TW200825370A - Method for measurement of straightness of metallic wire and measuring equipment of same - Google Patents

Method for measurement of straightness of metallic wire and measuring equipment of same Download PDF

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Publication number
TW200825370A
TW200825370A TW096146410A TW96146410A TW200825370A TW 200825370 A TW200825370 A TW 200825370A TW 096146410 A TW096146410 A TW 096146410A TW 96146410 A TW96146410 A TW 96146410A TW 200825370 A TW200825370 A TW 200825370A
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Taiwan
Prior art keywords
line
wire
curve
thin metal
metal wire
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TW096146410A
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Chinese (zh)
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TWI348538B (en
Inventor
Toshitaka Mimura
Mitsuo Takada
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Tanaka Electronics Ind
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Publication of TW200825370A publication Critical patent/TW200825370A/en
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Publication of TWI348538B publication Critical patent/TWI348538B/en

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Abstract

To provide method for measurement of straightness of metallic fine wire and measuring Equipment of same. A sample wire is hanged down, a photograph of the wire is taken from vertical direction to hanged down direction, degree of meander can be evaluated by the curve calculated from image of photograph taken, dividing the curve into 2 to 25 times length section of loop length. It is acknowledged that bend of wire relating to leaning defect, as meander width from distance of parallel lines around curve, though wavy bend of long cycle with expanded meander width does not affect leaning, bend of small curvature radius, which affects leaning, is relating to loop length, it can be recognized as meander width at above-mentioned section. Section of sample wire photograph, corresponded to accuracy of apparatus, should be divided into length direction; it is evaluated as continuous curve by processing as digital data, which are expanded to width direction.

Description

200825370 九、發明說明: 【發明所屬之技術領域】 、杨鴨棚供引賴接等接合已觸成每—赋長度的細線 兩端所使用的拉線加工的金屬細線之真直性的測定方法及測定裝 、置,與線徑於0. 007〜〇. i咖,尤其指〇. 〇15〜請5麵之範圍的金屬 細線之真直性的測定方法及測定農置有關。 【先前技術】 • *久以來經予拉線加工的金屬細線,係予捲繞於捲筒上並予 拉伸著使用8^予以裁切成固定長度而予使用。於此獅態予以 處理的金屬細線’有電器零組件之引線成偵撿器之引線、汽車輪 胎之胎唇線、及半導體裝置用之銲(壓)接線、例如供連接電子 ,f路元件或電路基板而用的隆起銲接線或輝(壓)接線等,係極 其通常的形態。此種金屬細線,因應其用途,有以AU、Ag、w、200825370 IX. Description of the invention: [Technical field of invention] The method for measuring the trueness of the metal thin wire processed by the wire used for the ends of the thin wire of each length Measure the mounting, setting, and wire diameter at 0. 007~〇. i coffee, especially 〇. 〇15~ Please measure the trueness of the thin metal wire in the range of 5 faces and measure the agricultural setting. [Prior Art] • * A thin metal wire which has been subjected to wire drawing for a long time is wound on a reel and stretched and used to be cut into a fixed length for use. The thin metal wire that is handled by this lion state has the lead of the electrical component as the lead of the detector, the bead wire of the automobile tire, and the welding (voltage) wiring for the semiconductor device, for example, for connecting electronic components, f-channel components or A bump welding line or a glow (voltage) wiring for a circuit board is an extremely common form. Such metal thin wires have AU, Ag, w, depending on their use.

Pt、A卜Cu、Fe、Ni、Pb、Sn、w等的金屬或該等的元素為主成分 #的合金被使用著,此等的鑄塊係予連續被由粗線抽拉成細線的進 行拉線加X,視必要時,於拉伸線之前、中、後^以熱處理。 此種金屬細線之蛇行形狀,以於動下垂下金屬細線予以目視 的方法(日本特開平士酬⑽號公報)可簡便的測定,由其結果, 有諸如蛇行寬幅較大的金屬細線,真直性差,較容易形成不良品。 然而,藉由目視的情形,由於個人差別等而於測定值上有分 散性, 進行定量崎估有_存在著。@此,巾請人對金屬細線由其前 5 200825370 =予以抽拉成固定長度,對此對象材料施以酬,拍攝此對象 :將此已拍攝的影像藉由電腦處理並開—^ 幌置,且_咏馳爾讀η日她ΓMetals such as Pt, A, Cu, Fe, Ni, Pb, Sn, w, or the like are used as the alloy of the main component #, and these ingots are continuously drawn by a thick line into a thin line. The wire is twisted and X is added, and if necessary, heat treated before, during, and after the stretching line. The serpentine shape of such a thin metal wire can be easily measured by a method of visually dropping a thin metal wire (Japanese Patent Laid-Open (10)), and as a result, there is a thin metal wire such as a snake. Poor sex, it is easier to form defective products. However, in the case of visual observation, there is dispersion in the measured value due to personal differences, etc., and there is a quantitative estimation. @这,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, , and _ 咏 尔 尔 reading η日 sheΓ

