200824504 九、發明說明： 【發明所屬之技術領域】 一種有關用來清潔各種材料表面，並進一步改 善材料表面親水性的大氣壓電漿噴射裝置，本發明 尤指一種利用特殊的收容構造，以防止外來空氣的 混入，而有效延長放電電漿長度的大氣壓電漿噴射 裝置。 【先前技術】 以往的產業界，為了清潔各種材料表面及改善 其親水性都使用低壓電漿，但最近逐漸地使用大氣 壓電聚喷射裝置，請參閱日本專利特許公表第 2002-542586號公報，其係揭露一種大氣壓電漿喷 射裝置，而在一接地的導電壁與一空間内的導電壁 間，其空間内並流動有一原料氣體，經供給高周波 電力後’可激發空間内的原料氣體，產生連續的放 電電漿，由於使用大氣壓噴射電漿可提高處理速 度’而直接對材料表面進行改質的作業，且大氣壓 電水噴射裝置並不需要任何真空容器，或真空排氣 裝置使材料周圍呈現真空狀態，因此，可大幅降低 裝置的成本’且可使用如：氧氣（〇2)、氮氣（He) 或由氧氣及氮氣混合的氣料原料氣體，由於原料 氣體的取得容易’而可降低其材料成本及運轉成本。 以往的大氣壓電漿噴射裝置，在距離電衆喷射 5 200824504 嘴前端約1〜2公分處，因受到周圍氣體的混入，造 成電漿的重力喷流長度縮短’因此降低了清潔及表 面改質的效果’但是，隨著產業界大量增加使用大 氣壓電漿噴射裝置’前述大氣壓電激噴流裝置並益 法適用於表面有數公分落差的材料，且對於材料表 面改質的要求也增加’因此，達到配合這個要求， 其電漿的重力喷流長度也需要適度延長，才能增加 表面改質的範圍。 曰 【發明内容】 有鐘於以往A氣壓電聚喷射裝置噴射電漿時， 會有放電電浆長度不足，而造成表面改質效果不拿 =，本發明人要精心研究，設計了—200824504 IX. Description of the invention: [Technical field to which the invention pertains] An atmospheric piezoelectric slurry spraying device for cleaning the surface of various materials and further improving the hydrophilicity of the surface of the material, and the present invention particularly relates to a special housing structure for preventing foreign objects. An atmospheric piezoelectric slurry spraying device that mixes air and effectively extends the length of the discharge plasma. [Prior Art] In the past, the low-pressure plasma was used to clean the surface of various materials and to improve the hydrophilicity. However, the atmospheric piezoelectric poly-injection device has been gradually used recently, please refer to Japanese Patent Laid-Open Publication No. 2002-542586. The utility model discloses an atmospheric piezoelectric slurry spraying device, wherein a raw material gas flows in a space between a grounded conductive wall and a conductive wall in a space, and after supplying high-frequency power, the raw material gas in the space can be excited to generate Continuous discharge plasma, which can improve the processing speed by using atmospheric pressure jet plasma to directly modify the surface of the material, and the atmospheric piezoelectric water jet device does not need any vacuum container, or the vacuum exhaust device makes the material appear around The vacuum state, therefore, can greatly reduce the cost of the device' and can use, for example, oxygen (〇2), nitrogen (He) or a gas material gas mixed by oxygen and nitrogen, which can be lowered due to the easy acquisition of the raw material gas. Material costs and operating costs. In the past, the atmospheric piezoelectric slurry spraying device was about 1 to 2 cm away from the front end of the nozzle of the electric jet 5 200824504. Due to the mixing of the surrounding gas, the gravity jet length of the plasma was shortened, thus reducing the cleaning and surface modification. Effect 'However, with the industry increasing the use of atmospheric piezoelectric slurry spraying devices' the above-mentioned atmospheric piezoelectric laser jet device and the method is applicable to materials with a surface drop of several centimeters, and the requirements for material surface modification are also increased. For this requirement, the gravity jet length of the plasma also needs to be moderately extended to increase the range of surface modification.曰 【Contents of the Invention】 When the plasma is sprayed by the A-pneumatic electro-spraying device in the past, there will be insufficient length of the discharge plasma, and the surface modification effect will not be taken. The inventors have carefully studied and designed—
大氣壓電漿噴射裝置处 W I、、'σ構 以解決此一問題。 本發明之主要目& 匕士 n 、 、，曰在提供一種可使放電電 水長度增加的大氣壓 笔冤漿嘴射裝置，以對各種矣 凹凸不平的材料，矛面 作業。 進仃更有效率的清潔及表面改質 為達上述目的 乂 ，本發明之大氣壓電漿噴射穿 置，係使用單一的刍Μ 貝町表 的礼體種類，如：氧氣（〇2)、氧 (Ν2)或惰性氣體Γ 虱乳 體（例如··氬氣（Ar))等作為屌 氣體，或是將二種以““ ”马原枓 生化學反應的氣體、、曰人、 曰夂相發 % b而成的原料氣體，經供认 周波電力後，可由番妝 ^ …π 由電漿噴射嘴噴射出大氣壓電漿。 200824504 為了能狗防止周圍氣體的混 壓電裝喷射裝置係設計了—種收容構造，2 :壓電二喷射裝置的”噴射嘴周圍充滿原料: 體，並汉有一可排出原料 ” 電漿噴射的同時排放出 牡連轉 完全包覆收容於其内，且立站山 处材料 且其排出口所喷出的原料氣 體對外部產生正壓，以田 八 乂用來防止周圍空氣的混入， 使大氣壓電漿喰射驻g + i 贺射4置產生較長的放電電漿，因 此，其收容構造儲放的原料氣體壓力範圍，係以原 =體喷出後可形成正壓作為基準，如此一來，就 :是材料的表面上有較;罙的凹凸不平，放電電漿仍 月“氐達凹部的底部，而達到清潔及表面改質的目 =，又，以球或具有多面體形狀的處理對象物為例， 田％以大氣壓喷射電漿時，係將處理對象物包覆收 奋於本發明收容構造内，其中，較長的放電電漿可 、心到處理對象物的側面，甚至繞到背面，而對處理 對象物作更全面性，且更有效率的表面改質。 又’本發明並揭露了另一種收容構造，則是在 大氣壓電漿喷射裝置的電漿喷射嘴前端組設有一中 空官體’其中空管體及與大氣壓電漿噴射裝置的電 水喷射嘴的斷面係呈細長狀，可使大氣壓喷射電漿 的範圍變得更廣，擴展表面改質的幅度，且中空管 轉_ ' 方的開口係為導入口，用以導入放電電漿，由 於中空管體内部填充的是原料氣體，所以大氣壓噴 200824504 射電漿噴射時的強度不合多 食匕到、去 9衮減，且大氣壓噴射電轉 月匕到達的最大距離，會隨著中咖 電水 改交，因此，即使處理對象 有所 i曰人 之表面有深的凹凸沾 场合，大氣壓喷射電漿還县处私 0的 以右▲“ 水還疋旎夠到達凹部的底部， 有效進仃材料表面改質，而 ^ j, m . 友*罩另一方的開口則 u 通過的放電電漿，並有效防 止周圍氣體由電漿噴射嘴、、曰Λ搭1 防 噴出的士 w 原料氣體中，因此使 賀出的大氣壓噴射電漿增長， &釣攸， u上兩種收容構造都 勺 飞疋大軋壓噴射電漿及材料完全 ^ 里赁射電漿的長度增加，而可 對各種表面凹凸不平的姑4 _ 的材枓，進行更有效率的清潔 及表面改質作業，又，並 ^ 一 τ二官體必須與大氣壓電 漿喷射裝置緊密連接，才 才此夠更有效地防止周圍氣 “ 且在中空官體與大氣壓電漿喷射裝置間係 組设有-絕緣材料，以達到電氣絕緣的效果，而能 夠防止大氣壓電衆噴射農置中的電極，由與中空管 體接合處發生漏電的現象。 再者’本發明又揭露一種收容構造，係將一光 罩組設於大氣壓雷爿|喊 、 ％水贺射裝置電漿喷射嘴前端，用 、：覆收谷欲進仃大氣壓喷射電漿的處理對象物， /、光罩上係成型有一供大氣壓噴射電漿導入的導入 口 〃田進仃大亂壓噴射電漿時，大氣壓電漿喷射裝 置係將放f電漿喷人光軍内，並使大氣壓喷射電聚 充滿光罩内，且大氣壓噴射電漿係呈流體狀，因此， 8 200824504 就算處理對象物有較深的凹 喷射電聚㈣可以料㈣計^面其大氣屋 音省月主 逹凹I的底部，而有效地進杆 以矣心 了將處理對象物的廣面-次予 以表面改質；而，前述的光 人予 ♦ ϊ田*丨 尤罩上並成型有至少一徂 处子象物導出的出入q ，苴屮 " 一側， ，、出入口係位於光罩的 對參私山 尤罩的兩相對侧，在處理 :物出入時，不需將光罩全面開放，也不需要在 體， ^置換光罩内部的原料氣 體因而縮短了進行表面改質# # „ 叹貝的時間，其成型有二 :時，可將處理對象物由其中一側的出入口導 屮待表面改質完成後，再由光罩另一側的出入口 提高表面改質處理工程的速度；為了減少 =氣體由光罩的出入口逸出，在出入口係設有一 ::可調整出人口的開口面積，以維持光罩内的 二料氣體壓力，並有效地防止周圍氣體的混入，當 ♦理對象物出入時’也可藉由調整器加大其出入口 的開口面積’而使處理對象物容易出入。 