200829967 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種彩色濾光片的佈局圖案，特別是一種 在佈局圖案各角隅設有加大型彩色濾光片或延伸棱邊以避 免彩色濾光片剝離之彩色濾光片的佈局圖案。 【先前技術】 一般習知的彩色影像感測器可依其成像技術大略分為 互補式金氧半導體影像感測器（CMOS image sensor，CIS)和 電荷耦合(CCD)感測器二種，其中互補式金氧半導體影像感 測器可利用半導體製程製作，將影像感測和影像處理所需 的兀件製作在單一的晶片上，其應用範圍遍佈多種消費性 的電子商品，例如數位相機、個人數位助理(pDA)和照像手 機等等。 習知的CIS由下而上依序包含基底、複數個感光二極 體、金屬内連線層、彩色濾光片陣列及複數個微聚光鏡 (microlens)等多層結構共同組成複數個感測影像的像素 (pixel)。光線由最上層的微聚光鏡進入cis後，經過彩色 濾光片將光線依其波長作分類，分類後的光線再到達下方 的感光二極體產生對應強度的電子訊號，並交由其他相關 的το件處理和記錄；而該等像素係井然有序地排列成包含 5 200829967 ^ 複數條行列的像素陣列(pixel array)，且該像素陣列可劃分 為負貝感剛影像的一主動感測區（active sensor region)的一 主動像素陣列（active pixel array)以及該在主動感測區外圍 的虛置像素陣列（dummy pixel array)，其中，該等虛置像 素一方面係用以保護主動感測區的該主動像素陣列，另一 #面來說’由該虛置像素陣列所產生的訊號可以作為該主 動感測區中該主動像素陣列所產生的訊號之參考值，藉此 馨 校正因CIS結構所造成的訊號誤差。 請參考第1圖，其繪示典型習知CIS之彩色濾光片陣 列10的示意圖，彩色濾光片陣列10係涵蓋CIS之該主動 感测區的該等主動像素陣列及該主動感測區周邊之該等虛 置像素陣列，其包含複數個紅色(R)濾光片12、複數個綠色 (G)濾光片14及複數個藍色(B)濾光片16等不同顏色的彩 色濾光片，且每四個彩色濾光片（G、R、G、B)構成一個單 _ 位，彼此相鄰排列成馬赛克(mosaic)式的彩色濾光片陣列 10，藉此分離不同波長的光線，進而達成感測彩色影像的 目的。 以目前的製程技術來說’製作彩色濾、光片陣列時皆利 用彩色光阻依其顏色依序經過塗佈、曝光、顯影、烘烤等 製程，在一基底表面上逐次製作出一種顏色的彩色濾光 片，然後再共同拼湊出完整的彩色濾光片陣列。然而，請 200829967 參考第2圖，由左到右依序為製作完成的紅色彩色渡光 片綠色彩色濾光片及藍色彩色濾光片的剖面圖，以負光 阻為材料的彩色濾光片為例，在製作完成後，由於構成彩 色光阻的感光材料特性的差異，不同顏色的彩色濾光片會 有著不同剖面結構，因此在顯影、清洗等製程後，常會發 生彩色濾光片自該基底表面剝離(pealing)的現象，當中尤 以底面積最小的藍色彩色濾光片最容易發生剝離的情形； ⑩此外，如第3圖所示，第3圖為設於主動感測區外圍之虛 置像素陣列上彩色濾光片陣列之一部分結構的示意圖，可 以清楚地觀察到在邊緣和角隅(c〇rner)都有剝離的彩色濾 光片，根據統計，剝離的彩色濾光片中有8〇%是來自位於 彩色濾光片陣列的角隅，這些剝離的彩色濾光片嚴重影響 產品的良率，為產品良率無法提昇的主要原因之一。 【發明内容】 _ 針對上述習知彩色濾光片陣列的缺點，本發明之一目 的在於提供一種彩色濾光片之佈局圖案，特別是一種在佈 局圖案各角隅設置加大型彩色濾光片或延伸棱邊，以降低 彩色濾光片自佈局圖案角隅剝離的機率。 為達上述之目的，本發明提供一種彩色濾光片之佈局 _ 圖案’該佈局圖案包含排列為一矩陣之複數個彩色濾光片 以及分別設置於該矩陣之各角隅之複數個加大型彩色濾光 7 200829967 片（enlarged color filter)，其中，各該加大型彩色濾光片的 面積大於各該彩色濾光片，以降低自該佈局圖案角隅剝離 的可能性。 為達上述之目的，本發明另提供一種彩色濾光片之佈 局圖案，該佈局圖案包含排列為一矩陣之複數個彩色濾光 片以及複數個延伸棱邊(extended edge)，其中，該等延伸棱 邊係設於該矩陣之各角隅之並與設於各角隅之各該彩色濾 ®光片連接。 據此，本發明所提供之彩色濾光片之佈局圖案係適用 於主動感測區的主動像素陣列上的彩色濾光片陣列配置、 主動像素陣列外圍虛置像素陣列上的彩色濾光片之彩色濾 光片陣列配置或前述兩個區域的彩色濾光片陣列配置，並 可有效防止彩色濾光片的剝離，並顯著提伸產品的良率。 【實施方式】 為了突顯本發明之優點及特徵，下文列舉本發明之數 個較佳實施例，並配合圖示作詳細說明如下： 由於在實際的CIS製程中，80%剝離的彩色濾光片是 來自設於角隅處的彩色濾光片，本發明係提供一第一較佳 實施例，以消去設於角隅處彩色濾光片的方式，達成減少 200829967 彩色濾光片剝離的可能性。請參考第4圖，第4圖係依據 本發明之第一較佳實施例所繪示之彩色濾光片之佈局圖案 的示意圖’該佈局圖案係設置於一基底之一表面（圖未 示）’例如一包含複數層層間介電(inter_layer dielectric，ILD) 層、複數個金屬内連線以及複數個感光二極體之半導體基 底表面’且該佈局圖案係為一具有缺口之彩色濾光片陣列 26，其包含複數個像素矩陣(cell)17、18、19等（以較粗的 _ 黑框示之）。其中，每一個像素矩陣均包含四個彩色濾光片 以陣列方式排列，且相鄰的彩色濾光片顏色並不相同。以 像素矩陣18為例，像素矩陣18包含一藍色彩色濾光片 (B)24、一第一綠色彩色濾光片（G)221、一第二綠色彩色濾 光片222以及一紅色彩色濾光片（r)2〇，而且藍色彩色濾光 片24與第一綠色彩色濾光片位於像素矩陣18的第一列， 呈左、右配置，第二綠色彩色濾光片222與紅色彩色濾光 片20則設在像素矩陣18的第二列，亦呈左、右配置。 如前所述，由於構成彩色光阻的感光材料特性的差 異’不同顏色的彩色滤光片具有不同的剖面結構，所以在 歷經形成不同顏色之彩色滤光片的塗佈、曝光、顯影、烘 烤、清洗等製程，設於彩色濾光片陣列之角隅處的彩色濾 光片常會發生彩色濾光片自該基底表面剝離的現象，因此 • 本發明之第一較佳實施例便利用去除原本應該設置在角隅 • 28之彩色濾光片的佈局設計，來降低設於角隅28之彩色 9 200829967 -滤光片的數量，以減少彩色遽光片可自角隅28剝離的可能 性，因此構成如第4圖所示之具有缺口的一彩色滤光片陣 列在角隅28並未設置任何一種的彩色渡光片。此外， 於第^佳實施例中’並不限制被消去的彩色濾光片的種 類與數量，端視整體佈局圖案的設計而決定被消去的彩色 ;慮光片的種類，亦即需消去設置於最角落的至少一彩色遽 光片’尤以底面積最小之藍色彩色遽光片為佳。 _ 上述第較佳實施例係以消去法減少設於角隅處的彩 色濾光片數量，以使之彩色濾光片陣列的角隅在巨觀上約 略形成一圓角化結構，接著本發明另提供一第二較佳實施 例’在維持原有#式矩陣完整外型的前提下，彡成減少彩 色濾光片剝離的狀況。請參考第5圖，第5圖係依據本發 明之第二較佳實施例所繪示之一彩色濾光片之佈局圖案的 不意圖，且第二較佳實施例與該第一較佳實施例相同之元 ⑩件係沿用該第-較佳實施例之元件符號。如第5圖所示， 該佈局圖案係設置於一基底之一表面（圖未示），例如一包 含複數層層間介電層、複數個金屬内連線以及複數個感光 一極體之半導體基底表面，且該佈局圖案包含複數個像素 矩陣Π、18、19等（以較粗的黑框示之）以及設於該佈局圖 案各角隅處之複數個加大型彩色濾光片3〇，共同排列為一 . 馬賽克式的矩陣，且相鄰的彩色濾光片為不同的顏色。值 知注意的是，第二較佳實施例所包含之加大型彩色濾光片 200829967 一係各自取代自知形色濾光片陣列角隅處至少三塊彩色滤 光片的位置，亦即其面積為該佈局圖案所包含之紅色彩色 遽光片20、、綠色彩色滤光片221、222或藍色滤光片24的 至少二倍’也就是說，藉由擴大位於角隅處的加大型彩色 濾光片30面積’以增加與下方基底（圖未示）的接觸面，因 此加大型彩色遽光片30較不易剝離，進而使產品 升0 如同第一較佳實施例i，本第二較佳實施例也是利 用彩色遽光片的光罩佈局圖案即可達成，以第5圖綠 ^的加大型彩色㈣片作朗，在製作第二較佳實施例之 衫色濾光片的佈局圖案時’僅需修改習知用以製作綠色彩 色濾、光片的光罩圖案’將角隅處的濾光片圖案開口分別向 平及垂直方向各延伸—個彩色濾光片的大小，便可得到 如本第二較佳實施例所示之L型的加大型彩色濾光片30, 然而’加大型$色遽光片3G的外型並不揭限為L型以增 加接觸面積的概念為前提，任意_種形狀如矩形、三角形、 平仃四邊形、菱形等均可適用於本發明所述之彩色滤光 片士。據此當製作如本發明所述之彩色遽光片之佈局圖案 '…、u新的製程或材料，僅利用增加角隅處的彩色 ;慮光片與基底之接觸面積的方式，就可以有效降低彩色渡 光片的剝離數量，並A幅提升產品之良率。 200829967 本發明另揭露一第三較佳實施例，其特點在彩色滤光 片所排列而成的矩陣周邊設置加強貼附力的結構，因此使 設於矩陣周邊的彩色濾光片更不易剝離。請參考第6圖， 第6圖係依據本發明之該第三較佳實施例所繪示之一彩色 濾光片之佈局圖案的示意圖，且本第三較佳實施例與該第 一較佳實施例相同之元件係沿用該第一較佳實施例之元件 符號。如第6圖所示，該第三較佳實施例之該佈局圖案係 設置於一基底之一表面（圖未示），例如一包含複數層層間 ® 介電層、複數個金屬内連線以及複數個感光二極體之半導 體基底表面，且該佈局圖案包含複數個像素矩陣17、18、 19等（以較粗的黑框示之）以及設於該佈局圖案各角隅處之 複數個延伸棱邊(extended edge)32，排列成一馬賽克式的矩 陣且相鄰的彩色濾光片的顏色並不相同，其中，各像素矩 陣均包含一藍色彩色濾光片24、一第一綠色彩色濾光片 221、一第二綠色彩色濾光片222以及一紅色彩色濾光片 ⑩ 20，其排列方式如第一較佳實施例所示之藍色彩色濾光片 24與第一綠色彩色濾光片位於像素矩陣18的第一列，呈 左、右配置，第二綠色彩色濾光片222與紅色彩色濾光片 20則設在像素矩陣18的第二列，亦呈左、右配置。 本發明之第三較佳實施例的特點在於該佈局圖案的角 隅處設置有延伸棱邊32，且延伸棱邊32與相鄰的該等彩 色濾光片連接，在該佈局圖案的角隅處構成近似「口」字 12 200829967 型的環繞結構，而口字型結構内則為藍色彩色濾光片24。 