再者,於日本特開86174號公報(專利文獻2),揭示出 由專利文f 1之祕方法,「若垂下金屬細線時,縣由金屬細線 之本身重里’(中間省略)欲使變形成金屬細線具有的蛇行形狀係 有困難的(專利文獻2第3攔)」所謂的理由,「使金屬細線之至少 一端以呈現自由端之_浮鎌上,以於魏體之液面上的 前述金屬細線之形狀鱗評估,該金屬細線之真直性(專利文獻2 弟5爛)§平估方法及裝置。 。此評估褒置,係將三維的金屬細線之形狀 又維的照姆像’較合適的是由金屬細線呈現的連續線, 以連接已侧顿㈣錄U败親行曲線並予 鏗別的方法。糾較藉由此評估裝置而得的啦結果與目視時的 測定結果時’可大幅的抑制真直性測定值之分散性。(參閱同一公 報第5頁之表1的實施例5、6、HM2係比較例卜2)。 專利文獻1 ··日本特開2002-124534號公報 專利文獻2 :日本特開2006-86174號公報 然而,即使有藉由此等的真直性評估裝置之測定方法,仍然 留存著下述的問題點。 首先就專利文獻1的情形予以說明。因為金屬細線變細會呈 200825370 現三維_,由於亂反射等現象續難獲得均勻的對比的拍攝 影像。因此,金屬細線之拍攝影像發生無法麵的背景部分,於 製作蛇行鱗雜常發生金屬錯誤。尤其金屬細線愈加變直 徑〇. 1麵町時,難鑑觀行_,較常發生 此外’即使為照鶴件良好且經予均勻拍攝的^,於製作 蛇行曲線時’於金屬細線及背景部分,會發生土2啦(圖元)程 度的誤差。例如,採用475萬圖元(縱㈣pixx橫!,_pix) 之攝影機拍攝長度3Gcm (公分)的領域時,攝影機之測定精度即 使為 Ain/pix ’由於上述的誤差而發生最大的誤差,若予 以換异時’則發生480/zm之誤差。 而且,經予連續拉線的金屬細線,本來真直性之差異小,由 於比較作為應予判定的蛇行寬幅幾乎在1() _以⑽差異,真值 性若愈高時則於監視器畫面上欲確認其蛇行的大小即愈困難。 其次現明專利文獻2。於專利文獻2之實施例所示的為純水填 籲滿的液體保持容器内,即使意欲浮有直徑18卵長度35〇麵的金 線,終究自捲、線器被取出的金線會呈現三維的蛇行,所以欲浮於 一維的水平面上係有困難的。即或可以使此種金線浮起,藉由表 面張力可使金線被吸進至液體保持容器之侧壁上,對拍攝裝置欲 保持金線於指定的方向•位置係有困難的,欲適用於製造現場上 • 並不實用。而且,由於裁切兩端,所以裁切時的應力因呈現出金 _ 線端部之彎曲量(參閱專利文獻2第 21攔),欲測定裁切時的彎 200825370 曲量或測定金線本身之真直性錢行其評估係有聊的。 如此,於專利文獻1、及2之測定綠或評估方法方面 法迴避供測定而_拍攝條件所產生的誤差。 t 而且,即絲日本特_2_12簡號公報(專利文獻i)所 疋義的蛇仃寬咖、的她樣,自細_並予裁切成固 定長度,的次進行銲接的此—操作之中,變形成不可珊的形 狀,即有形成不良品的情形。尤其,使·半導體裝置的銲接線 的情形’在一件半導體裝置有數百〜數簽個連接位置之中,有一個 位置的不良會使其他的所有連接位置成為不能_,因此成為致 命的缺陷。此種不良即皱稱作銲接線f曲或測平⑴ning),由於 即使為蛇行寬幅較小的金屬細線亦會發生,至目前為止的測定方 法或評估方法亦無法於裁切金屬細線且予接合之制定該情形的 良好與否。 具體而言,測平不良係於接合銲接線之絲鋅球至半導體晶 片之A1銲墊並形成第—壓接(bQnd)後,藉由毛細管壓接工具 (capillary㈣)抽拉出銲(壓)接線並描晝線圈形時而於第 -壓接之根部断產生的銲(壓)接線之異雜斜。此種測平不 良係相鄰的銲(壓)接關隔狹窄㈣於接近所產生的。近年, 間距間隔由_πι急劇的縮小間距至心m,隨著細密間距化的 進行’輝(壓)接線與鮮(壓)接線之間隔漸成狹窄。因此,辉 (壓)接線與銲(壓)接線之間隔較寬_,少許的傾斜即不皱 8 200825370 平不良,相對的,銲⑽)接線與銲⑷接線之間隔 漸成狹㈣結果’使_定制料良的情形增加著。 ‘ 然而,隨著近年來的積體電路之積體度提高,細密間距化盘銲 •(壓)接線之細線化亦同時進行著。隨著細間距間隔由⑽卿各 劇的縮小間距至35⑽之細密間距化的進行,鲜(壓)接線亦由 30,予以細線化至15_。結果,測平不良對策於此等極細線 方面即成為極其重要的課題。 φ 【發明内容】 發明欲解決的譯擷 本發明係鱗決上述課題而予完成者,其目的在於實用且有 效的提供供壓·線壓接成每i定長度的細線兩端所使用的拉 線加工的金屬細線之真直性的測定方法。 本發明之目的在於提供可區別成為測平不良之原因的蛇行度 與不成為該原因的蛇行度’且可破實測定的有效真直性的測定方 0 法。 本發明之目的在独二維方式良好精密度測定出呈現三維變 形的蛇行度,且可解決金屬細線之直徑及蛇行寬幅的絕對値極小 而不能充分對應供讀取影像而用的攝影用之光學機器的精確度。 此外’本發明之目的在於提供達成上述課題之較至目前為止 的測定裝置可更價廉且高精確的實用測定裝置。 本發明係金屬細線之真直性的贼方法,其舰在於垂下金 200825370 屬細線並自垂直方向對該金屬細線拍攝,讀取拍攝影像作為公値 數據’由該影像求取假想財^線並轉換成二維連續蛇行曲線, 將該二維曲線之測定區域,以於銲(壓)接線接合時的弧狀 連接線(wire loop)長度之2〜25倍的多數_,以對該經予區 分的二維曲線之二維曲線的每一區間評估該區線之真直性。 本發明係金屬細線之真直性賴定方法,其特徵在於上述多 數區間為5區間以上’依各自的每—區間之蛇行寬幅的大小順序, #健採用測定俊之半數〜十分之一的個數値,評估該曲線之真直 性, μ 由挾持上述龍分區間之區分區間的金屬細線之曲線的平行 線間距離評估上述金屬細線之真直性, 於將上述拍攝影像處理作2値數據並予轉換成二維曲線之 際,於寬幅方向上放大處理,藉由採用該經予放大處理的影像, 降低轉換成二維曲線之際的誤差, Φ 以上述金屬細線作為015-0· 〇25mm之線徑為特徵, 藉由重宜上述二維曲線之區分區間及相鄰的區間,維持曲線 之連續性,提高測定精確度。 再者,本發明係經予拉線加工的銲接線接合用金屬細線之真 直性的測定裝置,其特徵在於由 (a) 插通自捲線器垂下的金屬細線並定位的導環、 (b) 對金屬細線之垂下方向呈垂直的方向拍攝的攝影手段,及 200825370 (C)僅寬幅方向放大經予拍攝的二維蛇行影像’於鋒接線鲜接 時之長度的2〜25倍的區間區分已求取其中心線而得的二維曲線, 對該經予區分的二維曲線之每-區間,平行於賴線之中心線晝 出挾持該二維曲線之線,求取該平行線間之距離的運算處理裝置 而予構成者’對上述金屬細線之_係藉由設置㈣光照明予以 進行,降低照明光線之亂射的影響的金屬細線。In Japanese Patent Laid-Open Publication No. 86174 (Patent Document 2), the secret method of Patent Document F1 is disclosed, "When the metal thin line is dropped, the county is made up of the metal thin wire itself" (middle omitted) to be deformed. The metal wire has a serpentine shape which is difficult (Patent Document 2, No. 3). The reason is to "make at least one end of the thin metal wire appear on the floating end of the metal wire to form the aforementioned fine metal wire on the surface of the Weili body. The shape scale evaluation, the straightness of the thin metal wire (Patent Document 2, brother 5 is bad) § flat evaluation method and device. This evaluation device is a three-dimensional metal wire shape and the dimension of the image is more suitable It is a continuous line drawn by a thin metal wire to connect the sidetrack (4) to record the U-family curve and discriminate. The result of the evaluation by the evaluation device and the measurement result when visually can be greatly The dispersibility of the measurement of the trueness is suppressed. (Refer to the examples 5 and 6 of Table 1 on page 5 of the same publication, and the comparative example 2 of the HM2 series.) Patent Document 1 - Japanese Patent Laid-Open Publication No. 2002-124534 2: Japan Special Open 2006-86174 However, even if there is a measurement method by such a straightness evaluation device, the following problems remain. First, the case of Patent Document 1 will be explained. Since the thin metal wire is thinner, it will be in the form of 200825370. The phenomenon of chaotic reflections continues to be difficult to obtain a uniform contrasting shot image. Therefore, the image of the thin metal line is not able to face the background part, and metal errors often occur in the production of snakes. Especially the thin metal wire is more variable in diameter. It is difficult to see the line _, more often than the other 'even if the crane is good and evenly shot ^, in the production of the snake curve 'in the metal thin line and the background part, the degree of soil 2 (picture)) For example, when a camera with a length of 3 Gcm (cm) is used with a camera of 4.75 million primitives (vertical (four) pixx horizontal!, _pix), the measurement accuracy of the camera is Ain/pix', and the maximum error occurs due to the above error. When the change is made, the error of 480/zm occurs. Moreover, the difference between the straightness of the metal thin wire which is continuously drawn is small, because the comparison is The width of the snake line to be judged is almost 1 () _ by (10) difference, and the higher the truth value is, the more difficult it is to confirm the size of the meandering on the monitor screen. Next, Patent Document 2 is disclosed. The embodiment shows a pure water filled liquid holding container, even if it is intended to float a gold wire having a diameter of 18 eggs and a length of 35 inches, after all, the gold wire taken out from the coil and the threader will exhibit a three-dimensional snake line. Therefore, it is difficult to float on the one-dimensional horizontal plane. That is, the gold wire can be floated, and the surface tension can cause the gold wire to be sucked into the side wall of the liquid holding container, and the image device is intended to be maintained. The gold wire has difficulty in the specified direction and position, and it is not suitable for use in the manufacturing site. Moreover, since the ends are cut, the stress at the time of cutting is due to the amount of bending of the end of the gold wire ( Refer to Patent Document 2, No. 21). It is necessary to determine the curvature of the 200825370 volume when cutting or to determine the authenticity of the gold wire itself. As described above, the methods of measuring green or the evaluation method in Patent Documents 1 and 2 avoid the error caused by the measurement conditions. t, that is, the silk 日本 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the middle, it becomes a shape that cannot be formed, that is, a situation in which a defective product is formed. In particular, in the case of a soldering wire of a semiconductor device, in a semiconductor device having a connection position of several hundred to several marks, a defect in one position causes all other connection positions to become incapable, thereby becoming a fatal defect. . This kind of defect is called the welding line f curve or leveling (1) ning). Even if the metal thin wire with a small width is generated, the measurement method or evaluation method so far cannot cut the metal thin wire. The joint is good or not. Specifically, the leveling defect is after the wire zinc ball of the bonding wire is bonded to the A1 pad of the semiconductor wafer and the first crimping (bQnd) is formed, and the welding (pressure) is extracted by a capillary crimping tool (capillary). Wiring and drawing the coil shape and the irregularity of the welding (pressure) wiring generated at the root of the first crimping. This kind of flattening is caused by the proximity of the adjacent weld (pressure) joints (4). In recent years, the pitch interval has been sharply narrowed from _πι to the center m, and the spacing between the 'glow (voltage) wiring and the fresh (pressure) wiring has become narrower with fine pitch. Therefore, the interval between the hui (voltage) wiring and the welding (pressure) wiring is wider _, a little tilt is not wrinkled 8 200825370 flat bad, opposite, welding (10)) wiring and welding (4) wiring is gradually narrow (four) results 'make _ Customized materials are increasing. ‘However, with the increase in the integrated circuit of the integrated circuit in recent years, the thinning of the fine-pitched (welded) wiring is also carried out simultaneously. The fine (pressure) wiring is also thinned to 15_ by 30, as the fine pitch spacing is performed by the narrow pitch of the (10) syllabic to the fine pitch of 35 (10). As a result, the countermeasure against flatness is an extremely important issue in terms of such extremely thin lines. φ [ 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明A method for determining the trueness of a wire processed metal wire. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for measuring the effective straightness which can be distinguished from the degree of serpentine which is a cause of poor flatness and the degree of serpentine which does not cause the cause. The object of the present invention is to measure the degree of serpentine in three-dimensional deformation in a unique two-dimensional manner, and to solve the problem that the diameter of the metal thin wire and the width of the meandering width are extremely small and cannot sufficiently correspond to the image for reading the image. The accuracy of the optical machine. Further, the object of the present invention is to provide a practical measuring device which is more cost-effective and highly accurate than the conventional measuring device which achieves the above-mentioned problems. The invention is a thief method for the straightness of a metal thin wire, and the ship is a fine line of the hanging gold 200825370 and photographs the thin metal line from the vertical direction, and reads the captured image as the public data 'by the image to obtain the hypothetical financial line and convert Forming a two-dimensional continuous meandering curve, and measuring the area of the two-dimensional curve to a majority of 2 to 25 times the length of the wire loop when the welding (pressure) wire is joined to distinguish the Each interval of the two-dimensional curve of the two-dimensional curve evaluates the trueness of the line. The present invention is a method for determining the trueness of a metal thin wire, characterized in that the majority of the intervals are 5 or more intervals, and the size of the snake width according to each of the intervals is #, and the health is measured by half to one tenth of Jun. Counting the value of the curve, and evaluating the trueness of the thin metal line by the distance between the parallel lines of the curve of the metal thin line between the above-mentioned dragon sections, and processing the above-mentioned captured image as 2 data. When converting into a two-dimensional curve, the processing is enlarged in the wide direction, and by using the pre-amplified image, the error at the time of conversion into a two-dimensional curve is reduced, Φ is 015-0· 〇 25 mm with the above-mentioned thin metal wire The wire diameter is characterized by maintaining the continuity of the curve by the distinction between the two-dimensional curve and the adjacent interval, thereby improving the measurement accuracy. Further, the present invention is a measuring device for the straightness of a metal wire for bonding wire bonding which is subjected to pre-wire processing, and is characterized in that (a) a guide ring inserted through a thin metal wire suspended from the reel and positioned (b) A photographing method for photographing the vertical direction of the metal thin line in a vertical direction, and 200825370 (C) only widening the two-dimensional snake image of the photographed image in the wide direction to distinguish between 2 to 25 times the length of the sharp connection. A two-dimensional curve obtained by taking the center line thereof is obtained, and each of the differentiated two-dimensional curves is parallel to the center line of the slanting line, and the line of the two-dimensional curve is drawn, and the parallel line is obtained. The distance processing device is configured to perform a thin metal wire on the metal thin wire by providing (four) light illumination to reduce the influence of the illuminating light.

