CN104176431A - Workpiece transmission device with electrostatic elimination function - Google Patents
Workpiece transmission device with electrostatic elimination function Download PDFInfo
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- CN104176431A CN104176431A CN201310203784.3A CN201310203784A CN104176431A CN 104176431 A CN104176431 A CN 104176431A CN 201310203784 A CN201310203784 A CN 201310203784A CN 104176431 A CN104176431 A CN 104176431A
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- workpiece
- guide rail
- transfer device
- workpiece transfer
- wheel shaft
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Abstract
The invention provides a workpiece transmission device with an electrostatic elimination function, and relates to the technical field of processing and manufacturing of semiconductors. The workpiece transmission device is used for connecting a workpiece supplying device with a workpiece processing device and comprises a supporting assembly, a transmission assembly, a power assembly and an electrostatic elimination assembly, wherein the supporting assembly is arranged between the workpiece supplying device and the workpiece processing device; the transmission assembly is arranged on the supporting assembly and is used for receiving a workpiece which is supplied by the workpiece supplying device and transmitting the workpiece to the workpiece processing device; the power assembly is arranged on the supporting assembly and is used for supplying transmission power to the transmission assembly; the electrostatic elimination assembly is arranged at the side of the transmission assembly and is used for carrying out electrostatic elimination processing on the workpiece. According to the technical scheme, a transmitting mode is applied to the workpiece, in addition, the workpiece also can be subjected to the electrostatic elimination processing during a transmission process, the time consumption of workpiece transmitting and electrostatic elimination processing can be reduced, and the workpiece processing efficiency can be increased.
Description
Technical field
The present invention relates to semiconductor processing and manufacturing technical field, refer to especially a kind of workpiece transfer device with electrostatic eliminating function.
Background technology
In semiconductor devices (as integrated circuit, LED etc.) processing process, at a processing stations, workpiece is completed after respective handling, often need to transfer to another one processing stations from current processing stations is for further processing, in prior art, be generally by Workpiece processing apparatus, between processing stations, to be carried workpiece, owing to there being certain distance between processing stations, and the kinematic velocity of Workpiece processing apparatus is limited, therefore transmission and the treatment effeciency of workpiece are lower, and then cause the productive costs of workpiece higher.
In addition, before workpiece enters Workpiece processing apparatus, also need workpiece to carry out various pretreatments, further increased time loss.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of workpiece transfer device with electrostatic eliminating function, workpiece is adopted to the mode transmitting, and in transport process, workpiece is carried out to static Processing for removing, can reduce the time loss of workpiece transmission and static Processing for removing, improve workpiece treatment effeciency.
For solving the problems of the technologies described above, embodiments of the invention provide technical scheme as follows:
On the one hand, provide a kind of workpiece transfer device, for connecting workpiece generator and Workpiece processing apparatus, described workpiece transfer device comprises:
Be arranged on the supporting component between described workpiece generator and Workpiece processing apparatus;
Be arranged on described supporting component, the workpiece providing for accepting workpiece generator, and by described work piece delivery to the transmission component of described Workpiece processing apparatus;
Be arranged on described supporting component, be used to described transmission component that the Power Component that transmits power is provided;
Be arranged on described transmission component side, for described workpiece being carried out to the static of static Processing for removing, eliminate assembly.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component;
The slide block that be arranged on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Thereby be arranged on described guide rail inner side, the Timing Belt for driving described workpiece brace rotation to drive described slide block to slide along described guide rail.
Further, described guide rail is circular guideway, oval guide rail or straight bent guide rail.
Further, described transmission component is driven by Power Component, realizes automatically and workpiece transfer accurately.
Further, described Power Component comprises:
Motor;
The first wheel shaft and first belt wheel that be connected corresponding to described the first wheel shaft that connect with described motor;
The second wheel shaft being oppositely arranged with described the first wheel shaft and second belt wheel that be connected corresponding to described the second wheel shaft;
Wherein, described the first belt wheel and the second belt wheel and the engagement of described Timing Belt, described the first belt wheel can rotate under the effect of described motor, by the engagement with described Timing Belt, drives described Timing Belt to rotate, and then the second belt wheel rotation described in transmission.
