TW200839331A - Paste composition for optical waveguide and optical waveguide using it - Google Patents

Abstract

The present invention provides a paste composition for optical waveguide which can be hardened in a short time and has excellent developing property. A paste composition for optical waveguide comprises (A) a barium sulfate particle having an average particle diameter of 1 nm to 50 nm, (B) a compound having polymerizable group and carboxylic group, or a phosphoric ester compound having polymerizable group, and (C) an organic solvent.

Description

200839331 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a paste composition for an optical waveguide. More specifically, the optical waveguide paste composition in which the bismuth sulfate particles are dispersed in the organic substance, and the optical waveguide using it. [Prior Art] A paste composition in which an inorganic particle is dispersed in an organic substance such as a resin, or a cured product obtained by curing a paste composition is widely used in printing paints, lubricants, cosmetics, adhesives, and release agents. Or a constituent material of a display or a package substrate. The purpose of dispersing the inorganic particles in the resin is to give excellent properties such as thermodynamic properties, electromagnetic properties, optical properties, and the like which are not obtained by the resin, or when using a high-priced resin, it is possible to reduce the content and suppress the production. Cost, etc. In recent years, in order to improve the surface smoothness or light transmittance of materials, or to cope with the micromachining of semiconductors and the like, attempts have been made to use the fine particles of the dispersed inorganic particles having a particle diameter of several tens to several nanometers. Progress in the field. In the field of optical wiring technology, in order to suppress the change in the refractive index or the size of the optical waveguide material with temperature, or to ensure the light transmittance of the material, it is considered to disperse the inorganic particles having a particle diameter of several tens to several nanometers. The technology in the resin. One of the methods for dispersing the inorganic particles in the resin is a method of first dispersing a dispersion in which an inorganic particle is well dispersed in an organic solvent, and secondarily mixing the dispersion with a resin. Commercially available inorganic particles having an average particle diameter of several tens to several nanometers are often powder-like particles (secondary particles) having an average particle diameter of several tens of micrometers which are moderately aggregated for each particle (primary particle). Therefore, in order to produce a dispersion of inorganic particles having an average particle diameter of several tens to several nanometers, it is necessary to disperse the agglomeration of these secondary particles in an organic solvent to produce a dispersion in which the particles are stably dispersed once. However, in the case where the average particle diameter of the primary particles is less than 5 Onm, the ratio of the surface area to the particle volume is extremely large, and the frequency of re-agglomeration of the primary dispersed particles becomes high, and it becomes difficult to disperse. of. Therefore, it is disclosed that an organic substance called a dispersing agent having a functional group or the like at the end is added, and the functional group of the dispersing agent is placed on the surface of the inorganic particles to prevent the inorganic particles from approaching each other, thereby suppressing re-agglomeration of the primary particles. To improve the dispersion. As such an example, a nickel colloidal particle having an average particle diameter of 20 to 4 Onm, a nonpolar polymer pigment dispersant, and a nickel colloidal solution having an organic solvent are proposed (see, for example, Patent Document 1). Further, a method of dispersing barium sulfate particles in an organic solvent using a dispersant has been disclosed (for example, refer to Patent Document 2). However, when a paste composition is produced by mixing a dispersion of inorganic particles using a conventional dispersant with a resin, and then hardening it to produce a cured product in which inorganic particles are dispersed, a curing reaction of the resin by light irradiation or heating is carried out. Compared with the case of not using inorganic particles, the system is insufficient. Therefore, the thermomechanical properties and the like of the obtained cured product are deteriorated. Further, when a film formed by using a paste composition containing inorganic particles and a resin cured by light is subjected to patterning by a lithography method, insufficient curing of the exposed portion causes elution of the composition at the time of development. The pattern shape becomes unclear, or the solubility of the unexposed portion is lowered, and the residue of the paste composition occurs at the time of development. Therefore, the light propagation loss of the optical waveguide formed by the lithography method becomes large. 200839331 Further, it is known that when a resin monomer having a polymerizable group is added to the resin, the antistatic property or flame retardancy of the cured product can be increased, and the dispersion of the pigment (particles) dispersed in the resin can be improved. Effect such as sex (see Patent Document 3). In general, the dispersibility of pigments (particles) varies not only greatly depending on whether the pigment used is organic or inorganic, but also because of the same inorganic pigment, such as barium sulfate particles and alumina particles, the surface potential or surface thereof. The difference in smoothness and the like is also large, and one additive has an effect of improving dispersibility, but the other may also reduce dispersibility. Patent Document 3 only describes that an inorganic pigment can be used, but does not specifically disclose the kind of inorganic pigment which can be dispersed to the left and right as described above. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. 2006-106708 (page 18) [Patent Document 3] JP-A-2003- 1 46992 [Explanation] The problem to be solved by the invention is as described above, when the barium sulfate particles having an average particle diameter of 1 nm or more and 50 nm or less are used as one of constituent materials in the composition for a light guide wave path paste, When a conventional dispersing agent is used for the purpose of dispersing particles, the curing reaction of the paste composition due to light irradiation or heating may be insufficient, or the film formed using the paste composition may be lithographically formed. When performing pattern processing, development becomes difficult. The present invention has been made in view of the problems of the prior art, and it is an object of the invention to provide a paste composition for an optical waveguide which is capable of reliably curing 200839331 and which is excellent in developability. The present invention relates to a paste composition for an optical waveguide comprising (A) barium sulfate particles having an average particle diameter of 1 nm or more and 50 nm or less, (B) a compound having a polymerizable group and a carboxyl group, or a polymerizable group. Phosphate compound, and (C) organic solvent. Further, the optical waveguide of the optical waveguide paste composition is cured. The effect of the optical waveguide paste composition of the present invention can be surely cured by light irradiation or heating. Further, in the patterning by the lithography method, the hardenability of the exposed portion and the developability of the unexposed portion are extremely excellent. By using the optical waveguide paste composition of the present invention, it is possible to obtain an optical waveguide having a small change in refractive index due to temperature, a small linear expansion ratio, and a small light propagation loss. [Embodiment] The optical waveguide paste composition (hereinafter referred to as paste composition) of the present invention contains (A) barium sulfate particles, (B) a compound having a polymerizable group and a carboxyl group, or has a polymerization. a phosphate compound of a base, and (C) an organic solvent. In the following, a compound having a polymerizable group and a carboxyl group or a phosphate compound having a polymerizable group is referred to as "Compound A" unless otherwise specified. In the paste composition of the present invention, the compound A has an action of dispersing the barium sulfate particles. The carboxyl group or the phosphate bond site in the compound A covers the surface of the barium sulfate particles by the interaction with the barium sulfate particles. Further, it is considered that the 200839331 polymerizable group of the compound A covering the surface of the barium sulfate particles is oriented to the outside of the barium sulfate particles, and is compatible with an organic solvent or other compound in the paste composition to stably disperse the barium sulfate particles. The polymerizable group in the compound A is an organic group which can be polymerized by a polyaddition reaction or a radical reaction by light or heat. In the paste composition of the present invention, since the compound A participates in the polymerization, the hardening is carried out rapidly and surely. In the present invention, the compound A itself is polymerized by light or heat to form a matrix resin in the cured product. Therefore, the compound A used in the present invention functions both as a dispersing agent for barium sulfate particles and as a matrix resin. It is considered that by dispersing barium sulfate in a polymer having a polymerizable group for forming a matrix by a dispersing agent having no polymerizable group, when the matrix resin is polymerized, barium sulfate particles move and aggregate, and the dispersibility is lowered. . On the other hand, in the paste composition of the present invention, since the compound A is polymerized in a state in which the cerium sulfate particles are trapped, the dispersibility of the cerium sulphate particles can be favorably maintained in the cured product. Therefore, the light transmittance and surface flatness of the cured product are good. Further, by curing the compound A in the paste composition by light, patterning by the lithography method can be performed. In this case, since the compound A in the exposed portion is polymerized in a state in which barium sulfate particles are trapped, a strong network using barium sulfate particles as a starting point is formed, and swelling or dissolution of the exposed portion during development is suppressed, so that formation can be performed. Clear pattern shape. The polymerizable group of the compound A is preferably a good affinity for the organic solvent or other compound contained in the paste composition because the purpose is to disperse the barium sulfate particles well. Examples of such may include a vinyl group, an acrylic acid 200839331 ester group, a methacrylate group, an epoxy acrylate group, an epoxy methacrylate group, and an epoxy group.

The compound A has the above polymerizable group and a carboxyl group. The carboxyl group of the compound a acts on the surface of the barium sulfate particles by interacting with the barium sulfate particles to disperse the barium sulfate particles. Further, when the patterning process is performed by the lithography method in which the compound A in the paste composition of the present invention is cured by light, since the compound A has a carboxyl group having a high polarity, the dissolution of the developing solution is fast, and the unexposed portion can be reduced. The residue of the image. The compound A used in the present invention is preferably represented by the following formula (1): R1 CH2~c~C-0~R2-(:-OH(1) Ο 于 in the formula (1), and R1 represents hydrogen An atom or a methyl group, and R2 represents a divalent group represented by any one of the following formulas (2) to (4). Ten tons of hydrazine-PCH2tr (2) 〇

(3) (4) In the general formulae (2) to (4), η and m are each an integer of 1 to 3. The polymerizable group of the formula (1) is an acrylate group -10- 200839331 when R1 is a hydrogen atom, and is a methacrylate group when R 1 is a methyl group. The acrylate group or the methacrylate group having an unsaturated bond ' can be subjected to radical polymerization by light irradiation or heating. When radical polymerization is carried out by light, a lithography method of irradiating light through a reticle can be employed to form a wiring pattern or the like. The acrylate group-based polymerizicity in which R 1 is a hydrogen atom is more preferable, and is preferable. When η and m in the general formulae (2) to (4) are small, the number of polymerizable groups and carboxyl groups per unit weight increases, so that the polymerizability is further improved and the dispersibility of barium sulfate particles is improved. . On the other hand, when the number of η and m is large, the compound A becomes a steric hindrance when it is placed on the barium sulfate particles, so that the dispersibility is improved. Therefore, η and m are preferably an exoethyl group having a carbon number of 2. Among the compounds represented by the formula (1), a compound wherein R1 is a hydrogen atom and R2 is a divalent group represented by the formula (4) is preferred. In this case, η is preferably used for the above reasons. 2. When this compound is used, polymerizability and developability are further improved. Further, since the dispersibility of the barium sulfate particles is further improved, the average particle diameter of the dispersed barium sulfate can be further reduced, so that the light transmittance of the cured product obtained from the paste composition is improved. Therefore, an optical waveguide having a small loss of light transmission can be obtained. Specific examples of the compound oxime represented by the formula (1) used in the present invention include "Η Ο A - MS, manufactured by Kyoei Kogyo Co., Ltd., (trade name, Ri in the formula (1) In the case of a hydrogen atom, R2 is represented by the formula (2), and both η and 1 are 2) and "HOA-HH" (trade name, Ri in the formula (1) is a hydrogen atom, and r2 is a formula (3). In other words, η is 2), "HOA-MPL, (trade name, R1 in the formula (1) is a hydrogen atom" R2 is represented by the formula (4), and η is 2). On the other hand, it is also preferred to use a compound oxime represented by the following formula (5). -11- 200839331 Ο II ο-Ρ Ο R4 (5) R5 In the formula (5), R3 to R5 represent a monovalent group represented by any one of the following formulas (6) to (10) or The hydrogen atom, R3 to R5, may be the same or different. However, not all of R3 to R5 are hydrogen atoms.

(6)

(7) h2c=c[CO—R10—II 0 (8) -12- 200839331 (9) H2C^CH—R11— (10) In the general formulae (6) to (10), R6 to r9 represent a hydrogen atom or a base. Rio to R 11 are a divalent group having 1 to 10 carbon atoms, preferably a divalent hydrocarbon group having 1 to 10 carbon atoms, more preferably an alkyl group having 2 carbon atoms. R12 is a divalent group having 1 to 10 carbon atoms and having a hydroxyl group, and is preferably an organic group represented by the following formulas (13) to (15).

0H -CH2—CH—CH2— (13)