為使貝審查委員能清楚了解本發^ μ 1 以下列說明搭配圖示，敬請參閱。 【實施方式】 實施例（一） 請參閱「第1圖」，為本發明較佳實施例（一 的構造示意圖，如圖中所示，其主要係由一大氣 200824504 電漿噴射裝置ίο及-中空管體2〇所組成，欲利用 大氣壓電聚喷射裝置10產生大氣壓噴射電漿時，係 將T :氧氣（〇2)、氮氣（n2)或惰性氣體（例如： 虱氣（Ar))等原料氣體3〇，或是將二種以上在產 生電漿時，不會互相發生化學反應的氣體混合而成 的原料氣體30,由一電漿喷射筒1〇1的上端斜向喷 入，以使原料氣體30在電漿噴射筒1〇1内產生螺旋 屬卷式轉動’接著，再使用一脈衝電源！ 〇2通入出 脈衝幅約20微秒的高電壓脈衝，而在内部電極丄 和外部電極104之間，往返放出周波數約16ΚΗζ的 電丨l平均電此約在〇 · 7〜1 Kff，最初放電是由電漿 噴射筒101上部的電極間距離最小的地方開始，且 二次脈衝放電間的時間間隔很短，前次放電所生的 放電電漿40，會有一部份到下次脈衝放電前，成為 ter-glow —plasma (發光後殘留電漿）而殘留下 來，因此，下次放電再通過after —gl⑽一phs可 =容易產生放電電漿40，但是原料氣體3〇不斷地 流動，放電電漿40也會隨著原料氣體3〇，一起移 動到下方的電漿喷射嘴1〇5前端附進行噴射，並用 以維持内部電極1〇3到電漿噴射嘴1〇5間放電電漿 4〇的安定性，由於放電是脈衝放電，其放電電流僅 發生在電漿噴射筒101内部，再透過after 〜gl〇w-plasma由電漿喷射嘴ι〇5，而噴出大氣壓喷 射電漿50，而前述的中空管體2〇係為一内徑， 10 200824504 外徑7mm，長度約6公分的不銹鋼管，中空管體 上側的開口係為導入口 201 ’其與電漿喷：嘴'。5 間係組設有一由絕緣材作成的絕緣環，中空管 體20組設於電漿噴射嘴1〇5時係保持緊密連接，且 中空管體20之下部係成型有一導出口 2〇3,供以將 放電電漿40導出，而形成大氣壓噴射電$ 5〇,其 導出口 203的斷面形狀将g ‘· 仏狀係呈如·圓形、矩形等幾何 圖形。 其使用時，以使用的原料氣體30是氮氣為例， 其原料氣冑30的流量是4〇 L/min，當大氣壓電衆 贺射裝置10產生大氣壓喷射電漿5〇時，其電漿束 由中空管體20的導出口 9n 夺出口 203達到2公分外，在中空 管體20的作用下，在壤Α 广 任V入大氣壓噴射電漿50以及 原料氣體30後，其中*其贼〇Λ 二吕體20内的原料氣體30呈 正壓’因此’周圍的空氧 工巩無去混入中空管體20，所 以導入口 201導入的女名两 的大乳昼噴射電漿50，在充滿原 料氣體的中空管體2〇肉加f 味 内部強度不易衰減，並由中空 官體20的導出口 203嘖鉍山+ 尸 T射出去，根據實驗結果，大 氣壓噴射電漿50所能到碴从n 犯到達的隶大距離，至少可增加 中空管體20的長度，由 由於中空管體20之外徑很細， 而可用來插置於微細的* 0Λ , 幻二隙中，因此可將中空管體 20插入處理對象物表 沾言， 面的凹部内，再由中空管體20 的導出口 203噴出大翁厭4 ♦ w 乳堡噴射電漿50，以輕易地對 處理對象物凹部底部進 仃表面改質，反觀一般電漿 11 200824504 嘴射嘴105的直;1Λ 9Λ 象物的凹部底：無法深入處理對 孜折由 -邛進仃表面改質，而影響到整個表面 改貝處理的品質。 實施例（二） 月多-閱「第2圖」，為本發明較佳實施例（二） 餅構：不思圖’如圖中所示，為進一步提昇表面改 將的ϋσ貝的效率’前述大氣壓電漿喷射裝ϊ 10的電 將噴射嘴1 05刖端係組設有一光罩6〇，其大氣壓電 水贺射裝S 10的構造係與前述實施例（一）相同， 光罩60係成型有一導入口 6〇1及一容置空間 6〇2,相對於導入口 6〇1的一端係呈開放狀，且在光 罩60下方放置有一呈平板狀的底盤6〇3,其光罩μ 係覆盍籠罩於底盤603上方，而導入口 6〇1係位於 光罩60的中央，並與大氣壓電漿喷射裝置ι〇的電 漿噴射嘴105相互連接，以使光罩6〇的導入口 與電聚喷射嘴105呈連通，又，光罩6〇周緣並鱼底 盤603間呈開放狀，因此，在光罩6〇與底盤6〇3之 間有一空隙604，光罩60係使用樹脂材質製作，而 光罩6〇下端開口的内徑是17公分，由導入口 6〇1 到底盤603間的距離是1〇公分，其底盤6〇3係以玻 璃材質製成。 其使用時，係在光罩60的底盤603上放置_ ρΕΤ 片材70’以使PET片材70被完全包覆於光罩6〇的 容置空間602内，且pet片材70大約與光罩6〇開 12 200824504 口面積相同，其使用氣名 w曰士 “作為原料氣體，且原料氣 體的流置為4〇1/min，以在大氣壓電㈣射裝置ι〇 内產生大氣壓電聚放電電聚40,並由電衆喷射嘴 1〇5,朝光罩6G的導入口 _噴出大氣壓喷射電聚 5〇,當大氣壓噴射電漿5。達到PET片材7。表面後， 會由PET片材7G表面橫向擴大範圍，持續喷射1〇 秒鐘後，再將PET片材7。取出，並針對m片材 7〇的親水性作測試，顯示PET片材7。與大氣壓噴 射電衆50接觸面上的親水性有顯著改善；另外再 將’PET片材70貼附於表面有凹凸不平的材料上， 再進打同樣的實驗，發現只要與大氣壓喷射電聚50 的碰觸處，都有很好的表面改質（親水性）效果， 由於光罩60係可將原料氣體3()與外部空氣隔離， 使外部空氣益法谋入 二 孔…、忐此入，而侍以延長大氣壓噴射電 50的長度；拖古夕 ’ 換a之，s大氣壓喷射電漿5〇及原 氣體3〇,由光罩60的導入口 6〇1導入光罩6〇内部 後由於原料氣體3〇係呈正壓，使得外部的氣體益 法混入光罩r η囟加 α ^ t …、 内"卩，且其大氣壓喷射電漿50在充 ，原料氣體30的光罩6〇内強度不會衰減，直到大 孔壓喷射電漿50到達底盤6〇3 ’再橫向擴展範圍， 其光罩60和底盤6〇3間的微小空隙—，有 的原料氣體3 0排出的功能。 實施例（三） 明參閱「第10圖」，為本發明較佳實施例（三） 13 200824504 =構&不意圖，如圖中所示，前述大氣壓電漿喷射 裝置10的電漿噴射嘴105前端係組設有一光罩6〇, 其大乳壓電漿噴射裝置丨〇的構造係與前述實施例 ()、（二）相同，並在光罩60 —侧成型有一高 么分，寬11公分的矩形開口 6〇5，此矩形開口 605，水平延伸有一長約110公分的矩形導管606， 並在矩形導官606的出口，組設有一可調整開口面 牙貝的開關607，其矩形開口 6〇5及矩形導管6〇6，係 用來將處理對象物導入光罩6〇内，或是將處理對象 物由光罩60導出。 /、使用時，只要將開關6〇7完全打開，使處理 對象物可通過矩形導# 606而導入光罩6〇内，隨後 ,將控制開關607，以將矩形導管606完全封閉或 :使其開口面積縮小’接下來的操作步驟則與前述 實施例、、广一、 + ) I 一）相同，而將大氣壓喷射電漿5〇 理2 2 6〇内’以進行表面改f的處理，而增加處 :象物的親水性，待處理完畢後再打開開關6。7, 中处理對象物通過矩形導管_由光罩6G取出；其 ，光罩60 一側之矩形開口 605及矩形導管6〇/，、 處理對象物的導入或導出，且處理對象物導入 2出時：不必將光軍6°完全打開，其光罩6。内 邻处原料Λ體3(3就不會H由以往原料空氣與外 ::氣混合’可能會造成原料氣體濃度不夠純，造 改質的效果變差’而必須再重新置換光罩60 14 2U0824504 内。卩的原料氣體，发單一 省置換原料氣幾3。：時：及入口的設計’可大幅節 質的處理流程；又，使 ”，亚可加速表面改 對象物做表面改質時 氣壓噴射電漿50對處理 内的原料氣體3〇的^ = ’而用來減少光罩6〇 友雜⑼ 的逸出，並保持光罩60内的原粗 軋體30的壓力呈現正 原科 空氣混入朵置fin 因此，可有效地防止外部 日车，i 内，進行處理對象物的表面改質 寺’，、開關6 0 7可以不必全 、 *陴，χ n 邛關閉，而保留適當的 工隙不僅可以防止原料氣體30及^ 50的逸出，且使虚理斟争此 、町电水 使處理對象物的進出更為容易，綜上 所述，本實施例（三）也可與前述實施例（―）、（二） 相同’有效延長其大氣壓噴射電漿5〇的長度，而增 進表面改質處理的品質。 曰 實施例（四） 清參閱「第4圖」，為本發明較佳實施例（四） 的構造示意圖，如圖中所示，其大氣壓電漿喷射裝 置10的構造，基本上與前述實施例（一）、（二）、（三） 中所使用的相同，但是，在光罩6〇的二相對側分別 成型有一矩形開口 6〇5、605，及一矩形導管606、 606’ ，而矩形導管606、606，分別由矩形開口 605、605 水平向外延伸，並在矩形導管606、606， 的出口處’組設有一開關6 0 7、6 0 7 ’ ，供以調整其 矩形導管606、606’開口的面積。 15 200824504 其使用時’係將光罩60 —側的開關6〇7打開， 供處理對象物通過矩形導管606，等到處理對象物 被導入光罩60的容置空間602後，由操作人員控制 開關607，以完全封閉矩形導管6〇6的開口，或是 將矩形導管606的開口面積縮小，再操作大氣壓$ 漿喷射裝置1 0 ’以將大氣壓噴射電漿5 〇嘴入光罩 60内，進行表面改質作業，待作業完畢後，再打開 另一側矩形導管606’的開關607’ ，以便通過矩形 導管606’而取出光罩60的處理對象物；本實施例 (四）主要係罩60兩側分別成型的矩形開口 605、605’及矩形導管606、6〇6，便於導入或導出 處理對象物，且在處理對象物進出時，不必將光罩 6〇完全打開，其光軍60内部的原料氣體.30就不會 外沒’由以往原料空氣與外部空氣混合，可能會造 成原料氣體濃度不夠純’造成表面改質的效果變 差，而必須再重新置槔#罢^ 硖光罩60内部的原料氣體，其 雙向出入口的設計，也可大幅節 卩田即名置換原料氣體30 的時間及成本，並加速表面改質的處理流程；又， 使用大氣麗喷射電漿5。對處理對象物做表面改質 時’操作人員可藉由開關6G7、6G7’，控制矩形導 管606、606’的開口而接 ^ 積’而用來減少光罩60内 的原料氣體30的逸出，並伴 示符先罩60内的原料氣 體30的壓力呈現正壓， f枓孔 蛩目此，可有效地防止外部空 氣混入光罩60内，進行處 士象物的表面改質時， 16 200824504 其開關607、607’可以不必令却bb 王4關閉，而俘留谪舍 的空隙，不僅可以防止原料氣體3〇 保留適田 漿50的逸出，且使處理對象物 礼㈣射電 个切的進出更為& 開關607、607’在大氣壓噴射 二谷，，、 水► 5 0對虛輝斟复 物作表面改質時，也可以不必八 处里對象 王關’以4非屮立β /公女 氣壓噴射電浆5。運轉所用的原料氣體3。 综上所述，經過多次比對實驗證明，其特點如 下· 比較例（一） 使用前述實施例（-）中的大氣壓電衆噴射裝 置1〇’並將前端的中空管體2()移開，進行運轉後， 假設使用與前述實施例（―）相同的運轉條件，如： 原料氣體的流量、電流周波數或是平均電能等，立 所產生的大氣壓喷射„5G長度約2公分，而前述 貫施例（-”，其大氣壓嗔射電漿5〇長度就是原 產生大氣壓噴射電t 50長度，再加上中空管體2〇 的長度，相較之下，使用前述實施例（一），可有效 延長大氣壓噴射電漿5〇的長度。 