Further, described the first wheel shaft is connected with described motor by coupler.
Further, described supporting component comprises:
Supporting substrate;
Be arranged on the upper supporting plate column on described supporting substrate;
Be arranged on the upper supporting plate on described upper supporting plate column;
Wherein, described motor is fixed on described upper supporting plate, and described the first wheel shaft and the second wheel shaft are arranged between described upper supporting plate and supporting substrate.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component, described guide rail is circular guideway, oval guide rail or straight bent guide rail;
The slide block that be positioned on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Described Power Component comprises:
Be arranged on described supporting component, take described guide rail as stator, the motor that the described slide block of take is mover.Further, described slide block can drive workpiece brace to realize automatically and workpiece transfer accurately as electric mover.
Further, described supporting component comprises:
Supporting substrate;
Wherein, described motor is fixed on described supporting substrate.
Wherein, described static elimination assembly comprises:
Be arranged on the permanent seat of described guide rail top;
The rotary seat that is arranged on described permanent seat top, is rotatably connected with described permanent seat;
Be fixed on the static eraser on described rotary seat.
Embodiments of the invention have following beneficial effect:
In such scheme, workpiece is adopted to the mode transmitting, can reduce the passing time of workpiece, improve workpiece treatment effeciency.In transport process, can also carry out static to workpiece in addition and eliminate pretreatment, further save the production time of workpiece, improve the production efficiency of workpiece, thereby finally can reduce the productive costs of workpiece.
Accompanying drawing explanation
Fig. 1 is the structural representation of the workpiece transfer device of the embodiment of the present invention one;
Fig. 2 is the exploded perspective view of workpiece transfer device shown in Fig. 1;
Fig. 3 is another structural representation of the workpiece transfer device of the embodiment of the present invention one;
Fig. 4 is the structural representation of the workpiece transfer device of the embodiment of the present invention two.
The specific embodiment
For technical matters, technical scheme and advantage that embodiments of the invention will be solved are clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
Embodiments of the invention cause for the type of transmission of workpiece in prior art the problem that workpiece treatment effeciency is lower, a kind of workpiece transfer device with electrostatic eliminating function is provided, workpiece is adopted to the mode transmitting, and in transport process, workpiece is carried out to static Processing for removing, can reduce workpiece transmission and pretreated time loss, improve workpiece treatment effeciency.
The workpiece transfer device of the embodiment of the present invention, for connecting workpiece generator and Workpiece processing apparatus, described workpiece transfer device comprises:
Be arranged on the supporting component between described workpiece generator and Workpiece processing apparatus;
Be arranged on described supporting component, the workpiece providing for accepting workpiece generator, and by described work piece delivery to the transmission component of described Workpiece processing apparatus;
Be arranged on described supporting component, be used to described transmission component that the Power Component that transmits power is provided;
Be arranged on described transmission component side, for described workpiece being carried out to the static of static Processing for removing, eliminate assembly.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component;
The slide block that be arranged on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Thereby be arranged on described guide rail inner side, the Timing Belt for driving described workpiece brace rotation to drive described slide block to slide along described guide rail.
Further, described guide rail is circular guideway, oval guide rail or straight bent guide rail.
Further, described Power Component comprises:
Motor;
The first wheel shaft and first belt wheel that be connected corresponding to described the first wheel shaft that connect with described motor;
The second wheel shaft being oppositely arranged with described the first wheel shaft and second belt wheel that be connected corresponding to described the second wheel shaft;
Wherein, described the first belt wheel and the second belt wheel and the engagement of described Timing Belt, described the first belt wheel can rotate under the effect of described motor, by the engagement with described Timing Belt, drives described Timing Belt to rotate, and then the second belt wheel rotation described in transmission.
Further, described the first wheel shaft is connected with described motor by coupler.
Further, described supporting component comprises:
Supporting substrate;
Be arranged on the upper supporting plate column on described supporting substrate;
Be arranged on the upper supporting plate on described upper supporting plate column;
Wherein, described motor is fixed on described upper supporting plate, and described the first wheel shaft and the second wheel shaft are arranged between described upper supporting plate and supporting substrate.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component, described guide rail is circular guideway, oval guide rail or straight bent guide rail;
The slide block that be positioned on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Described Power Component comprises:
Be arranged on described supporting component, take described guide rail as stator, the motor that the described slide block of take is mover.