OH

I

(14) —CH2—CH — CH2—CH2—

OH -ch2-ch- (15) In the compound A represented by the formula (5), a phosphoric acid monoester in which two of R3 to R5 are a hydrogen atom, and a phosphoric acid in which one of r3 to r5 is a hydrogen atom In the case of diester comparison, it is preferred to increase the dispersibility of barium sulfate particles. Further, phosphorus-13-200839331 acid diester is preferable in comparison with a phosphate triester which does not contain a hydrogen atom in R3 to R5, because it improves the dispersibility of barium sulfate particles. The monovalent group represented by the formulae (6) to (9) has an acrylate group or a methacrylate group, and can be subjected to radical polymerization by light irradiation or heating. Further, the monovalent group represented by the formula (10) can be subjected to ion polymerization by light irradiation or heating. The polymerizable group of the acrylate group in which R6 to R9 are a hydrogen atom is more preferably used. γ When the number of carbon atoms of R1() to R12 in the general formulae (8) to (10) is small, the number of polymerizable groups and phosphate-bonding sites per unit weight increases, so polymerization property It is more favorable and improves the dispersibility of barium sulfate particles. Further, when R 1G to R12 have a large carbon number, the compound A has a large steric hindrance when it is placed on the barium sulfate particles, so that the dispersibility is improved. Therefore, the carbon number of R 1 ^ to R 12 is preferably from 1 to 4. In particular, among the compounds represented by the formula (5), at least one of R3 to R5 is preferably a monovalent group represented by the formula (8). In this case, more preferably, the R1G system is used. A divalent hydrocarbon group having 1 to 3 carbon atoms. Further, at least one of R3 to R5 of the formula (5) is preferably a monovalent group represented by the formula (9), and the R 12 of the formula (9) has a carbon number of 2 to 3 of the hydroxyl group. Hydrocarbyl group. Specific examples of the compound A represented by the formula (5) used in the present invention include "Light_Acrylate P-1 A" (trade name, phosphate monoester having an acrylate group) manufactured by Kyoeisha Chemical Co., Ltd. ), "Light-Ester P-1M," (trade name, methacrylate-based phosphoric acid monoacetate), "Light-Ester P-2M" (trade name, with A) RDX63182 (phosphoric acid diester having epoxy-14-200839331 acrylate group) manufactured by DAICEL-CYTEC Co., Ltd., which can be used in the present invention. Further, the cured product obtained from the paste composition of the present invention has a small change in physical properties with respect to temperature, and a rate of change in refractive index or a coefficient of linear expansion due to temperature is small, and is used for enhancing dispersion of inorganic particles. a dispersant which hinders the hardening reaction of the resin in the paste composition, increases the rate of change of the refractive index or the coefficient of linear expansion due to the temperature of the cured product obtained from the paste composition, and the characteristics of the cured product. Deterioration In the present invention, the compound A itself which contributes to the dispersibility of the barium sulfate particles, since the polymerization and the hardening are involved in the polymerization of the resin described later, the temperature-induced refraction can be suppressed. As described above, in the paste composition of the present invention, the compound A is polymerized to form a matrix in the cured product, but may contain other substances. A resin used for forming a matrix. Examples of the resin used at this time include polyacrylic acid, ethylene resin, raw borneylene resin, epoxy resin, acrylate resin, methacrylate resin, and epoxy acrylate resin. a thermosetting or UV curable resin having a polymerizable group such as an epoxy methacrylate resin, a cyanate resin, a bismaleimide-tripper resin, a benzocyclobutene resin, or a decane resin. Further, a thermoplastic resin such as linaloamine resin, polystyrene, polyether phthalimide, polyphenylene ether or thermoplastic polyimide may be mentioned. These resins may be used singly or in an appropriate ratio. In the application for heat resistance and the like in the process, among the above resins, a thermosetting resin or a resin having a polymerizable group such as a UV curable resin is preferred. Further, -15-200839331, used for a paste composition When the obtained cured product is required to be a light-transmitting optical waveguide material, an epoxy resin, an acrylate resin, a methacrylate resin, an epoxy acrylate resin, an epoxy methacrylate resin, or a ruthenium is preferably used. In particular, when a UV-curable type of these resins is selected, it is preferable to realize a pattern of an optical waveguide by a lithography method. In the present invention, a thermosetting resin can be used. The polymerizable groups of the UV-curable resin may be polymerized with each other, or the polymerizable group of these resins may be polymerized with the polymerizable group of the compound A. The polymer formed in the cured product of the present invention may have (a) a polymer formed from the compound A, (b) a polymer of the compound A and the resin, or (c) a polymer formed only from the resin. The polymer of various forms has barium sulfate particles which are present in the polymer in a dispersed state. Further, the respective polymers (a) to (c) present in the cured product obtained from the paste composition are simply referred to as "polymers" unless otherwise specified. The polymer in the cured product obtained from the paste composition is in any one of the above (a) to (c), or in accordance with the composition of the compound A, the resin, the polymerization accelerator, and the like contained in the paste composition, or These mixed forms exist. For example, when the polymerizable group of the compound A is an acrylate group and the polymerizable group of the resin is also an acrylate group, since a large amount of the compound A is present in the vicinity of the barium sulfate particles, the polymer of (a) is much more distant from sulfuric acid. In the region of the ruthenium particles, the polymer of (c) is many, and the polymer of (b) is present in the intermediate region. Further, as another example, the polymer of (a) and (c) may be produced from a paste composition containing a polymerizable group of an acrylate group-containing compound A and a polymerizable group of an epoxy group-containing resin-16-200839331. The cured product of the polymer. Further, when a plurality of resins are used, for example, a compound A having a polymerizable group as an acrylate group, a resin having a polymerizable group as an epoxy acrylate group, and a resin having a polymerizable group as an epoxy group are used. The component is copolymerized to obtain the polymer of (b). When the refractive index of the polymer in the cured product of the present invention and the barium sulfate particles are close to each other, the Rayleigh scattering of light incident on the cured product is small, and the light transmittance of the cured product is increased. Therefore, in order to obtain a light having a desired refractive index when an optical material-like light transmittance is required, it is preferred to set the type or mixing ratio of the compound A and the resin. Since the refractive index of barium sulfate is 1.6, in order to improve light transmittance, the refractive index of the obtained polymer is preferably close to 1.6, and more preferably the refractive index of the polymer is also 1.6. The polymer is composed of a substance other than barium sulfate particles contained in a paste composition such as a dispersant or a resin, and the refractive index of the obtained polymer is made close to 1. 6. Preferably, the type of each substance is determined. Or a mixture amount. However, when a plurality of substances having different refractive indexes are mixed to form a polymer having a certain refractive index, it is preferred that the refractive index of each substance is close to the intended refractive index, and a polymer having a small refractive index variation can be easily obtained. With respect to the refractive index of Compound A exemplified previously, "Η Ο A - M S " was 1.46, "ΗΟΑ-ΗΗ" was 1.48, and "HOA-MPL" was 1.52. Also, "Light-Acrylate Ρ-1Α" is 1.47, "Light-Ester Ρ-1Μ" is 1.47, "1^§1^- ugly 3{61»?-2%" is 1.47, and 110乂63182 is 1.54. In the use of optical materials such as optical waveguides, when "HOA-MPL" or RDX6 3 18 2 which is close to the refractive index of barium sulfate is used, the light transmittance of the cured product 17-200839331 obtained from the paste composition is used. It is easy to get better, so it is better. When the cured product obtained by using the paste composition of the present invention is a light-transmitting material which is required to have heat resistance and light transmittance, the polymerizable group of the thermosetting resin or the UV curable resin is preferably an epoxy group. An acrylate group, a methacrylate group, an epoxy acrylate group, an epoxy methacrylate group, or the like. However, when the epoxy resin or the like is subjected to cationic polymerization, the cationically active species are adsorbed to the barium sulfate particles, and the polymerization reaction is slowed down. (Therefore, it is preferably an acrylate resin, a methacrylate resin, an epoxy acrylate resin, or an epoxy methacrylate resin which is suitable for radical polymerization. As the optical wiring material, it is preferably as described above with barium sulfate The refractive index of the particle is close to, for example, an acrylate resin (refractive index: 1.55) represented by the following formula (11) or an epoxy acrylate resin represented by the following formula (12) (refractive index: 1.5). 6) When the paste composition is subjected to patterning by the lithography method, when the resin represented by the following formula (1 1) is selected as the resin, the residue of the unexposed portion at the time of development can be reduced. On the other hand, if the resin represented by the following formula (1 2) is selected as the resin, the temperature dependence or linear expansion of the refractive index of the cured product obtained from the paste composition can be reduced. Rate, and the system is more suitable. -18- 200839331

