200902431 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種氣泡式微幫浦及其氣泡產生裝 置’且特W是有關於-種間接產生氣泡之氣泡式微幫浦及 其氣泡產生裝置。 【先前技術】 目前’微機電領域所採用之微幫浦大致上區分為兩大 類：第一類幫浦是利用機械推動之方式達成，例如氣泡式 幫浦（bubble pump )' 薄膜式繁浦（membrane pump )、擴 散式幫浦（diffuser pump)等。第二類幫浦則是利用感應 電％去驅動液體’例如電滲式幫浦（electr〇_〇smotic pump )、電泳式幫浦（eiectr〇phoretic pump )與電濕式幫 浦（electro-wetting pump)等。 然而’前述之第一類幫浦必須在微流道系統中架構複 雜之機械元件’這些機械元件之尺寸必須非常微細才可滿 足要求’於技術上產生許多限制。另外，第二類幫浦需要 由複雜之電信號控制，且必須在微流道系統中裝設感測器 以偵測流體之特性，亦具有許多與製程技術相關之限制。 在所有微幫浦中，電解氣泡式微幫浦具有低耗能、低 驅動電壓、常溫操作環境等優點，其最適合在微流道系統 中發展。但是此類型之微幫浦都是在微流道中直接電解液 體以產生氣泡，不僅會造成液體之酸鹼值改變，況且於通 電到微幫浦之電極時，電極會產生電場影響流體之驅動。 200902431 另外，目前電解氣泡式微幫浦仍無法有效排除其所產生之 電解氣泡。 【發明内容】 本發明係有關於一種氣泡式微幫浦及其間接式氣泡 產生裝置，係於氣泡式微幫浦中利用間接產生之氣泡生滅 以驅動液體流動，並可解決因電解氣泡導致液體產生酸解 值之問題。 本發明提出一種間接式氣泡產生裝置，此裝置包括一 基板與一氣泡產生單元。基板具有一流道、至少一排氣通 道、一進氣通道與一氣泡出口，其中排氣通道連接流道前 段，進氣通道連接流道後段，氣泡出口則位於流道末端。 進氣通道係引入氣體填充於部分之流道後段。氣泡產生單 元設置於流道前段。當氣泡產生單元於流道前段之液體中 產生一第一氣泡時，流道後段上之液體係被推向流道末 端，流道後段中之氣體會被液體推向氣泡出口以產生一第 二氣泡。 本發明再提出一種氣泡式微幫浦，其包括一主部件與 一驅動部。主部件具有一主流道與一側向排氣通道，此側 向排氣通道連接主流道。主流道之一第一區域具有一第一 表面，主流道之一第二區域則具有一第二表面，其中第一 區域與第二區域係鄰近侧向排氣通道，且第一表面之親疏 水性係不同於第二表面之親疏水性。驅動部包括一間接式 氣泡產生裝置，此間接式氣泡產生裝置之一流道係連接於 200902431 前述之主流道，且間接式氣泡產生裝置係於第一區域與第 二區域中產生氣泡。當氣泡由侧向排氣通道開始散失時， 由於第一表面之親疏水性與第二表面之親疏水性之差 異，使第一區域之液體回填速度不等於第二區域之液體回 填速度，藉此以驅動液體流動。 為讓本發明之上述内容能更明顯易懂，下文特舉較佳 實施例，並配合所附圖式，作詳細說明如下： 【實施方式】 請參照第1圖，其繪示依照本發明一較佳實施例的氣 泡式微幫浦之爆炸圖。如第1圖所示，氣泡式微幫浦1包 括一基板100與一蓋板110，氣泡式微幫浦1於基板100 上設有一主部件120與一驅動部。主部件120具有一主流 道122與一側向排氣通道124，此側向排氣通道124連接 主流道122。主流道122之一第一區域（未標示於第1圖） 具有一第一表面122A，主流道122之一第二區域（未標 示於第1圖）則具有一第二表面122B，其中第一區域與第 二區域係鄰近側向排氣通道124，且第一表面122A之親 疏水性係不同於第二表面122B之親疏水性。驅動部包括 一間接式氣泡產生裝置130,此間接式氣泡產生裝置130 之一流道132係連接於主部件120之主流道122。間接式 氣泡產生裝置130係於第一區域與第二區域中產生氣泡。 當氣泡由側向排氣通道124開始散失時，由於第一表面 122A之親疏水性與第二表面122B之親疏水性之差異，使 8 200902431 第一區域之液體回填速度不等於第二區域之液體回填速 度，藉此以驅動液體流動。 氣泡式微幫浦1之蓋板110係設置於基板100上。蓋 板110較佳為透明材料製成。藉此於氣泡式微幫浦1運作 時，可清楚觀察基板100上液體流動狀態。蓋板110之材 質例如是高乙烯基含量梦橡膠（Polydimethylsioxane， PDMS)或玻璃等。另外，本實施例之蓋板110並具有一 第一流入孔112、第二流入孔114與一流出孔116,以供液 體流入與流出基板100，但本發明並不以此為限定。 基板100上之第一表面122 A之親疏水性以及第二表 面122B之親疏水性可以藉由至少二種方式達成。其一， 係使第一表面122A為具一第一粗糖因子01之粗糙表面， 並使第二表面122B為具一第二粗縫因子02之粗糙表面。 根據發表在電氣與電子工程師學會期刊（IEEE，pp 694-697, 30 Jan〜3 Feb 2005, Ashutosh Shastry” etc)之論文「用以 操控微流系統中的液滴之工程表面粗梭度」（engineering surface roughness to manipulate droplets in micro-fluidic systems)其論點：表面之粗糙度調整可改變液滴與此表面 之親疏程度，以控制微流系統中之液滴流動。因此，第一 表面122A之第一粗糙因子01與第二表面1223之第二粗 糙因子02之大小係與液體及第一表面122A與第二表面 122B之接觸面積相關。如此一來，本實施例可藉由在平面 上製造出許多微型矽柱體以改變此平面之表面粗縫度，其 中’粗繞因子0之定義為「石夕柱體之表面積（與液滴接觸 200902431 ，欵使 之面積）與平面總面積之比」Q當平面之表面粗鍵片改、 後’液滴與平面之接觸角與毛細作用力將隨之改變 秦 液滴於平面上之可動性改變 粗糙表面之粗糙因子係與液體之接觸角相關。也 之粗糖因子越大時，液面之接觸角越小。而液面 角尋 f. v.+ 係影響其毛細作用力之大小，進而影響在氣泡散失時、 回填之速度，其中，毛細作用力越大，液體回填之迷文體 快。於大氣壓力下，毛細作用力與接觸角約成反比，=越 §液面之接觸角越小（粗糖因子越大），毛細作用力 而 液體之回填速度越快。 ， 其二，第一表面122A之親疏水性係為主部件i2〇 該第一表面122A上設有一疏水材料形成，而第二♦於 122B之親疏水性係為於第二表面122B設有一親水柯 成。親水材料與疏水材料對於液滴之作用力不相同"％ 中，疏水材料對於液滴之毛細作用力大於親水材料對其 滴之毛細作用力，使得疏水、親水材料之作用非常類似= 前述之表面粗造度之概念，因此親水材料與疏水材料之設 。十亦可作為控制微流糸統中液滴流動之方式。 在本實施例中，於主流道122第一區域之第一表面 lf2A係由一疏水材料製成，於第二區域之第二表面 係由親水材料製成。疏水材料與親水材料係可於主流道 122製作完成後再形成於主流道122上。或者，第一表面 122Α上之疏水材料與第二表面122Β上之親水材料可與主 道122之製程一併完成。 200902431 如前所述，由於第一表面122A之疏水特性以及第二 表面122B之親水特性，使第一區域之液體回填速度大於 第二區域之液體回填速度，以產生圖示中X方向上之液體 淨流量。 較佳地’基板100於側向排氣通道124上亦設有一疏 水材料’防止液體由側向排氣通道124流出基板1〇〇。其 中’疏水材料例如是鐵氟龍，親水材料則例如是玻璃、二 氧化石夕等。基板100更包括一第一液體入α 102、一第二 液體入口 104與一液體出口 1〇6。第一液體入口 1〇2位於 流道132前端’並對應於蓋板11 〇之第一流入孔112設置。 第二液體入口 104係連接於主流道122,並對應於蓋板110 之第二流入孔114設置。液體出口 1〇6亦連接於主流道 122，並對應於蓋板11 〇之流出孔116設置。主流道122 上之第一粗糙表面122Α、第二粗糙表面122Β與侧向排氣 通道124係例如位於主流道122上之中段位置。 ( 如第1圖所示’本實施例之間接式氣泡產生裝置130 包括在基板上設置之流道132、至少一排氣通道134、一 進氣通道136 —氣泡出口 138與一氣泡產生單元140。本 實施例是以多個連接到流道前段132Α之排氣通道134作 說明’排氣通道134用以使基板1〇〇上之氣體排出。進氣 通道136連接到流道後段132Β，進氣通道136係引入氣體 填充於部分之流道後段132Β。氣泡出口 138位於流道132 之末端，並對應於主流道122上之第一區域與第二區域設 置。基板100於排氣通道134、進氣通道136與部分之流 11 200902431 道後段132B上皆設有疏水材料，以防止液體從排氣通道 134、進氣通道136與流道後段132B流出基板100。當然， 疏水材料亦可以是鐵氟龍。流道前段132A之寬度係實質 上不等於流道後段132B之寬度，本實施例係以流道前段 132A之寬度小於流道後段132B之寬度作說明，且連接到 主流道122之部分流道後段132B之寬度係逐漸減縮直到 氣泡出口 138處。 於間接式氣泡產生裝置130之流道132上之液體較佳 是一電解質水溶液或一去離子水溶液。氣泡產生單元140 係設置於流道前段132A並電性連接至一驅動電源（未繪 示）。氣泡產生單元140用以於流道前段132A中電解液體 以產生氣泡。氣泡產生單元140包括至少一電極組，在本 實施例中是電極組包括四個電極142、144、146、148作 說明。每個電極142、144、146、148各別電性連接到驅 動電源，驅動電源係提供電壓到各電極142、144、146、 148，並適時調整驅動之電極位置與電極極性。電極142、 % , 144、I46、148之材質例如是金屬，但較佳係金、鉑等純 態金廣，較不易參與反應。依需求以驅動流道前段132A 上之任二個電極，係可選擇氣泡所要產生之位置與大小。 請參照第2A〜2C圖’其繪示第1圖的氣泡式微幫浦 運作之連續示意圖。如第2A圖所示’當液體L1由蓋板 110 (見第1圖）之第一流入孔112與基板100之第一液 體入口 102進入流道132中’由於部分流道後段132B、排 氣通道134與進氣通道136上設有疏水材料，液體L1係 12 200902431 維持在流道132上’而流道後段132B上設有疏水材料的 部分會填充氣體。液體L2則是經由蓋杈11()之第二流人 孔114與基板100之第二液體入口 102進入主流道122中。 當施加電壓到電極142與148，並使電極142與148 之極性相反時，電極142與148會開始電解液體li以產 生電解氣泡B1，如第2B圖所示。在氣、;包B1逐漸加大之 過程中，流道後段132B上的液體會被推向流道Π2末端， 將流道後段132B上之氣體擠出流道132，於主流道122 之液體L2中產生氣泡B2。當氣泡B2達到一定的大小， 便會經由側向排氣通道124排除。 如第2C圖所示，在氣泡B2從側向排氣通道124排 除的過程中，由於第一區域I與第二·區域II之表面親疏水 性具有差異，使主流道122上左邊之液體受到較大之毛細 作用力，使得液體回填的速度較右邊之液體快，如此便可 使液體L2產生一個向右的淨流量。 當氣泡B1從排氣通道134向外散失而流道前段132A 之液體L1回填時，流道後段132B上之液體係回流至流道 前段132A，此時於流道後段132B中會產生一類似真空吸 力之作用’將外部氣體由進氣通道136導引到流道後段 132B，以再次填充氣體於部分之流道後段132B中。從施 加電壓到電極142、148以產生電解氣泡B1 ’並關閉電極 142、148上之施加電壓，以由排氣通道134將氣泡B1排 除、以及氣泡B2從側向排氣通道124排除與液體回填， 到此係完成一個電解氣泡的生滅適程。 13 200902431 藉由反覆之電解氣泡B1以及間接產生之氣泡B2之 生滅過程，得以產生流體循環而達到連續淨流量之效果。 氣泡式微幫浦1係可藉由不同的驅動電壓與操作頻率，做 精確流速以及流量控制。另外，亦可經由不同的流道截面 積之調整以調控氣泡式微幫浦1之性能。 由於氣泡式微幫浦1係藉由填充於流道後段132B之 外部空氣所構成之氣泡B2生滅以達到驅動液體L2之效 果，其係不受到電解氣泡B1之影響，也就是說，即使液 體L1因電解氣泡而產生酸鹼值變化，液體L1也不會直接 影響到液體L2之酸鹼性質。如此一來，當應用氣泡式微 幫浦1去驅動其他種類之液體時，便無須擔心會因液體之 酸鹼值擾動而影響到後續處理液體之微流道系統（如一生 醫晶片）。 雖然本實施例之基板100在第一區域I (或第一表面 122A，見第1圖）與第二區域11(或第二表面122B，見 第1圖）上分別鋪設有疏水材料與親水材料，但是在其他 實施例中，只要使第一區域I與第二區域II對應的二個表 面具有親疏水特性之差異即可。舉例來說，只要在任一區 域上塗佈一疏水材料或親水材料，或是造成第一區域I與 第二區域II之粗糙因子差異即可。 另外，本實施例之主流道122、流道132、排氣通道 134、側向排氣通道124、進氣通道136等，係藉由一般微 機電製程即可在基板100上製作完成。且由於排氣通道 134、側向排氣通道124、進氣通道136與部分流道132係 14 200902431 設有疏水材料，使液體在被驅動時會保持在流道132與主 流道122内，而僅將氣泡從基板100中排出，有效地解決 了以往無法順利排除氣泡之缺點。 本發明上述實施例所揭露之氣泡式微幫浦及其間接 式氣泡產生裝置，其係將間接產生的氣泡形成於具有親疏 水特性差異之表面上，藉由氣泡排除時之液體回填速度快 慢以產生流體淨流量。氣泡式微幫浦之耗能低、不需要太 大之驅動電壓，且可於常溫環境下驅動，又不會使液體產 生酸鹼值之擾動問題。本發明之氣泡式微幫浦及其間接式 氣泡產生裝置非常適合成為驅動液體之裝置。 綜上所述，雖然本發明已以較佳實施例揭露如上，然 其並非用以限定本發明。本發明所屬技術領域中具有通常 知識者，在不脫離本發明之精神和範圍内，當可作各種之 更動與潤飾。因此，本發明之保護範圍當視後附之申請專 利範圍所界定者為準。 15 200902431 【圖式簡單說明】 第1圖繪示依照本發明一較佳實施例的氣泡式微幫 浦之爆炸圖。 第2A〜2C圖繪示第1圖的氣泡式微幫浦運作之連續 示意圖。 16 200902431 【主要元件符號說明】 1 :氣泡式微幫浦 100 :基板 102 :第一液體入口 104 :第二液體入口 106 :液體出口 110 :蓋板 112 :第一流入孔 114 :第二流入孔 116 :流出孔 120 :主部件 122 :主流道 122A :第一表面 122B :第二表面 124 :側向排氣通道 130 :氣泡產生裝置 132 :流道 132A :流道前段 132B :流道後段 134 :排氣通道 136 :進氣通道 138 :氣泡出口 140 :氣泡產生單元 142、144、146、148 :電極 17200902431 IX. Description of the Invention: [Technical Field] The present invention relates to a bubble type micro-pump and a bubble generating device thereof, and particularly relates to a bubble type micro-pump which indirectly generates bubbles and a bubble generating device thereof . [Prior Art] At present, the micro-pulse used in the micro-electromechanical field is roughly divided into two categories: the first type of pump is achieved by means of mechanical pushing, such as bubble pump's thin film type ( Membrane pump ), diffuser