於本較佳實施例中，延伸棱邊32和綠色彩色濾光片221、 222係利用綠色光阻製作，因此在形成濾光片時，只需將 利用在該佈局圖案角隅處開口為「口」字型之綠色彩色濾 光片的光罩，就可以形成如第6圖所示，與最接近的綠色 彩色濾光片221、222共同連接為「口」字型結構的延伸棱 邊32。第三較佳實施例可同時達成增加該佈局圖案角隅處 彩色濾光片與該基底(圖未示）間的接觸面積、減少該佈局 ® 圖案角隅處彩色濾光片自該基底（圖未示）剝離的機會等目 的。然而，本發明之第三較佳實施例係以綠色的彩色光阻 製作延伸棱邊，但不侷於此限，延伸棱邊亦可用藍色的彩 色光阻、紅色的彩色光阻，或其他適用於製作彩色濾光片 的材料，同時，延伸棱邊的顏色設定及延伸範圍可視實際 所需的情況而決定。 • 於該第三較佳實施例中，設於該佈局圖案角隅處的延 伸棱邊係與相近的彩色濾光片連接為「口」字型結構，然 而延伸棱邊亦可與相鄰的彩色濾光片合為一體，形成面積 較其他彩色濾光片大的延伸型彩色濾光片。如第7圖所 示，第7圖係依據本發明之一第四較佳實施例所繪示之一 彩色濾光片之佈局圖案的示意圖，其與該第一較佳實施例 相同之元件係沿用該第一較佳實施例之元件符號，該第四 較佳實施例之該佈局圖案係設置於一基底之一表面（圖未 13 200829967 示），該佈局圖案包含複數個像素矩陣17、18、19等（以較 粗的黑框示之）以及複數個設於該佈局圖案角隅處的延伸 型彩色濾光片34，排列為一馬賽克式的矩陣，且相鄰的彩 色濾光片為不同的顏色。其中，各像素矩陣均包含一藍色 彩色濾光片24、一第一綠色彩色濾光片221、一第二綠色 彩色濾光片222以及一紅色彩色濾光片20，其排列方式如 第一較佳實施例所示之藍色彩色濾光片24與第一綠色彩 色濾光片在像素矩陣18的第一列，呈左、右配置，第二綠 ^ 色彩色濾光片222與紅色彩色濾光片20在像素矩陣18的 第二列，亦呈左、右配置。 第四較佳實施例的特點在於將第三較佳實施例的延伸 棱邊與設置於該佈局圖案角隅處的彩色濾光片以相同顏色 之彩色光阻結合，構成如第7圖所示位於該佈局圖案角隅 處之複數個延伸型彩色濾光片34，該些延伸型彩色濾光片 • 34因涵蓋原本延伸棱邊以及位於該佈局圖案角隅處彩色濾 光片的面積，因此其總面積較其他彩色濾光片更大，更不 容易自該基底之該表面剝離。 除前述之較佳實施例外，本發明另提供一第五較佳實 施例，請參考第8圖，第8圖係依據本發明之第五較佳實 施列所繪示之一包含矩陣邊框之彩色濾光片之佈局圖案的 示意圖，與該第一較佳實施例相同之元件係沿用該第一較 200829967 佳實施例之元件符號。該第五較佳實施例之該佈局圖案係 設置於一基底表面（圖未示），該佈局圖案包含複數個像素 矩陣17、18、19等（以較粗的黑框示之）以及一矩陣邊框 (b〇rder)36,該些像素矩陣係排列為一馬賽克式的矩陣，且 相鄰的彩色滤光片為不同的顏色。其中，各像素矩陣均包 含一藍色彩色濾光片24、一第一綠色彩色濾光片221、一 第二綠色彩色濾光片222以及一紅色彩色濾光片2〇，其排 列方式如第一較佳實施例所示之藍色彩色濾光片24與第 一綠色彩色濾光片在像素矩陣18的第一列，呈左、右配 置，第一綠色彩色濾光片222與紅色彩色濾光片2〇在像素 矩陣18的第二列，亦呈左、右配置。 設於該矩陣外圍之矩陣邊框36係將第三較佳實施例 所揭露之延伸棱邊分別向水平和垂直方向延伸並連接而 成，如護城河一般圍住由該等彩色濾光片所組成的該矩 _ 陣，可有效防止位於角隅處或該矩陣邊緣處的紅色彩色濾 光片20、綠色彩色濾光片221、222或藍色彩色遽光片％ 自该基底之该表面（圖未示）剝離。 第8圖所繪不之矩陣邊框36係利用與製作紅色彩色濾 光片20相同原料的紅色光阻所製作，但不限於此，矩陣邊 框36亦可利用製作綠色彩色濾光片221、222、或藍色彩 色濾光片24的原料建構之。此外，矩陣邊框％亦可與位 15 200829967 • 於該矩陣最外圍的彩色濾光片連接，即構成本發明之第六 較佳實施例，如第9圖所示。第9圖係依據本發明之第六 較佳實施列所綠示之另一包含矩陣邊框之彩色遽光片之佈 局圖案的示意圖，與該第一較佳實施例相同之元件係沿用 該第一較佳實施例之元件符號，該第六較佳實施例之該佈 局圖案係設置於一基底之一表面（圖未示），該佈局圖案包 含複數個像素鱗n、18、19等⑽錄的黑框*之）以及 _ 矩陣邊框38，該些像素矩陣係排列為一馬赛克式的矩 陣，且相鄰的彩色濾光片為不同的顏色。其中，各像素矩 陣均包含-藍色彩色濾光片24、一第一綠色彩色濾光片 221、一第二綠色彩色濾光片222以及一紅色彩色濾光片 2〇，其排列方式如第一較佳實施例所示之藍色彩色濾光片 24與第一綠色彩色濾光片在像素矩陣18的第一列，呈左、 右配置，第二綠色彩色濾光片222與紅色彩色濾光片20在 像素矩陣18的第二列，呈左、右配置。 值得注意的是，第六較佳實施例所包含之矩陣邊框38 係與设於該矩陣最外圈的該等藍色彩色濾光片 24合而為 ，結合後的結構與下方該基底的接觸面積大幅增加，並 連接較雨述實施例更多的彩色濾光片，不僅能保護設於該 矩陣角隅處或邊緣處的該些彩色濾光片，同日寺可以消拜該 • 些形色濾光片自該基底表面（圖未示）脫離的疑慮。 16 200829967 本發明所揭露之該等較佳實施例係以紅藍綠三色之彩 色濾光片陣列為例，其他組合之彩色濾光片陣列亦適用於 本發明，例如··青色(cyan，C)、品紅色(1113§61^,]\4)及黃色 (yellow，Y)三色組合之彩色濾光片陣列（CMY pattern)，紅 色、綠色、藍色及祖母綠色(emerald，E)四色組合之彩色濾 光片陣列(RGBE)，青色、品紅色、黃色及綠色四色組合之200829967 IX. Description of the Invention: [Technical Field] The present invention relates to a layout pattern of a color filter, in particular, a large color filter or an extended edge is provided at each corner of the layout pattern to avoid color The layout pattern of the color filter from which the filter is peeled off. [Prior Art] A conventional color image sensor can be roughly classified into a complementary CMOS image sensor (CIS) and a charge coupled (CCD) sensor according to its imaging technique, wherein Complementary CMOS image sensors can be fabricated on a semiconductor process to create the components needed for image sensing and image processing on a single wafer. Applications range from consumer electronics to digital cameras such as digital cameras. Digital assistants (pDA) and photo phones, etc. The conventional CIS consists of a plurality of layers including a substrate, a plurality of photodiodes, a metal interconnect layer, a color filter array, and a plurality of microlens in order to form a plurality of sensing images. Pixel (pixel). The light enters the cis by the uppermost micro condenser, and the light is classified according to its wavelength through the color filter. The classified light then reaches the lower photodiode to generate an electronic signal of corresponding intensity, and is assigned to other related το. Processing and recording; and the pixels are arranged in an orderly manner into a pixel array comprising 5 200829967 ^ plural rows and columns, and the pixel array can be divided into an active sensing region of the negative shell image ( An active pixel array of the active sensor region and the dummy pixel array on the periphery of the active sensing region, wherein the dummy pixels are used to protect the active sensing region The active pixel array, the other side of the signal generated by the dummy pixel array can be used as a reference value of the signal generated by the active pixel array in the active sensing region, thereby correcting the CIS structure The resulting signal error. Please refer to FIG. 1 , which illustrates a schematic diagram