Vi yo 〇 i £u (u)ffioHHulo==lo"HuIHu-^ulo

U-H0

0=0, I9 o 7 * 7 il 7 olffiulHulffiuloiu=clHU HO I OHO-, HO 〇olwulHrKol?u==ISHffiu In the paste composition of the present invention, the content of the compound A, for 100 parts by weight of barium sulfate particles Preferably, it is 5 parts by weight or more and 20 parts by weight or less. When the content of the compound A is 5 parts by weight or more, the dispersibility of the barium sulfate particles can be increased, and the dispersed particle diameter of the barium sulfate particles 19 to 200839331 can be reduced, so that the composition of the paste of the present invention can be improved. The light transmittance of the cured product obtained by the object. Therefore, an optical waveguide having a small light propagation loss can be obtained. On the other hand, when the refractive index difference between the compound A and the barium sulfate is considered, when the content of the compound A is 20 parts by weight or less with respect to the barium sulfate particles, the light of the cured product obtained from the paste composition can be improved. Transparency. Therefore, an optical waveguide having a small light propagation loss can be obtained. Further, in the paste composition of the present invention, when the polymer obtained by curing is r only composed of the compound A, the content of the compound a is different from that of the compound A and the resin as a whole of the paste composition. Case. For example, in the aspect of the polymer (A) in which the compound A is polymerized and cured alone, the content of the compound A is not particularly limited, but is different from the volatile component such as an organic solvent in the paste composition. The solid content is preferably 20% by weight or more and 70% by weight or less. When the content of the compound A is 20% by weight or more based on the solid content other than the volatile component such as the organic solvent in the paste composition, the crack resistance of the obtained cured product or the adhesion to the substrate is improved. The resistance to cohesive failure is also high. When the content of the compound A is 30% by weight or more based on the volatile component other than the volatile component such as the organic solvent in the paste composition, the effect can be further improved. When the content of the compound A is 70% by weight or less based on the solid content other than the volatile component such as the organic solvent in the paste composition, the refractive index change rate due to the temperature of the obtained cured product can be further reduced. Or linear expansion rate. When the content of the compound A is 50% by weight or less based on the solid content of the volatile component such as the organic solvent in the paste composition, the effect can be further improved. -20- 200839331 On the other hand, when the polymer in the cured product contains the aspect of (b) or (C), the compound A and the resin are solid components other than the volatile component such as an organic solvent in the paste composition. The sum of the contents is preferably 20% by weight or more, more preferably 30% by weight or more. In addition, the solid content of the solid component other than the volatile component such as the organic solvent in the paste composition is preferably 70% by weight or less, and more preferably 50% by weight or less. The preferred reason within this range is the same as the reason of the above (a) aspect. The mixing ratio of the compound a to the resin can be arbitrarily set in accordance with the composition ratio of the polymer A to be produced and the polymer of the resin. When the content of the compound A is 1% by weight or more for the barium sulfate particles, high barium sulfate is used. The dispersibility of the particles is preferred. Further, when a resin having a polymerizable group is used, it is preferred to consider the polymerization characteristics of the compound A and the resin, and to set the mixing ratio. In other words, when (b 1 ) the compound A and the resin having a polymerizable group are each polymerized separately, when (b2) one compound A and a resin having a polymerizable group at the starting point are polymerized in a chain form, (b 3 ) When the compound A and the resin having a polymerizable group are alternately polymerized, the mixing ratio of the compound A and the polymer having a polymerizable group is different. For example, in the case of the aspect of the above (b3), when the compound A having an epoxy group and an epoxy acrylate group is alternately polymerized, the polymerizable group of the two is preferably the same as the paste of the present invention. The composition may contain a polymerization accelerator for generating an active species of a radical, a cation, an anion or the like in order to promote the polymerization of the compound A or the resin. The polymerization accelerator may be activated by light irradiation or heat treatment, and may be used separately depending on the application. When the paste composition is formed into a film of -21 - 200839331, by patterning, a polymerization accelerator activated by light irradiation is used. Examples of the polymerization accelerator which generates radicals by irradiation with UV light include an anthracene series, a benzophenone type, a triple well type, and a benzotriazole type. Further, examples of the polymerization accelerator which generates cations by irradiation with UV light include scaly, lanthanide, and iodine. The paste composition of the present invention contains barium sulfate having an average particle diameter of 1 nm or more and 50 nm or less. Further, the average particle diameter in the present invention is an index average particle diameter ^. The barium sulfate particles in the paste composition are present in a state in which the state of the primary particles which are completely agglomerated and the state in which the plurality of primary particles are aggregated are present. Here, the particle size of the barium sulfate particles in the paste composition refers to the particle diameter of the primary particles which are not aggregated, and the particle size of the aggregates of the primary particles. In order to produce a paste composition in which the dispersed barium sulfate particles have an average particle diameter of 5 Onm or less, the primary particles of the barium sulfate particles used must have an average particle diameter of 5 Onm or less. For example, BF-40 (average primary particle diameter i 〇 nm) manufactured by Nippon Chemical Industry Co., Ltd. can be mentioned. As a method of measuring the average particle diameter of the barium sulfate particles in the paste composition, a method of directly observing particles by SEM (scanning electron microscope) or TEM (transmission electron microscope) and calculating the number average of the particle diameters is exemplified. . When the average particle diameter of the barium sulfate particles in the paste composition is 50 nm or less, the homogeneity increases in each form of the paste composition and the cured product, and the Rayleigh of light caused by the barium sulfate particles is reduced. Scattering, so light transmission is also high. By using such a paste composition, a pilot wave path in which light propagation is small can be obtained. Further, when the average particle diameter of the barium sulfate particles dispersed in the paste composition is 3 Onm or less, the Rayleigh scattering caused by the barium sulfate particles is extremely small in the cured product obtained from the paste composition.显-22-200839331 shows the light transmittance substantially the same as that of the cured product containing no barium sulfate particles. When such a material is used, an optical waveguide having a very small light propagation loss can be obtained. On the other hand, when the particle size of the barium sulfate particles is 1 nm or more, the specific surface area becomes small with respect to the volume of the particles, so that the dispersibility of the particles becomes good. In the present invention, the content of the barium sulfate particles in the paste composition is preferably 30% by weight or more and 80% by weight or less based on the solid content other than the volatile component such as an organic solvent. When the content of the barium sulfate particles in the solid content in the paste composition is 30% by weight or more, the refractive index change rate or the linear expansion ratio due to the temperature of the cured product obtained from the paste composition is reduced. The content of the barium sulfate particles in the solid content in the paste composition is more preferably 50% by weight or more. When the content of the barium sulfate particles in the solid content in the paste composition is 80% by weight or less, the crack resistance or the adhesion to the substrate is improved, and the resistance to cohesive failure is also improved. Further, by using such a material, a cured product excellent in light transmittance can be obtained, so that an optical waveguide having a small light propagation loss can be obtained. Further, in the patterning by the lithography method, in order to reduce the residue of the unexposed portion during development, it is more preferable that the content of the barium sulfate particles in the paste composition is 70% by weight. the following. The paste composition of the present invention contains an organic solvent. Examples of the organic solvent include hydrazine, hydrazine-dimethylacetamide, N-methyl-2-pyrrolidone, dimethylimidazolidinone, dimethyl sulfoxide, γ-butyrolactone, and lactate B. Ester, 1-methoxy-2-propanol, 1-ethoxy-2-propanol, ethylene glycol mono-n-propyl ether, diacetone alcohol, tetrahydrofurfuryl alcohol, and the like. -23- 200839331 The paste composition of the present invention preferably contains a decane coupling agent. By including the ceramsite coupling agent, the pattern of the exposed portion can be reduced or peeled off during the patterning process of the lithography method, so that the occurrence of cracks can be suppressed and a clear pattern shape can be realized. Further, the residue of the unexposed portion can be further reduced. In general, it is known that a decane coupling agent has an effect of improving the adhesion of an inorganic material to an organic material. In the present invention, it is also expected to improve the adhesion between the resin component and the inorganic component in the composition or to improve the adhesion of the resin component in the composition to the inorganic substrate such as a ruthenium wafer. The pattern of the portion is thinned or peeled off, and the effect of cracking is suppressed. On the other hand, regarding the effect of reducing the residue of the unexposed portion in the pattern processing of the lithography method, the following reasons can be considered. When the developing liquid contacts the unexposed portion, the resin or the compound A or the like is eluted, and the barium sulfate particles captured by the compound A are also eluted. When the compound A is desorbed from the barium sulfate particles, the barium sulfate particles exposed on the surface are agglomerated with each other, and the resin or the like in the vicinity is also aggregated to become a development residue. However, if the decane coupling agent is present, the cerium coupling agent is more strongly bonded to the inorganic component cerium sulfate particles and the organic component compound A, so that the dispersibility of the barium sulfate particles during development is maintained, and the composition is rapidly dissolved. It is not easy to cause residue. As the decane coupling agent, 3 · glycidoxypropyl trimethoxy decane, 3 - glycidoxypropyl triethoxy decane, 3 - methacryloxypropyl trimethoxy decane, 3-Methyl propylene methoxy propyl triethoxy decane, N-2 (aminoethyl) 3-aminopropyl trimethoxy decane, N-2 (aminoethyl) 3-aminopropyl three Ethoxylate sand, 3-isocyanate propyl trimethoxy sand, 3-isocyanate propyl triethoxy decane, and the like. In addition, the content of the mixture of the decane-coupled-24-200839331 in the paste composition is preferably 0.1% by weight or more and 1% by weight or less based on the component other than the volatile component such as an organic solvent. When the content of the decane coupling agent is 0.1% by weight or more based on the solid content in the paste composition, a sufficient effect of the above decane coupling agent can be obtained. Further, the general decane coupling agent of the above-mentioned enumerator has a refractive index of 1.45 or less and a large difference in refractive index from barium sulfate particles. Therefore, in the solid content in the paste composition, when the content of the decane coupling agent is 1% by weight or less, Rayleigh scattering can be reduced and light transmittance can be improved, which is preferable. Further, the paste composition of the present invention may contain a dispersing agent other than the compound A. The content of the dispersing agent other than the compound A is preferably 5 parts by weight or more and 20 parts by weight or less based on 100 parts by weight of the barium sulfate particles. When the content of the dispersing agent other than the compound A is 5 parts by weight or more, the effect of improving the dispersibility of the barium sulfate particles is remarkable, and when the content is less than 20 parts by weight, the temperature of the cured product obtained from the paste composition is The resulting refractive index change rate or linear expansion ratio becomes small. Next, a method of producing the paste composition of the present invention will be described in detail. First, a method of producing a dispersion in which barium sulfate particles are dispersed in an organic solvent is shown. The barium sulfate particles (secondary particles containing agglomerated state) having an average primary particle diameter of 50 nm or less, the compound A, the organic solvent, and other resins, a pH adjuster, a polymerization inhibitor, and the like as needed are mixed in a specified amount. Stir. Since the air layer immediately covers the surface of the barium sulfate particles after mixing, there is a case where the barium sulfate particles are insufficiently wetted with the organic solvent to increase the viscosity. In this case, it is preferred to stir with a rotating blade or the like until the barium sulfate particles are completely wetted with the organic solvent. -25- 200839331 When mixing barium sulfate particles, the total amount or a part of the necessary resin for the purpose of producing a cured product may be added. In comparison with the case where the resin is added after the dispersion treatment, when the resin is added before the dispersion treatment, the resin and the barium sulfate particles can be uniformly mixed. On the other hand, when the viscosity of the dispersion increases, the efficiency of the dispersion treatment may be deteriorated, or the storage stability of the dispersion liquid after the dispersion treatment may be deteriorated. Regarding the compound A, the necessary amount may be fully charged before the dispersion treatment, or a part of the necessary amount may be previously charged before the dispersion treatment, and the remaining amount may be added after the dispersion treatment. Further, the compound A or other substance may be gradually added while measuring the properties such as the viscosity of the dispersion in the dispersion treatment. Further, a polymerization accelerator, an antifoaming agent, an antioxidant, a polymerization inhibitor, a plasticizer, a decane coupling agent, and the like which are necessary for the purpose of producing a cured product may be added. However, from the viewpoint of preservation stability of the dispersion, it is preferred to add a polymerization accelerator or the like immediately before the production of the paste composition. The barium sulfate particles (secondary particles including agglomerated state), the compound A, the organic solvent, and other necessary substances are mixed and stirred, and then the barium sulfate particles are dispersed by a dispersing device. For example, a bead mill such as "Star Mill" (trade name) manufactured by "Ultra Apex Mill" (trade name) ASHIZAWA Precision Technology Co., Ltd., manufactured by Shou Industrial Co., Ltd., may be mentioned. The average particle diameter of the beads used in the bead mill is preferably 0.0 1 mm or more and 0.5 mm or less. When the average particle diameter of the beads is 〇.5 mm or less, since the contact frequency of the barium sulfate particles in the bead mill with the beads is high, the effect of sufficiently dispersing is obtained. On the other hand, when the average particle diameter of the beads is 0.0 1 mm or more, since the amount of movement of each of the beads is large, the sufficient shear stress for dispersing the aggregated barium sulfate particles can be obtained from -26 to 200839331. As the beads, ceramics, glass, metal or the like can be used. Examples of the material of the beads include soda glass, quartz, titanium oxide, cerium nitride, tantalum carbide, aluminum oxide, zirconium oxide, chromium silicate, steel, stainless steel, and the like. Among these, chrome oxide beads having high hardness are particularly suitable. The dispersion of the bead mill can be carried out by using a small bead for one treatment or by changing the size of the bead. For example, the beads having a particle diameter of 0.5 mm may be first subjected to dispersion treatment until the dispersed particle diameter of the barium sulfate particles is about 100 nm, and then the dispersion treatment is carried out using minute beads. The time taken for the dispersion treatment is appropriately set in accordance with the type or composition ratio of the barium sulfate particles or the substance constituting the dispersion of the compound A or the organic solvent. Further, by sampling the dispersion liquid every predetermined period of time and measuring the average particle diameter of the barium sulfate particles in the dispersion liquid, it is preferable to grasp the change over time in the dispersion state and judge the end of the dispersion treatment. The apparatus for measuring the particle size of the barium sulfate particles in the dispersion liquid is "Zeatsiz ernano ZS" (trade name) manufactured by SYSMEX Co., Ltd., which is a dynamic light scattering method. Next, a method of producing a paste composition by mixing the obtained dispersion liquid with a resin or the like by the above method will be described. However, when a substance required for the purpose of producing a cured product is completely mixed at the time of production of the dispersion, the dispersion obtained by the above method is a paste composition of the present invention. When the resin is mixed in the dispersion of barium sulfate particles, the type or amount of the resin to be mixed is selected in accordance with the composition of the compound A or the like in the dispersion. When the optical composition of the -27-200839331 optical waveguide is produced by using the paste composition in which the barium sulfate particles are dispersed according to the present invention, the refractive index of the polymer obtained from the compound A and the resin is close to that of the barium sulfate particles (1. After 6), the light propagation loss of the optical waveguide can be reduced, so it is better. When the dispersion and the resin are mixed, the dispersion may be injected into the resin until a predetermined amount is reached, or the resin may be injected into the dispersion until a predetermined amount is reached. At the time of manufacture of the paste composition, Compound A may be further added to adjust the composition. The paste composition obtained by mixing a predetermined amount of the dispersion liquid, the resin, or the like may be subjected to a treatment using a ball mill or a roll mill in order to be more homogeneous. Further, when bubbles are mixed in the paste composition by the mixing treatment, if the bubbles are removed by standing, under reduced pressure, or by using a stirring defoaming machine or the like, it is possible to prevent the bubbles from being mixed into the cured product produced by using the paste composition. in. In order to adjust the viscosity of the paste composition, an organic solvent may be further added, or an organic solvent may be appropriately removed by heating or depressurization. Further, the polymerization reaction of the compound A or the resin may be appropriately carried out by heat treatment or light irradiation. By hardening the paste composition produced as described above, a cured product in which barium sulfate particles are dispersed in the polymer can be produced. Next, an example of a method of hardening the paste composition of the present invention will be described. First, the paste composition is applied onto a substrate, stretched to form a film or a yarn, and after being molded by pouring into a mold or the like, the organic solvent in the paste composition is removed by heat treatment. Examples of the method for removing the organic solvent include heat drying in an oven or a hot plate, heating in a vacuum drying, electromagnetic waves such as infrared rays or microwaves, and the like. Here, when the removal of the organic solvent is insufficient, the composition obtained by the subsequent hardening treatment is in an uncured state, and the thermomechanical properties are deteriorated. -28-200839331 After the removal of the organic solvent, the curing reaction of the paste composition is carried out by heat treatment, light irradiation or the like according to the curing mechanism of the compound A or the resin in the paste composition to be used. In this case, in order to completely cure the heat treatment after light irradiation, a plurality of treatments may be combined. Further, when the heat treatment is carried out in an environment of 100 ° C or higher, it is preferred to treat the mixture in an inert atmosphere such as nitrogen to suppress oxidation of the polymer. Further, in the composition in which a radical-generating polymerization accelerator (which loses activity due to oxygen) is used, when it is cured by light irradiation, if it is treated under an inert atmosphere such as nitrogen, polymerization is not inhibited. Therefore, it is more appropriate. When the patterning process is performed by the lithography method, the paste composition is first applied onto the substrate, and after removing the organic solvent, the light is irradiated through the designed mask only by passing the light through a necessary portion corresponding to the pattern. Light corresponding to the hardened wavelength range of the paste composition. Examples of the light source include an ultrahigh pressure mercury lamp, a metal halide lamp, a halogen lamp, a helium-neon laser, and a YAG laser. As the exposure apparatus, an ultrahigh pressure mercury lamp exposure apparatus PEM-6M (manufactured by UNION Optical Co., Ltd.) or the like can be given. When the curing mechanism of the paste composition is a radical polymerization, in order to prevent the radical reaction species from being deactivated by oxidation, it is preferred to perform exposure treatment under a nitrogen atmosphere. Further, in order to improve the resolution of the pattern, it is preferable to increase the parallelism of the irradiation light of the exposure apparatus, and in order to reduce the influence of the diffracted light of the mask, it is preferable to bring the mask into contact with the substrate or to reduce the gap between the mask and the substrate. At the time of exposure, the edge of the pattern is distorted due to scattering of the illuminating light inside the dried paste composition. In this case, if the ultraviolet absorber is added to the paste composition in advance, since the ultraviolet absorber absorbs the weak light of -29-200839331 leaking from the exposed portion and suppresses the scattering, the edge of the pattern can be sharply maintained. should. The scattering inside the dried paste composition 'the Rayleigh scattering from the barium sulfate particles is large, and the shorter the wavelength of light', the greater the scattering. Therefore, it is also preferred to use an ultraviolet absorber which can selectively absorb light of a short wavelength. Further, by inserting a filter for cutting short-wavelength light between the light source and the photomask, scattering can be suppressed. In order to carry out the hardening reaction after the exposure, the substrate may be stored at room temperature for a certain period of time for heat treatment. After the exposure treatment, the substrate is immersed in the developing solution to remove the paste composition of the unexposed portion, and the substrate on which the cured pattern is formed is washed and dried, and may be further subjected to heat treatment for the curing reaction. The paste composition or cured product of the present invention is preferably used in an optical waveguide. The optical waveguide system is formed on a circuit board such as an electronic device and has a function of transmitting an optical signal between 1C packaged on the substrate. The optical waveguide is composed of a core portion propagated by an optical signal and a cladding portion having a lower refractive index than a core portion of the core portion. Fig. 1 shows the structure of a channel type optical waveguide, and Fig. 2 shows the structure of a plate type optical waveguide. The channel type optical waveguide has a structure in which the cladding portion 2 surrounds the periphery of the linear core portion 1. The plate type optical waveguide has a layered cladding portion 2 covering the upper and lower layers of the layered core portion 1. The paste composition of the present invention can be used for both the core portion and the cladding portion, or can be used alone. Since the paste composition of the present invention can be patterned by light irradiation, it is preferable to use a material for forming a core portion, and it is possible to easily manufacture optical waveguides of various shapes. Further, it is preferable that the refractive index difference between the core portion and the cladding portion is large, and the effect of enclosing the propagating light is large. The refractive index or thickness of the cladding portion and the core portion of the optical waveguide can be selected in accordance with the optical waveguide of the -30-200839331 I. In the case of a multimode optical waveguide, it is suitable to increase the refractive index difference between the core and the cladding portion. In the case of a single-mode optical waveguide, the difference in refractive index between the core and the cladding is reduced, and the core is thinned to achieve single mode propagation. In the method of manufacturing a channel type optical waveguide, for example, the following. The paste composition for the under cladding layer is applied onto a substrate such as a glass or sand wafer, a glass epoxy substrate, or a plastic film, and dried and hardened to form an under cladding portion & Further, a core composition for a core is applied to the lower cladding portion and dried to form a film-shaped core portion. Next, the film-shaped core is processed into a waveguide pattern. When the core paste composition is polymerized by light irradiation, pattern formation can be performed by a lithography method. Further, when the core paste composition is polymerized by heat, the pattern can be formed by reactive ion etching or the like. Next, a paste composition for a clad portion is applied over the core, dried, and cured to form an over cladding portion. The method for forming the coating film is not particularly limited, and for example, a method using a device such as a spin coater, a screen printing machine, a blade coater, or a die coater can be used. [Embodiment] Hereinafter, embodiments of the present invention will be described, but the present invention is not limited thereto. Further, among the compounds used in the examples, the abbreviations used are as follows. DMAc : N,N-dimethylacetamide THFA: a cured product of tetrahydrofurfuryl alcohol from a dispersion of barium sulfate particles, a paste composition, and a method for measuring various characteristics of the optical waveguide of the 31-200839331 . <Method for Measuring Refractive Index of Hardened Material Obtained from Paste Composition> Using a 稜鏡coupler device 2010 manufactured by METRICON Co., Ltd. and a dedicated P -1 稜鏡 at a wavelength of 85 mM and a temperature of 25 ° C, the refractive index of the cured product obtained from the paste composition in the form of a film was obtained. Further, the refractive indices of 40 ° C, 60 ° C, 80 ° C, and 1 〇〇 ° C were measured by the same apparatus, and the slopes of these four points were obtained by the least square method, and the refractive index was calculated for temperature. Change (refractive index temperature dependence). <Method for Measuring Light Propagation Loss of Optical Guide Wave Path> According to the JPCA specification (JPCA-PE02-05-0 S-2004), it is measured by the cwib (c u t b a c k) method. The fiber on the incident side and the exit side was a multimode type in which the number of openings having a core diameter of 5 Ο μη was 0.28. The measurement temperature was 23 t, and the wavelength of the light source was measured to be 8 5 0 n m. <Method for Measuring Average Particle Diameter of Raw Material Barium Sulfate Particles Coagulated Before Production of Dispersion> The measurement was carried out by using an optical microscope as follows. The particles are placed on a transparent plate such as glass, and the transparent plate carrying the particles is placed on an observation stage of an optical microscope, and the light is irradiated from the lower side of the transparent plate, and the CCD camera mounted on the eyepiece portion instead of the optical microscope is attached. The ADP-240M (FLOVEL system) is used to input the optical image as a digital image into the computer. The image processing software FlvFs (made by FLOVEL) is used to obtain a spherical approximation for any 100 particles observed. The particle diameter at the time was calculated and the number average particle diameter was calculated. <Method for Measuring Average Particle Diameter of Barium Sulfate Particles in Dispersion> On a carbon-deposited rubber film, the dispersion was dropped, and the organic solvent-32-200839331 was removed to obtain a transmission electron microscope H. -71 OOFA (Hitachi Manufacturing Co., Ltd.) to observe barium sulfate particles. The acceleration voltage is l〇okv. The observed image is used as a digital image input computer. The image processing software FlvFs (manufactured by FLOVEL) is used to obtain the particle size of the spherical approximation for any one of the observed particles, and the number average particle diameter is calculated. . Further, when the primary particles are aggregated, the particle size of the aggregates is measured. <Method for Measuring Average Particle Diameter of Barium Sulfate Particles in Paste Composition> The paste composition was dropped on a carbon-deposited rubber film, and the organic solvent was dried and removed, and then subjected to a transmission electron microscope H-7 10 OF A (manufactured by Hitachi, Ltd.) to observe barium sulfate particles. The acceleration voltage is l〇〇kV. The observed image was used as a digital image input computer, and the image processing software FlvFs (manufactured by FLOVEL) was used to obtain the spherical average particle size of any 100 particles observed, and the number average particle diameter was calculated. Further, when the primary particles are aggregated, the particle size of the aggregates is measured. <Method for Measuring Linear Expansion Ratio of Cured Product Obtained from Paste Composition> Using TMA measuring device TMA/SS6100 manufactured by SII Nanotechnology Co., Ltd., heating from room temperature to 1 20 ° in a nitrogen atmosphere When C is further cooled to room temperature, the displacement of the size of the cured product obtained from the paste composition is measured by a press-in load of 5 OmN, and the average line of the temperature rise and fall from 50 ° C to 70 ° C is calculated. Expansion rate. In order to remove the temperature of the linear expansion rate, the temperature was continuously raised and lowered, and the temperature was repeated twice, and the second measurement result was used as the displacement 値. <Production of Dispersion> Dispersions A to P were produced as follows. The barium sulfate secondary particles BF-40 (manufactured by Nippon Chemical Industry Co., Ltd., average 2 particles - 33 - 200839331 diameter 15 μm, average primary particle diameter l 〇 nm) and dispersed were mixed at the respective amounts shown in Table 1. The agent and the organic solvent were treated by a homogenizer "Excleauto, trade name, manufactured by Nippon Seiki Co., Ltd." at a peripheral speed of a 5 m/s rotary blade tip for 1 hour to disperse the barium sulfate particles. The above-mentioned dispersion liquid to be treated by the homogenizer is subjected to dispersion treatment using "ULTRA APEX MILLUAM-015" (trade name) (manufactured by Shou Industrial Co., Ltd.) as a ball mill. The material of the beads is chromium oxide, and the average particle size is 0.05 mm (manufactured by NIKKATO, YTZ ball), the input amount is 400 g. In addition, the peripheral speed of the bead mill rotor is 9.5 m/s, and the liquid supply pressure is 0.1 MPa. Dispersion treatment time is dispersion A When Ο is 1 〇, P is 1 hour, and after completion of the dispersion treatment, the liquid is recovered to obtain a dispersion of barium sulfate particles. Table 1 shows the average particle diameter of barium sulfate particles in the dispersion at the end of dispersion. 1 "HOA-MPL" (trade name), "HOA-H" used as a dispersing agent "H" (trade name) is a compound having a polymerizable group and a mercapto group, and is also a "light-Ester P-1M" (trade name, Kyoeisha Chemical Co., Ltd.). And "RDX63182" (trade name, manufactured by DAICEL-CYTEC Co., Ltd.) is a phosphate compound having a polymerizable group. "Disperbyk-1 1 1, (trade name, BYK Japan Co., Ltd.) does not have A polymerizable group phosphate compound. -34- 200839331 [Table 1] Dispersion composition dispersion treatment time (h) Average particle size (nm) Barium sulfate amount (g) Dispersant "HOA-MPL, ΗΟΑ-ΗΗ compound having a polymerizable group and a carboxyl group, Light -Ester Ρ-1Μ, RDX63182 is a compound of pity ester compound with polymerizable group A) Organic solvent mn loo For barium sulfate, dispersant halo (Ray content) Material amount (g) (g) Dispersion A 200 HOA-MPL 30 THFA 270 15 10 22 Dispersion B 200 HOA-MPL 8 THFA 292 4 10 33 Dispersion c 200 HOA-MPL 14 THFA 286 7 10 24 Dispersion D 200 HOA-MPL 60 THFA 240 30 10 26 Dispersion E 200 HOA-HH 30 THFA 270 15 10 26 Dispersion F 200 HOA-HH 8 THFA 292 4 10 37 Dispersion G 200 HOA-HH 14 THFA 286 7 10 25 Dispersion Η 200 HOA- HH 60 THFA 240 30 10 26 Dispersion I 200 Light-Ester P-1 Μ 30 DMAc 270 15 10 19 Dispersion J 200 Light-Ester P-1 Μ 8 DMAc 292 4 10 31 Dispersion K 200 Light-Ester P- 1 M 14 DMAc 286 7 10 20 Dispersion L 200 Light-Ester P-1 M 60 DMAc 240 30 10 21 Dispersion Μ 200 RDX63182 30 DMAc 270 1 5 10 29 Dispersion Ν 200 Disperbyk-111 30 DMAc 270 15 10 31 Dispersion 〇200 Disperbyk-111 10 DMAc 290 5 10 40 Dispersion Ρ 200 HOA-MPL 30 THFA 270 15 1 49 -35- 200839331 Example 1 Use The ball mill was mixed with 9.8 g of the dispersion A, 5 g of the resin represented by the above formula (1 1), 0.1 g of the lanthanide UV-active polymerization accelerator OXE02 (made by Ciba Specialty Chemicals Co., Ltd.), and 0.2 g of the decane coupling agent. "KBM403" (trade name, Shin-Etsu Chemical Co., Ltd., chemical name: 3-glycidoxypropyltrimethoxydecane) to prepare a paste composition. Further, in the paste composition, the content of barium sulfate particles in the solid component other than the organic solvent was 40% by weight. Further, the average particle diameter of the barium sulfate particles in the paste composition was 26 nm. The paste composition was applied onto a quartz substrate by a spin coater, dried in an air oven at 80 ° C for 1 hour in the atmosphere, and then subjected to an ultrahigh pressure mercury lamp exposure apparatus (PEOM-6M manufactured by UNION Optics). The hardening treatment of the paste composition was carried out by exposure to ultraviolet rays of 50 mJ/cm 2 to produce a film-like cured product having a thickness of 1 μm. At a wavelength of 850 nm and a temperature of 25 ° C, the refractive index of the film-like cured product was 1.55 6, and the temperature change rate of the refractive index was 5 1 p p m / °C. On the other hand, using a paste composition, a cured product for evaluation of linear expansion ratio was produced as follows. Apply 10mm x 10mm "Teflon (registered trademark)" tape to the Φ4吋 wafer, and place the 8mm inner diameter "Teflon (registered trademark)" tape on the 内径4mm. The paste composition obtained above was injected into a "Teflon (registered trademark)" tape in such a manner that the height became 1 mm. Then, it was dried in an air oven at 80 ° C for 1 hour in the atmosphere, and then subjected to hardening treatment of a paste composition using an ultrahigh pressure mercury lamp exposure apparatus (PEOM-6M manufactured by UNION Optics Co., Ltd.), and exposed to ultraviolet rays of 50 mJ/cm 2 . A cured product having a thickness of 8 mm and a thickness of 1 mm on the bottom surface was produced. The obtained cured product was taken out from the "Teflon (registered trademark)" tape, and the linear expansion ratio in the direction of -36 - 200839331 was measured and found to be 44 ppm/°C. On the other hand, using a paste composition, an optical waveguide is manufactured as follows. First, a liquid epoxy resin (#314, manufactured by EPOTEK Co., Ltd.) was applied onto a Φ4 吋 矽 wafer using a spin coater, and dried in an atmosphere at 80 ° C for 1 hour in an oven, and then hardened in nitrogen gas. The mixture was heated at 150 ° C for 1 hour to form a lower cladding portion having a thickness of 5 μm. The refractive index of the lower cladding portion at a wavelength of 850 nm and a temperature of 25 ° C was measured and found to be 1.5 02. Next, the paste group and the object were applied onto the under cladding portion formed on the quartz substrate by a spin coater, and dried in an atmosphere at 80 ° C for 1 hour in an oven to obtain a paste composition having a thickness of 50 μm. Dry film of matter. To the obtained film, an ultrahigh pressure mercury lamp exposure apparatus (PEM-6M manufactured by UNION Optics Co., Ltd.) was used, and exposed to ultraviolet rays of 50 mJ/cm 2 through a quartz mask. The quartz reticle has a slit portion having a width of 50 μm and a length of 9 cm, and is shielded from light by a portion other than the slit portion. The substrate after the exposure was immersed in a developing solution P-7G (manufactured by Tokyo Ohka Kogyo Co., Ltd.) for 5 minutes, and the film of the unexposed portion was removed to form a core portion having a shape of a width of 50 μm and a length of 9 cm. The pattern after development was a clear rectangle, and no crack occurred, and no residue was observed in the unexposed portion, and the developing property was good. Further, the same material as that of the under cladding portion was applied by using a spin coater, and after drying at 8 ° C for 1 hour, it was heated at 150 ° C for 1 hour in nitrogen gas for hardening to form a thickness of 5 μm. The upper cladding portion obtains an optical waveguide. Using a cutting device, the optical propagation loss was obtained by cutting both ends of the optical waveguide for each substrate, and the result was 〇3 dB/em. Examples 2 to 2 9 0 A composition of paste-37-200839331 having the composition shown in Tables 2 to 31 was produced in the same manner as in Example 1 to produce a cured product for evaluation of physical properties and an optical waveguide. Further, in Examples 209 to 226, when a paste composition was produced and a dispersion liquid was produced without adding a resin, the compound A used was added and added. The evaluation results are shown in Tables 2 to 31. Here, the resin A is represented by the above formula (1 1 ), and the resin B is represented by the above formula (1 2). Further, the decane coupling agent "KBM 5 03 " (trade name) is a system name of 3-methyl propylene methoxy propyl trimethoxy decane, manufactured by Shin-Etsu Chemical Co., Ltd. Further, in the case of producing an optical waveguide, an example in which a film-like residue is present on the surface of the substrate on the unexposed portion after development is described, and in the column of the visibility of Tables 2 to 31, "unexposed portion" is described. There is residue." Further, in the case of producing an optical waveguide, in the case where the crack is present in the core portion after development, the development of Tables 2 to 31 is described as "the core is cracked" -38 - 200839331 [Table 2] Paste composition composition dispersion resin polymerization accelerator decane coupling agent Solid content solid content solid content of compound A and resin (weight sample name (g) material denier (g) material amount (g) Barium sulfate content (% by weight) in the amount of material (g) Example 1 Dispersion A 9.8 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 2 Dispersion A 2.4 Resin A 5 OXE02 0.1 KBM403 0.2 15 80 Example 3 Dispersion Liquid A 3.4 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 4 Dispersion A 15.4 Resin A 3 OXE02 0.06 KBM403 0.12 60 38 Example 5 Dispersion A 26.5 Resin A 1 OXE02 0.02 KBM403 0.04 80 20 Example 6 Dispersion A 50.1 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 7 Dispersion B 9.1 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 8 Dispersion B 2.3 Resin A 5 OXE02 0.1 KBM403 0.2 15 81 Example 9 Dispersion B 3 .3 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 10 Dispersion B 12.7 Resin A 3 OXE02 0.06 KBM403 0.12 60 37 Example 11 Dispersion B 12.6 Resin A 1 OXE02 0.02 KBM403 0.04 80 18 Example 12 Dispersion B 9.7 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 14 Example 13 Dispersion C 9.3 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 14 Dispersion C 2.4 Resin A 5 OXE02 0.1 KBM403 0.2 15 80 Example 15 Dispersion C 3.4 Resin A 5 OXE02 0.1 KBM403 0.2 20 75 Example 16 Dispersion c 13.3 Resin A 3 OXE02 0.06 KBM403 0.12 60 38 Example 17 Dispersion C 14.7 Casing A 1 OXE02 0.02 KBM403 0.04 80 20 Example 18 Dispersion C 12.4 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 19 Dispersion D 11.0 Measurement A 5 OXE02 0.1 KBM403 0.2 40 57 Example 20 Dispersion D 2.5 Resin A 5 OXE02 0.1 KBM403 0.2 15 81 Example 21 Dispersion D 3.6 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 22 Dispersion D 21.7 Resin A 3 OXE02 0.06 KBM403 0.12 60 39 -39- 200839331 [Table 3] Results Average particle size (nm) Refractive index refractive index in paste composition Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 1 26 1.556 51 44 Good 0.3 Example 2 23 1.552 56 52 Good 0.3 Example 3 25 1.553 55 51 Good 0.3 Example 4 27 1.562 44 37 Good 0.3 Example 5 29 1.572 31 24 Good 0.4 Example 6 32 1.575 25 18 Unexposed part has cracks in the core of the residue 0.5 Example 7 37 1.558 52 46 Good 0.6 Example 8 35 1.552 57 52 Good 0.5 Example 9 35 1.553 56 50 Good 0.6 Example 10 36 1.566 44 36 Good 0.6 Example 11 39 1.578 33 25 Good 0.7 Example 12 42 1.583 26 17 Unexposed part with residue core Cracking occurred 0.8 Example 13 25 1.558 49 44 Good 0.3 Example Μ 24 1.552 55 51 Good 0.3 Example 15 25 1.553 56 51 Good 0.3 Example 16 27 1.565 44 37 Good 0.3 Example Π 29 1.577 30 23 Good 0.4 Example 18 31 1.581 24 18 Unexposed part with crack in the core of the residue 0.5 Example 19 27 1.554 52 43 Good 0.5 Example 20 25 1.551 55 51 Good 0.4 Example 21 25 1.552 55 51 Good 0.5 Real Example 22 27 1.557 43 37 Good 0.6 -40- 200839331 [Table 4]

