200836850 九、發明說明： 【發明所屬之技術領域] 本發明有關一種回收太陽能板之方法，尤指一種利用 電解法回收太陽能電池之製程。 【先前技術】 太陽能電池（solar cell )為一光伏打系統 (photovoltaic system)的基本電力轉換單元，其通常是 由半導體材料製成，與其它固態電子元件，例如二極體、 電晶體或積體電路，具有很多之共同性。在實際運用上， 太陽能電池通常會被製作成太陽能模組（s〇lar module)後 才能運作。 目前市面上有报多種型態之太陽能電池，依使用的材 料主要可區分為兩大類，一類是包含單晶矽 (Monocrystalline Silicon)與多晶矽（Multicrystalline200836850 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a method for recovering solar panels, and more particularly to a process for recovering solar cells by electrolysis. [Prior Art] A solar cell is a basic power conversion unit of a photovoltaic system, which is usually made of a semiconductor material, and other solid electronic components such as a diode, a transistor or an integrated body. Circuits have a lot in common. In practice, solar cells are usually manufactured as solar modules (s〇lar modules). At present, there are many types of solar cells reported on the market, and the materials to be used can be mainly divided into two categories, one of which includes monocrystalline silicon and polycrystalline germanium (Multicrystalline).
Si 1 icon)在内的結晶石夕（cryStal 1 ine Si 1 icon)太陽電 池’另一類則是非晶石夕（Amorphous Silicon)太陽電池。其 中，單晶石夕製成的太陽電池，效率高且性能穩疋，多晶石夕 因為製程簡單，較具成本優勢。根據統計，目Μι全球結晶 矽太陽電池的出貨量仍較大宗，約占八成以上的產值。 然而，由於能源危機帶來市場需求量急遽暴增，使得 結晶矽上游矽原料供應出現短缺現象，除了这成矽原料價 格上漲外，也對產業的發展造成不小的衡擊^ 從製造的角度來看，矽晶圓片通常是由圓柱狀的矽鑄 5 200836850 錠（Ing〇t)利用金屬線鑛（WireSaw)切片而成。過去，石夕濤 錠必，由_的材料中抽拉成型，而現今已經發現從廢棄 的太陽能板时之再切亦可以大約丨G%的比率添加於純 石夕中以拉’這使得再切之價值也隨張船高。Si 1 icon) is the crystal silicon solar cell. The other type is the amorphous silicon solar cell. Among them, the solar cell made of single crystal stone has high efficiency and stable performance, and the polycrystalline stone is more cost-effective because of the simple process. According to statistics, the global crystallization of solar cells is still relatively large, accounting for more than 80% of the output value. However, due to the sudden increase in market demand due to the energy crisis, the supply of raw materials in the upstream of the crystallization is in short supply. In addition to the rising price of raw materials, it also has a small impact on the development of the industry. In view, the tantalum wafer is usually made of a cylindrical cast iron 5 200836850 ingot (Ing〇t) using a wire wire (WireSaw). In the past, Shi Xitao ingots must be drawn from the material of _, and now it has been found that the re-cut from the discarded solar panels can also be added to the pure stone in the evening of 丨G% to pull 'this makes The value of cutting is also high with Zhang.
參閱第三圖’典型⑽太陽能電池9(sili_ s〇iar = 11)包括-石夕晶基板9〇、-前接觸電極91、一背接觸電 極92及一抗反射層93。其中，該石夕晶基板9〇係一邊捧雜 :而成Μ型半導體層9Q1，另—邊摻闕成p型半導體層 902,而於N型半導體層贿射型半導體層之間界定 出一 P-η接面903 (p_n Juncti〇n)。該前接觸電極91係 利用網印等技術將銀漿料形成栅狀或手指狀的接觸電極Μ ::晶基板90上。而背接觸電極92是由鋁漿料塗層與矽 =板90形成歐姆接觸而成。光電轉換後產生之電流係藉 ^、背接觸電極91及92分別導引給一消耗設備95使 2該抗反射層93係形成”晶基板9()上用以提高光穿 氮切（Sl3N4)在過去幾十年已經逐漸地取代二氧 =太成為抗反射層93之材料，特別是由於氮化㈣色的表 面鈍化特性，阻止載子在太陽能電池的表面再結合。 从 田々、/又π 隹化降解（Photodegradation)， =曰=夕太陽能電池製成的太陽能模組（sQlar mQduie)可 ^年仍不會影響纽能。惟，太陽能额之分層、破 =、缺陷或電力儲存設備的失效等均會導致效能大大降 =面臨回㈣命運。此外，太陽能電池製造過程中的瑕 也可以回收。