200817668 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種通過由發光源所產生的透射光及反射光，來 檢驗被測物的光學裝置。 【先前技術】 習知LCD檢驗裝置僅藉由透射光來對被測物進行檢驗。這種 檢驗裝置中，具有透明底面的玻璃基板下方設有光源，而藉由這 一光源所產生的光透過該玻璃基板後透射光，來對被測物進行檢 驗0 第一圖表示這種習知光學裝置。如第一圖所示，習知光學裝 置包括發光單元（100)及測光器（200)，其中，由所述發光單元（1〇〇) 所透射的光經過玻璃基板(B)和被測物（A)後射入測光器（2〇〇)。 即’由發光單元（100)所透射的光透過玻璃基板(B)及被測物（A) 後，可藉由測光器（200)觀察到該透射光。即，在這種習知光學裝 置中’只利用透射光來檢驗被測物（A)。 但是，這種習知光學裝置中並不存在用於支援玻璃基板的部 件，因此作為底面來使用的玻璃基板，由於其具有嚴重變形的特 性，因此，無法在部分領域中觀察到透射光。 此外，如果在该玻璃基板的底面設置支樓部件，則不能像習 知光學裝置那樣利用透射光進行檢驗。 μ 於㈣基板的底面設置支撐部件時，不能僅利用反 射先來對被測物進行準確的檢驗。 【發明内容】 其把問題’本發明的目的是提供—種包含用於支援玻璃 基扳的反射盤之光學裝置。 的反另—目的是提供—種即使在包含用於支援玻璃基板 裝置。、i〜兄下’也摘湘透射光及反射光進行檢驗的光學 5 200817668 為了解決上述課題，本發明採取如下技術手段，即本發明包 括·· 第一發光單元，其用於產生及照射具預定大小波長的第一光 線； 分光鏡，其配置在所述第一發光單元的一側，用於反射或透 射所入射的光線； 光4*透鏡’其配置在所述分光鏡的下方，用於使入射光透過； =二發光單元，其配置在所述光學透鏡下方的侧面，用於產 生及照射具預定大小波長的第二光線； 遮光部件，其具有遮光壁，所述遮光壁設置在第二發光單元 ，圍，^阻隔第二發光單元和*學透鏡之間，以防丄由所述 第二發光單元照射㈣第二光在制物歧射後，射人所述光學 透鏡； >反射片’其位於所述遮光部件的下方，並從所述遮光部 開設置，用於反射透過所述被測物的光； 反射盤，其位於所述反射片的下方；以及 光鏡=器’其配置在所述分光鏡的上方，祕接收透過所述分 其中，所述反射片最好採用棱鏡片。 此时，所述遮光部件最好设成开^。 可以等 門距發明光學裝置中’以所述光學透鏡為中心 間距叹置兩飢X上所述第二發光單元及遮光 而且，本發明光學裝置中，以所述BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical device for inspecting an object to be measured by transmitted light and reflected light generated by a light source. [Prior Art] The conventional LCD inspection apparatus tests the object to be tested only by transmitted light. In the inspection apparatus, a light source is disposed under the glass substrate having a transparent bottom surface, and the light generated by the light source transmits light through the glass substrate to inspect the object to be tested. Know the optical device. As shown in the first figure, the conventional optical device includes a light emitting unit (100) and a photometer (200), wherein light transmitted by the light emitting unit (1) passes through the glass substrate (B) and the measured object (A) After entering the photometer (2〇〇). That is, after the light transmitted by the light-emitting unit (100) passes through the glass substrate (B) and the object (A), the transmitted light can be observed by the photometer (200). Namely, in this conventional optical device, only the transmitted light is used to inspect the object to be tested (A). However, since such a conventional optical device does not have a member for supporting a glass substrate, the glass substrate used as the bottom surface has a characteristic of being severely deformed, so that transmitted light cannot be observed in some fields. Further, if a branch member is provided on the bottom surface of the glass substrate, it cannot be inspected by transmitted light like a conventional optical device. μ When the support member is placed on the bottom surface of the (4) substrate, the object to be tested cannot be accurately inspected only by reflection first. SUMMARY OF THE INVENTION It is an object of the present invention to provide an optical device including a reflective disk for supporting a glass base plate. The opposite is to provide - even if it is included in a device for supporting a glass substrate. , i~ brothers under the 'optical light and reflected light for inspection 5 200817668 In order to solve the above problems, the present invention adopts the following technical means, that is, the first light-emitting unit for generating and illuminating the device a first light of a predetermined size wavelength; a beam splitter disposed on one side of the first light emitting unit for reflecting or transmitting incident light; and a light 4* lens disposed below the beam splitter Passing incident light; a second light emitting unit disposed on a side below the optical lens for generating and illuminating a second light having