200841381 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種半導裝體裝備之化學藥品供給裝置，尤 * 其涉及將用於半導體晶圓（wafe〇或平板顯示裝置（Flat . Panel DisPlay: FPD)製程之化學藥品自容器罐（Canister)輸 送至緩衝器，從而使化學藥品穩定地供給至化學藥品供給 裝置。 【先前技術】 _ 圖1為先前技術之化學藥品供給裝置之概要圖。 如圖所示之先前技術之化學藥品供給裝置大體由容器罐 10及緩衝器20構成，其中該容器罐10用於灌入化學藥品原 料，該緩衝器20用於接收灌入於該容器罐1〇内之化學藥品 (以下稱為藥液），以便將該化學藥品穩定地供給至半導體 裝備25。 該容器罐10内灌入藥液Ub，該藥液llb灌裝於膠袋形式 之藥液袋11而被供給。 ^ 此時，該藥液袋11内灌人藥液11b及作為溶媒之惰性氣 體或氮氣11 a。 * 如上所述之藥液袋11安裝成使輸送管16浸潰於其内部， ^ 而該輸送管16貫通設置於容器罐10中央。藥液袋U經由該 輸送管16向緩衝器2〇供給藥液lib。 此時’該緩衝器20位於容器罐10之上部，由此需要有將 該藥液lib強制輸送至缓衝器20之強制輸送裝置。 該強制輸送裝置可以使用如圖1所示之加壓泵13，該加 130329.doc 200841381 Μ果13起到南谷益罐ι〇内部壓力之作用。 根據该加遂泵13之作用提高容器罐内部之壓力，進而 壓縮藥液袋，並根據該壓縮力將藥液袋i丨内部之藥液！ “ 為 輸送至緩衝器20。 • 輸送至該緩衝器20之藥液Hb再經由排出閥24輸送至半 導體裝備25。此時，可以使藥液同時供給至多個半導體裝 備，此時該緩衝器20以穩定之壓力及輸送速度將一定量= 灌入之藥液11 b供給至一個或多個半導體裝備25。 鲁 該緩衝器20之上部設有氣泡排氣闕26，以用於將包含在 樂液11 b裹之氣泡向外部排出。 並且，在該緩衝器20之一側設有水位感應器23，以用於 偵測灌入之藥液1 lb之水位，並使藥液i lb之灌入狀態始終 保持一定水位以上。 設置如上所述之水位感應器23之理由為預防氣體經由排 出閥24流入至半導體裝備25。 φ 但是，如上所述先前技術之化學藥品供給裝置當儲存在 容器罐ίο之藥液Ub達到殘量（1⑽〜5〇〇 cc)時，供給至緩衝 器2 0之流速變得非常快。 此犄，如上所述若藥液Ub之流速被提高，則惰性氣體 - Ua在藥液llb内混雜成微細之氣泡狀態，從而產生泡沫。 此日守因為產生之氣泡體積很小，所以輸送至緩衝器2〇 後不肊上升至藥液1 lb之上層而混雜在藥液丨lb内之情況下 被硬化，從而對排管系統及機器造成故障。 因此，目前由於這種原因不能用盡藥液Ub，而是在剩 130329.doc 200841381 有100〜500 CC左右之情況下被廢棄。從而導致材料浪費及 過程縮短等嚴重問題。 ' 【發明内容】 本發明係為了解決上述問題而提出的，其目之在於提供 一種當所測定容器罐内之藥液之殘量為基準值以下時，緩 衝器執行低速真空吸入工作之化學藥品供給裝置。 本發明之另-目之在於提供一種無殘量地全部用盡藥液200841381 IX. Description of the Invention: [Technical Field] The present invention relates to a chemical supply device for semi-conductive body equipment, particularly to a semiconductor wafer (wafer. Panel DisPlay) : FPD) Process chemicals are transported from a canister to a buffer to stably supply chemicals to the chemical supply device. [Prior Art] FIG. 1 is a schematic view of a prior art chemical supply device. The chemical supply device of the prior art as shown in the drawing is generally constituted by a container can 10 for filling a chemical raw material, and a buffer 20 for receiving and filling the canister 1 a chemical (hereinafter referred to as a chemical liquid) in the crucible to stably supply the chemical to the semiconductor device 25. The container 10 is filled with a chemical liquid Ub, and the liquid is filled in a plastic bag form The bag 11 is supplied. ^ At this time, the drug solution bag 11 is filled with the drug solution 11b and the inert gas or nitrogen gas 11 a as a solvent. * The drug solution bag 11 as described above is mounted for transport. 16 is immersed in the inside thereof, and the transfer pipe 16 is disposed through the center of the container tank 10. The drug solution bag U supplies the drug solution lib to the damper 2 via the transfer tube 16. At this time, the buffer 20 is located in the container can. The upper part of 10, thus requiring a forced conveying device for forcibly conveying the chemical solution lib to the buffer 20. The forced conveying device can use the pressure pump 13 as shown in Fig. 1, which adds 130329.doc 200841381 13 acts as the internal pressure of the Nanguyi tank 。. According to the action of the twisting pump 13, the pressure inside the container can be increased, and the liquid medicine bag is compressed, and the liquid medicine inside the liquid medicine bag is licked according to the compression force! "For delivery to the buffer 20. The chemical liquid Hb delivered to the buffer 20 is then delivered to the semiconductor device 25 via the discharge valve 24. At this time, the chemical liquid can be simultaneously supplied to the plurality of semiconductor devices, at which time the buffer 20 A certain amount of the injected chemical solution 11b is supplied to one or more semiconductor devices 25 at a steady pressure and a conveying speed. The upper portion of the buffer 20 is provided with a bubble exhaust port 26 for inclusion in the music The bubble wrapped in the liquid 11 b is discharged to the outside. Moreover, a water level sensor 23 is disposed on one side of the buffer 20 for detecting the water level of the injected liquid of 1 lb, and the filling state of the liquid medicine i lb is always maintained above a certain water level. The reason for the water level sensor 23 is to prevent the gas from flowing into the semiconductor device 25 via the discharge valve 24. φ However, the chemical supply device