of a typical conventional CIS color filter array 10 . The color filter array 10 includes the active pixel arrays of the active sensing region of the CIS and the active sensing region. The dummy pixel arrays surrounding the plurality of color filters including a plurality of red (R) filters 12, a plurality of green (G) filters 14, and a plurality of blue (B) filters 16 a light sheet, and each of the four color filters (G, R, G, B) constitutes a single_bit, and is arranged adjacent to each other as a mosaic type color filter array 10, thereby separating different wavelengths Light, in order to achieve the purpose of sensing color images. In the current process technology, when color filters and optical arrays are produced, the color resists are sequentially coated, exposed, developed, baked, etc. according to their colors, and a color is successively produced on a substrate surface. Color filters, and then together to form a complete array of color filters. However, please refer to Figure 2, 200829967, which is a cross-sectional view of the red color green light filter and the blue color filter which are completed from left to right, and the color filter with negative photoresist as the material. For example, after the production is completed, the color filters of different colors have different cross-sectional structures due to the difference in characteristics of the photosensitive materials constituting the color photoresist. Therefore, after development, cleaning, etc., color filters often occur from the color filter. The phenomenon of pealing on the surface of the substrate, in which the blue color filter having the smallest bottom area is most likely to be peeled off; 10 In addition, as shown in FIG. 3, the third figure is set in the active sensing area. A schematic diagram of a portion of the structure of the color filter array on the peripheral dummy pixel array, the color filter having peeling off at both the edge and the corner 可以 (c〇rner) can be clearly observed, and the color filter is stripped according to statistics. 8% of the film is from the corners of the color filter array. These stripped color filters seriously affect the yield of the product, which is one of the main reasons why the yield of the product cannot be improved. SUMMARY OF THE INVENTION In view of the above disadvantages of the conventional color filter array, an object of the present invention is to provide a layout pattern of a color filter, in particular, a large color filter is disposed at each corner of the layout pattern or The edges are extended to reduce the chance of the color filter peeling off from the layout pattern corners. In order to achieve the above object, the present invention provides a layout of a color filter _ pattern. The layout pattern includes a plurality of color filters arranged in a matrix and a plurality of enlarged colors respectively disposed at respective corners of the matrix. Filter 7 200829967 (enlarged color filter), wherein each of the enlarged color filters has an area larger than each of the color filters to reduce the possibility of peeling off from the layout pattern corner. In order to achieve the above object, the present invention further provides a layout pattern of a color filter, the layout pattern comprising a plurality of color filters arranged in a matrix and a plurality of extended edges, wherein the extensions The edge is disposed at each corner of the matrix and connected to each of the color filter sheets disposed at each corner. Accordingly, the layout pattern of the color filter provided by the present invention is applicable to the color filter array configuration on the active pixel array of the active sensing region, and the color filter on the dummy pixel array of the active pixel array. The color filter array configuration or the color filter array configuration of the foregoing two regions can effectively prevent the color filter from being peeled off and significantly improve the yield of the product. [Embodiment] In order to highlight the advantages and features of the present invention, several preferred embodiments of the present invention are exemplified below, and are described in detail with reference to the drawings as follows: 80% peeled color filter in an actual CIS process The present invention provides a color filter disposed at a corner, and the present invention provides a first preferred embodiment for eliminating the color filter disposed at the corner to achieve