200822962 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種側流式非熱電漿廢氣處理裝 置，尤指一種以高壓放電產生非熱電漿之方式達到廢 氣處理之功效者。 【先前技術】 非熱電聚廢氣處理技術乃是利用氣體高壓放電方 式產生具有高動能的自由電子，經由此類電子與其他 氣體分子、原子碰撞轉移能量而形成自由活化基如 N，0,0H，03與激發態分子等，再與氣態污染物迅速發 生氧化或還原反應，將這些空氣污染物轉變成無害或 低污染物質，達到淨化廢氣之目的。因為在此放電過 程中，主要外界能量均施加在電子上，原氣體分子能 量並無大幅變動，即平均電子溫度遠大於氣體溫度， 故稱為非熱電漿。此技術在處理低濃度污染氣體具有 、 省能與高效率之優點。 一般高壓放電電漿反應器的結構設計與其應用之 標的物有密切關聯。目前應用於空氣淨化、廢氣處理 上之電漿反應器的設計主要結構有管線式及平板式兩 種。其中平板式電漿反應器雖具有流場平順之優點， 但在放電均勻度上會因其平板面積的擴大而增加其困 難度，因而影響到其處理效率及流量，故罕見於大流 量廢氣處理應用。管線式電漿反應器則主要有脈衝電 200822962 暈（pulse corona)及介電質屏壁放電（dielectric barrier discharge)等二種反應器。脈衝電暈（pUise corona)反應 器之放電電極間無絕緣材質隔離，為避免短路故採用 高壓短脈衝（<lpsec)，一般而言廢氣處理效率高，如美 國1985年專利編號4,695，358即其中一種。但受限於 此短脈衝，其脈衝功率電源成本非常高，在大流量時 不易達成高經濟效益，故少被採用。介電質屏壁放電 反應器則有一或二個介電質絕緣材質於放電電極間作 隔離，避免短路，故此法使用一般交流高壓電源即可， 可降低電源設置成本。此法起源自1857年德國 Siemens製造臭氧，且延用至今並無巨大變化。另亦有 採高介質係數絕緣顆杻填充至此管線式反應器中，以 增強空隙電場提昇效率，如美國1993年專利編號 5,236,672及1995年專利編號5,440,876即使用此種方 式0 因一般線管式反應器均採直流式設計，即處理氣 μ方向與反應器同軸向。在大流量廢氣處理應用時， 若採加大管徑之方式因應，則放電所須之外加電壓將 k同至不切實際，且在絕緣保護上造成操作維修與工 女之困擾，亦多不被接受採用。因而造成目前在處理 大流量廢氣時多採多根并串聯反應器設計，但此時要 考量個別電漿反應器内放電均勻的一致性，使其内氣 流場平順且均勻分布，以確保個別反應器之相對應負 200822962 載也有一致性；另在系統整體設計上要避免高壓電極 之連接與絕緣設計不會干擾到整體氣流場分布。但通 常多個反應器串并聯的情況下，需考量其裝置内部高 電壓管路的佈線安排與安裝維修等安全性因素，再加 上考慮氣流場分布流暢等因素，皆會增加系統的複雜 度及製作成本’且日後保養維護不易。故此法係會造 成兩端壓差過大且尺寸放大後不易均勻放電，故在實 際應用上亦少被採用。 【發明内容】 本發明之主要目的係在於，以高壓放電產生非熱 電漿達到大流量廢氣處理之目的。 為達上述之目的，本發明係一種側流式非熱電漿 廢氣處理裝置，包含複數個行列式排列之側流式反應 器單元及複數個介於相鄰側流式反應器單元間之氣流 擋板。其中，該側流式反應器單元係包含一可作為陰 j使用之外部電極，且該外部電極表面係具有多數個 貫穿孔；一設置於外部電極内作為陽極使用之甲間電 極；一設置於外部電極與中間電極間之絕緣層；及一 與㈣電極及中間電極電性耗接之高壓電源，用以提 ，高屢電源在外部電極與中間電極間游離放電產生所 而非二、電漿。藉此’可任意串并聯行列組合該側流 式反應器單元以擴展廢氣處理流量簡化組裝程序以 降低成本，而可達到大流量廢氣處理之功效。 .200822962 【實施方式】 -凊參閱『第1圖』所示，係本發明侧流式反應器 單元之剖面狀態示意圖。如圖所示：本發明係一種側 流式非熱電漿廢氣處理裝置，係包含複數個側流式反 應器卓元及複數個氣流擋板（圖中未示），該複數個侧 流式反應器單元係呈行列式排列，且該侧流式反應器 單元係由一外部電極1、一中間電極2、一絕緣層3 及一而壓電源4所構成，使受污染之待處理氣體流經 高壓放電作用區以產生電壤作用反應達到廢氣處理之 功效者。 上述所提之外部電極1係可為陰極接地，且該外 部電極1上係設置有複數個貫穿孔11與一固定法蘭 1 2 ’而該外部電極1係為由一金屬導電材質所製成 之一圓柱管體，該金屬材質可為不锈鋼、銅、鐵、鋁 等合金。而該外部電極1於製作時係利用一薄金屬板 加工製成該具該複數個貫穿孔1 1之圓柱管體，並將 其與該固定法蘭1 2連接組裝成一體，該固定法蘭係 為金屬導電材質，上有4〜6個攻牙穿孔供連結固定及 接地之用。該複數個貫穿孔1 1之孔洞總面積可占該 圓柱管體表面積之40〜60%，且同時達到維持放電均勻 性之目標，外部電極1之金屬板厚度可為〇.g〜3mm， 管體長度可為60〜150cm，直徑可為8〜10cm，且該貫 穿孔1 1直徑可為0.5〜lcm。 200822962 該中間電極2係設置於上述外部電極丄内，且該 中間電極2係可作為陽極使用，而該中間電極2係為 由一金屬導電材質所製成之桿體，該金屬導電材質可 為不锈鋼、銅等合金。且該中間電極2之直徑可視實 際高壓運作考量為0.5〜3cm。 該絕緣層3係設置於上述外部電極丄與中間電極 2之間，覆蓋在中間電極2外部，而該絕緣層3係為 由一絕緣材質所製成之管體，該絕緣材質係可為鐵弗 龍（PTFE)、聚乙烯（PE)、陶瓷、玻璃、石英等，且該 絕緣層3之厚度可視實際高壓運作及放電間隙距離之 考量為0.3〜1.5cm，而該放電間隙距離可為15〜5cm。 該高壓電源4係與該外部電極丄及該中間電極2 電性耦接，藉以提供該外部電極i與該中間電極2所 需之高壓放電電源，而該高壓電源4係可為傳統之變 頻（<440Hz)高壓交流電源或為高頻（>lkHz)高壓交流 電源’且其操作電壓視放電間隙及工作頻率可為 10〜60kV間。如是，藉由上述之結構組成一全新之側 流式反應器單元。 请參閱『第2圖』所示，係本發明側流式反應器 單元之使用狀態示意圖。如圖所示：當使用該側流式 反應器單元時，該受污染之待處理氣體係由該側流式 反應器單元外部電極1上之複數個貫穿孔1 1進入， 此時由於該高壓電源4係提供高壓交流電源於該外部 200822962 電極1與該中間電極2上，因此當受污染之氣體由該 外部電極1上之複數個貫穿孔jL i進入時，藉由加辱 壓於該外部電極1與該中間電極2之間，使在該外部 電極1與該絕緣層3中之放電間隙中之氣體受高壓放 電之故游離崩潰生成非熱電漿，繼而藉由碰撞產生多 種高活性之自由基物種，如N，〇,OH，〇3與激發態分子 等，再與受污染之氣體作用反應，成為無害或低污染 物質，並將處理後之氣體由另一方向之貫穿孔i丄排 出。 明參閱『第3及第4圖』所示，係本發明之使用 狀態示意圖及本發明使用狀態之立體刳面示意圖。如 圖所示：該複數個側流式反應器單元係并串聯行列排 放並結合複數個氣流擋板組合而成本發明之側流式非 熱電漿廢氟處理裝置，先將複數個側流式反應器單元 置入置放室5内，並規畫設計其行列組合之排放方 式，可并聯、串聯或并串聯之交錯或非交錯式排列； 該側流式反應ϋ單元之㈣以—氣流擋板5 i阻隔， 以確保待處理廢氣皆會由該側流式反應器單元外部電 極1上之多數個貫穿孔1 1進入，以流經放電區產生 非熱電漿反應，並將處理後之氣體由另一方向之貫穿 =1 1排出。該置放室5導引該待處理氣體由其下方 密閉空間流經該側流式反應器單元之放電區以作用反 應而降解為無害或低污染物質，並將處理後之氣體由 .200822962 之另一方向排出。