200847586 、、 九、發明說明 【發明所屬之技術領域】 本發明，是有關於吸引力抵消形的線形馬達，特別是 有關構成其電樞將的2個電樞捲線的連線及捲線的冷卻。 【先前技術】 在相互平行延伸的2個場磁軛的相面對側在長度方向 將複數永久磁鐵的極性交互不同地配置而構成場磁極，另 一方面，具有槽及齒的電樞芯的槽中捲繞電樞捲線，從上 由上托板，且從下由下托板三明治狀地挾持電樞芯於中間 • 構成電樞，將場磁極及電樞的任一方作爲固定子及另一方 作爲可動件來構成線形馬達的技術是公知的（例如，專利 文獻1參照）。 第1 2圖〜第1 4圖是說明習知技術的線形馬達的圖， 第1 2圖是其正面剖面圖，第1 3圖是說明各相的電樞捲線 的連線關係的俯視圖，第14圖是其側面圖。 〔專利文獻1〕日本特開2000-22 8 860號公報 在第1 2圖中，在2個相面對配置的場磁軛2b的各相 面對側將複數永久磁鐵2a極性交互不同地直線狀（第1 2 圖的紙面的垂直方向）配置，在2個場磁極2之間隔著磁 性間隔將電樞1相面對配置。在成爲可動件的上托板1 c 的下方固定電樞芯1 b，電樞芯1 b是分別設置於U相、V 相、W相各相，在1個電樞芯1 b中分別捲繞2個電樞捲 線（線圈）1 a。這些的2個電樞捲線1 a，是如第1 3圖所 -4- 200847586BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor having an attraction canceling shape, and more particularly to cooling of a wire and a winding wire of two armature winding wires constituting the armature. [Prior Art] The polarities of the plurality of permanent magnets are alternately arranged in the longitudinal direction on the opposite sides of the two field yokes extending in parallel to each other to constitute a field magnetic pole, and on the other hand, an armature core having grooves and teeth The armature winding wire is wound in the groove, and the armature core is sandwiched between the upper and lower plates, and the armature core is sandwiched in the middle. The armature is formed, and either one of the field magnetic pole and the armature is used as a stator and the other. A technique in which one of the movable members constitutes a linear motor is known (for example, refer to Patent Document 1). Figs. 1 to 2 are diagrams for explaining a linear motor of the prior art, Fig. 22 is a front sectional view thereof, and Fig. 13 is a plan view showing a connection relationship of armature winding wires of each phase, Figure 14 is a side view of it. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2000-22 8 860. In Fig. 2, the plurality of permanent magnets 2a are alternately linearly crossed in different directions on the respective facing sides of the field yokes 2b facing each other. In the shape (the vertical direction of the paper surface of Fig. 2), the armatures 1 are arranged facing each other with magnetic intervals between the two field poles 2. The armature core 1 b is fixed below the upper pallet 1 c which becomes the movable member, and the armature cores 1 b are respectively disposed in the U phase, the V phase, and the W phase, and are respectively wound in one armature core 1 b Winding around 2 armature coils (coils) 1 a. These two armature windings 1 a are as shown in Figure 3-4.
\N 示將各相（u V W各相）的2個電樞捲線u 1 L及 V1L 及 V1R、W1L 及 W1R、U2L 及 U2R、V2L 及 W 2 L及W 2 R各別連線於連線基板9上，從電樞1 看是將UVW各相的馬達導線各別拉出1條的構造。 在第14圖中，上托板lc的下方使電樞芯lb 定於各相，在該各相的電樞芯1 b使電樞捲線1 a捲 (圖中，只有畫一方的電樞捲線），2個的各電樞j / 是相互由連線基板9連線（第13圖參照）。連線 線基板9的端部透過連接器7取出至電樞1的外部 藉由將這些的電樞捲線利用外部的控制裝置選 . 勵磁使電樞1及場磁極2逐次不吸引/反抗使電樞 磁極2相對移動而構成線形馬達。 但是，在習知裝置中，如第12圖〜第14圖所 樞捲線1 a彼此的連線因爲在電樞1的內部的連線 上進行，所以連線無法簡單地變更，而有無法對應 求的性能的缺點。 且，第12圖〜第14圖所示的線形馬達，當線 驅動時，電樞會發熱，且會傳熱至可動件基座或安 上的負荷而不佳。特別是吸引力抵消形線形馬達， 於液晶/半導體的製造裝置或檢查裝置、或是電子 裝裝置等，在這些的用途中，朝負荷的傳熱多爲其 瓶頸。 在此，以往已嘗試一些電樞捲線的冷卻。 第1 5圖是顯示具備習知的冷卻裝置的線形馬達 U1R、 V2R、 整體來 分別固 繞2圈 卷線la 是從連 〇 擇性地 1及場 不5電 基板9 任何要 形馬達 裝於其 多使用 零件實 最大的 -5- 200847586 在第15圖中，因爲與第12圖相同符號是具有相同功 會g，所以省略重複說明。第1 5圖與第1 2圖不同處，如第 1 5圖所示，是將冷卻配管3a配置於溫度上昇較高的電樞 芯1 b的側面。 藉此，電樞捲線1 a因爲是藉由冷卻配管3 a冷卻，所 以減少傳熱至可動件基座或安裝於其上的負荷。 但是，此情況，因爲有需要擴大電樞1及永久磁鐵2a ^ 行的磁性空隙，而有需犧牲馬達的電氣特性的缺點。 且，具備別的冷卻裝置的線形馬達也是公知的。 第1 6圖是顯示具備別的冷卻裝置的線形馬達。 在第16圖中，因爲與第12圖相同符號是具有相同功 會g，所以省略重複說明。第1 6圖處與第1 2圖不同處，如 第1 6圖所示，是將安裝了銅管4 i的冷卻套4 j配置於可動 件基座1 c上，藉由讓冷媒流動於銅管4i來進行冷卻。 藉此，電樞捲線1 a因爲是藉由冷卻配管4 i冷卻，所 以減少傳熱至可動件基座lc或安裝於其上的負荷。 但是，此情況，有致動器的體格變大的缺點。 在該習知裝置中，因爲有需要擴大電樞及永久磁鐵列 的磁性空隙，所以有需犧牲馬達的電氣特性的缺點，或致 動器的體格變大的缺點。 【發明內容】 〔發明的揭示〕 (本發明所欲解決的課題） -6- 200847586 如上述，在習知裝置中，如第12圖〜第14圖所示， 電樞捲線1 a彼此的連線因爲是在電樞1的內部的連線基 板9上進行’所以連線無法簡單地變更，而無法對應任何 連線要求。 且，如第15圖及第16圖所示，在習知裝置中，因爲 有需要擴大電樞及永久磁鐵列的磁性空隙，所以有需犧牲 馬達的電氣特性的缺點，或致動器的體格變大的缺點。 本發明的目的是爲了解決這些的課題，第1目的是提 供一種高效率的線形馬達，可抑制馬達驅動時的熱發生損 失，抑制朝負荷的傳熱。