of the prior art as described above when the drug liquid Ub stored in the container can reach the residual amount (1 (10) When it is ~5 〇〇 cc), the flow rate supplied to the damper 20 becomes very fast. Thus, as described above, if the flow rate of the chemical liquid Ub is increased, the inert gas - Ua is mixed into the fine liquid in the liquid llb. Bubble state, resulting in foam. Since the volume of the bubble generated is small, it is sent to the buffer 2 and then rises to the upper layer of the liquid medicine 1 lb and is mixed in the liquid medicine lb to be hardened, thereby arranging the piping system and the machine. Caused a malfunction. Therefore, for this reason, the chemical liquid Ub cannot be used up, but it is discarded when the remaining 130329.doc 200841381 has a temperature of about 100 to 500 CC. This leads to serious problems such as material waste and process shortening. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a chemical which performs a low-speed vacuum suction operation when a residual amount of a chemical liquid in a measured canister is below a reference value. Supply device. Another object of the present invention is to provide a drug-free solution that is completely free of residuals.
袋内之藥液，並在殘量藥液内不產生氣泡之化學藥品供汰 裝置。 … 為了實現上述目的，本發明所提供之化學藥品供給裝置 包括：用於灌入藥液之容轉；緩衝器，其下部設有用於 接收該容器罐内之藥液後向半導體裝備輸送之排出閥，在 上部形成用於向外部排出包含於該藥液裏之氣泡之氣泡排 氣閥；殘量測定裝置，以用於測定該容器罐内藥液之殘 量；及體積可變裝置，以用於當利用該殘量測定裝置進行 之測定結果為容器罐内之藥液殘量在基準值以下時，使緩 衝器内藥液之收容空間收縮及膨脹，&而吸入容器罐内之 藥液。 在此，該容器罐之内部具有灌入藥液之藥液袋，該化學 某i、衣置具有為了提高該容器罐之内部壓力而壓縮該 藥液袋之加壓泵。 此枯，該緩衝斋設有水位感應器，以用於測定灌入之藥 液之水位。 並且，該體積可變裝置包括：分別設置於缓衝器之内部 130329.doc 200841381 左右側之膜部件，該膜部件為了能夠任意收縮膨脹形成於 膜部件之間之收容空間而向左右方向進行收縮膨脹動作； 及可變致動器，以用於使該膜部件進行收縮膨脹動作。 在此，在該膜部件使用隔膜（Diaphragm)、褶皺管及橡 膠板中之某一個。 此時，該膜部件製作成球體形狀，並在該球體之下部連 接輸送管，上部連接氣泡排氣閥，而連接著該輸送管之一 側連接排出閥。 並且，該可變致動器使用加/減壓泵或汽缸。 並且，當容器罐内藥液之殘量在基準值以下時，該可變 致動裔進4亍減壓驅動。 此時，該殘量基準值為100〜500 cc。 在此，根據該體積可變裝置之真空吸入速度為小於1〇 cc/s 之流速。 並且’該殘量測定裝置使用設在容器罐底面之測壓元件 或設在輸送管之壓力感應器，其中，該測壓元件用於偵測 容器罐之重量變化。 【實施方式】 以下，參照附圖詳細說明本發明之較佳實施例。 <實施例1 > 圖2為本發明之第一實施例所提供之化學藥品供給裝置 之整體結構之概要圖。 如圖所示，本發明所提供之化學藥品供給裝置大體由容 器罐100及緩衝态200構成，該容器罐1⑽用於灌入化學藥 I30329.doc 200841381 品原料，而該緩衝器2〇〇用於接收灌入於該容器罐1〇〇内之 化學藥品（以下稱為藥液），以便將藥品穩定地供給至半導 體裝備250。 該容器罐100内灌入藥液113，該藥液113灌裝於膠袋形 式之藥液袋11而被供給。 此時，該藥液袋110内灌入藥液113及作為溶媒之惰性氣 體或氮氣111。A chemical solution in the bag and a chemical supply device that does not generate bubbles in the residual drug solution. In order to achieve the above object, the chemical supply device provided by the present invention comprises: a volume transfer for injecting a liquid medicine; a buffer, the lower portion of which is provided with a discharge for receiving the liquid medicine in the container tank and then transporting it to the semiconductor equipment. a valve, at the upper portion, a bubble exhaust valve for discharging air bubbles contained in the chemical liquid to the outside; a residual amount measuring device for measuring a residual amount of the chemical liquid in the container; and a volume variable device When the measurement result by the residual amount measuring device is that the residual amount of the chemical liquid in the container is below the reference value, the storage space of the chemical liquid in the buffer is contracted and expanded, and the medicine in the container is sucked. liquid. Here, the inside of the container tank has a drug solution bag filled with a drug solution, and the chemical device has a pressure pump for compressing the drug solution bag in order to increase the internal pressure of the container. In this case, the buffer has a water level sensor for determining the water level of the liquid to be poured. Further, the variable volume device includes film members respectively disposed on the left and right sides of the interior of the buffer 130329.doc 200841381, and the film member is contracted to the left and right direction in order to be arbitrarily contracted and expanded to form a housing space between the film members. An expansion action; and a variable actuator for causing the film member to undergo a contraction expansion operation. Here, one of a diaphragm (diaphragm), a pleated tube, and a rubber sheet is used for the film member. At this time, the film member is formed into a spherical shape, and a conveying pipe is connected