pump, etc. The second type of pump uses the inductive power to drive the liquid 'eg electr〇_〇smotic pump, electrophoretic pump (eiectr〇phoretic pump) and electrowetting pump (electro-wetting) Pump) and so on. However, the aforementioned first type of pump must construct complex mechanical components in the microchannel system. These mechanical components must be very small in size to meet the requirements. There are many technical limitations. In addition, the second type of pump needs to be controlled by complex electrical signals, and sensors must be installed in the micro-channel system to detect the characteristics of the fluid, and there are many limitations related to the process technology. Among all micro-pulls, electrolytic bubble micro-pull has the advantages of low energy consumption, low driving voltage and normal temperature operating environment, and it is most suitable for development in micro-channel systems. However, this type of micro-pump is directly in the micro-flow channel to generate bubbles, which not only causes the pH value of the liquid to change, but also when the electrode is connected to the electrode of the micro-pump, the electrode generates an electric field to affect the driving of the fluid. 200902431 In addition, the current electrolytic bubble micro-pump is still unable to effectively eliminate the electrolytic bubbles generated by it. SUMMARY OF THE INVENTION The present invention relates to a bubble micro-pump and an indirect bubble generating device thereof, which utilizes indirectly generated bubble generation to drive liquid flow in a bubble micro-pump, and can solve the liquid acid generated by the electrolytic bubble. The solution to the problem. The present invention proposes an indirect bubble generating device comprising a substrate and a bubble generating unit. The substrate has a first-class channel, at least one exhaust passage, an intake passage and a bubble outlet, wherein the exhaust passage is connected to the front portion of the flow passage, the intake passage is connected to the rear portion of the flow passage, and the bubble outlet is located at the end of the flow passage. The intake passage is introduced into the rear portion of the flow passage in which the gas is filled. The bubble generating unit is disposed in front of the flow path. When the bubble generating unit generates a first bubble in the liquid in the front stage of the flow path, the liquid system on the rear stage of the flow path is pushed toward the end of the flow path, and the gas in the rear stage of the flow path is pushed by the liquid toward the bubble outlet to generate a second bubble. The present invention further provides a bubble type micro-pump comprising a main part and a driving portion. The main component has a main flow path and a side exhaust passage, and the lateral exhaust passage is connected to the main flow path. One of the main channels has a first surface, and the second region of the main channel has a second surface, wherein the first region and the second region are adjacent to the lateral exhaust passage, and the first surface is hydrophobic It is different from the hydrophilicity of the second surface. The driving portion includes an indirect bubble generating device. One of the indirect bubble generating devices is connected to the main channel of 200902431, and the indirect bubble generating device generates bubbles in the first region