且，第2目的是提供一種線形馬 達，不會犧牲馬達的電氣特性，可抑制致動器體格的大型 (解決上述課題的手段） 爲了解決上述問題，申請專利範圍第1項的線形馬達 電樞的發明，是設有：包含齒及形成於前述的齒的各場磁 極側附近的2處的槽之電樞芯、及各別捲繞於前述槽的2 個電樞捲線、及將前述電樞芯從上及下三明治狀地挾在中 間的上托板及下托板，其特徵爲：在前述下托板安裝有端 子台，由連續捲取各別形成前述2個電樞捲線，分別將電 樞捲線的捲。 申請專利範圍第2項的發明，是如申請專利範圍第1 項的線形馬達電樞，前述各端子台的U V W各相是各別串 聯連線。 200847586 申請專利範圍第3項的發明，是如申請專利範圍第1 項的線形馬達電樞，前述各端子台的UVW各相是各別並 列連線。 申請專利範圍第4項的發明，是如申請專利範圍第1 項的線形馬達電樞，在前述的複數齒（稱主齒）的行程方 向前端及後端分別配置比前述主齒小形的補助齒。 申請專利範圍第5項的發明，是如申請專利範圍第1 項的線形馬達電樞，可取代各別將前述2個電樞捲線連續 捲取形成’而將前述2個電樞捲線的一端彼此直接相互連 線。 申請專利範圍第6項的線形馬達電樞的發明，是設有 :包含齒及形成於前述的齒的各場磁極側附近的2處的槽 之電樞芯、及各別捲繞於前述槽的2個電樞捲線，且由上 托板支撐前述電樞芯，其特徵爲：將具有使空氣朝向下方 噴出的複數空氣噴出口之冷卻配管設在前述電樞的底面。 申請專利範圍第7項的發明，是如申請專利範圍第6 項的線形馬達電樞，將前述的複數空氣噴出口等間隔地設 在前述冷卻配管。 申請專利範圍第8項的線形馬達的發明，其特徵爲， 具備：由相互平行延伸的2個場磁軛及在前述場磁軛的相 互面對側使極性在行程方向交互不同配置的複數的永久磁 鐵所構成的2個場恤極、及設在則述2個場磁極之間的申 請專利範圍第1〜7項的任一項的線形馬達電樞，前述場 磁極及前述電樞的任一方爲固定子及另一方爲可動件。 -8- 200847586 ν'- 申請專利範圍第9項的發明，是如申請專利範圍第8 項的線形馬達，前述場磁極是由：在行程方向比前述電樞 短的場磁軛呈直線狀配置的複數個主極永久磁鐵、及安裝 於前述場磁軛的行程方向兩端的補助極永久磁鐵所構成， 前述電樞爲固定件，前述場磁極爲可動件。 申請專利範圍第1 0項的發明，是如申請專利範圍第9 項的線形馬達，將與前述端子台連接的前述電樞捲線時間 " 地切換。 〔發明的效果〕 依據申請專利範圍第1項，因爲將兩側的電樞捲線連 續捲取’所以可以省略2個的電樞捲線彼此的連線過程， 提高生産性，進一步，藉由將各電樞捲線的捲取開始拉出 線及捲取結束拉出線與設在電樞外部的端子台連線，無連 線基板化就成爲可能，並且連線可簡單且自由地改變。 依據申請專利範圍第2項，藉由將各端子台的UVW 各相各別串聯連線，就可以抑制從電源供給的電流。 依據申請專利範圍第3項，藉由將各端子台的UVW 各相各別並列連線，就可以抑制電樞捲線的感應電壓，即 ，馬達行走速度可提高，可以對應被要求的任何馬達性能 〇 依據申請專利範圍第4項，不順暢現象就不易產生。 依據申請專利範圍第5項，即使使用既有的電樞捲線 也可達成與連續捲取的情況相同的效果，即，無連線基板 -9- 200847586 化成爲可能’並且連線可簡單且自由地改變。 依據申請專利範圍第6項，因爲將冷卻配管設在電樞 的底面，所以可獲得不會犧牲馬達的電氣特性且可抑制致 動器體格的大型化的無線形馬達。 依據申請專利範圍第7項，因爲將複數空氣噴出口等 間隔地設在冷卻配管，所以可以效率地進行冷卻。 依據申請專利範圍第8項，可獲得抑制馬達驅動時的 熱發生損失、抑制朝負荷的傳熱的高效率的線形馬達。 依據申請專利範圍第9項，由場磁軛、永久磁鐵、補 助極永久磁鐵構成的場磁極的行程方向長度因爲比電樞短 ，藉由將電樞作爲固定件，將場磁極作爲可動件，就可以 實現如馬達纜線不會纏繞的簡單的驅動機構。 依據申請專利範圍第1 0項，藉由時間地切換勵磁電 樞捲線，就可抑制馬達發生損失且高效率驅動。 【實施方式】 以下，參照圖式說明本發明的實施例。又’對於本發 明的與習知相同構成要素是附加同一符號省略重複說明， 只有說明不同點。 〔實施例1〕 第1圖〜第6圖是顯示本發明的實施例1的線形馬達 的說明圖。 第1圖是本發明的實施例1的線形馬達的正面剖面圖 -10- 200847586 V、 ，第2圖是第1圖的電磁部的俯視圖，第3圖是說明各相 的2個的電樞捲線的連續捲取的俯視圖，第4圖是線形馬 達的俯視圖，第5圖是其側面圖’第6圖是各電樞捲線的 連線電路圖。 在第1圖及第2圖中，在2個相面對配置的場磁軛2b 的各相面對側使複數永久磁鐵2a極性交互不同地直線狀 (第1圖的紙面的垂直方向）配置，在2個場磁極2之間 # 隔著磁性空隙配置電樞1。在成爲可動件的上托板lc的下 方固定電樞芯1 b，電樞芯1 b是分別設於U相、V相、W 相各相，在1個的電樞芯1 b中分別捲繞2個電樞捲線（ 線圈）1 a。 這些2個電樞捲線1 a的特徵，是如第3圖所示由線 圈跨線1 f各別連續捲取各相（UVW各相）的2個電樞捲 線 U1L 及 U1R、V1L 及 V1R、W1L 及 W1R、U2L 及 U2R 、V2L及V2R、W2L及W2R (不是在第13圖的連線基板 , 9上連線）而形成。 電樞芯1 b的1個形狀，是如第2圖的剖面線所示的 電樞芯1 b的形狀。即’ 1個電樞芯1 b的形狀，是分別在 :行程方向一方面中央的凹部、及行程方向另一方中央的 凸部、及行程方向的前述凹部、及前述凸部的中間與螺絲 孔直角的方向的兩端附近，各別將捲線收納用的槽1 s及2 個槽1 s連結的跨線溝〗k而形成。線圈跨線} f是被收納 保護於該跨線溝1 k內。 在第4圖及第5圖中’在上托板ic的下方電樞芯ib -11 - 200847586 vv (第2圖）是分別由螺絲1 m固定於各相。沿著下托板1 d 的行程方向在兩端設有端子台5，2個電樞捲線1 a (第1 圖）的兩端的拉出線1 η是連接於端子台5 (第5圖參照） 。在各端子台5的各相端子中分別連接纏繞馬達導線6並 連接於連接器7。將複數電樞捲線1 a如第6圖所示連接纏 繞右側的電樞捲線1 a的連線方法，是可以在連接器7 (第 4圖）側全部藉由連接簡單實現。 ， 且，將如第8圖（a)的連續捲取左右的電樞捲線la 進一步如第8圖（b )地分別在各相進行連接連線時，（ 即使不打開電樞1的內部）也可在第8圖的連接器7 (第 4圖）側使用開閉元件就可以簡單地實現。 如以上，在本實施例中，從各電樞捲線1 a的左右兩 側拉出的馬達導線之中將片側全部短路（第6圖參照）（ 即並列連線）的話，與串聯連線時相比因爲可以抑制感應 電壓（第6圖中是UVW各相各有5線圈，感應電壓是串 , 聯連線時成爲5分之1 )，成爲可對應高速驅動的要求。 且，電樞捲線1 a爲串聯連線（第8圖（b )參照）的 話，與並列連線時相比，可以抑制從電源供給至電樞的電 流（第5圖中UVW各相各有5線圈，供給電流成爲並列 連線時的5分之1 )。 在習知裝置中因爲在電樞1的內部的連線基板上進行 連線，所以連線無法簡單地變更，但是藉由將本發明的如 第8圖（a )的連續捲取的左右的電樞捲線1 a的各拉出線 1 η (第5圖）與位於電樞1的外部的端子台5連線，因爲 -12- 200847586 ν'* 由外部就可簡單實現各種連線，所以可對應任何要求的性 能0 〔實施例2〕 第7圖及第8圖是顯示本發明的線形馬達的實施例2 ，第7圖是電磁部結構的詳細圖，第8圖是說明捲線的連 線電路的圖，（a )是本發明的連續捲取的狀態的圖，（b )是實施例2的串聯連線後的電路圖。 在第7圖及第8圖中的特徵，是在行程方向比電樞】 短的場磁軛2 b呈直線狀配置複數個永久磁鐵2 a，且在場 磁軛2b的行程方向兩端安裝補助極永久磁鐵2c，電樞1 作爲固定件，場磁極2作爲可動件。 如第8圖（a )所示，在實施例2中，爲了讓感應於 UVW各相的電壓隨時保持三相平衡，從各電樞捲線的左 右兩側拉出的UVW各相是如第8圖（b )各別串聯連線。 第7圖及第8圖的例，雖是將全部的電樞捲線隨時勵磁， 但是時間地切換勵磁的電樞捲線也可以。由此，馬達驅動 時發生在電樞捲線的損失可被抑制至最小限度爲止，可高 效率驅動。 如上述，在線形馬達中，電樞捲線的連線因爲不是在 電樞內部的基板上進行，而是藉由將各電樞捲線在電樞外 部的端子台連線，就可讓電樞可動形或是場磁極可動形@ 任一種皆可適用，且，因爲連線方法可自由地改變，所以 可提供可對應任何要求的性能的馬達。 -13- 200847586 %、 又，在以上的例中，2個電樞捲線雖各別由連續捲取 形成，但是將既有的電樞捲線使用2個當然也可以。該情 況，2個的電樞捲線不透過連線基板連線，而是將2個的 電樞捲線的線圈端彼此隨著本發明直接連接，或者是由別 的導線取代線圈跨線1 f (第3圖）的部分也可以。 〔實施例3〕 本發明的實施例3的線形馬達冷卻方法是如第9圖〜 第1 1圖所示。 第9圖是實施了實施例3的冷卻方法之線形馬達的前 視圖’第1 0圖是第9圖的冷卻系統3 ( —點鎖線的框內） 的擴大圖，第1 1圖是線形馬達的平面圖。 實施例3的線形馬達冷卻方法的特徵，是在線形馬達 的電樞底面藉由配管固定部3b固定冷卻配管3a。 