Further, described slide block can drive workpiece brace to realize automatically and workpiece transfer accurately as electric mover.
Further, described supporting component comprises:
Supporting substrate;
Wherein, described motor is fixed on described supporting substrate.
Particularly, described static elimination assembly comprises:
Be arranged on the permanent seat of described guide rail top;
The rotary seat that is arranged on described permanent seat top, is rotatably connected with described permanent seat;
Be fixed on the static eraser on described rotary seat, for example ion blower.
The workpiece transfer device with electrostatic eliminating function of the present invention, adopts the mode transmitting to workpiece, can reduce the passing time of workpiece, improves workpiece treatment effeciency.In transport process, can also carry out static Processing for removing to workpiece in addition, further save the production time of workpiece, improve the production efficiency of workpiece, thereby finally can reduce the productive costs of workpiece.
Below in conjunction with specific embodiment and accompanying drawing, the workpiece transfer device with electrostatic eliminating function of the present invention is described further:
Embodiment mono-
As shown in FIG. 1 to 3, in workpiece transfer device of the present invention, include supporting component, transmission component, Power Component and eliminate assembly 3 for described workpiece being carried out to the static of static Processing for removing.
Wherein, supporting component comprises: be arranged on the supporting substrate 16 on complete machine platen 14; Be fixedly installed on the upper supporting plate column 7 on supporting substrate 16; Be fixed by screws in the upper supporting plate 5 on upper supporting plate column 7.
Transmission component comprises: the guide rail 10 that is arranged on supporting substrate 16 tops; The slide block 11 that be arranged on guide rail 10, can slide along guide rail 10; Be fixed on the workpiece brace 2 on slide block 11; Be arranged on the Timing Belt 17 of guide rail 10 inner sides, workpiece brace 2 by screws clamp on Timing Belt 17, thereby Timing Belt 17 can drive workpiece brace 2 rotation band movable sliders 11 to slide along guide rail 10 like this.Its middle guide 10 can be circular guideway, oval guide rail or straight bent guide rail, and in the present embodiment, particularly, guide rail 10 can be the straight bent guide rail of ellipse.
Power Component comprises: be fixed on the motor 13 on upper supporting plate 5; The first wheel shaft 15 being connected with motor 13 by coupler 9, the first belt wheel 8 of connection corresponding to the first wheel shaft 15; The second wheel shaft 4 being oppositely arranged with the first wheel shaft 15; The second belt wheel 6 of connection corresponding to the second wheel shaft 4.Wherein, the first wheel shaft 15 and the second wheel shaft 4 are between upper supporting plate 5 and supporting substrate 16, and the first belt wheel 8 and the second belt wheel 6 mesh with Timing Belt 17.Certainly, should be understood that, can also adopt other mounting structures that those skilled in the art easily expect that the first belt wheel 8 and the second belt wheel 6 are installed, all do not affect the enforcement of the present embodiment technical scheme.
Static is eliminated assembly 3 and is comprised: the permanent seat 33 that is arranged on guide rail 10 tops; The rotary seat 32 that is arranged on permanent seat 33 tops, is rotatably connected with permanent seat 33; Be fixed on the ion blower 31 on rotary seat 32.Wherein, by the angle between adjusting rotary seat 32 and permanent seat 33, can adjust the aligned position of ion blower 31.
When the workpiece transfer device work of the present embodiment, during motor 13 rotation, by the first wheel shaft 15, drive the first belt wheel 8 rotations, the first belt wheel 8 drives Timing Belt 17 to rotate by the engagement with Timing Belt 17, and then transmission the second belt wheel 6 rotations, workpiece brace 2 by screws clamp on Timing Belt 17, Timing Belt 17 drives 2 rotations of workpiece brace while rotating, workpiece brace 2 band movable sliders 11 slide along guide rail 10, at workpiece brace 2, rotate to below ion blower 31 time, ion blower 31 blows out deionization wind and removes the static on workpiece, the static Processing for removing of realization to workpiece.Afterwards, next workpiece brace 2 is rotated to again ion blower 31 belows, then completes static elimination action.So repeatedly carry out, realize after the static Processing for removing of workpiece, by work piece delivery to Workpiece processing apparatus.
