TW200812213A - Single-stage driving circuit for linear piezoelectric ceramic motor - Google Patents

Single-stage driving circuit for linear piezoelectric ceramic motor Download PDF

Info

Publication number
TW200812213A
TW200812213A TW95130051A TW95130051A TW200812213A TW 200812213 A TW200812213 A TW 200812213A TW 95130051 A TW95130051 A TW 95130051A TW 95130051 A TW95130051 A TW 95130051A TW 200812213 A TW200812213 A TW 200812213A
Authority
TW
Taiwan
Prior art keywords
voltage
circuit
switch
low
capacitor
Prior art date
Application number
TW95130051A
Other languages
Chinese (zh)
Other versions
TWI314386B (en
Inventor
Rou-Yong Duan
Original Assignee
Univ Hungkuang
Rou-Yong Duan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Hungkuang, Rou-Yong Duan filed Critical Univ Hungkuang
Priority to TW95130051A priority Critical patent/TWI314386B/en
Publication of TW200812213A publication Critical patent/TW200812213A/en
Application granted granted Critical
Publication of TWI314386B publication Critical patent/TWI314386B/en

Links

Landscapes

  • Inverter Devices (AREA)

Abstract

In this invention study develops of high step-up and high order resonant driving circuit for linear piezoelectric ceramic motor (LPCM). The LPCM, which usually operates at ultrasonic wave, has been widely used in many practical applications due to their merits of smaller dimension and high-holding force than the classic electromagnetic motors. The traditional driving circuit for the LPCM consists of a dc/dc converter and a dc/ac inverter, so that it usually needs two control circuits to achieve the speed regulation. However, the amplitude of ac output voltage should been effect by the variable load. In this invention, the linear piezoelectric ceramic motor drive is designed based on the high voltage gain property converter for regulating the LPCM speed and the high order resonant inverter to attenuate the effect of time-varying system parameters and load variations. Though the circuit is made up of converter and inverter with five switches, it only uses a controller to work. Analysis and experiment results are presented to demonstrate the performance of the proposed strategy of actual making.