a predetermined wavelength; a light shielding member having a light shielding wall, the light shielding wall being disposed at a second illuminating unit surrounds the second illuminating unit and the illuminating lens to prevent 丄 from being irradiated by the second illuminating unit. (4) the second light is incident on the optical lens after the object is dissected; a reflection sheet 'located under the light shielding member and disposed from the light shielding portion for reflecting light transmitted through the object to be tested; a reflection disk positioned below the reflection sheet; and a light mirror The = device is disposed above the beam splitter, and the secret receiving portion passes through the portion, and the reflecting sheet preferably uses a prism sheet. At this time, the light shielding member is preferably set to open. The second light-emitting unit and the light-shielding may be slanted at a distance from the optical lens as the center of the optical device, and the optical device of the present invention is
設置所述第二發光單元及遮光部件。“為中一啊形連接 【實施方式J 下面結合附圖，詳細說明本發明光學 願發明的各輸嫩，物崎本 6 200817668 實施例1 : 下面參照第二圖至第五圖，來說明本發明光學裝置的第一實 施例。 首先說明本發明光學裝置的結構。如第二圖所示，本發明光 學裝置包括第一發光單元（10)、分光鏡(20)、光學透鏡(30)、第 二發光單元(40)、遮光部件(50)、反射片（6())、反射盤（7〇)、測 光器（80)。 其中，第一發光單元（1〇)用於產生並照射具一定大小波長的 第一光線，所照射的第一光線射入分光鏡(2〇)。 分光鏡(20)位於所述第一發光單元（1〇)的一側，其用於反射 所射入光的一部分，而另一部分入射光則被分光鏡（2〇)透射。 被反射的第一光線射入像濾光片或TFT等被測物(A)，而射入濾光 片或TFT等的第一光線則在其表面反射或透過。 光學透鏡（30)配置在分光鏡（2〇)的下方，其用於聚集入射 光’並將其透過。 第一發光單元(40)配置在所述光學透鏡(3〇)下方的一側，其 用於產生及照射具預定大小波長的第二光線。由所述第二發光單 元(40)所產生的第二光線射入濾光片或TFT。射入濾光片^ TFT 的第二光線在其表面反射或透過。 遮光部件（50)設置在第二發光單元(4〇)的周圍，其上設有遮 光壁，所述遮光壁用於阻隔第二發光單元（4〇)和光學'透鏡（3〇“） 之間，以防止由所述第二發光單元（4〇)照射出的第二光線在被 測物處反射後，射入所述光學透鏡（30)。 為了有效地圍住第二發光單元(40)的周圍，所述遮光部件(5 〇)可設成” 型，或者也可設成半圓形或平板狀。 一反射片（6〇)位於所述遮光部件（50)的下方，並從遮光部件（5〇) 隔開設置。所謂反射片（60)是用於反射透過濾光片或τρτ、玻璃基 板的光線的片體。本實施例中反射片（6〇)可以是棱鏡片。第五圖 7 200817668 中示出棱鏡片，射入棱鏡片的光線將根據不同的波長，向不同的 方向反射出。所述棱鏡片可以是圓錐形，也可以是三角錐形。 反射盤（70)固定在反射片（60)的下方。反射盤（7〇)用於穩定 地固定濾光片或TFT等被測物(A)及附著有被測物的玻璃基板⑻。 本實施例中’可通過配置在分光鏡(20)上方的測光器（8〇)， 觀察到透過濾光片或TFT等被測物，或者由所述被測物反射的光。 下面，參照第三圖及第四圖，來看一下通過本發明光學裝置， 利用反射光及透射光對被測物進行檢驗的方法。 首先，參照第三圖說明利用第一發光單元（10)所引起的反射 光來檢驗被測物的方法。如第三圖所示，由第一發光單元（1〇)所 產生的第一光線(K)在分光鏡(20)反射，並射入光學透鏡(3〇)。而 透過光學透鏡(30)的第一光線(K)則到達濾光片或TFT(B)等被測 物。濾光片或TFT(B)具有反射大部分的光，而只透過一部分光線 的特性。因此，只要弟一光線(K)的強度不是很大，大部分的光線 (L)被反射，而重新回到光學透鏡(3〇)。這些反射光(l)中的一部 分將透過分光鏡(20)後到達測光器（80)。如此，利用第一發光單 元（10)所引起的反射光，可觀察到濾光片或TFT(B)的表面狀態。 此時’濾光片的反射影像利於檢查濾光片中凸出的部分（即將此叫 作黑（black)缺陷）。 其次，參照第四圖說明利用第二發光單元(4〇)所引起的透射 光來檢驗被測物的方法。如第四圖所示，由第二發光單元（4〇)所 產生的弟一光線直接射入濾光片或TFT(B)。如上述說明，在濾光 片中大部分光線被反射，因此為了利用透射光，需要讓第二發光 ，元（40)產生遠大于第一發光單元（1〇)所產生的光線之強度的 光。在濾光片或TFT(B)處被反射的光(M)則被遮光部件（5〇)擋住而 免於進入光學透鏡(30)。在此，可適當選擇遮光部件（5〇)的位置， 以免反射光(M)進入光學透鏡(30)。由濾光片或吓吖幻透過的光(N) 將透過玻璃基板(β)後，到達反射片（6〇)。本實施例中，反射片（6〇) 8 200817668 是棱鏡片，在第五圖中示出光的前進方向。如第五圖所示，所進 入的光根據不同的波長，被反射而分散於不同的方向。其中，一 部分光線重新透過玻璃基板(B)及濾光片或TFT(B)，並射入光學透 鏡(30)。這些透射光(N)將透過分光鏡(2〇)後，到達測光器（8〇)。 如此，可利用第二發光單元（4〇)所引起的透射光來觀察濾光片或 TFT(B)的狀態。此時，濾光片的透射影像利於檢查濾光片中凹進 的部分（即將此叫作白（white)缺陷）。 這樣，在檢驗附著於玻璃基板上的濾光片或TFT的雜質時， 可通過選擇利用第一發光單元所引起的反射光或第二發光單元所 引起的透射光，來準確地觀察濾光片或TFT的全般領域。另外， 在利用第一發光單元所引起的透射光時，可通過增加遮光部件， 以防止受到反射光的干擾。 實施例2 卜曲，芩妝弟六圖說明本發明光學裝置的第三實施例 省略說明和實施例1相同的結構。 第六圖表示本發明另一實施例中的遮光部件。 乂一ΐ第六圖所示，在光學透鏡(30)的周圍配置有兩個以上第二 I光單元(40)及遮光部件（5〇)。如第六圖所示，第二發光單元(仙） ^遮光部件⑽可以有4個，但也可配置其他數目。從業人員也 應該可以理解職了防止由第二發光單元㈤所產生的光線直 被測物膜片上反射後進入光學透鏡（30 )，所述遮光部件(50) 在第二光源(4G)的賴可設置具—定深度的遮光壁。 ，可在光學透鏡（3Q)關圍配置多數第二發光單元(4〇)及 =光。卩件（50)’由此更加有效地通過反射光（第四圖中符號n)來進 行對濾光片的觀察及檢驗操作。 實施例3 Μ ’參照第七圖說明本發明光學裝置的第三實施例。在此， 9 200817668 也省略說明和實施例1相同的結構。 置。遮光部件⑼)以光學透鏡_=先= 部件⑽可設成如_所』=He，光 ，形狀。遮光部件⑽的内部可配置多個或 有贱财祕光（帛四_賴獅^==觀 利範====上；實施例φ而在後述的申請專 的發明=式。在不脫射請專利範圍中記載 π” 、靶圍内，從業者所能進行的各種修飾及變更也應該 屬於本發明的保護範圍。 ，發明的光學裝置和f知技術不同，即使在玻璃基板被反射 ίίΐ= 下’也可以通過其他光源所引起的透射光’來檢驗 外’本發明的光學裝置可麵綱透射光及反射光，由此 =確地觀^慮光片或TFT的全般區域。 ^夕’利用第二發光單元所引起的透射光的情況下，可增加使用 遮光部件，由此可防止受到反_的干擾。 200817668 【圖式簡單說明j f一圖是習知光學裝置的剖視圖。 ^士圖是根據本發明第一實施例的光學裝置剖視圖。 第三圖表示根據本發明第一實施例的光學裝置中第一光線的 前進方向。The second light emitting unit and the light blocking member are disposed. "Embodiment J. The following is a detailed description of the various aspects of the optical invention of the present invention in conjunction with the accompanying drawings, and the article 5: 1717668. Embodiment 1: The following is a description of the present invention with reference to the second to fifth figures. First Embodiment of Inventive Optical Device First, the structure of the optical device of the present invention will be described. As shown in the second figure, the optical device of the present invention includes a first light emitting unit (10), a beam splitter (20), an optical lens (30), a second light emitting unit (40), a light blocking member (50), a reflection sheet (6()), a reflection plate (7〇), and a photometer (80). wherein the first light emitting unit (1〇) is used for generating and irradiating a first light having a wavelength of a certain size, the first light irradiated is incident on the beam splitter (2〇). The beam splitter (20) is located on one side of the first light emitting unit (1〇), and is used for reflection One part of the light is incident, and the other part of the incident light is transmitted by the beam splitter (2〇). The reflected first light is incident on the object (A) such as a filter or TFT, and is incident on the filter or TFT. The first light is reflected or transmitted through its surface. The optical lens (30) is placed under the beam splitter (2〇) a first light-emitting unit (40) disposed on a side below the optical lens (3) for generating and illuminating a second light having a predetermined wavelength The second light generated by the second light emitting unit (40) is incident on the filter or the TFT. The second light incident on the filter TFT is reflected or transmitted through the surface thereof. The light shielding member (50) is disposed at a periphery of the second light emitting unit (4〇) is provided with a light shielding wall for blocking between the second light emitting unit (4〇) and the optical 'lens (3〇') to prevent The second light emitted by the second light emitting unit (4〇) is reflected by the object and then injected into the optical lens (30). In order to effectively surround the periphery of the second light emitting unit (40), the light shielding member (5 〇) may be set to a "type", or may be set to a semicircular shape or a flat shape. A reflection sheet (6 〇) is located at the The light-shielding member (50) is disposed below the light-shielding member (5). The reflection sheet (60) is a sheet for reflecting light transmitted through the filter or τρτ or the glass substrate. The reflective sheet (6〇) may be a prism sheet. The prism sheet is shown in Fig. 7 200817668, and the light incident on the prism sheet will be reflected in different directions according to different wavelengths. The prism sheet may be conical. The reflection plate (70) may be fixed under the reflection sheet (60). The reflection plate (7〇) is used for stably fixing the object (A) such as a filter or a TFT, and is attached to the measurement. The glass substrate (8) of the object. In the present embodiment, the object to be measured such as a filter or a TFT can be observed by a photometer (8〇) disposed above the beam splitter (20), or can be reflected by the object to be measured. Hereinafter, referring to the third and fourth figures, the optical device of the present invention is utilized. A method of inspecting an object to be measured by reflected light and transmitted light. First, a