to the lower portion of the spherical body, and a bubble exhaust valve is connected to the upper portion, and a discharge valve is connected to one side of the conveying pipe. Also, the variable actuator uses an add/drop pump or a cylinder. Further, when the residual amount of the liquid medicine in the container tank is below the reference value, the variable activator is driven by a reduced pressure. At this time, the residual reference value is 100 to 500 cc. Here, the vacuum suction speed of the volume variable device is a flow rate of less than 1 〇 cc/s. And the residual amount measuring device uses a load cell provided on the bottom surface of the container tank or a pressure sensor provided in the transfer tube, wherein the load cell is used to detect a change in the weight of the container can. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. <Example 1> Fig. 2 is a schematic view showing the overall configuration of a chemical supply device according to a first embodiment of the present invention. As shown in the figure, the chemical supply device provided by the present invention is generally composed of a container can 100 and a buffer state 200, and the container can 1 (10) is used for injecting chemical materials I30329.doc 200841381, and the buffer 2 is used. The chemical (hereinafter referred to as a chemical liquid) poured into the container can be received to stably supply the drug to the semiconductor device 250. The container tank 100 is filled with a chemical solution 113 which is filled in a plastic bag 11 in the form of a plastic bag and supplied. At this time, the drug solution bag 110 is filled with the drug solution 113 and an inert gas or nitrogen gas 111 as a solvent.
如上所述藥液袋m安裝成使輸送管16〇浸潰於其内部， 而該輸送管160貫通設置於容器罐100中央。藥液袋11〇經 由該輪送管160向緩衝器200供給藥液113。 此時，該緩衝器200位於容器罐100之上部，由此需要有 將該藥液113強制輸送至緩衝器200之強制輸送裝置。 资上述強制輸送裝置可使用如圖2所示之加麼泵13()，該加 壓泵130起到提高容器罐1〇〇内部壓力之作用。 根據„亥加磨泵130之作用提高容器罐⑽内部之麼力，進 而壓縮藥液袋’並根據該壓縮力將藥液袋ιι〇内部之藥液 113輸送至緩衝器200。 雨运至該緩衝H2GG之藥液113再經由排出閥24〇輸送至 •導體裝備250。此時’可以使藥液同時供給至多個該半 導體裝備250’此時該緩衝器2〇〇將灌入之一定量之藥、夜 較之麗力及輸送速度供給至—個或多個半導體裝 該緩衝裔200之上部設有用於 ^ 將包合在樂液113裏之氣泡 σ卜。P排出之氣泡排氣閥26〇。 130329.doc 200841381 並且，在該緩衝器200之一側面設有水位感應器230，以 用於偵測灌入之藥液lib之水位，並使藥液113之灌入狀態 始終保持一定水位以上。 設置如上所述之水位感應器230之理由係為了預防氣體 經由排出閥240流入至半導體裝備250。 並且，在該缓衝器200之内部設置用於任意改變藥液^3 之灌入空間大小之體積可變裝置。 該體積可變裝置包括：分別設置於缓衝器2〇〇之内部左 右側之膜部件210，該膜部件21〇為了能夠任意地收縮膨脹 灌入於膜部件210之間之藥液113之收容空間而向左右方向 進行收縮膨脹動作；及可變致動器220，以用於改變該膜 部件210之形態及位置。 如圖2所示’膜部件210可使用隔膜，褶皺管及橡膠板等 形態變形自由之材料。 並且，用於改變該膜部件21〇之可變致動器22〇可使用加/ 減壓泵。 通常，該加/減壓泵使膜部件210與緩衝器2〇〇之間之空 間形成高壓狀態，從而使膜部件21G向緩衝器之中心膨 脹，由此將藥液113之收容空間維持在最小狀態。 當藥液袋11〇内藥液113之殘量為基準值以^時，如上所 述之加/㈣泵進行㈣_，㈣，容㈣⑽側之加麼 果13 0彳予止工作。 若該加/減壓泵進行減壓驅動，則 ^ ^ 則膜部件21〇如同圖2用 虛線表示向缓衝器200之外劈你丨你給 Γ 土侧收‘。若該膜部件210收 130329.doc -10- 200841381 縮，則中央之藥液113收容空間之體積就會相對地膨脹起 來，並出現減壓現象。As described above, the drug solution bag m is attached so that the delivery tube 16 is immersed in the inside thereof, and the delivery tube 160 is disposed in the center of the container can 100. The drug solution bag 11 is supplied with the drug solution 113 to the damper 200 via the wheel tube 160. At this time, the damper 200 is located above the container can 100, and thus a forced conveying device for forcibly transporting the medicinal solution 113 to the damper 200 is required. The above-mentioned forced conveying device can use a pump 13 () as shown in Fig. 2, which functions to increase the internal pressure of the container can. According to the action of the "Hejia mill pump 130, the force inside the container tank (10) is increased, and the liquid medicine bag is compressed, and the liquid medicine 113 inside the liquid medicine bag is transported to the buffer 200 according to the compression force. The liquid buffer 113 buffering H2GG is then transported to the conductor assembly 250 via the discharge valve 24〇. At this time, 'the liquid medicine can be simultaneously supplied to the plurality of semiconductor equipment 250'. At this time, the buffer 2〇〇 is poured into one of the quantitative ones. The drug, the night, the Lili and the transport speed are supplied to one or more semiconductor devices. The upper portion of the buffered person 200 is provided with a bubble σ for the inclusion of the bubble σ in the liquid 113. The bubble exhaust valve 26 for