200825404 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種基板檢測設備；具體而言’本發明係 有關於一種用於線上檢測之玻璃基板檢測設備。 【先前技術】BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate detecting apparatus; in particular, the present invention relates to a glass substrate detecting apparatus for on-line inspection. [Prior Art]
一般供製造諸如液晶顯示器（TFT-LCD)、電漿顯示器 (PDP，Plasma Display Panel)或電致發光元件（EL， Electroluminescence)等顯示裝置之玻璃基板係經由玻璃溶爐 溶解並模壓為平面狀之玻璃基板，經一次性按規格切割的工序 製造後，繼續在加工線上運輸加工。接著在玻璃基板的加工線 上，將玻璃基板再次裁切成符合各平面顯示器規格的尺寸，對 通過裁切成形的四個鋒利的邊緣進行研磨及分別於此四個切 角（Comer cut)定位標記。 上述玻璃基板之成形、裁切、研磨及操縱等一連串的作 業中，因各種因素會產生氣泡、雜質或石子等異物混入，因此 會造成玻璃基板的污損、劃傷、切紋或裂紋等多種缺陷。此外， 在產品製造過程中，玻璃基板上會進行各式製程，例如彩色遽 光片製轉。為了製造出高品質的平面顯柯，麟玻璃基板 本身或經製飾產生之生成物的缺陷進行檢查，以區分合格品 及不合格品’並試圖在製虹序巾尋找不_素，查明 原因並進行糾正。然而習祕查玻璃基板的方式係利用目視或 微f縣學裝置檢查。料，對_基板進行 ，為了劇級細正雜及可她，還需要進行抽 5 200825404 如圖1所示，傳統上進行檢查程序時，檢杳人員通常合 親機械手臂（圖糖示)卸下在輸送線2〇上待檢查之玻絲 其置放於檢魏5Q上進行檢查；或者是另設一條輸 运線30輸送此不良品至檢查站5〇。在此所述之檢纟，一般而 H透過檢查站50上方之發光元件或函素燈等照明設備 (圖未縿示），以目視來檢查玻璃基板1〇的缺陷。然而不論是 j機械手臂或是另讀騎輸送至檢纽的方式，均會增加運 达玻璃基板的時間以及增設輸送_設備Generally, a glass substrate for manufacturing a display device such as a liquid crystal display (TFT-LCD), a plasma display panel (PDP), or an electroluminescence (EL) is dissolved and molded into a planar shape through a glass melting furnace. After the glass substrate is manufactured by a one-time cutting process, it continues to be transported on the processing line. Then, on the processing line of the glass substrate, the glass substrate is again cut into a size conforming to the specifications of each flat display, and the four sharp edges formed by the cutting are ground and respectively positioned at the four corners (Comer cut). mark. In a series of operations such as forming, cutting, polishing, and manipulating the glass substrate, foreign matter such as bubbles, impurities, or stones may be mixed due to various factors, and thus the glass substrate may be stained, scratched, cut, or cracked. defect. In addition, in the manufacturing process of the product, various processes such as color film transfer are performed on the glass substrate. In order to produce high-quality flat-screen ke, the defects of the lining glass substrate itself or the products produced by the decoration are inspected to distinguish between the qualified products and the non-conforming products' and attempt to find the non-supplement in the preparation of the rainbow-made towel. Cause and correct it. However, the way to look at the glass substrate is to check with a visual or micro-fate device. Material, for the _ substrate, in order to play fine and mixed, but also need to pump 5 200825404 As shown in Figure 1, when the inspection process is traditionally carried out, the inspection personnel usually close the mechanical arm (Figure sugar) unloading The glass wire to be inspected on the conveying line 2〇 is placed on the inspection Wei 5Q for inspection; or another transportation line 30 is provided to transport the defective product to the inspection station 5〇. In the inspection described herein, the defects of the glass substrate 1 are visually inspected by visual inspection of a light-emitting element or a light-emitting device (not shown) above the inspection station 50. However, whether it is a j-arm or another way to send to the checker, it will increase the time to transport the glass substrate and add transport_equipment
