200817259 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於基板分類系統，尤其是關於將基板從分 類來源卡匣暫時收納於暫存站之後，收納於分類目的卡匣 ‘並藉此進行基板的分類。 【先前技術】 # 第18圖係顯示以往的基板分類系統200的槪略構成 之俯視圖，第19圖係顯示基板分類系統200的正面圖， 爲第18圖之XIX的箭頭方向之圖式。 基板分類系統200係具備可載置分類來源卡匣202及 多數個分類目的卡匣2 04之基台206;可藉由單片方式而 搬送基板W之機器人208;以及可載置分類目的卡匣2 04 之置放架210。分類來源卡匣202及分類目的卡匣204具 有同樣構成，各個卡匣可收納同等數目的基板。 於基台206及置放架210之間，可使用起重機（圖中 未顯示）而使分類目的卡匣2 04適當的移動。 一旦隨機收納有不同種類的多數片基板之分類來源卡 匣202，設置（載置）於基台206上，則收納於分類來源 卡匣202之各種基板之資訊（例如關於基板的種類之資 訊；於各基板中以條碼所表示之資訊），可藉由讀碼機等 所讀出，並藉由機器人208從分類來源卡匣202當中一次 搬出1片基板，且將搬出之基板搬入至分類目的卡匣2 04 中〇 -5- 200817259 (2) 於搬入時，係依據不同種類的基板而將 類目的卡匣204，因此於各個分類目的卡匣 不同種類而收納有基板。 亦即，隨機收納於分類來源卡匣202之 收納至分類目的卡匣2 04時，係依據種類的 而收納，而進行各片基板的分類。 於基板分類系統200中，係於使用機器 來源卡匣2 02中將基板搬送至分類目的卡匣 基板的分類，因此於基台206及置放架210 的卡匣2 04的替換動作（操作）較多，因而 率進行基板的分類之問題。 亦即，若於分類來源卡匣202中收納有 如爲1 〇種）的基板，並且如第1 8圖所示般 上僅能載置3個分類目的卡匣204時，則於 卡匣204中，僅能搬入3種的基板，而於 2 02中仍殘留7種的基板。此外，僅就上述 言，於基台206上所載置之3個分類目的卡 板並非滿載收納。 因此，若可將另外的分類目的卡匣204 放架210，並於基台206及置放架210之間 類目的卡匣204，則可將上述10種的基板分 卡匣2 0 4中而加以收納，但是於基台2 0 6及 間必需進行分類目的卡匣204的替換，因此 操作之效率變差。 基板搬入至分 2 0 4中，係依 各片基板，於 不同加以整理 人208從分類 2 0 4時，進行 之間之分類目 具有難以有效 多數種類（例 之於基台2 0 6 各個分類目的 分類來源卡匣 3種的基板而 匣204中，基 預先載置於置 適當的替換分 類至分類目的 置放架2 1 0之 ，基板的分類 •6- 200817259 (3) 此外，於進行上述分類時，係設定爲一旦載置於基台 2 06之分類來源卡匣202的基板用完，則將可收納多數種 類的基板之下1個類來源卡匣202載置於基台206上。 上述問題在收納於分類來源卡匣202之基板的種類變 '多時，亦變得更爲顯著。 Λ 因此，關於與基板分類系統200爲不同之基板分類系 統，可考量到具備暫存站之基板分類系統（圖中未顯 f 示）。 上述基板分類系統，除了具備與上述基板分類系統 2 00爲相同構成之分類來源卡匣；分類目的卡匣；基台； 機器人；及置放架之外，更具備暫存站。 上述暫存站例如具有多數列的暫存用卡匣，於各個暫 存用卡匣之間，係設置有與上述機器人爲相同構成之機器 人。暫存用卡匣係具有與分類來源卡匣及分類目的卡匣爲 相同構成，且可收納相同片數之基板，並載置於與上述基 台爲同樣之基台上。 之後，一旦將隨機收納有不同種類的多數片基板之分 類來源卡匣載置於基台上，則收納於分類來源卡匣之各種 基板之資訊’可藉由讀碼機等所讀出，並藉由機器人從分 類來源卡匣當中一次搬出1片基板，並且使用機器人（因 應必要而使用機器人）將此搬出之基板搬入至暫存用卡匣 中〇 接著一旦留存特定片數之特定種類的基板，則使用機 器人（因應必要而使用機器人）將這些特定片數的基板從 200817259 (4) 暫存用卡匣中搬出，並將搬出後的基板搬入至分類目的卡 匣204中。 由於具備暫存站，因此於上述基板分類系統中，於置 放架及基台之間不需進行分類目的卡匣的替換，因此可有 效率的進行基板的分類。 關於與上述基板分類系統200相關之文獻，例如有專 利文獻（日本特許第3 1 8 5 5 9 5號公報）。 然而如上述般，於上述基板分類系統200中，係具有 難以有效率進行基板的分類之問題，於上述基板分類系統 (圖中未顯示）中，亦具有因設置用以暫時收納多數片基 板之暫存站，而導致裝置的大型化之問題。 本發明係鑑於上述問題點而創作出之發明，目的在於 提供一種，可有效率進行基板的分類並且可避免裝置大型 化的問題之基板分類系統。 【發明內容】 本發明的第1項型態之發明爲一種基板分類系統，係 用以將收納於分類來源卡匣之多數片基板分類至分類目的 卡匣，其特徵爲係具有，可將上述基板收納於任意位置之 暫存站；及於上述分類來源卡匣、上述分類目的卡匣、及 上述暫存站各自之間，可藉由單片方式而搬送基板之載入 裝置。 本發明的第2項型態之發明爲一種基板分類系統，於 第1項型態所記載之基板分類系統中，係具有用以輸入收 -8- 200817259 (5) 納於分類來源卡匣之基板的ID之ID輸入手段；及根據上 述ID輸入手段所輸入之ID，以使分類的基板移動至上述 分類目的卡匣之方式而控制上述載入裝置之控制手段。 本發明的第3項型態之發明爲一種基板分類系統，於 ‘第1項或第2項型態所記載之基板分類系統中，上述分類 _ 目的卡匣係設置有多數個。 本發明的第4項型態之發明爲一種基板分類系統，於 , 第1項至第3項型態中之任一項所記載之基板分類系統 中，上述暫存站爲高密度且可收納上述基板。 【實施方式】 [第1實施型態] 第1圖係顯示本發明的第1實施型態之基板分類系統 1的槪略構成之俯視圖，第2圖係顯示基板分類系統1的 槪略構成之側面圖，爲第i圖之II的箭頭方向之圖式。 於本申請書中，爲了說明上的簡便，係以水平方向的 一方向爲X軸方向，以水平方向的另一方向且與上述X 軸方向呈直角之方向爲Y軸方向，以筆直方向爲Z軸方 向。 基板分類系統1爲用以將收納於分類來源卡匣3之多 數片基板W分類至分類目的卡匣5之裝置。分類來源卡 匣3係使基板W呈水平並以幾乎爲等間隔且互相形成少 許間隔而層積，藉此可收納多數段，分類目的卡匣5亦同 樣使基板W呈水平並以幾乎爲等間隔且互相形成少許間 -9 - 200817259 (6) 隔而層積，藉此可收納多數段。 關於上述基板W，例如可考量爲玻璃基板（例如於電 漿顯示面板及液晶顯示面板等當中所使用之矩形且爲板狀 之玻璃基板）。 基板分類系統1係具備，可將基板W載置於例如爲 高密度卡匣9上且可將基板w收納於高密度卡匣9的任 意位置之暫存站7;可載置分類來源卡匣3之分類來源站 . 13;可載置分類目的卡匣5之分類目的站15;及於分類來 源卡匣3與分類目的卡匣5與高密度卡匣9之間，以單片 方式而搬送基板W之載入裝置11。 高密度卡匣9係與分類來源卡匣3相同，係使基板W 呈水平並以幾乎爲等間隔且互相形成少許間隔而層積，藉 此可收納多數段。惟於暫存站7中，可僅以機器手臂而載 置基板W之上述機器手臂，係以不會進入於基板W之間 之程度的基板間隔，以高密度將基板W加以收納。 於分類來源站13中，係設置有以單片方式將收納於 分類目的卡匣5之基板W傳送至載入裝置11之分類來源 卡匣輔助部1 7，此外，於分類目的站1 5中，係設置有將 載入裝置11所搬送之基板W收納至分類目的卡匣5之分 類目的卡匣輔助部19。 在此係舉例而詳細說明暫存站7。200817259 (1) IX. OBJECTS OF THE INVENTION [Technical Field] The present invention relates to a substrate sorting system, and more particularly to temporarily storing a substrate from a sorting source card in a temporary storage station, and storing it in a sorting purpose card This performs classification of the substrate. [Prior Art] #Fig. 18 is a plan view showing a schematic configuration of a conventional substrate sorting system 200, and Fig. 19 is a front view showing a substrate sorting system 200, which is a diagram of an arrow direction of XIX in Fig. 18. The substrate sorting system 200 includes a base 206 on which the sort source card 202 and a plurality of sort destination cards 042 04 can be placed; a robot 208 that can transport the substrate W by a single chip method; and a sorting destination card can be placed 2 04 placement rack 210. The classification source card 202 and the classification destination card 204 have the same configuration, and each cassette can accommodate an equal number of substrates. Between the base 206 and the rack 210, a crane (not shown) can be used to appropriately move the sorting purpose card 匣240. Once the classification source card 202 of a plurality of different types of substrate is randomly stored and placed (mounted) on the base 206, information stored on the various substrates of the classification source card 202 (for example, information on the type of the substrate; The information indicated by the bar code in each of the substrates can be read by a code reader or the like, and the robot 208 carries out one substrate from the sort source card 202 at a time, and carries the unloaded substrate into the classification purpose.匣 〇 04 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - In other words, when it is stored in the classification source card 202 and stored in the classification destination card 匣 2 04, it is stored in accordance with the type, and the classification of each substrate is performed. In the substrate sorting system 200, the sorting of the substrate to the sorting destination cassette substrate by using the machine source cassette 202 is performed, so that the replacement operation (operation) of the cassette 206 of the base 206 and the rack 210 is performed. There are many, and thus the problem of classification of substrates is performed. In other words, if the substrate is stored in the sort source card 202, and only three sorting destination cassettes 204 can be placed as shown in FIG. 18, then the cassette 204 is placed in the cassette 204. Only three kinds of substrates can be carried in, and seven kinds of substrates remain in 022. Further, only in the above description, the three sorting destination cards placed on the base 206 are not fully loaded. Therefore, if another sorting purpose card 匣 204 can be placed on the rack 210 and the type of the cassette 204 between the base 206 and the rack 210, the above 10 types of substrates can be divided into the 匣 2 0 4 It is stored, but the replacement of the cassette 204 for sorting is necessary between the base station and the sixth, so the efficiency of the operation is deteriorated. When the substrate is loaded into the sub-portion, it is difficult to validate the majority of the classifications (for example, on the base station 2 0 6 ). The purpose is to classify the source card into three kinds of substrates and in the case of 匣204, the base is pre-loaded in the appropriate replacement classification to the classification purpose placement frame 2 1 0, the classification of the substrate • 6-200817259 (3) In the classification, once the substrate loaded on the sort source card 202 of the base 206 is used up, one type of source cassette 202 under the substrate that can accommodate a plurality of types is placed on the base 206. The above problem is also more remarkable when the type of the substrate accommodated in the classification source card 202 is increased. Λ Therefore, regarding the substrate classification system different from the substrate classification system 200, it is possible to consider having a temporary storage station. a substrate sorting system (not shown). The substrate sorting system includes a sorting source card having the same configuration as the substrate sorting system 200; a sorting destination card; a base; a robot; and a shelf outer Further, the temporary storage station has a plurality of temporary storage cards, and a robot having the same configuration as the robot is provided between the temporary storage cards. The substrate has the same configuration as the classification source card and the classification destination card, and can accommodate the same number of substrates, and is placed on the same base as the base. Then, a different type of majority is randomly stored. When the classification source card of the substrate is placed on the base, the information of the various