the possibility of reducing the peeling of the 200829967 color filter. . Please refer to FIG. 4 , which is a schematic diagram of a layout pattern of a color filter according to a first preferred embodiment of the present invention. The layout pattern is disposed on a surface of a substrate (not shown). For example, a semiconductor substrate surface comprising a plurality of inter-layer dielectric (ILD) layers, a plurality of metal interconnects, and a plurality of photodiodes and the layout pattern is a chip filter array having a notch 26, which comprises a plurality of pixel cells 17, 18, 19, etc. (shown in a thicker black box). Each of the pixel matrices includes four color filters arranged in an array, and the adjacent color filters are not the same color. Taking the pixel matrix 18 as an example, the pixel matrix 18 includes a blue color filter (B) 24, a first green color filter (G) 221, a second green color filter 222, and a red color filter. The light sheet (r) 2〇, and the blue color filter 24 and the first green color filter are located in the first column of the pixel matrix 18, arranged left and right, and the second green color filter 222 and red color The filter 20 is disposed in the second column of the pixel matrix 18, and is also disposed in the left and right directions. As described above, due to the difference in characteristics of the photosensitive material constituting the color photoresist, the color filters of different colors have different cross-sectional structures, so coating, exposing, developing, and baking the color filters that have formed different colors are formed. In the process of baking, cleaning, etc., the color filter disposed at the corner of the color filter array often causes the color filter to peel off from the surface of the substrate, so that the first preferred embodiment of the present invention is convenient for removal. The layout of the color filter should be set in the corner 隅 28 to reduce the number of colors set in the corner 28 200829967 - the number of filters to reduce the possibility that the color enamel can be peeled off from the corner 隅 28 Therefore, a color filter array having a notch as shown in FIG. 4 is not provided with any one of the color light guide sheets at the corners 28. In addition, in the second preferred embodiment, 'the type and number of color filters to be erased are not limited, and the color to be erased is determined depending on the design of the overall layout pattern; the type of the light-receiving sheet is eliminated. At least one color calender in the corner is preferably a blue color calender with the smallest bottom area. The above preferred embodiment reduces the number of color filters disposed at the corners by the erasing method such that the corners of the color filter array approximately form a rounded structure on the macroscopic view, and then the present invention A second preferred embodiment is provided to reduce the peeling of the color filter on the premise of maintaining the complete appearance of the original #-type matrix. Please refer to FIG. 5 , which is a schematic diagram of a layout pattern of a color filter according to a second preferred embodiment of the present invention, and a second preferred embodiment and the first preferred embodiment. The same elements are used in the same manner as the component symbols of the first preferred embodiment. As shown in FIG. 5, the layout pattern is disposed on a surface (not shown) of a substrate, such as a semiconductor substrate including a plurality of interlayer dielectric layers, a plurality of metal interconnections, and a plurality of photosensitive anodes. a surface, and the layout pattern comprises a plurality of pixel matrices 18, 18, 19, etc. (shown by a thick black frame) and a plurality of enlarged color filters 3 设 at each corner of the layout pattern. Arranged as a mosaic matrix, and adjacent color filters are of different colors. It is to be noted that the enlarged color filter 200829967 included in the second preferred embodiment replaces the position of at least three color filters at the corners of the self-contained color filter array, that is, The area is at least twice as large as the red color filter 20, the green color filter 221, 222 or the blue filter 24 included in the layout pattern, that is, by enlarging the enlargement at the corner The color filter 30 is 'area' to increase the contact surface with the underlying substrate (not shown), so