200847853 九、發明說明 【發明所屬之技術領域】 本發明是關於在搬送帶電之製品等之際，進行除電的 除電搬送裝置及搬送時之除電方法。 【先前技術】 液晶面板或電漿顯示器、半導體基板等之電子裝置雖 然是製造於無塵室內，但一旦於電子裝置帶有靜電，便會 產生構成電子裝置之絕緣體被電氣性破壞，或是微粒子附 著在構成電子裝置之電路而使其短路所造成的靜電危害之 風險。因此，在電子裝置之製造製程，已知有使用軟X射 線式除電器或放電式靜電消除器（ionizer)等之除電器， 來將產生於電子裝置之靜電除電的技術（例如，參照專利 文獻1。）。 又，在將經過製造製程之電子裝置收納於匣體，又於 下一個製程加以移送之搬送製程，亦進行產生於電子裝置 之靜電的除電。例如，如圖1 0、1 1所示，於製造設備100 的出口側設有移載室110，且在該移載室110的天井側配 設有流出清淨空氣的風扇120。此外，於風扇120所致之 氣流的上游側設有放電式靜電消除器130，而在下游側配 設有搬送機器人140。然後，在藉由放電式靜電消除器 130產生空氣離子的狀態下，藉由搬送機器人140從製造 設備1 〇〇側支托玻璃基板（電子裝置）Μ，並將玻璃基板 Μ移送至匣體150側而收納於匣體150。在該移送中，產 -4 - 200847853 生於玻璃基板Μ的靜電是由空氣離子所中和而除電。 [專利文獻1]特開2006-221998號公報 【發明內容】 [發明所欲解決之問題] 然而，當在玻璃基板Μ的帶電面附近，空氣離子 之厚度，也就是除電空間厚度爲某程度厚時（例如 cm以上時），利用除電器之除電效果（除電速度） 大地取決於帶電面附近的離子濃度和電場強度。亦即 子濃度越高，電場強度越強，則可得到的除電效果越 對此，在如上述之搬送製程的除電方法，存在於玻璃 Μ之周邊的接地構件，是由接地導體所構成的移載室 之天井或壁及匣體150。然後，由於移載室110之天 玻璃基板Μ的距離D1很大（例如2 m以上），故帶 附近的電場強度很弱，而無法得到高除電效果。又， 製造設備1 〇〇側支托玻璃基板Μ之際，或將玻璃基 收納於匣體1 5 0之際，玻璃基板Μ和壁的距離D2或 基板Μ和匣體1 50的距離D3變窄，但由於時間非常 故難以充分地將玻璃基板Μ除電。此外，相對於玻璃 Μ的帶電面（水平面），移載室11〇的壁面位於垂 向，匣體1 5 0位於橫方向（同一水平面上），而並未 向。因此，即使使玻璃基板Μ長時間接近移載室1 1 0 或匣體150，仍無法橫跨玻璃基板Μ的帶電面之全面 均一且強的電場，而難以有效地將帶電面的全面除電 存在 ，10 會大 ，離 商。 基板 110 井和 電面 在從 板Μ 玻璃 短， 基板 直方 相對 之壁 形成 -5- 200847853 圖1 2表示當以如上述之除電方法加以除電時（變化 曲線L 1 )，和不進行除電時（變化曲線L2 )之玻璃基板 Μ的電位變化之一例。圖中符號P1顯示在製造設備1〇〇 中玻璃基板Μ被抬起之前的時間點’符號Ρ2顯不已被ί口 起之時間點，符號Ρ3顯示搬送中，符號Ρ4顯示將玻璃基 板Μ收納於匣體1 5 0之時間點（搬送機器人1 4 0放開玻璃 基板Μ的時間點）。如該圖所示，可知藉由如上述之除電 _ 方法，玻璃基板Μ的除電會需要長時間，並且不能完全地 9 除電，而無法有效（有效率地）除電。該結果是，一旦除 電尙未充足便將玻璃基板Μ移出等，則靜電危害之風險會 提高。另一方面，爲了進行充分的除電，一旦大量設置除 電器，則會導致設備成本的增加，而一旦延長除電時間， 則會導致生產性的下降。 因此，本發明之目的爲提供能夠有效地將帶電體除電 而加以搬送的除電搬送裝置及搬送時之除電方法。 [用以解決問題之手段] 爲了達成上述目的，申請專利範圍第1項所記載之發 * 明是具備支托帶電之帶電體而加以搬送的搬送機器人、和 * 藉由空氣離子將於前述帶電體所帶之電氣中和而加以除電 的除電器之除電搬送裝置，其特徵爲：在支托前述帶電體 的前述搬送機器人之支托部，於支托前述帶電體之際，以 相隔預定距離而與前述帶電體對向的方式，配設被控制爲 預定電位的導電構件’且以前述空氣離子至少位於（被形 -6 - 200847853 成、供給於）前述帶電體和前述導電構件之 設前述除電器。 若由搬送機器人的支托部來支托帶電體 會和帶電體相隔預定距離而對向，且藉由除 子位於帶電體和導電構件之間。 申請專利範圍第2項所記載之發明，是 第1項所記載之除電搬送裝置，其特徵爲： 和前述帶電體的距離被設定爲1〜20 cm。 申請專利範圍第3項所記載之發明，是 第1項所記載之除電搬送裝置，其特徵爲： 的電位被設定爲接地電位。 申請專利範圍第4項所記載之發明，是 第1項所記載之除電搬送裝置，其特徵爲： 述帶電體的面，全面均等地對向的方式，形 導電構件。 申請專利範圍第5項所記載之發明，是 第1項所記載之除電搬送裝置，其特徵爲： 送機器人之支托部的方式，配設前述除電器 申請專利範圍第6項所記載之發明，是 人搬送帶電之帶電體之際，將前述帶電體除 除電方法，其特徵爲：在支托前述帶電體的 人之支托部，於支托前述帶電體之際，以相 與前述帶電體對向的方式，配設被控制爲預 構件，使前述空氣離子至少位於前述帶電體 間的方式，配 ，則導電構件 電器使空氣離 申請專利範圍 前述導電構件 申請專利範圍 前述導電構件 申請專利範圍 以和面對之前 成、配設前述 申請專利範圍 以追隨前述搬 〇 在以搬送機器 電的搬送時之 前述搬送機窃: 隔預定距離而 定電位的導電 和前述導電構 -7- 200847853 件之間而加以除電。 [發明之效果] 根據申請專利範圍第1項及第6項所記載之發明’在 帶電體由搬送機器人的支托部所支托的狀態下，帶電體和 導電構件會相隔預定距離而對向，且空氣離子會位於其 間。因此，在帶電體由搬送機器人所支托的狀態下，可在 帶電體和導電構件之間（帶電體的周邊）形成強且穩定之 電場，而在這種良好的電場下有效且穩定地進行利用空氣 離子之除電。該結果是能夠有效地將帶電體除電而加以搬 送。 根據申請專利範圍第2項所記載之發明，由於導電構 件和帶電體之距離被設定爲1〜20 cm，故能夠形成更強 且穩定之電場來有效地將帶電體除電。 根據申請專利範圍第3項所記載之發明，由於導電構 件的電位被設定爲接地電位，故舉例來說，藉由透過接地 之搬送機器人將導電構件接地，能夠容易且穩定地控制導 電構件的電位。 根據申請專利範圍第4項所記載之發明，由於是以和 對向之帶電體的全面均等地對向的方式來形成、配設導電 構件，故可在帶電體的全面周邊形成均等且穩定之電場， 而能夠均等且有效地將帶電體的全面除電。 根據申請專利範圍第5項所記載之發明，由於是以追 隨搬送機器人之支托部的方式配設除電器，故可使空氣離 -8- 200847853 子恆良好且穩定地位於帶電體和導電構件之間’而 效地將帶電體除電。此外，藉由在帶電體的搬送 (形成、供給）空氣離子來加以除電’能夠同時進 和除電。換言之，能夠省時地搬送、除電。 【實施方式】 以下將根據圖式之實施形態來說明本發明。 (實施形態1 ) 圖1是顯示與本實施形態有關的除電搬送裝置 略結構圖。該除電搬送裝置1是將由製造設備100 的平面板顯示器基板’也就是玻璃基板（帶電體： 電，同時移送（搬送）至匣體1 5 〇側而收納於匣體 裝置，且以具備搬送機器人2和軟X射線照射器 器）3爲主。在此，對和上述圖1 〇、1 1所說明之結 ^ 的結構，付與同樣的符號來加以說明。又，移載室 設於經溫度調整的無塵室內’而來自風扇過濾單元 清靜空氣是以垂直流的方式被供給’並經過未圖示 ' 腔（return chamber )或回流管（return duct )使其: ' 搬送機器人2是支托帶電之玻璃基板Μ而加以 機器人，被設置在移載室110內之製造設備100的 和匣體1 5 0之間，且在本實施形態是被接地、固 面。該搬送機器人2具備：位於最下方的基部21、 部2 1之上方的第一環22、位於第一環22之上方的 能夠有 中設置 行搬送 1之槪 所製造 )Μ除 150的 (除電 構同等 1 1 0是 120的 之回流 盾環。 搬送的 出口側 定於底 位於基 第二環 -9 - 200847853 23、和位於最上方的兩個手臂（支托部）24。第一環22 是相對於基部21而自由轉動（以垂直軸爲中心旋轉）、 擺動（以水平軸爲中心擺動），第二環23變成相對於第 一環22而自由擺動。兩個手臂24是如圖2、3所示，被 以平板棒狀平行地配設，且相對於第二環23而自由擺 動，並被控制成由兩個手臂24所形成的面，也就是包含 兩個手臂24的平面恆位於水平。因此，在製造設備100 的出口側以手臂24支托被抬起的玻璃基板Μ，在將玻璃 基板Μ的板面維持爲水平的狀態下，可將其移送至匣體 150側而收納於匣體150。 在手臂24配設有導電性的金屬網板（導電構件）4。 該金屬網板4爲金屬網狀之平板，且被配設成和由兩個手 臂24所形成的面平行，而貫穿兩個手臂24。又，金屬網 板4的板面之大小（面積）被設定成和玻璃基板Μ同尺 寸，且在以手臂24支托玻璃基板Μ的狀態下，被配設成 和面對之玻璃基板Μ的板面全面對向。此外，在各手臂 24的上面側，沿著長邊方向形成兩個向上方突出的支托凸 部24a，並將支托凸部24a的高度設定成，在支托（載 置）玻璃基板Μ的狀態下，玻璃基板Μ和金屬網板4的 距離（縫隙）Η爲3 cm。因此，在支托玻璃基板Μ的狀 態下，金屬網板4變成與玻璃基板Μ的板面全面對向，且 其間隔全面均等。換言之，金屬網板4是與玻璃基板Μ的 板面全面均等地對向。 在此，玻璃基板Μ和金屬網板4的距離Η雖然被設 -10- 200847853 定爲3 cm，但這是考慮除電效果及玻璃基板Μ之收納性 的結果。亦即，是匣體1 5 0內之可容許作爲玻璃基板Μ的 收納間隔之距離，且認爲後述軟X射線照射器3所致之空 氣離子形成在玻璃基板Μ和金屬網板4之縫隙全體的距離 以1〜4 cm爲恰當，而在本實施形態設定爲3 cm。以此 方式，在該實施形態，距離Η雖然是被設定爲3 cm，但 若令距離Η爲1〜20 cm，便確認可得到良好的除電效 果，故考慮玻璃基板Μ的大小或收納間隔等，將距離Η 設定於該範圍即可。 又，金屬網板4的電位被設定（控制）爲接地電位。 換言之，金屬網板4是經由搬送機器人2而接地。以此方 式，在本實施形態，雖然是令金屬網板4的電位爲接地電 位，但亦可將其控制爲接地電位以外的電位，例如，和玻 璃基扳Μ的電位同等程度之電位。換言之，亦可如下述， 以在玻璃基板Μ的周邊形成強而穩定之電場的方式，控制 金屬網板4的電位。 軟X射線照射器3是藉由空氣離子將於玻璃基板Μ 所帶之靜電除電的除電器。亦即，在本實施形態，藉由在 空氣中照射波長0 · 5〜2 Α的軟X射線，使空氣中的分子 游離而產生空氣離子。然後，和玻璃基板Μ所帶之靜電的 極性相反極性的空氣離子會和靜電結合，而將靜電中和、 除電。該軟X射線照射器3是配設在搬送機器人2的第二 環23之上端部，而追隨搬送機器人2的手臂24。換言 之，伴隨著環22、23的轉動、擺動所致之手臂24、的移 -11 - 200847853 動，軟X射線照射器3亦會隨著環22、23移動，故手臂 24和軟X射線照射器3的相對位置關係變成恆固定。 此外’軟X射線照射器3是被配設成，將軟X射線 照射至由手臂24所支托之玻璃基板μ的上面及下面之全 面周邊。換言之，軟X射線照射器3是被配設成，使空氣 離子形成在（位於）玻璃基板Μ的上面側及玻璃基板Μ 和金屬網板4之間。藉由以此方式配設軟X射線照射器 3，在手臂24的移動中，也就是玻璃基板μ的搬送中，可 恆良好且穩定地在玻璃基板Μ的上下面周邊形成空氣離 子。在此，最好以軟X射線照射器3的照射中心軸位於玻 璃基板Μ的下面和金屬網板4之間的方式來配設軟X射 線照射器3。藉此，可橫跨除電效果最高的玻璃基板μ和 金屬網板4之間的全空間，更均等地形成空氣離子。 接著，說明此種結構之除電搬送裝置1的動作及依據 除電搬送裝置1的搬送時之除電方法。在此，說明從支托 玻璃基板Μ之前起，使軟X射線照射器3作動而持續照 射軟X射線的情形（情況1 )，和在支托玻璃基板Μ之 後，使軟X射線照射器3動作而持續照射軟X射線的情 形（情況2 )。