substrates stored in the classification source card can be read by a code reader or the like, and the robot can be carried out once from the classification source card. One piece of the substrate is used, and the robot is used (the robot is used as necessary) to carry the unloaded substrate into the temporary storage cassette, and then the robot is used (the robot is used as necessary). These specific number of substrates are carried out from the 200817259 (4) temporary storage cassette, and the carried out substrate is carried into the classification destination cassette 204. Since the temporary storage station is provided Therefore, in the above-described substrate sorting system, the sorting purpose of the cassette is not required to be replaced between the rack and the base, so that the sorting of the board can be efficiently performed. For the document related to the above-described board sorting system 200, for example, There is a patent document (Japanese Patent No. 3 1 5 5 5 95). However, as described above, in the above-described substrate sorting system 200, there is a problem that it is difficult to efficiently classify the substrate, and the above-described substrate sorting system (Fig. The present invention is also an object of the present invention in view of the above problems, and the object of the present invention is to provide a kind of invention, which is not shown in the drawings, which has a temporary storage station for temporarily storing a plurality of substrates. A substrate sorting system that efficiently classifies substrates and avoids the problem of large-scale devices. SUMMARY OF THE INVENTION A first aspect of the present invention is a substrate sorting system for classifying a plurality of substrates contained in a sort source card into a sorting destination card, which is characterized in that The substrate is stored in a temporary storage station at any position; and the loading device of the substrate can be transported by a single piece between the classification source card, the classification destination card, and the temporary storage station. According to a second aspect of the present invention, there is provided a substrate sorting system, wherein the substrate sorting system according to the first aspect is provided for inputting a -8-200817259 (5) into a classification source card. The ID input means of the ID of the substrate; and the control means of the loading device is controlled such that the classified substrate is moved to the classification target card based on the ID input by the ID input means. According to a third aspect of the present invention, there is provided a substrate sorting system, wherein in the substrate sorting system described in the first or second aspect, the plurality of sorting_purpose cassettes are provided. According to a fourth aspect of the present invention, in a substrate sorting system according to any one of the first to third aspect, the temporary storage station is high-density and can be accommodated. The above substrate. [Embodiment] FIG. 1 is a plan view showing a schematic configuration of a substrate sorting system 1 according to a first embodiment of the present invention, and FIG. 2 is a schematic view showing a schematic configuration of the substrate sorting system 1. The side view is a diagram of the arrow direction of the i-th picture II. In the present application, for simplicity of explanation, one direction in the horizontal direction is the X-axis direction, and the other direction in the horizontal direction and the direction perpendicular to the X-axis direction are the Y-axis direction, and the straight direction is Z-axis direction. The substrate sorting system 1 is a device for sorting a plurality of substrates W accommodated in the sort source card 3 into the sorting destination cassette 5. The classification source card 3 is formed by stacking the substrates W at a substantially equal interval and forming a small interval therebetween, thereby accommodating a plurality of segments, and the classification purpose cassette 5 also makes the substrate W horizontal and almost equal. Interval and form a little between each other -9 - 200817259 (6) Separate and stack, so that most sections can be accommodated. The substrate W can be, for example, a glass substrate (for example, a rectangular and plate-shaped glass substrate used in a plasma display panel or a liquid crystal display panel). The substrate sorting system 1 includes a temporary storage station 7 that can mount the substrate W on, for example, a high-density cassette 9 and can store the substrate w in the high-density cassette 9; the classification source card can be placed. 3 classified source station. 13; can be placed on the classification destination card 15 classification destination station 15; and between the classification source card 3 and the classification destination card 5 and the high-density cassette 9, transported in a single piece The loading device 11 of the substrate W. The high-density cassette 9 is the same as the sort source card 3, and the substrate W is horizontally stacked at a substantially equal interval and at a slight interval therebetween, whereby a plurality of segments can be accommodated. In the temporary storage station 7, the robot arm on which the substrate W is placed only by the robot arm can be accommodated at a high density with a substrate interval that does not enter between the substrates W. The sorting source station 13 is provided with a sort source card assisting unit 1 7 that transports the substrate W stored in the sorting destination cassette 5 to the loading device 11 in a single piece, and further, in the sorting destination station 15 A sorting purpose card assisting unit 19 that stores the substrate W transported by the loading device 11 into the sorting destination cassette 5 is provided. The staging station 7 will be described in detail herein by way of example.
第3圖係顯示暫存站7的槪略斜視圖。第4圖係顯示 構成暫存站7之高密度卡匣9之斜視圖，第5圖係顯示第 3圖之V的箭頭方向之圖式，第6圖係顯示第5圖之VI -10- 200817259 (7) 的箭頭方向之圖式。 暫存站7係具備〗個或是多數個（例如爲2個）高密 度卡匣9而構成。槪略來看，高密度卡匣9係構成爲直方 體狀’並於Y軸方向的兩端部上具備側面構材25。側面 構材2 5具有於Z軸方向上較爲細長之形狀，並於γ軸方 ' 向的一端部側上，於X軸方向上形成間隔而設置有多數 個’同樣的，於Y軸方向的另一端部側上，於X軸方向 . 上形成間隔而設置有多數個。 .於Y軸方向的一端部側上所設置之側面構材25與Y 軸方向的另一端部側上所設置之側面構材25之間，張設 有用以將基板W載置於高密度卡匣9內而收納之線狀構 材（例如爲纜線）2 7。 於Z軸方向上，係於相同位置上（以同樣高度）於X 軸方向上形成特定間隔，並往Y軸方向延伸而設置多數條 纜線27，藉此而構成可支撐（載置）1片基板W之1個 纜線群。 上述纜線群係於Z軸方向上形成特定的較小間隔而設 置有多數個，藉此，高密度卡匣9可使基板W呈水平而 收納多數段。如此構成之高密度卡匣9 ’亦有稱呼爲纜線 卡匣之情況。 此外，於高密度卡匣9之X軸方向的一側面（設置有 載入裝置11之一側的面）上，係設置有基板1可自由進 出之開口部2 6。 於暫存站7中，係設置有可藉由單片方式’將從載入 •11 - 200817259 (8) 裝置1 1所接收之基板W收納於高密度卡匣9的任意位 置’或者是從高密度卡匣9當中，將收納於高密度卡匣9 之任意基板W取出並傳送至載入裝置1 1之暫存站側輔助 部23。 暫存站側輔助部23係將輔助單元29配置於高密度卡 匣9之Y軸方向的一邊側上，並將與上述輔助單元29爲 同樣構成之輔助單元29配置於高密度卡匣9之Y軸方向 的另一邊側上，亦即，暫存站側輔助部23係以一對的輔 助單元29所構成。此外，上述一對的輔助單元29係於每 1個高密度卡匣9中設置一對。由於第1圖所示之暫存站 7係具有2個高密度卡匣9，因此暫存站7係具有2對的 輔助單元（4個輔助單元）29。 在此係說明1個輔助單元29。 輔助單元29係具備，對設置有基板分類系統1之底 面爲可移動及固定之基座構材31。於此基座構材31的上 面（於水平方向上延展之平面狀的上面）上，係以可自由 於Y軸方向上移動般而設置有形成爲板狀且於水平方向上 延伸之Y軸托架3 5。詳細而言，係隔著該導軌（圖中未 顯示）一體設置於基座構材31且軸承（圖中未顯示）一 體設置於Y軸托架35之線性導軌軸承（圖中未顯示）， 使Y軸托架3 5由基座構材3 1所支撐。此外，Y軸托架 3 5係藉由伺服馬達等的促動器及球狀螺絲等，而可於Y 軸方向上自由移動及定位。 於Y軸托架3 5的前端部側（高密度卡匣9側）上， -12- 200817259 (9) 係於X軸方向上形成特定間隔而設置有多數個缺口 3 7。 於位於Y軸托架3 5的前端部側且未設置上述缺口 3 7之各 個部位3 9上’係以可自由迴轉般而設置有用以載置並搬 送基板W之圓柱狀的小徑之滾輪4 1。 上述各個滾輪41係以使該迴轉中心軸於γ軸方向上 延伸之方式，以同樣高度而設置，並以圖中未顯示之軸承 而支撐於Y軸托架35，並且隔著圖中未顯示之齒輪等的 動力傳達構材’各自與馬達等之促動器同步（圖中未顯 示）而迴轉。 於Y軸托架3 5的各個部位3 9之各自上，除了滾輪 41之外’亦設置有用以支撐這些滾輪41所搬送之基板w 的重量之暫存站側空氣浮動手段43。 暫存站側空氣浮動手段43，例如係具備以具有透氣性 的陶瓷所形成之薄板狀的支撐構材4 5，以壓縮空氣供應手 段（圖中未顯示）所供應之壓縮空氣，係從支撐構材45 , 中噴出，並於與上述基板W爲非接觸之狀態下，支撐上 述基板W的重量。 上述支撐構材45係設置於較滾輪4 1更爲前端側（高 密度卡匣9側）上。此外，支撐構材45的上面係位於較 滾輪41的上端稍微下方，此外，支撐構材45的下面之高 度與滾輪41的下端之高度，係幾乎互爲一致。 除了透氣性的陶瓷之外，亦可由透氣性的燒結金屬等 加以取代而構成上述支撐構材45。此外，亦可採用以不具 有透氣性的材質所塡入之金屬等的構材，並於此金屬等的 -13- 200817259 (10) 構材中設置多數個孔，而從這些孔中噴出壓縮空氣以支撐 上述基板W。 此外，除了上述各個空氣浮動手段43之外，亦可採 用以超音波使基板W浮起之超音波浮動手段加以取代。 ’ 上述超音波浮動手段係以超音波振盪器使基板支撐構 材產生振盪，並藉由上述基板W與上述基板支撐構材之 間所形成之較薄的空氣膜，而支撐上述基板W的重量。 若舉例詳細說明，則上述超音波浮動手段例如具有超 音波產生元件（例如壓電元件）。 於上述超音波產生元件的上側上，係設置有用以將此 超音波產生元件所產生之振盪加以增幅之號角。上述基板 支撐構材係隔著連結構材，而設置於上述號角的上部。 之後，上述超音波產生元件所產生之振盪係傳達至上 述基板支撐構材，此基板支撐構材主要於上述基板W的 厚度方向上產生振盪，藉此於基板W與上述基板支撐構 材之間，產生以空氣爲媒體之放射壓（空氣的疏密波所造 成之放射壓），由於此放射壓而於上述基板W與上述基 板支撐構材之間產生較薄的空氣膜，因此可藉由上述基板 支撐構材而支撐上述基板W的重量。 