視掌控生產品質。此外，對於通過麵基板的尺寸趨 及薄形化’如何有效地將製造良率及生產效率轉—定的品 管；特別是’ f玻璃基板的需求量越大時，能即時地監控產品 。口貝又不致影響產能，將是面板薇商嚴酷的挑戰。 【發明内容】 本發明之目的在於提供-種線上（生產線上）即時檢 基板檢測設備。 本發明之另-目的在於提供—種即輕控產品品質之具 板檢測設備。 、土 本發明之另-目的姐提供—種基板檢触備，且 高之生產效率。 ^孕乂 本發明目的在於提供—種基板檢測 節省產品檢測時間。 /本發明之基板檢測設備，與輸送裝置配合使用。輸送壯 置係具有輸送面且供輸送至少一基板。基板檢測設備包含=二 座、抬幵機構及驅動機構。抬昇機構設於支撐座上方且4有： 6 200825404 數根抬昇支H抬昇核係位於輸翻下 行設置。驅動機構設於支擇座中，且與抬昇機構連；^面千 在較佳實施例中，於抬昇機構上方相對應位置處°更設置光 盒，供檢測人貝檢測玻璃基板是否為不良品。抬 有支撐端及支點端，其中支撐端可繞支點端旋轉。當驅^禮 驅動支撐端上昇時，抬昇支架上昇並與輸送面成—夾2 動機構鶴支擒端下降時，抬敎架回復至輸送面下方y此 外’輸送裝置進-步設有複數個輸送滚輪。輸送滚輪係分別設 置於輸达軸上’以形成輸送面並輸送基板。驅動機構進一步= 含複數根從動軸，每-從動軸係連接每—抬昇支架。 ί機支撐部上方更設有軸11。在本伽之較佳實施^ 中，制動讀佳係域壓缸。其中氣壓缸更具有可伸縮之 部，供伸出並抵觸基板之邊緣。Take control of production quality. In addition, the quality of the surface substrate becomes thinner than how to effectively reduce the manufacturing yield and production efficiency; in particular, when the demand for the 'f glass substrate is larger, the product can be monitored in real time. Muzzle will not affect the production capacity, it will be the tough challenge of the panel Wei. SUMMARY OF THE INVENTION An object of the present invention is to provide an on-line (production line) instant inspection substrate detecting apparatus. Another object of the present invention is to provide a panel inspection apparatus that is a quality of light control products. , the other side of the invention - the purpose of the sister to provide a kind of substrate inspection and control, and high production efficiency. Pregnancy The purpose of the present invention is to provide a substrate inspection that saves product inspection time. / The substrate detecting device of the present invention is used in conjunction with a conveying device. The transport sturdy system has a transport surface and is configured to transport at least one substrate. The substrate detecting device includes a second seat, a lifting mechanism and a driving mechanism. The lifting mechanism is located above the support base and has 4: 6 200825404 Several lifting lifts H lifting the nuclear system is located in the downshift setting. The driving mechanism is disposed in the supporting seat and is connected to the lifting mechanism. In the preferred embodiment, the light box is further disposed at a corresponding position above the lifting mechanism for detecting whether the glass substrate is Defective product. The support end and the fulcrum end are lifted, wherein the support end is rotatable around the fulcrum end. When the driving support end rises, the lifting bracket rises and forms a clamp with the conveying surface. When the moving mechanism crane is lowered, the lifting frame returns to the lower side of the conveying surface y. In addition, the conveying device is provided with a plurality of steps. Transport rollers. The conveying rollers are respectively disposed on the conveying shaft to form a conveying surface and convey the substrate. The drive mechanism further = a plurality of driven shafts, each of which is connected to each of the brackets. The shaft 11 is further provided above the support portion of the machine. In the preferred implementation of the gamma, the brake is read by a good pressure cylinder. The pneumatic cylinder has a retractable portion for extending and resisting the edge of the substrate.