又，假設玻璃基板Μ是由製造設備1 〇〇內 的製造製程（前製程）所處理，並藉由搬送滾子1 0 1搬送 至製造設備1〇〇的出口側，而藉由頂銷102所抬起之物。 在情況1，首先，在軟X射線照射器3作動中的狀態 下，由搬送機器人2的手臂24支托被抬起的玻璃基板 Μ。接著，環22、23驅動，在將玻璃基板μ的板面維持 -12- 200847853 爲水平的狀態下，將玻璃基板Μ移送至匣體1 5 0側。接下 來，將玻璃基板Μ收納於匣體1 5 0，使手臂2 4與玻璃基 板Μ脫離。另一方面，在該移送中，藉由軟X射線照射 器3所形成之空氣離子，將玻璃基板μ所帶之靜電中和而 除電。 在情況2，首先，以搬送機器人2的手臂24支托被抬 起的玻璃基板Μ，緊接著使軟X射線照射器3作動。之 後，和情況1同樣地，將玻璃基板Μ移送至匣體1 5 0側而 收納於匣體1 5 0。然後，在軟X射線照射器3作動後，藉 由軟X射線照射器3將玻璃基板Μ除電。 如以上，根據該除電搬送裝置1及除電方法，在由手 臂24支托玻璃基板Μ的狀態下，被設定爲接地電位的金 屬網板4和玻璃基板Μ面對，而在其間形成空氣離子。因 此，在玻璃基板Μ和金屬網板4之間（在玻璃基板Μ的 周邊）會形成強且穩定之電場，而可在這種良好的電場下 有效且穩定地進行利用空氣離子之除電。而且，由於金屬 網板4均等地對向玻璃基板Μ的板面全面，故可在玻璃基 板Μ的全面周邊形成均等且穩定之電場，而能夠均等且有 效地將玻璃基板Μ的全面除電。 此外，如上述，由於在玻璃基板Μ的搬送中，可恆良 好且穩定地在玻璃基板Μ的上下面周邊形成空氣離子，故 能夠恆有效地將玻璃基板Μ除電。又，藉由以上述方式於 搬送中進行除電，同時進行搬送與除電，能夠省時地搬 送、除電。然後，該等結果是能夠有效、有效率地將經過 -13- 200847853 製造製程的玻璃基板Μ除電而加以搬送。 圖4表示當以該除電搬送裝置1除電時之玻璃基板 的電位變化之一例’且圖中曲線L 3表示情況1時，曲 L 4表示情況2時，而曲線L 2表示未進行除電時。又， 號Ρ1表示玻璃基板Μ被抬起之前的時間點，符號ρ 2 示被抬起的時間點，符號Ρ3表示搬送中，符號Ρ4表示 玻璃基板Μ收納於匣體150的時間點（手臂24脫離玻 基板Μ的時間點）。 如該圖所示，在情況1及情況2任一者時，與習知 電方法（圖12的曲線L1 )相比，皆認爲可明顯有效地 玻璃基板Μ除電。亦即，在情況1 (曲線l 3 )時，玻 基板Μ的最高電位爲0.2〜0.3 kV左右，從支托起可在 2秒完全除電。又，在情況2 (曲線L4 )時，玻璃基板 的最高電位爲1 kV左右，從支托起可在約3秒完全 電。又，在手臂24脫離玻璃基板μ之P4時，在手臂 和玻璃基板Μ的接觸部（手持墊（hand pad ))之間會 生新的帶電，而無法以習知除電方法將該帶電除電。 此，確認情況1及情況2皆亦可將這樣的帶電完全除電 (實施形態2) 圖5是顯示與本實施形態有關的除電搬送裝置1 1 槪略結構圖。在本實施形態，軟X射線照射器3的配設 置與實施形態1相異，對與實施形態1同等的結構則付 同一符號來加以說明。 Μ 線 符 表 將 璃 除 將 璃 約 Μ 除 24 產 對 之 位 與 -14- 200847853 軟X射線照射器3是設置、固定在製造設備1 〇 〇的出 口側和搬送機器人2之間。亦即，在製造設備1 〇〇的出口 側和搬送機器人2之間設置垂直延伸的設置桿5，並在該 設置桿5的上端部，以照射口朝向上方的方式安裝軟X射 線照射器3。又，在以搬送機器人2的手臂24將玻璃基板 Μ搬入（移送）至移載室1 1 〇內的狀態下，如圖6所示， 將軟X射線照射器3的設置高度及位置設定成可將來自軟 X射線照射器3的軟X射線照射至玻璃基板Μ和金屬網 板4的全面周邊。藉由這種軟X射線照射器3之設置，對 玻璃基板Μ的板面從下方垂直地照射軟X射線，並經由 金屬網板4的網眼，將軟X射線照射至玻璃基板Μ和金 屬網板4之間，而形成空氣離子。 接著，說明此種結構之除電搬送裝置1 1的動作及依 據除電搬送裝置11的搬送時之除電方法。首先，在軟X 射線照射器3作動中的狀態下，以搬送機器人2的手臂24 支托玻璃基板Μ，將玻璃基板Μ移送至軟X射線照射器3 的正上方爲止。然後，藉由將該位置狀態保持一定時間來 將玻璃基板Μ除電，之後，將玻璃基板Μ移送至匣體150 側而收納於匣體150。 根據該除電搬送裝置11及除電方法，由於在以手臂 24支托玻璃基板Μ的狀態下，金屬網板4和玻璃基板Μ 對向，故和實施形態1同樣地，能夠均等且有效地將玻璃 基板Μ的全面除電。又，由於對玻璃基板Μ (金屬網板 4 )的板面垂直照射軟X射線，故可橫跨玻璃基板Μ的全 -15- 200847853 面周邊，更均等地照射軟χ射線，而可更均等地形成空氣 離子。該結果是，即使當玻璃基板Μ的板面積很大時，仍 能夠橫跨全面而均等且有效地除電。 圖7表示當以該除電搬送裝置11除電時的玻璃基板 Μ之電位的變化曲線L5之一例。如該圖所示，可以看 出·因爲直到玻璃基板Μ位於軟X射線照射器3的正上 方爲止並未進行除電，故玻璃基板Μ的電位很高，但自位 於軟X射線照射器3的正上方之後，電位便會急遽下降， 而可在短時間被除電。 以上雖說明本發明的實施形態，但具體之結構並不限 於上述之實施形態，而在不脫離本發明之要旨的範圍之設 計的變更等，亦包含於本發明中。例如，在實施形態1， 雖然是在玻璃基板Μ的上面側及玻璃基板Μ和金屬網板4 之間照射軟X射線來形成空氣離子，但亦可將形成於其他 空間的空氣離子供給至玻璃基板Μ的上面側及玻璃基板Μ 和金屬網板4之間。此外，在上述之實施形態，雖然是使 用軟X射線照射器3來作爲除電器，但亦可爲電暈放電式 之靜電消除器等其他的除電器。 又’亦可使搬送機器人2的手臂24爲滑動式。亦 即，如圖8、圖9所示，由第一臂241和第二臂242構成 手臂24，將第一臂241配設於第二環23，並將第二臂242 配設成相對於第一臂241而自由滑動。又，金屬網板4配 設於第一臂2 4 1。然後，在支托玻璃基板Μ而加以移送至 匣體150側期間，令第二臂242爲重疊於第一臂241之狀 -16- 200847853 態。另一方面，在將玻璃基板M收納於匣體1 5 0之際，使 第二臂242滑動至前方，而僅使第二臂242和玻璃基板Μ 位於匣體1 5 0內。藉由此，就算是以可橫跨玻璃基板Μ的 全面周邊而更均等地照射軟X射線的方式，而將玻璃基板 Μ和金屬網板4的距離保持爲較廣，亦由於第一臂24 1不 位於匣體1 50內，故能夠將玻璃基板Μ的收納間隔抑制在 容許範圍。換言之，在確保高除電效果上，能夠縮小玻璃 基板Μ的收納間隔。 此外，雖然是藉由將玻璃基板Μ載置於搬送機器人2 的手臂24來支托玻璃基板Μ，但亦可利用吸引等來支托 玻璃基板Μ，而使玻璃基板Μ位於手臂24的下方。此 時，於實施形態2，亦可將軟X射線照射器3設置於手臂 24的上方，使得軟X射線隨著風扇過濾單元120所致之 氣流而朝向玻璃基板Μ。又，搬送機器人2亦可爲可行走 之物，當然也可適用於玻璃基板Μ以外的電子裝置（帶電 體），例如半導體基板等之除電、搬送。此外，導電構件 不限於金屬網板4，亦可對應於帶電體的形狀、除電器的 種類等，爲以棒體所構成之物、於平板形成有複數個穿孔 之物、或是具有平板狀、凹凸的變形板狀之物等。另外， 當頂銷102和金屬網板4干擾時，亦可在製造設備100側 支托抬起玻璃基板Μ的端緣等，以不干擾之方式分開金屬 網板4。金屬網板4的大小最好大槪和玻璃基板Μ同程 度，但就算稍微小一點，機能上性能也不會有多大的下 降。例如，當玻璃基板Μ爲1800x15 00 (mm)時，若金 -17- 200847853 屬網板4爲1 400x1 1 00 ( mm )左右，則性能會下降l〇〜 2 0%，但不致大量損害功能。又，反之，當金屬網板4比 玻璃基板Μ還大時，性能幾乎不變。 [產業利用性] 如以上，與本發明有關之除電搬送裝置及搬送時之除 電方法，作爲可有效地將帶電體除電而搬送的裝置及方法 係極爲有用。 【圖式簡單說明】 圖1是顯示與本發明之實施形態1有關的除電搬送裝 置之槪略結構圖。 圖2是顯示圖1的除電搬送裝置之搬送機器人的手臂 周邊之放大平面圖。 圖3是圖2的Υ-Υ剖面圖。 圖4是表示當以圖1之除電搬送裝置除電時的玻璃基 板之電位變化的一例之圖。 圖5是顯示與本發明之實施形態2有關的除電搬送裝 置之槪略結構圖。 圖6是從圖5的Ζ-Ζ方向所見之槪略平面圖。 圖7是表示當以圖5之除電搬送裝置除電時的玻璃基 板之電位變化的一例之圖。 圖8是顯示本發明之實施形態的搬送機器人之手臂的 變形例之圖。 -18- 200847853 圖9是顯示圖8之手臂的第二臂滑動至前方的狀態之 圖。 圖10是顯示習知搬送時之除電方法的槪略結構圖。 " 圖1 1是從圖10的X-X方向所見之槪略平面圖。 圖12是表示當以圖10之除電方法除電時的玻璃基板 之電位變化的一例之圖。 【主要元件符號說明】 1、1 1 :除電搬送裝置 2 :搬送機器人 24 ··手臂（支托部） 3 :軟X射線照射器（除電器） 4 :金屬網板（導電構件） 5 ··設置桿 1 0 0 :製造設備 1 1 0 :移載室 120 :風扇過濾單元 150 :匣體 Μ :玻璃基板（帶電體） -19-。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] Although an electronic device such as a liquid crystal panel, a plasma display, or a semiconductor substrate is manufactured in a clean room, once the electronic device is electrostatically charged, the insulator constituting the electronic device is electrically damaged or microparticles. The risk of electrostatic hazard caused by the short circuit caused by the circuit that constitutes the electronic device. Therefore, in the manufacturing process of an electronic device, there is known a technique of using a soft X-ray type discharge device or a discharge type static dissipator (ionizer) to remove static electricity generated in an electronic device (for example, refer to the patent document) 1.). Further, in the transfer process in which the electronic device that has been subjected to the manufacturing process is stored in the body and transferred in the next process, the static electricity generated in the electronic device is also removed. For example, as shown in Figs. 10 and 11, a transfer chamber 110 is provided on the outlet side of the manufacturing apparatus 100, and a fan 120 through which