本發明係於採用銲接線銲接等的結線上,藉由正確的呼估成 =平等的之解半雜,丨♦料,可確實的去除成為測平 不良的金屬細線,_可姻於不成為測平不良 的緩和金m 料位#乂大 出現’即可有效的因應提高較高度的真直性之需长。 或影像解析之負擔’使較廉價的拍攝 ΠΓΓΓ時顺要麵絲吨拍攝機器 祛态等之利用成為可能,可 降低設備緒使該料處理容易進行 【實施方式】 於本發明 銲接線銲鱗的弧崎接線長度1叫所朗喊切長度之 維曲線分抛其2〜25倍之長=、^ ’將_影像而得的二 若依發明人等的研究日士,^進行測定蛇行度。 了於金屬細線之真直性給予測平等 200825370 的影響之蛇行,非為跨拒(span)較 弧狀連接線,而係由鱗較小的屈糾起者了 "或曲率較大的 圖2係以模式的表示出此一關係。 屈曲开若^式的表示出金屬細祕供_之測定範_長度上的 开-狗’大致上如同第2圖(a)~ ( 較:略理想形態。α— I」為^场__示蛇行者,⑷域輪小的「瘤」 出伴Ik此等的「婉蜒」或「弧狀連接線」而予表示者。通常, ^於此等鱗,若_行寬幅時,如圖㈦〜⑷的情形,此 炎开场上的不同並不呈現於測定俊上,不論何者均以蛇行寬幅成 為同樣的數値。 然而’如同銲接線般結線長度最多可以10mm程度以下的弧狀 連接線予以接合時,以測定長度數十⑽之間所測定的此等⑻、 (c)之「蜿蜒」或「弧狀連接線」的緩和且比較長的區間所表示 的蛇行,認定成幾乎不影響測平等的真直性。 另一方面’如(d)般被觀察時的曲率半徑較小的「瘤狀」之 屈曲’係所謂該屈曲之變化率較大,所以於此等較短的區間所使 用的情形大大的表示出影響,尤其於銲接線方面,若於接合部位 存在著此種屈曲時,則例如蛇行寬幅小,而且其範圍狹小,且立 即表不成為測平不良,其影響較大。亦即,於此等的蛇行曲線之 ^ V-. ’如(d)所示般曲率較小,曲曲程度較小而表示成「瘤狀」的 12 200825370 屈曲即在真直性評估方面較重要的。 然而’如同以往般,取經長的測定長度1尤其整體藉由 測定蛇減之技骑,魏_之最大_喊曲率半徑較 大的弧狀連接線轉_行寬幅係於其勸或鲜梓之 長度_最大,所以由鱗_或鲜半徑較大的弧_ 線而得的蛇行’ g卩成為以最大的蛇行寬幅被彳貞檢出。The present invention is applied to a knot line by welding wire welding, etc., by correctly arbitrarily arranging to be equal to half of the miscellaneous, and 料 料 material, and can reliably remove the thin metal wire which becomes a bad leveling, _ can not be married The flattening of the tempering gold m level #乂大 appears' can be effectively responded to the need to improve the high degree of straightness. Or the burden of image analysis 'making it cheaper to take advantage of the cheaper shooting time, etc., and it is possible to reduce the equipment and make the processing easier. [Embodiment] In the welding wire welding scale of the present invention The arc length of the arc is 1 and the length of the curve is 2 to 25 times the length of the curve. The true straightness of the thin metal wire gives the snake of the influence of the equalization of 200825370, which is not a spanned arc-shaped connecting line, but is made up of a smaller scale and has a larger curvature. This relationship is expressed in terms of patterns. When the buckling is open, the formula indicates that the metal is fine. The measurement of the length _ the length of the opening - the dog' is roughly the same as the second figure (a) ~ (Comparative: slightly ideal form. α - I) is ^ field __ Show the snakewalker, (4) The small "tumor" of the domain wheel is accompanied by the "婉蜒" or "arc connection line" of Ik. Usually, ^such scale, if _ line width, such as In the case of (7) to (4), the difference in the onset of this inflammation is not present on the measurement, and the same number is obtained in the width of the snake. However, as with the welding line, the length of the knot can be up to 10 mm or less. When the connecting wires are joined, it is determined that the meandering of the (8), (c) "蜿蜒" or "arc connection line" measured between the tens of (10) and the relatively long interval is determined. On the other hand, 'the buckling of the 'tumor shape' with a small radius of curvature when viewed as (d) is so that the rate of change of the buckling is large, so it is shorter. The situation used in the interval greatly indicates the influence, especially in the welding line, if it is stored at the joint In the case of such buckling, for example, the size of the snake is small, and the range is narrow, and the immediate display does not become a bad flatness, and the influence thereof is large. That is, the meandering curve of the snake line ^ V-. '如(d ) The curvature shown is small, and the degree of curvature is small and expressed as "tumor". 12 200825370 The buckling is more important in the assessment of true straightness. However, as in the past, the length of the long measurement 1 is especially Measuring the technique of snake reduction, the biggest _ _ shouting the arc of the curved radius with a large radius of curvature _ line width is the length of its persuasion or fresh _ _ maximum, so by the scale _ or the arc with a larger radius The _ line of the snake line 'g卩 became the largest snake line to be detected by the cockroach.