Description

200812213 九、發明說明: 【發明所屬之技術領域] 本發明所涉及之技術領域係以電力電子之範 應用於線型壓電料馬達驅動所需之電源轉換電路。首夫 2低電壓電源昇壓至直流高壓電路,再利用高階 原理、,f直流高壓電轉換成高頻穩定之交流正弦電壓二 形,以提供線型壓電陶瓷馬達所需之電力。. 【先前技術】 線型壓電陶兗馬達(linear piezoelectric⑽mic刪〇r pc=是將電能轉換成機械能,其構造上與驅動原和 傳統電磁馬達不同’具有高轉矩低轉速 受電磁干擾等優點,因此,它县― 、〗不 的致動器,適合庠用於铲,.供巧又具有高轉矩 谭勺㈣二⑽之驅動裝置。圖1表示線型 ::瓦”之機械結構。線麵電陶莞馬達 性的產生-些機:力電材料上’材料將反抗 掇舻翻七 或疋應雙所形成的彈性振動以得到摩 ^ 一 、’,再利用此摩擦驅動力形成運動,馬達本身乃是 四固厚平板架構而成,四個電極」、n 附著在正面並分別舜芸v 如棋盤般 蓋單-電極。成針二:四为之一的表面,而反面則完全覆 分別為兩_==極以電線連接之,其 的行進控制。:=二兩對取其一應用,做為正向與負向 反面电極經由一可調變諧振反流器的可變 200812213 =後接地。線型壓電陶t馬達的運動是受限於四伽则 n译性係數支撑彈篑,這些彈#沿著馬達的長邊連 =陶究上,並且在連接點上沒有乂方向的運動,只在y二 硬質材料之陶瓷轉動子以黏著劑接合在壓電陶瓷短 i力二:Γ個短邊的中間有一緊㈣電陶莞上之 。如此’預力彈簧便可提供一壓力在轉 台之間’摩擦力便會產生在平台和轉動子之間的^ *厭而轉動子即可將力量傳遞至平台並使之移動,當交流 :::驅[T]頻率等於壓電陶瓷的自然諧振頻率時,其振幅 馬達參數為具非線性時變特性,諸如不適用 速、機電轉換效率偏低(大約35〜45%),此外它的耐 =性=,運轉易受溫升影響,其動態模型具非線性盘史 叙_ ’因此m L P c Μ驅動電路及其控制 馬達性能要求更高,一般學術或業界大都 J串:咖組成基本架構。由於壓電元件之-二= 負载而變化’所以必須偏離共振頻率並加上馬 ^屋迴杈’以閉迴路調整輸入電壓,取得释定之 ^電昼,’然而高頻迴授之響應控制不易處理,盆峰ϋ二 相力,尤其是在高速運轉時,電咖 問題,但相二 反饋以控制品質因數IV度二 規Α 研衣電、机源亚聯諧振反流器 200812213 [3] ’成功解決上述震幅與相位之瓶頸,以改變切換頻率調 整旋轉速度,然其輸出電壓諧波成分與環流比例過高。為 改善譜波與環流問題,結合串聯諧振與並聯諧振之高階 LLCC諧振反流器問世[4],將切換頻率侷限在幾何平均頻率 (geometric mean frequency)時,幾乎沒有任何環流經過 開關,同時兩相交流電壓震幅與相位不易受負載變動之影 響。上述旋轉型壓電陶瓷馬達係將兩相之交流電壓與相2 維持定值,利用不同切換頻率控制旋轉速度。後續開發應 用於線型壓電陶瓷馬達驅動裝置,僅使用一組交流電壓, 然其機械諧振多點分散,因此必須改用震幅控制[5],藉由 增加刚級可變昇壓型換流器之電壓控制LLCC反流器之震 ,,,該反流器之電壓增益僅約1 273倍,前級電壓二須提 昇至高壓方能操控。為降低前級電壓,於是有效控制 串聯諸振震幅之能量控制原理[6]以及更高反流器增益之丄 階諸振Π]陸續發表。LPC_動控制器發展至此,/已 二:成„要關鍵技術,然而上述文獻必須兩組獨立控 =以完成兩級架構調整需求,同時受限於 ;去出=低,並未討論驅動電路之轉換效率,因ΐ ΐ 馬達驅動裝置之須朝高效率微型化,以符合微 機電產業之需求。 订口 u 本么明所提之單級架構之線型l電陶冑弓遠齋叙+ 路,前級換流器電路採用為人千n * J尤馬達駆動電 關即可大範圍控制昇壓之值7;“構’僅用一個低麼開 理,將直流電轉換成高貝=用高譜振原 貝t疋之父流正弦電壓波形。後級 200812213 之切換頻率為^級之二分之―,且為同相位觸發,因此可 與刖級換流器共用一個控制1(:,大幅簡化前述文獻所需兩 組控制ic ’同時全部開關及:極體皆有柔性切換之特性。 【發明内容】 本發_明所提之單級架構之線型壓電陶瓷馬達驅動電路 如所不,包括.一低壓電源之直流輸入電路101;由耦 合電感一次側繞組A與低壓開關a所組成之一次側電路 102,主要+目的為導通一次側繞組心的電流;一第一箝制二 極體A、第二箝制二極體A與箝制電容q搭配之箝制電路 1糾’抑制低壓開關0之電壓;合電感二次側繞組^與 中塵電容02所組成之二次側電路1G3,該電路分別利用低壓 開關Q導通與截止時間昇壓;一高壓二極體與高壓電容 Q組成之高壓電路105 ’提供後級反流器所需之電源丨一由 四個高壓功率半導體開關m 所組成之全 橋反,器電路108,負責將高壓電路1〇5之直流電壓,切換 成為高階諧振電路所需交流方波電壓;一由串聯諧振電感 4、並聯^諧振電感心與串聯諧振電容Q、並聯諧振電容&所 組成之高階譜振電路107,將前述之高壓方波利用高階譜振 原理濾波成正弦波。一控制驅動電路1〇6,將速度控制命令 轉成五個開關所需之驅動訊號以及使用u p、D _開關切: 行進方向。另外’為使後續說明精簡易於暸解,專有名詞 不至於冗長,電路歸屬圖號(如...電路1〇1)省略之,直接對 照說明所屬圖示即可明瞭。 、 11 200812213 低壓開關Q與全橋開關ρβ_導通時,低壓開關q提 供一次側繞組A激磁電流l與感應電流&路徑,其感應之二 次側繞組電流/Z2,穿越串聯中壓電容c2以及高壓二極體凡 與全橋開關仏+、&_路徑,給予諧振反流器正半週所需電 源。當低壓開關Q截止時,全橋開關么+與仍持續導通, 箝制電路吸收一次側繞組漏感能量,並固定低電壓以保護 低Μ開關Q,待漏感能量降低,耦合電感激磁能量將傳至 一次侧繞組A,因此該繞組將能量釋放至中壓電容q。當 低壓開關Q再次導通時,全橋開關換向成為與仏導 通,換流器又是一週期之開始,而反流器輸出成為交流負 半週之電壓。而低壓開關與全橋開關係以同一控制器驅 動,其低壓開關頻率為80kHz,因此全橋開關切換頻率為低 壓開關之二分之-;而_合電感—次側電路與_合二 耦合電感’為一具高氣隙之高激磁電流雙繞組 .文反為,利用該變壓器匝數比不同,區隔電壓鱼 低壓難數少㈣大,高壓側反之。可圍以 吸收線路電感能量,並可再容納耦合電感 感能量,其吸收能量可再用於昇壓, %、'、之漏 導體開關導通時,二次側電路之力率半 電流路徑,其中所使用之第二箝制二極二二:繞組所需 制電容與耦合電感二次側電路,其;壓:刀別連接箝 電壓與箝制電容電壓之差值時,:::於高壓電容 通’因此所需承受電壓低於輪出電二極體導 電路。 +而碩外加裝緩震 200812213 單級架構之線型壓電陶瓷馬達驅動電路之各點波形時 序與電路工作模式,分別如圖3與圖4所示,電路元件相關 疋義睛茶考圖4(a)等效電路圖,詳細工作原理說明如下: 模式一:時間低壓開關0及全橋開關ρ 導通 一段時間:圖4(b) 本模式開始時,低壓開關a已經導通一段時間,導引 =直流輸入電路至耦合電感乃一次側繞組及之電流該電 流包括激磁電流^及感應電流&。感應電流(將透過耗合電 感之磁路,感應至輕合電感厂二次側、繞組々之電 於該繞組之極性點感應為正電壓,又與二次側中壓電2容^ 串聯,因此其串聯電壓高於高壓電容& 2 %-所棱供迴路,注入高階諧振雷敗% + 時交流輸出電壓^為正半週期 兒路所需之電流,此 令耦合電感7;之一次繞組' 之匝數 % tfr & AT 甘广如 句Μ,二次繞組厶之 ε數為m數比,搞 ^LJ(Lk+Lm) 疋義為 其中夂為激磁電感,4為一次側繞組z (1) 導通時,-次側激磁電感‘之等效電壓之感。低壓開㈣ = kVIN “馬 其中厂/tv為直流輸入電路之電墨,此日,—a (2) 電壓vZ2為 $ 一次側繞組矣感應之 VL2 nv200812213 IX. Description of the Invention: TECHNICAL FIELD The technical field to which the present invention relates is applied to a power conversion circuit required for driving a linear piezoelectric motor by using a range of power electronics. The first low-voltage power supply of the first husband 2 is boosted to the DC high-voltage circuit, and then the high-order principle is used to convert the high-voltage electric current into a high-frequency stable AC sinusoidal voltage diode to provide the electric power required for the linear piezoelectric ceramic motor. [Prior Art] Linear piezoelectric ceramic motor (linear piezoelectric (10) mic deleted r pc = is the conversion of electrical energy into mechanical energy, its structure is different from the driving original and the traditional electromagnetic motor' has high torque, low speed and electromagnetic interference, etc. Therefore, it is the actuator of the county, not suitable for shovel, and the drive device with high torque Tan spoon (four) two (10). Figure 1 shows the mechanical structure of the line type: tile. The electric generation of the electric ceramics - some machines: the material on the electro-mechanical material will resist the elastic vibration formed by the 掇舻 疋 or 疋 双 以 to obtain the friction, and then use the friction driving force to form the movement, The motor itself is a four-thick-thick flat plate structure, four electrodes", n attached to the front side and respectively 舜芸v such as a checkerboard-like single-electrode. The needle 2: four is one of the surfaces, while the reverse side is completely covered. The two _== poles are connected by wires, and their travel control.:=Two pairs of pairs take one of the applications, as positive and negative reverse electrodes via a variable-variable resonant inverter variable 200812213 = After grounding. The movement of the linear piezoelectric ceramic t motor is Limited to the four gamma n translation coefficient support impeachment, these bombs # along the long side of the motor = ceramics, and there is no movement in the direction of the joint, only the ceramic rotor in the y two hard material to adhere The agent is bonded to the piezoelectric ceramic short i-force 2: there is a tight (four) electric pottery in the middle of the short side of the crucible. So the 'pre-force spring can provide a pressure between the turntables' friction will be generated on the platform and rotate Between the children, the rotator can transfer the force to the platform and move it. When the AC::: drive [T] frequency is equal to the natural resonant frequency of the piezoelectric ceramic, the amplitude motor parameter is nonlinear. Time-varying characteristics, such as inapplicable speed, low electromechanical conversion efficiency (about 35~45%), in addition to its resistance =, the operation is susceptible to temperature rise, and its dynamic model has a nonlinear disk history _ 'so m LP c Μ drive circuit and its control motor performance requirements are higher, generally academic or industry J string: coffee composition of the basic structure. Because the piezoelectric element - two = load changes 'must so must deviate from the resonance frequency and add the horse Look back 'adjust the input voltage with a closed loop, The power is released, 'but the response control of the high frequency feedback is not easy to handle, the two peaks of the peak and the peak, especially in the high speed operation, the electric coffee problem, but the second feedback to control the quality factor IV degree two rules Research clothes, machine source, sub-harmonic inverter 200812213 [3] 'Successfully solve the bottleneck of the above amplitude and phase, to change the switching frequency to adjust the rotation speed, but the output voltage harmonic component and the circulation ratio is too high. To improve Spectral wave and circulation problems, combined with high-order LLCC resonant inverters with series resonance and parallel resonance [4], when the switching frequency is limited to the geometric mean frequency, almost no loop flows through the switch, and two-phase AC The voltage amplitude and phase are not susceptible to load changes. The above-described rotary piezoelectric ceramic motor maintains a constant value of the two-phase AC voltage and the phase 2, and controls the rotation speed by using different switching frequencies. Subsequent development