clean air flows is disposed on the patio side of the transfer chamber 110. Further, a discharge type static eliminator 130 is provided on the upstream side of the air flow by the fan 120, and a transfer robot 140 is disposed on the downstream side. Then, in a state where air ions are generated by the discharge type static eliminator 130, the glass substrate (electronic device) is supported from the side of the manufacturing apparatus 1 by the transfer robot 140, and the glass substrate is transferred to the body 150. The side is housed in the body 150. In this transfer, the static electricity generated in the glass substrate is neutralized by air ions and neutralized. [Patent Document 1] JP-A-2006-221998 SUMMARY OF INVENTION [Problems to be Solved by the Invention] However, when the charged surface of the glass substrate is near the surface, the thickness of the air ions, that is, the thickness of the static elimination space is somewhat thick. At the time (for example, when the temperature is cm or more), the static elimination effect (power removal speed) using the static eliminator largely depends on the ion concentration and the electric field intensity in the vicinity of the charged surface. That is, the higher the sub-concentration, the stronger the electric field strength, the more the de-energizing effect can be obtained. In the static elimination method as described above, the grounding member existing around the glass crucible is formed by the grounding conductor. The patio or wall of the chamber and the body 150. Then, since the distance D1 of the glass substrate Μ of the transfer chamber 110 is large (e.g., 2 m or more), the electric field intensity near the band is weak, and a high power-removing effect cannot be obtained. Further, when the manufacturing apparatus 1 supports the glass substrate on the side of the crucible, or when the glass substrate is housed in the crucible 150, the distance D2 between the glass substrate and the wall or the distance D3 between the substrate and the crucible 150 becomes It is narrow, but it is difficult to sufficiently remove the glass substrate due to the time. Further, with respect to the charged surface (horizontal plane) of the glass crucible, the wall surface of the transfer chamber 11A is located in the vertical direction, and the crucible 150 is located in the lateral direction (same horizontal plane) without being directed. Therefore, even if the glass substrate is brought close to the transfer chamber 1 10 or the body 150 for a long time, it is impossible to cross the fully uniform and strong electric field of the charged surface of the glass substrate, and it is difficult to effectively remove the entire surface of the charged surface. , 10 will be big, leaving business. The well 110 and the electric surface of the substrate 110 are short from the plate glass, and the wall of the substrate is formed opposite to the wall -5 - 200847853. Fig. 12 shows when the power is removed by the above-mentioned method of removing electricity (the curve L 1 ), and when the power is not removed ( An example of the change in potential of the glass substrate Μ of the variation curve L2). The symbol P1 in the figure shows the time point before the glass substrate Μ is lifted in the manufacturing apparatus 1 ' 'the symbol Ρ 2 is not shown at the time point, the symbol Ρ 3 shows the conveyance, and the symbol Ρ 4 shows that the glass substrate Μ is stored in The time point of the body 1 150 (the time point at which the transfer robot 1 40 releases the glass substrate )). As shown in the figure, it can be seen that by the above-described method of removing electricity, the static elimination of the glass substrate 需要 takes a long time, and it is impossible to completely remove the electricity, and it is impossible to effectively (effectively) remove electricity. As a result, the risk of electrostatic hazard increases as the glass substrate is removed after the power is removed. On the other hand, in order to perform sufficient power-removal, once a large number of de-energizers are provided, the cost of equipment is increased, and once the de-energization time is extended, productivity is lowered. Accordingly, an object of the present invention is to provide a static eliminator that can efficiently transport a charged body and that is transported, and a method of removing electricity during transportation. [Means for Solving the Problem] In order to achieve the above object, the document described in the first paragraph of the patent application is a transport robot that carries a charged body that is charged and charged, and * is charged by air ions. A device for removing and discharging a static eliminator that is electrically neutralized and neutralized by a body, wherein the supporting portion of the transport robot supporting the charged body is spaced apart by a predetermined distance when the charged body is supported Further, the conductive member is controlled to have a predetermined potential, and the air ion is disposed at least in the form of the above-mentioned charged