因此’隨著太陽能系統的市場曰益壯 大’回收廢棄或喊的太陽能模組或太陽能電池的需求也 6 200836850 跟著大大地提高。 因此，美國專利δ063995揭露一種回收矽光伏♦ (S1l1C〇nph〇一…。dule)之方法，；= 在鈍氣環境中利用高溫裂解「太陽能模組」中 用 EVA部分’以避免其碳化’藉此回收太陽能電池=料 此方法僅回收其中的「太陽能電池」，無法更進 太陽能電池中之接觸電極91及92之銀或鋁金屬， 反射塗層93之氮切（Si3N4)。因此，無法直接 :Referring to the third figure, a typical (10) solar cell 9 (sili_s〇iar = 11) includes a - stellite substrate 9A, a front contact electrode 91, a back contact electrode 92, and an anti-reflection layer 93. Wherein, the illuminating substrate 9 is held in one side: a germanium-type semiconductor layer 9Q1, and is additionally doped into a p-type semiconductor layer 902, and a n-type semiconductor layer is formed between the brittle-type semiconductor layers. P-η junction 903 (p_n Juncti〇n). The front contact electrode 91 is formed by forming a grid-like or finger-shaped contact electrode Μ :: crystal substrate 90 by a technique such as screen printing. The back contact electrode 92 is formed by an aluminum paste coating forming an ohmic contact with the 矽=plate 90. The current generated after the photoelectric conversion is guided to a consuming device 95 by the back contact electrodes 91 and 92, respectively, so that the anti-reflective layer 93 is formed on the crystal substrate 9 (for improving the light-through nitrogen cut (Sl3N4). In the past few decades, the material of the anti-reflective layer 93 has been gradually replaced by dioxin, especially due to the surface passivation property of the nitriding (tetra) color, preventing the carrier from recombining on the surface of the solar cell. From the field, / and π Photodegradation, = 曰 夕 夕 solar cell solar module (sQlar mQduie) can still not affect New Energy. However, solar energy stratification, broken =, defects or power storage equipment Failure, etc. will lead to a significant drop in performance = face back (four) fate. In addition, the enamel in the solar cell manufacturing process can also be recycled. Therefore, 'as the solar system market grows stronger' recycles discarded or shouted solar modules or solar cells The demand is also greatly improved in 2008. The US patent δ063995 discloses a method for recycling 矽 photovoltaic ♦ (S1l1C〇nph〇...dule); Use the EVA part in the "solar module" to avoid carbonization. This is to recover the solar cell. This method only recovers the "solar cell", and cannot change the silver or aluminum of the contact electrode 91 and 92 in the solar cell. The metal, the nitrogen coating of the reflective coating 93 (Si3N4). Therefore, it cannot be directly:
收的再生矽晶基板90。 W 日本專利獅G5123541㈣-種在單㈣基板 效移除絕緣膜及不請之方法，主要係將該單㈣ = =膜先以物理性之破碎，例如喷砂（sand Mast)等了繼 浸泡在氟酸及硝酸的混合液中移除，以得到可回收的矽美 板90。上述之方法雖可有效地去除太陽能電池g中的^ 極91及氮切93。⑽該倾㈣制，對環境十分不 其他，例如日本專利JP2005311178是單純利用化 理以去除銀電極91及氮切93。由於目前尚未有任】 術可以有效且安全地移除矽基板上的其他材料，許多業 甚^直接彻王水來—併去除所有基板上的材料，包括金 屬電極及氮切等，其產生的廢液處理問題更值得堪慮。 又，美國專利5997718揭露一種回收CdTe光伏打廢棄 物（ph〇t〇v〇itaic waste)之方法’其主要係首先利用硝酸 將廢棄物中的塑膠及金屬物質溶出，經過固液分離後，將 濾液取出進行電解以分離出碲tellurium (Te)金屬。然 7 200836850 而，就基板回收的角度而言，此法主要係利用駿洗來移除 金屬電極，其後續的「電解」製程主要目的是將酸洗後二 - 廢液中電解以分離有害金屬，並回收高危險性的崎。 - 誠如上所述，目前業界大多仍沿用化學處理方式來移 除矽晶基板上的其他物質以回收太陽能電池，銬而「门^ …、rrq |回收」 基板的同時，也大量地「污染」環境。 