that the enlarged color calender sheet 30 is less likely to be peeled off, thereby causing the product to rise to 0 as in the first preferred embodiment i, the second The preferred embodiment is also achieved by using the mask layout pattern of the color calender sheet, and the layout of the shirt color filter of the second preferred embodiment is made by using the enlarged color (four) sheet of the green image of FIG. In the case of the pattern, it is only necessary to modify the mask pattern of the green color filter and the light sheet to extend the filter pattern openings at the corners to the horizontal and vertical directions respectively. Obtained as shown in the second preferred embodiment L-shaped large color filter 30, however, the shape of the 'larger $ color calender 3G is not limited to the L-type to increase the contact area. Any shape such as rectangle, triangle, flat A quadrangular shape, a diamond shape, or the like can be applied to the color filter of the present invention. Accordingly, when the layout pattern '..., u's new process or material of the color grading sheet according to the present invention is produced, only the color at the corner gusset is increased; the contact area of the light sheet with the substrate can be effectively used. Reduce the amount of peeling of the color light-emitting sheet, and increase the yield of the product by A. Further, a third preferred embodiment of the present invention is characterized in that a structure for reinforcing the adhesion force is provided around the matrix in which the color filters are arranged, so that the color filters provided around the matrix are less likely to be peeled off. Please refer to FIG. 6 , which is a schematic diagram of a layout pattern of a color filter according to the third preferred embodiment of the present invention, and the third preferred embodiment and the first preferred embodiment. The same elements of the embodiment follow the element symbols of the first preferred embodiment. As shown in FIG. 6, the layout pattern of the third preferred embodiment is disposed on a surface (not shown) of a substrate, such as a plurality of interlayer dielectric layers, a plurality of metal interconnects, and a plurality of semiconductor substrate surfaces of the photodiode, and the layout pattern comprises a plurality of pixel matrices 17, 18, 19, etc. (shown by a thick black frame) and a plurality of extensions disposed at corners of the layout pattern The extended edge 32 is arranged in a mosaic matrix and the colors of the adjacent color filters are not the same. Each pixel matrix includes a blue color filter 24 and a first green color filter. The light sheet 221, a second green color filter 222, and a red color filter 10 20 are arranged in the same manner as the blue color filter 24 and the first green color filter shown in the first preferred embodiment. The slices are located in the first column of the pixel matrix 18, and are arranged left and right. The second green color filter 222 and the red color filter 20 are disposed in the second column of the pixel matrix 18, and are also arranged left and right. A third preferred embodiment of the present invention is characterized in that the corner of the layout pattern is provided with an extending edge 32, and the extending edge 32 is connected to the adjacent color filters, in the corner of the layout pattern. The structure is similar to the "mouth" word 12 200829967 type surround structure, and the mouth type structure is blue color filter 24. In the preferred embodiment, the extended edge 32 and the green color filters 221 and 222 are formed by using green photoresist. Therefore, when forming the filter, it is only necessary to use the opening in the corner of the layout pattern as " The mask of the green color filter of the mouth shape can be formed as shown in Fig. 6, and the edge 32 of the "green" color filter 221, 222 is connected in common to the "mouth" type structure. . The third preferred embodiment can simultaneously increase the contact area between the color filter at the corner of the layout pattern and the substrate (not shown), and reduce the color filter of the layout® pattern corner from the substrate (Fig. Not shown) the purpose of stripping and other purposes. However, in a third preferred embodiment of the present invention, the extending edge is formed by a green colored photoresist, but not limited thereto, and the extending edge may also be a blue colored