applied to the linear piezoelectric ceramic motor drive device, using only one set of AC voltage, but its mechanical resonance is multi-point dispersed, so it is necessary to use the amplitude control [5], by adding the rigid-stage variable boost type commutation The voltage of the device controls the vibration of the LLCC inverter. The voltage gain of the inverter is only about 1 273 times. The voltage of the front stage must be raised to high voltage to be controlled. In order to reduce the voltage of the front stage, the energy control principle of effectively controlling the amplitude of the series vibrations [6] and the higher order of the gain of the higher inverter are successively published. LPC_dynamic controller has developed to this point, / two: into the key technology, however, the above documents must be two sets of independent control = to complete the two-level architecture adjustment requirements, while limited by; go out = low, does not discuss the drive circuit The conversion efficiency is due to the fact that the motor drive unit must be miniaturized towards high efficiency to meet the needs of the micro-electromechanical industry. The order of the single-stage architecture of the line u is the line-type l electric pottery bow bow Yuanzhai + road The pre-converter circuit adopts a thousand n * J and the motor slams the electric switch to control the boost value 7 in a large range; "construction" uses only one low-cause, converts the direct current into high-bee = high The sinusoidal voltage waveform of the parent of the spectrum oscillator. The switching frequency of the later stage 200812213 is two-points of the ^ level, and is the same phase trigger, so it can share a control 1 with the first-class converter (:, greatly simplify the two sets of control ic ' required for the above documents) The polar body has the characteristics of flexible switching. [Invention] The single-stage linear piezoelectric ceramic motor driving circuit of the present invention includes a DC input circuit 101 of a low voltage power supply; The primary side circuit 102 composed of the primary side winding A and the low voltage switch a is mainly for the purpose of conducting current of the primary side winding core; a first clamping diode A, a second clamping diode A and a clamping capacitor q are matched. The clamping circuit 1 corrects the voltage of the low-voltage switch 0; the secondary side circuit 1G3 composed of the secondary side winding ^ and the medium dust capacitor 02, the circuit is respectively boosted by the low-voltage switch Q and the off-time is boosted; The high voltage circuit 105 composed of the pole body and the high voltage capacitor Q' provides the power required by the rear stage inverter. The full bridge inverter circuit composed of four high voltage power semiconductor switches m is responsible for the high voltage power. The DC voltage of 1〇5 is switched into the AC square wave voltage required for the high-order resonant circuit; a high-order spectral circuit 107 composed of a series resonant inductor 4, a parallel resonant inductor core, a series resonant capacitor Q, and a parallel resonant capacitor & The high-voltage square wave is filtered into a sine wave by using a high-order spectral vibration principle. A control driving circuit 1〇6 converts the speed control command into driving signals required for five switches and uses up, D _ switch cutting: traveling direction In addition, in order to make the follow-up instructions easier to understand, the proper nouns are not too long, and the circuit attribution figure number (such as ... circuit 1〇1) is omitted, and the description can be directly compared with the description. 11 200812213 Low voltage When the switch Q and the full bridge switch ρβ_ are turned on, the low voltage switch q provides the primary side winding A excitation current l and the induced current & path, the induced secondary side winding current / Z2, traverses the series medium voltage capacitor c2 and the high voltage two The polar body and the full bridge switch 仏+, & _ path, give the power supply required for the positive half cycle of the resonant inverter. When the low voltage switch Q is cut off, the full bridge switch + and still continue to conduct, the clamp circuit absorbs The primary side winding leaks energy and fixes a low voltage to protect the low-turn switch Q. The leakage inductance energy is reduced, and the coupled inductor excitation energy is transmitted to the primary side winding A, so the winding releases energy to the medium voltage capacitor q. When the low-voltage switch Q is turned on again, the full-bridge switch commutates to be connected to the 仏, the inverter is the beginning of a cycle, and the inverter output becomes the voltage of the AC negative half-cycle. The low-voltage switch is connected to the full bridge. The same controller drives, the low-voltage switching frequency is 80kHz, so the full-bridge switching frequency is two-points of the low-voltage switch; and the _inductor-secondary circuit and the _coupled inductor are a high air gap high excitation The current double winding. The text is reversed, using the transformer turns ratio is different, the barrier voltage fish low pressure is less difficult (four) large, the high voltage side is opposite. It can be used to absorb the line inductance energy, and can accommodate the coupled inductance energy. The absorbed energy can be used to boost the voltage. When the leakage conductor switch is turned on, the force side half current path of the secondary circuit is The second clamped two poles used: the secondary capacitor of the winding and the secondary side circuit of the coupled inductor; the pressure: the difference between the voltage of the clamp and the voltage of the clamp capacitor::: at the high voltage capacitor Therefore, the required withstand voltage is lower than the wheel-out diode guide circuit. + and the external installation of cushioning 200812213 single-stage linear piezoelectric ceramic motor drive circuit waveform timing and circuit operation mode, as shown in Figure 3 and Figure 4, circuit components related to the tea test 4 (a) Equivalent circuit diagram, the detailed working principle is as follows: Mode 1: Time low voltage switch 0 and full bridge switch ρ Conduction for a period of time: Figure 4 (b) At the beginning of this mode, low voltage switch a has been turned on for a period of time, guidance = The DC input circuit to the coupled inductor is the primary winding and the current. The current includes the excitation current ^ and the induced current & The induced current (which will pass through the magnetic circuit that consumes the inductance, sensed to the secondary side of the light-inductive inductor, and the electric current of the winding is induced to be a positive voltage at the polarity of the winding, and is connected in series with the secondary-side piezoelectric 2 capacitor. Therefore, the series voltage is higher than the high voltage capacitor & 2% - the ribbed supply loop, when the high-order resonance is defeated by % +, the AC output voltage ^ is the current required for the positive half-cycle, which makes the coupled inductor 7; the primary winding匝%% tfr & AT 甘广如句Μ, the number of ε of the secondary winding turns is m-number ratio, engages ^LJ(Lk+Lm) 疋 meaning that 夂 is the magnetizing inductance, 4 is the primary winding z (1 When conducting, the sense of the equivalent voltage of the -second side magnetizing inductance'. Low voltage on (4) = kVIN "Mazhong factory / tv is the ink of the DC input circuit, this day, -a (2) voltage vZ2 is $ primary side Winding 矣 induction VL2 nv