比較例（2 ) 而使用前述實^梯；你1 f 1 , 耳她例C )中的大氣壓電漿喷射 裂置10,但將原料氣體30改為一般空氣，運轉後 斤f生的大氣壓噴射電纟50 ’且其原料氣體3〇的 流置及其他運轉條件，與前述實施例（一）相同， 其放電電漿4G就會在中空管心的内部進行衰減， 17 200824504 且其衰減幅度相當地大，甚至1 山 土…、忒田T空官體2〇前 _大氣壓喷射電裂5。嘴出，又，將處理對象物 保持靠近於中空㈣20前端，也無法收到表面改質 的效果’其係因為說氣及氧氣的混合氣體（外部* 氣）所產生的電漿，其生成時，電衆中的氮原子； 與氧原子激烈反應並形成NQx，而錢原子及氧原子 大量消失，因此，本發明中必須使用單一種類的氣 體作為原料氣體30,或是混合二種以上氣體所形成 的原料氣體30’其產生電裝時不會互相產生化學反 應，才不會造成大氣壓喷射電漿5〇的強度衰減。 參考例（1 ) 田w A貝易W 、一）三）、（四）中的大氣壓 電襞噴射裝置1(3冑轉後，可切出大氣壓噴射電裝 5〇，其所產生的大氣壓噴射電漿5〇長度大約4公 分，相較於前述比較例（—）中的大氣壓噴射電漿 50長度’僅多了 2公分’但不及上述實施例（一） 的大氣壓喷射電漿50的長度，其係因為光罩6〇與 底盤603間的空隙’或是因為矩形開〇 6〇5過大，' 而造成外部的空氣容易混入光罩6〇内的結果，唯， 以上所述者，僅為本發明之較佳之實施例而已，並 非用以限定本發明實施之範圍；任何熟習此技藝 者，在不脫離本發明之精神與範圍下所作之均等變 化與修飾，皆應涵蓋於本發明之專利範圍内；譬如： 前述實施例（一）中’中空管體2〇的前端斷面形狀， 18 200824504 不僅可為平面的幾何圖形，也可改用細長的形狀， 、冬表面改負的巾田度擴大；〖，在前述實施例（二） 〜（四）巾，其光罩60頂面也可組設有二個以上： 大軋壓電漿喷射裝i 1 0，以同時平行使用這些大氣 壓電漿噴射裝f 10,而可運用在處理對象物大或是 處理對象物具有複雜表面時，就算是處理對象物有 複雜表面時仍可以迅速地處理，當前述複數個大氣 壓7漿喷射裝置1〇運轉時，其各個電装噴射嘴1〇5 不疋集中一點而是分散，以喷射於處理對象物表 面，其依然能夠有效地達到表面改質的功效，如將 複數個電漿喷射嘴1 〇 5以軸中心，作不同角度的喷 射，更可以擴大大氣壓噴射電漿5〇的喷射面積；再 者，本發明用來防止外部空氣混入的方式，也可將 中空官體20直接成型於電漿喷射嘴1〇5上，或是在 中空管體20的導出口 203附近充滿原料氣體3〇， 綜上所述，一方面可以防止周圍氣體的混入，另一 面也可以增加大氣壓喷射電漿5 〇的長度。 本發明其據以實施後，係利用特殊的收容構 造’包括由大氣壓電漿噴射裝置外部所產生的氣體 正壓，組δ又於大氣壓電漿喷射裝置電漿喷射嘴前端 的中空管體，或是組設於大氣壓電漿喷射裝置電漿 喷射嘴前端的光罩等等，都可將其噴射的放電電漿 及材料完全包覆收容於其内，以避免周圍空氣混入 其喷氣嘴内’而確實達到提供一種使放電電漿長度 19 200824504 增加的大氣壓電漿喷 平的材料’進行更有 目的。 綜上所述，本潑 效，係具有發明之「 「進步性」等專利要> 向 鈞局提起發明專 射裝置，以對各種表面凹凸不 效率的清潔及表面改質作業之 明大氣壓電漿喷射裝置之功 產業可利用性」、「新穎性」與 牛；申請人爰依專利法之規定， 利之申請。 20 200824504 【圖式簡單說明】 的構造示意圖。 的構造不意圖。 的構造不意圖。 的構造示意圖。 第1圖，為本發明較佳實施例（一 第2圖，為本發明較佳實施例（二 第3圖，為本發明較佳實施例（三 第4圖，為本發明較佳實施例（四 主要元件符號說明 10 大氣壓電漿喷射裝置 101 電漿喷射筒 102 脈衝電源 103 内部電極 104 外部電極 105 電漿喷射嘴 20 中空管體 201 導入口 202 絕緣環 203 導出口 30 原料氣體 40 放電電漿 50 大氣壓喷射電漿 60 光罩 601 導入口 602 容置空間 603 底盤 21 200824504 604 空隙 60 5 矩形開口 605， 矩形開口 606 矩形導管 606， 矩形導管 607 開關 607， 開關 70 PET板材Atmospheric piezoelectric slurry injection device W I, 'σ structure to solve this problem. The main object of the present invention is that an air pressure pen squirting device capable of increasing the length of the discharge electric water is provided for the squeezing operation of various materials which are uneven. In order to achieve the above purpose, the atmospheric piezoelectric slurry of the present invention is sprayed through a single type of ritual, such as oxygen (〇2), oxygen. (Ν2) or inert gas Γ 虱 虱 (for example, argon (Ar)), etc. as a helium gas, or two kinds of gases that are chemically reacted with "" 玛原, 曰人, 曰夂 phase The raw material gas which is made up of % b, after confessing the power of the cycle, can be sprayed out of the plasma piezoelectric nozzle by the powder makeup nozzle ... 200824504 In order to prevent the surrounding gas from being mixed, the piezoelectric device is designed. Kind of containment structure, 2: Piezoelectric two-spraying device is filled with raw materials: body, and Han can discharge raw materials. At the same time, the plasma spray is discharged and the whole body is completely wrapped and contained in the station. The material gas emitted from the material and the discharge port produces a positive pressure to the outside, and the field is used to prevent the intrusion of the surrounding air, so that the atmospheric piezoelectric slurry is placed in the g + i Pulp, therefore, its containment structure is stored The gas pressure range is based on the positive pressure generated by the original body, so that the surface of the material is relatively flat; the unevenness of the crucible, and the discharge plasma is still "the bottom of the recess" In addition, in the case of a ball or a processing object having a polyhedral shape, when the field is sprayed with plasma at atmospheric pressure, the object to be treated is coated and wrapped in the storage structure of the present invention. Inside, the longer discharge plasma can be applied to the side of the object to be treated, or even to the back side, to make the object to be processed more comprehensive and more efficient surface modification. Further, the present invention discloses another storage structure in which a hollow body body is disposed in a front end of a plasma spray nozzle of an atmospheric piezoelectric slurry spraying device, wherein the hollow pipe body and the electric water jet nozzle of the atmospheric piezoelectric slurry spraying device are provided. The section is slender, which can make the range of atmospheric pressure jet plasma wider, expand the extent of surface modification, and the opening of the hollow tube is the inlet for introducing the discharge plasma. The inside of the hollow tube is filled with the raw material gas, so the intensity of the injection of the atmospheric pressure spray 200824504 is not the same as that of the squid, and the maximum distance reached by the atmospheric pressure injection to the moon, will be with the water. Changed, therefore, even if the object of the treatment has a deep concave and convex surface, the atmospheric pressure jet plasma is still private to the county ▲ "water is still enough to reach the bottom of the recess, effective feeding material The surface is modified, and ^ j, m. The other side of the cover is the discharge plasma that passes through u, and effectively prevents the surrounding gas from being sprayed by the plasma spray nozzle, and the cockroach 1 is prevented from being ejected into the raw material gas. because The atmospheric pressure jet plasma is increased, and the two types of storage structures are scooped, the large rolling press plasma and the material are completely increased in length, and the surface can be uneven. The material of the 4th _ is used for more efficient cleaning and surface modification operations, and the ^2 dynasty body must be closely connected with the atmospheric piezoelectric slurry spraying device to be more effective in preventing the surrounding gas. And an insulating material is arranged between the hollow body and the atmospheric piezoelectric slurry spraying device to achieve the effect of electrical insulation, and the electrode in the atmospheric piezoelectric injection can be prevented from being leaked by the junction with the hollow tubular body. The phenomenon. Furthermore, the present invention discloses a containment structure in which a photomask is assembled in an atmospheric pressure Thunder | shouting, a front end of a plasma spray nozzle of a water jet device, and is used for: injecting plasma into the atmospheric pressure jet plasma. The object to be treated, /, the mask is formed with an inlet for the introduction of atmospheric pressure jet plasma, and the atmospheric piezoelectric slurry spraying device will discharge the plasma into the light army. And the atmospheric pressure jet electropolymer is filled in the reticle, and the atmospheric pressure jet plasma is fluid. Therefore, 8 200824504, even if the object to be treated has a deep concave jet electropolymer (4), it can be expected to be (4) The bottom of the main concave I, and the effective entry of the rod to the surface of the object to be treated is modified to the surface of the object; and the aforementioned light person ♦ ϊ田*丨 hood and formed at least one出 徂 子 导出 导出 导出 导出 苴屮 导出 导出 导出 导出 导出 quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot quot Also does not need to be in the body, ^ replace the original inside the mask The gas thus shortens the surface modification. # # „ The time of the sigh, when the molding is two: the object to be treated is guided by one of the inlets and outlets to be surface-modified, and then the other side of the reticle The entrance and exit increases the speed of the surface modification process; in order to reduce the gas from escaping from the entrance and exit of the reticle, a: at the entrance and exit is provided: the opening area of the population can be adjusted to maintain the pressure of the two gas in the reticle, and It is effective to prevent the intrusion of the surrounding gas. When the object is moved in and out, the opening area of the inlet and outlet can be increased by the adjuster, so that the object to be treated can be easily accessed. 1 Illustrated with the following description, please refer to the following. [Embodiment] Embodiment (1) Please refer to "Figure 1", which is a schematic structural diagram of a preferred embodiment of the present invention, as shown in the figure, It consists of an atmosphere 200824504 plasma spray device ίο and a hollow tube body 2,. When the atmospheric piezoelectric jetting device 10 is used to generate atmospheric pressure jet plasma, T: oxygen (〇2), nitrogen is used. N2) or a raw material gas 30 such as an inert gas (for example, helium (Ar)) or a mixture of two or more gases which do not chemically react with each other when plasma is generated, The upper end of the plasma spray cylinder 1〇1 is obliquely injected to cause the raw material gas 30 to generate a spiral coil rotation in the plasma spray cylinder 1〇1, and then a pulse power supply is used. 〇2 is connected to the pulse width. A high-voltage pulse of 20 microseconds, and between the internal electrode 丄 and the external electrode 104, the electric discharge of the circumference of the electric wave is about 16 平均, and the average electric current is about 7·7~1 Kff, and the initial discharge is by the plasma spray cylinder. The distance between the electrodes at the top of the 101 is the smallest, and the time interval between the secondary pulse discharges is very short. The discharge plasma 40 generated by the previous discharge will have a part to be ter-glow before the next pulse discharge. Plasma (residual plasma after luminescence) remains, so the next discharge will pass through -gl(10)- phs = the discharge plasma 40 will be easily generated, but the raw material gas 3 〇 will flow continuously, and the discharge plasma 40 will follow Raw material gas 3〇, move together to The lower end of the plasma spray nozzle 1〇5 is sprayed and used to maintain the stability of the discharge electrode 4内部3 to the discharge nozzle 4〇5. Since the discharge is a pulse discharge, the discharge current is only Occurred in the interior of the plasma spray can 101, and then passed through the plasma spray nozzle ι〇5 through the ～gl〇w-plasma, and the atmospheric pressure sprayed plasma 50 is sprayed, and the hollow tubular body 2 is an inner diameter. 