and the second region. When the bubble starts to be dissipated from the lateral exhaust passage, the liquid backfilling speed of the first region is not equal to the liquid backfilling speed of the second region due to the difference between the hydrophilicity of the first surface and the hydrophilicity of the second surface. Drive liquid flow. In order to make the above-mentioned contents of the present invention more comprehensible, the following detailed description of the preferred embodiments and the accompanying drawings will be described in detail as follows: [Embodiment] Referring to Figure 1, there is shown a first embodiment of the present invention. The exploded view of the bubble micro-pump of the preferred embodiment. As shown in Fig. 1, the bubble type micro-pump 1 includes a substrate 100 and a cover plate 110. The bubble type micro-pump 1 is provided with a main part 120 and a driving part on the substrate 100. The main component 120 has a main flow passage 122 and a side exhaust passage 124 which is connected to the main flow passage 122. The first area of one of the main channels 122 (not shown in FIG. 1) has a first surface 122A, and the second area of the main channel 122 (not shown in FIG. 1) has a second surface 122B, of which the first The region and the second region are adjacent to the lateral exhaust passage 124, and the hydrophilicity of the first surface 122A is different from the hydrophilicity of the second surface 122B. The driving portion includes an indirect bubble generating device 130, and one of the indirect bubble generating devices 130 is connected to the main flow path 122 of the main member 120. The indirect bubble generating device 130 generates bubbles in the first region and the second region. When the bubble is dissipated by the lateral exhaust passage 124, the liquid backfilling speed of the first region of 8 200902431 is not equal to the liquid backfill of the second region due to the difference between the hydrophilicity of the first surface 122A and the hydrophilicity of the second surface 122B. Speed, thereby driving the liquid to flow. The cover plate 110 of the bubble type micro-pump 1 is disposed on the substrate 100. The cover plate 110 is preferably made of a transparent material. Thereby, when the bubble type micro-pump 1 is operated, the liquid flow state on the substrate 100 can be clearly observed. The material of the cover plate 110 is, for example, a high vinyl content (Polydimethylsioxane, PDMS) or glass. In addition, the cover plate 110 of the embodiment has a first inflow hole 112, a second inflow hole 114 and a first-class outlet hole 116 for the liquid to flow into and out of the substrate 100, but the invention is not limited thereto. The hydrophilicity of the first surface 122 A on the substrate 100 and the hydrophilicity of the second surface 122B can be achieved in at least two ways. First, the first surface 122A is a rough surface having a first coarse sugar factor 01, and the second surface 122B is a rough surface having a second rough slit factor 02. According to the paper published in the Journal of the Institute of Electrical and Electronics Engineers (IEEE, pp 694-697, 30 Jan~3 Feb 2005, Ashutosh Shastry etc), "The rough surface of engineering surfaces used to manipulate droplets in microfluidic systems" ( The argument is that the roughness adjustment of the surface changes the degree of contact of the droplet with