LlLl

nkVIN (3) 特別說明電流L與其他電流關係式為 200812213 iL2=ix/n = iu-iLm<iLi 此外,低壓開關電流/· (4) ㈣中壓電容Q,但其:遠:二 其電流爬升率因兩侧漏感得以限制,因]二=’且 耦合係數々很容易設計接近丨, 、"、由於 m,為簡化計算1合;;^輪,壓影響比例不高 亦白如人又疋為卜由於高壓電路電壓 可表示為 电合匸2,因此該電壓&nkVIN (3) Specifically, the relationship between current L and other currents is 200812213 iL2=ix/n = iu-iLm<iLi In addition, low voltage switch current / (4) (four) medium voltage capacitor Q, but its: far: two The current climb rate is limited by the leakage inductance on both sides, because the second = 'and the coupling coefficient 々 is easy to design close to 丨, , ", because m, to simplify the calculation 1;; ^ wheel, the pressure effect ratio is not high and white If the person is stunned, the voltage of the high voltage circuit can be expressed as 电2, so the voltage &

Vh = + vC2 =nVIN+ vC2 模式二:時間“弋);低壓開關Q觸發訊號截止瞬間,全 開關、仏_持續導通··圖4(c) 本模式始於低壓開關Q觸發訊號截止瞬間,耦合電感 次側繞組心受限於漏感影響,其電流仏仍繼續流通,電流 路杈改為對低壓開關Q之寄生電容充電,二次側電路之電 概t ’亦因該繞組之漏感能量釋放,仍以高壓二極體%續 流至全橋開關仏+及δ。當低壓開關β兩端電壓vMl逐漸上 昇時,第一箝制二極體/^之逆偏跨壓亦逐漸降低,本模式 止於電壓vDiS1高於箝制電容ς電壓vcl。 模式三:時間(〖2—^);二次侧電流L轉向,第一箝制二極 體A導通以及全橋開關么+、&_持續導通:圖4(d) 當低壓開關α之電壓高於箝制電容q電壓vci時,第 一箝制二極體A導通,導引一次側繞組電流/L1流向箝制電 容ς,該電容為一具高頻響應佳之高容量電容,藉以快速 14 200812213 導引低壓開關βΐ電流至该電容,因此其電壓%可視為一 穩定之低連波直流電壓’以抑制低壓開關電壓之最大值, 而開關承受電壓等於第一箝制二極體a承受電壓,兩者 電壓相互箝制,令低壓開關導通之責任週期為Θ,則其電壓 關係式為 VC1 = VLm + ^IN = ^IN /(1 ~ = V〇sl ⑹ 在釋放二次側繞組乓漏感能量後,電流l於本模式之 始轉向,其電流來自一次側激磁電流/^釋放能量,感應至 二次側電流L,從非極性點流出並對高壓電容充電。又因 電流L從零緩慢上昇,其路徑剛好補充高壓二極體凡所需 截止之逆向恢復電流以及接受第二箝制二極體^導通前所 釋放出來寄生電容之電流,且兩二極體電塵相互箝制,皆 具低逆向恢復電流特性,此為達成高效率換流ϋ所具備關 鍵技術之-,兩二極體承受跨壓%。與〜低於高壓電路之電 壓^,可表示為 ^DO = VD2 ~~VC\ ^四m’。’4)’第二箝制二極體&導通以及全橋丨 關&+、&—持續導通:圖4(e) 日士截於第—柑制二極體&導通而高壓二極體仏1 日守截止,耦合電咸Γ 胃 υ 放,一次側嘵組雷、/.4 置兵分兩路由兩側繞組3 组帝i電"丨1^1持績對箝制電容匸丨充電,二次側多 充Γ:2Γ 箝制二極體D丨與a回路對中屋電容( ΐ:示Γ 繞組電塵〜在非極性點電壓為正… 15 200812213 vl\ = ViNd /(1 ⑻ 因此中壓電容c2之電壓可計算為 VC2-VL2^VJNnd/(l^cl) 將上式帶入式〇 (9) (ίο) V^=nViN+vC2^VINn/(l^d) 針對換流器部分求其電壓增益〜表示如下 Gn=VHfViN^/(l_d) 承心i式⑹,式(ι 1)繪製換流器電壓增益^、低壓開關 一又、i〜1鉍低壓開關責任週期J之關係曲線如圖5所 =^同樣E數比與責任週期設計下,本發明昇壓比例高 於苓考文獻[8]之麵合電感架構。 模式五··時間(W5);—次側電流~轉向以及 持續導通:圖4(f) 么+ 由於箝制電容電壓VC1已經充電一段時間,當一次側繞 組之漏感能量消耗殆盡,一次側電流心轉向時,開始本模 式之時序。依據充電平衡原g,箝㈣電容電。放電電流 將逆流至耦合電感一次側繞組厶以及直流輪入電路,並對 中壓電容q繼續充電,當兩側繞組電流L與L串聯相等 時,第一箝制二極體A截止。 L1 、 模式六·時間- /^ ),低壓開關0瞬間導通,全橋開關2 、 截止··圖4(g) 此時低壓開關Q再次導通’由於第一箝制二極體乃1可 使用低壓蕭基二極體,當低壓開關Q導通時立即以幾乎無 16 200812213 逆向電流逆偏,此外搞合f π—、二次側漏感 兩串聯電流b與匕2之變動率,因此抑制電流^上昇率,以 及電流/i2則需要時間降至零’低壓開關0無法自一次側+ 路、二次側電路與第一箝制二極體A等三路徑汲取任何! 流,自然形成零電流切換特性(zcsw匕時電路電流 仍然維持輸人電源電路,但逐漸遞減巾,因此本發明低ί 開關Q導通時具柔性切換,截止時箝制於低電壓特性。土 在全橋反流器方面,令择關關^ ^ w王“開關之驅動信號, k附於低壓開關Q之同—控制器而截止,但另—組全橋開 = &+、&_仍未導通,由於輸出交流電壓%與輸人反流器 輸=方波電壓同相位[4],所以開始負半週交流電壓波形。 二串办卜白振电感、仍有洛後電流續流,對四個橋式開關 2:生電谷充放電,其電流將逐漸導引開關1與&—自然 而開關與么_之飛輪二極體相對導通,然後結束 本模式。 =^七·時間(& _&)低壓開關⑽續導通,全橋開關仏+ 導通:圖4(h) 一 干,壓開關Q電流“高於激磁電流以夺,二次側繞組 開始感應來自-次側繞組的能量,對高壓電路充 甩,向壓換流器部分又回到模式一的情形。 極王橋反Γ為方f,由於全橋開關&+與么-之飛輪二 秋=、通’此時觸發時,開關具有零電壓切換效果(zvs), 聯諧振電感4電流亦開始反向,繼續高階諧振電路 之父流電壓負半週期。從模式—至模式七,完成高昇壓換 200812213 流器之—週期切換模式,但對反流器 此高昇壓換户哭夕而;。僅兀成一+,因 期的= 兩仙結束後,才會回到換流器下—週 =於高以LCC諧振之原理分析如后說明,令切抑 又頌率為%,疋義諧振電壓增益^〗為輪帝 二 值%_)與輸入方波電壓峰值厂比 L私i V〇之峰 对备嗶值〜之比尺為壓電陶瓷馬達耸 效負載電阻,依據阻抗分壓式^ 曰皿g—K2以及輸入方波電壓與交流電壓%之相位值…] ^O(max) ^ 4/Vh = + vC2 =nVIN+ vC2 Mode 2: Time “弋”; low-voltage switch Q trigger signal cut-off instant, full switch, 仏 _ continuous conduction · Figure 4 (c) This mode starts from the low-voltage switch Q trigger signal cut-off instant, coupling The secondary winding core of the inductor is limited by the leakage inductance, and the current 仏 continues to flow. The current path is changed to charge the parasitic capacitance of the low-voltage switch Q. The electric current of the secondary circuit is also due to the leakage energy of the winding. Release, still continue to flow to the full bridge switch 仏+ and δ with high voltage diode %. When the voltage vMl across the low voltage switch β gradually rises, the reverse bias voltage of the first clamped diode is gradually reduced. The mode ends at voltage vDiS1 higher than the clamp capacitor ς voltage vcl. Mode 3: Time (〖2-^); Secondary side current L steering, first clamp diode A conduction and full bridge switch +, & Conduction: Figure 4(d) When the voltage of the low-voltage switch α is higher than the clamp capacitor q voltage vci, the first clamp diode A is turned on, guiding the primary side winding current / L1 to the clamp capacitor ς, the capacitor is a high High-capacity capacitor with good frequency response, so fast 14 200812213 Guide low voltage open Βΐ current to the capacitor, so the voltage % can be regarded as a stable low-wavelength DC voltage 'to suppress the maximum value of the low-voltage switching voltage, and the switch withstand voltage is equal to the voltage of the first clamp diode a, the voltages of the two clamp each other , the duty cycle for turning on the low-voltage switch is Θ, then the voltage relationship is VC1 = VLm + ^IN = ^IN /(1 ~ = V〇sl (6) After releasing the secondary side winding puncture energy, the current is At the beginning of this mode, the current is from the primary side excitation current / ^ release energy, induced to the secondary side current L, flows out from the non-polar point and charges the high voltage capacitor. And because the current L rises slowly from zero, its path just complements The reverse recovery current of the high voltage diode required to be cut off and the current of the parasitic capacitance released before the second clamp diode is turned on, and the two diodes are clamped to each other, and have low reverse recovery current characteristics. In order to achieve the key technology of high-efficiency commutation, the two diodes are subjected to a voltage across the voltage. The voltage below the high voltage circuit can be expressed as ^DO = VD2 ~~VC\^four m'. 4) 'The second clamp two Polar Body & Conduction and Full Bridge Pass &+, & - Continuous Conduction: Figure 4(e) Japanese sect is in the first - citrus diode & conduction and high voltage diode 仏 1 day deadline, Coupling electric salty sputum stomach sputum, one side squat group, the other, the two sides of the two sides of the two windings, the three sets of windings, the three sets of electricity, "丨1^1 performance to clamp the capacitor 匸丨, the secondary side more charge Γ: 2Γ clamp diode D丨 and a loop to the center capacitor (ΐ: Γ winding dust ● at the non-polar point voltage is positive... 15 200812213 vl\ = ViNd / (1 (8) therefore medium voltage capacitor c2 The voltage can be calculated as VC2-VL2^VJNnd/(l^cl). The above equation is taken into the equation 〇(9) (ίο) V^=nViN+vC2^VINn/(l^d). Find the voltage for the converter part. The gain ~ is expressed as follows: Gn=VHfViN^/(l_d) Chengxin i type (6), formula (ι 1) draws the inverter voltage gain ^, low voltage switch one again, i ~ 1 铋 low voltage switch duty cycle J relationship curve 5 = ^ The same E-number ratio and duty cycle design, the present invention is higher than the surface-inductance structure of the reference [8]. Mode 5··Time (W5);—Secondary current~steering and continuous conduction: Figure 4(f) 么+ Since the clamp capacitor voltage VC1 has been charged for a while, when the leakage inductance energy of the primary winding is exhausted, the primary side When the current is turned, the timing of this mode is started. According to the charge balance original g, the clamp (four) capacitor electricity. The discharge current will flow back to the primary winding of the coupled inductor and the DC input circuit, and continue to charge the medium voltage capacitor q. When the winding currents L and L are equal in series, the first clamp diode A is turned off. L1, mode hex·time - /^), low-voltage switch 0 is turned on instantaneously, full-bridge switch 2, cut-off · Figure 4 (g) At this time, low-voltage switch Q is turned on again 'Because the first clamped diode is 1 can use low voltage Xiaoji diode, when the low-voltage switch Q is turned on, immediately reverses the reverse current of almost no 2008 200812213, and also fluctuates the f π-, the secondary side leakage inductance, and the variation rate of the two series currents b and 匕2, thus suppressing the current ^ The rate of rise, as well as the current /i2, takes time to zero. 'Low-voltage switch 0 cannot take any three paths from the primary side + the secondary circuit, the secondary side circuit and the first clamped diode A. The flow naturally forms a zero current switching characteristic. (Zcsw匕 circuit current still maintains the input power circuit, but gradually reduces the towel, so the invention is low. The switch Q has flexible switching when turned on, and clamps to low voltage characteristics when turned off. The earth is in the full bridge inverter, Guan Guan ^ ^ w Wang "switch drive signal, k attached to the same low voltage switch Q - controller and cut off, but the other - group full bridge open = & +, & _ still not turned on, due to the output AC voltage% In phase with the input inverter output = square wave voltage [4], In order to start the negative half cycle AC voltage waveform. The second string of white oscillators, there is still current after the current, four bridge switches 2: electricity grid charge and discharge, its current will gradually lead to switch 1 and & - natural The switch is turned on with the flywheel diode of the _, and then ends this mode. =^7·Time (&_&) Low-voltage switch (10) continues to conduct, full-bridge switch 仏+ conduction: Figure 4 (h) dry, pressure The switch Q current "is higher than the excitation current to capture, the secondary winding starts to sense the energy from the secondary winding, and the high voltage circuit is charged, and the pressure converter portion returns to mode one." For the square f, since the full bridge switch & + and the flywheel of the two - autumn =, pass 'at this time, the switch has zero voltage switching effect (zvs), the resonant inductor 4 current also begins to reverse, continue high-order resonance The parent voltage of the circuit is negative for a half cycle. From mode to mode 7, the high-boost converter is switched to the -12212213-cycle switching mode, but the high-voltage converter is reluctant to the inverter. Period = two cents after the end, will return to the inverter - week = The high-resolution analysis of the principle of LCC resonance is as follows, so that the cutoff rate is %, the resonance voltage gain of the 疋 为 is the value of the wheel 二 值%_) and the input square wave voltage peak factory ratio L private i V 〇 peak The ratio of the 哔 value to the 哔 为 is the piezoelectric ceramic motor load resistance, according to the impedance divider type ^ g g - K2 and the phase value of the input square wave voltage and the AC voltage %...] ^O(max) ^ 4 /

1 + ^ + ^1 + ^ + ^

Cs Lp ω^Ιρ〇3:喊 Ψ - tan'Cs Lp ω^Ιρ〇3: shout Ψ - tan'

\ ❻sL$C p + J [喊—1 ] ) \ L & cosRlCs J (12) 1 + ^- +\ ❻sL$C p + J [Call-1] ) \ L & cosRlCs J (12) 1 + ^- +

LIlAT -cosLsCp (13)LIlAT -cosLsCp (13)