基此，當欲檢測通過抬昇機構之某一基板時，驅動機構夢 由從動軸將每-抬昇支雜起，_缸之轉亦會伸出並抵角二 基板之邊緣，使基板不致曝昇肖度變大而產生轉。當操作 人員檢測完此基板並欲放了基板時，.驅動機構亦藉由從動轴將 抬昇支架降下略水平位麟，氣壓缸_，使基板回歸到 原始位置，即在原傳輸線上繼續傳輸加工。 【實施方式】 &本發明係提供-種可應用於各式基板之檢測設備。然在 較實;^fj巾本發明主要可應用於玻璃基板之檢測，特別是 應用於經過彩色濾、光片（color Filter，CF)製程之玻璃基板檢 測。本發明具有線上即時檢測、監控基板良率，並具有大量生 7 200825404 產之n在此所5之彩色據光片主要係顧於、 PDP或EL等平面顯不器中。然而在不同的實施例中，基板亦 可應用於半賴、缸、傳統卫業或其它糾躺愤用。以 :即配合所_式，進—步酬本發明之各具體實施例及其步 圖2及圖3所示為本發明抬昇機構之實施例示意圖。本發 ^之基板檢測設備⑽係舆輸送裝置m配合使用，其中輸送 =110形成，送面1U並輸送至少一基板A。本發明包含支 2 02、抬幵機構12G及驅動機構⑽。支撐座⑽較佳係 ^數根結構鑛馳紅細，輸钱置1關設於支撐座 —ϋ 般而5 ’輸送裝置110具有複數根輸送軸112。 :一軸112上更分別設置有複數個輸送滾輪116。在此所 二指每一輸送滾輪116上表面所共同定義的假 二面。其’動此輸送裝置110更包含傳動系統(圖树 :―。在此所s之傳動系統係包含至少—馬達、至少一輸送帶 及稷數個傳輸輪等裝置，供傳動輸送裝置110。 如^所示，抬昇機構12G亦設於支撐錢2上方且固定 ^一^102之側。抬昇機構120具有複數根抬昇支架122, 二:二支木122位於輪运面114下方且概略與輸送面114平 ΪΓΓ 架122之長度及數量（寬度)係根據所欲抬昇之 :日而左右。換言之，當所欲傳送之基板Α面積 $ Η口歼支4 122的長度及數量會越長及/或越多。反之， 虽:斤欲傳送之基板Α面積越小時，抬昇 ^相對越小及/或越少。在如圖2及圖3 == 昇支架m分別具有切轉及支點部12二 8 200825404 升起時，每’當括昇機構⑽之抬昇核 藏於輸送面以=係，每-輸送軸m =Therefore, when it is desired to detect a substrate passing through the lifting mechanism, the driving mechanism dreams that the driven shaft will be lifted by the lifting shaft, and the rotation of the cylinder will also extend and abut the edges of the two substrates to make the substrate Do not cause the increase in the degree of increase and the turn. When the operator detects the substrate and wants to release the substrate, the driving mechanism also lowers the lifting bracket by the driven shaft by a slight horizontal position, and the pneumatic cylinder _ returns the substrate to the original position, that is, continues transmission on the original transmission line. machining. [Embodiment] The present invention provides a detection apparatus applicable to various types of substrates. However, the invention is mainly applicable to the detection of a glass substrate, in particular to a glass substrate subjected to a color filter and a color filter (CF) process. The invention has the advantages of on-line detection and monitoring of the substrate yield, and has a large number of raw materials. The color light film of the above-mentioned 5 is mainly in the flat display of PDP or EL. However, in various embodiments, the substrate can also be applied to semi-rear, cylinder, conventional health or other squatting indignation. DETAILED DESCRIPTION OF THE INVENTION Various embodiments and steps of the present invention are shown in FIG. 2 and FIG. 3 are schematic views of an embodiment of the lifting mechanism of the present invention. The substrate detecting device (10) of the present invention is used in combination with a transport device m in which transport = 110 is formed, the surface is fed 1U and at least one substrate A is transported. The invention comprises a support 02, a lifting mechanism 12G and a drive mechanism (10). The support base (10) preferably has a plurality of root structures that are reddened, and the money transfer is set to be placed on the support base. The transport unit 110 has a plurality of transport shafts 112. A plurality of conveying rollers 116 are respectively disposed on one shaft 112. Here, the two fingers are pseudo-two sides defined by the upper surface of each of the conveying rollers 116. The transmission device 