discharging the P 130329.doc 200841381 Further, a water level sensor 230 is disposed on one side of the buffer 200 for detecting the water level of the poured liquid lib, and the filling state of the liquid 113 is always maintained at a certain water level. The reason for setting the water level sensor 230 as described above is to prevent the gas from flowing into the semiconductor device 250 via the discharge valve 240. Further, a filling space for arbitrarily changing the chemical liquid ^3 is provided inside the buffer 200. Size and size The volume variable device includes: a membrane member 210 disposed on the inner and left sides of the buffer 2A, respectively, and the membrane member 21 is configured to be capable of arbitrarily contracting and expanding the liquid medicine 113 between the membrane members 210. The accommodating space is subjected to a contraction and expansion operation in the left-right direction; and the variable actuator 220 is used to change the shape and position of the film member 210. As shown in Fig. 2, the membrane member 210 can use a diaphragm, a pleated tube and a rubber sheet. The material is deformed freely. Further, the variable actuator 22 for changing the membrane member 21 can use an accelerating/decompressing pump. Typically, the accelerating/reducing pump causes the membrane member 210 and the buffer 2 to The space between the crucibles is in a high pressure state, so that the membrane member 21G is inflated toward the center of the damper, thereby maintaining the accommodating space of the medicinal solution 113 at a minimum. When the residual amount of the medicinal solution 113 in the medicinal solution bag 11 is used as a reference When the value is ^, the above-mentioned plus / (four) pump is carried out (4) _, (4), and the capacity of the (4) (10) side is increased. If the pressure/decompression pump is driven under reduced pressure, then ^ ^ is the membrane part. 21〇 as shown in Figure 2, with a dotted line to the outside of the buffer 200 Soil Γ side close to you '. If the film member 210 to close 130329.doc -10- 200841381 reduced, the volume of the housing space 113 of the liquid center will be relatively expanded from, and occurs the phenomenon under reduced pressure.
Ik著该藥液113收容空間被減壓，儲存於容器罐} 〇〇之殘 里藥液113沿者輸送管160被吸入而輸送。 此時，該加/減壓泵自殘量基準為100〜500 cc之點開始進 行減壓驅動並形成最低之流速（1 〇 cc/s以下之流速為宜）， 一直到殘量變為50〜〇 cc為止緩慢進行。 在此，將減壓速度維持在最低速度之理由係為了防止藥 液Π 3内產生氣泡。 用如上所述之方法向緩衝器2 〇 〇内部灌入一定量之藥液 113之後，使該緩衝器2〇〇内部之體積可變裝置進行收縮動 作，從而將缓衝器200内部之藥液i 13壓送至半導體裝備 250 〇 此時，該體積可變裝置之收縮動作係經由加/減壓泵之 加壓作用而實現。該加/減壓泵向膜部件21〇與緩衝器2〇〇 之間之空間供給壓縮空氣而加壓，從而使膜部件2丨〇向緩 衝器200之中央膨脹。 根據該膜部件210向内部中央側膨脹，在膜部件2 i 〇之間 形成之藥液113收容空間被收縮，並儲存在藥液丨i 3收容空 間内之藥液113經由排出閥240供給至半導體裝備250。 如上所述之體積可變裝置之抽吸作用反覆進行至容器罐 100内之藥液113全部用盡。 並且’為了測定該容器罐i 〇〇内藥液1丨3之殘量使用殘量 測定裝置。該殘量測定裝置可使用設在容器罐1〇〇底面之 130329.doc 200841381 測壓兀件150或設在輸送管16〇之壓力感應器17〇,其中該 測壓元件150偵測容器罐之重量變化。 此時，该壓力感應器17〇亦可替換為測定藥液ιΐ3流速及 ^ 流量之感應器。 • 綜上所述，根據本發明之第一實施例所提供之化學藥品 供給裝置，因為可以無殘量地全部用盡容器罐11〇内之藥 液113，從而可以節省材料費。 <實施例2> • 圖3為本發明之第二實施例所提供之化學藥品供給裝置 之緩衝器結構之放大圖。 如圖所示’本發明之第二實施例所提供之化學藥品供給 I置只變更了如圖2所示之本發明之第一實施例所提供之 緩衝器200之結構。 以下’省略對容器罐100之結構說明，而詳細說明緩衝 益2 0 0之結構。 φ 本發明之第二實施例所提供之緩衝器200下部具有用於 將藥液113供給至半導體裝備250之排出閥240，而上部設 置用於向外部排出包含於藥液113裏之氣泡之氣泡排氣閥 * 260 〇 並且’在該緩衝器200之一側設有水位感應器230，以用 於偵測灌入之藥液11b之水位，並使藥液113之灌入狀態始 終保持一定水位以上。 5又置如上所述之水位感應器230之理由係為了預防氣體 經由排出閥240流入至半導體裝備250。 130329.doc -12· 200841381 並且，在該缓衝态200之内部設置用於任意改變藥液η] 之灌入空間大小之體積可變裝置。 該體積可變裝置包括：分別設置於緩衝器2〇〇之内部左 右侧之膜部件210，該膜部件210為了能夠任意地收縮膨脹 灌入於膜部件210之間之藥液in之收容空間而向左右方向 進行收縮膨脹動作；及可變致動器220，以用於改變該膜 部件210之形態及位置。 如圖3所示，該膜部件210可使用手風琴形態之褶皺管部 件。 並且，用於改變該膜部件21 〇之可變致動器22〇可使用汽 缸，該汽缸用於將褶皺管部件之前端沿橫向左右移送。 通常，該汽缸使活塞伸長長至最大長度，從而使膜部件 210向緩衝恣200之中心移動，由此將藥液j丨3之收容空間 維持在最小狀態。 當藥液袋内110之藥液113殘量為基準值以下時，如上所 述之汽缸進行減壓驅動。 右該汽缸進行減壓驅動，則活塞之長度縮短為最小，並 使膜部件210向緩衝器200之外壁侧擴張，從而使中央之藥 液113收容空間之體積相對膨脹。 此時，若該藥液113收容空間膨脹，則内部壓力急劇減 J從而儲存在谷斋罐100之殘量藥液113沿著輸送管1 60 吸入至緩衝器2〇〇。 …此日守，邊汽缸自殘量基準為100〜500 cc之點開始進行減 壓驅動並形成最低之流速（1〇 _以下之流速為宜），一直 130329.doc -13- 200841381 到殘量變為50〜〇 cc為止緩慢進行。 用如上所述之方法向缓衝器2〇〇内部灌入一定量之藥液 ⑴之後，使該緩衝器擔内部之體積可變裝置進行收縮動 作’從而將緩衝器200内部之藥液113壓送至半導體裝備 250 〇 該體積可變裝置之收縮動作係經由汽紅之加壓驅動而實 現。並且為了該加壓驅動該汽缸使活塞延長至最大長度， 從而使膜部件210向緩衝器細之中心移動，由此收縮藥液 113之收容空間。 隨著該藥液113收容空間收縮，儲存在藥液113收容空間 之藥液113經由排出閥240供給至半導體裝備250。 如上所述之體積可變裝置之抽吸作用反覆進行至容器罐 100内之藥液113全部用盡為止。 此訏，用於測定該容器罐100内藥液i丨3殘量之殘量測定 裝置可利用設在容器罐100底面之測壓元件15〇或設在輸送 笞160之壓力感應裔1，該測壓元件1 $〇用於搞測容器罐 100之重量變化。 