藉由如第9圖的結構，實施例3的冷卻系統3是如第 1 0圖所示，流入於冷卻配管3 a的空氣Lu是從空氣噴出 口 3c (第11圖）朝向固定件基座2d噴出，由該反射空氣 Lu冷卻電樞1，藉此可抑制朝負荷的傳熱。 如此，在實施例3中，藉由利用電樞的底面及固定件 基座間的空間進行冷卻，因爲不需增加致動器整體的體格 ，就可以抑制朝負荷的傳熱，所以可適用於液晶/半導體 的製造裝置或檢查裝置，或者是半導體實裝裝置等。 〔產業上的利用可能性〕 -14 - 200847586 本發明的線形馬達電樞，其捲繞於電樞的各齒的兩槽 的2個電樞捲線，是使用線圈跨線由連續捲取而形成，各 電樞捲線的捲取開始拉出線及捲取結束拉出線，因爲可以 由電樞外部的端子台在簡單實現連線，所以可提供對應任 何要求的性能的線形馬達，當然可適用於液晶/半導體的 製造裝置等。 【圖式簡單說明】 〔第1圖〕本發明的實施例1的線形馬達的正面剖面 圖。 〔第2圖〕實施例1的線形馬達的電磁部的俯視圖。 〔第3圖〕說明實施例1的各相的2個的電樞捲線的 連續捲取的俯視圖。 〔第4圖〕實施例1的線形馬達的俯視圖。 〔第5圖〕實施例1的線形馬達的側面圖。 〔第6圖〕實施例1的各電樞捲線的連線電路圖。 〔第7圖〕顯示本發明的實施例2的電磁部結構的詳 細圖。 〔第8圖〕說明本發明的實施例2的連線電路的圖， (a )是由本發明的連續捲取的狀態的圖，（b )是實施例 2的串聯連線後的電路圖。 〔第9圖〕實施了本發明的實施例3的冷卻方法之線 形馬達的前視圖。 〔第1 〇圖〕第9圖的冷卻系統3 ( —點鎖線的框內） -15- 200847586 的擴大圖。 〔第1 1圖〕本發明的實施例3所適用的線形馬達的 平面圖。 〔第1 2圖〕習知技術的線形馬達的正面剖面圖。 〔第1 3圖〕說明各相的電樞捲線的連線關係的俯視 圖。 〔第1 4圖〕習知技術的線形馬達的側面圖。 〔第1 5圖〕具備習知技術的冷卻裝置的線形馬達的 正面剖面圖。 〔第1 6圖〕具備習知技術的別的冷卻裝置的線形馬 達的正面剖面圖。 【主要元件符號說明】\N shows that the two armature windings u 1 L and V1L and V1R, W1L and W1R, U2L and U2R, V2L and W 2 L and W 2 R of each phase (u VW phase) are connected to each other. The substrate 9 has a structure in which one motor wire of each phase of the UVW is pulled out from the armature 1. In Fig. 14, the armature core 1b is positioned in each phase below the upper pallet lc, and the armature core 1b of the respective phases causes the armature winding 1a to be wound (in the figure, only one armature winding is drawn) The two armatures j / are connected to each other by the wiring board 9 (refer to Fig. 13). The ends of the wiring board 9 are taken out to the outside of the armature 1 through the connector 7, and these armature windings are selected by an external control device. The excitation causes the armature 1 and the field pole 2 to be attracted/reacted one by one. The armature pole 2 moves relative to each other to form a linear motor. However, in the conventional device, since the connection between the pivot wires 1a of Figs. 12 to 14 is performed on the connection line inside the armature 1, the connection cannot be easily changed, and there is no correspondence. The shortcomings of performance. Further, in the linear motor shown in Figs. 12 to 14, when the wire is driven, the armature generates heat, and the load which is transferred to the base of the movable member or mounted is not good. In particular, the attraction cancels the linear motor, the liquid crystal/semiconductor manufacturing apparatus, the inspection apparatus, or the electronic equipment. In these applications, heat transfer to the load is often a bottleneck. Here, some cooling of the armature winding has been attempted in the past. Fig. 15 is a view showing a linear motor U1R, V2R having a conventional cooling device, and integrally winding two coils of la, respectively, from the substrate 1 and the field 5 to the substrate 9 The most used part is the most -5-200847586. In the 15th figure, since the same symbol as that of the 12th figure has the same function g, the repeated description is omitted. The fifth and fourth figures are different from the first and second views. As shown in Fig. 15, the cooling pipe 3a is disposed on the side surface of the armature core 1b having a high temperature rise. Thereby, the armature winding 1a is cooled by the cooling pipe 3a, so that the heat transfer to the movable member base or the load attached thereto is reduced. However, in this case, since it is necessary to enlarge the magnetic gap of the armature 1 and the permanent magnet 2a, there is a disadvantage that the electrical characteristics of the motor are sacrificed. Moreover, linear motors having other cooling devices are also known. Figure 16 shows a linear motor with additional cooling devices. In Fig. 16, since the same reference numerals as in Fig. 12 have the same function g, the overlapping description will be omitted. The first six figure is different from the first one, and as shown in Fig. 16, the cooling jacket 4 j on which the copper