110 further includes a transmission system (Fig. Tree: ― The transmission system here includes at least a motor, at least one conveyor belt and a plurality of transmission wheels for the transmission conveyor device 110. As shown in the figure, the lifting mechanism 12G is also disposed on the side of the support money 2 and fixed to the side of the body 102. The lifting mechanism 120 has a plurality of lifting brackets 122, and the second: two woods 122 are located below the wheeling surface 114 and are summarized. The length and number (width) of the frame 122 with the conveying surface 114 are depending on the desired lifting: day to day. In other words, the length and number of the substrate Α area 4 122 to be conveyed will be more The length and/or the more. Conversely, although the area of the substrate to be transported is smaller, the lift is relatively smaller and/or less. In Figure 2 and Figure 3 == the riser m has a cut and Pivot part 12 2 8 200825404 When rising, each 'when the lifting mechanism (10) lifts the core to the conveying surface to = system, per-transport axis m =
輸送基板«時，抬昇機構常^ (即輸送震置ii0 之運行。當藉由驅動機 口歼支木亚不會干擾基板A 之抬昇支架122時，支⑼撐部m抬起糾機構12〇 起。然而在不同的每 即可繞支點部126旋轉而升 部126處或其亦可設計成由支點 在此需說财是，域構150。 至樞軸128之扣環134 ^。& ’中’支點部126較佳係延伸 ⑽上方左右兩側之固定=【=2二係藉由固定在支撐座 亦具奴位且ϋ定料簡⑽^杖持。此外爾支架⑶ 更^樞軸128、固定支架132、平板138及制 主i似圖所不。平板138係狀於抬昇支架122上， ^係為設動請。__則是為了支撐及固定基 ^之用。在此實施例中之制動器140較佳為氣壓叙。然而在 ς匕不同的實細巾’制絲14G可為油壓缸或其它以電力來 只現之制動器。因此，若制動$ 14〇為氣壓缸時，其具有可供 伸縮之凸出部142，供支撐並保護基板A抬昇後之垂直面的位 移。 又如圖2及圖3之實施例中所示，於每一抬昇支架122之 上表面適當距離處較佳係分別設有止滑件13〇，供定位基板A 於平行抬昇支架122平面上之位移。在此所言之止滑件130材 質較佳係包含聚醚醚酮(Poly Ether Ether Ketone, PEEK)。此 外，在抬昇支架122左右兩侧的平板138上，更連接轉動輪 200825404 136作為支點。換言之，轉動輪136在此係作為辅助抬昇機構 120抬昇或下降之工具，亦即當抬昇支架122被抬起時，轉動 輪136係輔助抬昇支架122作抬起之動作；當抬昇支架122下 降時，轉動輪136係輔助抬昇支架122作下降之動作。其中抬 昇機構120下降後，較佳係以設置於支撐座1〇2上之橫板1〇4 疋位及擒止每一抬昇支架122。 如圖5所示’驅動機構150較佳更包含複數根從動軸152。 藉由從動軸152與抬昇支架122連接，供驅動抬昇支架122之 支撐部124的升起及下降。在如圖5所示之實施例中，驅動機 構150較佳係以馬達158驅動滾珠螺桿156。其中從動軸152 係分別定位於垂直於從動軸丨52之固定板154，且固定板154 又與滾珠螺桿156垂直連接。每一從動軸152上緣具有缺槽 ⑸’供與抬昇支帛122定位。基此，f滾珠螺桿156驅動支 撐部124上昇時，抬昇支架122即會繞支點部126旋轉而上昇 並與輸送面114成一夾角；當滚珠螺桿156驅動支撐部124下 降時，抬昇支架122亦會繞支點部126旋轉而回復至輸 114下方。此外，於本實施例中，在輸送面Π4下方適當位置 處設置若干❹|]||⑽，供控糖賴置11G_、粒及限 位之相關功能。 窃基本上’上述所言之基板檢須j設傷100係於生產線上藉由 抬昇機構120之直接料或下降供檢·板A。在此所言之基 板A係採廣義之定義，亦即包含半導體、化工、傳统工業或里 它領財之基板檢測。然而如㈣及6b所示之實施例中，基 板檢測設備100主要係供線上檢測玻璃基板a，且進一步包含 設置光盒於抬昇機構12G之上方。其中光盒·係由減 200825404 根發光元件202所組成。在此所述之發光元件202係包含鎢絲 燈、鹵素燈、LED或其它發光裝置；然而在其它不同的實施例 中’光盒200更可為設置如CCD、照相機、顯微鏡或其它光學 檢測裝置。此外，在如圖6a及圖牝所示之實施例中，抬昇機 構120並未包含樞軸128，僅於固定支架132上設置定位輪 118，以作為抬昇支架122之支點部126。意即抬昇機構12〇 之每一抬昇支架之旋轉軸心。 如圖b所示，當驅動機構15〇驅動抬昇支架I”之支撐部 124上升時，抬昇機構122會升起並直到碰到定位輪118。此 時，抬昇支架122會以定位輪118為支點旋轉，並使抬昇支架 122與輸达面114夾-角度0。反之，當驅動機構15〇驅動支 樓部124下降時’抬昇機構122亦相定位輪118為支點旋 轉，並逐漸縮小角度，直到抬昇支架122降至輸送面114下。 在此所言之角度Θ較佳係介於3Q度錢度之間，供藉由光之 反射原理來目測或以其他方式檢測玻璃基板A之良赛。換言 之，當發光元件2G2照射玻璃基板A時，玻璃基板A產生光°的 反射來目測其㈣。財’當檢測人員發現有《品時，會先 降下此不良品，再以機械手臂或㈣至不合格區（圖未緣示）。 如圖7及圖8所示，為本發明抬昇機構之另-較佳實施例 圖^本實施例中，抬昇機構12〇較佳係在樞轴128上設奴 位輪118 ’而定位輪118係可於樞㈣8上轉動。特別是，定 赠置在平板138上，_支_ 線。基此，當驅非為一直 200825404 實施例中，較佳係設置四根8 側之抬昇支架122之支 支木122其中左右兩 ⑶，供u定並旋轉料核122 ‘糾_細定固定柱 上之又===:支撐部124升起時，設於平板⑽ 為/乱屋虹140即伸出凸出物i42。抬 二及固定柱133為支點部126旋轉，直到上 =從動軸:52使每—抬昇支架⑵降下，直到下降至次 續产片下在之凸出部142亦會縮回，而使M A繼 佶^ °在本列中，係分別設置有兩組不同之支點部126， ^幵機構120升起或下降。然而在不同的實施例中，亦可設 王由疋位輪118為支點部126方走轉，或者設置全由固定柱 ^作為支點部126旋轉，又或者是選擇性地使用上述方式任 —方式搭配使用，以達抬昇或下降抬昇機構12()之目的。