10 200824504 Stainless steel pipe with an outer diameter of 7 mm and a length of about 6 cm. The opening on the upper side of the hollow pipe body is the inlet port 201 'which is sprayed with the plasma: mouth'. The five sets are provided with an insulating ring made of an insulating material. The hollow pipe body 20 is tightly connected when it is assembled in the plasma spray nozzle 1〇5, and an outlet port 2 is formed on the lower part of the hollow pipe body 20. 3. The discharge plasma 40 is led to form an atmospheric pressure injection electric power of $5 〇, and the cross-sectional shape of the outlet 203 is such that the g '· 仏 shape is a geometric figure such as a circle or a rectangle. In the case of using, the raw material gas 30 used is nitrogen gas, and the flow rate of the raw material gas 30 is 4 〇 L / min. When the atmospheric piezoelectric mass spectrometer 10 generates atmospheric pressure jet plasma 5 ,, the plasma beam The outlet 203 of the hollow tubular body 20 takes the outlet 203 to 2 cm. Under the action of the hollow tubular body 20, after the magnetic blasting of the plasma 50 and the raw material gas 30, the thief原料 The raw material gas 30 in the Erlu body 20 is positive pressure 'so that the air oxygen gas around the hollow pipe 20 is not mixed into the hollow pipe body 20, so the female squirt jet plasma 50 introduced by the female port 201 is introduced. The inner tube of the hollow tube body 2 filled with the raw material gas is not easily attenuated, and is ejected from the outlet 203 of the hollow body 20, the mountain + the corpse T. According to the experimental results, the atmospheric pressure spray plasma 50 can The length of the hollow tube 20 can be increased by at least the distance from the n to the distance of the hollow tube body 20, because the outer diameter of the hollow tube body 20 is very thin, and can be inserted into the fine * 0 Λ , phantom gap, Therefore, the hollow tubular body 20 can be inserted into the object to be treated, and the concave portion of the surface can be inserted. The outlet 203 of the hollow tubular body 20 ejects a large smear 4 ♦ w milkcasting spray plasma 50 to easily modify the surface of the bottom of the concave portion of the object to be treated, and the general plasma 11 200824504 is directly attached to the nozzle 105 ;1Λ 9Λ The bottom of the concave part of the elephant: It is impossible to carry out in-depth treatment to the surface of the fold-by-turning, which affects the quality of the entire surface. EXAMPLES (2) More months - read "Figure 2", which is a preferred embodiment of the present invention (2) Pie structure: not thinking "as shown in the figure, in order to further improve the efficiency of the surface modification of the ϋσ shell" The electric current of the atmospheric piezoelectric slurry jetting device 10 is provided with a photomask 6 刖 at the end of the nozzle, and the structure of the atmospheric piezoelectric water mobile device S 10 is the same as that of the foregoing embodiment (1). The inlet port 6〇1 and the accommodating space 6〇2 are formed, and one end of the inlet port 6〇1 is open, and a flat plate-shaped chassis 6〇3 is disposed under the reticle 60, and the light is formed thereon. The cover μ is covered over the chassis 603, and the inlet 6〇1 is located at the center of the reticle 60 and is connected to the plasma spray nozzle 105 of the atmospheric piezoelectric spray device to interconnect the reticle 6 The inlet is in communication with the electrospray nozzle 105, and the periphery of the mask 6 is open and the fish pan 603 is open. Therefore, there is a gap 604 between the mask 6〇 and the chassis 6〇3, and the mask 60 is used. Made of resin material, and the inner diameter of the lower end of the mask 6 is 17 cm, and the distance between the inlet port 6〇1 and the bottom plate 603 Is 1〇 cm, its chassis 6〇3 glass-based material to be made. When it is used, the _ ΕΤ 片 sheet 70 ′ is placed on the chassis 603 of the reticle 60 such that the PET sheet 70 is completely covered in the accommodating space 602 of the reticle 6 ,, and the pet sheet 70 is approximately in contact with the light. Cover 6 split 12 200824504 The same port area, using the gas name w gentleman "as a raw material gas, and the flow of the raw material gas is 4 〇 1 / min, in order to generate atmospheric piezoelectric discharge in the atmospheric piezoelectric (four) device ι〇 The electro-convergence 40 is discharged from the inlet of the photomask 6G to the inlet of the photomask 6G, and the electro-paste is sprayed at atmospheric pressure to reach the PET sheet 7. After the surface, the PET sheet is formed. The surface of the material 7G is laterally enlarged, and after continuously spraying for 1 second, the PET sheet 7 is taken out, and tested for the hydrophilicity of the m sheet 7〇, the PET