Cs Lp 〇^Lpcs 上式4與Z〆分別為串聯電感與並聯電感之感值,而c與c 分別為串聯電容與並聯電容之容值。令諧振㈣值^制 條件及以及幾何平均頻/,-l/(2^V^C;) g (14、 且令全橋開關切換頻率人等於幾何平均頻率△,並式 (12)與式(13)可以簡化成 GV2 =4/λγ = 1.273 Α (15) (16) 圖6所示為高階諧振電路電壓增益曲線圖,由不同負載 18 200812213 檢視電壓增益gF2對不同切換頻率厶之響應。依據八 析,操作在幾何平均頻率時,電壓增益 塑: 固定為4/ττ。 只執如4且 =物理特耗由於所組成之串料效阻抗 ==率操作時為零,同理…所組成之並聯等效阻 =:…因此方波電_後’整個高階譜振阻抗剩 下負载电阻,基本波成分直接跨在負載端,所以沒 因此應用於驅動壓電陶究馬達’不需迴授授調節: 最後求得整體諧振電壓增益Gn之條件為,當 時,輸出交流電壓心之峰值與直流輸入電敕容 轉移方程式如下 电土〜之比,整個 (17) ^V3 ^O(max) \^in -4/?/7r(l-d) 【實施方式】 本發明係以線型壓電陶莞馬達所需驅動電源規格作為 設計依據,其頻率為4GkHz,因此全橋開關切換頻率盘幾^ =均頻率依此設定以及計算譜振元件之值。在高昇壓換流 為部分,則倍頻為80kHz。驅動壓電陶£馬敎最高電 27〇Vrms,依據前述電壓增益方程式,反推高壓電路之電塵 為300V。驅動壓電㈣馬達之交流電壓丨卿聊(m =以下時㈣始停止運動,故必須提供更低之交流電壓以 確保停止狀態,因此高壓直流電壓規範於72v〜3〇〇v之間, 19 200812213 可以符合壓電陶瓷馬達全域驅動之電壓範圍。其詳細規格 條列如下: vIN ·· uv。 K" : 72V〜300V。 切換頻率:DC/DC: 80kHz; DC/AC: 40kHz 線型壓電陶瓷馬達規格: 1·雙頭輸出;2.供應電源:最高270Vrms,40kHz ; 3.額定 功率:10W ; 4.壓電陶瓷馬達等效電容:2nF。 諧振電感:心=心=1320〆/。 諧振電容:Q=CV=12nF(含壓電陶瓷馬達等效電容)。 搞合電感:乃:4 = 100以// ; L2=3.6m// ; :7V2=18 : 108 ; ]<:二0.95 ; Core : ΕΙ 〇 MOSFET : Q : IRF4710 ()^=100V,(㈤=0·014Ω,TO-220)。 Qa.Qa-Qb.Qb- : IRF840(Fd,=500V ^ RDS{ON)=0AQ ^ TO-220) Diode:Cs Lp 〇^Lpcs The above equations 4 and Z are the sense values of the series inductor and the shunt inductor, respectively, and c and c are the capacitance values of the series capacitor and the shunt capacitor, respectively. Let the resonance (four) value ^ condition and the geometric mean frequency /, -l / (2 ^ V ^ C;) g (14, and make the full bridge switching frequency equal to the geometric mean frequency △, and formula (12) and (13) can be simplified to GV2 = 4 / λ γ = 1.273 Α (15) (16) Figure 6 shows the voltage gain curve of the high-order resonant circuit, the response of the voltage gain gF2 to different switching frequencies 由 by different loads 18 200812213. According to the eight analysis, when operating at the geometric mean frequency, the voltage gain is: fixed at 4/ττ. Only for 4 and = physical consumption due to the composition of the material effect impedance == rate is zero when operating, the same reason... The parallel equivalent resistance of the composition =:... Therefore, the square wave power _ after 'the entire high-order spectral impedance is left with the load resistance, the basic wave component directly crosses the load end, so it is not used to drive the piezoelectric ceramic motor' Authorization adjustment: Finally, the condition of the overall resonance voltage gain Gn is obtained. At that time, the peak value of the output AC voltage core and the DC input power capacitance transfer equation are as follows: the whole (17) ^V3 ^O(max) \^in -4/?/7r(ld) [Embodiment] The present invention is a linear piezoelectric ceramics As far as the design of the required driving power supply is concerned, the frequency is 4GkHz, so the full-bridge switching frequency disk is set as follows and the value of the spectral element is calculated. In the high-boost commutation, the multiplier is 80kHz. Drives the piezoelectric ceramics to the highest voltage of 27〇Vrms. According to the above voltage gain equation, the electric dust of the high-voltage circuit is reversed to 300V. The AC voltage of the piezoelectric (four) motor is driven (m = the following (four) starts to stop Movement, it is necessary to provide a lower AC voltage to ensure the stop state, so the high voltage DC voltage is specified between 72v~3〇〇v, 19 200812213 can meet the voltage range of the piezoelectric ceramic motor global drive. The detailed specifications are as follows : vIN ·· uv. K" : 72V~300V. Switching frequency: DC/DC: 80kHz; DC/AC: 40kHz Linear piezoelectric ceramic motor Specifications: 1·Double-head output; 2. Power supply: up to 270Vrms, 40kHz; 3. Rated power: 10W; 4. Piezoelectric ceramic motor equivalent capacitance: 2nF. Resonant inductance: heart = heart = 1320 〆 /. Resonant capacitance: Q = CV = 12nF (including piezoelectric ceramic motor equivalent capacitance). Inductance: is: 4 = 100 to / / ; L2 = 3.6m / / ; : 7V2 = 18 : 108 ; ] < : two 0.95 ; Core : ΕΙ 〇 MOSFET : Q : IRF4710 () ^ = 100V, ((5) = 0 014 Ω, TO -220) Qa.Qa-Qb.Qb- : IRF840(Fd,=500V ^ RDS{ON)=0AQ ^ TO-220) Diode:

Dr D2: STPS20H100CT, 100V/2*10A (schottky) ? TO-220AB D0 : SFA1606G, 400V/16A, TO-220AB 為使更進一步瞭解本發明之内容,以下實施例之實驗 波形,電路元件之電壓及電流之代號,敬請參閱圖4(a)之等 效電路。 圖7及圖8所示為本發明之線型壓電陶瓷馬達驅動電路 之實施例,圖7(a)中為低壓開關Q之電壓Vasi與電流//^波 形,如圖所示低壓開關Q導通時具有零電流切換(ZCS)之特 20 200812213 性,當低壓開關β截止時,兩端之突波電壓受第一箝制二 極體Α導通至箝制電容q之功效,箝制電壓在30V附近,符 合理論分析,且遠低於開關最高耐壓100V。低壓開關之導 通責任週期為0.59,仍有相當寬裕調整空間以改善輸入電 壓變動因素、負載效應影響及提高輸出電壓。 圖7(b)為全橋反流器開關仏+之電壓v@+與電流波 形,圖中所示全橋開關仏+具有零電壓切換(ZVS)之特性。 由圖7(a)與圖7(b)中可得知開關切換損失減少,對於效率之 轉換有相當的助益。圖7(c)為一次侧繞組A之電流、二次 侧繞組乓之電流/12與低壓開關電壓之相關波形,由圖顯 示一次側繞組A之電流L與二次側繞組Z2之電流/Ζ2之比為 6 : 1,與本發明所設計之匝數比相等,同時高壓側之電流 遠小於低壓側電流,表示本發明已完全達成高、低壓侧的 電壓及電流分野之目的,更驗證理論與實際之關連性。 圖7(d)為高壓電路之電壓^、第一箝制二極體電壓vD1 與第二箝制二極體電壓vD2之波形,第二箝制二極體電壓 之電壓低於高壓電路之電壓匕,又對照圖8(a)之波形,其 中第二箝制二極體乃2與高壓二極體%,其兩二極體相互箝 制,其波形放大如圖8(b)所示。圖8(e)與(f)為第二箝制二極 體乃2之電壓vD2電流與高壓二極體凡之電壓電流k 之波形,其逆向恢復電流低於導通電流且未加裝緩震電路 下,二極體兩端不存在突波電壓,所以二極體已達成電壓 箝制及柔性切換效果。 圖8(c)為諧振反流器之並聯諧振槽輸出交流電壓%、低 21 200812213 壓開關β電壓Vpn與全橋開關電壓%+之波形,低壓開關 α完成一週期切換模式時,全橋開關a+僅完成一半,因此 低壓開關β之兩周期結束後,全橋開關方開始下一週 期。 圖8(d)為高壓電路之電壓匕與諧振反流器之並聯諧振 槽輸出交流電壓%之波形,其交流電壓%之峰值與高壓電路 電壓^之電壓比約為1.376倍略大於方程式(15)中的1.273 倍。 圖8(e)與圖8(f)為諧振反流器應用於10W負載及無載之 並聯諧振槽輸出交流電壓%,並分別作傅立葉分析其波形 總諧波失真率(THD)。圖8(e)為10W負載時,輸出交流電壓 波形其總諧波失真率(THD)為9%。圖9(f)為無載時,總諧波 失真率(THD)略高,為12.9%。 圖9表示本發明所揭示之單級架構之線型壓電陶瓷馬 達驅動電路應用於線型壓電陶瓷馬達無載時,諧振反流器 之並聯諧振槽輸出交流電壓~之實測波形,其中(a)、(b)以 及(c)分別為命令電壓+3、+6以及+ 9伏特時’輸出40kHz正 弦交流電壓波形,其對應速率與電壓峰值分別為 I6mm/ --166V、52mn/ — 208V以及 49mn/ — 260V ; (d)、 /sec /sec /sec v ’ (e)以及(f)分別為命令電壓-3、-6以及-9伏特時,輸出40kHz 正弦交流電壓波形,其對應速率與電壓峰值分別為Dr D2: STPS20H100CT, 100V/2*10A (schottky) ? TO-220AB D0 : SFA1606G, 400V/16A, TO-220AB For further understanding of the contents of the present invention, the experimental waveforms of the following embodiments, the voltage of the circuit components and For the code of the current, please refer to the equivalent circuit of Figure 4(a). 7 and FIG. 8 show an embodiment of the linear piezoelectric ceramic motor driving circuit of the present invention. In FIG. 7(a), the voltage Vasi and the current//^ waveform of the low voltage switch Q are turned on, and the low voltage switch Q is turned on as shown in FIG. It has the characteristic of zero current switching (ZCS) 20 200812213. When the low voltage switch β is cut off, the surge voltage at both ends is controlled by the first clamp diode 至 to the clamp capacitor q, and the clamping voltage is around 30V, which is consistent with Theoretical analysis, and far below the maximum withstand voltage of the switch 100V. The on-load duty cycle of the low-voltage switch is 0.59, and there is still considerable room for adjustment to improve input voltage variation, load effect, and output voltage. Figure 7(b) shows the voltage v@+ and current waveform of the full-bridge inverter switch 仏+. The full-bridge switch 仏+ has zero-voltage switching (ZVS) characteristics. It can be seen from Fig. 7(a) and Fig. 7(b) that the switching loss is reduced, which is quite helpful for the conversion of efficiency. Fig. 7(c) shows the correlation between the current of the primary side winding A, the current of the secondary side winding puncture/12 and the low voltage switching voltage, and the current L of the primary side winding A and the current of the secondary side winding Z2/Ζ2 are shown by the figure. The ratio is 6:1, which is equal to the turns ratio designed by the present invention, and the current on the high voltage side is much smaller than the low side current, indicating that the present invention has completely achieved the purpose of dividing the voltage and current on the high and low voltage sides, and further proves the theory. Relevance to reality. Figure 7 (d) is the voltage of the high voltage circuit ^, the first clamp diode voltage vD1 and the second clamp diode voltage vD2 waveform, the voltage of the second clamp diode voltage is lower than the voltage of the high voltage circuit, and Referring to the waveform of Fig. 8(a), the second clamped diode is 2% of the high voltage diode, and the two diodes are clamped to each other, and the waveform is enlarged as shown in Fig. 8(b). 8(e) and (f) are waveforms of the voltage vD2 current of the second clamp diode and the voltage current k of the high voltage diode, and the reverse recovery current is lower than the on current and the surge circuit is not added. Underneath, there is no surge voltage at both ends of the diode, so the diode has achieved voltage clamping and flexible switching effects. Fig. 8(c) shows the waveform of the AC voltage of the parallel resonant tank of the resonant inverter, the low voltage of 21,122,122, and the voltage of the full-bridge switching voltage, and the full-bridge switching mode when the low-voltage switch α completes the one-cycle switching mode. A+ is only half completed, so after the end of the two cycles of the low voltage switch β, the full bridge switch begins the next cycle. Figure 8(d) shows the waveform of the output voltage of the voltage 匕 of the high-voltage circuit and the parallel resonant tank of the resonant inverter. The ratio of the peak value of the AC voltage to the voltage of the high-voltage circuit is about 1.376 times larger than the equation (15). 1.273 times in ). Fig. 8(e) and Fig. 8(f) show the output AC voltage % of the resonant regenerator applied to the 10W load and the unloaded parallel resonant tank, and the Fourier analysis of the waveform's total harmonic distortion rate (THD). Figure 8(e) shows the total harmonic distortion (THD) of the output AC voltage waveform at 9% for a 10W load. Figure 9(f) shows that the total harmonic distortion rate (THD) is slightly higher at 12.9% when there is no load. 9 is a diagram showing the measured waveform of the output voltage of the parallel resonant tank of the resonant inverter when the linear piezoelectric ceramic motor driving circuit of the single-stage structure disclosed in the present invention is applied to the linear piezoelectric ceramic motor without load, wherein (a) (b) and (c) output 40kHz sinusoidal AC voltage waveforms for command voltages +3, +6, and +9 volts, respectively. The corresponding rate and voltage peaks are I6mm/-166V, 52mn/-208V, and 49mn, respectively. / — 260V ; (d), /sec /sec /sec v ' (e) and (f) output a 40kHz sinusoidal AC voltage waveform for command voltages of -3, -6, and -9 volts, respectively, corresponding to rate and voltage The peak values are