此外，於暫存站7中，係設置有用以載置高密度卡匣 9，並使所載置的高密度卡匣9可於Z軸方向上自由移動 及定位之卡匣移動定位裝置33。此卡匣移動定位裝置33 係具備直接載置高密度卡匣9之部位；及未直接載置高密 度卡匣9之部位而構成，上述直接載置之部位係隔著線性 -14- 200817259 (11) 導軌軸承等，以可於Z軸方向上自由移動之方式而支撐於 未直接載置之部位。此外，上述直接載置之部位係藉由伺 服馬達等的促動器及球狀螺絲等，而可於Z軸方向上自由 移動及定位。 * 於上述構成之暫存站7中，一旦於圖中未顯示的控制 裝置之控制下而適當的驅動各個促動器等，則如第3圖所 示般，滾輪41及支撐構材45係行進至高密度卡匣9的外 f 部，或者是，高密度卡匣9於Z軸方向上適當的移動及定 位，而如第6圖所示般，滾輪41及支撐構材45進入於高 密度卡匣9內，亦即進入於收納於高密度卡匣9之任意的 2片基板W之間，以滾輪41載置基板W並以支撐構材45 防止基板W產生彎曲而支撐基板W的重量，使基板W於 X軸方向上移動，而將收納於高密度卡匣9之基板W搬 出，或是將基板W搬入於高密度卡匣9。 於滾輪41及支撐構材45進入於高密度卡匣9內時， 高密度卡匣9的側面構材25係進入於滾輪41及支撐構材 4 5之間的缺口 3 7之處。此外，於高密度卡匣9之Y軸方 向的兩側上所設置之各個輔助單元29，係互爲同步而進行 動作。再者，如上述般，由於滾輪41及支撐構材45的高 度（Z軸方向的尺寸）抑制爲較低，因此即使高密度卡匣 9於上下方向上以狹窄的間隔（機械手臂無法進入之程度 的狹窄間隔）收納各片基板W，滾輪41及支撐構材45亦 可進入於任意的2片基板W之間。 接下來舉例而詳細說明分類來源卡匣3;分類目的卡 -15- 200817259 (12) 匣5;載入裝置11;分類來源卡匣輔助部17及分類目的 卡匣輔助部1 9。 於分類來源站1 3中，係設置有載置分類來源卡匣3， 並使所載置的分類來源卡匣3可於Z軸方向上自由移動及 定位之卡匣移動定位裝置（與上述卡匣移動定位裝置33 幾乎爲相同構成之卡匣移動定位裝置）14。此外，於分類 目的站15中，亦設置有同樣的卡匣移動定位裝置16。 , 接下來更進一步說明基板分類系統1。 第7圖係顯示基板分類系統1的槪略構成之俯視圖， 爲對應於第1圖之圖式。 第8圖係顯示基板分類系統1的槪略構成之側面圖， 爲第7圖之VIII的箭頭方向之圖式且爲對應於第2圖之 圖式。 爲了更容易觀看，於第8圖中係省略一邊側（第7圖 中的下側）之側邊構材6 1等的表示。 如上述般，分類來源卡匣3例如構成爲幾乎與高密度 卡匣9相同，並形成爲幾乎相同之外形。分類目的卡匣5 亦與分類來源卡匣3爲同樣構成。 從第1圖、第7圖中可理解到，於基板分類系統1 中，於載入裝置11之X軸方向的一邊側上，配置有分類 來源卡匣3及分類目的卡匣5，於載入裝置11之X軸方 向的另一邊側上，配置有高密度卡匣9。 分類來源卡匣輔助部1 7係藉由與上述暫存站側空氣 浮動手段43爲相同構成之分類來源空氣浮動手段47所構 -16- 200817259 (13) 成。分類來源空氣浮動手段47，例如係以於X軸方向上 形成間隔而設置之多數個支撐構材49所構成。各個支撐 構材49可從該各個支撐構材49的上面中噴出空氣。 此外，於上述控制裝置的控制下，以卡匣移動定位裝 置14使分類來源卡匣3於Z軸方向上進行適當的移動及 定位，並從支撐構材49中噴出空氣，藉此，可支撐收納 於分類來源卡匣3的最下方之基板W的重量。 分類目的卡匣輔助部19亦與分類來源卡匣輔助部17 具有同樣的構成，並進行幾乎爲同之動作。 於載入裝置1 1中，係設置有用以於此載入裝置1 1與 分類來源卡匣3及分類目的卡匣5之間進行基板W的搬 送之分類目的卡匣·分類來源卡匣側基板搬送手段51。此 外，於載入裝置1 1中，係設置有用以於此載入裝置1 1與 高密度卡匣9之間進行基板W的搬送之高密度卡匣側基 板搬送手段5 3。 詳細而言，載入裝置11係於下部中具有基座構材 57。此基座構材57係以線性導軌軸承59所支撐，並藉由 伺服馬達等的促動器及球狀螺絲等，而可於Y軸方向上自 由移動及定位。 於上述基座構材57的上面（於水平方向上延展之平 面狀的上面）上，係一體豎設有側邊構材6 1。此側邊構材 6 1係設置於基座構材5 7之Y軸方向的兩端部側。 分類目的卡匣·分類來源卡匣側基板搬送手段5 1係 具備於上述各個側邊構材61之間所設置之移載手臂支撐 -17- 200817259 (14) 構材63。於移載手臂支撐構材63的上部上，係設置有 「L」字形的手臂構材67。手臂構材67係隔著線性導軌 軸承（圖中未顯示）等，以可自由移動之方式而支撐於移 載手臂支撐構材63。此外，手臂構材67係藉由伺服馬達 等的促動器及球狀螺絲等，而可於X軸方向上自由移動及 定位。 於手臂構材67的上部上，係一體設置有可吸附並保 持基板W的下面之做爲保持手段的例子之吸盤71。除了 以吸盤7 1加以保持之外，亦例如可包夾基板W的端部而 加以保持。 此外，於移載手臂支撐構材63的上部上，係設置有 載入空氣浮動手段69。此載入空氣浮動手段69係藉由一 體設置於移載手臂支撐構材63之多數個支撐構材70所構 成。於各個支撐構材70的上面係位於較上述吸盤7 1的上 面稍微下方，此外，各個支撐構材70可從各個支撐構材 49的上面噴出空氣。 此外，若於高度方向上適當的將移載手臂支撐構材63 加以定位，使手臂構材67從移載手臂支撐構材63產生外 伸，並往分類來源卡匣3或分類目的卡匣5側（第8圖中 的右側）延伸出，則可藉由吸盤7 1保持分類來源卡匣3 之基板W的端部下面。 此外，若從上述支撐構材49的上面及各個支撐構材 70的上面中吹出空氣以支撐上述基板W的重量，而拉引 手臂構材67的話（若往第8圖中的左側移動的話），則 -18· 200817259 (15) 可從分類來源卡匣3中’將基板W拉出（搬出）至移載 手臂支撐構材63的幾乎正上方的位置爲止。 於將基板W搬入至分類目的卡匣5時，只需進行與 上述從分類來源卡匣3中搬出基板W的動作爲相反之動 ' 作即可。 高密度卡匣側基板搬送手段53，係具備輸送帶基座構 材73。輸送帶基座構材73係於各個側邊構材6 1之間，隔 / 著線性導軌軸承65由各個側邊構材61所支撐。此外，輸 送帶基座構材73係藉由伺服馬達等的促動器及球狀螺絲 等，而可於Z軸方向上自由移動及定位。 於輸送帶基座構材73的上面（於水平方向上延展之 平面狀的上面）上，係一體設置有多數個滾輪支撐構材 75。這些各個滾輪支撐構材75，例如於Y軸方向上形成 間隔而設置。此外，於各個滾輪支撐構材7 5的上端部 上，係設置有構成用以載置基板W之輸送帶之多數個滾 輪77。 各個滾輪77的迴轉中心軸係於Y軸方向上延伸，並 且隔著馬達等的促動器及齒輪等的動力傳達構材而各自同 步迴轉，或者是可藉由離合器等而與馬達切離並各自自由 迴轉。 再者’輸送帶基座構材73及各個滾輪支撐構材75及 各個滾輪77，可於遠離移載手臂支撐構材63而存在於移 載手臂支撐構材63的下方之位置，與各個滾輪77的上端 僅較吸盤7 1的上端稍微高的位置之間移動。於各個滾輪 -19· 200817259 (16) 77的上端位於較吸盤71的上端還上方的位置等 下，各個滾輪支撐構材75及各個滾輪77係通過移 支撐構材63上所設置之貫通孔。 各個滾輪77的上端僅較吸盤71的上端稍微高 上之上述各個滾輪的上端，與暫存站側輔助部23 滾輪4 1的上端，係成爲相同高度。 於使用高密度卡匣側基板搬送手段5 3，從各 77中將基板W搬入（搬出）至高密度卡匣9時， 當的使各個滾輪77及各個滾輪4 1回轉即可，於從 卡匣9將基板W搬送至各個滾輪77時，只需進行 動作即可。 此外，於基板分類系統1中，上述控制裝置（ 顯示）係根據將收納於分類來源卡匣3之基板W的 以輸入之ID輸入手段（圖中未顯示），以及藉由」 輸入手段所輸入之ID，使分類至分類目的卡匣5 W移動。 具體而言，上述控制裝置係透過天線（圖t 示），將設置於分類來源卡匣 3 之 RFID ( Frequency Identification :射頻識別）標籤（圖 c 示）中所儲存之基板W的資訊（收納於分類來源 之各個基板的資訊；關於基板W的種類、基板W 與否之資訊）加以讀取並輸入，並將此輸入後的各 W的資訊，記憶於圖中未顯示之記憶手段。 基板W的資訊係設定爲，於對收納於分類來源 之狀態 載手臂 的位置 的各個 個滾輪 只需適 高密度 相反的 圖中未 ID加 二述ID 之基板 中未顯 Radio 并未顯 卡匣3 的良品 個基板 卡匣3 -20- 200817259 (17) 之各個基板W進行加工之前工程等當中，預先記錄（儲 存）上述RFID標籤中。此外，係設定爲於分類來源卡匣 3中，例如以隨機方式收納有不同種類的基板W。 此外，於將收納於分類來源卡匣3之基板W移動至 '暫存站7時，係將基板W收納（搬入）至高密度卡匣9 '的任意位置上。於收納於分類來源卡匣3之基板W爲搬 空時，可適當的替換爲用以收納基板W之下一個分類來 源卡匣3。 之後，參照上述記憶手段中所記憶之資訊，若例如於 暫存站7中留存特定片數之相同種類的基板W，則將這些 留存之特定片數的基板W移往分類目的卡匣5。此時，係 從暫存站7的任意位置中搬出基板W。因此，可僅將上述 留存特定片數之相同種類的基板W移往分類目的卡匣5， 而進行基板W的分類。 一旦上述相同種類之特定片數的基板W移往分類目 的卡匣5之動作結束，則將分類目的卡匣5替換爲下一個 卡匣，而準備下一次相同種類的基板W之分類。 此外，用以取代RFID標籤或是除了 RFID標籤之 外，亦可藉由分類來源卡匣3上所附加的條碼及各個基板 W上所附加的條碼等，而讓上述控制裝置獲得基板W的 資訊。此外，亦可將控制裝置連接於網路，並透過上述網 路而獲得基板W的資訊。Fig. 3 is a schematic oblique view showing the temporary storage station 7. 4 is a perspective view showing a high-density cassette 9 constituting the temporary storage station 7, FIG. 5 is a view showing an arrow direction of V in FIG. 3, and FIG. 6 is a view showing a VI of FIG. 200817259 (7) The direction of the arrow direction. The temporary storage station 7 is configured to have one or a plurality of (for example, two) high density cassettes 9. In short, the high-density cassette 9 is formed in a rectangular shape and includes side members 25 at both end portions in the Y-axis direction. The side member member 25 has a shape elongated in the Z-axis direction, and is formed on the one end side of the γ-axis direction in the X-axis direction, and is provided with a plurality of the same 'in the Y-axis direction. On the other end side, a plurality of intervals are formed in the X-axis direction. Between the side member 25 provided on the one end side in the Y-axis direction and the side member 25 disposed on the other end side in the Y-axis direction, the substrate W is placed on the high-density card. The linear member (for example, a cable) accommodated in the 匣9 is 27. In the Z-axis direction, a specific interval is formed in the X-axis direction at the same position (at the same height), and a plurality of cables 27 are extended in the Y-axis direction, thereby forming a supportable (mounting) 1 One cable group of the substrate W. The cable group is provided in a plurality of specific small intervals in the Z-axis direction, and the high-density cassette 9 allows the substrate W to be horizontal and accommodates a plurality of segments. The high-density cassette 9 ′ thus constructed is also referred to as a cable jam. Further, on one side surface (the surface on which one side of the loading device 11 is provided) in the X-axis direction of the high-density cassette 9, an opening portion 26 into which the substrate 1 can freely enter and exit is provided. In the temporary storage station 7, it is provided that the substrate W received from the loading device 11 to be stored in the high-density cassette 9 can be stored in a single-chip manner 'or In the high-density cassette 9, any of the substrates W accommodated in the high-density cassette 9 is taken out and transported to the temporary storage side auxiliary portion 23 of the loading device 11. The storage unit side auxiliary unit 23 arranges the auxiliary unit 29 on one side in the Y-axis direction of the high-density cassette 9, and arranges the auxiliary unit 29 having the same configuration as the auxiliary unit 29 in the high-density cassette 9 On the other side in the Y-axis direction, that is, the temporary-station-side auxiliary portion 23 is constituted by a pair of auxiliary units 29. Further, the pair of auxiliary units 29 are provided in a pair in each of the high density cassettes 9. Since the temporary storage station 7 shown in Fig. 1 has two high-density cassettes 9, the temporary storage station 7 has two pairs of auxiliary units (four auxiliary units) 29. Here, one auxiliary unit 29 will be described. The auxiliary unit 29 is provided with a base member 31 that is movable and fixed to the bottom surface on which the substrate sorting system 1 is provided. The upper surface of the base member 31 (the upper surface extending in the horizontal direction) is provided with a Y-axis holder which is formed in a plate shape and extends in the horizontal direction so as to be movable in the Y-axis direction. Rack 3 5. Specifically, the guide member 31 (not shown) is integrally provided with the base member 31 and the bearing (not shown) is integrally provided on the linear guide bearing (not shown) of the Y-axis bracket 35, The Y-axis bracket 35 is supported by the base member 31. Further, the Y-axis bracket 35 can be freely moved and positioned in the Y-axis direction by an actuator such as a servo motor or a ball screw. On the front end side (high-density cassette 9 side) of the Y-axis bracket 35, -12-200817259 (9) is provided with a plurality of notches 37 in a predetermined interval in the X-axis direction. A roller having a small cylindrical shape for placing and transporting the substrate W is rotatably provided on each of the portions 39 on the front end side of the Y-axis bracket 35 and not provided with the notch 37. 