sheet 7 is displayed. Contact with the atmospheric pressure jet battery 50 The hydrophilicity on the surface was significantly improved. In addition, the 'PET sheet 70 was attached to the uneven surface material, and the same experiment was carried out. It was found that as long as it touched the atmospheric pressure jet 50, Good surface modification (hydrophilic) effect, because the reticle 60 can be used to feed the raw material gas 3() The air is isolated, so that the outside air benefits into the two holes... and enters, and the length of the atmospheric pressure injection 50 is extended; the ancient eve 'for a, s atmospheric spray plasma 5 原 and the original gas 3 〇 After the introduction port 6〇1 of the photomask 60 is introduced into the inside of the photomask 6〇, the raw material gas 3 is positively pressurized, so that the external gas is mixed into the mask r η 囟 α α α, 、, & 卩, And the atmospheric pressure jet plasma 50 is not charged, and the strength of the material gas 30 is not attenuated until the macroporous jet plasma 50 reaches the chassis 6〇3' and then laterally expands, and the mask 60 and the chassis 6 Between the three small gaps - the function of the discharge of the raw material gas 30. Embodiment (3) See "Figure 10", which is a preferred embodiment of the present invention (3) 13 200824504 = Construction & As shown in the figure, the front end of the plasma spray nozzle 105 of the atmospheric piezoelectric slurry spraying device 10 is provided with a photomask 6〇, and the structure of the large-milk piezoelectric slurry spraying device is the same as the foregoing embodiment (), 2) The same, and a high-profile, 11 cm wide rectangular opening on the side of the mask 60 a rectangular opening 605, a rectangular duct 606 extending horizontally about 110 cm, and a switch 607 having an adjustable open-faced scallop at the exit of the rectangular guide 606, the rectangular opening 6〇5 The rectangular duct 6〇6 is used to introduce the object to be processed into the mask 6 or to export the object to be processed by the mask 60. /, in use, as long as the switch 6〇7 is fully opened, the object to be processed can be introduced into the reticle 6〇 through the rectangular guide #606, and then the switch 607 will be controlled to completely close the rectangular conduit 606 or: The opening area is reduced. The next operation step is the same as the foregoing embodiment, the first one, and the other one, and the atmospheric pressure jet plasma 5 is treated within 2 2 6 ' to perform the surface modification process. Addition: the hydrophilicity of the object, after the treatment is completed, the switch 6 is opened. 7. The object to be processed is taken out through the rectangular duct _ by the reticle 6G; the rectangular opening 605 on one side of the reticle 60 and the rectangular duct 6 〇 /,, when the object to be processed is introduced or exported, and when the object to be processed is introduced 2, it is not necessary to completely open the light 6°, and the mask 6 is opened. In the vicinity of the raw material body 3 (3 will not H from the previous material air and external:: gas mixed 'may result in insufficient raw material gas concentration, the effect of the modification is worse' and must be replaced again the mask 60 14 Within 2U0824504, the raw material gas of 卩 is issued in a single province to replace the raw material gas. 3: When: and the design of the inlet 'can greatly improve the quality of the treatment process; and, to make", the sub-accelerated surface modification object for surface modification The air jet plasma 50 is used to reduce the escape of the mask 6 〇 (9) to the raw material gas 3 处理 in the treatment, and maintains the pressure of the original rough rolling body 30 in the reticle 60 to be positive. Therefore, the air can be mixed with the fins. Therefore, it is possible to effectively prevent the external sun-driving vehicle from being inside, and the surface of the object to be treated is modified by the temple, and the switch 6 0 7 may not be fully, *陴, χ n 邛 closed, and the appropriate The work gap not only prevents the escape of the material gases 30 and 50, but also makes it easier for the object water to be moved in and out of the object to be processed. In summary, the third embodiment can also be used with The foregoing embodiments (-), (b) are the same 'effectively extending their The air jet sprays the length of the plasma 5 , to improve the quality of the surface modification process. 曰 Embodiment (4) Refer to "4th figure" for a schematic diagram of the structure of the preferred embodiment (4) of the present invention. It is shown that the configuration of the atmospheric piezoelectric slurry spraying device 10 is basically the same as that used in the foregoing embodiments (1), (2), and (3), but a rectangular shape is formed on the opposite sides of the mask 6〇, respectively. Openings 6〇5, 605, and a rectangular conduit 606, 606', and rectangular conduits 606, 606 extend horizontally outward from rectangular openings 605, 605, respectively, and are provided at the exit of rectangular conduits 606, 606 The switch 6 0 7 , 6 0 7 ' is provided to adjust the area of the opening of the rectangular ducts 606, 606'. 