200812197 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種利用線圈在磁場中相對運動，運 用磁通量變化而感應產生電流之電磁式微發電機。 【先前技術】 隨著半導體和微系統技術的進步，產品及元件的開發 逐漸走向小體積之研究，為了配合這些微小元件，負責供 應能源的設計也必須隨著微小化，而微機電技術係為前述 ⑩ 微小化開發中之重要技術。 移動通信系統係結合通信系統與微機電技術之優 點’而考量個人移動通信終端的產品體積日益減小，及要 求更長的待機和使用時間，因此需要小型化、微型化的高 功率能源。目前各式微能源包括電磁式、壓電式、熱感應、 燃料電池及電化學電池等，皆為微機電技術之開發重點。 微小發電機的技術目前屬於新興技術，如何將電磁式微發 電模組設計最佳化以搭配微機電製程技術達到最小體積、 最高發電量對微發電系統的開發相當重要。此技術將有助 於可攜式3C產品及微機械元件之發展與應用，並提昇產 業競爭力。 於微能源之開發上，電磁式微發電機為一可達到無污 染、微小化、不受時間及地點限制，且能從外在環境#中'辞 取能源隻發電機。電磁式微發電機係為法拉第定彳f之^ 用，即在一時變磁場中，當微線圈與磁石相對運動時，= 於穿過線圈之磁力線變化，而產生感應電動勢。 而在習知於電磁式微發電機的研究領域之中，Η” 年Shearwood及Yates研發以微機電製程製造一電磁式微 5 200812197 發電機，具有0.3μ\ν a _ , -電磁式發電機，等’ 2麵 2香港大學發表 構，線圈為15_；^動結構為使用雷射光加工之彈簧結 構對振動頻率以及線管線圈’經過，分析其彈簀結 率可達功㈣㈣’可得其發電機輸出功 省理工學院電壓可達2V;以及1998年美國麻 =f大輪“tr:前=電= 極硬磁及一層線圈所以發電量小。、 利用 此外，2003年日本東京大學發展的非電磁式(旋轉 =二質微發電機，其發電輸出功率為25μΨ，主要運用電 介質，料的特性來發電，且以微機電技術來製作轉子與靜 子。該非電磁式(旋轉）電介質微發電機雖採用多極設計、(四 極)之多極硬磁線圈但卻只有單層的設計，其發電量乃不及 傳統以磁生電原理發電量來的大。 而參考國内相關之電磁式發電機研究，中華民國專利 公告號第544002號係提出一種可裝設於自行車輪轴之發 電機’藉由自行車之車輪轉動來帶動該發電機其轉子迴 轉’以供應自行車使用者隨身攜帶電子設備之電池充電及 ^行車車燈所需電力；中華民國專利公告號第563961號係 提出一種可由人力驅動而發電之直流發電機，其包括有一 兔％機外殼、一發電部、一傳動部及一作動部，其中該發 電部係由複數個小型發電機組合而成，在其作動時係用手 或足部連續按壓作動；中華民國專利公告號第M286295號 係提出一種微水流發電機發電機構改良，在水流入流水通 6 200812197 件時，驅使内磁石轉動，利用無 因磁石固定框組將上磁石與磁環固定， 同步轉動進而達到發電效能者。 便传上磁石與磁私 :二;，對準精度不夠《===; 強度需加強，以增加輸出功率。㈣料磁貝之磁场 【發明内容】 本發明之目的在 電技術製造-微發電機電機’利用微機 Ϊ石相互運動’利用最小體積隻微發電機達到最大之ί電 本發明提供一種電磁微 複數組線圈區域.以及_ 電機’包括：-線圈’具有 前述線圈之線圈區域植有複數組磁極；其中’ 環狀共平面線圈樣2、、^ί後數組線圈區域依序排列成 列成一與前述線_同極;^=係將複數組磁極依序排 石之=明以結丄多層平面線圈與多極磁 化製作，有效減小荞二自平面微線圈與多極磁石係可平面 本發明體積’且提高發電量。 說明，惟需明瞭 或特徵，將依據後附圖式加以詳細 明而非在限制或縮^本=圖式及所舉之例，抵是做為說 【實施方式】 本發明係有關一 種電磁微發電機，該電磁微發電機係 200812197 在-均勻:ί =產==二線圈以-角速度 ===:出、於感“二勢 (—，S :「對於固定或 =法 動勢以路鍵結之磁通量的時變;=;」’其感應電 發電機包括： = 之結構圖’該電磁 以旋轉之方式形成—相對運動。1;、、’，： : = : 個線圈區域所絚合而成，：U忒線圈1係由複數 所細人而：成 亥磁石2係由複數個磁石磁極 Ι：；Ιΐ^ 其中’線圈1係為微發電機之靜子，且 圈區域繞法係以-單極⑼順時針繞、—臨極⑻逆時3 的規律依序排列成環狀共平面線圈樣式；而該磁石 微發電機之轉子，且制石2係將磁石磁極以—單極(Ν 朝上Em極⑻朝上的方式依序排列成一與線圈1相同極 數的環狀。如此的安排使得動子旋轉時，靜子感應生成電 >’IL的方向性與順其線圈繞行方向一致 爹考第二A圖係線圈！於旋轉運動時的暫態表示圖， 其中斜線部分為磁通量產生變化之區域；以及第二3圖係 線圈1於旋轉運動並經歷每_&N_S極的交換時，所得到 感應電壓之正弦波輸出波形圖，其中該感應電壓之週期為 了，以及感應電壓之頻率為户^/7。 … 本發明電磁發電機之磁石2係為多極平面，若該磁石 2具有尸極，則該磁石2具有P/2組的N-S極。而由於該 8 200812197 =出ί「 極的交換即可得到-完整的正弦 η „磁石2旋轉一圈即經過ρ/2次n_s極之交 =，所/2秒。因此可得感應電壓頻打與角速 度ω之關係： ω^αάΐ8)χ[Ε^ / = —~~ 2π 毛磁發電機之線圈依其幾何形狀可概分為螺線管線圈 (Sole^oij Coil)與平面線圈⑦丨姐魟c〇u)兩種。依照安培定 律’當流通線圈上的電流值固定時，磁場與線圈圈數成正 比關係，而感應電動勢的大小係與圈數多寡、磁能大小、 相對位移大小及改變頻率大小有關。 。由1平面線圈具有可批次化生產I且體積小等優勢； 產口口 〇口貝方面’有多樣化的線圈樣式、良好的結構特性、 可於彎曲表面、更小的導體電阻抗誤差、更廣泛的熱 阻抗選擇範圍、適合各數量需求的訂單與具環保性等優 勢；製程技術方面，可精確的製造錯綜複雜的線圈樣式， ⑩可極完善的將導線嵌入，最小^寬町達20 μιη，可用絞合 漆包線（Litz Wire)來當導線，且町隨意的選擇基底 (Substrate)材料，嵌入時不會損壞導線，所運用的繞線技術 $做出具許多交叉點的微小化線圈，因此繞線樣式多，線 ，與gap均小，故單位面積的繞線數多。若受到外來的衝 擊’、結構亦不易遭破壞，絞合漆包線適合高頻使用。適合 各式曲面上的建構，平面線圈極富彎曲性，故可在不失去 ^有$性下彎曲成合適的表面。減少縱長導線的電阻抗誤 ▲ 材料於生產化即受到级的控制。較廣泛的 “、、阻抗選擇性，範圍由105〇C〜200。(：町以需求選擇，適合 9 200812197 大量或小量生產，且無須化學藥品的浪費。 本發明電磁微發電機係以微機電技術發展多平面且多 極線圈，並達到小尺寸但有密集之圈數，致使提高發電量。 而平面微線圈的製作方法包括：繞線技術（Filament Winding)、低溫陶兗共燒技術(Low Temperature Cofired Ceramic，LTCC)或微機電系統（Microelectromechanical Systems，MEMS)製程技術等。200812197 IX. Description of the Invention: [Technical Field] The present invention relates to an electromagnetic micro-generator that utilizes a coil to move relative to a magnetic field and utilizes a change in magnetic flux to induce a current. [Prior Art] With the advancement of semiconductor and micro-system technology, the development of products and components is gradually moving toward small-volume research. In order to match these tiny components, the design responsible for supplying energy must also be miniaturized, and the MEMS technology is The above 10 important technologies in miniaturization development. The mobile communication system combines the advantages of the communication system and the MEMS technology, and the product size of the personal mobile communication terminal is decreasing, and the standby and the use time are required. Therefore, a miniaturized and miniaturized high-power energy source is required. At present, various types of micro-energy include electromagnetic, piezoelectric, thermal induction, fuel cells and electrochemical cells, all of which are the focus of development of MEMS technology. The technology of micro-generators is currently an emerging technology. How to optimize the design of electromagnetic micro-energy modules to match the micro-electromechanical process technology to achieve the minimum volume and maximum power generation is very important for the development of micro-generation systems. This technology will help the development and application of portable 3C products and