body and the conductive member. Remover. When the support portion of the transfer robot supports the charged body, it is opposed to the charged body by a predetermined distance, and the separator is located between the charged body and the conductive member. The invention according to claim 2, wherein the distance from the electrified body is set to 1 to 20 cm. The invention according to claim 3 is the power transmission and transport device according to the first aspect, wherein the potential is set to a ground potential. The invention according to claim 4 is the power transmission and transport device according to the first aspect of the invention, characterized in that the surface of the electrified body is a shape-oriented conductive member. The invention according to claim 5 is the power transmission and transport device according to the first aspect of the invention, characterized in that: the invention described in claim 6 is provided for the method of feeding the support portion of the robot In the case of a person carrying a charged body, the method of removing and removing electricity from the charged body is characterized in that: in the support portion of the person supporting the charged body, when the charged body is supported, the phase is charged with the phase In a body-facing manner, the arrangement is controlled to be a pre-member such that the air ions are at least located between the charged bodies, and the conductive member electrical device makes the air patent from the patent application scope. In the scope of the above-mentioned patent application, the above-mentioned patent application scope is provided to follow the above-mentioned transporting shovel at the time of transporting the machine power: the conductive and the above-mentioned conductive structure -7-200847853 pieces Remove electricity between them. [Effects of the Invention] According to the invention described in the first and sixth aspects of the patent application, in the state in which the electrified body is supported by the supporting portion of the transport robot, the charged body and the conductive member are opposed to each other by a predetermined distance. And the air ions will be in between. Therefore, in a state where the charged body is supported by the transport robot, a strong and stable electric field can be formed between the charged body and the conductive member (around the charged body), and the electric field is efficiently and stably performed under such a good electric field. Use air ions to remove electricity. As a result, the charged body can be effectively removed and transported. According to the invention of the second aspect of the invention, since the distance between the conductive member and the electrified body is set to 1 to 20 cm, a stronger and stable electric field can be formed to effectively remove the charged body. According to the invention of the third aspect of the invention, since the potential of the conductive member is set to the ground potential, the conductive member can be easily and stably controlled by grounding the conductive member by, for example, a grounding robot. . According to the invention of the fourth aspect of the invention, since the conductive member is formed to be uniformly opposed to the oppositely facing electrified body, the conductive member can be formed uniformly and stably around the entire periphery of the electrified body. The electric field can uniformly and effectively remove the entire charge of the charged body. According to the invention described in claim 5, since the static eliminator is disposed so as to follow the supporting portion of the transport robot, the air can be stably and stably located in the charged body and the conductive member from -8 to 200847853. Indirectly, the charged body is de-energized. Further, by removing (forming and supplying) air ions in the charged body, it is possible to simultaneously remove and remove electricity. In other words, it is possible to transport and remove electricity in a time-saving manner. [Embodiment] Hereinafter, the present invention will be described based on embodiments of the drawings. (Embodiment 1) Fig. 1 is a schematic block diagram showing a power transmission and conveying apparatus according to the present embodiment. The static electricity removal and transport device 1 is housed in a flat-panel display substrate of the manufacturing apparatus 100, that is, a glass substrate (charged body: electricity, simultaneously transferred (transported) to the side of the body 15 and housed in the body device, and includes a transfer robot. 