【發明内容】 …有鑑於此，本發明之主要目的在於提供一種回收方 法，可以有效地且安全地移除太陽能電池上的不良物質， Θ回收矽晶基板，藉以重新投產或再利用。 ' 本發明所述之回收方法主要係利用「電解法 」7卜J 日日 基板上的金屬電極材料移除，例如銀膠中的銀。其中，該 電解法較佳地係利用申請人申請中之非接觸式電解蝕刻^ 式來移除基板上的金屬物質，既快速且有效。關於非接觸 • 式電解蝕刻方式可詳閱案號095123018及095128916之專 、 利申請案之說明。 至於基板上之抗反射層之去除，相較於傳統上使用高 危險性之氯氟酸來去除氮化石夕⑸㈤，本發明採用磷酸來 加以移除，不僅蝕刻速度容易控制且安全無虞。 古一因此，藉由本發明之回收方法，藉以避免習用技術之 兩污染及高危險性造成的環境危害。 此外，藉由本發明之回收方法，可得到純度 99%以上 的石夕晶材料，可進-步與原材料純石夕混合以拉製石夕鋒破， 8 200836850 以郎省妙每石定之材料成本。 熟知此技術者可在閱讀說明書後，更了解請求項中所 界定的申請專利發明的其他好處或其他目的。 【實施方式】 首先，如第三圖所示，典型的矽太陽能電池9包括— 石夕晶基板9G、-前接觸電極91、—f接觸電極92及一抗 =射層93 °其中’該石夕晶基板9{)係—邊摻雜硼而成N型 半導體層9G1，另-邊摻雜鱗成p型半導體層.，而於^ 型+導體層901與p型半導體層⑽2之間界定出一 ”接 面903。該前接觸電極91係利用網印等技術將銀聚料形成 柵極或手減的接觸電極91於㊉日日日基板9()上，而銀聚料 艮：)主要是由銀粉與環氧樹脂(ep〇xy)混合而成。 ::Γ心是由銘漿料塗層與矽晶基板9〇形成歐姆 轉換後產生之電流導引：來:電：91及92分別地將光電 射厗來么、—沩耗設備95使用。該抗反 射層93躲成抑晶基板9G上㈣提高光穿透率。 石” ΪΓ月：露一種回收方法用以回收太陽能電池上之- 驟主要係分別移除該太陽能電池上之全屬 再加以回收並 絰本叙明所述之分層回收後，可 口三、’、再生 板’供石夕鑄叙拉製或其他之再利用之㈣砂晶基 請參閱第—圖，係揭露本發太 9 200836850 陽能電池9夕m B «· Λ _ 觸電極92及，基才反9〇上之该前接觸電極91、該背接 曰Α板9Π 射層93，以有效地㈣可再利用之石夕 二屬免先前技術中利用有害之化學_液產生 蝕刻IS ’二步：A中’該麻電池9被放置於-電解 屬，即銀膠中的丁電解，去除前接觸電極91中的銀金 包括-一如工第:^ 液供應源4及-儲槽^ σ電源供應器3、-電解 罩Π刻單元1係具有-陽極10、兩陰極11及一絕緣 =緣;=設於該陽極1〇之 別固定在兩固^ 絕該 U。該兩陰極11係分 於該絕緣罩12Τ。13的底部。而該兩固定板13分別固定 忒工作台2係供承放該太陽能電池9，且 之該前接觸電極91面對該飿刻單元1之陽極:: :亥I秘應H 3係具有_正極（如正號騎 木（如負號所示）分別連接該蝕刻單元丨之芎 一負 陰極11，用以提供電解時所需之電力。 極10及該 該電解液供應源4係藉由該絕I — 連通該蝕刻單元1，用以連讳 而的—開口 15與 陽極1 〇。該第-電解液41 二t電解液Μ於該 刷於該⑪晶基板9。上 r厂陽極i。後，再沖 板9。與該陰極u所界定之:==且沿該矽晶基 間隙14流出。其中，該第一 10 200836850 電解液41係充滿該_ 14，使 與該前接觸電極91之間可萨由节笛，：5亥兩陰極11 _ _ 」精由δ亥弟一電解液41保持雷性 連接。因此，前接觸電極91中 的μ，苴抑士中被该蝕刻單元1掃掠過 g域’其轉中之銀會因為電解 陽極1〇流下來的第—電解液41_而移除大里地被^ 有鑑於資源回收之者吾 考5亥儲槽5係設於該工作台2 :方用以接收電_後之該第一電解液41。其中含有可 金屬’例如銀金屬’因此續以傳統之電鍍方法 雷: 置1〇。更可包括-純化設備6。 =的第-電解液41可藉由一幫浦7將之打入該純化設 備6中過濾’並排人該電解液供應源4以重覆使用，不僅 減低污染，且資源不浪費。 因此，藉由上叙非接觸式電解钱刻製程可大量地移 除該太陽能電池9之銀膠中的銀。然而，熟悉相關技蓺之 人士當知，本發明戶斤叙電解侧方式不限於該非接觸式 電解蝕刻法，傳統之電解蝕刻方式亦在本發明之精神及原 理下猶加修飾而實施。 ^請續參閱第一圖之步驟B，經過電解去除銀膠中的銀 後，可繽以一第二電解液（未顯示）以相同於上述移除銀 之非接觸式電解蝕刻方式移除該背接觸電極92之鋁層，須 特別注意的是，當使該鋁層92面對該蝕刻單元1以進行電 解钱刻。 在步驟c中，經過電解去除前、背接觸電極91及92 後，續以約50%〜100%重量百分比之磷酸，較佳為85%，於 11 200836850 100〜200 c的溫度下，除去該矽晶基板卯 :蝴該抗反射層93。其中，氮峨刻之化The recovered twinned substrate 90 is received. W Japanese patent lion G5123541 (four) - a kind of single (four) substrate effect to remove the insulating film and the method of not asking, mainly the single (four) = = film first physical fracture, such as sand blasting (sand Mast), etc. The mixture of hydrofluoric acid and nitric acid is removed to obtain a recyclable enamel plate 90. The above method can effectively remove the electrode 91 and the nitrogen cut 93 in the solar cell g. (10) The system of the tilting (four) is very different from the environment. For example, Japanese Patent JP2005311178 simply uses a chemical to remove the silver electrode 91 and the nitrogen cut 93. Since there is currently no work to effectively and safely remove other materials on the substrate, many industries are directly involved in the water - and remove all materials on the substrate, including metal electrodes and nitrogen cutting, etc. Dealing with problems is even more worrying. In addition, U.S. Patent No. 5,997,718 discloses a method for recovering CdTe photovoltaic waste (ph〇t〇v〇itaic waste), which is mainly used to dissolve plastic and metal substances in waste by nitric acid, and after solid-liquid separation, The filtrate was taken out for electrolysis to separate the 碲tellurium (Te) metal. However, 7 200836850, in terms of substrate recovery, this method mainly uses the use of Chun wash to remove the metal electrode, and the subsequent "electrolysis" process is mainly to electrolyze the pickled second waste liquid to separate harmful metals. And recycle high-risk saki. - As mentioned above, most of the current industry still uses chemical treatment to remove other substances on the crystal substrate to recover solar cells, and the "gates ..., rrq | recycling" substrates are also "contaminated" in large quantities. surroundings. SUMMARY OF THE INVENTION In view of the above, it is a primary object of the present invention to provide a recycling method for efficiently and safely removing undesirable substances on a solar cell, recovering a twinned substrate, and thereby re-commissioning or reusing. The recovery method of the present invention is mainly carried out by using a metal electrode material on an "electrolysis method", such as silver in silver paste. Among other things, the electrolysis method is preferably fast and efficient by removing the metal species on the substrate by the non-contact electrolytic etching method of the applicant's application. For non-contact • Electrolytic etching methods, please refer to the descriptions of the special applications and applications of Case Nos. 095123018 and 095128916. As for the removal of the antireflection layer on the substrate, the present invention is removed by using phosphoric acid to remove the nitride (5) (5) compared to the conventional use of high-risk chlorofluoric acid, and the etching speed is not only easy to control but also safe. Gu Yi therefore, by the recycling method of the present invention, avoids the environmental hazards caused by the two pollutions and high risks of the conventional technology. In addition, by the recovery method of the present invention, a stone crystal material having a purity of 99% or more can be obtained, and the stone material can be further mixed with the raw material pure stone to extract the stone stalk, 8 200836850 . Those skilled in the art will be able to appreciate the other benefits or other objects of the claimed invention as defined in the claims after reading the specification. [Embodiment] First, as shown in the third figure, a typical tantalum solar cell 9 includes - a quartz crystal substrate 9G, a front contact electrode 91, a -f contact electrode 92, and a primary anti-reflection layer 93 ° which is the stone The solar crystal substrate 9{) is doped with boron to form an N-type semiconductor layer 9G1, and the other side is doped to form a p-type semiconductor layer, and is defined between the +-type + conductor layer 901 and the p-type semiconductor layer (10) 2 A "contact surface 903" is formed. The front contact electrode 91 is formed by a technique such as screen printing to form a gate electrode or