其它 結構同上所陳，在此不再贅述。 ^ 、本务明已由上述相關實施例加以描述，然而上述實施例僅 為實施本發明之範例。必需指出的是，已揭露之實施例並未限 制本發明之範圍。相反地，包含於申請專利範圍之精神及範圍 之修改及均等設置均包含於本發明之範圍内。 【圖式簡單說明】 圖1為習知玻璃基板之檢測流程示意圖； 圖2為本發明基板檢測設備之部分立體圖，亦即本發明抬昇機 12 200825404 構下降之動作圖； 圖3為圖2之抬昇機構升起之動作圖； 圖4為圖3之抬昇機構之局部放大圖； 圖5為本發明基板檢測設備之部分正視圖； 圖6a為本發明基板檢測設備之第二實施例圖，亦即整體機台 之抬昇機構尚未升起之側視示意圖； 圖6b為圖6a之另*^侧視不意圖， 圖7為本發明之抬昇機構未升起之另一較佳實施例圖；及 ， 圖8為圖7抬昇機構升起之動作圖。 【主要元件符號說明】 10 0基板檢測設備 102支撐座 104橫板 110輸送裝置 112輸送轴 114輸送面 / 116輸送滾輪 118定位輪 120抬昇機構 122抬昇支架 124支撐部 126支點部 128柩轴 130止滑件 13 200825404 132固定支架 133固定柱 134扣環 136轉動輪 138平板 140制動器 142凸出部 150驅動機構 152從動轴 151缺槽 154固定板 156滾珠螺桿 158馬達 160感測器 200光盒 202發光元件 A基板/玻璃基板 0角度 14When the substrate « is transported, the lifting mechanism is always ^ (ie, the operation of the oscillating device ii0 is transmitted. When the supporting device is not interfered with the lifting bracket 122 of the substrate A by the driving machine port, the support (9) struts m lifts the correcting mechanism 12 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 & 'Medium' fulcrum portion 126 is preferably extended (10) above and below the left and right sides of the fixed = [= 2 two series by fixing the support seat also has a slave position and set the material simple (10) ^ stick holding. In addition to the bracket (3) more ^ The pivot 128, the fixed bracket 132, the flat plate 138, and the main body i are similar. The flat plate 138 is attached to the lifting bracket 122, and the system is for the movement. __ is for supporting and fixing the base. The brake 140 in this embodiment is preferably pneumatic. However, in the case of a different actual fine towel, the wire 14G can be a hydraulic cylinder or other brake that is powered by electricity. Therefore, if the brake is $14, In the pneumatic cylinder, it has a protruding portion 142 for telescopic support for supporting and protecting the displacement of the vertical surface after the substrate A is lifted. As shown in the embodiment of FIG. 3, at a suitable distance from the upper surface of each of the lifting brackets 122, a sliding member 13 is preferably provided for the displacement of the positioning substrate A on the plane of the parallel lifting bracket 122. The material of the sliding member 130 is preferably made of Poly Ether Ether Ketone (PEEK). In addition, on the flat plate 138 on the left and right sides of the lifting bracket 122, the rotating wheel 200825404 136 is further connected as a fulcrum. The rotating wheel 136 is used as a tool for raising or lowering the auxiliary lifting mechanism 120, that is, when the lifting bracket 122 is lifted, the rotating wheel 136 assists in lifting the bracket 122 for lifting; when lifting When the bracket 122 is lowered, the rotating wheel 136 assists in lifting the bracket 122 for lowering. After the lifting mechanism 120 is lowered, the horizontal plate 1〇4 disposed on the supporting base 1〇2 is preferably clamped and terminated. Each of the lifting brackets 122. As shown in Fig. 5, the driving mechanism 150 preferably further includes a plurality of driven shafts 152. The supporting portion 124 for driving the lifting bracket 122 is connected by the driven shaft 152 and the lifting bracket 122. Rise and fall. In the embodiment shown in Figure 5, the drive machine 150 preferably