2 and soft X-ray irradiator) 3 main. Here, the same components as those described above with reference to Figs. 1 and 11 will be described with the same reference numerals. Further, the transfer chamber is provided in the temperature-controlled clean room 'and the clean air from the fan filter unit is supplied as a vertical flow' and passes through a return chamber or a return duct (not shown). It is: 'The transport robot 2 is a glass substrate that supports the charged glass substrate, and is placed between the manufacturing device 100 and the body 150 in the transfer chamber 110, and is grounded and solid in this embodiment. surface. The transport robot 2 includes a base portion 21 located at the lowermost portion, a first ring 22 above the portion 2 1 , and a top row 22 located above the first ring 22 (which may be provided with a row transport 1). The equivalent 1 1 0 is the returning shield ring of 120. The exit side of the transport is set at the bottom of the second ring - 9 - 200847853 23, and the two arms (support part) 24 at the top. The first ring 22 It is freely rotatable (rotated about the vertical axis) with respect to the base 21, and is swung (centered on the horizontal axis), and the second ring 23 is freely swung relative to the first ring 22. The two arms 24 are as shown in FIG. As shown in FIG. 3, it is arranged in parallel in a flat bar shape, and is free to swing with respect to the second ring 23, and is controlled to be a face formed by the two arms 24, that is, a plane containing the two arms 24 constant. Therefore, the glass substrate 支 which is lifted by the arm 24 on the exit side of the manufacturing apparatus 100 can be transferred to the side of the cymbal 150 while maintaining the horizontal surface of the glass substrate 水平. Stored in the body 150. Conductive in the arm 24 It is a stencil (conductive member) 4. The metal mesh plate 4 is a metal mesh plate and is disposed parallel to the surface formed by the two arms 24 and penetrates the two arms 24. Further, the metal mesh plate The size (area) of the plate surface of 4 is set to be the same size as that of the glass substrate, and in the state in which the glass substrate is supported by the arm 24, it is disposed so as to face the plate surface of the facing glass substrate. Further, on the upper surface side of each arm 24, two support projections 24a projecting upward are formed along the longitudinal direction, and the height of the support projections 24a is set to support (mount) the glass substrate. In the state of the crucible, the distance (slit) Η of the glass substrate Μ and the metal mesh plate 4 is 3 cm. Therefore, in the state in which the glass substrate 支 is supported, the metal mesh plate 4 becomes completely opposite to the surface of the glass substrate Μ In other words, the metal mesh plate 4 is uniformly opposed to the surface of the glass substrate 。. Here, the distance between the glass substrate Μ and the metal mesh plate 4 is set to be -10- 200847853 3 cm, but this is considering the effect of removing electricity and the storage of the glass substrate. That is, it is a distance in the storage body of the glass substrate 可 which is allowed to be within the immersion body 150, and it is considered that air ions caused by the soft X-ray illuminator 3 described later are formed on the glass substrate Μ and the metal mesh plate 4 The distance of the entire slit is preferably 1 to 4 cm, and is set to 3 cm in the present embodiment. In this embodiment, although the distance Η is set to 3 cm, the distance Η is 1 to 1 When it is 20 cm, it is confirmed that a good static elimination effect can be obtained. Therefore, the distance Η can be set to the range in consideration of the size of the glass substrate 或 or the storage interval, etc. Further, the potential of the metal mesh plate 4 is set (controlled) to the ground potential. . In other words, the metal mesh plate 4 is grounded via the transfer robot 2 . In this manner, in the present embodiment, the potential of the metal mesh plate 4 is set to the ground potential, but it may be controlled to a potential other than the ground potential, for example, the potential equivalent to the potential of the glass substrate. In other words, the potential of the metal mesh plate 4 can be controlled so as to form a strong and stable electric field around the periphery of the glass substrate. The soft X-ray irradiator 3 is a static eliminator that removes static electricity by the air ions on the glass substrate. That is, in the present embodiment, by irradiating soft X-rays having a wavelength of 0 · 5 to 2 Torr in the air, molecules in the air are released to generate air ions. Then, the air ions of the opposite polarity to the polarity of the static electricity carried by the glass substrate are combined with the static electricity to neutralize and neutralize the static electricity. The soft X-ray irradiator 3 is disposed at the upper end of the second ring 23 of the transport robot 2, and follows the arm 24 of the transport robot 2. In other words, with the rotation of the rings 22, 23, the movement of the arm 24, the movement of the arm -11 - 200847853, the soft X-ray illuminator 3 will also move with the rings 22, 23, so the arm 24 and soft X-ray irradiation The relative positional relationship of the device 3 becomes constant. Further, the soft X-ray irradiator 3 is disposed so as to irradiate the soft X-rays to the entire periphery of the upper surface and the lower surface of the glass substrate μ supported by