Mmry __164v、49mn/ --206V 以及 86mn/ --258V。測量 /sec /sec /sec 壓電陶瓷馬達靜止時正向與逆向之靜止電容分別為1.83nf 以及1.93nf,由於此正向靜止電容與逆向靜止電容的不同, 22 200812213 造成當命令電壓值一樣時,正向與逆向兩者速度與電壓峰 值的差異,此乃壓電材料内部電容之非線性特性,形成 LLCC為振曲線偏移’但同^^亍進方向’不易受負載變化景;^ 響之特性仍然存在。 圖10表示本發明所揭示之單級架構之線型壓電陶究馬 達驅動電路應用於線型壓電陶瓷馬達堵住測試時,譜振反 流器之並聯諧振槽輸出交流電壓V。之實測波形,其中(a)、 (1))以及((:)分別為命令電壓+3、+6以及+9伏特時,輸出4〇]^1^ 正弦交流電壓波形;(d)、(e)以及(f)分別為命令電壓_3、_6 以及-9伏特時,輸出40kHz正弦交流電壓波形。 由圖9及圖10可清楚得知,在固定的命令電壓下,益办 #、、、口ί田 是無載或堵住測試時,諧振反流器所輸出的正弦電壓波形 幾乎不變,由此可驗證本發明所揭示之線型壓電陶竟馬達 驅動裝置具有極佳的穩定性。 雖本發明已以前述較佳實施例揭示,然其並非以限定 本發明,任何熟習此技藝者,在不脫離本發明之精神和範 圍内,當可做各種之變動與修改,因此本發明之保護範圍 當事後附之申請專利範圍所界定者為準。 備註:參考文獻 1 R. J· Wai,R. Y· Duan,J· D· Lee,and C· H. Tu,“Development of high-gain six-order resonant technique for linear piezoelectric ceramic motor drived Pending R, O. C. Invention Patent, Appl NO. 091137812. 2 F· J. Lin,and L. C· Kuo, ’’Driving circuit for ultrasonic motor servo 23 200812213 drive with variable-structure adaptive model-following control,ff IEE Proceeding Electrical Power Applications,vol. 144,no. 2,pp. 199-206, 1997. 3 F· J. Lin,R. Y. Duan,and J. C· Yu,“An ultrasonic motor drive using a current-source parallel-resonant inverter with energy feedback,” IEEE Trans. Power Electron., vol. 14? no. 1, pp. 31-42, 1999. 4 F. J. Lin,R. Y. Duan,R. J. Wai and C. M. Hong,“LLCC resonant inverter for piezoelectric ultrasonic motor drive,” /五五 /Voc. η — ··___ A____7 ___1 Λ Λ r ___ c λ ^rn λ n^7 1 rvr^rv vui· ιπ·υ, iiu. pp. 丄 5 R. J. Wai,F. J. Lin,R. Υ· Duan,Κ· Y. Hsieh,and J. D. Lee,“Robust fuzzy neural network control for linear ceramic motor drive via backstepping design technique^ IEEE Trans. Fuzzy Systems, vol. 10, no.l5 pp. 102-H2, 2002. 6 R. J. Wai,R. Y· Duan,and J· D. Lee,Hybrid resonant driving circuit for linear piezoelectric ceramic motor via energy feedback technique, R. O. C. Invention Patent l>\o. 197634. 7 R· J· Wai and R. Y· Duan,“High-efficiency DC/DC converter with high voltage gain/5 IEE Proc. Electric Power Applications, vol. 152? no· 4, pp· 793-802, 2005.Mmry __164v, 49mn/ --206V and 86mn/ --258V. Measuring /sec /sec /sec Piezoelectric ceramic motors have a positive and negative static capacitance of 1.83nf and 1.93nf at rest, due to the difference between the forward static capacitance and the reverse static capacitance, 22 200812213 caused when the command voltage value is the same , the difference between the forward and reverse speeds and the voltage peak, which is the nonlinear characteristic of the internal capacitance of the piezoelectric material, forming the LLCC as the vibration curve offset 'but the same direction is not easily affected by the load change; ^ The characteristics still exist. Fig. 10 is a diagram showing the output of an alternating current voltage V of a parallel resonant tank of a spectral converter when the linear piezoelectric ceramic motor drive circuit of the single-stage architecture disclosed in the present invention is applied to a linear piezoelectric ceramic motor blocking test. The measured waveform, where (a), (1)), and ((:) are command voltages +3, +6, and +9 volts, respectively, output 4〇]^1^ sinusoidal AC voltage waveform; (d), ( e) and (f) output 40kHz sinusoidal AC voltage waveforms for command voltages _3, _6 and -9 volts respectively. It can be clearly seen from Fig. 9 and Fig. 10 that under a fixed command voltage, When the port is in the no-load or blocking test, the sinusoidal voltage waveform outputted by the resonant inverter is almost unchanged, thereby verifying that the linear piezoelectric ceramic motor drive device disclosed in the present invention has excellent stability. The present invention has been disclosed in the foregoing preferred embodiments, and is not intended to limit the scope of the invention, and the invention may be variously modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. Remarks: Reference 1 R. J. Wai, R. Y. Duan, J. D. Lee, and C. H. Tu, “Development of high -gain six-order resonant technique for linear piezoelectric ceramic motor drived Pen Ding R, OC Invention Patent, Appl NO. 091137812. 2 F· J. Lin, and L. C· Kuo, ''Driving circuit for ultrasonic motor servo 23 200812213 drive with variable-structure adaptive model-following control, ff IEE Proceeding Electrical Power Applications, vol. 144, no. 2, pp. 199-206, 1997. 3 F· J. Lin, RY Duan, and J. C· Yu, “An ultrasonic motor drive using a current-source parallel-resonant Inverter with energy feedback," IEEE Trans. Power Electron., vol. 14? no. 1, pp. 31-42, 1999. 4 FJ Lin, RY Duan, RJ Wai and CM Hong, "LLCC resonant inverter for piezoelectric ultrasonic motor Drive," /五五/Voc. η — ··___ A____7 ___1 Λ Λ r ___ c λ ^rn λ n^7 1 rvr^rv vui· ιπ·υ, iiu. pp. 丄5 RJ Wai, FJ Lin, R. Υ·Duan, Κ·Y. Hsieh, and JD Lee, “Robust fuzzy neural network control for linear ceramic motor drive via backstepping design technique^ IEEE Trans. Fuzzy Systems, vol. 10, no.l5 pp. 102-H2 , 2002. 6 RJ Wai, R. Y· Duan, and J. D. Lee, Hybrid resonant driving circuit for linear piezoelectric ceramic motor via energy feedback technique, ROC Invention Patent l>\o. 197634. 7 R· J· Wai and R. Y· Duan, “High-efficiency DC/DC converter with high voltage gain/5 IEE Proc. Electric Power Applications, vol. 152? no· 4, pp· 793-802, 2005.