this surface to control the flow of droplets in the microfluidic system. Therefore, the magnitude of the first roughness factor 01 of the first surface 122A and the second roughness factor 02 of the second surface 1223 is related to the contact area of the liquid and the first surface 122A and the second surface 122B. In this way, the embodiment can change the surface roughness of the plane by manufacturing a plurality of micro-cylinders on a plane, wherein the 'rough winding factor 0 is defined as the surface area of the stone cylinder (with the droplets) Contact 200902431, the ratio of the area to the total area of the plane" Q When the surface of the plane is thickened, the contact angle between the droplet and the plane and the capillary force will change the movement of the Qin droplet on the plane. The roughness factor that changes the rough surface is related to the contact angle of the liquid. Also, the larger the crude sugar factor, the smaller the contact angle of the liquid surface. The liquid level angle f. v.+ affects the size of the capillary force, which in turn affects the speed of backfilling when the bubble is lost. Among them, the larger the capillary force, the faster the fluid backfilling. At atmospheric pressure, the capillary force is inversely proportional to the contact angle. = The smaller the contact angle of the liquid surface (the larger the crude sugar factor), the faster the capillary force and the liquid backfilling speed. Second, the hydrophilicity of the first surface 122A is the main component i2, the first surface 122A is formed with a hydrophobic material, and the hydrophilicity of the second surface 122B is a hydrophilic surface of the second surface 122B. . The hydrophilic material and the hydrophobic material have different forces for the droplets. In %, the capillary material has a capillary force greater than that of the hydrophilic material, so that the hydrophobic and hydrophilic materials work very similarly. The concept of surface roughness, and therefore the design of hydrophilic materials and hydrophobic materials. Ten can also be used as a means of controlling the flow of droplets in a microfluidic system. In the present embodiment, the first surface lf2A of the first region of the main flow channel 122 is made of a hydrophobic material, and the second surface of the second region is made of a hydrophilic material. The hydrophobic material and the hydrophilic material may be formed on the main channel 122 after the main channel 122 is fabricated. Alternatively, the hydrophobic material on the first surface 122 and the hydrophilic material on the second surface 122 can be completed in conjunction with the process of the main track 122. 200902431 As previously mentioned, due to the hydrophobic nature of the first surface 122A and the hydrophilic nature of the second surface 122B, the liquid backfill velocity of the first region is greater than the liquid backfill velocity of the second region to produce a liquid in the X direction as illustrated. Net flow. Preferably, the substrate 100 is also provided with a hydrophobic material on the lateral exhaust passage 124 to prevent liquid from flowing out of the substrate 1 from the lateral exhaust passage 124. Among them, the hydrophobic material is, for example, Teflon, and the hydrophilic material is, for example, glass, silica, or the like. The substrate 100 further includes a first liquid inlet α 102, a