Paste composition composition dispersion medium polymerization accelerator cesium hydride coupling agent solid content of barium sulfate content (% by weight) in the solid content of the compound sample name (g) amount of material (g) amount of material (g) amount of material (g Contents of A and Resin (% by weight) Example 23 Dispersion A 9.8 Resin A 5 OXE02 0.1 KBM 503 0.2 40 57 Example 24 Dispersion A 2.4 Resin A 5 OXE02 0.1 KBM 503 0.2 15 80 Example 25 Dispersion A 3.4 Resin A 5 OXE02 0.1 KBM503 0.2 20 76 Example 26 Dispersion A 15.4 shed A 3 OXE02 0.06 KBM503 0.12 60 38 Example 27 Dispersion A 26.5 Resin A 1 OXE02 0.02 KBM503 0.04 80 20 Example 28 Dispersion A 50.1 Resin A 0.5 OXE02 0.01 KBM503 0.02 85 15 Example 29 Dispersion B 9.1 Resin A 5 OXE02 0.1 KBM503 0.2 40 57 Example 30 Dispersion C 9.3 A5 OXE02 0.1 KBM503 0.2 40 57 Example 31 Dispersion D 11.0 Resin A 5 OXE02 0.1 KBM503 0.2 40 57 Example 32 Dispersion A 9.4 Resin A 5 OXE02 0.1 ^fnrr. Μ j \\\ 40 59 Example 33 Dispersion A 2.3 shed A 5 OXE02 0.1 Sister j\\\ int. illl ! J\\\ 15 8 3 Example 34 Dispersion A 3.3 Resin A 5 OXE02 0.1 Μ ^\\\ Arxr Mil j \\\ 20 79 Example 35 Dispersion A 14.8 Resin A 3 OXE02 0.06 vfnrr tltt j\\\ inL ftTt jw\ 60 39 Example 36 Dispersion A 25.5 Resin A 1 OXE02 0.02 Μ j\\\ fill? J \\\ 80 20 Example 37 Dispersion A 48.2 Resin A 0.5 OXE02 0.01 Μ j\\\ and J\\\ 85 15 Implementation Example 38 Dispersion B 8.7 Resin A 5 OXE02 0.1 r titr A\\T. it 11? J \\\ 40 59 Example 39 Dispersion B 2.2 Resin A 5 OXE02 0.1 4ί Μ* ΊΤΤΓ \Ν irrr J \ \\ 15 84 Example 40 Dispersion B 3.2 Resin A 5 OXE02 0.1 4rrr Η ιΠ > fnT 11Π! j \\\ 20 79 Example 41 Dispersion B 12.2 Resin A 3 OXE02 0.06 4γγτ. 11 lit 4επι 111 tr y \ \ \ 60 39 Example 42 Dispersion B 12.1 Resin A 1 OXE02 0.02 No 80 20 Example 43 Dispersion B 9.3 Resin A 0.5 OXE02 0.01 Μ > frrr. m 85 14 Example 44 Dispersion c 8.9 Resin A 5 OXE02 0.1 Newist /\\\ 40 59 Example 45 Dispersion c 2.3 Resin A 5 OXE02 0.1 Μ /\\\ j \\\ 15 83 Example 46 Dispersion C 3.3 Resin A 5 OXE02 0.1 dot. Milt J\\ \ and 20 78 Example 47 Dispersion C 12.8 Resin A 3 OXE02 0.06 Μ ^\\\ No 60 39 Example 48 Dispersion C 14.2 Resin A 1 OXE02 0.02 彳m·-ΙΜΓ ^\\\ MJ \ 80 20 Example 49 Dispersion C 12.0 Resin A 0.5 OXE02 0.01 M: J i N\ 85 15 -41 200839331 [Table 5] Results Average particle size (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Line Expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 23 27 1.556 50 42 Good 0.3 Example 24 24 1.552 55 52 Good 0.3 Example 25 26 1.553 55 52 Good 0.3 Example 26 27 1.562 43 38 Good 0.3 Example 27 29 1.572 31 25 Good 0.4 Example 28 33 1.578 24 19 Unexposed part has cracks in the core of the residue 0.5 Example 29 35 1.558 51 44 Good 0.6 Example 30 25 1.558 53 41 Good 0.3 Implementation Example 31 25 1.554 53 42 Good 0.5 Example 32 25 1.556 51 42 Good 0.4 Example 33 22 1.552 55 51 Good 0.3 Example 34 25 1.553 54 50 Good 0.3 Example 35 26 1.562 44 37 Good 0.4 Example 36 30 1.572 32 24 core cracks 0.4 implementation 37 31 1.578 24 18 Unexposed part with crack in the core of the residue 0.5 Example 38 36 1.558 51 43 Good 0.6 Example 39 35 1.552 56 52 Good 0.5 Example 40 36 1.553 56 51 Good 0.6 Example 41 36 1.566 43 36 Good 0.6 Example 42 36 1.578 31 22 Crack occurred in the core 0.7 Example 43 41 1.583 25 17 Crack in the core portion of the unexposed portion 0.8 Example 44 25 1.558 52 43 Good 0.4 Example 45 25 1.552 56 51 Good 0.3 Example 46 24 1.553 55 51 Good 0.3 Example 47 26 1.565 43 37 Good 0.4 Example 48 29 1.577 31 24 Crack occurred in the core 0.4 Example 49 33 1.581 24 18 Unexposed part has cracks in the core of the residue 0.5 -42- 200839331 Table 6]