a hand-reduced contact electrode 91 on a ten-day substrate 9 (), and a silver polymer material:) It is mainly made of silver powder and epoxy resin (ep〇xy). :: Heart is the current guide formed by the ohmic conversion of the paste coating and the twinned substrate 9〇: Come: Electricity: 91 and 92 respectively, the photoelectric ray is used, the consumption device 95 is used. The anti-reflection layer 93 is hidden on the crystal-inhibiting substrate 9G (4) to improve the light transmittance. Stone" ΪΓ月: Dew a recycling method for recycling solar cells In the above - the main part is to remove the entire genus of the solar cell and then recycle it, and after the stratified recovery described in the present description, delicious , ', Recycled board' for Shi Xizhu, or other re-use (4) sand crystal base, please refer to the first picture, revealing the hair of the hair 9 200836850 Yang energy battery 9 eve m B «· Λ _ touch electrode 92 And the front contact electrode 91 and the back contact plate 9 irradiance layer 93 are effectively etched by the use of harmful chemical _ liquid in the prior art. IS 'Two Steps: A' The hemp battery 9 is placed in the electrolysis genus, that is, the butyl electrolysis in the silver gel, and the silver gold in the front contact electrode 91 is removed - as in the work: ^ liquid supply source 4 and - The storage tank σ power supply 3, the electrolytic hood engraving unit 1 has an anode 10, two cathodes 11 and an insulation = edge; = is disposed on the anode 1 固定 fixed to the two. The two cathodes 11 are separated by the insulating cover 12A. The bottom of the 13th. The two fixing plates 13 are respectively fixed to the table 2 for receiving the solar cell 9, and the front contact electrode 91 faces the anode of the engraving unit 1:: Hai I secret H 3 system has _ positive electrode (If the positive riding wood (as indicated by the minus sign) is connected to the negative cathode 11 of the etching unit, respectively, for providing the electric power required for electrolysis. The pole 10 and the electrolyte supply source 4 are by the The I is connected to the etching unit 1 for connecting the opening 15 and the anode 1. The first electrolyte 41 is applied to the 11 crystal substrate 9. Afterwards, the plate 9 is further defined by the cathode u: == and flows along the twin base gap 14. The first 10 200836850 electrolyte 41 is filled with the _ 14, and the front contact electrode 91 is used. Between the horns and the whistle, the etched unit 1 is _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Sweeping through the g domain's silver in the middle of the transfer will be removed due to the electrolyte-electrolyte 41_ flowing down the electrolyte. The 5th sump 5 is installed on the workbench 2 to receive the first electrolyte 41 after the electric _. It contains a metal can be 'for example, silver metal'. Therefore, the conventional electroplating method is used. Further, the -electrolyte device 41 can be included. The first electrolyte 41 can be driven into the purification device 6 by a pump 7 to filter the electrolyte