因此’對上述_平雜影響最大的曲率半徑最小的屈曲, 由於蛇行寬秘顿崎胁鱗鮮待鼓_行内而未予 偵檢出。 為傭出影_平等的鱗半徑最小的蛇行,若分割相當於 應予評估曲率的長度之曲間並予測定時,則對較該區間大的週 /月或曲率之蛇行貞彳^捨棄影像並傾除,以相當於此等的較小 的曲率之蛇行寬幅可予偵檢出。 至於此等的關係,對以供試體之拍攝影像為準的二維蛇行曲 線測定蛇行性技巧的概細,模侧2之蛇行狀態並表示於圖3。 於圖3 ’各自的二維曲線,係予分割成㈣3、…、di d3之區間, 此等的分割範圍係有部分重複的。 惋挺」或「弧狀連接線」亦較小的真直性良好的細線,係 如(a)所示般’即使為已分⑽翻、針各自測定的蛇行寬幅亦 較小。 卜如Π (b)、(c)之曲線所皱見般的誇距較長的蛇行, 13 200825370 係藉由分割成如騎讀,並且_其經予分_長度,使「婉 蜒」或「弧狀連接線」之振幅可予消除。其「婉挺」或「弧狀連 接線」之週期,或分割長度較曲率半徑愈小,其値變成愈小。相 對於此’屈曲之週期如⑷般短小,曲率半徑小且短的蛇行,其 分割長度縣獅或鲜伟變近,軒測定成較大的儘。 適當的分舰贼分龍量,係指由金屬細線之_或銲接 的弧狀連接線長度(由毛細管壓接工频抽㈣銲接線之全長。 亦即’已進行銲接的銲接線由垂直方向觀察時的平面長度即使相 同,弧狀連接線高度若變高時,聰狀連接線長騎變長。以下 相同),隨著弧狀連接線之高度等的弧狀連接線之取樣方法,及供 试體長度之不_異’但是通常酬平等的缺陷,鮮分割的區 分係對上述金屬細線之使㈣的弧狀連接線若為2~25倍之範圍的 ,度則I知此等的曲率半徑較短的蛇行之值奸測定的成為 取大的蛇行紐。騎,若成朴15倍等之範_長度時,則對 實用條件因可較直接的對比,故較宜。 、再者本U之敬法,係取得拍攝影像並藉由電腦處理而 、的料線’雖n維曲線區分成已因應銲接線銲接 的弧狀連躲錢之長度,败蛇行度並真雜,但藉由咬 如前述般,於作為本㈣之縣的直徑數十 成她的區分金屬細線之攝影曲間測定蛇行度所需的高精細影 像’因應拍攝機器之影像處理能力,可確保所需的精確度。 //in以下的極細 200825370 線之拍攝影像方面,由於可掌握幾乎完全筆直的直線中之較小的 屈曲,故已放大的鬲精細的影像即成必要的,但欲得予該影像相 稱的像元之拍攝機器細較困難的,此外成本負擔亦較大。 因此,藉由取得如此適當分割且拍攝的影像,並進行數據處 理,可得高精細的影像,且可大幅的降低此等的設備負擔。 其次,於寬幅方向上放大已拍攝的影像。 由於透鏡像差之影響在光轴附近較小,且沿著半徑方向顯示 出,所以本來蛇行寬幅小,經過光軸附近且沿著半徑方向予以拍 攝的金屬係線之影像即使僅放大寬幅方向,其影響亦小。 此外,藉由僅放大寬幅方向,且二維曲線之蛇行寬幅經予放 大而使測定成為容易。 取得如此而得的影像數據,予以2値化成二維曲線,而作為 本發明之縣的極細線,由於光之繞射或亂卿原_使拍攝影 像之輪廓較易成為不鮮明,保制狀的抑2值化及其影響使線 之輪廓不清楚的位置雖有不賴’但藉由於寬幅方向放大且使線 L成為固疋値以上,可予減少於轉換成二維曲線之際的誤差發生 率。 金屬細線之二維變形,係歸因於拉線加工或熱處理等加工時 的各種經歷,由於此等錯綜而生成的,所以於不連續的要短曲間, 僅月b把握其—部分而已。然而,若沿某種程度之長度觀察時,則 此等的變形以各種的組合,或朝著長轴方向變形而約略全部顯現 15 200825370 出0 因此 捲線哭解門時^^之判定條件的供試體之長度,具體而言係由 ===金屬細線之婉蜓程度予以妓的,但經驗上其長 線獅定’但若是約為Mon程度即以足夠。 予分割的區分以相互重複為宜。於重複的位置因可 相互連接各_分触。峨崎用上終職。Therefore, the buckling with the smallest radius of curvature that has the greatest influence on the above-mentioned _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ If the snake line that has the smallest scale radius is equal to the length of the curve corresponding to the curvature to be evaluated and measured, the image of the week/month or curvature that is larger than the interval is discarded. The dumping is detectable with a snake width equivalent to such a small curvature. As for the relationship, the outline of the serpentine technique is measured on the two-dimensional serpentine line which is based on the image of the test piece, and the meandering state of the mold side 2 is shown in Fig. 3. The two-dimensional curves of Fig. 3' are divided into sections of (4), ..., di d3, and the division ranges of these are partially repeated. The thin line with good straightness, which is also small, or the arc-shaped connecting line, is as shown in (a). Even if it is divided into 10 points, the width of the snake is smaller. Bu Ruo (b), (c) The curve is a wrinkled long snake line, 13 200825370 is divided into a ride, and _ is divided into lengths, so that "婉蜒" or The amplitude of the "arc connection" can be eliminated. The period of the "squeaky" or "arc connection", or the smaller the segmentation length, the smaller the radius becomes. Relative to this period of 'buckling' is as short as (4), the radius of curvature is small and short, and the length of the segmentation is longer than that of the county lion or the fresh worm. The appropriate number of sub-ship thieves refers to the length of the thin wire of the metal wire or the welding wire (the length of the welding wire by the capillary crimping (4) welding wire. That is, the welding wire that has been welded is perpendicular to the vertical direction. Even if the plane length of the observation is the same, if the height of the arcuate connecting line becomes high, the length of the arc-shaped connecting line becomes long. The same applies hereinafter, the sampling method of the arc-shaped connecting line with the height of the arc-shaped connecting line, and the like The length of the test piece is not different from that of the sample, but the difference is usually equal to the difference between the fresh metal and the thin wire of the metal wire (4). If the arc connection is 2 to 25 times, the degree is such that The value of a snake with a short radius of curvature is determined to be a large snake line. Riding, if it is 15 times the length of the _ _ _ length, then the practical conditions can be compared directly, it is more appropriate. In addition, the U's respect for the law is the line that obtains the captured image and is processed by the computer. Although the n-dimensional curve is divided into the length of the arc-shaped escape money that has been welded in response to the welding line, the defeat is too complicated. However, by taking a bite as described above, the high-definition image required for measuring the degree of serpentine between the tens of thousands of diameters of the county (4), which is the diameter of her, is determined by the image processing capability of the shooting machine. The accuracy required. //In the following very fine shots of the 200825370 line, since the smaller buckling of the almost straight line can be grasped, the magnified image of the magnified image becomes necessary, but the image is commensurate with the image. The shooting machine of Yuan is more difficult, and the cost burden is also large. Therefore, by obtaining an image which is appropriately divided and captured, and performing data processing, a high-definition image can be obtained, and the burden on the device can be greatly reduced. Second, the captured image is enlarged in the wide direction. Since the influence of the lens aberration is small in the vicinity of the optical axis and is displayed along the radial direction, the original snake line is small in width, and the image of the metal line that is photographed near the optical axis and taken along the radial direction is enlarged only by the wide width. Direction, its impact is also small. Further, the measurement is facilitated by merely enlarging the wide direction and the meandering width of the two-dimensional curve is enlarged. Obtaining the image data thus obtained and converting it into a two-dimensional curve, and as a very thin line of the county of the present invention, the outline of the captured image is relatively unclear due to the diffraction of light or the original image of the image. The deconstantization and its influence make the position of the line unclear, although it is not bad, but by increasing the width direction and making the line L more solid, it can be reduced to the error when it is converted into a two-dimensional curve. rate. The two-dimensional deformation of the thin metal wire is caused by various intricacies in the processing such as wire drawing or heat treatment, and therefore it is generated by the inconsistency of the short curve, and only the month b is grasped. However, if observed along a certain length, the deformations are deformed in various combinations or in the direction of the long axis, and approximately all of them appear. The length of the test piece, specifically, is determined by the degree of === metal thin line, but it is empirically long-term lion's, but if it is about Mon, it is enough. The division of the division is preferably repeated with each other. In the repeated position, each _ tap can be connected to each other. Shinozaki used the final job.