如上所述之壓力感應器170亦可替換成測定藥液113流速 及流量之感應器。 <實施例3> 圖4為本發明之第三實施例所提供之化學藥品供給裝置 之緩衝器結構之放大圖。 如圖所示，本發明之第三實施例所提供之化學藥品供給 裝置為只是變更了如圖2所示之本發明之第一實施例所提 130329.doc -14- 200841381 供之缓衝器200之結構。 以下，省略對容器罐100之結構說明，而詳細說明緩衝 器200之結構。 本發明之第三實施例所提供之緩衝器2〇〇下部具有用於 * 將藥液113供給至半導體裝備250之排出閥240，而上部設 置用於向外部排出包含於藥液113裏之氣泡之氣泡排氣^ 260 〇 並且，該緩衝器200之一侧設有水位感應器23〇,以用於 釀㈣灌人之藥液113之水位’並使藥液113之灌人狀態始終 保持一定水位以上。 設置如上所述之水位感應器23〇之理由係為了預防氣體 經由排出閥240流入至半導體裝備250。 並且，在該緩衝器200之内部設置用於任意改變藥液113 之灌入空間大小之體積可變裝置。 该體積可變裝置包括：設置於緩衝器200内部中央之球 # 體形狀之膜部件210,該膜部件21〇為了能夠任意地收縮膨 服灌入於其内部之藥液i i 3之收容空間而進行收縮膨服動 作；及可變致動器22〇,以用於使該膜部件21〇進行收縮膨 服動作。 - 士此時，該膜部件210可使用如圖4所示之#進行收縮膨腹 時能夠具有伸縮性之球體形狀之伸縮部件。 該球體形狀之伸縮部件之下部中心連接輸送管16〇，上 部中心連接氣泡排氣閥260，而連接著該輸送管16〇之一側 連接排出閥240。 130329.doc -15- 200841381 並且’用於改變該膜部件210之可變致動器220可使用加/ 減塵果’該加/減壓泵用於對膜部件21〇之間之空間進行加 壓及減壓。 通常’該加/減壓泵使膜部件21〇與緩衝器2〇〇之間之空 間維持高壓狀態而使膜部件210收縮得最大，由此將藥液 113之收容空間維持在最小狀態。 若藥液袋110内藥液113之殘量為基準值以下，如上述之 加/減壓泵進行減壓驅動。 右该加/減壓泵進行減壓驅動，則緩衝器200與膜部件 210之間之空間形成低壓狀態而使膜部件21〇膨脹，從而使 中央之藥液113收容空間之體積膨脹。 此時，若該藥液113收容空間膨脹，則内部壓力急劇減 小’從而儲存於容器罐100之殘量藥液113沿著輸送管16〇 吸入至緩衝器200。 此時，該加/減壓泵自殘量基準為1〇〇〜5〇〇 cc之點開始進 行減壓驅動並形成最低之流速（1〇 cc/s&下之流速為宜）， 一直到殘量變為50〜0 cc為止緩慢進行。 用如上所述之減壓驅動向緩衝器2〇〇内部灌入一定量之 藥液113之後，使該緩衝器2〇〇内部之體積可變裝置進行收 縮動作，從而將緩衝器200内部之藥液113壓送至半導體裝 備 250 〇 該體積可變裝置之收縮動作係經由加/減壓泵之加壓驅 動而實現，並且，該加/減壓泵以高壓狀態維持緩衝器2〇〇 與膜部件210之間之空間，從而使膜部件21〇最大地收縮， 130329.doc -16 - 200841381 由此收縮藥液113之收容空間。 隨著該藥液113收容空間收縮，儲存在藥液113收容空間 内之藥液113經由排出閥240供給至半導體裝備250。 如上所述之體積可變裝置之抽吸作用反覆進行至容器罐 100内之藥液113全部用盡。 此時’用於測定該容器罐i 00之藥液i丨3殘量之殘量測定 I置可使用設在容器罐1〇〇底面之測壓元件15〇或設在輸送Ik is decompressed in the accommodating space of the medicinal solution 113, and is stored in the container tank. The medicinal liquid 113 is sucked and transported along the person delivery tube 160. At this time, the pressure/decompression pump is driven at a reduced pressure of 100 to 500 cc and starts to be driven at a reduced pressure to form a minimum flow rate (a flow rate of 1 〇 cc/s or less is preferable) until the residual amount becomes 50 〇 The cc is going slowly. Here, the reason why the decompression speed is maintained at the minimum speed is to prevent the occurrence of bubbles in the liquid medicine cartridge 3. After a certain amount of the chemical solution 113 is poured into the buffer 2 〇〇 by the method described above, the volume variable device inside the buffer 2 收缩 is contracted, thereby the liquid medicine inside the buffer 200 i 13 is pressure fed to the semiconductor device 250. At this time, the contraction operation of the variable volume device is achieved by the pressurization of the addition/decompression pump. The addition/decompression pump supplies compressed air to the space between the membrane member 21 and the damper 2, and pressurizes the membrane member 2 to expand toward the center of the buffer 200. According to the film member 210 being inflated toward the inner center side, the chemical liquid 113 accommodating space formed between the film members 2 i 被 is contracted, and the chemical liquid 113 stored in the medicinal liquid 收容 i 3 accommodating space is supplied to the medicinal solution 113 via the discharge valve 240 Semiconductor equipment 250. The suction action of the volume variable device as described above is repeated until the liquid medicine 113 in the container can 100 is completely used up. Further, in order to measure the residual amount of the drug solution 1丨3 in the container jar i, a residual amount measuring device was used. The residual amount measuring device may use 130329.doc 200841381 pressure measuring element 150 disposed on the bottom surface of the container tank 1 or a pressure sensor 17A disposed on the conveying tube 16〇, wherein the pressure measuring element 150 detects the container can Weight changes. At this time, the pressure sensor 17〇 can also be replaced with a sensor for measuring the flow rate of the liquid medicine ιΐ3 and the flow rate. As described above, according to the chemical supply device of the first embodiment of the present invention, since the chemical liquid 113 in the container can 11 can be completely used without any residue, material cost can be saved. <Embodiment 2> • Fig. 3 is an enlarged view showing a buffer structure of a chemical supply device according to a second embodiment of the present