1361910 _ 101年1月3]日修正替換頁 九、發明說明： ^ 【發明所屬之技術領域】 本發明係關於一種彩色濾光片的排列結構，特別是一種 在排列結構各角隅設有加大型彩色濾光片或延伸棱邊以避 免彩色濾光片剝離之彩色濾光片的排列結構。 .【先前技術】 一般習知的彩色影1像感測器可依其成像技術大略分為 互補式金氧半導體影像感測器（CMOS image sensor, CIS)和 電荷耦合(CCD)感測器二種，其中互補式金氧半導體影像感 測器可利用半導體製程製作，將影像感測和影像處理所需 的元件製作在單一的晶片上，其應用範圍遍佈多種消費性 的電子商品，例如數位相機、個人數位助理（PDA)和照像手 機等等。 . 習知的CIS由下而_上依序包含基底、複數個感光二極 體、金屬内連線層、彩色濾光片陣列及複數個微聚光鏡 (microlens)等多層結構共同組成複數個感測影像的像素 (pixel)。光線由最上層的微聚光鏡進入CIS後，經過彩色 濾光片將光線依其波長作分類，分類後的光線再到達下方 的感光二極體產生對應強度的電子訊號，並交由其他相關 - 的元件處理和記錄；而該等像素係井然有序地排列成包含 5 1361910 … 101年月31日修正替掉百 複數條行列的像素陣列（pixel array) ’且該像素陣列可劃分 為負貝感測影像的一主動感測區（active sensor region)的一 主動像素陣列（active pixel array)以及該在主動感測區外圍 的一虛置像素陣列(dummy pixel array)，其中，該等虛置像 素一方面傳用以保護主動感測區的該主動像素陣列，另一 方面來說，由該虛置像素陣列所產生的訊號可以作為該主 動感測區中該主動像素陣列所產生的訊號之參考值，藉此 校正因CIS結構所造成的訊號誤差。 請參考第1圖，其繪示典型習知CIS之彩色濾光片陣 列1〇的示意圖，彩色濾光片陣列10係涵蓋CIS之該主動 感測區的該等主動像素陣列及該主動感測區周邊之該等虛 置像素陣列，其包含複數個紅色(R)濾光片12、複數個綠色 (G)濾光片14及複數個藍色(B)濾光片16等不同顏色的彩 色濾光片，且每四個彩色濾光片（G、R、G、B)構成一個單 位’，此相鄰排列成馬賽克(m〇saic)式的彩色渡光片陣列 0藉此刀離不同波長的光線，進而達成感測彩色影像的 目的。 以目前的製程技術來說’製作彩色濾光片陣列時皆利 用彩色光阻依其顏色依序經過塗佈、曝光、顯影、烘烤等 製程’在-基底表面上逐次製作出一種顏色的彩色滤光 片，然後再共同拼凑^整的彩色料片㈣。然而，請 丄观910 夂 , I 101年1月31日修正替換頁 Μ第2圖’由左到右依序為製作完成的紅色彩色慮光 片、綠色彩色遽光片及藍色彩色渡光片的剖面圖，以負光 阻為材料的彩色濾光片為例，在製作完成後，由於構成彩 色光阻的感光材料特性的差異，不同顏色的彩色濾光片會 有著不同剖面結構，因此在顯影、清洗等I程後，常會發 生I色/慮光片自該基底表面剝離(pealing)的現象，當中尤 以底面積最小的藍色彩色濾光片最容易發生剝離的情形； 此外’如第3圖所示，® 3圖為設於主動感測區外圍之虛 置像素陣列上彩色濾光片陣列之一部分結構的示意圖，可 以β楚地觀察到在邊緣和角隅(c〇rner)都有剝離的彩色濾 光片’根據統計’剝離的彩色谑光片中有8〇%是來自位於 形色濾光片陣列的角隅，這些剝離的彩色濾光片嚴重影響 產品的良率，為產品良率無法提昇的主要原因之一。 【發明内容】 針對上述習知彩色濾光片陣列的缺點，本發明之一目 的在於提供一種彩色濾光片之排列結構，特別是一種在排列 結構各角隅設置加大型彩色濾光片或延伸棱邊，以降低彩 色濾、光片自排列結構角隅剝離的機率。 為達上述之目的，本發明提供一種彩色濾光片之排列 結構，該排列結構包含排列為—矩陣之複數個彩色濾光片以 及分別設置於該矩.陣之各角隅之複數個加大型彩色濾光片 7 1361910 fΛ ^ 1〇1年1月31日修正替換百 (en arged C0l0r filter)，其中，各該加大型^色濾^ 積大於各該彩色濾光片’以降低自該排列結構角隅剝離的可 能性。 為達上述之目的，本發明另提供一種彩色濾光片之排 列結構，該排列結構包含排列為一矩陣之複數個彩色濾光片 以及複數個延伸棱邊(extendededge)，其中，該等延伸棱邊 係設於該矩陣之各角隅之並與設於各角隅之各該彩色濾光 片連接。 ' - — ^ 據此本發明所&供之彩色濾光片之排列結構係適用於 主動感測區的主動像素陣列上的彩色濾光片陣列配置、主 動像素陣列外圍虛置像素陣列上的彩色渡光片之彩色滤光 片陣列配置或前述兩個區域的彩色濾光片陣列配置，並可 有效防止彩色濾光片的剝離，並顯著提伸產品的良率。 【實施方式】 為了突顯本發明之優點及特徵，下文列舉本發明之數 個較佳貫施例，並配合圖示作詳細說明如下： .由於在實際的CIS製程中，80%剝離的彩色濾光片是 •來自設於角隅處的彩色濾光片，本發明係提供一第一較佳 實施例，以消去設於角隅處彩色濾光片的方式，達成減少 1361910 101年1月31日修正替換頁 J· 彩色慮光片剝離的可能性。請參考第4圖，第4圖係依據 本發明之第一較佳實施例所繪示之彩色濾光片之排列結構 的不意圖，該排列結構係設置於一基底之一表面（圖未示）， 如匕 έ 複數層層間介電（inter-layei] dielectric，ILD) 層、複數個金屬内連線以及複數個感光二極體之半導體基 底表面，且4排列結構係為一具有缺口之彩色濾光片陣列 26，其包含複數個像素矩陣㈣⑴口、ΐ8、μ等（以較粗的 黑框不之）。其中，每一個像素矩陣均包含四個彩色濾、光片 以陣列方式排列，且相鄰的彩色濾光片顏色並不相同。以 像素矩陣為例，像素矩陣18包含—藍色彩色遽光片 ⑻24、一第-綠色彩色濾光片⑹221、一第二綠色彩色濾 光片222一以及-紅色彩色濾光片（R)2〇,而且藍色彩色遽光 3 〃、第綠色彩色濾光片位於像素矩陣18的第-列， 右配置，第二綠色彩色濾光片奶與紅色彩色滤光 0則設在像素矩陣18的第二列，亦呈左、右配置。 如前所述’由於構成彩色光阻的感光材料特性的差 _不同顏色的彩色遽 '光片具有不同的剖面結構，所以在 二==顏色Γί濾光片的塗佈、曝光、顯影、烘 光d ,°又於形色濾光片陣列之角隅處的彩色滤 本^曰务生形色渡光片自該基底表面剝離的現象，因此 1361910 101年1月31日修正替換頁 慮片的數里，以減少彩色濾光片可自角隅28剝離的可能 性，因此構成如第4圖所示之具有缺口的―彩色濾光片陣 列,26在角隔28並未設置任何一種的彩色滤光片。此外， 於第-^佳實施例中’並不限制被消去的彩色遽光片的種 類”數里^視整體排列結構的設計而決定被消去的彩色渡 光片的種類’亦即需消去設置於最㈣的至少―彩色滤光“ 片’尤以底面積最小之藍色彩色濾'光片為佳。 j述第一較佳實施例係以消去法減少設於角隅處的彩 色A光片數里，以使之彩色濾光片陣列的角隅在巨觀上約 略形成®角化結構，接著本發明另提供一第二較佳實施 例在，，隹持原有方式矩陣完整外型的前提下，達成減少彩 日色濾光片剝離的狀況。請參考第5圖，第5圖係依據本發 明^二較佳實施例所繪示之-彩色濾、光片之排列結構的 不思圖’且第二較在實施例與該第一較佳實施例相同之元 件係沿用該第—較佳實施例之元件符號。如第5圖所示， 额列結構係設置於—基底之—表面（圖未示），例如—包含 複數層層間介電層、複數個金屬内連線以及複數個感光二 枉體之半導體基絲面’且該侧結構包含複數個像素矩陳 二18 :19等（以較粗的黑框示之）以及設於該排列結構各角 禹处之複數個加大型彩色濾光片％，共同排列為—馬赛克 矩陣’且相鄰的彩色〉慮光片為不同的顏色。值得注意 的是’第二較佳實施例所包含之加大型彩色遽光片30係i 1.361910 I 101年1月31日修正替換頁 自取代習知彩色濾光片陣列角隅處至少三塊彩色濾光片的 位置’亦即其面積為該排列結構所包含之紅色彩色濾光片 2〇、綠色彩色濾光片221、222或藍色濾光片24的至少三 倍，也就是說，藉由擴大位於角隅處的加大型彩色濾光片 3〇面積，以增加與下方基底（圖未示）的接觸面，因此加大 型彩色濾光片30較不易剝離，進而使產品良率提升。 如同第一較佳實施例一 • 本弟二較佳貫施例也是利 用調整¥色濾光片的光罩排列結構即可達成，以第$圖綠色 的加大型彩色濾光片作說明，在製作第二較佳實施例之彩 色遽光片的排列結構時，僅需修改習知用以製作綠色彩色濾 光片的光罩圖案，將角隅處的渡光片圖案開口分別向水平 ，垂直方向各延伸—個彩色遽光片的大小，便可得到如本 弟二較佳實_所示之L㈣加大卿㈣光片％，然 而加大型％色濾光片3〇的外型並不揭限為l型，以增加 接觸面積的概念為前提，任意一種形狀如矩形、三角形、 ^丁^邊形、菱形等均可適用於本發明所述之彩色滤光 日/ L此、當製作如本發明所述之彩色遽光片之排列結構 濾井片加新的製程或材料’僅利用增加角隅處的彩色 :片的之接觸面積的方式，就可以有效降低彩色遽 w的剝_量，並大幅提升產品之良率。 本發明另揭露一第三較佳 實施例，其特點在彩色濾光 1361910 片所排列而成的矩陣周邊設置加強貼附 設於矩陣周邊的彩色慮光片更不易剝離。請參考第6圖， 第6圖係依據本發明之該第三較佳實施例所繪示之―:色 渡光片之排列結構的示意圖’且本第三較佳實施例與該第一 較佳實施例相同之元件#、沿用該[難#施例之元〆件符 號。如第6圖所示，該第三較佳實施例之該排列結構係設置 於-基底之-表面（圖未幻，例如—包含複數層層間介電 層、複數個金屬内連線以及複數個感光二極體之半導體美 底表面，且該排列結構包含複數個像素矩陣i7、i8、i9等^ 較粗的黑框示之）以及設於該排職構各角隅處之複數個延 伸棱邊(extended edge)32，排列成一馬賽克式的矩陣且相鄰 的彩色遽光片的顏色並不相同，其中，各像素矩陣均包含 I色才>色遽光片24、-第一綠色彩色濾光片221、一第 二綠色^色遽光片222以及-紅色彩色遽光片2()，其排列 方式如第-較佳實施例所示之藍色彩色遽光片Μ與第一 綠色彩色濾光片位於像素矩陣18的第一列，呈左、右配 置，第二綠色彩色濾光片222與紅色彩色濾光片2()則設在 像素矩陣18的第二列，亦呈左、右配置。 本發明之第二.較佳實施例的特點在於該排列結構的角 隅處設置有延伸棱邊32,錢伸棱邊32與相鄰的該等彩 色濾光片連接’在該排列結構的角隅處構成近似「口」字型 的環繞結構，而口字型結構㈣為藍色彩色㈣片Μ。