Paste composition composition Dispersion resin Polymerization accelerator decane coupling agent Solid component Solid component Solid component content (g) Material amount (g) Material amount (g) Material amount (g) Barium sulphate content (% by weight) Content A and Resin Content (% by weight) Example 50 Dispersion D 10.6 shed A 5 OXE02 0.1 No and J \ w 40 59 Example 51 Dispersion D 2.4 Resin A 5 OXE02 0.1 Μ j \\\ M /\\ 15 15 Example 52 Dispersion D 3.5 Resin A 5 OXE02 0.1 tilt yfrrr. tilt y\\s 20 78 Example 53 Dispersion D 20.9 Resin A 3 OXE02 0.06 Μ yvw and 60 40 Example 54 Dispersion E 9.8 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 55 Dispersion E 2.4 Resin A 5 OXE02 0.1 KBM403 0.2 15 80 Example 56 Dispersion E 3.4 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 57 Dispersion E 15.4 Resin A 3 OXE02 0.06 KBM403 0.12 60 38 Example 58 Dispersion E 26.5 Resin A 1 OXE02 0.02 KBM403 0.04 80 20 Example 59 Dispersion E 50.1 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 60 Dispersion F 9.1 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 61 Dispersion G 9.3 Resin A 5 OXE02 0.1 ICBM403 0.2 40 57 Example 62 Dispersion Η 11.0 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 63 Dispersion Ε 9.4 Resin A 5 OXE02 0.1 Μ j \ \\ 4rrr None 40 59 Example 64 Dispersion Ε 2.3 shed A 5 OXE02 0.1 4ττΐ ILjI! j\\\ llllt >,,, 15 83 Example 65 Dispersion Ε 3.3 Resin A 5 OXE02 0.1 4nr lilt dxxc trnt y\w 20 79 Example 66 Dispersion Ε 14.8 Resin A 3 OXE02 0.06 No M j\\\ 60 39 Example 67 Dispersion Ε 25.5 Resin A 1 OXE02 0.02 4τχτ titr j \\\ 嘉 j\\\ 80 20 Example 68 Dispersion Ε 48.2 Resin A 0.5 OXE02 0.01 iXXL· II 11 - J\\\ 85 15 Example 69 Dispersion F 8.7 Resin A 5 OXE02 0.1 M 40 59 Example 7 〇 Dispersion G 8.9 Resin A 5 OXE02 0.1 > Fnrr Mttt /\\\ 迦^\\\ 40 59 Example 71 Dispersion Η 10.6 Resin A 5 OXE02 0.1 4rrr. 11 lit j \\\ No 40 59 -43- 200839331 [Table 7] Results in the paste composition Average particle size (nm) Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Imaging twin light propagation loss (dB/cm) Example 50 24 1.554 51 43 Good 0.5 Example 51 23 1.551 56 51 Good 0.4 Example 52 24 1.552 55 51 Good 0.5 Example 53 26 1.557 43 37 Good 0.6 Example 54 30 1.553 52 44 Good 0.5 Example 55 29 1.551 56 51 Good 0.3 Example 56 30 1.551 55 51 Good 0.4 Example 57 31 1.555 43 38 Good 0.5 Example 58 34 1.560 33 25 Good 0.5 Example 59 39 1.561 27 20 Unexposed part with residue core Cracking occurred 0.6 Example 60 42 1.557 51 43 Good 0.7 Example 61 33 1.556 51 44 Good 0.5 Example 62 32 1.547 50 44 Good 0.6 Example 63 29 1.553 52 43 Good 0.5 Example 64 30 1.551 55 52 Good 0.3 Example 65 29 1.551 54 51 Good 0.4 Example 66 30 1.555 44 36 Good 0.5 Example 67 33 1.560 31 24 Crack occurred in the core 0.5 Example 68 40 1.561 25 18 Unexposed part has cracks in the core of the residue 0.6 Example 69 43 1.557 51 43 Good 0.7 Example 70 31 1.556 51 43 Good 0.5 Example 71 31 1.547 52 44 Good 0.6 -44 - 200839331 [Table 8] Composition of the paste composition Liquid measurement polymerization accelerator decane coupling agent Solid component in the solid content of the compound sample amount (g) Material amount (g) Material amount (g) Material amount (g) Barium sulfate content (% by weight) A and resin Content (% by weight) Example 72 Dispersion A 9.8 Column B 5 OXE02 0.1 KBM403 0.2 40 57 Example 73 Dispersion A 2.4 Resin B 5 OXE02 0.1 KBM403 0.2 15 80 Example 74 Dispersion A 3.4 Resin B 5 OXE02 0.1 KBM403 0.2 20 76 Example 75 Dispersion A 15.4 Resin B 3 OXE02 0.06 KBM403 0.12 60 38 Example 76 Dispersion A 26.5 Resin B 1 OXE02 0.02 KBM403 0.04 80 20 Example 77 Dispersion A 50.1 Resin B 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 78 Dispersion B 9.1 Resin B 5 ' OXE02 0.1 KBM403 0.2 40 57 Example 79 Dispersion c 9.3 Resin B 5 OXE02 0.1 KBM403 0.2 40 57 Example 80 Dispersion D 11.0 Resin B 5 OXE02 0.1 KBM403 0.2 40 57 Example 81 Dispersion A 9.4 Resin B 5 OXE02 0.1 Μ y\\\ ^frrr .1111Γ J » NN 40 59 Example 82 Dispersion A 2.3 Resin B 5 OXE02 0.1 Mitt y\\\ M y\\\ 15 83 Example 83 Dispersion A 3.3 Resin B 5 OXE02 0.1 and j»\\ ^\\\ 20 79 Example 84 Dispersion A 14.8 Resin B 3 OXE02 0.06 M j\\\ No 60 39 Example 85 Dispersion A 25.5 Resin B 1 OXE02 0.02 /fnT- illtt No 80 20 Example 86 Dispersion A 48.2 Resin B 0.5 OXE02 0.01 M j\\\ 85 15 Example 87 Dispersion B 8.7 Resin B 5 OXE02 0.1 >frnr till j \\\ ^fnr ΓΤΓΓΤΓ j \\\ 40 59 Example 88 Dispersion c 8.9 Resin B 5 OXE02 0.1 > frrr Mti j\\\ int. itir J\\\ 40 59 Example 89 Dispersion D 10.6 Resin B 5 OXE02 0.1 > fnT- ΤΓΓΓ J\\\ 40 59 -45- 200839331 [Table 9] Results Average particle size (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) ) Developmental light propagation loss (dB/cm) Example 72 25 1.566 50 37 Good 0.4 Example 73 23 1.563 54 45 Good 0.3 Example 74 24 1.563 53 43 Good 0.3 Example 75 25 1.566 44 27 Unexposed part Residue 0.4 Example 76 29 1.574 32 16 Residue in the unexposed portion 0.4 Example 77 33 1.576 24 12 Unexposed portion has cracks in the core portion 0.5 78 36 1.568 48 32 Good 0.6 Example 79 25 1.568 49 35 Good 0.4 Example 80 27 1.562 52 35 Good 0.5 Example 81 23 1.566 51 35 Unexposed part with residue 0.4 Example 82 23 1.563 53 43 Good 0.3 Example 83 24 1.563 53 43 Good 0.3 Example 84 25 1.566 43 28 Residue in the unexposed portion 0.5 Example 85 28 1.574 32 16 Crack in the core portion of the unexposed portion 0.5 Example 86 32 1.576 23 12 Unexposed portion with residue core Cracking occurred 0.6 Example 87 34 1.568 49 31 Residues in the unexposed portion 0.7 Example 88 25 1.568 50 35 Residue in the unexposed portion 0.4 Example 89 27 1.562 51 33 Unexposed portion with residue 0.5 -46- 200839331 [Table 10] Paste composition composition Dispersion resin Polymerization accelerator decane coupling agent Solid component Solid component Solid component content (g) Material amount (g) Material amount (g) Material amount (g) Barium sulphate content f Thunder % Contents of A and Resin (% by weight) Example 90 Dispersion E 9.8 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 91 Dispersion E 2.4 Resin Β 5 Ο Ε02 0.1 ΚΒΜ403 0.2 15 80 Example 92 Dispersion E 3.4 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 20 76 Example 93 Dispersion Ε 26.5 Resin Β 1 ΟΧΕ 02 0.02 ΚΒΜ 403 0.04 80 20 Example 94 Dispersion Ε 50.1 棚 Β 0.5 ΟΧΕ 02 0.01 ΚΒΜ 403 0.02 85 15 Example 95 Dispersion F 9.1 Column Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 96 Dispersion G 9.3 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 97 Dispersion Η 11.0 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ403 0.2 40 57 Example 98 Dispersion Ε 9.4 Resin Β 5 ΟΧΕ 02 0.1 Μ j \\\ 40 59 Example 99 Dispersion Ε 2.3 Resin Β 5 ΟΧΕ 02 0.1 No inL m 15 83 Example 1 〇〇 Dispersion Ε 3.3棚ΒΒ 5 ΟΧΕ02 0.1 j \\\ M j \ w 20 79 Example 101 Dispersion Ε 25.5 Resin Β 1 ΟΧΕ02 0.02 Μ dnL· ΤΓΤΓ J \\\ 80 20 Example 102 Dispersion Ε 48.2 Resin Β 0.5 ΟΧΕ02 0.01 >frrr It Tit J\S\ M j \\\ 85 15 Example 103 Dispersion F 8.7 Resin Β 5 ΟΧΕ02 0.1 /fnT πΓπ 40 59 Example 104 Dispersion G 8.9 Resin Β 5 ΟΧΕ02 0.1 J \\\ 40 59 Example 105 Dispersion Η 10.6 Resin Β 5 ΟΧΕ 02 0.1 M j\\\ ixxt. ΤΤΤΓ J \\\ 40 59 -47- 200839331 [Table 11] The average particle size in the paste composition ( Nm) refractive index refractive index temperature dependence (ppm/°C) linear expansion ratio (ppm/°C) developmental light propagation loss (dB/cm) Example 90 30 1.555 52 38 Good 0.5 Example 91 30 1.562 54 44 is good 0.3 Example 92 29 1.562 53 41 Good 0.4 Example 93 35 1.562 34 18 Residue in the unexposed portion 0.5 Example 94 40 1.562 26 13 Crack in the core portion of the unexposed portion 0.6 Example 95 42 1.567 51 36 Good 0.7 Example 96 32 1.566 51 38 Good 0.5 Example 97 33 1.555 53 39 Good 0.6 Example 98 29 1.555 53 37 Unexposed part with residue 0.5 Example 99 29 1.562 55 44 Good 0.3 Example 1〇〇30 1.562 54 42 Good 0.4 Example 101 34 1.562 33 15 Crack occurred in the core portion of the unexposed portion 0.6 Example 102 39 1.562 24 12 Crack occurred in the core portion of the unexposed portion 0.7 Example 103 43 1.567 48 35 Unexposed portion has residue 0.8 Example 104 33 1.56 6 49 37 Residue in the unexposed part 0.5 Example 105 31 1.555 51 37 Residue in the unexposed part 0.6 -48- 200839331 [Table 12] Composition of the paste composition Disperse skin resin polymerization accelerator The content of barium sulfate in the solid component of the decane coupling agent (% by weight) Content of Compound A and Resin in solid content (% by weight) Sample name (g) Material amount (g) Material amount (g) Material amount (g) Example 106 Dispersion A 9.8 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Column B 2.5 Example 107 Dispersion A 2.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 80 Resin B 2.5 Example 108 Dispersion A 3.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Resin B 2.5 Example 109 Dispersion A 15.4 Resin A 1.5 OXE02 0.06 KBM403 0.12 60 38 Resin B 1.5 Example 110 Dispersion A 26.5 Resin A 0.5 OXE02 0.02 KBM403 0.04 80 20 Resin B 0.5 Example 111 Dispersion A 50.1 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 15 Resin B 0.25 Example 112 Dispersion B 9.1 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 113 Dispersion B 2.3 shed A 2.5 OXE02 0.1 K BM403 0.2 15 81 Resin B 2.5 Example 114 Dispersion B 3.3 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Resin B 2.5 Example 115 Dispersion B 12.7 Casing A 1.5 OXE02 0.06 KBM403 0.12 60 37 Resin B 1.5 Example 116 Dispersion Liquid B 12.6 Resin A 0.5 OXE02 0.02 KBM403 0,04 80 18 Resin B 0.5 Example 117 Dispersion B 9.7 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 14 Resin B 0.25 Example 118 Dispersion c 9.3 Column A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 119 Dispersion C 2.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 80 Resin B 2.5 Example 120 Dispersion c 3.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 75 Resin B 2.5 Example 121 Dispersion C 13.3 Resin A 1.5 OXE02 0.06 KBM403 0.12 60 38 Resin B 1.5 Example 122 Dispersion C 14.7 Resin A 0.5 OXE02 0.02 KBM403 0.04 80 20 Resin B 0.5 Example 123 Dispersion c 12.4 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 15 Resin B 0.25 -49- 200839331 [Table 13] Results Average particle diameter (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental Light Propagation Loss (dB/cm) Example 106 25 1.561 50 40 Good 0.3 Example 107 24 1.557 55 48 Good 0.3 Example 108 26 1.558 54 47 Good 0.3 Example 109 26 1.565 42 33 Good 0.3 Example 110 27 1.573 32 21 Good 0.4 Example 111 31 1.576 25 16 Unexposed part has crack in the core of the residue 0.5 Example 112 37 1.563 51 41 Good 0.6 Example 113 36 1.558 56 48 Good 0.5 Example 114 35 1.559 53 46 Good 0.6 Example 115 36 1.570 42 33 Good 0.6 Example 116 39 1.581 30 20 Good 0.7 Example 1Π 41 1.585 24 15 Unexposed portion has cracks in the residue core 0.8 Example 118 26 1.563 51 40 Good 0.3 Example 119 24 1.558 55 47 is good 0.3 Example 120 24 1.559 55 47 Good 0.3 Example 121 26 1.569 43 33 Good 0.3 Example 122 28 1.579 31 21 Good 0.4 Example 123 30 1.582 25 16 Unexposed part has a residue core crack 0.5 - 50- 200839331 [Table 14] Paste composition composition dispersion liquid resin polymerization accelerator cesium hydride coupling agent solid content of barium sulfate (% by weight) Content of Compound A and Resin in Solid Content (% by volume) Sample Name (g) Material Quantity (g) Material Quantity (g) Material (g) Example 124 Dispersion D 11.0 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 125 Dispersion D 2.5 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 81 Resin B 2.5 Example 126 Dispersion D 3.6 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Resin B 2.5 Example 127 Dispersion D 21.7 Resin A 1.5 OXE02 0.06 KBM403 0.12 60 39 Resin B 1.5 Example 128 Dispersion A 9.4 Casing A 2.5 OXE02 0.1 No ^ττΤ Μ 40 59 Resin B 2.5 Example 129 Dispersion A 2.3 shed A 2.5 OXE02 0.1 Sister 15 83 Resin B 2.5 Example 130 Dispersion A 3.3 Resin A 2.5 OXE02 0.1 迦 20 20 79 Column B 2.5 Example 131 Dispersion A 14.8 Resin A 1.5 OXE02 0.06 No i ιΓ. ΤΓΓΓ J\\\ 60 39 Resin B 1.5 Implementation Example 132 Dispersion A 25.5 Resin A 0.5 OXE02 0.02 Μ j\\\ Μ 80 20 Resin B 0.5 Example 133 Dispersion A 48.2 Test A 0.25 OXE02 0.01 4 ml iMt! Pick 85 15 Resin B 0.25 Example 134 Dispersion B 8.7 Resin A 2.5 OXE02 0.1 • Yiir. TiTTT j\w Μ /\\\ 40 59 Resin B 2.5 Example 135 Dispersion C 8.9 shed A 2.5 OXE02 0.1 M y\\\ Μ y\\\ 40 59 Shelter B 2.5 Example 136 Dispersion D 10.6 Resin A 2.5 OXE02 0.1 M 5ε j\\\ 40 59 Purpose B 2.5 Example 137 Dispersion E 9.8 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 138 Dispersion E 2.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 80 shed B 2.5 Example 139 Dispersion E 3.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 shed B 2.5 Example 140 Dispersion E 26.5 Resin A 0.5 OXE02 0.02 KBM403 0.04 80 20 Resin B 0.5 Example 141 Dispersion E 50.1 Benzing A 0.25 OXE02 0.01 KBM403 0.02 85 15 Shelter B 0.25 -51 - 200839331 [Table 15] Results Average particle size (nm) in the paste composition Refractive index Refractive index temperature dependence Properties (ppm/°C) Linear Expansion Ratio (ppm/°C) Developmental Light Propagation Loss (dB/cm) Example 124 26 1.558 52 39 Good 0.5 Example 125 25 1.557 55 48 Good 0.4 Example 126 26 1.557 54 47 Good 0.5 Example 127 27 1.559 42 33 Good 0.6 Example 128 2 4 1.561 51 40 Good 0.4 Example 129 23 1.557 56 47 Good 0.3 Example 130 25 1.558 55 46 Good 0.3 Example 131 26 1.565 43 32 Good 0.4 Example 132 28 1.573 32 21 Core cracking 0.4 Example 133 31 1.576 24 17 Unexposed part has crack in the core of the residue 0.5 Example 134 26 1.563 50 40 Good 0.6 Example 135 25 1.563 51 39 Good 0.4 Example 136 25 1.558 52 40 Good 0.5 Example 137 29 1.557 52 40 Good 0.5 Example 138 30 1.556 56 48 Good 0.3 Example 139 30 1.557 55 47 Good 0.4 Example 140 35 1.561 31 21 Good 0.5 Example 141 40 1.562 25 16 Unexposed part has cracks in the core of the residue 0.6 -52- 200839331 [Table 16] Paste composition