pipe 4 i is mounted is disposed on the movable base 1 c by allowing the refrigerant to flow. The copper tube 4i is cooled. Thereby, the armature winding 1a is cooled by the cooling pipe 4i, so that the heat transfer to the movable base lc or the load attached thereto is reduced. However, in this case, there is a disadvantage that the physique of the actuator becomes large. In this conventional device, since it is necessary to enlarge the magnetic gap of the armature and the permanent magnet array, there is a disadvantage that the electrical characteristics of the motor are required to be sacrificed, or the physique of the actuator is increased. [Disclosure of the Invention] [Disclosure of the Invention] (Problems to be Solved by the Invention) -6- 200847586 As described above, in the conventional device, as shown in Figs. 12 to 14, the armature windings 1a are connected to each other. Since the line is performed on the wiring board 9 inside the armature 1, the connection cannot be easily changed, and it is not possible to cope with any connection request. Further, as shown in Figs. 15 and 16, in the conventional device, since it is necessary to enlarge the magnetic gap of the armature and the permanent magnet array, there is a disadvantage of sacrificing the electrical characteristics of the motor or the physique of the actuator. The disadvantage of getting bigger. SUMMARY OF THE INVENTION An object of the present invention is to provide a high-efficiency linear motor which can suppress heat loss during motor driving and suppress heat transfer to a load. Further, a second object is to provide a linear motor which can suppress the large size of the actuator without sacrificing the electrical characteristics of the motor (means for solving the above problems). To solve the above problem, the linear motor armature of the first application of the patent scope is claimed. The invention is characterized in that: an armature core including teeth and two grooves formed in the vicinity of each field magnetic pole side of the teeth, and two armature winding wires respectively wound around the grooves, and the electric The upper support plate and the lower support plate in which the pivot core is sandwiched between the upper and lower sandwiches, wherein the lower support plate is provided with a terminal block, and the two armature winding wires are formed by continuous winding, respectively. Roll the armature to the coil. The invention of claim 2 is a linear motor armature according to the first aspect of the patent application, and each of the U V W phases of the respective terminal blocks is a separate serial connection. 200847586 The invention of claim 3 is a linear motor armature according to claim 1, wherein the UVW phases of the respective terminal blocks are individually connected in parallel. The invention of claim 4 is the linear motor armature according to the first aspect of the patent application, wherein the auxiliary teeth having a smaller shape than the main teeth are disposed at the front end and the rear end of the plurality of teeth (referred to as main teeth) in the stroke direction. . The invention of claim 5 is a linear motor armature according to claim 1 of the patent application, which can replace the two armature windings continuously to form a 'and one end of the two armature windings to each other. Directly connected to each other. The invention of the linear motor armature according to claim 6 is characterized in that: an armature core including teeth and two grooves formed in the vicinity of each field magnetic pole side of the teeth is formed, and each is wound around the groove The two armature winding wires support the armature core by the upper pallet, and are characterized in that a cooling pipe having a plurality of air ejection ports that discharge air downward is provided on a bottom surface of the armature. The invention