於 12 1361910 本較佳實施例中，延伸棱邊Μ和綠色彩色 係利用綠色光阻製作，因此在形成濾光片時，只需將利用 =排列結構角隅處開口為「口」字型之綠色彩色遽光片的 =可以形成如第6圖所示’與最接近的綠色彩色濾 Ϊ片21、222共同連接為「口」字型結構的延伸棱邊32。 弟二較佳貫施例可同時達成增加該排列結構角隅處彩色渡 基底（圖未示）間的接觸面積、減少該排列結構角隅 處形色滤光片自該基底（圖未示）剝離的機會等目的。铁 Γ姑ί發明之第三較佳實施例係以綠色的彩色光阻製作延 故’但不聽此限，延伸棱邊亦可用藍色㈣色光阻、 的彩色光阻’或其他適用於製作彩色遽光片的材料， 況而決定。 疋狀伸乾圍可視貫際所需的情 接真= 施财，設於簡騎制隅處的延伸 棱^係與相近的彩色濾、光片連接為「口」字型結構，狹而 延伸棱邊亦可與相鄰的彩色滤光片合為一體， 其他彩色濾光片大的延伸型彩色滹 貝乂 第7圖係依據本發明之一第圖所示’1361910 _January 3, 2011 correction correction page IX, invention description: ^ [Technical field of invention] The present invention relates to an arrangement structure of color filters, in particular, a corner is provided at each corner of the arrangement structure A large color filter or an arrangement of color filters that extend edges to avoid color filter peeling. [Prior Art] The conventional conventional color image 1 sensor can be roughly classified into a complementary CMOS image sensor (CIS) and a charge coupled (CCD) sensor according to its imaging technology. The complementary MOS image sensor can be fabricated by a semiconductor process, and the components required for image sensing and image processing are fabricated on a single wafer, and the application range is applicable to various consumer electronic products, such as digital cameras. , personal digital assistants (PDAs) and photo phones, and so on. The conventional CIS consists of a plurality of layers including a substrate, a plurality of photodiodes, a metal interconnect layer, a color filter array, and a plurality of microlens. The pixel of the image (pixel). After the light enters the CIS by the uppermost micro condenser, the light is sorted according to its wavelength through the color filter, and the classified light reaches the photodiode below to generate the corresponding intensity electronic signal, and is assigned to other related- Component processing and recording; and the pixels are arranged in an orderly manner to include 5 1361910 ... 101 pixels on the 31st of the 31st to replace the pixel array of pixels and pixels array and the pixel array can be divided into negative sense An active pixel array of an active sensor region of the image and a dummy pixel array at the periphery of the active sensing region, wherein the dummy pixels are On one hand, the active pixel array is used to protect the active sensing region. On the other hand, the signal generated by the dummy pixel array can be used as a reference for the signal generated by the active pixel array in the active sensing region. The value is used to correct the signal error caused by the CIS structure. Please refer to FIG. 1 , which illustrates a schematic diagram of a typical conventional CIS color filter array 1 彩色 , the color filter array 10 is the active pixel array of the active sensing region of the CIS and the active sensing. The dummy pixel arrays surrounding the region include a plurality of colors of different colors such as a plurality of red (R) filters 12, a plurality of green (G) filters 14, and a plurality of blue (B) filters 16. a filter, and each of the four color filters (G, R, G, B) constitutes a unit ', and the adjacent color mosaic arrays arranged in a mosaic (m〇saic) are thus different from each other. The light of the wavelength, in turn, achieves the purpose of sensing the color image. In the current process technology, when making a color filter array, the color photoresist is sequentially coated, exposed, developed, baked, etc. according to its color, and a color of one color is successively produced on the surface of the substrate. Filters, and then piece together the whole color piece (4). However, please visit 910 夂, I revised the replacement page on January 31, 101. Figure 2 'Red color light, green color light and blue color light from left to right. A cross-sectional view of a sheet, a color filter using a negative photoresist as an example. After the fabrication is completed, color filters of different colors have different cross-sectional structures due to differences in characteristics of photosensitive materials constituting the color resist. After the I process of development, cleaning, etc., the phenomenon that the I color/lighting sheet peels off from the surface of the substrate often occurs, especially in the case where the blue color filter with the smallest bottom area is most likely to be peeled off; As shown in Figure 3, the ® 3 diagram is a schematic diagram of a portion of a color filter array disposed on a dummy pixel array on the