Dispersion measurement The polymerization accelerator cesium hydride coupling agent solid content of barium sulfate (% by weight) Solid content of compound A and resin content (% by weight) Sample name (g) Material amount (g) Material amount (g Material amount (g) Example 142 Dispersion F 9.1 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 143 Dispersion G 9.3 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 144 Dispersion Η 11.0 BOX A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 145 Dispersion Ε 9.4 Resin A 2.5 OXE02 0.1 and > frrr 40 59 Resin B 2.5 Example 146 Dispersion Ε 2.3 Resin A 2.5 OXE02 0.1 4rrr tilt* j\\\ M j\\\ 15 83 Resin B 2.5 Example 147 Dispersion Ε 3.3 shed A 2.5 OXE02 0.1 and j\\\ No 20 79 shed B 2.5 Example 148 Dispersion Ε 25.5 Resin A 0.5 OXE02 0.02 Μ ^\\\ 赫 j\\\ 80 20 Resin B 0.5 Example 149 Dispersion Ε 48.2 Resin A 0.25 OXE02 0.01 Ittt! j \\\ M j \\\ 85 15 Resin B 0.25 Example 150 Dispersion F 8.7 Resin A 2.5 OXE02 0.1 M j\\\ ^\\\ 40 59 Purpose B 2.5 Example 151 Dispersion G 8.9 Purpose A 2.5 OXE02 0.1 Loss J \ w 40 59 Resin B 2.5 Example 152 Dispersion Η 10.6 Resin A 2.5 OXE02 0.1 M j\\\ 赫 j \\\ 40 59 Resin B 2.5 -53- 200839331 [Table 17] Results Average particle size (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Imaging light propagation loss (dB/cm) Example 142 44 1.562 50 41 Good 0.7 Example 143 32 1.561 49 41 Good 0.5 Example 144 30 1.551 52 40 Good 0.6 Example 145 30 1.557 50 40 Good 0.5 Example 146 28 1.556 54 47 Good 0.3 Example 147 29 1.557 55 46 Good 0.4 Example 148 36 1.561 30 20 Crack occurred in the core 0.5 Example 149 39 1.562 24 15 Crack in the core portion of the unexposed portion 0.6 Example 150 42 1.562 50 41 Good 0.7 Example 151 29 1.561 51 39 Good 0.5 Example 152 31 1.551 50 39 Good 0.6 -54- 200839331 [Table 18] Paste composition composition Dispersion resin polymerization accelerator 矽 偶 偶 coupling agent solid content of barium sulfate (% by weight) Solid content Content of Compound A and Resin (% by weight) Sample Name (g) Material Quantity (g) Material Quantity (g) Material Quantity (g) Example 153 Dispersion I 9.8 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 154 Dispersion I 2.4 Resin A 5 OXE02 0.1 KBM403 0.2 15 80 Example 155 Dispersion I 3.4 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 156 Dispersion I 15.4 Resin A 3 OXE02 0.06 KBM403 0.12 60 38 Example 157 Dispersion Liquid I 26.5 Resin A 1 OXE02 0.02 KBM403 0.04 80 20 Example 158 Dispersion I 50.1 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 159 Dispersion J 9.1 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 160 Dispersion J 2.3 Resin A 5 OXE02 0.1 KBM403 0.2 15 81 Example 161 Dispersion J 3.3 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 162 Dispersion J 12.7 Resin A 3 OXE02 0.06 KBM403 0.12 60 37 Example 163 Dispersion J 12.6 Resin A 1 OXE02 0.02 KBM403 0.04 80 18 Example 164 Dispersion J 9.7 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 14 Example 165 Dispersion κ 9.3 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 166 Dispersion K 2.4 Resin A 5 OXE02 0.1 KBM403 0.2 15 80 Example 167 Dispersion K 3.4 Resin A 5 OXE02 0,1 KBM403 0.2 20 75 Example 168 Dispersion K 13.3 Resin A 3 OXE02 0.06 KBM403 0.12 60 38 Example 169 Dispersion K 14.7 Resin A 1 OXE02 0.02 KBM403 0.04 80 20 Example 170 Dispersion κ 12.4 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 15 Example Π1 Dispersion L 11.0 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Example 172 Dispersion L 2.5 Resin A 5 OXE02 0.1 KBM403 0.2 15 81 Example Π 3 Dispersion L 3.6 Resin A 5 OXE02 0.1 KBM403 0.2 20 Ί 6 Example Π 4 Dispersion L 21.7 Resin A 3 OXE02 0.06 KBM403 0.12 60 39 -55- 200839331 [Table 19] Results Average particle diameter (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 153 21 1.552 51 44 Good 0.4 Example 154 20 1.550 55 52 Good 0.3 Example 155 21 1.551 54 51 Good 0.3 Example 156 23 1.553 44 38 Good 0.4 Example 157 26 1.556 31 24 Unexposed portion has a residue of 0.4 Example 158 28 1.557 26 19 Unexposed portion having cracks in the residue core 0.5 Example 159 35 1.557 51 46 Good 0.6 Example 160 33 1.552 56 53 Good 0.5 Example 161 33 1.553 55 51 Good 0.6 Example 162 36 1.563 43 36 Good 0.7 Example 163 37 1.574 33 25 Unexposed portion with residue 0.7 Example 164 38 1.578 25 16 Unexposed portion with crack in the core portion 0.8 Example 165 22 1.556 49 44 Good 0.4 Example 166 21 1.552 55 50 Good 0.3 Example 167 22 1.552 55 49 Good 0.3 Example 168 24 1.561 43 38 Good 0.4 Example 169 26 1.569 30 23 Residue in the unexposed portion 0.4 Example Π0 29 1.572 24 18 Unexposed portion has a crack in the core portion 0.5 Example 171 22 1.544 53 43 Good 0.5 Example 172 21 1.548 55 51 Good 0.4 Example 173 22 1.548 55 51 Good 0.4 Example Π 4 23 1.539 43 37 Good 0.6 -56- 200839331