photoresist, a red colored photoresist, or the like. It is suitable for the material used to make the color filter. At the same time, the color setting and extension range of the extended edge can be determined according to the actual situation. In the third preferred embodiment, the extending edge disposed at the corner of the layout pattern is connected to the adjacent color filter as a "mouth"-shaped structure, but the extended edge may also be adjacent to the adjacent edge. The color filters are integrated to form an extended color filter having a larger area than other color filters. As shown in FIG. 7, FIG. 7 is a schematic diagram showing a layout pattern of a color filter according to a fourth preferred embodiment of the present invention, and the same component system as the first preferred embodiment. A component symbol of the first preferred embodiment is used. The layout pattern of the fourth preferred embodiment is disposed on a surface of a substrate (not shown in FIG. 13 200829967). The layout pattern includes a plurality of pixel matrices 17 and 18. 19, etc. (shown by a thick black frame) and a plurality of extended color filters 34 disposed at the corners of the layout pattern are arranged in a mosaic matrix, and the adjacent color filters are different color. Each of the pixel matrices includes a blue color filter 24, a first green color filter 221, a second green color filter 222, and a red color filter 20, which are arranged in a first manner. The blue color filter 24 and the first green color filter shown in the preferred embodiment are arranged in the first column of the pixel matrix 18, left and right, and the second green color filter 222 and red color. The filter 20 is also arranged in the second column of the pixel matrix 18, left and right. The fourth preferred embodiment is characterized in that the extending edge of the third preferred embodiment is combined with the color filter disposed at the corner of the layout pattern by a color resist of the same color, as shown in FIG. a plurality of extended color filters 34 located at the corners of the layout pattern, the extended color filters 34 covering the original extended edges and the area of the color filters located at the corners of the layout pattern, Its total area is larger than other color filters, and it is less likely to peel off from the surface of the substrate. In addition to the foregoing preferred embodiments, the present invention further provides a fifth preferred embodiment. Referring to FIG. 8, FIG. 8 illustrates a color including a matrix frame according to a fifth preferred embodiment of the present invention. The schematic diagram of the layout pattern of the filter, the same components as the first preferred embodiment, follow the symbol of the first preferred embodiment of the 200829967. The layout pattern of the fifth preferred embodiment is disposed on a surface of a substrate (not shown), and the layout pattern includes a plurality of pixel matrices 17, 18, 19, etc. (shown by a thick black frame) and a matrix. A frame (b〇rder) 36, the pixel matrix is arranged in a mosaic matrix, and adjacent color filters are different colors. Each of the pixel matrices includes a blue color filter 24, a first green color filter 221, a second green color filter 222, and a red color filter 2, arranged in a manner The blue color filter 24 and the first green color filter shown in a preferred embodiment are arranged in the first column of the pixel matrix 18, left and right, and the first green color filter 222 and the red color filter. The light sheet 2 is arranged in the second column of the pixel matrix 18, and is also arranged left and right. The matrix frame 36 disposed on the periphery of the matrix is formed by extending and connecting the extended edges disclosed in the third preferred embodiment to the horizontal and vertical directions, respectively, for example, the moat is generally surrounded by the color filters. The matrix of the matrix can effectively prevent the red color filter 20, the green color filter 221, 222 or the blue color filter sheet located at the corner or at the edge of the matrix from the surface of the substrate (Fig. Show) peeling. The matrix frame 36 depicted in FIG. 8 is formed by using a red photoresist of the same material as the red color filter 20, but is not limited thereto, and the matrix frame 36 can also be used to form green color filters 221 and 222. Or the material of the blue color filter 