4 1. Each of the rollers 41 is provided at the same height so that the center axis of rotation extends in the γ-axis direction, and is supported by the Y-axis bracket 35 by bearings not shown, and is not shown in the figure. The power transmission members of the gears and the like are each rotated in synchronization with an actuator such as a motor (not shown). On each of the respective portions 39 of the Y-axis brackets 35, a temporary station side air floating means 43 for supporting the weight of the substrate w carried by the rollers 41 is provided in addition to the rollers 41. The temporary station side air floating means 43 is, for example, a thin plate-shaped supporting member member 45 formed of a gas permeable ceramic, and compressed air supplied by a compressed air supply means (not shown) is supported from the support. The member 45 is ejected, and supports the weight of the substrate W in a state of being non-contact with the substrate W. The support member 45 is provided on the front end side (the side of the high density cassette 9) of the roller 41. Further, the upper surface of the support member 45 is located slightly below the upper end of the roller 41, and the height of the lower surface of the support member 45 and the height of the lower end of the roller 41 are almost identical to each other. In addition to the gas permeable ceramic, the support member 45 may be formed by replacing with a gas permeable sintered metal or the like. Further, a member made of a metal such as a material that does not have gas permeability may be used, and a plurality of holes may be provided in the material of the metal such as -13-200817259 (10), and compression is performed from the holes. Air to support the above substrate W. Further, in addition to the above-described respective air floating means 43, the ultrasonic floating means for superimposing the substrate W to float may be used instead. The above-described ultrasonic floating means oscillates the substrate supporting member with an ultrasonic oscillator, and supports the weight of the substrate W by a thin air film formed between the substrate W and the substrate supporting member. . As described in detail, the above-described ultrasonic floating means has, for example, an ultrasonic generating element (e.g., a piezoelectric element). On the upper side of the above-described ultrasonic generating element, a horn for amplifying the oscillation generated by the ultrasonic generating element is provided. The substrate supporting member is provided on the upper portion of the horn above the connecting structural member. Thereafter, the oscillation generated by the ultrasonic generating element is transmitted to the substrate supporting member, and the substrate supporting member mainly oscillates in a thickness direction of the substrate W, thereby between the substrate W and the substrate supporting member a radiation pressure caused by air as a medium (radiation pressure caused by a dense wave of air) is generated, and a thin air film is formed between the substrate W and the substrate supporting member due to the radiation pressure, thereby The substrate supports the member to support the weight of the substrate W. Further, in the temporary storage station 7, a cassette moving positioning device 33 for placing the high-density cassette 9 and allowing the mounted high-density cassette 9 to freely move and position in the Z-axis direction is provided. The cassette positioning device 33 includes a portion where the high-density cassette 9 is directly placed, and a portion where the high-density cassette 9 is not directly placed, and the directly placed portion is separated by a linear-14-200817259 ( 11) Guide rail bearings and the like are supported so as to be freely movable in the Z-axis direction at a portion that is not directly placed. Further, the portion to be directly placed is freely movable and positioned in the Z-axis direction by an actuator such as a servo motor or a ball screw. * In the temporary storage station 7 of the above configuration, when each actuator or the like is appropriately driven under the control of a control device not shown in the drawing, the roller 41 and the supporting member 45 are as shown in Fig. 3 Advancing to the outer f portion of the high-density cassette 9, or the high-density cassette 9 is appropriately moved and positioned in the Z-axis direction, and as shown in Fig. 6, the roller 41 and the supporting member 45 enter the high density. In the cassette 9, that is, between the two substrates W accommodated in any of the high-density cassettes 9, the substrate W is placed on the roller 41, and the substrate W is prevented from being bent by the supporting member 45 to support the weight of the substrate W. The substrate W is moved in the X-axis direction, and the substrate W accommodated in the high-density cassette 9 is carried out, or the substrate W is carried into the high-density cassette 9. When the roller 41 and the supporting member 45 enter the high-density cassette 9, the side member 25 of the high-density cassette 9 enters the notch 31 between the roller 41 and the supporting member 45. Further, each of the auxiliary units 29 provided on both sides of the Y-axis direction of the high-density cassette 9 is synchronized with each other. Further, as described above, since the heights (dimensions in the Z-axis direction) of the roller 41 and the support member 45 are suppressed to be low, even if the high-density cassette 9 is at a narrow interval in the up-and-down direction (the robot arm cannot enter) The substrate W is accommodated in a narrow interval, and the roller 41 and the support member 45 may enter between any two substrates W. Next, the classification source card 匣3 will be described in detail by way of example; the classification destination card -15- 200817259 (12) 匣5; the loading device 11; the classification source card 匣 auxiliary unit 17 and the classification purpose card auxiliary unit 1 9. In the sorting source station 13 3, a card moving positioning device (with the above card) for placing the sort source card 3 and allowing the mounted sort source card 3 to be freely movable and positioned in the Z-axis direction is provided The 匣 mobile positioning device 33 is almost the same configuration of the cassette moving positioning device 14 . Further, in the sorting destination station 15, the same cassette moving positioning means 16 is also provided. Next, the substrate sorting system 1 will be further explained. Fig. 7 is a plan view showing a schematic configuration of the substrate sorting system 1, which corresponds to the drawing of Fig. 1. Fig. 8 is a side view showing a schematic configuration of the substrate sorting system 1, which is a schematic diagram of the arrow direction of VIII of Fig. 7 and corresponds to the drawing of Fig. 2. In order to make it easier to see, in Fig. 8, the side members 6 1 and the like on the one side (the lower side in Fig. 7) are omitted. As described above, the sorting source card 3 is configured, for example, almost identically to the high-density cassette 9, and is formed into almost the same outer shape. The classification purpose card 5 is also constructed in the same manner as the classification source card 匣3. As can be understood from FIGS. 1 and 7 , in the substrate sorting system 1 , the sort source card 3 and the sort destination card 5 are placed on one side of the X-axis direction of the loading device 11 . A high-density cassette 9 is disposed on the other side of the device 11 in the X-axis direction. The classification source card 匣 auxiliary unit 17 is formed by the classification source air floating means 47 having the same configuration as the above-described temporary storage