the arm 24. In other words, the soft X-ray irradiator 3 is disposed such that air ions are formed between the upper surface side of the glass substrate 及 and the glass substrate Μ and the metal mesh plate 4. By disposing the soft X-ray irradiator 3 in this manner, in the movement of the arm 24, that is, in the conveyance of the glass substrate μ, air ions can be formed continuously and stably around the upper and lower surfaces of the glass substrate. Here, it is preferable that the soft X-ray illuminator 3 is disposed such that the irradiation central axis of the soft X-ray irradiator 3 is located between the lower surface of the glass substrate 和 and the metal mesh plate 4. Thereby, air ions can be formed more uniformly across the entire space between the glass substrate μ having the highest static elimination effect and the metal mesh plate 4. Next, the operation of the static electricity removing and conveying apparatus 1 having such a configuration and the method of removing electricity according to the transportation of the static electricity conveying apparatus 1 will be described. Here, a case where the soft X-ray irradiator 3 is actuated to continuously irradiate the soft X-rays from the front of the support glass substrate ( (Case 1), and after the support of the glass substrate Μ, the soft X-ray irradiator 3 is made. The case where the soft X-ray is continuously irradiated while moving (Case 2). Further, it is assumed that the glass substrate 处理 is processed by the manufacturing process (pre-process) in the manufacturing apparatus 1 and transported to the exit side of the manufacturing apparatus 1 藉 by the transport roller 10 1 , and by the top pin 102 Lifted up. In the case 1, first, in the state in which the soft X-ray irradiator 3 is in operation, the raised glass substrate 支 is supported by the arm 24 of the transport robot 2. Next, the rings 22 and 23 are driven, and the glass substrate Μ is transferred to the side of the body 150 while maintaining the plate surface of the glass substrate μ at a level of -12-200847853. Next, the glass substrate Μ is housed in the body 150, and the arm 24 is separated from the glass substrate. On the other hand, in the transfer, the air ions formed by the soft X-ray irradiator 3 neutralize and neutralize the static electricity carried by the glass substrate μ. In Case 2, first, the raised glass substrate 支 is supported by the arm 24 of the transport robot 2, and then the soft X-ray irradiator 3 is actuated. Then, in the same manner as in the case 1, the glass substrate was transferred to the side of the body 150 and stored in the body 150. Then, after the soft X-ray irradiator 3 is actuated, the glass substrate is de-energized by the soft X-ray irradiator 3. As described above, in the state of the charge removing and conveying device 1 and the static eliminating method, the metal mesh plate 4 set to the ground potential and the glass substrate Μ are faced in a state in which the glass substrate 支 is supported by the arm 24, and air ions are formed therebetween. Therefore, a strong and stable electric field is formed between the glass substrate Μ and the metal mesh plate 4 (on the periphery of the glass substrate Μ), and the use of air ions can be effectively and stably performed under such a good electric field. Further, since the metal mesh plate 4 is uniformly aligned on the surface of the glass substrate, it is possible to form an equal and stable electric field around the entire periphery of the glass substrate, and it is possible to uniformly and effectively remove the entire surface of the glass substrate. Further, as described above, since air ions are formed on the periphery of the upper and lower surfaces of the glass substrate by constant and stable during the conveyance of the glass substrate, the glass substrate can be effectively and effectively removed. Further, by performing the above-described method of removing electricity during transportation and carrying out transportation and discharging, it is possible to transport and remove electricity in a time-saving manner. Then, as a result, the glass substrate subjected to the manufacturing process of -13-200847853 can be efficiently and efficiently removed and transported. Fig. 4 shows an example of the change in the potential of the glass substrate when the power is removed by the static electricity transfer and transport apparatus 1. In the figure, the curve L3 indicates the case 1, the curve L4 indicates the case 2, and the curve L2 indicates that the power is not removed. Further, the symbol Ρ1 indicates the time point before the glass substrate Μ is lifted, the symbol ρ 2 indicates the time point at which the glass substrate 抬 is lifted, the symbol Ρ3 indicates the conveyance, and the symbol Ρ4 indicates the time point at which the glass substrate Μ is housed in the corpus callosum 150 (the arm 24) The point of time when the glass substrate is detached). As shown in the figure, in either of the case 1 and the case 2, it is considered that the glass substrate can be effectively removed as compared