至於叙對象之金屬細線,以〇. 007~0.1腿’尤其〇. 015 〜0·025麵之線㈣宜。線徑若成為較1麵為粗時,則因線材本身 具有剛!·生故會由於接合時線材之内在的缺陷為其剛性所遮蔽 的反之若過、、、田成較〇, 〇〇7mm細時,則因極細線較難處理所致。 以下’參閱咖並再進—步具體的說明予本發财騎測定方 法及測定裝置。 第-圖係表林發明之败m實施雜者,财賴號7 係經予垂下朗定長度的供試體金屬細線、12係拍攝裝置、13係 &像處理衣置、14係監視器、1〇係供阻止氣流之影響而用的防風 罩蓋、11係觀測窗、3係捲取金屬細線的捲線器、18係導環。 金屬細線支掊丰| 已捲繞的金屬細線的捲線器3,係經予可旋轉的支持於罩蓋上 200825370 部,抽出金屬細線成指定的長度並予垂下。 一右於此狀恶日守,由於此等的極細線徑之金屬細線受氣流的影 響會搖晃,所以於圍繞金屬細線之防風罩蓋内垂下並通過觀測窗 予以攝影,但藉由通職小線徑的雜導環垂下金屬細線,可防 止細線之搖晃,同時可正確的配置其位置於攝影裝i之視野中心。 於導環由於使金屬細線之平滑性提高,故以氧化絡、氧化欽、 碳化鎢等被覆而事先製成2〜3層之線圈狀者為宜。 攝影條件係為清晰的取得金屬細線之攝影影像,於背景上配 置對比較大的黑㈣等的平面,藉好之平行的拍攝面予以攝 影成二維影像。此時,由各個方向直接照明金屬細線並需製成不 成為由陰影或反射光而得之斷續影像。 於習用的照明方法’來自由光源所照射的金屬細線7之反射 光因可予觀測,故藉由金屬細線7魏射會使金屬細線7之亮度 •產生分散性’欲均勻的捕捉金屬細線7整體的影像則有困難。 相對於此,若於背光照明為背景予以攝影時,則金屬細線7 因阻斷直接光’故僅金屬細線7維較小的輪摩可予觀察。因此即 使於金屬細線7上有鲜較顿料,由於未有背光之繞射光的 影響引起祕射,故金屬細線7大致可予均勾的被暗暗的觀察出。 ^ 摄髮^置 〇 至於二維之攝影裝置12則可朗市麵數位照相機。至於數 17 200825370 位照相機,舉例有GmiOn股份有限公·造的「3D數位精細視野 VC4500」、日本吉恩斯(KEYENCE)股份有限公司製造的「數位肋 微視野¥11-7000」、朽腿公司製造的「1^1細116〇亂」、組咖 Publisher公司製造的「5.〇 RTV」、或―如公司製造的「」 系列EOS Kiss」專。金屬細線7之前端部分由於遭受裁斷而引 起的變形’所以視必要相於離财端岐間隔驗置上拍攝金 屬細線為宜。 測定範圍係如前述般’因麟縣置之精細度,將經予垂下 的金屬細祕體分贼錄_分似姆。藉由各經予分割的 區分相互重疊’於重複位置相互連接各個的區分並可使具有連續 性。重複她在20〜70%係較實用的。 、 影像處理裝詈 以攝影裝置12拍攝的影像,係藉由影像處理裝置13,使金屬 細線7之絲方向的倍率储雜的,而橫向的倍率宜為3〜洲 倍,例如放大至10倍。金屬細線7之放大觸及倍率,係邊觀察 監視器裝置14,例如於5mm〜50mm之任意範圍邊適當選擇拉出成 300誦〜1000麵之金屬細線並可予放大。 對已放大的影像進行2值化。2值化之方法,不僅對 線 及背景之濃淡差的光之繞騎統射等制㈣的不連續影像, 藉由可瘤略成為臨界值(thresh〇ld她6)以下者等之方法,對 線徑7卵贿的金屬細_刺定。料,由於金屬細線及背景 18 200825370 間的界線並枝晰科可連键得2值化數據的情形,以直 迴歸曲線連接妓白部分’可極力的齡2值化之_誤差。為 得此等連續麟_的技巧,所謂數位元元元元元影像數據之處 理法係廣為人知的。若能適當採时售的軟體時即可,故在此省 略其技巧之說明。 其火由已2值化影像藉由電腦求取假想的中心曲線。即使為 孟屬、、、田線之外周與μ景間的界線不清_ 2值化數據,已放大掃 向之倍率的金屬細線之影像目係以較粗的曲線表示,其不受外周 部分之影響(鋸鮮的不連續性),可得以高精確度平滑狀中心曲 線。此曲線為假想的蛇行曲線。相對於此,對不放大橫向之倍率 的情形’由於其外周部分的不連雜之影響可予大大的表示成假 想的蛇行鱗,故未能去除2值化之際的誤差。因此,即成為需 要焦點深度較深的價昂的透鏡或可進行複_解析計算之價昂的 軟體。 ^ Ρ ' 由所得的假想的蛇行曲線,以蛇行之已放大的曲率及數量, 蛇行之已放大的寬幅及已放大的蛇行寬幅等作為參數,可測定出 蛇行之程度,藉由此等之經予數值化的數據,可對比實際之銲接 線接合時經予結線的金屬細線之不良,例如歸因於半導體裝置用 之連接銲接線的微細彎曲或所謂測平的金屬細線之真直性的不 良。 至於測定對象之金屬細線7,係長度約10〇cm,線徑 19 200825370 〇· 015〜〇· 〇25ffim ’作為此測定對象之輕長度職線徑而異但為 4確度良好的相上:4的二維之變化,對線徑較大的情形,以設 壯述祕之長度為宜。料,對線錄小的情形,金屬細線7 之際測長度即使為約30αη,對線徑之長徑比大至3χΐ〇4〜3χ_ 度,亦可充分的把握上述的蛇行特性。 第四圖係取出拉線金屬細線之拍攝影像作為二維曲線,再對 比二維曲線的每—個已區分成指定_定區分長度之區分表示出 • 求取蛇行寬幅之膜式圖。 此等的區分區間cl〜cl6係保持著連續性,為提高測定精確度 可使各自重複著。 此等的蛇行寬幅之測定技巧,曾經被提出各種方法,例如圖5 (a) (b)所示的方法則係較通常的。 (a) 首先,描繪出連接區分區間之區分位置的線材之上下 端的線作為中心線,拉出平行於該中心線的二根直線挟持著 鲁 蛇行曲線,求取其間隔距離。 (b) 或自該區間之蛇行曲線以最小自乘法求取於區分區 間之中心線,以下同法亦可拉出挾持蛇行曲線之二條平行線。 接著,對每一個區間進行此等的操作,比較該等數值並求取 最大值。 i施例 以線徑25ym,純度99. 99質量%以上的金(Au)線銲接線作 20 200825370 為供試線,以全長30cm為測定範圍,對以上述方式而得的二維曲 線,以0· 5cm、2cm、5cm及15cm區分蛇行範圍内,於此等的每一 麵分_,對已啦_行歧财(錄連接_狀係弧狀 連接線長度為2· 56麵。)關係測定時,而得表〗之數據。 在此,蛇行度係於各區間關用最小方差法求取巾心線,描 繪二條平行線使平行於此中心線且挾持著曲線之二條直線的寬幅 成為最小般,以此平行線之間隔、蛇行寬度維蛇行度,單位為麵。 二維曲線整體的蛇行度測定’為避免由裁斷鲜接線而引起的 誤差,自銲接線之下端隔離腕之距離且由該位置固定領域成 1獲區間為5〇%。蛇行度係在此測定領域内,決定任意的 區分區間長度’由平均值整所得的多數_之蛇行寬幅並求 出。然^,若較短的設定區分區間時,則整體的數據數量增加。 因里^ ’但有數個蛇行的情形’由平均值處理即較不顯著。 由./下述#方式鱗’由全部數據依蛇行寬幅較高的順序 知米用僅1/3的平均值’作為求取的蛇行度。此外,修整蛇行度 用即可亦可斟酌分散性等進行多種考量’視必要時若能適當採 的^ ’對測定領域(cm): L ’區分區間㈤:κ,若以重複 u為X時’職於測定領域L之重複數為η, (n-1) 0.5W/2 (n+l)> 右予解出時,則於測定領域之區間數, 21 200825370 總數據數量(個)·· n= (L/K) + (L-K) /Κ) 由此等數據之中,若採用上位1/3時,則成如下所示。 有效數據數量(個):依蛇行寬幅之較高的順序, {(L/K) + ((L-κ) + ((l-K) /Κ)} /3 (個) (例)因此’若依上述的例子時,則由L=3Qem,㈣—, 總數據數#(個):=(30/0.5) + (3㈣.5)/〇 5)·=ιΐ9 (個) 有效數據數量:依蛇行寬幅之較Μ順序,即成為4〇個。 • 於本實施例’重複進行此測定W次,由蛇行度較大者採用5 個之值,並表示其平均值於表1。 22 200825370 表i區分寬幅別的蛇行度與測平間的關係As for the thin metal wire of the object, 〇. 007~0.1 leg' is especially 〇. 015 ~0·025 face line (four) is appropriate. If the wire diameter is thicker than the one surface, the wire itself has a rigid shape. The original wire rod is covered by the rigidity of the wire, and the wire is covered by the rigidity. When it is fine, it is difficult to handle due to extremely thin lines. The following is a detailed description of the coffee and the measurement method. The first picture is a disintegration of the invention of the table, and the No. 7 is a thin metal wire, a 12-series camera, a 13-series & image processing clothes, and a 14-series monitor. 1) is a windshield cover for preventing the influence of airflow, an 11-series observation window, a 3rd wire reel for winding a thin metal wire, and an 18-series guide ring. The thin wire of the metal wire is wound up | The winder 3 of the wound metal wire is rotatably supported on the cover of the 200825370 part, and the thin metal wire is drawn to a specified length and suspended. On the right side of this day, the fine metal wire of these extremely thin wires will be shaken by the influence of the airflow, so it hangs down inside the windshield cover around the thin metal wire and is photographed through the observation window, but through the small office The wire diameter of the miscellaneous guide ring hangs down the thin metal wire to prevent the fine wire from shaking, and at the same time, it can correctly position its position in the center of the field of view of the photographic device. In order to improve the smoothness of the fine metal wires, it is preferable to form a coil of 2 to 3 layers in advance by coating with oxide, oxidized, tungsten carbide or the like. The photographic conditions are clear to obtain a photographic image of a thin metal line, and a relatively large black (four) plane is arranged on the background, and the parallel shooting surface is used to capture a two-dimensional image. At this time, the thin metal wires are directly illuminated by the respective directions and are required to be made into intermittent images which are not caused by shadows or reflected light. In the conventional illumination method, the reflected light from the thin metal wire 7 irradiated by the light source is observable, so that the fineness of the thin metal wire 7 by the fine metal wire 7 causes the dispersion of the fine metal wire 7 to be uniformly dispersed. The overall image is difficult. On the other hand, when the backlight is photographed as a background, the thin metal wires 7 can be observed by blocking the direct light. Therefore, even if there is a fresh material on the thin metal wire 7, since the secret light is not caused by the influence of the diffracted light of the backlight, the thin metal wire 7 can be almost dullly observed. ^ 摄发^置 〇 As for the two-dimensional camera 12, the camera is a digital camera. As for the number of 2008, the 25,25,370 cameras, the "3D digital fine vision VC4500" made by GmiOn Co., Ltd., and the "digital rib micro-view ¥11-7000" manufactured by Japan KEYENCE Co., Ltd. The "1^1fine 116 mess" manufactured by the company, the "5.〇RTV" manufactured by the Publishers, or the "EOS Kiss" series made by the company. The front end portion of the thin metal wire 7 is deformed due to the cutting, so it is preferable to take a metal thin wire at a time interval from the financial position. The measurement range is as described above. Due to the fineness of the Injun County, the metal secrets that have been suspended are recorded as thieves. By distinguishing each of the divided divisions, each of the divisions is connected to each other at the repeated position and can be made continuous. Repeating her in 20~70% is more practical. The image processing device mounts the image captured by the photographing device 12 by the image processing device 13 to store the magnification of the metal thin wire 7 in the direction of the wire, and the lateral magnification is preferably 3 to 3,000 times, for example, up to 10 times. . The magnification of the metal thin wires 7 is in contact with the magnification, and the monitor device 14 is appropriately selected, for example, in a range of 5 mm to 50 mm, and the metal thin wires of 300 to 1000 faces are appropriately selected and enlarged. Binarize the enlarged image. The method of binarization is not only for the discontinuous image of the light and the background of the line and the background of the light, but also by the method of the tumor (thresh〇ld her 6). The metal fine _ stabbed on the wire diameter 7 egg bribe. According to the case where the thin line between the metal thin line and the background 18 200825370 can be binarized, the straight-forward curve can be used to connect the white portion to the error of the age of 2. In order to obtain the skills of such continuous lining, the so-called digital elementary image data is well known. If the software sold at the time can be properly taken, the explanation of the technique is omitted here. The fire is calculated from the binarized image by the computer to obtain the imaginary central curve. Even if the boundary between the outer circumference of the Meng, the, and the field lines and the μ scene is unclear _ 2 valued data, the image of the thin metal line that has been enlarged to the magnification is expressed by a thicker curve, which is not affected by the outer peripheral portion. The effect (slipping discontinuity) allows for a highly accurate smooth center curve. This curve is an imaginary meandering curve. On the other hand, in the case where the lateral magnification is not enlarged, the influence of the non-mixing of the outer peripheral portion can be largely expressed as an imaginary meandering scale, so that the error at the time of binarization cannot be removed. Therefore, it becomes a lens that requires a deeper depth of focus or a software that can perform complex analytic calculations. ^ Ρ ' From the resulting imaginary meandering curve, the enlarged curvature and number of the snake line, the enlarged width of the snake line and the enlarged width of the snake line can be used as parameters to determine the degree of the snake line. The numerical data can be compared with the defects of the metal wires that are pre-bonded during the actual bonding of the bonding wires, for example, due to the microbending of the bonding wires for the semiconductor device or the so-called flatness of the metal wires. bad. As for the thin metal wire 7 of the measurement object, the length is about 10 〇cm, and the wire diameter is 19 200825370 〇· 015~〇· 〇25ffim 'The light length of the measurement target is different but the accuracy is 4: 4 The change of two-dimensional, in the case of a large diameter, it is advisable to set the length of the secret. In the case where the line number is small, even if the length of the thin metal wire 7 is about 30αη, the aspect ratio of the wire diameter is as large as 3χΐ〇4~3χ_degree, and the above-mentioned meandering characteristics can be sufficiently grasped. The fourth figure is to take out the captured image of the thin metal wire as a two-dimensional curve, and then compare the difference between each of the two-dimensional curves into a specified length. • Find a film pattern of the snake width. These division intervals cl to cl6 maintain continuity, and each of them can be repeated for the purpose of improving measurement accuracy. These techniques for measuring the width of snakes have been proposed in various ways, such as the method shown in Figure 5 (a) (b). (a) First, the line above the upper end of the wire connecting the distinguishing sections is taken as the center line, and the two straight lines parallel to the center line are pulled to hold the arc-like curve, and the distance is determined. (b) Or the meandering curve from the interval is obtained by the minimum self-multiplication method from the center line between the zones. The following method can also pull out two parallel lines that hold the meandering curve. Next, perform such operations on each of the intervals, compare the values, and find the maximum value. i The example is a gold (Au) wire bonding wire with a wire diameter of 25 μm and a purity of 99.99 mass% or more as a test line, with a total length of 30 cm as a measurement range, and a two-dimensional curve obtained in the above manner. 0·5cm, 2cm, 5cm, and 15cm are distinguished within the scope of the snake, and each of these faces is divided into _, which is already _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ When measuring, the data of the table is obtained. Here, the serpentine degree is determined by the minimum variance method in each interval, and the two parallel lines are drawn so that the width of the two straight lines parallel to the center line and holding the curve is minimized, and the parallel lines are spaced apart. , snake line width dimension, the unit is face. The measurement of the serpentine degree of the whole two-dimensional curve is to avoid the error caused by the cutting of the fresh wiring, and the distance from the lower end of the welding line is separated from the wrist and the area obtained by the fixed position is 5〇%. In the field of measurement, the degree of serpentine is determined by arbitrarily distinguishing the length of the interval from the mean value of the majority of the snakes. However, if the shorter setting distinguishes the interval, the total amount of data increases. The case where there is a few snakes in the case of '^' is less significant when processed by the average value. From the ./the following #式 scales, all the data are in the order of the higher width of the snake line, and the mean value of only 1/3 is used as the obtained meandering degree. In addition, the degree of serpentine can be used for various considerations, such as dispersibility, etc. If appropriate, the appropriate measurement can be made in the field of measurement (cm): L 'distance interval (five): κ, if repeating u is X 'The number of repetitions in the measurement field L is η, (n-1) 0.5W/2 (n+l)> When the solution is solved right, the number of intervals in the measurement field, 21 200825370 Total number of data (number) ·· n= (L/K) + (LK) /Κ) If the upper level is 1/3 of the data, the following is displayed. The number of valid data (units): In the order of the width of the snake line, {(L/K) + ((L-κ) + ((lK) /Κ)} /3 (pieces) (example) According to the above example, by L = 3Qem, (four) -, the total number of data # (): = (30 / 0.5) + (3 (four). 5) / 〇 5) · = ΐ ΐ 9 (number) The number of valid data: The order of the width of the snake line is 4 〇. • This measurement was repeated W times in this example, and the values of the snakes were larger by five, and the average value thereof is shown in Table 1. 22 200825370 Table i distinguishes the relationship between the width of snakes and the leveling