而該置放室5上方則 連結，該置放室5上方兩側係設置有多個絕 ^係可提供架設高壓線連結高壓電源之用， ν放室之外殼則接地以做安全維護。因為本發明係 將電氣部分隔開，有利其内氣流場平順且均句分布， 並確保各側流式反應器單元之相對應負載一致性，且 ^高^電氣部分皆在該置放室5上方，使該側流式反 "、器單元之女裝及維修均非常便利，可個別拆裝維 ‘而實際所需之該側流式反應器單元數量及排列方 式，則需視應用場所，處理之廢氣流量，考量消耗電 功率與氣體停留時間，及使符合廢氣排放法規限制或 處理效率>90%以上等要求而定，對設計而言提供相當 的便利性。另在高壓放電電源搭配上，亦可視成本效 盈與經濟考量上選用一組或多組高壓電源搭配使用。 另’由於本發明可視未來應用之廢氣處理流量及 、 ％所等實際考量，藉由側流式反應器單元串并聯的行 列式排列組合搭配，規畫設計出一最佳效益之處理廢 氣裝置。另基於此裝置的特殊簡化設計，可採模組化 之側流式反應器單元設計，無論在放電管製造、安裝、 及曰後保養維修皆非常便利，可大幅降低製造及維護 運轉成本。 纟宗Ji所述’本發明之側流式非熱電漿廢氣處理裝 置可有效改善習用之種種缺點，可以高壓放電產生電 200822962 裝之方式達到廢氣處理之功效，且可視應用場合任意 並聯或串聯排列組合搭配來增加處理流量及停留時 間，進而使本發明之產生能更進步、更實用、更符合 使用者之所須，確已符合發明專利申請之要件，爰依 法出專利申請。 惟以上所述者，僅為本發明之較佳實施例而已， 當不能以此限定本發明實施之範圍；故，凡依本發明 申請專利範圍及創作說明書内容所作之簡單的等效變 化與修飾，皆應仍屬本發明專利涵 嚴 < 範圍内。 200822962 【圖式簡單說明】 第1圖，係本發明側流式反應器單元之剖面狀態示 意圖。 第2圖，係本發明側流式反應器單元之使用狀態示 意圖。 第3圖，係本發明之使用狀態示意圖。 帛4@ ’係本發明制狀態之立㈣面示意圖。 【主要元件符號說明】 外部電極1 i 貫穿孔1 1 固定法蘭1 2 中間電極2 絕緣層3 高壓放電電源4 置放室5 氣流擋板5 1 絕緣柱5 2 13200822962 IX. Description of the Invention: [Technical Field] The present invention relates to a side-flow non-thermal plasma exhaust gas treatment device, and more particularly to a method for achieving waste gas treatment by means of high-voltage discharge to produce non-thermal plasma. [Prior Art] The non-thermoelectric poly-exhaust gas treatment technology uses a high-pressure gas discharge method to generate free electrons with high kinetic energy, and through such electrons collide with other gas molecules and atoms to transfer energy to form a free activation group such as N, 0, 0H, 03 and excited state molecules, and then with the rapid oxidation or reduction of gaseous pollutants, these air pollutants are converted into harmless or low-pollution substances, to achieve the purpose of purifying the exhaust gas. Because the main external energy is applied to the electrons during the discharge process, the energy of the original gas does not change greatly, that is, the average electron temperature is much larger than the gas temperature, so it is called non-thermal plasma. This technology has the advantages of low energy concentration, energy saving and high efficiency. The structural design of a typical high-pressure discharge plasma reactor is closely related to its application. At present, the main structure of the plasma reactor used in air purification and exhaust gas treatment is pipeline type and flat type. Among them, the flat-type plasma reactor has the advantages of smooth flow field, but its discharge uniformity will increase its difficulty due to the expansion of the flat plate area, thus affecting its processing efficiency and flow rate, so it is rare for large-flow exhaust gas treatment. application. Inline plasma reactors mainly include two types of reactors: pulsed power 200822962 pulse corona and dielectric barrier discharge. In the pulse corona (pUise corona) reactor, there is no insulation material isolation between the discharge electrodes. In order to avoid short circuit, a high-voltage short pulse (<lpsec) is used. Generally, the exhaust gas treatment efficiency is high, as in the US Patent No. 4,695,358 in 1985. one of them. However, due to this short pulse, the pulse power supply cost is very high, and it is not easy to achieve high economic efficiency at a large flow rate, so it is