of claim 7 is the linear motor armature according to claim 6 of the patent application, wherein the plurality of air ejection ports are provided at equal intervals in the cooling pipe. The invention of the linear motor of claim 8 is characterized in that: two field yokes extending in parallel with each other and plural sides in which the polarities are alternately arranged in the stroke direction on the mutually facing sides of the field yoke A linear motor armature of any one of the first and seventh embodiments of the present invention, wherein the field pole and the armature are provided One side is a fixed piece and the other side is a movable piece. -8-200847586 ν'- The invention of claim 9 is the linear motor of claim 8, wherein the field pole is linearly arranged in a field yoke having a stroke direction shorter than the armature. The plurality of main pole permanent magnets and the auxiliary pole permanent magnets attached to both ends of the field yoke in the stroke direction, wherein the armature is a fixed member, and the field magnet is a movable member. According to the invention of claim 10, the linear motor of claim 9 is switched, and the armature winding time connected to the terminal block is switched. [Effects of the Invention] According to the first item of the patent application, since the armature windings on both sides are continuously wound up, it is possible to omit the connection process of the two armature windings, thereby improving productivity, and further, by The take-up start pull-out line and the take-up end pull-out line of the armature take-up wire are connected to the terminal block provided outside the armature, and it is possible to realize the connection without the connection, and the connection can be easily and freely changed. According to the second item of the patent application, the current supplied from the power source can be suppressed by connecting the UVW phases of the respective terminal blocks in series. According to the third item of the patent application scope, by connecting the UVW phases of the respective terminal blocks in parallel, the induced voltage of the armature winding wire can be suppressed, that is, the motor traveling speed can be increased, and any motor performance required can be matched. 〇 According to item 4 of the scope of patent application, it is not easy to produce a phenomenon that is not smooth. According to the fifth item of the patent application, even if the existing armature winding is used, the same effect as in the case of continuous winding can be achieved, that is, the unconnected substrate -9-200847586 becomes possible' and the connection can be simple and free. Change. According to the sixth aspect of the patent application, since the cooling pipe is provided on the bottom surface of the armature, a wireless motor capable of suppressing the electrical characteristics of the motor and suppressing an increase in the size of the actuator can be obtained. According to the seventh aspect of the patent application, since the plurality of air ejection ports are provided at intervals in the cooling pipe, the cooling can be performed efficiently. According to the eighth aspect of the patent application, a highly efficient linear motor that suppresses heat loss during motor driving and suppresses heat transfer to load can be obtained. According to the ninth application patent range, the length of the field pole formed by the field yoke, the permanent magnet, and the auxiliary pole permanent magnet is shorter than that of the armature, and the field pole is used as the movable member by using the armature as a fixing member. A simple drive mechanism such as a motor cable that does not wrap around can be realized. According to the tenth application patent range, by switching the field armature winding time, it is possible to suppress the loss of the motor and drive it with high efficiency. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The same components as those in the present invention are denoted by the same reference numerals, and the description thereof will not be repeated, and only the differences will be described. [Embodiment 1] Figs. 1 to 6 are explanatory views showing a linear motor according to a first embodiment of the present invention. Fig. 1 is a front sectional view of a linear motor according to a first embodiment of the present invention. -10- 200847586 V, Fig. 2 is a plan view of the electromagnetic portion of Fig. 1, and Fig. 3 is a view showing two armatures of each phase. A plan view of the continuous winding of the winding wire, Fig. 4 is a plan view of the linear motor, and Fig. 5 is a side view thereof. Fig. 6 is a wiring circuit diagram of each armature winding wire. In the first and second figures, the plurality of permanent magnets 2a are linearly arranged in a different polarity (the vertical direction of the paper surface in the first drawing) in the mutually opposite sides of the respective fields yokes 2b facing each other. The armature 1 is disposed between the two field poles 2 via a magnetic gap. The armature core 1b is fixed under the upper pallet lc which is a movable member, and the armature cores 1b are respectively disposed in the U phase, the V phase, and the W phase, and are respectively wound in one armature core 1b. Winding around 2 armature coils (coils) 1 a. The two armature winding wires 1 a are characterized in that two armature winding wires U1L and U1R, V1L and V1R of each phase (UVW phase) are continuously wound by the coil jumper 1 f as shown in Fig. 3, W1L and W1R, U2L and U2R, V2L and V2R, W2L and W2R (not connected to the wiring substrate of Fig. 13, and 9 are connected). The shape of the armature core 1 b is the shape of the armature core 1 b as shown by the hatching in Fig. 2 . That is, the shape of the one armature core 1 b is a concave portion at the center of the stroke direction, a convex portion at the center of the other stroke direction, and the concave portion in the stroke direction, and the middle of the convex portion and the screw hole. In the vicinity of both ends in the direction of the right angle, each of the grooves 1 s for winding the wire and the overhang groove k for connecting the two grooves 1 s are formed. The coil jumper}f is housed and protected within 1 k of the overrunning groove. In Figs. 4 and 5, the armature cores ib-11 - 200847586 vv (Fig. 2) below the upper pallet ic are respectively fixed to the respective phases by screws 1 m. The terminal block 5 is provided at both ends along the stroke direction of the lower pallet 1 d, and the pull-out wires 1 η at both ends of the two armature winding wires 1 a (first FIG. 1 ) are connected to the terminal block 5 (refer to FIG. 5 ). A motor lead 6 is wound around each of the phase terminals of each terminal block 5 and connected to the connector 7. The connection method of connecting the plurality of armature winding wires 1 a to the armature winding wires 1 a wound around the right side as shown in Fig. 6 can be simply realized by the connection on the side of the connector 7 (Fig. 4). Further, as shown in Fig. 8(a), the right and left armature windings la are further connected to the respective phases as shown in Fig. 8(b) (even if the inside of the armature 1 is not opened). It can also be easily realized by using an opening and closing element on the side of the connector 7 (Fig. 4) of Fig. 8. As described above, in the present embodiment, when all of the motor wires drawn from the left and right sides of each armature winding 1a are short-circuited on the chip side (refer to FIG. 6) (that is, parallel connection), when connected in series, In contrast, since the induced voltage can be suppressed (in FIG. 6, there are five coils in each phase of the UVW, the induced voltage is