Wherein, one end of guide rail 10 is near workpiece generator, and the other end is near Workpiece processing apparatus.At workpiece generator end, workpiece generator is placed on pending workpiece on workpiece brace 2, by workpiece transfer device, work piece delivery is arrived to Workpiece processing apparatus end; At Workpiece processing apparatus end, Workpiece processing apparatus takes off workpiece from workpiece brace 2, and workpiece is processed.
Workpiece described in the present embodiment includes but not limited to wafer, chip etc.
The workpiece transfer device of the present embodiment is when installing, each several part structure can connect with screw, for example: with screw, supporting substrate 16 is fixed on complete machine platen 14, leveling guide rail 10 and slide block 11, make the upper reference plane of slide block 11 in the error limit requiring; With screw, connect upper supporting plate column 7 and supporting substrate 16, with screw, connect upper supporting plate column 7 and upper supporting plate 5; By bearing and bearing gland, the first belt wheel 8, the second belt wheel 6, the first wheel shaft 15 and the second wheel shaft 4 are installed to upper supporting plate 5 and supporting substrate 16, with screw, connect motor 13 to upper supporting plate 5, by coupler 9, connect motor shaft and the first wheel shaft 15, Timing Belt 17 and the first belt wheel 8, the second belt wheel 6 are installed, with screw, connect workpiece brace 2 to slide block 11, with screws clamp Timing Belt 17 and workpiece brace 2, the driving by Timing Belt 17 can drive workpiece brace 2 and slide block 11 to move along guide rail 10.
In the present embodiment, workpiece is loaded onto on workpiece brace at workpiece generator end, and accepts static Processing for removing through being configured in the static elimination assembly in guide rail outside, then at Workpiece processing apparatus end, by Workpiece processing apparatus, is obtained and carries out next step operation.Such mode guarantees that Workpiece processing apparatus can obtain workpiece in shorter distance on the one hand; Because can walking abreast on workpiece transfer device, a plurality of workpiece accept static Processing for removing on the other hand, can further save the overhours of workpiece, make Workpiece processing apparatus can obtain continuously the workpiece that completes static Processing for removing, improve the production efficiency of workpiece, finally can reduce the productive costs of workpiece.
Embodiment bis-
In workpiece transfer device of the present invention, include supporting component, transmission component, Power Component and eliminate assembly for described workpiece being carried out to the static of static Processing for removing.
Wherein, supporting component comprises the supporting substrate being arranged on complete machine platen.
As shown in Figure 4, transmission component comprises: be fixedly installed on the guide rail 21 on supporting substrate; Be arranged on guide rail 21 slide block 22 that can slide along guide rail 21; Be fixed on the workpiece brace 23 on slide block 22.
Power Component comprises: be fixedly installed on supporting substrate the motor that the guide rail 21 of take is mover as stator, the slide block 22 of take.Motor can drive all mover slide blocks 22 to move along stator guiding track 21, thereby drives workpiece brace 23 to move.Its middle guide 21 can be circular guideway, oval guide rail or straight bent guide rail.In the present embodiment, particularly, as shown in Figure 4, guide rail 21 can be the straight bent guide rail of ellipse.
Static is eliminated assembly and is comprised: the permanent seat that is arranged on guide rail 21 tops; The rotary seat that is arranged on permanent seat top, is rotatably connected with permanent seat; Be fixed on the ion blower on rotary seat.Wherein, by the angle between adjusting rotary seat and permanent seat, can adjust the aligned position of ion blower.