station side air floating means 43. -16-200817259 (13). The classification source air floating means 47 is constituted, for example, by a plurality of support members 49 which are provided at intervals in the X-axis direction. Each of the support members 49 can eject air from the upper surface of the respective support members 49. Further, under the control of the above-mentioned control device, the sorting source cassette 3 is appropriately moved and positioned in the Z-axis direction by the cassette moving positioning device 14, and air is ejected from the supporting member 49, thereby being supported The weight of the substrate W accommodated at the lowest position of the sort source card 3 . The classification purpose card auxiliary unit 19 also has the same configuration as the classification source card auxiliary unit 17, and performs almost the same operation. In the loading device 1 1 , a sorting purpose card for sorting the substrate W between the loading device 1 1 and the sort source card 3 and the sorting destination cassette 5 is provided. The transport means 51. Further, in the loading device 1 1, a high-density card side substrate transporting means 53 for transporting the substrate W between the loading device 1 1 and the high-density cassette 9 is provided. In detail, the loading device 11 has a base member 57 in the lower portion. The base member 57 is supported by a linear guide bearing 59, and is freely movable and positioned in the Y-axis direction by an actuator such as a servo motor or a ball screw. On the upper surface of the base member 57 (the upper surface extending in the horizontal direction), the side members 61 are integrally provided. The side members 161 are provided on both end sides of the susceptor member 57 in the Y-axis direction. Classification purpose card 分类 classification source card 匣 side substrate transporting means 5 1 is provided with a transfer arm support -17-200817259 (14) member 63 provided between each of the side members 61. An arm member 67 having an "L" shape is provided on the upper portion of the transfer arm supporting member 63. The arm member 67 is supported by the transfer arm supporting member 63 so as to be freely movable via a linear guide bearing (not shown) or the like. Further, the arm member 67 is freely movable and positioned in the X-axis direction by an actuator such as a servo motor or a ball screw. On the upper portion of the arm member 67, a suction cup 71 which is an example of a holding means capable of adsorbing and holding the lower surface of the substrate W is integrally provided. In addition to being held by the suction cup 71, for example, the end of the substrate W can be sandwiched and held. Further, on the upper portion of the transfer arm supporting member 63, a load air floating means 69 is provided. The load air floating means 69 is constructed by a plurality of support members 70 integrally disposed on the transfer arm support member 63. The upper surface of each of the support members 70 is located slightly below the upper surface of the above-mentioned suction cup 71, and further, each of the support members 70 can eject air from the upper surface of each of the support members 49. In addition, if the transfer arm supporting member 63 is properly positioned in the height direction, the arm member 67 is extended from the transfer arm supporting member 63, and is sorted to the source card 3 or the sorting purpose card 5 The side (the right side in Fig. 8) is extended, and the lower end of the end of the substrate W of the sort source card 3 can be held by the suction cup 71. In addition, when air is blown from the upper surface of the support member 49 and the upper surface of each of the support members 70 to support the weight of the substrate W, and the arm member 67 is pulled (if moving to the left side in FIG. 8) -18·200817259 (15) The substrate W can be pulled out (lifted out) from the sort source card 3 to a position almost directly above the transfer arm supporting member 63. When the substrate W is carried into the classification target cassette 5, it is only necessary to perform the operation opposite to the operation of moving the substrate W from the classification source cassette 3 described above. The high-density cassette side substrate transporting means 53 is provided with a conveyor base member 73. The belt base member 73 is interposed between the respective side members 61, and the linear guide bearings 65 are supported by the respective side members 61. Further, the conveyor belt base member 73 is freely movable and positioned in the Z-axis direction by an actuator such as a servo motor or a ball screw. A plurality of roller supporting members 75 are integrally provided on the upper surface of the conveyor belt base member 73 (the upper surface extending in the horizontal direction). These respective roller supporting members 75 are provided, for example, at intervals in the Y-axis direction. Further, on the upper end portion of each of the roller supporting members 75, a plurality of rollers 77 constituting a conveyor belt on which the substrate W is placed are provided. The rotation center axis of each of the rollers 77 extends in the Y-axis direction, and is rotated in synchronization with each other via a power transmission member such as an actuator such as a motor or a gear, or can be separated from the motor by a clutch or the like. Each is free to turn. Furthermore, the conveyor belt base member 73 and the respective roller support members 75 and the respective rollers 77 can be located below the transfer arm supporting member 63 away from the transfer arm supporting member 63, and the respective rollers. The upper end of 77 is only moved between positions slightly higher than the upper end of the suction cup 7 1 . At the upper end of each roller -19·200817259 (16) 77, which is located above the upper end of the suction cup 71, the respective roller supporting members 75 and the respective rollers 77 are passed through the through holes provided in the supporting member 63. The upper end of each of the rollers 77 is slightly higher than the upper end of the suction cup 71, and the upper end of each of the rollers is at the same height as the upper end of the roller 4 1 of the temporary storage side auxiliary portion 23. When the high-density cassette side substrate transporting means 5 3 is used to carry (load out) the substrate W from each 77 to the high-density cassette 9, the respective rollers 77 and the respective rollers 4 1 can be rotated. 9 When the substrate W is transported to each of the rollers 77, it is only necessary to perform an operation. Further, in the substrate sorting system 1, the control device (display) is input by an input ID input means (not shown) for inputting the substrate W stored in the sort source card 3, and by an input means. The ID is such that the classification to the classification purpose card 匣 5 W moves. Specifically, the control device transmits information of the substrate W stored in the RFID (Frequency Identification) tag (shown in FIG. 5) of the classification source card 3 through the antenna (not shown). The information of each substrate of the classification source; the type of the substrate W and the information of the substrate W are read and input, and the information of each input W is memorized in a memory means not shown in the figure. The information of the substrate W is set so that the respective wheels of the position where the arm is stored in the state of the classification source need only have a high density, and the substrate having the ID and the ID is not displayed in the figure. In the above-mentioned RFID tag 3 -20- 200817259 (17), each of the substrates W is pre-recorded (stored) in the above-mentioned RFID tag. Further, in the classification source card 3, for example, different types of substrates W are stored in a random manner. Further, when the substrate W stored in the sort source card 3 is moved to the 'storage station 7, the substrate W is stored (loaded) to any position of the high-density cassette 9'. When the substrate W accommodated in the sort source card 