編號 測平 根數 氺 區分寬幅〇. 5cm 之蛇行度(mm) 區分寬幅2cm 之蛇行度(_) 區分寬幅5cm 之蛇行度(醒) 區分寬幅15cm 之蛇行度(画) 1 0 0.03 0.03 0. 06 0.41 2 1 0.02 0. 03 0.15 0.76 3 1 0.02 0. 04 0.12 0.44 4 0 0. 03 0. 04 0.11 0. 37 5 3 0.06 0.15 0.31 1.09 6 0 0.04 0.05 0.11 0.51 7 1 0. 03 0.06 0.12 0. 66 8 4 0. 05 0.06 0. 22 0. 98 9 2 0.03 0.07 0.21 0.81 10 4 0.06 0.09 0. 29 1.13 11 5 0. 04 0.08 0.15 0. 63 12 3 0. 03 0. 08 0.20 0. 87 13 1 0. 03 0· 10 0. 24 0.74 14 10 0. 03 0.09 0.18 0. 55 15 9 0.03 0,09 0.26 L02 16 3 0. 05 0.13 0.31 L00 17 16 0. 03 0.10 0. 24 0. 74 18 7 0. 03 0.11 0. 22 0. 75 19 15 0.06 0.11 0.27 0.83 20 12 0.06 0.12 0. 30 0. 95 _21_^ 15 0.05 0.12 0. 27 0.87 22 10 0.05 0.12 0. 33 1.03 23 24 0. 05 0.13 0. 27 0.91 24 2 0. 05 0.13 0.32 1.27 25 ——-- 14 0.06 0.14 0.32 1.13 26 10 0. 05 0.14 0. 38 1.40 27 ---—-- 27 0. 06 0.15 0.30 1.03 28 24 0. 06 0.15 0.31 1.10 29 18 0. 04 0.14 0,31 0. 97 30 15 — 0. 07 0.16 0. 46 1.79 31 22 0. 07 0.17 0. 38 1.28 32 — _26^ 0.07 0,17 0. 37 1.39 *採用新川股份有限公司製造的銲接器(UTC-400),以閒距間隔 53/zm,銲接1,500次時,計數相鄰銲接線接觸的銲接線之根數。 23 200825370 1圖、第六圖之區分區間 /根數表示於第六-1圖、第 表1之關係係於以區分成第六 的長度,以蛇行度及測平接觸數量 六-2圖上。Number of flattened roots 氺 Distinguish wide 〇. 5cm serpentine (mm) Distinguish between 2cm wide serpentine (_) Distinguish between wide 5cm serpentine (wake) Distinguish between wide 15cm serpentine (painting) 1 0 0.03 0.03 0. 06 0.41 2 1 0.02 0. 03 0.15 0.76 3 1 0.02 0. 04 0.12 0.44 4 0 0. 03 0. 04 0.11 0. 37 5 3 0.06 0.15 0.31 1.09 6 0 0.04 0.05 0.11 0.51 7 1 0. 03 0.06 0.12 0. 66 8 4 0. 05 0.06 0. 22 0. 98 9 2 0.03 0.07 0.21 0.81 10 4 0.06 0.09 0. 29 1.13 11 5 0. 04 0.08 0.15 0. 63 12 3 0. 03 0. 08 0.20 0. 87 13 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0. 74 18 7 0. 03 0.11 0. 22 0. 75 19 15 0.06 0.11 0.27 0.83 20 12 0.06 0.12 0. 30 0. 95 _21_^ 15 0.05 0.12 0. 27 0.87 22 10 0.05 0.12 0. 33 1.03 23 24 0. 05 0.13 0. 27 0.91 24 2 0. 05 0.13 0.32 1.27 25 —————— 14 0.06 0.14 0.32 1.13 26 10 0. 05 0.14 0. 38 1.40 27 ------ 27 0. 06 0.15 0.30 1.03 28 24 0. 06 0.15 0.31 1.10 29 18 0. 04 0.14 0,31 0. 97 30 1 5 — 0. 07 0.16 0. 46 1.79 31 22 0. 07 0.17 0. 38 1.28 32 — _26^ 0.07 0,17 0. 37 1.39 *Use the welding device (UTC-400) manufactured by Shinkawa Co., Ltd. When the distance is 53/zm and the welding is 1,500 times, the number of welding lines contacting the adjacent welding lines is counted. 23 200825370 The difference between the interval and the number of the first and sixth graphs is shown in the sixth-1, and the relationship between the first and the first is based on the length of the sixth, with the degree of serpentine and the number of levels of contact on the six-2 graph. .