rarely used. The dielectric screen discharge reactor has one or two dielectric insulating materials for isolation between the discharge electrodes to avoid short circuit. Therefore, the general AC high voltage power supply can be used in this method, which can reduce the power supply setting cost. This method originated from the ozone produced by Siemens in Germany in 1857, and there has been no significant change since its use. In addition, high dielectric constant insulating particles are filled into the pipeline reactor to enhance the efficiency of the void electric field. For example, the US Patent No. 5,236,672 in 1993 and the patent number 5,440,876 in 1995 use this method because of the general line tube reaction. The devices are all designed in a DC mode, that is, the direction of the treatment gas μ is the same as the axial direction of the reactor. In the application of large-flow exhaust gas treatment, if the method of increasing the diameter of the pipe is adopted, the voltage applied to the discharge will be unrealistic, and the operation and maintenance of the insulation protection will cause troubles for the working woman. Accepted for adoption. Therefore, the current multi-stage and series reactor design is often used in the treatment of large-flow exhaust gas, but at this time, the uniformity of discharge in individual plasma reactors should be considered, so that the internal gas flow field is smooth and evenly distributed to ensure individual reactions. The corresponding negative load of 200822962 is also consistent; in addition, the overall design of the system should avoid the connection and insulation design of the high voltage electrode without interfering with the overall airflow field distribution. However, in the case of multiple reactors connected in series and parallel, it is necessary to consider the safety factors such as the wiring arrangement and installation maintenance of the high-voltage pipeline inside the device, and considering the smooth distribution of the airflow field, etc., the complexity of the system will increase. Degree and production cost' and it is not easy to maintain in the future. Therefore, the system will cause excessive pressure difference at both ends and it is not easy to discharge evenly after being enlarged in size, so it is rarely used in practical applications. SUMMARY OF THE INVENTION The main object of the present invention is to produce non-thermal plasma by high-voltage discharge for the purpose of large-flow exhaust gas treatment. In order to achieve the above object, the present invention is a side-flow non-thermal plasma exhaust gas treatment device comprising a plurality of side-by-side arrangement side-flow reactor units and a plurality of air flow blocks between adjacent side-flow reactor units board. Wherein, the lateral flow reactor unit comprises an external electrode which can be used as a cathode, and the external electrode surface has a plurality of through holes; an interelectrode electrode which is disposed in the external electrode as an anode; An insulating layer between the external electrode and the intermediate electrode; and a high-voltage power supply electrically connected to the (four) electrode and the intermediate electrode