micromechanical components, and enhance the competitiveness of the industry. In the development of micro-energy, the electromagnetic micro-generator can achieve non-pollution, miniaturization, no time and place restrictions, and can resign energy from the external environment # generator only. The electromagnetic micro-generator is used for the Faraday ,f, that is, in a time-varying magnetic field, when the micro-coil and the magnet move relative to each other, the magnetic field line passing through the coil changes to generate an induced electromotive force. In the field of research on electromagnetic micro-generators, Shearwood and Yates have developed a micro-electromechanical process to manufacture an electromagnetic micro-5 200812197 generator with 0.3μ\ν a _ , - electromagnetic generator, etc. '2 face 2 Hong Kong University published, the coil is 15_; ^ moving structure for the use of laser processing spring structure on the vibration frequency and the coil coil 'pass, analysis of its magazine junction rate can reach the work (four) (four) 'available generator The output of the Institute of Technology is up to 2V; and in 1998 the United States hemp = f big wheel "tr: front = electricity = extremely hard magnetic and a layer of coils so the power generation is small. In addition, in 2003, the non-electromagnetic (rotary=secondary micro-generator developed by the University of Tokyo, Japan, whose power output is 25μΨ, mainly uses dielectric and material characteristics to generate electricity, and uses micro-electromechanical technology to make rotors and stators. The non-electromagnetic (rotary) dielectric micro-generator uses a multi-pole design, (four-pole) multi-pole hard magnetic coil, but only a single-layer design, its power generation is not as large as the traditional magnetic generation principle Referring to the domestic related electromagnetic generator research, the Republic of China Patent No. 544002 proposes a generator that can be mounted on a bicycle axle "by rotating the wheel of the bicycle to drive the rotor of the generator to rotate" To provide battery power for the bicycle user to carry the electronic device and to charge the power required for driving the vehicle lamp; the Republic of China Patent No. 563961 proposes a DC generator that can be powered by human power and includes a rabbit% machine casing, a power generation unit, a transmission unit and an actuation unit, wherein the power generation unit is composed of a plurality of small generators, and is actuated At the same time, the hand or foot is continuously pressed; the Republic of China Patent No. M286295 proposes a micro-flow generator power generation mechanism to improve the rotation of the inner magnet when the water flows into the water flow 6 200812197, and fix it with a non-magnetic magnet. The frame group fixes the upper magnet and the magnetic ring, and synchronously rotates to achieve the power generation efficiency. The magnet and the magnetic private are transmitted: 2; the alignment accuracy is not enough "===; the strength needs to be strengthened to increase the output power. (4) Material magnetic The magnetic field of the invention [invention] The object of the invention is to manufacture an electromagnetism-micro-generator motor 'utilizes the mutual movement of the vermiculite' with the smallest volume and only the micro-generator to achieve the maximum electricity. The invention provides an electromagnetic micro-integrated coil region And _ motor 'including: - coil' has a coil array of the aforementioned coils with a complex array of magnetic poles; wherein 'the annular coplanar coils 2, ^ ί after the array coil regions are arranged in a row to form a line with the aforementioned Extremely; ^= is to make the complex array magnetic poles in sequence. = Ming is made of multi-layer planar coil and multi-pole magnetization, which effectively reduces the self-plane micro-coil and multi-pole magnetic It is possible to plan the volume of the present invention and to increase the amount of power generated. It should be understood that the details or features will be described in detail in the following figures instead of limiting or reducing the drawings and examples. [Embodiment] The present invention relates to an electromagnetic micro-generator, the electromagnetic micro-generator system 200812197 in - uniform: ί = production == two coils - angular velocity ===: out, in the sense of "two potentials (-, S : "Time-varying of the magnetic flux bound by the fixed or = normal momentum; =;" 'The induction electric generator includes: = the structure diagram 'The electromagnetic is formed by rotation - relative motion. 