予以數值化,將求取相關關係之結果表示於表2。 亦即,於蛇行度及測平數之間有固定的關係存在,即使在 蛇行测定區分區間為0· 5、2· 5及15cm之任—範圍,蛇行度愈 大時則蛇行愈不良,此_行度麵分㈣於弧狀連接線長度 2.56咖之附近’可知制料㈣之_義㈣。為將此值 £2測平與蛇行度對蛇行度區,狀度之相關關係Numerically, the results of the correlation are shown in Table 2. That is to say, there is a fixed relationship between the serpentine degree and the level of the flatness. Even in the range where the meandering measurement interval is 0·5, 2·5, and 15 cm, the larger the serpentine degree, the worse the snake behavior. _ line degree surface (four) in the vicinity of the arc connecting line length of 2.56 coffee 'known to the material (four) _ meaning (four). In order to measure the value of £2 and the degree of serpentine on the serpentine degree, the correlation between the degree

亦即’於蛇行度啦區分_長度及财方面被認為有相 關關係,使區分區間變化可確認相關的傾向呈現變化。 在此,相關係(Γ)係若將測平根數設為χ,蛇行度設 為 y 時,則以 r=Sxy/ (Sx.Sy) 1/2表示。 其中,Sx=Exi2— (Sxi) 2/n、In other words, it is considered that there is a correlation between the length of the snake and the length of the money, and the change in the interval can confirm that the related tendency changes. Here, the phase relationship (Γ) is expressed as r = Sxy / (Sx.Sy) 1/2 if the number of levels is set to χ and the degree of snake is set to y. Where Sx=Exi2—(Sxi) 2/n,

Sy=Eyi2- (Zyi) 2/n ^Sy=Eyi2- (Zyi) 2/n ^

Sxy^Zxiyi^ (Σχΐ) (Syi) /n 〇 此外,0.5on之區分區間的總數據數量,如上述般設為 24 200825370 119個,於2cm、5cm及I5cm,則各為29、u及3個。 由此結果’相_數以以上表示成◎,Q.6〜G 7表示 成〇,0. M). 6表示成Δ,未滿Q. 5表示成—時則可知此二 區分區間以◎最麵表示出蛇行度與測平之關係,q. ^及— 之區分區_〇良好的表示出相關關係。Sxy^Zxiyi^ (Σχΐ) (Syi) /n 〇 In addition, the total number of data in the 0.5on section is set to 24 200825370 119 as described above, and 29, u and 3 at 2cm, 5cm and I5cm. One. As a result, the 'phase number is expressed as ◎, and Q.6 to G7 are expressed as 〇, 0. M). 6 is expressed as Δ, and less than Q. 5 is expressed as - when it is known that the second interval is ◎ The most representative of the relationship between serpentine and leveling, q. ^ and - the district partition _ 〇 good indicates the correlation.

由表2,於銲接線線徑25„且弧狀連接線長度& 67醜之 情形,蛇行度區分區間之長度為2cm時,被認為蛇行度與測平 方面有車乂強的相關關係。另一方面,銲接線線徑與弧狀連接線 j因蛇行及測平有影響,故最義蛇行區分區職被預想成 隨銲接線雜及錄連接線長度而變化。 弧狀連接線線徑若變大時,則蛇行區分區間之曲率半徑變 大,平均而言銲接線蛇行之週期變大。因此,蛇行區分區間之 紐以已較_的-_。料,弧狀連接_若變短 ^則週輸短_行_平的影響變高。因此,以將蛇行度 ^刀區門之長度較短叹定的一者為佳。為使此等關係清楚,如 表3般各自改贿接、魏魏錄雜線長狀組合,採用各 自32個捲線器對已成水準的試樣,進行評估。 首先’對4水準之各自32鶴線器,固定蛇行之測定範圍 為3〇〇n、於0. -、2cm、5cm、細、_區分所得的二維曲 線之範_,測定已與各_分_目對應的蛇行度。 對4水準之各自32個捲線器,測定測平。最後,求 25 200825370 取蛇行度與測平之相關關係,以下述的基準為準,彙整結果於 表3。 且,相關係數:◎SO. 7,0· 7^〇2〇· 6,〇. 6> △ >〇. 4, 0.4^ — 表3 /則平及蛇行度對弧狀連接線長度及區分區間寬幅之相關關係 相關係數 區分區間寬幅 (cm) 弧狀連接線長度 (mm) 線徑 (βϊΆ) 〇 0.5 2.67 15 〇 2 2. 67 〇 5 2. 67 — 15 2. 67 — 30 2.67 〇 0.5 4 ◎ 2 4 〇 5 4 一 15 4 一 30 4 〇 0.5 2. 67 25 ◎ 2 2. 67 ◎ 5 2· 67 Δ 15 2,67 △ 30 2· 67 〇 0.5 4 ◎ 2 4 ◎ l· 5 4 〇 15 4 △ 30 4 由以上的結果,測平並不與15_〜25/zm之銲絲的線徑有 關’蛇行度愈大,測平魏不良愈多,但測平不良之程度係與使 用的線材之長度,亦即弧狀連接線長度間有相關關係,藉由於孤 狀連接線長度之2〜25倍的區分區間評估蛇行度,可最適當正破的 判疋測平之良好與否,可之測定精確度提高。 26 200825370 真直性,可適當且簡單迅速的進行真直性之良·不良的評估。 【圖式簡單說明】 因此,於使用經予拉線加工的金屬細線作為鲜接線之前,取 得金屬細線之拍攝影像,評估作為二維曲線,球v使用的銲接線 長度、弧狀連接線長度之2〜25倍的每-區分區間之蛇行度並_ 第-圖係模式的表示出本發明之測定裝置整體的構成圖。 第二圖係表示拉線金屬細線之4種代表性蛇行曲線。 φ 苐二圖係拉線金屬細線之蛇行曲率與蛇行度的關係。 第四圖係表示於本發明之金屬細線的蛇行寬幅測定方法。 第五圖係表示於金屬細線之蛇行測定法的說明圖。 第六圖細表示於蛇行測定區間0 5cm (A)及2cm (B)之蛇行 - 度與測平不良間的相關關係圖。 第七圖係表示於蛇行測定區間5cm (A)及15cm (β)之蛇疒 度與測平不良間的相關關係圖。 • 【主要元件符號說明】 3金屬細線捲線器 7金屬細線 10防風用罩蓋 11測定窗 Μ 12拍攝裝置 13影像處理裝置 27 200825370 14監視器 18導環From Table 2, in the case where the welding wire diameter is 25 „ and the arc connecting line length & 67 is ugly, the length of the serpentine section is 2 cm, and it is considered that the degree of serpentine has a reluctant correlation with the leveling. On the other hand, the weld line diameter and the arc connection line j have an influence on the meandering and leveling, so the divisional position of the most appropriate snake area is expected to vary with the length of the welding line and the length of the recorded connecting line. If it becomes larger, the radius of curvature of the meandering interval becomes larger, and on average, the period of the weld line is larger. Therefore, the knot of the snake line is more than the __. ^The effect of weekly short _ _ _ flat becomes higher. Therefore, it is better to sigh the length of the snake knives and the length of the knives. To make these relationships clear, change the bribes as shown in Table 3. The long-distance combination of the Weiwei and Weiwei recording lines is evaluated by the respective 32 reelers for the leveled samples. First of all, the measurement range of the fixed snakes is 3 〇〇n for each of the 4 levels. , in 0. -, 2cm, 5cm, fine, _ distinguish the resulting two-dimensional curve _, measured with each _ The degree of serpentine corresponding to the _ target is measured. For each of the 32 reelers of the 4 levels, the leveling is measured. Finally, the correlation between the snake sling and the leveling is determined according to the following criteria, and the results are summarized in Table 3. And, the correlation coefficient: ◎SO. 7,0· 7^〇2〇· 6,〇. 6> △ >〇. 4, 0.4^ — Table 3 / then the level of the snake and the length of the arc connecting line and the distinction Interval width correlation correlation coefficient division interval width (cm) arc connection length (mm) wire diameter (βϊΆ) 〇0.5 2.67 15 〇2 2. 67 〇5 2. 67 — 15 2. 67 — 30 2.67 〇0.5 4 ◎ 2 4 〇5 4 - 15 4 - 30 4 〇 0.5 2. 67 25 ◎ 2 2. 67 ◎ 5 2· 67 Δ 15 2,67 △ 30 2· 67 〇0.5 4 ◎ 2 4 ◎ l· 5 4 〇15 4 △ 30 4 From the above results, the leveling is not related to the wire diameter of the wire of 15_~25/zm. 'The larger the snake's degree, the more bad the flatness is, but the degree of badness is flat. There is a correlation between the length of the wire used, that is, the length of the arc connecting line, and the degree of serpentine is estimated by the interval of 2 to 25 times the length of the lone connecting line. If the appropriate judgment is good or not, the accuracy of the measurement can be improved. 26 200825370 True straightness, the evaluation of the integrity and the badness can be carried out appropriately and simply. [Simplified illustration] Therefore, Before using the thin metal wire processed by the pre-wire as the fresh wire, obtain the image of the thin metal wire, and evaluate the length of the welding wire used as the two-dimensional curve, the length of the welding wire and the length of the arc connecting wire 2 to 25 times. The degree of serpentine _ in the first-picture mode shows the overall configuration of the measuring apparatus of the present invention. The second figure shows four representative meandering curves of the thin metal wires. The relationship between the meandering curvature and the meandering degree of the thin metal wire of φ 苐 图. The fourth figure shows a method for measuring the width of a serpentine line of the metal thin wire of the present invention. The fifth drawing is an explanatory view showing a meandering measurement method of a thin metal wire. The sixth figure shows the correlation between the meandering degree and the leveling failure in the measurement range of 0 5 cm (A) and 2 cm (B) in the meandering range. The seventh graph shows the correlation between the snake mites at 5 cm (A) and 15 cm (β) in the serpentine measurement interval and the leveling failure. • [Main component symbol description] 3 Metal thin wire reel 7 Thin metal wire 10 Windproof cover 11 Measurement window Μ 12 Camera 13 Image processing device 27 200825370 14 Monitor 18 Guide ring