with the conventional electric method (curve L1 of Fig. 12). That is, in the case 1 (curve l 3 ), the maximum potential of the glass substrate 为 is about 0.2 to 0.3 kV, and the power can be completely removed in 2 seconds from the support. Further, in Case 2 (curve L4), the maximum potential of the glass substrate is about 1 kV, and it can be fully charged in about 3 seconds from the support. Further, when the arm 24 is separated from the P4 of the glass substrate μ, a new charging occurs between the contact portion (hand pad) of the arm and the glass substrate, and the charging cannot be removed by a conventional discharging method. In the case of the case 1 and the case 2, the charge can be completely removed. (Embodiment 2) Fig. 5 is a schematic block diagram showing the charge removing and conveying device 1 according to the present embodiment. In the present embodiment, the configuration of the soft X-ray irradiator 3 is different from that of the first embodiment, and the same configurations as those of the first embodiment are denoted by the same reference numerals. Μ 表 将 将 将 将 将 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 软 软 软 软 软 软 软 软 软 软 软 软 软 软 软 软That is, a vertically extending setting rod 5 is provided between the outlet side of the manufacturing apparatus 1A and the transfer robot 2, and the soft X-ray irradiator 3 is attached to the upper end portion of the setting rod 5 with the irradiation opening facing upward. . Further, in a state where the glass substrate Μ is carried (transferred) into the transfer chamber 1 1 by the arm 24 of the transfer robot 2, as shown in FIG. 6, the installation height and position of the soft X-ray irradiator 3 are set to The soft X-rays from the soft X-ray irradiator 3 can be irradiated to the entire periphery of the glass substrate Μ and the metal mesh plate 4. By the arrangement of the soft X-ray irradiator 3, the surface of the glass substrate 垂直 is irradiated with soft X-rays vertically from below, and the soft X-rays are irradiated to the glass substrate Μ and the metal via the mesh of the metal mesh plate 4. Between the stencils 4, air ions are formed. Next, the operation of the static electricity conveying and conveying device 1 having such a configuration and the method of removing electricity according to the transportation of the static electricity conveying and conveying device 11 will be described. First, in a state in which the soft X-ray irradiator 3 is in operation, the glass substrate 支 is supported by the arm 24 of the transport robot 2, and the glass substrate Μ is transferred to the immediately above the soft X-ray irradiator 3. Then, the glass substrate is removed by holding the positional state for a predetermined period of time, and then the glass substrate is transferred to the side of the body 150 and stored in the body 150. According to the power-removing and conveying device 11 and the method of removing electricity, since the metal mesh plate 4 and the glass substrate Μ are opposed in a state in which the glass substrate 支 is supported by the arm 24, the glass can be uniformly and efficiently obtained in the same manner as in the first embodiment. Complete removal of the substrate Μ. Further, since the surface of the glass substrate Μ (metal mesh plate 4) is vertically irradiated with soft X-rays, the soft ray rays can be more uniformly irradiated across the entire surface of the glass substrate Μ -15 2008 2008 2008 2008 2008 2008 , , , , , , , , , , The ground forms air ions. As a result, even when the plate area of the glass substrate crucible is large, it is possible to completely and equally and effectively remove electricity. Fig. 7 shows an example of a change curve L5 of the potential of the glass substrate Μ when the static eliminating conveyance device 11 is de-energized. As shown in the figure, it can be seen that since the de-energization is not performed until the glass substrate crucible is located directly above the soft X-ray irradiator 3, the potential of the glass substrate crucible is high, but from the soft X-ray irradiator 3 Immediately above, the potential will drop sharply and can be removed in a short time. The embodiment of the present invention has been described above, and the specific configuration is not limited to the above-described embodiments, and modifications of the design and the like without departing from the scope of the present invention are also included in the present invention. For example, in the first embodiment, air X ions are formed by irradiating soft X-rays between the upper surface side of the glass substrate 及 and the glass substrate Μ and the metal mesh plate 4, but air ions formed in other spaces may be supplied to the glass. The upper side of the substrate 及 is between the glass substrate Μ and the metal mesh plate 4. Further, in the above embodiment, the soft X-ray irradiator 3 is used as the static eliminator, but may be another static eliminator such as a corona discharge type static eliminator. Further, the arm 24 of the transport robot 2 may be of a sliding type. That is, as