1; , ', : : = : The coil areas are combined: U 忒 coil 1 is composed of a plurality of fine people: Cheng Hai magnet 2 is composed of a plurality of magnets Ι:; Ιΐ ^ where 'coil 1 is The stator of the micro-generator, and the circle region is arranged in a ring-like coplanar coil pattern in a clockwise manner with a monopole (9) clockwise and a reverse polarity (3); and the rotor of the magnet micro-generator, And the stone 2 series arranges the magnet poles in a sequence of one-pole (Ν upwards Em pole (8) upwards) An annular ring of the same number of poles. Such an arrangement allows the stator to generate electricity >' directionality of the rotor in the direction of the winding direction of the coil when the mover rotates. Refer to the second A-picture coil! A transient representation of the rotational motion, wherein the oblique portion is the region where the magnetic flux changes; and the second 3 is the sine wave of the induced voltage when the coil 1 is rotated and undergoes an exchange of each _&N_S pole The output waveform diagram, wherein the period of the induced voltage is, and the frequency of the induced voltage is the household ^/7. The magnet 2 of the electromagnetic generator of the present invention is a multi-pole plane. If the magnet 2 has a cadaver, the magnet 2 has a P/2 group of N-S poles. And because the 8 200812197 = out ί "polar exchange can be obtained - complete sine η „ magnet 2 rotates one turn, that is, ρ/2 times n_s pole intersection =, /2 seconds. Therefore, the relationship between the induced voltage frequency and the angular velocity ω can be obtained: ω^αάΐ8)χ[Ε^ / = —~~ 2π The coil of the magnetic generator can be roughly divided into a solenoid coil according to its geometry (Sole^oij Coil ) and the plane coil 7 丨 sister 魟 c〇u) two. According to Ampere's law, when the current value on the circulating coil is fixed, the magnetic field is proportional to the number of coil turns, and the magnitude of the induced electromotive force is related to the number of turns, the magnitude of magnetic energy, the magnitude of relative displacement, and the frequency of change. . The 1-plane coil has the advantages of batch production I and small volume; the mouth-and-mouth mouth has a variety of coil patterns, good structural characteristics, bendable surface, smaller conductor electrical impedance error, A wider range of thermal impedance options, orders for environmental protection and environmental benefits; process technology can accurately create intricate coil patterns, 10 can be fully embedded in the wire, the smallest ^ wide machi up to 20 μιη Litz Wire can be used as the wire, and the substrate material can be selected at will, and the wire will not be damaged when embedded. The winding technology used can make a micro coil with many intersections, thus winding There are many line styles, lines, and gaps are small, so the number of windings per unit area is large. If the external impact is imposed and the structure is not easily damaged, the stranded enameled wire is suitable for high frequency use. Suitable for construction on various curved surfaces, the planar coil is extremely flexible, so it can be bent into a suitable surface without losing it. Reducing the electrical impedance of vertical conductors ▲ The material is controlled by the stage during production. A wide range of ", impedance selectivity, ranging from 105 〇 C to 200. (: Town selected by demand, suitable for 9 200812197 large or small production, and no waste of chemicals. The electromagnetic micro-generator of the present invention is micro Electromechanical technology develops multi-planar and multi-pole coils, and achieves small size but dense number of turns, resulting in increased power generation. The manufacturing methods of planar micro-coils include: Filament Winding, low-temperature ceramic co-firing technology ( Low Temperature Cofired Ceramic (LTCC) or Microelectromechanical Systems (MEMS) process technology.
