38 Atmospheric liberation ditch 56 Hygrometer 58 Lubricating oil temperature control mechanism 60 Thrust bearing-24-