drives the ball screw 156 with a motor 158. The driven shaft 152 is respectively positioned on a fixed plate 154 that is perpendicular to the driven shaft 52, and the fixed plate 154 is in turn perpendicularly coupled to the ball screw 156. Each driven shaft The upper edge of the 152 has a notch (5)' for positioning with the lifting support 122. Accordingly, when the f ball screw 156 drives the support portion 124 to rise, the lifting bracket 122 is rotated around the fulcrum portion 126 to rise and form a line with the conveying surface 114. When the ball screw 156 drives the support portion 124 to descend, the lift bracket 122 also rotates around the fulcrum portion 126 to return to below the feed 114. Further, in the present embodiment, a plurality of ❹|]||(10) are disposed at appropriate positions below the conveying surface Π4 for controlling the sugar to displace the 11G_, the grain and the limit. The sneak is basically the above-mentioned substrate inspection j. The injury 100 is applied to the production line by the direct feed of the lifting mechanism 120 or the lower inspection plate A. The substrate A mentioned here is defined in a broad sense, that is, the substrate inspection including semiconductor, chemical, traditional industry or other leading industries. However, in the embodiments shown in (d) and 6b, the substrate detecting apparatus 100 mainly detects the glass substrate a on the line, and further includes setting the light box above the lifting mechanism 12G. The light box is composed of 200825404 light-emitting elements 202. The light-emitting element 202 described herein comprises a tungsten filament lamp, a halogen lamp, an LED or other light-emitting device; however, in other different embodiments, the light box 200 may be provided as a CCD, a camera, a microscope or other optical detecting device. . Further, in the embodiment shown in Figs. 6a and ,, the lifting mechanism 120 does not include the pivot 128, and the positioning wheel 118 is provided only on the fixing bracket 132 as the fulcrum portion 126 of the lifting bracket 122. That is to say, the rotation axis of each lifting bracket of the lifting mechanism 12〇. As shown in FIG. b, when the driving mechanism 15 〇 drives the support portion 124 of the lifting bracket 1" to rise, the lifting mechanism 122 will rise until it hits the positioning wheel 118. At this time, the lifting bracket 122 will be positioned. 118 is a fulcrum rotation, and the lifting bracket 122 is clamped to the conveying surface 114 by an angle of 0. Conversely, when the driving mechanism 15 〇 drives the branch portion 124 to descend, the lifting mechanism 122 also rotates with the positioning wheel 118 as a fulcrum, and The angle is gradually reduced until the lifting bracket 122 is lowered below the conveying surface 114. The angle Θ is preferably between 3 and 3 degrees for visual inspection or otherwise detecting the glass by the principle of light reflection. In the good game of the substrate A. In other words, when the light-emitting element 2G2 illuminates the glass substrate A, the glass substrate A generates a reflection of light to visually measure it (4). When the inspector finds that there is a product, the defective product is lowered first, and then The mechanical