When the workpiece transfer device work of the present embodiment, thereby electric mover slide block 22 drives workpiece brace 23 to drive workpiece to move to Workpiece processing apparatus end by workpiece generator end.At workpiece generator end, workpiece generator 24 is placed on pending workpiece in the workpiece brace 23 on mover slide block 22, workpiece brace 23 moves along guide rail 21 under the drive of motor, at workpiece brace 23, rotate to below ion blower time, ion blower blows out deionization wind and removes the static on workpiece, realizes the static Processing for removing to workpiece.Afterwards, next workpiece brace 23 is rotated to again ion blower below, then completes static elimination action.So repeatedly carry out, realize after the static Processing for removing of workpiece, by work piece delivery to Workpiece processing apparatus 25.At Workpiece processing apparatus end, Workpiece processing apparatus 25 takes off workpiece from workpiece brace, and workpiece is processed.
Workpiece described in the present embodiment includes but not limited to wafer, chip etc.
The workpiece transfer device of the present embodiment is when installing, and straight bent stator guiding track 21 can be fixed on supporting substrate or directly be connected on complete machine platen with screw, so that whole transmitting device is fixed.The workpiece brace 23 that carrying workpiece is used, can connect or other connection modes with screw with being connected of mover slide block 22, and for example magnetic force connects.Workpiece generator 24, Workpiece processing apparatus 25 and static are eliminated assembly and are screwed on complete machine platen.
In the present embodiment, workpiece is loaded onto on workpiece brace at workpiece generator end, and accepts static Processing for removing through being configured in the static elimination assembly in guide rail outside, then at Workpiece processing apparatus end, by Workpiece processing apparatus, is obtained and carries out next step operation.Such mode guarantees that Workpiece processing apparatus can obtain workpiece in shorter distance on the one hand; Because can walking abreast on workpiece transfer device, a plurality of workpiece accept static Processing for removing on the other hand, can further save the overhours of workpiece, make Workpiece processing apparatus can obtain continuously the workpiece that completes static Processing for removing, improve the production efficiency of workpiece, finally can reduce the productive costs of workpiece.
The above is the preferred embodiment of the present invention; should be understood that; for those skilled in the art; do not departing under the prerequisite of principle of the present invention; can also make some distortion, improvements and modifications, these distortion, improvements and modifications also should be considered as protection scope of the present invention.
Claims (11)
1. a workpiece transfer device with electrostatic eliminating function, for connecting workpiece generator and Workpiece processing apparatus, is characterized in that, described workpiece transfer device comprises:
Be arranged on the supporting component between described workpiece generator and Workpiece processing apparatus;
Be arranged on described supporting component, the workpiece providing for accepting workpiece generator, and by described work piece delivery to the transmission component of described Workpiece processing apparatus;
Be arranged on described supporting component, be used to described transmission component that the Power Component that transmits power is provided;
Be arranged on described transmission component side, for described workpiece being carried out to the static of static Processing for removing, eliminate assembly.
2. workpiece transfer device according to claim 1, is characterized in that, described transmission component comprises:
Be arranged on the guide rail on described supporting component;
The slide block that be arranged on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Thereby be arranged on described guide rail inner side, the Timing Belt for driving described workpiece brace rotation to drive described slide block to slide along described guide rail.
3. workpiece transfer device according to claim 2, is characterized in that, described guide rail is circular guideway, oval guide rail or straight bent guide rail.
4. workpiece transfer device according to claim 2, is characterized in that, described transmission component is driven by Power Component, realizes automatically and workpiece transfer accurately.
5. workpiece transfer device according to claim 2, is characterized in that, described Power Component comprises:
Motor;
The first wheel shaft and first belt wheel that be connected corresponding to described the first wheel shaft that connect with described motor;
The second wheel shaft being oppositely arranged with described the first wheel shaft and second belt wheel that be connected corresponding to described the second wheel shaft;
Wherein, described the first belt wheel and the second belt wheel and the engagement of described Timing Belt, described the first belt wheel can rotate under the effect of described motor, by the engagement with described Timing Belt, drives described Timing Belt to rotate, and then the second belt wheel rotation described in transmission.
6. workpiece transfer device according to claim 5, is characterized in that, described the first wheel shaft is connected with described motor by coupler.
7. workpiece transfer device according to claim 5, is characterized in that, described supporting component comprises:
Supporting substrate;
Be arranged on the upper supporting plate column on described supporting substrate;
Be arranged on the upper supporting plate on described upper supporting plate column;
Wherein, described motor is fixed on described upper supporting plate, and described the first wheel shaft and the second wheel shaft are arranged between described upper supporting plate and supporting substrate.