supply source 4 for repeated use, not only reducing pollution. And the resources are not wasted. Therefore, the silver in the silver paste of the solar cell 9 can be largely removed by the above-mentioned non-contact electrolysis process. However, those skilled in the art know that the invention is The electrolysis side method is not limited to the non-contact electrolytic etching method, and the conventional electrolytic etching method is also implemented by modifying the spirit and principle of the present invention. ^ Please continue to refer to step B of the first figure to remove silver paste by electrolysis. After the silver is removed, the aluminum layer of the back contact electrode 92 is removed by a second electrolyte (not shown) in the same manner as the above-mentioned silver removal. It is necessary to pay special attention to The aluminum layer 92 faces the etching unit 1 for electrolysis In step c, after the front and back contact electrodes 91 and 92 are removed by electrolysis, about 50% to 100% by weight of phosphoric acid is used, preferably 85%, at a temperature of 11 200836850 100 to 200 c. Removing the twinned substrate: the antireflection layer 93. Among them, nitrogen engraving
ShN4 + 射〇4 〜Si3(p〇4)4 + 棚3 其中，石粦酸石夕Si3(p〇4)4和氛⑽）@ 溶於水。如此，磷酸可用來齡二其種副產品均可 93。由於磷酸屬於弱酸安二：0上的氮化矽 且反應速率可穩定地受控制T王性相對喊HF(氫氣酸）， 硝酸溶液陽能電池9續被浸潰於約概 ㈤，可^!^ti=dify)及氧化 由於此步物刪料分地微量，而， 確酸戟肖大I之 可省略D步驟。 兄之^甚至’在條件許可下， 經過步驟Α及D，盤狀由沾你人s 剩下銀膠中的樹_。=經完全被移除而 中殘留的樹脂膜完全剔除或地將該太陽能電池9 平方: = 'Ϊ?上述方法實施後，可得到阻值 26〜33歐姆/ 分之單夕基板，以及阻值7g歐姆/平方公 土 ，可進一步作為矽鑄碇拉製之部份材料。 所示=二:;::r:r施例。除了上述 移除方法來回切晶基。#二實施例亦利用分段 12 200836850 首先，係將該太陽能電池9浸潰於一混合酸液中以同 ^移=銀與鋁金屬電極（步驟F)。該混合酸液主要為由少 ，=¼酸，加上硝酸、醋酸及水混合而成。經過實驗證實， =s Ssc液此迅速且有效地同時移除銀與銘金屬電極，且 不傷及氮化矽，作業時程得以簡化。 接著，利用機械式方法瞬間移除剩下的樹脂膜（步驟ShN4 + 〇 4 ~ Si3 (p〇4) 4 + shed 3 Among them, sarcophagus Si3 (p〇4) 4 and atmosphere (10)) @ dissolve in water. Thus, phosphoric acid can be used for age 2 and its by-products are 93. Since phosphoric acid belongs to the weak acid, the tantalum nitride on the second:0 and the reaction rate can be stably controlled by the T-king relative to shouting HF (hydrogen acid), the nitric acid solution of the nitric acid battery 9 is continuously immersed in the approximate (five), can be ^! ^ti=dify) and oxidation. Because of this step, the material is traced to a small amount, and the acid step can be omitted. Brother's ^ even 'under the conditions permit, after the steps and D, the disc is made of the tree in the silver glue left by you. = The resin film remaining completely removed is completely removed or the solar cell 9 is squared: = 'Ϊ? After the above method is carried out, a single-sided substrate having a resistance of 26 to 33 ohms/min, and a resistance value can be obtained. 7g ohm/square earth can be further used as part of the material of the enamel casting. Shown = two:;::r:r example. In addition to the above removal method, the crystal substrate is cut back and forth. The second embodiment also utilizes the segmentation 12 200836850 First, the solar cell 9 is immersed in a mixed acid solution to transfer the silver and aluminum metal electrodes (step F). The mixed acid is mainly composed of a mixture of less than 1⁄4 acid, plus nitric acid, acetic acid and water. It has been experimentally confirmed that the =s Ssc solution quickly and effectively removes the silver and metal electrodes at the same time without damaging the tantalum nitride, and the working time is simplified. Next, the remaining resin film is removed instantaneously by a mechanical method (step