繞線技術為以電腦輔助設計之方式，藉由電腦辅助繪 圖軟體(AutoCAD)直接畫出所設計的圖樣。參考第三圖為 使用繞線技術所設計之線圈示意圖，使用者可依預先設定 之線圈整體之外直徑（Maximum Overall Dimensions)、線圈 整體之内直徑(Minimum Overall Dimensions)與線圈導體直 徑(Conductor Diameter)等數據資料設計一可在基材上嵌入 線圈導體以精確製作出錯綜複雜且精細的線圈圖案。~ 參考第四圖為使用不同繞線技術之結構圖，平面線圈 於使用繞線技術時可依外層薄膜不同而區分為雙層膜 41、單層膜42及無膜43等三種結構方式。其中外^ ^胰 層（ThinnestFihn)401之材料係可為pET、pps或π 絕 緣層（Insulation Layer)402之材料係可為塑膠合成樹脂’七 及導體層（Conductor Layer)403之材料係可為銅等^電= 屬，如此使線圈導體表面可具有保護作用。 〜至 由於線圈設計時必須考，獅呢电矹的万向一致 而多極磁石相鄰兩極為N-S極互換，產生减鹿的、、☆ 乃反相。因此，相鄰兩單極線圈必須順時針與反^針^ 向繞線’以配合電磁感應所產生的感應電产方白 應電流方向相同。參考第五圖為使用繞線技術 的摺受線圈不意圖，其中，’’順”表示該線圈區域係為^ 200812197 =單：中右表不該線圈區域係為逆時針方向。由於平 圈：層：有八極’可以折疊方式產生多層線 於同層線圈中相鄰兩單極線圈乃以順時針斑 =2 ’又單層線圈中槐數必須為偶數極，故 應的繞線圈方向乃相同，故多極多層線圈 產生的感應電流方向可—致。 w夕增關 可將被動元件内埋、低膨脹係數(tce)、低；j 係數么差、内埋導體其導電性質佳、易掣 士 ==層與層間整合内埋被動元‘、“共=供 低、、1^2 及利錄量加^低縣等優點。而 低酿陶寬共燒技術的製程流程係為： d)_安裝框架(Fmme Setter):解捲陶瓷捲，切割成適 石尺寸’標s己Via註冊點架於固定框架上。 (2) 通孔(Via Punching):使用 yag Laser 或微孔鑽 進行Via hole通孔。 (3) 填充(Via Filling):以銀膏等材料填充via hole。 (4) 電路印刷(pattern printing):對準系統下進行印刷 電路。 (5) 移除框架(Metal Frame Removing):製作堆疊陶磁 層用對位孔，移除固定框架。 (6) 堆疊（Stacking):抽真空靜置堆疊。 (7) 封裝（Sealing Packing):封包加壓。 (8) 製片（Laminating):高壓緊密堆疊。 (9) 共燒(Co-firing):進行特定溫度-時間曲線的共燒 過程。 (1 〇)表面印刷(Post Printing):表面印刷電路、打件。 11 200812197 (Π)測試(Testing) ··測試。 參考第六圖為本發明使用低溫陶瓷共燒技術製作微限 圈之不意圖。本發明係將每一層經設計圖樣之繞線型，透 過Via連接，成連貫一線之平面多層微線圈。由於設計線 圈時必須考慮感應生成電流方向的一致性，當磁石安排上 為相鄰兩極N-S極互換共八極，當線圈於單一極性上移動 時無法感生電流，而當線圈移動於一極性跨入另一極性時 始感生電流，故線圈設計上必須相對磁鐵級數亦八極，並 書且相鄰兩極繞線方向須相反。 因低溫陶瓷共燒技術是以PCB的方式將導線印刷於 陶磁層上，線路設計上必須不能有交連點，導致無法直接 將繞畢的一極線圈直接拉至下一極續繞，必須透過Via Hole的方式將線圈穿繞自下一層，使得線圈得以繞往下一 極，如此將使得在線圈製作層數上只能為偶數層。參考第 七圖為低溫陶瓷共燒技術中微線圈繞線方向與層數之關係 圖’其中線圈區域710及730所涵蓋之各層線圈皆為順時 針方向，而線圈區域720所涵蓋之各層線圈皆為逆時針方 ❿ 向。欲滿足線圈極極繞線方向相反，且線圈自最上層出發， 最終回歸該層是一連續通路，因此該線圈適當排列即可層 疊出更多層數’但限制上則仍是只允許偶數層。 而習知於平面多極磁石製作方式有燒結（Sinterec^鈥/ 鐵/硼（Nd/Fe/B)製程技術及低溫（350 °C以下）磁性共錄 (Co-Sputtering)技術等方法。本發明係利用燒結（Sintered) 鈥/鐵/硼(Nd/Fe/B)技術製作平面多極磁石。 參考第八圖為使用燒結鈦/鐵/硼技術以製作磁石之製 程流程圖，鈥/鐵/硼等原料經熔鍊、鑄錠、粉碎、真空超 12 200812197 細粉碎、異方性磁場配向、燒結及熱處理、切割研磨加工 與表面處理、著磁與磁性檢测等過程製作成一平面多極磁 石。 (1) 溶鍊(Melting):由於稀土元素活潑，容易氧化’ 熔鍊需要在真空下進行。可用真空感應爐或真空電 爐熔鍊。爐料可一次全部裝入，也可先將Fe、Co、 Cu、Zr和B/Fe熔清後再加入。若一次裝入全部爐 料，純金屬材料(Fe、Co、Cu、Zr)應裝在坩堝的周 圍和中部，而B/Fe應放在J#堝的中部。用純度大The winding technology is a computer-aided design that directly draws the designed pattern by computer-aided drawing software (AutoCAD). Referring to the third figure, a schematic diagram of a coil designed using a winding technique, the user can set a predetermined overall diameter of the coil (Maximum Overall Dimensions), the overall diameter of the coil (Minimum Overall Dimensions) and the diameter of the coil conductor (Conductor Diameter) The data is designed to embed the coil conductor on the substrate to accurately produce complex and fine coil patterns. ~ Refer to the fourth figure for the structure diagram using different winding techniques. When using the winding technology, the planar coil can be divided into three layers: the double film 41, the single film 42 and the filmless 43 according to the outer film. The material of the outer layer of the thin layer (ThinnestFihn) 401 may be a pET, pps or π insulating layer (Insulation Layer) 402. The material may be a plastic synthetic resin 'seven and a conductor layer (Conductor Layer) 403. Copper, etc. = genus, so that the surface of the coil conductor can have a protective effect. ~ To Because the coil design must be tested, the universal orientation of the lion's electric cymbal is the same, and the multi-pole magnet is adjacent to the two extreme N-S poles, which produces the deer, and ☆ is reversed. Therefore, the adjacent two monopole coils must be clockwise and reversely wound to the same direction as the induced current generated by the electromagnetic induction. Referring to the fifth figure, the winding coil is not intended to use the winding technique, wherein ''shun'' indicates that the coil area is ^200812197=single: the middle right table does not have the coil area counterclockwise. Layer: There are eight poles that can be folded to produce a multi-layered line in the same layer of coils. Two adjacent monopole coils are clockwise = 2 ' and the number of turns in a single layer coil must be an even pole, so the direction of the coil should be The same, so the direction of the induced current generated by the multi-pole multi-layer coil can be made. The w-throwing can be buried in the passive component, low expansion coefficient (tce), low; j coefficient difference, the buried conductor has good conductivity, easy Gentleman == layer and layer integration buried passive element ', "total = low, 1 ^ 2 and profitable record plus low county." The process flow of the low-making ceramic co-firing technology is: d) _Fmme Setter: unwinding the ceramic roll and cutting it into a suitable size. (2) Via Punching: Use the yag Laser or micro-drill to make a Via hole. (3) Via Filling: Fill the via hole with a material such as silver paste. (4) Pattern printing: Print the circuit under the alignment system. (5) Metal Frame Removing: Make the alignment holes for the stacked ceramic layers and remove the fixed frame. (6) Stacking: vacuuming and standing. (7) Sealing: The package is pressurized. (8) Laminating: High-voltage close stacking. (9) Co-firing: A co-firing process with a specific temperature-time curve. (1 〇) Post Printing: Surface printed circuit and printed parts. 