8. workpiece transfer device according to claim 1, is characterized in that, described transmission component comprises:
Be arranged on the guide rail on described supporting component, described guide rail is circular guideway, oval guide rail or straight bent guide rail;
The slide block that be positioned on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Described Power Component comprises:
Be arranged on described supporting component, take described guide rail as stator, the motor that the described slide block of take is mover.
9. workpiece transfer device according to claim 8, is characterized in that, described slide block can drive workpiece brace to realize automatically and workpiece transfer accurately as electric mover.
10. workpiece transfer device according to claim 8, is characterized in that, described supporting component comprises:
Supporting substrate;
Wherein, described motor is fixed on described supporting substrate.
11. according to the workpiece transfer device described in claim 2 or 8, it is characterized in that, described static is eliminated assembly and comprised:
Be arranged on the permanent seat of described guide rail top;
The rotary seat that is arranged on described permanent seat top, is rotatably connected with described permanent seat; Be fixed on the static eraser on described rotary seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310203784.3A CN104176431A (en) | 2013-05-28 | 2013-05-28 | Workpiece transmission device with electrostatic elimination function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310203784.3A CN104176431A (en) | 2013-05-28 | 2013-05-28 | Workpiece transmission device with electrostatic elimination function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104176431A true CN104176431A (en) | 2014-12-03 |
Family
ID=51957836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310203784.3A Pending CN104176431A (en) | 2013-05-28 | 2013-05-28 | Workpiece transmission device with electrostatic elimination function |
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| Country | Link |
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| CN (1) | CN104176431A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104925503A (en) * | 2014-03-17 | 2015-09-23 | 深圳富泰宏精密工业有限公司 | Conveying mechanism |
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| GB2166192A (en) * | 1984-10-17 | 1986-04-30 | Yoshida Kogyo Kk | Inspection apparatus for slide fasteners |
| CN101299899A (en) * | 2007-05-01 | 2008-11-05 | 株式会社未来视野 | Charge eliminating and conveying apparatus and charge eliminating method when conveying |
| CN101596942A (en) * | 2009-05-07 | 2009-12-09 | 长沙楚天科技有限公司 | Conveying device for large transfusion soft bag production line |
| CN101997386A (en) * | 2009-08-18 | 2011-03-30 | 株式会社安川电机 | Linear and curvilinear motor system |
| CN102502168A (en) * | 2011-10-14 | 2012-06-20 | 安徽佰瑞特日用品有限公司 | Transmission device for testing heat-insulating property of heat-insulating bottle liner |
| US20120228087A1 (en) * | 2009-09-29 | 2012-09-13 | Van Der Sluis Cigar Machinery B.V. | Transfer apparatus for transferring an item |
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2013
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2166192A (en) * | 1984-10-17 | 1986-04-30 | Yoshida Kogyo Kk | Inspection apparatus for slide fasteners |
| CN101299899A (en) * | 2007-05-01 | 2008-11-05 | 株式会社未来视野 | Charge eliminating and conveying apparatus and charge eliminating method when conveying |
| CN101596942A (en) * | 2009-05-07 | 2009-12-09 | 长沙楚天科技有限公司 | Conveying device for large transfusion soft bag production line |
| CN101997386A (en) * | 2009-08-18 | 2011-03-30 | 株式会社安川电机 | Linear and curvilinear motor system |
| US20120228087A1 (en) * | 2009-09-29 | 2012-09-13 | Van Der Sluis Cigar Machinery B.V. | Transfer apparatus for transferring an item |
| CN102502168A (en) * | 2011-10-14 | 2012-06-20 | 安徽佰瑞特日用品有限公司 | Transmission device for testing heat-insulating property of heat-insulating bottle liner |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104925503A (en) * | 2014-03-17 | 2015-09-23 | 深圳富泰宏精密工业有限公司 | Conveying mechanism |
| CN104925503B (en) * | 2014-03-17 | 2018-05-29 | 深圳富泰宏精密工业有限公司 | Transport mechanism |
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Application publication date: 20141203 |