periphery of the active sensing region, which can be observed at the edges and corners (c〇rner ) There are stripped color filters 'According to the statistics' 85% of the color-removed sheets are from the corners of the color filter array, and these stripped color filters seriously affect the yield of the product. , the product yield cannot be improved To one of the reasons. SUMMARY OF THE INVENTION In view of the above disadvantages of the conventional color filter array, an object of the present invention is to provide an arrangement structure of color filters, in particular, a large color filter or an extension is provided at each corner of the arrangement structure. The edge is used to reduce the probability of color filter and the self-aligned structure of the light sheet. In order to achieve the above object, the present invention provides an arrangement structure of color filters, which comprises a plurality of color filters arranged in a matrix, and a plurality of large and large arrays respectively disposed at respective corners of the matrix. Color filter 7 1361910 fΛ ^ 1 January 1st, 1st revised arged C0l0r filter, wherein each of the added large color filters is larger than each of the color filters 'to reduce the arrangement The possibility of structural corner peeling. In order to achieve the above object, the present invention further provides an arrangement structure of color filters, the arrangement structure comprising a plurality of color filters arranged in a matrix and a plurality of extended edges, wherein the extending edges The edge is disposed at each corner of the matrix and is connected to each of the color filters disposed at each corner. '-- ^ According to the present invention, the color filter arrangement structure is applied to the color filter array configuration on the active pixel array of the active sensing region, and the active pixel array peripheral dummy pixel array The color filter array configuration of the color light-passing sheet or the color filter array configuration of the foregoing two regions can effectively prevent the color filter from being peeled off and significantly improve the yield of the product. [Embodiment] In order to highlight the advantages and features of the present invention, several preferred embodiments of the present invention are listed below, and are described in detail with reference to the following drawings: Since 80% peeling color filter in the actual CIS process The light sheet is from a color filter disposed at a corner, and the present invention provides a first preferred embodiment to eliminate the color filter disposed at the corner, achieving a reduction of 1361910, January 31, 101. Day correction replacement page J. The possibility of peeling off the color filter. Please refer to FIG. 4, which is a schematic view of the arrangement of the color filters according to the first preferred embodiment of the present invention. The arrangement is disposed on a surface of a substrate (not shown). , such as a plurality of inter-layei dielectric (ILD) layers, a plurality of metal interconnects, and a plurality of photodiode semiconductor substrate surfaces, and the 4 array structure is a color having a gap A filter array 26 comprising a plurality of pixel matrices (4) (1), ΐ8, μ, etc. (in the case of a thicker black frame). Each of the pixel matrices includes four color filters, and the light patches are arranged in an array, and the adjacent color filters are not the same color. Taking the pixel matrix as an example, the pixel matrix 18 includes a blue color light film (8) 24, a first green color filter (6) 221, a second green color filter 222, and a red color filter (R) 2 〇, and the blue color neon 3 〃, the first green color filter is located in the first column of the pixel matrix 18, the right configuration, the second green color filter milk and the red color filter 0 are set in the pixel matrix 18 The second column is also arranged left and right. As mentioned above, due to the difference in the characteristics of the photosensitive material constituting the color photoresist, the color 遽 light sheets of different colors have different cross-sectional structures, so the coating, exposure, development, and baking of the two color filters are performed. The light d, ° and the color filter at the corner of the color filter array are peeled off from the surface of the substrate, so 1361910 revised the replacement