11 200812197 (Π) Testing (Testing) · · Testing. Referring to the sixth figure, the present invention is not intended to produce a micro-limit ring using a low-temperature ceramic co-firing technique. The present invention is a winding type of each layer designed through a Via, which is connected as a planar multi-layer micro-coil of a continuous line. Since the coil must be designed with the consistency of the induced current direction, when the magnet is arranged, the adjacent poles are interchanged with a total of eight poles. When the coil moves on a single polarity, the current cannot be induced, and when the coil moves over a polarity cross, When the other polarity is introduced, the current is induced, so the coil design must be eight poles relative to the magnet order, and the winding direction of the adjacent poles must be opposite. Because the low-temperature ceramic co-firing technology prints the wire on the ceramic layer in the form of PCB, the circuit design must not have a crossover point, which makes it impossible to directly pull the wound one-pole coil directly to the next pole, which must pass through Via. Hole's way of winding the coil from the next layer, so that the coil can be wound to the next pole, so that the number of layers in the coil can only be an even number of layers. Referring to the seventh figure, the relationship between the winding direction of the micro-coil and the number of layers in the low-temperature ceramic co-firing technology is shown in the figure where the coils covered by the coil regions 710 and 730 are clockwise, and the coils covered by the coil region 720 are It is counterclockwise. To satisfy the opposite direction of the coil pole winding, and the coil starts from the uppermost layer, the final return to the layer is a continuous path, so the coil can be arranged to stack more layers ', but the limit is still only allow even layers. The conventional methods for producing planar multi-pole magnets include sintering (Sinterec^鈥/iron/boron (Nd/Fe/B) process technology and low temperature (350 °C or less) magnetic co-recording (Co-Sputtering) technology. The invention uses a sintered (Sintered) 鈥/iron/boron (Nd/Fe/B) technique to fabricate a planar multi-pole magnet. Refer to the eighth figure for a process flow diagram for making a magnet using sintered titanium/iron/boron technology, 鈥/iron / Boron and other raw materials are melted, ingot, pulverized, vacuum super 12 200812197 fine pulverization, anisotropic magnetic field alignment, sintering and heat treatment, cutting and grinding processing and surface treatment, magnetic and magnetic detection, etc. Magnet (1) Melting: Due to the active nature of rare earth elements, it is easy to oxidize. 'The melting chain needs to be carried out under vacuum. It can be melted in a vacuum induction furnace or a vacuum electric furnace. The charge can be completely loaded at one time, or Fe, Co, Cu, Zr and B/Fe are added after melting. If all the charge is charged at one time, pure metal materials (Fe, Co, Cu, Zr) should be placed around the middle and middle of the crucible, and B/Fe should be placed. The middle of J#埚. With high purity
• 於95%的Al2〇3做坩堝。裝料後先抽真空至133J χΗΓ4〜l(T5Pa(l(r4〜ΗΓ5毫米汞柱高）。如真空度達不 到要求，可用氬氣洗爐兩次，以便把殘餘的氧氣趨 出。達到所要求的真空度後，開始送電，先用小功 率預熱，以便讓原材料吸附的水份或其他氣體排 除。預熱一定時間後，充入399.3〜533.2 X 102Pa(300〜400毫米汞柱）的氬氣。接著進行大功率 熔化。 (2) 鑄錠(1叩的。33如名）：熔清後靜定一定時間，鑄錠 φ 溫度一般不超過熔點的200 ^(:。Nd/Fe/B合金的您 點隨成分而變化。例如NdnFe^B7合金的熔點約 Π70 °C。Nd的含量越高，合金的熔點就越低。 SmC〇5的熔點約1350 °C。用冷水銅模鑄錠，以便使 合金液迅速凝固，以防止偏析，造成大面積的成分 不均勻。若緩慢的冷卻，有可能首先從合金液中: 晶出a-Fe(樹枝狀）’而快速冷卻就可能抑制a_pe的 詰晶體。 、 (3) 粉碎(Crushing):目的是將大塊的鋼錠，破碎成— 13 200812197 定尺寸的粉末體。包括粗破碎與磨粉兩個過程。 Nd/Fe/B合金的熱穩定性較差：粉末狀的 Nd/Fe/B，若在空氣中加熱，當加熱至29〇°C時， Nd已開始氧化；當加熱到400 〇c後，Nd2Fel4B已 被破壞。若是大塊的Nd/Fe/B力口熱至290 °c時， Nd未氧化。可在700 〇c經受短時間的熱。故大塊 Nd/Fe/B樣品比粉末狀對熱要穩定得多。亦即塊狀 樣品被破壞成小塊或細小的粉末時，其熱穩定性會 下降。所以在破碎過程應有保護介質，以防止氧 ⑩ 化。破碎時所用的介質可以是汽油、曱苯、石油_ 等，或其他有機液體或惰性氣體，如氮、氬氣等。 (4) 真空超細粉碎(Jet Mill):磨粉的目的是將粒顆粒 的合金進一步研磨到適合尺寸。所謂適合的尺寸有 三個涵意：⑻尺寸大小，SmC〇5合金要求研磨至 5〜10 μιη，Nd/Fe/B永磁體要求磨至3〜5 μιη。使每 一個顆粒都是單晶體；（b)粉末尺寸要均勻一致；以 及(c)粉末顆粒接近球形，表面光滑，缺陷少。而磨 私的方法有：（a)振動球磨；（b)滾動球磨；以及（e) _ 氣流磨。振動與滚動球磨都是利用振動或滾動的球 體(如軸承鋼球)與粉末體碰擊而使合金粉末進一步 細化。振動球磨一般只有撞擊，而滾動球磨除了撞 擊外，還有滾動，對塑性較好的合金材料，合金粉 主球形或偏球狀。