3 is evacuated, it can be appropriately replaced with a sorted source card 3 for accommodating the substrate W. Then, referring to the information stored in the above-described memory means, if, for example, the substrate W of the same type having a specific number of sheets is left in the temporary storage station 7, the substrate W of the specific number of these remaining sheets is transferred to the sorting destination cassette 5. At this time, the substrate W is carried out from any position of the temporary storage station 7. Therefore, the substrate W of the same type in which the specific number of sheets is retained can be transferred to the classification target cassette 5 to classify the substrate W. When the operation of moving the substrate W of the same kind of the same kind to the sorting target cassette 5 is completed, the sorting destination cassette 5 is replaced with the next cassette, and the sorting of the same type of the substrate W is prepared next time. In addition, in place of or in addition to the RFID tag, the control device may obtain the information of the substrate W by sorting the barcode attached to the source card 3 and the barcode attached to each substrate W. . In addition, the control device can be connected to the network, and the information of the substrate W can be obtained through the above network.
於基板分類系統1的分類目的站15中，可設置多數 個分類目的卡匣5。此外係構成爲，一旦分類後的基板W -21 · 200817259 (18) 收納於所設置之各個分類目的卡匣5當中的1個分類目的 卡匣5之動作結束後，則可持續進行往上述各個分類目的 卡匣5當中的另1個分類目的卡匣5之分類。所設置之各 個分類目的卡匣5當中的其他分類目的卡匣5，係成爲待 機卡匣。 此外，如第1圖所示般，於基板分類系統1中，係設 置有可載置分類目的卡匣5之置放架79。於分類目的站 f 15及置放架79之間，可使用起重機（圖中未顯示）或是 分類目的卡匣移動機器人等，藉此可使分類目的卡匣5適 當的移動。 接下來說明基板分類系統1的動作。 第9圖〜第1 4圖係顯示用以說明基板分類系統1的動 作之圖式。 基板分類系統1係設定爲在上述控制裝置的控制下進 行動作。於基板分類系統1開始動作之前，例如係設定 爲，收納有種種基板W之分類來源卡匣3係設置於分類 來源站13，未收納基板W之空的分類來源卡匣3設置於 分類目的站1 5，於高密度卡匣9中並未收納基板W而成 爲空的卡匣。 此外，如第9圖所示般，手臂構材67係位於高密度 卡匣9側（第9圖的左側）。分類來源卡匣3係位於，吸 盤7 1的上端位於較收納於分類來源卡匣3的最下側之基 板W的下面還低之處的高度（係位於，支撐構材49的上 面亦位於離收納於分類來源卡匣3的最下側之基板W的 -22- 200817259 (19) 下面還低之處的高度）。此外，滾輪77係位於移 支撐構材63的下方。 於第9圖所示的狀態中，使手臂構材67往分 卡匣3側移動（第9圖的右側），並適當的使分類 匣3往下方移動，直到收納於分類來源卡匣3的最 基板W的下面，與吸盤71的上端幾乎爲一致爲止 收納於分類來源卡匣3的最下側之基板W的下面 較支撐構材49的上面稍微上方之位置爲止）。 接著以吸盤71將收納於分類來源卡匣3的最 基板W的下端部（載入裝置1 1側的下端部）加以 從支撐構材49的上面噴出空氣，使收納於分類來源 的最下側之基板W僅上升些許程度（參照第1 0圖： 接下來一邊從支撐構材70的上面噴出空氣， 手臂構材67往高密度卡匣9側（第1 0圖的左側） 而從分類來源卡匣3中搬出基板W。搬出後的基板 位於移載手臂支撐構材63的幾乎正上方的位置（ 1 1圖、第12圖）。 接下來使各個滾輪77上升，並使各個滾輪77 的高度與基板W的下面的高度幾乎呈一致（使各 77的上端的高度成爲僅較支撐構材70的上面的高 上方），以滾輪77支撐基板W的兩側邊部下面， 吸盤7 1對基板W的保持。 於第12圖中，爲了避免圖式不易觀看，因此 手臂構材67等的表示。 載手臂 類來源 來源卡 下側之 (直到 ，位於 下側之 保持， 卡匣3 〇 一邊使 移動， W，係 參照第 的上端 個滾輪 度稍微 並解除 係省略 -23- 200817259 (20) 於第1 2圖所示的狀態中，將高密度卡匣9定位於適 當的高度，並將滾輪41及支撐構材45插入於高密度卡匣 9的內部，使滾輪77、滾輪41迴轉驅動而將基板W搬入 至高密度卡匣9內。 之後使高密度卡匣9僅上升些許，將所搬入的基板W ‘載置於高密度卡匣9的纜線2 7。之後係返回與第9圖所示 的狀態幾乎爲相同之狀態。 重複進行此動作，一旦於高密度卡匣9中，留存特定 片數之相同種類的基板W，則將這些留存之特定片數的基 板W移往分類目的卡匣5。此移動係如上述般，係以與從 分類來源卡匣3將基板移載至高密度卡匣9之動作幾乎爲 相反之動作而進行。從高密度卡匣9往分類目的卡匣5移 動時，係從暫存站7的任意位置中搬出基板W。因此，可 僅將上述留存特定片數之相同種類的基板W移往分類目 的卡匣5，而進行基板W的分類。 一旦上述相同種類之特定片數的基板W移往分類目 的卡匣5之動作結束，則將分類目的卡匣5替換爲下一個 卡匣，而準備下一次相同種類的基板w之分類。 根據基板分類系統1，一旦於暫存站7中留存特定片 數之特定種類的基板W，則可僅將這些特定片數的基板W 移往分類目的卡匣5，因此’不須於分類目的卡匣5及置 放架79之間進行分類目的卡匣5的替換’而可有效率進 行基板W之分類。此外’由於可於暫存站7中以高密度 收納多數片的基板w，因此可避免暫存站7的大型化’使 -24 - 200817259 (21) 基板分類系統1達到小型化。 此外，藉由使基板分類系統1達到小 板分類系統1的設置面積。若可縮小基板 置面積，則於無塵室內使用基板分類系統 爲昂貴設備之無塵室的大小。 此外，根據基板分類系統1，係構成 ID，使分類至分類目的卡匣5之基板W 到基板分類系統1之更進一步的自動化， 且正確的進行基板W之分類。 此外，根據基板分類系統1，係構成 基板W收納於各個分類目的卡匣5當中 卡匣5之動作結束後，則可持續進行往各 5當中的另1個分類目的卡匣5之分類， 送目的的分類目的卡匣5有所改變，亦不 11的動作，而有效率進行基板W之分類< [第2實施型態] 第14圖係顯示本發明的第2實施型 統1 〇 1的槪略構成之側面圖，爲對應於第 第2實施型態之基板分類系統1 0 1， 輸送帶而進行分類來源卡匣3與載入裝濯 類目的卡匣5與載入裝置11之間之基板 看，係與第1實施型態之基板分類系統1 與基板分類系統1幾乎相同而構成，並 >型化，可縮小基 分類系統1的設 1時，可縮小做 爲根據所輸入之 移動，因此可達 並且可更有效率 爲一旦分類後的 的1個分類目的 個分類目的卡匣 因此即使基板搬 需中斷載入裝置 態之基板分類系 2圖之圖式。 就以使用滾輪之 :1 1之間以及分 W的搬送之點來 爲不同，其他係 可達到同樣的效 -25- 200817259 (22) 果。 亦即’於基板分類系統101中，係去除移載手臂支撐 構材63、手臂構材67、吸盤71等，並且各個輔助部17、 19具備以促動器所迴轉驅動之滾輪1〇2而構成。各個滾輪 102的上端的高度、各個滾輪77的上端的高度、及各個滾 輪4 1的上端的局度係互爲一致。此外，藉由適當的驅動 各個滾輪77、102，可於分類來源卡匣3與載入裝置11之 間以及分類目的卡匣5與載入裝置11之間進行基板|的 搬送。 [第3實施型態] 第1 5圖係顯示本發明的第3實施型態之基板分類系 統11〇的槪略構成之側面圖，爲對應於第2圖之圖式。 第3實施型態之基板分類系統11〇，就使用與手臂構 材67、吸盤71爲同樣構成且設置於移載手臂支撐構材63 之手臂構材67a、吸盤71a，而進行載入裝置11與高密度 卡匣9之間之基板W的搬送之點來看，係與第1實施型 態之基板分類系統1爲不同，其他係與基板分類系統1幾 乎相同而構成，並可達到同樣的效果。 此外，於暫存站側輔助部23中，係去除滾輪41。 [第4實施型態] 第4實施型態之基板分類系統（圖中未顯示），與第 1實施型態之基板分類系統1相反，係以使用由促動器所 -26- 200817259 (23) 驅動之滾輪之輸送帶’而進行分類來源卡匣3與載入裝置 1 1之間以及分類目的卡匣5與載入裝置1 1之間之基板W 的搬送，並使用手臂構材67a、吸盤71a而進行高密度卡 匣9與載入裝置11之間之基板W的搬送。 [第5實施型態] 第16圖係顯示本發明的第5實施型態之基板分類系 統1 3 0的槪略構成之俯視圖’爲對應於第1圖之圖式。 第1 7圖係顯示本發明的第5實施型態之基板分類系 統130的槪略構成之側面圖，爲第16圖之XVII的箭頭方 向之圖式。 第5實施型態之基板分類系統1 3 0，就使用基板移載 手臂132而進行分類來源卡匣3與載入裝置11的主體部 1 7之間，以及分類目的卡匣5與載入裝置1 1的主體部1 7 之間之基板W的搬送之點來看，係與第1實施型態之基 板分類系統1爲不同，其他係與基板分類系統1幾乎相同 而構成，並可達到同樣的效果。 亦即，於基板分類系統1 3 0中，係於與移載手臂支撐 構材63幾乎爲相同構成之移載手臂支撐構材63a中，設 置有可藉由促動器於X軸方向上自由移動及定位之梳狀的 基板移載手臂132。之後，可將基板移載手臂〗32插入於 分類來源卡匣3及分類目的卡匣5內而載置基板W並加 以運送。於移載手臂支撐構材63a之高密度卡匣9側的上 面上，設置有用以支撐基板W的重量之滾輪136,於將基 -27- 200817259 (24) 板從滾輪77搬送至滾輪4 1時’係以滾輪1 3 6支撐基板W 的重量，而可平順的進行基板w的運送。 此外，關於分類來源卡匣及分類目的卡匣，可不採用 纜線卡匣，而可採用於Y軸方向的兩端部上支撐基板W 之一般的卡匣。 [第6實施型態] 第6實施型態之基板分類系統（圖中未顯示），就使 用與手臂構材67、吸盤71爲同樣構成且設置於移載手臂 支撐構材 63之手臂構材 67a、吸盤 71a (參照第15 圖），而進行載入裝置11的主體部17與高密度卡匣9之 間之基板W的搬送之點來看，係與第5實施型態之基板 分類系統1 3 0爲不同，其他係與基板分類系統1 3 0幾乎相 同而構成，並可達到同樣的效果。 此外，於輔助部23 (參照第3圖）中，係與第3實施 型態之基板分類系統110同樣去除滾輪41。 於上述各項實施型態中，係使分類來源卡匣3、分類 目的卡匣5、高密度卡匣9於上下方向上移動而進行基板 W的搬出及搬入，但亦可預先於高度方向上固定分類來源 卡匣3、分類目的卡匣5、高密度卡匣9，並且使移載手臂 支撐構材63等於上下方向上移動，而藉此進行基板w的 搬出及搬入。 此外，本發明並不限定於上述發明的實施型態，可藉 由進行適當的變更而於其他型態中加以實施。 -28- 200817259 (25) 【圖式簡單說明】 第1圖係顯示本發明的第1實施型態之基板分類系統 的槪略構成之俯視圖。 第2圖係顯示基板分類系統的槪略構成之側面圖，爲 第1圖之II的箭頭方向之圖式。 第3圖係顯示暫存站的槪略斜視圖。 第4圖係顯示構成暫存站之高密度卡匣之斜視圖。 第5圖係顯示第3圖之V的箭頭方向之圖式。 第6圖係顯示第5圖之VI的箭頭方向之圖式。 第7圖係顯示基板分類系統的槪略構成之俯視圖，爲 對應於第1圖之圖式。 第8圖係顯示基板分類系統的槪略構成之側面圖，爲 第7圖之VIII的箭頭方向之圖式且爲對應於第2圖之圖 式。 第9圖係顯示用以說明基板分類系統的動作之圖式。 第1 0圖係顯示用以說明基板分類系統的動作之圖 式。 第1 1圖係顯示用以說明基板分類系統的動作之圖 式。 第1 2圖係顯示用以說明基板分類系統的動作之圖 式。 第1 3圖係顯示用以說明基板分類系統的動作之圖 式。 -29- 200817259 (26) 第1 4圖係顯示本發明的第2實施型態之基板分類系 統的槪略構成之側面圖，爲對應於第2圖之圖式。 第1 5圖係顯示本發明的第3實施型態之基板分類系 統的槪略構成之側面圖，爲對應於第2圖之圖式。 第1 6圖係顯示本發明的第5實施型態之基板分類系 統的槪略構成之俯視圖，爲對應於第1圖之圖式。 第1 7圖係顯示本發明的第5實施型態之基板分類系 統的槪略構成之側面圖，爲第16圖之XVII的箭頭方向之 圖式。 第1 8圖係顯示以往的基板分類系統的槪略構成之俯 視圖。 第19圖係顯示基板分類系統的正面圖，爲第18圖之 XIX的箭頭方向之圖式。 【主要元件符號說明】 1、101、1 10、130、200 :基板分類系統 3、202:分類來源卡匣 5、204 :分類目的卡匣 7 :暫存站 9 :高密度卡匣 11 :載入裝置 1 3 :分類來源站 14、16、33:卡匣移動定位裝置 1 5 :分類目的站 -30- 200817259 (27) 1 7 :分類來源 1 7 :主體部 1 9 :分類目的 2 3 :暫存站側 25 :側面構材 26 :開口部 2 7 :線狀構材 2 9 :輔助單元 3 1、57 :基座 3 3 :卡匣移動 3 5 : Y軸托架 3 7 :缺口 41 、 77 、 102、 43 :暫存站側 45 、 49 、 70 : 47 :分類來源 5 1 :分類目的 53 :高密度卡 5 9、6 5 :線性 61 :側邊構材 63 、 63a ：移 _ 67、67a ：手臂 6 9 :載入空氣 71、 71a ：吸盤 卡匣輔助部 卡匣輔助部 輔助部 (纜線） 構材 定位裝置 1 3 6 :滾輪 空氣浮動手段 支撐構材 空氣浮動手段 卡匣·分類來源卡匣側基板搬送手段 匣側基板搬送手段 導軌軸承 €手臂支撐構材 f構材 浮動手段 -31 - 200817259 (28) 73 :輸送帶基座構材 75 :滾輪支撐構材 7 9、2 1 0 :置放架 132 :基板移載手臂 206 :基台 208 :機器人 W :基板 •32In the sorting destination station 15 of the substrate sorting system 1, a plurality of sorting destination cards 5 can be set. In addition, after the classified substrates W-21, 200817259 (18) are stored in one of the classified purpose cards 5 provided in each of the classified purpose cards 5, the operation is continued. The classification of the other classification purpose card 匣5 in the classification purpose card 匣5. The other classification destination cards 匣5 among the various classification destination cards 设置5 are set as standby cards. Further, as shown in Fig. 1, in the substrate sorting system 1, a placement frame 79 on which the classification purpose cassette 5 can be placed is provided. Between the sorting destination station f 15 and the rack 79, a crane (not shown) or a sorting card, a mobile robot or the like can be used, whereby the sorting purpose card 5 can be appropriately moved. Next, the operation of the substrate sorting system 1 will be described. Figs. 9 to 14 show diagrams for explaining the operation of the substrate sorting system 1. The substrate sorting system 1 is set to operate under the control of the above-described control device. Before the start of the operation of the substrate sorting system 1, for example, the sort source card 3 in which the various types of substrates W are stored is set in the sort source station 13, and the sort source card 3 in which the substrate W is not stored is set in the sort destination station. In the high-density cassette 9, the