second liquid inlet 104 and a liquid outlet 1〇6. The first liquid inlet 1 〇 2 is located at the front end of the flow path 132 and is disposed corresponding to the first inflow hole 112 of the cover 11 〇. The second liquid inlet 104 is connected to the main flow path 122 and is disposed corresponding to the second inflow hole 114 of the cap plate 110. The liquid outlet 1〇6 is also connected to the main flow path 122 and is provided corresponding to the outflow hole 116 of the cover plate 11〇. The first rough surface 122A, the second rough surface 122A, and the lateral exhaust passage 124 on the main flow path 122 are, for example, located at a mid-stage position on the main flow path 122. (As shown in FIG. 1 , the in-line bubble generating device 130 of the present embodiment includes a flow path 132 provided on the substrate, at least one exhaust passage 134 , an intake passage 136 - a bubble outlet 138 and a bubble generating unit 140 The present embodiment is illustrated by a plurality of exhaust passages 134 connected to the front section 132 of the flow passage. The exhaust passage 134 is for exhausting the gas on the substrate 1. The intake passage 136 is connected to the rear section 132 of the flow passage. The gas passage 136 is introduced with a gas filling portion of the flow passage rear portion 132. The bubble outlet 138 is located at the end of the flow passage 132 and is disposed corresponding to the first region and the second region on the main flow passage 122. The substrate 100 is disposed at the exhaust passage 134, The intake passage 136 and the partial flow 11 200902431 are provided with a hydrophobic material on the rear section 132B to prevent liquid from flowing out of the substrate 100 from the exhaust passage 134, the intake passage 136 and the downstream passage 132B. Of course, the hydrophobic material may also be iron. The width of the front section 132A of the flow path is substantially not equal to the width of the rear section 132B of the flow path. In this embodiment, the width of the front section 132A of the flow path is smaller than the width of the rear section 132B of the flow path, and is connected to the main channel. The width of the portion of the flow path rear section 132B is gradually reduced until the bubble outlet 138. The liquid on the flow path 132 of the indirect bubble generating device 130 is preferably an aqueous electrolyte solution or a deionized aqueous solution. The flow channel front portion 132A is electrically connected to a driving power source (not shown). The bubble generating unit 140 is used for the electrolyte body in the flow channel front portion 132A to generate bubbles. The bubble generating unit 140 includes at least one electrode group. In the example, the electrode group includes four electrodes 142, 144, 146, and 148. Each of the electrodes 142, 144, 146, and 148 is electrically connected to a driving power source, and the driving power source supplies a voltage to each of the electrodes 142 and 144. 