而氣流磨為最佳的磨粉方式，氣 机磨是高速氣流的振動下，使粉末與容器内壁發生 滾動是撞擊。而進一步細化。氣流磨效率高，顆粒 呈球狀，表面光滑且缺陷少。 (5) 異方性磁場配向（Anisotropic Magnetic Field 200812197• Do 95% of Al2〇3. After charging, first evacuate to 133J χΗΓ4~l (T5Pa (l(r4~ΗΓ5mmHg height). If the vacuum is not enough, you can wash the furnace twice with argon to get the residual oxygen out. After the required degree of vacuum, start to send electricity, first preheat with a small power, in order to allow the water or other gases adsorbed by the raw materials to be removed. After preheating for a certain period of time, charge 399.3~533.2 X 102Pa (300~400 mmHg) Argon gas. Then carry out high-power melting. (2) Ingot (1叩. 33): After melting for a certain period of time, the temperature of the ingot φ generally does not exceed the melting point of 200 ^ (: Nd / Fe The point of /B alloy varies with the composition. For example, the melting point of NdnFe^B7 alloy is about °70 °C. The higher the content of Nd, the lower the melting point of the alloy. The melting point of SmC〇5 is about 1350 °C. Ingots are cast in order to quickly solidify the alloy solution to prevent segregation and cause uneven distribution of large areas. If it is slowly cooled, it is possible to first crystallize a-Fe (dendritic) from the alloy liquid and cool it quickly. Suppressing a pe 诘 crystals, (3) Crushing: the purpose is to make large pieces of steel ingots Broken into - 13 200812197 Size of powder body. Includes two processes of coarse crushing and milling. Nd/Fe/B alloy has poor thermal stability: powdered Nd/Fe/B, if heated in air, when heated At 29 °C, Nd has started to oxidize; when heated to 400 〇c, Nd2Fel4B has been destroyed. If the bulk Nd/Fe/B is heated to 290 °c, Nd is not oxidized. 〇c is subjected to a short period of heat. Therefore, the bulk Nd/Fe/B sample is much more stable to heat than the powder. That is, when the bulk sample is broken into small pieces or fine powder, its thermal stability is lowered. Therefore, there should be a protective medium in the crushing process to prevent oxygen 10. The medium used for crushing may be gasoline, toluene, petroleum, etc., or other organic liquids or inert gases such as nitrogen, argon, etc. (4) Vacuum Jet Mill: The purpose of milling is to further grind the alloy of granules to a suitable size. The so-called suitable size has three meanings: (8) size, SmC 〇5 alloy requires grinding to 5~10 μηη, Nd The /Fe/B permanent magnet is required to be ground to 3~5 μm, so that each particle is a single crystal; (b) the powder size should be uniform; and (c) the powder particles are nearly spherical, with a smooth surface and few defects. The methods of grinding are: (a) vibratory ball milling; (b) rolling ball milling; and (e) _ jet milling Both vibrating and rolling ball mills use a vibrating or rolling ball (such as a bearing steel ball) to strike the powder to further refine the alloy powder. Vibratory ball milling generally only has an impact, and the rolling ball mill has rolling in addition to the impact. For alloy materials with better plasticity, the alloy powder is mainly spherical or globular. The airflow mill is the best grinding method. The air mill is the vibration of the high-speed airflow, which causes the powder to collide with the inner wall of the container. And further refinement. The jet mill has high efficiency, the particles are spherical, the surface is smooth and the defects are few. (5) Anisotropic magnetic field alignment (Anisotropic Magnetic Field 200812197
Oriention Direction) ·· SmC〇5 和 2 : 17 型 SmC〇 合Oriention Direction) ··SmC〇5 and 2: 17 type SmC combination
金都屬於六角晶系，其c軸是易磁化轴，a軸是難 f化軸。Nd/Fe/B系合金的主相是四角 ，其c軸亦是易磁化轴，a軸亦是難磁化軸。 悉單軸晶體’當沿單晶體的易軸磁化時，有最大的 ^礙屯从，如果磁化與單晶體的易磁化軸成一 f 0角時，則剩磁為从e〇s6)，可見0越小， 就越大。對於由許多單晶體粉末組成的燒結磁 的，如果使母一個粉末顆粒的易磁化方向都沿相同 ^方向取向，則沿該方向的剩磁就達到最大值。參 :弟九A圖及第九B圖為粉末磁場取向方法之示意 曰，粉末磁場取向方法有兩種：一種是垂直取向， 種是平行取向。當磁場方向與加壓力的方向相 ^直時，叫垂直取向，如第九八圖所示；當磁場方 ^與加壓力的方向相平行時，叫平行取向，如第九 取圖所示。一般來說，垂直取向有利於獲得較高的 〜向因子。