2828

Claims (1)

200825370 十、申請專利範圍: L 一種金屬細線之真直性的測定方法,包括: 於垂下金屬細線並自垂直方向對該金屬細線拍攝; 讀取拍攝影像作為2値數據,由該影像求取假想的中心線並予 轉換成二維連續蛇行曲線; 將該二維曲線之測定區域,以於銲(壓)接線接合時的弧狀連 接線長度之2〜25倍的多數區間予以區分,以對該經予區分的二 •、维曲線之二維曲線的每一區間評估該區線之真直性。 2. —種金屬細線之真直性的測定方法,包括·· 於垂下金屬細線並自垂直方向對該金屬細線拍攝; 讀取拍攝輯作為2錄據,倾影縣輪想財心線並予 轉換成二維連續蛇行曲線;200825370 X. Patent application scope: L A method for determining the trueness of a thin metal wire, comprising: dropping a thin metal wire and photographing the thin metal wire from a vertical direction; reading the captured image as 2値 data, and obtaining an imaginary image from the image The center line is converted into a two-dimensional continuous meandering curve; the measurement area of the two-dimensional curve is distinguished by a plurality of intervals of 2 to 25 times the length of the arc-shaped connecting line when the welding (pressure) wire is joined, to Each interval of the two-dimensional curve of the differentiated two-dimensional curve evaluates the trueness of the line. 2. The method for determining the trueness of a thin metal wire, including: · dropping the thin metal wire and taking the thin metal wire from the vertical direction; reading the film as a 2 record, the pendulum county wants the financial line and converts it Into a two-dimensional continuous meandering curve; =曲線之測定區域,以於鲜(壓)接線接合時的弧狀連 接線長度之2〜25倍的多數區間予以區分成5區間以上. 2各自的每—關之蛇行寬_大小順序,健採關定値之 +數〜十分之-的她値,評估_線之真直性。 3·㈣求項1或2所述的金屬細線之真直性的測定方法, 其中該金屬細線之真直性評估係由挟持上述的區分區間之區 區間的金屬細線之曲線的平行線間距離進行評估。 4.如明求項1至3的任—項所述的金屬細線之真直性的測定方 法,於=上述拍攝影像處理作2値數據並予轉換成二維曲 之際,於見幅方向上放大處理,採用該經予放大處理的影像 29 200825370 5·Γ==至4的任-項所述的金屬細線之输的測定方法, Λ i屬細線為〇· 015〜0· 025mm之線偟。 6. 5的任—項所述的金屬細線之真直性的測定方法, 7 -錄/ 自的二維曲線之區分11間及相鄰的區間。 •:人痛細線之真直㈣測定裝置,係軒拉線加卫的輝接線 接口用金屬細線之真直性的測定裝置,其特徵在於:由 (a)插通自捲線||垂下的金屬細線並定位的導環、 ⑻對金屬細線之垂下方向呈垂直的方向拍攝的攝影手段,及 (C)僅寬幅方向放大經予拍攝的二維蛇行影像,於銲接線_ 時之長度的2〜25倍的區間區分已求取其中心線而得的二維曲 線,對雜予區分的二維曲線之每一區間,平行於該區線之中 心線晝出挾持該二維崎之線,4取該平行線間之距離 處理裝置予以構成。 I 8·如請求項7所述的金屬細線之真直性的測定襄置, 對其中金屬細線之照明係藉由設置成背光照明予以進行。= The measurement area of the curve is divided into 5 sections or more for the interval of 2 to 25 times the length of the arc connection line when the fresh (pressure) wire is joined. 2 The respective snake width _ size order of each The + 数 + + + 〜 〜 〜 〜 〜 〜 评估 评估 评估 评估 评估 评估 评估 评估 评估 値 値 値3. The method for determining the trueness of the thin metal wire described in Item 1 or 2, wherein the straightness evaluation of the thin metal wire is evaluated by the distance between the parallel lines of the curve of the metal thin wire in the zone of the above-mentioned zone. . 4. The method for measuring the trueness of the metal thin wire according to any one of the items 1 to 3, wherein the image is processed and converted into a two-dimensional curve, in the direction of the viewing direction. For the amplification processing, the method for measuring the transmission of the thin metal wire according to any of the items of the enlarged image 29 200825370 5·Γ== to 4, Λ i is a thin line of 〇·015~0·025mm偟. 6. The method for determining the trueness of the thin metal wires described in the above-mentioned item, the 7-recorded/self-divided two-dimensional curve is distinguished by 11 and adjacent intervals. •: The straight line of the human pain line (4) Measuring device, which is a measuring device for the trueness of the thin metal wire for the glow wiring interface of the Xuan pull line, which is characterized in that: (a) the metal wire hanging from the winding wire|| The positioning guide ring, (8) the photographing means for taking the vertical direction of the metal thin line in a vertical direction, and (C) magnifying the photographed two-dimensional snake image only in the wide direction, the length of the welding line _ 2 to 25 The interval of the multiple is divided into a two-dimensional curve obtained by obtaining the center line, and each interval of the two-dimensional curve of the hybrid is parallel to the center line of the area line, and the line of the two-dimensional line is taken, 4 The distance processing device between the parallel lines is configured. I 8· The measurement of the trueness of the thin metal wires described in the claim 7 is performed by setting the illumination of the thin metal wires to be backlighted.
TW096146410A 2006-12-12 2007-12-05 Method for measurement of straightness of metallic wire and measuring equipment of same TWI348538B (en)

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