146, 148, and adjust the position of the electrode and the polarity of the electrode in a timely manner. The materials of the electrodes 142, %, 144, I46, and 148 are, for example, metals, but are preferably pure gold such as gold or platinum, and are less likely to participate in the reaction. It is required to drive any two electrodes on the front section 132A of the flow path, and the position and size of the bubble to be generated can be selected. Please refer to the figure 2A~2C', which shows the bubble type micro-transport of the first figure. A continuous schematic view. As shown in Fig. 2A, when the liquid L1 is introduced into the flow path 132 by the first inflow hole 112 of the cover plate 110 (see Fig. 1) and the first liquid inlet 102 of the substrate 100, due to the rear portion of the partial flow path 132B, the exhaust passage 134 and the intake passage 136 are provided with a hydrophobic material, the liquid L1 system 12 200902431 is maintained on the flow passage 132' and the portion of the flow passage rear section 132B provided with the hydrophobic material is filled with gas. The liquid L2 is via The second flow hole 114 of the cover 11 () and the second liquid inlet 102 of the substrate 100 enter the main flow path 122. When a voltage is applied to the electrodes 142 and 148 and the polarities of the electrodes 142 and 148 are reversed, the electrodes 142 and 148 start the electrolyte body li to produce the electrolytic bubble B1 as shown in Fig. 2B. During the process of gradually increasing the package B1, the liquid on the rear section 132B of the flow path is pushed toward the end of the flow channel 2, and the gas on the rear section 132B of the flow path is extruded out of the flow path 132, and the liquid L2 in the main flow path 122. Bubble B2 is produced in the middle. When the bubble B2 reaches a certain size, it is excluded via the lateral exhaust passage 124. As shown in FIG. 2C, in the process in which the bubble B2 is excluded from the lateral exhaust passage 124, since the surface hydrophobicity of the first region I and the second region II is different, the liquid on the left side of the main flow channel 122 is subjected to comparison. The large capillary force makes the liquid backfill faster than the right liquid, so that the liquid L2 produces a net flow to the right. When the bubble B1 is dissipated outward from the exhaust passage 134 and the liquid L1 of the front portion 132A of the flow path is backfilled, the liquid system on the rear portion 132B of the flow path is returned to the front portion 132A of the flow path, at which time a similar vacuum is generated in the rear portion 132B of the flow path. The effect of suction 'directs external air from intake passage 136 to flow passage rear section 132B to refill the gas in a portion of flow passage rear section 132B. From applying a voltage to the electrodes 142, 148 to create an electrolytic bubble B1 'and closing the applied voltage on the electrodes 142, 148 to exclude the bubble B1 from the exhaust passage 134 and to exclude the bubble B2 from the lateral exhaust passage 124 with the liquid backfill At this point, the system completes the process of killing and burning an electrolytic bubble. 13 200902431 By the process of reversing the electrolytic bubble B1 and the indirectly generated bubble B2, fluid circulation is achieved to achieve a continuous net flow. The bubble micro-pull 1 system can be used for precise flow rate and flow control with different drive voltages and operating frequencies. In addition, the performance of the bubble micro-pump 1 can also be adjusted by adjusting the cross-sectional area of the flow channel. Since the bubble type micro-pump 1 is killed by the bubble B2 formed by the outside air filled in the rear section 132B of the flow path to achieve the effect of driving the liquid