[Table 20] Paste composition composition dispersion liquid polymerization accelerator decane coupling agent solid content of barium sulfate content (% halo) Solid content of compound A and resin content (% by weight) Sample name (g) Material denier (grams) Material amount (g) Material amount (g) Example 175 Dispersion I 9.4 Resin A 5 OXE02 0.1 dux: No 40 59 Example 176 Dispersion I 2.3 Resin A 5 OXE02 0.1 and Μ j \\ \ 15 83 Example 177 Dispersion I 3.3 Resin A 5 OXE02 0.1 No Μ j \\\ 20 79 Example Π 8 Dispersion I 14.8 Resin A 3 OXE02 0.06 4τττ 1ΙΤΙ 4ττγ ΊιίΓ «μ 60 39 Example 179 Dispersion I 25.5 A A A 1 OXE02 0.02 and Μ j \\\ 80 20 Example 180 Dispersion I 48.2 Resin A 0.5 OXE02 0.01 Μ 85 15 Example 181 Dispersion J 8.7 Resin A 5 OXE02 0.1 and «/WN Μ j \\\ 40 59 Example 182 Dispersion J 2.2 Resin A 5 OXE02 0.1 J\\\ and 15 84 Example 183 Dispersion J 3.2 Resin A 5 OXE02 0.1 No Μ j \\\ 20 79 Example 184 Dispersion J 12.2 Resin A 3 OXE02 0.06 M Μ 4 V ΝΝ 60 39 Example 185 Dispersion J 12. 1 Resin A 1 OXE02 0.02 M j\\\ Μ j\\\ 80 20 Example 186 Dispersion J 9.3 shed A 0.5 OXE02 0.01 ^\\\ Α\\\λ Mil 85 14 Example 187 Dispersion K 8.9棚 A 5 OXE02 0.1 No dnL· πΤΓ 40 59 Example 188 Dispersion K 2.3 Resin A 5 OXE02 0.1 J\\\ ΤΠΓ* J\\\ 15 83 Example 189 Dispersion K 3.3 Resin A 5 OXE02 0.1 No 20 78 Example 190 Dispersion K 12.8 Resin A 3 OXE02 0.06 j \ \\ Μ J\\\ 60 39 Example 191 Dispersion K 14.2 Resin A 1 OXE02 0.02 > fnr IMF J\\\ Μ j \\\ 80 20 Example 192 Dispersion K 12.0 Resin A 0.5 OXE02 0.01 N/gt; fnT- ΤΓΤΤ: J\\\ 85 15 Example 193 Dispersion 10.6 shed A 5 OXE02 0.1 4fff j\\\ inL Pick 40 59 Example 194 Dispersion L 2.4 shed A 5 OXE02 0.1 > frn* TTli 15 84 Example 195 Dispersion L 3.5 Resin A 5 OXE02 0.1 No > fnr. ΠΠΤ 20 78 Example 196 Dispersion L 20.9 Resin A 3 OXE02 0.06 No MJ \ w 60 40 -57- 200839331 [Table 21] Result Average particle size (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 175 23 1.552 51 43 Good 0.4 Example Π6 21 1.550 56 52 Good 0.3 Example Π7 21 1.551 55 51 Good 0.3 Example 178 24 1.553 44 37 Unexposed portion has residue 0.5 Example 179 27 1.556 30 25 Crack in the core portion of the unexposed portion 0.5 Example 180 28 1.557 25 18 Crack in the core portion of the unexposed portion 0.6 Example 181 35 1.557 53 46 Good 0.7 Example 182 33 1.552 56 51 good 0.5 Example 183 34 1.553 56 50 Good 0.6 Example 184 37 1.563 45 37 Unexposed portion with residue 0.7 Example 185 38 1.574 33 25 Unexposed portion with crack in the core portion 0.8 Example 186 40 1.578 26 17 The exposed portion has cracks in the residue core portion. Example 187 22 1.556 49 44 Good 0.4 Example 188 20 1.552 56 51 Good 0.3 Example 189 20 1.552 55 50 Good 0.3 Example 190 22 1.561 44 37 Unexposed portion has a residue 0.5 Example 191 26 1.569 31 22 Cracks occurred in the core portion of the unexposed portion 0.5 Example 192 28 1.572 25 19 The unexposed portion has cracks in the residue core. 6 Example 193 21 1.544 53 44 Good 0.5 Example 194 20 1.548 54 51 Good 0.4 Example 195 21 1.548 54 50 Good 0.4 Example 196 22 1.539 43 36 Unexposed part with residue 0.6 -58- 200839331 [Table 22] Paste Composition Composition Dispersion Concentrate Polymerization accelerator decane coupling agent Content of compound A and resin in solid content solid component (Military halo%) Sample name (g) Material amount (g) Material amount (g) Material amount (g Barium sulphate content (% halo) Example 197 Dispersion Μ 9.8 A 5 OXE02 0.1 KBM403 0.2 40 57 Example 198 Dispersion Μ 2.4 A5 OXE02 0.1 KBM403 0.2 15 80 Example 199 Dispersion 3.4 3.4 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Example 200 Dispersion Μ 15.4 Resin A 3 OXE02 0.06 ICBM403 0.12 60 38 Example 201 Dispersion Μ 26.5 Column A 1 OXE02 0.02 KBM403 0.04 80 20 Example 202 Dispersion Μ 50.1 shed A 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 203 Dispersion Μ 9.4 A5 OXE02 0.1 Μ >fnT Πιί J\\\ 40 59 Example 204 Dispersion Μ 2.3 Resin A 5 OXE02 0.1 4 ml tttr j\w Μ J i 15 83 Example 205 Dispersion Μ 3.3 Resin A 5 OXE02 0.1 ΑττΤ. lHI? J\\\ 4ttT. iitr y\\n 20 79 Example 206 Dispersion Μ 14.8 Resin A 3 OXE02 0.06 'till· J\\\ No 60 39 Example 207 Dispersion Μ 25.5 Resin A 1 OXE02 0.02 M No 80 20 Example 208 Dispersion Μ 48.2 Resin A 0.5 OXE02 0.01 No 85 15 ί -59- 200839331 Table 23] Results Average particle diameter (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 197 35 1.558 51 43 Good 0.6 Example 198 34 1.552 54 52 Good 0.5 Example 199 34 1.553 54 51 Good 0.6 Example 200 37 1.565 45 37 Good 0.6 Example 201 39 1.578 32 24 Unexposed part with residue 0.7 Example 202 40 1.582 26 20 Unexposed part with crack in the core of the residue 0.8 Example 203 36 1.558 52 44 Good 0.6 Example 204 33 1.552 55 51 Good 0.5 Example 205 34 1.553 55 49 Good 0.6 Example 206 38 1.565 45 37 Not exposed Part with residue 0.7 Example 207 39 1.578 31 25 There is residue in the unexposed part. Cracking occurs in the core. 0.8 Example 208 41 1.582 26 19 Residue in the unexposed part Crack in the core 0.9

-60- 200839331 [Table 24] Paste composition composition Dispersion medium polymerization accelerator cerium sulfate coupling agent solid content of barium sulfate content (% by weight) Solid content of compound A and resin content (% by weight) (g) Amount of material (g) Amount of material (g) Amount of material (g) Example 209 Dispersion I 9.8 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 210 Dispersion I 2.4 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 15 80 Example 211 Dispersion I 3.4 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 20 76 Example 212 Dispersion I 15.4 Resin Β 3 ΟΧΕ 02 0.06 ΚΒΜ 403 0.12 60 38 Example 213 Dispersion I 26.5 Resin Β 1 ΟΧΕ 02 0.02 ΚΒΜ 403 0.04 80 20 Example 214 Dispersion I 50.1 棚 Β 0.5 ΟΧΕ 02 0.01 ΚΒΜ 403 0.02 85 15 Example 215 Dispersion J 9.1 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 216 Dispersion K 9.3 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 217 Dispersion L 11.0 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 218 Dispersion I 9.4 Β Β 5 ΟΧΕ 02 0.1 Μ Μ 40 59 Example 219 Dispersion I 2.3 Resin Β 5 ΟΧΕ 02 0.1 jia no 15 83 Example 220 Dispersion I 3.3 Resin Β 5 ΟΧΕ 02 0.1 Μ j\\\ ^frrr. No 20 79 Example 221 Dispersion I 14.8 Resin Β 3 ΟΧΕ02 0.06 Μ ^\\\ ^πΤ- j \ \\ 60 39 Example 222 Dispersion I 25.5 棚 Β 1 ΟΧΕ02 0.02 ίΓ. Μ: /frrr Ι1ΓΓ ^\\\ 80 20 Example 223 Dispersion I 48.2 Resin Β 0.5 ΟΧΕ02 0.01 Μ No 85 15 Example 224 Dispersion J 8.7 Column Β 5 ΟΧΕ 02 0.1 4πτ Mil J \ \\ No 40 59 Example 225 Dispersion κ 8.9 Resin Β 5 ΟΧΕ 02 0.1 No > ήττ 40 59 Example 226 Dispersion L 10.6 Resin Β 5 ΟΧΕ 02 0.1 and J \ ΝΝ 4rcL 40 59 Example 227 Dispersion Μ 9.8 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 40 57 Example 228 Dispersion Μ 2.4 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 15 80 Example 229 Dispersion Μ 3.4 Resin Β 5 ΟΧΕ 02 0.1 ΚΒΜ 403 0.2 20 76 Example 230 Dispersion Μ 26.5 Resin Β 1 ΟΧΕ 02 0.02 ΚΒΜ 403 0.04 80 20 Example 231 Dispersion Μ 50.1 Resin Β 0.5 ΟΧΕ 02 0.01 ΚΒΜ 4 03 0.02 85 15 -61 - 200839331 [Table 25]

Results Average particle diameter (nm) in the paste composition Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 209 24 1.560 50 37 good 0.4 Example 210 23 1.560 53 44 Good 0.3 Example 211 23 1.560 53 43 Good 0.3 Example 212 25 1.559 44 26 Unexposed portion has a residue 0.4 Example 213 28 1.559 31 16 Unexposed portion has a residue 0.4 Example 214 31 1.559 24 13 Unexposed part with crack in the core of the residue 0.5 Example 215 34 1.565 49 32 Good 0.6 Example 216 22 1.564 49 35 Good 0.4 Example 217 24 1.552 51 35 Good 0.5 Example 218 21 1.560 51 36 Not Residue in the exposed portion 0.4 Example 219 22 1.560 54 44 Good 0.3 Example 220 23 1.560 53 43 Good 0.3 Example 221 23 1.559 42 28 Unexposed portion has a residue 0.5 Example 222 27 1.559 32 17 Unexposed portion has a residue core Crack occurrence 0.5 Example 223 32 1.559 22 12 Unexposed portion has cracks in the core portion 0.6 Example 224 34 1.565 49 30 Unexposed portion has residue 0.7 Example 225 25 1.564 50 35 Not exposed Residues 0.4 Example 226 26 1.552 52 33 Unexposed part with residue 0.5 Example 227 34 1.566 53 37 Good 0.6 Example 228 33 1.562 54 44 Good 0.5 Example 229 35 1.562 53 41 Good 0.6 Example 230 38 1.580 34 18 Residues in the unexposed part 0.8 Example 231 41 1.583 25 12 Cracks in the core of the residue in the unexposed part 0.9 -62- 200839331 [Table 26] Composition of the paste composition Dispersion 1 Resin polymerization accelerator In the solid content of the decane coupling agent Barium sulphate content (% by weight) Content of Compound A and resin in solid content (Thunder amount of sample name (g) Material amount (g) Material amount (g) Material dan (g) Example 232 Dispersion I 9.8 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 233 Dispersion I 2.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 80 shed B 2.5 Example 234 Dispersion I 3.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Resin B 2.5 Example 235 Dispersion I 15.4 Resin A 1.5 OXE02 0.06 KBM403 0.12 60 38 Resin B 1.5 Example 236 Dispersion I 26.5 Test A 0.5 OXE02 0.02 KBM403 0. 04 80 20 Resin B 0.5 Example 237 Dispersion I 50.1 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 15 Resin B 0.25 Example 238 Dispersion J 9.1 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 239 Dispersion J 2.3 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 81 IB 2.5 Example 240 Dispersion J 3.3 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Test B 2.5 Example 241 Dispersion J 12.7 Reversal A 1.5 OXE02 0.06 KBM403 0.12 60 37 Resin B 1.5 Example 242 Dispersion J 12.6 Resin A 0.5 OXE02 0.02 KBM403 0.04 80 18 Resin B 0.5 Example 243 Dispersion J 9.7 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 14 Resin B 0.25 Example 244 Dispersion κ 9.3 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 245 Dispersion κ 2.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 80 Resin B 2.5 Example 246 Dispersion K 3.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 75 Resin B 2.5 Example 247 Dispersion κ 13.3 Resin A 1.5 OXE02 0.06 KBM403 0.12 60 38 Resin B 1.5 Example 248 Dispersion κ 14.7 Resin A 0.5 OXE02 0.02 KBM403 0.04 80 20 Resin B 0.5 Example 249 Dispersion κ 12.4 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 15 Resin B 0.25 -63- 200839331 [Table 27] Results Average particle diameter (nm) in the paste composition Refractive index Refractive index Temperature dependence ( Ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 232 22 1.556 50 41 Good 0.3 Example 233 21 1.555 54 49 Good 0.3 Example 234 23 1.555 53 47 Good 0.3 Example 235 25 1.557 40 33 Good 0.3 Example 236 27 1.558 31 20 Good 0.4 Example 237 32 1.558 24 16 Unexposed portion has cracks in the residue core 0.5 Example 238 36 1.561 51 41 Good 0.6 Example 239 37 1.557 55 47 Good 0.5 Example 240 34 1.558 53 46 Good 0.6 Example 241 38 1.567 42 33 Good 0.6 Example 242 39 1.577 29 21 Good 0.7 Example 243 41 1.580 25 15 Unexposed part has cracks in the core portion 0.8 Example 244 25 1.560 51 41 Good 0.3 Example 245 23 1.556 56 48 Good 0.3 Example 246 23 1.557 55 47 Good 0.3 Example 247 25 1.564 44 34 Good 0.3 Example 248 28 1.571 31 22 Good 0.4 Example 249 30 1.574 24 17 Unexposed part has cracks in the residue core 0.5 -64- 200839331 [Table 28] Paste composition composition Dispersion resin polymerization accelerator decane coupling agent solid content in solid components Content of Compound A and Resin (% by amount of bar) Sample name (grams) Amount of material (g) Amount of material (g) Amount of barium sulfate (% by weight) in the amount of material (g) Example 250 Dispersion L 11.0 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 251 Dispersion L 2.5 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 81 Resin B 2.5 Example 252 Dispersion L 3.6 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Resin B 2.5 Example 253 Dispersion L 21.7 Resin A 1.5 OXE02 0.06 KBM403 0.12 60 39 Resin B 1.5 Example 254 Dispersion I 9.4 Resin A 2.5 OXE02 0.1 Μ VV ΝΝ and J \ w 40 59 Resin B 2.5 Example 255 Dispersion I 2.3 Resin A 2.5 OXE02 0.1 4ητ m >frrr. iMtr j\\\ 15 83 Resin B 2.5 Example 256 Dispersion I 3.3 Resin A 2.5 OXE02 0.1 Μ. j\w and j\\\ 20 79 Resin B 2.5 Example 257 Dispersion I 14.8 Resin A 1.5 OXE02 0.06 No inL Vision 60 39 Resin B 1.5 Example 258 Dispersion I 25.5 Resin A 0.5 OXE02 0.02 No 80 20 Resin B 0.5 Example 259 Dispersion I 48.2 Resin A 0.25 OXE02 0.01 Μ j\ \\ and j\\\ 85 15 Resin B 0.25 Example 260 Dispersion J 8.7 Resin A 2.5 OXE02 0.1 No 40 59 Resin B 2.5 Example 261 Dispersion K 8.9 Resin A 2.5 OXE02 0.1 Μ j \\\ Charm > \\N 40 59 Resin B 2.5 Example 262 Dispersion L 10.6 Resin A 2.5 OXE02 0.1 4rrr tfir j\\\ 40 59 Resin B 2.5 Example 263 Dispersion Μ 9.8 Resin A 2.5 OXE02 0.1 KBM403 0.2 40 57 Resin B 2.5 Example 264 Dispersion Μ 2.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 15 80 Resin B 2.5 Example 265 Dispersion Μ 3.4 Resin A 2.5 OXE02 0.1 KBM403 0.2 20 76 Resin B 2.5 Example 266 Dispersion Μ 26.5 Resin A 0.5 OXE02 0.02 KBM403 0.04 80 20 Resin B 0.5 Example 267 Dispersion Μ 50.1 Resin A 0.25 OXE02 0.01 KBM403 0.02 85 15 Resin B 0.25 -65- 200839331 [Table 29] Result Average particle size (nm) Refractive index refractive index in paste composition Degree dependence (ppm/°C) Linear expansion rate (ppm/°C) Developmental light propagation loss (dB/cm) Example 250 25 1.548 51 39 Good 0.5 Example 251 24 1.553 55 48 Good 0.4 Example 252 24 1.552 54 46 Good 0.5 Example 253 27 1.543 42 33 Good 0.6 Example 254 23 1.556 50 41 Good 0.4 Example 255 21 1.555 55 47 Good 0.3 Example 256 24 1.555 55 45 Good 0.3 Example 257 25 1.557 42 32 Good 0.4 Example 258 27 1.558 32 22 Crack occurred in the core 0.4 Example 259 30 1.558 23 18 Crack in the core portion of the unexposed portion 0.5 Example 260 25 1.561 50 40 Good 0.6 Example 261 24 1.560 51 39 Good 0.4 Example 262 24 1.548 52 41 Good 0.5 Example 263 34 1.562 52 40 Good 0.5 Example 264 33 1.557 55 48 Good 0.3 Example 265 34 1.558 55 47 Good 0.4 Example 266 38 1.579 31 22 Good 0.5 Example 267 41 1.583 24 16 Crack in the core of the residue in the unexposed part 0.6 -66 - 200839331 [Table 30]