arm or (4) to the unqualified area (not shown). As shown in Fig. 7 and Fig. 8, another preferred embodiment of the lifting mechanism of the present invention is shown in Fig. 1. In this embodiment, the lifting mechanism 12 Preferably, the slave wheel 118' is disposed on the pivot 128 and the positioning wheel 118 is pivotable (four) 8 is rotated. In particular, the gift is placed on the flat plate 138, the _ branch _ line. Based on this, when the drive is not always 200825404, in the embodiment, it is preferable to set the support of four eight-side lift brackets 122. 122, wherein the left and right two (3), for the u fixed and rotate the core 122 'correction _ finely fixed on the fixed column ===: when the support portion 124 rises, is set on the flat plate (10) is / chaos Hong 140 is protruding protruding The object i42. The lifting and fixing column 133 is rotated by the fulcrum portion 126 until the upper=driven shaft: 52 lowers each lifting bracket (2) until it is lowered to the sub-continuation sheet, and the protruding portion 142 is also retracted. In the present column, there are two different sets of fulcrum portions 126, and the mechanism 120 is raised or lowered. However, in different embodiments, the king can also be set. 118 is the fulcrum portion 126 side rotation, or is set to be rotated by the fixed column ^ as the fulcrum portion 126, or alternatively used in any manner described above to achieve the lifting or lowering lifting mechanism 12 () Purpose: Other structures are the same as above, and will not be described here. ^, The present invention has been described by the above related embodiments, however The embodiments are merely illustrative of the invention. It is to be understood that the scope of the invention is not limited by the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a process of detecting a conventional glass substrate; FIG. 2 is a partial perspective view of the substrate detecting device of the present invention, that is, an action diagram of the structure of the lifting machine 12 200825404 of the present invention; Figure 3 is a partial enlarged view of the lifting mechanism of Figure 3; Figure 5 is a partial front elevational view of the substrate detecting device of the present invention; Figure 6a is a substrate detecting device of the present invention; 2 is a side view of the lifting mechanism of the overall machine; FIG. 6b is a side view of FIG. 6a, and FIG. 7 is not raised by the lifting mechanism of the present invention. Another preferred embodiment of the drawings; and, Fig. 8 is an operation diagram of the raising of the lifting mechanism of Fig. 7. [Main component symbol description] 10 0 substrate detecting device 102 support base 104 horizontal plate 110 conveying device 112 conveying shaft 114 conveying surface / 116 conveying roller 118 positioning wheel 120 lifting mechanism 122 lifting bracket 124 supporting portion 126 fulcrum portion 128 柩 axis 130 slipper 13 200825404 132 fixing bracket 133 fixing post 134 buckle 136 rotating wheel 138 flat plate 140 brake 142 projection 150 driving mechanism 152 driven shaft 151 missing groove 154 fixing plate 156 ball screw 158 motor 160 sensor 200 light Box 202 light-emitting element A substrate / glass substrate 0 angle 14