24 is constructed. In addition, the matrix frame % can also be connected to the color filter of the outermost periphery of the matrix, which constitutes the sixth preferred embodiment of the present invention, as shown in FIG. Figure 9 is a schematic view showing another layout pattern of a color light-emitting sheet including a matrix frame according to a sixth preferred embodiment of the present invention, and the same components as the first preferred embodiment are used in the first In the component symbol of the preferred embodiment, the layout pattern of the sixth preferred embodiment is disposed on a surface (not shown) of a substrate, and the layout pattern includes a plurality of pixel scales n, 18, 19, etc. (10) The black frame * and the _ matrix frame 38, the pixel matrix is arranged in a mosaic matrix, and the adjacent color filters are different colors. Each of the pixel matrices includes a blue color filter 24, a first green color filter 221, a second green color filter 222, and a red color filter 2, arranged in a manner The blue color filter 24 and the first green color filter shown in a preferred embodiment are arranged in the first column of the pixel matrix 18, left and right, and the second green color filter 222 and the red color filter. The light sheet 20 is disposed in the second column of the pixel matrix 18 in the left and right directions. It should be noted that the matrix frame 38 included in the sixth preferred embodiment is combined with the blue color filters 24 disposed on the outermost circumference of the matrix, and the combined structure is in contact with the substrate below. The area is greatly increased, and more color filters are attached to the embodiment than the embodiment, which not only protects the color filters disposed at the corners or edges of the matrix, but also can worship the colors in the same day. The filter is detached from the surface of the substrate (not shown). 16 200829967 The preferred embodiments disclosed in the present invention are exemplified by a color filter array of red, blue and green colors, and other combinations of color filter arrays are also suitable for use in the present invention, for example, cyan (cyan, C), magenta (1113§61^,]\4) and yellow (yellow, Y) three color combination color filter array (CMY pattern), red, green, blue and emerald (E) Four color combination color filter array (RGBE), combination of cyan, magenta, yellow and green
彩色濾光片陣列(CMYG pattern)或黃色、青色、綠色及無 濾光層（unfiltered，以W表示）之四色彩色濾光片陣列 (YGCW pattern)等。同時，本發明所述之加大型彩色濾光 片、延伸棱邊、矩陣邊框的製作並不侷限於本發明所述之 彩色光阻，其他適用於製作彩色濾光片之原料，如加入彩 色染料的樹脂、彩色玻璃、分色膜等亦可應用於本發明， 且製作彩色濾光片的製程不侷限為利用光罩曝光、顯影以 完成彩色濾光片的製作，將配合彩色濾光片之原料而決定 其製程。此外’彩色t、光片的外型除本發明各較佳實施例 所4不的矩型外，亦可採用二月形、干行四邊形、菱形等 形狀’且彩色濾光片的排列方式料限制為如本發明所示 之包含複數排行列的方形矩陣，將視產品需要而更動，例 如排列成三角排列式的矩陣、平行四邊形排列式的矩陣或 =他的排列方式，同樣剌本發明之彩⑽光片的佈局圖 案0 本發明所揭露之彩色濾w的佈局圖案，係在彩色遽 17 200829967A color filter array (CMYG pattern) or a four-color color filter array (YGCW pattern) of yellow, cyan, green, and unfiltered (indicated by W). Meanwhile, the fabrication of the enlarged color filter, the extended edge, and the matrix frame of the present invention is not limited to the color resist of the present invention, and other materials suitable for the color filter are used, such as adding a color dye. The resin, the colored glass, the color separation film, and the like can also be applied to the present invention, and the process of manufacturing the color filter is not limited to the use of the mask exposure and development to complete the color filter, and the color filter is matched. The raw materials determine the process. In addition, in addition to the rectangular shape of the preferred embodiment of the present invention, the shape of the color t and the light sheet may be a shape of a shape such as a February shape, a dry line quadrangular shape, a diamond shape, or the color filter. The present invention is limited to a square matrix comprising a plurality of rows and columns as shown in the present invention, which will be changed according to product requirements, such as a matrix arranged in a triangular arrangement, a matrix in a parallelogram arrangement, or a matrix arrangement thereof. Layout pattern of color (10) light sheet 0 The layout pattern of color filter w disclosed in the present invention is in color 遽 17 200829967