a string, and the number of the connected wires is one-fifth), which is a requirement for high-speed driving. Further, when the armature winding 1a is a series connection (refer to FIG. 8(b)), the current supplied from the power source to the armature can be suppressed as compared with the case of parallel connection (the UVW phases in FIG. 5 have each 5 coils, the supply current is one-fifth of the time when the wires are connected in parallel). In the conventional device, since the connection is made on the wiring substrate inside the armature 1, the connection cannot be easily changed, but by continuously winding the left and right of the present invention as shown in Fig. 8(a) Each of the pull-out wires 1 η (Fig. 5) of the armature winding 1a is connected to the terminal block 5 located outside the armature 1, because -12-200847586 ν'* can be easily realized from the outside, so that various connections can be easily realized. Corresponding to any required performance 0 [Embodiment 2] Figs. 7 and 8 are diagrams showing Embodiment 2 of the linear motor of the present invention, Fig. 7 is a detailed view of the structure of the electromagnetic portion, and Fig. 8 is a diagram showing the connection of the winding The diagram of the line circuit, (a) is a diagram of the state of continuous winding of the present invention, and (b) is a circuit diagram of the series connection of the second embodiment. The features in Figs. 7 and 8 are that a plurality of permanent magnets 2a are arranged linearly in the field yoke 2b having a shorter stroke direction than the armature, and are mounted at both ends of the field yoke 2b in the stroke direction. The permanent magnet 2c is assisted, the armature 1 is used as a fixing member, and the field pole 2 is used as a movable member. As shown in Fig. 8(a), in the second embodiment, in order to maintain the three-phase balance of the voltages inducing the UVW phases, the UVW phases pulled out from the left and right sides of each armature winding are as the eighth. Figure (b) is connected in series. In the examples of Figs. 7 and 8, the armature windings may be excited at all times, but the armature windings may be switched in time. As a result, the loss of the armature winding at the time of motor driving can be suppressed to a minimum, and the driving can be performed with high efficiency. As described above, in the linear motor, the armature winding wire is made to be movable on the substrate inside the armature, but by connecting the armature winding wires to the terminal block outside the armature, the armature can be moved. Any of the shapes or field poles can be applied, and since the wiring method can be freely changed, a motor that can match any desired performance can be provided. -13- 200847586% Further, in the above example, the two armature winding wires are each formed by continuous winding, but it is also possible to use two of the existing armature winding wires. In this case, the two armature winding wires do not pass through the wiring substrate connection, but the coil ends of the two armature winding wires are directly connected to each other according to the present invention, or the coil wires 1f are replaced by other wires ( The part of Fig. 3) is also available. [Embodiment 3] The linear motor cooling method of Embodiment 3 of the present invention is as shown in Figs. 9 to 11. Fig. 9 is a front view of the linear motor in which the cooling method of the third embodiment is carried out. Fig. 10 is an enlarged view of the cooling system 3 (in the frame of the dot lock line) of Fig. 9, and Fig. 1 is a linear motor. Floor plan. The linear motor cooling method of the third embodiment is characterized in that the cooling pipe 3a is fixed to the bottom surface of the armature of the linear motor by the pipe fixing portion 3b. According to the configuration of Fig. 9, the cooling system 3 of the