shown in FIGS. 8 and 9, the first arm 241 and the second arm 242 constitute the arm 24, the first arm 241 is disposed on the second ring 23, and the second arm 242 is disposed opposite to the second arm 242. The first arm 241 is free to slide. Further, the metal mesh plate 4 is disposed on the first arm 241. Then, while the glass substrate is supported and transferred to the side of the body 150, the second arm 242 is placed in the state of -16-200847853 overlapping the first arm 241. On the other hand, when the glass substrate M is housed in the body 150, the second arm 242 is slid to the front, and only the second arm 242 and the glass substrate are placed in the body 150. Thereby, even if the soft X-rays are more uniformly irradiated across the entire periphery of the glass substrate, the distance between the glass substrate Μ and the metal mesh 4 is kept wide, also because the first arm 24 Since 1 is not located in the body 1 50, the storage interval of the glass substrate 能够 can be suppressed to an allowable range. In other words, it is possible to reduce the storage interval of the glass substrate 在 in securing the high power absorbing effect. Further, the glass substrate 支 is supported by placing the glass substrate on the arm 24 of the transfer robot 2, but the glass substrate 支 can be supported by suction or the like, and the glass substrate can be placed under the arm 24. At this time, in the second embodiment, the soft X-ray irradiator 3 may be placed above the arm 24 such that the soft X-ray is directed toward the glass substrate in accordance with the air current caused by the fan filter unit 120. Further, the transport robot 2 may be a walkable object, and may of course be applied to an electronic device (charged body) other than the glass substrate, for example, a semiconductor substrate or the like for removing electricity and transporting. Further, the conductive member is not limited to the metal mesh plate 4, and may be formed of a rod body, a plurality of perforated objects formed on the flat plate, or a flat plate shape corresponding to the shape of the electrified body and the type of the static eliminator. , a deformed plate-like object such as a bump. Further, when the top pin 102 and the metal mesh plate 4 interfere, the edge of the glass substrate Μ can be lifted on the side of the manufacturing apparatus 100 to separate the metal mesh plate 4 without interference. The size of the metal mesh plate 4 is preferably the same as that of the glass substrate, but even if it is slightly smaller, the performance on the function will not be much lower. For example, when the glass substrate is 1800x15 00 (mm), if the gold -17-200847853 is about 1 400x1 00 (mm), the performance will drop by 〇~20%, but it will not cause a lot of damage. . Further, conversely, when the metal mesh plate 4 is larger than the glass substrate, the performance is hardly changed. [Industrial Applicability] As described above, the static electricity removing and conveying device according to the present invention and the method of removing electricity during transportation are extremely useful as an apparatus and method for efficiently discharging and discharging a charged body. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic block diagram showing a power transmission and carrying device according to a first embodiment of the present invention. Fig. 2 is an enlarged plan view showing the periphery of an arm of the transport robot of the static electricity transporting apparatus of Fig. 1. Figure 3 is a cross-sectional view of the Υ-Υ of Figure 2; Fig. 4 is a view showing an example of a change in potential of a glass substrate when the static eliminating conveyance device of Fig. 1 is de-energized. Fig. 5 is a schematic structural view showing a static eliminating conveyance device according to a second embodiment of the present invention. Fig. 6 is a schematic plan view seen from the Ζ-Ζ direction of Fig. 5. Fig. 7 is a view showing an example of a change in potential of a glass substrate when the static electricity removing and conveying device of Fig. 5 is de-energized. Fig. 8 is a view showing a modification of the arm of the transport robot according to the embodiment of the present invention. -18- 200847853 Fig. 9 is a view showing a state in which the second arm of the arm of Fig. 8 is slid to the front. Fig. 10 is a schematic structural view showing a method of removing electricity at the time of conventional transportation. " Fig. 11 is a schematic plan view seen from the X-X direction of Fig. 10. Fig. 12 is a view showing an example of a change in potential of a glass substrate when the electricity is removed by the static elimination method of Fig. 10. [Description of main component symbols] 1. 1 1 : Power transmission and transport device 2 : Transport robot 24 · Arm (support part) 3 : Soft X-ray irradiator (discharger) 4 : Metal mesh plate (conductive member) 5 ·· Setting rod 1 0 0 : Manufacturing equipment 1 1 0 : Transfer chamber 120 : Fan filter unit 150 : 匣 body Μ : glass substrate (charged body) -19-