page on January 31, 101. In the case of the number, the possibility that the color filter can be peeled off from the corner 隅 28 is reduced, so that the color filter array having the notch as shown in FIG. 4 is formed, and 26 is not provided in the corner spacer 28 Color filter. In addition, in the first preferred embodiment, 'the type of the color grading sheet that is erased is not limited, and the type of the color louver that is erased is determined by the design of the overall arranging structure', that is, the setting is eliminated. At least the "color filter" of the most (four) is especially suitable for the blue color filter with the smallest bottom area. In the first preferred embodiment, the number of color A sheets disposed at the corners is reduced by the erasing method so that the corners of the color filter array are approximately formed into a keratinized structure on the macroscopic view. The invention further provides a second preferred embodiment in which the condition of reducing the peeling of the color filter is achieved under the premise of maintaining the complete appearance of the original mode matrix. Please refer to FIG. 5, which is a schematic diagram of the arrangement of the color filter and the light sheet according to the preferred embodiment of the present invention, and the second comparison between the embodiment and the first preferred embodiment. The components of the embodiment are the same as the component symbols of the first preferred embodiment. As shown in FIG. 5, the frontal structure is disposed on the surface of the substrate (not shown), for example, a semiconductor layer including a plurality of interlayer dielectric layers, a plurality of metal interconnects, and a plurality of photosensitive diads. The silk surface' and the side structure comprises a plurality of pixel moments, a number of pixels 18:19, etc. (shown by a thick black frame) and a plurality of large-sized color filters disposed at corners of the array structure, common Arranged as a mosaic matrix 'and adjacent color>spots are of different colors. It is worth noting that the second embodiment of the present invention includes a large-scale color light-receiving sheet 30 i 1.361910. The revised replacement page of January 31, 101 replaces at least three colors of the conventional color filter array corners. The position of the filter 'that is, the area is at least three times the red color filter 2 〇, the green color filter 221 , 222 or the blue filter 24 included in the arrangement structure, that is, borrowed By increasing the area of the enlarged color filter located at the corners to increase the contact surface with the underlying substrate (not shown), the enlarged color filter 30 is less likely to be peeled off, thereby improving the yield of the product. As in the first preferred embodiment, the preferred embodiment of the second embodiment is also achieved by adjusting the mask arrangement of the color filter, and the green color filter of the first figure is illustrated. When the arrangement structure of the color light-emitting sheet of the second preferred embodiment is made, it is only necessary to modify the mask pattern used to make the green color filter, and the aperture pattern opening at the corner is horizontally and vertically. The direction of each extension - the size of a color light film, you can get the L (four) increase Qing (four) light film% as shown in this book, but the appearance of the large % color filter 3〇 is not The disclosure is limited to the type l, and the concept of increasing the contact area is premised, and any shape such as a rectangle, a triangle, a triangle, a diamond, or the like can be applied to the color filter day/L of the present invention. The color filter sheet arrangement structure of the present invention adds a new process or material 'only by increasing the color of the corner: the contact area of the sheet, the peeling of the color 遽w can be effectively reduced _ Quantity and greatly increase the yield of the product. The present invention further discloses a third preferred embodiment, which is characterized in that the color filter sheets which are affixed to the periphery of the matrix are provided on the periphery of the matrix in which the color filter 1361910 is arranged, and are less likely to be peeled off. Please refer to FIG. 6 , which is a schematic diagram of an arrangement structure of a color light-receiving