L2, it is not affected by the electrolytic bubble B1, that is, even if the liquid L1 is Electrolytic bubbles produce a change in pH, and liquid L1 does not directly affect the acidity and alkalinity of liquid L2. In this way, when the bubble micro-pump 1 is used to drive other kinds of liquids, there is no need to worry about the micro-channel system (such as a biomedical wafer) that affects the subsequent treatment liquid due to the pH value of the liquid. Although the substrate 100 of the present embodiment is provided with a hydrophobic material and a hydrophilic material on the first region I (or the first surface 122A, see FIG. 1) and the second region 11 (or the second surface 122B, see FIG. 1), respectively. However, in other embodiments, the two surfaces corresponding to the first region I and the second region II may have a difference in hydrophilic and hydrophobic properties. For example, it is only necessary to apply a hydrophobic material or a hydrophilic material to any of the regions, or to cause a difference in the roughness factor between the first region I and the second region II. In addition, the main channel 122, the flow channel 132, the exhaust channel 134, the lateral exhaust channel 124, the inlet channel 136, and the like of the present embodiment can be fabricated on the substrate 100 by a general MEMS process. And because the exhaust passage 134, the lateral exhaust passage 124, the intake passage 136 and the partial flow passage 132 system 14 200902431 are provided with a hydrophobic material, the liquid is retained in the flow passage 132 and the main flow passage 122 when being driven, and Only the air bubbles are discharged from the substrate 100, which effectively solves the drawback that the air bubbles cannot be smoothly removed in the past. The bubble micro-pump and the indirect bubble generating device disclosed in the above embodiments of the present invention form an indirectly generated bubble on a surface having a difference in hydrophilic and hydrophobic properties, and the liquid backfilling speed is eliminated when the bubble is removed to generate Net flow of fluid. The bubble type micro-pump has low energy consumption, does not require too much driving voltage, and can be driven under normal temperature conditions without causing liquid to cause a problem of pH fluctuation. The bubble micro-pump of the present invention and its indirect bubble generating device are very suitable as devices for driving liquids. In the above, the present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. 15 200902431 [Simple Description of the Drawings] Fig. 1 is a view showing an exploded view of a bubble type micro-pitch according to a preferred embodiment of the present invention. 2A to 2C are views showing a continuous schematic diagram of the operation of the bubble micro-pump in Fig. 1. 16 200902431 [Explanation of main component symbols] 1 : Bubble micro-pump 100 : Substrate 102 : First liquid inlet 104 : Second liquid inlet 106 : Liquid outlet 110 : Cover 112 : First inflow hole 114 : Second inflow hole 116 : Outflow hole 120 : Main part 122 : Main flow path 122A : First surface 122B : Second surface 124 : Lateral exhaust passage 130 : Bubble generating device 132 : Flow path 132A : Flow path front section 132B : Flow path rear section 134 : Row Air passage 136: intake passage 138: bubble outlet 140: bubble generation unit 142, 144, 146, 148: electrode 17