8 Q. Zhao and F· C. Lee,“High-efficiency,high step_up DC-DC converters/5Trans. Power Electron., vol. 18, no. 1? pp. 65 73, 2003. 【圖式簡單說明】 24 200812213 圖1線型塵電陶究馬達機械結構。 圖2本發明之單級架構之線型塵電陶 路架構圖。 、、、達驅動電路之電 圖3本發明之單級架構之線髮電陶 路時序圖。 、、、達驅動電路之電 圖4本發明之單級架構之線型壓電陶瓷 作模式圖。 "、、達驅動電路之工 圖5本叙明之單級架構之線型壓電陶 流器,⑷於不同阻數比條件下,電心也辱區動電路之換 關責任週期&關係曲線;_數心c慶開 開關電墨V如與低麗開關導通責任週期4之β、守,低壓 圖6本發明單級架構之線型 =各。 譜«路:於不同負載時,電壓增益達=圖電路之高階 回7本电明之早級架構之線型壓電陶 測波形之一。 仏動弘路之貫 圖8本發明之單級架構之線型壓電陶究馬達驅動電· 測波形之二。 Ά 圖9本發明單級架構之線型壓電陶莞馬達驅動電路,並聯 諳振槽輸出交流電壓之無荷重實測波形。 # 圖1(^本發明單級架構之線型壓電陶瓷馬達驅動電路,並聯 譜振槽輸出交流電壓之堵住測試實測波形。 25 200812213 【主要元件符號說明】 101 :直流輸入電路 102 : —次侧電路 103 :二次侧電路 104 :箝制電路 105 :高壓電路 106 :控制驅動電路 10 7 ·南階譜振電路 108 :全橋反流器電路 〜:直流輸入電路電壓 VH :高壓電路電壓 ν,:輸出交流電壓 β :低壓功率半導體開關(簡稱低壓開關) 、仏-、&+及:高壓功率半導體開關(簡稱全橋 開關) 7;:具高激磁電流之變壓器(簡稱耦合電感) A::柄合電感K之輛合係數 A :耦合電感一次側繞組(簡稱一次側繞組) :耦合電感二次侧繞組(簡稱二次側繞組) 4:串聯諧振電感 4:並聯諧振電感 ς :箝制電容 c2 :中壓電容 C# :高壓電容 26 200812213 q:串聯諧振電容 cv :並聯諧振電容 A:第一箝制二極體 乃2 :第二箝制二極體 凡:高壓二極體 278 Q. Zhao and F· C. Lee, “High-efficiency, high step_up DC-DC converters/5Trans. Power Electron., vol. 18, no. 1? pp. 65 73, 2003. [Simple description] 24 200812213 Fig. 1 The mechanical structure of the linear dust-fired ceramic motor. Figure 2 is a schematic diagram of the linear dust-electric ceramic circuit structure of the single-stage architecture of the present invention. The electric circuit of the drive circuit of the present invention is the power generation of the single-stage structure of the present invention. The timing diagram of the circuit, the electric circuit of the drive circuit of the present invention, the linear piezoelectric ceramic of the single-stage structure of the present invention is used as a pattern diagram of the single-stage structure of the present invention. The terrarium, (4) under different resistance ratio conditions, the electric core also humiliates the duty cycle of the circuit and the relationship curve; _ number of hearts c open switch electric ink V as with the switch of the low switch duty cycle 4 β, 守, low voltage Figure 6 The linear type of the single-stage architecture of the invention = each. Spectrum «Road: At different loads, the voltage gain is up to = the high-order of the circuit is back to the linear piezoelectric test waveform of the early stage structure of the 7th electric I. 仏动弘路之图 Figure 8 is a single-stage architecture of the invention of the linear piezoelectric ceramic motor drive · Measure the second waveform. Ά Figure 9. The linear piezoelectric ceramic motor drive circuit of the single-stage architecture of the present invention, the load-free measured waveform of the output AC voltage of the parallel oscillating vibration tank. # Figure 1 (The linear pressure of the single-stage architecture of the present invention) Electric ceramic motor drive circuit, parallel spectrum oscillator output AC voltage blocking test measured waveform. 25 200812213 [Main component symbol description] 101: DC input circuit 102: - secondary circuit 103: secondary circuit 104: clamp circuit 105 : High voltage circuit 106 : Control drive circuit 10 7 · South-order spectral circuit 108 : Full-bridge inverter circuit ~: DC input circuit voltage VH : High-voltage circuit voltage ν,: Output AC voltage β : Low-voltage power semiconductor switch (referred to as low voltage Switch), 仏-, & + and: high-voltage power semiconductor switch (referred to as full-bridge switch) 7;: transformer with high excitation current (referred to as coupled inductor) A:: shank inductance K of the vehicle combination coefficient A: coupled inductor Primary winding (referred to as primary winding): coupled inductor secondary winding (referred to as secondary winding) 4: series resonant inductor 4: parallel resonant inductor ς: clamp capacitor c2: medium voltage Yung C #: high-voltage capacitor 26 200812213 q: series resonant capacitor CV: parallel resonant capacitor A: a first clamping diode is the 2: Where the second clamp diodes: two high-voltage diodes 27

Claims (1)