sheet according to the third preferred embodiment of the present invention, and the third preferred embodiment is compared with the first The same component is used in the preferred embodiment #, and the symbol of the [difficult #example embodiment is used. As shown in FIG. 6, the array structure of the third preferred embodiment is disposed on the surface of the substrate (not illustrated, for example, including a plurality of interlayer dielectric layers, a plurality of metal interconnects, and a plurality of a semiconductor bottom surface of the photodiode, and the array structure comprises a plurality of pixel matrices i7, i8, i9, etc., a thick black frame) and a plurality of extending edges disposed at each corner of the row of jobs The extended edge 32 is arranged in a mosaic matrix and the colors of the adjacent color light-emitting sheets are not the same, wherein each pixel matrix includes an I color> color light-emitting sheet 24, and a first green color The filter 221, a second green color light-emitting sheet 222, and a red color light-emitting sheet 2 are arranged in a blue color light-emitting sheet and a first green color as shown in the first preferred embodiment. The color filters are located in the first column of the pixel matrix 18, and are arranged left and right. The second green color filter 222 and the red color filter 2 () are disposed in the second column of the pixel matrix 18, and are also left. , right configuration. A second preferred embodiment of the present invention is characterized in that the corners of the array are provided with extending edges 32, and the money edge 32 is connected to the adjacent color filters 'at the corner of the array structure The 隅 构成 ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” ” In 12 1361910, in the preferred embodiment, the extended edge Μ and the green color are made by using green photoresist. Therefore, when forming the filter, it is only necessary to use the opening of the argon structure to form a "mouth" shape. The green color calender sheet = can be formed as shown in Fig. 6 'external green color filter sheets 21, 222 are joined together to form a "mouth"-shaped extension edge 32. The preferred embodiment of the second embodiment can simultaneously increase the contact area between the color-transferring substrate (not shown) at the corner of the array structure, and reduce the color filter of the arrangement structure angle from the substrate (not shown). The purpose of stripping and other purposes. In the third preferred embodiment of the invention, the green color resist is used to make the delay 'but not to this limit, and the extended edge can also be made of blue (four) color photoresist, color photoresist' or other suitable for making The material of the colored calender is determined by the condition.疋 伸 围 围 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = The edge can also be integrated with the adjacent color filter, and the other color filter has a large extended color mussel 乂 Figure 7 according to one of the figures of the present invention.
.貫知例所繪示之一彩A ===的示意圖’其與該第-較佳實施例相同之 讀係触實麵}之元件符號 施例之該排赌構係設置於—基底之― ^ 列結構包含複數個像素轉17、18、19_較_ = 13 1361910 _ ^ 101年1月31日修正替換百 之）以及複數個設於該排列結構角隅處的延 1^型彩色滤^^ 34 ’排列為-馬賽克式的矩陣，且相鄰的彩色遽光片為不 同=顏色。其中，各像素矩陣均包含—藍色彩色慮光片Μ、 一第綠色％色滤光片221、一第二綠色彩色滤光片m 以及-紅色彩色濾光片2〇’其排列方式如第一較佳實施例 所示之藍色彩色據光片24與第一綠色彩色渡光片在像素 矩陣18的第列’壬左、右配置，第二綠色彩色濾光片 222與紅色彩色渡光片2()在像素矩陣18的第二列，亦呈 左、右配置。 第四較佳實施例的特點在於將第三較佳實施例的延伸 ㈣與設置於該排列結構角隅處的彩色遽光片以相同顏色 之=色光阻、”。合’構成如第7圖所示位於該排列結構角隅處 之複，個延伸型$色濾光片34’該些延伸卿色濾光片μ 口涵蓋原本延伸棱邊以及位於該排列結構角隅處彩色遽光 片的面積’ ϋ此其總面積較其他彩色濾^更大，更不容 易自該基底之該表面剝離。 a除則述之較佳實施例外，本發明另提供一第五較佳實 施例’請參考第8圖’第8圖係依據本發明之第五較佳實 施，所繪示之—包含矩陣邊框之彩色濾光片之排列結構的 ::圖，與該第—較佳實施例相同之元件係沿用該第一較 土貫施例之元件符號。該第實施例之該排列結構係設 14 1361910 • 」 _ I ]〇]年]月31日修正替換頁 置於一基底表面（圖未示），該排列結構包含複數個像素矩陣 /· 17、18、19等（以較粗的黑框示之）以及一矩陣邊框 ^ (border)36，該些像素矩陣係排列為一馬賽克式的矩陣，且 相别的彩色;慮光片為不同的顏色。其中，各像素矩陣均包 έ監色彩色濾光片24、一第一綠色彩色濾光片221、一 第二綠色彩色濾光片222以及一紅色彩色濾光片2〇，其排 列方式如第一較佳實施例所示之藍色彩色濾光片24與第 一綠色彩色濾光片在像素矩陣18的第一列，呈左、右配 置，第二綠色衫色濾光片222與紅色彩色濾光片2〇在像素 矩陣18的第二列，亦呈左、右配置。 設於該矩陣外圍之矩陣邊框36係將第三較佳實施例 所揭露之延伸棱邊分別向水平和垂直方向延伸並連接而 成，如護城河一般圍住由該等彩色濾光片所組成的該矩 陣，可有效防止位於角隅處或該矩陣邊緣處的紅色彩色濾 光片20、綠色彩色濾光片221、222或藍色彩色濾光片24 自該基底之該表面（圖未示）剝離。 第8圖所繪示之矩陣邊框3 6係利用與製作紅色彩色濾 光片2〇相同原料的紅色光阻所製作，但不限於此，矩陣邊 框36亦可利用製作綠色彩色濾光片221、222、或藍色彩 色慮光片24的原料建構之。此外’矩陣邊框36亦可與位 於該矩陣最外圍的彩色濾光月連接，即構成本發明之第六 15 1361910 較佳實施例，如第9圖所示。