for raising and discharging the high-voltage power source between the external electrode and the intermediate electrode instead of the second plasma . Thereby, the side flow reactor unit can be combined in any series and parallel arrangement to expand the exhaust gas treatment flow to simplify the assembly process to reduce the cost, and the effect of the large flow exhaust gas treatment can be achieved. [Embodiment] - Refer to "Fig. 1" for a schematic view of the cross-sectional state of the side-flow reactor unit of the present invention. As shown in the figure: the present invention is a side-flow non-thermal plasma exhaust gas treatment device comprising a plurality of side-flow reactor elements and a plurality of gas flow baffles (not shown), the plurality of side-flow reactions The unit is arranged in a matrix, and the lateral flow reactor unit is composed of an external electrode 1, an intermediate electrode 2, an insulating layer 3 and a pressure source 4, so that the contaminated gas to be treated flows through The high-voltage discharge zone is used to produce an effect of the action of the electric soil to achieve the treatment of the exhaust gas. The external electrode 1 mentioned above may be a cathode ground, and the external electrode 1 is provided with a plurality of through holes 11 and a fixing flange 1 2 ', and the external electrode 1 is made of a metal conductive material. One of the cylindrical tubes, the metal material may be an alloy of stainless steel, copper, iron, aluminum or the like. The outer electrode 1 is fabricated into a cylindrical tube body having the plurality of through holes 11 by a thin metal plate, and is assembled and integrated with the fixing flange 12, the fixing flange is assembled. It is made of metal conductive material with 4~6 tapping holes for connection and grounding. The total area of the holes of the plurality of through holes 11 may be 40 to 60% of the surface area of the cylindrical tube, and at the same time achieve the goal of maintaining uniformity of discharge. The thickness of the metal plate of the external electrode 1 may be 〇.g~3 mm. The body length may be 60 to 150 cm, the diameter may be 8 to 10 cm, and the through hole 1 1 may have a diameter of 0.5 to 1 cm. 200822962 The intermediate electrode 2 is disposed in the external electrode ,, and the intermediate electrode 2 can be used as an anode, and the intermediate electrode 2 is a rod made of a metal conductive material, and the metal conductive material can be Stainless steel, copper and other alloys. Moreover, the diameter of the intermediate electrode 2 can be regarded as an actual high pressure operation of 0.5 to 3 cm. The insulating layer 3 is disposed between the external electrode 丄 and the intermediate electrode 2 and covers the outside of the intermediate electrode 2, and the insulating layer 3 is a tube body made of an insulating material, and the insulating material may be iron. Furon (PTFE), polyethylene (PE), ceramics, glass, quartz, etc., and the thickness of the insulating layer 3 can be regarded as an actual high-pressure operation and a discharge gap distance of 0.3 to 1.5 cm, and the discharge gap distance can be 15 ~5cm. The high voltage power supply 4 is electrically coupled