method of inspecting a measured object by reflected light caused by the first light emitting unit (10) will be described with reference to a third figure. As shown in the third figure, The first light (K) generated by the first light emitting unit (1) is reflected by the beam splitter (20) and injected into the optical lens (3〇), and the first light (K) transmitted through the optical lens (30) is It reaches the object to be measured such as a filter or a TFT (B). The filter or the TFT (B) has a characteristic of reflecting most of the light and transmitting only a part of the light. Therefore, as long as the intensity of the light (K) is not very high Large, most of the light (L) is reflected and returned to the optical lens (3〇). Some of these reflected light (1) will pass through the beam splitter (20) and then reach the photometer (80). The reflected light caused by the first light-emitting unit (10) can observe the surface state of the filter or the TFT (B). At this time, the reflected image of the filter is favorable for checking the convex portion of the filter (ie, this is It is called black defect. Next, the transmitted light caused by the second light-emitting unit (4〇) is explained with reference to the fourth figure. The method of testing the object to be tested. As shown in the fourth figure, the light generated by the second light-emitting unit (4〇) is directly incident on the filter or the TFT (B). As described above, in the filter Most of the light is reflected, so in order to utilize the transmitted light, it is necessary to make the second light, the element (40) generate light much larger than the intensity of the light generated by the first light emitting unit (1〇). In the filter or TFT (B The reflected light (M) is blocked by the light shielding member (5〇) from entering the optical lens (30). Here, the position of the light shielding member (5〇) can be appropriately selected to prevent the reflected light (M) from entering. The optical lens (30) will pass through the glass substrate (β) by the filter or the light transmitted through the glass substrate (β), and then reach the reflection sheet (6〇). In the present embodiment, the reflection sheet (6〇) 8 200817668 is a prism sheet, and the direction of advancement of light is shown in the fifth diagram. As shown in the fifth figure, the incoming light is reflected and dispersed in different directions according to different wavelengths. Among them, a part of the light is re-transmitted through the glass substrate (B) and the filter or TFT (B), and is incident on the optical lens (30). These transmitted light (N) will pass through the beam splitter (2〇) and reach the photometer (8〇). Thus, the state of the filter or the TFT (B) can be observed by the transmitted light caused by the second light-emitting unit (4〇). At this point, the transmitted image of the filter facilitates inspection of the recessed portion of the filter (ie, this is called a white defect). Thus, when the impurities of the filter or the TFT attached to the glass substrate are inspected, the filter can be accurately observed by selecting the reflected light caused by the first light-emitting unit or the transmitted light caused by the second light-emitting unit. Or the general field of TFT. In addition, when the transmitted light caused by the first light-emitting unit is utilized, the light-shielding member can be added to prevent interference by the reflected light. (Embodiment 2) A third embodiment of the optical device of the present invention will be described with reference to the same structure as that of the first embodiment. Fig. 6 is a view showing a light shielding member in another embodiment of the