第9圖係依^^ 較佳實施列所繪示之另一包含矩陣邊框之彩色遽光片之排 :结構的示意圖，與該第一較佳實施例相同之元件係沿用該 ί —較佳料狀元件㈣，該第六難實_之該排列 於-基底之—表面（圖未示），該排列結構包含複 數個像素矩陣17、18、19等(以較粗的黑框示之)以及一矩 陣邊框38，該些像素矩陣係排列為一馬賽克式的矩陣，且 相鄰的彩色濾光片為不同的顏色〜其中，各像素矩陣均包 $一藍色彩色遽光片24、—第一綠色彩色滤光片221、一 弟一綠色彩色滤光片222以及一紅色彩色濾光片20,並排 列方式如第-較佳實施例所示之藍色彩色遽光片Μ與第 綠色彩色濾'光片在像素矩陣18的第一列，呈左、右配 置，第二綠色彩色遽光片222與紅色彩色據光片工像 矩陣18的第二列，呈左、右配置。 值得注意的是，第讀佳實_所包含之矩陣邊框％ 係。设於該矩陣最外圈的該等藍色彩色濾光片％合而為 結構與^該基底的接觸面積大幅增加，並 矩随更多的彩色遽光片’不僅能保護設於該 矩陣角隅處或邊緣處的該些彩色遽光片，同時可以消拜該 些衫色遽光片自該基底表面（圖未示)脫離的疑慮。 以紅藍綠三色之彩 本發明所揭露之該等較佳實施例係 16 < 1361910 101年1月3]日修土替換頁 色濾光片陣列為例，其他組合之彩色濾光片陣列亦適用於 本發明’例如：青色（cyan，C)、品紅色（magenta，M)及黃色 (yellow，Y)三色組合之彩色濾光片陣列（Cmy pattern)，紅 色、綠色、藍色及祖母綠色（emerald, E)四色組合之彩色慮 光片陣列（RGBE)，青色、品紅色、黃色及綠色四色組合之 彩色濾光片陣列（CMYG pattern)或黃色、青色、綠色及無 濾、光層（unfiltered，以W表示）之四色彩色攄光片陣列 (YGCW pattern)等。同時，本發明所述之加大型彩色濾光 片、延伸棱邊、矩陣邊框的製作並不侷限於本發明所述之 彩色光阻，其他適用於製作彩色濾光片之原料，如加入彩 色染料的樹脂、彩色玻璃、分色膜等亦可應用於本發明， 且製作彩色濾光片的製程不侷限為利用光罩曝光、顯影以 完成彩色慮光片的製作，將配合彩色濾、光片之原料而決定 其製程。.此外，彩色濾光片的外型除本發明各較佳實施例 所繪示的矩型外，亦可採用三角形、平行四邊形、菱形等 形狀’且彩色遽光片的排列方式亦不限制為如本發明所示 之包含複數排行列·的方形矩陣，將視產品需要而更動，例 如排列成三角排列式的矩陣、平行四邊形梆列式的矩陣或 其他的排列方式，同樣適用本發明之彩色濾光片的排列結 構。 Ά〜 本發明.所揭露之彩色濾光片的排列結構，係在彩色濾光 片排列的矩陣之角隅處設有加大型彩色濾光片、在該些角 17 1361910 101年1月31日修正替換頁 隅處另設延伸棱邊或在矩陣外圍設置矩陣邊框，以減少彩 色濾光片剝落的機會，此外，本發明在實施時，亦可結合 前述兩種結構，在各加大型彩色濾光片外側同時設置延伸 棱邊或矩陣邊框，且該些延伸棱邊或矩陣邊框可與相鄰之 加大型彩色濾光片或該等彩色濾光片連接，以增加設於彩 色濾光片的排列結構角隅處彩色濾光片與下方基底的接觸 面積.，並確保該些設於角隅處的彩色濾光片更不容易脫 落。基於上述之優點，本發明之彩色濾光片的排列結構上十 分適合用於配置於主動感測區的像素陣列、主動感測區外 圍的虛置像素陣列，亦或是涵蓋前述兩個區域的彩色濾光 片陣列，且本發明之彩色濾光片排列結構不僅適用於CIS， 其他形式之光學元件，如同屬影像感測元件之電荷耦合 (CCD)感測器；或影像顯示器，如液晶顯示面板（LCD panel)、數位光源處理（digital light processing，DLP)投影 機、石夕基液晶顯示器（liquid crystal on silicon display, LCoS display)或其他具有彩色濾光片的顯示器，其彩色濾光片之 設計，均可適用本發明之彩色濾光片之排列結構，以供高良 率的產品.。 以上所述僅為本發明之較佳實施例，凡依本發明申請 -. 專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範.圍。 【圖式簡单說明】 18 1361910 第1圖係繪示典型習知CIS之彩色渡光 D圖為製作完成之紅色彩色遽光片、綠色彩色渡光片及 監色彩色遽光片的剖面圖。 第3圖為設於主動感測區外圍之虛置像素陣列上彩色濾光 片陣列之一部分結構的示意圖。 第4圖係依據本發明之第一較佳實施例所緣示之一彩色淚 光片之排列結構的示意圖。 心 第5圖係依#本發明之第二較佳實施例所繪示之 光片之排列結構的示意圖。 取 第6圖係依據本發明之第三較佳實施例所繪示之 光片之排列結構的示意圖。 巍 第7圖係㈣本發明之第吨佳實 光片之排列結構的示意圖。 之心色4 第8圖係依據本發明笛 陣邊框之〜1 車父佳實施列所繪示之-包含矩 第色遽光片之排列結構的示意圖。 第圖係依據本發明之第k处— 矩陣邊框之彩色背光/ 貫施列所繪示之另一包含 色濾先片之排列結構的示意圖。 【主要元件符號說明】 12 紅色彩色濾光片 16 藍色彩色濾光片 20 紅色彩色濾光片 24 藍色彩色濾光片 10 .彩色濾光片降列 Γ4 綠色彩色濾光片 17、18、丨9晝素矩陣 22卜222綠色彩色濾光片 19 1361910 101年1月31日修正替換頁 26 彩色濾光片陣列 28 角隅 30 加大型彩色濾光片 32 延伸棱邊 34 延伸型彩色濾光片 36' 38 矩陣邊框 20A schematic diagram of a color scheme A ===, which is the same as the reading system of the first preferred embodiment, is set to the base of the component symbolic embodiment. ― ^ The column structure contains a plurality of pixels to 17, 18, 19_ compared to _ = 13 1361910 _ ^ revised on January 31, 101, and a plurality of extended color types located at the corners of the array structure The filters ^^ 34' are arranged in a mosaic-like matrix, and the adjacent color patches are different = color. Each of the pixel matrices includes a blue color filter Μ, a ninth green color filter 221, a second green color filter m, and a red color filter 2 〇' A blue color light film 24 and a first green color light passing picture shown in a preferred embodiment are arranged in the column ''left and right' of the pixel matrix 18, and the second green color filter 222 and the red color light beam The slice 2() is also arranged in the second column of the pixel matrix 18, left and right. The fourth preferred embodiment is characterized in that the extension (4) of the third preferred embodiment and the color grading sheet disposed at the corner of the arrangement structure are formed in the same color as the color photoresist, and are combined as shown in FIG. Shown at the corners of the array structure, an extended color filter 34' of the extended color filter μ mouth covers the original extended edge and the color light sheet at the corner of the array structure The area 'is larger than the other color filters, and is less likely to be peeled off from the surface of the substrate. a. In addition to the preferred embodiment described, the present invention further provides a fifth preferred embodiment 'please refer to Figure 8 is a diagram showing the arrangement of the color filters including the matrix frame according to the fifth preferred embodiment of the present invention: the same components as the first preferred embodiment. The component symbol of the first comparative embodiment is used. The arrangement structure of the first embodiment is 14 1361910 • _ I ] 〇] year] the 31th revision replacement page is placed on a substrate surface (not shown) ), the arrangement structure comprises a plurality of pixel matrices / 17, 17, 19, etc. ( The