substrate W is not stored and becomes empty. Further, as shown in Fig. 9, the arm member 67 is located on the side of the high-density cassette 9 (the left side of Fig. 9). The classification source card 3 is located at the upper end of the suction cup 7 1 at a height lower than the lower surface of the substrate W housed on the lowermost side of the classification source cassette 3 (the system is located on the upper side of the support member 49 -22-200817259 (19) of the lowermost side of the substrate W of the sort source card 3 is lower than the height below). Further, the roller 77 is located below the moving support member 63. In the state shown in Fig. 9, the arm member 67 is moved to the side of the minute card 3 (the right side of Fig. 9), and the classification 匣3 is appropriately moved downward until it is stored in the classification source card 3 The lower surface of the most substrate W is placed at a position on the lower surface of the substrate W on the lowermost side of the sorting source cassette 3 slightly above the upper surface of the support member 49, almost coincident with the upper end of the chuck 71. Then, the lower end portion (the lower end portion of the loading device 1 1 side) of the most substrate W accommodated in the sorting source cassette 3 is ejected from the upper surface of the supporting member 49 by the suction cup 71, and is stored in the lowermost side of the sorting source. The substrate W is only raised to a certain extent (see Fig. 10: next, air is ejected from the upper surface of the support member 70, and the arm member 67 is directed to the high-density cassette 9 side (the left side of the figure 10) from the classification source. The substrate W is carried out from the cassette 3. The substrate after the loading is placed at a position almost directly above the transfer arm supporting member 63 (FIG. 1 and FIG. 12). Next, the respective rollers 77 are raised, and the respective rollers 77 are placed. The height is almost the same as the height of the lower surface of the substrate W (the height of the upper end of each 77 is higher than the upper surface of the support member 70), and the lower side of the both sides of the substrate W is supported by the roller 77, and the pair of suction cups 7 1 In the twelfth figure, in order to avoid the drawing being difficult to view, the arm member 67 and the like are displayed. The arm type source card is on the lower side (until the lower side is held, the cassette 3 is one) Move, W, reference The upper end roller is slightly removed and the mechanism is omitted. -23- 200817259 (20) In the state shown in Fig. 2, the high-density cassette 9 is positioned at an appropriate height, and the roller 41 and the supporting member 45 are placed. Inserted into the inside of the high-density cassette 9, the roller 77 and the roller 41 are rotationally driven to carry the substrate W into the high-density cassette 9. Then, the high-density cassette 9 is raised only slightly, and the loaded substrate W' is placed. The cable 2 of the high-density cassette 9 is returned to the state which is almost the same as the state shown in Fig. 9. This operation is repeated, and once in the high-density cassette 9, the same kind of the same number of sheets is retained. The substrate W moves the remaining number of substrates W to the sorting destination cassette 5. This movement is performed as described above, and the substrate is transferred from the sort source card 3 to the high density cassette 9. In the case of moving from the high-density cassette 9 to the sorting purpose cassette 5, the substrate W is carried out from any position of the temporary storage station 7. Therefore, only the same type of the specific number of sheets can be retained. The substrate W is moved to the classification purpose card 5, and Sorting of the row substrate W. Once the operation of moving the substrate W of the same kind of the same kind to the sorting destination card 5 is completed, the sorting destination card 5 is replaced with the next card, and the next same type of substrate is prepared. According to the substrate classification system 1, once a specific number of substrates W of a specific number are retained in the temporary storage station 7, only the specific number of substrates W can be moved to the classification destination cassette 5, so It is necessary to perform the sorting of the sorting purpose cassette 5 between the sorting purpose cassette 5 and the rack 79. The sorting of the substrate W can be efficiently performed. Further, since a plurality of sheets can be accommodated in the temporary storage station 7 at a high density. Since the substrate w can prevent the size of the temporary storage station 7 from being increased, the size of the substrate classification system 1 is reduced to 24 - 200817259 (21). Further, the substrate sorting system 1 is brought to the set area of the small-plate sorting system 1. If the substrate area can be reduced, the size of the clean room in which the substrate sorting system is expensive in a clean room is used. Further, according to the substrate sorting system 1, the ID is configured, and the substrate W classified to the sorting destination cassette 5 is further automated to the substrate sorting system 1, and the sorting of the substrate W is performed correctly. Further, according to the substrate sorting system 1, after the operation of accommodating the substrate W in each of the sorting purpose cassettes 5, the sorting of the other sorting destination cassettes 5 is continued, and the sorting is continued. The classification target of the purpose is changed, and the operation of the substrate is not changed, and the classification of the substrate W is performed efficiently. [Second embodiment] FIG. 14 shows the second embodiment of the present invention. The side view of the schematic configuration is performed for the sorting source card 3 and the loading cassette 5 and the loading device 11 corresponding to the substrate sorting system 101 of the second embodiment. The substrate classification system 1 according to the first embodiment is configured in almost the same manner as the substrate classification system 1 and is classified into a type, and when the base classification system 1 is set to be smaller, it can be reduced as a basis. The movement of the input is therefore reachable and can be more effective. Once the classification is made, the classification target card of one classification purpose is used, so that even if the substrate is moved, the pattern of the substrate classification system in the device state is interrupted. It is different from the point of using the roller: 1 1 and the point of W. The other system can achieve the same effect -25- 200817259 (22). That is, in the substrate sorting system 101, the transfer arm supporting member 63, the arm member 67, the suction cup 71, and the like are removed, and each of the auxiliary portions 17, 19 is provided with the roller 1〇2 that is rotatably driven by the actuator. Composition. The height of the upper end of each of the rollers 102, the height of the upper end of each of the rollers 77, and the degree of the upper end of each of the rollers 41 are identical to each other. Further, by appropriately driving the respective rollers 77, 102, the substrate|salt can be transferred between the sort source card 3 and the loading device 11 and between the sorting destination card 5 and the loading device 11. [Third embodiment] Fig. 15 is a side view showing a schematic configuration of a substrate sorting system 11A according to a third embodiment of the present invention, and corresponds to the drawing of Fig. 2. In the substrate sorting system 11 of the third embodiment, the arm member 67a and the suction cup 71a, which are configured in the same manner as the arm member 67 and the suction cup 71, are disposed on the transfer arm supporting member 63, and the loading device 11 is loaded. The substrate W is transported from the high-density cassette 9 in a different manner from the substrate classification system 1 of the first embodiment, and the other system