to the external electrode 丄 and the intermediate electrode 2 to provide the high voltage discharge power required by the external electrode i and the intermediate electrode 2, and the high voltage power supply 4 can be a conventional frequency conversion ( <440 Hz) High-voltage AC power supply or high-frequency (>lkHz) high-voltage AC power supply' and its operating voltage can be between 10 and 60 kV depending on the discharge gap and operating frequency. As such, a novel lateral flow reactor unit is constructed by the above structure. Referring to Fig. 2, it is a schematic view showing the state of use of the side stream reactor unit of the present invention. As shown in the figure: when the lateral flow reactor unit is used, the contaminated gas system to be treated enters from a plurality of through holes 11 on the external electrode 1 of the lateral flow reactor unit, at which time the high pressure The power source 4 supplies a high-voltage AC power source to the external 200822962 electrode 1 and the intermediate electrode 2, so when the contaminated gas enters through the plurality of through holes jL i on the external electrode 1, the humiliation is applied to the outside Between the electrode 1 and the intermediate electrode 2, the gas in the discharge gap between the external electrode 1 and the insulating layer 3 is freely collapsed to generate non-thermal plasma, and then a plurality of high activity freedoms are generated by collision. The base species, such as N, 〇, OH, 〇3 and excited state molecules, react with the contaminated gas to become harmless or low-pollution substances, and discharge the treated gas from the through-holes in the other direction. . Referring to the "3rd and 4th drawings", there is shown a schematic view of the state of use of the present invention and a schematic perspective view of the state of use of the present invention. As shown in the figure: the plurality of side-flow reactor units are arranged in series and discharged in combination with a plurality of gas flow baffles to form a side-flow non-thermal plasma waste fluorine treatment device of the invention, and a plurality of lateral flow reactions are first introduced. The unit is placed in the setting chamber 5, and the discharge mode of the row and column combination is designed, and the staggered or non-interlaced arrangement can be arranged in parallel, series or in series; (4) of the side flow type reaction unit is in the air flow block The plate 5 i is blocked to ensure that the exhaust gas to be treated enters through a plurality of through holes 11 on the external electrode 1 of the lateral flow reactor unit to flow through the discharge region to generate a non-thermal plasma reaction, and the treated gas It is discharged by the penetration of the other direction = 1. The placing chamber 5 guides the gas to be treated to flow through the discharge area of the side flow reactor unit from the lower closed space to react to decompose into harmless or low-pollution substances, and treat the treated gas from .200822962 Discharge in the other direction. The upper part of the placing chamber 5 is connected. The two sides of the placing chamber 5 are provided with a plurality of permanent systems for providing a