thick black frame shown) and a frame matrix ^ (border) 36, the plurality of pixels arranged in a matrix-based matrix mosaic, color and relative to the other; the light sheet is considered a different color. Each of the pixel matrices includes a color filter 24, a first green color filter 221, a second green color filter 222, and a red color filter 2, arranged in a manner The blue color filter 24 and the first green color filter shown in a preferred embodiment are arranged in the first column of the pixel matrix 18, left and right, and the second green color filter 222 and red color. The filter 2 is arranged in the second column of the pixel matrix 18, and is also arranged left and right. The matrix frame 36 disposed on the periphery of the matrix is formed by extending and connecting the extended edges disclosed in the third preferred embodiment to the horizontal and vertical directions, respectively, for example, the moat is generally surrounded by the color filters. The matrix can effectively prevent the red color filter 20, the green color filter 221, 222 or the blue color filter 24 at the corner or at the edge of the matrix from the surface of the substrate (not shown) Stripped. The matrix frame 3 6 shown in FIG. 8 is made of a red photoresist having the same material as the red color filter 2 , but is not limited thereto, and the matrix frame 36 can also be used to form the green color filter 221 . The raw material of 222, or blue color filter 24 is constructed. Further, the matrix frame 36 can also be connected to the color filter month located at the outermost periphery of the matrix, i.e., constitutes the sixth embodiment of the present invention, as shown in Fig. 9. Figure 9 is a row diagram of another color grading sheet comprising a matrix frame according to a preferred embodiment: a schematic view of the structure, and the same components as the first preferred embodiment are used. The material element (4), the sixth hard surface is arranged on the surface of the substrate (not shown), and the array structure comprises a plurality of pixel matrices 17, 18, 19, etc. (shown by a thick black frame) And a matrix frame 38, the pixel matrix is arranged in a mosaic matrix, and the adjacent color filters are different colors, wherein each pixel matrix comprises a blue color light film 24, The first green color filter 221, the first green color filter 222, and the red color filter 20 are arranged in a blue color light sheet and a green color as shown in the first preferred embodiment. The color filter 'light sheets are arranged left and right in the first column of the pixel matrix 18, and the second green color light-emitting sheet 222 and the second column of the red color-lighting image processing matrix 18 are arranged left and right. It is worth noting that the first reading of the _ contains the matrix border %. The blue color filters disposed on the outermost circumference of the matrix are combined to form a large increase in the contact area between the structure and the substrate, and the moments along with the more color light-emitting sheets can not only protect the matrix angles The colored calenders at the crotch or at the edges can also dispel the doubt that the tampons are detached from the surface of the substrate (not shown). The preferred embodiments disclosed in the present invention are 16 < 1361910 January 3, 2011, a soil replacement color filter array as an example, other combinations of color filters The array is also suitable for use in the present invention 'for example: Cyan pattern of cyan (C), magenta (M) and yellow (yellow) Y color combinations, red, green, blue And emerald (E) four-color combination color filter array (RGBE), cyan, magenta, yellow and green four color combination of color filter array (CMYG pattern) or yellow, cyan, green and none A four-color color ray plate array (YGCW pattern) such as a filter or an optical layer (unfiltered). Meanwhile, the fabrication of the enlarged color filter, the extended edge, and the matrix frame of the present invention is not limited to the color resist of the present invention, and other materials suitable for the color filter are used, such as adding a color dye. The resin, the colored glass, the color separation film, and the like can also be applied to the present invention, and the process of manufacturing the color filter is not limited to the use of the reticle exposure and development to