invention. As shown in the figure, the chemical supply I provided in the second embodiment of the present invention changes only the structure of the buffer 200 provided in the first embodiment of the present invention as shown in FIG. Hereinafter, the structure of the container can 100 will be omitted, and the structure of the buffer benefit 200 will be described in detail. φ The lower portion of the damper 200 provided by the second embodiment of the present invention has a discharge valve 240 for supplying the chemical liquid 113 to the semiconductor device 250, and the upper portion is provided with a bubble for discharging the air bubbles contained in the chemical liquid 113 to the outside. The exhaust valve* 260 〇 and 'the water level sensor 230 is disposed on one side of the buffer 200 for detecting the water level of the poured liquid 11b, and the filling state of the liquid 113 is always maintained at a certain water level. the above. The reason why the water level sensor 230 is further set as described above is to prevent gas from flowing into the semiconductor device 250 via the discharge valve 240. 130329.doc -12· 200841381 Further, a volume variable device for arbitrarily changing the size of the filling space of the drug solution η] is provided inside the buffer state 200. The volume variable device includes: a film member 210 which is disposed on the left and right sides of the inner side of the damper 2, respectively, and the film member 210 is capable of arbitrarily contracting and expanding the accommodating space of the chemical liquid in between the film members 210. The contraction expansion operation is performed in the left-right direction; and the variable actuator 220 is used to change the shape and position of the film member 210. As shown in Fig. 3, the film member 210 can use a pleated tube member in the form of an accordion. Also, the variable actuator 22 for changing the membrane member 21 can use a cylinder for transferring the front end of the pleated tube member laterally to the left and right. Usually, the cylinder elongates the piston to a maximum length, thereby moving the membrane member 210 toward the center of the buffer bowl 200, thereby maintaining the accommodation space of the drug solution j丨3 to a minimum. When the residual amount of the chemical solution 113 in the drug solution bag 110 is equal to or lower than the reference value, the cylinder as described above is driven under reduced pressure. When the right cylinder is driven under reduced pressure, the length of the piston is shortened to the minimum, and the membrane member 210 is expanded toward the outer wall side of the damper 200, so that the volume of the central medicinal liquid 113 accommodating space is relatively expanded. At this time, when the accommodation space of the chemical liquid 113 expands, the internal pressure is sharply decreased by J, and the residual chemical liquid 113 stored in the Guzhai tank 100 is sucked into the buffer 2A along the transport pipe 160. ...this day, the side cylinder self-residue reference is 100~500 cc, and the decompression drive is started and the lowest flow rate is formed (the flow rate is below 1〇_), which has been 130329.doc -13- 200841381 50~〇cc is slowly performed. After a certain amount of the chemical liquid (1) is poured into the buffer 2〇〇 by the method described above, the volume variable device inside the buffer is subjected to a contraction operation to press the liquid medicine 113 inside the buffer 200. The shrinking action is sent to the semiconductor device 250 by the volumetric device. Further, in order to pressurize the cylinder to extend the piston to the maximum length, the film member 210 is moved toward the center of the buffer to thereby shrink the accommodation space of the chemical liquid 113. As the accommodation space of the chemical liquid 113 contracts, the chemical liquid 113 stored in the storage space of the chemical liquid 113 is supplied to the semiconductor device 250 via the discharge valve 240. The suction action of the volume variable device as described above is repeated until the liquid medicine 113 in the container can 100 is completely used up. In this case, the residual amount measuring device for measuring the