在平行取向的情況下，當壓力增加到一Gold is a hexagonal crystal system, its c-axis is an easy magnetization axis, and the a-axis is a difficult axis. The main phase of the Nd/Fe/B alloy is four corners, the c-axis is also the easy magnetization axis, and the a-axis is also the hard magnetization axis. It is known that when the uniaxial crystal is magnetized along the easy axis of a single crystal, there is a maximum 屯 屯. If the magnetization is at a f 0 angle with the easy magnetization axis of the single crystal, the remanence is from e 〇 s6), and the smaller the visible 0 is. , the bigger it is. For sintered magnetism composed of a plurality of single crystal powders, if the easy magnetization direction of one of the mother powder particles is oriented in the same ^ direction, the remanence in this direction reaches a maximum value. Reference: The brothers N and A and the ninth B are schematic diagrams of the powder magnetic field orientation method. There are two methods for powder magnetic field orientation: one is vertical orientation and the other is parallel orientation. When the direction of the magnetic field is perpendicular to the direction of the applied pressure, it is called vertical orientation, as shown in Figure IX; when the magnetic field is parallel to the direction of the applied pressure, it is called parallel orientation, as shown in the ninth. In general, vertical orientation is advantageous for obtaining a higher ~-factor. In the case of parallel orientation, when the pressure is increased to one
^程度時，即可使取向因子稍有下降，反而使B p条低。 汽壓(Press):粉末的壓型方向有五種：（a)平行鋼模 ^ L(b)垂直鋼模壓；（c)橡皮模壓；⑷平行鋼模壓+ 平，壓；以及(e)垂直鋼模壓+等靜壓。垂直模壓比 ^行模壓粉末的取向效果好。採用垂直模壓+等靜 ^比單獨模壓的取向效果更好。在等靜壓過程令， (7)髮=大小對磁體的密度也有重要的影響。 &結及熱處理（Sintering and Heat Treatment):壓 $疋_多粉末顆粒的機械堆積體，它的相對密度有 15 200812197 60〜70%。其中内部的空隙很大，強度低。事實證明 粉末結體的磁性能彳艮低。燒結過程可分為三個階 段·⑻固〉谷階段；（b)溶解脫溶階段；以及⑷重排 階段。經過燒結後，磁體的相對密度可增加到 94〜98%。燒結時，由於原子的擴散，使不同的粉末 顆粒彼此熔合在一起，而形成一個整體。燒結後的 磁體不僅僅使密度增加，它的機械強度，磁性能如 剩磁承和矯頑力私、磁能積⑺句等，都大大提高。 實現磁體的致密化是燒結階段的極為重要的目 • 的，燒結體的密度對燒結溫度十分敏感，隨著燒結 溫度的提咼’磁體的密度亦增加。Smc〇5的燒結溫 度較窄，而Nd/Fe/B永磁合金在很寬的溫度範圍内 燒結都可獲得較好的磁性能。磁性體燒結後的熱處 理對不同的合金有不同的作法。如果合金的基體是 單相的，在熱處理過程中並沒有相變發生，只是改 變晶界狀態，如在SmCo5和Nd15Fe77B8磁體中，一 般把燒結後熱處理稱為後燒結處理，或叫回火。如 果基體相不是單相，而熱處理過程中有相變發生， ⑩ 則把燒結後的熱處理稱為時效處理，如在Sm(Co,When the degree is ^, the orientation factor is slightly decreased, and the B p strip is made low. Press: There are five types of powders: (a) parallel steel molds ^ L (b) vertical steel molding; (c) rubber molding; (4) parallel steel molding + flat, pressure; and (e) vertical Steel molding + isostatic pressing. The vertical molding ratio is better than the orientation of the molded powder. Vertical molding + isostatic is better than single molding. In the isostatic pressing process, (7) hair = size also has an important effect on the density of the magnet. & Sintering and Heat Treatment: A mechanical deposit of $疋_ multi-powder particles with a relative density of 15 200812197 60 to 70%. The internal space is large and the strength is low. It turns out that the magnetic properties of powder compacts are low. The sintering process can be divided into three stages, (8) solid and valley stages; (b) dissolution and desolvation stage; and (4) rearrangement stage. After sintering, the relative density of the magnet can be increased to 94 to 98%. During sintering, different powder particles are fused together to form a whole due to the diffusion of atoms. The sintered magnet not only increases the density, but also its mechanical strength, magnetic properties such as residual magnetic force and coercive force, and magnetic energy product (7) sentence. Achieving densification of the magnet is an extremely important object in the sintering stage. The density of the sintered body is very sensitive to the sintering temperature, and the density of the magnet increases with the sintering temperature. The sintering temperature of Smc〇5 is narrow, and the Nd/Fe/B permanent magnet alloy can obtain better magnetic properties when sintered in a wide temperature range. The heat treatment after sintering of the magnetic body has different practices for different alloys. If the matrix of the alloy is single-phase, no phase change occurs during the heat treatment, but the grain boundary state is changed. For example, in the SmCo5 and Nd15Fe77B8 magnets, the post-sintering heat treatment is generally referred to as post-sintering treatment, or tempering. If the matrix phase is not a single phase and a phase change occurs during the heat treatment, 10 the heat treatment after sintering is called aging treatment, as in Sm (Co,