high voltage line for connecting a high voltage power source, and the outer casing of the ν chamber is grounded for safe maintenance. Because the invention separates the electrical parts, it is advantageous for the airflow field to be smooth and evenly distributed, and to ensure the corresponding load consistency of each side-flow reactor unit, and the electrical parts are in the storage room 5 Above, the side-flowing anti-quot;, the unit of the women's clothing and maintenance are very convenient, and the number of the side-flow reactor units and the arrangement of the lateral flow reactor units that are actually required for disassembly and assembly are required to be regarded as the application place. The treated exhaust gas flow rate, considering the consumption of electric power and gas residence time, and compliance with emission emission regulations or treatment efficiency > 90% or more, provides considerable convenience for design. In addition, in the high-voltage discharge power supply, it is also possible to use one or more sets of high-voltage power supplies in combination with cost-effectiveness and economic considerations. In addition, due to the actual consideration of the exhaust gas treatment flow rate and the % of the future application of the present invention, the side-flow reactor unit is arranged in series and in parallel, and the exhaust gas device is designed to produce an optimal benefit. . Based on the special simplified design of this device, the modular side-flow reactor unit design can be used to facilitate the manufacture, installation and maintenance of the discharge tube, which can greatly reduce the manufacturing and maintenance costs. The side-flow non-thermal plasma exhaust gas treatment device of the present invention can effectively improve various disadvantages of the conventional use, and can be used for high-pressure discharge to generate electricity 200822962 to achieve the effect of exhaust gas treatment, and can be arranged in parallel or in series in visual applications. Combining and matching to increase the processing flow and residence time, so that the invention can be made more progressive, more practical, and more in line with the needs of the user, and indeed meets the requirements of the invention patent application, and patent application is legally required. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; therefore, the simple equivalent changes and modifications made in accordance with the scope of the present invention and the contents of the present specification are modified. All should remain within the scope of the invention. [Brief Description of the Drawings] Fig. 1 is a schematic cross-sectional view showing the side flow reactor unit of the present invention. Fig. 2 is a view showing the state of use of the side stream reactor unit of the present invention. Fig. 3 is a schematic view showing the state of use of the present invention.帛4@ ’ is a schematic diagram of the (four) plane of the state of the invention. [Main component symbol description] External electrode 1 i Through hole 1 1 Fixed flange 1 2 Intermediate electrode 2 Insulation layer 3 High-voltage discharge power supply 4 Placement chamber 5 Air flow baffle 5 1 Insulation column 5 2 13