residual amount of the chemical liquid in the container can 100 can use the pressure measuring element 15 provided on the bottom surface of the container can 100 or the pressure sensing element 1 provided on the conveying port 160. The load cell 1 〇 is used to measure the weight change of the canister 100. The pressure sensor 170 as described above can also be replaced with a sensor for measuring the flow rate and flow rate of the liquid 113. <Embodiment 3> Fig. 4 is an enlarged view showing a buffer structure of a chemical supply device according to a third embodiment of the present invention. As shown in the figure, the chemical supply device provided by the third embodiment of the present invention is only a buffer provided by the first embodiment of the present invention as shown in FIG. 2, 130329.doc -14-200841381. 200 structure. Hereinafter, the structure of the container can 100 will be omitted, and the structure of the buffer 200 will be described in detail. The buffer 2 of the third embodiment of the present invention has a discharge valve 240 for supplying the chemical liquid 113 to the semiconductor device 250, and an upper portion for discharging the air bubbles contained in the chemical liquid 113 to the outside. The bubble exhaust gas 260 〇 and the water level sensor 23〇 is disposed on one side of the buffer 200 for use in brewing the water level of the liquid medicine 113 and keeping the filling state of the liquid medicine 113 constant Above the water level. The reason why the water level sensor 23 is set as described above is to prevent gas from flowing into the semiconductor device 250 via the discharge valve 240. Further, a volume variable device for arbitrarily changing the size of the filling space of the chemical liquid 113 is provided inside the buffer 200. The volume variable device includes a membrane member 210 disposed in the center of the inner portion of the damper 200, and the membrane member 21 is arbitrarily contracted to accommodate the accommodating space of the medicinal liquid iii 3 which is poured into the interior thereof. The contraction and expansion operation is performed; and the variable actuator 22A is used to perform the contraction and expansion operation of the membrane member 21A. At this time, the film member 210 can be a stretchable member having a spherical shape which can be stretched when shrinking and swelling as shown in Fig. 4 . The spherical portion of the lower portion of the telescopic member is connected to the center of the transport tube 16A, the upper portion is connected to the bubble exhaust valve 260, and the side of the transport tube 16 is connected to the discharge valve 240. 130329.doc -15-200841381 and 'variable actuator 220 for changing the membrane member 210 can use add/dump fruit' for adding/decreasing pump for adding space between membrane members 21〇 Pressure and decompression. In general, the addition/decompression pump maintains the space between the membrane member 21 and the damper 2 维持 in a high pressure state to maximize the contraction of the membrane member 210, thereby maintaining the accommodating space of the medicinal solution 113 to a minimum. If the residual amount of the chemical solution 113 in the drug solution bag 110 is equal to or less than the reference value, the above-described pressure/decompression pump is driven under reduced pressure. When the right/adding/decompression pump is driven to be decompressed, the space between the damper 200 and the membrane member 210 is in a low pressure state, and the membrane member 21 is swollen, thereby expanding the volume of the central medicinal solution 113 accommodating space. At this time, when the accommodating space of the chemical liquid 113 expands, the internal pressure sharply decreases, and the residual chemical solution 113 stored in the container can 100 is sucked into the damper 200 along the transport tube 16A. At this time, the pressure/decompression pump self-residue reference is 1 〇〇 to 5 〇〇 cc, and the pressure reduction drive is started to form the lowest flow rate (the flow rate is preferably 1 〇 cc / s & The amount is slowly changed from 50 to 0 cc. After a certain amount of the chemical liquid 113 is poured into the buffer 2A by the decompression