complete the production of the color filter, and the color filter and the light film are matched. The raw materials determine the process. In addition, the outer shape of the color filter may be in the shape of a triangle, a parallelogram, a diamond, or the like, in addition to the rectangular shape illustrated in the preferred embodiments of the present invention, and the arrangement of the color light-emitting sheet is not limited to The square matrix including the plurality of rows and columns as shown in the present invention may be changed according to the needs of the product, for example, a matrix arranged in a triangular arrangement, a matrix in a parallelogram matrix or other arrangement, and the same applies to the color of the present invention. The arrangement of the filters. Ά~ The arrangement of the color filters disclosed in the present invention is such that a large color filter is provided at the corner of the matrix of the color filter array, at the corners 17 1361910 January 31, 101 The replacement page is additionally provided with an extended edge or a matrix frame is arranged on the periphery of the matrix to reduce the chance of color filter peeling. In addition, the present invention can also be combined with the foregoing two structures in each of the large color filters. An extended edge or a matrix frame is disposed on the outer side of the light sheet, and the extended edge or matrix frame can be connected to the adjacent enlarged color filter or the color filter to increase the color filter. Arranging the contact area between the color filter and the underlying substrate at the corner of the structure, and ensuring that the color filters disposed at the corners are less likely to fall off. Based on the above advantages, the color filter of the present invention is well-suited for the pixel array disposed in the active sensing region, the dummy pixel array on the periphery of the active sensing region, or the two regions. a color filter array, and the color filter array structure of the present invention is not only applicable to CIS, other forms of optical components, such as charge coupled (CCD) sensors that are image sensing components; or image displays such as liquid crystal displays. LCD panel, digital light processing (DLP) projector, liquid crystal on silicon display (LCoS display) or other display with color filter, color filter The design can be applied to the arrangement of the color filters of the present invention for high yield products. The above description is only the preferred embodiment of the present invention, and all changes and modifications made to the scope of the patent application of the present invention should be included in the scope of the present invention. [Simple description of the drawings] 18 1361910 The first picture shows the typical color C light of the conventional DIS. The cross-section of the red color light film, the green color light film and the color control color film are completed. . Figure 3 is a schematic diagram showing a portion of a color filter array disposed on a dummy pixel array on the periphery of the active sensing region. Fig. 4 is a view showing the arrangement of a color tear sheet according to the first preferred embodiment of the present invention. Figure 5 is a schematic view showing the arrangement of the light sheets according to the second preferred embodiment of the present invention. Figure 6 is a schematic view showing the arrangement of the light sheets according to the third preferred embodiment of the present invention.巍 Fig. 7 is a schematic view showing the arrangement structure of the ton of good light sheets of the present invention. The heart color 4 Fig. 8 is a schematic view showing the arrangement structure of the second color light-receiving sheet according to the embodiment of the frame of the present invention. The figure is a schematic view of another arrangement comprising color filter precursors according to the k-th color backlighting/crossing of the matrix frame of the present invention. [Main component symbol description] 12 Red color filter 16 Blue color filter 20 Red color filter 24 Blue color filter 10. Color filter down Γ 4 Green color filter 17, 18,丨9 昼 矩阵 matrix 22 222 green color filter 19 1361910 January 31, 101 revised replacement page 26 color filter array 28 corner 加 30 large color filter 32 extended edge 34 extended color filter Sheet 36' 38 matrix frame 20