ί ^最後，再利用約85%之磷酸移除氮化矽（步驟H)，以 得到可資回收之矽晶基板9〇。 .一參閱第五圖，係本發明之第三較佳實施例。類似於第 貫施例’其差異在於第三較佳實施例中，其太陽能電池 9中的減銀金屬電極制__氯化鐵⑽㈤钱 來移除（步驟I)，亦能快速有效地移_些金屬電極。’ 待金屬電極被移除後，再以機械式的方__ 柯脂層（步.驟J)，以及利用石粦酸移除氮化石夕（步驟κ)"曰 到可資回收之矽晶基板90。 伸 無論如何’任何人都可以從上述例子的說明中 夠教導，亚據而了解到本發明確實具有產業上之利 =發明在同-領域中未見減或類似技術揭露或而 ^新穎性及進步性。因此，本㈣符合發料件^ 依法提出申請。 戈1干戋 13 200836850 【圖式簡單說明】 第一圖係本發明回收太陽能電池之第一較佳實施例。 第二圖係本發明所使用之非接觸電解蝕刻設備的示意 圖。 第三圖係太陽能電池之示意圖。 第四圖係本發明回收太陽能電池之第二較佳實施例。 第五圖係本發明回收太陽能電池之第三較佳實施例。 【主要元件符號說明】 9矽太陽能電池 901 N型半導體層 903 ρ-η接面 91前接觸電極 93抗反射層 1蝕刻單元 11陰極 13固定板 15開口 2工作台 4電解液供應源 5儲槽 7幫浦 90矽晶基板 902 Ρ型半導體層 92背接觸電極 100電解蝕刻裝置 10陽極 12絕緣罩 14間隙 3電源供應器 41第一電解液 6純化設備 14Finally, the barium nitride is removed by using about 85% phosphoric acid (step H) to obtain a recoverable twin substrate 9〇. Referring to Figure 5, a third preferred embodiment of the present invention is shown. Similar to the first embodiment, the difference is that in the third preferred embodiment, the silver-reduced metal electrode in the solar cell 9 is removed by the silver-plated metal electrode (10) (5), and can be quickly and efficiently moved. _ some metal electrodes. After the metal electrode is removed, the mechanical layer __ 柯 grease layer (step J), and the use of sulphuric acid to remove nitrite eve (step κ) " 可 to recoverable 矽Crystal substrate 90. Anyway, 'anyone can teach from the description of the above examples, and it is learned that the present invention does have industrial advantages = inventions are not seen in the same field or similar technologies are disclosed or novelty and Progressive. Therefore, this (4) conforms to the issue of materials ^ and submits an application according to law.戈1干戋 13 200836850 [Simplified description of the drawings] The first figure is a first preferred embodiment of the recovered solar cell of the present invention. The second drawing is a schematic view of a non-contact electrolytic etching apparatus used in the present invention. The third figure is a schematic diagram of a solar cell. The fourth figure is a second preferred embodiment of the recovered solar cell of the present invention. The fifth drawing is a third preferred embodiment of the recovered solar cell of the present invention. [Main component symbol description] 9 矽 solar cell 901 N-type semiconductor layer 903 ρ-η junction 91 front contact electrode 93 anti-reflection layer 1 etching unit 11 cathode 13 fixing plate 15 opening 2 table 4 electrolyte supply source 5 storage tank 7 pump 90 twin substrate 902 Ρ type semiconductor layer 92 back contact electrode 100 electrolytic etching device 10 anode 12 insulating cover 14 gap 3 power supply 41 first electrolyte 6 purification device 14