driving as described above, the volume variable device inside the buffer 2 is contracted, thereby the medicine inside the buffer 200. The liquid 113 is pressure fed to the semiconductor device 250. The contraction operation of the volume variable device is achieved by the pressure driving of the addition/decompression pump, and the addition/decompression pump maintains the buffer 2〇〇 and the membrane in a high pressure state. The space between the members 210, thereby maximally shrinking the film member 21, 130329.doc -16 - 200841381 thereby shrinking the accommodating space of the liquid 113. As the accommodation space of the chemical liquid 113 contracts, the chemical liquid 113 stored in the accommodation space of the chemical liquid 113 is supplied to the semiconductor device 250 via the discharge valve 240. The suction action of the volume variable device as described above is repeated until the liquid medicine 113 in the container can 100 is completely used up. At this time, the residual amount measurement for measuring the residual amount of the drug solution i 00 of the container can 00 can be set using the pressure measuring element 15 设 provided on the bottom surface of the container can 1 or at the delivery
管160之壓力感應器17〇，該測壓元件15〇用於偵測容器罐 100之重量變化。 如上所述之壓力感應器170亦可替換成測定藥液i 13流速 及流量之測定感應器。 擁有“上所述之結構及作用之本發明可根據熟習此項技 術者利用丽面說明之多個實施例而進行多種修改及變更， 本务明真正之技術範圍並不侷限於說明書所記載之 詳細說明之内容，而是根據申請專利範圍而定。 綜上所述，若測定之容器罐内藥液之殘量在基準值以 下，則緩衝器側形成低速真空吸人動作，因此可減少容器 罐内之藥液之殘量而節省材料費用。 二 ^ 10 cc/s以下之低速吸入容器罐内之藥液殘量， 因此本發明可預防產生於藥液内之氣泡在供給管内形成固 【圖式簡單說明】 圖1為先前技術之化學藥品供給裝置之概要圖； 圖2為本發明之第—實施例所提供之化學藥品供給裝置 130329.doc -17- 200841381 之整體結構之概要圖。 圖3為本發明之第二實施例所提供之化學藥品供給裝置 之緩衝器結構之放大圖。 圖4為本發明之第二實施例所提供之化學藥品供給裝置 之緩衝器結構之放大圖。 【主要元件符號說明】The pressure sensor 17 of the tube 160 is used to detect the change in weight of the can 100. The pressure sensor 170 as described above can also be replaced with a measuring sensor for measuring the flow rate and flow rate of the chemical solution i 13 . The present invention having the structure and function of the above-described embodiments can be variously modified and modified according to various embodiments of the skilled person using the present invention. The technical scope of the present invention is not limited to the description. The details of the description are based on the scope of the patent application. In summary, if the residual amount of the chemical liquid in the container is below the reference value, the buffer side forms a low-speed vacuum suction operation, thereby reducing the container. The residual amount of the liquid medicine in the tank saves the material cost. The residual amount of the liquid in the low-speed inhalation container tank of 2 ^ 10 cc / s or less, so the present invention can prevent the bubbles generated in the liquid medicine from forming in the supply tube. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a chemical supply device of the prior art; Fig. 2 is a schematic view showing the overall structure of a chemical supply device 130329.doc -17-200841381 according to a first embodiment of the present invention. Figure 3 is an enlarged view of a buffer structure of a chemical supply device according to a second embodiment of the present invention. Figure 4 is a chemical supply according to a second embodiment of the present invention. An enlarged view of the buffer structure of the device. [Description of main component symbols]
10 容器罐 11 藥液袋 11a 惰性氣體或氮氣 11b 藥液 13 加壓泵 16 輸送管 20 緩衝器 23 水位感應器 24 排出閥 25 半導體裝備 26 氣泡排氣閥 100 容器罐 110 藥液袋 111 惰性氣體、氮氣 113 藥液 130 加壓泵 150 測壓元件 160 輸送管 130329.doc 18 200841381 170 200 210 220 230 240 250 260 壓力感應器 緩衝器 膜部件 可變致動器 水位感應器 排出閥 半導體裝備 氣泡排氣閥10 Containers 11 Liquid medicine bags 11a Inert gas or nitrogen 11b Chemical liquid 13 Pressure pump 16 Delivery tube 20 Buffer 23 Water level sensor 24 Discharge valve 25 Semiconductor equipment 26 Bubble vent valve 100 Container tank 110 Liquid medicine bag 111 Inert gas , nitrogen 113 liquid 130 pressure pump 150 pressure measuring element 160 conveying pipe 130329.doc 18 200841381 170 200 210 220 230 240 250 260 pressure sensor damper membrane component variable actuator water level sensor discharge valve semiconductor equipment bubble row Air valve
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