present invention. As shown in the sixth diagram, two or more second I light units (40) and light blocking members (5 inches) are disposed around the optical lens (30). As shown in the sixth figure, the second light-emitting unit (sin) may have four light-shielding members (10), but other numbers may be arranged. The practitioner should also be able to understand that the light generated by the second light-emitting unit (5) is prevented from being reflected on the test object film and enters the optical lens (30), and the light-shielding member (50) is at the second light source (4G). Lai can be equipped with a shading wall with a certain depth. A plurality of second light-emitting units (4 turns) and = light can be disposed around the optical lens (3Q). The member (50)' thus performs the observation and inspection operation of the filter more efficiently by reflecting light (symbol n in the fourth figure). Embodiment 3 Μ A third embodiment of the optical device of the present invention will be described with reference to the seventh embodiment. Here, 9 200817668 also omits the same configuration as that of the first embodiment. Set. The light-shielding member (9) is optical lens _=first = component (10) can be set to _, _ = He, light, shape. The inside of the light-shielding member (10) may be configured with a plurality of or a wealthy secret light (帛四_赖狮^==观利范====上; the embodiment φ and the application-specific invention described later = formula. In the patent range, π" and the target circumference, various modifications and changes that can be made by the practitioner are also within the scope of protection of the present invention. The optical device of the invention differs from the known technology even when the glass substrate is reflected ίίΐ= The lower 'can also pass the transmitted light caused by other light sources' to check the outer surface of the optical device of the present invention, which can transmit light and reflected light, thereby accurately determining the entire area of the light sheet or TFT. In the case of using the transmitted light caused by the second light-emitting unit, it is possible to increase the use of the light-shielding member, thereby preventing the interference of the reverse light. 200817668 [Simplified illustration of the drawing jf is a cross-sectional view of a conventional optical device. Fig. is a cross-sectional view of an optical device according to a first embodiment of the present invention. The third figure shows the advancing direction of the first light ray in the optical device according to the first embodiment of the present invention.
第四圖表示根據本發明第一實施例的光學裝置中第二光線的 前進方向。 V 第五圖是本發明的第一實施例中反射片的俯視圖。 第六圖是本發明的第二實施例中遮光部件的俯視圖 第七圖是本發明的第三實施例中遮光部件的俯視 【主要元件符號說明】 (共計16項元件符號或編號） 10:第一發光單元 2〇:分光鏡 3〇:光學透鏡 40:第二發光單元 50:遮光部件 ⑼：反射片 70:反射盤 80:測光器 100:發光單元 200:測光器 A:被測物 B:玻璃基板 K:第一光線 L:光線 M:反射光 N:透射光The fourth diagram shows the advancing direction of the second light in the optical device according to the first embodiment of the present invention. V Fig. 5 is a plan view of the reflection sheet in the first embodiment of the present invention. 6 is a plan view of a light shielding member in a second embodiment of the present invention. FIG. 7 is a plan view of a light shielding member in a third embodiment of the present invention. [Main component symbol description] (a total of 16 component symbols or numbers) 10: One light-emitting unit 2〇: beam splitter 3〇: optical lens 40: second light-emitting unit 50: light-shielding member (9): reflective sheet 70: reflective disk 80: photometer 100: light-emitting unit 200: photometer A: object B: Glass substrate K: first light L: light M: reflected light N: transmitted light