Cu，Fe，Zr)7.4合金中則是如此。熱處理可有效的提 高合金的磁性能。 ⑻切割研磨與表面處理（Cutting，Grinding and Surface Treatment):燒結後則進行表面處理過程， 如研磨使表面出粗韆度小；並可進行切割以得所需 的磁石形狀以便著磁。 (9)著磁(Yoke) ··著磁設備可分為端面多極、外周多 極與内周多極充磁頭。參考第十A圖係為端面多極 16 200812197 之著磁結構圖；第十B圖係為外周多極之著磁結構 圖，以及第十C圖係為内周多極之著磁結構圖。 本發明使用鈒/鐵/硼(Nd/Fe/B)作為燒結磁石的材料， 且具有以下之優點： (1) 擁有商用市場最高磁能積，目前可達45 MG〇e 以上。 (2) 燒結磁石7.4g/cm3之低密度，適合輕薄短小化。 (3) 極佳機械強度、抗彎強度與抗拉強度均為釤鈷磁 石的二倍。 (4) 稀土鈥元素地球含量極多，無缺貨之虞。 纟不上所述’使用前述製造方法之本發明電磁微發電機 配，目前大力發展的二次電池及微燃料電池使用，可以增 力:能源的使用效率及延長電池的使用壽命，以減少地球丄 貝=的消耗與污染的產生，達到有效應用地球有限資源的 願景。且可被廣泛的應用於如汽機車輪軸、腳踏車輪軸、 订動通訊（手機等）、玩具(鑰匙圈等）、無線滑鼠等方面。 在洋細說明本發明的較佳實施例之後，熟悉該項技術 人士可β疋的瞭解，在不脫離下遂申請專利範圍與精神下 進行各種變化與改變，且本發明亦不受限於說明書中所兴 實施例的實施方式。 牛 17 200812197 【圖式簡單說明】 第一圖為本發明電磁發電機之結構圖； 第二A圖係線圈1於旋轉運動時的暫態表示圖； 第二B圖係線圈1於旋轉運動時所得到感應電壓之正 弦波輸出波形圖； 第三圖為使用繞線技術所設計之線圈不意圖， 第四圖為使用不同繞線技術之線圈結構圖； 第五圖為使用繞線技術之平面線圈的摺疊線圈示意 圖； • 第六圖為本發明使用低溫陶瓷共燒技術製作微限圈 之示意圖； 第七圖為低溫陶瓷共燒技術中微線圈繞線方向與層 數之關係圖； 第八圖為使用燒結鈥/鐵/硼技術以製作磁石之製程流 程圖； 第九A圖為垂直取向之粉末磁場取向方法示意圖； 第九B圖為水平取向之粉末磁場取向方法示意圖； 第十A圖為端面多極之著磁結構圖； ⑩ 第十B圖為外周多極之著磁結構圖；以及 第十C圖為内周多極之著磁結構圖。 主要部份之代表符號： 1 —線圈 2—磁石 41…雙層膜結構 42—單層膜結構 43…無膜結構 18 200812197 401…薄膜層 402…絕緣層 403…導體層 710、720、730…線圈區域This is the case for Cu, Fe, Zr) 7.4 alloys. The heat treatment can effectively improve the magnetic properties of the alloy. (8) Cutting, Grinding and Surface Treatment: After sintering, a surface treatment process is performed, such as grinding to make the surface coarse and small; and cutting can be performed to obtain a desired magnet shape for magnetism. (9) Magnetic (Yoke) · Magnetic devices can be divided into end-face multi-pole, peripheral multi-pole and inner-week multi-pole magnetizing head. Referring to the tenth A diagram, the magnetic structure diagram of the end face multipole 16 200812197; the tenth B diagram is the magnetic structure diagram of the outer multipole, and the tenth C diagram is the magnetic structure diagram of the inner circumference multipole. The invention uses bismuth/iron/boron (Nd/Fe/B) as the material of the sintered magnet, and has the following advantages: (1) It has the highest magnetic energy product in the commercial market and is currently up to 45 MG〇e or more. (2) The low density of sintered magnet 7.4g/cm3 is suitable for light and thin. (3) Excellent mechanical strength, flexural strength and tensile strength are twice that of samarium cobalt magnet. (4) Rare earth lanthanum element has a lot of earth content, and there is no shortage of goods. The invention relates to the electromagnetic micro-generator of the present invention using the foregoing manufacturing method, and the currently developed secondary battery and micro fuel cell can be used to increase the efficiency of energy use and extend the service life of the battery to reduce the earth. The consumption of mussels and the generation of pollution have reached the vision of effectively applying the limited resources of the earth. And can be widely used in such as turbine wheel axles, pedal wheel axles, telecommunication (mobile phones, etc.), toys (key rings, etc.), wireless mouse and so on. Having described the preferred embodiments of the present invention, it will be understood by those skilled in the art that various changes and modifications can be made without departing from the scope and spirit of the invention, and the invention is not limited by the description. Embodiments of the embodiments of the present invention.牛17 200812197 [Simple diagram of the diagram] The first diagram is the structural diagram of the electromagnetic generator of the present invention; the second diagram is the transient representation of the coil 1 during the rotational motion; the second diagram B is the rotation of the coil 1 during the rotation The sine wave output waveform of the induced voltage is obtained; the third figure is not intended to use the winding technology, the fourth figure is the coil structure drawing using different winding technology; the fifth picture is the plane using the winding technology Schematic diagram of the folded coil of the coil; • The sixth figure is a schematic diagram of the micro-circle of the invention using the low-temperature ceramic co-firing technology; the seventh figure is the relationship between the winding direction of the micro-coil and the number of layers in the low-temperature ceramic co-firing technology; The figure shows a process flow chart for making a magnet using sintered bismuth/iron/boron technology; ninth A is a schematic diagram of a vertical orientation of a magnetic field orientation method; and ninth B is a schematic diagram of a horizontally oriented powder magnetic field orientation method; The magnetic structure diagram of the end face multipole; 10th Fig. 10B is the magnetic structure diagram of the outer multipole; and the tenth C diagram is the magnetic structure diagram of the inner circumference multipole. Representative symbols of the main part: 1 - coil 2 - magnet 41 ... double film structure 42 - single layer film structure 43 ... filmless structure 18 200812197 401... film layer 402... insulating layer 403... conductor layer 710, 720, 730... Coil area