15 200824504 When it is used, the switch 6 〇 7 on the side of the reticle 60 is opened, and the object to be processed passes through the rectangle. The conduit 606 waits until the processing object is introduced into the accommodating space 602 of the reticle 60, and the operator controls the switch 607 to completely close the opening of the rectangular conduit 6〇6, or to reduce the opening area of the rectangular conduit 606, and then operate. Atmospheric pressure The spraying device 10' is configured to pour the atmospheric pressure jetting plasma 5 into the reticle 60 to perform surface modification work. After the operation is completed, the switch 607' of the other side rectangular conduit 606' is opened to pass the rectangular conduit 606. 'The processing object of the mask 60 is taken out; the fourth embodiment is a rectangular opening 605, 605' and rectangular ducts 606, 6〇6 which are respectively formed on both sides of the cover 60, so as to facilitate introduction or derivation of the object to be processed, and When the object to be processed is moved in and out, it is not necessary to completely open the mask 6 ,, and the raw material gas .30 inside the light army 60 is not left out. 'The raw material air is mixed with the outside air, which may cause the raw material gas concentration to be insufficiently pure' The effect of surface modification is deteriorated, and the raw material gas inside the mask 60 must be re-positioned. The design of the two-way entrance and exit can also greatly reduce the time and cost of replacing the raw material gas 30 by the name of the field. And accelerate the process of surface modification; in addition, use atmospheric spray plasma 5 . When the surface of the object to be processed is surface-modified, the operator can control the escape of the material gas 30 in the reticle 60 by controlling the opening of the rectangular conduits 606, 606' by the switches 6G7, 6G7'. And the pressure of the material gas 30 in the first cover 60 is positive pressure, and the f hole is in this way, which can effectively prevent the outside air from being mixed into the reticle 60, and when the surface of the ward object is modified, 16 200824504 The switches 607, 607' can prevent the bb king 4 from being closed, and the gap of the trap can not only prevent the material gas 3〇 from retaining the escape of the field slurry 50, but also cause the object to be treated (4) to be cut by the object. In and out of the more & switch 607, 607' in the atmospheric pressure spray two valleys,,, water ► 50 on the surface of the virtual 斟 斟 作 作 作 表面 表面 表面 表面 表面 表面 表面 表面 表面 虚 虚 虚 虚 虚 虚 对象 对象 对象 对象 对象 对象 对象 对象/ Male female pneumatic jet plasma 5. Raw material gas 3 used for operation. In summary, after several times of comparison experiments, the characteristics are as follows. · Comparative Example (1) Using the atmospheric piezoelectric mass injection device 1〇' in the foregoing embodiment (-) and the hollow tube body 2 at the front end () After the operation is carried out, it is assumed that the same operating conditions as those of the foregoing embodiment (-) are used, such as: the flow rate of the raw material gas, the number of current cycles, or the average electric energy, etc., and the atmospheric pressure generated by the vertical jet is about 2 cm in length. In the foregoing embodiment (-", the atmospheric pressure of the plasma is 5 〇 length is the length of the original atmospheric pressure injection electric power t 50, plus the length of the hollow tubular body 2 ,, in contrast, the foregoing embodiment (one ), can effectively extend the length of atmospheric jet plasma 5 。. Comparative example (2) and use the above-mentioned real ladder; you 1 f 1 , the ear of the case of C) in the atmospheric piezoelectric slurry spray crack 10, but the raw material gas 30 is changed to general air, and after the operation, the atmospheric pressure injection electric 纟 50 ' and the flow of the raw material gas 3 及 and other operating conditions are the same as the above-mentioned embodiment (1), and the discharge plasma 4G is in the middle. The inside of the empty tube is attenuated, 17 2 00824504 and its attenuation amplitude is quite large, even 1 mountain soil..., Putian T empty body 2 〇 _ atmospheric pressure jet rupture 5. When the mouth is out, the object to be treated is kept close to the front end of the hollow (four) 20, and the effect of surface modification cannot be received. The result is that the plasma generated by the mixed gas of gas and oxygen (external * gas) is generated. The nitrogen atom in the electricity; reacts violently with the oxygen atom to form NQx, and the money atom and the oxygen atom largely disappear. Therefore, in the present invention, a single type of gas must be used as the material gas 30, or two or more gases may be mixed. The formed material gas 30' does not generate a chemical reaction with each other when it is electrically assembled, and does not cause the intensity decay of the atmospheric pressure jet plasma. Reference example (1) The atmospheric piezoelectric squirting device 1 in the field of W A Bieyi W, a) 3), (4) (3 胄 turn, the atmospheric pressure injection electric device 5 〇 can be cut out, the atmospheric pressure injection generated by it The length of the plasma 5 大约 is about 4 cm, which is only 2 cm more than the length of the atmospheric pressure jet plasma 50 in the above comparative example (-), but is not as long as the length of the atmospheric pressure jet plasma 50 of the above embodiment (1). This is because the gap between the reticle 6 〇 and the chassis 603 'or because the rectangular opening 〇 6 〇 5 is too large, 'the result is that the outside air is easily mixed into the reticle 6 ,, but the above is only The preferred embodiments of the present invention are not intended to limit the scope of the present invention; any variations and modifications made by those skilled in the art without departing from the spirit and scope of the invention are intended to cover the invention. In the range of the front end section of the hollow tube body 2〇 in the foregoing embodiment (1), 18 200824504 can be used not only as a plane geometry, but also as a slender shape, and a towel with a winter surface change Tiandu expands; 〖, before Embodiment (2) ~ (4) towel, the top surface of the photomask 60 may also be set up with two or more: large-rolling piezoelectric slurry injection device i 1 0, to simultaneously use these atmospheric piezoelectric slurry injection devices f 10 When the object to be processed is large or the object to be processed has a complicated surface, even if the object to be processed has a complicated surface, it can be quickly processed. When the plurality of atmospheric pressure 7 slurry spraying devices are operated, each of them The electric spray nozzle 1〇5 is dispersed without being concentrated, so as to be sprayed on the surface of the object to be treated, which can still effectively achieve the effect of surface modification, such as making a plurality of plasma spray nozzles 1 〇 5 at the center of the shaft. The injection of different angles can enlarge the injection area of the atmospheric pressure jet plasma 5 ;; in addition, the invention can be used to prevent the external air from being mixed in, and the hollow body 20 can be directly formed on the plasma spray nozzle 1〇5. Alternatively, the raw material gas 3 is filled in the vicinity of the outlet 203 of the hollow tubular body 20. As described above, on the one hand, the mixing of the surrounding gas can be prevented, and on the other hand, the length of the atmospheric jet plasma 5 增加 can be increased. After the invention is implemented, the special storage structure is used to include a positive pressure of gas generated by the outside of the atmospheric piezoelectric slurry spraying device, and the group δ is a hollow tubular body at the front end of the plasma injection nozzle of the atmospheric piezoelectric slurry spraying device. Or a reticle or the like which is disposed at the front end of the plasma spray nozzle of the atmospheric piezoelectric slurry spraying device, and the discharge plasma and material sprayed thereon can be completely enclosed and contained therein to prevent the surrounding air from being mixed into the air nozzle. However, it is indeed more desirable to provide a material that flattens the atmospheric piezoelectric slurry that increases the length of the discharge plasma 19 200824504. In summary, the invention has the patent "Progressive" and the like. Invented the special radiation device to the bureau for the inefficiency of cleaning and surface modification of various surfaces, and the utility of the atmospheric piezoelectric slurry injection device, "newness" and cattle; The provisions of the law, the application of interest. 20 200824504 [Simplified description of the diagram] The schematic diagram of the structure. The structure is not intended. The structure is not intended. Schematic diagram of the structure. 1 is a preferred embodiment of the present invention (a second embodiment of a preferred embodiment of the present invention (2, FIG. 3, which is a preferred embodiment of the present invention (3th, 4th, and is a preferred embodiment of the present invention). (Four main components symbol description 10 Atmospheric piezoelectric slurry injection device 101 Plasma injection cylinder 102 Pulse power supply 103 Internal electrode 104 External electrode 105 Plasma injection nozzle 20 Hollow tube 201 Conducting inlet 202 Insulation ring 203 Conducting port 30 Raw material gas 40 Discharge Plasma 50 Atmospheric Jet Plasma 60 Mask 601 Guide 602 Housing 603 Chassis 21 200824504 604 Clearance 60 5 Rectangular opening 605, Rectangular opening 606 Rectangular conduit 606, Rectangular conduit 607 Switch 607, Switch 70 PET sheet