光片排列的矩陣之角隅處設有加大型彩色濾光片、在該些 角隅處另設延伸棱邊或在矩陣外圍設置矩陣邊框，以減少 彩色濾光片剝落的機會，此外，本發明在實施時，亦可結 合前述兩種結構，在各加大型彩色濾光片外側同時設置延 伸棱邊或矩陣邊框，且該些延伸棱邊或矩陣邊框可與相鄰 之加大型彩色濾光片或該等彩色濾光片連接，以增加設於 彩色濾、光片的佈局圖案角隅處彩色濾光片與下方基底的接 觸面積’並確保該些設於角隅處的彩色濾光片更不容易脫 落。基於上述之優點，本發明之彩色濾光片的佈局圖案上 十分適合用於配置於主動感測區的像素陣列、主動感測區 夕卜虛置像素陣列，亦或是涵蓋前述兩個區域的彩色濾 光片P車歹1丨，g I 1本發明之彩色濾光片佈局圖案不僅適用於 人’其他形式之光學元件，如同屬影像感測元件之電荷耦 °(CCD)感剛器；或影像顯示器，如液晶顯示面板(LCD 位光源處理(digital light processing，DLP)投影 機、石夕基液曰一 日曰”属示器（liquid crystal on silicon display，LCoS display)或其 "具有彩色濾光片的顯示器，其彩色濾光片之 π又叶，均可滴田 良率的產口 本發明之彩色濾光片之佈局圖案，以供高 專利範僅4本發明之較佳實_，凡依本發明申請 之岣等變化與修飾，皆應屬本發明之涵蓋範圍。 18 200829967 【圖式簡單說明] 第1圖係繪示典型習知CIS之彩色濾光片陣列的示意圖。 第2圖為製作完成之紅色彩色濾光片、綠色彩色濾光片及 藍色彩色;慮光片的剖面圖。 第3圖為設於主動感測區外圍之虛置像素陣列上彩色濾光 片陣列之一部分結構的示意圖。At the corner of the matrix of the light sheet arrangement, a large color filter is arranged, and an extended edge is arranged at the corners or a matrix frame is arranged at the periphery of the matrix to reduce the chance of the color filter peeling off. In the implementation of the invention, in combination with the foregoing two structures, an extended edge or a matrix frame may be simultaneously disposed outside each of the large color filters, and the extended edges or matrix frames may be adjacent to the enlarged color filter. The pieces or the color filters are connected to increase the contact area of the color filter and the underlying substrate disposed at the corner of the layout pattern of the color filter and the light sheet and to ensure the color filters disposed at the corners It is less likely to fall off. Based on the above advantages, the layout pattern of the color filter of the present invention is very suitable for the pixel array disposed in the active sensing area, the active sensing area, the dummy pixel array, or the two regions. Color filter P 歹1丨, g I 1 The color filter layout pattern of the invention is not only suitable for human 'other forms of optical components, like a charge coupled (CCD) sensor which is an image sensing component; Or an image display such as a liquid crystal display panel (LCD) or a liquid crystal on silicon display (LCoS display) or The display of the color filter, the π and the leaves of the color filter, can be used to produce the layout pattern of the color filter of the present invention, so as to provide a high patent for only 4 inventions. The variations and modifications of the invention according to the application of the present invention are all within the scope of the present invention. 18 200829967 [Simple Description of the Drawings] FIG. 1 is a schematic diagram showing a color filter array of a typical conventional CIS. Figure 2 shows the system A completed red color filter, a green color filter, and a blue color; a cross-sectional view of the light-sensitive sheet. Figure 3 is a portion of the color filter array disposed on the dummy pixel array on the periphery of the active sensing region. Schematic diagram of the structure.
第4圖係依據本發明之第—較佳實_翁示之—彩色濾 光片之佈局圖案的示意圖。 第5圖係依據本翻之第二較佳實施綱繪示之一彩色遽 光片之佈局圖案的示意圖。 第6圖係依據本發明之第三較佳實施綱㈣之—彩色遽 光片之佈局圖案的示意圖。 第7圖係依據本發明之第吨佳實施綱繪示之一彩色遽 光片之佈局圖案的示意圖。 第8圖係依據本發明之第五較佳實施列所繪示之—包含矩 陣邊框之彩色遽光片之佈局圖案的示意圖。 第9圖係依據本發明之第六較佳實施列所繪示之另一包含 矩陣邊框之彩色濾光片之佈局圖案的示意圖。 【主要元件符號說明】 12 乡工色彩色濾光片 16 M色彩色濾光片 20 &色彩色濾光片 彩色濾、光片陣列 14 綠色彩色濾光片 17、18、19晝素矩陣 19 200829967 221、222 綠色彩色濾光片 24 藍色彩色濾光片 26 彩色濾光片陣列 28 角隅 30 加大型彩色濾光片 32 延伸棱邊 34 延伸型彩色濾光片 36、38 矩陣邊框 參 20Fig. 4 is a view showing a layout pattern of a color filter in accordance with the first embodiment of the present invention. Fig. 5 is a schematic view showing a layout pattern of a color light sheet according to the second preferred embodiment of the present invention. Fig. 6 is a schematic view showing a layout pattern of a color light-emitting sheet according to a third preferred embodiment (4) of the present invention. Figure 7 is a schematic illustration of a layout pattern of a color luminescent sheet in accordance with a preferred embodiment of the present invention. Figure 8 is a schematic illustration of a layout pattern of a color grading sheet comprising a matrix frame in accordance with a fifth preferred embodiment of the present invention. Figure 9 is a schematic view showing another layout pattern of a color filter including a matrix frame according to a sixth preferred embodiment of the present invention. [Main component symbol description] 12 Rural color filter 16 M color filter 20 & Color filter Color filter, light film array 14 Green color filter 17, 18, 19 pixel matrix 19 200829967 221, 222 Green color filter 24 Blue color filter 26 Color filter array 28 Corner 加 30 Large color filter 32 Extended edge 34 Extended color filter 36, 38 Matrix frame 20 20