Paste composition composition Dispersion compound A Polymerization accelerator decane coupling agent Solid component in the solid content of the compound sample amount (g) Material amount (g) Material amount (g) Material amount (g) Barium sulfate content (% by weight Contents of A and Resin (% by weight) Example 268 Dispersion Μ 9.4 Resin A 2.5 OXE02 0.1 4nC ΤΓΓΓ j\\\ Μ J\\\ 40 59 Resin B 2.5 Example 269 Dispersion Μ 2.3 Resin A 2.5 OXE02 0.1 > fnr ΙΙΙι and ^\\\ 15 83 Resin B 2.5 Example 270 Dispersion Μ 3.3 shed A 2.5 OXE02 0.1 no dnt, black 20 79 Resin B 2.5 Example 271 Dispersion Μ 25.5 Resin A 0.5 OXE02 0.02 J\\\ yfmr 80 20 Resin B 0.5 Example 272 Dispersion Μ 48.2 Resin A 0.25 OXE02 0.01 Μ j\\\ MJVN\ 85 15 Column B 0.25 Example 273 Dispersion A 9.8 HOA-MPL 5 OXE02 0.1 KBM403 0.2 40 57 Example 274 Dispersion A 2.4 HOA-MPL 5 OXE02 0.1 KBM403 0.2 15 80 Example 275 Dispersion A 3.4 HOA-MPL 5 OXE02 0.1 KBM403 0.2 20 76 Example 276 Dispersion A 15.4 HOA-MPL 3 OXE02 0.06 KBM403 0.12 60 38 Example 277 Dispersion A 26.5 HOA-MPL 1 OXE02 0.02 KBM403 0.04 80 20 Example 278 Dispersion A 50.1 HOA-MPL 0.5 OXE02 0.01 KBM403 0.02 85 15 Example 279 Dispersion B 9.1 HOA-MPL 5 OXE02 0.1 KBM403 0.2 40 57 Example 280 Dispersion c 9.3 HOA-MPL 5 OXE02 0.1 KBM403 0.2 40 57 Example 281 Dispersion ϋ 11.0 HOA-MPL 5 OXE02 0.1 KBM403 0.2 40 57 Example 282 Dispersion A 9.4 HOA-MPL 5 OXE02 0.1 Μ j \ \\ None 40 59 Example 283 Dispersion A 2.3 HOA-MPL 5 OXE02 0.1 4ttT II lit y\\\ 4nf J\\\ 15 83 Example 284 Dispersion A 3.3 HOA-MPL 5 OXE02 0.1 M j \ \\ J\ \\ 20 79 Example 285 Dispersion A 14.8 HOA-MPL 3 OXE02 0.06 4rrr ιΠν. y\\N No 60 39 Example 286 Dispersion A 25.5 HOA-MPL 1 OXE02 0.02 No 80 20 Example 287 Dispersion A 48.2 HOA-MPL 0.5 OXE02 0.01 M / \ \\ No 85 15 Example 288 Dispersion B 8.7 HOA-MPL 5 OXE02 0.1 4πΐ liln J \\\ No 40 59 Example 289 Dispersion C 8.9 HOA-MPL 5 OXE02 0.1 None And J\\\ 40 59 Example 290 Dispersion D 10.6 HOA-MPL 5 OXE02 0.1 J\\\ 40 59 -67- 200839331 [Table 31] Results Average particle size in the composition (IV) Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Example 268 34 1.562 51 40 Good 0.6 Example 269 32 1.557 54 47 Good 0.5 Example 270 33 1.558 54 46 Good 0.6 Example 271 38 1.579 30 22 Crack occurred in the core 0.7 Example 272 40 1.583 24 16 Unexposed portion has cracks in the core portion 0.8 Example 273 23 1.531 53 43 Good 0.6 Example 274 24 1.521 56 51 Good 0.5 Example 275 24 1.523 55 52 Good 0.5 Example 276 26 1.543 44 37 Good 0.6 Example 277 29 1.565 30 23 Unexposed part with residue 0.7 Example 278 32 1.572 24 18 Unexposed part has cracks in the core of the residue 0.8 Example 279 36 1.531 52 42 Good 0.8 Example 280 26 1.531 52 43 Good 0.6 Example 281 26 1.531 52 42 Good 0.6 Example 282 25 1.531 54 42 Good 0.6 Implementation Example 283 24 1.521 56 51 Good 0.5 Example 284 25 1.523 55 51 Good 0.5 Example 285 25 1.543 43 36 Good 0.7 Example 286 28 1.565 31 24 Unexposed part Crack occurred in the core 0.8 Example 287 31 1.572 24 17 Unexposed portion has a crack in the core of the residue 0.9 Example 288 35 1.531 51 42 Good 0.8 Example 289 25 1.531 51 41 Good 0.6 Example 290 27 1.531 52 40 Good 0.6 - 68-200839331 Comparative Examples 1 to 2 A paste composition having the composition shown in Tables 3 2 to 3 3 was produced in the same manner as in Example 1 and used to produce a cured product for evaluation of physical properties and an optical waveguide. Table 3 shows the evaluation results in 2 to 3 3. The obtained cured product was insufficiently polymerized and soft, and the refractive index and the coefficient of linear expansion could not be evaluated. Further, when the optical waveguide was manufactured, the unexposed portion was whitened during development, and the immersion time of 5 minutes was not removed, and the unexposed portion was removed by shaking the substrate for 20 minutes. A film-like residue is present on the surface of the substrate on the unexposed portion. Further, the optical waveguide pattern of the exposure portion is a mountain shape having a small gradient. Attempts to measure the loss of light propagation, but the loss is too large, and the intensity of the transmitted light is below the detection limit and cannot be measured. Comparative Examples 3 to 4 A paste composition composed of the compositions shown in Tables 3 2 to 3 3 was produced in the same manner as in Example 1 to produce a cured product for evaluation of physical properties and an optical waveguide. Table 3 shows the evaluation results in 2 to 3 3. The temperature dependence of the refractive index and the linear expansion ratio are both large. When the optical waveguide is manufactured, the unexposed portion is whitened during development, and even if it is shaken for 20 minutes in the developing solution, a film having a thickness of several micrometers remains in the unexposed portion. Attempts to measure the loss of light propagation, but the loss is too large, and the intensity of the transmitted light is below the detection limit and cannot be measured. Comparative Examples 5 to 10 0 A paste composition composed of the compositions shown in Tables 3 2 to 3 3 was produced in the same manner as in Example 1 and used to produce a cured product for physical property evaluation and an optical waveguide. Table 3 shows the evaluation results in 2 to 3 3. -69- 200839331 [Table 32] Paste composition composition dispersion resin polymerization accelerator decane coupling agent Solid content solid content Solid content of compound A and resin content (% by weight) Sample name (g) Material amount (g) (g) Amount of material (g) Barium sulfate content (% by weight) Comparative Example 1 Dispersion N 9.8 Resin A 5 OXE02 0.1 KBM403 0.2 40 51 Comparative Example 2 Dispersion N 9.4 Resin A 5 OXE02 0.1 vfrrr ι1ιτ! j \ \\ 4nr. τι In j\\\ 40 53 Comparative Example 3 Dispersion 〇 9.1 A 5 OXE02 0.1 KBM403 0.2 40 55 Comparative Example 4 Dispersion 〇 8.8 Resin A 5 OXE02 0.1 irrL till j \\\ M j\ \\ 40 57 Comparative Example 5 Dispersion P 9.8 Resin A 5 OXE02 0.1 KBM403 0.2 40 57 Comparative Example 6 Dispersion P 2.4 Resin A 5 OXE02 0.1 KBM403 0.2 15 80 Comparative Example 7 Dispersion P 3.4 Resin A 5 OXE02 0.1 KBM403 0.2 20 76 Comparative Example 8 Dispersion P 15.4 Resin A 3 OXE02 0.06 KBM403 0.12 60 38 Comparative Example 9 Dispersion P 26.5 Resin A 1 OXE02 0.02 KBM403 0.04 80 20 Comparative Example 10 Dispersion P 50.1 Resin A 0.5 OXE02 0.01 KBM403 0.02 85 15 [Table 33] Results paste Average particle diameter (nm) of the refractive index Refractive index Refractive index Temperature dependence (ppm/°C) Linear expansion ratio (ppm/°C) Developmental light propagation loss (dB/cm) Comparative Example 1 35 Film hardening Sufficient, the pattern could not be measured. The unexposed portion had residue. Comparative Example 2 34 Film hardening was insufficient, and the pattern could not be measured. Unclear portions were not residue. Comparative Example 3 52 1.557 74 67 Unexposed portion removal difficulty Comparative Example 4 50 1.557 74 68 Unexposed portion removal difficulty Comparative Example 5 54 1.556 53 44 Good 1.0 Comparative Example 6 55 1.552 58 53 Good 0.8 Comparative Example 7 54 1.553 57 51 Good 0.9 Comparative Example 8 56 1.562 46 38 Good 1.2 Comparative Example 9 61 1.572 33 24 Good 1.5 Comparative Example 10 62 1.575 26 19 Crack in the core portion of the unexposed portion 2.3 - 70 - 200839331 Industrial Applicability The optical waveguide paste composition of the present invention can be suitably used for a personal computer, a hard disk recorder, An optical wiring for transmitting information between LSIs in a wiring board used for an information device for high-speed signal transmission such as a DVD recorder, a game machine, or a portable telephone. [Simple description of the drawing] The i-th image shows a schematic diagram of the structure of the channel type optical waveguide. Fig. 2 is a schematic diagram showing the structure of a plate type optical waveguide. [Description of main component symbols] Core Cladding section Optical signal 1 2 3

Claims (1)

200839331 X. Patent application scope: 1. A paste composition for an optical waveguide comprising (A) barium sulfate particles having an average particle diameter of 1 nm or more and 50 nm or less, (B) a compound having a polymerizable group and a carboxyl group, or Phosphate compound with polymerizable group, and (C) organic solvent! I. 2. The optical waveguide paste composition according to claim 1, wherein the polymerizable group and the carboxyl group-containing compound comprise a compound represented by the following formula (1): R1 CH2=C-c-〇-~ R2—j: —OH (1) Ο Ο (In the above formula (1), R1 represents a hydrogen atom or a methyl group, and R2 represents a divalent value represented by any one of the following formulae (2) to (4). ()) -fCH2 弋O-0CH seven (2) 0 (3) 〇vJ -f a ^^ (4) (in the above general formulae (2) to (4), η and m are each an integer of 1 to 3) . The light-wave-wave paste composition of the second aspect of the invention, wherein R1 in the formula (1) is a hydrogen atom, and R2 is a divalent group represented by the formula (4), η Is 2. 4. The optical waveguide paste composition according to claim 1, wherein the polymerizable group-containing phosphate compound comprises a compound represented by the following formula (5), 0. II Λ R3~〇-ρ- ——R4 (5) Ο R5 (R3 to R5 in the above formula (5) represent a monovalent group or a hydrogen atom represented by any one of the following formulae (6) to (1〇), and R3 to R5 may be the same. Or different, but r3~r5 are not all hydrogen atoms), C v\cno \ (6 (7 73- (8) (8) 200839331 R9 H2C=C[ C-〇-r12—(9) II op H2c—CH—R11—do) (In the above formula (6) to (lo), R6 to r9 represent a hydrogen atom or a fluorenyl group, and Rio to R11 are carbon. A divalent group having a number of 1 to 10, and R12 is a divalent group having a carbon number of 1 to 1 fluorene having a hydroxyl group). 5. The optical waveguide paste composition of claim 4, wherein at least one of R3 to R5 in the general formula (5) is a monovalent group represented by the general formula (8). 6. The optical waveguide paste composition %' of any one of claims 1 to 5, further comprising a polymer having a polymerizable group. 7 · $D $ | 靑 Patent scope No. 6 of the optical waveguide paste composition, wherein the resin having @#1生S comprises a resin represented by the following formula (11) or (12), -74- 200839331 (U)£ο=Ηυιυιο"ΗυΙΗό"Ηο—ο Ο Η—Ο (ζ L)£υΗΗϋ—υ=ιο”Ηοιδ”Ηυ—ο 9 ο r * 7 = 7 ouslsuKU—0—υιδπί 〇=; ΗΟ οικυ1ΗΟ”Ηο丨ο—υ—Ηο ΗΟ ===0 Groups of pastes used in the light of the waveguide 1 ο ο _ _ _ _ _ 1 Alkane Dimensional Fan Fanli is more specialized in the application, such as the object 8 Renzhong 8 to 11 The first quarter of the pound B ξ 利 专 专 专 专 专 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如Lubo waveguide light guiding light one item one - 9 -75-