200812213 十、申請專利範圍: 1. 一種單級架構之線型壓電陶瓷馬達驅動電路包含 一一次側電路:由耦合電感一次側繞組與低壓開關所組 成,主要目的為導通一次侧繞組之電流,並藉由低壓開 關導通與截止,儲存或釋放耦合電感一次側繞組之能量; 一箝制電路:由第一箝制二極體、第二箝制二極體與箝 制電容組成,主要是吸收耦合電感一次側之漏感能量以 保護低壓開關,並將吸收之能量釋放於輸出端; 一二次侧電路:由耦合電感二次侧繞組興中壓電容所組 成,該電路分別利用低壓開關導通與截止時間昇壓; 一高壓電路:由高壓二極體與高壓電容組成,提供後級 反流器所需之高壓直流電源; 一全橋反流器電路:由四個高壓功率半導體開關所組 成,負責將高壓電路之直流電壓,切換成為高階諧振反 流器所需交流方波電壓; 一高階諧振電路:由串聯諧振電感、並聯諧振電感與串 聯諧振電容、並聯諧振電容等四個被動元件所組成,以 高階諧振原理,將前述之高壓方波波形濾波成正弦波; 一控制驅動電路··將速度控制命令轉成低壓開關與四個 全橋開關所需之驅動訊號; 低壓開關與全橋開關導通時,低壓開關提供耦合電 感一次側繞組激磁電流與感應電流之路徑,其感應之耦 合電感二次侧繞組電流,穿越串聯中壓電容以及高壓二 極體與兩全橋開關路徑,給予諧振反流器正半週所需電 源;當低壓開關截止時,兩全橋開關仍持續導通,箝制 28 200812213 電路吸收耦合電感一次側繞組漏感能量,並固定低電壓 以保護低壓開關,待漏感能量降低,耦合電感激磁 將,至輕合電感二次側繞組,因此該繞組將能量釋放至 中壓電容;當低壓開關再次導通時,全橋開關換向成為 f兩全橋開關導通,換流器又是一週期之開始,而反流 出成為交流另一半週之電壓;因此全橋開關切換; 率為低壓開關之二分之一,全部開關可共用一個控制哭。 .如申請專利範圍第1項所述之單級架構之線型壓電陶。兗 ,達驅動罨路’具中耦合電感一次側電路 之麵合電r為一具高氣隙之高激磁電流= r i:,利用该k壓态匝數比不同,區隔電壓與電流 馬口电感一次側電路之低壓側匝數少電流大,高 I =2:範圍第1項所述之單級架構之線型壓電陶竟 量,另""冰’其中粉制電路除可以吸收線路電感能 希咸—谷納耦合電感-次側繞組之漏感能量;耦合 :應電ί,則ί二漏感越高將減少耦合電感二次側繞組 日;二叮制電路配合增加低壓半導體開關導通 守間仍可以維持輸出電壓定值。 體兩端= 上電路所使用之第-箱制二極 承受電壓盥低燁門率半導體開關與箝制電容’所需 失之二極體 開關相同’因此可採用低㈣低導通損 5·如申請專利範圍第1項所述之單級架構之線型屢電陶究 29 馬達驅動電路,其中 體兩端分別連接箝制電二::所:吏用之第二箝制二極 向電壓高於高墨電容带極體,當該二極體逆 迫傕含颅干 电壓與箝制電容電壓之士 Z k使⑽電路之高虔:極 U之差值#,將 昼低於高壓電容電壓額二:因此所需承受電 6·如中請專利範圍第i項所述之單級 路。 向電壓,高於高壓用ί高壓二極體逆 差值時,將基的“ ··私i/、柑制兒路箝制電容電壓之 導通,因戶所使用之第二箝制二極體順偏 額外緩厂低於高厂堅電容電厂堅,不需加裝 二箝制:二二極體與箝制電路所使用之第 高之門1门士1v、,因此無二極體逆向恢復電流過 呵之問碭,同時兼具電壓箝制效能。 7. ttff利範圍第1項所述之單級架構之線型壓電陶究 動電路,其中之高階諧振電路,主要目的係將直 k琶壓切換成4〇kHz之交流正弦電壓;設計幾何頻率盥 切換頻率相同皆為4 〇 k Η z,使得全橋開關在導通時具柔 性切換效果,降低切換損失之優點。 8·如申請專利範圍第1項所述之單級架構之線型壓電陶瓷 馬達驅動電路,其中之控制驅動電路,將80kHZ方波驅 動訊號,降為40kHz並分離為4組〇。及180。兩種方波波 形’提供高階諧振反流器所需4個高壓功率半導體開關 之閉極驅動訊號。 30200812213 X. Patent application scope: 1. A single-stage linear piezoelectric ceramic motor drive circuit comprises a primary side circuit consisting of a coupled inductor primary winding and a low voltage switch, the main purpose of which is to conduct current of the primary winding. And the low-voltage switch is turned on and off, storing or releasing the energy of the primary winding of the coupled inductor; a clamping circuit: consisting of the first clamped diode, the second clamped diode and the clamped capacitor, mainly absorbing the coupled inductor primary side Leakage energy to protect the low-voltage switch and release the absorbed energy to the output; a secondary circuit: consisting of a secondary winding of the coupled inductor, which is composed of a medium-voltage capacitor, which uses the low-voltage switch to conduct and cut off respectively. Boost; a high voltage circuit consisting of a high voltage diode and a high voltage capacitor to provide the high voltage DC power required by the downstream inverter; a full bridge inverter circuit: consisting of four high voltage power semiconductor switches, responsible for The DC voltage of the high voltage circuit is switched to the AC square wave voltage required for the high-order resonant inverter; a high-order resonant circuit It consists of four passive components, such as series resonant inductor, parallel resonant inductor, series resonant capacitor, and parallel resonant capacitor. The high-voltage square wave waveform is filtered into a sine wave by high-order resonance principle. One control drive circuit··speed control The command is converted into a driving signal required for the low-voltage switch and the four full-bridge switches; when the low-voltage switch and the full-bridge switch are turned on, the low-voltage switch provides a path of the coupled current and the induced current of the primary winding of the coupled inductor, and the coupled coupled inductor secondary side The winding current passes through the series medium-voltage capacitor and the high-voltage diode and the two full-bridge switching paths, giving the resonant half-cycle the required power supply for the positive half-cycle; when the low-voltage switch is turned off, the two full-bridge switches remain continuously conducting, clamping 28 200812213 The circuit absorbs the leakage inductance energy of the primary side winding of the coupled inductor, and fixes the low voltage to protect the low voltage switch. When the leakage inductance energy is reduced, the coupled inductor will be excited to the secondary winding of the light coupling inductor, so the winding releases the energy to the medium voltage. Capacitor; when the low-voltage switch is turned on again, the full-bridge switch is commutated to become the two full-bridge switches. It is also the beginning of a cycle, and reflux the other AC voltage to become half weeks; thus full-bridge switch; rate of one-half of the low pressure switch, all share a control switch may cry. A linear piezoelectric ceramic of a single-stage structure as described in claim 1 of the patent application.兖,达驱动罨's surface of the primary side of the coupled inductor is r, a high air gap of high excitation current = ri:, using the k pressure state turns ratio is different, the voltage and current of the mouth The low-voltage side of the inductor primary side circuit has a small current, high I = 2: the linear piezoelectric ceramics of the single-stage architecture described in the first item, and the other The line inductance can be the salt-gull-coupled inductor-the leakage inductance energy of the secondary winding; the coupling: the voltage should be ί, then the higher the leakage inductance will reduce the secondary winding day of the coupled inductor; the second circuit will increase the low-voltage semiconductor The switch conductance can still maintain the output voltage setting. Both ends of the body = the first-box two-pole withstand voltage used in the upper circuit. The low-threshold rate semiconductor switch is the same as the clamped capacitor 'required missing diode switch'. Therefore, low (four) low conduction loss can be used. The single-stage architecture of the single-stage architecture described in the first paragraph of the patent range 29 motor drive circuit, in which the two ends of the body are respectively connected to the clamped electric two:: the second clamped second pole voltage is higher than the high ink capacitor With the pole body, when the diode is forced to contain the cranial dry voltage and the clamp capacitor voltage Z k makes the (10) circuit high: the difference U of the pole U, will be lower than the high voltage capacitor voltage two: therefore Need to withstand electricity 6 · Single-stage road as described in item i of the patent scope. When the voltage is higher than the high voltage and the high voltage diode is used, the voltage of the base voltage is turned on, and the second clamp diode used by the household is added. The slow factory is lower than the high-factory capacitor power plant, and there is no need to install two clamps: the second gate used by the diode and the clamp circuit is 1V, so there is no diode reverse recovery current.砀 砀 同时 利 利 利 利 利 利 利 利 利 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围 范围交流 kHz AC sinusoidal voltage; design geometric frequency 盥 switching frequency is the same 4 〇 k Η z, making the full bridge switch flexible switching effect when turned on, reducing the switching loss advantage. 8 · As claimed in the first item The linear piezoelectric ceramic motor driving circuit of the single-stage architecture, wherein the control driving circuit reduces the 80 kHZ square wave driving signal to 40 kHz and separates into four groups of 〇 and 180. The two square wave waveforms provide high-order resonance 4 high voltage power required by the flow device The closed-circuit drive signal of the semiconductor switch. 30
TW95130051A 2006-08-16 2006-08-16 Single-stage driving circuit for linear piezoelectric ceramic motor TWI314386B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95130051A TWI314386B (en) 2006-08-16 2006-08-16 Single-stage driving circuit for linear piezoelectric ceramic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95130051A TWI314386B (en) 2006-08-16 2006-08-16 Single-stage driving circuit for linear piezoelectric ceramic motor

Publications (2)

Publication Number Publication Date
TW200812213A true TW200812213A (en) 2008-03-01
TWI314386B TWI314386B (en) 2009-09-01

Family

ID=44767968

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95130051A TWI314386B (en) 2006-08-16 2006-08-16 Single-stage driving circuit for linear piezoelectric ceramic motor

Country Status (1)

Country Link
TW (1) TWI314386B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8213190B2 (en) 2008-12-31 2012-07-03 Macroblock, Inc. Single-stage isolated high power factor AC/DC converter with leakage inductor energy recovery function
CN104097113A (en) * 2014-06-24 2014-10-15 苏州大学 Single-stage driver positioning device and error compensation method
US9407173B2 (en) 2011-01-31 2016-08-02 Man-Sun Yun Piezo actuator having an electrode structure for a torsional vibration mode, and rotation-type ultrasonic motor including same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI481186B (en) * 2012-05-03 2015-04-11 Delta Electronics Inc Motor control device and motor control method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8213190B2 (en) 2008-12-31 2012-07-03 Macroblock, Inc. Single-stage isolated high power factor AC/DC converter with leakage inductor energy recovery function
US9407173B2 (en) 2011-01-31 2016-08-02 Man-Sun Yun Piezo actuator having an electrode structure for a torsional vibration mode, and rotation-type ultrasonic motor including same
CN104097113A (en) * 2014-06-24 2014-10-15 苏州大学 Single-stage driver positioning device and error compensation method

Also Published As

Publication number Publication date
TWI314386B (en) 2009-09-01

Similar Documents

Publication Publication Date Title
Barnes et al. Power electronic converters for switched reluctance drives
Mahmoud et al. Studying different types of power converters fed switched reluctance motor
TWI326154B (en) Switching power supply circuit
TW201027889A (en) Switching-mode power supply
TWI301348B (en)
WO2013120363A1 (en) Inverter circuit and control method therefor
JP2013520148A (en) DC-DC converter circuit for high input-to-output voltage conversion
TW201106599A (en) Resonant converter having over current protection apparatus and controlling method thereof
WO2017049250A1 (en) Pwm scheme based on space vector modulation for three-phase rectifier converters
Wu et al. Interleaved phase-shift full-bridge converter with transformer winding series–parallel autoregulated (SPAR) current doubler rectifier
WO2015029273A1 (en) Single-phase inverter
TW200812213A (en) Single-stage driving circuit for linear piezoelectric ceramic motor
JP2010154714A (en) Power converter and vacuum cleaner using the same
US20140286059A1 (en) Sparse and ultra-sparse partial resonant converters
JP2006304383A (en) Power conversion equipment
JP2010154715A (en) Power converter and vacuum cleaner using the same
TWI225727B (en) 092113910
JPH10210757A (en) Zero current turn off type pwm inverter device
CN107078642B (en) Resonant DC-DC converter
Mukhopadhyay et al. Drive strategies for switched reluctance motor-A review
Huang et al. Application of piezoelectric-transformer-based resonant circuits for AC LED lighting-driven systems with frequency-tracking techniques
Ramkmar et al. Wind energy based asymmetrical half bridge flyback converter for BLDC motor
CN104601005A (en) Resonance offset frequency ozone generator power supply
JP6917142B2 (en) Gate bidirectional dual rail series resonant converter power supply
RU2356709C1 (en) Welding arc power supply

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees