KR20110122940A - Reflective type optical sensor for reflector - Google Patents

Reflective type optical sensor for reflector Download PDF

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Publication number
KR20110122940A
KR20110122940A KR1020100042307A KR20100042307A KR20110122940A KR 20110122940 A KR20110122940 A KR 20110122940A KR 1020100042307 A KR1020100042307 A KR 1020100042307A KR 20100042307 A KR20100042307 A KR 20100042307A KR 20110122940 A KR20110122940 A KR 20110122940A
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South Korea
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light
unit
optical sensor
light receiving
reflector
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KR1020100042307A
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Korean (ko)
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KR101185076B1 (en
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강정수
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주식회사 지노이드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)

Abstract

PURPOSE: A reflective optical sensor for a reflector is provided to integrate light scattered by a light spreading unit at a light receiving unit by arranging light integrating unit between the light spreading unit and the light receiving unit. CONSTITUTION: A reflective optical sensor(30) for a reflector comprises a light transmitting unit(300), a light receiving unit(310), and a light spreading unit(320). The light transmitting unit emits a spot size of optical beam to a target. The light receiving unit comprises a plurality of receiving elements(311,312,313,314,315,316). The light receiving unit is arranged where the optical beam emitted from the transmitting unit is reflected by the target and progresses. The light spreading unit is arranged at an interval from the light receiving surface of the light receiving unit. The light spreading unit transmits and scatters light incoming from the outside, and provides it to the light receiving unit.

Description

Reflective optical sensor for reflector {Reflective type optical sensor for reflector}

The present invention relates to an optical sensor, and more particularly, to an optical sensor capable of accurately detecting a defect of an inspection object having reflective characteristics by using a laser beam providing spot illumination.

 Currently, the glass-related industry continues to grow with the development of the display industry such as LCD. In addition, as the display is enlarged, the glass substrate is also enlarged, and the thickness of the glass is also thinned for cost reduction and technology improvement. Accordingly, when a glass substrate is damaged in a glass manufacturing process and a display manufacturing process using a large glass substrate, when the glass substrate is not detected and proceeds to the final process of the display manufacturing, the production yield is lowered. There is a problem that the overall manufacturing cost is increased. In addition, when glass fragments, etc., occur due to the damage of the glass substrate, there is also a problem of contaminating manufacturing process equipment disposed in the workplace.

 On the other hand, in order to determine whether or not the surface of the general object does not have reflection characteristics of the damage, by scanning a small optical beam, such as a laser to the surface of the object, by detecting the light emitted by the small light beam diffused from the object In addition, determine whether the object is damaged. However, in the case of a reflector having a reflective property such as glass, when light is incident on the surface, the light is reflected only in the direction of the reflection angle with respect to the incident angle according to the law of reflection of light, and thus cannot be diffused. Therefore, when the above-described method of detecting a defect of an object using a laser optical beam, which is spot illumination, is applied to a reflector such as a glass substrate, when the glass substrate vibrates or a displacement occurs due to a change in the surrounding environment, The position at which the beam is incident on the glass substrate changes. As a result, as the position incident on the glass substrate changes, the direction reflected from the glass substrate also changes, making it difficult for the light receiving element to integrate the optical beam reflected from the glass substrate. In particular, as the glass substrate becomes larger in size and thinner in recent years, the glass substrate vibrates greatly even when a small change occurs in the surrounding environment. Therefore, when the above-described method is applied to a glass substrate, which is a reflector, it is difficult to integrate the optical beam reflected from the glass substrate, and a problem arises in that it is impossible to perform stable sensing regardless of the surrounding environment.

Accordingly, in order to detect defects of a reflector such as a glass substrate, conventionally, an ultrasonic sensor, a diffuse reflection type optical sensor using an LED, an image pattern analysis by camera imaging, and the like are used.

 First, since the ultrasonic sensor has a large detection area, the method of using the ultrasonic sensor can accurately determine the presence or absence of a glass substrate, but there is a problem in that partial breakage of the glass substrate cannot be determined. Moreover, the image pattern analysis method by camera imaging has many weak points in manufacturing cost, installation environment, processing time, etc.

The method of using the diffuse reflection type optical sensor using the LED is a method of detecting the reflected light after scanning the light in a fairly wide range using the LED. In this regard, Korean Patent Laid-Open Publication No. 10-2006-53847 discloses a method for inspecting a defect of a glass plate using a red, blue, and green LED as a light source. However, the LED light source has a problem that the distance between the light source and the inspection object should be minimized in order to detect an accurate defect on the inspection object as the area to be scanned becomes wider from the light source.

SUMMARY OF THE INVENTION An object of the present invention for solving the above problems is to provide a reflective optical sensor for a reflector capable of accurately detecting defects of an inspection object having reflective characteristics by using a spot size light source such as a laser optical beam. .

 A feature of the present invention for achieving the above-described technical problem, relates to an optical sensor for inspecting the surface defects of the inspection object reflection characteristics, the optical sensor includes a light transmitting unit for scanning a spot-sized optical beam to the inspection object; A light receiving unit comprising a plurality of light receiving elements, the light receiving unit being disposed at a position where the optical beam scanned from the light transmitting unit is reflected by the inspection object; A light diffusing unit disposed to be spaced apart from the light receiving surface of the light receiving unit by a predetermined distance and transmitting and scattering light incident from the outside; And a light collecting device for condensing the light scattered through the light diffusing unit in a direction in which the light receiving unit is located.

 In the reflection type optical sensor for a reflector according to the above-mentioned feature, the light transmitting portion is preferably composed of an oscillator for generating a laser beam.

 In the reflective optical sensor for a reflector according to the above features, the light diffusing unit is preferably a diffusing film for transmitting and scattering light incident from the outside.

In the reflective optical sensor for a reflector according to the above-mentioned feature, the light integrated element is preferably composed of any one of a lens, a prism and a prism sheet.

 While the conventional optical sensor using a LED has a detection distance of several mm to several tens of mm, the reflective optical sensor for reflector according to the present invention uses a spot size laser optical beam, which is a distance between the light source and the inspection object. Even when the detection distance is 200 ~ 230mm, accurate and stable detection can be achieved.

In addition, the reflective optical sensor for a reflector according to the present invention can be stably detected even if a change in the surrounding environment such as vibration or displacement occurs by introducing a light diffusion unit between the inspection object and the light receiving element.

In addition, the reflective optical sensor for a reflector according to the present invention may arrange the light integrated element between the light diffusing unit and the light receiving element, thereby integrating the light scattered by the light diffusing unit in the direction of the light receiving element. Since the light scattered by the light diffusing unit is scanned in a wide area, the light intensity per unit area becomes small, so that accurate detection is not possible when external light incident to the light receiving element other than the light reflected from the inspection object occurs. Becomes difficult. Therefore, when the scattered light is integrated by using the light integrated device to increase the intensity of the received light, damage of the inspection object can be detected more accurately.

1 is a structural diagram showing a reflective optical sensor for a reflector according to a first embodiment of the present invention.
FIG. 2 is a view illustrating a path in which an optical beam of an optical sensor travels to / from a glass substrate as the substrate shakes in the reflective optical sensor according to the first exemplary embodiment of the present invention.
3 is a structural diagram showing a reflective optical sensor for a reflector according to a second embodiment of the present invention.
FIG. 4 is a view illustrating a path in which an optical beam of an optical sensor travels to / from a glass substrate as the substrate shakes in the reflective optical sensor according to the second exemplary embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail the structure and operation method of the reflective optical sensor for a reflector according to an embodiment of the present invention.

First embodiment

 1 is a structural diagram schematically showing a reflective optical sensor for a reflector according to a first embodiment of the present invention. Referring to FIG. 1, the reflective optical sensor 10 according to the present invention includes a light transmitting unit 100, a light receiving unit 110, a light diffusing unit 120, and a housing (not shown). The housing serves as a case in which the light transmitting element, the light receiving element, and the light diffusing portion are disposed to be fixed.

The light transmitting part 100 is composed of an optical element for scanning an optical beam of the spot size, such as a laser, the light transmitting portion scans an optical beam of the spot size, such as a laser to the inspection object.

The light receiving unit 110 includes a plurality of light receiving elements 111, 112, 113, 114, 115, and 116 and is disposed at a position adjacent to the light transmitting unit 100. Each of the light receiving elements 111, 112, 113, 114, 115, and 116 of the light receiving unit 110 is for detecting light reflected from the light emitting unit 100 and reflected from the inspection object, and configured as a photo detector. Can be. Each of the light receiving elements 111, 112, 113, 114, 115, and 116 of the light receiving unit 110 may be positioned in a direction in which light emitted from the light transmitting unit 100 is reflected by the inspection object and travels. .

The light diffusing unit 120 may be configured as a diffusion film having light transmission and scattering properties, and may be disposed at a front surface separated from the light receiving surface of the light receiving elements 111, 112, 113, 114, 115, and 116 by a predetermined distance. Is placed. The light diffuser 120 diffuses the light reflected from the inspection object and provides the light to the light receiver 110.

The optical sensor according to the first embodiment of the present invention having the above-described configuration facilitates the integration of reflected light even if the position and direction change due to vibration or displacement of the inspection object. 2 is a diagram showing a path of an optical beam traveling in various environments in the reflective optical sensor for a reflector according to the first embodiment. Referring to FIG. 2, the light transmitting part 100 of the optical sensor 10 scans light having a specific incident angle θ i to a glass substrate a1 that is an inspection object having reflective characteristics. Unlike other inspection objects that diffuse the incident light, the inspection object having the characteristics of the reflector has a reflection angle (θ r = θ) having the same size as a specific incident angle θ i based on the surface of the inspection object according to the law of reflection. i ) reflect light. The reflected light is transmitted through the light diffusing unit 120 of the optical sensor 10 to be scattered, and is spread to a wider area than the conventional spot sized optical beam and irradiated to the light receiving unit 110.

On the other hand, when the positions of the inspection objects a2 and a3 change due to environmental changes such as vibration or displacement, the reflection direction of the light reflected from the inspection object is changed. At this time, unlike the conventional optical sensor that could not detect the reflected light when it is out of the detection region of the light receiving unit 110 by the change in the direction of the reflected light, the optical sensor 10 according to the present invention is a light diffusion unit Light scattered by the 120 is irradiated to the plurality of light receiving elements 111, 112, 113, 114, 115, and 116. Therefore, the optical sensor 10 according to the present invention can accurately detect the change in the surrounding environment, such as shaking of the glass substrate.

The optical sensor 10 can be detected even if the inspection object having the characteristics of the reflector changes up to 3 ° up and down from the center, and can be detected even at a distance of up to 70 mm based on when the cutting planes of the inspection object are parallel. Do.

2nd Example

Hereinafter, the structure and operation of a reflective optical sensor for a reflector according to a second embodiment of the present invention will be described in detail with reference to the accompanying drawings. The reflective optical sensor for a reflector according to the second embodiment has a structure similar to that of the optical sensor according to the first embodiment, but further includes an optical integrated element between the optical diffuser and the light receiver. Referring to FIG. 3, the reflective optical sensor 30 for a reflector according to the second exemplary embodiment of the present invention includes a light projector 300, a light receiver 310, a light diffuser 320, a light integrated device 330, and the like. A housing (not shown). In the second embodiment, the rest of the components except for the light integrated element 330 are the same as those of the first embodiment, and overlapping description thereof will be omitted.

The light integrated device 330 of the second embodiment is composed of any one of a lens, a prism, and a prism sheet, and is disposed between the light diffusing unit 320 and the light receiving unit 310. The light integrating element 330 serves to condense the light scattered by the light diffusing unit 320 to condense in the direction in which the light receiving elements 311, 312, 313, 314, 315, and 316 are located.

 The optical sensor 30 according to the second embodiment of the present invention having the above-described configuration enables accurate detection even if noise such as external light other than the light reflected from the inspection object is generated. 4 is a view showing a path of an optical beam traveling in various environments in the reflective optical sensor 30 for a reflector according to the second embodiment. In the second embodiment, the path of travel of the optical beam to the light diffusing section 320 is the same as those of the first embodiment, and thus redundant description is omitted.

Referring to FIG. 4, the light scattered from the light diffusing unit 320 is refracted while passing through the light integrating element 330 to condense in the direction of the light receiving element. Generally, scattered light has a property of decreasing light intensity per unit area instead of being diffused to a wide area. When the light scattered by the light diffusing unit 120 is directly scanned to the light receiving unit 110 as in the first embodiment, the light may be detected by the light receiving unit 110 in a large area. Since the intensity is weakened, when noise such as external light other than the light reflected from the inspection object (a1, a2, a3) occurs, it may be difficult to accurately detect. Therefore, the optical sensor 30 according to the second embodiment of the present invention condenses the scattered light to amplify the received signal, and can accurately detect even when external noise occurs.

Although the present invention has been described above with reference to preferred embodiments thereof, this is merely an example and is not intended to limit the present invention, and those skilled in the art do not depart from the essential characteristics of the present invention. It will be appreciated that various modifications and applications which are not illustrated above in the scope are possible. And differences relating to such modifications and applications should be construed as being included in the scope of the invention as defined in the appended claims.

Reflective optical sensor for a reflector according to the present invention can be widely used in the field to detect the defects of the inspection object having the characteristics of the reflector. An inspection object having the characteristics of glass and a reflector may be broken when an impact is applied, that is, brittle, and may be broken during a cutting or processing process. When the whole process is performed without extracting the damaged inspection object, in the field of manufacturing a product based on the inspection object, not only the cost loss but also the contamination of the manufacturing process equipment may be caused by the broken fragments of the inspection object. Therefore, since it is necessary to accurately inspect whether or not the inspection object having the characteristics of the reflector, the reflective optical sensor for the reflector of the present invention can be used.

10, 30: reflective optical sensor for reflector
100, 300: floodlight
110, 310: light receiver
111-116, 311-316: Light receiving element
120, 320: light diffusion unit
330: photo integrated device

Claims (5)

In the optical sensor for inspecting defects on the surface of the inspection object having a reflective characteristic,
A light transmitting unit scanning a spot sized optical beam to an inspection object;
A light receiving unit comprising a plurality of light receiving elements, the light receiving unit being disposed at a position where the optical beam scanned from the light transmitting unit is reflected by the inspection object; And
A light diffusion unit disposed to be spaced apart from the light receiving surface of the light receiving unit by a predetermined distance, and configured to transmit and scatter light incident from the outside to the light receiving unit;
Reflective optical sensor for a reflector having a.
The method of claim 1,
The light transmitting unit is a reflection type optical sensor for a reflector, characterized in that for using a laser oscillator for generating a laser beam.
The method of claim 1,
The light diffusing unit is a reflection type optical sensor for the reflector, characterized in that the diffusion film for transmitting and scattering the light incident from the outside. The method of claim 1,
The reflection type optical sensor for the reflector further includes a light integration element disposed between the light diffusion unit and the light receiving unit, and the light integration element transmits the light scattered through the light diffusion unit and concentrates the light scattered in the direction of the light receiving unit. Reflective optical sensor for reflectors. The method of claim 4, wherein
The optical integrated element is a reflection type optical sensor for a reflector, characterized in that composed of any one of a lens, a prism and a prism sheet.
KR20100042307A 2010-05-06 2010-05-06 Reflective type optical sensor for reflector KR101185076B1 (en)

Priority Applications (1)

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KR20100042307A KR101185076B1 (en) 2010-05-06 2010-05-06 Reflective type optical sensor for reflector

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Application Number Priority Date Filing Date Title
KR20100042307A KR101185076B1 (en) 2010-05-06 2010-05-06 Reflective type optical sensor for reflector

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KR101185076B1 KR101185076B1 (en) 2012-09-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110998223A (en) * 2017-06-26 2020-04-10 特里纳米克斯股份有限公司 Detector for determining the position of at least one object

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035608B2 (en) 1980-09-13 1985-08-15 松下電工株式会社 Position/attitude control device
JP2005321319A (en) 2004-05-10 2005-11-17 Fujitsu Ltd Apparatus and method for inspecting surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110998223A (en) * 2017-06-26 2020-04-10 特里纳米克斯股份有限公司 Detector for determining the position of at least one object
CN110998223B (en) * 2017-06-26 2021-10-29 特里纳米克斯股份有限公司 Detector for determining the position of at least one object

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