third embodiment is as shown in Fig. 10, and the air Lu flowing into the cooling pipe 3a is from the air ejection port 3c (Fig. 11) toward the holder base. 2d is ejected, and the armature 1 is cooled by the reflected air Lu, whereby heat transfer to the load can be suppressed. As described above, in the third embodiment, since the space between the bottom surface of the armature and the base of the stator is used for cooling, since the heat transfer to the load can be suppressed without increasing the physique of the entire actuator, it can be applied to the liquid crystal. / Semiconductor manufacturing device or inspection device, or semiconductor mounting device. [Industrial Applicability] -14 - 200847586 The linear motor armature of the present invention is formed by winding two coils wound in two slots of each arm of the armature by continuous winding. The take-up start pull-out line and the take-up end pull-out line of each armature take-up wire can be provided by a terminal block external to the armature, so that a linear motor corresponding to any required performance can be provided, of course, applicable In a liquid crystal/semiconductor manufacturing device. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A front cross-sectional view of a linear motor according to a first embodiment of the present invention. [Fig. 2] A plan view of an electromagnetic portion of the linear motor of the first embodiment. [Fig. 3] A plan view showing the continuous winding of the two armature winding wires of the respective phases of the first embodiment. [Fig. 4] A plan view of the linear motor of the first embodiment. [Fig. 5] A side view of the linear motor of the first embodiment. [Fig. 6] A circuit diagram of the wiring of each armature winding of the first embodiment. [Fig. 7] shows a detailed view of the structure of the electromagnetic portion of the second embodiment of the present invention. [Fig. 8] A diagram showing a wiring circuit according to a second embodiment of the present invention, wherein (a) is a view of a state in which the present invention is continuously wound up, and (b) is a circuit diagram in which a series connection of the second embodiment is performed. [Fig. 9] A front view of a linear motor in which the cooling method of the third embodiment of the present invention is carried out. [Picture 1] The cooling system 3 (in the frame of the point lock line) of Figure 9 is an enlarged view of -15-200847586. [Fig. 1] A plan view of a linear motor to which Embodiment 3 of the present invention is applied. [Fig. 1 2] A front sectional view of a linear motor of the prior art. [Fig. 1 3] is a plan view showing the connection relationship of the armature winding wires of the respective phases. [Fig. 14] A side view of a linear motor of the prior art. [Fig. 15] A front cross-sectional view of a linear motor including a conventional cooling device. [Fig. 16] A front cross-sectional view of a linear motor having another cooling device of the prior art. [Main component symbol description]
Lu :空氣 1 :電樞 1 a :電樞捲線（線圈） 1 b :電樞芯 1 c :上托板 1 C :可動件基座 1 d :下托板 1 f :線圈跨線 1 k :跨線溝 1 m :螺絲 1 n :(捲取開始、捲取結束）拉出線 -16- 200847586Lu : Air 1 : Armature 1 a : Armature winding (coil) 1 b : Armature core 1 c : Upper pallet 1 C : Movable member base 1 d : Lower pallet 1 f : Coil span 1 k : Over the line groove 1 m : Screw 1 n : (winding start, winding end) Pull out line -16 - 200847586
Is :槽 2 :場磁極 2a:永久磁鐵（主極） 2b :場磁軛 2 c :永久磁鐵（補助極） 2d :固定件基座 3 :冷卻系統 3 a :冷卻配管 3b :配管固定部 3c :空氣噴出口 4i :冷卻配管（銅管） 4j :冷卻套 5 ·牺子台 6 :馬達導線 7 :連接器 9 :連線基板 -17-Is : slot 2 : field pole 2a : permanent magnet (main pole) 2b : field yoke 2 c : permanent magnet (substitute pole) 2d : stator base 3 : cooling system 3 a : cooling pipe 3b : pipe fixing portion 3c : Air outlet 4i: Cooling piping (copper pipe) 4j: Cooling jacket 5 · Shengzitai 6: Motor wire 7: Connector 9: Connection board -17-