is configured in almost the same manner as the substrate classification system 1, and the same can be achieved. effect. Further, in the temporary storage station side auxiliary portion 23, the roller 41 is removed. [Fourth embodiment] The substrate sorting system (not shown) of the fourth embodiment is opposite to the substrate sorting system 1 of the first embodiment, and is used by the actuator -26-200817259 (23). The driving belt of the roller is used to carry out the conveyance of the substrate W between the sorting source cassette 3 and the loading device 1 1 and between the sorting destination cassette 5 and the loading device 1 1 , and using the arm member 67a, The suction pad 71a carries out the conveyance of the substrate W between the high-density cassette 9 and the loading device 11. [Fifth Embodiment] Fig. 16 is a plan view showing a schematic configuration of a substrate classification system 130 of the fifth embodiment of the present invention, which corresponds to Fig. 1 . Fig. 17 is a side view showing a schematic configuration of a substrate sorting system 130 according to a fifth embodiment of the present invention, and is a diagram showing an arrow direction of XVII in Fig. 16. The substrate sorting system 1 30 of the fifth embodiment performs the sorting source cassette 3 and the main body portion 17 of the loading device 11 using the substrate transfer arm 132, and the sorting purpose cassette 5 and the loading device. The substrate W of the first embodiment is different from the substrate classification system 1 of the first embodiment in that the substrate W of the first embodiment is different from the substrate classification system 1 of the first embodiment, and the configuration is almost the same as that of the substrate classification system 1. Effect. That is, in the substrate sorting system 130, the transfer arm supporting member 63a having almost the same configuration as the transfer arm supporting member 63 is provided to be freely movable in the X-axis direction by the actuator. The comb-shaped substrate that moves and positions is transferred to the arm 132. Thereafter, the substrate transfer arm 32 can be inserted into the classification source cassette 3 and the classification destination cassette 5 to mount the substrate W and transport it. On the upper side of the high-density cassette 9 side of the transfer arm supporting member 63a, a roller 136 for supporting the weight of the substrate W is provided for transporting the base -27-200817259 (24) plate from the roller 77 to the roller 4 1 At the time of 'supporting the weight of the substrate W with the roller 136, the substrate w can be conveyed smoothly. Further, regarding the classification source card and the classification destination card, a general cassette supporting the substrate W on both end portions in the Y-axis direction may be employed instead of the cable cassette. [Sixth embodiment] In the substrate sorting system (not shown) of the sixth embodiment, the arm member which is configured similarly to the arm member 67 and the suction cup 71 and which is provided to the transfer arm supporting member 63 is used. 67a, the suction cup 71a (refer to Fig. 15), and the substrate classification system of the fifth embodiment is described in the point of carrying out the conveyance of the substrate W between the main body portion 17 of the loading device 11 and the high-density cassette 9. The difference between 1 and 3 is that the other systems are almost identical to the substrate classification system 130, and the same effect can be achieved. Further, in the auxiliary portion 23 (see Fig. 3), the roller 41 is removed in the same manner as the substrate sorting system 110 of the third embodiment. In the above embodiments, the sort source card 3, the sort destination card 5, and the high-density cassette 9 are moved in the vertical direction to carry out the loading and unloading of the substrate W, but may be in advance in the height direction. The fixed sort source card 3, the sort destination card 5, the high density cassette 9, and the transfer arm supporting member 63 are moved in the up and down direction, whereby the substrate w is carried out and carried in. Further, the present invention is not limited to the embodiment of the invention described above, and can be implemented in other forms by appropriately changing the invention. -28-200817259 (25) [Brief Description of the Drawings] Fig. 1 is a plan view showing a schematic configuration of a substrate sorting system according to a first embodiment of the present invention. Fig. 2 is a side view showing a schematic configuration of a substrate sorting system, and is a diagram showing an arrow direction of Fig. 1 . Figure 3 is a schematic oblique view of the temporary storage station. Figure 4 is a perspective view showing a high density cassette constituting a temporary storage station. Fig. 5 is a view showing the direction of the arrow of V in Fig. 3. Fig. 6 is a view showing the direction of the arrow in the VI of Fig. 5. Fig. 7 is a plan view showing a schematic configuration of a substrate sorting system, which corresponds to the drawing of Fig. 1. Fig. 8 is a side view showing a schematic configuration of the substrate sorting system, which is a diagram of the arrow direction of VIII of Fig. 7 and corresponds to the pattern of Fig. 2. Figure 9 is a diagram showing the operation of the substrate sorting system. Fig. 10 shows a diagram for explaining the operation of the substrate sorting system. Fig. 1 is a view showing the operation of the substrate sorting system. Fig. 12 is a view showing the operation of the substrate sorting system. Fig. 13 shows a diagram for explaining the operation of the substrate sorting system. -29-200817259 (26) Fig. 14 is a side view showing a schematic configuration of a substrate sorting system according to a second embodiment of the present invention, which corresponds to the drawing of Fig. 2. Fig. 15 is a side view showing a schematic configuration of a substrate sorting system according to a third embodiment of the present invention, which corresponds to the drawing of Fig. 2. Fig. 16 is a plan view showing a schematic configuration of a substrate sorting system according to a fifth embodiment of the present invention, which corresponds to the drawing of Fig. 1. Fig. 17 is a side view showing a schematic configuration of a substrate sorting system according to a fifth embodiment of the present invention, and is a diagram showing an arrow direction of XVII in Fig. 16. Fig. 18 is a top view showing a schematic configuration of a conventional substrate sorting system. Fig. 19 is a front view showing the substrate sorting system, which is a diagram of the arrow direction of XIX in Fig. 18. [Description of main component symbols] 1, 101, 1 10, 130, 200: Substrate classification system 3, 202: Classification source card 匣 5, 204: Classification purpose card 匣 7: Temporary storage station 9: High density cassette 11: Incoming device 1 3 : Classification source station 14, 16, 33: Cartridge mobile positioning device 1 5: Classification destination station -30- 200817259 (27) 1 7 : Classification source 1 7 : Main body 1 9 : Classification purpose 2 3 : Temporary station side 25: side member 26: opening portion 2 7 : linear member 2 9 : auxiliary unit 3 1 , 57 : base 3 3 : cassette movement 3 5 : Y-axis bracket 3 7 : notch 41 , 77 , 102 , 43 : temporary storage station side 45 , 49 , 70 : 47 : classification source 5 1 : classification purpose 53 : high density card 5 9 , 6 5 : linear 61 : side members 63 , 63a : shift _ 67, 67a: Arm 6 9 : Loading air 71, 71a: Suction cup cassette auxiliary part card auxiliary part auxiliary part (cable) Member positioning device 1 3 6 : Roller air floating means support member air floating means card ·Classification source card 匣 side substrate transfer means 匣 side substrate transfer means guide rail bearing arm support member f-material floating means -31 - 200817259 (28) 73 : Loss 75 with base girders: roller support girders 7 9,2 10: bobbin 132 placed: the substrate transfer arms 206: base 208: robot W: substrate • 32